Production line for fixing and baking developed substrate

Abstract

The invention relates to the field of semiconductor manufacturing equipment, in particular to a developed substrate fixing and baking production line which comprises a feeding manipulator, a feeding conveying line, automatic feeding and discharging equipment, a furnace body oven, a cooling feeding line and a discharging manipulator. A cavity is formed in the oven, and an opening is formed in one side of the cavity; a plurality of guide grooves are formed in the two opposite inner side walls of the cavity, the guide grooves located on the same side of the cavity are arranged at intervals in the vertical direction, the sides, close to an opening of the cavity, of the guide grooves are open, and the sides, away from the opening of the cavity, of the guide grooves are closed; a bearing plate is arranged in the guide groove, the bearing plate is in sliding fit with the guide groove, and the bearing plate is used for bearing a plurality of substrates to be baked; a plurality of driving devices are arranged on one side of the oven and arranged at intervals in the vertical direction, and each driving device is used for driving the bearing plate to move in the horizontal direction. According to the invention, the baking efficiency and quality of the substrate are improved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing equipment, and in particular to a production line for baking a substrate after development. Background Art

[0002] Post-development substrate baking is a key process in the electronics manufacturing process, especially in the manufacturing process of the middle frame of small electronic devices such as mobile phones. This process directly affects the performance and reliability of the final product. Traditional baking methods mainly rely on manual operation, which has problems such as low efficiency and uneven temperature. With the advancement of technology, baking equipment with a high degree of automation has gradually been introduced, which has significantly improved production efficiency and product quality.

[0003] The related technology discloses a display glass substrate baking device, which consists of a baking rack, a baking box, an air supply system and an exhaust system. The baking box is installed on the baking rack through a sliding rack, and the sliding rack includes a supporting rack and a sliding guide rail to ensure that the baking box can move smoothly. The interior of the baking box is surrounded by a baking cavity by a wall, a bottom plate and an upper cover. A heating plate assembly is provided inside, which consists of a heating panel, a heating plate and a heating support plate. The heating plate is spliced ​​by multiple electric heating units to meet different baking requirements. The baking box is also equipped with a door, which is installed through a box door sealer to ensure the sealing during the baking process. The substrate lifting device of the baking equipment has a sophisticated structure. The lifting rack is equipped with an ejector tray and an ejector rod. The ejector rod passes through the heating assembly and extends into the baking cavity to lift and put down the substrate. The lifting device slides through a swing shaft drive box and a lifting swing arm to ensure the smooth lifting and lowering of the substrate.

[0004] Although the above equipment can meet the baking requirements of developed substrates to a certain extent, in the actual production process, the interference problem between the automatic feeding equipment (such as a manipulator or a turntable feeding device) and the baking equipment is more prominent. Specifically, due to the limited internal space of the baking equipment, the automatic feeding equipment is prone to collide with the baking equipment during loading and unloading, resulting in equipment damage or substrate falling, seriously affecting production efficiency and product yield. Therefore, how to effectively solve this problem is a technical problem that needs to be solved urgently. Summary of the invention

[0005] In order to solve the above technical problems, the present application provides a production line for baking substrates after development.

[0006] The present application provides a production line for post-development substrate solid baking, which adopts the following technical solution: A production line for baking substrates after development, comprising a loading robot, a loading conveyor line, an automatic loading and unloading device, an oven, a cooling feeding line and a unloading robot; the loading robot is used to convey the substrate to the loading conveyor line, the loading conveyor line is used to convey the substrate to the automatic loading and unloading device, the automatic loading and unloading device is used to convey the substrate on the loading conveyor line into the oven, the automatic loading and unloading device is used to convey the substrate baked in the oven to the cooling feeding line, the cooling feeding line is used to convey the substrate to the unloading robot and cool the substrate at the same time; the oven is provided with a cavity inside, one side of the cavity is open; the cavity A plurality of guide grooves are provided on two opposite inner side walls of the cavity, and the guide grooves on both sides correspond to each other one by one. The plurality of guide grooves on the same side of the cavity are arranged at intervals in the vertical direction, and the length direction of each guide groove extends along the second direction. The side of the guide groove close to the cavity opening is open, and the side of the guide groove away from the cavity opening is closed. A carrying plate is provided in each of the guide grooves, and the carrying plate is slidably matched with the guide groove, and the carrying plate is used to support a plurality of substrates to be baked. A plurality of driving devices are provided on the oven, and the plurality of driving devices are arranged at intervals in the vertical direction, and the driving devices correspond to the carrying plates one by one, and the driving devices are used to drive the carrying plates to move in the horizontal direction.

[0007] By adopting the above technical scheme, the production line for post-development substrate baking provided by the present application realizes the automated baking process of the substrate through the cooperation of the loading manipulator, the loading conveyor line, the automatic loading and unloading equipment, the oven, the cooling feeding line and the unloading manipulator; in the loading process, the driving device drives multiple carrier plates to extend in sequence (from top to small or from bottom to top), and the automatic loading equipment loads the multiple carrier plates in sequence; when the substrate on one of the carrier plates is full, the driving device automatically retracts the carrier plate into the cavity, repeats the above action until all the substrates are retracted into the cavity, and then closes the door for baking; when baking is completed, firstly, the driving device drives multiple carrier plates to extend in sequence (from top to small or from bottom to top), and the automatic loading equipment unloads the multiple carrier plates in sequence (from top to bottom), and when the carrier plate at the top is unloaded, it automatically retracts into the cavity, and so on, to realize automatic loading and unloading of all carrier plates; effectively solves the interference problem between the traditional baking equipment and the automatic feeding equipment during the loading and unloading process, and improves the production efficiency and the reliability and safety of the equipment.

[0008] Optionally, the driving device includes a linkage mechanism and a first driving mechanism, the linkage mechanism includes a spur gear, a rack and a rotating shaft, the rotating shaft passes through the oven, and the rotating shaft is rotatably connected to the oven; the spur gear is sleeved on the rotating shaft and fixedly connected to the rotating shaft, the rack is fixed on a supporting plate, the rack extends in a horizontal direction, and the spur gear and the rack are meshed with each other; the first driving mechanism is arranged on the outer wall of the oven, and the first driving mechanism is used to drive the rotating shaft to rotate.

[0009] By adopting the above technical solution, the meshing transmission mechanism of the spur gear and the rack ensures the precise movement of the carrier plate and improves the reliability and stability of the equipment; the rotating shaft is rotatably connected to the oven through the bearing, which reduces friction and extends the service life of the equipment; the setting of the first driving mechanism is convenient for the staff to manually or automatically adjust the rotation angle of the rotating shaft, so as to flexibly control the moving distance of the carrier plate and adapt to the requirements of substrates of different sizes and quantities; the entire driving device has a compact structure and is easy to maintain and replace parts, thereby reducing maintenance costs.

[0010] Optionally, a positioning groove is provided on the lower surface of the supporting plate, the positioning groove extends along the second direction, and both ends of the positioning groove are closed; the rack is installed in the positioning groove, the outer wall of the rack abuts against the inner wall of the positioning groove, and the rack is fixedly connected to the supporting plate.

[0011] By adopting the above technical solution, a positioning groove is provided on the lower surface of the carrier plate, the positioning groove extends along the second direction, both ends of the positioning groove are closed, the rack is installed in the positioning groove, the outer wall of the rack abuts against the inner wall of the positioning groove, and the rack is fixed to the lower surface of the carrier plate by multiple bolts. The stability and reliability of the rack installation are increased, and the rack is effectively prevented from loosening or falling off due to vibration or other factors during long-term use, ensuring the transmission accuracy and stability of equipment operation.

[0012] Optionally, the first driving mechanism includes a first support, a motor, a first bevel gear and a second bevel gear, the first support is fixed to the outer wall of the oven, the motor is fixed to the first support, the first bevel gear is sleeved on the output shaft of the motor and fixedly connected to the output shaft of the motor; the second bevel gear is sleeved on the rotating shaft and fixedly connected to the rotating shaft, and the first bevel gear is meshed with the second bevel gear.

[0013] By adopting the above technical solution, the first support is fixed to the outer wall of the oven, and the motor is fixed on the first support, which not only provides a stable installation foundation, but also facilitates the maintenance and replacement of the motor; the first bevel gear is sleeved on the output shaft of the motor and fixedly connected to the output shaft of the motor, the second bevel gear is sleeved on the rotating shaft and fixedly connected to the rotating shaft, and the first bevel gear is meshed with the second bevel gear. This transmission method can effectively transmit power, reduce energy loss, and improve transmission efficiency; the first bevel gear is driven by the motor to rotate, and then the second bevel gear and the rotating shaft thereon are driven to rotate, thereby realizing precise control of the carrier plate, so that it can move smoothly in the guide groove, thereby realizing automatic loading and unloading of the substrate.

[0014] Optionally, a first adjustment groove is formed on the first support, and the first adjustment grooves extend in a vertical direction; bolts are passed through the first adjustment grooves, and the bolts cooperate with oven threads.

[0015] By adopting the above technical solution, the four adjustment slots and bolts on the first support not only increase the convenience of the staff to install and remove the first support, but also facilitate the staff to adjust the position of the first support in the vertical direction. This flexible adjustment capability helps to ensure the height adaptation of the motor and the first bevel gear, thereby ensuring good meshing between the first bevel gear and the second bevel gear, and improving the reliability and accuracy of the equipment operation.

[0016] Optionally, an automatic door device is also included, which includes a revolving door and a second driving mechanism, one side of the revolving door is rotatably connected to one side of the oven; the second driving mechanism is arranged on the box body, and the second driving mechanism is used to drive the revolving door to automatically open or close.

[0017] By adopting the above technical solution, an automatic door device is provided on one side of the cavity opening of the production line for post-development substrate fixation baking, and the device includes a revolving door and a second driving mechanism. One side of the revolving door is rotatably connected to one side of the oven, and the second driving mechanism is provided on the outer side wall of the automatic door, and is used to drive the revolving door to open or close automatically. It can effectively prevent dust from entering the cavity, maintain the cleanliness of the working environment, and improve product quality. At the same time, the automatic door reduces the time of manual operation and improves production efficiency.

[0018] Optionally, the second driving mechanism includes a support seat, a cylinder and a second support, the support seat is fixed to the side wall of the oven, the second support is fixed to the revolving door, the cylinder is rotatably connected to the support seat, and the piston rod of the cylinder is rotatably connected to the second support.

[0019] By adopting the above technical solution, the support seat is fixed to the side wall of the oven, providing a stable installation foundation for the cylinder, ensuring the stability of the cylinder during operation; the second support seat is fixed to the outer wall of the revolving door and is rotatably connected to the piston rod of the cylinder, so that the cylinder can flexibly drive the revolving door to open and close, thereby improving the degree of automation; the rotational connection between the cylinder and the support seat, as well as the rotational connection between the piston rod of the cylinder and the second support seat, make the entire system more stable during movement, reduce mechanical wear, and extend service life.

[0020] Optionally, the support seat is provided with two second adjustment grooves, each of which extends along the second direction; each of the second adjustment grooves is penetrated by a bolt, and each of the bolts cooperates with the box thread.

[0021] By adopting the above technical solution, the two second adjustment grooves on the support seat enable the staff to easily adjust the position of the support seat in the horizontal direction, thereby accurately adjusting the relative position of the cylinder and the second support seat, ensuring a good connection between the cylinder piston rod and the second support seat. The bolts inserted in each second adjustment groove cooperate with the box thread, which enhances the stability of the support seat and improves the overall reliability and service life of the equipment.

[0022] Optionally, a strip-shaped protective cover is provided on the lower surface of the supporting plate, the rack is located inside the protective cover, and there is a gap between the protective cover and the side wall of the cavity.

[0023] By adopting the above technical solution, the strip-shaped protective cover is set on the lower surface of the carrier plate, completely wrapping the rack inside it, effectively preventing the rack from direct contact with the external environment during operation, reducing the interference and damage of dust, debris and other impurities to the rack, and ensuring the meshing accuracy and transmission efficiency of the rack and the spur gear. At the same time, the gap design between the protective cover and the side wall of the cavity not only ensures the smooth movement of the carrier plate in the guide groove, but also avoids the friction between the protective cover and the side wall of the cavity, extending the service life of the equipment and improving the reliability and stability of the entire production line for post-development substrate fixation.

[0024] Optionally, a humidity sensor is also provided in the cavity, and the humidity sensor is used to detect the humidity in the cavity and transmit a signal to the controller.

[0025] By adopting the above technical solution, the humidity sensor can monitor the humidity in the cavity in real time and feed the data back to the controller. This ensures that the humidity in the cavity is kept within an appropriate range during the baking process, avoiding excessive humidity that affects the quality of the substrate, thereby improving the reliability and consistency of the product.

[0026] In summary, the present application includes at least one of the following beneficial technical effects: 1. The oven structure with a sliding bearing plate realizes effective support and automatic movement of the substrate, solves the interference problem between the traditional baking equipment and the automatic feeding equipment during the loading and unloading process, and improves production efficiency and safety; 2. The driving device arranged under each carrier plate accurately controls the movement of the carrier plate through a linkage mechanism consisting of a spur gear, a rack and a rotating shaft, ensuring the stability and consistency of the substrate during the baking process, and improving the baking quality and product yield; 3. The automatic door device installed at the oven opening can open and close automatically, which is convenient for the feeding of substrates and the sealing of the baking cavity, reduces human intervention, and further improves the automation level and operation convenience of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is a schematic diagram of the structure of a production line for baking a substrate after development in an embodiment of the present application.

[0028] Figure 2 It is a schematic diagram of the structure of the oven in the embodiment of the present application.

[0029] Figure 3 It is a schematic diagram of the structure of the guide groove and the protective cover in the embodiment of the present application.

[0030] Figure 4 It is a schematic diagram of the structure of the spur gear, rack and rotating shaft in the embodiment of the present application.

[0031] Figure 5 yes Figure 2 A partial enlarged view of part A.

[0032] Figure 6 It is a structural schematic diagram of the load-bearing plate from another perspective in an embodiment of the present application.

[0033] Figure 7 It is a schematic diagram of the structure of the support seat, the cylinder and the second support in the embodiment of the present application.

[0034] Description of reference numerals: 1. Oven; 11. Cavity; 12. Guide groove; 2. Carrying plate; 21. Positioning groove; 22. Protective cover; 3. Linkage mechanism; 31. Spur gear; 32. Rack; 33. Rotating shaft; 4. First driving mechanism; 41. First support; 42. Motor; 43. First bevel gear; 44. Second bevel gear; 45. First adjusting groove; 5. Revolving door; 6. Second driving mechanism; 61. Support seat; 62. Cylinder; 63. Second support; 64. Second adjusting groove; 7. Bottom cabinet; 8. Loading robot; 9. Loading conveyor line; 10. Automatic loading and unloading equipment; 13. Cooling feeding line; 14. Unloading robot. DETAILED DESCRIPTION

[0035] The following is combined with Figure 1-7 This application is described in further detail.

[0036] The terms used in this application are only for the purpose of describing specific embodiments and are not intended to limit this application. Unless otherwise defined, the technical terms or scientific terms used in this application should be the common meanings understood by those skilled in the art to which this application belongs. The "first", "second" and similar words used in this application do not indicate any order, quantity or importance, but are only used to distinguish different components.

[0037] For ease of understanding, in the horizontal direction of this embodiment, the length direction of the rotating shaft 33 is defined as the first direction, and the length direction of the guide groove 12 is defined as the second direction, and the production line for post-development substrate fixing and baking is explained based on this.

[0038] The present application embodiment discloses a production line for baking a substrate after development. Figure 1 Figure 1 and Figure 2 Figure 2 The production line for baking the substrate after development includes a loading robot 8, a loading conveyor line 9, an automatic loading and unloading device 10, an oven 1, a cooling feeder line 13 and a unloading robot 14; the loading robot 8 is used to convey the substrate to the loading conveyor line 9, the loading conveyor line 9 is used to convey the substrate to the automatic loading and unloading device 10, the automatic loading and unloading device 10 is used to convey the substrate on the loading conveyor line 9 to the oven, the automatic loading and unloading device 10 is used to convey the substrate baked in the oven to the cooling feeder line 13, the cooling feeder line 13 is used to transfer to the unloading robot 14 and cool the substrate at the same time. In this embodiment, the automatic loading and unloading device 10 can be a robot or a turntable feeding device.

[0039] Reference Figure 2 and Figure 3 A cavity 11 is provided inside the oven 1, and one side of the cavity 11 is open. Multiple groups of cooling fans are also provided in the cavity 11, and the multiple groups of cooling fans are evenly distributed along the height direction of the cavity 11, and are used to quickly cool the substrate in the cavity 11. A bottom cabinet 7 is provided at the bottom of the cavity 11, and a control system for controlling multiple groups of cooling fans is provided inside the bottom cabinet 7. The control system includes a controller, and the controller is responsible for receiving signals from sensors or other input devices. These signals usually reflect various parameters such as cooling requirements, ambient temperature, and equipment status. Based on these input information, the controller performs real-time analysis and calculation through preset algorithm logic to accurately control the working status of each cooling fan, including but not limited to starting, stopping, speed adjustment, etc., in order to achieve efficient and accurate heat management.

[0040] Reference Figure 3, two opposite inner side walls of the cavity 11 are provided with a plurality of guide grooves 12, and the guide grooves 12 on both sides correspond to each other. The plurality of guide grooves 12 on the same side of the cavity 11 are arranged at intervals in the vertical direction, and the length direction of each guide groove 12 extends along the second direction. The side of the guide groove 12 close to the opening of the cavity 11 is open, and the side of the guide groove 12 away from the opening of the cavity 11 is closed. A carrying plate 2 is provided in each two corresponding guide grooves 12, and each carrying plate 2 is slidably matched with the guide grooves 12 on both sides at the same time, and the carrying plate 2 is used to support multiple substrates to be baked.

[0041] Reference Figure 2 and Figure 3 A plurality of driving devices are arranged on one side of the oven 1, and the plurality of driving devices are arranged at intervals in the vertical direction, and the driving devices correspond to the carrying plates 2 one by one. Each driving device is used to drive the carrying plate 2 to move along the second direction.

[0042] Reference Figure 4 and Figure 5 Each driving device includes a linkage mechanism 3 and a first driving mechanism 4. The linkage mechanism 3 includes a spur gear 31, a rack 32 and a rotating shaft 33. The rotating shaft 33 extends along a first direction, passes through one side of the oven 1, and is rotatably connected to the oven 1 through a bearing. The spur gear 31 and the rack 32 are located inside the oven 1. The spur gear 31 is sleeved on the end of the rotating shaft 33 and is fixedly connected to the rotating shaft 33. The rack 32 is fixed to the lower surface of the supporting plate 2. The rack 32 extends along a second direction. The spur gear 31 and the rack 32 are meshed with each other. The first driving mechanism 4 is arranged on the outer wall of the oven 1. The first driving mechanism 4 is used to drive the rotating shaft 33 to rotate, so that the rotation of the rotating shaft 33 can be converted into the linear movement of the supporting plate 2.

[0043] Reference Figure 6 The lower surface of the carrier plate 2 is provided with a positioning groove 21, which extends along the second direction, and both ends of the positioning groove 21 are closed. The rack 32 is installed in the positioning groove 21, and the outer wall of the rack 32 abuts against the inner wall of the positioning groove 21. The rack 32 is fixed to the lower surface of the carrier plate 2 by a plurality of bolts, which increases the efficiency of the staff in installing and removing the rack 32.

[0044] Reference Figure 2 and Figure 5 The first driving mechanism 4 includes a first support 41, a motor 42, a first bevel gear 43 and a second bevel gear 44. The first support 41 is fixed to the outer wall of the oven 1, the motor 42 is fixed to the first support 41, the first bevel gear 43 is sleeved on the output shaft of the motor 42 and is fixedly connected to the output shaft of the motor 42. The second bevel gear 44 is sleeved on the rotating shaft 33 and is fixedly connected to the rotating shaft 33, and the first bevel gear 43 and the second bevel gear 44 are meshed with each other.

[0045] Reference Figure 5 , four first adjustment slots 45 are provided on the first support 41, and the four first adjustment slots 45 are distributed in a rectangular array, and each adjustment slot extends in the vertical direction. A bolt is inserted into each first adjustment slot 45, and each bolt is threadedly matched with the oven 1. It not only increases the convenience for the staff to install and disassemble the first support 41, but also facilitates the staff to adjust the height of the first support 41, thereby facilitating the adjustment of the height of the motor 42 and the first bevel gear 43, so as to facilitate the mutual meshing of the first bevel gear 43 and the second bevel gear 44. In this embodiment, the distance between the first drive mechanism 4 and the opening side of the cavity 11 is small, thereby increasing the moving stroke of the rack 32.

[0046] Reference Figure 3 , a strip-shaped protective cover 22 is provided on the lower surface of the carrier plate 2, and the protective cover 22 is fixed to the carrier plate 2 by a plurality of bolts. The protective cover 22 extends along the second direction, and both ends of the protective cover 22 are open. The rack 32 is located inside the protective cover 22, and there is a gap between the side walls of the protective cover 22 and the cavity 11. The strip-shaped protective cover 22 is provided on the lower surface of the carrier plate 2, and the rack 32 is completely wrapped inside it, which effectively prevents the rack 32 from directly contacting the external environment during operation, reduces the interference and damage of dust, debris and other impurities to the rack 32, and ensures the meshing accuracy and transmission efficiency of the rack 32 and the spur gear 31. At the same time, the gap design between the protective cover 22 and the side wall of the cavity 11 not only ensures the smooth movement of the carrier plate 2 in the guide groove 12, but also avoids the friction between the protective cover 22 and the side wall of the cavity 11, prolongs the service life of the equipment, and improves the reliability and stability of the entire production line for post-development substrate fixation.

[0047] Reference Figure 7 The production line for baking the substrate after development further includes an automatic door device, which includes a revolving door 5 and a second driving mechanism 6. One side of the revolving door 5 is rotatably connected to one side of the oven 1. The second driving mechanism 6 is arranged on the outer side wall of the automatic door, and the second driving mechanism 6 is used to drive the revolving door 5 to automatically open or close.

[0048] Continue to refer to Figure 7 In this embodiment, the second driving machine includes a support seat 61, a cylinder 62 and a second support seat 63. The support seat 61 is fixed to the side wall of the oven 1, and the second support seat 63 is fixed to the outer wall of the revolving door 5. The cylinder 62 is rotatably connected to the support seat 61, and the piston rod of the cylinder 62 is rotatably connected to the second support seat 63, thereby realizing automatic opening and closing of the revolving door 5.

[0049] Continue to refer to Figure 7The support seat 61 is provided with two second adjustment slots 64, each of which extends along the second direction. Each second adjustment slot 64 is provided with a bolt, each of which is matched with the screw thread of the box body, which not only increases the convenience of the staff in installing and removing the support seat 61, but also facilitates the staff in adjusting the position of the support seat 61 in the horizontal direction.

[0050] The implementation principle of the above embodiment is as follows: the production line for fixing and baking the substrate after development provided by the present application realizes the automatic fixing and baking process of the substrate through the cooperation of the loading manipulator, the loading conveyor line, the automatic loading and unloading equipment, the oven, the cooling and feeding line and the unloading manipulator; the guide groove 12 provided on the inner wall of the cavity 11 is slidably matched with the carrier plate 2, so that the carrier plate 2 can move along the second direction to realize the feeding and sending of the substrate. A driving device is arranged under each carrier plate 2, and the driving device realizes the movement of the carrier plate 2 through the linkage mechanism 3 (including the spur gear 31, the rack 32 and the rotating shaft 33). The rotating shaft 33 is driven to rotate by the first driving mechanism 4 (including the motor 42, the first bevel gear 43 and the second bevel gear 44), thereby driving the spur gear 31 to rotate, and the rack 32 meshing with the spur gear 31 moves accordingly, thereby driving the carrier plate 2 to move along the second direction. The positioning groove 21 on the lower surface of the carrier plate 2 is used to install the rack 32, which increases the stability of the installation of the rack 32. The automatic door device (including the revolving door 5 and the second driving mechanism 6) provided at the opening of the oven 1 can be opened and closed automatically to facilitate the feeding of the substrate and the sealing of the baking cavity 11. The second driving mechanism 6 drives the revolving door 5 to rotate through the cylinder 62 to realize the automatic operation of the door. In addition, the adjustment slot outside the oven 1 facilitates the staff to install, disassemble and adjust the height and position of related components, ensuring the flexibility and ease of use of the equipment. The entire equipment improves production efficiency through automated loading and unloading and baking processes, and avoids the interference problem between traditional baking equipment and automatic feeding equipment during loading and unloading.

[0051] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A production line for baking a substrate after development, characterized in that: The invention comprises a loading robot (8), a loading conveyor line (9), an automatic loading and unloading device (10), a furnace oven (1), a cooling feeding line (13) and a unloading robot (14); the loading robot (8) is used to convey a substrate to the loading conveyor line (9); the loading conveyor line (9) is used to convey a substrate to the automatic loading and unloading device (10); the automatic loading and unloading device (10) is used to convey a substrate on the loading conveyor line (9) into the oven; the automatic loading and unloading device (10) is used to convey a substrate baked in the oven to the cooling feeding line (13); the cooling feeding line (13) is used to convey the substrate to the unloading robot (14) and cool the substrate at the same time; a cavity (11) is provided inside the oven (1); one side of the cavity (11) is open; two sides of the cavity (11) are A plurality of guide grooves (12) are provided on opposite inner side walls, the guide grooves (12) on both sides correspond to each other, the plurality of guide grooves (12) on the same side of the cavity (11) are arranged at intervals in the vertical direction, the length direction of each guide groove (12) extends along the second direction, the side of the guide groove (12) close to the opening of the cavity (11) is open, and the side of the guide groove (12) away from the opening of the cavity (11) is closed; a carrying plate (2) is provided in each of the guide grooves (12), the carrying plate (2) and the guide groove (12) are slidably matched, and the carrying plate (2) is used to support a plurality of substrates to be baked; a plurality of driving devices are provided on the oven (1), the plurality of driving devices are arranged at intervals in the vertical direction, the driving devices correspond to the carrying plates (2) one by one, and the driving devices are used to drive the carrying plates (2) to move in the horizontal direction.

2. The production line for baking developed substrates according to claim 1, characterized in that: The driving device comprises a linkage mechanism (3) and a first driving mechanism (4); the linkage mechanism (3) comprises a spur gear (31), a rack (32) and a rotating shaft (33); the rotating shaft (33) passes through the oven (1); the rotating shaft (33) is rotatably connected to the oven (1); the spur gear (31) is sleeved on the rotating shaft (33) and is fixedly connected to the rotating shaft (33); the rack (32) is fixed on the supporting plate (2); the rack (32) extends in a horizontal direction; the spur gear (31) and the rack (32) are meshed with each other; the first driving mechanism (4) is arranged on the outer wall of the oven (1); the first driving mechanism (4) is used to drive the rotating shaft (33) to rotate.

3. The production line for baking developed substrates according to claim 2, characterized in that: A positioning groove 21 is provided on the lower surface of the carrier plate (2), the positioning groove 21 extends along the second direction, and both ends of the positioning groove 21 are closed; the rack (32) is installed in the positioning groove 21, the outer side wall of the rack (32) abuts against the inner side wall of the positioning groove 21, and the rack (32) is fixedly connected to the carrier plate (2).

4. The production line for baking developed substrates according to claim 2, characterized in that: The first driving mechanism (4) comprises a first support (41), a motor (42), a first bevel gear (43) and a second bevel gear (44); the first support (41) is fixed to the outer wall of the oven (1); the motor (42) is fixed to the first support (41); the first bevel gear (43) is sleeved on the output shaft of the motor (42) and is fixedly connected to the output shaft of the motor (42); the second bevel gear (44) is sleeved on the rotating shaft (33) and is fixedly connected to the rotating shaft (33); the first bevel gear (43) is meshed with the second bevel gear (44).

5. The production line for baking developed substrates according to claim 4, characterized in that: The first support (41) is provided with an adjustment groove, and the adjustment grooves extend in a vertical direction; bolts are passed through the adjustment grooves, and the bolts are engaged with the threads of the oven (1).

6. The production line for baking developed substrates according to claim 1, characterized in that: The invention also comprises an automatic door device, which comprises a revolving door (5) and a second driving mechanism (6), one side of the revolving door (5) is rotatably connected to one side of the oven (1); the second driving mechanism (6) is arranged on the box body, and the second driving mechanism (6) is used to drive the revolving door (5) to automatically open or close.

7. The production line for baking developed substrates according to claim 6, characterized in that: The second driving mechanism (6) comprises a support seat (61), a cylinder (62) and a second support seat (63); the support seat (61) is fixed to the side wall of the oven (1); the second support seat (63) is fixed to the revolving door (5); the cylinder (62) is rotatably connected to the support seat (61); and the piston rod of the cylinder (62) is rotatably connected to the second support seat (63).

8. The production line for baking developed substrates according to claim 7, characterized in that: The support seat (61) is provided with two second adjustment grooves (64), each of which extends along the second direction; each of which is provided with a bolt, each of which is threadedly matched with the box body.

9. The production line for baking developed substrates according to claim 2, characterized in that: A strip-shaped protective cover (22) is provided on the lower surface of the bearing plate (2), the rack (32) is located inside the protective cover (22), and a gap exists between the protective cover (22) and the side wall of the cavity (11).

10. The production line for baking developed substrates according to claim 1, characterized in that: A humidity sensor is also provided in the cavity (11), and is used to detect the humidity in the cavity (11) and transmit a signal to the controller.

Images