Special gas supply system and special gas supply method

Abstract

The invention provides a special gas supply system. The special gas supply system comprises at least two special gas cabinets; the coating cabins are connected to the special gas cabinet through gas supply pipelines; the air supply valve is arranged on the air supply pipeline; the middle pipeline is connected between the air supply pipelines corresponding to the two adjacent film coating cabins, and the middle pipeline is communicated with the air supply pipelines; the middle valve is arranged on the middle pipeline; wherein the middle pipeline is positioned between the special gas holder and the gas supply valve, or the middle pipeline is positioned between the gas supply valve and the coating cabin; the pressure detectors are arranged on the gas supply pipeline, and one special gas holder corresponds to one pressure detector. The working efficiency of the special gas holder and the coating cabin is improved.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to a special gas supply system and a special gas supply method. Background Art

[0002] In the field of semiconductor manufacturing, special gases (special gases) refer to various high-purity or mixed gases used in the production process. In order to safely and effectively manage and use these special gases, a series of peripheral devices are required to support them. In the prior art, the special gas cabinet supplies specific gases to the coating chamber. After the gas enters the coating chamber, the specific components in the gas are deposited on the surface of the wafer to form a coating. However, the special gas cabinet in the prior art is connected one-to-one to the coating chamber. When the special gas cabinet fails, the coating chamber connected to it needs to stop operating for maintenance. It can only continue to operate after the maintenance is completed, resulting in low operating efficiency. Therefore, there is room for improvement. Summary of the invention

[0003] In view of the above-mentioned shortcomings of the prior art, an object of the present invention is to provide a special gas supply system and a special gas supply method, which are used to solve the problem in the prior art that the special gas cabinet and the coating chamber are correspondingly connected and the operating efficiency is low.

[0004] To achieve the above-mentioned purpose and other related purposes, the present invention provides a special gas supply system, comprising:

[0005] At least two special gas cabinets;

[0006] At least two coating chambers, wherein the coating chambers are connected to the special gas cabinet via gas supply pipelines;

[0007] An air supply valve is arranged on the air supply pipeline;

[0008] An intermediate pipeline is connected between the air supply pipelines corresponding to two adjacent coating chambers, and the intermediate pipeline is in communication with the air supply pipelines;

[0009] An intermediate valve, arranged on the intermediate pipeline;

[0010] Wherein, the intermediate pipeline is located between the special gas cabinet and the gas supply valve, or the intermediate pipeline is located between the gas supply valve and the coating chamber.

[0011] In one embodiment of the present invention, the special gas supply system further includes a multi-way pipeline, wherein the multi-way pipeline is connected to the gas supply pipeline, and the gas supply pipeline is connected to the intermediate pipeline via the multi-way pipeline.

[0012] In one embodiment of the present invention, the special gas supply system further includes a pressure detector, which is arranged on the gas supply pipeline, and one special gas cabinet is provided with a corresponding pressure detector.

[0013] In one embodiment of the present invention, on the gas supply pipeline, the pressure detector is located on a side close to the special gas cabinet.

[0014] In one embodiment of the present invention, the special gas supply system further comprises a pressure controller, and the pressure detector is electrically connected to the pressure controller;

[0015] The air supply valve and the intermediate valve are electromagnetic valves or pneumatic valves, and the pressure controller is electrically connected to the air supply valve and the intermediate valve.

[0016] In one embodiment of the present invention, on the air supply pipes and the intermediate pipes corresponding to two adjacent coating chambers, when the indications of the two pressure detectors are the same, the two air supply valves are in an open state and the intermediate valve is in a closed state.

[0017] In one embodiment of the present invention, on the air supply pipe and the intermediate pipe corresponding to two adjacent coating chambers, when the indications of the two pressure detectors are different, the intermediate valve is in an open state, one of the air supply valves is in an open state, and the other air supply valve is in a closed state.

[0018] In one embodiment of the present invention, the diameter of the intermediate pipe is the same as the diameter of the air supply pipe.

[0019] In one embodiment of the present invention, the special gas supply system further includes a multi-way pipeline, one of the special gas cabinets is correspondingly connected to at least one of the coating chambers, and the gas supply pipeline is connected to at least one of the coating chambers through the multi-way pipeline.

[0020] In one embodiment of the present invention, a sealing ring is provided at the connection between the multi-way pipe and the air supply pipe.

[0021] The present invention further provides a special gas supply method, using any of the special gas supply systems described above, comprising:

[0022] Open the gas supply valves on the gas supply pipelines corresponding to the two special gas cabinets, and close the intermediate valve on the intermediate pipeline, so that the two special gas cabinets supply gas to the corresponding coating chambers;

[0023] The pressure detector is used to detect the pressure of the gas supply pipelines corresponding to the two special gas cabinets, and the difference between the detection pressure on the pressure detector and the preset normal pressure is determined;

[0024] When the detection pressure on the two pressure detectors is equal to the preset normal pressure, the gas supply valves on the two gas supply pipes are kept open, and the intermediate valve on the intermediate pipe is closed to supply gas to the two coating chambers;

[0025] When the detection pressure on the first pressure detector is equal to the preset normal pressure, and the detection pressure on the second pressure detector is lower than the preset normal pressure, the gas supply valve on the first gas supply pipeline is opened, the gas supply valve on the second gas supply pipeline is closed, and the intermediate valve on the intermediate pipeline is opened to supply gas to the two coating chambers;

[0026] When the detection pressures on the two pressure detectors are lower than the preset normal pressure, fault information of the special gas cabinet is generated.

[0027] As described above, the special gas supply system and the special gas supply method of the present invention have the following beneficial effects: when a failure occurs in the special gas cabinet, the coating chamber can continue to work without stopping, thereby improving the operating efficiency of the special gas cabinet and the coating chamber. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 A schematic structural diagram of a special gas supply system provided in one embodiment of the present invention.

[0029] Figure 2 A schematic structural diagram of a special gas supply system provided in yet another embodiment of the present invention.

[0030] Figure 3 A schematic structural diagram of a special gas supply system provided in yet another embodiment of the present invention.

[0031] Figure 4 A schematic diagram of the steps of a special gas supply method provided in one embodiment of the present invention.

[0032] Marking Description

[0033] 10. Special gas cabinet; 20. Coating chamber; 30. Gas supply pipeline; 40. Gas supply valve; 50. Intermediate pipeline; 60. Intermediate valve; 70. Pressure detector; 80. Multi-way pipeline; 90. Pressure controller. DETAILED DESCRIPTION

[0034] The following describes the embodiments of the present invention by specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention. It should be noted that the following embodiments and features in the embodiments can be combined with each other without conflict.

[0035] It should be noted that the illustrations provided in the following embodiments are only schematic illustrations of the basic concept of the present invention, and thus the drawings only show components related to the present invention rather than being drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component may be changed arbitrarily, and the component layout may also be more complicated.

[0036] In the following description, numerous details are discussed to provide a more thorough explanation of the embodiments of the present invention. However, it is obvious to those skilled in the art that the embodiments of the present invention can be implemented without these specific details. In other embodiments, well-known structures and devices are shown in the form of block diagrams rather than in detail to avoid making the embodiments of the present invention difficult to understand.

[0037] See also Figures 1 to 4 The present invention proposes a special gas supply system and a special gas supply method, which can be applied to the field of gas supply from special gas cabinets to coating cabins. The special gas cabinet can not only supply gas to the corresponding coating cabin, but also supply gas to the coating cabin corresponding to the adjacent special gas cabinet when a failure occurs in the adjacent special gas cabinet. When a failure occurs in the special gas cabinet, the present invention can keep the coating cabin from shutting down and continue to work, thereby improving the operating efficiency of the special gas cabinet and the coating cabin. The following is a detailed description through specific embodiments.

[0038] See also Figure 1 In one embodiment of the present invention, a special gas supply system is provided, which may include a special gas cabinet 10, a coating chamber 20, a gas supply pipeline 30, a gas supply valve 40, an intermediate pipeline 50, and an intermediate valve 60.

[0039] Specifically, the special gas cabinet 10 supplies a specific gas to the coating chamber 20. After the gas enters the coating chamber 20, the specific components in the gas are deposited on the surface of the wafer to form a coating. The specific gas can be a mixed gas of nitrogen (N2) and water vapor, a mixed gas of nitrogen (N2) and trimethylaluminum (TMA), or nitrogen (N2) and ozone (O3).

[0040] Specifically, in this embodiment, the number of special gas cabinets 10 is set to at least two, the number of coating chambers 20 is set to at least two, and the coating chambers 20 are connected to the special gas cabinets 10 through the gas supply pipes 30. One special gas cabinet 10 is connected to one coating chamber 20, or one special gas cabinet 10 is connected to more than two coating chambers 20.

[0041] Specifically, the gas supply pipe 30 is provided with a gas supply valve 40, and the gas supply valve 40 can be in an open, closed or half-open state. For example, when the gas supply valve 40 is in an open or half-open state, the special gas cabinet 10 can supply gas to the coating chamber 20 through the gas supply pipe 30. When the gas supply valve 40 is in a closed state, the special gas cabinet 10 cannot supply gas to the coating chamber 20 through the gas supply pipe 30.

[0042] Specifically, the intermediate pipe 50 can be connected between the gas supply pipes 30 corresponding to two adjacent coating chambers 20, and the intermediate pipe 50 is connected to the gas supply pipes 30. In addition, an intermediate valve 60 is provided on the intermediate pipe 50, and the intermediate valve 60 can be in an open, closed or half-open state. The intermediate pipe 50 is located between the special gas cabinet 10 and the gas supply valve 40, or the intermediate pipe 50 is located between the gas supply valve 40 and the coating chamber 20.

[0043] For example, between two adjacent coating chambers 20, when the intermediate valve 60 is in an open or half-open state, the first special gas cabinet 10 can supply gas to the coating chamber 20 corresponding to the first special gas cabinet 10 through the gas supply pipeline 30, and the first special gas cabinet 10 can also supply gas to the coating chamber 20 corresponding to the second special gas cabinet 10 through the gas supply pipeline 30 and the intermediate pipeline 50. Similarly, the second special gas cabinet 10 can supply gas to the coating chamber 20 corresponding to the second special gas cabinet 10 through the gas supply pipeline 30, and the second special gas cabinet 10 can also supply gas to the coating chamber 20 corresponding to the first special gas cabinet 10 through the gas supply pipeline 30 and the intermediate pipeline 50.

[0044] Between two adjacent coating chambers 20, when the intermediate valve 60 is in the closed state, the first special gas cabinet 10 can only supply gas to the coating chamber 20 corresponding to the first special gas cabinet 10 through the gas supply pipeline 30, and cannot supply gas to the coating chamber 20 corresponding to the second special gas cabinet 10 through the intermediate pipeline 50. Similarly, the second special gas cabinet 10 can only supply gas to the coating chamber 20 corresponding to the second special gas cabinet 10 through the gas supply pipeline 30, and cannot supply gas to the coating chamber 20 corresponding to the first special gas cabinet 10 through the intermediate pipeline 50.

[0045] It can be seen that the technical solution in this embodiment can realize that the special gas cabinet 10 can supply gas to the corresponding coating chamber 20, and can also supply gas to the coating chamber 20 corresponding to the adjacent special gas cabinet 10 when a failure occurs in the adjacent special gas cabinet 10.

[0046] See also Figure 1 In one embodiment of the present invention, the special gas supply system further includes a multi-way pipe 80 , which is connected to the gas supply pipe 30 , and the gas supply pipe 30 is connected to the intermediate pipe 50 through the multi-way pipe 80 .

[0047] See also Figure 1 In one embodiment of the present invention, the special gas supply system further includes a pressure detector 70, which is disposed on the gas supply pipeline 30, and one special gas cabinet 10 is provided with a corresponding pressure detector 70. The pressure detector 70 is located on a side close to the special gas cabinet 10.

[0048] Specifically, by installing a pressure detector 70 on the gas supply pipeline 30 corresponding to the special gas cabinet 10, the pressure detector 70 can detect the air pressure in the gas supply pipeline 30 to analyze whether the gas supplied by the special gas cabinet 10 to the gas supply pipeline 30 is normal.

[0049] For example, when the gas pressure supplied by a special gas cabinet 10 to the gas supply pipeline 30 is normal, the gas supply valve 40 can be opened so that the special gas cabinet 10 supplies gas to the coating chamber 20 through the gas supply pipeline 30, and the intermediate valve 60 can be closed. When the gas pressure supplied by a special gas cabinet 10 to the gas supply pipeline 30 is abnormal, the gas supply valve 40 can be closed so that the special gas cabinet 10 no longer supplies gas to the coating chamber 20 through the gas supply pipeline 30, and the intermediate valve 60 can be opened so that the coating chamber 20 receives gas supplied by another special gas cabinet 10 through the intermediate pipeline 50.

[0050] See also Figure 1 In one embodiment of the present invention, the special gas supply system further includes a pressure controller 90, and the pressure detector 70 is electrically connected to the pressure controller 90. The gas supply valve 40 and the intermediate valve 60 are electromagnetic valves or pneumatic valves, and the pressure controller 90 is electrically connected to the gas supply valve 40 and the intermediate valve 60.

[0051] Specifically, after the pressure detector 70 detects the air pressure in the air supply pipe 30 , the pressure controller 90 can control the opening and closing of the air supply valve 40 and the intermediate valve 60 based on the indication on the pressure detector 70 .

[0052] For example, when the gas pressure supplied by a special gas cabinet 10 to the gas supply pipeline 30 is normal, the pressure detector 70 detects that the gas pressure in the gas supply pipeline 30 is normal. The pressure controller 90 can open the gas supply valve 40 based on the normal reading on the pressure detector 70, so that the special gas cabinet 10 supplies gas to the coating chamber 20 through the gas supply pipeline 30, and the intermediate valve 60 can be closed.

[0053] When the gas pressure supplied by a special gas cabinet 10 to the gas supply pipeline 30 is abnormal, the pressure detector 70 detects that the gas pressure in the gas supply pipeline 30 is abnormal. Based on the abnormal indication on the pressure detector 70, the pressure controller 90 can close the gas supply valve 40 so that the special gas cabinet 10 no longer supplies gas to the coating chamber 20 through the gas supply pipeline 30, and can open the intermediate valve 60 so that the coating chamber 20 receives the gas supplied by another special gas cabinet 10 through the intermediate pipeline 50.

[0054] See also Figure 1 In one embodiment of the present invention, on the air supply pipes 30 and the intermediate pipes 50 corresponding to two adjacent coating chambers 20, when the readings of the two pressure detectors 70 are the same, the two air supply valves 40 are in the open state and the intermediate valve 60 is in the closed state.

[0055] Specifically, between two adjacent coating chambers 20, since one special gas cabinet 10 is provided with a corresponding pressure detector 70, when the readings on the two pressure detectors 70 are the same, it indicates that the air pressure supplied by the two special gas cabinets 10 to the air supply pipeline 30 is normal. At this time, the air pressure in the air supply pipeline 30 detected by the two pressure detectors 70 is also normal.

[0056] See also Figure 1 In one embodiment of the present invention, on the air supply pipes 30 and the intermediate pipes 50 corresponding to two adjacent coating chambers 20, when the readings of the two pressure detectors 70 are different, the intermediate valve 60 is in an open state, one air supply valve 40 is in an open state, and the other air supply valve 40 is in a closed state.

[0057] Specifically, between two adjacent coating chambers 20, since a special gas cabinet 10 is provided with a corresponding pressure detector 70, when the readings on the two pressure detectors 70 are different, it indicates that the air pressure supplied by one of the special gas cabinets 10 to the air supply pipeline 30 is abnormal. At this time, the air pressure in the air supply pipeline 30 detected by the pressure detector 70 corresponding to the special gas cabinet 10 is also abnormal.

[0058] See also Figure 3 In one embodiment of the present invention, the special gas supply system further includes a multi-channel pipeline 80, one special gas cabinet 10 is correspondingly connected to at least one coating chamber 20, and the gas supply pipeline 30 is connected to at least one coating chamber 20 through the multi-channel pipeline 80. A sealing ring is provided at the connection between the multi-channel pipeline 80 and the gas supply pipeline 30.

[0059] Specifically, Figure 3As shown, a special gas cabinet 10 may be connected to a gas supply pipeline 30, and a pressure detector 70 may be provided on the gas supply pipeline 30. The pressure detector 70 is used to detect the air pressure in the gas supply pipeline 30. A gas supply valve 40 may be installed on the gas supply pipeline 30, and the gas supply valve 40 may be in an open / closed state. When the gas supply valve 40 is open, the special gas cabinet 10 can supply gas to the coating chamber 20.

[0060] Specifically, the pressure detector 70 may be connected to the pressure controller 90. When the pressure detector 70 detects that the air pressure of a special gas cabinet 10 is abnormal, the pressure controller 90 controls the air supply valve 40 corresponding to the special gas cabinet 10 to close, and controls the intermediate valve 60 to open. When the pressure detector 70 detects that the air pressure of a special gas cabinet 10 is normal, the pressure controller 90 controls the air supply valve 40 corresponding to the special gas cabinet 10 to open, and controls the intermediate valve 60 to close.

[0061] Specifically, one special gas cabinet 10 is connected to at least one coating chamber 20, and the gas supply pipe 30 is connected to at least one coating chamber 20 through a multi-way pipe 80. A sealing ring is provided at the connection between the multi-way pipe 80 and the gas supply pipe 30.

[0062] It can be seen that, by correspondingly connecting one special gas cabinet 10 to at least one coating chamber 20, and connecting an intermediate pipe 50 between the gas supply pipes 30 corresponding to two adjacent coating chambers 20, the intermediate pipe 50 is communicated with the gas supply pipe 30. This embodiment enables the special gas cabinet 10 to not only supply gas to its corresponding coating chamber 20, but also supply gas to the coating chamber 20 corresponding to the adjacent special gas cabinet 10 when a failure occurs in the adjacent special gas cabinet 10.

[0063] See also Figure 4 In one embodiment of the present invention, the present invention also proposes a special gas supply method, which may include the following steps.

[0064] Step S10: open the gas supply valves on the gas supply pipelines corresponding to the two special gas cabinets, and close the middle valve on the middle pipeline, so that the two special gas cabinets supply gas to the corresponding coating chambers.

[0065] Specifically, under normal circumstances, if both special gas cabinets 10 are normal, the two special gas cabinets 10 can supply gas to the corresponding coating chambers 20. For example, the first special gas cabinet 10 supplies gas to the first coating chamber 20, and the second special gas cabinet 10 supplies gas to the second coating chamber 20.

[0066] Step S20: Perform pressure detection on the gas supply pipelines corresponding to the two special gas cabinets through a pressure detector, and determine the size between the detection pressure on the pressure detector and the preset normal pressure.

[0067] Specifically, during the process of the special gas cabinet 10 supplying gas to the coating chamber 20, if the special gas cabinet 10 fails, it will affect the process technology of the coating chamber 20. Therefore, it is necessary to use the pressure detector 70 to perform real-time pressure detection on the gas supply pipes 30 corresponding to the two special gas cabinets 10.

[0068] Step S30, when the detection pressure on the two pressure detectors is equal to the preset normal pressure, keep the gas supply valves on the two gas supply pipes open, and close the middle valve on the middle pipe to supply gas to the two coating chambers.

[0069] Specifically, when the detection pressures on the two pressure detectors 70 are equal to the preset normal pressure, it indicates that the two special gas cabinets 10 are normal. Therefore, the two special gas cabinets 10 can be kept supplying gas to the corresponding coating chambers 20 .

[0070] Step S40, when the detection pressure on the first pressure detector is equal to the preset normal pressure, and the detection pressure on the second pressure detector is lower than the preset normal pressure, open the gas supply valve on the first gas supply pipeline, close the gas supply valve on the second gas supply pipeline, and open the middle valve on the middle pipeline to supply gas to the two coating chambers.

[0071] Specifically, when the detection pressure on the first pressure detector 70 is equal to the preset normal pressure, and the detection pressure on the second pressure detector 70 is less than the preset normal pressure, it means that the first special gas cabinet 10 is normal and the second special gas cabinet 10 is faulty. Therefore, the gas supply valve 40 on the first gas supply pipeline 30 is opened, the gas supply valve 40 on the second gas supply pipeline 30 is closed, and the intermediate valve 60 on the intermediate pipeline 50 is opened, so that the first special gas cabinet 10 supplies gas to the two coating chambers 20.

[0072] Step S50: When the detection pressure on the two pressure detectors is lower than the preset normal pressure, the fault information of the special gas cabinet is generated.

[0073] Specifically, when the detection pressure on the two pressure detectors 70 is lower than the preset normal pressure, it indicates that both special gas cabinets 10 are faulty, and thus fault information corresponding to the two special gas cabinets 10 can be generated.

[0074] It can be seen that, by correspondingly connecting one special gas cabinet 10 to at least one coating chamber 20, and connecting an intermediate pipe 50 between the gas supply pipes 30 corresponding to two adjacent coating chambers 20, the intermediate pipe 50 is communicated with the gas supply pipe 30. This embodiment enables the special gas cabinet 10 to not only supply gas to its corresponding coating chamber 20, but also supply gas to the coating chamber 20 corresponding to the adjacent special gas cabinet 10 when a failure occurs in the adjacent special gas cabinet 10.

[0075] In summary, the special gas supply system and the special gas supply method disclosed in the present invention can keep the coating chamber running without stopping and continue to work when the special gas cabinet fails, thereby improving the operating efficiency of the special gas cabinet and the coating chamber. Therefore, the present invention effectively overcomes various shortcomings in the prior art and has a high industrial utilization value.

[0076] The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Anyone familiar with the art may modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by a person of ordinary skill in the art without departing from the spirit and technical concept disclosed by the present invention shall still be covered by the claims of the present invention.

Claims

1. A special gas supply system, characterized in that: include: At least two special gas cabinets; At least two coating chambers, wherein the coating chambers are connected to the special gas cabinet via a gas supply pipeline; An air supply valve is arranged on the air supply pipeline; An intermediate pipeline is connected between the air supply pipelines corresponding to two adjacent coating chambers, and the intermediate pipeline is in communication with the air supply pipelines; An intermediate valve is arranged on the intermediate pipeline; wherein the intermediate pipeline is located between the special gas cabinet and the gas supply valve, or the intermediate pipeline is located between the gas supply valve and the coating chamber; A pressure detector is arranged on the gas supply pipeline, wherein one special gas cabinet corresponds to one pressure detector.

2. The special gas supply system according to claim 1, characterized in that: On the gas supply pipeline, the pressure detector is located on a side close to the special gas cabinet.

3. The special gas supply system according to claim 1, characterized in that: The special gas supply system further comprises a pressure controller, and the pressure detector is electrically connected to the pressure controller; The air supply valve and the intermediate valve are electromagnetic valves or pneumatic valves, and the pressure controller is electrically connected to the air supply valve and the intermediate valve.

4. The special gas supply system according to claim 1, characterized in that: On the air supply pipes and the intermediate pipes corresponding to the two adjacent coating chambers, when the indications of the two pressure detectors are the same, the two air supply valves are in the open state, and the intermediate valve is in the closed state.

5. The special gas supply system according to claim 1, characterized in that: On the air supply pipes and the intermediate pipes corresponding to the two adjacent coating chambers, when the indications of the two pressure detectors are different, the intermediate valve is in an open state, one of the air supply valves is in an open state, and the other air supply valve is in a closed state.

6. The special gas supply system according to claim 1, characterized in that: The diameter of the intermediate pipe is the same as the diameter of the air supply pipe.

7. The special gas supply system according to claim 1, characterized in that: The special gas supply system also includes a multi-way pipeline, which is connected to the gas supply pipeline, and the gas supply pipeline is connected to the intermediate pipeline through the multi-way pipeline.

8. The special gas supply system according to claim 1, characterized in that: The special gas supply system also includes a multi-way pipeline, one of the special gas cabinets is correspondingly connected to at least one of the coating chambers, and the gas supply pipeline is connected to at least one of the coating chambers through the multi-way pipeline.

9. The special gas supply system according to claim 1, characterized in that: A sealing ring is provided at the connection between the multi-way pipe and the air supply pipe.

10. A special gas supply method, using the special gas supply system according to any one of claims 1 to 9, characterized in that: include: Open the gas supply valves on the gas supply pipelines corresponding to the two special gas cabinets, and close the intermediate valve on the intermediate pipeline, so that the two special gas cabinets supply gas to the corresponding coating chambers; The pressure detector is used to detect the pressure of the gas supply pipelines corresponding to the two special gas cabinets, and the difference between the detection pressure on the pressure detector and the preset normal pressure is determined; When the detection pressure on the two pressure detectors is equal to the preset normal pressure, the gas supply valves on the two gas supply pipes are kept open, and the intermediate valve on the intermediate pipe is closed to supply gas to the two coating chambers; When the detection pressure on the first pressure detector is equal to the preset normal pressure, and the detection pressure on the second pressure detector is lower than the preset normal pressure, the gas supply valve on the first gas supply pipeline is opened, the gas supply valve on the second gas supply pipeline is closed, and the intermediate valve on the intermediate pipeline is opened to supply gas to the two coating chambers; When the detection pressures on the two pressure detectors are lower than the preset normal pressure, fault information of the special gas cabinet is generated.

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