Optical detection equipment and appearance detection method

Abstract

The invention provides optical detection equipment, which is used for detecting the appearance of an electronic product and comprises a bracket, a camera assembly, a middle light source assembly and a tail end light source assembly, the camera assembly, the middle light source assembly and the tail end light source assembly are sequentially arranged on the support, the camera assembly is used for simultaneously acquiring a plane image and three-dimensional geometric information of a detected electronic product, and the middle light source assembly and the tail end light source assembly are used for respectively providing supplementary light for the camera assembly. The invention further provides an appearance detection method which can be executed by applying the optical detection equipment. Compared with the prior art, the optical detection equipment and the appearance detection method have the advantages that more comprehensive appearance detection results can be obtained with higher efficiency, more perfect light supplementing effects can be generated, and ideal shooting parameters and light supplementing states can be adjusted at any time.

Description

Technical Field

[0001] The present application belongs to the technical field of electronic product quality inspection, and in particular, relates to an optical inspection device for electronic product appearance inspection, and an appearance inspection method using the optical inspection device. Background Art

[0002] Electronic products such as computers, mobile phones, etc. generally need to be equipped with high-quality memory chips, such as Leadscan Memory ICs. With the upgrading of electronic products, the quality requirements for memory chips are also increasing, so memory chips must pass strict quality inspections before leaving the factory.

[0003] Appearance inspection is a very important aspect in the quality inspection of memory chips. Appearance inspection can not only directly find visible defects on the outside of the memory chip, but also analyze the image information in the memory chip according to its appearance, and obtain more specific performance indicators of the memory chip. Due to the huge number of memory chips used in the industry today, the corresponding appearance inspection is time-consuming, and the size of a single memory chip is small, which is not convenient for direct observation by the human eye. Therefore, manual appearance inspection can no longer meet the memory chip industry's demand for output and quality. Manufacturers in the industry have generally begun to introduce automated optical inspection (AOI) equipment, striving to achieve efficient and accurate automated appearance inspection of memory chips.

[0004] However, the existing AOI equipment for appearance inspection of memory chips on the market still has some defects. For example, when the existing AOI equipment performs appearance inspection on memory chip products, it usually uses a fixed camera to shoot a single product placed in the inspection position to obtain its image information; so when the number of products to be inspected is large, it is necessary to place each product in the inspection position one by one (commonly known as loading), and then remove it from the inspection position after performing appearance inspection (commonly known as unloading). The workload is very large, and the process of taking and placing products is easy to cause damage to the products. Furthermore, in order to obtain more comprehensive performance indicators of memory chip products in appearance inspection, it is often necessary to analyze both the plane image and three-dimensional geometric information of the product. However, the existing AOI equipment cannot obtain the plane image and three-dimensional geometric information of the product at the same time. Each product must be photographed at least twice to obtain the plane image and three-dimensional geometric information of the product respectively, making the appearance inspection operation more cumbersome and time-consuming.

[0005] Therefore, it is necessary to provide an optical inspection device with a more novel structure, and a corresponding appearance inspection method using the optical inspection device, so as to overcome the above-mentioned defects existing in the prior art. Summary of the invention

[0006] The purpose of the present application is to provide an optical inspection device with a more novel structure, and a corresponding appearance inspection method using the optical inspection device, so as to solve the technical problems that the existing optical inspection equipment used for chip appearance inspection needs to perform frequent loading and unloading operations on the inspected products during appearance inspection, resulting in excessive workload, and cannot simultaneously obtain the planar image and three-dimensional geometric information of the product.

[0007] An embodiment of one aspect of the present application provides an optical inspection device for performing appearance inspection on electronic products, the optical inspection device comprising a bracket, a camera assembly, an intermediate light source assembly, and a terminal light source assembly; the camera assembly, the intermediate light source assembly, and the terminal light source assembly are sequentially mounted on the bracket, the camera assembly is used to simultaneously obtain a planar image and three-dimensional geometric information of the inspected electronic product, and the intermediate light source assembly and the terminal light source assembly are used to provide fill light for the camera assembly, respectively.

[0008] In some embodiments, the camera assembly includes a middle camera for acquiring a planar image of the inspected electronic product and two side cameras for acquiring three-dimensional geometric information of the inspected electronic product, wherein the middle camera is arranged between the two side cameras.

[0009] In some embodiments, the middle camera and the two side cameras include a camera body, a lens, a mounting plate, a rotation fine-tuning platform, a translation fine-tuning platform, and a camera base; the lens is connected to the camera body, and the lens can be movably mounted on the mounting plate along a preset first direction; the mounting plate can be rotatably mounted on the rotation fine-tuning platform, and the rotation fine-tuning platform can be movably mounted on the translation fine-tuning platform along preset second and third directions; the first direction, the second direction, and the third direction are perpendicular to each other; the translation fine-tuning platform is connected to the bracket through the camera base.

[0010] In some embodiments, the middle camera and the two side cameras also include a fastening plate, a pressure plate bolt, a lens mount, an adjusting bolt, and an adjusting spring; the lens is clamped between the fastening plate and the lens mount, and the pressure plate bolt fastens the fastening plate to the lens mount; the adjusting bolt passes through the lens mount and is screwed into the mounting plate, the adjusting spring is sleeved on the adjusting bolt and is arranged between the lens mount and the mounting plate, thereby forming a pre-compression gap with adjustable width between the lens mount and the mounting plate.

[0011] In some embodiments, the intermediate light source assembly includes a coaxial light source box for generating light, and a light-passing plate and a light-shielding plate; the coaxial light source box is connected to the bracket, the light-passing plate is arranged between the coaxial light source box and the intermediate camera, and has a light-passing opening for allowing the light generated by the coaxial light source box to pass through; the light-shielding plate is movably mounted on the bracket, and is arranged between the light-passing plate and the intermediate camera; the movement of the light-shielding plate is used to adjust the opening area of ​​the light-passing opening.

[0012] In some embodiments, the terminal light source assembly includes a first annular bevel light source and a second annular bevel light source that are overlapped, the second annular bevel light source is connected below the first annular bevel light source, the inner and outer surfaces of the first annular bevel light source and the second annular bevel light source are both formed as conical surfaces, and the inner surfaces of the first annular bevel light source and the second annular bevel light source are both used as light emitting surfaces for emitting light.

[0013] In some embodiments, the angle between the radial direction of the light emitting surface of the first annular oblique light source and the axis is 40-50 degrees, and the angle between the radial direction of the light emitting surface of the second annular oblique light source and the axis is 50-60 degrees.

[0014] In some embodiments, the end light source assembly also includes an annular plane light source, which is arranged on the side facing the end with a larger diameter of the second annular bevel light source; the distances between the first annular bevel light source, the second annular bevel light source and the annular plane light source and the camera assembly, as well as the horizontality of the first annular bevel light source, the second annular bevel light source and the annular plane light source are all adjustable.

[0015] In some embodiments, the end light source assembly also includes a planar light source bracket, a light source mounting seat, a mounting seat bolt and a mounting seat spring, the mounting seat bolt is screwed into the annular planar light source, the light source mounting seat and the planar light source bracket to connect the annular planar light source with the planar light source bracket; the mounting seat spring is sleeved on the mounting seat bolt and abuts between the light source mounting seat and the planar light source bracket.

[0016] Another aspect of the present application also provides an appearance inspection method for performing appearance inspection on an electronic product, the appearance inspection method comprising the following steps: S0, providing an optical inspection device as described in the above embodiment; S1, calibrating a camera component of the optical inspection device; S2, aligning a product to be inspected for appearance with the optical inspection device; S3, providing fill light for the camera component; S4, controlling the camera component to photograph the product and obtain image data of the product; S5, analyzing appearance inspection information of the product based on the image data of the product and determining an appearance inspection result.

[0017] Compared with the prior art, the optical inspection equipment and appearance inspection method provided by the embodiments of the present application have many advantages, such as: (1) The middle camera and two side cameras can be used to simultaneously shoot the inspected product from different angles, so that the plane image and three-dimensional geometric information of the product can be obtained simultaneously in one shot, and more comprehensive appearance inspection results can be obtained with higher efficiency. (2) An axial light source, an annular plane light source, and two annular oblique light sources are used at the same time to provide fill light for appearance inspection according to a specific structural combination, so that a more complete fill light effect can be obtained. (3) The lens in the camera assembly has multiple adjustable degrees of freedom, and the position and horizontality of the annular plane light source and the annular oblique light source can also be adjusted to a certain extent. The operations of shooting and fill light are more flexible and convenient, and can be adjusted to the ideal shooting parameters and fill light status at any time. (4) When multiple products need to be inspected for appearance, the traditional loading and unloading method can be used to place the products one by one at the shooting point of the optical inspection equipment for inspection. Alternatively, the optical inspection equipment can be driven to move so that its shooting point coincides with each product before inspection. This can save the loading and unloading operations of the products, help reduce the overall workload and reduce damage to the products. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0019] Figure 1 It is a structural schematic diagram of an optical detection device provided by one embodiment of the present application.

[0020] Figure 2 yes Figure 1 A schematic diagram of the structural decomposition of the optical detection equipment shown.

[0021] Figure 3 yes Figure 1 A schematic diagram of the structural breakdown of the camera assembly of the optical inspection device shown.

[0022] Figure 4 yes Figure 1 The schematic diagram of the structural decomposition of the end light source assembly of the optical detection device is shown.

[0023] Figure 5 yes Figure 4 The schematic cross-sectional view of the first annular bevel light source and the second annular bevel light source of the end light source assembly is shown.

[0024] Figure 6 yes Figure 4 An enlarged structural schematic diagram of the light source mounting base in the terminal light source assembly is shown.

[0025] Figure 7 yes Figure 1 Schematic diagram of the working principle of the optical detection equipment shown.

[0026] Figure 8 It is a flow chart of an appearance detection method provided by one embodiment of the present application. DETAILED DESCRIPTION

[0027] The specific embodiments of the present application will be described in detail below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all of the embodiments. Based on the description of the present application, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present application.

[0028] The main purpose of this application is to provide an optical inspection device with a more novel structure, and a corresponding appearance inspection method using the optical inspection device, so as to solve the technical problems that the existing optical inspection equipment used for chip appearance inspection needs to perform frequent loading and unloading operations on the inspected products during appearance inspection, resulting in excessive workload, and cannot simultaneously obtain the planar image and three-dimensional geometric information of the product.

[0029] An embodiment of one aspect of the present application provides an optical inspection device, which may be, for example, an AOI device, for performing appearance inspection on electronic products such as memory chips. Figure 1 and Figure 2 The optical detection device includes a bracket 1, a camera component 2, an intermediate light source component 3, and a terminal light source component 4, wherein the camera component 2, the intermediate light source component 3, and the terminal light source component 4 are sequentially mounted on the bracket 1.

[0030] In this embodiment, the bracket 1 includes a front plate 11, a back plate 12, at least two connecting beams 13, and at least two reinforcing ribs 14. The front plate 11 and the back plate 12 are both flat plates, and are preferably both arranged in an upright state. The back plate 12 includes a back plate body 121 and two wing plates 122 extending from two opposite edges of the back plate body 121, respectively. The back plate body 121 is aligned with the front plate 11 and is arranged to be parallel to the front plate 11, so as to form an assembly space between the front plate 11 and the back plate body 121. The connecting beam 13 is connected between the front plate 11 and the back plate body 121. The reinforcing rib 14 is an L-shaped flat plate with two mutually perpendicular strips, one strip of each reinforcing rib 14 is arranged parallel to the back plate 12 and connected to the back plate body 121, and the other strip is perpendicular to the back plate 12 and extends toward the direction of the front plate 11. The back plate body 121 can establish a transmission connection with various existing driving devices such as motors, cylinders, etc. through existing technical means, so that the optical detection device can be moved as a whole under the drive of the driving device.

[0031] The camera assembly 2 is installed on the side of the back panel 12 facing the front panel 11, and includes a middle camera 2A and two side cameras 2B. The middle camera 2A is movably mounted on the back panel body 121, and the two side cameras 2B are movably mounted on the two wing panels 122, respectively, so that the middle camera 2A is arranged between the two side cameras 2B.

[0032] In this embodiment, the structures of the middle camera 2A and the side camera 2B are mostly the same, and only the installation positions and specific types of lenses are different. Therefore, only one of the cameras needs to be taken as an example to illustrate the specific structures of the middle camera 2A and the side camera 2B. Figure 3 Here, taking any side camera 2B as an example, the specific structure of the middle camera 2A and the side camera 2B is explained.

[0033] like Figure 3As shown, the side camera 2B includes a camera body 20, a lens 21, a fastening plate 22, a plurality of plate bolts (not shown), a lens mounting seat 23, a plurality of camera adjustment bolts (not shown), a plurality of camera adjustment springs 232, a mounting plate 24, a rotation fine-tuning platform 25, a translation fine-tuning platform 26, and a camera base 27. The camera body 20 is provided with, for example, an existing image sensor unit, and the lens 21 is connected to one side of the camera body 20 in, for example, an existing manner, so that the camera body 20 can receive the optical signal collected by the lens 21 and generate a corresponding image signal. In this embodiment, the lens 21 of the side camera 2B preferably adopts a Sham lens, which can be used to capture and obtain the three-dimensional geometric information of the product to be inspected from two side perspectives, so that the images captured by the two side cameras 2B respectively form a binocular stereoscopic vision effect, and then the three-dimensional geometric information of the product to be inspected can be obtained according to the images captured by the two side cameras 2B respectively according to, for example, the existing method for decoding three-dimensional geometric information based on the principle of binocular stereoscopic vision. The number of the fastening plates 22 and the lens mounting seat 23 is preferably at least two, and the number of the fastening plates 22 and the lens mounting seat 23 is equal, so that the fastening plates 22 and the lens mounting seat 23 correspond one to one; each fastening plate 22 and the corresponding lens mounting seat 23 are respectively arranged on both sides of the lens 21 and interlocked with each other, and the pressure plate bolt passes through each fastening plate 22 and is screwed into the corresponding lens mounting seat 23 to lock the corresponding fastening plate 22 and the lens mounting seat 23 with each other, thereby clamping the lens 21 between the corresponding fastening plate 22 and the lens mounting seat 23. The camera adjustment bolt passes through each lens mount 23 and is screwed into the mounting plate 24. The camera adjustment spring 232 is preferably a cylindrical coil spring, and the number of the camera adjustment spring 232 corresponds to the camera adjustment bolt. Each camera adjustment spring 232 is sleeved on the corresponding adjustment bolt and is arranged between the lens mount 23 and the mounting plate 24, so that the two ends of each camera adjustment spring 232 respectively abut against the lens mount 23 and the mounting plate 24, thereby forming a pre-compression gap with adjustable width between the lens mount 23 and the mounting plate 24. In this way, when the camera adjustment bolt is rotated to change the length of the pre-compression gap relative to the mounting plate 24, the width of the pre-compression gap can be adjusted, that is, the distance between the lens mount 23 and the mounting plate 24 can be adjusted, so as to adjust the pre-compression gap in a preset first direction (for example, Figure 3 The position of the lens mount 23 and the lens 21 can be adjusted in the Z-axis direction (as shown in FIG. 1 ). The camera adjustment spring 232 can provide assistance and feedback during the above adjustment process. The mounting plate 24 can also be provided with a support plate 241 extending to one side of the camera body 20 to support the camera body 20.

[0034] The mounting plate 24 is mounted on the rotating fine-tuning platform 25. The rotating fine-tuning platform 25 allows the mounting plate 24 and the lens 21 and the camera body 20 mounted thereon to rotate in the first direction (eg Figure 3The rotation fine-tuning platform 25 is mounted on the translation fine-tuning platform 26, and the translation fine-tuning platform 26 allows the rotation fine-tuning platform 25 and the mounting plate 24 and the lens 21 mounted thereon to rotate along the preset second direction and the third direction (for example, Figure 3 The lens 21 is moved in the X-axis direction and the Y-axis direction shown in the figure, and the first direction, the second direction and the third direction are perpendicular to each other. In this way, the position of the lens 21 can be adjusted in three dimensions and can also be rotated, so that it has a rich degree of adjustment freedom. Preferably, the rotation fine-tuning platform 25 is provided with a rotation fine-tuning micrometer, and the translation fine-tuning platform 26 is provided with a translation fine-tuning micrometer for adjusting in the second direction and the third direction, respectively, so that the rotation of the lens 21 with the first direction as the axis and the movement in the second direction and the third direction can have sufficient accuracy. The translation fine-tuning platform 26 is connected to the back plate 12 through the camera base 27. For the side camera 2B, its camera base 27 is mounted on a side plate 122 of the back plate 12.

[0035] The structure of the middle camera 2A can refer to the structure of the side camera 2B, the only difference is that the lenses 21 of the two side cameras 2B use Sham lenses, and their camera bases 27 are respectively installed on the two side plates 122 of the back plate 12; while the lens of the middle camera 2A uses other types of existing lenses for capturing the plane image of the inspected product, and its camera base 27 is installed on the back plate body 121 of the back plate 12. Therefore, the specific structure of the middle camera 2A is not repeated.

[0036] The intermediate light source assembly 3 is installed in the assembly space formed between the front plate 11 and the back plate body 121. Figure 2 As shown, the intermediate light source assembly 3 includes a coaxial light source box 31, a light source box base 32, a light-through plate 33 and a light shielding plate 34. One side of the coaxial light source box 31 is connected to the back plate 121 through the light source box base 32, and the other side opposite to it can be connected to the vertical plate 11 or not connected. The inner wall of the coaxial light source box 31 is provided with, for example, an existing axial light source (not shown in the figure) for generating fill light, and the box wall of the coaxial light source box 31 on one side facing the intermediate camera 2A and the box wall on the other side opposite to the side facing the intermediate camera 2A are provided with a transparent light-through area 310, so that the light emitted by the axial light source can enter the field of view of the camera assembly 2 through the light-through area 310, providing fill light for the camera assembly 2 when shooting. Preferably, a through shooting hole 311 is also provided in the middle of the light-through area 310, so that the intermediate camera 2A can more clearly shoot the inspected product through the shooting hole 310.

[0037] The light-through plate 33 is arranged between the coaxial light source box 31 and the intermediate camera 2A, is fixedly connected to the vertical plate 11 and the back plate 12, and is provided with a light-through opening 330 corresponding to the light-through area 310 of the coaxial light source box 31. The light-through opening 330 is aligned with the light-through area 310, so that the light emitted by the coaxial light source can be emitted through the light-through area 310 and the light-through opening 330. The light shielding plate 34 is movably mounted on the bracket 1, for example, it can be slidably mounted on the reinforcing rib plate 14 through, for example, an existing slide rail structure, and the light shielding plate 34 is arranged between the light-through plate 33 and the intermediate camera 2A. When the shading plate 34 moves on the bracket 1, for example, slides along the slats of the reinforcing rib plate 14 perpendicular to the back plate 12, it can move relative to the light opening 330 to block part or all of the area of ​​the light opening 330, thereby adjusting the opening area of ​​the light opening 330. In this way, the amount of light passing through the light opening 330 can be changed to adjust the brightness of the fill light provided by the intermediate light source assembly 3 to the camera assembly 2.

[0038] The end light source assembly 4 is installed at the end of the bracket 1 away from the camera assembly 2, that is, it is arranged on the side of the middle light source assembly 3 facing away from the camera assembly 2. Figure 4 The end light source assembly 4 includes a fixing plate 41, a plurality of mounting pillars 42, a first annular bevel light source 43, a second annular bevel light source 44, a bevel light source bracket 45, a bevel light source connecting plate 46, a planar light source bracket 47, and an annular planar light source 48.

[0039] The fixing plate 41 is connected to the bevel light source bracket 45 through the mounting pillar 42. The specific connection method can be, for example, existing bolt connection, bonding, welding, etc., and bolt connection is preferred in this embodiment; the mounting pillar 42 is supported between the fixing plate 41 and the bevel light source bracket 45, so that an assembly gap for accommodating the first annular bevel light source 43 and the second annular bevel light source 44 is formed between the fixing plate 41 and the bevel light source bracket 45. The number of the bevel light source connecting plates 46 is preferably two, which are arranged on opposite sides of the bevel light source bracket 45, respectively. The bevel light source bracket 45 is connected to the front plate 11 and the back plate body 121 respectively through the two bevel light source connecting plates 46, and the fixing plate 41 is arranged to face the side where the camera assembly 2 is located. A large light-transmitting area is opened through the middle of the fixing plate 41 and the bevel light source bracket 45 to avoid obstructing the shooting of the camera assembly 2.

[0040] Please also read Figure 5The shape of the first annular bevel light source 43 is roughly a conical cylindrical shell with the top truncated, or a trumpet-shaped shell. The inner and outer surfaces of the first annular bevel light source 43 are formed as conical surfaces obliquely arranged relative to its axis, wherein the inner surface is used as the light-emitting surface 430 of the first annular bevel light source 43, and the light generated by the first annular bevel light source 43 is arranged to be emitted from the light-emitting surface 430; the outer surface can be used to connect the wires required for the first annular bevel light source 43. Both ends of the first annular bevel light source 43 in the axial direction are arranged to be completely open to facilitate the passage of light. In this embodiment, the radial angle between the light-emitting surface 430 of the first annular bevel light source 43 and its axis is set to 50-60 degrees, preferably to 55 degrees.

[0041] The second annular bevel light source 44 is also roughly in the shape of a conical cylindrical shell with the top cut off, or a trumpet-shaped shell. The second annular bevel light source 44 is connected to the lower side of the first annular bevel light source 44, such as Figure 5 As shown, the inner and outer surfaces of the second annular bevel light source 44 are formed into conical surfaces arranged obliquely relative to its axis, wherein the inner surface is used as the light-emitting surface 440 of the second annular bevel light source 44, and the light generated by the second annular bevel light source 44 is arranged to be emitted from the light-emitting surface 440; the outer surface can be used to connect the wires required by the second annular bevel light source 44. Both ends of the second annular bevel light source 44 in the axial direction are arranged to be completely open to facilitate the passage of light. Figure 4 As shown, in this embodiment, the angle between the radial direction of the light emitting surface 440 of the second annular oblique light source 44 and its axis is set to 40-50 degrees, preferably 45 degrees.

[0042] The first annular bevel light source 43 and the second annular bevel light source 44 are coaxially overlapped and fixed to each other by existing technical means such as bonding and welding. The second annular bevel light source 44 is located on the side of the first annular bevel light source 43 with a larger diameter, and the opening direction of the first annular bevel light source 43 and the second annular bevel light source 44, that is, the direction in which the diameter gradually increases, are consistent. In this embodiment, the diameter of the second annular bevel light source 44 is larger than the diameter of the first annular bevel light source 43, so that when the first annular bevel light source 43 and the second annular bevel light source 44 are overlapped in the above manner, the light emitting surface 430 inside the first annular bevel light source 43 and the light emitting surface 440 inside the second annular bevel light source 44 can form a smooth transition at the junction to avoid blocking the light of the first annular bevel light source 43.

[0043] The first annular bevel light source 43 and the second annular bevel light source 44 which are arranged overlappingly in the above manner are installed in the assembly gap between the fixing plate 41 and the bevel light source bracket 45, the first annular bevel light source 43 is arranged toward the side where the fixing plate 41 and the camera assembly 2 are located, and the second annular bevel light source 44 is connected to the bevel light source bracket 45 by existing technical means such as bonding, welding, bolt connection, etc. In this embodiment, preferably, the second annular bevel light source 44 and the bevel light source bracket 45 are connected by connecting bolts 441, and further preferably, a supporting spring 442, which is preferably a columnar helical spring, can be sleeved on the connecting bolts 441 connecting the second annular bevel light source 44 and the bevel light source bracket 45, and the supporting spring 442 is pressed between the second annular bevel light source 44 and the bevel light source bracket 45. In this way, based on the working principle similar to that of the camera adjustment bolt and the camera adjustment spring 232 in the aforementioned lens assembly 2, a pre-compression gap with adjustable width can be formed between the second annular bevel light source 44 and the bevel light source bracket 45, and the distance between multiple areas of the second annular bevel light source 44 and the bevel light source bracket 45 can be adjusted within a certain range by adjusting the length of the connecting bolt 441 screwed into the second annular bevel light source 44 and / or the bevel light source bracket 45. Since the first annular bevel light source 43 and the second annular bevel light source 44 are fixed to each other, and the bevel light source bracket 45 is fixed relative to the bracket 1 and the camera assembly 2, the distance between the first annular bevel light source 43 and the second annular bevel light source 44 and the camera assembly 2 can be adjusted by adjusting the distance between the second annular bevel light source 44 and the bevel light source bracket 45, thereby adjusting the corresponding fill light effect. It can be understood that such an adjustment structure can not only directly adjust the distance between the first annular bevel light source 43 and the second annular bevel light source 44 and the camera assembly 2, but also when the connecting bolts 441 screwed into different areas of the second annular bevel light source 44 are adjusted to different degrees, different areas of the second annular bevel light source 44 can be displaced to different degrees relative to the bevel light source bracket 45, thereby adjusting the overall horizontality of the first annular bevel light source 43 and the second annular bevel light source 44.

[0044] The plane light source bracket 47 is fixedly connected to the inclined light source bracket 45 by existing technical means such as bonding, welding, and bolt connection. A large light-through area is also opened in the middle of the plane light source bracket 47 to avoid obstructing the shooting of the camera assembly 2. The annular plane light source 48 is connected to the side of the plane light source bracket 47 that is away from the inclined light source bracket 45 by existing technical means such as bonding, welding, and bolt connection, so that the annular plane light source 48 is arranged on the side facing the larger diameter opening end of the second annular inclined light source 44. Please refer to Figure 6In this embodiment, a plurality of light source mounting seats 49 are preferably provided, and each light source mounting seat 49 is provided with a mounting seat bolt 491, through which the mounting seat bolt 491 is screwed into the annular plane light source 48, the light source mounting seat 49 and the plane light source bracket 47 in sequence, so as to connect the annular plane light source 48 with the plane light source bracket 47. A mounting seat spring 492 may also be sleeved on the mounting seat bolt 491, which is preferably a cylindrical coil spring, and the mounting seat spring 492 is pressed between the light source mounting seat 49 and the plane light source bracket 47. In this way, based on the working principle similar to the camera adjustment bolt and the camera adjustment spring 232 in the aforementioned lens assembly 2, a pre-compression gap with adjustable width can be formed between the light source mounting seat 49 and the plane light source bracket 47, and by adjusting the length of the mounting seat bolt 491 screwed into the plane light source bracket 47, the distance between multiple areas of the annular plane light source 48 and the plane light source bracket 47 can be adjusted within a certain range. Since the plane light source bracket 47 and the bevel light source bracket 45 are fixed relative to the bracket 1 and the camera assembly 2, the distance between the annular plane light source 48 and the camera assembly 2 can be adjusted by adjusting the distance between the annular plane light source 48 and the plane light source bracket 47, thereby adjusting the corresponding fill light effect. It can be understood that such an adjustment structure can not only directly adjust the distance between the annular plane light source 48 and the camera assembly 2, but also when the mounting seat bolts 491 screwed into different areas of the annular plane light source 48 are adjusted to different degrees, different areas of the annular plane light source 48 can also be displaced to different degrees relative to the plane light source bracket 47, so that the overall levelness of the annular plane light source 48 can be adjusted.

[0045] Furthermore, if Figure 4 and Figure 6 As shown, in addition to the above-mentioned mounting base bolts 491, another locking bolt 493 can also be used to further fix the light source mounting base 49 and the planar light source bracket 47 to each other to increase the connection strength; the locking bolt 493 can also be further extended, passed through the planar light source bracket 47 and further screwed into the bevel light source bracket 45, thereby connecting the light source mounting base 49, the planar light source bracket 47, and the bevel light source bracket 45 together to further improve the overall structural strength.

[0046] Please also read Figure 7 , which shows the working principle of the above optical detection device. When using the above optical detection device to detect electronic products such as Figure 6When the memory chip 9 shown in the figure is subjected to appearance inspection, the memory chip 9 can be photographed simultaneously using the middle camera 2A and the two side cameras 2B. The middle camera 2A photographs the memory chip 9 directly to obtain a planar image of the memory chip 9; and the two side cameras 2B photograph the memory chip 9 from opposite sides at a certain tilt angle (preferably, the optical axes of the two side cameras 2B form a 30-degree angle with the optical axis of the middle camera 2A). The acquired three-dimensional geometric information enables the images of the memory chip 9 photographed by the two side cameras 2B to form a binocular stereoscopic vision effect. Then, the images photographed by the two side cameras 2B can be synthesized into the three-dimensional geometric information of the memory chip 9 according to the existing method for decoding three-dimensional geometric information based on the principle of binocular stereoscopic vision. In this way, the planar image and three-dimensional geometric information of the memory chip 9 can be obtained simultaneously with only one shooting, and more comprehensive appearance inspection results can be obtained with higher efficiency.

[0047] Another embodiment of the present application provides an appearance inspection method for performing appearance inspection on electronic products such as memory chips. The appearance inspection method can be performed using the above-mentioned optical inspection equipment. The following still takes the appearance inspection of the above-mentioned memory chip 9 by the above-mentioned optical inspection equipment as an example to illustrate the specific steps of the appearance inspection method. Figure 8 , the appearance detection method may include the following steps:

[0048] S0, provide an optical detection device. For example, provide the optical detection device described in the above embodiment.

[0049] S1, calibrate the camera assembly of the optical detection device. This step S1 may include the following specific operations: based on the above-mentioned movable structure of the camera assembly 2, adjust the middle camera 2A and the two side cameras 2B, so that the optical axis of the middle camera 2A is aligned with the light opening 330 of the light plate 33 and the light area 310 of the coaxial light source box 31, and coincides with the central axis of the first annular bevel light source 43, the second annular bevel light source 44, and the annular plane light source 48; the optical axes of the two side cameras 2B are aligned with the inner ring range of the first annular bevel light source 43, the second annular bevel light source 44, and the annular plane light source 48, and intersect with the optical axis of the middle camera 2A at the same point, and the intersection of the optical axes of the middle camera 2A and the two side cameras 2B is located on the side of the annular plane light source 48 facing away from the plane light source bracket 47 (that is, the outside of the annular plane light source 48, or the outside of the end of the entire optical detection device). Preferably, the optical axes of the two side cameras 2B can form an angle of 30 degrees with the optical axis of the middle camera 2A.

[0050] S2, align the product to be inspected for appearance with the optical inspection device. This step S2 may include the following specific operations: after completing the above adjustment of the camera assembly 2, use the intersection of the optical axes of the middle camera 2A and the two side cameras 2B as the shooting point of the optical inspection device, and place the product to be inspected for appearance, such as Figure 6 The memory chip 9 is placed at the shooting point. The placement operation may be to move the memory chip 9 to the shooting point, or to use, for example, an existing driving device to drive the optical detection device to move as a whole, so that the shooting point moves to coincide with the memory chip 9.

[0051] S3, providing fill light for the camera assembly. The step S3 may include the following specific operations: turning on the first annular bevel light source 43, the second annular bevel light source 44, and the annular plane light source 48 to provide fill light for the camera assembly 2. Moving the light shielding plate 34 may adjust the brightness of the fill light provided by the intermediate light source assembly 3 to the camera assembly 2. In addition, if it is found that the position and levelness of the first annular bevel light source 43, the second annular bevel light source 44, and the annular plane light source 48 are not ideal, the position and levelness of the first annular bevel light source 43, the second annular bevel light source 44, and the annular plane light source 48 may be adjusted based on the above-mentioned pre-compression gap structure formed by the bolts and the springs to obtain the best fill light effect.

[0052] S4, control the camera assembly to shoot the product and obtain the image data of the product. This step S4 may include the following specific operations: after being satisfied with the fill light effect, control the middle camera 2A and the two side cameras 2B to shoot the memory chip 9 at the same time. Among them, the middle camera 2A shoots directly at the memory chip 9 to obtain a plane image of the memory chip 9; and the two side cameras 2B shoot the memory chip 9 from opposite sides at a certain tilt angle, such as the above-mentioned 30-degree tilt angle. The three-dimensional geometric information makes the images of the memory chip 9 respectively shot by the two side cameras 2B form a binocular stereoscopic vision effect, and then the images respectively shot by the two side cameras 2B can be synthesized into the three-dimensional geometric information of the memory chip 9 according to the existing method of decoding three-dimensional geometric information based on the principle of binocular stereoscopic vision. Since the middle light source assembly 3 and the end light source assembly 4 can be separated by a large distance, the middle light source assembly 3 will not hinder the side camera 2B from shooting the memory chip 9.

[0053] S5, analyzing the appearance inspection information of the product according to the image data of the product to determine the appearance inspection result. The appearance inspection information may include, for example, two-dimensional image information and three-dimensional geometric information of all solder balls on the memory chip 9. This step S5 can be performed completely according to the existing technical means, and no further description is needed here.

[0054] Based on the above specific description, it can be understood that the optical inspection equipment and appearance inspection method provided by the embodiments of the present application have many advantages over the prior art, such as: (1) The middle camera and two side cameras can be used to simultaneously shoot the inspected product from different angles, so that the plane image and three-dimensional geometric information of the product can be obtained simultaneously in one shot, and more comprehensive appearance inspection results can be obtained with higher efficiency. (2) An axial light source, an annular plane light source, and two annular oblique light sources are used at the same time to provide fill light for appearance inspection according to a specific structural combination, so that a more complete fill light effect can be obtained. (3) The lens in the camera assembly has multiple adjustable degrees of freedom, and the position and horizontality of the annular plane light source and the annular oblique light source can also be adjusted to a certain extent. The operations of shooting and fill light are more flexible and convenient, and can be adjusted to the ideal shooting parameters and fill light status at any time. (4) When multiple products need to be inspected for appearance, the traditional loading and unloading method can be used to place the products one by one at the shooting point of the optical inspection equipment for inspection. Alternatively, the optical inspection equipment can be driven to move so that its shooting point coincides with each product before inspection. This can save the loading and unloading operations of the products, help reduce the overall workload and reduce damage to the products.

[0055] The above are only specific implementations of the present application, but the protection scope of the present application is not limited thereto. Any changes or substitutions that can be easily thought of by a person skilled in the art within the technical scope disclosed in the present application should be included in the protection scope of the present application. Therefore, the protection scope of the present application shall be subject to the attached claims.

Claims

1. An optical inspection device for performing appearance inspection on electronic products, characterized in that: The optical inspection equipment includes a bracket, a camera assembly, an intermediate light source assembly, and a terminal light source assembly; the camera assembly, the intermediate light source assembly, and the terminal light source assembly are sequentially mounted on the bracket, the camera assembly is used to simultaneously acquire a planar image and three-dimensional geometric information of the inspected electronic product, and the intermediate light source assembly and the terminal light source assembly are used to provide fill light for the camera assembly, respectively.

2. The optical detection device according to claim 1, characterized in that: The camera assembly includes a middle camera for acquiring a planar image of the inspected electronic product and two side cameras for acquiring three-dimensional geometric information of the inspected electronic product, wherein the middle camera is arranged between the two side cameras.

3. The optical detection arrangement according to claim 2, characterized in that The middle camera and the two side cameras all include a camera body, a lens, a mounting plate, a rotation fine-tuning platform, a translation fine-tuning platform, and a camera base; the lens is connected to the camera body, and the lens is movably mounted on the mounting plate along a preset first direction; the mounting plate is rotatably mounted on the rotation fine-tuning platform, and the rotation fine-tuning platform is movably mounted on the translation fine-tuning platform along a preset second direction and a third direction; the first direction, the second direction, and the third direction are mutually perpendicular in pairs; The translation fine-tuning platform is connected to the bracket through the camera base.

4. The optical detection device according to claim 3, characterized in that: The middle camera and the two side cameras also include a fastening plate, a pressure plate bolt, a lens mount, a camera adjustment bolt, and a camera adjustment spring; the lens is clamped between the fastening plate and the lens mount, and the pressure plate bolt fastens the fastening plate to the lens mount; the camera adjustment bolt passes through the lens mount and is screwed into the mounting plate, the camera adjustment spring is sleeved on the adjustment bolt, and is arranged between the lens mount and the mounting plate, thereby forming a pre-compression gap with adjustable width between the lens mount and the mounting plate.

5. The optical detection device according to claim 2, characterized in that: The intermediate light source assembly includes a coaxial light source box for generating light, a light-passing plate and a light-shielding plate; the coaxial light source box is connected to the bracket, the light-passing plate is arranged between the coaxial light source box and the intermediate camera, and is provided with a light-passing opening for allowing the light generated by the coaxial light source box to pass through; the light-shielding plate is movably mounted on the bracket, and is arranged between the light-passing plate and the intermediate camera; the movement of the light-shielding plate is used to adjust the opening area of ​​the light-passing opening.

6. The optical detection device according to claim 1, characterized in that: The end light source assembly includes a first annular bevel light source and a second annular bevel light source that are overlapped, the second annular bevel light source is connected below the first annular bevel light source, the inner and outer surfaces of the first annular bevel light source and the second annular bevel light source are both formed as conical surfaces, and the inner surfaces of the first annular bevel light source and the second annular bevel light source are both used as light emitting surfaces for emitting light.

7. The optical detection device according to claim 6, characterized in that: The included angle between the radial direction of the light emitting surface of the first annular oblique light source and the axis is 50-60 degrees, and the included angle between the radial direction of the light emitting surface of the second annular oblique light source and the axis is 40-50 degrees.

8. The optical detection device according to claim 5, characterized in that: The end light source assembly also includes an annular plane light source, which is arranged on the side facing the end with a larger diameter of the second annular bevel light source; the distances between the first annular bevel light source, the second annular bevel light source and the annular plane light source and the camera assembly, as well as the horizontality of the first annular bevel light source, the second annular bevel light source and the annular plane light source are all adjustable.

9. The optical detection device according to claim 8, characterized in that: The terminal light source assembly also includes a planar light source bracket, a light source mounting seat, a mounting seat bolt and a mounting seat spring. The mounting seat bolt is screwed into the annular planar light source, the light source mounting seat and the planar light source bracket to connect the annular planar light source with the planar light source bracket; the mounting seat spring is sleeved on the mounting seat bolt and abuts between the light source mounting seat and the planar light source bracket.

10. An appearance inspection method for performing appearance inspection on electronic products, characterized in that: The appearance detection method comprises the following steps: S0, providing an optical detection device as described in any one of claims 1-9; S1, calibrating a camera assembly of the optical detection device; S2, aligning the product to be inspected for appearance with the optical inspection device; S3, providing fill light for the camera assembly; S4, controlling the camera assembly to shoot the product to obtain image data of the product; S5, analyzing the appearance detection information of the product according to the image data of the product to determine the appearance detection result.

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