Coating roller and coating device

Abstract

The invention relates to the technical field of film coating, and provides a film coating roller and a film coating device.The film coating roller comprises a roller body provided with a cavity; the first end plate is arranged at the end part of the roller body; the at least two first cooling channels are arranged in an isolated manner; the second cooling channel is formed in the first end plate; a circulation channel, an inflow channel and an outflow channel. In the whole coating process, cooling media are input into at least two positions of the roller body at the same time in a segmented mode, the stroke flowing through the first cooling channel is reduced, the loop of the cooling media is short, and then the temperature difference of the cooling media located in the same cooling channel can be reduced; furthermore, the heat of the base material, especially the base material with larger width, is uniformly and quickly taken away through heat exchange between one side surface, close to the roller body, of the base material and the coating roller.

Description

Technical Field

[0001] The invention relates to the technical field of coating, and in particular to a coating roller and a coating device. Background Art

[0002] A passive or active coating roller is used in the process chamber of the vacuum coating equipment, and the roller diameter is generally large. When the coating equipment is working normally, it will generate a lot of heat. In order to prevent the substrate on the surface of the coating roller from being damaged, the usual practice is to pass the coolant into the middle of the coating roller, that is, the coolant enters from one end of the coating roller, flows through the roller surface for heat exchange, and then flows out from the other end, or flows out from the same end by changing the rotary joint. In this way, as the roller surface becomes longer and longer, the coolant's heat exchange travel on the roller surface will also become longer and longer. At this time, it will directly lead to a larger temperature difference at both ends of the roller surface, which will reduce the cooling uniformity of the roller surface substrate, thereby affecting the coating effect. Summary of the invention

[0003] Therefore, the technical problem to be solved by the present invention is to overcome the defect in the prior art that, when the coating equipment is working normally, a relatively large amount of heat will be generated. In order to prevent the substrate on the surface of the coating roller from being damaged, the usual practice is to pass coolant into the middle of the coating roller, that is, the coolant enters from one end of the coating roller, flows through the roller surface for heat exchange, and then flows out from the other end, or flows out from the same end by changing the rotary joint. In this way, as the roller surface becomes longer and longer, the heat exchange stroke of the coolant on the roller surface will also become longer and longer. At this time, it will directly lead to a larger temperature difference between the two ends of the roller surface, which will reduce the cooling uniformity of the roller surface substrate, thereby affecting the coating effect. Thus, a coating roller and a coating device are provided.

[0004] A coating roller comprises: a roller body having a cavity; at least two first cooling channels formed on the outer peripheral body of the roller body along the axis direction of the roller body, and the first cooling channels are isolated from each other; a circulation channel formed in the cavity, the first cooling channels are configured to be connected to the circulation channels and are arranged one by one; an inflow channel is arranged along the axis direction of the roller body, one end of the inflow channel is configured to be arranged in the cavity and extend toward one end of the roller body and to the end surface thereof, and the other end is configured to be located outside the cavity and suitable for communicating with the cooling channel. The coating roller is connected to a cooling medium source, the inlet of any of the circulation channels is suitable for communicating with the inlet channel, and the outlet of the circulation channel is connected to the corresponding first cooling channel; the outflow channel is configured to be isolated from the inflow channel, and the outflow channel is suitable for communicating with any of the first cooling channels, and the other end is suitable for extending out of the cavity; the coating roller has a cooling medium suitable for flowing into each circulation channel along the inflow channel to enter each first cooling channel, and the cooling medium in each first cooling channel is suitable for merging into the outflow channel to flow out along the outflow channel.

[0005] Optionally, the above-mentioned coating roller also includes at least one molded part, the outer wall surface of the molded part is pressed against the inner wall surface of the cavity, and each of the molded parts is suitable for being arranged parallel to the axial direction of the roller body, and a first groove structure with open ends is opened on any of the molded parts, and the first groove structure serves as the circulation channel to be connected with the corresponding first cooling channel.

[0006] Optionally, the above-mentioned coating roller further includes:

[0007] A first end plate, disposed at an end of the roller body and configured to be sealed and connected to the roller body;

[0008] A second cooling channel is formed on the first end plate, the second cooling channel is communicated with the adjacent first cooling channel, and the second cooling channel is communicated with the inflow channel through the communicating channel.

[0009] Optionally, in the above-mentioned coating roller, the roller body is a double-layer cylindrical structure, which includes an outer roller and an inner roller, which are sleeved and connected, and along the axial direction of the roller body, at least three sections of second groove structures that are not connected to each other and are spirally arranged between the outer wall surface of the inner roller and the inner wall surface of the outer roller, and each of the second groove structures serves as each of the first cooling channels.

[0010] Optionally, in the above-mentioned coating roller, there is a first gap between the inner peripheral wall surface of the outer roller and the outer peripheral wall surface of the inner roller;

[0011] It also includes at least three partitions, each of which is spirally wound in the first gap, and a second gap is left between the two opposite wall surfaces of each partition. The second gaps formed by each partition are cut off, and the outer peripheral wall surface of the partition is pressed against the inner peripheral wall surface of the outer roller and the outer peripheral wall surface of the inner roller, so that the second gap forms the second groove structure.

[0012] Optionally, in the above-mentioned coating roller, a third groove structure is opened in the circumferential direction of the first end plate to form the second cooling channel, and one end of the third groove structure is connected to one of the adjacent connecting channels, and the other end is connected to the adjacent first cooling channel.

[0013] Optionally, in the above-mentioned coating roller, the third groove structure is arranged in an annular shape to form an annular second cooling channel.

[0014] Optionally, the above-mentioned coating roller also includes a roller shaft, one end of the roller shaft is located in the cavity and is suitable for connecting to the first end plate, the other end of the roller shaft is located outside the cavity, the inflow channel is opened in the axial direction of the roller shaft, and all of the first groove structures are connected to the side wall of the roller shaft so as to be connected to the inflow channel.

[0015] Optionally, the coating roller further comprises an outflow pipe and an output pipe, wherein the outflow pipe is provided with the outflow channel corresponding to the first cooling channel, one end of the output pipe extends into the cavity and is sleeved on the roller shaft, and a third gap is provided between the inner wall surface of the output pipe and the outer wall surface of the roller shaft, and the third gap is suitable for forming the output channel;

[0016] One end of each of the outflow pipes is suitable for being connected to the second gap of the inner roller, and the other end of the outflow pipe is connected to the third gap, so that one end of the outflow channel is connected to the first cooling channel, and the other end is connected to the output channel.

[0017] Optionally, in the above-mentioned coating roller, the roller shaft is connected to the first end plate via a bearing, and the bearing is made of ceramic material.

[0018] Optionally, in the above-mentioned coating roller, an opening is opened on the first end plate, which is suitable for balancing the pressure difference between the cavity and the outside.

[0019] Optionally, in the above-mentioned coating roller, a through hole for the roller shaft to pass through is opened on any of the molded parts, and the roller shaft is axially connected to the through hole.

[0020] A coating device comprises a coating roller, wherein the coating roller is the coating roller as described above.

[0021] The technical solution of the present invention has the following advantages:

[0022] 1. A coating roller provided by the present invention comprises: a roller body having a cavity; at least two first cooling channels formed on the outer peripheral body of the roller body along the axial direction of the roller body, and the first cooling channels are isolated from each other; a circulation channel formed in the cavity, the first cooling channels are configured to be connected with the circulation channels and arranged one-to-one; an inflow channel is arranged along the axial direction of the roller body, one end of the inflow channel is configured to be arranged in the cavity and extend toward one end of the roller body and to its end surface, and the other end is configured to be located outside the cavity, and Suitable for communicating with a cooling medium source, the inlet of any of the circulation channels is suitable for communicating with the inlet channel, and the outlet of the circulation channel is connected to the corresponding first cooling channel; the outflow channel is configured to be isolated from the inlet channel, and the outflow channel is suitable for communicating with any of the first cooling channels, and the other end is suitable for extending out of the cavity; the coating roller has a cooling medium suitable for flowing into each circulation channel along the inlet channel to enter each first cooling channel, and the cooling medium in each first cooling channel is suitable for merging into the outflow channel to flow out along the outflow channel.

[0023] In the coating roller of this structure, the coating roller is driven to rotate, and the substrate wound on the outer roller surface of the coating roller is transported as the coating roller rotates. Atomic deposition is generated on the substrate through magnetron sputtering or evaporation device to form a coating, and a cooling medium is input into the inflow channel. The cooling medium enters into each multi-section isolated first cooling channel along the circulation channel at each position, and then continuously flows in the first cooling channel and enters into the outflow channel to flow out of the first cooling channel, while continuing to input the cooling medium into the inflow channel. During the whole process, the cooling medium is input in sections and at least two positions of the roller body at the same time, and the cooling medium loop is shortened by reducing the stroke of the first cooling channel, thereby reducing the temperature difference of the cooling medium in the same cooling channel, and then the substrate is evenly and quickly taken away through heat exchange with the coating roller on one side of the roller body. The heat of the substrate, especially for the substrate with a larger width, is avoided, so that the cooling effect of the substrate on the output side of the cooling medium is poor due to the long cooling channel, and the effect of uniform cooling of each position of the substrate is achieved, the overall cooling effect is good, and the coating effect is improved. It overcomes the problem in the prior art that when the coating equipment is working normally, a relatively large amount of heat will be generated. In order to prevent the substrate on the surface of the coating roller from being damaged, the usual practice is to pass the coolant into the middle of the coating roller, that is, the coolant enters from one end of the coating roller, flows through the roller surface for heat exchange, and then flows out from the other end, or flows out from the same end by changing the rotary joint. In this way, as the roller surface becomes longer and longer, the heat exchange stroke of the coolant on the roller surface will also become longer and longer. At this time, it will directly lead to a larger temperature difference at both ends of the roller surface, which will reduce the cooling uniformity of the roller surface substrate, thereby affecting the coating effect.

[0024] 2. The coating roller provided by the present invention also includes at least one molded part, the outer wall surface of the molded part is pressed against the inner wall surface of the cavity, and each of the molded parts is suitable for being arranged parallel to the axial direction of the roller body, and a first groove structure with open ends is opened on any of the molded parts, and the first groove structure serves as the circulation channel to be connected with the corresponding first cooling channel and the second cooling channel respectively.

[0025] In the coating roller of this structure, a molded part is arranged in the cavity, the outer wall surface of the molded part is pressed against the inner wall surface of the cavity, and a first groove structure with open ends is opened on each molded part to form a circulation channel. The flow channel is connected to the first cooling channel and the second cooling channel respectively by means of the circulation channel. This molding method is relatively simple and convenient for actual molding and use.

[0026] 3. The coating roller provided by the present invention also includes: a first end plate, which is arranged at the end of the roller body and is configured to be sealed and connected to the roller body; a second cooling channel, a second cooling channel is formed on the first end plate, the second cooling channel is connected to the adjacent first cooling channel, and the second cooling channel is connected to the inflow channel through the connecting channel.

[0027] In the coating roller of this structure, a second cooling channel is formed on the first end plate at the end of the roller body, and the second cooling channel is connected with the adjacent first cooling channel, and is connected with the inflow channel through a connecting channel. When the cooling medium enters the second cooling channel through the connecting channel along the inflow channel, the roller end face and the substrate in contact with the roller end face can be cooled, thereby avoiding the local temperature of the coating roller from being too high. This overcomes the defect that during magnetron sputtering coating, due to the high voltage vacuum environment, tip discharge is easily formed on the roller and the roller end face of the coating roller, thereby causing the local temperature of the coating roller to be too high, especially the end face temperature cannot be cooled immediately, which affects the coating effect and cannot meet its actual use requirements. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0029] Figure 1 A schematic diagram of the overall structure of a coating roller provided in a first embodiment of the present invention;

[0030] Figure 2 It is a cross-sectional view of the end structure of the coating roller;

[0031] Figure 3 for Figure 1 A schematic diagram of the overall structure of the coating roller from another angle is shown;

[0032] Description of reference numerals:

[0033] 100, roller body; 101, cavity;

[0034] 102, outer roller; 103, inner roller; 104, second gap;

[0035] 200, first end plate; 201, third slot structure;

[0036] 300, first cooling channel;

[0037] 400, second cooling channel;

[0038] 600, molded part; 601, first slot structure;

[0039] 700, partition;

[0040] 800, roller; 801, inflow channel;

[0041] 900. Output pipe. DETAILED DESCRIPTION

[0042] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0043] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0044] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0045] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0046] It should be noted that the pressing in the present invention refers to the contact between surfaces, for example, a transition fit may be used.

[0047] Example 1

[0048] This embodiment describes a coating roller, see Figure 1-Figure 3The coating roller includes a roller body 100 and a first end plate 200, wherein the roller body 100 has a cavity 101, and the first end plate 200 is arranged at the end of the roller body 100 and is configured to be sealed and connected with the roller body 100. In order to pass a cooling medium into the roller body 100, at least two first cooling channels 300 are arranged on the outer peripheral body of the roller body 100 along the axial direction of the roller body 100, and each first cooling channel 300 is isolated from each other. By inputting the cooling medium into the first cooling channel 300, the substrate located on the outer peripheral surface of the roller body 100 can exchange heat with the cooling medium through the roller body 100, and at least two first cooling channels 300 are arranged on the roller body 100, and the first cooling medium is passed into each first cooling channel 300 at the same time, which can effectively shorten the circulation circuit of the cooling medium in the same cooling channel.

[0049] In order to flow the cooling medium into the first cooling channel 300, a circulation channel can also be formed in the cavity 101 of the above-mentioned roller body 100, and an inflow channel 801 can be set along the axial direction of the roller body 100. The circulation channel is configured to be connected to each first cooling channel 300 and arranged one by one, and each circulation channel is connected to the inflow channel 801 respectively.

[0050] Specifically, one end of the inflow channel 801 is configured to be arranged in the cavity 101 and extend toward one end of the roller body 100 and to its end surface, and the other end is configured to be located outside the cavity 101 and is suitable for connecting with a cooling medium source. Any circulation channel includes an inlet and an outlet, wherein the inlet is suitable for connecting with the inflow channel 801, and the outlet is connected with the corresponding first cooling channel 300. The cooling medium in the cooling medium source can enter the first cooling channel 300 from the inflow channel 801 along the inlet through the circulation channel and through the outlet, and flow along the first cooling channel 300.

[0051] In order to form a circulation loop, an outflow channel can also be set corresponding to the inflow channel 801. The outflow channel is sleeved on the above-mentioned inflow channel 801, and the outflow channel is isolated from the inflow channel 801. The outflow channel is configured to be connected to any first cooling channel 300, and the other end is suitable for extending out of the cavity 101. The cooling medium in the first cooling channel 300 flows out of the corresponding first cooling channel 300 from the outflow channel.

[0052] In actual use, the coating roller in this embodiment has a cooling medium that is suitable for flowing into each circulation channel along the inlet channel 801 to enter each first cooling channel 300, and the cooling medium in each first cooling channel 300 is suitable for merging into the outflow channel to flow out along the outflow channel.

[0053] In the coating roller of this embodiment, at least two first cooling channels 300 are provided in isolation from each other on the outer peripheral body of the roller body 100, and one or more circulation channels are formed in the cavity 101 of the roller body 100, any circulation channel is configured to communicate with the first cooling channel 300 and the second cooling channel 400 and to correspond to each other, and then an inflow channel 801 is provided in the axial direction of the roller body 100, and one end of the inflow channel 801 is configured to be provided in the cavity 101 and extend toward one end of the roller body 100. The end surface of the coating roller is configured to be located outside the cavity 101 and is suitable for communicating with the cooling medium source. The inlet of any circulation channel is suitable for communicating with the inflow channel 801, and the outlet of any circulation channel is connected to the corresponding first cooling channel 300. At the same time, an outflow channel is set on the inflow channel 801, and the two are isolated from each other. The outflow channel is configured to communicate with any first cooling channel 300, and the other end is suitable for extending out of the cavity 101. During the coating process, the coating roller is driven to rotate and is wound around the outer roller 102 of the coating roller. The substrate on the surface is transported as the coating roller rotates, and atoms are deposited on the substrate by magnetron sputtering or evaporation to form a coating. A cooling medium is input into the inflow channel 801, and the cooling medium enters each first cooling channel 300 along the circulation channels at each position, and then continuously flows in the first cooling channel 300 and enters the outflow channel to flow out of the first cooling channel 300, while continuing to input the cooling medium into the inflow channel 801. During the whole process, the cooling medium is input in sections and at least two positions of the roller body 100 at the same time, and the cooling medium loop is shortened by reducing the stroke of flowing through the first cooling channel 300, thereby reducing the temperature difference of the cooling medium in the same cooling channel. Then, the substrate is close to the side of the roller body 100 through heat exchange with the coating roller, and the heat of the substrate is evenly and quickly taken away. Especially for substrates with a larger width, the cooling effect of the substrate on the output side of the cooling medium is avoided to be poor due to the longer cooling channel, so that the effect of uniform cooling of each position of the substrate is achieved, the overall cooling effect is good, and the coating effect is improved.

[0054] The coating roller in this embodiment also includes a molded part 600, the end face of which is pressed against the inner wall of the cavity 101, and the axes of each molded part 600 are respectively arranged parallel to the axis direction of the roller body 100, and a first groove structure 601 with openings at both ends is opened on any molded part 600, and the first groove structure 601 is used as a circulation channel to be connected with the corresponding first cooling channel 300 and second cooling channel 400 respectively.

[0055] By arranging a molded part 600 in the cavity 101, the outer peripheral end face of the molded part 600 is pressed against the inner wall surface of the cavity 101, and a first groove structure 601 with open ends is opened on each molded part 600 to form a circulation channel, and the inflow channel 801 is connected with the first cooling channel 300 by utilizing the circulation channel. This molding method is relatively simple and convenient for actual molding and use.

[0056] Specifically, the molded part 600 can be set as a circular plate, which is adaptably connected to the roller body 100, and then a first groove structure 601 is opened in the radial direction of the circular plate. The cross-section of the first groove structure 601 is circular. In actual use, the circular plate has a certain thickness and can open the first groove structure 601 on its body. The axis of the first groove structure 601 is perpendicular to the axial direction of the circular plate.

[0057] In the process of production practice, after continuous experiments and summarization by the inventors, the inventors also found that when magnetron sputtering coating is working, due to the high-voltage vacuum environment, tip discharge is easily formed on the roller and the end face of the coating roller, which causes the local temperature of the coating roller to be too high, especially the end face temperature cannot be cooled immediately, affecting the coating effect. Therefore, in order to be able to cool the end position of the roller body and avoid overheating of the local position of the roller body, a second cooling channel 400 can be formed on the first end plate 200 along the axial direction of the above-mentioned first end plate 200, and the second cooling channel 400 is connected to the adjacent first cooling channel 300, and the second cooling channel is connected to the inflow channel 801 through a connecting channel, and the cooling medium enters the second cooling channel 400 from the inflow channel 801 through the second circulation channel, and the cooling medium in the second cooling channel 400 flows into the adjacent first cooling channel 300.

[0058] The provision of the second cooling channel can cool the first end plate located at the end of the coating roller, and on this basis, avoid local overheating of the coating roller.

[0059] In detail, any one of the above-mentioned first cooling channels 300 is connected to the inflow channel through the first circulation channel, and the above-mentioned second cooling channel 400 is connected to the inflow channel through the second circulation channel. The first groove structure 601 opened on each of the above-mentioned molded parts 600 can be used as the first connecting channel and the second connecting channel respectively, that is, the molded part where the first connecting channel is located is defined as the first molded part, and the molded part where the second connecting channel is located is defined as the second molded part.

[0060] The second molded part can be arranged close to the first end plate 200, see Figure 2The first groove structure opened on the second molded part can be set in an L shape. Since there is a gap between the second molded part and the first end plate, the second cooling channel and the first groove structure on the first end plate can be connected by a connecting pipe, and the connecting pipe can be a manifold.

[0061] Of course, without considering the processing technology, the second cooling channel and the first groove structure on the first end plate can be connected without a connecting pipe. For example, the second molded part is set close to the first end plate 200, and the port of the first groove structure 601 is directly connected to the second cooling channel 400 opened on the first end plate 200.

[0062] In this embodiment, the roller body 100 is a double-layer cylindrical structure, which includes an outer roller 102 and an inner roller 103, which are sleeved and connected. Along the axial direction of the roller body 100, at least three sections of second groove structures that are not connected to each other and are spiral are arranged between the outer wall surface of the inner roller 103 and the inner wall surface of the outer roller 102, and each second groove structure serves as a first cooling channel 300.

[0063] In detail, a first gap can be left between the inner circumferential wall surface of the outer roller 102 and the outer circumferential wall surface of the inner roller 103, and at least three partitions 700 are arranged in the first gap. Each partition 700 is spirally wound in the first gap, and a second gap 104 is left between the two opposite walls of each partition 700. The second gaps 104 formed by each partition 700 are cut off and set, and the outer circumferential wall surface of the partition 700 and the inner circumferential wall surface of the outer roller 102 and the outer circumferential wall surface of the inner roller 103 are pressed against each other, so that the second gap 104 on each partition 700 forms a second groove structure correspondingly, and the cooling medium flows into the second gap 104 from the outflow outlet of the first circulation channel, thereby realizing heat exchange with the roller body 100, and then heat exchange is performed with the substrate on the outer circumferential surface of the roller body 100.

[0064] In this embodiment, in order to form the second cooling channel 400, a third groove structure 201 can be opened in the circumferential direction of the first end plate 200 to form the second cooling channel 400. One end of the third groove structure 201 is connected to the second connecting channel, and the other end is connected to the adjacent first cooling channel 300. In actual operation, the third groove structure 201 is arranged in a ring shape to form a ring-shaped second cooling channel 400. Arranging the third groove structure 201 in a ring shape can increase the circulation distance of the cooling medium at the end, thereby improving the cooling of the first end plate 200 and the end substrate. The annular third groove structure 201 is arranged to be arranged in a circle around the axial direction of the first end plate 200.

[0065] In this embodiment, in order to facilitate the molding of the inflow channel 801 without adding a new pipeline structure, a roller 800 is also included. One end of the roller 800 is set in the cavity 101 and connected to the first end plate 200. The other end of the roller 800 is set outside the cavity 101, and the inflow channel 801 is opened in the axial direction of the roller 800. All the first groove structures 601 are connected to the side wall of the roller 800 to connect with the inflow channel 801.

[0066] In actual use, the above-mentioned molded parts 600, that is, the first molded part and the second molded part, can be sleeved and connected with the roller 800. For example, a through hole can be opened on the molded part 600, and then the roller 800 can be passed through each through hole in turn to connect with each molded part 600. In order to ensure the stable use of each molded part 600, the outer circumference of the roller 800 can be pressed against the through hole, and a hollow cavity is opened in the roller 800. The hollow cavity is used as the inflow channel 801, and one end of the hollow cavity is opened to connect with an external cooling medium source. A circulation hole is opened on the roller 800, and the circulation hole is connected to the circulation channel, that is, the inlet of the first circulation channel and the second circulation channel correspondingly. In this way, the cooling medium can enter the first circulation channel and the second connecting channel along the circulation hole on the roller 800 after entering the inflow channel 801, and then enter the first cooling channel 300 and the second cooling channel 400.

[0067] In practice, the roller 800 and the formed part 600 are connected via a shaft.

[0068] In this embodiment, an outflow pipe and an output pipe 900 are also included, wherein the outflow pipe is provided with an outflow channel corresponding to the first cooling channel 300, one end of the output pipe 900 extends into the cavity 101 and is sleeved on the roller shaft 800, and a third gap is provided between the inner wall surface of the output pipe 900 and the outer wall surface of the roller shaft 800, and the third gap is suitable for forming an output channel, one end of each outflow pipe is suitable for being connected to the second gap 104 of the inner roller 103, and the other end of the outflow pipe is connected to the third gap, so that one end of the outflow channel is connected to the first cooling channel 300, and the other end is connected to the output channel.

[0069] The number of the above-mentioned outflow pipes is set corresponding to the number of the first cooling channels 300. For example, the above-mentioned three-section first cooling channel 300 is set, so the outflow pipe is also set to three sections, and when the outflow pipe is arranged in the cavity 101 of the roller body 100, it is necessary to avoid the flow channel opened on the molded part 600 for arrangement.

[0070] It should be noted that the inlets of the three first cooling channels 300 are all connected to different first circulation channels, and the outlets are also connected to different outflow pipes, and all the outflow pipes are connected to the same output pipe 900, that is, the same output channel, and the cooling medium in the second cooling channel 400 will also flow into the adjacent first cooling channel 300, thereby realizing the introduction of cooling medium into different cooling channels, thereby shortening the reflux path of the cooling medium, and at the same time, only one output pipe 900 can be set, and the cooling medium in the first cooling channels at different positions are all merged into the output channel formed between the same output pipe 900 and the outer wall surface of the roller shaft 800, thereby completing the input and output of the cooling medium. The circuit structure is complete, and the coating roller can cool the substrate uniformly. When working, the coating roller is driven to rotate, and the substrate wound on the outer roller 102 surface of the coating roller is transported as the coating roller rotates. Atoms are deposited on the substrate through magnetron sputtering or evaporation to form a coating. The substrate is close to the outer roller 102 surface, and the heat of the substrate is evenly and quickly taken away through heat exchange with the coating roller. The cooling medium passes through multiple cooling channels in the coating roller and evenly and quickly takes away the heat from the outer roller 102 surface. At the same time, due to the design of the annular cooling channel on the first end plate 200, the cooling medium can also quickly take away the heat generated on the end face due to tip discharge, thereby ensuring the uniformity of cooling of the roller surface substrate and improving the coating effect.

[0071] In actual use, the roller shaft 800 can be connected to the first end plate 200 via a bearing, which is made of ceramic material. Of course, a second end plate is provided at the other end of the roller body opposite to the first end plate 200, that is, at one end corresponding to the output channel. The second end plate is connected to the output pipe 900 via a bearing, which can also be made of ceramic material. The two have the same structure, and the difference lies in the different size settings.

[0072] In this embodiment, an opening may be provided on the first end plate 200 , and the pressure difference between the cavity 101 and the outside may be balanced by the opening. Of course, the opening may also be used as an inspection port to facilitate maintenance of the coating roller.

[0073] It should be noted that by reducing the distance flowing through the first cooling channel 300, the cooling medium circuit is short, which means that at least two first cooling channels 300 are opened along the axis direction of the roller body 100, and the first cooling channels 300 are not connected to each other, and each first cooling channel 300 includes a cooling medium inlet and a cooling medium outlet.

[0074] Embodiment 2:

[0075] This embodiment describes a coating device, including a coating roller, which is the coating roller described in Example 1.

[0076] The coating device in this embodiment adopts the coating roller recorded in Example 1, and thus has all the beneficial effects of the coating roller recorded in Example 1, and the coating device has a good coating effect.

[0077] Obviously, the above embodiments are merely examples for the purpose of clear explanation, and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived therefrom are still within the scope of protection of the invention.

Claims

1. A coating roller, characterized in that: include: A roller body (100) having a cavity (101); At least two first cooling channels (300) are formed on the outer peripheral body of the roller body (100) along the axial direction of the roller body (100), and the first cooling channels (300) are isolated from each other; A circulation channel is formed in the cavity (101), and the first cooling channel (300) is configured to communicate with the circulation channel and be arranged in a one-to-one correspondence; an inflow channel (801) arranged along the axial direction of the roller body (100), one end of the inflow channel (801) being arranged in the cavity (101) and extending toward one end of the roller body (100) and reaching the end surface thereof, and the other end being arranged outside the cavity (101) and being suitable for communicating with a cooling medium source, an inlet of any of the circulation channels being suitable for communicating with the inflow channel (801), and an outlet of the circulation channel being connected with the corresponding first cooling channel (300); an outflow channel, configured to be isolated from the inflow channel (801), and the outflow channel is suitable for being connected to any one of the first cooling channels (300), and the other end is suitable for extending out of the cavity (101); The coating roller has a cooling medium that is suitable for flowing into each circulation channel along the inflow channel (801) to enter each first cooling channel (300), and the cooling medium in each first cooling channel (300) is suitable for merging into the outflow channel to flow out along the outflow channel.

2. The coating roller according to claim 1, characterized in that: It also includes at least one molded part (600), the outer peripheral wall surface of the molded part (600) is pressed against the inner wall surface of the cavity (101), and each of the molded parts (600) is suitable for being arranged parallel to the axial direction of the roller body (100), and a first groove structure (601) with two ends being open is provided on any of the molded parts (600), and the first groove structure (601) serves as the circulation channel to communicate with the corresponding first cooling channel (300).

3. The coating roller according to claim 2, characterized in that: Also includes: A first end plate (200) is disposed at an end of the roller body (100) and is configured to be sealed and connected to the roller body (100); A second cooling channel (400) is formed on the first end plate (200), the second cooling channel (400) is connected to the adjacent first cooling channel (300), and the second cooling channel (400) is connected to the inflow channel (801) through a connecting channel.

4. The coating roller according to any one of claims 1 to 3, characterized in that: The roller body (100) is a double-layer cylindrical structure, comprising an outer roller (102) and an inner roller (103), which are sleeved and connected. Along the axial direction of the roller body (100), at least three sections of second groove structures that are not connected to each other and are spiral are arranged between the outer wall surface of the inner roller (103) and the inner wall surface of the outer roller (102), and each of the second groove structures serves as each of the first cooling channels (300).

5. The coating roller according to claim 4, characterized in that: A first gap is formed between the inner peripheral wall surface of the outer roller (102) and the outer peripheral wall surface of the inner roller (103); It also includes at least three partitions (700), each of which is spirally wound in the first gap, and a second gap (104) is left between the two opposite wall surfaces of each partition (700). The second gaps (104) formed by each partition (700) are cut off and arranged, and the outer peripheral wall surface of the partition (700) is pressed against the inner peripheral wall surface of the outer roller (102) and the outer peripheral wall surface of the inner roller (103), so that the second gap (104) forms the second groove structure.

6. The coating roller according to claim 3, characterized in that: A third groove structure (201) is provided in the circumferential direction of the first end plate (200) to form the second cooling channel (400); one end of the third groove structure (201) is connected to one of the adjacent connecting channels, and the other end is connected to the adjacent first cooling channel (300).

7. The coating roller according to claim 6, characterized in that: The third groove structure (201) is arranged in an annular shape to form an annular second cooling channel (400).

8. The coating roller according to claim 3, characterized in that: It also includes a roller shaft (800), one end of which is located in the cavity (101) and is suitable for connecting with the first end plate (200), and the other end of which is located outside the cavity (101). The inflow channel (801) is opened in the axial direction of the roller shaft (800), and all the first groove structures (601) are connected to the side wall of the roller shaft (800) so as to be connected to the inflow channel (801).

9. The coating roller according to claim 8, characterized in that: It also includes an outflow pipe and an output pipe (900), wherein the outflow pipe is provided with the outflow channel corresponding to the first cooling channel (300), one end of the output pipe (900) extends into the cavity (101) and is sleeved on the roller shaft (800), and a third gap is provided between the inner wall surface of the output pipe (900) and the outer wall surface of the roller shaft (800), and the third gap is suitable for forming the output channel; One end of each of the outflow pipes is suitable for being connected to the second gap (104) of the inner roller (103), and the other end of the outflow pipe is connected to the third gap, so that one end of the outflow channel is connected to the first cooling channel (300), and the other end is connected to the output channel.

10. The coating roller according to claim 8, characterized in that: The roller shaft (800) is connected to the first end plate (200) via a bearing, and the bearing is made of ceramic material.

11. The coating roller according to any one of claims 3 or 6-10, characterized in that: An opening is provided on the first end plate (200) to balance the pressure difference between the cavity (101) and the outside.

12. The coating roller according to any one of claims 2 or 3 or 6-10, characterized in that: A through hole for the roller shaft (800) to pass through is provided on any of the molded parts (600), and the roller shaft (800) is axially connected to the through hole.

13. A coating device, characterized in that: It comprises a coating roller, and the coating roller is the coating roller according to any one of claims 1-12.

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