Real-time control method and system for atomic force microscope imaging noise

Abstract

The application provides an atomic force microscope imaging noise real-time control method and system, comprising: zero scanning noise template establishment, processing zero scanning data formed by zero scanning imaging of an atomic force microscope to obtain all noise frequency bands of the zero scanning data to constitute a noise deduction template; wherein, during the zero scanning imaging, all motion dimensions of the atomic force microscope used for the zero scanning imaging remain static; real-time scanning imaging noise suppression, using the noise deduction template for noise deduction during real-time scanning imaging of the atomic force microscope. The technical scheme of the application can obtain a noise deduction template according to the current environment of the atomic force microscope, and can cope with the characteristics of complex noise and vibration sources, rich frequency spectrum and strong time variation.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of atomic force microscope imaging technology, and in particular to a real-time control method and system for atomic force microscope imaging noise. BACKGROUND

[0002] An atomic force microscope is an important scientific instrument for studying the surface morphology and physical properties of materials at the nanoscale. The atomic force microscope senses the structure and properties of the surface of a substance through the extremely weak interatomic interaction force between the surface of the sample to be measured and the micro force sensitive element composed of a probe and a micro cantilever. Due to the extremely high sensitivity of this micro force sensitive element, it is also very sensitive to environmental vibrations and noise, and therefore the imaging quality of the atomic force microscope is highly dependent on the level of vibration and noise suppression.

[0003] Currently, passive or active vibration isolation means are commonly used in atomic force microscope systems to suppress vibrations and environmental noise. For example, an air floating platform is used on the base of the atomic force microscope to isolate the base from the surrounding environment, so as to avoid the coupling of environmental vibrations to the measurement mechanical circuit through the base; the core measurement unit of the atomic force microscope usually uses a soundproof cover to block the audio noise from the external environment, so as to reduce the vibrations of the micro cantilever caused by the excitation of sound waves in space. In addition to the above passive vibration isolation means, active vibration and noise compensation techniques are also used in some atomic force microscope systems. For example, a voice coil motor, a piezoelectric actuator or other elements are installed under the base support platform, and the high dynamic motion capability of these elements is used to achieve reverse compensation of environmental vibrations, so as to improve the stability of the platform.

[0004] When the atomic force microscope system is applied to an industrial production environment, the noise and vibration have complex sources, rich frequency spectrum and strong time-varying characteristics. Both passive vibration isolation means and active vibration isolation means have certain shortcomings: passive vibration isolation tables and soundproof covers are usually designed for specific noise patterns, and it is difficult to achieve ultra-wide spectrum noise suppression with existing technology. The active vibration compensation capability provided by piezoelectric and voice coil motor active actuators is usually expensive and has limited load capacity. SUMMARY

[0005] The present application provides a real-time control method and system for atomic force microscope imaging noise, to solve the problems of passive vibration isolation that is difficult to achieve ultra-wide spectrum noise suppression, and active actuator vibration isolation that is expensive and has limited load capacity.

[0006] To solve the above technical problems, the present application is implemented by the following technical solutions:

[0007] According to a first aspect of the present application, a real-time control method for atomic force microscope imaging noise is provided, which comprises:

[0008] Zero scan noise template establishment, processing zero scan data formed by zero scan imaging of an atomic force microscope to obtain all noise frequency bands of the zero scan data and to form a noise deduction template; wherein, during the zero scan imaging, all motion dimensions of the atomic force microscope used for zero scan imaging remain static;

[0009] Real-time scan imaging noise suppression, using the noise deduction template to perform noise deduction during real-time scan imaging of the atomic force microscope.

[0010] Preferably, m rows of real-time scan data are processed as a data block during the real-time scan imaging noise suppression; wherein, m is in the range of [1, M] and M is the number of rows of zero scan imaging;

[0011] Specifically, when the number of image data rows generated by the real-time scan imaging is less than m rows, the real-time displayed imaging is image data without noise deduction;

[0012] When the number of image data rows generated by the real-time scan imaging is m rows, noise deduction is performed on the data block composed of the m rows of image data, and the m rows of image data after noise deduction are updated to the first row to the mth row of image data;

[0013] Thereafter, each time a new row of image data is generated by the real-time scan imaging, it is combined with the m-1 rows of image data before the row to form an m-row data block for noise deduction, and the m rows of image data after noise deduction are used to update the previous m rows of image data including the current row; the process is repeated until the real-time scan reaches the number of rows M.

[0014] Preferably, the zero scan noise template establishment specifically includes:

[0015] Zero scan imaging, the atomic force microscope performs zero scan imaging to obtain zero scan data;

[0016] Zero scan frequency domain transformation, processing the zero scan data to obtain zero scan frequency domain signal data;

[0017] Noise segmentation threshold determination, determining a noise segmentation threshold of the zero scan frequency domain signal data;

[0018] Noise deduction template generation, determining all noise frequency bands in the zero scan frequency domain signal data according to the noise segmentation threshold to form a noise deduction template.

[0019] Preferably, the real-time scan imaging noise suppression specifically includes:

[0020] Real-time scan imaging, the atomic force microscope performs real-time scan imaging to obtain real-time scan data;

[0021] Real-time scanning frequency domain transformation, processing the real-time scanning data to obtain real-time scanning frequency domain signal data;

[0022] Noise deduction, using the noise deduction template to deduct noise from the real-time scanning frequency domain signal data;

[0023] Real-time scanning time domain transformation, processing the noise-deducted real-time scanning frequency domain signal data to convert it into real-time scanning time domain signal for real-time imaging output.

[0024] Preferably, the zero-scan imaging specifically includes:

[0025] Zero-scan data storage, the atomic force microscope performs zero-scan imaging, wherein each frame of zero-scan data is stored as two images: Trace image and Retrace image respectively;

[0026] Zero-scan image recombination, recombining the Trace image and the Retrace image to obtain a recombined image, wherein the Trace image and the Retrace image in the recombined image correspond to each other in an up-down manner;

[0027] Recombined image unfolding, unfolding the recombined image into a one-dimensional time sequence according to the time sequence of data generation.

[0028] Preferably, the specific method of the zero-scan image recombination is:

[0029] For the Trace image and the Retrace image with a size of M rows and N columns, the xth row of the Trace image is taken as the 2x-1th row of the recombined image, and the xth row of the Retrace image is taken as the 2xth row of the recombined image, thereby obtaining a recombined image with 2M rows and N columns.

[0030] Preferably, the specific method of the recombined image unfolding is:

[0031] The recombined image is extracted and spliced in the order of odd rows from left to right and even rows from right to left.

[0032] Preferably, the real-time scanning imaging specifically includes:

[0033] Real-time scanning data storage, the atomic force microscope performs real-time scanning imaging, wherein each frame of real-time scanning data is stored as two images: Trace real-time image and Retrace real-time image respectively;

[0034] Reconstructing the real-time scanning images, reconstructing the Trace real-time image and the Retrace real-time image to obtain a real-time reconstructed image, wherein the Trace image and the Retrace image in the real-time reconstructed image correspond to each other in a one-to-one and top-to-bottom manner;

[0035] Unfolding the real-time reconstructed image to a one-dimensional time sequence according to the time sequence of data generation.

[0036] Preferably, the specific method of the real-time scanning image reconstruction is as follows:

[0037] For the Trace real-time image and the Retrace real-time image with the size of m rows and N columns, taking the xth row of the Trace real-time image as the 2x-1th row of the real-time reconstructed image, and taking the xth row of the Retrace real-time image as the 2xth row of the real-time reconstructed image, thereby obtaining a real-time reconstructed image with the size of 2m rows and N columns;

[0038] wherein the value range of m is [1, M].

[0039] Preferably, the specific method of the real-time reconstructed image unfolding is as follows:

[0040] Extracting and splicing the real-time reconstructed image in the order of odd rows from left to right and even rows from right to left.

[0041] Preferably, the real-time scanning time domain conversion specifically includes:

[0042] Processing the denoised real-time scanning frequency domain signal data to convert into a real-time scanning time domain signal;

[0043] Reconstructing the real-time scanning time domain signal into a two-dimensional image;

[0044] Splitting the reconstructed two-dimensional image into the denoised Trace real-time image and the Retrace real-time image;

[0045] Mirroring the denoised Retrace real-time image left and right.

[0046] Preferably, the noise deduction specifically includes:

[0047] Comparing all frequency points in each noise frequency band of the noise deduction template, and processing the data of the corresponding frequency points in the real-time scanning frequency domain signal data as follows to obtain the frequency domain denoised data of the frequency point:

[0048] y_amp[k] = |y_real[k]| - f * |y_zero[k]|

[0049] y_theta[k] = arg(y_real[k])

[0050] y dn[k] = y amp[k] * exp(y theta[k] * i)

[0051] wherein y real[k] and y zero[k] are the real-time scanning frequency domain value and the zero scanning complex frequency domain value of the frequency point k respectively; |. | represents the modulus of a complex number, and arg(.) represents the argument of a complex number; f is a positive real number denoising intensity factor for adjusting the intensity of noise signal deduction; when the complex frequency domain data is deducted for noise, only the modulus value is reduced to obtain the denoised modulus value y amp[k] of the frequency point k, and the argument y theta[k] remains unchanged with the original real-time scanning data; y dn[k] is the complex value of the frequency point k after noise deduction, wherein exp(.) represents exponential operation, and i is the imaginary unit.

[0052] Preferably, the noise segmentation threshold determination specifically comprises:

[0053] performing window mean filtering on the zero scanning frequency domain signal data;

[0054] transforming the window mean filtered zero scanning frequency domain signal data into the interval [0, 1] by a uniformization method;

[0055] drawing a preset hierarchical Y cumulative histogram according to the uniformized zero scanning frequency domain signal data;

[0056] determining the noise segmentation threshold position THD in the cumulative histogram according to the noise segmentation threshold percentile p:

[0057] THD = FFT_L * p

[0058] wherein FFT_L is the length of the zero scanning frequency domain signal data;

[0059] in the cumulative histogram, starting from the lowest level, finding the hierarchical serial number s at which the cumulative frequency is first greater than or equal to THD, and calculating the noise segmentation threshold SPLIT AMP:

[0060] SPLIT AMP = s / Y * FFT MAX

[0061] wherein FFT MAX is the maximum value of the zero scanning frequency domain signal data.

[0062] Preferably, the noise deduction template generation specifically comprises:

[0063] Segment the zero-scan frequency domain signal data based on the noise segmentation threshold, mark frequency points with values greater than or equal to the noise segmentation threshold as possible noise frequency points, and mark frequency points with values less than the noise segmentation threshold as non-noise frequency points to obtain a segmentation result;

[0064] Observe the zero-scan frequency domain signal data from the first frequency point one by one to determine all noise frequency bands of the zero-scan frequency domain signal data.

[0065] Preferably, the obtaining of the segmentation result and the determination of all noise frequency bands of the zero-scan frequency domain signal data further comprise:

[0066] Closely connect discrete noise frequency points in the segmentation result with a preset window size CON_SIZE, and the specific method is:

[0067] Observe the zero-scan frequency domain signal data from the first frequency point one by one, and for a frequency point marked as a possible noise frequency point, if there is a frequency point marked as a possible noise frequency point in the CON_SIZE subsequent frequency points, then all frequency points between the two are re-marked as possible noise frequency points.

[0068] According to a second aspect of the present application, a real-time control system for atomic force microscope imaging noise is provided, comprising:

[0069] A zero-scan noise template establishing device is configured to process zero-scan data formed by zero-scan imaging of an atomic force microscope to obtain all noise frequency bands of the zero-scan data and form a noise deduction template; wherein all motion dimensions of the atomic force microscope used for zero-scan imaging remain stationary during the zero-scan imaging process.

[0070] The real-time imaging noise suppression device is configured to use the noise deduction template to perform noise deduction during real-time scanning imaging of the atomic force microscope.

[0071] Preferably, the zero-scan noise template establishing device specifically comprises:

[0072] A zero-scan imaging module is configured to perform zero-scan imaging of an atomic force microscope to obtain zero-scan data.

[0073] A frequency domain transformation module is configured to process the zero-scan data to obtain zero-scan frequency domain signal data.

[0074] A noise segmentation threshold determining module is configured to determine a noise segmentation threshold of the zero-scan frequency domain signal data.

[0075] A noise deduction template generating module is configured to determine all noise frequency bands in the zero-scan frequency domain signal data based on the noise segmentation threshold to form a noise deduction template.

[0076] Preferably, the real-time imaging noise suppression device specifically comprises:

[0077] A real-time scanning imaging module for the atomic force microscope to perform real-time scanning imaging to obtain real-time scanning data;

[0078] A real-time scanning frequency domain transformation module for processing the real-time scanning data to obtain real-time scanning frequency domain signal data;

[0079] A noise deduction module for using the noise deduction template to perform noise deduction on the real-time scanning frequency domain signal data;

[0080] A real-time scanning time domain transformation module for processing the noise-deduced real-time scanning frequency domain signal data to convert it into real-time scanning time domain signal.

[0081] Preferably, the zero scanning imaging module specifically comprises:

[0082] A zero scanning data storage unit for the atomic force microscope to perform zero scanning imaging, wherein each frame of zero scanning data is stored as two images: a Trace image and a Retrace image;

[0083] A zero scanning image recombination unit for recombining the Trace image and the Retrace image to obtain a recombined image, wherein the Trace image and the Retrace image in the recombined image correspond to each other in an up-down manner;

[0084] A recombined image unfolding unit for unfolding the recombined image into a one-dimensional time sequence according to the time sequence of data generation.

[0085] Preferably, the real-time scanning imaging module specifically comprises:

[0086] A real-time scanning data storage unit for the atomic force microscope to perform real-time scanning imaging, wherein each frame of real-time scanning data is stored as two images: a Trace real-time image and a Retrace real-time image;

[0087] A real-time scanning image recombination unit for recombining the Trace real-time image and the Retrace real-time image to obtain a real-time recombined image, wherein the Trace image and the Retrace image in the real-time recombined image correspond to each other in an up-down manner;

[0088] A real-time recombined image unfolding unit for unfolding the real-time recombined image into a one-dimensional time sequence according to the time sequence of data generation.

[0089] Preferably, the noise segmentation threshold determination module specifically comprises:

[0090] a window mean filtering unit configured to perform window mean filtering on the zero-scan frequency domain signal data;

[0091] a uniformization unit configured to transform the window mean filtered zero-scan frequency domain signal data into an interval [0, 1] by a uniformization method;

[0092] a noise segmentation threshold position obtaining unit configured to draw a cumulative histogram of a preset hierarchical Y according to the uniformized zero-scan frequency domain signal data;

[0093] determine a noise segmentation threshold position THD in the cumulative histogram according to a noise segmentation threshold percentile p:

[0094] THD = FFT_L * p

[0095] where FFT_L is a length of the zero-scan frequency domain signal data;

[0096] a noise segmentation threshold obtaining unit configured to find a hierarchical serial number s at which a cumulative frequency first becomes greater than or equal to THD in the cumulative histogram from a lowest hierarchical level, and calculate a noise segmentation threshold SPLIT AMP:

[0097] SPLIT AMP = s / Y * FFT MAX

[0098] where FFT MAX is a maximum value of the zero-scan frequency domain signal data.

[0099] Preferably, the noise deduction template generation module specifically comprises:

[0100] a segmentation result obtaining unit configured to segment the zero-scan frequency domain signal data based on the noise segmentation threshold, mark a frequency point with a value greater than or equal to the noise segmentation threshold as a possible noise frequency point, and mark a frequency point with a value less than the noise segmentation threshold as a non-noise frequency point, to obtain a segmentation result;

[0101] a total noise frequency band obtaining unit configured to observe each frequency point from a first frequency point, and determine a total noise frequency band of the zero-scan frequency domain signal data.

[0102] Preferably, the noise deduction template generation module further comprises:

[0103] a closed connection unit configured to perform closed connection on discrete noise frequency points in the segmentation result with a preset window size CON SIZE, and specifically configured to:

[0104] From the first frequency point, observe one by one, for the frequency point marked as possible noise frequency point, if there is a marked as possible noise frequency point in the CON_SIZE subsequent frequency points, then all the frequency points between the two are re-marked as possible noise frequency points.

[0105] According to a third aspect of the present application, there is provided an electronic device comprising:

[0106] a processor;

[0107] and a memory for storing processor-executable instructions;

[0108] wherein the processor implements the steps of any of the above methods by executing the executable instructions.

[0109] According to a fourth aspect of the present application, there is provided a computer-readable storage medium having stored thereon a computer program which, when executed by a processor, implements the steps of any of the above methods.

[0110] The atomic force microscope imaging noise real-time control method and system provided by the present application obtains all noise frequency bands of zero scanning data formed in the zero scanning imaging process of the atomic force microscope by processing the zero scanning data, and forms a noise deduction template to suppress real-time imaging noise.

[0111] In addition, the atomic force microscope imaging noise real-time control method and system provided by the present application, since the noise deduction template is obtained according to the current environment of the atomic force microscope, all vibrations and noise sources in the current environment are well weakened, and the energy of the sound waves coupled through space is also weakened, which can further improve the imaging effect of the atomic force microscope.

[0112] In an optional solution of the present application, m rows of continuous real-time scanning data are taken as a data block for denoising processing, and the output is updated in real time, thereby saving the waiting time of real-time output.

[0113] In an optional solution of the present application, the one-dimensional time sequence is unfolded for the two-dimensional image composed of the Trace image and the Retrace image, and the noise removal process of the Trace image and the Retrace image is fused together, thus simplifying the noise removal process and saving the noise removal time.

[0114] In an optional solution of the present application, the discrete noise frequency points are closed connected to form a noise frequency band in the process of establishing the noise deduction template, thus further improving the noise removal effect and saving the noise removal time. BRIEF DESCRIPTION OF DRAWINGS

[0115] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced. Obviously, the drawings in the following description only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.

[0116] Figure 1 The flow chart of the atomic force microscope imaging noise real-time control method of an embodiment of the present application;

[0117] Figure 2 The flow chart of the zero-scan noise template establishment of a preferred embodiment of the present application;

[0118] Figure 3 The flow chart of the real-time imaging noise suppression of a preferred embodiment of the present application;

[0119] Figure 4 The schematic diagram of the Trace image and the Retrace image recombination of a preferred embodiment of the present application;

[0120] Figure 5 The schematic diagram of the recombination image unfolded into a one-dimensional time sequence of a preferred embodiment of the present application;

[0121] Figure 6 The schematic diagram of the real-time scanning time domain signal reconstruction into a two-dimensional image of a preferred embodiment of the present application;

[0122] Figure 7 The schematic diagram of the image splitting of the two-dimensional image and the left-right mirroring of the Retrace image of a preferred embodiment of the present application;

[0123] Figure 8 The schematic diagram of the atomic force microscope imaging noise real-time control system of an embodiment of the present application;

[0124] Figure 9 The schematic diagram of the zero-scan noise template establishment device of a preferred embodiment of the present application;

[0125] Figure 10 schematic diagram of a real-time imaging noise suppression device according to a preferred embodiment of the present application;

[0126] Figure 11 schematic diagram of a zero-scan imaging module according to a preferred embodiment of the present application;

[0127] Figure 12 schematic diagram of a real-time scan imaging module according to a preferred embodiment of the present application;

[0128] Figure 13 schematic diagram of an electronic device according to an embodiment of the present application;

[0129] BRIEF DESCRIPTION OF DRAWINGS:

[0130] 1 - zero-scan noise template establishing device,

[0131] 11 - zero-scan imaging module,

[0132] 111 - zero-scan data storage unit,

[0133] 112 - zero-scan image recombination unit,

[0134] 113 - recombined image unfolding unit;

[0135] 12 - frequency domain transformation module,

[0136] 13 - noise segmentation threshold determination module,

[0137] 14 - noise subtraction template generation module;

[0138] 2 - real-time imaging noise suppression device,

[0139] 21 - real-time scan imaging module,

[0140] 211 - real-time scan data storage unit,

[0141] 212 - real-time scan image recombination unit,

[0142] 213 - real-time recombined image unfolding unit;

[0143] 22 - real-time scan frequency domain transformation module,

[0144] 23 - noise subtraction module,

[0145] 24 - real-time scan time domain transformation module;

[0146] 31 - processor,

[0147] 32 - internal bus,

[0148] 33 - memory,

[0149] 34 - memory. DETAILED DESCRIPTION

[0150] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by a person of ordinary skill in the art without creative work fall within the protection scope of the present application.

[0151] In the description of the specification of the present application, it should be understood that the terms "upper", "lower", "upper end", "lower end", "lower surface", "upper surface" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the purpose of facilitating the description of the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application.

[0152] In the description of the specification of the present application, the terms "first", "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined with "first", "second" can explicitly or implicitly include one or more of the features.

[0153] In the description of the present application, the meaning of "a plurality of" is a plurality, for example, two, three, four, etc., unless otherwise explicitly specified and limited.

[0154] In the description of the specification of the present application, unless otherwise explicitly specified and limited, the terms "connection" and the like should be broadly understood, for example, it can be fixedly connected, or detachably connected, or integrated; it can be mechanically connected, or electrically connected or can communicate with each other; it can be directly connected, or indirectly connected through an intermediate medium, or the internal communication of two elements or the interaction relationship between two elements. For a person of ordinary skill in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0155] The technical solutions of the present application will be described in detail below with specific embodiments. The following specific embodiments can be combined with each other, and the same or similar concepts or processes can not be described in some embodiments.

[0156] In an embodiment, a real-time control method for atomic force microscope imaging noise is provided, please refer to Figure 1 , which comprises:

[0157] S1: zero scanning noise template establishment, processing zero scanning data formed by zero scanning imaging of the atomic force microscope to obtain all noise bands of the zero scanning data and form a noise deduction template; wherein, during the zero scanning imaging, all motion dimensions of the atomic force microscope used for the zero scanning imaging are kept static (i.e. "zero motion" state);

[0158] S2: real-time scanning imaging noise suppression, using the noise deduction template to perform noise deduction during real-time scanning imaging of the atomic force microscope.

[0159] Preferably, all measurement parameters (scanning size, resolution, scanning speed, etc.) used in the zero scanning mode are consistent with those used in the real-time scanning imaging.

[0160] In an embodiment, during the real-time scanning imaging noise suppression, m consecutive rows of real-time scanning data are processed as a data block; wherein, the value of m is [1, M], and M is the number of rows of the zero scanning imaging, i.e. M is the maximum number of rows.

[0161] Specifically, when the number of image data rows generated by the real-time scanning imaging is less than m rows, the real-time displayed imaging is image data without noise deduction;

[0162] When the number of image data rows generated by the real-time scanning imaging is m rows, noise deduction is started on the data block composed of the m rows of image data, and the m rows of image data after noise deduction are updated to the first row to the mth row of image data.

[0163] Thereafter, each time a new row of image data is generated by the real-time scanning imaging, it is combined with the m-1 rows of image data before the row to form a data block of m rows for noise deduction, and the m rows of image data after noise deduction are used to update the previous m rows of image data including the current row; the process is repeated until the real-time scanning reaches the maximum number of rows M.

[0164] The above data block method for noise deduction processing can update the output in real time and save the output waiting time; and each time a new row of data is generated after m rows, it is combined with the m-1 rows of data before the row to form a data block for noise deduction processing, and the output is real-time, which ensures the continuity of the real-time output and further saves the waiting time of the real-time output.

[0165] It should be noted that the m rows are processed as a data block in the above embodiment, which is a preferred embodiment. In different embodiments, the maximum number of rows M can also be scanned in real time and then unified for denoising processing. In addition, in the above embodiment, each time a new row of data is generated after m rows, it is combined with the m-1 rows of data before the row to form a data block for denoising processing. In different embodiments, denoising processing can also be performed every m rows, that is, 1-m rows are denoised once, m+1-2m rows are denoised once, and so on.

[0166] In an embodiment, please refer to Figure 2 The zero-scan noise template establishment specifically includes:

[0167] S11: Zero-scan imaging, the atomic force microscope performs zero-scan imaging to obtain zero-scan data;

[0168] S12: Zero-scan frequency domain transformation, the zero-scan data is processed, which can be fast Fourier transform (FFT), to obtain zero-scan frequency domain signal data;

[0169] S13: Noise segmentation threshold determination, the noise segmentation threshold of the zero-scan frequency domain signal data is determined;

[0170] S14: Noise deduction template generation, according to the noise segmentation threshold, all noise frequency bands in the zero-scan frequency domain signal data are determined to form a noise deduction template.

[0171] In an embodiment, please refer to Figure 3 The real-time scanning imaging noise suppression specifically includes:

[0172] S21: Real-time scanning imaging, the atomic force microscope performs real-time scanning imaging to obtain real-time scanning data;

[0173] S22: Real-time scanning frequency domain transformation, the real-time scanning data is processed, which can also be fast Fourier transform, to obtain real-time scanning frequency domain signal data;

[0174] S23: Noise deduction, the noise deduction template is used to perform noise deduction on the real-time scanning frequency domain signal data;

[0175] S24: Real-time scanning time domain transformation, the denoised real-time scanning frequency domain signal data is processed and converted into real-time scanning time domain signal for real-time imaging output.

[0176] In an embodiment, the zero-scan imaging specifically includes:

[0177] Zero-scan data storage, the atomic force microscope performs zero-scan imaging, wherein each frame of zero-scan data is stored as two images: Trace image and Retrace image;

[0178] Zero-scan image recombination, recombination of Trace image and Retrace image, to obtain a recombination image, please refer to Figure 4 , the Trace image and Retrace image in the recombination image correspond one by one up and down;

[0179] Recombination image unfolding, unfolding the recombination image into a one-dimensional time sequence according to the time sequence of data generation.

[0180] In an embodiment, the specific method of zero-scan image recombination is:

[0181] For the Trace image and Retrace image with the size of M rows and N columns, the xth row of the Trace image is taken as the 2x-1th row of the recombination image, and the xth row of the Retrace image is taken as the 2xth row of the recombination image, and then a recombination image with 2M rows and N columns is obtained, please refer to Figure 4 .

[0182] In an embodiment, the specific method of recombination image unfolding is:

[0183] The recombination image is extracted and spliced in the order of odd rows from left to right and even rows from right to left, please refer to Figure 5 .

[0184] In an embodiment, real-time scanning imaging specifically includes:

[0185] Real-time scanning data storage, atomic force microscope for real-time scanning imaging, wherein each frame of real-time scanning data is stored as two images: Trace real-time image and Retrace real-time image;

[0186] Real-time scanning image recombination, recombination of Trace real-time image and Retrace real-time image, to obtain a real-time recombination image, similar to the repeated method in zero-scan imaging, please refer to Figure 4 , the Trace image and Retrace image in the real-time recombination image correspond one by one up and down;

[0187] Real-time recombination image unfolding, unfolding the real-time recombination image into a one-dimensional time sequence according to the time sequence of data generation.

[0188] In an embodiment, the specific method of real-time scanning image recombination is:

[0189] For the Trace real-time image and Retrace real-time image with the size of m rows and N columns, the xth row of the Trace real-time image is taken as the 2x-1th row of the real-time recombination image, and the xth row of the Retrace real-time image is taken as the 2xth row of the real-time recombination image, and then a real-time recombination image with 2m rows and N columns is obtained;

[0190] wherein m is in the range of [1, M].

[0191] In the above embodiment, m rows are taken as a data block to perform the denoising process, which is described in the above embodiment. Of course, in different embodiments, if m rows are not taken as a data block to perform the process, but the process is performed after scanning M rows in real time, the recombination process is also aimed at the M-row N-column Trace real-time image and the Retrace real-time image.

[0192] In an embodiment, the specific method of unfolding the real-time recombined image is as follows:

[0193] The real-time recombined image is extracted and spliced in the order of odd rows from left to right and even rows from right to left, which is similar to the unfolding method of the zero-scan recombined image. Please refer to Figure 5 .

[0194] It should be noted that in different embodiments, whether it is zero-scan or real-time scanning, the method of unfolding the recombined image is not necessarily the above-mentioned odd rows from left to right and even rows from right to left, but other methods can also be used, as long as the same rule is followed in the unfolding process of zero-scan and real-time scanning, and the positions of denoising correspond to each other.

[0195] In an embodiment, the real-time scanning time domain transformation specifically includes:

[0196] The denoised real-time scanning frequency domain signal data is processed, which can be an inverse fast Fourier transform (IFFT) to convert into a real-time scanning time domain signal, which is a one-dimensional sequence at this time. If the above m rows are taken as a data block, the length of the one-dimensional sequence is 2xmN.

[0197] The real-time scanning time domain signal is reconstructed into a two-dimensional image. Specifically, if the above size is taken as an example, it can be that the first data is taken as a row of the two-dimensional image every N data. Please refer to Figure 6 .

[0198] The reconstructed two-dimensional image is split into a denoised Trace real-time image and a Retrace real-time image. Please refer to Figure 7 , specifically, the (x / 2+1)th row of the image can be taken as the xth row of the Trace real-time image, and the (x / 2+2)th row can be taken as the xth row of the Retrace real-time image.

[0199] The denoised Retrace real-time image is mirrored left and right. Please refer to Figure 7Specifically, the nth point of each row of data can be placed at the position of (N-n+1)th point; because the data is obtained by expanding the above-mentioned odd rows from left to right and even rows from right to left, the Retrace real-time image needs to be left-right mirrored, if the expansion manner followed is different, this step can be omitted, or needs to be transformed according to actual needs.

[0200] In an embodiment, the noise deduction specifically includes:

[0201] With reference to all frequency points in each noise frequency band of the noise deduction template, starting from the lowest frequency point, the data of the corresponding frequency point in the real-time scanning frequency domain signal data can be processed as follows to obtain the frequency domain de-noised data of the frequency point:

[0202] y_amp[k] = |y_real[k]| - f * |y_zero[k]|

[0203] y_theta[k] = arg(y_real[k])

[0204] y_dn[k] = y_amp[k] * exp(y_theta[k] * i)

[0205] wherein y_real[k] and y_zero[k] are the real-time scanning frequency domain value and the zero scanning complex frequency domain value of the frequency point k respectively; |. | represents the modulus of a complex number, and arg(.) represents the argument of a complex number; f is a positive real de-noising intensity factor for adjusting the intensity of noise signal deduction; when the complex frequency domain data is de-noised, only the modulus value is subtracted to obtain the de-noised modulus value y_amp[k] of the frequency point k, and the argument y_theta[k] remains unchanged from the original real-time scanning data; y_dn[k] is the complex value of the frequency point k after noise deduction, wherein exp(.) represents exponential operation, and i is the imaginary unit.

[0206] In an embodiment, the noise segmentation threshold determination specifically includes:

[0207] The zero scanning frequency domain signal data is subjected to window mean filtering; preferably, the window size can be the number n of points of each row of the scanning image;

[0208] The zero scanning frequency domain signal data subjected to window mean filtering is transformed into the interval [0, 1] by a uniformization method; preferably, the uniformization method can adopt maximum-minimum value uniformization;

[0209] According to the uniformized zero scanning frequency domain signal data, a cumulative histogram of a preset classification Y is drawn;

[0210] According to the noise segmentation threshold percentile p, the noise segmentation threshold position THD in the cumulative histogram is determined.

[0211] THD = FFT_L * p

[0212] wherein FFT_L is the length of the zero-scan frequency domain signal data; preferably, the noise segmentation threshold percentage p can be a noise segmentation threshold percentage with a value between 80% and 90%;

[0213] In the cumulative histogram, from the lowest level, the order number of the level at which the cumulative frequency is first greater than or equal to THD is s, and the noise segmentation threshold SPLIT AMP is calculated:

[0214] SPLIT AMP = s / Y * FFT MAX

[0215] wherein FFT MAX is the maximum value of the zero-scan frequency domain signal data.

[0216] Preferably, taking data with a size of M rows and N columns as an example, the preset level Y can be 10N. Of course, in different embodiments, other level numbers can also be used, and the level number can be an integer multiple of the column number N. The more the level numbers, the higher the resolution of the noise segmentation threshold determination. A suitable level number can be selected according to the needs.

[0217] In an embodiment, the noise deduction template generation specifically includes:

[0218] Based on the noise segmentation threshold, the zero-scan frequency domain signal data is segmented, which can be binary segmentation. The frequency points with a value greater than or equal to the noise segmentation threshold are marked as possible noise frequency points (which can be marked as "1"), and the frequency points with a value less than the noise segmentation threshold are marked as non-noise frequency points (which can be marked as "0") to obtain a segmentation result.

[0219] Starting from the first frequency point, all noise frequency bands of the zero-scan frequency domain signal data are determined. Specifically, the position where the value changes from "0" to "1" is the starting point Is of the noise frequency band, and the position where the value changes from "1" to "0" is the end point Ie of the noise frequency band. The starting point and the end point of the noise frequency band must appear in pairs to jointly constitute a description of a noise frequency band. If a starting point is found in the observation and no end point is found until the end of the frequency domain signal data, the last frequency point of the frequency domain signal data is taken as the end point of the noise frequency band corresponding to the starting point. There can be one or more noise frequency bands in the zero-scan frequency domain signal data, and the set of all noise frequency band descriptions constitutes a noise deduction template.

[0220] In an embodiment, in order to further improve the denoising effect, the segmented result and the determination of all noise frequency bands of the zero-scan frequency domain signal data further include:

[0221] The discrete noise frequency points in the segmentation result are closed and connected with a preset window size CON_SIZE. The specific method is as follows:

[0222] From the first frequency point, the subsequent CON_SIZE frequency points are observed one by one. If there is a frequency point marked as a possible noise frequency point ('1') in the subsequent CON_SIZE frequency points, all the frequency points between the two are re-marked as possible noise frequency points ('1'). CON_SIZE is an adjustable parameter, and the value range can be N~2N.

[0223] In an embodiment, a real-time atomic force microscope imaging noise control system is also provided, please refer to Figure 8 which comprises:

[0224] The zero-scan noise template establishment device 1 is used for processing the zero-scan data formed by the zero-scan imaging of the atomic force microscope, obtaining all the noise frequency bands of the zero-scan data, and constituting a noise deduction template. During the zero-scan imaging process, all the motion dimensions of the atomic force microscope used for zero-scan imaging are kept stationary.

[0225] The real-time imaging noise suppression device 2 is used for noise deduction using the noise deduction template during the real-time scanning imaging process of the atomic force microscope.

[0226] In an embodiment, please refer to Figure 9 The zero-scan noise template establishment device 1 specifically comprises:

[0227] The zero-scan imaging module 11 is used for zero-scan imaging of the atomic force microscope to obtain zero-scan data.

[0228] The frequency domain transformation module 12 is used for processing the zero-scan data to obtain zero-scan frequency domain signal data.

[0229] The noise segmentation threshold determination module 13 is used for determining the noise segmentation threshold of the zero-scan frequency domain signal data.

[0230] The noise deduction template generation module 14 is used for determining all the noise frequency bands in the zero-scan frequency domain signal data according to the noise segmentation threshold, and constituting a noise deduction template.

[0231] In an embodiment, please refer to Figure 10 The real-time imaging noise suppression device 2 specifically comprises:

[0232] The real-time scanning imaging module 21 is used for real-time scanning imaging of the atomic force microscope to obtain real-time scanning data.

[0233] The real-time scanning frequency domain transformation module 22 is used for processing the real-time scanning data to obtain real-time scanning frequency domain signal data.

[0234] a noise deduction module 23, configured to perform noise deduction on the real-time scanning frequency domain signal data by using a noise deduction template;

[0235] a real-time scanning time domain conversion module 24, configured to process the de-noised real-time scanning frequency domain signal data and convert the de-noised real-time scanning frequency domain signal data into real-time scanning time domain signals.

[0236] In an embodiment, the zero scanning imaging module 11 specifically includes Figure 11

[0237] a zero scanning data storage unit 111, configured to perform zero scanning imaging by using the atomic force microscope, wherein each frame of zero scanning data is stored as two images, i.e., a Trace image and a Retrace image;

[0238] a zero scanning image recombination unit 112, configured to recombine the Trace image and the Retrace image to obtain a recombined image, wherein the Trace image and the Retrace image in the recombined image correspond to each other in an up-down manner;

[0239] a recombined image unfolding unit 113, configured to unfold the recombined image into a one-dimensional time sequence according to a time sequence in which the data is generated.

[0240] In an embodiment, the real-time scanning imaging module 21 specifically includes Figure 12

[0241] a real-time scanning data storage unit 211, configured to perform real-time scanning imaging by using the atomic force microscope, wherein each frame of real-time scanning data is stored as two images, i.e., a Trace real-time image and a Retrace real-time image;

[0242] a real-time scanning image recombination unit 212, configured to recombine the Trace real-time image and the Retrace real-time image to obtain a real-time recombined image, wherein the Trace image and the Retrace image in the real-time recombined image correspond to each other in an up-down manner;

[0243] a real-time recombined image unfolding unit 213, configured to unfold the real-time recombined image into a one-dimensional time sequence according to a time sequence in which the data is generated.

[0244] In an embodiment, the noise segmentation threshold determination module specifically includes

[0245] a window mean filtering unit, configured to perform window mean filtering on the zero scanning frequency domain signal data;

[0246] a uniformization unit, configured to transform the zero scanning frequency domain signal data after the window mean filtering into an interval of [0, 1] by using a uniformization method; ​​

[0247] The noise segmentation threshold position obtaining unit draws a cumulative histogram of the preset hierarchical Y according to the homogenized zero-scan frequency domain signal data;

[0248] The noise segmentation threshold position THD in the cumulative histogram is determined according to the noise segmentation threshold percentile p:

[0249] THD = FFT_L * p

[0250] where FFT_L is the length of the zero-scan frequency domain signal data;

[0251] The noise segmentation threshold obtaining unit is configured to, starting from the lowest hierarchical level in the cumulative histogram, find the hierarchical sequence number at which the cumulative frequency is first greater than or equal to THD, and calculate the noise segmentation threshold SPLIT_AMP:

[0252] SPLIT_AMP = s / Y * FFT_MAX

[0253] where FFT_MAX is the maximum value of the zero-scan frequency domain signal data.

[0254] In an embodiment, the noise deduction template generation module specifically includes:

[0255] The segmentation result obtaining unit is configured to, taking the noise segmentation threshold as a reference, segment the zero-scan frequency domain signal data, mark frequency points with values greater than or equal to the noise segmentation threshold as possible noise frequency points, and mark frequency points with values less than the noise segmentation threshold as non-noise frequency points, to obtain a segmentation result.

[0256] The all-noise frequency band obtaining unit is configured to, starting from the first frequency point, observe each frequency point one by one, and determine all noise frequency bands of the zero-scan frequency domain signal data

[0257] In an embodiment, the noise deduction template generation module further includes:

[0258] The closed connection unit is configured to, taking a preset window size CON_SIZE, perform closed connection on discrete noise frequency points in the segmentation result, and specifically configured to:

[0259] Starting from the first frequency point, observe each frequency point one by one, and for a frequency point marked as a possible noise frequency point, if there is a frequency point marked as a possible noise frequency point in the CON_SIZE subsequent frequency points, then all frequency points between the two are re-marked as possible noise frequency points.

[0260] In an embodiment, an electronic device is also provided, which is described in detail with reference to Figure 13At the hardware level, the device includes a processor 31, an internal bus 32, a memory 33, and a storage 34, and can also include other hardware required by the service. One or more embodiments of the present application can be implemented in a software manner, such as reading a corresponding computer program from the storage 34 to the memory 33 by the processor 31 and then running. Of course, in addition to the software implementation, one or more embodiments of the present application do not exclude other implementation manners, such as logic devices or a combination of software and hardware, etc., that is, the execution subject of the following processing flow is not limited to each logic unit, but can also be hardware or a logic device. Among them, the processor realizes the steps in the method of any one of the above embodiments by running executable instructions, including:

[0261] Zero scan noise template establishment, processing zero scan data formed by zero scan imaging of the atomic force microscope to obtain all noise frequency bands of the zero scan data, and constructing a noise deduction template; wherein, during the zero scan imaging, all motion dimensions of the atomic force microscope used for the zero scan imaging remain stationary;

[0262] Real-time scan imaging noise suppression, using the noise deduction template to perform noise deduction during real-time scan imaging of the atomic force microscope.

[0263] In an embodiment, a storage medium having a computer program stored thereon is also provided, and the computer program is executed by a processor to realize the steps in the method of any one of the above embodiments, including:

[0264] Zero scan noise template establishment, processing zero scan data formed by zero scan imaging of the atomic force microscope to obtain all noise frequency bands of the zero scan data, and constructing a noise deduction template; wherein, during the zero scan imaging, all motion dimensions of the atomic force microscope used for the zero scan imaging remain stationary;

[0265] Real-time scan imaging noise suppression, using the noise deduction template to perform noise deduction during real-time scan imaging of the atomic force microscope.

[0266] Storage media includes permanent and non-permanent, removable and non-removable media, which can be implemented by any method or technology to store information. The information can be computer readable instructions, data structures, program modules or other data. Examples of computer storage media include, but are not limited to, phase change memory (PRAM), static random access memory (SRAM), dynamic random access memory (DRAM), other types of random access memory (RAM), read-only memory (ROM), electrically erasable programmable read-only memory (EEPROM), flash memory or other memory technologies, compact disc read-only memory (CD-ROM), digital versatile disc (DVD) or other optical storage, magnetic cassette, disk storage, quantum memory, graphene-based storage medium or other magnetic storage device, or any other non-transmission medium that can be used to store information that can be accessed by a computing device.

[0267] In the description of the present specification, the description of the terms "one embodiment", "one example", "specific implementation process", "one example" and the like means that the specific features, structures, materials or characteristics described in combination with the embodiment or example are included in at least one embodiment or example of the present application. In the present specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0268] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present application, and not to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand: it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement to part or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A method for real-time control of imaging noise in an atomic force microscope, characterized in that, include: A zero-scan noise template is established by processing the zero-scan data generated by the zero-scan imaging of the atomic force microscope to obtain the entire noise frequency band of the zero-scan data, thus forming a noise subtraction template; wherein, during the zero-scan imaging process, all motion dimensions of the atomic force microscope used for zero-scan imaging remain stationary. Real-time scanning imaging noise suppression: During the real-time scanning imaging process of the atomic force microscope, noise reduction is performed using the noise reduction template. The establishment of the zero-scan noise template specifically includes: Zero-scan imaging: Atomic force microscopy is used to perform zero-scan imaging to obtain zero-scan data; Zero-scan frequency domain transformation is performed to process the zero-scan data and obtain zero-scan frequency domain signal data; Noise segmentation threshold determination: Determine the noise segmentation threshold for the zero-scan frequency domain signal data; Noise subtraction template generation: Based on the noise segmentation threshold, all noise frequency bands in the zero-scan frequency domain signal data are determined to form a noise subtraction template; The real-time scanning imaging noise suppression specifically includes: Real-time scanning imaging: Atomic force microscopy is used to perform real-time scanning imaging to obtain real-time scanning data; Real-time scanning frequency domain transformation is performed to process the real-time scanning data and obtain real-time scanning frequency domain signal data; Noise reduction: The noise reduction template is used to perform noise reduction on the real-time scanned frequency domain signal data; Real-time scanning time-domain transformation processes the denoised real-time scanning frequency domain signal data, converting it into a real-time scanning time-domain signal for real-time imaging output; The noise reduction specifically includes: By comparing all frequency points within each noise frequency band of the noise subtraction template, the data of the corresponding frequency point in the real-time scanned frequency domain signal data is processed as follows to obtain the frequency domain denoised data for that frequency point: ； ； ； in, and These are the real-time scan frequency domain value and the zero-scan complex frequency domain value at frequency point k, respectively; The modulus of a complex number, The argument of the complex number is represented by f; f is a positive real denoising intensity factor used to adjust the intensity of noise signal subtraction; when performing noise subtraction on complex frequency domain data, only the magnitude is subtracted to obtain the denoised magnitude at frequency point k. And its argument It remains unchanged from the original real-time scan data; Let k be the complex value after noise subtraction at frequency point k, where This indicates exponentiation, where i is the imaginary unit; The determination of the noise segmentation threshold specifically includes: Window mean filtering is applied to the zero-scan frequency domain signal data; By using a homogenization method, the zero-scan frequency domain signal data after window mean filtering is transformed to the interval [0, 1]. Based on the uniformized zero-scan frequency domain signal data, plot the cumulative histogram of the preset grade Y; The noise segmentation threshold position (THD) in the cumulative histogram is determined based on the noise segmentation threshold percentile p. ； in, The length of the zero-scan frequency domain signal data; Starting from the lowest level in the cumulative histogram, find the level number where the cumulative frequency first exceeds or equals THD, denoted as s, and calculate the noise segmentation threshold. : ； in, This represents the maximum value of the zero-scan frequency domain signal data.

2. The method for real-time control of imaging noise in atomic force microscopy according to claim 1, characterized in that, The real-time scanning imaging noise suppression process treats m consecutive lines of real-time scanning data as a single data block; where m takes the value [1, M], and M is the number of lines in the zero-scan imaging. When the number of rows of image data generated by the real-time scanning imaging is less than m rows, the real-time displayed image data is the image data without noise subtraction; When the image data generated by the real-time scanning imaging is m rows, noise subtraction is performed on the data block composed of m rows of image data, and the m rows of image data after noise subtraction are updated to the image data from the 1st row to the mth row. For each new line of image data generated by the real-time scanning imaging, it is merged with the previous m-1 lines of image data to form a data block of m lines for noise removal. The noise-removed image data is then used to update the previous m lines of image data, including the current line. This process is repeated until the real-time scanning reaches the number of lines M.

3. The method for real-time control of imaging noise in atomic force microscopy according to claim 1, characterized in that, The zero-scan imaging specifically includes: Zero-scan data storage: The atomic force microscope performs zero-scan imaging, wherein each frame of zero-scan data is stored as two images: a Trace image and a Retrace image. Zero-scan image reconstruction involves reconstructing the Trace image and the Retrace image to obtain a reconstructed image, in which the Trace image and the Retrace image correspond one-to-one vertically. The reconstructed image is unfolded into a one-dimensional time series according to the time sequence of data generation.

4. The method for real-time control of imaging noise in atomic force microscopy according to claim 3, characterized in that, The specific method for zero-scan image reconstruction is as follows: For the Trace image and Retrace image with a size of M rows and N columns, the x-th row of the Trace image is used as the 2x-1th row of the reconstructed image, and the x-th row of the Retrace image is used as the 2xth row of the reconstructed image, thus obtaining a reconstructed image with 2M rows and N columns.

5. The method for real-time control of imaging noise in atomic force microscopy according to claim 4, characterized in that, The specific method for unfolding the reconstructed image is as follows: The reconstructed image is extracted and stitched together sequentially in the order of odd-numbered rows from left to right and even-numbered rows from right to left.

6. The method for real-time control of imaging noise in atomic force microscopy according to claim 5, characterized in that, The real-time scanning imaging specifically includes: Real-time scanning data storage: The atomic force microscope performs real-time scanning imaging, wherein each frame of real-time scanning data is stored as two images: a Trace real-time image and a Retrace real-time image. Real-time scan image reconstruction: The Trace real-time image and the Retrace real-time image are reconstructed to obtain a real-time reconstructed image, in which the Trace image and the Retrace image correspond one-to-one vertically; The real-time reconstructed image is unfolded into a one-dimensional time series according to the time sequence of data generation.

7. The method for real-time control of imaging noise in atomic force microscopy according to claim 6, characterized in that, The specific method for real-time scanned image reconstruction is as follows: For the Trace real-time image and Retrace real-time image with a size of m rows and N columns, the x-th row of the Trace real-time image is used as the 2x-1th row of the real-time reconstructed image, and the x-th row of the Retrace real-time image is used as the 2xth row of the real-time reconstructed image, thus obtaining a real-time reconstructed image with 2m rows and N columns; The value of m ranges from [1, M].

8. The method for real-time control of imaging noise in atomic force microscopy according to claim 7, characterized in that, The specific method for real-time image reconstruction and unfolding is as follows: The real-time reconstructed image is extracted and stitched together sequentially in the order of odd-numbered rows from left to right and even-numbered rows from right to left.

9. The method for real-time control of imaging noise in atomic force microscopy according to claim 8, characterized in that, The real-time scanning time-domain transformation specifically includes: The denoised real-time scanning frequency domain signal data is processed and converted into a real-time scanning time domain signal; The real-time scanning time-domain signal is reconstructed into a two-dimensional image; The reconstructed 2D image is split into a denoised Trace real-time image and a Retrace real-time image. The denoised Retrace real-time image is then mirrored left and right.

10. The method for real-time control of imaging noise in atomic force microscopy according to any one of claims 1 to 9, characterized in that, The noise subtraction template generation specifically includes: Based on the noise segmentation threshold, the zero-scan frequency domain signal data is segmented. Frequency points with values ​​greater than or equal to the noise segmentation threshold are marked as possible noise frequency points, and frequency points with values ​​less than the noise segmentation threshold are marked as non-noise frequency points, thus obtaining the segmentation result. Starting from the first frequency point, observe each frequency point one by one to determine the entire noise frequency band of the zero-scan frequency domain signal data.

11. The method for real-time control of imaging noise in atomic force microscopy according to claim 10, characterized in that, The relationship between obtaining the segmentation result and determining the entire noise frequency band of the zero-scan frequency domain signal data also includes: With preset window size The discrete noise frequency points in the segmentation result are closed-loop connected, specifically by the following method: Starting from the first frequency point, observe each frequency point one by one. For frequencies marked as potential noise points, if their subsequent frequencies... If there is a frequency point that is marked as a possible noise frequency point, then all frequency points between the two will be remarked as possible noise frequencies points.

12. A real-time control system for imaging noise in an atomic force microscope, characterized in that, include: A zero-scan noise template establishment device is used to process the zero-scan data formed by zero-scan imaging of an atomic force microscope to obtain the entire noise frequency band of the zero-scan data and form a noise subtraction template; wherein, during the zero-scan imaging process, all motion dimensions of the atomic force microscope used for zero-scan imaging remain stationary. The real-time imaging noise suppression device is used to perform noise reduction using the noise reduction template during the real-time scanning imaging process of the atomic force microscope. The zero-scan noise template establishment device specifically includes: The zero-scan imaging module is used for zero-scan imaging in atomic force microscopy to obtain zero-scan data. The frequency domain transformation module is used to process the zero-scan data to obtain zero-scan frequency domain signal data; The noise segmentation threshold determination module is used to determine the noise segmentation threshold of the zero-scan frequency domain signal data; The noise subtraction template generation module is used to determine all noise frequency bands in the zero-scan frequency domain signal data based on the noise segmentation threshold, and to form a noise subtraction template. The real-time imaging noise suppression device specifically includes: The real-time scanning imaging module is used for real-time scanning imaging in atomic force microscopy to obtain real-time scanning data. The real-time scanning frequency domain transformation module is used to process the real-time scanning data to obtain real-time scanning frequency domain signal data; The noise reduction module is used to perform noise reduction on the real-time scanned frequency domain signal data using the noise reduction template; The real-time scanning time-domain transformation module is used to process the denoised real-time scanning frequency domain signal data and convert it into a real-time scanning time domain signal. The noise segmentation threshold determination module specifically includes: A window mean filtering unit is used to perform window mean filtering on the zero-scan frequency domain signal data; The homogenization unit is used to transform the zero-scan frequency domain signal data after window mean filtering to the interval [0, 1] by homogenization. The noise segmentation threshold position acquisition unit draws a cumulative histogram of preset grade Y based on the uniformized zero-scan frequency domain signal data. The noise segmentation threshold position (THD) in the cumulative histogram is determined based on the noise segmentation threshold percentile p. ； in, The length of the zero-scan frequency domain signal data; The noise segmentation threshold acquisition unit is used to find, starting from the lowest level in the cumulative histogram, the level number (denoted as s) where the cumulative frequency first exceeds or equals the THD, and then calculate the noise segmentation threshold. : ； in, This represents the maximum value of the zero-scan frequency domain signal data.

13. The real-time noise control system for atomic force microscopy imaging according to claim 12, characterized in that, The zero-scan imaging module specifically includes: A zero-scan data storage unit is used for zero-scan imaging by the atomic force microscope, wherein each frame of zero-scan data is stored as two images: a Trace image and a Retrace image. The zero-scan image reconstruction unit is used to reconstruct the Trace image and the Retrace image to obtain a reconstructed image, wherein the Trace image and the Retrace image are in one-to-one vertical correspondence in the reconstructed image; The reconstructed image unfolding unit is used to unfold the reconstructed image into a one-dimensional time series according to the time sequence of data generation.

14. The real-time noise control system for atomic force microscopy imaging according to claim 13, characterized in that, The real-time scanning imaging module specifically includes: A real-time scanning data storage unit is used for the atomic force microscope to perform real-time scanning imaging, wherein each frame of real-time scanning data is stored as two images: a Trace real-time image and a Retrace real-time image. A real-time scan image reconstruction unit is used to reconstruct the Trace real-time image and the Retrace real-time image to obtain a real-time reconstructed image, wherein the Trace image and the Retrace image are in one-to-one vertical correspondence in the real-time reconstructed image; The real-time reconstructed image unfolding unit is used to unfold the real-time reconstructed image into a one-dimensional time series according to the time sequence of data generation.

15. The real-time noise control system for atomic force microscopy imaging according to any one of claims 12 to 14, characterized in that, The noise subtraction template generation module specifically includes: The segmentation result acquisition unit is used to segment the zero-scan frequency domain signal data based on the noise segmentation threshold, mark frequency points with values ​​greater than or equal to the noise segmentation threshold as possible noise frequency points, and mark frequency points with values ​​less than the noise segmentation threshold as non-noise frequency points, thereby obtaining the segmentation result. The complete noise frequency band acquisition unit is used to observe one frequency point at a time starting from the first frequency point to determine the complete noise frequency band of the zero-scan frequency domain signal data.

16. The real-time noise control system for atomic force microscopy imaging according to claim 15, characterized in that, The noise subtraction template generation module further includes: Closed connection unit, used to achieve a preset window size The discrete noise frequency points in the segmentation result are closed-loop connected, specifically for: Starting from the first frequency point, observe each frequency point one by one. For frequencies marked as potential noise points, if their subsequent frequencies... If there is a frequency point that is marked as a possible noise frequency point, then all frequency points between the two will be remarked as possible noise frequencies points.

17. An electronic device, characterized in that, include: processor; And, memory used to store processor-executable instructions; The processor implements the steps of the method according to any one of claims 1-11 by running the executable instructions.

18. A computer-readable storage medium, characterized in that, It stores a computer program that, when executed by a processor, implements the steps of the method described in any one of claims 1-11.

Images