Ceramic metallization connector

Abstract

The invention belongs to the technical field of thermal field emission, and particularly discloses a ceramic metallization connector, which comprises an insulator and a high-voltage connector conduction structure, and is characterized in that the high-voltage connector conduction structure is positioned above the insulator; the high-voltage connector conduction structure comprises a metal ring, a metal sheet, a power supply pin, a crown spring, a filament fixing seat and a metal pin, high-voltage power supply can be provided for Schottky thermal field emission through the high-voltage connector conduction structure, the Schottky thermal field emission device adapts to an ultrahigh vacuum environment, the overall size is smaller, and the voltage withstanding grade is improved.

Description

Technical Field

[0001] The invention relates to the technical field of thermal field emission, in particular to a ceramic metallized connector. Background Art

[0002] At present, Schottky thermal field emission is widely used in electron beam measurement equipment, high-end scanning electron microscopes and other fields. Metallized connectors can be used to provide voltage for Schottky thermal field emission.

[0003] In order to obtain higher electron energy in Schottky thermal field emission, the supply voltage needs to be increased, which will lead to an increase in the size of the connector. However, oversized connectors are limited in the scenarios in which they can be used. Summary of the invention

[0004] The object of the present invention is to provide a ceramic metallized connector which is adjustable in five degrees of freedom online, adaptable to ultra-high vacuum environment and has a small size.

[0005] The present invention provides the following technical solution: a ceramic metallized connector, comprising an insulator, a high-voltage connector conducting structure and an adjusting mechanism, wherein the high-voltage connector conducting structure is located above the insulator.

[0006] In one implementation of the present invention, the high-voltage connector conduction structure includes a metal ring, a metal sheet, a power supply needle, a crown spring, a filament fixing seat and a metal needle. An installation cavity is arranged above the insulator, the metal ring is sleeved on the outside of the installation cavity, the metal sheet, the power supply needle and the metal needle are all arranged at the bottom of the installation cavity, the crown spring is arranged above the power supply needle, and the filament fixing seat is arranged above the installation cavity; the metal sheet acts as a bridge to supply power to the filament, the filament fixing seat is used to place the filament, and the metal ring supplies power to the extraction electrode.

[0007] In one implementation of the present invention, the connector further includes an adjustment mechanism, the adjustment mechanism is located outside the insulator, the adjustment mechanism includes a first adjustment seat, a second adjustment seat and a bellows, the first adjustment seat, the second adjustment seat and the bellows are sequentially sleeved on the insulator from bottom to top, a protrusion is provided on the first adjustment seat, a groove matching the protrusion is provided below the second adjustment seat, a first screw hole is provided below the first adjustment seat, a second screw hole is provided on the side wall of the second adjustment seat, and an adjustment screw is connected to each of the first screw hole and the second screw hole. By providing the adjustment mechanism, the position of the filament fixing seat in the connector can be adjusted without disassembling the connector, which not only improves the adjustment accuracy of the filament, but also is suitable for the ultra-high vacuum environment required for Schottky thermal field emission.

[0008] In one implementation of the present invention, the insulator is made of ceramic material, and a flange connector is provided below the insulator. The flange connector improves the adaptability of the device in a high vacuum environment and realizes ceramic metallization. The insulator ensures that the device can withstand high voltage current. A smaller flange is selected for ceramic metallization welding; the interface size is reduced.

[0009] In an implementation of the present invention, the insulator and the flange connector, the metal needle, the power supply needle, the metal sheet, the filament fixing seat and the metal ring are welded together by using a ceramic metallization process.

[0010] In one implementation of the present invention, an elastic mechanism is provided above the crown spring, an internal thread is provided below the crown spring, the crown spring is threadedly connected to the power supply pin via the internal thread, the top of the crown spring is an elastic mechanism with a certain elasticity connected to the metal column at the bottom of the Schottky filament, the top elastic mechanism ensures the reliability of the connection with the filament, and the elastic mechanism can be a spring or other elastic components.

[0011] In one implementation of the present invention, the outer wall of the insulator is provided with a corrugated pattern, and the corrugated pattern is provided to increase the creepage distance of the parts. The diameter and length of the insulator are reduced, and the ceramic corrugated pattern is added to increase the creepage distance; the design is carried out according to the minimum size while ensuring our use scenario and verifying safety.

[0012] In one implementation of the present invention, a locking hole and a locking screw hole are respectively opened under the first adjustment seat and the second adjustment seat. The locking hole and the locking screw hole are aligned and fixed by screws. After adjusting the angles of the first adjustment seat and the second adjustment seat, they can be locked with screws.

[0013] In an implementation of the present invention, an adjustment space is reserved between the first adjustment seat and the second adjustment seat, and the adjustment space can provide an angle adjustment range for the device.

[0014] In an implementation of the present invention, the flange connector and the first adjustment seat are fastened together by screws to fix the first adjustment seat.

[0015] The present invention provides a ceramic metallized connector, which can provide high-voltage power supply for Schottky thermal field emission through a high-voltage connector conduction structure, and the connector is more miniaturized as a whole, and has a higher voltage resistance level. In addition, by deploying an adjustment mechanism in the connector, the filament in the connector can be adjusted online in five degrees of freedom, with high adjustment accuracy, without the need to disassemble the connector, and adapted to the ultra-high vacuum environment of Schottky thermal field emission. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 A schematic diagram of the overall structure of a connector provided by the present invention;

[0017] Figure 2 A partial schematic diagram of the conduction structure of the high-voltage connector provided by the present invention;

[0018] Figure 3 A schematic diagram of the structure of a ceramic component provided by the present invention;

[0019] Figure 4 A schematic diagram of the structure of the first adjustment seat provided by the present invention;

[0020] Figure 5 A schematic diagram of the structure of the second adjustment seat provided by the present invention;

[0021] Figure 6 This is a schematic cross-sectional structure diagram of the second adjustment seat provided by the present invention.

[0022] In the figure: 1. flange connector; 2. insulator; 201. wave pattern; 3. high-voltage connector conduction structure; 301. metal ring; 302. metal sheet; 303. power supply pin; 304. crown spring; 305. filament fixing seat; 306. metal pin; 4. adjustment mechanism; 401. first adjustment seat; 4011. first screw hole; 402. second adjustment seat; 4021. second screw hole; 403. bellows. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0024] In the description of the present invention, it should be noted that the terms "vertical", "up", "down", "horizontal", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0025] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0026] See also Figure 1 The present invention provides a ceramic metallized connector (hereinafter referred to as “connector”), including an insulator 2 and a high-voltage connector conductive structure 3, wherein the high-voltage connector conductive structure 3 is located above the insulator 2.

[0027] In one embodiment, see Figure 1-2 The high-voltage connector conduction structure 3 includes a metal ring 301, a metal sheet 302, a power supply needle 303, a crown spring 304, a filament fixing seat 305 and a metal needle 306. An installation cavity is arranged above the insulator 2. The metal ring 301 is sleeved on the outside of the installation cavity. The metal sheet 302, the power supply needle 303 and the metal needle 306 are all arranged at the bottom of the installation cavity. The crown spring 304 is arranged above the power supply needle 303, and the filament fixing seat 305 is arranged above the installation cavity.

[0028] The metal sheet 302 acts as a bridge to supply power to the filament, the filament fixing seat 305 is used to place the filament, and the metal ring 301 supplies power to the extraction electrode.

[0029] In one embodiment, see Figure 1 , 4 , 5, 6, the connector also includes an adjustment mechanism 4 located outside the insulator 2. The adjustment mechanism 4 includes a first adjustment seat 401, a second adjustment seat 402 and a bellows 403, which are sequentially sleeved on the insulator 2 from bottom to top, a protrusion is provided on the first adjustment seat 401, a groove matching the protrusion is provided below the second adjustment seat 402, a first screw hole 4011 is provided below the first adjustment seat 401, a second screw hole 4021 is provided on the side wall of the second adjustment seat 402, and an adjustment screw is threadedly connected in the first screw hole 4011 and the second screw hole 4021. Exemplarily, the bellows 403 is welded to the insulator 2 and the second adjustment seat 402.

[0030] For the convenience of explaining the adjustment directions of the first adjustment seat 401 and the second adjustment seat 402, Figure 1As shown, the Y-axis direction represents the horizontal direction, the Z-axis direction represents the vertical direction, the X-axis direction represents the perpendicular direction of the Y-axis direction, the Rx-axis direction represents the direction of rotation relative to the X-axis, and the Ry-axis direction represents the direction of rotation relative to the Y-axis. By adjusting the depth of the screw in the first screw hole 4011, the adjustment of the second adjustment seat 402 in different directions can be completed. For example, the adjustment in the Rx-axis direction, the Ry-axis direction and the Z-axis direction can be achieved. The adjustment of the X-axis direction and the Y-axis direction of the second adjustment seat 402 is achieved by the adjustment screw in the second screw hole 4021. By adjusting the depth of the adjustment screw in the second screw hole 4021, the screw in the second screw hole 4021 is made to abut against the raised portion of the first adjustment seat 401, so as to adjust the X-axis direction and the Y-axis direction of the second adjustment seat 402. By adjusting the Rx axis direction, the Ry axis direction, the Z axis direction, the X axis direction and the Y axis direction, the five-degree-of-freedom adjustment of the filament holder in the connector is achieved, so that the filament can achieve micron-level adjustment accuracy without destroying the ultra-high vacuum environment required for Schottky thermal field emission. It can be understood that the above adjustment process can be an adjustment during the operation of the connector, which can be called "online adjustment".

[0031] In one embodiment, see Figure 1 The insulator 2 is made of ceramic material, and a flange connector 1 is arranged below the insulator 2. For example, the blade of the flange connector 1 is made of 316L stainless steel, and the size and tolerance refer to the national standard document "GB / T 6071-2003". The flange connector 1 ensures that the connector is compatible with ultra-high vacuum environment and realizes ceramic metallization. The insulator 2 can improve the connector's ability to withstand high-voltage current. Select a smaller flange for ceramic metallization welding; reduce the interface size.

[0032] Exemplarily, the insulator 2 and the flange connector 1 , the metal needle 306 , the power supply needle 303 , the metal sheet 302 , the filament fixing seat 305 and the metal ring 301 are welded together by using a ceramic metallization process.

[0033] In one embodiment, an elastic mechanism is provided above the crown spring 304, and an internal thread is provided below the crown spring 304. The crown spring 304 is threadedly connected to the power supply needle 303 through the internal thread. The top of the crown spring 304 is an elastic mechanism with a certain elasticity connected to the metal column at the bottom of the filament. The elastic mechanism at the top ensures the reliability of the connection with the filament.

[0034] In one embodiment, see Figure 3 The outer wall of the insulator 2 is provided with a corrugation 201, and the corrugation 201 is provided on the insulator 2 to increase the creepage distance of the parts. The diameter and length of the insulator 2 are reduced, and the ceramic corrugation 201 is added to increase the creepage distance; thus, the creepage distance can be designed according to the minimum size while ensuring the use scenario and verifying safety.

[0035] In one embodiment, a locking hole and a locking screw hole are respectively opened under the first adjustment seat 401 and the second adjustment seat 402. The locking hole and the locking screw hole are aligned and fixed by screws. After adjusting the angles of the first adjustment seat 401 and the second adjustment seat 402, they can be locked with screws.

[0036] In one embodiment, an adjustment space is reserved between the first adjustment seat 401 and the second adjustment seat 402 , and the adjustment space is a five-degree-of-freedom adjustment range of the adjustment mechanism.

[0037] In one embodiment, the flange connector 1 and the first adjustment seat 401 are fastened together by screws to fix the first adjustment seat 401 .

[0038] The flange connector 1 ensures that the device is compatible with a high vacuum environment, and the insulator 2 ensures that the device can withstand high voltage current. During the processing of the insulator 2, some areas need to be processed into a wavy shape to increase the creepage distance of the parts. The top of the crown spring 304 is an elastic mechanism with a certain elasticity, which is connected to the metal column at the bottom of the filament. The elastic mechanism can ensure the reliability of the connection with the filament. The metal sheet 302 is used to connect the insulator 2 and the metal sheet 302, so as to power the filament. The filament fixing seat 305 is used to place the filament. The titanium alloy metal ring 301 is used to power the extraction electrode.

[0039] Exemplarily, the angle adjustment of the connector can be achieved by combining the first adjustment seat 401, the second adjustment seat 402 and the bellows 403. Among them, the bellows 403 has both a certain rigidity and the ability to adjust, and can ensure that the connector is in an ultra-high vacuum environment, and realize the movement of about ±1mm in the X, Y direction, about ±2mm in the Z direction, and about ±6.8mrad in the Rx, Ry direction. By adjusting the depth of the adjustment screw in the first screw hole 4011 set on the first adjustment seat 401. To complete the adjustment of the Rx, Ry and Z directions of the connector, after the adjustment is completed, the first adjustment seat 401 and the second adjustment seat 402 are fixed by using screws. By adjusting the depth of the adjustment screw in the second screw hole 4021 on the second adjustment seat 402, the angle of the second adjustment seat 402 in the X, Y direction is adjusted, and the angle of the second adjustment seat 402 after adjustment is fixed is completed by the opposite top screw.

[0040] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the technical solution principles provided by the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A ceramic metallized connector, characterized in that: It comprises an insulator (2) and a high-voltage connector conducting structure (3), wherein the high-voltage connector conducting structure (3) is located above the insulator (2); The high-voltage connector conducting structure (3) comprises a metal ring (301), a metal sheet (302), a power supply needle (303), a crown spring (304), a filament fixing seat (305) and a metal needle (306); an installation cavity is arranged above the insulator (2); the metal ring (301) is sleeved on the outside of the installation cavity; the metal sheet (302), the power supply needle (303) and the metal needle (306) are all arranged at the bottom of the installation cavity; the crown spring (304) is arranged above the power supply needle (303); and the filament fixing seat (305) is arranged above the installation cavity.

2. A ceramic metallized connector according to claim 1, characterized in that: The invention also comprises an adjusting mechanism (4), wherein the adjusting mechanism (4) is located outside the insulator (2), and comprises a first adjusting seat (401), a second adjusting seat (402) and a bellows (403); the first adjusting seat (401), the second adjusting seat (402) and the bellows (403) are sequentially sleeved on the insulator (2) from bottom to top, a protrusion is provided on the first adjusting seat (401), a groove matching the protrusion is provided below the second adjusting seat (402), a first screw hole (4011) is provided below the first adjusting seat (401), a second screw hole (4021) is provided on the side wall of the second adjusting seat (402), and adjusting screws are threadedly connected in the first screw hole (4011) and the second screw hole (4021).

3. A ceramic metallized connector according to claim 1 or 2, characterized in that: The insulator (2) is made of ceramic material, and a flange connection piece (1) is arranged below the insulator (2).

4. A ceramic metallized connector according to any one of claims 1 to 3, characterized in that: The insulator (2) is welded together with the flange connector (1), the metal needle (306), the power supply needle (303), the metal sheet (302), the filament fixing seat (305) and the metal ring (301) by using a ceramic metallization process.

5. A ceramic metallized connector according to any one of claims 1 to 3, characterized in that: The flange connection piece (1) and the first adjustment seat (401) are fastened together by screws.

6. The ceramic metallized connector according to claim 1, characterized in that: An elastic mechanism is arranged above the crown spring (304), an internal thread is provided below the crown spring (304), the crown spring (304) is threadedly connected to the power supply pin (303) via the internal thread, and the elastic mechanism is connected to the metal column at the bottom of the Schottky filament.

7. A ceramic metallized connector according to any one of claims 1 to 3, characterized in that: The outer side wall of the insulator (2) is provided with wavy patterns (201).

8. The ceramic metallized connector according to claim 2, characterized in that: A locking hole and a locking screw hole are respectively provided below the first adjustment seat (401) and the second adjustment seat (402).

9. The ceramic metallized connector according to claim 2, characterized in that: An adjustment space is reserved between the first adjustment seat (401) and the second adjustment seat (402).

Images