Furnace door sealing mechanism of vacuum coating equipment

Abstract

The furnace door sealing mechanism of the vacuum coating equipment is reasonable in structural design, and the vacuum furnace door is designed on the lower side; and the capacity can be expanded only by lengthening the equipment, so that the limitation is less and the investment cost is low. When the furnace door ascends, the outer cavity can be compressed to form sealing with the atmosphere; the sealing among the metal boat, the flow equalizing plate and the air exhaust cavity is realized by pressing the inner cavity; the furnace chamber flange is butted and sealed with the furnace door special gas port; the exhaust cavity flange is butted and sealed with the special gas outlet flange; therefore, sealing between the inner cavity and the outer cavity is achieved. The motion of the three parts is achieved at the same time, during descending, the flow uniformizing plate and the air exhaust cavity can be separated from the metal boat to return to the original position, it is guaranteed that the metal boat is located in the middle position, and more linkage motion and vacuum sealing are achieved with little drive while boat ascending and descending are stable.

Description

Technical Field

[0001] The invention relates to a sealing mechanism for a furnace door of vacuum coating equipment, belonging to the technical field of vacuum coating equipment. Background Art

[0002] The furnace door is an important component of the vacuum coating equipment, which is used to isolate the internal and external environment of the equipment. Its sealing is one of the important indicators to measure its quality.

[0003] In the prior art, the overall compression and docking mechanism of the vacuum coating equipment is completed by a set of lifting mechanisms for the furnace door, which requires strict positioning of the debugging position. Otherwise, interference between the guide wheel and the guide wheel groove and misalignment of the exhaust port docking will occur, resulting in the inability to form an inner and outer cavity seal, increasing the difficulty of debugging. On the other hand, the furnace door of the vacuum coating equipment in the prior art is usually designed on the side. When it is necessary to expand production capacity, it is usually necessary to raise or widen the equipment, which is subject to many restrictions in the factory and has a high cost of transformation. Summary of the invention

[0004] The present invention provides a sealing mechanism for a furnace door of a vacuum coating equipment, the purpose of which is to overcome the above-mentioned deficiencies in the prior art, reduce the difficulty of debugging and facilitate modification while ensuring the sealing effect.

[0005] The technical solution of the present invention is: a vacuum coating equipment furnace door sealing mechanism, which includes a furnace chamber and a furnace door, wherein the furnace chamber is fixed on the frame, the furnace chamber is rectangular, the furnace chamber bottom opening is equipped with a furnace chamber flange and a furnace door, the furnace chamber top is provided with two pairs of flanges near the front and rear sides, each flange is installed with a heating device, the furnace door top surface is provided with a supporting beam, a metal boat is hung on the supporting beam, synchronous lifting modules are installed on both sides of the furnace door bottom, and the furnace door and the furnace chamber are surrounded by an outer cavity when closed. The furnace door is designed on the lower side, and the equipment only needs to be lengthened to expand the production capacity, which reduces restrictions and reduces investment costs.

[0006] Preferably, the two sides of the supporting crossbeam are connected to the flow equalizer plate and the exhaust cavity through a horizontal sliding mechanism and a reset spring mechanism, a guide wheel groove is installed on the outer side of the flow equalizer plate, and clamping rollers corresponding to the position of the guide wheel groove are arranged on both sides of the furnace cavity, and the guide wheel groove extends downward and outward from the upper inlet. When the furnace door is closed, the flow equalizer plate and the exhaust cavity form an inner cavity with a metal boat inside. During the rising process of the furnace door, the clamping roller is pressed into the guide wheel groove, driving the flow equalizer plate and the exhaust cavity to move toward the metal boat, and the inner cavity is formed by the clamping roller.

[0007] Preferably, a special gas outlet is provided on the outer side of a flange at the top of the furnace chamber, and an exhaust cavity flange corresponding to the bottom interface position of the special gas outlet is provided on the supporting crossbeam, and the exhaust cavity flange is communicated with the exhaust cavity, and when the furnace door is closed, the exhaust cavity flange is connected to the bottom interface of the special gas outlet, so that the exhaust passage is connected when the furnace door is closed.

[0008] Preferably, the exhaust cavity is connected to the interface on the top surface of the furnace door through a pipeline, and the interface corresponds to the position of the special gas inlet on the side of the furnace cavity. When the furnace door is closed, the interface on the top surface of the furnace door is connected to the special gas inlet, so that the air intake passage is connected when the furnace door is closed.

[0009] The advantages of the present invention are as follows: the structural design is reasonable, and the vacuum furnace door is designed on the lower side; to expand the production capacity, it is only necessary to lengthen the equipment, with few restrictions and low investment costs. When the furnace door rises, the outer cavity can be compressed to form a seal with the atmosphere; the inner cavity is compressed to achieve the seal between the metal boat, the flow plate, and the exhaust cavity; the furnace cavity flange and the special gas port of the furnace door are butt-sealed; the exhaust cavity flange and the special gas outlet flange are butt-sealed; thereby achieving the seal between the inner cavity and the outer cavity. The actions of the three parts are achieved at the same time. When descending, the flow plate and the exhaust cavity can be separated from the metal boat and returned to their original positions, and the metal boat is ensured to be in the middle position. While the boat is smoothly raised and lowered, more linkage actions and vacuum seals can be achieved with very little drive. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Figure 1 It is a structural schematic diagram of the furnace door sealing mechanism of the vacuum coating equipment of the present invention in the open door state.

[0011] Figure 2 It is a structural schematic diagram of the vacuum coating equipment furnace door sealing mechanism in the closed door state of the present invention.

[0012] In the figure, 1 is the furnace chamber, 2 is the pressing roller, 3 is the guide wheel groove, 4 is the flow equalizer, 5 is the metal boat, 6 is the furnace door, 7 is the exhaust chamber, 8 is the return spring mechanism, 9 is the heating device, 10 is the special gas outlet, 11 is the supporting beam, 12 is the special gas inlet, and 13 is the exhaust chamber flange. DETAILED DESCRIPTION

[0013] The present invention is further described in detail below with reference to examples and specific implementation modes.

[0014] like Figure 1 , 2As shown, a vacuum coating equipment furnace door sealing mechanism comprises a furnace chamber 1 and a furnace door 6, wherein the furnace chamber 1 is fixed on a frame, the furnace chamber 1 is rectangular, the bottom opening of the furnace chamber 1 is provided with a furnace chamber flange and a furnace door 6, two pairs of flanges are provided at the top of the furnace chamber 1 near the front and rear sides, each flange is provided with a heating device 9, a special gas outlet 10 is provided on the outer side of a flange at the top of the furnace chamber 1, a supporting beam 11 is provided on the top surface of the furnace door 6, a metal boat 5 is hung on the supporting beam 11, synchronous lifting modules (not shown) are installed on both sides of the bottom of the furnace door 6, and both sides of the supporting beam 11 are connected to the flow equalizer 4 and the exhaust chamber 7 through a horizontal sliding mechanism and a reset spring mechanism 8, and the flow equalizer 4 is connected to the exhaust chamber 7 through a horizontal sliding mechanism and a reset spring mechanism 8. A guide wheel groove 3 is installed on the outer side of 4, and pressing rollers 2 corresponding to the position of the guide wheel groove 3 are arranged on both sides of the furnace chamber 1. The guide wheel groove 3 extends downward from the upper inlet to the outside. The exhaust chamber 7 is connected to the interface on the top surface of the furnace door 6 through a pipeline, and the interface corresponds to the position of the special gas inlet 12 on the side of the furnace chamber 1. An exhaust chamber flange 13 corresponding to the position of the bottom interface of the special gas outlet 10 is arranged on the supporting crossbeam 11, and the exhaust chamber flange 13 is communicated with the exhaust chamber 7. When the furnace door 6 is closed, it forms an outer cavity with the furnace chamber 1, and the exhaust chamber flange 13 is connected to the bottom interface of the special gas outlet 10. The uniform flow plate 4 and the exhaust chamber 7 form an inner cavity with a metal boat 5 arranged inside, and the top interface of the furnace door 6 is connected to the special gas inlet 12.

[0015] According to the above structure, when working, During the rising process of the furnace door 6, the clamping roller 2 is pressed into the guide wheel groove 3, driving the uniform flow plate 4 and the exhaust chamber 7 to move toward the metal boat 5, and the inner chamber is formed by the clamping roller 2; the furnace door 6 rises and presses the furnace chamber flange to form an outer chamber, and at the same time, the furnace door 6 is connected with the special gas inlet 12 on the furnace chamber 1, and the special gas outlet 10 at the top of the furnace chamber 1 is just connected with the exhaust chamber flange 13, so that the process pipeline of the special gas inlet 12 outside the furnace chamber can be used to process the furnace inner chamber and discharge it from the special gas outlet 10.

[0016] During the process of the furnace door 6 descending, the furnace chamber flange and the furnace door 6 are first separated, and then after the special gas outlet 10 is separated from contact, the flow plate 4 and the exhaust chamber 7 move to both sides synchronously and separate from the metal boat 5 synchronously, ensuring that the metal boat 5 remains in the center of the furnace chamber. When the clamping roller 2 separates from the guide wheel groove 3, the flow plate 4 and the exhaust chamber 7 are respectively limited by two reset spring mechanisms 8 to prevent deviation, ensuring that the spring clamping roller and the guide wheel groove remain unchanged. Example

[0017] ALD vacuum coating equipment adopts this mechanism. 8 rows of metal boats are silicon wafer carriers. There are two process gases, A and B, and inert gas C. The gas flows from the special gas inlet on the side of the uniform flow plate toward the exhaust cavity and is exhausted from the special gas outlet. A and B enter the cavity from the side of the uniform flow plate alternately. Inert gas C enters the cavity at intervals between A and B gases and enters the cavity from the side of the uniform flow plate and the exhaust cavity at the same time. All gases are exhausted from the special gas outlet on the top of the cavity.

[0018] All the components mentioned above are prior art, and those skilled in the art can use any model and existing design that can achieve their corresponding functions.

[0019] The above is only a preferred embodiment of the present invention. It should be pointed out that a person skilled in the art can make several modifications and improvements without departing from the inventive concept of the present invention, which all belong to the protection scope of the present invention.

Claims

1. A vacuum coating equipment furnace door sealing mechanism, characterized in that: The invention comprises a furnace chamber (1) and a furnace door (6), wherein the furnace chamber (1) is fixed on a frame, the furnace chamber (1) is rectangular, the bottom opening of the furnace chamber (1) is provided with a furnace chamber flange and a furnace door (6), the top of the furnace chamber (1) is provided with two pairs of flanges near the front and rear sides, each flange is provided with a heating device (9), the top surface of the furnace door (6) is provided with a supporting crossbeam (11), a metal boat (5) is suspended on the supporting crossbeam (11), synchronous lifting modules are installed on both sides of the bottom of the furnace door (6), and when the furnace door (6) is closed, it and the furnace chamber (1) form an outer cavity.

2. A vacuum coating equipment furnace door sealing mechanism as claimed in claim 1, characterized in that: The supporting crossbeam (11) is connected to the flow plate (4) and the exhaust chamber (7) on both sides via a horizontal sliding mechanism and a return spring mechanism (8). A guide wheel groove (3) is installed on the outer side of the flow plate (4). Pressure rollers (2) corresponding to the positions of the guide wheel grooves (3) are provided on both sides of the furnace chamber (1). The guide wheel grooves (3) extend downwardly and outwardly from the upper inlet. When the furnace door (6) is closed, the flow plate (4) and the exhaust chamber (7) form an inner cavity with a metal boat (5) inside.

3. A vacuum coating equipment furnace door sealing mechanism as claimed in claim 2, characterized in that: A special gas outlet (10) is provided on the outer side of a flange at the top of the furnace chamber (1), and an exhaust chamber flange (13) corresponding to the bottom interface position of the special gas outlet (10) is provided on the supporting crossbeam (11). The exhaust chamber flange (13) is communicated with the exhaust chamber (7). When the furnace door (6) is closed, the exhaust chamber flange (13) is connected to the bottom interface of the special gas outlet (10).

4. A vacuum coating equipment furnace door sealing mechanism as claimed in claim 2, characterized in that: The exhaust chamber (7) is connected to an interface on the top surface of the furnace door (6) via a pipeline, and the interface corresponds to the position of a special gas inlet (12) on the side of the furnace chamber (1). When the furnace door (6) is closed, the interface on the top surface of the furnace door (6) is connected to the special gas inlet (12).

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