Method for extracting contour of graph in scanning electron microscope image and related product

Abstract

The invention provides a contour extraction method for a graph in a scanning electron microscope image and a related product. The method comprises the following steps: acquiring a scanning electron microscope image of a to-be-extracted contour and a design layout corresponding to the scanning electron microscope image; carrying out contour extraction on a graph in the scanning electron microscope image to obtain an initial graph contour; according to the initial graph contour, a design graph on the design layout is zoomed out or zoomed in, and a zoomed design graph is obtained; and performing contour extraction on a graph in the scanning electron microscope image by using the scaled design graph to obtain a target graph contour. After the design graph is scaled according to the proportion, the size of the design graph is quite close to the size of the actual graph. On the basis, contour extraction of the scanning electron microscope image is carried out, the success rate and the precision of graph contour extraction can be improved, and wrong contour extraction caused by image noise and signal intensity is avoided.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to a method for extracting contours of graphics in a scanning electron microscope image and related products. Background Art

[0002] In the manufacturing process of integrated circuit chips, a large number of images are scanned and generated, and the manufacturing process quality is judged and evaluated by processing and analyzing the images. Graphic contour extraction of various images is widely used in defect detection and key dimension measurement in integrated circuit manufacturing.

[0003] The difficulty of using the image contour extraction technology is the success rate of the contour extraction. The success rate of contour extraction includes the completeness and correctness of contour extraction. Only when the necessary contour of the image is completely and accurately extracted, the subsequent defect analysis and measurement based on the contour of the image can have correct results and provide correct process control feedback.

[0004] In the existing integrated circuit manufacturing process, the outline of the graphics in the image is extracted from the image. The general process is as follows: Figure 1 As shown, it specifically includes: step S510, obtaining the image that needs to be contour extracted, where the image is generally obtained by a scanning electron microscope, also known as a scanning electron microscope image or SEM (Scanning Electron Microscope) image. Step S520, processing the image (binarization, etc.). Step S530, filtering the processed image according to a threshold value to obtain image contour edge points. Step S540, connecting the contour edge points respectively to obtain the extracted image contour edge. Since the image graphic contour extraction technology only extracts contours based on image information, this type of contour extraction technology is highly dependent on image quality. Image noise and signal strength will greatly affect the integrity and accuracy of the extracted graphic contour. Therefore, when high-precision contour extraction is required, this type of graphic contour extraction technology based only on images is not applicable. Summary of the invention

[0005] In view of the above problems, the present invention is proposed to provide a method for extracting contours of graphics in scanning electron microscope images that overcomes the above problems or at least partially solves the above problems, which can improve the success rate and extraction accuracy of graphic contour extraction.

[0006] In particular, the present invention provides a method for extracting contours of a figure in a scanning electron microscope image, comprising: obtaining a scanning electron microscope image of the contour to be extracted and a design layout corresponding to the scanning electron microscope image;

[0007] Extracting the contour of the figure in the scanning electron microscope image to obtain an initial figure contour;

[0008] Reduce or enlarge the design graphic on the design layout according to the initial graphic outline to obtain a scaled design graphic;

[0009] The scaled design pattern is used to extract the contour of the pattern in the scanning electron microscope image to obtain the contour of the target pattern.

[0010] Optionally, the step of reducing or enlarging the design graphic on the design layout according to the initial graphic outline includes:

[0011] Obtaining the size of a preset part on the design graphic to obtain the layout size;

[0012] Obtaining the size of a portion on the initial graphic outline corresponding to the preset portion to obtain an outline size;

[0013] The design graphic is reduced or enlarged according to the layout size and the outline size to obtain the scaled design graphic; the scaled design graphic is located outside the corresponding graphic in the scanning electron microscope image.

[0014] Optionally, the step of reducing or enlarging the design graphic according to the layout size and the outline size includes:

[0015] Calculating a ratio between the outline size and the layout size;

[0016] determining a scaling ratio according to the ratio;

[0017] The design graphic is reduced or enlarged according to the scaling ratio.

[0018] Optionally, determining the scaling ratio according to the ratio includes: calculating the product value of a preset coefficient and the ratio to obtain the scaling ratio; the preset coefficient is 1 to 1.1.

[0019] Optionally, the step of extracting the contour of the scanning electron microscope image using the scaled design graphic comprises:

[0020] aligning and superimposing the scaled design pattern with a corresponding pattern in the scanning electron microscope image;

[0021] Placing a plurality of breakpoints on the scaled design graphic;

[0022] Searching for corresponding contour edge points on corresponding graphics in the scanning electron microscope image according to each of the breakpoints;

[0023] Connecting a plurality of the contour edge points in sequence to form the target graphic contour.

[0024] Optionally, the contour of the scanning electron microscope image is extracted using the original design graphic on the design layout to obtain an initial graphic contour.

[0025] Optionally, before the step of determining the scaling ratio according to the ratio, the method further comprises:

[0026] Determining whether the ratio is less than a ratio threshold;

[0027] If yes, proceed to the step of determining the scaling ratio according to the ratio;

[0028] If not, the initial graphic outline is determined to be the target graphic outline.

[0029] According to another aspect of the present invention, there is also provided a computer-readable storage medium having a computer program stored thereon, which implements the steps of any of the above-mentioned methods for extracting contours of graphics in scanning electron microscope images when the computer program is executed by a processor.

[0030] According to another aspect of the present invention, a computer program product is provided, which includes a computer program, and when the computer program is executed by a processor, the steps of any of the above-mentioned methods for extracting contours of graphics in a scanning electron microscope image are implemented.

[0031] According to another aspect of the present invention, a computer device is provided, which includes a memory, a processor and a computer program stored in the memory, and the processor executes the computer program to implement the steps of any of the above-mentioned methods for extracting contours of graphics in scanning electron microscope images.

[0032] The method for extracting the contour of a graphic in a scanning electron microscope image of the present invention and the related products first perform initial graphic contour extraction on the scanning electron microscope image, scale the design graphic on the design layout based on the obtained initial graphic contour, and perform a second contour extraction on the scanning electron microscope image using the scaled design graphic to obtain the target graphic contour. After the design graphic is scaled proportionally, the size of the design graphic is quite close to the actual graphic size. On this basis, the contour extraction of the scanning electron microscope image is performed, and the success rate and extraction accuracy of the graphic contour extraction can be improved, avoiding the contour erroneous extraction caused by image noise and signal strength.

[0033] Based on the following detailed description of specific embodiments of the present invention in conjunction with the accompanying drawings, those skilled in the art will become more aware of the above and other objects, advantages and features of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Hereinafter, some specific embodiments of the present invention will be described in detail in an exemplary and non-limiting manner with reference to the accompanying drawings. The same reference numerals in the accompanying drawings indicate the same or similar components or parts. It should be understood by those skilled in the art that these drawings are not necessarily drawn to scale. In the accompanying drawings:

[0035] Figure 1 It is a schematic diagram of the process of extracting the contour of a graphic in an image in the prior art;

[0036] Figure 2 is a schematic flow chart of a method for extracting contours of a graphic in a scanning electron microscope image according to an embodiment of the present invention;

[0037] Figure 3 is a schematic flow chart of a method for extracting contours of a graphic in a scanning electron microscope image according to an embodiment of the present invention;

[0038] Figure 4 is a schematic flow chart of a method for extracting contours of graphics in a scanning electron microscope image according to an embodiment of the present invention;

[0039] Figure 5 is a schematic flow chart of a method for extracting contours of a graphic in a scanning electron microscope image according to an embodiment of the present invention;

[0040] Figure 6 is a schematic flow chart of a method for extracting contours of a graphic in a scanning electron microscope image according to an embodiment of the present invention;

[0041] Figure 7 is a schematic diagram of extracting an initial graphic contour in a method for extracting a graphic contour in a scanning electron microscope image according to an embodiment of the present invention;

[0042] Figure 8 is a schematic diagram of extracting an initial graphic contour in a method for extracting a graphic contour in a scanning electron microscope image according to an embodiment of the present invention;

[0043] Fig. 9 is a schematic diagram of an initial graphic contour extracted according to a method for extracting a contour of a graphic in a scanning electron microscope image according to an embodiment of the present invention;

[0044] Fig.10 is a schematic diagram of measuring the layout size and the outline size in a method for extracting the outline of a graphic in a scanning electron microscope image according to an embodiment of the present invention;

[0045] Fig.11 It is a schematic diagram of the correspondence between the reduced design graphic, the original design graphic and the actual graphic contour according to a method for extracting the contour of a graphic in a scanning electron microscope image according to an embodiment of the present invention;

[0046] Fig.12 is a schematic diagram of a computer program product according to an embodiment of the present invention;

[0047] Fig.13 is a schematic diagram of a computer-readable storage medium according to an embodiment of the present invention; and

[0048] Fig.14 is a schematic diagram of a computer device according to an embodiment of the present invention. DETAILED DESCRIPTION

[0049] This embodiment provides a method for extracting the contour of a graphic in a scanning electron microscope image. Figure 2 FIG. 1 is a flow chart of a method for extracting contours of a graphic in a scanning electron microscope image according to an embodiment of the present invention. The method may generally include:

[0050] Step S100, obtaining a scanning electron microscope image of the contour to be extracted and a design layout corresponding to the scanning electron microscope image.

[0051] Step S200, extracting the contour of the figure in the scanning electron microscope image to obtain the initial figure contour.

[0052] Step S300, reducing or enlarging the design graphic on the design layout according to the initial graphic outline to obtain a scaled design graphic.

[0053] Step S400, using the scaled design pattern to extract the contour of the pattern in the scanning electron microscope image to obtain the contour of the target pattern.

[0054] In an embodiment of the present invention, an initial graphic contour extraction is first performed on a scanning electron microscope image, and the design graphic on the design layout is scaled based on the obtained initial graphic contour. The scaled design graphic is used to perform a second contour extraction on the scanning electron microscope image to obtain the target graphic contour. After the design graphic is scaled proportionally, the size of the design graphic is quite close to the actual graphic size. On this basis, the contour extraction of the scanning electron microscope image is performed, and the success rate and extraction accuracy of the graphic contour extraction can be improved, avoiding the contour erroneous extraction caused by image noise and signal strength.

[0055] In some embodiments of the present invention, reference Figure 5, step S200, performing contour extraction on the scanning electron microscope image to obtain the initial graphic contour is specifically as follows: using the design graphic on the original design layout to perform contour extraction on the scanning electron microscope image to obtain the initial graphic contour. Specifically, the step of performing contour extraction on the scanning electron microscope image includes: aligning and superimposing the original design graphic with the corresponding area on the scanning electron microscope image. Placing multiple breakpoints on the original design graphic. Searching for corresponding contour edge points on the scanning electron microscope image according to each breakpoint. Connecting multiple contour edge points in sequence to form the initial graphic contour. Specifically, the breakpoints placed on the design graphic are used as starting points for searching the image contour edge, and according to the preset search direction, the corresponding contour edge points are searched and obtained from each starting point.

[0056] For the extraction of the initial graphic outline, in this embodiment, breakpoints are placed on the original design graphic 710 as starting points for finding the edge of the graphic outline, such as Figure 7 As shown in FIG. 1 , when the design figure is not much different from the actual figure contour 702, each starting point can successfully find the corresponding contour edge point, and then connect the lines to form the correct figure contour extraction result. However, when the actual figure contour 702 is significantly different from the design figure, such as Figure 8 As shown, since the placement of the breakpoints 701 of the design graphic and the search direction of the actual graphic outline 702 remain unchanged, the actual outline points found from the breakpoints 701 of the design graphic may be wrong. Fig. 9 As shown, the erroneous actual contour points are then connected, and the contour extraction result 703 formed will be erroneous, which will affect the application range of the corresponding contour extraction result. In order to ensure the correctness and success rate of contour extraction, it is not enough to extract the contour of the graphic in this way, so step S300 is required to reduce or enlarge the design graphic on the design layout according to the initial graphic contour to obtain the scaled design graphic 720; and step S400 is used to extract the contour of the scanning electron microscope image using the scaled design graphic 720 to obtain the target graphic contour, that is, to extract the graphic contour again.

[0057] In some other embodiments of the present invention, other methods may be used to obtain the initial graphic outline. The initial graphic outline is used to determine the scaling ratio of the design layout, so the source of the initial graphic outline may not be specifically limited, and the outline extracted by the method described in the background technology may also be used as the initial graphic outline.

[0058] In some embodiments of the present invention, Figure 3 As shown, the above-mentioned step of reducing or enlarging the design graphic on the design layout according to the initial graphic outline includes:

[0059] Step S310, obtaining the size of a preset part on the original design graphic 710 to obtain the layout size.

[0060] Step S320, obtaining the size of the part on the initial graphic outline corresponding to the preset part to obtain the outline size.

[0061] Step S330, reducing or enlarging the original design graphic 710 according to the layout size and the outline size to obtain a scaled design graphic 720; the scaled design graphic 720 is located outside the corresponding graphic in the scanning electron microscope image.

[0062] In some embodiments of the present invention, Fig.10 As shown, before the step of obtaining the size of the preset part on the design graphic, it also includes: calling the CD Detector measurement program to obtain the layout size 705 and the outline size 706 using the steps specified by the CD Detector measurement program. Specifically, obtaining the layout size 705 and the outline size 706 using the steps specified by the CD Detector measurement program includes: determining the preset part, which can also be called the CD Detector position; detecting the size of the design graphic within the range of the CD Detector to obtain the layout size 705, and detecting the size of the initial graphic outline within the range of the CD Detector to obtain the outline size 706.

[0063] In some embodiments of the present invention, Figure 4 As shown, the steps of reducing or enlarging the design graphic according to the layout size 705 and the outline size 706 include:

[0064] Step S331 , calculating the ratio between the outline size 706 and the layout size 705 .

[0065] Step S332, determining the scaling ratio according to the ratio.

[0066] Step S333, reducing or enlarging the design graphic according to the scaling ratio.

[0067] Calculate the ratio R between the outline size 706 and the layout size 705, such as Fig.11 As shown, the design graphic is reduced or enlarged according to the R value. For example, in most cases, the R value is less than 1. When the R value is less than 1, the design graphic is reduced. In some cases, the R value can also be greater than 1, and the design graphic is correspondingly enlarged.

[0068] Further, in order to ensure that the scaled design graphic 720 is outside the corresponding area on the scanning electron microscope image, in some embodiments of the present invention, step S332, determining the scaling ratio according to the ratio includes: calculating the product value of the preset coefficient and the ratio to obtain the scaling ratio. The preset coefficient is 1 to 1.1. That is, the scaling ratio is the ratio R multiplied by a preset coefficient, and the preset coefficient is 1 to 1.1, so that the final scaling ratio is slightly larger than the ratio R.

[0069] In some embodiments of the present invention, Figure 5 As shown, the steps of extracting the contour of the scanning electron microscope image using the scaled design pattern 720 include:

[0070] Step S410, aligning and superimposing the scaled design pattern 720 with the corresponding pattern in the scanning electron microscope image.

[0071] Step S420 , placing multiple breakpoints 701 on the scaled design graphic 720 .

[0072] Step S430 , searching for corresponding contour edge points on corresponding graphics in the scanning electron microscope image according to each breakpoint 701 .

[0073] Step S440, connecting multiple contour edge points in sequence to form a target graphic contour.

[0074] The scaled design graphic 720 is closer to the scanning electron microscope image, and multiple breakpoints 701 are re-arranged on the scaled design graphic 720, and the corresponding contour edge points on the scanning electron microscope image are found according to the breakpoints 701 on the scaled design graphic 720, and the found contour edge points are connected in sequence to finally obtain the target graphic contour. This method obtains a more accurate target graphic contour.

[0075] In some embodiments of the present invention, Figure 6 As shown, before the step of determining the scaling ratio according to the ratio, it also includes:

[0076] Step S334, determining whether the ratio is less than a ratio threshold.

[0077] If yes, proceed to step S332 to determine the scaling ratio according to the ratio.

[0078] If not, proceed to step S335 to determine that the initial graphic outline is the target graphic outline.

[0079] If the ratio is not less than the ratio threshold, it means that the actual contour is not much different from the designed figure, and the obtained initial contour is accurate. There is no need for a second contour extraction, and the initial contour can be used as the target figure contour.

[0080] In summary, the method in the present application is to first perform the first contour extraction based on the design graphic, and then use CD Detector to detect the extracted initial graphic contour to obtain the contour size and layout size of the actual graphic. Compare the contour size with the layout size to obtain the ratio of the design graphic to be scaled. After scaling the design graphic according to the scaling ratio, place new breakpoints 701, and perform a graphic contour search to obtain the contour points of the second contour extraction. Connect the new contour points to form the target graphic contour.

[0081] In the present invention, on the basis of the existing method of extracting the SEM (Scanning Electron Microscope) graphic contour based on the design graphic, the CD Detector is used to calculate the contour size and the layout size based on the initial graphic contour, so as to obtain the ratio value that the design graphic needs to be scaled. Since it is a mature technology to obtain the contour size and the layout size based on the contour extraction result and the design graphic, the process can be completely automatic to form a process for adaptively determining the graphic scaling ratio. The above method makes the method an automatic, adaptive, and high-precision contour extraction solution.

[0082] The flow chart provided by the present embodiment is not intended to indicate that the operation of the method will be performed in any particular order, or that all operations of the method are included in all every case. In addition, the method may include additional operations. Within the scope of the technical thinking provided by the present embodiment method, additional changes may be made to the above method.

[0083] It should be understood that in some embodiments, each part can be implemented by hardware, software, firmware or a combination thereof. In the above embodiments, multiple steps or methods can be implemented by software or firmware stored in a memory and executed by a suitable instruction execution system.

[0084] This embodiment also provides a computer program product 10 , a computer readable storage medium 20 , and a computer device 30 . Fig.12 is a schematic diagram of a computer program product 10 according to an embodiment of the present invention, Fig.13 is a schematic diagram of a computer-readable storage medium 20 according to an embodiment of the present invention, Fig.14is a schematic diagram of a computer device 30 according to an embodiment of the present invention. The computer program product 10 includes a computer program 11, which, when executed by a processor 32, implements the steps of any of the above-mentioned methods for extracting the contour of a figure in a scanning electron microscope image. The computer-readable storage medium 20 stores the above-mentioned computer program 11, which, when executed by the processor 32, implements the steps of any of the above-mentioned methods for extracting the contour of a figure in a scanning electron microscope image. The computer device 30 may include a memory 31, a processor 32, and the computer program 11 stored in the memory 31 and running on the processor 32.

[0085] The computer program 11 for performing the operation of the present invention may be an assembly instruction, an instruction set architecture (ISA) instruction, a machine instruction, a machine-related instruction, a microcode, a firmware instruction, a state setting data, a configuration data of an integrated circuit, or a source code or an object code written in any combination of one or more programming languages ​​and process programming languages. The computer program 11 may be executed entirely on the user's computer, partially on the user's computer, as an independent software package, partially on the user's computer and partially on a remote computer, or entirely on a remote computer or server. In the latter case, the remote computer may be connected to the user's computer via any type of network (including a local area network (LAN) or a wide area network (WAN), or may be connected to an external computer. In some embodiments, in order to perform various aspects of the present invention, an electronic circuit including, for example, a programmable logic circuit, a field programmable gate array (FPGA) or a programmable logic array (PLA) may execute computer-readable program instructions by utilizing the state information of the computer-readable program instructions to personalize the electronic circuit.

[0086] In the description of this embodiment, the computer program product 10 is a related product including the computer program 11 .

[0087] For the purpose of the description of the present embodiment, the computer readable storage medium 20 is a tangible device capable of retaining and storing the computer program 11, which can be any device that can contain, store, communicate, propagate or transmit the computer program 11 for use with an instruction execution system, device or apparatus or in conjunction with these instruction execution systems, devices or apparatuses. More specific examples (a non-exhaustive list) of the computer readable storage medium 20 include the following: a portable computer disk, a hard disk, a random access memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), a static random access memory (SRAM), a portable compact disk read-only memory (CD-ROM), a digital versatile disk (DVD), a memory stick, a floppy disk, a mechanical encoding device, and any suitable combination of the above.

[0088] The computer device 30 may be, for example, a server, a desktop computer, a notebook computer, a tablet computer, or a smart phone. In some examples, the computer device 30 may be a cloud computing node. The computer device 30 may be described in the general context of computer system executable instructions (such as program modules) executed by a computer system. Typically, a program module may include routines, programs, target programs, components, logic, data structures, etc. that perform specific tasks or implement specific abstract data types. The computer device 30 may be implemented in a distributed cloud computing environment where remote processing devices linked via a communication network perform tasks. In a distributed cloud computing environment, program modules may be located on a local or remote computing system storage medium including a storage device.

[0089] The computer device 30 may include a processor 32 adapted to execute stored instructions, and a memory 31 providing temporary storage space for the operation of instructions during operation. The processor 32 may be a single-core processor, a multi-core processor, a computing cluster, or any number of other configurations. The memory 31 may include a random access memory (RAM), a read-only memory, a flash memory, or any other suitable storage system.

[0090] The computer device 30 may also include a network adapter / interface and an input / output (I / O) interface. The I / O interface allows data to be input and output with external devices that may be connected to the computer device. The network adapter / interface may provide communication between the computer device and a network, which is typically shown as a communication network.

[0091] At this point, those skilled in the art should recognize that, although multiple exemplary embodiments of the present invention have been shown and described in detail herein, many other variations or modifications that conform to the principles of the present invention can still be directly determined or derived based on the content disclosed in the present invention without departing from the spirit and scope of the present invention. Therefore, the scope of the present invention should be understood and recognized as covering all these other variations or modifications.

Claims

1. A method for extracting contours of graphics in a scanning electron microscope image, characterized in that: include: Acquire a scanning electron microscope image of the contour to be extracted and a design layout corresponding to the scanning electron microscope image; Extracting the contour of the figure in the scanning electron microscope image to obtain an initial figure contour; Reduce or enlarge the design graphic on the design layout according to the initial graphic outline to obtain a scaled design graphic; The scaled design pattern is used to extract the contour of the pattern in the scanning electron microscope image to obtain the contour of the target pattern.

2. The method for extracting contours of graphics in a scanning electron microscope image according to claim 1, characterized in that: The step of reducing or enlarging the design graphic on the design layout according to the initial graphic outline includes: Obtaining the size of a preset part on the design graphic to obtain the layout size; Obtaining the size of a portion on the initial graphic outline corresponding to the preset portion to obtain an outline size; The design graphic is reduced or enlarged according to the layout size and the outline size to obtain the scaled design graphic; the scaled design graphic is located outside the corresponding graphic in the scanning electron microscope image.

3. The method for extracting contours of graphics in a scanning electron microscope image according to claim 2, characterized in that: The step of reducing or enlarging the design graphic according to the layout size and the outline size includes: Calculating a ratio between the outline size and the layout size; determining a scaling ratio according to the ratio; The design graphic is reduced or enlarged according to the scaling ratio.

4. The method for extracting contours of graphics in a scanning electron microscope image according to claim 3, characterized in that: Determining the scaling ratio according to the ratio includes: calculating the product value of a preset coefficient and the ratio to obtain the scaling ratio; the preset coefficient is 1 to 1.

1.

5. The method for extracting contours of graphics in a scanning electron microscope image according to claim 3, characterized in that: The step of extracting the contour of the scanning electron microscope image using the scaled design graphic comprises: aligning and superimposing the scaled design pattern with a corresponding pattern in the scanning electron microscope image; Placing a plurality of breakpoints on the scaled design graphic; Searching for corresponding contour edge points on corresponding graphics in the scanning electron microscope image according to each of the breakpoints; Connecting a plurality of the contour edge points in sequence to form the target graphic contour.

6. The method for extracting contours of graphics in a scanning electron microscope image according to claim 1, characterized in that: The contour of the scanning electron microscope image is extracted using the original design pattern on the design board to obtain an initial pattern contour.

7. The method for extracting contours of graphics in a scanning electron microscope image according to claim 3, characterized in that: Before the step of determining the scaling ratio according to the ratio, the method further comprises: Determining whether the ratio is less than a ratio threshold; If yes, proceed to the step of determining the scaling ratio according to the ratio; If not, the initial graphic outline is determined to be the target graphic outline.

8. A computer-readable storage medium having a computer program stored thereon, characterized in that: When the computer program is executed by a processor, the steps of the method for extracting the contour of a figure in a scanning electron microscope image according to any one of claims 1 to 7 are implemented.

9. A computer program product, comprising a computer program, characterized in that When the computer program is executed by a processor, the steps of the method for extracting the contour of a figure in a scanning electron microscope image according to any one of claims 1 to 7 are implemented.

10. A computer device, characterized in that: The method comprises a memory, a processor and a computer program stored in the memory, wherein the processor executes the computer program to implement the steps of the method for extracting the contour of a figure in a scanning electron microscope image according to any one of claims 1 to 7.

Images