Adjustable rectangular optical element flexible supporting structure and method

Abstract

The invention discloses an adjustable rectangular optical element flexible supporting structure and method. The supporting structure comprises a mirror chamber, a horizontal flexible supporting frame, a mirror frame and a vertical flexible supporting frame. The mirror chamber inner wall surface is used for positioning and fixing the rectangular optical element. The mirror frame bears and is connected with the mirror chamber, so that the rectangular optical element realizes fine adjustment of the mounting position in the mirror frame; the front side and the rear side of the mirror chamber are connected with the mirror frame through the horizontal flexible supporting frames. And the vertical flexible support frame connects the left side and the right side of the mirror chamber with the mirror frame respectively. The horizontal flexible supporting frame is shaped like a Chinese character'ji 'and comprises a first flexible groove, a second flexible groove and a ball head adjusting screw, the distance between the first flexible groove and the second flexible groove is adjusted by screwing the ball head adjusting screw, and multi-degree-of-freedom adjustment of the rectangular optical element can be achieved. According to the flexible supporting structure, the flexible supporting frame is adopted, fine adjustment of the position of the rectangular optical element is achieved, machining errors and installation errors of structural parts can be eliminated, and the installation precision of the optical element is improved.

Description

Technical Field

[0001] The present invention belongs to the field of precision optical machinery technology, and more specifically, relates to an adjustable rectangular optical element flexible support structure and method. Background Art

[0002] The support of optical elements has an important impact on maintaining good system performance of the optical system. The conventional pressure ring support method is to directly install the lens in the mirror seat, and the outer edge of the lens is directly attached to the mirror chamber support step ring. The contact area is large. If there is a processing error or structural deformation in the mirror chamber, assembly stress will be generated after the mirror body is pressed, causing the surface accuracy of the mirror to deteriorate. In addition, optical elements are generally made of materials with a small expansion coefficient and directly assembled with the metal mirror chamber. In the presence of a temperature gradient, the thermal stress generated by the structure due to the different material expansion coefficients will also reduce the surface accuracy of the mirror. Therefore, it is necessary to use other types of support structures to replace the conventional pressure ring support to enable the optical system to maintain good system performance.

[0003] The patent with publication number CN115407471A provides a low-stress multi-point flexible support structure and support method for a large-aperture rectangular optical mirror. By setting a flexible support unit with multiple degrees of freedom of rotation and movement in different directions on the outer wall of the mirror chamber, it can effectively compensate for the stress introduced by various factors, ensure the position accuracy and surface accuracy of the optical mirror, and effectively reduce the vibration amplitude of the optical mirror in a vibration environment. However, the support structure is not adjustable. After the flexible support units are installed, the position of the optical mirror cannot be finely adjusted. If there are processing errors in the structural parts and the installation plane, the position accuracy of the optical mirror will still be affected.

[0004] Therefore, it is necessary to design an adjustable rectangular optical element flexible support structure to solve the above problems. Summary of the invention

[0005] In view of the problems that the optical mirror support structure in the prior art is not adjustable, cannot cope with the decrease in accuracy caused by subsequent stress changes, and cannot achieve fine adjustments to the position of the optical mirror, the present invention provides an adjustable rectangular optical element flexible support structure and method to solve this problem.

[0006] To achieve the above-mentioned purpose, the present invention provides an adjustable rectangular optical element flexible support structure, including a mirror chamber, the inner side of which fixes the rectangular optical element by gluing; a mirror frame for supporting and connecting the mirror chamber, the inner frame size of which is larger than the size of the mirror chamber, leaving adjustment space for fine-tuning the rectangular optical element; a horizontal flexible support frame for connecting the front and rear sides of the mirror chamber to the mirror frame respectively, which is provided with multiple groups and is an H-shaped structure, including a first horizontal connecting plate, a first flexible groove, a locking nut, a ball head adjustment screw, a second flexible groove and a mounting seat; the second flexible groove shares the same groove with the first flexible groove The grooves of the two are opposite; the shaft of the ball head adjustment screw is threadedly connected to the outer groove wall of the first flexible groove, and the bottom of the ball head adjustment screw is in conflict with the inner groove wall of the first flexible groove; the vertical flexible support frame used to connect the left and right sides of the mirror chamber to the mirror frame respectively is an H-shaped structure; according to actual adjustment needs, the ball head adjustment screw on the corresponding horizontal flexible support frame is turned to adjust the groove spacing of the first flexible groove and the second flexible groove, thereby changing the relative position between the mirror chamber and the mirror frame, and after adjusting multiple horizontal flexible support frames in sequence, the multiple degrees of freedom positions of the rectangular optical element can be changed, thereby realizing fine adjustment of the position of the rectangular optical element.

[0007] Furthermore, a first through hole is provided at one end of the first horizontal connecting plate, and a bolt is passed through the first through hole and then threadedly connected to the front or rear side of the frame to achieve fixed connection between one end of the first horizontal connecting plate and the frame; the first flexible groove includes a first vertical connecting plate, a third horizontal connecting plate, and a second vertical connecting plate, wherein the third horizontal connecting plate serves as a groove bottom, and the first vertical connecting plate and the second vertical connecting plate serve as groove walls and are respectively vertically arranged at both ends of the third horizontal connecting plate; the other end of the first vertical connecting plate is vertically connected to the other end of the first horizontal connecting plate.

[0008] Furthermore, the second flexible groove shares the same groove wall with the first flexible groove, and the groove openings of the two are opposite. It includes a second horizontal connecting plate and a third vertical connecting plate. The second horizontal connecting plate is vertically fixedly connected to the other end of the second vertical connecting plate, and the third vertical connecting plate is vertically arranged at the other end of the second horizontal connecting plate.

[0009] Furthermore, the middle of the mounting seat is vertically fixedly connected to the other end of the third vertical connecting plate, and a second through hole is provided on it. A bolt is passed through the second through hole and then threadedly connected to the front or rear side of the mirror chamber, thereby achieving a fixed connection between the horizontal flexible support frame and the mirror chamber.

[0010] Furthermore, the bottom of the ball head adjustment screw passes through the first vertical connecting plate and contacts the second vertical connecting plate, and its shaft is threadedly connected to the threaded hole provided on the first vertical connecting plate; the locking nut is located on the outside of the first vertical connecting plate and is threadedly connected to the ball head adjustment screw.

[0011] Furthermore, the vertical flexible support frame is a "J"-shaped structure, which is provided with two groups, which are respectively arranged in the middle of the left and right sides of the mirror chamber along the horizontal X direction, and include a horizontal connecting plate, a third flexible groove, a fourth flexible groove and a mounting plate. One end of the horizontal connecting plate is fixedly connected to the top of the left or right side of the mirror chamber, and the other end is connected to the third flexible groove; the third flexible groove and the fourth flexible groove share the same groove wall, and the grooves of the two are opposite. The mounting plate is connected to the fourth flexible groove, and is connected to the mirror frame by passing bolts through the mounting plate, thereby realizing the connection between the left and right sides of the mirror chamber and the mirror frame through the flexible support frame.

[0012] Furthermore, the mirror chamber is a square frame structure, and its inner size is adapted to the rectangular optical element.

[0013] Furthermore, a step positioning portion is provided inside the mirror chamber, and a plurality of glue injection holes are provided in the circumferential direction of the outer side, and the glue injection holes are connected to the inner wall surface of the mirror chamber.

[0014] Furthermore, the mirror chamber, mirror frame, horizontal flexible support frame, and vertical flexible support frame are all made of titanium alloy material.

[0015] According to another aspect of the present invention, there is also provided an adjustable rectangular optical element flexible support method, comprising the following steps:

[0016] S100: The mirror chamber, horizontal flexible support frame, mirror frame, and vertical flexible support frame must be deeply cleaned before installation to ensure cleanliness; the rectangular optical element must be inspected for surface shape before installation;

[0017] S200: placing a rectangular optical element into the mirror chamber, ensuring that the rectangular optical element fits the step positioning surface without any gap, and the gaps between the rectangular optical element and the four side walls inside the mirror chamber are equal;

[0018] S300: injecting optical glue between the rectangular optical element and the inner wall of the mirror chamber through the glue injection hole on the mirror chamber, cleaning up excess glue in time during the glue injection process, and bonding the rectangular optical element after the glue layer is cured, and detecting the surface shape of the rectangular optical element after bonding to ensure that there is no obvious change in the surface shape before and after bonding;

[0019] S400: installing the horizontal flexible support frame and the vertical flexible support frame on the outer four sides of the mirror chamber, and then connecting the other mounting surfaces of the horizontal flexible support frame and the vertical flexible support frame to the mirror frame, and finally installing the mirror frame on the corresponding mounting surface, thus completing the installation of the adjustable flexible support structure of the rectangular optical element;

[0020] S500: When the rectangular optical element is adjusted up and down on the Y axis, the ball head adjustment screws on the multiple sets of horizontal flexible support frames are turned to make the depths of the multiple sets of ball head adjustment screws consistent, so as to lift the rectangular optical element to the desired adjustment point;

[0021] S600: When the rectangular optical element rotates on the X-axis for pitch adjustment, tighten the ball head adjustment screws on the two horizontal flexible support frames on the upper part of the mirror chamber or tighten the ball head adjustment screws on the two horizontal flexible support frames on the lower part of the mirror chamber at the same time according to the actual adjustment requirements, and then lock it with a locking nut after completion;

[0022] S700: When the rectangular optical element rotates on the Z axis for left and right yaw adjustment, tighten the ball head adjustment screws on the two horizontal flexible support frames on the left side of the mirror chamber or tighten the ball head adjustment screws on the two horizontal flexible support frames on the right side of the mirror chamber at the same time according to the actual adjustment requirements; observe the direction of the optical path in real time during the adjustment process, and tighten the locking nut when it is adjusted to the specified position to complete the locking of the mirror chamber position.

[0023] In general, the above technical solutions conceived by the present invention can achieve the following beneficial effects compared with the prior art:

[0024] 1. The flexible support structure of the present invention includes a mirror chamber, a mirror frame, a horizontal flexible support frame, and a vertical flexible support frame. Under adverse environments such as temperature changes and vibrations, the horizontal flexible support frame, the vertical flexible support frame, and the adhesive layer between the optical element and the mirror chamber arranged outside the mirror chamber can effectively maintain the relative position between the mirror chamber and the mirror frame, thereby ensuring the position accuracy and surface accuracy of the optical element. By arranging a ball head adjustment screw on the flexible link to change the width of the flexible groove, and then changing the relative position between the mirror chamber and the mirror frame, the multiple degrees of freedom of the rectangular optical element can be changed by adjusting multiple horizontal flexible support frames in sequence, thereby achieving fine adjustment of the position of the rectangular optical element.

[0025] 2. The flexible support structure of the present invention, its mirror chamber, mirror frame, horizontal flexible support frame, and vertical flexible support frame are all made of titanium alloy material, which has excellent mechanical properties and can avoid interference with the precision of optical elements due to structural strain caused by environmental changes; among them, the horizontal flexible support frame and the vertical flexible support frame made of titanium alloy material have high strength, good toughness, high specific strength and excellent fatigue resistance. When the horizontal flexible support frame and the vertical flexible support frame are deformed to adjust the position of the rectangular optical element, it can effectively prevent the stress changes caused by their own materials and structures from causing deviations of the rectangular optical element again.

[0026] 3. The flexible support structure of the present invention can realize the flexible connection between the mirror chamber and the mirror frame through the H-shaped structure of the horizontal flexible support frame 2 and the vertical flexible support frame. At the same time, it reserves adjustment space for deformation through its own two sets of reverse grooves. It can convert the load into elastic potential energy through deformation, effectively reduce the vibration or stress on the rectangular optical element, and also avoid permanent deformation of its own structure, so as not to hinder the adjustment of the rectangular optical element, and can adapt to the adjustment needs after the stress change of the rectangular optical element.

[0027] 4. The flexible support structure of the present invention can realize the displacement adjustment of the rectangular optical element in three directions of X-axis, Y-axis and Z-axis by adjusting the ball head adjustment screw on the horizontal flexible support frame. The adjustment method is simple and the adjustment efficiency of the optical element is improved.

[0028] 5. The flexible support structure of the present invention can be flexibly applied to rectangular optical elements of different sizes, and integrates the flexible support structure with the adjustable structure. It has a simple structure, a small number of parts, and simple installation and adjustment steps, and can realize rapid installation and replacement of optical elements.

[0029] 6. The flexible support structure of the present invention realizes flexible support for optical elements through flexible support links, which can effectively resist the influence of adverse factors such as vibration and temperature change on the position accuracy and surface shape of optical elements; the ball head adjustment screw used in the present invention realizes the adjustability of the flexible link and realizes fine adjustment of the position of the rectangular optical element, which can eliminate the influence of structural component processing errors and installation errors on the position accuracy and surface shape of the optical element, and improve the installation accuracy of the optical element. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 Schematic diagram of the structure of an adjustable rectangular optical element flexible support structure in an embodiment of the present invention;

[0031] Figure 2 It is a structural schematic diagram of the mirror chamber in an embodiment of the present invention;

[0032] Figure 3 It is a structural schematic diagram of a horizontal flexible support frame in an embodiment of the present invention;

[0033] Figure 4 It is a structural schematic diagram of a vertical flexible support frame in an embodiment of the present invention;

[0034] Figure 5 The figure is a process step diagram of an adjustable rectangular optical element flexible support method in an embodiment of the present invention.

[0035] In all the drawings, the same figure marks represent the same technical features, specifically: 1-mirror chamber, 101-mounting hole, 102-glue injection hole, 103-step positioning portion, 2-horizontal flexible support frame, 201-first horizontal connecting plate, 202-second horizontal connecting plate, 203-first flexible groove, 204-first vertical connecting plate, 205-locking nut, 206-ball head adjustment screw, 207-third horizontal connecting plate, 208-second vertical connecting plate, 209-second flexible groove, 210-mounting seat, 211-third vertical connecting plate 211, 3-mirror frame, 4-vertical flexible support frame, 401-horizontal connecting plate, 402-third flexible groove, 403-fourth flexible groove, 404-mounting plate, 5-rectangular optical element. DETAILED DESCRIPTION

[0036] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0037] like Figure 1-3 As shown, the present invention provides an adjustable flexible support structure for rectangular optical elements, including a mirror chamber 1, a horizontal flexible support frame 2, a mirror frame 3 and a vertical flexible support frame 4. The mirror chamber 1 is a square frame structure, and its inner wall surface is used to position and fix the rectangular optical element 5. The mirror frame 3 supports and connects the mirror chamber 1, so that the rectangular optical element 5 can be finely adjusted in the installation position in the mirror frame 3; the horizontal flexible support frame 2 is provided with multiple groups, which respectively connect the front and rear sides of the mirror chamber 1 with the mirror frame 3, and are used to adjust the position of the rectangular optical element 5. The vertical flexible support frame 4 is provided with two groups, which respectively connect the left and right sides of the mirror chamber 1 with the mirror frame 3. The horizontal flexible support frame 2 is in the shape of a Chinese character "J", and includes a first flexible groove 203, a second flexible groove 209 and a ball head adjustment screw 206. By turning the ball head adjustment screw 206, the groove spacing between the first flexible groove 203 and the second flexible groove 209 is adjusted, thereby changing the position between the mirror chamber 1 and the mirror frame 3. According to the pointing requirements of the optical system, the ball head adjustment screw 206 on the horizontal flexible support frame 2 is adjusted in sequence to achieve multiple degrees of freedom adjustment of the rectangular optical element 5. The flexible support structure of the present invention uses the ball head adjustment screw 206 to achieve the adjustability of the horizontal flexible support frame 2, and achieves fine adjustment of the position of the rectangular optical element, which can eliminate the influence of the structural component processing error and installation error on the position accuracy and surface shape of the optical element, and improve the installation accuracy of the optical element.

[0038] like Figure 1-2As shown, in the embodiment of the present invention, the mirror chamber 1 is used to install and fix the rectangular optical element 5. It is a square frame structure, and its inner size is adapted to the rectangular optical element 5. The rectangular optical element 5 is fixed by gluing. Furthermore, in order to achieve accurate positioning, a step positioning portion 103 is also provided on the inner side of the mirror chamber 1. When the rectangular optical element 5 is lowered along the inner side of the mirror chamber 1, the step positioning portion 103 is used to block the rectangular optical element 5 so that the rectangular optical element 5 is lowered to the positioning installation point and remains horizontal. A plurality of glue injection holes 102 are provided on the outer side of the mirror chamber 1 in the circumferential direction. The glue injection holes 102 are connected to the inner wall surface of the mirror chamber 1. After completing the positioning and installation of the rectangular optical element 5, the operator can perform glue injection through the glue injection holes 102 to allow the glue to penetrate into the gap between the inner side of the mirror chamber 1 and the outer side of the rectangular optical element 5, thereby forming a glue layer, thereby connecting the mirror chamber 1 and the rectangular optical element 5 as a whole. Preferably, installation operation holes are also provided at the four corners of the inner side of the mirror chamber 1, which provide fulcrums for the sinking installation of the rectangular optical element 5 and provide working space for fingers during installation, making it convenient for operators to hold the four corners of the rectangular optical element 5 for installation operations, while also avoiding collision between the four corners of the rectangular optical element 5 and the inner wall of the mirror chamber 1.

[0039] like Figure 1 As shown, the mirror frame 3 is used to carry and connect the mirror chamber 1. It is a square frame structure, and its inner frame size is slightly larger than the size of the mirror chamber 1, leaving adjustment space for fine-tuning the rectangular optical element 5. The mirror frame 3 is provided with first mounting holes on the front and rear sides, respectively, for mounting and fixing the horizontal flexible support frame 2, and second mounting holes are provided on the left and right ends of the top, respectively, for mounting the vertical flexible support frame 4.

[0040] like Figure 3As shown, the horizontal flexible support frame 2 is provided with multiple groups, which are used to connect the mirror chamber 1 and the mirror frame 3, and finely adjust the rectangular optical element 5 through its own deformation to ensure the position accuracy of the optical mirror. The horizontal flexible support frame 2 is a "J"-shaped structure, including a first horizontal connecting plate 201, a first flexible groove 203, a locking nut 205, a ball head adjustment screw 206, a second flexible groove 209 and a mounting seat 210. A first through hole is provided at one end of the first horizontal connecting plate 201, and a bolt is passed through the first through hole and then threadedly connected to the first mounting hole to achieve a fixed connection between one end of the first horizontal connecting plate 201 and the mirror frame 3; the first flexible groove 203 includes a first vertical connecting plate 204, a third horizontal connecting plate 207, and a second vertical connecting plate 208, wherein the third horizontal connecting plate 207 serves as a groove bottom, and the first vertical connecting plate 204 and the second vertical connecting plate 208 serve as groove walls and are respectively vertically arranged at both ends of the third horizontal connecting plate 207; further, the other end of the first vertical connecting plate 204 is vertically connected to the other end of the first horizontal connecting plate 201; The second flexible groove 209 shares the same groove wall with the first flexible groove 203, and the grooves of the two are opposite. It includes a second horizontal connecting plate 202 and a third vertical connecting plate 211. The second horizontal connecting plate 202 is vertically fixedly connected with the other end of the second vertical connecting plate 208, and the third vertical connecting plate 211 is vertically arranged at the other end of the second horizontal connecting plate 202; the locking nut 205 is located outside the first vertical connecting plate 204, and is threadedly connected with the ball head adjustment screw 206; the bottom of the ball head adjustment screw 206 passes through the first vertical connecting plate 204 and contacts the second vertical connecting plate 208, and its shaft is threadedly connected with the threaded hole provided on the first vertical connecting plate 204. The middle of the mounting seat 210 is vertically fixedly connected with the other end of the third vertical connecting plate 211, and a second through hole is provided on it. The bolt is passed through the second through hole and then threadedly connected with the front side or the rear side of the mirror chamber 1, so as to realize the fixed connection between the horizontal flexible support frame 2 and the mirror chamber 1.

[0041] like Figure 1As shown, the vertical flexible support frame 4 is a "J"-shaped structure, which is provided with two groups, which are arranged in the middle of the left and right sides of the mirror chamber 1 along the horizontal X direction, respectively, and include a horizontal connecting plate 401, a third flexible groove 402, a fourth flexible groove 403 and a mounting plate 404. One end of the horizontal connecting plate 401 is fixedly connected to the top of the left or right side of the mirror chamber 1, and the other end is connected to the third flexible groove 402; the third flexible groove 402 and the fourth flexible groove 403 share the same groove wall, and the grooves of the two are opposite. The mounting plate 404 is connected to the fourth flexible groove 403, and is connected to the mirror frame 3 after passing through the mounting plate 404 with bolts, thereby realizing the connection between the left and right sides of the mirror chamber 1 and the mirror frame 3 through the flexible support frame 4. Furthermore, through the third flexible groove 402 and the fourth flexible groove 403 provided on the flexible support frame 4, the vertical flexible support frame 4 with an "J"-shaped structure can be deformed when receiving an external load, and the load can be converted into elastic potential energy through deformation. When reducing the influence of vibration or stress on the rectangular optical element 5, the vertical flexible support frame 4 can be avoided from permanent deformation, thereby not causing obstacles to the adjustment of the rectangular optical element 5, and being able to adapt to the adjustment needs of the rectangular optical element 5 after the stress change.

[0042] The flexible support structure of the present invention is installed by lowering the rectangular optical element 5 along the inner side of the mirror chamber 1 until it contacts the step positioning portion 103, and detecting whether the bottom of the rectangular optical element 5 is completely fitted with the step positioning portion 103; after completely fitting, glue is injected into the gap between the inner side of the mirror chamber 1 and the outer side of the rectangular optical element 5 through the glue injection hole 102, and the glue is solidified to form a glue layer, thereby connecting the mirror chamber 1 and the rectangular optical element 5 as a whole; a vertical flexible support frame 4 is installed in the middle of the left and right sides of the mirror chamber 1, and the other end of the vertical flexible support frame 4 is fixedly installed on the mirror frame 3 by bolts; the horizontal flexible support frame 2 is provided with four or more groups, which are symmetrically arranged on the front and rear sides of the mirror chamber 1, and one end of the horizontal flexible support frame 2 is fixedly connected to the front or rear side of the mirror chamber 1 by bolts passing through the mounting seat 210, and the other end of the horizontal flexible support frame 2 is fixedly connected to the front or rear side of the mirror frame 3 by bolts passing through the first horizontal connecting plate 201; thereby completing the installation of the flexible support structure.

[0043] When adjusting the rectangular optical element 5, if the rectangular optical element 5 deviates in the Y-axis direction due to stress changes, the ball head adjustment screws 206 on the multiple sets of horizontal flexible support frames 2 can be turned to keep the depths of the multiple sets of ball head adjustment screws 206 consistent, so that the rectangular optical element 5 can be adjusted up and down on the Y-axis. When it is necessary to adjust downward, the ball head adjustment screws 206 are turned to compress the groove spacing of the first flexible groove 203 and the second flexible groove 209 downward. When it drops to the required adjustment point, the locking nut 205 is turned to fit the outer side of the first horizontal connecting plate 201 and locked to reach the position of the lowered rectangular optical element 5. When adjusting upward, the ball head adjustment screws 206 are turned in the opposite direction to release the elastic potential energy of the horizontal flexible support frame 2, and the groove spacing of the first flexible groove 203 and the second flexible groove 209 is increased, thereby pushing the rectangular optical element 5 to move upward until it reaches the required adjustment point.

[0044] If the rectangular optical element 5 deviates in the X-axis direction due to stress changes and needs to be adjusted in pitch, the ball head adjustment screws 206 on the two horizontal flexible support frames 2 on the upper part of the mirror chamber 1 can be tightened at the same time according to actual adjustment requirements, or the ball head adjustment screws 206 on the two horizontal flexible support frames 2 on the lower part of the mirror chamber 1 can be tightened at the same time. After completion, the locking nut 205 can be used for locking.

[0045] If the rectangular optical element 5 deviates in the required Z-axis direction due to stress changes and needs to be adjusted to the left and right, the ball head adjustment screws 206 on the two horizontal flexible support frames 2 on the left side of the mirror chamber 1 can be tightened simultaneously according to actual adjustment requirements, or the ball head adjustment screws 206 on the two horizontal flexible support frames 2 on the right side of the mirror chamber 1 can be tightened simultaneously; during the adjustment process, the direction of the optical path can be observed in real time, and when it is adjusted to the specified position, the locking nut 205 is tightened to complete the locking of the position of the mirror chamber 1.

[0046] The flexible support structure of the present invention comprises a mirror chamber 1, a mirror frame 3, a horizontal flexible support frame 2, and a vertical flexible support frame 4. Under adverse environments such as temperature changes and vibrations, the horizontal flexible support frame 2, the vertical flexible support frame 4, and the adhesive layer between the optical element and the mirror chamber 1 arranged outside the mirror chamber can effectively maintain the relative position between the mirror chamber 1 and the mirror frame 3, thereby ensuring the position accuracy and surface accuracy of the optical element. By arranging a ball head adjustment screw on the flexible link, the width of the flexible groove is changed, and then the relative position between the mirror chamber 1 and the mirror frame 3 is changed. After adjusting multiple horizontal flexible support frames 2 in sequence, the multiple degrees of freedom positions of the rectangular optical element can be changed, and the position of the rectangular optical element 5 can be finely adjusted.

[0047] The flexible support structure of the present invention, its mirror chamber 1, mirror frame 3, horizontal flexible support frame 2, and vertical flexible support frame 4 are all made of titanium alloy material, which has excellent mechanical properties and avoids interference with the accuracy of optical elements due to structural strain caused by environmental changes; wherein, the horizontal flexible support frame 2 and the vertical flexible support frame 4 are made of titanium alloy material, so that both have high strength, good toughness, high specific strength and excellent fatigue resistance. When the horizontal flexible support frame 2 and the vertical flexible support frame 4 are deformed to adjust the position of the rectangular optical element 5, it can effectively prevent the stress changes caused by the material and structure itself from causing deviations of the rectangular optical element 5 again.

[0048] The flexible support structure of the present invention can realize the flexible connection between the mirror chamber 1 and the mirror frame 3 through the H-shaped structure of the horizontal flexible support frame 2 and the vertical flexible support frame 4. At the same time, it reserves adjustment space for deformation through its own two sets of reverse grooves. It can convert the load into elastic potential energy through deformation, effectively reduce the vibration or stress on the rectangular optical element 5, and also avoid permanent deformation of its own structure, so as not to hinder the adjustment of the rectangular optical element 5, and can adapt to the adjustment needs of the rectangular optical element 5 after the stress changes.

[0049] The flexible support structure of the present invention can realize displacement adjustment of the rectangular optical element 5 in three directions of X-axis, Y-axis and Z-axis by adjusting the ball head adjustment screw 206 on the horizontal flexible support frame 2. The adjustment method is simple and the adjustment efficiency of the optical element 5 is improved.

[0050] The flexible support structure of the present invention can be flexibly applied to rectangular optical elements of different sizes, and integrates the flexible support structure with the adjustable structure. It has a simple structure, a small number of parts, and simple installation and adjustment steps, and can realize rapid installation and replacement of optical elements.

[0051] The flexible support structure of the present invention realizes flexible support of the optical element through the flexible support link, and can effectively resist the influence of adverse factors such as vibration and temperature change on the position accuracy and surface shape of the optical element. The ball head adjustment screw in the present invention realizes the adjustability of the flexible link, realizes the fine adjustment of the position of the rectangular optical element, eliminates the influence of the structural part processing error and installation error on the position accuracy and surface shape of the optical element, and improves the installation accuracy of the optical element.

[0052] The present invention also provides an adjustable rectangular optical element flexible support method, comprising the following steps:

[0053] S100: The mirror chamber 1, the horizontal flexible support frame 2, the mirror frame 3, and the vertical flexible support frame 4 need to be deeply cleaned before installation to ensure cleanliness. The rectangular optical element 5 needs to be inspected for surface shape before installation;

[0054] S200: placing the rectangular optical element 5 into the mirror chamber 1, ensuring that the rectangular optical element 5 fits with the step positioning surface 103 without any gap, and the gaps with the four side walls inside the mirror chamber 1 are equal;

[0055] S300: Injecting optical glue between the rectangular optical element 5 and the inner wall of the mirror chamber 1 through the glue injection hole 102 on the mirror chamber 1, and in the glue injection process, it is necessary to clean up the excess glue in time, and the rectangular optical element 5 can be bonded after the glue layer is solidified, and the surface shape of the rectangular optical element 5 after bonding is detected to ensure that there is no obvious change in the surface shape before and after bonding;

[0056] S400: Install the horizontal flexible support frame 2 and the vertical flexible support frame 4 on the outer sides of the mirror chamber 1, then connect the other mounting surfaces of the horizontal flexible support frame 2 and the vertical flexible support frame 4 to the mirror frame 3, and finally install the mirror frame 3 on the corresponding mounting surface, thus completing the installation of the adjustable flexible support structure of the rectangular optical element 5;

[0057] S500: When the rectangular optical element 5 is adjusted up and down on the Y axis, the ball head adjustment screws 206 on the multiple sets of horizontal flexible support frames 2 are screwed to make the depths of the multiple sets of ball head adjustment screws 206 consistent, so as to lift the rectangular optical element 5 to the desired adjustment point;

[0058] S600: When the rectangular optical element 5 rotates on the X-axis for pitch adjustment, the ball head adjustment screws 206 on the two horizontal flexible support frames 2 on the upper part of the mirror chamber 1 are tightened simultaneously or the ball head adjustment screws 206 on the two horizontal flexible support frames 2 on the lower part of the mirror chamber 1 are tightened simultaneously according to actual adjustment requirements, and after completion, the locking nut 205 is used to lock it;

[0059] S700: When the rectangular optical element 5 rotates on the Z axis for left and right yaw adjustment, the ball head adjustment screws 206 on the two horizontal flexible support frames 2 on the left side of the mirror chamber 1 are tightened simultaneously or the ball head adjustment screws 206 on the two horizontal flexible support frames 2 on the right side of the mirror chamber 1 are tightened simultaneously according to actual adjustment requirements; during the adjustment process, the direction of the optical path can be observed in real time, and when it is adjusted to the specified position, the locking nut 205 is tightened to complete the locking of the position of the mirror chamber 1.

[0060] It will be easily understood by those skilled in the art that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. An adjustable rectangular optical element flexible support structure, characterized in that: include: A mirror chamber (1), the inner side of which is fixed with a rectangular optical element (5) by gluing; A mirror frame (3) for supporting and connecting the mirror chamber (1), wherein the inner frame size is larger than the size of the mirror chamber (1), leaving adjustment space for fine adjustment of the rectangular optical element (5); A horizontal flexible support frame (2) for connecting the front and rear sides of the mirror chamber (1) to the mirror frame (3) respectively, which is provided with multiple groups and is an H-shaped structure, comprising a first horizontal connecting plate (201), a first flexible groove (203), a locking nut (205), a ball head adjustment screw (206), a second flexible groove (209) and a mounting seat (210); the second flexible groove (209) and the first flexible groove (203) share the same groove wall, and the grooves of the two are opposite; the shaft of the ball head adjustment screw (206) is threadedly connected to the outer groove wall of the first flexible groove (203), and the bottom of the ball head adjustment screw (206) is in conflict with the inner groove wall of the first flexible groove (203); A vertical flexible support frame (4) for connecting the left and right sides of the mirror chamber (1) to the mirror frame (3) respectively, and having an H-shaped structure; According to actual adjustment requirements, the ball head adjustment screw (206) on the corresponding horizontal flexible support frame (2) is turned to adjust the groove spacing between the first flexible groove (203) and the second flexible groove (209), thereby changing the relative position between the mirror chamber (1) and the mirror frame (3), and adjusting multiple horizontal flexible support frames (2) in turn to change the multiple degrees of freedom positions of the rectangular optical element (5), thereby achieving fine adjustment of the position of the rectangular optical element.

2. The adjustable rectangular optical element flexible support structure according to claim 1, characterized in that: A first through hole is provided at one end of the first horizontal connecting plate (201), and a bolt is passed through the first through hole and then threadedly connected to the front or rear side of the mirror frame (3), so as to achieve fixed connection between one end of the first horizontal connecting plate (201) and the mirror frame (3); the first flexible groove (203) comprises a first vertical connecting plate (204), a third horizontal connecting plate (207), and a second vertical connecting plate (208), wherein the third horizontal connecting plate (207) serves as a groove bottom, and the first vertical connecting plate (204) and the second vertical connecting plate (208) serve as groove walls and are respectively vertically arranged at two ends of the third horizontal connecting plate (207); the other end of the first vertical connecting plate (204) is vertically connected to the other end of the first horizontal connecting plate (201).

3. The adjustable rectangular optical element flexible support structure according to claim 2, characterized in that: The second flexible groove (209) and the first flexible groove (203) share the same groove wall, and the groove openings of the two are opposite. It includes a second horizontal connecting plate (202) and a third vertical connecting plate (211). The second horizontal connecting plate (202) is vertically fixedly connected to the other end of the second vertical connecting plate (208), and the third vertical connecting plate (211) is vertically arranged at the other end of the second horizontal connecting plate (202).

4. The adjustable rectangular optical element flexible support structure according to claim 3, characterized in that: The middle of the mounting seat (210) is vertically fixedly connected to the other end of the third vertical connecting plate (211), and a second through hole is provided thereon. A bolt is passed through the second through hole and then threadedly connected to the front or rear side of the mirror chamber (1), thereby achieving a fixed connection between the horizontal flexible support frame (2) and the mirror chamber (1).

5. The adjustable rectangular optical element flexible support structure according to claim 4, characterized in that: The bottom of the ball head adjustment screw (206) passes through the first vertical connecting plate (204) and contacts the second vertical connecting plate (208), and its shaft is threadedly connected to the threaded hole provided on the first vertical connecting plate (204); the locking nut (205) is located outside the first vertical connecting plate (204) and is threadedly connected to the ball head adjustment screw (206).

6. An adjustable rectangular optical element flexible support structure according to any one of claims 1 to 5, characterized in that: The vertical flexible support frame (4) is a "J"-shaped structure, and is provided with two groups, which are arranged in the middle of the left and right sides of the mirror chamber (1) along the horizontal X direction, respectively, and include a horizontal connecting plate (401), a third flexible groove (402), a fourth flexible groove (403) and a mounting plate (404); one end of the horizontal connecting plate (401) is fixedly connected to the top of the left or right side of the mirror chamber (1), and the other end is connected to the third flexible groove (402); the third flexible groove (402) and the fourth flexible groove (403) share the same groove wall, and the grooves of the two are opposite; the mounting plate (404) is connected to the fourth flexible groove (403), and is connected to the mirror frame (3) by passing bolts through the mounting plate (404), so that the left and right sides of the mirror chamber (1) are connected to the mirror frame (3) through the flexible support frame (4).

7. An adjustable rectangular optical element flexible support structure according to any one of claims 1 to 5, characterized in that: The mirror chamber (1) is a square frame structure, and its inner dimensions are adapted to the rectangular optical element (5).

8. An adjustable rectangular optical element flexible support structure according to any one of claims 1 to 5, characterized in that: The mirror chamber (1) is also provided with a step positioning portion (103) on the inner side, and a plurality of glue injection holes (102) are provided on the outer side in a circumferential direction, wherein the glue injection holes (102) are communicated with the inner wall surface of the mirror chamber (1).

9. An adjustable rectangular optical element flexible support structure according to any one of claims 1 to 5, characterized in that: The mirror chamber (1), the mirror frame (3), the horizontal flexible support frame (2), and the vertical flexible support frame (4) are all made of titanium alloy material.

10. An adjustable rectangular optical element flexible support method, characterized in that: The steps include: S100: The mirror chamber (1), the horizontal flexible support frame (2), the mirror frame (3), and the vertical flexible support frame (4) need to be deeply cleaned before installation to ensure cleanliness; the rectangular optical element (5) needs to be inspected for surface shape before installation; S200: placing the rectangular optical element (5) into the mirror chamber (1), ensuring that the rectangular optical element (5) fits the step positioning surface (103) without any gap, and the gaps between the rectangular optical element (5) and the four side walls inside the mirror chamber (1) are equal; S300: injecting optical glue between the rectangular optical element (5) and the inner wall of the mirror chamber (1) through the glue injection hole (102) on the mirror chamber (1), and in a timely manner cleaning up excess glue during the glue injection process, and then bonding the rectangular optical element (5) can be achieved after the glue layer is solidified, and detecting the surface shape of the rectangular optical element (5) after bonding to ensure that there is no obvious change in the surface shape before and after bonding; S400: installing the horizontal flexible support frame (2) and the vertical flexible support frame (4) on the outer four sides of the mirror chamber (1), then connecting the other mounting surfaces of the horizontal flexible support frame (2) and the vertical flexible support frame (4) to the mirror frame (3), and finally installing the mirror frame (3) on the corresponding mounting surface, thus completing the installation of the adjustable flexible support structure of the rectangular optical element (5); S500: When the rectangular optical element (5) is adjusted up and down on the Y axis, the ball head adjustment screws (206) on the multiple sets of horizontal flexible support frames (2) are screwed to make the depths of the multiple sets of ball head adjustment screws (206) remain consistent, thereby raising and lowering the rectangular optical element (5) to the desired adjustment point; S600: When the rectangular optical element (5) is rotated on the X-axis for pitch adjustment, the ball head adjustment screws (206) on the two horizontal flexible support frames (2) at the upper part of the mirror chamber (1) are tightened simultaneously or the ball head adjustment screws (206) on the two horizontal flexible support frames (2) at the lower part of the mirror chamber (1) are tightened simultaneously according to actual adjustment requirements, and after completion, the locking nuts (205) are used for locking; S700: When the rectangular optical element (5) is rotated on the Z axis to adjust the left and right yaw, the ball head adjustment screws (206) on the two horizontal flexible support frames (2) on the left side of the mirror chamber (1) are tightened simultaneously or the ball head adjustment screws (206) on the two horizontal flexible support frames (2) on the right side of the mirror chamber (1) are tightened simultaneously according to actual adjustment requirements; during the adjustment process, the direction of the optical path is observed in real time, and when it is adjusted to the specified position, the locking nut (205) is tightened to complete the locking of the position of the mirror chamber (1).

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