Furnace door control structure and coating equipment

Abstract

The furnace door control structure comprises a furnace door opening and closing assembly for controlling a furnace door to move relative to a furnace opening, so that the furnace opening is opened or closed; the furnace door opening and closing assembly is connected with the furnace door through a plurality of fine adjustment assemblies of the furnace door, each fine adjustment assembly comprises a rotating part connected with the furnace door and a positioning part connected with the furnace door opening and closing assembly, and the positioning parts and the rotating parts are controlled by adjusting parts to rotate relatively around a rotating shaft. And the angle of the furnace door can be adjusted in multiple directions relative to the furnace opening. The invention provides a furnace door control structure with multi-stage adjustment and accurate positioning functions to solve the problems that in existing PECVD equipment, fitting precision of a furnace door and a furnace opening is insufficient, sealing performance is poor, and heat is prone to leakage. According to the structure, the furnace door can open or close the furnace mouth through the furnace door opening and closing assembly, and the furnace door can be subjected to micron-order posture correction in a three-dimensional space by combining multi-dimensional angle adjustment of the fine adjustment assembly, so that the fitting precision of the furnace door and the edge of the furnace mouth is remarkably improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of door seal, in particular to a furnace door control structure and a coating equipment. BACKGROUND

[0002] The vacuum reaction chamber of a plasma enhanced chemical vapor deposition (PECVD) device in the field of solar cell manufacturing is the core place of the device process. The inlet and outlet of the vacuum reaction chamber is a channel for sending the carrier into the reaction chamber and taking it out after the process is completed.

[0003] The furnace door is a structure device for blocking the inlet and outlet of the vacuum reaction chamber, so as to isolate the inner cavity of the vacuum reaction chamber from the external environment. Before and during the process of the silicon wafer, the furnace door is in a closed state with the inlet and outlet of the vacuum reaction chamber.

[0004] However, the current furnace door of the vacuum reaction chamber is not accurately aligned and attached to the furnace port, resulting in excessive loss of heat in the vacuum reaction chamber. SUMMARY

[0005] To solve at least one of the above technical problems, on the one hand, the present application provides a furnace door control structure to improve the sealing performance of the furnace door structure on the furnace port and avoid the loss of heat in the furnace body from the furnace port.

[0006] On the other hand, the present application also provides a coating equipment with the furnace door control structure.

[0007] The technical solution adopted by the present application is to design a furnace door control structure, which includes a furnace door opening and closing assembly for controlling the movement of the furnace door relative to the furnace port, so that the furnace port is opened or closed. The furnace door opening and closing assembly is connected to the furnace door through a plurality of fine adjustment assemblies of the furnace door. The fine adjustment assembly includes a rotating member connected to the furnace door and a positioning member connected to the furnace door opening and closing assembly. The positioning member and the rotating member are controlled to rotate around the rotating shaft by the adjusting member, so as to adjust the angle of the furnace door relative to the furnace port in multiple directions.

[0008] In some embodiments, the fine adjustment assembly includes a first positioning mechanism, which includes a first positioning member, a first rotating member and a first adjusting member. The first positioning member and the first rotating member are connected by a first rotating shaft. The first positioning member is connected to the furnace door opening and closing assembly, the first rotating member is connected to the furnace door, and the first adjusting member controls the rotation angle of the first rotating member relative to the first positioning member.

[0009] In some embodiments, the fine adjustment assembly further includes a second positioning mechanism, which includes a second positioning member, a second rotating member and a second adjusting member. The second positioning member and the second rotating member are connected by a second rotating shaft. The first rotating shaft and the second rotating shaft are perpendicular to each other. The second rotating member is connected to the first positioning member, the second positioning member is connected to the furnace door opening and closing assembly, and the second adjusting member controls the rotation angle of the second rotating member relative to the second positioning member.

[0010] In some embodiments, the fine-tuning assembly further comprises a third positioning mechanism, the third positioning mechanism comprising a third positioning member, a third rotating member and a third adjusting member, the third positioning member and the third rotating member being rotatably connected through a third rotating shaft; the third rotating member being connected to the second positioning member, the third rotating shaft, the second rotating shaft and the first rotating shaft being perpendicular to each other; the third rotating member being connected to the second positioning member, the third positioning member being connected to the furnace door opening and closing assembly, and the third adjusting member controlling the rotation angle of the third rotating member relative to the third positioning member.

[0011] In some embodiments, the third positioning member is connected to the furnace door opening and closing assembly through a limiting fine-tuning mechanism, the limiting fine-tuning mechanism allowing the third positioning member to move closer to or further away from the furnace opening.

[0012] In some embodiments, the furnace door opening and closing assembly comprises a lifting mechanism, the lifting mechanism comprising a first guide rail arranged vertically and a lifting plate slidingly matched with the first guide rail, the lifting plate being controlled by a first driving member to lift along the first guide rail, and the lifting plate being connected to the fine-tuning assembly through a supporting arm.

[0013] In some embodiments, the furnace door opening and closing assembly further comprises a horizontal moving mechanism, the horizontal moving mechanism comprising a second guide rail arranged in a horizontal direction and a horizontal moving plate slidingly matched with the second guide rail, the horizontal moving plate being controlled by a second driving member to move horizontally along the second guide rail, and the first guide rail and the first driving member being arranged on the horizontal moving plate.

[0014] In some embodiments, the lifting plate is provided with a bolt extending and retracting towards the horizontal moving plate, the bolt being controlled by a third driving member to extend and retract, and the horizontal moving plate is provided with a hole corresponding to the bolt, the bolt being inserted into the hole to fix the lifting plate relative to the horizontal moving plate in the vertical direction.

[0015] In some embodiments, the horizontal moving plate is provided with a position detection sensor detecting the lifting position of the lifting plate, and when the position of the lifting plate is detected to correspond to the bolt and the hole, the third driving member drives the bolt to be inserted into the hole.

[0016] In some embodiments, the inner side plate surface opposite to the furnace opening of the furnace door faces upward, the inner side plate surface is provided with a collection disc corresponding to the furnace opening in the vertical direction, the inner side plate surface is provided with a blocking body surrounding the collection disc, the blocking body prevents the collection disc from moving along the inner side plate surface, and the collection disc is detachably arranged between the blocking bodies.

[0017] A coating equipment comprises a furnace door control structure and a furnace body, and the furnace body is provided with a furnace opening at one end.

[0018] Compared with the prior art, the present application has the following beneficial effects: The present application aims at the problems of insufficient fitting precision, poor sealing performance and easy heat leakage of the furnace door and the furnace mouth in the existing PECVD equipment, and provides a furnace door control structure with multi-stage adjustment and precise positioning function. BRIEF DESCRIPTION OF DRAWINGS

[0019] The present application will be described in detail below with specific examples and drawings, which are not necessarily drawn to scale, and similar reference numerals can be used to describe similar components in different views. The drawings generally show the embodiments discussed herein in an example and non-limiting manner. Among them: Figure 1 is a schematic view of the furnace door below the furnace door.

[0020] Figure 2 is a front schematic view of the furnace door control structure.

[0021] Figure 3 is Figure 2 is an enlarged schematic view of A in

[0022] Figure 4 is Figure 2 is a left view schematic view of

[0023] Figure 5 is Figure 4 is an enlarged schematic view of B in

[0024] Figure 6 is a schematic view of the fine adjustment assembly of the furnace door.

[0025] Figure 7 is a schematic view of the assembly of part of the fine adjustment assembly of the furnace door.

[0026] Figure 8 is a schematic view after the plug is inserted into the socket.

[0027] Figure 9 is a schematic view of the furnace door control structure.

[0028] In the diagram, 1. Furnace opening; 2. Furnace door; 11. First positioning component; 12. First rotating component; 13. First adjusting component; 14. First rotating shaft; 21. Second positioning component; 22. Second rotating component; 23. Second adjusting component; 24. Second rotating shaft; 31. Third positioning component; 32. Third rotating component; 33. Third adjusting component; 34. Third rotating shaft; 3. Fixing bolt; 4. Drive nut; 5. Adjusting side plate; 6. Lifting bolt; 7. First guide rail; 8. Lifting plate; 9. First driving component; 26. Second guide rail; 10. Horizontal sliding plate; 27. Displacement sensor; 15. Pin; 16. Third driving component; 17. Insertion hole; 18. Position detection sensor; 19. Collection tray; 20. Limiting post; 25. Support arm; 28. Second driving component. Detailed Implementation

[0029] The following are specific embodiments of the present invention, and the technical solution of the present invention will be further described in conjunction with the accompanying drawings. However, the present invention is not limited to these embodiments, and the following embodiments do not limit the invention covered by the claims. Furthermore, not all combinations of the features described in the embodiments are necessary for the inventive solution.

[0030] The principles and structure of the present invention will be described in detail below with reference to the accompanying drawings and embodiments.

[0031] Example like Figures 1 to 7 As shown, a furnace door control structure for a coating equipment is used to control the opening and closing of the furnace opening 1 of a vacuum reaction chamber. The furnace door control structure includes a furnace door opening and closing assembly that controls the movement of the furnace door relative to the furnace opening 1, thereby opening or closing the furnace opening 1. The furnace door opening and closing assembly is connected to the furnace door through multiple fine-tuning components of the furnace door. The fine-tuning components include a rotating component connected to the furnace door and a positioning component connected to the furnace door opening and closing assembly. The positioning component and the rotating component are controlled to rotate relative to each other around a rotating axis by an adjusting component, so that the furnace door can be adjusted in multiple directions relative to the furnace opening 1.

[0032] The furnace door opening and closing assembly is used to control the long-distance movement of the furnace door 2 relative to the furnace opening 1, controlling the furnace door 2 to move away from the front of the furnace opening 1 or to initially fasten onto the furnace opening 1. The furnace door fine-tuning assembly is used to fine-tune the angle of the furnace door 2 relative to the furnace opening 1, so that the edge of the furnace door 2 fits better and the sealing performance is improved.

[0033] The furnace door control structure realizes the movement and adjustment of the furnace mouth 1 relative to the furnace mouth 1 at different levels by setting the cooperation of the furnace door opening and closing assembly and the furnace door fine adjustment assembly. Specifically, the furnace door opening and closing assembly undertakes the large stroke movement function of the furnace door 2, and makes the furnace door 2 away from the furnace mouth 1 when the furnace mouth 1 is opened, so as to facilitate the entry and exit of the carrier and the silicon wafer; when the furnace mouth 1 is closed, the furnace door 2 is pushed to the front of the furnace mouth 1 and is preliminarily closed. Since the vacuum reaction chamber has very high sealing accuracy requirements, simply relying on the opening and closing assembly cannot guarantee the complete closing of the furnace door 2 and the edge of the furnace mouth 1, so the fine adjustment of the posture of the furnace door 2 is further realized through the furnace door fine adjustment assembly. The fine adjustment assembly can control the inclination angle of the furnace door 2 relative to the plane of the furnace mouth 1, so that the plate surface of the furnace door 2 can be angle compensated within a range, thereby correcting the alignment error caused by assembly deviation or thermal deformation. Through the structure, the furnace door 2 can be more closely closed with the edge of the furnace mouth 1, significantly improving the sealing performance of the furnace mouth 1, effectively preventing heat leakage from the interface during the process, maintaining a stable temperature environment in the vacuum reaction chamber, thereby improving the consistency and yield of the silicon wafer process, prolonging the service life of the equipment and reducing energy consumption.

[0034] It should be noted that the positioning member can include a first positioning member 11, and / or a second positioning member 21, and / or a third positioning member 31. The rotating member can include a first rotating member 12, and / or a second rotating member 22, and / or a third rotating member 32. The adjusting member can include a first adjusting member 13, and / or a second adjusting member 23, and / or a third adjusting member 33. The rotating shaft can include a first rotating shaft 14, and / or a second rotating shaft 24, and / or a third rotating shaft 34.

[0035] Further, the fine adjustment assembly includes a first positioning mechanism, the first positioning mechanism includes the first positioning member 11, the first rotating member 12 and the first adjusting member 13, the first positioning member 11 and the first rotating member 12 are rotationally connected through the first rotating shaft 14; the first positioning member 11 is connected with the furnace door opening and closing assembly, the first rotating member 12 is connected with the furnace door 2, and the first adjusting member 13 controls the rotation angle of the first rotating member 12 relative to the first positioning member 11.

[0036] The first positioning member 11 and the first rotating member 12 are both rectangular plate bodies, and the first adjusting member 13 includes two nuts, the two nuts are respectively fixed on two opposite side edges of the first positioning member 11 plate body, the nuts are matched with bolts, the two bolts respectively push the two opposite side edges of the first rotating member 12 plate body, and the rotation of the bolts relative to the nuts realizes the pushing of different side edges of the first positioning member 11 plate body, thereby controlling the rotation angle of the first rotating member 12 relative to the first positioning member 11.

[0037] The fine adjustment assembly is provided with a first positioning mechanism, so that the angle of the furnace door 2 relative to the furnace mouth 1 is accurately adjusted. Specifically, the first positioning piece 11 is fixedly connected with the furnace door opening and closing assembly, and is used to provide a stable mounting reference; the first rotating piece 12 is connected with the furnace door 2 and can rotate relative to the first positioning piece 11 about the first rotating shaft 14; the first adjusting piece 13 applies a control force to make the first rotating piece 12 rotate within a limited range, thereby causing a slight change in the posture of the furnace door 2. Through this structure, when the furnace door 2 is preliminarily closed under the action of the furnace door opening and closing assembly, the operator or the control system can adjust the first adjusting piece 13 to correct the angle of the furnace door 2 relative to the plane of the furnace mouth 1, thereby eliminating the alignment error caused by the machining or installation deviation. This scheme not only improves the fitting precision of the furnace door 2 and the mouth edge of the furnace mouth 1, significantly enhances the sealing performance, but also reduces the heat and gas leakage, ensures the stable temperature and atmosphere environment in the vacuum reaction chamber, and thus improves the reliability of the coating process and the product yield.

[0038] Further, the fine adjustment assembly further comprises a second positioning mechanism, the second positioning mechanism comprising a second positioning piece 21, a second rotating piece 22 and a second adjusting piece 23, the second positioning piece 21 and the second rotating piece 22 being rotationally connected through a second rotating shaft 24; the second positioning piece 21 is connected with the first rotating piece 12, the first rotating shaft 14 is perpendicular to the second rotating shaft 24, the first rotating piece 12 is connected with the second positioning piece 21, the second positioning piece 21 is connected with the furnace door opening and closing assembly, and the second adjusting piece 23 controls the rotation angle of the second rotating piece 22 relative to the second positioning piece 21.

[0039] The second positioning piece 21 and the second rotating piece 22 are both rectangular plate bodies, and the second adjusting piece 23 comprises two nuts, the two nuts being respectively fixed on two opposite sides of the plate body of the second positioning piece 21, the nuts being matched with bolts, the two bolts being respectively pushed against two opposite sides of the plate body of the second rotating piece 22, and the bolts being rotated relative to the nuts to push against different sides of the plate body of the second positioning piece 21, thereby controlling the rotation angle of the second rotating piece 22 relative to the second positioning piece 21.

[0040] The fine adjustment assembly is provided with a second positioning mechanism, so that the furnace door 2 can be finely adjusted in multiple degrees of freedom. Specifically, the second positioning member 21 is connected with the first rotating member 12 and is rotationally connected with the second rotating member 22 through a second rotating shaft 24, and the second rotating shaft 24 is arranged perpendicularly to the first rotating shaft 14, so that the furnace door 2 can be adjusted in two perpendicular rotating directions. The second adjusting member 23 is used to control the rotating angle of the second rotating member 22 relative to the second positioning member 21, so as to drive the furnace door 2 to perform angle compensation in another direction. Through the combination of the first positioning mechanism and the second positioning mechanism, the furnace door 2 can be independently finely adjusted in different degrees of freedom relative to the plane of the furnace port 1, so as to avoid the problem of poor fitting caused by insufficient adjustment in a single direction. The structure effectively improves the overall fitting precision of the furnace door 2 and the furnace port 1, further enhances the sealing performance, reduces the heat and gas leakage, so as to ensure the stable process environment in the vacuum reaction chamber and improve the yield of the coating process.

[0041] Further, the fine adjustment assembly further comprises a third positioning mechanism, the third positioning mechanism comprising a third positioning member 31, a third rotating member 32 and a third adjusting member 33, the third positioning member 31 and the third rotating member 32 being rotationally connected through a third rotating shaft 34; the third positioning member 31 is connected with the second rotating member 22, the third rotating shaft 34, the second rotating shaft 24 and the first rotating shaft 14 being perpendicular to each other, the third rotating member 32 being connected with the second positioning member 21, the third positioning member 31 being connected with the furnace door opening and closing assembly, and the third adjusting member 33 being used to control the rotating angle of the third rotating member 32 relative to the third positioning member 31.

[0042] The third positioning member 31 and the third rotating member 32 are both rectangular plate bodies, and the third adjusting member 33 comprises two nuts, the two nuts being respectively fixed on two opposite sides of the third positioning member 31, the nuts being matched with bolts, the two bolts being respectively arranged on two opposite sides of the third rotating member 32, and the bolts being rotationally adjusted relative to the nuts to push the third rotating member 32 on different sides of the third positioning member 31, so as to control the rotating angle of the third rotating member 32 relative to the third positioning member 31.

[0043] The fine adjustment assembly is provided with a third positioning mechanism, so that the furnace door 2 has full-range fine adjustment capability in three-dimensional space. Specifically, the third positioning member 31 is connected with the second rotating member 22, and is rotationally connected with the third rotating member 32 through a third rotating shaft 34, and the third rotating shaft 34 is arranged perpendicular to both the first rotating shaft 24 and the second rotating shaft 24, so that on the basis of the original two-degree-of-freedom adjustment, an angle correction in an independent direction is further added. The third adjusting member 33 is used for accurately controlling the rotation angle of the third rotating member 32 relative to the third positioning member 31, so that the furnace door 2 realizes posture compensation in the third direction. Through cooperation of the first, second and third positioning mechanisms, the furnace door 2 can be adjusted in angles in three mutually perpendicular directions, so that the complex deviation problems caused by equipment assembly errors, thermal deformation or long-term operation are solved. The scheme further ensures that the furnace door 2 is closely fitted with the furnace port 1 in multiple directions, greatly improves the sealing performance and stability, so that heat and gas leakage are effectively avoided, the temperature and atmosphere control in the vacuum reaction chamber are ensured, and the consistency and yield of the coating process are improved.

[0044] It should be noted that the shapes of the first positioning member 11, the first rotating member 12, the second positioning member 21, the second rotating member 22, the third positioning member 31 and the third rotating member 32 can be rectangular, rhombic, polygonal or the like, and the shapes can realize the functions of fixed connection and rotational adjustment. The number of the first adjusting member 13, the second adjusting member 23 and the third adjusting member 33 can be multiple, and the setting positions can be single-sided or multi-sided, which are not limited herein.

[0045] Further, the third positioning member 31 is connected with the furnace door opening and closing assembly through a limiting fine adjustment mechanism. The limiting fine adjustment mechanism makes the third positioning member 31 close to or away from the furnace port 1. The limiting fine adjustment mechanism includes a fixed bolt 3 and a driving nut 4 matched with the fixed bolt 3. The supporting arm 25 of the furnace door opening and closing assembly is provided with a through hole, and the driving nut 4 is located above the through hole. The fixed bolt 3 is fixedly connected with the third rotating member 32 through the through hole and the upper end of the driving nut 4. The fixed bolt 3 is lifted or lowered by rotating the driving nut 4, so as to control the fine adjustment of the third rotating member 32 in the upward and downward directions, and then the fine adjustment of the furnace door 2 relative to the furnace port 1 in the upward and downward directions, so that the furnace door 2 is better fitted and sealed. The lower end side of the third positioning member 31 is connected with an adjusting side plate 5. The supporting arm 25 of the furnace door opening and closing assembly is provided with two parallel lifting bolts 6. The supporting arm 25 of the furnace door opening and closing assembly is provided with screw holes matched with the lifting bolts 6 in screw threads. The upper ends of the two lifting bolts 6 support the lower surface of the adjusting side plate 5. The lifting bolts 6 are rotated relative to the screw holes to realize the upward and downward fine adjustment of the third positioning member 31, so as to realize the upward and downward fine adjustment of the furnace door 2 in cooperation with the third rotating member 32.

[0046] Further, the furnace door opening and closing assembly comprises a lifting mechanism, the lifting mechanism comprises a first guide rail 7 arranged vertically and a lifting plate 8 in sliding cooperation with the first guide rail 7, the lifting plate 8 is controlled to ascend and descend along the first guide rail 7 by a first driving member 9, and the lifting plate 8 is connected with the fine adjustment assembly through a supporting arm 25. The first driving member 9 can be a telescopic driving device such as a pneumatic cylinder, an electric cylinder or a motor.

[0047] The furnace door opening and closing assembly realizes the vertical opening and closing movement of the furnace door 2 relative to the furnace port 1 by arranging the lifting mechanism. Specifically, the lifting mechanism comprises a first guide rail 7 arranged vertically, and a lifting plate 8 in sliding cooperation with the guide rail, which can realize stable up and down movement along the guide rail under the driving of a first driving member 9. The lifting plate 8 is connected with the fine adjustment assembly through a supporting arm 25, and in this embodiment, the lifting plate 8 is connected with the fine adjustment assembly through the supporting arm 25 by a fixing bolt 3, so that the furnace door 2 always maintains the linkage relationship with the fine adjustment assembly during the lifting process. When it is needed to open the furnace port 1, the lifting plate 8 is driven to move upward or downward, thereby driving the furnace door 2 to move away from the furnace port 1, which facilitates the carrier to enter and exit; when the furnace port 1 is closed, the lifting plate 8 pushes the furnace door 2 to the position of the furnace port 1, and then the fine adjustment assembly is used for angle fine adjustment, so as to realize the precise fitting of the furnace door 2 and the furnace port 1. This design not only ensures the stability and positioning accuracy of the lifting movement of the furnace door 2, but also improves the sealing effect of the furnace door 2 when finally closed, reduces the leakage of heat and gas, and ensures the stability of the process environment of the vacuum reaction chamber.

[0048] Further, the furnace door opening and closing assembly further comprises a horizontal moving mechanism, the horizontal moving mechanism comprises a second guide rail 26 arranged in a horizontal direction and a horizontal moving plate 10 in sliding cooperation with the second guide rail 26, the horizontal moving plate 10 is controlled to move horizontally along the second guide rail 26 by a second driving member 28, and the first guide rail 7 and the first driving member 9 are arranged on the horizontal moving plate 10. The second driving member 28 can be a telescopic driving device such as a pneumatic cylinder, an electric cylinder or a motor. A displacement sensor 27 for detecting the position of the horizontal moving plate 10 can be arranged on the second guide rail 26, and the displacement sensor 27 can be a position detection sensor such as a touch switch.

[0049] The furnace door opening and closing assembly is provided with a horizontal movement ability by setting a horizontal movement mechanism. Specifically, the horizontal movement mechanism includes a second guide rail 26 arranged in the horizontal direction, and a horizontal movement plate 10 is in sliding cooperation with the second guide rail 26 and can be stably moved in the horizontal direction under the driving of a second driving member. The first guide rail 7 and the first driving member 9 are installed on the horizontal movement plate 10, so that the lifting mechanism as a whole moves horizontally with the horizontal movement plate 10. During the opening and closing process of the furnace door 2, the whole device is first driven by the horizontal movement mechanism to move in the horizontal direction, so that the furnace door 2 moves away from or approaches the furnace port 1, and then the vertical adjustment is performed by the lifting mechanism, and finally the angle fine compensation is completed by the fine adjustment assembly. The multi-stage movement cooperation structure ensures the flexibility and controllability of the movement of the furnace door 2, not only can meet the needs of remote opening and closing of the furnace door 2, but also can ensure the accurate alignment of the position of the furnace door 2 and the furnace port 1 when closing, significantly improve the sealing effect, reduce energy and gas leakage, and protect the stable process environment of the vacuum reaction chamber.

[0050] Further, as shown in Figure 8 , the lifting plate 8 is provided with a bolt 15 that extends and retracts towards the horizontal movement plate 10, the bolt 15 is controlled to extend and retract by a third driving member 16, the horizontal movement plate 10 is provided with a corresponding insertion hole 17, and when the bolt 15 is inserted into the insertion hole 17, the lifting plate 8 is fixed relative to the horizontal movement plate 10 in the vertical direction. The third driving member 16 can be a telescopic driving device such as a pneumatic cylinder, an electric cylinder or a motor.

[0051] The lifting plate 8 and the horizontal movement plate 10 are reliably positioned and locked by the cooperation of the bolt 15 and the insertion hole 17. Specifically, the lifting plate 8 is provided with a bolt 15 that extends and retracts towards the horizontal movement plate 10, the bolt 15 is driven by a third driving member 16 to automatically extend or retract. The horizontal movement plate 10 is provided with an insertion hole 17 at a corresponding position, and when the lifting plate 8 moves to a predetermined position, the bolt 15 extends into the insertion hole 17 under the action of the third driving member 16, so that the lifting plate 8 is fixed relative to the horizontal movement plate 10 in the vertical direction, thereby avoiding shaking or deviation during lifting. After the lifting plate 8 completes the required vertical movement and enters the working position, the insertion of the bolt 15 can effectively enhance the stability of the overall structure, withstand the reaction force from the weight of the furnace door 2 or the sealing and pressing process, so as to prevent the furnace door 2 from falling and ensure that the furnace door 2 remains stable when it is aligned with the furnace port 1. This design not only improves the movement accuracy and positioning reliability, but also prolongs the service life of the lifting and horizontal movement mechanism, and ensures the sealing effect of the vacuum reaction chamber and the stability of the process environment. When the furnace door 2 needs to be temporarily stopped urgently, the bolt 15 can also be inserted into the through hole of the horizontal movement plate 10 to make the furnace door 2 stop moving urgently and prevent the furnace door 2 from falling.

[0052] Furthermore, the transverse plate 10 is equipped with a position detection sensor 18 for detecting the lifting position of the lifting plate 8. When the position of the lifting plate 8 is detected such that the pin 15 corresponds to the socket 17, the third driving member 16 causes the pin 15 to be inserted into the socket 17. The position detection sensor 18 can be, for example, a touch switch.

[0053] A positioning sensor 18 installed on the transverse plate 10 is used to monitor the vertical position of the lifting plate 8 in real time. When the lifting plate 8 moves to a state where the pin 15 and the socket 17 are accurately aligned, the sensor outputs a detection signal to control the third drive component 16 to extend the pin 15 and insert it into the socket 17, thereby achieving precise locking between the lifting plate 8 and the transverse plate 10. This avoids the problem of the pin 15 being misaligned or unable to be inserted due to manual judgment or positional deviation, ensuring that the pin 15 and the socket 17 are in the optimal alignment position. This automatic detection and linkage control method not only improves the accuracy and reliability of the pin 15 insertion, but also reduces the accumulation of errors during equipment operation and improves the overall accuracy of the opening and closing positioning of the furnace door 2. Ultimately, it can effectively enhance the stability of the furnace door 2 when it is in contact with the furnace opening 1, ensure the sealing effect of the vacuum reaction chamber and the constancy of the process environment, and improve the intelligence and safety of equipment operation.

[0054] Furthermore, such as Figure 9 As shown, the inner side panel of the furnace door 2, opposite to the furnace opening 1, faces upward. A collection tray 19, corresponding vertically to the furnace opening 1, is provided on the inner side panel. A baffle is provided around the collection tray 19 on the inner side panel to prevent the collection tray 19 from moving along the inner side panel. The collection tray 19 is detachably arranged between the baffles. The baffle can be a limiting post 20 protruding relative to the furnace door 2.

[0055] During the process, any accidental event causing chip or fragment drop will result in the chip or fragment falling directly to the bottom of the reaction chamber or the inlet / outlet area located at the bottom of the chamber. Normally, the seal between the furnace opening 1 and the inlet / outlet ports of the reaction chamber is achieved using a sealing ring between them; this seal is a crucial requirement for achieving a vacuum level in the vacuum reaction chamber. If the fragments fall directly below the furnace opening 1 or to other areas and are not cleaned up promptly, these fragments can easily contaminate the reaction chamber.

[0056] To prevent debris from falling below the furnace opening 1 or into other areas, this embodiment employs a collection tray 19 on the furnace door 2, corresponding vertically to the furnace opening 1. This tray blocks debris that would otherwise fall below the furnace opening 1 or into other areas, and can accommodate a certain volume of accumulated debris, avoiding the need for frequent cleaning and improving economic efficiency. During maintenance, the tray is removed from the furnace door 2, the debris is emptied, and the tray is then reinstalled on the furnace door 2. The simple limiting mechanism relative to the protrusion on the furnace door 2 eliminates the need for additional tools such as wrenches or hexagonal screwdrivers when removing the collection tray 19.

[0057] The specific embodiments described herein are merely illustrative examples illustrating the spirit of the invention. Those skilled in the art can make various modifications or additions to the described embodiments or use similar methods to substitute them, without departing from the spirit of the invention or exceeding the scope defined by the appended claims.

Claims

1. A furnace door control structure, characterized in that: The furnace door includes a furnace door opening and closing assembly that controls the movement of the furnace door relative to the furnace opening, thereby opening or closing the furnace opening. The furnace door opening and closing assembly is connected to the furnace door through multiple fine-tuning components of the furnace door. The fine-tuning components include a rotating component connected to the furnace door and a positioning component connected to the furnace door opening and closing assembly. The positioning component and the rotating component are controlled to rotate relative to each other around a rotating axis through an adjusting component, so that the furnace door can be adjusted in multiple directions relative to the furnace opening.

2. The furnace door control structure according to claim 1, characterized in that, The fine-tuning component includes a first positioning mechanism, which includes a first positioning element, a first rotating element, and a first adjusting element. The first positioning element and the first rotating element are rotatably connected via a first rotating shaft. The first positioning element is connected to the furnace door opening and closing component, the first rotating element is connected to the furnace door, and the first adjusting element controls the rotation angle of the first rotating element relative to the first positioning element.

3. The furnace door control structure according to claim 2, characterized in that, The fine-tuning component further includes a second positioning mechanism, which includes a second positioning element, a second rotating element, and a second adjusting element. The second positioning element and the second rotating element are rotatably connected via a second rotating shaft. The second rotating element is connected to the first positioning element, and the first rotating shaft is perpendicular to the second rotating shaft. The second positioning element is connected to the furnace door opening and closing component, and the second adjusting element controls the rotation angle of the second rotating element relative to the second positioning element.

4. The furnace door control structure according to claim 3, characterized in that, The fine-tuning component further includes a third positioning mechanism, which includes a third positioning element, a third rotating element, and a third adjusting element. The third positioning element and the third rotating element are rotatably connected by a third rotating shaft. The third rotating element is connected to the second positioning element. The third rotating shaft, the second rotating shaft, and the first rotating shaft are perpendicular to each other. The third positioning element is connected to the furnace door opening and closing component. The third adjusting element controls the rotation angle of the third rotating element relative to the third positioning element.

5. The furnace door control structure according to claim 4, characterized in that, The third positioning component is connected to the furnace door opening and closing assembly through a limiting and fine-tuning mechanism, which allows the third positioning component to move closer to or further away from the furnace opening.

6. The furnace door control structure according to claim 1, characterized in that, The furnace door opening and closing assembly includes a lifting mechanism, which includes a vertically arranged first guide rail and a lifting plate that slides with the first guide rail. The lifting plate is controlled by a first driving component to move up and down along the first guide rail, and the lifting plate is connected to the fine-tuning assembly via a support arm.

7. The furnace door control structure according to claim 6, characterized in that, The furnace door opening and closing assembly also includes a horizontal sliding mechanism, which includes a second guide rail arranged in a horizontal direction and a horizontal sliding plate that slides with the second guide rail. The horizontal sliding plate is controlled by a second driving member to move horizontally along the second guide rail. The first guide rail and the first driving member are arranged on the horizontal sliding plate.

8. The furnace door control structure according to claim 6, characterized in that, The lifting plate is provided with a pin that extends and retracts toward the transverse plate. The pin is controlled to extend and retract by a third driving component. The transverse plate is provided with a hole corresponding to the pin. When the pin is inserted into the hole, the lifting plate is fixed in the vertical direction relative to the transverse plate.

9. The furnace door control structure according to claim 8, characterized in that, The transverse plate is equipped with a positioning sensor to detect the lifting position of the lifting plate. When the position of the lifting plate is detected such that the pin corresponds to the socket, the third driving member drives the pin to insert into the socket.

10. The furnace door control structure according to claim 1, characterized in that, The inner side panel of the furnace door, which is opposite to the furnace opening, faces upward. A collection tray corresponding to the furnace opening is provided on the inner side panel. A baffle is provided on the inner side panel to surround the collection tray, and the baffle prevents the collection tray from moving along the inner side panel.

11. A coating apparatus, characterized in that, It includes the furnace door control structure and furnace body as described in any one of claims 1-10, wherein one end of the furnace body is provided with a furnace opening.

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