A preparation device for BC cells
Through automated cleaning mechanisms and inert gas cooling system, safety hazards and equipment damage problems of manually cleaning diffusion furnace pipes in BC battery manufacturing are solved, safe and efficient diffusion furnace pipe cleaning is achieved, reducing production costs and improving production efficiency.
Patent Information
- Application Number
- CN202510401300.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2025-04-01
- Publication Date
- 2025-07-04
- Estimated Expiration
- 2045-04-01
AI Technical Summary
During the manufacturing process of existing BC batteries, manual cleaning of diffusion furnace tubes poses safety hazards and equipment damage risks, affecting production efficiency and cost.
A BC battery preparation equipment is designed, using an automated cleaning mechanism, including an outer cylinder and an inner cylinder, the inner cylinder is filled with inert gas, and the diffusion furnace tube is cleaned by cleaning solution and micro bubbles. Combined with an inert gas cooling and circulation system, it avoids manual contact with harmful solutions and reduces equipment damage.
It realizes safe and efficient diffusion furnace pipe cleaning, reduces production costs, improves production efficiency, and avoids safety hazards and equipment damage caused by manual cleaning.
Smart Images

Figure CN119907344B_ABST
Abstract
Description
Technical Field
[0001] The present invention belongs to the technical field of battery production equipment, and particularly relates to a preparation device for BC batteries. Background Art
[0002] In recent years, with the rapid development of the photovoltaic industry, back contact batteries (BC batteries) have attracted much attention due to their high efficiency characteristics. In the manufacturing process of BC batteries, the boron diffusion process is one of the key links. However, this process generates powdered boron trioxide and silicon dioxide, which adhere to the quartz boat and form accumulations that are difficult to remove. Over time, these accumulations reduce the efficiency of the diffusion process and thus affect the battery performance. Therefore, regular cleaning of the quartz boat and the diffusion furnace tube has become a necessary measure to ensure stable product quality.
[0003] Currently, the cleaning work mainly relies on manual operation, using corrosive cleaning solutions to remove the accumulations on the furnace tube. However, this method has significant deficiencies and risks. Firstly, the corrosive solution poses potential hazards to the human body, and complex protective equipment must be worn for operation, increasing the difficulty of safety management. Secondly, during the manual cleaning process, it is very likely that the furnace tube will be damaged due to improper operation, which not only requires repairing and replacing the equipment, increasing the production cost of the enterprise, but also causes production stagnation, unable to complete the production task according to the original plan, affecting the delivery time, and thus damaging customer trust and the market competitiveness of the enterprise.
[0004] The information disclosed in this background art section is only intended to enhance the overall understanding of the present invention and should not be regarded as an admission or any form of implication that this information constitutes the prior art known to those of ordinary skill in the art. Summary of the Invention
[0005] The purpose of the present invention is to provide a preparation device for BC batteries, which can solve the technical problems raised in the above background art.
[0006] To achieve the above purpose, the technical solution provided by a specific embodiment of the present invention is as follows:
[0007] A preparation device for BC cells, comprising a diffusion device and a gantry conveyor. A number of diffusion furnace tubes are provided on the diffusion device. A preparation chamber matching the diffusion furnace tubes is provided on one side of the diffusion device. A first slider is fixedly connected to the lower end of the diffusion device. A slide rail matching the first slider is provided below the diffusion device. A cleaning mechanism matching the diffusion furnace tubes is installed on the gantry conveyor. The cleaning mechanism includes an outer cylinder and an inner cylinder. The outer cylinder and the inner cylinder are integrally formed. A cavity is formed between the inner cylinder and the outer cylinder. The cavity is filled with an inert gas. A heat exchanger matching the inner cylinder is installed on the outer cylinder. A heat conduction mechanism is installed between the outer cylinder and the inner cylinder. A ninth connecting pipe is installed on the outer cylinder. A plurality of uniformly distributed nozzles are installed on the ninth connecting pipe. A sixth connecting pipe is installed between the inner cylinder and the ninth connecting pipe.
[0008] In one or more embodiments of the present invention, a baffle is installed on the outer cylinder. The baffle divides the outer cylinder and forms a first cavity and a second cavity. The inner cylinder is located in the first cavity. An output pump is installed in the second cavity. The output end of the output pump is installed with a heat exchange pipe. The heat exchange pipe penetrates through the heat conduction mechanism. The input end of the output pump is fixedly connected with an eighth connecting pipe. The end of the eighth connecting pipe away from the output pump is connected to a cleaning solution source.
[0009] In one or more embodiments of the present invention, the heat conduction mechanism includes a plurality of heat exchangers. A chute is opened on the heat exchanger. A heat exchange block matching the chute is slidably connected to the heat exchanger. A memory metal part is installed between the heat exchange block and the bottom wall of the chute. The memory metal part deforms when heated, forcing the heat exchange block to be located in the chute. The end of the heat exchange block away from the memory metal part is fixedly connected with a heat insulation block. A baffle matching the heat insulation block is opened on the outer cylinder. The bottom wall of the baffle is fixedly connected with a second magnetic block. A first magnetic block matching the baffle is fixedly connected to the heat insulation block. The first magnetic block and the second magnetic block repel each other. The force generated by the deformation of the memory metal part is greater than the repulsive force between the first magnetic block and the second magnetic block.
[0010] In one or more embodiments of the present invention, a circulation system is provided on the preparation chamber. The circulation system includes a circulation pump. The output end of the circulation pump is fixedly connected with a first connecting pipe. The end of the first connecting pipe away from the circulation pump is fixedly connected with an air outlet plate. The input end of the circulation pump is fixedly connected with a second connecting pipe. The end of the second connecting pipe away from the circulation pump is fixedly connected with a filtering mechanism. The inner bottom wall of the preparation chamber is fixedly connected with a return air plate. A third connecting pipe is fixedly connected between the return air plate and the filtering mechanism.
[0011] In one or more embodiments of the present invention, a plurality of uniformly distributed air outlets are provided on the air outlet plate, and a plurality of uniformly distributed air inlets are provided on the air return plate.
[0012] In one or more embodiments of the present invention, a sewage discharge pipe matching the diffusion furnace tube is installed on the diffusion device, the other end of the sewage discharge pipe far from the diffusion device communicates with the filtering mechanism, a temperature measuring device and a first valve are fixedly connected to the first connecting pipe, and a fourth connecting pipe is fixedly connected between the temperature measuring device and the first valve.
[0013] In one or more embodiments of the present invention, a microbubble generation system is installed on one side of the fourth connecting pipe. The microbubble generation system includes a microbubble generator. A fifth connecting pipe is installed between the microbubble generator and the fourth connecting pipe. A third valve is fixedly connected to the fifth connecting pipe. A second valve is fixedly connected to the fourth connecting pipe. The end of the fourth connecting pipe far from the first valve communicates with a ninth connecting pipe.
[0014] In one or more embodiments of the present invention, a cold air supply system is provided on one side of the fourth connecting pipe. The cold air supply system includes a cold air generator. A seventh connecting pipe is installed between the cold air generator and the fourth connecting pipe. A fourth valve is provided on the seventh connecting pipe.
[0015] In one or more embodiments of the present invention, the gantry conveyor includes a frame body. A first traveling device is slidably connected to the frame body. A second traveling device is slidably connected to the first traveling device. The sliding direction of the first traveling device is perpendicular to the sliding direction of the second traveling device. A third traveling device is slidably connected to the second traveling device. The third traveling device slides up and down on the second traveling device. The cleaning mechanism is detachably installed on the third traveling device.
[0016] In one or more embodiments of the present invention, the outer diameter of the cleaning mechanism is smaller than the inner diameter of the diffusion furnace tube.
[0017] Compared with the prior art, a preparation device for a BC battery of the present invention can avoid safety hazards caused by manual cleaning, avoid damage to the diffusion furnace tube during the manual disassembly and cleaning process, improve the cleaning efficiency, reduce the production cost of enterprises, and greatly improve the production efficiency. Brief Description of the Drawings
[0018] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the accompanying drawings required for the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description are only some embodiments recorded in the present invention. For those of ordinary skill in the art, without creative efforts, other accompanying drawings can also be obtained based on these drawings.
[0019] Figure 1 Structural schematic of a preparation device for a BC cell in an embodiment of the present invention Figure 1 ;
[0020] Figure 2 For Figure 1 Schematic diagram of the structure at position A in
[0021] Figure 3 For Figure 1 Schematic diagram of the structure at position F in
[0022] Figure 4 Structural schematic of a preparation device for a BC cell in an embodiment of the present invention Figure 2 ;
[0023] Figure 5 Structural schematic of a preparation device for a BC cell in an embodiment of the present invention Figure 3 ;
[0024] Figure 6 Schematic diagram of the structure of a cleaning mechanism in an embodiment of the present invention;
[0025] Figure 7 For Figure 6 Schematic diagram of the structure at position B in
[0026] Figure 8 Cross-sectional view of a cleaning mechanism in an embodiment of the present invention;
[0027] Figure 9 For Figure 8 Schematic diagram of the structure at position C in
[0028] Figure 10 For Figure 8 Schematic diagram of the structure at position D in
[0029] Figure 11 For Figure 8 Schematic diagram of the structure at position E in
[0030] Figure 12 Cross-sectional view of a heat conduction mechanism in an embodiment of the present invention.
[0031] Main reference numeral description:
[0032] 1. Diffusion equipment; 101. Diffusion furnace tube; 2. First slider; 3. Slide rail; 4. Preparation chamber; 5. Circulation system; 6. Circulation pump; 7. First connecting pipe; 8. Air outlet plate; 801. Air outlet; 9. Second connecting pipe; 10. Filtration mechanism; 11. Air return plate; 1101. Air return port; 1102. Third connecting pipe; 12. Temperature measuring equipment; 13. Fourth connecting pipe; 14. First valve; 15. Second valve; 16. Microbubble generation system; 17. Microbubble generator; 18. Fifth connecting pipe; 19. Third valve; 20. Exhaust pipe; 21. Cold air supply system; 22. Cold air generator; 23. Seventh connecting pipe; 24. Fourth valve; 25. Sewage pipe; 26. Gantry conveyor; 27. Frame body; 28. First traveling device; 29. Second traveling device; 30. Third traveling device; 31. Cleaning mechanism; 32. Outer cylinder; 3201. Baffle; 3202. Heat dissipation hole; 33. Inner cylinder; 34. Heat exchange member; 3401. Chute; 35. Heat exchange block; 36. Heat insulation block; 3601. Storage groove; 37. Shape memory metal part; 38. First magnetic attraction block; 39. Second magnetic attraction block; 40. Heat exchange pipe; 41. Output pump; 42. Eighth connecting pipe; 43. First cavity; 44. Second cavity; 45. Convex part; 46. Airbag; 47. Ninth connecting pipe; 48. Sprayer; 49. Sixth connecting pipe; 50. Drain pipe. Detailed implementation mode
[0033] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.
[0034] As Figure 1 shown, a preparation device for a BC battery in an embodiment of the present invention includes a diffusion device 1. A plurality of diffusion furnace tubes 101 are arranged in the diffusion device 1. The diffusion device 1 mainly enables the BC battery to complete the diffusion process, which mainly has two stages. First is the pre-diffusion stage. Nitrogen and oxygen are first introduced, and the temperature is maintained at 20~100°C. After the pre-diffusion is completed, boron trichloride is introduced and the main diffusion process starts. At this time, the temperature rises to 700~1000°C. It should be noted that in the main diffusion stage, nitrogen does not need to be introduced anymore, so no NOx waste gas is generated during the entire diffusion process. In a high-temperature environment, boron trichloride undergoes a decomposition reaction, thereby forming borosilicate glass on the surface of the silicon wafer.
[0035] As Figures 1 - 2As shown in the figure, a preparation chamber 4 is installed on one side of the diffusion device 1. An inlet (not shown in the figure) is provided on the preparation chamber 4, and the quartz boat enters the preparation chamber 4 through the inlet. The diffusion device 1 and the preparation chamber 4 are in contact. In order to form a gap between the diffusion device 1 and the preparation chamber 4 during cleaning, a first slider 2 is fixedly connected to the lower end of the diffusion device 1, and a slide rail 3 matching the first slider 2 is fixedly connected below the diffusion device 1. The first slider 2 slides along the direction set by the slide rail 3 and can drive the diffusion device 1 to slide on the slide rail 3.
[0036] As Figure 1 shown, a gantry conveyor 26 is provided on the diffusion device 1, and a cleaning mechanism 31 is installed on the gantry conveyor 26. The outer diameter of the cleaning mechanism 31 is smaller than the inner diameter of the diffusion furnace tube 101. The cleaning mechanism 31 can extend into the diffusion furnace tube 101 and form a cavity between the cleaning mechanism 31 and the inner wall of the diffusion furnace tube 101. By introducing a cleaning solution and bubbles, the cleaning of the inner wall of the diffusion furnace tube 101 is realized.
[0037] As Figure 1 shown, the gantry conveyor 26 includes a frame 27. The diffusion device 1 is located below the frame 27, and the diffusion device 1 slides along the direction set by the frame 27. A first traveling device 28 is slidably connected to the frame 27, and a second traveling device 29 is slidably connected to the first traveling device 28. The sliding directions of the first traveling device 28 and the second traveling device 29 are perpendicular. A third traveling device 30 is slidably connected to the second traveling device 29, and the third traveling device 30 is slidably connected to the second traveling device 29 up and down. In this way, the cleaning mechanism 31 can enter different diffusion furnace tubes 101 to realize the cleaning of diffusion furnace tubes 101 at different heights.
[0038] Of course, the gantry conveyor 26 can be provided with cleaning mechanisms 31 matching the number and positions of the diffusion furnace tubes 101. That is, if there are three diffusion furnace tubes 101 on the diffusion device 1, the simultaneous cleaning of the three diffusion furnace tubes 101 can be realized by setting three cleaning mechanisms 31.
[0039] As Figures 1 - 12 shown, the cleaning mechanism 31 includes an outer cylinder 32 and an inner cylinder 33. Both the outer cylinder 32 and the inner cylinder 33 are made of materials with poor heat conduction or low heat conduction ability. The outer cylinder 32 and the inner cylinder 33 are integrally formed, and a cavity is formed between the outer cylinder 32 and the inner cylinder 33. The cavity is filled with heat insulation media such as inert gas for heat insulation to reduce the temperature outside the outer cylinder 32 from affecting the temperature inside the inner cylinder 33. A heat conduction mechanism is also installed between the outer cylinder 32 and the inner cylinder 33, and the heat conduction mechanism is used to transfer fixed heat from outside the outer cylinder 32 to inside the inner cylinder 33.
[0040] Specifically, as Figures 1 - 12As shown in the figure, the inner cylinder 33 is filled with a cleaning solution, which is generally a 20% HF solution. The number of heat conduction mechanisms provided is multiple, and they are evenly distributed on the outer cylinder 32. The heat conduction mechanism includes a heat insulation block 36. The heat insulation block 36 is Y-shaped. The middle part of the heat insulation block 36 is located inside the inner cylinder 33. The outer part of the heat insulation block 36 extends out of the surface of the outer cylinder 32, and a storage groove 3601 is provided on each extended part. A heat exchange block 35 that matches the storage groove 3601 is slidably connected to the heat insulation block 36. When the heat exchange block 35 is exposed to the air, the heat exchange block 35 and the part of the outer part of the heat insulation block 36 extending out of the surface of the outer cylinder 32 can absorb heat and transfer the heat to the heat exchange member 34, and the heat exchange member 34 then transfers the heat to the cleaning solution inside the inner cylinder 33 to realize the heating of the cleaning solution.
[0041] As Figures 1 - 12 shown in the figure, a shape memory metal member 37 is installed between the heat exchange block 35 and the bottom wall of the storage groove 3601. A baffle 3201 that matches the heat insulation block 36 is provided on the outer cylinder 32. A second magnetic attraction block 39 is fixedly connected to the bottom wall of the baffle 3201. A first magnetic attraction block 38 that matches the baffle 3201 is fixedly connected to the heat insulation block 36. The first magnetic attraction block 38 and the second magnetic attraction block 39 repel each other. When the shape memory metal member 37 is heated to a certain degree, it will curl up and pull the heat exchange block 35 to slide into the storage groove 3601. And the pulling force generated by the curling of the shape memory metal member 37 is greater than the repulsive force between the first magnetic attraction block 38 and the second magnetic attraction block 39. Therefore, the heat insulation block 36 can be located inside the baffle 3201. When the heat insulation block 36 is located inside the baffle 3201, the heat insulation block 36 can block the baffle 3201 to prevent heat from continuing to be transferred to the inner cylinder 33 through the heat exchange block 35 and the heat exchange member 34, and avoid the continuous heating of the cleaning solution inside the inner cylinder 33.
[0042] Generally, the temperature at which the shape memory metal member 37 curls up due to heat is matched with the optimal working temperature of the cleaning solution. For example, the optimal working temperature of the cleaning solution is 60 °C. When the shape memory metal member 37 is heated to about 60 °C, the shape memory metal member 37 curls up. Different materials of the heat exchange block 35 and the heat exchange member 34, as well as different materials of the shape memory metal member 37, will cause different degrees of heat absorption of the cleaning solution and the shape memory metal member 37. The material of the shape memory metal member 37 can be selected according to the actual situation. Of course, the shape memory metal member 37 can also be an electric push rod, and the push rod is driven by detecting the temperature of the cleaning solution inside the inner cylinder 33. However, using the shape memory metal member 37 has a lower cost, can reduce the maintenance cost, and has relatively higher stability.
[0043] As Figures 8 - 12As shown in the figure, a baffle 3201 is fixedly connected to the outer cylinder 32. The baffle 3201 divides the outer cylinder 32 and forms a first cavity 43 and a second cavity 44. The inner cylinder 33 is located in the first cavity 43. An output pump 41 is installed in the second cavity 44. Heat dissipation holes 3202 for dissipating heat of the output pump 41 are provided on the outer cylinder 32. One end of an eighth connecting pipe 42, which is fixedly connected to the input end of the output pump 41, is used to connect to a cleaning solution source, that is, a storage device for storing the cleaning solution. The output end of the output pump 41 is fixedly connected to a heat exchange pipe 40. A part of the heat exchange pipe 40 located in the first cavity 43 penetrates through a heat conduction mechanism, that is, the first cavity 43 can be used as a part of the heat conduction mechanism. At the same time, the cleaning solution can enter the inner cylinder 33 through the heat exchange pipe 40. During this process, during transportation, the cleaning solution in the heat exchange pipe 40 exchanges heat with the heat exchange pipe 40. When the cleaning solution is in the inner cylinder 33, the cleaning solution exchanges heat with the heat exchange pipe 40 and the heat conduction mechanism to realize heating of the cleaning solution and make the heating of the cleaning solution more uniform.
[0044] As Figures 8 - 10 shown, a ninth connecting pipe 47 is installed on the outer cylinder 32. A plurality of nozzles 48 are installed on the ninth connecting pipe 47. A sixth connecting pipe 49 is installed between the ninth connecting pipe 47 and the sixth connecting pipe 49. A pump (not shown in the figure) is connected to the sixth connecting pipe 49. Through the cooperation of the pump, the sixth connecting pipe 49, the ninth connecting pipe 47 and the nozzles 48, the cleaning solution in the inner cylinder 33 is evenly sprayed into the cavity formed by the outer cylinder 32 and the diffusion furnace tube 101, so that the cleaning solution is in full contact with the inner wall of the diffusion furnace tube 101.
[0045] As Figure 10 shown, a convex part 45 is fixedly connected to the outer cylinder 32. An airbag 46 is installed on the convex part 45. The outer diameter of the convex part 45 is smaller than the outer diameter of the diffusion furnace tube 101, and the outer diameter of the airbag 46 is larger than the outer diameter of the diffusion furnace tube 101. The airbag 46 can enter the diffusion furnace tube 101 by insertion and is in full contact with the inner wall of the diffusion furnace tube 101 to form a seal.
[0046] Of course, the airbag 46 can also achieve the seal between the diffusion furnace tube 101 and the convex part 45 by inflation. The airbag 46 is made of a high-temperature resistant material, specifically one or a combination of nickel-based alloys, ceramic fibers or ceramic matrix composites.
[0047] After filling the cavity between the outer cylinder 32 and the diffusion furnace tube 101 with the cleaning solution, microbubbles can be continuously output into the cleaning solution through the ninth connecting pipe 47. When the microbubbles contact the inner wall of the diffusion furnace tube 101, they burst, and the destructive force released when the microbubbles dissipate and dissolve is used to peel off dirt.
[0048] Specifically, as Figures 1 - 5As shown in the figure, a microbubble generation system 16 is installed on one side of the diffusion device 1. The microbubble generation system 16 includes a microbubble generator 17. A third valve 19 is installed on the microbubble generator 17. A fifth connecting pipe 18 is installed on the third valve 19. The third valve 19 is communicated with a ninth connecting pipe 47. The third valve 19 conveys gas into the ninth connecting pipe 47. The gas is ejected through a nozzle 48 to form microbubbles. During the process of conveying gas in the ninth connecting pipe 47, the inner wall of the ninth connecting pipe 47 can be cleaned, and the cleaning solution remaining in the ninth connecting pipe 47 is discharged, which is beneficial to extending the service life of the ninth connecting pipe 47.
[0049] Among them, the passage between the sixth connecting pipe 49 and the ninth connecting pipe 47 is controlled by a valve.
[0050] As Figure 1 As shown in the figure, a sewage discharge pipe 25 matching the diffusion furnace tube 101 is installed on the diffusion device 1. The sewage discharge pipe 25 is used to discharge the waste gas in the diffusion furnace tube 101 and the waste liquid formed by cleaning the diffusion furnace tube 101 with the cleaning solution. Specifically, one end of the sewage discharge pipe 25 is fixedly connected with a liquid discharge pipe 50. The waste liquid used to clean the diffusion furnace tube 101 is conveyed from the sewage discharge pipe 25 to the liquid discharge pipe 50, and then the liquid discharge pipe 50 discharges the waste liquid. Generally, a pump (not shown in the figure) is provided at one end of the liquid discharge pipe 50 away from the sewage discharge pipe 25 to provide power for discharging the waste liquid.
[0051] Among them, a pure water input pipe (not shown in the figure) is also communicated with the ninth connecting pipe 47. After the waste liquid is discharged, pure water is sprayed from the ninth connecting pipe 47 and the nozzle 48 onto the inner wall of the diffusion furnace tube 101 to clean the waste liquid remaining on the inner wall of the diffusion furnace tube 101 and avoid the influence of waste liquid residue on the production of BC batteries.
[0052] In the above preparation equipment, pure water, the cleaning solution, and the gas used to form microbubbles are not input into the inner cylinder 33 at the same time, and the transportation of the three has a certain order. The ninth connecting pipe 47 can be used alone as the transportation pipeline. Or three corresponding pipelines can be set to separately transport pure water, the cleaning solution, and the gas used to form microbubbles.
[0053] As Figures 1 - 2As shown in the figure, a circulation system 5 is provided on the preparation chamber 4. The circulation system 5 realizes the cleaning of BC batteries by means of circulating air. The circulation system 5 includes a circulation pump 6. The output end of the circulation pump 6 is fixedly connected to a first connecting pipe 7. One end of the first connecting pipe 7 away from the circulation pump 6 is fixedly connected to an air outlet plate 8. A plurality of uniformly distributed air outlet holes 801 are provided on the air outlet plate 8. The air outlet plate 8 is installed above the preparation chamber 4 and can convey gas to the preparation chamber 4 from top to bottom. The input end of the circulation pump 6 is fixedly connected to a second connecting pipe 9. One end of the second connecting pipe 9 away from the circulation pump 6 is fixedly connected to a filtering mechanism 10. A third connecting pipe 1102 is installed on the filtering mechanism 10. One end of the third connecting pipe 1102 away from the filtering mechanism 10 is fixedly connected to a return air plate 11. A plurality of uniformly distributed return air holes 1101 are provided on the return air plate 11. The air discharged from the air outlet plate 8 is recycled through the return air plate 11. The recycled air passes through the filtering mechanism 10. The filtering mechanism 10 filters the impurities in the recycled air, making the discharged air purer. During the circulation of the air, the impurities on the surface of the BC battery can be removed, avoiding the influence of impurities on the quality of the BC battery.
[0054] As Figure 1 shown, an exhaust pipe 20 is installed between the sewage discharge pipe 25 and the filtering mechanism 10. Through the exhaust pipe 20, waste gas can be conveyed into the filtering mechanism 10, and then filtered by the filtering mechanism 10 to obtain clean and high-temperature air. A temperature measuring device 12 and a first valve 14 are installed on the first connecting pipe 7. A fourth connecting pipe 13 is installed between the temperature measuring device 12 and the first valve 14. The temperature measuring device 12 is used to detect the temperature of the clean and high-temperature air, and control whether the air is discharged through the first connecting pipe 7 or through the fourth connecting pipe 13 through the first valve 14.
[0055] That is, in the normal state, the circulation system 5 is used to conduct air circulation in the preparation chamber 4 to remove the impurities on the surface of the BC battery, avoiding the influence of impurities on the diffusion effect of the BC battery. In the state where the diffusion furnace tube 101 needs to be cleaned, the circulation system 5 stops the air circulation in the preparation chamber 4 and mixes hot air and cold air, that is, by inhaling the high-temperature gas in the diffusion furnace tube 101 and the normal-temperature gas in the preparation chamber 4, and the two are mixed to cool the high-temperature gas. And it is discharged through the fourth connecting pipe 13, and one end of the fourth connecting pipe 13 away from the first connecting pipe 7 is communicated with the ninth connecting pipe 47 (not shown in the figure). The air with a lower temperature than that in the diffusion furnace tube 101 is conveyed into the diffusion furnace tube 101 through the ninth connecting pipe 47 and the nozzle 48, realizing the cooling of the diffusion furnace tube 101, and can avoid the situation that air directly enters the diffusion furnace tube 101, resulting in damage to the diffusion furnace tube 101 due to excessive temperature difference.
[0056] To further improve the cooling efficiency of the diffusion furnace tube 101, a cold air supply system 21 is installed on the fourth connecting pipe 13. The cold air supply system 21 includes a cold air generator 22. A seventh connecting pipe 23 is installed on the cold air generator 22, and a fourth valve 24 is installed on the seventh connecting pipe 23. Cold air generated by the cold air generator 22 is transported into the fourth connecting pipe 13, and the other end of the fourth connecting pipe 13 is communicated with a ninth connecting pipe 47. At this time, colder gas is transported into the diffusion furnace tube 101 to achieve rapid cooling of the diffusion furnace tube 101. During this process, it should be ensured that the temperature difference between the gas discharged from the diffusion furnace tube 101 and the relatively colder gas input does not exceed 50 °C to avoid damage to the diffusion furnace tube 101 caused by too large a temperature difference.
[0057] As Figures 1 - 3 shown, one end of the third valve 19 is communicated with the fourth connecting pipe 13. A fifth connecting pipe 18 is installed on the third valve 19, and a second valve 15 is installed on the fourth connecting pipe 13. The fourth connecting pipe 13 is controlled by the fifth connecting pipe 18 and the second valve 15 to transport the gas for forming microbubbles or the cooling gas.
[0058] It should be noted that the gas for cooling and the gas for forming microbubbles are not output into the diffusion furnace tube 101 at the same time. Therefore, the ninth connecting pipe 47 can be shared by both. Of course, it is also possible to choose to separately set the conveying pipelines for transporting the gas for cooling and the gas for forming microbubbles.
[0059] When the BC cell preparation equipment is in use, first, the BC cell is placed on the quartz boat and enters through the entrance of the preparation chamber 4. The circulation system 5 will be started, and air will be sucked through the air return plate 11 and discharged through the air outlet plate 8 by the circulation pump 6. During the air suction process, the filtering mechanism 10 can filter the sucked air to make the ejected air clean, so as to clean the impurities on the surface of the BC cell. After the BC cell passes through the preparation chamber 4, it will enter the diffusion furnace tube 101 and complete the diffusion process.
[0060] After the diffusion furnace tube 101 has been used for some time, substances such as silicon dioxide and boron trioxide are formed on the inner wall of the diffusion furnace tube 101. When this substance adheres to the diffusion furnace tube 101 and affects the preparation of the BC battery, the first slider 2 will move the diffusion device 1 towards the end away from the preparation chamber 4, creating a gap between the diffusion device 1 and the preparation chamber 4. This gap is used to place the cleaning mechanism 31 so that the cleaning mechanism 31 can enter the diffusion furnace tube 101 through the gap. Specifically, the first traveling device 28 slides on the frame 27 to position the cleaning mechanism 31 between the diffusion device 1 and the preparation chamber 4. Then, the third traveling device 30 slides downward to align the cleaning mechanism 31 with the diffusion furnace tube 101 to be cleaned. The central axis of the cleaning mechanism 31 is aligned with the central axis of the diffusion furnace tube 101 through the second traveling device 29. Then, the first traveling device 28 moves in the reverse direction to insert the cleaning mechanism 31 into the diffusion furnace tube 101 and bring the airbag 46 into contact with the inner wall of the diffusion furnace tube 101 to seal the diffusion furnace tube 101.
[0061] After the cleaning mechanism 31 enters the diffusion furnace tube 101, it first cools down the diffusion furnace tube 101. The cooling process is as follows: the circulation pump 6 extracts the hot air in the diffusion furnace tube 101 and mixes it with room temperature air and cold air to form mixed air. The temperature of the mixed air is lower than the heat of the gas extracted from the diffusion furnace tube 101. The mixed air is transported to the diffusion furnace tube 101 through the circulation pump 6, the fourth connecting pipe 13, and the ninth connecting pipe 47, thereby achieving the cooling of the diffusion furnace tube 101. During the cooling process of the diffusion furnace tube 101, the heat exchange block 35 and the heat exchange element 34 absorb the heat inside the diffusion furnace tube 101, and this heat is transferred to the inner cylinder 33 to heat the cleaning solution to make the cleaning solution reach the optimal working temperature. When the cleaning solution in the inner cylinder 33 reaches the optimal working temperature, the heat exchange block 35 is pulled into the interior of the chute 3401 by the force generated by the curling of the shape memory metal part 37, so that the heat exchange block 35 no longer conducts heat with the heat exchange element 34.
[0062] When the temperature of the diffusion furnace tube 101 drops to the cleaning temperature, generally, the temperature of the diffusion furnace tube 101 can be between 20 and 60 °C. The cleaning solution in the inner cylinder 33 passes through the sixth connecting pipe 49 and the ninth connecting pipe 47 and finally sprays out from the nozzle 48, evenly spraying the cleaning solution onto the inner wall of the diffusion furnace tube 101 and filling the cavity formed between the diffusion furnace tube 101 and the cleaning mechanism 31. Then, the microbubble generating system 16 outputs the gas for generating microbubbles through the fourth connecting pipe 13 and the ninth connecting pipe 47, causing microbubbles to form in the cleaning solution. The force generated by the rupture of the microbubbles is used to peel off impurities, achieving the cleaning of impurities.
[0063] After the impurities are cleaned, the waste liquid formed by the cleaning solution mixed with the impurities is output through the sewage discharge pipe 25 and the liquid discharge pipe 50. After the waste liquid is output, the pure water input pipe cooperates with the ninth connecting pipe 47 to transport pure water into the cavity between the diffusion furnace tube 101 and the cleaning mechanism 31, rinse the remaining cleaning solution, and discharge it from the sewage discharge pipe 25 and the liquid discharge pipe 50. After the pure water is discharged, the moisture in the diffusion device 1 can be dried by conveying air into the diffusion device 1 to reduce the generation of water stains.
[0064] As Figure 1 shown, the upper end of the sewage discharge pipe 25 is connected to the exhaust pipe 20, the lower end is connected to the liquid discharge pipe 50, and valves are provided at both ends of the sewage discharge pipe 25.
[0065] After the diffusion furnace tube 101 on the diffusion device 1 is completely cleaned, the gantry conveyor 26 drives the cleaning mechanism 31 to be located at the upper end of the diffusion device 1, and the first slider 2 slides on the slide rail 3 to drive the diffusion device 1 to slide, so that the diffusion furnace tube 101 on the diffusion device 1 is aligned with the preparation chamber 4.
[0066] In the above embodiment, the present invention can realize the non-dismantling cleaning of the diffusion furnace tube 101, avoid the possibility of damage during the disassembly process of the diffusion furnace tube 101, and can quickly cool down the diffusion furnace tube 101. Compared with the traditional cleaning after disassembly, the cleaning speed of the diffusion furnace tube 101 is faster and the efficiency is higher. And it does not use manual labor to clean the equipment, which can reduce the manual work, and at the same time can increase the cleaning frequency. Even if the cleaning frequency is increased, compared with manual cleaning, it is safer and more efficient than manual cleaning, so as to avoid the situation that the impurities attached in the diffusion furnace tube 101 affect the preparation of BC batteries.
[0067] In another embodiment, a detection mechanism (not shown in the figure) is provided at the front end of the outer cylinder 32. Through the detection mechanism, the degree of impurity attachment in the diffusion furnace tube 101 can be judged, and different amounts of microbubbles are released to different parts with different degrees of impurity attachment according to the degree of impurity attachment in cooperation with the microbubble generation system 16 to achieve precise decontamination.
[0068] For those skilled in the art, it is obvious that the present invention is not limited to the details of the above exemplary embodiments, and can be implemented in other specific forms without departing from the spirit or basic characteristics of the present invention. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting. The scope of the present invention is defined by the appended claims rather than the above description. Therefore, all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the present invention. Any reference signs in the claims should not be regarded as limiting the claimed rights.
[0069] In addition, it should be understood that although this specification is described according to embodiments, not every embodiment only includes an independent technical solution. This narrative way of the specification is only for clarity. Those skilled in the art should regard the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.
Claims
1. A preparation device for BC battery, characterized in that, Including: A diffusion device, on which a number of diffusion furnace tubes are provided. A preparation chamber matching the diffusion furnace tubes is provided on one side of the diffusion device. A first slider is fixedly connected to the lower end of the diffusion device, and a slide rail matching the first slider is provided below the diffusion device; A gantry conveyor, on which a cleaning mechanism matching the diffusion furnace tubes is installed. The cleaning mechanism includes an outer cylinder and an inner cylinder. The outer cylinder and the inner cylinder are integrally formed. A cavity is formed between the inner cylinder and the outer cylinder, and an inert gas is filled in the cavity; A heat exchange element matching the inner cylinder is installed on the outer cylinder. A heat conduction mechanism is installed between the outer cylinder and the inner cylinder. A ninth connecting pipe is installed on the outer cylinder, and a plurality of uniformly distributed nozzles are installed on the ninth connecting pipe. A sixth connecting pipe is installed between the inner cylinder and the ninth connecting pipe; A baffle is installed on the outer cylinder. The baffle divides the outer cylinder and forms a first cavity and a second cavity. The inner cylinder is located in the first cavity; An output pump is installed in the second cavity. The output end of the output pump is installed with a heat exchange pipe, and the heat exchange pipe penetrates through the heat conduction mechanism; The input end of the output pump is fixedly connected with an eighth connecting pipe, and the end of the eighth connecting pipe far from the output pump is connected with a cleaning solution source; The heat conduction mechanism includes a plurality of heat exchange elements. A chute is opened on the heat exchange element, and a heat exchange block matching the chute is slidably connected to the heat exchange element; A memory metal part is installed between the heat exchange block and the bottom wall of the chute. The memory metal part deforms when heated, forcing the heat exchange block to be located in the chute; One end of the heat exchange block far from the memory metal part is fixedly connected with a heat blocking block. A baffle matching the heat blocking block is opened on the outer cylinder. A second magnetic block is fixedly connected to the bottom wall of the baffle, and a first magnetic block matching the baffle is fixedly connected to the heat blocking block. The first magnetic block and the second magnetic block repel each other, and the force generated by the deformation of the memory metal part is greater than the repulsive force between the first magnetic block and the second magnetic block.
2. The manufacturing equipment of a BC battery according to claim 1, characterized in that, A circulation system is provided on the preparation chamber. The circulation system includes a circulation pump. The output end of the circulation pump is fixedly connected with a first connecting pipe, and the end of the first connecting pipe far from the circulation pump is fixedly connected with an air outlet plate; The input end of the circulation pump is fixedly connected with a second connecting pipe, and the end of the second connecting pipe far from the circulation pump is fixedly connected with a filtering mechanism. The inner bottom wall of the preparation chamber is fixedly connected with a return air plate, and a third connecting pipe is fixedly connected between the return air plate and the filtering mechanism.
3. The manufacturing equipment of a BC cell according to claim 2, characterized in that, A plurality of uniformly distributed air outlets are provided on the air outlet plate, and a plurality of uniformly distributed air return openings are provided on the return air plate.
4. The manufacturing equipment of a BC cell according to claim 3, characterized in that, A sewage discharge pipe matching the diffusion furnace tubes is installed on the diffusion device, and the end of the sewage discharge pipe far from the diffusion device communicates with the filtering mechanism; A temperature measuring device and a first valve are fixedly connected to the first connecting pipe, and a fourth connecting pipe is fixedly connected between the temperature measuring device and the first valve.
5. The manufacturing equipment of a BC cell according to claim 4, characterized in that, A microbubble generation system is installed on one side of the fourth connecting pipe. The microbubble generation system includes a microbubble generator. A fifth connecting pipe is installed between the microbubble generator and the fourth connecting pipe. A third valve is fixedly connected to the fifth connecting pipe, and a second valve is fixedly connected to the fourth connecting pipe. The end of the fourth connecting pipe away from the first valve communicates with a ninth connecting pipe.
6. The manufacturing equipment of a BC cell according to claim 5, characterized in that, A cold air supply system is provided on one side of the fourth connecting pipe. The cold air supply system includes a cold air generator. A seventh connecting pipe is installed between the cold air generator and the fourth connecting pipe. A fourth valve is provided on the seventh connecting pipe.
7. The manufacturing equipment of a BC cell according to claim 1, characterized in that, The gantry conveyor includes a frame body. A first traveling device is slidably connected to the frame body. A second traveling device is slidably connected to the first traveling device. The sliding direction of the first traveling device is perpendicular to the sliding direction of the second traveling device. A third traveling device is slidably connected to the second traveling device. The third traveling device slides up and down on the second traveling device. The cleaning mechanism is detachably installed on the third traveling device.
8. The manufacturing equipment of a BC cell according to claim 1, characterized in that, The outer diameter of the cleaning mechanism is smaller than the inner diameter of the diffusion furnace tube.
Citation Information
Patent Citations
Semiconductor preparation diffusion furnace
CN118207632A
Diversion structure for silicon wafer diffusion furnace
CN219157037U