End effector, manipulator and transmission chamber

Abstract

The invention provides an end effector, a manipulator and a transmission chamber, and relates to the technical field of semiconductor equipment, the end effector comprises a bearing section, and the bearing section comprises a first extension rod, a second extension rod, a first reinforcing rod, a second reinforcing rod, a third reinforcing rod and a transition part; wherein the first reinforcing rod is located between the first extension rod and the second extension rod, the near end of the first extension rod and the near end of the second extension rod are both connected to the transition part, the second reinforcing rod is connected between the far end of the first extension rod and the far end of the first reinforcing rod, and the third reinforcing rod is connected between the far end of the second extension rod and the far end of the first reinforcing rod. The overall weight of the bearing section is reduced, and the far-end droop amount of the end effector is reduced; the integral structural rigidity of the bearing section is improved, so that the first-order mode is increased, the movement stability of the manipulator is improved, the resonance of the manipulator during movement is avoided, and the wafer is prevented from slipping or being scratched.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor equipment, and in particular to an end effector, a robot arm and a transfer chamber. Background Art

[0002] In the semiconductor device manufacturing process, the wafer is carried by the end effector of the robot, so that the wafer can be transferred in different chambers (such as loading and locking chambers, transfer chambers, process chambers, etc.), thereby assisting in completing the entire process.

[0003] The working environment of the end effector is usually a high temperature environment, and its material is usually a high temperature resistant quartz material. The proximal end of the end effector (the end close to the robot body) is connected to the robot, and the distal end of the end effector (the end away from the robot body) is in a suspended state. In the prior art, the distal end of the end effector has a large amount of droop, which is easy to interfere with other objects below it (such as other end effectors). When the end effector is designed as a long arm due to demand, this problem becomes particularly prominent. The inventor of this patent found that simply reducing the weight of the distal end of the end effector will affect the structural stiffness, thereby reducing the first-order mode of the end effector, and easily causing resonance during movement, resulting in the risk of scratches and slipping during wafer transmission. Summary of the invention

[0004] The main purpose of the present invention is to provide an end effector to solve at least one of the technical problems of the end effector in the prior art, such as large sagging, insufficient structural rigidity, and easy resonance.

[0005] In order to achieve the above-mentioned purpose, the present invention provides an end actuator, including a bearing section, the bearing section including a first extension rod, a second extension rod, a first reinforcement rod, a second reinforcement rod, a third reinforcement rod, and a transition portion; wherein the first reinforcement rod is located between the first extension rod and the second extension rod, the proximal end of the first extension rod and the proximal end of the second extension rod are both connected to the transition portion, the second reinforcement rod is connected between the distal end of the first extension rod and the distal end of the first reinforcement rod, and the third reinforcement rod is connected between the distal end of the second extension rod and the distal end of the first reinforcement rod.

[0006] Further, the distal ends of the first extension rod, the distal ends of the second extension rod, and the distal ends of the first reinforcement rod are all located on a first straight line, and the first reinforcement rod is disposed perpendicularly to the first straight line.

[0007] Furthermore, the distance between the distal end of the first reinforcing rod and the manipulator is smaller than the distance between the distal end of the first extension rod and the manipulator, and the distance between the distal end of the first reinforcing rod and the manipulator is smaller than the distance between the distal end of the second extension rod and the manipulator.

[0008] Furthermore, the second reinforcing rod and the third reinforcing rod are both bent toward the direction of the robot arm.

[0009] Furthermore, it also includes a connecting section and a mounting section, wherein the mounting section is connected to the manipulator, the proximal end of the connecting section is connected to the mounting section, and the distal end of the connecting section is connected to the transition portion.

[0010] Furthermore, at least one of the thickness and the width of the connecting section gradually increases from the distal end to the proximal end.

[0011] Furthermore, a first weight-reducing hole is provided on the transition portion.

[0012] Further, at least one of the thickness and width of the first extension rod gradually increases from the distal end to the proximal end; and / or, at least one of the thickness and width of the second extension rod gradually increases from the distal end to the proximal end; and / or, at least one of the thickness and width of the first reinforcement rod gradually increases from the distal end to the proximal end.

[0013] Furthermore, the width of the transition portion tapers smoothly from the distal end to the proximal end.

[0014] Further, the bearing section includes a first limiting portion, a second limiting portion, and a third limiting portion, the first limiting portion is arranged on the transition portion, the second limiting portion is arranged at the distal end of the first extension rod, and the third limiting portion is arranged at the distal end of the second extension rod.

[0015] Furthermore, the first limiting portion is provided with a first conical surface, the second limiting portion is provided with a second conical surface, and the third limiting portion is provided with a third conical surface, and the angle between the first conical surface and the horizontal plane, the angle between the second conical surface and the horizontal plane, and the angle between the third conical surface and the horizontal plane are all less than 45°.

[0016] The present invention also provides a robot arm, comprising the end effector.

[0017] The present invention also provides a transmission chamber, comprising a transmission chamber wall, wherein the transmission chamber wall forms a chamber body, and the manipulator is arranged in the chamber body.

[0018] The end effector of the present invention has a first reinforcing rod located between the first extension rod and the second extension rod, one end of the second reinforcing rod and one end of the third reinforcing rod are connected to the distal end of the first reinforcing rod, the other end of the second reinforcing rod is connected to the distal end of the first extension rod, and the other end of the third reinforcing rod is connected to the distal end of the second extension rod. The interval between the first reinforcing rod and the first extension rod and the interval between the first reinforcing rod and the second extension rod are equivalent to a weight-reducing hole structure, which reduces the overall weight of the load-bearing section, reduces the distal droop of the end effector, and avoids interference with other objects; the first reinforcing rod, the second reinforcing rod and the third reinforcing rod are used to improve the overall structural stiffness of the load-bearing section, thereby increasing the first-order mode, improving the movement stability of the robot, avoiding resonance when the robot moves, and ensuring that the wafer will not slip or be scratched.

[0019] The beneficial effects of the manipulator and the transfer chamber in the present invention correspond to all the beneficial effects of the above-mentioned end effector, and will not be repeated here. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The drawings constituting a part of the present application are used to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the drawings:

[0021] Figure 1 A first structural schematic diagram of an end effector provided in an embodiment of the present invention;

[0022] Figure 2 The second structural schematic diagram of the end effector provided by the embodiment of the present invention;

[0023] Figure 3 The third structural schematic diagram of the end effector provided by the embodiment of the present invention;

[0024] Figure 4 A fourth structural schematic diagram of an end effector provided in an embodiment of the present invention;

[0025] Figure 5 A fifth structural schematic diagram of an end effector provided in an embodiment of the present invention;

[0026] Figure 6 A sixth structural schematic diagram of an end effector provided in an embodiment of the present invention;

[0027] Figure 7 A partially enlarged schematic diagram of an end effector provided in an embodiment of the present invention;

[0028] Figure 8 A second partially enlarged schematic diagram of an end effector provided in an embodiment of the present invention;

[0029] Fig. 9 for Figure 6 Schematic diagram of the cross section at AA;

[0030] Fig.10 for Figure 6 Schematic diagram of the cross section at BB.

[0031] The above drawings include the following reference numerals:

[0032] 1. bearing section; 11. first extension rod; 12. second extension rod; 13. first reinforcing rod; 131. positioning hole; 14. second reinforcing rod; 15. third reinforcing rod; 16. transition section; 161. first weight-reducing hole; 17. first limiting section; 171. first conical surface; 18. second limiting section; 181. second conical surface; 19. third limiting section; 2. connecting section; 3. mounting section; 100. wafer. DETAILED DESCRIPTION

[0033] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments. The following description of at least one exemplary embodiment is actually only illustrative and is by no means intended to limit the present invention and its application or use. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0034] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.

[0035] Unless otherwise specifically stated, the relative arrangement, numerical expressions and numerical values ​​of the parts and steps set forth in these embodiments do not limit the scope of the present invention. At the same time, it should be understood that, for ease of description, the sizes of the various parts shown in the accompanying drawings are not drawn according to the actual proportional relationship. The technology, methods and equipment known to those of ordinary skill in the relevant field may not be discussed in detail, but in appropriate cases, the technology, methods and equipment should be considered as a part of the authorization specification. In all examples shown and discussed here, any specific value should be interpreted as being merely exemplary, rather than as a limitation. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters represent similar items in the following drawings, and therefore, once a certain item is defined in an accompanying drawing, it does not need to be further discussed in subsequent drawings.

[0036] The present invention provides an end effector, comprising a bearing section 1, wherein the bearing section 1 comprises a first extension rod 11, a second extension rod 12, a first reinforcement rod 13, a second reinforcement rod 14, a third reinforcement rod 15, and a transition portion 16;

[0037] Among them, the first reinforcing rod 13 is located between the first extension rod 11 and the second extension rod 12, the proximal ends of the first extension rod 11 and the second extension rod 12 are both connected to the transition portion 16, the second reinforcing rod 14 is connected between the distal end of the first extension rod 11 and the distal end of the first reinforcing rod 13, and the third reinforcing rod 15 is connected between the distal end of the second extension rod 12 and the distal end of the first reinforcing rod 13.

[0038] Combination Figures 1 to 10 As shown, the position where the manipulator is connected to the end effector is indicated by the label "manipulator". The manipulator can be connected to the end effector by means of connection such as bolt connection, clamping connection, plug-in connection, etc. The specific structure of the manipulator can be designed as required. The length direction, width direction and thickness direction are also shown in the figure. For each component, the distal end refers to the end of the component away from the manipulator, and the proximal end refers to the end of the component close to the manipulator. In this specification, the distal end and proximal end are used to describe the ends of some structures.

[0039] Combination Figure 1 and Figure 2As shown, the first extension rod 11, the first reinforcing rod 13, and the second extension rod 12 are all arranged along the length direction. In other embodiments, the specific arrangement direction of the first extension rod 11, the first reinforcing rod 13, and the second extension rod 12 may not be limited. The proximal end of the first extension rod 11, the proximal end of the second extension rod 12, and the proximal end of the first reinforcing rod 13 are all integrally connected to the transition portion 16 (it can also be welded, bolted, etc.). The figure shows a wafer 100. In the illustrated embodiment, the wafer 100 is placed on the end effector, and the end effector supports and limits the wafer 100. In other embodiments, the wafer 100 can also be supported and limited by other supporting structures (for example, pillars supported below the wafer 100) and limiting structures (for example, baffles are arranged around the wafer 100).

[0040] Combination Figure 1 As shown, the first reinforcing rod 13 is located between the first extension rod 11 and the second extension rod 12, and a positioning hole 131 is provided on the first reinforcing rod 13 to facilitate calibration of the position of the wafer 100 on the end effector. The proximal end of the first reinforcing rod 13 is connected to the transition portion 16, and the distal end of the first reinforcing rod 13 is simultaneously connected to one end of the second reinforcing rod 14 and one end of the third reinforcing rod 15, the other end of the second reinforcing rod 14 is connected to the distal end of the first extension rod 11, and the other end of the third reinforcing rod 15 is connected to the distal end of the second extension rod 12, so that the first reinforcing rod 13, the second reinforcing rod 14 and the third reinforcing rod 15 form a T-shaped structure or a Y-shaped structure as a whole.

[0041] It should be noted that, combined with Figures 1 to 6 As shown, the interval between the first reinforcing rod 13 and the first extension rod 11, and the interval between the first reinforcing rod 13 and the second extension rod 12 constitute two weight-reducing hole structures, and the shapes of the two weight-reducing hole structures can be designed as needed, for example, a rectangle (such as Figure 4 As shown), oval, oblong (as Figure 1 As shown, the two ends are semicircular arcs and the middle is a rectangular shape) or other shapes.

[0042] In the illustrated embodiment, the first reinforcing rod 13, the first extension rod 11 and the second extension rod 12 are all basically extended in the length direction. Compared with setting the first reinforcing rod 13 and / or the first extension rod 11 and / or the second extension rod 12 as an arc rod or other structures that are not basically extended only in the length direction, this arrangement method allows the end effector to have a sufficient support area, and the moment of inertia is small, so that the entire end effector is not prone to problems such as large end droop. In addition, the illustrated embodiment uses a transition portion 16 with a gradually changing width, and it can also use a transition portion 16 with a constant width, or a transition portion 16 of other shapes, which is not limited here.

[0043] The end effector of the present invention has a first reinforcing rod 13 located between the first extension rod 11 and the second extension rod 12, one end of the second reinforcing rod 14 and one end of the third reinforcing rod 15 are connected to the distal end of the first reinforcing rod 13, the other end of the second reinforcing rod 14 is connected to the distal end of the first extension rod 11, and the other end of the third reinforcing rod 15 is connected to the distal end of the second extension rod 12. The interval between the first reinforcing rod 13 and the first extension rod 11 and the interval between the first reinforcing rod 13 and the second extension rod 12 are equivalent to a weight-reducing hole structure, which reduces the overall weight of the bearing section 1, reduces the distal droop of the end effector, and avoids interference with other objects; the first reinforcing rod 13, the second reinforcing rod 14 and the third reinforcing rod 15 are used to improve the overall structural stiffness of the bearing section 1, thereby increasing the first-order mode, improving the movement stability of the robot, avoiding resonance when the robot moves, and ensuring that the wafer 100 will not slip or be scratched.

[0044] Optionally, combined Figure 1 As shown, the distal ends of the first extension rod 11 , the second extension rod 12 , and the first reinforcing rod 13 are all located on a first straight line L1 , and the first reinforcing rod 13 is disposed perpendicular to the first straight line L1 .

[0045] In one embodiment, the distal ends of the first extension rod 11, the second extension rod 12, and the first reinforcing rod 13 are all located on the first straight line L1. Figure 1 , Figure 3 and Figure 4 As shown, the second reinforcing rod 14 and the third reinforcing rod 15 both adopt a rod structure that is basically in a straight line shape, and are both parallel to the first straight line L1. Therefore, the first reinforcing rod 13 is also perpendicular to the second reinforcing rod 14 and the third reinforcing rod 15 (it should be understood that the vertical here is also basically vertical. Because, in some embodiments, the second reinforcing rod 14 and the third reinforcing rod 15 are not strictly rod structures).

[0046] In another embodiment, the second reinforcing rod 14 and the third reinforcing rod 15 may also adopt a rod structure with a non-linear shape, such as an arched rod structure formed by bending and protruding toward the distal end or the proximal end. At this time, the distal ends of the first extension rod 11, the second extension rod 12 and the first reinforcing rod 13 are still located on the first straight line L1, and the first reinforcing rod 13 is perpendicular to the first straight line L1 (not shown in the figure of this embodiment, the second reinforcing rod 14 is similar to a U-shape, and the third reinforcing rod 15 is similar to a U-shape. After the second reinforcing rod 14 and the third reinforcing rod 15 are connected, a structure similar to a W or M shape will be formed; preferably, the second reinforcing rod 14 and the third reinforcing rod 15 are both bent and protruded in a direction close to the manipulator (which can also be described as toward the proximal end) to form a W-shaped structure, so that the center of gravity of the second reinforcing rod 14 and the third reinforcing rod 15 moves toward the proximal direction, thereby reducing the distal sag of the end effector).

[0047] In this way, by arranging the distal ends of the first extension rod 11, the distal ends of the second extension rod 12 and the distal ends of the first reinforcement rod 13 on the first straight line, and arranging the first reinforcement rod 13 perpendicular to the first straight line, the first reinforcement rod 13, the second reinforcement rod 14 and the third reinforcement rod 15 can play a better structural reinforcement effect, and the structural rigidity can be effectively increased.

[0048] Optionally, the distance between the distal end of the first reinforcing rod 13 and the manipulator is smaller than the distance between the distal end of the first extension rod 11 and the manipulator, and the distance between the distal end of the first reinforcing rod 13 and the manipulator is smaller than the distance between the distal end of the second extension rod 12 and the manipulator.

[0049] Combination Figure 5 and Figure 6 As shown, compared with the distal ends of the first extension rod 11 and the second extension rod 12, the distal end of the first reinforcing rod 13 is closer to the proximal direction (i.e., the direction close to the manipulator), so that the second reinforcing rod 14 and the third reinforcing rod 15 form a V-shaped structure. The second reinforcing rod 14 and the third reinforcing rod 15 in this embodiment are not limited in their specific shapes, and can adopt a straight-line rod structure or an arched or other-shaped rod structure.

[0050] In this way, the center of gravity of the second reinforcing rod 14 and the third reinforcing rod 15 is more inclined to the proximal end (ie, the direction close to the manipulator), which can reduce the distal weight of the end effector and further reduce the sagging amount of the end effector.

[0051] Furthermore, the second reinforcing rod 14 and the third reinforcing rod 15 are both bent toward the direction of the manipulator (which can also be described as the proximal end).

[0052] Combination Figure 5 and Figure 6 As shown, compared to Figure 5 The second reinforcing rod 14 and the third reinforcing rod 15, Figure 6The second reinforcing rod 14 and the third reinforcing rod 15 in the embodiment have a certain curvature, wherein the second reinforcing rod 14 is bent toward the interval between the first reinforcing rod 13 and the first extension rod 11 and forms an arc shape, and the third reinforcing rod 15 is bent toward the interval between the first reinforcing rod 13 and the second extension rod 12 and forms an arc shape, and the second reinforcing rod 14 and the third reinforcing rod 15 together form a structure similar to a U-shape, and by forming such a U-shaped structure, the second reinforcing rod 14 and the third reinforcing rod 15 are closer to the manipulator. The U-shaped structure here is only used as an embodiment, and other structures can also be formed by bending the second reinforcing rod 14 and the third reinforcing rod 15 to different degrees, as long as the bending direction is toward the manipulator. In the basic principle that the bending direction is toward the manipulator, the closer the center of gravity of the rod (such as the second reinforcing rod 14 or the third reinforcing rod 15) is to the proximal end, the better.

[0053] In this way, the center of gravity of the second reinforcing rod 14 and the third reinforcing rod 15 can be further moved toward the proximal direction, thereby further reducing the distal weight of the end effector and reducing the sagging amount of the end effector.

[0054] Alternatively, see Figure 1 The end effector also includes a connecting section 2 and a mounting section 3, wherein the mounting section 3 is connected to the manipulator, the proximal end of the connecting section 2 is connected to the mounting section 3, and the distal end of the connecting section 2 is connected to the transition portion 16.

[0055] Combination Figures 1 to 6 As shown, the mounting section 3 can be connected to the robot arm by any means such as bolt connection, clamping, plug-in, etc., the proximal end of the connecting section 2 is connected to the mounting section 3 (it can be an integral connection, or it can be welded, bolted, etc.), and the distal end of the connecting section 2 is connected to the transition portion 16. The connecting section 2 can extend the end effector in the length direction to facilitate the placement of the wafer 100.

[0056] Furthermore, at least one of the thickness and the width of the connecting section 2 gradually increases from the distal end to the proximal end.

[0057] Combination Figure 8 As shown, when observing along the width direction, the connecting section 2 has a slope structure, one side surface of the connecting section 2 along the thickness direction is a slope, and the other side surface is parallel to the horizontal plane. Such a slope structure makes the thickness of the connecting section 2 gradually increase from the far end to the near end. In this embodiment, the slope angle θ of the connecting section 2 is 1.5°~2.5°, and its specific slope angle θ can be determined according to needs.

[0058] It can be understood that "gradually increase" does not mean that the thickness and width of the connecting section 2 must change uniformly. The connecting section 2 can also be a curved slope or a slope of other shapes (that is, the slope angle of the connecting section 2 changes nonlinearly); more preferably, the connecting section 2 can also gradually increase in width from the distal end to the proximal end, and can also gradually increase in width and thickness from the distal end to the proximal end. In this way, the stiffness of the connecting section 2 can be more effectively increased, the bending resistance of the connecting section 2 can be improved, and the distal sag of the end effector can be reduced.

[0059] Furthermore, a first weight-reducing hole 161 is formed on the transition portion 16 .

[0060] Combination Figures 1 to 6 As shown, the proximal end of the first extension rod 11, the proximal end of the second extension rod 12 and the proximal end of the first reinforcement rod 13 are all connected to the transition portion 16, and the cross sections of the three rod structures gradually intersect through the transition portion 16, so as to be connected to the connecting section 2. A first weight-reducing hole 161 is opened on the transition portion 16, and the shape of the first weight-reducing hole 161 can be designed as needed, for example, a circle (such as Figure 1 and Figure 3 As shown), triangle (as Figure 4 As shown in , three corners can be rounded to avoid stress concentration) or other shapes.

[0061] Preferably, the width of the transition portion 16 tapers smoothly from the distal end to the proximal end.

[0062] Combination Figures 1 to 6 As shown, the width of the transition portion 16 tapers smoothly from the distal end to the proximal end. Smooth means that the width of the transition portion 16 changes continuously to avoid forming sharp corners or sharp edges, thereby ensuring a smooth transition between the load-bearing section 1 and the connecting section 2.

[0063] Preferably, at least one of the thickness and the width of the first extension rod 11 gradually increases from the distal end to the proximal end.

[0064] Combination Figure 6 As shown, in this embodiment, the thickness of the first extension rod 11 remains unchanged, and the width of the first extension rod 11 gradually increases from the distal end to the proximal end.

[0065] In another embodiment, the thickness of the first extension rod 11 may gradually increase from the distal end to the proximal end, or both the thickness and the width of the first extension rod 11 may gradually increase from the distal end to the proximal end.

[0066] It is understandable that “gradually increasing” does not mean that the thickness and width of the first extension rod 11 change evenly. For example, one side of the first extension rod 11 along the width direction is a curved surface or a surface with a changing slope (ie, the width changes nonlinearly).

[0067] In this way, the center of gravity of the first extension rod 11 is more inclined toward the proximal direction (ie, the direction close to the manipulator), thereby reducing the distal droop of the end effector.

[0068] Similar to the first extension rod 11, Figure 6 As shown, at least one of the thickness and width of the second extension rod 12 gradually increases from the distal end to the proximal end. The "gradual increase" here can also be a non-uniform change, for example, one side of the second extension rod 12 along the width direction is a curved surface or a surface with a varying slope (i.e., a nonlinear width change). In a preferred embodiment, the midline of the first reinforcing rod 13 is used as a symmetry line, and the first extension rod 11 and the second extension rod 12 are symmetrical to each other, thereby ensuring a relatively balanced support force for the wafer 100.

[0069] In this way, the center of gravity of the second extension rod 12 is more inclined to the proximal direction (ie, the direction close to the manipulator), thereby reducing the distal droop of the end effector.

[0070] Further, at least one of the thickness and width of the first reinforcing rod 13 gradually increases from the distal end to the proximal end. The "gradual increase" here can also be a non-uniform change, for example, one side of the first reinforcing rod 13 along the width direction is a curved surface or a surface with a changing slope (i.e., the width changes nonlinearly).

[0071] In this way, the center of gravity of the first reinforcing rod 13 is more inclined toward the proximal direction (ie, the direction close to the manipulator), thereby reducing the distal droop of the end effector.

[0072] Furthermore, the bearing section 1 includes a first limiting portion 17, a second limiting portion 18, and a third limiting portion 19, the first limiting portion 17 is arranged on the transition portion 16, the second limiting portion 18 is arranged at the distal end of the first extension rod 11, and the third limiting portion 19 is arranged at the distal end of the second extension rod 12.

[0073] In one embodiment, the first limiting portion 17, the second limiting portion 18 and the third limiting portion 19 are used to support and limit the edge of the wafer 100, for example, the first limiting portion 17, the second limiting portion 18 and the third limiting portion 19 are baffles; in another embodiment, the first limiting portion 17, the second limiting portion 18 and the third limiting portion 19 can also be used to support and limit the lower surface of the wafer 100, for example, the first limiting portion 17, the second limiting portion 18 and the third limiting portion 19 are support columns (the schemes of the above two embodiments are not shown in the figure); in addition, the number of the first limiting portion 17, the second limiting portion 18 and the third limiting portion 19 is not limited, and various numbers of the first limiting portion 17, the second limiting portion 18 and the third limiting portion 19 can be used to support and limit the wafer 100 as needed.

[0074] In this way, the wafer 100 is supported and limited by the first limiting portion 17 , the second limiting portion 18 and the third limiting portion 19 , thereby improving the stability of the wafer 100 during transportation and reducing the risk of the wafer 100 slipping.

[0075] Furthermore, the first limiting portion 17 is provided with a first conical surface 171, the second limiting portion 18 is provided with a second conical surface 181, and the third limiting portion 19 is provided with a third conical surface, and the angle between the first conical surface 171 and the horizontal plane, the angle between the second conical surface 181 and the horizontal plane, and the angle between the third conical surface and the horizontal plane are all less than 45°.

[0076] Combination Figures 7 to 10 As shown, the first limiting portion 17 is provided with a first conical surface 171, the second limiting portion 18 is provided with a second conical surface 181, and the third limiting portion 19 is provided with a third conical surface (not marked in the figure, refer to Figure 6 As shown, the second limiting portion 18 and the third limiting portion 19 are symmetrical to each other, so the structure of the second conical surface 181 is basically the same as that of the third conical surface. Figure 6 As an example, it is not limited to that the second limiting portion 18 and the third limiting portion 19 are symmetrically arranged).

[0077] Generally speaking, the first cone surface 171, the second cone surface 181 and the third cone surface are all cone surface portions intercepted within the same height range on the same cone, so that the circumferential edge of the wafer 100 can contact the first cone surface 171, the second cone surface 181 and the third cone surface, and make the wafer 100 flush with the horizontal plane.

[0078] The angle β between the first conical surface 171 and the horizontal plane, the angle α between the second conical surface 181 and the horizontal plane, and the angle between the third conical surface and the horizontal plane are all less than 45°. The wafer 100 may expand and contract during the process. At this time, the conical slope less than 45° provides deformation space for the thermal expansion and contraction of the wafer 100, and prevents the wafer 100 from being damaged by the friction of the conical slope during thermal expansion and contraction.

[0079] The present invention also provides a manipulator, comprising the end effector. The manipulator is usually a multi-axis manipulator to improve the flexibility of movement.

[0080] The manipulator in the present invention is equipped with the end effector at the end. In the end effector, the first reinforcing rod 13 is located between the first extension rod 11 and the second extension rod 12, one end of the second reinforcing rod 14 and one end of the third reinforcing rod 15 are connected to the distal end of the first reinforcing rod 13, the other end of the second reinforcing rod 14 is connected to the distal end of the first extension rod 11, and the other end of the third reinforcing rod 15 is connected to the distal end of the second extension rod 12. The interval between the first reinforcing rod 13 and the first extension rod 11 and the interval between the first reinforcing rod 13 and the second extension rod 12 are equivalent to the weight-reducing hole structure, which reduces the overall weight of the bearing section 1, reduces the distal droop of the end effector, and avoids interference with other objects; the first reinforcing rod 13, the second reinforcing rod 14 and the third reinforcing rod 15 are used to improve the overall structural stiffness of the bearing section 1, thereby increasing the first-order mode, improving the movement stability of the manipulator, avoiding resonance when the manipulator moves, and ensuring that the wafer 100 will not slip or be scratched.

[0081] The present invention also provides a transfer chamber, including a transfer chamber wall, the transfer chamber wall enclosing a chamber, and the chamber is provided with the manipulator. The manipulator drives the end effector to move, thereby realizing the transportation process of the wafer 100 through the transfer chamber.

[0082] In the transmission chamber of the present invention, a manipulator is arranged in a cavity surrounded by the transmission cavity wall, and the manipulator is installed with the end effector at the end. In the end effector, the first reinforcing rod 13 is located between the first extension rod 11 and the second extension rod 12, one end of the second reinforcing rod 14 and one end of the third reinforcing rod 15 are connected to the distal end of the first reinforcing rod 13, the other end of the second reinforcing rod 14 is connected to the distal end of the first extension rod 11, and the other end of the third reinforcing rod 15 is connected to the distal end of the second extension rod 12. The interval between the first reinforcing rod 13 and the first extension rod 11 and the interval between the first reinforcing rod 13 and the second extension rod 12 are equivalent to the weight-reducing hole structure, which reduces the overall weight of the bearing section 1, reduces the distal droop of the end effector, and avoids interference with other objects; the first reinforcing rod 13, the second reinforcing rod 14 and the third reinforcing rod 15 improve the overall structural stiffness of the bearing section 1, thereby increasing the first-order mode, improving the movement stability of the manipulator, avoiding resonance when the manipulator moves, and ensuring that the wafer 100 will not slip or be scratched.

[0083] In the description of the present invention, it is necessary to understand that the directions or positional relationships indicated by directional words such as "front, back, up, down, left, right", "lateral, vertical, perpendicular, horizontal" and "top, bottom" are usually based on the directions or positional relationships shown in the drawings. They are only for the convenience of describing the present invention and simplifying the description. Unless otherwise specified, these directional words do not indicate or imply that the devices or elements referred to must have a specific direction or be constructed and operated in a specific direction. Therefore, they cannot be understood as limiting the scope of protection of the present invention. The directional words "inside and outside" refer to the inside and outside relative to the contours of each component itself.

[0084] For ease of description, spatially relative terms such as "above", "above", "on the upper surface of", "above", etc. may be used here to describe the spatial positional relationship between a device or feature and other devices or features as shown in the figure. It should be understood that spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation described in the figure. For example, if the device in the accompanying drawings is inverted, the device described as "above other devices or structures" or "above other devices or structures" will be positioned as "below other devices or structures" or "below other devices or structures". Thus, the exemplary term "above" can include both "above" and "below". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatially relative descriptions used here are interpreted accordingly.

[0085] In addition, it should be noted that the use of terms such as "first" and "second" to limit components is only for the convenience of distinguishing the corresponding components. If not otherwise stated, the above terms have no special meaning and therefore cannot be understood as limiting the scope of protection of the present invention.

[0086] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. An end effector for connecting to a manipulator, characterized in that: It includes a bearing section, and the bearing section includes a first extension rod, a second extension rod, a first reinforcement rod, a second reinforcement rod, a third reinforcement rod, and a transition portion; Wherein, the first reinforcing rod is located between the first extension rod and the second extension rod, the proximal ends of the first extension rod and the second extension rod are both connected to the transition portion, the second reinforcing rod is connected between the distal end of the first extension rod and the distal end of the first reinforcing rod, and the third reinforcing rod is connected between the distal end of the second extension rod and the distal end of the first reinforcing rod.

2. The end effector according to claim 1, characterized in that: The distal ends of the first extension rod, the second extension rod and the first reinforcement rod are all located on a first straight line, and the first reinforcement rod is arranged perpendicular to the first straight line.

3. The end effector according to claim 1, characterized in that: The distance between the distal end of the first reinforcing rod and the manipulator is smaller than the distance between the distal end of the first extension rod and the manipulator, and the distance between the distal end of the first reinforcing rod and the manipulator is smaller than the distance between the distal end of the second extension rod and the manipulator.

4. The end effector according to claim 3, characterized in that: The second reinforcing rod and the third reinforcing rod are both bent toward the robot arm.

5. The end effector according to claim 1, characterized in that: It also includes a connecting section and a mounting section, wherein the mounting section is connected to the manipulator, the proximal end of the connecting section is connected to the mounting section, and the distal end of the connecting section is connected to the transition portion.

6. The end effector according to claim 5, characterized in that: At least one of the thickness and the width of the connecting section gradually increases from the distal end to the proximal end.

7. The end effector according to claim 1, characterized in that: The transition portion is provided with a first weight-reducing hole.

8. The end effector according to claim 1, characterized in that: At least one of the thickness and the width of the first extension rod gradually increases from the distal end to the proximal end; and / or, at least one of the thickness and width of the second extension rod gradually increases from the distal end to the proximal end; And / or, at least one of the thickness and the width of the first reinforcing rod gradually increases from the distal end to the proximal end.

9. The end effector according to claim 1, characterized in that: The width of the transition portion tapers smoothly from the distal end to the proximal end.

10. The end effector according to claim 1, characterized in that: The bearing section includes a first limiting portion, a second limiting portion, and a third limiting portion. The first limiting portion is arranged on the transition portion, the second limiting portion is arranged at the distal end of the first extension rod, and the third limiting portion is arranged at the distal end of the second extension rod.

11. The end effector according to claim 10, characterized in that: The first limiting portion is provided with a first conical surface, the second limiting portion is provided with a second conical surface, and the third limiting portion is provided with a third conical surface. The angle between the first conical surface and the horizontal plane, the angle between the second conical surface and the horizontal plane, and the angle between the third conical surface and the horizontal plane are all less than 45°.

12. A robot, characterized in that: The end effector comprises the end effector according to any one of claims 1 to 11.

13. A transmission chamber, characterized in that: It comprises a transmission cavity wall, which encloses a cavity, and the manipulator according to claim 12 is arranged in the cavity.

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