Efficient, stable and reliable laser beam spatial filtering debugging method and device

Abstract

The invention provides an efficient, stable and reliable laser beam spatial filtering debugging method and device, and the method comprises the steps: enabling a laser light source, a first lens focusing module, a pinhole XY precise adjustment sliding table, an imaging system and a focusing sliding table to be sequentially installed on a debugging bottom plate, and adjusting a pinhole to achieve the clear imaging; the focusing sliding table is locked, the pinhole XY precise adjustment sliding table is detached, and the size of the focusing spot of the laser spot is controlled through the focusing module of the lens I; the precise pinhole is installed on the pinhole XY precise adjustment sliding table again, and the pinhole XY precise adjustment sliding table is controlled to drive the precise pinhole to the position of the marked light spot; a focusing module of a lens I and a pinhole XY precise adjusting sliding table are precisely adjusted, and the laser power of the laser penetrating through the pinhole is controlled to be maximum; the second lens focusing module is installed on the light beam filtering module, the size of the laser beam emitted by the light beam filtering module is observed through the target, coincident positioning of a focusing light spot and a small hole can be conveniently achieved, and the laser beam space filtering debugging efficiency is improved.

Description

Technical Field

[0001] The invention relates to the field of laser detection technology, and in particular to an efficient, stable and reliable laser beam spatial filtering debugging method and device. Background Art

[0002] Spatial filtering of lasers is a key technology in optics. It is of great significance for refining laser beams, improving their quality, and minimizing aberrations and unnecessary diffraction effects. Laser spatial filtering is based on the principle of Fourier optics, and uses a combination of lenses and apertures (or pinholes) to selectively filter the spatial frequency components of laser beams. When the laser beam passes through the lens, its wavefront is converted into the spatial frequency domain, that is, the light intensity distribution is mapped to the back focal plane of the lens. On this plane, different spatial frequency components correspond to different positions. By placing a tiny pinhole, high-frequency components (such as noise, diffraction rings, etc.) can be blocked, and only low-frequency components (i.e., the main beam) are allowed to pass. Subsequently, after the inverse transformation of the second lens, the filtered beam is re-formed in the spatial domain. At this time, the quality of the beam is significantly improved, which is of great significance for the imaging effect of the subsequent laser detection system. Based on the above principle, theoretically, the smaller the size of the pinhole, the better the filtering effect of the system. However, the smaller the size of the pinhole is, the more difficult it will be to design the system structure and debug the subsequent beam. The mechanical structure needs to have micron-level fine-tuning capabilities, ensure that the locking is not deformed by stress concentration, and be stable and reliable for a long time. At the same time, it is also very difficult to debug the optical path. Since the diameter of the pinhole is very small, it is difficult to quickly position the focus of the beam focused by the lens on the pinhole. The traditional debugging solution is to monitor the power passing through the pinhole, gradually debug the focal length of the lens and the XY position of the pinhole, and gradually try to converge the solution. This method requires a high level of proficiency from the debugging personnel, and requires a long time to complete the gradual adjustment, which is time-consuming and labor-intensive, and extremely inefficient. Summary of the invention

[0003] In view of the above technical problems, the present invention provides an efficient, stable and reliable laser beam spatial filtering debugging method and device, which can conveniently realize the coincidence positioning of the focusing spot and the pinhole, thereby improving the efficiency of laser beam spatial filtering debugging.

[0004] To achieve the above object, the present invention provides the following technical solution: an efficient, stable and reliable laser beam spatial filtering debugging method and device, comprising the following steps:

[0005] Step 1: Install the laser light source, lens-focusing module, pinhole XY precision adjustment slide, imaging system, and focusing slide on the debugging base plate in sequence, and set the imaging system parameters to adjust the pinhole for clear imaging;

[0006] Step 2: Lock the focusing slide, remove the pinhole XY precision adjustment slide, control the focus spot size of the laser spot through the lens-focusing module, and mark the spot position;

[0007] Step 3: Reinstall the precision pinhole on the pinhole XY precision adjustment slide, and control the pinhole XY precision adjustment slide to drive the precision pinhole to the marking spot position;

[0008] Step 4: Accurately adjust the lens-focusing module and the pinhole XY precision adjustment slide to control the laser power through the pinhole to be maximum;

[0009] Step 5: Install the lens 2 focusing module on the beam filtering module, and install the target on the debugging base plate. Observe the size of the laser beam emitted by the beam filtering module through the target, and debug the focal length of lens 2 in the lens 2 focusing module.

[0010] Preferably, in step 1, the imaging system is connected to a computer, and the light source brightness and sensitivity parameters are set by the computer.

[0011] Preferably, the process of controlling the pinhole XY precision adjustment slide to drive the precision pinhole to the marked light spot position in step 2 is as follows: the precision pinhole is set on the pinhole XY precision adjustment slide, and the precision pinhole is driven to move in the horizontal X direction and the vertical Y direction by the pinhole XY precision adjustment slide to control the pinhole to coincide with the light spot.

[0012] Preferably, a power meter for monitoring laser power is provided on the pinhole XY precision adjustment slide.

[0013] A highly efficient, stable and reliable laser beam spatial filtering debugging device comprises a beam filtering module arranged on a debugging base plate, and an imaging system arranged on the debugging base plate through a focusing slide and opposite to the beam filtering module. The invention is characterized in that the beam filtering module comprises a laser light source arranged on the debugging base plate through the module base plate, a lens-focusing module arranged on the emission port of the laser light source, a pinhole XY precision adjustment slide arranged on the module base plate and adjacent to the position of the lens-focusing module, and a lens-two focusing module arranged on the module base plate through a second fixing seat and located on a side of the pinhole XY precision adjustment slide away from the lens-one focusing module, and the pinhole XY precision adjustment slide is detachably mounted on the module base plate through the XY slide fixing seat.

[0014] Preferably, the pinhole XY precision adjustment slide comprises a back plate arranged on the module bottom plate through an XY slide fixing seat, a Y movable plate arranged on the end surface of the back plate away from the laser light source through a Y-direction control member, an X movable plate arranged on the end surface of the Y movable plate away from the back plate through an X-direction control member, and a precision pinhole fixing plate arranged on the end surface of the X movable plate away from the Y movable plate, the Y-direction control member drives the Y movable plate to slide along the Y direction on the end surface of the back plate; the X-direction control member drives the X movable plate to slide along the X direction on the end surface of the Y movable plate; the end surfaces of the back plate, the Y movable plate, the X movable plate and the precision pinhole fixing plate are provided with openings that penetrate each other, and the openings provided on the precision pinhole fixing plate are provided with precision pinholes.

[0015] Preferably, the Y-axis control component includes a first control block fixedly arranged on a side surface of one side of the back plate, a first adjustment block arranged on the side surface of the Y movable plate and with one end located below or above the first control block, and a Y-axis control structure for controlling the distance adjustment between the first control block and the first adjustment block and fixing the position.

[0016] Preferably, the X-axis control member includes a second adjustment block fixedly arranged on the top side of the Y movable plate and one end of which is located on the top side of the X movable plate, a second control block arranged on the top side of the X movable plate and located on the left or right side of the second adjustment block, and an X-axis control structure for controlling the distance adjustment between the second control block and the second adjustment block and fixing the position.

[0017] Preferably, the lens-focusing module includes a focusing guide component with an end face arranged on the laser light source emission port, a lens-fixing seat arranged on the end of the focusing guide component away from the laser light source, a lens-fixing seat arranged in the lens-fixing seat, a focal length adjustment nut sleeved on the focusing guide component and on the lens-fixing seat, an adjusting lens sleeved on the focal length adjustment nut through a bearing limiter and a limit bearing, and a preload spring arranged between the focusing guide component and the focal length adjustment nut.

[0018] The beneficial effects of the present invention are as follows: by matching a set of imaging systems, the focusing spot and the pinhole can be quickly positioned coincident, and the beam adjustment of the system can be subsequently achieved through pinhole position control. This method greatly reduces the debugging threshold and debugging time of the system, and can conveniently achieve the focusing spot and the pinhole coincident positioning, thereby improving the efficiency of laser beam spatial filtering debugging. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings:

[0020] Figure 1This is a schematic diagram of the debugging flow chart structure of the efficient, stable and reliable laser beam spatial filtering debugging method proposed by the present invention.

[0021] Figure 2 This is a schematic diagram of the structure of the efficient, stable and reliable laser beam spatial filtering debugging device proposed by the present invention.

[0022] Figure 3 It is a schematic diagram of the structure of the beam filtering module of the present invention.

[0023] Figure 4 It is a schematic diagram of the pinhole XY precision adjustment slide structure of the present invention.

[0024] Figure 5 It is a schematic diagram of the structure of a lens-focusing module of the present invention.

[0025] Figure 6 It is a schematic diagram of the locking structure of the present invention.

[0026] Figure 7 It is a schematic diagram of the pinhole position imaging debugging structure of the present invention.

[0027] Figure 8 It is a schematic diagram of the light spot debugging structure of the lens 1 of the present invention.

[0028] Fig. 9 It is a schematic diagram of the transmission power fine adjustment structure of the present invention.

[0029] Fig.10 It is a schematic diagram of the collimated light beam adjustment structure of the present invention.

[0030] In the figure:

[0031] 1. Beam filter module; 2. Debugging base plate; 3. Imaging system; 4. Focusing slide; 5. Power meter; 6. Target;

[0032] 1-1, laser light source; 1-2, lens 1 focusing module; 1-3, pinhole XY precision adjustment slide; 1-4, lens 2 focusing module; 1-5, fixed seat 2; 1-6, XY slide fixed seat; 1-7, fixed seat 1; 1-8, module bottom plate; 1-9, fastening screws;

[0033] 1-3-1, X movable plate; 1-3-2, X differential screw; 1-3-3, X locking screw 1; 1-3-4, X nut fixing piece; 1-3-5, X locking screw 2; 1-3-6, Y movable plate; 1-3-7, back plate; 1-3-8, Y differential screw; 1-3-9, Y locking screw 1; 1-3-10, Y locking screw 1; 1-3-11, Y nut ​​fixing piece; 1-3-12, guide rail; 1-3-13, mounting screw; 1-3-14, precision pinhole; 1-3-15, positioning pin; 1-3-16, precision pinhole fixing plate;

[0034] 1-2-1, lens fixing seat; 1-2-2, focal length adjustment nut; 1-2-3, adjustment lens; 1-2-4, bearing limiter; 1-2-5, focusing guide component; 1-2-6, stop pin; 1-2-7, preload spring; 1-2-8, limit bearing; 1-2-9, lens 1; 1-2-10, locking screw. DETAILED DESCRIPTION

[0035] In order to make the technical means, creative features, objectives and effects of the present invention easy to understand, the present invention is further described below in conjunction with specific embodiments and drawings, but the following embodiments are only preferred embodiments of the present invention, not all. Based on the embodiments in the implementation mode, other embodiments obtained by those skilled in the art without creative work are all within the scope of protection of the present invention.

[0036] See also Figure 1-10 , an efficient, stable and reliable laser beam spatial filtering debugging method and device, comprising the following steps:

[0037] Step 1: First, assemble the laser light source 1-1, the lens-focusing module 1-2, and the pinhole XY precision adjustment slide 1-3 on the module base plate 1-8 through the locking screws 1-9. After the assembly is completed, the above modules, the focusing slide 4, and the imaging system 3 need to be installed together on the debugging base plate 2. Use computer software to connect the imaging system 3, set the light source brightness, sensitivity and other parameters, and control the movement of the focusing slide 4 until the pinhole position of the precision pinhole 1-3-14 is clearly imaged;

[0038] Step 2: Lock the focusing slide 4, remove the precision pinhole 1-3-14 from the pinhole XY precision adjustment slide 1-3, and then adjust the focal length adjustment nut 1-2-2 to achieve the focusing spot size of the laser spot, such as Figure 8As shown, the focus adjustment nut 1-2-2 is continuously adjusted until the light spot shape in the imaging system 3 reaches the minimum, and the corresponding light spot position is marked by software; the process of controlling the pinhole XY precision adjustment slide 1-3 to drive the precision pinhole 1-3-14 to the marked light spot position is as follows: the precision pinhole 1-3-14 is set on the pinhole XY precision adjustment slide 1-3, and the pinhole XY precision adjustment slide 1-3 drives the precision pinhole 1-3-14 to move in the horizontal X direction and the vertical Y direction to control the pinhole to coincide with the light spot;

[0039] Step 3: Reinstall the precision pinhole 1-3-14 on the pinhole XY precision adjustment slide 1-3. At this time, the imaging system 3 obtains the image of the pinhole. In the above steps, since the position of the light spot has been marked by the software, the pinhole XY precision adjustment slide 1-3 can be adjusted to drive the precision pinhole 1-3-14 to the marked light spot position, so that the pinhole and the light spot can be quickly adjusted. The adjustment method of the pinhole XY precision adjustment slide 1-3 is as follows: Figure 4 As shown;

[0040] When the X direction needs to be adjusted, loosen the X-direction locking screw 1-3-3, manually fine-tune the X-direction position of the pinhole as close to the position of the spot mark as possible, re-tighten the X-direction locking screw 1-3-3, loosen the X-direction locking screw 2 1-3-5, and rotate the X-direction differential screw 1-3-2. The differential of the differential thread can achieve precise adjustment of the pinhole in the X direction. After the adjustment is completed, tighten the X-direction locking screw 2 1-3-5.

[0041] When the Y direction needs to be adjusted, loosen the Y direction locking screw 1-3-10, manually fine-tune the Y direction position of the pinhole as close to the position of the spot mark as possible, re-tighten the Y direction locking screw 1-3-10, loosen the Y direction locking screw 2 1-3-9, and rotate the Y direction differential screw 1-3-8. The differential of the differential thread can achieve precise adjustment of the pinhole in the X direction. After the adjustment is completed, tighten the Y direction locking screw 2 1-3-9.

[0042] Step 4: After the focus point and the light spot are overlapped, the power through the pinhole 1-3-14 needs to be monitored by the power meter 5 to accurately adjust the lens-focusing module 1-2 and the pinhole XY precision adjustment slide 1-3. The structure diagram is as follows: Fig. 9 As shown, ensure that the power meter 5 monitors the laser power through the precision pinhole 1-3-14 to reach the maximum, lock the X-axis locking screw 1-3-5 and the Y-axis locking screw 1-3-5 to complete the XY position locking of the pinhole; screw the locking screw 1-2-10 into the adjustment lens 1-2-3 with a wrench, and tighten it to complete the locking of the lens 1-2-9; a power meter 5 for monitoring the laser power is provided on the pinhole XY precision adjustment slide 1-3;

[0043] Step 5: Assemble the lens 2 focusing module 1-4 in the beam filter module 1, and then install the target 6 for debugging, continuously debug the focal length of the lens 2 in the lens 2 focusing module 1-4, and observe the size of the laser beam after passing through the beam filter module 1 through the target 6 until the beam meets the collimation requirements and the debugging is completed; the schematic diagram of the beam collimation adjustment structure is as follows Fig.10 shown.

[0044] The present invention provides an efficient, stable and reliable laser beam spatial filtering debugging method and device, which adopts a set of precision differential adjustment devices and a reasonable locking structure design scheme, and is actually verified to be stable and reliable. At the same time, it is matched with a set of imaging system 3 to quickly realize the coincidence positioning of the focusing spot and the pinhole, and the beam adjustment of the system can be realized by subsequent fine-tuning. This method greatly reduces the debugging threshold and debugging time of the system, and even a novice can complete it quickly, greatly improving the debugging efficiency, and can conveniently realize the coincidence positioning of the focusing spot and the pinhole, and improve the debugging efficiency of the laser beam spatial filtering.

[0045] During debugging, the imaging system 3 is connected to the control computer through a communication cable. The control computer has the function of automatically adjusting the light source size, imaging parameters, position marking, etc. of the imaging system. The debugging flow chart is as follows: Figure 1 shown.

[0046] A highly efficient, stable and reliable laser beam spatial filtering debugging device comprises a beam filtering module 1 arranged on a debugging base plate 2, and an imaging system 3 arranged on the debugging base plate 2 through a focusing slide 4 and opposite to the beam filtering module 1, characterized in that the beam filtering module 1 comprises a laser light source 1-1 arranged on the debugging base plate 2 through a module base plate 1-8, a lens-focusing module 1-2 arranged on the emission port of the laser light source 1-1, a pinhole XY precision adjustment slide 1-3 arranged on the module base plate 1-8 and adjacent to the lens-focusing module 1-2, and a lens-two focusing module 1-4 arranged on the module base plate 1-8 through a fixing seat 1-5 and located on a side of the pinhole XY precision adjustment slide 1-3 away from the lens-one focusing module 1-2, and the pinhole XY precision adjustment slide 1-3 is detachably mounted on the module base plate 1-8 through an XY slide fixing seat 1-6.

[0047] The pinhole XY precision adjustment slide 1-3 includes a back plate 1-3-7 arranged on the module bottom plate 1-8 through an XY slide fixing seat 1-6, a Y movable plate 1-3-6 arranged on the end surface of the back plate 1-3-7 away from the laser light source 1-1 through a Y-direction control member, an X movable plate 1-3-1 arranged on the end surface of the Y movable plate 1-3-6 away from the back plate 1-3-7 through an X-direction control member, and a precision pinhole fixing member arranged on the end surface of the X movable plate 1-3-1 away from the Y movable plate 1-3-6. The fixed plate 1-3-16 and the Y-direction control member drive the Y movable plate 1-3-6 to slide along the Y-direction on the end face of the back plate 1-3-7; the X-direction control member drives the X movable plate 1-3-1 to slide along the X-direction on the end face of the Y movable plate 1-3-6; the end faces of the back plate 1-3-7, the Y movable plate 1-3-6, the X movable plate 1-3-1 and the precision pinhole fixing plate 1-3-16 are provided with openings which are interconnected, and the precision pinhole fixing plate 1-3-16 is provided with a precision pinhole 1-3-14 in the opening provided by the precision pinhole fixing plate 1-3-16.

[0048] The Y-axis control component includes a first control block fixedly arranged on a side surface of the back plate 1-3-7, a first adjustment block arranged on a side surface of the Y movable plate 1-3-6 and one end of which is located below or above the first control block, and a Y-axis control structure for controlling the distance adjustment between the first control block and the first adjustment block and fixing the position.

[0049] The Y-direction control structure includes a first control screw which is threadedly connected to the first control block and one end of which is rotatably connected to the side of the first adjustment block. By rotating the first control screw, the first control block can be driven on the control screw rod to move closer to or away from the first adjustment block, thereby realizing the vertical distance adjustment between the back plate 1-3-7 and the Y movable plate 1-3-6.

[0050] like Figure 4 As shown, the Y-direction control structure includes a Y-direction differential screw 1-3-8 that passes through the first control block and the first adjustment block through a threaded connection. By rotating the Y-direction differential screw 1-3-8, the distance between the first control block and the first adjustment block can be adjusted, so as to accurately control the back plate 1-3-7 and the Y movable plate 1-3-6 to move closer to or farther away from each other in the Y direction.

[0051] The X-direction control member includes a second adjustment block fixedly arranged on the top side of the Y movable plate 1-3-6 and one end of which is located on the top side of the X movable plate 1-3-1, a second control block arranged on the top side of the X movable plate 1-3-1 and located on the left or right side of the second adjustment block, and an X-direction control structure for controlling the distance adjustment between the second control block and the second adjustment block and fixing the position.

[0052] The X-direction control structure includes a second control screw which is threadedly connected to the second control block and one end of which is rotatably connected to the side of the second adjustment block. By rotating the second control screw, the second control block can be driven to move closer to or away from the second adjustment block on the control screw rod, thereby realizing the distance adjustment in the lateral direction between the Y movable plate 1-3-6 and the X movable plate 1-3-1.

[0053] like Figure 4 As shown, the X-direction control structure includes an X-direction differential screw 1-3-2 that penetrates the first control block and the first adjustment block through a threaded connection. By rotating the X-direction differential screw 1-3-2, the distance between the second control block and the second adjustment block can be adjusted, so as to accurately control the X movable plate 1-3-1 and the Y movable plate 1-3-6 to move closer to or farther away from each other in the X direction.

[0054] like Figure 4 As shown, an X-direction nut fixing part 1-3-4 is provided on the Y movable plate 1-3-6, and the X-direction nut fixing part 1-3-4 is sleeved on the X-direction differential screw 1-3-2, and an X-direction locking screw 1-3-3 is provided on the X-direction nut fixing part 1-3-4, and the X-direction locking screw 1-3-3 drives the X-direction nut fixing part 1-3-4 to fix the position of the X-direction differential screw 1-3-2, so as to realize the position of the back plate 1-3-7 and the Y movable plate 1-3-6 after the Y-direction adjustment and the fixing of the position between the back plate 1-3-7 and the Y movable plate 1-3-6, and an X-direction locking screw 2 1-3-5 is provided on the first control block, and the X-direction locking screw 2 1-3-5 is rotated to fix the X-direction differential screw 1-3-2.

[0055] like Figure 4 As shown, a Y-direction nut fixing piece 1-3-11 is provided on the Y-direction movable plate 1-3-6, and the Y-direction nut fixing piece 1-3-11 is sleeved on the Y-direction differential screw 1-3-8, and a Y-direction locking screw 1-3-10 is provided on the Y-direction nut fixing piece 1-3-11, and the Y-direction locking screw 1-3-10 drives the Y-direction nut fixing piece 1-3-11 to fix the position of the Y-direction differential screw 1-3-8, so as to realize the X-direction movable plate 1-3-1 and the Y-direction movable plate 1-3-6 after being adjusted in the X direction and fixing the position between the X-direction movable plate 1-3-1 and the Y-direction movable plate 1-3-6, and a Y-direction locking screw 2 1-3-9 is provided on the second control block, and the Y-direction differential screw 1-3-8 is fixed by rotating the Y-direction locking screw 2 1-3-9.

[0056] A precision pinhole fixing plate 1-3-16 is provided on the end surface of the X movable plate 1-3-1 away from the Y movable plate 1-3-6 through a positioning pin 1-3-15 and a mounting screw 1-3-13.

[0057] A guide rail 1-3-12 arranged in the vertical direction is arranged on the end surface of the Y movable plate 1-3-6 adjacent to the back plate 1-3-7, and a guide rail 1-3-12 arranged in the transverse direction is arranged on the end surface of the Y movable plate 1-3-6 adjacent to the X movable plate 1-3-1. Through the two guide rails 1-3-12, the back plate 1-3-7 and the X movable plate 1-3-1 are respectively moved on the Y movable plate 1-3-6 in the vertical direction and the transverse direction, so as to facilitate the adjustment of the precision pinhole 1-3-14 in the XY direction and the position of the precision pinhole 1-3-14.

[0058] The lens-focusing module 1-2 includes a focusing guide component 1-2-5 whose end face is arranged on the emission port of the laser light source 1-1, a lens-fixing seat 1-2-1 arranged on the end of the focusing guide component 1-2-5 away from the laser light source 1-1, a lens 1-2-9 arranged in the lens-fixing seat 1-2-1, a focal length adjustment nut 1-2-2 mounted on the focusing guide component 1-2-5 and connected to the lens-fixing seat 1-2-1, an adjusting lens 1-2-3 mounted on the focal length adjustment nut 1-2-2 through a bearing limiter 1-2-4 and a limit bearing 1-2-8, and a preload spring 1-2-7 arranged between the focusing guide component 1-2-5 and the focal length adjustment nut 1-2-2.

[0059] A stop pin 1-2-6 is provided on the focusing guide component 1-2-5.

[0060] The lens-focusing module 1-2 is mounted on the module base plate 1-8 through a fixing seat.

[0061] The module base plate 1-8 is mounted on the debugging base plate 2 by fastening screws 1-9.

[0062] A locking screw 1-2-10 is provided on the focusing guide component 1-2-5.

[0063] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited by the above embodiments. The above embodiments and descriptions are only preferred examples of the present invention and are not intended to limit the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. An efficient, stable and reliable laser beam spatial filtering debugging method, characterized in that: The following steps are involved: Step 1: Install the laser light source (1-1), the lens-focusing module (1-2), the pinhole XY precision adjustment slide (1-3), the imaging system (3), and the focusing slide (4) on the debugging base plate (2) in sequence, and set the imaging system parameters to adjust the pinhole for clear imaging; Step 2: Lock the focusing slide (4), and remove the pinhole XY precision adjustment slide (1-3), control the focus spot size of the laser spot through the lens-focusing module (1-2), and mark the spot position; Step 3: Reinstall the precision pinhole (1-3-14) on the pinhole XY precision adjustment slide (1-3), and control the pinhole XY precision adjustment slide (1-3) to drive the precision pinhole (1-3-14) to the marking spot position; Step 4: Accurately adjust the lens-focusing module (1-2) and the pinhole XY precision adjustment slide (1-3) to control the laser power of the laser passing through the pinhole to be maximum; Step 5: Install the lens 2 focusing module (1-4) on the beam filtering module (1), and install the target (6) on the debugging base plate (2), observe the size of the laser beam emitted by the beam filtering module (1) through the target (6), and debug the focal length of the lens 2 in the lens 2 focusing module (1-4).

2. The efficient, stable and reliable laser beam spatial filtering debugging method according to claim 1 is characterized in that: In step 1, the imaging system is connected to a computer, and the light source brightness and sensitivity parameters are set through the computer.

3. The efficient, stable and reliable laser beam spatial filtering debugging method according to claim 1 is characterized in that: The process of controlling the pinhole XY precision adjustment slide (1-3) to drive the precision pinhole (1-3-14) to the position of the marking light spot in step 2 is as follows: the precision pinhole (1-3-14) is set on the pinhole XY precision adjustment slide (1-3), and the precision pinhole (1-3-14) is driven by the pinhole XY precision adjustment slide (1-3) to move in the horizontal X direction and the vertical Y direction, and the pinhole is controlled to coincide with the light spot.

4. The efficient, stable and reliable laser beam spatial filtering debugging method according to claim 1 is characterized in that: A power meter (5) for monitoring laser power is arranged on the pinhole XY precision adjustment slide table (1-3).

5. An efficient, stable and reliable laser beam spatial filtering debugging device, comprising a beam filtering module (1) arranged on a debugging base plate (2), and an imaging system (3) arranged on the debugging base plate (2) via a focusing slide (4) and opposite to the beam filtering module (1), characterized in that: The beam filtering module (1) comprises a laser light source (1-1) arranged on a debugging base plate (2) via a module base plate (1-8), a lens-focusing module (1-2) arranged on an emission port of the laser light source (1-1), a pinhole XY precision adjustment slide (1-3) arranged on the module base plate (1-8) and adjacent to the lens-focusing module (1-2), and a lens-2 focusing module (1-4) arranged on the module base plate (1-8) via a second fixing seat (1-5) and located on a side of the pinhole XY precision adjustment slide (1-3) away from the lens-focusing module (1-2). The pinhole XY precision adjustment slide (1-3) is detachably mounted on the module base plate (1-8) via an XY slide fixing seat (1-6).

6. The efficient, stable and reliable laser beam spatial filtering and debugging device according to claim 5, characterized in that: The pinhole XY precision adjustment slide (1-3) comprises a back plate (1-3-7) arranged on a module bottom plate (1-8) via an XY slide fixing seat (1-6), a Y movable plate (1-3-6) arranged on an end surface of the back plate (1-3-7) away from a laser light source (1-1) via a Y-direction control member, an X movable plate (1-3-1) arranged on an end surface of the Y movable plate (1-3-6) away from the back plate (1-3-7) via an X-direction control member, and a precision pinhole arranged on an end surface of the X movable plate (1-3-1) away from the Y movable plate (1-3-6). The fixed plate (1-3-16) is provided with a Y-direction control member driving the Y movable plate (1-3-6) to slide along the Y direction on the end surface of the back plate (1-3-7); the X-direction control member driving the X movable plate (1-3-1) to slide along the X direction on the end surface of the Y movable plate (1-3-6); the end surfaces of the back plate (1-3-7), the Y movable plate (1-3-6), the X movable plate (1-3-1) and the precision pinhole fixed plate (1-3-16) are provided with openings that penetrate each other, and the precision pinhole fixed plate (1-3-16) is provided with a precision pinhole (1-3-14) in the opening provided by the precision pinhole fixed plate (1-3-16).

7. The efficient, stable and reliable laser beam spatial filtering and debugging device according to claim 6, characterized in that: The Y-direction control member comprises a first control block fixedly arranged on one side of a back plate (1-3-7), a first adjustment block arranged on the side of a Y movable plate (1-3-6) and having one end located below or above the first control block, and a Y-direction control structure for controlling the distance adjustment between the first control block and the first adjustment block and fixing the position.

8. The efficient, stable and reliable laser beam spatial filtering debugging device according to claim 6 is characterized in that: The X-direction control member comprises a second adjustment block fixedly arranged on the top side of the Y movable plate (1-3-6) and one end of which is located on the top side of the X movable plate (1-3-1), a second control block arranged on the top side of the X movable plate (1-3-1) and located on the left or right side of the second adjustment block, and an X-direction control structure for controlling the distance adjustment between the second control block and the second adjustment block and fixing the position.

9. The efficient, stable and reliable laser beam spatial filtering debugging device according to claim 5, characterized in that: The lens-focusing module (1-2) comprises a focusing guide component (1-2-5) whose end face is arranged on the emission port of the laser light source (1-1), a lens-fixing seat (1-2-1) arranged on the end of the focusing guide component (1-2-5) away from the laser light source (1-1), a lens (1-2-9) arranged in the lens-fixing seat (1-2-1), a focal length adjustment nut (1-2-2) sleeved on the focusing guide component (1-2-5) and connected to the lens-fixing seat (1-2-1), an adjustment lens (1-2-3) sleeved on the focal length adjustment nut (1-2-2) through a bearing stopper (1-2-4) and a stopper bearing (1-2-8), and a preload spring (1-2-7) arranged between the focusing guide component (1-2-5) and the focal length adjustment nut (1-2-2).

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