Method and device for measuring volume flow rate of superheated water vapor, and heat treatment device

Abstract

Provided are a method for measuring the volumetric flow rate of superheated water vapor, a measuring device, and a heat treatment device, capable of measuring and monitoring the volumetric flow rate of superheated water vapor continuously supplied to the supply destination of superheated water vapor. Saturated water vapor or superheated water vapor is introduced into the first pipe (25). Saturated water vapor or superheated water vapor introduced into the first pipe (25) and passing through the first pipe (25) is adjusted to a predetermined temperature and to a predetermined pressure, so that the saturated water vapor or superheated water vapor is adjusted to a predetermined temperature and a predetermined pressure. The superheated water vapor adjusted to a predetermined temperature and a predetermined pressure is supplied to an area flow meter (27) connected to the first pipe (25), and the volume flow rate of the superheated water vapor passing through the area flow meter (27) is measured by the area flow meter (27). The superheated water vapor that has passed through the area flow meter (27) is introduced into a second pipe (28), and the superheated water vapor is supplied to the destination of the superheated water vapor via the second pipe (28).

Description

Technical Field

[0001] The present invention relates to a method for measuring the volume flow rate of superheated steam, a device for measuring the volume flow rate of superheated steam, and a heat treatment device having the device for measuring the volume flow rate of superheated steam. Background Art

[0002] It is known to heat a workpiece by heating it with superheated steam (for example, see Patent Document 1). Patent Document 1 discloses a steam reflux device 1 for heat-treating the workpiece by heating the workpiece carried into the heating furnace 2 with superheated steam continuously supplied into the heating furnace 2. The superheated steam continuously supplied to the heating furnace 2 is only measured in temperature by the temperature sensor 4.

[0003] When a heat treatment is performed on a workpiece using superheated steam, it is sometimes required to more accurately grasp the state of the atmosphere in the heat treatment chamber where the heat treatment is performed, depending on the type of heat treatment. In this case, it is preferable to be able to measure and monitor the volume flow rate of the superheated steam continuously supplied to the heat treatment chamber. However, in the steam reflux device 1 disclosed in Patent Document 1, only the temperature of the superheated steam supplied to the heating furnace 2 can be monitored, and the volume flow rate of the superheated steam cannot be measured and monitored.

[0004] As a method for measuring the amount of water vapor, the method disclosed in Patent Document 2 is known. In the measuring method disclosed in Patent Document 2, a gas with a known amount of water vapor is mixed with a high-temperature gas to be measured, the amount of water vapor in the mixed gas is made sufficiently smaller than that in the gas to be measured, the temperature of the mixed gas is lowered to a temperature at which the humidity can be measured using a hygrometer such as a wet-dry bulb hygrometer or a resistance hygrometer, and the amount of water vapor in the mixed gas is determined based on the measurement result of the hygrometer. Then, the mixing ratio of the gas to be measured and the gas with a known amount of water vapor is determined, and the amount of water vapor in the gas to be measured is determined based on the determined mixing ratio and the measured amount of water vapor in the mixed gas.

[0005] Patent Document 1: Japanese Patent Application Publication No. 2015-2325

[0006] Patent Document 2: Japanese Patent Application Laid-Open No. 53-93089

[0007] In the steam reflux device 1 disclosed in Patent Document 1, only the temperature of the superheated steam supplied to the heating furnace 2 as the supply destination of the superheated steam can be monitored, and the volume flow rate of the superheated steam cannot be measured and monitored. In addition, in the measurement method disclosed in Patent Document 2, the water vapor amount of the mixed gas is obtained by using a hygrometer after the gas to be measured is mixed with a gas with a known water vapor amount to lower the temperature, and the water vapor amount of the mixed gas is measured based on the water vapor amount of the mixed gas and the mixing ratio of the mixed gas. Therefore, the volume flow rate of the superheated steam continuously supplied to the supply destination of the superheated steam cannot be measured and monitored. Summary of the invention

[0008] An object of the present invention is to provide a method for measuring the volume flow rate of superheated steam, which can measure and monitor the volume flow rate of superheated steam continuously supplied to a supply destination of superheated steam, a device for measuring the volume flow rate of superheated steam, and a heat treatment device having the same.

[0009] (1) In order to solve the above-mentioned problems, a method for measuring a volume flow rate of superheated steam according to the present invention comprises the following steps: a steam introducing step of introducing saturated steam or superheated steam into a first pipe; a superheated steam regulating step of regulating the saturated steam or superheated steam introduced into the first pipe and passing through the first pipe to a predetermined temperature and a predetermined pressure, thereby making the saturated steam or superheated steam adjusted to the predetermined temperature and the predetermined pressure; a measuring step of supplying the superheated steam adjusted to the predetermined temperature and the predetermined pressure to an area flow meter connected to the first pipe, and measuring the volume flow rate of the superheated steam passing through the area flow meter by the area flow meter; and a supplying step of introducing the superheated steam passing through the area flow meter into a second pipe, and supplying the superheated steam to a supply destination of the superheated steam through the second pipe.

[0010] (2) In the measuring method, the second pipe is provided with a pressure regulating valve, and the pressure regulating valve is adjusted so as to maintain the superheated water steam supplied to the area flow meter through the first pipe at the prescribed pressure. In the superheated water steam regulating step, the superheated water steam supplied to the area flow meter through the first pipe is regulated to the prescribed pressure by the pressure regulating valve.

[0011] (3) In the measuring method, in the superheated steam adjustment step, the first pipe is heated by a heater provided in the first pipe, thereby heating the saturated steam or superheated steam passing through the first pipe to the predetermined temperature, thereby making the saturated steam or superheated steam adjusted to the predetermined temperature.

[0012] (4) In order to solve the above-mentioned problems, a device for measuring a volume flow rate of superheated water steam according to the present invention comprises: a first pipe into which saturated water steam or superheated water steam is introduced; a superheated water steam adjustment unit that adjusts the saturated water steam or superheated water steam introduced into the first pipe and passing through the first pipe to a predetermined temperature and a predetermined pressure, thereby making the saturated water steam or superheated water steam adjusted to the predetermined temperature and the predetermined pressure; an area flowmeter that is connected to the first pipe, is supplied with the superheated water steam adjusted to the predetermined temperature and the predetermined pressure, and measures the volume flow rate of the superheated water steam that passes through the first pipe; and a second pipe into which the superheated water steam that passes through the area flowmeter is introduced, and supplies the superheated water steam to a supply destination of the superheated water steam.

[0013] (5) In the measuring device, the superheated water steam adjusting unit includes a pressure adjusting valve, which is provided in the second pipe and is adjusted so as to maintain the superheated water steam supplied to the area flow meter through the first pipe at the specified pressure. The superheated water steam adjusting unit adjusts the superheated water steam supplied to the area flow meter through the first pipe to the specified pressure using the pressure adjusting valve.

[0014] (6) In the measuring device, the superheated water steam adjustment unit includes a heater provided in the first pipe, and the first pipe is heated by the heater, thereby heating the saturated water steam or superheated water steam passing through the first pipe to the predetermined temperature, thereby making it the superheated water steam adjusted to the predetermined temperature.

[0015] (7) In order to solve the above-mentioned problems, the heat treatment device of the present invention utilizes superheated water vapor to heat the object to be treated so as to perform heat treatment on the object to be treated, and the heat treatment device comprises: a heat treatment chamber which performs heat treatment on the object to be treated; and a device for measuring the volume flow rate of the superheated water vapor, wherein the superheated water vapor provided through the second piping is introduced into the heat treatment chamber.

[0016] According to the present invention, the volume flow rate of superheated steam continuously supplied to a supply destination of superheated steam can be measured and monitored. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a diagram schematically showing a heat treatment apparatus according to an embodiment of the present invention.

[0018] Figure 2 is a schematic cross-sectional view of a portion of a heat treatment device, showing Figure 1 The diagram shows the state observed at the position of the arrow on line AA.

[0019] Figure 3is a schematic cross-sectional view of a portion of a heat treatment device, showing Figure 1 The diagram shows the state observed at the arrow position of the BB line.

[0020] Figure 4 It is a diagram showing a device for measuring the volume flow rate of superheated water steam according to an embodiment of the present invention.

[0021] Figure 5 This is a diagram schematically showing a first pipe and a heater in a device for measuring a volume flow rate of superheated steam.

[0022] Figure 6 (A) is a cross-sectional view schematically showing the main parts of the area flow meter, Figure 6 (B) is Figure 6 A cross-sectional view taken at the position of the arrow on line CC of (A).

[0023] Figure 7 This is a flowchart for explaining a method for measuring the volume flow rate of superheated water steam according to an embodiment of the present invention.

[0024] Description of symbols

[0025] 1: heat treatment device; 10: device for measuring the volume flow rate of superheated steam; 11: heat treatment chamber (destination for supplying superheated steam); 25: first piping; 26: superheated steam adjustment unit; 27: area flow meter; 28: second piping; 29: heater; 30: pressure regulating valve; S1: water vapor introduction process; S2: superheated steam adjustment process; S3: measuring process; S4: supply process. DETAILED DESCRIPTION

[0026] Hereinafter, a mode for carrying out the present invention will be described with reference to the accompanying drawings. The present invention can be widely applied to various applications as a method for measuring the volume flow rate of superheated steam, a device for measuring the volume flow rate of superheated steam, and a heat treatment device having the device for measuring the volume flow rate of superheated steam. In the following description, first, a heat treatment device and a device for measuring the volume flow rate of superheated steam according to an embodiment of the present invention will be described, and then a method for measuring the volume flow rate of superheated steam according to an embodiment of the present invention will be described.

[0027] [Heat treatment equipment]

[0028] Figure 1: is a diagram schematically showing a heat treatment device 1 according to an embodiment of the present invention. The heat treatment device 1 is configured as a device for, for example, performing heat treatment on a ceramic or metal object 100 by heating the object 100 using superheated water vapor. Examples of the ceramic object 100 include ceramic electronic components such as a laminated ceramic capacitor. In addition, superheated water vapor is water vapor heated to a temperature higher than the boiling point, and is dry water vapor having a temperature higher than the boiling point. The heat treatment device 1 has a heat treatment chamber 11, which is provided with an inlet 18 for carrying in the object 100 and an outlet 19 for carrying out the object 100. Moreover, in the heat treatment device 1, the object 100 is heated by the superheated water vapor while being transported from the inlet 18 toward the outlet 19 in the heat treatment chamber 11, and the heat treatment of the object 100 is performed. As examples of heat treatment of the object 100 using superheated water vapor in the heat treatment device 1, a degreasing treatment and a sintering treatment can be exemplified.

[0029] When degreasing treatment is performed in the heat treatment apparatus 1, the object 100 to be treated, which has been subjected to machining or the like in the treatment process before the treatment in the heat treatment apparatus 1, is carried into the heat treatment apparatus 1. Then, in the heat treatment apparatus 1, grease attached to the object 100 is heated by superheated water vapor and vaporized, and removed from the object 100. In addition, when sintering treatment is performed in the heat treatment apparatus 1, the object 100, which is a sintered material bonded by a binder containing a grease component, is carried into the heat treatment apparatus 1. Then, in the heat treatment apparatus 1, the object 100 is heated by superheated water vapor to vaporize and remove the binder, and then, the object 100 from which the binder has been removed is further heated by superheated water vapor, thereby sintering.

[0030] In the heat treatment apparatus 1, the object 100 is carried into the heat treatment chamber 11, and is heated by superheated water vapor while being transported in the heat treatment chamber 11. Thus, the object 100 is heat treated. Then, the object 100 after the heat treatment in the heat treatment chamber 11 is carried out from the heat treatment chamber 11. In addition, the object 100 is continuously transported to the heat treatment chamber 11, heat-treated while being continuously transported in the heat treatment chamber 11, and continuously carried out from the heat treatment chamber 11.

[0031] In addition, when the object 100 is carried into the heat treatment chamber 11, it is carried in, for example, in a state in which it is arranged in a shell 100a formed into a thin box shape. In the shell 100a, a plurality of objects 100 are stored in a state in which they are arranged in a manner that is expanded at approximately equal intervals. Moreover, the object 100 is carried into the heat treatment chamber 11 in a state in which it is arranged in the shell 100a. In addition, in the shell 100a in which a plurality of objects 100 are stored, a plurality of holes, for example, formed on the surrounding side surfaces and the bottom surface, and an opening formed on the upper surface are provided so that the surrounding gas can pass through almost without resistance. Thus, the superheated water vapor of the atmosphere in the heat treatment chamber 11 is formed in the shell 100a and flows. In addition, the shell 100a can be formed by a mesh component as long as it is a structure that enables the superheated water vapor of the atmosphere in the heat treatment chamber 11 to flow through the shell 100a in a manner that is approximately without resistance.

[0032] The heat treatment apparatus 1 includes a heat treatment chamber 11, a heating mechanism 12, a steam supply unit 13, a steam generator 14, a steam discharge unit 15, a gas supply unit 16, a gas curtain unit 17, a superheated steam volume flow rate measuring device 10, and the like.

[0033] The heat treatment chamber 11 has a tunnel-like shape extending in a straight line in a cylindrical shape, and constitutes a chamber for conveying the object 100 to be treated and performing heat treatment on the object 100. The interior of the heat treatment chamber 11 becomes a processing space for performing heat treatment on the object 100. The conveying direction of the object 100, that is, the direction in which the object 100 is conveyed in the heat treatment chamber 11, is a direction parallel to the longitudinal direction of the heat treatment chamber 11 extending in a cylindrical shape. Figure 1 In the figure, the conveying direction of the processed object 100 is indicated by a dashed arrow X1, which is hereinafter referred to as the conveying direction X1.

[0034] Figure 2 is a schematic cross-sectional view of a portion of the heat treatment device 1, showing Figure 1 The diagram shows the state observed at the position of the arrow on line AA. Figure 3 is a schematic cross-sectional view of a portion of the heat treatment device 1, showing Figure 1 The state observed at the arrow position of the BB line. Figures 1 to 3The heat treatment chamber 11 has a pair of side walls (11a, 11b), a top wall 11c and a bottom wall 11d. The pair of side walls (11a, 11b), the top wall 11c and the bottom wall 11d of the heat treatment chamber 11 are formed by plate-like components made of steel. The heat treatment chamber 11 is formed by plate-like components made of steel, and is thus configured to easily conduct heat from a heating mechanism 12 described later that heats the heat treatment chamber 11 from the outside. A pair of side walls (11a, 11b) are arranged in parallel, and are both provided as wall portions extending along the up-down direction and the conveying direction X1. The top wall 11c is provided as a wall portion that divides the top surface portion of the upper part of the heat treatment chamber 11, and is provided in a manner that the upper ends of the pair of side walls (11a, 11b) are integrally combined. In addition, the top wall 11c is formed to extend in an arched shape in a section perpendicular to the conveying direction X1. The bottom wall 11 d is provided as a wall portion that partitions the bottom portion of the heat treatment chamber 11 , and is provided so as to integrally connect the lower end portions of the pair of side walls ( 11 a , 11 b ).

[0035] The entrance 18 of the heat treatment chamber 11 is provided as an opening for carrying in the object to be processed 100 in the heat treatment chamber 11. The entrance 18 is provided as an opening at one end in a direction parallel to the conveying direction X1 in the heat treatment chamber 11, and is opened at the end on the upstream side of the conveying direction X1 in the heat treatment chamber 11. The entrance 18 is open to the outside of the heat treatment chamber 11, and no door is provided, and it is always open to the outside. In addition, the object to be processed 100 is carried into the heat treatment chamber 11 from the entrance 18 in a state of being accommodated in the housing 100a.

[0036] The outlet 19 of the heat treatment chamber 11 is provided as an opening for carrying out the processed object 100 in the heat treatment chamber 11. The outlet 19 is provided as an opening at the end opposite to the end located on the side of the inlet 18 in a direction parallel to the conveying direction X1 in the heat treatment chamber 11, and is opened at the end on the downstream side of the conveying direction X1 in the heat treatment chamber 11. The outlet 19 is open to the outside of the heat treatment chamber 11, and no door is provided, and it is always open to the outside. In addition, the processed object 100 is carried out from the outlet 19 to the outside of the heat treatment chamber 11 in a state accommodated in the housing 100a.

[0037] In the heat treatment chamber 11, the object 100 is heated by the superheated water vapor supplied from the water vapor supplying section 13 described later, and the heat treatment chamber 11 is heated by the heating mechanism 12 described later that heats the heat treatment chamber 11 from the outside, so that the object 100 is also heated by the atmosphere in the heat treatment chamber 11 heated via the heat treatment chamber 11. In addition, in the heat treatment chamber 11, the heating of the object 100 by the heat from the heating mechanism 12 is performed in the region where the heating mechanism 12 is arranged in the conveying direction X1. Moreover, the heating of the object 100 by the superheated water vapor is performed in the region where the atmosphere in the heat treatment chamber 11 contains the superheated water vapor. In the present embodiment, the region in the heat treatment chamber 11 where the object 100 is heated by the superheated water vapor is a region from the water vapor supplying section 13 to the water vapor discharge section 15a on the inlet side of the water vapor discharge section 15 described later, and a region from the water vapor supplying section 13 to the water vapor discharge section 15b on the outlet side of the water vapor discharge section 15 described later.

[0038] In addition, a conveying mechanism 20 is provided in the heat treatment chamber 11. The conveying mechanism 20 is provided as a mechanism for conveying the object to be processed 100 in the heat treatment chamber 11. In addition, in the present embodiment, the conveying mechanism 20 is configured to convey the object to be processed 100 together with the shell 100a, that is, to convey the object to be processed 100 in a state of being accommodated in the shell 100a. The conveying mechanism 20 is arranged in the lower area in the heat treatment chamber 11, and is arranged above the bottom wall 11d and parallel to the wall surface of the bottom wall 11d along the conveying direction X1. The conveying mechanism 20 is, for example, configured to convey the object to be processed 100 by an annular mesh belt 21 that performs a circling operation. Moreover, the conveying mechanism 20 is configured to convey the object to be processed 100 accommodated in the shell 100a arranged on the upper surface of the mesh belt 21 together with the shell 100a by causing the mesh belt 21 to perform a circling operation.

[0039] In addition, the endless mesh belt 21 has a structure in which roller chains are respectively provided at both edges in the width direction thereof, and is configured to be driven and circulated by a plurality of drive shafts 22 provided with sprockets meshing with the roller chains. The plurality of drive shafts 22 are arranged in a manner that they rotate around the axis while being inserted through the inner side of the mesh belt 21. The plurality of drive shafts 22 are arranged in a manner that they extend in parallel to each other and in a manner that they extend in a direction perpendicular to a pair of side walls (11a, 11b). In addition, each drive shaft 22 is rotatably supported on a pair of side walls (11a, 11b). In addition, a pair of sprockets (22a, 22a) separated in the axial direction are provided on each drive shaft 22, and each sprocket 22a meshes with each roller chain at both edges of the mesh belt 21. In addition, at least one of the plurality of drive shafts 22 is configured to be rotationally driven by an electric motor (not shown). When the drive shaft 22 is driven to rotate by the electric motor, the rotation drive of the drive shaft 22 is transmitted to the mesh belt 21 via the meshing of the sprocket 22a and the roller chain. Then, the mesh belt 21, which is freely supported by the plurality of drive shafts 22, performs a revolving operation. When the mesh belt 21 performs the revolving operation, the processed object 100, which is arranged on the upper surface of the mesh belt 21 in a state of being accommodated in the housing 100a, is conveyed.

[0040] Reference Figure 1 The heating mechanism 12 is provided as a mechanism for heating the heat treatment chamber 11 from the outside, and a plurality of heating mechanisms 12 are provided. The plurality of heating mechanisms 12 are arranged in series along the length direction of the heat treatment chamber 11 (i.e., along the conveying direction X1). Figure 2 and Figure 3 In the figure, the illustration of the heating mechanism 12 is omitted. Each heating mechanism 12 is configured to have: a heating element (omitted from the figure), which is arranged around the heat treatment chamber 11; and a heat insulating member (omitted from the figure), which is arranged in a manner to cover the periphery of the heat treatment chamber 11 and the heating element on the outer side of the heating element arranged around the heat treatment chamber 11. The heating element is arranged in a manner to heat a pair of side walls (11a, 11b), a top wall 11c, and a bottom wall 11d in the heat treatment chamber 11 from the outside. The heating element is, for example, configured to have an electric heating element that converts electric energy provided from a power source (omitted from the figure) into thermal energy, and generates heat by energizing the electric heating element. When the heating element of the heating mechanism 12 operates and generates heat, the pair of side walls (11a, 11b), the top wall 11c, and the bottom wall 11d of the heat treatment chamber 11 are heated by the heat from the heating element of the heating mechanism 12. As a result, the atmosphere in the heat treatment chamber 11 is heated. The object 100 conveyed in the heat treatment chamber 11 is heated by the superheated steam and is also heated by the atmosphere in the heat treatment chamber 11 heated by the heat from the heating mechanism 12 .

[0041] Reference Figure 1 and Figure 2The water vapor supply unit 13 is provided in the heat treatment chamber 11 as a mechanism for supplying superheated water vapor into the heat treatment chamber 11. In the heat treatment apparatus 1 illustrated in the present embodiment, the water vapor supply unit 13 is provided at a substantially central portion of the conveying direction X1 of the object to be treated 100 in the heat treatment chamber 11. In addition, the water vapor supply unit 13 may be provided in the heat treatment chamber 11 at a position closer to the inlet 18 side or the outlet 19 side than the central portion in the conveying direction X1.

[0042] The water vapor supply unit 13 has a nozzle unit 23 for supplying the superheated water vapor supplied from the measuring device 10 for measuring the volume flow rate of the superheated water vapor described later into the heat treatment chamber 11. The nozzle unit 23 is provided, for example, as a member extending in a cylindrical shape and having both ends in the cylindrical axis direction closed. The nozzle unit 23 is arranged in the heat treatment chamber 11 in a state where the cylindrical axis direction thereof extends horizontally along the width direction of the heat treatment chamber 11. The width direction of the heat treatment chamber 11 is defined as a direction perpendicular to the length direction (i.e., the conveying direction X1) of the heat treatment chamber 11 extending horizontally and the height direction (i.e., the up-down direction) of the heat treatment chamber 11.

[0043] In addition, the nozzle portion 23 is connected to the second pipe 29 of the measuring device 10 of the volume flow rate of superheated water steam described later at a substantially central position in the cylindrical axis direction thereof. The second pipe 29 described later penetrates the ceiling 11c of the heat treatment chamber 11 and is connected to the nozzle portion 23 in the heat treatment chamber 11. The inside of the nozzle portion 23 is communicated with the inside of the second pipe 29, and the superheated water steam supplied from the second pipe 29 is supplied to the inside of the nozzle portion 23. In addition, a plurality of nozzle holes 23a opening toward the upstream side and the downstream side of the conveying direction X1 are provided on the nozzle portion 23. Each nozzle hole 23a is provided as a through hole opening in a circular shape, for example. In addition, the opening shape of each nozzle hole 23a is not limited to a circular shape, and may be formed in various shapes such as a rectangular shape and a slit shape.

[0044] The plurality of nozzle holes 23a are formed so as to be provided on both sides of the nozzle portion 23 in the conveying direction X1 and open toward the upstream side and the downstream side of the conveying direction X1, respectively. In addition, the plurality of nozzle holes 23a are arranged linearly along the cylindrical axial direction of the nozzle portion 23 on the upstream side and the downstream side of the conveying direction X1, respectively, for example, arranged at equal intervals. In addition, the cylindrical axial direction of the nozzle portion 23 is along the width direction of the heat treatment chamber 11, so the plurality of nozzle holes 23a in the nozzle portion 23 are arranged along the width direction of the heat treatment chamber 11. The superheated water steam supplied from the second pipe 29 to the nozzle portion 23 fills the nozzle portion 23 and then sprays out from the plurality of nozzle holes 23a to the outside. By spraying the superheated water steam from the plurality of nozzle holes 23a, the superheated water steam is supplied from the nozzle portion 23 to the heat treatment chamber 11. By providing the above-mentioned steam supplying portion 13 in the heat treatment chamber 11, the heat treatment chamber 11 is configured to be able to introduce the superheated water steam supplied through the second pipe 29 of the measuring device 10 for the volume flow rate of the superheated water steam described later.

[0045] Reference Figure 1 and Figure 3 The water vapor exhaust part 15 is provided as a mechanism for exhausting the superheated water vapor in the heat treatment chamber 11 to the outside of the heat treatment chamber 11. And, the water vapor exhaust part 15 is provided at the inlet 18 side and the outlet 19 side of the water vapor supply part 13 in the heat treatment chamber 11. An inlet-side water vapor exhaust part 15a is provided as the water vapor exhaust part 15 on the inlet 18 side of the heat treatment chamber 11. An outlet-side water vapor exhaust part 15b is provided as the water vapor exhaust part 15 on the outlet 19 side of the heat treatment chamber 11. In addition, in the present embodiment, the inlet-side water vapor exhaust part 15a is arranged in the heat treatment chamber 11 at a position corresponding to the heating mechanism 12 arranged closest to the inlet 18 side among the plurality of heating mechanisms 12 arranged along the conveying direction X1. And, the outlet-side water vapor exhaust part 15b is arranged in the heat treatment chamber 11 at a position corresponding to the heating mechanism 12 arranged closest to the outlet 19 side among the plurality of heating mechanisms 12 arranged along the conveying direction X1. In addition, the inlet side water vapor exhaust portion 15a and the outlet side water vapor exhaust portion 15b are arranged in the area on the top wall 11c side, that is, the upper half side in the cross section perpendicular to the conveying direction X1 of the heat treatment chamber 11, in each area on the inlet 18 side and the outlet 19 side of the heat treatment chamber 11.

[0046] The inlet-side water vapor exhaust portion 15a and the outlet-side water vapor exhaust portion 15b are similarly configured to be hollow box-shaped and extend in the width direction of the heat treatment chamber 11. The inlet-side water vapor exhaust portion 15a and the outlet-side water vapor exhaust portion 15b are respectively configured to have: an upper wall 24a extending in an arch shape along the top wall 11c in a cross section perpendicular to the conveying direction X1; a lower wall 24b extending horizontally; and a pair of side walls extending along the cross section perpendicular to the conveying direction X1. Thus, the hollow area inside each of the inlet-side water vapor exhaust portion 15a and the outlet-side water vapor exhaust portion 15b is formed into a circular arc-shaped dome-shaped hollow area surrounded by the upper wall 24a, the lower wall 24b and the pair of side walls.

[0047] In addition, a plurality of through holes (not shown in the figure) for sucking in superheated water vapor are provided on the lower wall 24b of each of the inlet-side water vapor exhaust portion 15a and the outlet-side water vapor exhaust portion 15b. The superheated water vapor is sucked in from the inlet-side water vapor exhaust portion 15a and the outlet-side water vapor exhaust portion 15b, respectively, and discharged from the heat treatment chamber 11. In addition, the inlet-side water vapor exhaust portion 15a and the outlet-side water vapor exhaust portion 15b are respectively connected to a water vapor exhaust system (not shown in the figure) that sucks in superheated water vapor from the inlet-side water vapor exhaust portion 15a and the outlet-side water vapor exhaust portion 15b and discharges the superheated water vapor to the outside of the heat treatment chamber 11. The water vapor exhaust system includes a water vapor exhaust pipe (not shown in the figure) and an ejector (not shown in the figure) connected to the inlet-side water vapor exhaust portion 15a and the outlet-side water vapor exhaust portion 15b, respectively. The ejector is provided as a mechanism for generating negative pressure using high-pressure fluid to draw superheated steam from the inlet-side steam discharge portion 15a and the outlet-side steam discharge portion 15b through the steam discharge pipe and discharge the drawn superheated steam to the outside.

[0048] Reference Figure 1 and Figure 3 The gas supply unit 16 is provided as a mechanism for supplying at least one of an inert gas and air into the heat treatment chamber 11. That is, the gas supply unit 16 is provided as a mechanism for supplying an inert gas such as nitrogen into the heat treatment chamber 11, or as a mechanism for supplying air into the heat treatment chamber 11, or as a mechanism for supplying a mixed gas of an inert gas and air into the heat treatment chamber 11. In the heat treatment apparatus 1, as the gas supply unit 16, an inlet-side gas supply unit 16a and an outlet-side gas supply unit 16b are provided. The inlet-side gas supply unit 16a is provided in the heat treatment chamber 11 at a position closer to the inlet 18 side than the inlet-side water vapor exhaust unit 15a provided at the inlet 18 side relative to the water vapor supply unit 13. The outlet-side gas supply unit 16b is provided in the heat treatment chamber 11 at a position closer to the outlet 19 side than the outlet-side water vapor exhaust unit 15b provided at the outlet 19 side relative to the water vapor supply unit 13.

[0049] The inlet-side gas supply part 16a and the outlet-side gas supply part 16b are similarly configured, for example, as a component extending in a cylindrical shape and having both ends in the cylindrical axis direction closed. The inlet-side gas supply part 16a and the outlet-side gas supply part 16b are respectively arranged in the heat treatment chamber 11 in a state where the cylindrical axis direction thereof extends horizontally along the width direction of the heat treatment chamber 11. The inlet-side gas supply part 16a and the outlet-side gas supply part 16b are respectively connected to a gas supply system (not shown) that provides a gas as an inert gas or air at a substantially central position in the cylindrical axis direction thereof. Gas is supplied from the gas supply system to the interior of each of the inlet-side gas supply part 16a and the outlet-side gas supply part 16b. In addition, a plurality of nozzle holes (not shown) are respectively provided on the inlet-side gas supply part 16a and the outlet-side gas supply part 16b. The plurality of nozzle holes are respectively arranged in a straight line along the cylindrical axis direction thereof in the inlet-side gas supply part 16a and the outlet-side gas supply part 16b, for example, arranged at equal intervals. In addition, the plurality of nozzle holes arranged along the cylindrical axis direction in the inlet gas supply part 16a and the outlet gas supply part 16b are open downward, so that the inert gas is ejected downward from the inlet gas supply part 16a and the outlet gas supply part 16b.

[0050] According to the above-mentioned structure, the gas supplied to the inlet-side gas supply part 16a and the outlet-side gas supply part 16b is ejected downward from the plurality of nozzle holes and supplied into the heat treatment chamber 11. Furthermore, the gas is supplied from the inlet-side gas supply part 16a provided on the inlet 18 side relative to the inlet-side water vapor exhaust part 15a, so that the atmosphere in the heat treatment chamber 11 is separated between the inlet 18 and the inlet-side water vapor exhaust part 15a. In addition, the gas is supplied from the outlet-side gas supply part 16b provided on the outlet 19 side relative to the outlet-side water vapor exhaust part 15b, so that the atmosphere in the heat treatment chamber 11 is separated between the outlet 19 and the outlet-side water vapor exhaust part 15b.

[0051] Reference Figure 1 The gas curtain 17 is provided as a mechanism for spraying the inert gas in a manner that forms a region where the inert gas spreads in a curtain shape at the end on the inlet 18 side and the end on the outlet 19 side of the heat treatment chamber 11. An inlet gas curtain 17a is provided as the gas curtain 17 at the end on the inlet 18 side of the heat treatment chamber 11, and an outlet gas curtain 17b is provided as the gas curtain 17 at the end on the outlet 19 side of the heat treatment chamber 11.

[0052] The inlet gas curtain 17a and the outlet gas curtain 17b are each formed in a hollow box shape and have a gas supply box to which an inert gas is supplied from an inert gas supply source (not shown). The gas supply box of the inlet gas curtain 17a is provided at the end of the inlet 18 side of the heat treatment chamber 11, and the gas supply box of the outlet gas curtain 17b is provided at the end of the outlet 19 side of the heat treatment chamber 11. A plurality of injection holes connected to the inside of the heat treatment chamber 11 are provided on each of the gas supply boxes of the inlet gas curtain 17a and the outlet gas curtain 17b. Moreover, the plurality of injection holes provided in each gas supply box are configured to inject the inert gas supplied from the inert gas supply source into the inside of the heat treatment chamber 11. In addition, the plurality of injection holes of the gas supply boxes of the inlet gas curtain 17a and the outlet gas curtain 17b inject the inert gas in a manner that the inert gas spreads in a curtain shape in a direction parallel to the opening surface of the inlet 18 and the outlet 19. By spraying inert gas in a curtain shape from the inlet gas curtain 17a and the outlet gas curtain 17b at the ends on the inlet 18 side and the outlet 19 side of the heat treatment chamber 11, the atmosphere of the inner area and the outer area of ​​the heat treatment chamber 11 are separated near the inlet 18 and the outlet 19 of the heat treatment chamber 11.

[0053] Reference Figure 1 The steam generator 14 is provided as a mechanism for generating saturated steam or superheated steam. When the steam generator 14 is provided as a mechanism for generating saturated steam, the steam generator 14 is configured to include a boiler. In this case, the steam generator 14 is configured to heat water in the boiler to evaporate it and generate saturated steam at a temperature around the boiling point. When the steam generator 14 is provided as a mechanism for generating superheated steam, the steam generator 14 is configured to include a boiler and a superheater. In this case, the steam generator 14 heats water in the boiler to evaporate it and generate saturated steam at a temperature around the boiling point, and further heats the saturated steam generated in the boiler by the superheater to generate superheated steam. The saturated steam or superheated steam generated by the steam generator 14 is transported to the device 10 for measuring the volume flow rate of superheated steam.

[0054] Figure 4 1 is a diagram showing a volume flow rate measuring device 10 of superheated steam according to an embodiment of the present invention. In the following description, the volume flow rate measuring device 10 of superheated steam is also simply referred to as a measuring device 10. Figure 1 and Figure 4The measuring device 10 of the heat treatment device 1 is connected to the steam generator 14, and the saturated steam or superheated steam generated by the steam generator 14 is introduced. Moreover, the measuring device 10 is configured to adjust the introduced saturated steam or superheated steam to a predetermined temperature and a predetermined pressure, so as to make it superheated steam adjusted to a predetermined temperature and a predetermined pressure. Moreover, the measuring device 10 is configured to measure the volume flow rate of the superheated steam adjusted to a predetermined temperature and a predetermined pressure, and to provide the superheated steam after the measured volume flow rate to the steam supply unit 13. The measuring device 10 for the volume flow rate of the superheated steam will be described in further detail below.

[0055] [Device for measuring the volume flow rate of superheated steam]

[0056] Reference Figure 1 and Figure 4 The measuring device 10 of the volume flow rate of superheated water steam according to the embodiment of the present invention is provided in the heat treatment device 1. The measuring device 10 adjusts the saturated water steam or superheated water steam generated by the water steam generator 14 to a predetermined temperature and a predetermined pressure, and makes it into superheated water steam of a predetermined temperature and a predetermined pressure, measures the volume flow rate, and supplies it to the water steam supply unit 13. The superheated water steam whose volume flow rate is measured by the measuring device 10 is supplied to the water steam supply unit 13, and the superheated water steam whose volume flow rate is monitored is introduced into the heat treatment chamber 11. The measuring device 10 is configured to include a first pipe 25, a superheated water steam adjustment unit 26, an area flow meter 27, a second pipe 28, and the like.

[0057] Reference Figure 1 and Figure 4 The first pipe 25 is connected to the steam generator 14 and is configured as a pipe for introducing the saturated steam or superheated steam generated by the steam generator 14. The first pipe 25 is configured as a metal pipe, for example, and is configured to be heated from the surrounding by a heater 29 of a superheated steam adjustment unit 26 described later. The saturated steam or superheated steam introduced from the steam generator 14 to the first pipe 25 is heated by the first pipe 25 heated by the heater 29 while flowing in the first pipe 25, and the temperature is adjusted so as to become superheated steam of a predetermined temperature.

[0058] In addition, when saturated steam is introduced from the steam generator 14 to the first pipe 25, the introduced saturated steam is heated to become superheated steam while flowing in the first pipe 25, and further heated to become superheated steam at a predetermined temperature while flowing in the first pipe 25. In addition, when superheated steam is introduced from the steam generator 14 to the first pipe 25, the introduced superheated steam is heated to become superheated steam at a predetermined temperature while flowing in the first pipe 25.

[0059] Reference Figure 1 and Figure 4 The superheated steam regulator 26 is configured as a mechanism that heats the saturated steam or superheated steam introduced into the first pipe 25 and passes through the first pipe 25 to a predetermined temperature, adjusts the temperature to a predetermined temperature, and adjusts the pressure to a predetermined pressure, thereby making it superheated steam of a predetermined temperature and a predetermined pressure. In this embodiment, the superheated steam regulator 26 is configured to include a heater 29, a pressure regulating valve 30, a temperature sensor 31, a pressure sensor 32, and a controller 33.

[0060] Figure 5 2 is a diagram schematically showing the first pipe 25 and the heater 29 in the measuring device 10. Figure 4 and Figure 5 The heater 29 of the superheated water steam adjustment unit 26 is provided on the first pipe 25, and is configured to heat the saturated water steam and the superheated water steam passing through the first pipe 25 by heating the first pipe 25. Moreover, the superheated water steam adjustment unit 26 is configured to heat the first pipe 25 by the heater 29, thereby heating the saturated water steam or the superheated water steam passing through the first pipe 25 to a predetermined temperature and making it become the superheated water steam adjusted to the predetermined temperature. In addition, in the present embodiment, the heater 29 is configured to be provided around the first pipe 25, and heat the first pipe 25 from the outside.

[0061] The heater 29 includes a heating element 34 which is arranged around the first pipe 25 in a manner of spirally winding around the outer circumference of the first pipe 25, and a heat-insulating shell 35 which surrounds the first pipe 25 and the heating element 34. The heating element 34 is configured to generate heat and output it by being energized, and heats the first pipe 25 to heat the saturated steam and superheated steam flowing in the first pipe 25. The heating element 34 of the heater 29 is connected to a power source (not shown), and the power supplied from the heater 29 to the heating element 34 is controlled by the controller 33. By controlling the power supplied to the heater 29 by the controller 33, the superheated steam flowing in the first pipe 25 while being heated by the heater 29 is heated to a predetermined temperature. The heat-insulating shell 35 is arranged so as to surround the first pipe 25 and the heating element 34 and cover the first pipe 25 and the heating element 34, and is configured to keep the first pipe 25 heated by the heating element 34 warm. For example, the heat-insulating shell 35 may be filled with a heat insulating material.

[0062] Reference Figure 4The pressure regulating valve 30 of the superheated water steam regulating unit 26 is provided in the second pipe 28 to be described later. In addition, the second pipe 28 is connected to the downstream side of the area flow meter 27 to be described later connected to the downstream side of the first pipe 25, and the superheated water steam passing through the first pipe 25 further passes through the area flow meter 27 and is introduced into the second pipe 28. Therefore, by adjusting the valve opening of the pressure regulating valve 30 provided in the second pipe 28 on the downstream side, the pressure of the superheated water steam on the upstream side flowing to the area flow meter 27 through the first pipe 25 is adjusted. And, the pressure regulating valve 30 is provided to regulate the superheated water steam supplied to the area flow meter 27 through the first pipe 25 to maintain a predetermined pressure. The superheated water steam regulating unit 26 is configured to regulate the superheated water steam supplied to the area flow meter 27 through the first pipe 25 to a predetermined pressure through the pressure regulating valve 30.

[0063] The pressure regulating valve 30 may be any valve that is regulated so as to maintain the superheated water steam on the upstream side supplied to the area flow meter 27 through the first pipe 25 at a predetermined pressure. For example, a needle valve that also serves as a flow control valve may be used as the pressure regulating valve 30. The valve opening of the pressure regulating valve 30 is controlled by the controller 33. By controlling the valve opening of the pressure regulating valve 30 by the controller 33, the superheated water steam supplied to the area flow meter 27 through the first pipe 25 is regulated to a predetermined pressure.

[0064] The temperature sensor 31 is provided on the downstream side of the first pipe 25 as a sensor for detecting the temperature of the superheated steam supplied to the area flow meter 27 through the first pipe 25. The temperature sensor 31 is electrically connected to the controller 33, and the detected value of the temperature of the superheated steam detected by the temperature sensor 31 is sent to the controller 33.

[0065] The pressure sensor 32 is provided on the downstream side of the first pipe 25 as a sensor for detecting the pressure of the superheated water steam supplied to the area flow meter 27 through the first pipe 25. The pressure sensor 32 is electrically connected to the controller 33, and the detection value of the pressure of the superheated water steam detected by the pressure sensor 32 is sent to the controller 33.

[0066] The controller 33 is provided as a control device for controlling the operation of the measuring device 10. The controller 33 is configured to include, for example, a CPU (Central Processing Unit), a ROM (Read Only Memory), a RAM (Random Access Memory), etc. The CPU reads a program corresponding to the processing content from the ROM and expands it in the RAM, and controls the operation of the heater 29 and the pressure regulating valve 30 of the measuring device 10 in cooperation with the expanded program.

[0067] The controller 33 is configured to control the operation of the heater 29 based on the detection value of the temperature of the superheated water steam received from the temperature sensor 31 so that the temperature of the superheated water steam introduced from the first pipe 25 to the area flow meter 27 becomes a predetermined temperature. That is, the controller 33 is configured to control the output of the heating element 34 of the heater 29 based on the detection value of the temperature sensor 31 so that the temperature of the superheated water steam introduced from the first pipe 25 to the area flow meter 27 becomes a predetermined temperature.

[0068] In addition, the controller 33 is configured to control the operation of the pressure regulating valve 30 based on the detection value of the pressure of the superheated water steam received from the pressure sensor 32 so that the pressure of the superheated water steam introduced from the first pipe 25 to the area flow meter 27 becomes a predetermined pressure. That is, the controller 33 is configured to control the valve opening of the pressure regulating valve 30 based on the detection value of the pressure sensor 32 so that the pressure of the superheated water steam introduced from the first pipe 25 to the area flow meter 27 becomes a predetermined pressure.

[0069] The superheated steam regulator 26 includes a heater 29, a temperature sensor 31, and a controller 33, and is configured to heat the first pipe 25 with the heater 29, thereby heating the saturated steam or superheated steam passing through the first pipe 25 to a predetermined temperature, thereby making it superheated steam adjusted to a predetermined temperature. In addition, the superheated steam regulator 26 includes a pressure regulating valve 30, a pressure sensor 32, and a controller 33, and is configured to adjust the superheated steam supplied to the area flow meter 27 through the first pipe 25 to a predetermined pressure through the pressure regulating valve 30. In this way, the superheated steam regulator 26 is configured to heat the saturated steam or superheated steam passing through the first pipe 25 to a predetermined temperature, adjust it to a predetermined temperature, and adjust it to a predetermined pressure, thereby making it superheated steam adjusted to a predetermined temperature and a predetermined pressure. The predetermined temperature and the predetermined pressure adjusted by the superheated steam regulator 26 are specific temperature and specific pressure set in order to measure the volume flow rate of the superheated steam by the area flow meter 27 that introduces the superheated steam from the first pipe 25. The area flow meter 27 is set to measure the volume flow rate of the superheated water steam at a predetermined temperature (specific temperature) and a predetermined pressure (specific pressure). The density of the superheated water steam adjusted to the predetermined temperature and the predetermined pressure becomes a predetermined density determined according to the temperature and the pressure. The area flow meter 27 is set to measure the volume flow rate of the superheated water steam adjusted to the predetermined temperature and the predetermined pressure to become a predetermined density.

[0070] Figure 6 (A) is a cross-sectional view schematically showing a main part of the area flow meter 27, Figure 6 (B) is Figure 6The cross-sectional view at the position of the arrow on line CC of (A). Figure 4 and Figure 6 The area flow meter 27 is connected to the first pipe 25, is supplied with superheated steam adjusted to a predetermined temperature and a predetermined pressure, and measures the volume flow rate of the superheated steam passing therethrough.

[0071] The area flowmeter 27 is configured to include a flowmeter body 36, a tapered tube 37, a float 38, and the like. The flowmeter body 36 is provided, for example, as a housing that connects the first pipe 25 and the second pipe 28 and accommodates the tapered tube 37. The first pipe 25 and the second pipe 28 connected to the flowmeter body 36 are connected to the tapered tube 37 in the flowmeter body 36. A scale 36a for reading the volume flow rate of the superheated water steam measured by the area flowmeter 27 is provided on the front surface of the flowmeter body 36.

[0072] The cone tube 37 of the area flow meter 27 is provided inside the flow meter body 36 in a state extending in the up-down direction, and is provided as a pipe body to which the superheated water steam introduced from the first pipe 25 is provided so as to allow the superheated water steam to pass from the bottom to the top. The cone tube 37 is provided in a cone shape whose cross-sectional area gradually increases from the lower end side to the upper end side. The lower end side portion of the cone tube 37 is connected to the first pipe 25, and the first pipe 25 is connected to the inside of the cone tube 37. The upper end side portion of the cone tube 37 is connected to the second pipe 28, and the inside of the cone tube 37 is connected to the second pipe 28. The superheated water steam introduced from the first pipe 25 to the lower end side of the cone tube 37 flows from the bottom to the top in the cone tube 37, and flows from the upper end side of the cone tube 37 to the second pipe 28. In addition, in Figure 6 In (A), the flow direction of the superheated water vapor is indicated by a dotted arrow.

[0073] The float 38 of the area flow meter 27 is disposed inside the conical tube 37. The float 38 is provided as a sphere made of metal, ceramic or resin, for example. The float 38 is configured to move up and down according to the volume flow rate of the superheated water vapor flowing inside the conical tube 37.

[0074] The superheated water steam adjusted to a predetermined temperature and a predetermined pressure by the superheated water steam adjustment unit 26 through the first pipe 25 is introduced from the first pipe 25 to the lower end side of the tapered pipe 37, and flows from the bottom to the top in the tapered pipe 37. When the superheated water steam flows upward in the tapered pipe 37, the float 38 is in a state of being located at a balanced position relative to the tapered pipe 37 according to the relationship between the pressure difference between the bottom and the top of the float 38 and the gravity and buoyancy acting on the float 38, depending on the volume flow rate of the superheated water steam flowing upward. Then, based on the position where the float 38 reaches equilibrium with respect to the tapered pipe 37, the volume flow rate of the superheated water steam flowing from the bottom to the top in the tapered pipe 37 is measured. The volume flow rate of the superheated water steam is measured by reading the scale 36a at the position where the float 38 reaches equilibrium.

[0075] The superheated water steam introduced into the area flow meter 27 is adjusted to a predetermined temperature and a predetermined pressure by the superheated water steam adjustment unit 26 through the first pipe 25, and becomes superheated water steam in a state of temperature and pressure set as the measurement object of the volume flow rate in the area flow meter 27. The density of the superheated water steam adjusted to the predetermined temperature and the predetermined pressure becomes a predetermined density determined by the temperature and the pressure. The area flow meter 27 is set to measure the volume flow rate of the superheated water steam adjusted to the predetermined temperature and the predetermined pressure to have a predetermined density.

[0076] In addition, in the area flowmeter 27, the volume flow rate Q of the superheated water steam measured based on the force balance relationship of the float 38 in the tapered tube 37 is expressed by the following formula (1).

[0077] Q=C×A×{2×g×Vf / Af×(ρf-ρ0) / ρ0} 1 / 2 Formula (1)

[0078] In the above formula (1), "C" is the outflow coefficient, which is the adjustment coefficient between the flow rate obtained by actual testing according to the conditions of the area flowmeter 27 and the theoretical formula. "A" represents the flow area, which is the area where the superheated water steam flows between the inner periphery of the cone 37 and the outer periphery of the float 38 at the position where the float 38 is in equilibrium. That is, "A" is the area of ​​the difference between the cross-sectional area of ​​the inner periphery of the cone 37 at the position where the float 38 reaches equilibrium and the cross-sectional area of ​​the maximum diameter of the float 38, which is Figure 6 The area represented by symbol A in (B) is shown in FIG. 1. “g” is the acceleration due to gravity. “Vf” is the volume of the float 38. “Af” is the cross-sectional area of ​​the maximum diameter portion of the float 38, which is Figure 6 The area of ​​the region indicated by the arrow at both ends and the symbol Af in (B). "ρf" is the density of the floating body. "ρ0" is the density of superheated water vapor adjusted to a predetermined temperature and a predetermined pressure.

[0079] In the above formula (1), the flow coefficient C, the gravitational acceleration g, the volume Vf of the float 38, the cross-sectional area Af of the maximum diameter portion of the float 38, and the density ρf of the float 38 are fixed values, and the density ρ0 of the superheated water vapor to be measured is also a fixed value because the superheated water vapor is adjusted to a predetermined pressure and a predetermined temperature. Therefore, in the area flow meter 27, the flow area A determined by the position of the float 38 in the conical tube 37 and the volume flow rate Q of the superheated water vapor passing through are in a fixed relationship, and the volume flow rate Q of the superheated water vapor is measured by detecting this position.

[0080] In addition, the volume flow rate of the superheated water vapor in the area flow meter 27 may be measured without reading the scale 36a. For example, a magnet may be provided on the float 38, and the volume flow rate of the superheated water vapor may be measured by detecting the magnitude of the magnetic force from the magnet to magnetically detect the position of the float 38 relative to the tapered tube 37. In this case, the area flow meter 27 is configured to display the measured value of the volume flow rate measured by magnetically detecting the position of the float 38 relative to the tapered tube 37.

[0081] Reference Figure 1 and Figure 4 The second pipe 28 is connected to the area flow meter 27 and is configured as a pipe into which the superheated water steam whose volume flow rate is measured by the area flow meter 27 is introduced. Furthermore, the second pipe 28 is configured as a pipe for supplying the superheated water steam to a supply destination of the superheated water steam, and is configured to supply the superheated water steam to the heat treatment chamber 11 which is the supply destination of the superheated water steam. Specifically, the upstream end of the second pipe 28 is connected to the upper end side of the cone 37 of the area flow meter 27, and the downstream end of the second pipe 28 is connected to the steam supply unit 13 disposed in the heat treatment chamber 11. The superheated water steam whose volume flow rate is measured by the area flow meter 27 is introduced into the second pipe 28 and flows in the second pipe 28, and is supplied to the steam supply unit 13 disposed in the heat treatment chamber 11. The superheated water steam supplied to the steam supply unit 13 is supplied from the steam supply unit 13 to the heat treatment chamber 11.

[0082] The second pipe 28 is provided with a pressure regulating valve 30 of the superheated steam regulating unit 26. The second pipe 28 is configured as a metal pipe, for example, and is configured to be heated from the periphery by the second heater 39. The superheated steam introduced from the area flow meter 27 and supplied to the heat treatment chamber 11 as the supply destination of the superheated steam through the second pipe 28 is heated and kept warm by the second pipe 28 heated by the second heater 39 while flowing in the second pipe 28.

[0083] The second heater 39 is configured similarly to the heater 29 provided in the first pipe 25, and includes a heating element 34 (not shown) arranged around the second pipe 28 in a spirally wound manner around the outer periphery of the second pipe 28, and a heat-insulating casing 35 (not shown) surrounding the second pipe 28 and the heating element 34. The heating element 34 of the second heater 39 is connected to a power source (not shown), and the power supplied from the second heater 39 to the heating element 34 is controlled by the controller 33. The power supplied to the second heater 39 is controlled by the controller 33, so that the superheated water steam flowing in the second pipe 28 while being heated by the second heater 39 is kept warm.

[0084] [Method for measuring the volume flow rate of superheated steam]

[0085] Next, a method for measuring the volume flow rate of superheated water steam according to an embodiment of the present invention will be described. Figure 7 This is a flowchart for explaining a method for measuring the volume flow rate of superheated water steam according to an embodiment of the present invention. The method for measuring the volume flow rate of superheated water steam according to the present embodiment (hereinafter, also referred to as "the measuring method of the present embodiment") is configured as a method for adjusting the saturated water steam or superheated water steam generated by the water steam generator 14 to a predetermined temperature and a predetermined pressure, and supplying the saturated water steam or superheated water steam as superheated water steam of a predetermined temperature and a predetermined pressure to the water steam supply unit 13, and is implemented using a measuring device 10.

[0086] Reference Figure 7 The measuring method of the present embodiment is configured to include a water vapor introduction step S1, a superheated water vapor adjustment step S2, a measuring step S3, and a supply step S4. In the measuring method of the present embodiment, by implementing the above steps S1 to S4, the volume flow rate of the superheated water vapor supplied to the heat treatment chamber 11 as the supply destination of the superheated water vapor is measured, and the superheated water vapor of which the volume flow rate is measured is continuously supplied to the heat treatment chamber 11.

[0087] The steam introduction step S1 is configured as a step of introducing saturated steam or superheated steam into the first pipe 25. Figure 1 and Figure 4 In the steam introduction step S1, the saturated steam or superheated steam generated by the steam generator 14 is introduced into the first pipe 25 connected to the steam generator 14. The saturated steam or superheated steam introduced into the first pipe 25 flows in the first pipe 25.

[0088] The superheated steam adjustment step S2 is a step of heating the saturated steam or superheated steam introduced into the first pipe 25 and passing through the first pipe 25 to a predetermined temperature and adjusting the temperature to a predetermined temperature, and adjusting the pressure to a predetermined pressure, thereby turning the saturated steam or superheated steam adjusted to the predetermined temperature and pressure.

[0089] Reference Figure 4 The superheated steam adjustment step S2 is configured to heat the first pipe 25 by the heater 29 provided in the first pipe 25, thereby heating the saturated steam or superheated steam passing through the first pipe 25 to a predetermined temperature and becoming superheated steam adjusted to the predetermined temperature. That is, in the superheated steam adjustment step S2, the saturated steam or superheated steam introduced from the steam generator 14 into the first pipe 25 is heated by the first pipe 25 heated by the heater 29 while flowing in the first pipe 25, and is heated to become superheated steam at a predetermined temperature, and the temperature is adjusted. In addition, when the saturated steam is introduced from the steam generator 14 into the first pipe 25, the introduced saturated steam is heated while flowing in the first pipe 25 and becomes superheated steam, and further, is heated until it becomes superheated steam at a predetermined temperature while flowing in the first pipe 25. When superheated water steam is introduced from the steam generator 14 to the first pipe 25, the introduced superheated water steam is heated until it becomes superheated water steam of a predetermined temperature while flowing through the first pipe 25. In addition, in the superheated water steam regulating step S2, the superheated water steam flowing through the first pipe 25 while being heated by the heater 29 is heated to a predetermined temperature by controlling the power supplied to the heater 29 by the controller 33. In the superheated water steam regulating step S2, the controller 33 controls the operation of the heater 29 based on the detected value of the temperature of the superheated water steam received from the temperature sensor 31 so that the temperature of the superheated water steam introduced from the first pipe 25 to the area flow meter 27 becomes a predetermined temperature.

[0090] In addition, a pressure regulating valve 30 is provided on the second pipe 28 connected to the downstream side of the area flow meter 27 connected to the downstream side of the first pipe 25. The pressure regulating valve 30 is used to regulate and maintain the superheated water steam supplied to the area flow meter 27 through the first pipe 25 at a predetermined pressure. In the superheated water steam regulating step S2, the superheated water steam supplied to the area flow meter 27 through the first pipe 25 is regulated to a predetermined pressure by the pressure regulating valve 30. In the superheated water steam regulating step S2, the valve opening of the pressure regulating valve 30 is controlled by the controller 33, so that the superheated water steam supplied to the area flow meter 27 through the first pipe 25 is regulated to a predetermined pressure. In the superheated water steam regulating step S2, the controller 33 controls the valve opening of the pressure regulating valve 30 based on the detected value of the pressure of the superheated water steam received from the pressure sensor 32 so that the pressure of the superheated water steam introduced from the first pipe 25 to the area flow meter 27 becomes a predetermined pressure.

[0091] The measurement step S3 is configured as a step of supplying superheated steam adjusted to a predetermined temperature and a predetermined pressure to the area flow meter 27 connected to the first pipe 25 and measuring the volume flow rate of the superheated steam passing through the area flow meter 27 by the area flow meter 27. Figure 4 and Figure 6 In the measurement step S3, the superheated water steam adjusted to a predetermined temperature and a predetermined pressure in the superheated water steam adjustment step S2 while passing through the first pipe 25 is introduced from the first pipe 25 to the lower end side of the tapered pipe 37 of the area flow meter 27, and flows from the bottom to the top in the tapered pipe 37. When the superheated water steam flows upward in the tapered pipe 37, the float 38 of the area flow meter 27 is in a state of being located at a balanced position relative to the tapered pipe 37 according to the relationship between the pressure difference between the bottom and the top of the float 38 and the gravity and buoyancy acting on the float 38, according to the volume flow rate of the superheated water steam flowing upward. Then, in the measurement step S3, the volume flow rate of the superheated water steam flowing from the bottom to the top in the tapered pipe 37 is measured based on the position where the float 38 reaches equilibrium with respect to the tapered pipe 37. The volume flow rate of the superheated water steam is measured by reading the scale 36a at the position where the float 38 reaches equilibrium.

[0092] In addition, the superheated water steam supplied to the area flow meter 27 in the measuring step S3 is adjusted to a predetermined temperature and a predetermined pressure through the first pipe 25 in the superheated water steam adjusting step S2, and becomes superheated water steam in a state of temperature and pressure set as a measurement target of the volume flow rate in the area flow meter 27. The density of the superheated water steam adjusted to the predetermined temperature and the predetermined pressure becomes a predetermined density determined by the temperature and the pressure. In the measuring step S3, the volume flow rate of the superheated water steam is measured by the area flow meter 27 set so as to measure the volume flow rate of the superheated water steam adjusted to the predetermined temperature and the predetermined pressure and to the predetermined density.

[0093] The supply step S4 is configured as a step of introducing the superheated water vapor having passed through the area flow meter 27 into the second pipe 28 and supplying the superheated water vapor to the heat treatment chamber 11 as a supply destination of the superheated water vapor through the second pipe 28. Figure 1 and Figure 4 In the supplying step S4, the superheated water vapor whose volume flow rate is measured by the area flow meter 27 in the measuring step S3 is introduced into the second pipe 28 connected to the tapered tube 37 of the area flow meter 27. Then, the superheated water vapor introduced into the second pipe 28 flows in the second pipe 28 and is supplied to the water vapor supplying part 13 disposed in the heat treatment chamber 11. The superheated water vapor supplied to the water vapor supplying part 13 is supplied from the water vapor supplying part 13 into the heat treatment chamber 11.

[0094] [Functions and Effects of the Present Embodiment]

[0095] According to the present embodiment, the saturated steam or superheated steam passing through the first pipe 25 is superheated steam adjusted to a predetermined pressure at a predetermined temperature, and becomes the superheated steam as the measurement object of the volume flow rate. The superheated steam is adjusted to a predetermined pressure at a predetermined temperature, and is adjusted to a predetermined density. Then, the superheated steam adjusted to a predetermined density passes through the area flow meter 27 connected to the first pipe 25, and its volume flow rate is measured by the area flow meter 27. In addition, the area flow meter 27 has a cone 37 and a float 38 that moves up and down according to the volume flow rate of the superheated steam flowing inside the cone 37, and the volume flow rate is measured based on the position where the float 38 reaches equilibrium with respect to the cone 37. The superheated steam adjusted to a predetermined density passes through the area flow meter 27, and the volume flow rate of the superheated steam is measured based on the position where the float 38 reaches equilibrium. The superheated steam whose volume flow rate is measured is continuously supplied to the heat treatment chamber 11 as the supply destination of the superheated steam through the second pipe 28.

[0096] Therefore, according to the present embodiment, the volume flow rate of the superheated water steam continuously supplied to the heat treatment chamber 11 as the supply destination of the superheated water steam can be measured and monitored.

[0097] In addition, when the object 100 to be treated by heating with superheated water vapor in the heat treatment device 1 is a ceramic electronic component such as a laminated ceramic capacitor, a small amount of hydrogen is added to the atmosphere in the heat treatment chamber 11. The circuit of the ceramic electronic component contains metal, and in order to prevent oxidation of the metal during the heat treatment, a small amount of hydrogen is added to the atmosphere in the heat treatment chamber 11. Therefore, when the object 100 to be treated is a ceramic electronic component, superheated water vapor and a small amount of hydrogen are supplied to the heat treatment chamber 11. At this time, in the heat treatment device 1, the concentration of hydrogen is sometimes controlled according to the heat treatment, and for this purpose, it is necessary to accurately grasp the volume flow rate of the superheated water vapor introduced into the heat treatment chamber 11 and the volume flow rate of other gases. In this regard, according to this embodiment, the volume flow rate of the superheated water vapor continuously supplied to the heat treatment chamber 11 can be measured and monitored by the measuring device 10. Therefore, according to this embodiment, the volume flow rate of the superheated water vapor introduced into the heat treatment chamber 11 can be accurately grasped, and the concentration of hydrogen can be more accurately controlled.

[0098] According to the present embodiment, by providing the pressure regulating valve 30 on the second pipe 28 downstream of the area flow meter 27, the pressure of the superheated water steam supplied from the first pipe 25 upstream of the area flow meter 27 to the area flow meter 27 can be easily adjusted to a predetermined pressure.

[0099] Furthermore, when condensation occurs in the superheated steam to be measured as the volume flow rate, the amount of water vapor in the condensed portion cannot be measured. However, according to the present embodiment, by providing the pressure regulating valve 30 on the second piping 28 on the downstream side of the area flow meter 27, it is possible to prevent the superheated steam supplied to the area flow meter 27 from condensing and failing to accurately measure the volume flow rate of the superheated steam. Figure 4When the pressure regulating valve 30 is provided on the second pipe 28 on the downstream side of the area flowmeter 27, the pressure on the upstream side of the pressure regulating valve 30 becomes substantially the same pressure. That is, the pressures in the second pipe 28, the area flowmeter 27, and the first pipe 25 on the upstream side of the pressure regulating valve 30 become substantially the same pressure, and the pressure can be substantially the same in the range from the pressure regulating valve 30 to the connection portion of the first pipe 25 to the steam generator 14. On the other hand, when the pressure regulating valve 30 is provided on the first pipe 25 on the upstream side of the area flowmeter 27, the pressure on the upstream side of the pressure regulating valve 30 is high, and the pressure on the downstream side of the pressure regulating valve 30 becomes low. If the opening end of the second pipe 28 is opened to the atmosphere, the pressure on the downstream side of the pressure regulating valve 30 becomes the atmospheric pressure. The pressure on the downstream side of the pressure regulating valve 30 is lower than that on the upstream side, so the superheated water vapor passing to the downstream side has a lower boiling point due to the pressure reduction, and may be easily condensed to form condensation. However, according to the present embodiment, the pressure regulating valve 30 is provided on the second pipe 28 downstream of the area flowmeter 27, thereby preventing condensation of the superheated steam supplied to the area flowmeter 27 and preventing the volume flow rate of the superheated steam from being accurately measured due to condensation.

[0100] According to the present embodiment, by providing the heater 29 in the first pipe 25 to heat the first pipe 25 , the temperature of the superheated steam supplied to the area flow meter 27 through the first pipe 25 can be easily adjusted to a predetermined temperature.

[0101] [Modifications]

[0102] Although the embodiments of the present invention have been described above, the present invention is not limited to the above-described embodiments, and can be implemented with various modifications within the scope of the claims. For example, the following modified examples can also be implemented.

[0103] In the above-mentioned embodiment, a method in which one measuring device 10 is provided in the heat treatment device 1 is exemplified, but this method is not necessary. A method in which a plurality of measuring devices 10 are provided in the heat treatment device 1 may also be implemented. For example, a water vapor generator 14 may be provided in the heat treatment device 1, a plurality of supply paths for superheated water vapor from the water vapor generator 14 to the heat treatment chamber 11 may be provided, and the measuring device 10 may be provided on each of the plurality of supply paths. In this case, even if the number of water vapor generators 14 provided in the heat treatment device 1 is one, the volume flow rate of the superheated water vapor continuously provided to the heat treatment chamber 11 through the plurality of supply paths can be measured and monitored in each supply path. Therefore, the number of water vapor generators 14 provided can be reduced, thereby achieving cost reduction.

[0104] In the above-mentioned embodiment, the heater 29 is provided around the first pipe 25 and heats the first pipe 25 from the outside, but it may not be such a mode. As a heater provided in the first pipe 25 and heating the superheated water vapor passing through the first pipe 25, for example, a heater having a heating element disposed inside the first pipe 25 and directly heating the superheated water vapor passing through the first pipe 25 may be implemented.

[0105] In the above-mentioned embodiment, the pressure regulating valve 30 is provided in the second pipe 28, and the pressure regulating valve 30 is adjusted so that the superheated water steam supplied to the area flow meter 27 through the first pipe 25 is maintained at a predetermined pressure, and the superheated water steam regulating unit 26 uses the pressure regulating valve 30 to regulate the superheated water steam supplied to the area flow meter 27 to a predetermined pressure, but this is not necessarily the case. It is also possible to implement a mode in which a pressure regulating valve for regulating the pressure of the saturated water steam or superheated water steam supplied to the first pipe 25 is provided, and the controller 33 of the superheated water steam regulating unit 26 controls the pressure regulating valve based on the detection result of the pressure sensor 32 so that the superheated water steam supplied to the area flow meter 27 through the first pipe 25 is regulated to a predetermined pressure.

[0106] In the above embodiment, the float 38 of the area flow meter 27 is spherical, but it may not be so. The float of the area flow meter 27 may have various shapes, for example, a float of a shape combining a conical shape and a cylindrical shape may be used.

[0107] In the above-mentioned embodiment, the saturated steam or superheated steam introduced into the first pipe 25 is heated to adjust the temperature of the superheated steam supplied to the area flow meter 27 to a predetermined temperature, but this is not necessary. It is also possible to implement a method in which the superheated steam is introduced into the first pipe 25, and the superheated steam introduced into the first pipe 25 and passed through the first pipe 25 is cooled to adjust the temperature of the superheated steam supplied to the area flow meter 27 to a predetermined temperature. For example, the temperature of the superheated steam introduced into the first pipe 25 may be set slightly higher than the predetermined temperature, and the temperature may be lowered while passing through the first pipe 25, and the temperature of the superheated steam may be supplied to the area flow meter 27 at a predetermined temperature. In this case, for example, first, in order to appropriately lower the temperature of the superheated steam passing through the first pipe 25 to a predetermined temperature, an experiment is conducted in advance to obtain data on the relationship between the material and length of the first pipe 25 and the temperature of the superheated steam in the first pipe 25. Then, based on the data, in order to lower the temperature of the superheated water steam so that the temperature of the superheated water steam becomes a predetermined temperature at the connection portion of the first pipe 25 connected to the upstream side of the area flow meter 27 and to the area flow meter 27, the temperature of the superheated water steam supplied to the area flow meter 27 can be adjusted to a predetermined temperature by using the first pipe 25 set to an appropriate material and length. In addition, a mode may be implemented in which the temperature of the superheated water steam introduced into the first pipe 25 and passing through the first pipe 25 is maintained, thereby adjusting the temperature of the superheated water steam supplied to the area flow meter 27 to a predetermined temperature. For example, the temperature of the superheated water steam introduced into the first pipe 25 may be set to a temperature substantially equal to the predetermined temperature, and the temperature of the superheated water steam may be prevented from decreasing while passing through the first pipe 25 by, for example, covering the first pipe 25 with a heat insulating material.

[0108] Industrial Applicability

[0109] The present invention can be widely applied to a method for measuring the volume flow rate of superheated steam, a device for measuring the volume flow rate of superheated steam, and a heat treatment device having the device for measuring the volume flow rate of superheated steam.

Claims

1. A method for measuring the volume flow rate of superheated steam, characterized in that: The method for measuring the volume flow rate of superheated steam has the following steps: a steam introduction step of introducing saturated steam or superheated steam into the first pipe; a superheated steam regulating step of regulating the saturated steam or superheated steam introduced into the first pipe and passing through the first pipe to a predetermined temperature and a predetermined pressure, thereby converting the saturated steam or superheated steam into superheated steam adjusted to the predetermined temperature and the predetermined pressure; a measuring step of supplying the superheated water steam adjusted to the predetermined temperature and the predetermined pressure to an area flow meter connected to the first pipe, and measuring a volume flow rate of the superheated water steam passing through the area flow meter by the area flow meter; as well as The supply step introduces the superheated steam having passed through the area flow meter into a second pipe, and supplies the superheated steam to a supply destination of the superheated steam through the second pipe.

2. The method for measuring the volume flow rate of superheated steam according to claim 1, characterized in that: The second pipe is provided with a pressure regulating valve, the pressure regulating valve being adjusted so as to maintain the superheated water steam supplied to the area flow meter through the first pipe at the predetermined pressure. In the superheated steam regulating step, the superheated steam supplied to the area flow meter through the first pipe is regulated to the predetermined pressure by the pressure regulating valve.

3. The method for measuring the volume flow rate of superheated steam according to claim 1 or 2, characterized in that: In the superheated steam adjustment step, the first pipe is heated by a heater provided in the first pipe, thereby heating the saturated steam or superheated steam passing through the first pipe to the predetermined temperature, thereby turning the saturated steam or superheated steam into superheated steam adjusted to the predetermined temperature.

4. A device for measuring the volume flow rate of superheated steam, characterized in that: The device for measuring the volume flow rate of superheated steam comprises: a first pipe into which saturated steam or superheated steam is introduced; a superheated steam regulator that regulates the saturated steam or superheated steam introduced into the first pipe and passing through the first pipe to a predetermined temperature and a predetermined pressure, thereby converting the saturated steam or superheated steam into superheated steam regulated to the predetermined temperature and the predetermined pressure; an area flow meter connected to the first pipe, supplied with the superheated steam adjusted to the predetermined temperature and the predetermined pressure, and measuring a volume flow rate of the superheated steam passing therethrough; as well as The second pipe is configured to introduce the superheated steam having passed through the area flow meter and to supply the superheated steam to a supply destination of the superheated steam.

5. The device for measuring the volume flow rate of superheated steam according to claim 4, characterized in that: The superheated steam regulating unit includes a pressure regulating valve provided in the second pipe and regulating the superheated steam supplied to the area flow meter through the first pipe so as to maintain the predetermined pressure. The superheated steam regulator adjusts the superheated steam supplied to the area flow meter through the first pipe to the predetermined pressure using the pressure regulating valve.

6. The device for measuring the volume flow rate of superheated steam according to claim 4 or 5, characterized in that: The superheated steam adjustment unit includes a heater provided in the first pipe, and heats the first pipe with the heater, thereby heating the saturated steam or superheated steam passing through the first pipe to the predetermined temperature, thereby turning the saturated steam or superheated steam into superheated steam adjusted to the predetermined temperature.

7. A heat treatment device for performing heat treatment on a treated object by heating the treated object with superheated steam, characterized in that: The heat treatment device has: a heat treatment chamber for performing heat treatment on the object to be treated; and The device for measuring the volume flow rate of superheated steam according to claim 4 or 5, The superheated water steam supplied through the second pipe is introduced into the heat treatment chamber.

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