Positioning jig

Abstract

The embodiment of the invention discloses a positioning jig. The positioning jig comprises a base, a fixing assembly, an adjusting assembly and a positioning assembly. A placing space for placing a probe head is formed on the base, and a first accommodating groove for accommodating the upper guide plate is formed below the placing space; the positioning assembly comprises at least three first positioning points and a positioning frame, the positioning frame is connected with the base, and a second containing groove used for containing a lower guide plate is formed in the positioning frame; the fixing assembly comprises a first fixing structure and a second fixing structure; and the adjusting assembly is used for applying thrust to the two positioning side edges of the probe head, so that the probe head and the lower guide plate generate relative displacement. According to the embodiment of the invention, the position adjustment of the probe head and the lower guide plate is realized, that is, the position adjustment of the upper guide plate and the lower guide plate is realized, and the relative position between the two guide plates can be adjusted more accurately.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor testing tools, and in particular to a positioning fixture. Background Art

[0002] During the manufacturing process of semiconductor chips, there are multiple testing processes to ensure that the shipped chips function normally and meet quality standards. Among them, CP testing refers to the testing of the chip on the wafer in an uncut state before the chip is packaged after tape-out. The purpose is to complete the testing of some or all chip functions before packaging, detect chip manufacturing problems as early as possible, and reduce the packaging cost waste caused by manufacturing defects during chip tape-out.

[0003] CP testing requires a probe card as a testing tool. One side of the probe card is connected to the test channel of the tester, and the other side contacts the test points on the chip through the probes, thereby realizing the electrical signal connection between the tester and the chip to be tested for testing. With the evolution of chip manufacturing and packaging processes, the spacing between chip test points is getting smaller and smaller, and the difficulty of testing is increasing, so the size of the probes is getting smaller and smaller. A guide plate is required in the probe card structure to fix and guide the probe. The guide plate is divided into an upper plate and a lower plate, and its processing and assembly accuracy directly affects the position accuracy and contact performance of the probe. As the probe size and the spacing between test points become smaller and smaller, the requirements for the processing accuracy and assembly accuracy of the guide plate become higher and higher.

[0004] In the prior art, a support is designed between the upper and lower guide plates, and the guide plate is positioned with the support through positioning pins and positioning holes. However, the positioning error of the pin holes is more than 20 microns, which cannot meet the assembly requirements of probe cards with small size and small spacing. Therefore, this application designs a special positioning fixture based on optics to achieve the positioning of the upper and lower guide plates to meet the more precise assembly requirements of advanced probe cards. Summary of the invention

[0005] The present application aims to solve at least one of the technical problems existing in the prior art. To this end, the present application proposes a positioning fixture to solve the problem of large positioning deviation of the upper and lower guide plates.

[0006] The present application provides a positioning fixture, comprising: a base, a fixing component, an adjustment component and a positioning component;

[0007] A placement space for placing the probe head is formed on the base, and a first receiving groove for accommodating the upper guide plate is provided below the placement space;

[0008] The positioning assembly includes at least three first positioning points and a positioning frame, at least three of the first positioning points are respectively arranged on two adjacent side edges of the placement space, and are used to abut against the two positioning side edges of the probe head, the positioning frame is connected to the base, a second accommodating groove for accommodating the lower guide plate is provided in the positioning frame, at least three second positioning points are respectively arranged on two adjacent positioning side edges of the lower guide plate, and are used to abut against the two positioning side edges of the lower guide plate;

[0009] One of the positioning side edges of the probe head is arranged opposite to one of the positioning side edges of the lower guide plate, and the other positioning side edge of the probe head is arranged opposite to the other positioning side edge of the lower guide plate;

[0010] The fixing assembly includes a first fixing structure and a second fixing structure, wherein the first fixing structure is used to apply pressure to two adjacent fixing sides of the probe head so that the two positioning sides of the probe head have a tendency to move toward the position of at least three of the first positioning points, and the two fixing sides of the probe head are respectively arranged opposite to its two positioning sides; the second fixing structure is used to apply pressure to two adjacent fixing sides of the lower guide plate so that the two positioning sides of the lower guide plate are against at least three of the second positioning points, and the two fixing sides of the lower guide plate are respectively arranged opposite to its two positioning sides;

[0011] The adjusting assembly is used to apply thrust to the two positioning side edges of the probe head so as to cause relative displacement between the probe head and the lower guide plate.

[0012] Based on the positioning fixture, the base can provide a preliminary placement position for the probe head. After the probe head is buckled into the placement space on the base, the first fixing structure can be used to fix the probe head on at least three first positioning points, and then the positioning frame can be installed on the bottom surface of the probe head, and the second fixing structure can be used to fix the lower guide plate on at least three second positioning points, thereby realizing the positioning and fixing of the probe head and the lower guide plate. Then, the adjusting component can be adjusted to make the positioning side of the probe head that is against the first positioning point move toward the fixed side of the lower guide plate, thereby realizing the position adjustment of the probe head and the lower guide plate, and also realizing the position adjustment of the upper guide plate and the lower guide plate. Since the upper guide plate, the lower guide plate and the probe head are all fixed first, and when the probe head is pushed, the lower guide plate is always fixed by the positioning frame, so the relative position between the two guide plates can be adjusted more accurately.

[0013] Optionally, the number of the first fixing structures is two, and the two first fixing structures are respectively arranged opposite to two fixed sides of the probe head, and the first fixing structure is used to apply pressure perpendicular to the fixed side of the corresponding probe head.

[0014] Furthermore, based on the above-mentioned first fixing structure, reliable pressure can be applied to the fixed side of the probe head to lock and fix it. It should be noted that the first fixing structure can be an elbow clamp, a spring needle, a spring sheet, a cylinder, an electric cylinder or other structures. As long as reliable pressure can be applied to the fixed side of the probe head to ensure the locking and fixation of the probe head, it can be suffice.

[0015] Optionally, the direction of the pressure applied by the first fixing structure to the fixed side of the probe head passes through a range surrounded by at least three of the first positioning points.

[0016] Furthermore, based on the above-mentioned first fixing structure, when the first fixing structure applies pressure to the fixing side of the probe head, the supporting and limiting effect of the first positioning point on the probe head will not be affected, thereby ensuring the stability of the probe head.

[0017] Optionally, at least two of the first positioning points are respectively arranged on two positioning side edges of the probe head, and are located away from a connection point between the two positioning side edges of the probe head.

[0018] Furthermore, based on the above-mentioned setting method of the first positioning point, the stability and reliability of the support and limitation of the probe head by the first positioning point can be further improved.

[0019] Optionally, a locking structure is provided on the first fixing structure to lock the end portion used to support the fixing side.

[0020] Furthermore, based on the above-mentioned first fixing structure, after the fixed side of the probe head is squeezed and fixed, the fixed side of the probe head can be reliably supported when the probe head is squeezed and adjusted by the adjustment assembly, thereby performing controllable adjustment on the probe head.

[0021] Optionally, the bottom of the positioning frame has a limiting surface that is fitted with the bottom surface of the probe head, and / or the top of the base has a limiting surface that is fitted with the top surface of the probe head.

[0022] Furthermore, based on the above positioning frame and base, the probe head can be reliably limited and supported in the vertical direction, increasing the contact area between two adjacent ones of the three, so that the probe head can be stably clamped by the bottom surface of the positioning frame and the top of the base.

[0023] Optionally, the positioning frame is provided with a limiting portion that cooperates with the bottom surface of the lower guide plate.

[0024] Furthermore, based on the above-mentioned positioning frame, the lower guide plate can be prevented from falling out in the direction away from the probe head, wherein the positioning frame can also set the position for accommodating the lower guide plate to a groove structure with a single-side opening, and the limiting portion can also be formed by part of the second positioning point or part of the second fixed structure.

[0025] Optionally, the number of the first positioning points and the number of the second positioning points are both three, wherein two of the first positioning points are arranged opposite to one of the second positioning points, and the remaining one of the first positioning points is arranged opposite to the remaining two of the second positioning points.

[0026] Furthermore, based on the setting of the above-mentioned first positioning points and the second positioning points, the two first positioning points and one of the second positioning points can form a stable triangular support, and the remaining first positioning point and the remaining two second positioning points can also form a stable triangular support, thereby ensuring that when the adjustment component is adjusted, the lower guide plate and the probe head can be more stable.

[0027] Optionally, the number of the adjustment components is three, two of which are arranged on the positioning side of the probe head having two first positioning points, and are used to apply a thrust to the positioning side toward the position where only one second positioning point is located, and the other adjustment component is arranged on the positioning side of the probe head having one first positioning point, and is used to apply a thrust to the positioning side toward the positions where two second positioning points are located.

[0028] Optionally, the two adjustment components located on the same positioning side are respectively arranged on the outsides of the two first positioning points on the positioning side, and the other adjustment component is located in the middle position of the corresponding positioning side.

[0029] Furthermore, based on the above-mentioned adjustment component, when fine-tuning the position of the probe head, the adjustment component can be used to squeeze the positioning side of the probe head to achieve reliable support, thereby ensuring the stability of the probe head during fine-tuning.

[0030] Additional aspects and advantages of the present application will be given in part in the description below, and in part will become apparent from the description below, or will be learned through the practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] The disclosure of the present application will become more easily understood with reference to the accompanying drawings. It is easy for those skilled in the art to understand that these drawings are only for illustrative purposes and are not intended to limit the scope of protection of the present application. In addition, similar numbers in the drawings are used to represent similar components, among which:

[0032] Figure 1 This is a schematic diagram of the structure of the positioning fixture described in the embodiment of the present application;

[0033] Figure 2 This is a schematic diagram of the structure in which a probe head is placed in the positioning fixture described in an embodiment of the present application;

[0034] Figure 3 for Figure 2Schematic diagram of the structure on the back.

[0035] Description of Reference Numerals

[0036] 11. Base; 111. First accommodating groove; 121. First positioning point; 122. Positioning frame; 123. Second positioning point; 131. First fixing structure; 132. Second fixing structure; 14. Adjustment assembly; 21. Probe head; 22. Upper guide plate; 23. Lower guide plate. DETAILED DESCRIPTION

[0037] Some embodiments of the present application are described below with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are only used to explain the technical principles of the present application and are not intended to limit the protection scope of the present application.

[0038] In the prior art, a support is designed between the upper and lower guide plates, and the guide plate is positioned with the support through positioning pins and positioning holes. However, the positioning error of the pin holes is more than 20 microns, which cannot meet the assembly requirements of probe heads with small sizes and small spacing. Therefore, this application designs a special positioning fixture based on optics to achieve the positioning of the upper and lower guide plates to meet the more precise assembly requirements of advanced probe heads.

[0039] Based on this, the present application provides a positioning fixture, and the base can provide a preliminary placement position for the probe head. After the probe head is buckled into the placement space on the base, the probe head can be fixed on at least three first positioning points using the first fixing structure, and then the positioning frame can be installed on the bottom surface of the probe head, and the lower guide plate can be fixed on at least three second positioning points using the second fixing structure, thereby realizing the positioning and fixing of the probe head and the lower guide plate. Then, the positioning side of the probe head that is against the first positioning point can be displaced toward the fixed side of the lower guide plate by adjusting the adjustment component, thereby realizing the position adjustment of the probe head and the lower guide plate, and also realizing the position adjustment of the upper guide plate and the lower guide plate. Since the upper guide plate, the lower guide plate and the probe head are all fixed first, and when the probe head is pushed, the lower guide plate is always fixed by the positioning frame, so the relative position between the two guide plates can be adjusted more accurately.

[0040] The present application will be described in detail below through specific embodiments.

[0041] Reference Figures 1 to 3As shown, this embodiment provides a positioning fixture, including: a base 11, a fixing component, an adjustment component and a positioning component; a placement space for placing a probe head 21 is formed on the base 11, and a first accommodating groove 111 for accommodating an upper guide plate 22 is provided below the placement space; the positioning component includes at least three first positioning points 121 and a positioning frame 122, at least three first positioning points 121 are respectively arranged on two adjacent side edges of the placement space, and are used to abut against the two positioning side edges of the probe head 21, the positioning frame 122 is connected to the base 11, and a second accommodating groove for accommodating a lower guide plate 23 is provided in the positioning frame 122, at least three second positioning points 123 are respectively arranged on two adjacent positioning side edges of the lower guide plate 23, and are used to abut against the two positioning side edges of the lower guide plate 23; one of the positioning sides of the probe head 21 is arranged relative to one of the positioning sides of the lower guide plate 23 , the other positioning side edge of the probe head 21 is arranged opposite to the other positioning side edge of the lower guide plate 23; the fixing assembly includes a first fixing structure 131 and a second fixing structure 132, the first fixing structure 131 is used to apply pressure to the two adjacent fixed sides of the probe head 21, so that the two positioning sides of the probe head 21 have a tendency to move toward the position of at least three first positioning points 121, and the two fixed sides of the probe head 21 are respectively arranged opposite to its two positioning sides; the second fixing structure 132 is used to apply pressure to the two adjacent fixed sides of the lower guide plate 23, so that the two positioning sides of the lower guide plate 23 are against at least three second positioning points 123, and the two fixed sides of the lower guide plate 23 are respectively arranged opposite to its two positioning sides; the adjusting assembly 14 is used to apply thrust to the two positioning sides of the probe head 21, so that the probe head 21 and the lower guide plate 23 are relatively displaced.

[0042] It should be noted that the top surface of the probe head 21 is first bonded and fixed together with the upper guide plate 22, and the two can be roughly positioned by means of positioning pins, etc., and then the top surface of the probe head 21 is turned downward and buckled onto the placement space on the top surface of the base 11, so that the bottom surface of the probe head 21 is placed facing upwards, and subsequently the bottom surface of the lower guide plate 23 needs to be placed facing upwards on the bottom surface of the probe head 21, and then adjusted.

[0043] The positioning fixture provided in this embodiment, the base 11 can provide a preliminary placement position for the probe head 21. After the probe head 21 is buckled into the placement space on the base 11, the probe head 21 can be fixed on at least three first positioning points 121 by using the first fixing structure 131, and then the positioning frame 122 is installed on the bottom surface of the probe head 21, and the lower guide plate 23 is fixed on at least three second positioning points 123 by using the second fixing structure 132, thereby realizing the positioning and fixing work of the probe head 21 and the lower guide plate 23, and then the adjustment can be adjusted. The joint assembly 14 causes the positioning side of the probe head 21 that is against the first positioning point 121 to move toward the fixed side of the lower guide plate 23, thereby realizing the position adjustment of the probe head 21 and the lower guide plate 23, and also realizing the position adjustment of the upper guide plate 22 and the lower guide plate 23. Since the upper guide plate 22, the lower guide plate 23 and the probe head 21 are all fixed first, and when the probe head 21 is pushed, the lower guide plate 23 is always fixed by the positioning frame 122, so the relative position between the two guide plates can be adjusted more accurately.

[0044] In some embodiments, there are two first fixing structures 131 , which are respectively arranged opposite to two fixed sides of the probe head 21 , and are used to apply pressure perpendicular to the fixed side of the corresponding probe head 21 .

[0045] Furthermore, based on the above-mentioned first fixing structure 131, reliable pressure can be applied to the fixed side of the probe head 21 to lock and fix it. It should be noted that the first fixing structure 131 can be a structure such as an elbow clamp, a spring needle, a spring sheet, a cylinder, an electric cylinder, etc., as long as reliable pressure can be applied to the fixed side of the probe head 21 to ensure that the probe head 21 is locked and fixed.

[0046] Continue to refer to Figure 1 and Figure 2 As shown, the direction of the pressure applied by the first fixed structure 131 to the fixed side of the probe head 21 passes through the range surrounded by at least three first positioning points 121, that is, the pressure applied by the first fixed structure 131 to the fixed side of the probe head 21 can continue to extend along its pressure direction and pass through the range surrounded by all first positioning points 121.

[0047] Furthermore, based on the first fixing structure 131 , when the first fixing structure 131 applies pressure to the fixed side of the probe head 21 , the supporting and limiting effect of the first positioning point 121 on the probe head 21 will not be affected, thereby ensuring the stability of the probe head 21 .

[0048] Continue to refer to Figure 1 and Figure 2As shown, at least two first positioning points 121 are respectively arranged on the two positioning sides of the probe head 21, and are located at a position away from the connection between the two positioning sides of the probe head 21. It should be understood that the two positioning sides of the probe head 21 are arranged adjacent to each other, and setting the two first positioning points 121 on the two positioning sides at a position away from the connection between the two positioning sides can expand the support range formed by all the first positioning points 121.

[0049] Furthermore, based on the above-mentioned arrangement of the first positioning point 121 , the stability and reliability of the support and positioning of the probe head 21 by the first positioning point 121 can be further improved.

[0050] Optionally, a locking structure is provided on the first fixing structure 131 to lock the end portion for supporting and fixing the side edge. Specifically, the first fixing structure 131 may be a structure such as a toggle clamp or a lead screw with a locking function.

[0051] Furthermore, based on the above-mentioned first fixing structure 131, after the fixed side of the probe head 21 is squeezed and fixed, when the probe head 21 is squeezed and adjusted by the adjustment component 14, it can be ensured that the fixed side of the probe head 21 can be reliably supported, thereby performing controllable adjustment on the probe head 21.

[0052] Optionally, the bottom of the positioning frame 122 has a limiting surface that is fitted with the bottom surface of the probe head 21 , and / or the top of the base 11 has a limiting surface that is fitted with the top surface of the probe head 21 .

[0053] Furthermore, based on the above-mentioned positioning frame 122 and base 11, the probe head 21 can be reliably limited and supported in the vertical direction, increasing the contact area between two adjacent ones of the three, so that the probe head 21 can be stably clamped by the bottom surface of the positioning frame 122 and the top of the base 11.

[0054] Optionally, the positioning frame 122 is provided with a limiting portion that cooperates with the bottom surface of the lower guide plate 23 to limit the position.

[0055] Furthermore, based on the above-mentioned positioning frame 122, the lower guide plate 23 can be prevented from falling out in the direction away from the probe head 21, wherein the positioning frame 122 can also set the position for accommodating the lower guide plate 23 to a groove structure with a single-side opening, and the limiting portion can also be formed by part of the second positioning point 123 or part of the second fixed structure 132.

[0056] Continue to refer to Figure 1 and Figure 2As shown, the number of the first positioning points 121 and the number of the second positioning points 123 are both three, wherein two first positioning points 121 are arranged opposite to one second positioning point 123 , and the remaining first positioning point 121 is arranged opposite to the remaining two second positioning points 123 .

[0057] Furthermore, based on the setting of the above-mentioned first positioning point 121 and the second positioning point 123, the two first positioning points 121 and one of the second positioning points 123 can form a stable triangular support, and the remaining first positioning point 121 and the remaining two second positioning points 123 can also form a stable triangular support, thereby ensuring that when the adjustment component 14 is adjusted, the lower guide plate 23 and the probe head 21 can be more stable.

[0058] Optionally, the number of adjustment components 14 is three, two of which are arranged on the positioning side of the probe head 21 having two first positioning points 121, and are used to apply a thrust to the positioning side toward the position where only one second positioning point 123 is located, and another adjustment component 14 is arranged on the positioning side of the probe head 21 having one first positioning point 121, and is used to apply a thrust to the positioning side toward the position where the two second positioning points 123 are located. In some embodiments, the adjustment component 14 can be a knob that can be fine-tuned by rotation, and the adjustment component 14 is installed on the base 11. By rotating the adjustment component 14, the end of the knob can be extended and squeezed to the positioning side of the probe head 21, thereby achieving fine-tuning.

[0059] Optionally, two adjustment components 14 located on the same positioning side are respectively arranged outside two first positioning points 121 on the positioning side, and another adjustment component 14 is located in the middle position of the corresponding positioning side.

[0060] Furthermore, based on the above-mentioned adjustment component 14, when fine-tuning the position of the probe head 21, the adjustment component 14 can be used to squeeze the positioning side of the probe head 21 to achieve reliable support, thereby ensuring the stability of the probe head 21 during fine-tuning.

[0061] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0062] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of this application, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0063] Although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limitations on the present application. Ordinary technicians in this field can change, modify, replace and modify the above embodiments within the scope of the present application.

Claims

1. A positioning fixture, characterized in that: include: A base (11), a fixing assembly, an adjustment assembly and a positioning assembly; A placement space for placing the probe head (21) is formed on the base (11), and a first receiving groove (111) for accommodating the upper guide plate (22) is provided below the placement space; The positioning assembly comprises at least three first positioning points (121) and a positioning frame (122); the at least three first positioning points (121) are respectively arranged on two adjacent side edges of the placement space and are used to abut against the two positioning side edges of the probe head (21); the positioning frame (122) is connected to the base (11); a second accommodating groove for accommodating the lower guide plate (23) is provided in the positioning frame (122); the at least three second positioning points (123) are respectively arranged on two adjacent positioning side edges of the lower guide plate (23) and are used to abut against the two positioning side edges of the lower guide plate (23); One of the positioning side edges of the probe head (21) is arranged opposite to one of the positioning side edges of the lower guide plate (23), and the other positioning side edge of the probe head (21) is arranged opposite to the other positioning side edge of the lower guide plate (23); The fixing assembly comprises a first fixing structure (131) and a second fixing structure (132), wherein the first fixing structure (131) is used to apply pressure to two adjacent fixing sides of the probe head (21) so that the two positioning sides of the probe head (21) have a tendency to move toward the positions of at least three of the first positioning points (121), and the two fixing sides of the probe head (21) are respectively arranged opposite to its two positioning sides; the second fixing structure (132) is used to apply pressure to two adjacent fixing sides of the lower guide plate (23) so that the two positioning sides of the lower guide plate (23) are abutted against at least three of the second positioning points (123), and the two fixing sides of the lower guide plate (23) are respectively arranged opposite to its two positioning sides; The adjustment assembly (14) is used to apply a thrust to the two positioning side edges of the probe head (21) so as to cause relative displacement between the probe head (21) and the lower guide plate (23).

2. The positioning fixture according to claim 1, characterized in that: The number of the first fixing structures (131) is two, and the two first fixing structures (131) are respectively arranged opposite to the two fixed side edges of the probe head (21), and the first fixing structure (131) is used to apply pressure perpendicular to the fixed side edge of the corresponding probe head (21).

3. The positioning fixture according to claim 2, characterized in that: The direction of the pressure applied by the first fixing structure (131) to the fixed side of the probe head (21) passes through a range surrounded by at least three of the first positioning points (121).

4. The positioning fixture according to claim 1, characterized in that: At least two of the first positioning points (121) are respectively arranged on two positioning side edges of the probe head (21), and are located away from the connection point of the two positioning side edges of the probe head (21).

5. The positioning fixture according to claim 1, characterized in that: The first fixing structure (131) is provided with a locking structure for locking the end portion used for supporting the fixing side edge.

6. The positioning fixture according to claim 1, characterized in that: The bottom of the positioning frame (122) has a limiting surface that is arranged to fit with the bottom surface of the probe head (21), and / or the top of the base (11) has a limiting surface that is arranged to fit with the top surface of the probe head (21).

7. The positioning fixture according to claim 1, characterized in that: The positioning frame (122) is provided with a limiting portion that cooperates with the bottom surface of the lower guide plate (23) to limit the position.

8. The positioning fixture according to any one of claims 1 to 7, characterized in that: The number of the first positioning points (121) and the number of the second positioning points (123) are both three, wherein two of the first positioning points (121) are arranged opposite to one of the second positioning points (123), and the remaining first positioning point (121) is arranged opposite to the remaining two of the second positioning points (123).

9. The positioning fixture according to claim 8, characterized in that: The number of the adjustment components (14) is three, wherein two of the adjustment components (14) are arranged on a positioning side of a probe head (21) having two first positioning points (121), and are used to apply a thrust to the positioning side toward a position where only one second positioning point (123) is located, and another of the adjustment components (14) is arranged on a positioning side of a probe head (21) having one first positioning point (121), and is used to apply a thrust to the positioning side toward positions where two second positioning points (123) are located.

10. The positioning fixture according to claim 9, characterized in that: The two adjustment components (14) located on the same positioning side are respectively arranged outside the two first positioning points (121) on the positioning side, and the other adjustment component (14) is located in the middle position of the corresponding positioning side.

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