Heating device of vacuum evaporation machine

Abstract

The present invention proposes a heating device for a vacuum evaporation machine, including a cavity, which is surrounded by a top plate, a surrounding plate and a bottom plate. A side wall anti-fog plate is provided on the inner side of the surrounding plate, and the side wall anti-fog plate is arranged around the upper part of the cavity. A first anti-fog plate is provided under the top plate, and the outer edge of the first anti-fog plate is connected to the top of the side wall anti-fog plate. A heating device is provided on the first anti-fog plate and the side wall anti-fog plate. The heating device includes multiple first heating wires and multiple second heating wires. The first heating wires are evenly distributed on the bottom surface of the first anti-fog plate, and the second heating wires are evenly distributed on the inner wall of the side wall anti-fog plate. The positive and negative poles of the same heating wire are connected to the positive and negative poles of a group of terminal blocks. Multiple groups of terminal blocks are provided on the top of the first anti-fog plate. The first heating wire and the second heating wire are heated to a certain temperature to generate heat radiation, thereby heating the substrate, avoiding light pollution while making the heating more uniform, and not affecting the detection of the light transmittance of the substrate.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum evaporation machines, and more specifically, to a heating device for a vacuum evaporation machine. Background Art

[0002] A vacuum evaporator is a device that evaporates materials by heating in a relatively high vacuum environment, so that the evaporated materials are used to coat the surface of a wafer substrate. During coating, the substrate needs to reach a certain temperature to achieve a good coating effect.

[0003] There are still some problems in the use of vacuum coating machines currently on the market. For example, the prior art CN118374774A discloses a vacuum coating machine with uniform material distribution. Heating lamps are installed on the anti-fouling plates on the inner walls of the left and right sides of the coating cavity. The position of the heating lamps can be adjusted up and down, but the heating range of the heating lamps in this solution is prone to unevenness, and optical inspection is required during the coating process to detect the transmittance of the substrate. The use of heating lamps will cause light pollution and affect the transmittance.

[0004] Therefore, a replacement device for a heating lamp is needed that can heat evenly without generating light pollution. Summary of the Invention

[0005] In view of this, in order to solve the problem in the prior art that the heating range of the heating lamp is easily uneven, and optical inspection is required during the coating process to detect the transmittance of the substrate, and the use of the heating lamp will cause light pollution and affect the transmittance, the present invention proposes a heating device for a vacuum evaporation machine, which avoids light pollution by generating thermal radiation heating through the heating wire, and at the same time, the uniformly distributed heating wire makes the heating more uniform, and does not affect the upper optical inspection of the substrate transmittance.

[0006] A heating device for a vacuum evaporation machine includes a cavity, which is surrounded by a top plate 11, a surrounding plate 12, and a bottom plate 13. A side wall anti-fog plate 3 is provided on the inner side of the surrounding plate 12. The side wall anti-fog plate 3 is arranged around the upper part of the cavity. A first anti-fog plate 2 is provided below the top plate 11. The outer edge of the first anti-fog plate 2 is connected to the top of the side wall anti-fog plate 3. It is characterized in that: a heating device is provided on the first anti-fog plate 2 and the side wall anti-fog plate 3, and the heating device includes a plurality of first heating wires 22 and a plurality of second heating wires 31. The first heating wires 22 are evenly distributed. On the bottom surface of the first anti-fouling plate 2, the second heating wires 31 are evenly and densely distributed on the inner wall of the side wall anti-fouling plate 3. Each of the first heating wires 22 and the second heating wires 31 are continuous S-shaped with one end being positive and the other end being negative. The positive and negative poles of the same heating wire are connected to the positive and negative poles of a group of terminal blocks 5. Multiple groups of terminal blocks 5 are provided on the top of the first anti-fouling plate 2. The first heating wires 22 and the second heating wires 31 are heated to a certain temperature to generate heat radiation, thereby heating the substrate, avoiding light pollution while making the heating more uniform, and not affecting the detection of the substrate transmittance.

[0007] Furthermore, the first anti-scratch plate 2 and the side wall anti-scratch plate 3 are an integrally formed structure.

[0008] Furthermore, the multiple first heating wires 22 are evenly divided into multiple fan-shaped arrangements centered on the center of the first anti-adhesion plate 2, and the S-shape of each first heating wire 22 is an equally divided fan-shaped arrangement. A first wiring hole 23 is provided on the first anti-adhesion plate 2 near the positive pole of each first heating wire 22, and a second wiring hole 24 is provided near the negative pole of each first heating wire 22. The positive and negative poles of the first heating wire 22 pass through the first wiring hole 23 and the second wiring hole 24 to connect to the corresponding wiring terminals 5.

[0009] In some embodiments, the multiple first heating wires 22 are arranged in an S shape as a whole. Except for the first and last first heating wires 22, the starting end of each first heating wire 22 is close to but not connected to the ending end of the adjacent first heating wire 22. A first wiring hole 23 is provided near the positive pole of each first heating wire 22, and a second wiring hole 24 is provided near the negative pole of each first heating wire 22. The positive and negative poles of the first heating wire 22 pass through the first wiring hole 23 and the second wiring hole 24 to connect to the corresponding wiring terminals 5.

[0010] Furthermore, the S-shape of the multiple second heating wires 31 is a rectangle with equal width at the top and bottom. A third wiring hole 32 is provided on the side wall anti-stick plate 3 near the positive pole of the second heating wire 31, and a fourth wiring hole 33 is provided on the side wall anti-stick plate 3 near the negative pole of the second heating wire 31. The positive and negative poles of the second heating wire 31 pass through the third wiring hole 32 and the fourth wiring hole 33 to connect to the corresponding wiring terminals 5.

[0011] Furthermore, a plurality of heating wire fixing plates 34 are evenly spaced apart on the two upper and lower adjacent rows of second heating wires 31 , and the heating wire fixing plates 34 are connected to the side wall anti-fouling plate 3 by screws.

[0012] Furthermore, two to three second heating wires 31 constitute a heating area, and at least three heating areas are provided on the side wall anti-sticking plate 3 to enclose a circular heating area. The longitudinal coverage range of the circular heating area completely covers the plating pot from the top to the bottom of the plating pot, so as to make full use of the space and maximize the heating efficiency.

[0013] Furthermore, an upward folding edge 21 is provided on the edge of the first anti-scratch plate 2 to increase the rigidity of the first anti-scratch plate 2 .

[0014] Furthermore, a second anti-deposition plate 4 is provided above the first anti-deposition plate 2 to prevent the film material from reversely settling and contaminating the material during the evaporation process.

[0015] Furthermore, the top plate 11 and the second anti-fouling plate 4 are provided with at least three groups of upper and lower corresponding through holes for the connection terminals 5 to pass through. Preferably, each heating area corresponds to a group of through holes to ensure uniform heating.

[0016] Furthermore, each through hole on the top plate 11 is connected to a flange 6, a circle of pressing blocks 61 is provided above the flange 6, each pressing block 61 is connected to the positive or negative pole of a heating wire, an annular water channel is provided in the middle of the flange 6, and a first cooling pipe 7 is provided above the middle of the flange 6, and cooling water is passed through the first cooling pipe 7 to cool the terminal 5.

[0017] Furthermore, a second cooling pipe 8 is provided outside the top plate 11, and a third cooling pipe 9 is provided outside the enclosure 12, so as to quickly cool the cavity when the temperature of the cavity is too high.

[0018] Furthermore, the area of the first heating wire 22 is smaller than that of the second heating wire 31 , and the density is increased, thereby enhancing the heating efficiency and compensating for the large temperature difference at the top of the cavity caused by water cooling.

[0019] Furthermore, a middle portion of the first anti-fog plate 2 and the second anti-fog plate 4 is provided with an avoidance opening 10 for avoiding the upper optical detection structure.

[0020] Beneficial effects of the present invention: The present invention proposes a heating device for a vacuum evaporation machine, comprising a cavity, wherein the cavity is surrounded by a top plate 11, a surrounding plate 12, and a bottom plate 13; a side wall anti-fog plate 3 is provided on the inner side of the surrounding plate 12; the side wall anti-fog plate 3 is arranged around the upper part of the cavity; a first anti-fog plate 2 is provided below the top plate 11; the outer edge of the first anti-fog plate 2 is connected to the top of the side wall anti-fog plate 3; a heating device is provided on the first anti-fog plate 2 and the side wall anti-fog plate 3; the heating device comprises a plurality of first heating wires 22 and a plurality of second heating wires 31; the first heating wires 22 The first anti-fouling plate 2 is evenly and densely distributed on the bottom surface of the second heating wire 31, and the side wall anti-fouling plate 3 is evenly and densely distributed on the inner wall of the side wall anti-fouling plate 3. Each of the first heating wire 22 and the second heating wire 31 is a continuous S-shaped one end of which is positive and the other end is negative. The positive and negative poles of the same heating wire are connected to the positive and negative poles of a group of terminal blocks 5. The top of the first anti-fouling plate 2 is provided with multiple groups of terminal blocks 5. The first heating wire 22 and the second heating wire 31 are heated to a certain temperature to generate heat radiation, thereby heating the substrate, avoiding light pollution while making the heating more uniform, and not affecting the detection of the light transmittance of the substrate. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a cross-sectional view of the chamber of the vacuum evaporation machine of the present invention.

[0022] Figure 2 This is a partial disassembled structural diagram of the heating device of the vacuum evaporation machine of the present invention.

[0023] Figure 3 This is a partial exploded view of the heating device of the vacuum evaporation machine of the present invention.

[0024] Figure 4 This is an upper cross-sectional view of the heating device of the vacuum evaporation machine of the present invention.

[0025] Figure 5 This is the arrangement diagram of the first heating wire in Example 1 of the present invention.

[0026] Figure 6 This is the first heating wire arrangement diagram of Example 2 of the present invention.

[0027] Figure 7 This is an external structural diagram of the heating device of the vacuum evaporation machine of the present invention.

[0028] Description of main component symbols

[0029] Top plate 11, enclosure 12, bottom plate 13, first anti-adhesion plate 2, folded edge 21, first heating wire 22, first wiring hole 23, second wiring hole 24, side wall anti-adhesion plate 3, second heating wire 31, third wiring hole 32, fourth wiring hole 33, heating wire fixing plate 34, second anti-adhesion plate 4, wiring terminal 5, flange 6, pressing block 61, first cooling tube 7, second cooling tube 8, third cooling tube 9, avoidance opening 10.

[0030] The following specific embodiments will further illustrate the present invention in conjunction with the above-mentioned drawings. DETAILED DESCRIPTION Example 1:

[0031] A heating device for a vacuum evaporation machine includes a cavity, which is surrounded by a top plate 11, a surrounding plate 12, and a bottom plate 13. A side wall anti-fog plate 3 is provided on the inner side of the surrounding plate 12. The side wall anti-fog plate 3 is arranged around the upper part of the cavity. A first anti-fog plate 2 is provided below the top plate 11. The outer edge of the first anti-fog plate 2 is connected to the top of the side wall anti-fog plate 3. It is characterized in that: a heating device is provided on the first anti-fog plate 2 and the side wall anti-fog plate 3, and the heating device includes a plurality of first heating wires 22 and a plurality of second heating wires 31. The first heating wires 22 are evenly distributed. On the bottom surface of the first anti-fouling plate 2, the second heating wires 31 are evenly and densely distributed on the inner wall of the side wall anti-fouling plate 3. Each of the first heating wires 22 and the second heating wires 31 are continuous S-shaped with one end being positive and the other end being negative. The positive and negative poles of the same heating wire are connected to the positive and negative poles of a group of terminal blocks 5. Multiple groups of terminal blocks 5 are provided on the top of the first anti-fouling plate 2. The first heating wires 22 and the second heating wires 31 are heated to a certain temperature to generate heat radiation, thereby heating the substrate, avoiding light pollution while making the heating more uniform, and not affecting the detection of the substrate transmittance.

[0032] The first anti-slip plate 2 and the side wall anti-slip plate 3 are an integrally formed structure.

[0033] The multiple first heating wires 22 are evenly divided into a plurality of fan-shaped arrangements centered on the center of the first anti-adhesion plate 2. The S-shape of each first heating wire 22 is an equally divided fan-shaped arrangement. The area of the first heating wire 22 is smaller than that of the second heating wire 31, and the density is enhanced to compensate for the large temperature difference at the top of the cavity. A first wiring hole 23 is provided on the first anti-adhesion plate 2 near the positive pole of each first heating wire 22, and a second wiring hole 24 is provided near the negative pole of each first heating wire 22. The positive and negative poles of the first heating wire 22 pass through the first wiring hole 23 and the second wiring hole 24 to connect to the corresponding wiring terminals 5.

[0034] The S-shape of the multiple second heating wires 31 is a rectangle with equal width at the top and bottom. A third wiring hole 32 is provided on the side wall anti-stick plate 3 near the positive pole of the second heating wire 31, and a fourth wiring hole 33 is provided on the side wall anti-stick plate 3 near the negative pole of the second heating wire 31. The positive and negative poles of the second heating wire 31 pass through the third wiring hole 32 and the fourth wiring hole 33 to connect to the corresponding wiring terminals 5.

[0035] A plurality of heating wire fixing pieces 34 are evenly spaced apart on the two upper and lower adjacent rows of second heating wires 31 , and the heating wire fixing pieces 34 are connected to the side wall anti-fouling plate 3 by screws.

[0036] Two to three second heating wires 31 constitute a heating area, and at least three heating areas are provided on the side wall anti-sticking plate 3 to enclose a circular heating area. The longitudinal coverage range of the circular heating area completely covers the plating pot from the top to the bottom of the plating pot, so as to make full use of the space and maximize the heating efficiency.

[0037] An upward fold 21 is provided on the edge of the first anti-slip plate 2 to increase the rigidity of the first anti-slip plate 2 .

[0038] A second anti-deposition plate 4 is provided above the first anti-deposition plate 2 to prevent the film material from reversely settling and contaminating the material during the evaporation process.

[0039] The top plate 11 and the second anti-fouling plate 4 are provided with at least two groups of upper and lower corresponding through holes for the connection terminals 5 to pass through. Preferably, each heating area corresponds to a group of through holes to ensure uniform heating.

[0040] Each through hole on the top plate 11 is connected to a flange 6, and a circle of pressing blocks 61 is arranged above the flange 6. Each pressing block 61 is connected to the positive or negative pole of a heating wire. An annular water channel is provided in the middle of the flange 6, and a first cooling pipe 7 is provided above the middle of the flange 6. Cooling water is passed through the first cooling pipe 7 to cool the terminal 5.

[0041] A second cooling pipe 8 is provided outside the top plate 11 , and a third cooling pipe 9 is provided outside the enclosure 12 , for quickly cooling the cavity when the cavity temperature is too high.

[0042] The area of the first heating wire 22 is smaller than that of the second heating wire 31 , and the density is increased, thereby enhancing the heating efficiency and compensating for the large temperature difference at the top of the cavity caused by water cooling.

[0043] The first anti-fog plate 2 and the second anti-fog plate 4 are provided with avoidance openings 10 in the middle thereof for avoiding the upper optical detection structure.

[0044] Beneficial effects of the present invention: The present invention proposes a heating device for a vacuum evaporation machine, comprising a cavity, wherein the cavity is surrounded by a top plate 11, a surrounding plate 12, and a bottom plate 13; a side wall anti-fog plate 3 is provided on the inner side of the surrounding plate 12; the side wall anti-fog plate 3 is arranged around the upper part of the cavity; a first anti-fog plate 2 is provided below the top plate 11; the outer edge of the first anti-fog plate 2 is connected to the top of the side wall anti-fog plate 3; a heating device is provided on the first anti-fog plate 2 and the side wall anti-fog plate 3; the heating device comprises a plurality of first heating wires 22 and a plurality of second heating wires 31; the first heating wires 22 The first anti-fouling plate 2 is evenly and densely distributed on the bottom surface of the second heating wire 31, and the side wall anti-fouling plate 3 is evenly and densely distributed on the inner wall of the side wall anti-fouling plate 3. Each of the first heating wire 22 and the second heating wire 31 is a continuous S-shaped one end of which is positive and the other end is negative. The positive and negative poles of the same heating wire are connected to the positive and negative poles of a group of terminal blocks 5. The top of the first anti-fouling plate 2 is provided with multiple groups of terminal blocks 5. The first heating wire 22 and the second heating wire 31 are heated to a certain temperature to generate heat radiation, thereby heating the substrate, avoiding light pollution while making the heating more uniform, and not affecting the detection of the light transmittance of the substrate. Example 2:

[0045] A heating device for a vacuum evaporation machine includes a cavity, which is surrounded by a top plate 11, a surrounding plate 12, and a bottom plate 13. A side wall anti-fog plate 3 is provided on the inner side of the surrounding plate 12. The side wall anti-fog plate 3 is arranged around the upper part of the cavity. A first anti-fog plate 2 is provided below the top plate 11. The outer edge of the first anti-fog plate 2 is connected to the top of the side wall anti-fog plate 3. It is characterized in that: a heating device is provided on the first anti-fog plate 2 and the side wall anti-fog plate 3, and the heating device includes a plurality of first heating wires 22 and a plurality of second heating wires 31. The first heating wires 22 are evenly distributed. On the bottom surface of the first anti-fouling plate 2, the second heating wires 31 are evenly and densely distributed on the inner wall of the side wall anti-fouling plate 3. Each of the first heating wires 22 and the second heating wires 31 are continuous S-shaped with one end being positive and the other end being negative. The positive and negative poles of the same heating wire are connected to the positive and negative poles of a group of terminal blocks 5. Multiple groups of terminal blocks 5 are provided on the top of the first anti-fouling plate 2. The first heating wires 22 and the second heating wires 31 are heated to a certain temperature to generate heat radiation, thereby heating the substrate, avoiding light pollution while making the heating more uniform, and not affecting the detection of the substrate transmittance.

[0046] The first anti-slip plate 2 and the side wall anti-slip plate 3 are an integrally formed structure.

[0047] The multiple first heating wires 22 are arranged in an S shape as a whole. Except for the first and last first heating wires 22, the starting end of each first heating wire 22 is close to but not connected to the ending end of the adjacent first heating wire 22. A first wiring hole 23 is provided near the positive pole of each first heating wire 22, and a second wiring hole 24 is provided near the negative pole of each first heating wire 22. The positive and negative poles of the first heating wires 22 pass through the first wiring hole 23 and the second wiring hole 24 to connect to the corresponding wiring terminals 5.

[0048] The S-shape of the multiple second heating wires 31 is a rectangle with equal width at the top and bottom. A third wiring hole 32 is provided on the side wall anti-stick plate 3 near the positive pole of the second heating wire 31, and a fourth wiring hole 33 is provided on the side wall anti-stick plate 3 near the negative pole of the second heating wire 31. The positive and negative poles of the second heating wire 31 pass through the third wiring hole 32 and the fourth wiring hole 33 to connect to the corresponding wiring terminals 5.

[0049] A plurality of heating wire fixing pieces 34 are evenly spaced apart on the two upper and lower adjacent rows of second heating wires 31 , and the heating wire fixing pieces 34 are connected to the side wall anti-fouling plate 3 by screws.

[0050] Two to three second heating wires 31 constitute a heating area, and at least three heating areas are provided on the side wall anti-sticking plate 3 to enclose a circular heating area. The longitudinal coverage range of the circular heating area completely covers the plating pot from the top to the bottom of the plating pot, so as to make full use of the space and maximize the heating efficiency.

[0051] An upward fold 21 is provided on the edge of the first anti-slip plate 2 to increase the rigidity of the first anti-slip plate 2 .

[0052] A second anti-deposition plate 4 is provided above the first anti-deposition plate 2 to prevent the film material from reversely settling and contaminating the material during the evaporation process.

[0053] The top plate 11 and the second anti-fouling plate 4 are provided with at least two groups of upper and lower corresponding through holes for the connection terminals 5 to pass through. Preferably, each heating area corresponds to a group of through holes to ensure uniform heating.

[0054] Each through hole on the top plate 11 is connected to a flange 6, and a circle of pressing blocks 61 is arranged above the flange 6. Each pressing block 61 is connected to the positive or negative pole of a heating wire. An annular water channel is provided in the middle of the flange 6, and a first cooling pipe 7 is provided above the middle of the flange 6. Cooling water is passed through the first cooling pipe 7 to cool the terminal 5.

[0055] A second cooling pipe 8 is provided outside the top plate 11 , and a third cooling pipe 9 is provided outside the enclosure 12 , for quickly cooling the cavity when the cavity temperature is too high.

[0056] The area of the first heating wire 22 is smaller than that of the second heating wire 31 , and the density is increased, thereby enhancing the heating efficiency and compensating for the large temperature difference at the top of the cavity caused by water cooling.

[0057] The first anti-fog plate 2 and the second anti-fog plate 4 are provided with avoidance openings 10 in the middle thereof for avoiding the upper optical detection structure.

[0058] Beneficial effects of the present invention: The present invention proposes a heating device for a vacuum evaporation machine, comprising a cavity, wherein the cavity is surrounded by a top plate 11, a surrounding plate 12, and a bottom plate 13; a side wall anti-fog plate 3 is provided on the inner side of the surrounding plate 12; the side wall anti-fog plate 3 is arranged around the upper part of the cavity; a first anti-fog plate 2 is provided below the top plate 11; the outer edge of the first anti-fog plate 2 is connected to the top of the side wall anti-fog plate 3; a heating device is provided on the first anti-fog plate 2 and the side wall anti-fog plate 3; the heating device comprises a plurality of first heating wires 22 and a plurality of second heating wires 31; the first heating wires 22 The first anti-fouling plate 2 is evenly and densely distributed on the bottom surface of the second heating wire 31, and the side wall anti-fouling plate 3 is evenly and densely distributed on the inner wall of the side wall anti-fouling plate 3. Each of the first heating wire 22 and the second heating wire 31 is a continuous S-shaped one end of which is positive and the other end is negative. The positive and negative poles of the same heating wire are connected to the positive and negative poles of a group of terminal blocks 5. The top of the first anti-fouling plate 2 is provided with multiple groups of terminal blocks 5. The first heating wire 22 and the second heating wire 31 are heated to a certain temperature to generate heat radiation, thereby heating the substrate, avoiding light pollution while making the heating more uniform, and not affecting the detection of the light transmittance of the substrate.

[0059] The above-described embodiments merely illustrate several implementations of the present invention, and while their descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the present invention. It should be noted that a person skilled in the art would be able to make numerous variations and improvements without departing from the spirit of the present invention, all of which fall within the scope of protection of the present invention. Therefore, the scope of protection of the present invention shall be determined by the appended claims.

Claims

1. A heating device for a vacuum evaporation machine, comprising a cavity, wherein the cavity is surrounded by a top plate (11), a surrounding plate (12), and a bottom plate (13), wherein a side wall anti-fog plate (3) is provided on the inner side of the surrounding plate (12), wherein the side wall anti-fog plate (3) is arranged around the upper part of the cavity, and a first anti-fog plate (2) is provided below the top plate (11), wherein the outer edge of the first anti-fog plate (2) is connected to the top of the side wall anti-fog plate (3), and wherein: The first anti-adhesion plate (2) and the side wall anti-adhesion plate (3) are provided with a heating device, and the heating device includes a plurality of first heating wires (22) and a plurality of second heating wires (31). The first heating wires (22) are evenly and densely distributed on the bottom surface of the first anti-adhesion plate (2), and the second heating wires (31) are evenly and densely distributed on the inner wall of the side wall anti-adhesion plate (3). Each of the first heating wires (22) and the second heating wires (31) is a continuous S-shaped one end being positive and the other end being negative. The positive and negative poles of the same heating wire are connected to the positive and negative poles of a group of wiring terminals (5). The top of the first anti-adhesion plate (2) is provided with a plurality of wiring terminals (5). The wire (22) and the second heating wire (31) are heated to a certain temperature to generate heat radiation to heat the substrate, thereby avoiding light pollution and making the heating more uniform without affecting the detection of the substrate transmittance. The plurality of the first heating wires (22) are evenly divided into a plurality of fan-shaped arrangements centered on the center of the first anti-sticking plate (2). The S-shape of each first heating wire (22) is an equally divided fan-shaped arrangement. The area of the first heating wire (22) is smaller than that of the second heating wire (31), and the density is enhanced to compensate for the large temperature difference at the top of the cavity. A first wiring hole (23) is provided on the first anti-sticking plate (2) near the positive pole of each first heating wire (22). A first wiring hole (23) is provided near each first heating wire (22). A second wiring hole (24) is provided at the negative pole of a heating wire (22), and the positive and negative poles of the first heating wire (22) pass through the first wiring hole (23) and the second wiring hole (24) to connect to the corresponding wiring terminals (5), and the S-shaped structure of the plurality of second heating wires (31) is a rectangle with equal width at the top and bottom, and a third wiring hole (32) is provided at the side wall anti-sticking plate (3) near the positive pole of the second heating wire (31), and a fourth wiring hole (33) is provided at the side wall anti-sticking plate (3) near the negative pole of the second heating wire (31), and the positive and negative poles of the second heating wire (31) pass through the third wiring hole (32) and the fourth wiring hole (33) to connect to the corresponding wiring terminals ( 5), a plurality of heating wire fixing plates (34) are evenly spaced on the two adjacent rows of second heating wires (31), the heating wire fixing plates (34) are connected to the side wall anti-adhesion plate (3) by screws, a second anti-adhesion plate (4) is provided above the first anti-adhesion plate (2), each through hole on the top plate (11) is connected to a flange (6), a circle of pressing blocks (61) is provided above the flange (6), each pressing block (61) is connected to the positive or negative pole of a heating wire, an annular water channel is provided in the middle of the flange (6), a first cooling pipe (7) is provided above the middle of the flange (6), and cooling water is passed through the first cooling pipe (7) to cool the terminal (5).

2. The heating device of the vacuum evaporation machine according to claim 1, characterized in that: An edge of the first anti-slip plate (2) is provided with an upward folded edge (21).

3. The heating device of the vacuum evaporation machine according to claim 1, wherein: A second cooling pipe (8) is provided on the outside of the top plate (11), and a third cooling pipe (9) is provided on the outside of the enclosure plate (12), for quickly cooling the cavity when the temperature of the cavity is too high.

4. A heating device for a vacuum evaporation machine, comprising a cavity, wherein the cavity is surrounded by a top plate (11), a surrounding plate (12), and a bottom plate (13); a side wall anti-fog plate (3) is provided on the inner side of the surrounding plate (12); the side wall anti-fog plate (3) is arranged around the upper part of the cavity; a first anti-fog plate (2) is provided below the top plate (11); the outer edge of the first anti-fog plate (2) is connected to the top of the side wall anti-fog plate (3); and the device is characterized in that: The first anti-adhesion plate (2) and the side wall anti-adhesion plate (3) are provided with a heating device, and the heating device includes a plurality of first heating wires (22) and a plurality of second heating wires (31). The first heating wires (22) are evenly and densely distributed on the bottom surface of the first anti-adhesion plate (2), and the second heating wires (31) are evenly and densely distributed on the inner wall of the side wall anti-adhesion plate (3). Each of the first heating wires (22) and the second heating wires (31) is a continuous S-shaped one end being positive and the other end being negative. The positive and negative poles of the same heating wire are connected to the positive and negative poles of a group of wiring terminals (5). The top of the first anti-adhesion plate (2) is provided with a plurality of wiring terminals (5). The heating wire (22) and the second heating wire (31) are heated to a certain temperature to generate heat radiation to heat the substrate, thereby avoiding light pollution and making the heating more uniform, and not affecting the detection of the substrate transmittance. The plurality of first heating wires (22) are arranged in an S shape as a whole. Except for the first and last first heating wires (22), the starting end of each first heating wire (22) is close to but not connected to the ending end of the adjacent first heating wire (22). A first wiring hole (23) is provided near the positive pole of each first heating wire (22), and a second wiring hole (24) is provided near the negative pole of each first heating wire (22). The positive pole and The negative electrode passes through the first wiring hole (23) and the second wiring hole (24) to connect to the corresponding wiring terminal (5); the area of the first heating wire (22) is smaller than that of the second heating wire (31), and the density is enhanced; the S-shaped structure of the plurality of second heating wires (31) is a rectangle with equal widths at the top and bottom; a third wiring hole (32) is provided on the side wall anti-attachment plate (3) near the positive electrode of the second heating wire (31); a fourth wiring hole (33) is provided on the side wall anti-attachment plate (3) near the negative electrode of the second heating wire (31); the positive and negative electrodes of the second heating wire (31) pass through the third wiring hole (32) and the fourth wiring hole (33) to connect to the corresponding wiring terminal (5 ), a plurality of heating wire fixing plates (34) are evenly spaced on the two adjacent rows of second heating wires (31), the heating wire fixing plates (34) are connected to the side wall anti-adhesion plate (3) by screws, a second anti-adhesion plate (4) is provided above the first anti-adhesion plate (2), each through hole on the top plate (11) is connected to a flange (6), a circle of pressing blocks (61) is provided above the flange (6), each pressing block (61) is connected to the positive or negative pole of a heating wire, an annular water channel is provided in the middle of the flange (6), a first cooling pipe (7) is provided above the middle of the flange (6), and cooling water is passed through the first cooling pipe (7) to cool the terminal (5).

5. The heating device of the vacuum evaporation machine according to claim 4, characterized in that: An edge of the first anti-slip plate (2) is provided with an upward folded edge (21).

6. The heating device of the vacuum evaporation machine according to claim 4, characterized in that: A second cooling pipe (8) is provided on the outside of the top plate (11), and a third cooling pipe (9) is provided on the outside of the enclosure plate (12), for quickly cooling the cavity when the temperature of the cavity is too high.

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