Optimization and energy saving method for ultra-pure hydrogen equipment
By converting the exhaust hydrogen into heat by using catalytic oxidation reaction during ultrapure hydrogen separation and supplying it to a hydrogen separator, the problem of high power consumption in traditional heating equipment is solved, and the effect of energy saving and consumption reduction and environmental protection is achieved.
Patent Information
- Application Number
- CN202510082651.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-20
- Publication Date
- 2025-05-02
- Estimated Expiration
- Not applicable · inactive patent
AI Technical Summary
During the traditional ultrapure hydrogen separation process, heating equipment consumes a lot of electricity, resulting in an increase in costs, and it is necessary to develop efficient and energy-saving optimization methods.
By collecting the exhaust hydrogen generated during ultrapure hydrogen separation, heat is supplied to the hydrogen separator using a catalytic oxidation reaction to reduce additional power consumption.
It realizes heat reuse, reduces additional power consumption, reduces production costs, and reduces the emission of harmful substances in exhaust gas, which is conducive to environmental protection.
Smart Images

Figure CN119909534A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to energy saving and replacement methods for heating equipment in ultrapure hydrogen separation process, and in particular to a technology for reducing extra electricity consumption by effectively utilizing tail gas hydrogen for catalytic oxidation to generate heat and resupply the heat to a hydrogen separator. Background Art
[0002] In 2023, my country's ultra-high purity hydrogen consumption will be 283,000 tons, with an average annual compound growth rate of 8.3% from 2019 to 2023. It is expected that downstream consumption will exceed 640,000 tons in 2030. High-purity hydrogen is widely used in petrochemical, electronics, metallurgical, food processing, float glass, chemical synthesis, aerospace, hydrogen energy vehicles and other fields.
[0003] my country's electronics and semiconductor industries consume the most high-purity hydrogen, reaching 144,800 tons. Ultra-high-purity hydrogen is widely used in the electronics and semiconductor industries. For example, in the production of vacuum materials such as tungsten and molybdenum, ultra-high-purity hydrogen is used to reduce oxides; in the production of integrated circuits, ultra-high-purity hydrogen is used as the base gas for configuring mixed gases such as SiH4 / H2. Electronic-grade polysilicon, SiC, GaN, large-scale integrated circuits, optical fibers, LEDs, thin-film solar cells, etc.
[0004] In addition, it is also used in other fields. ① Analytical instruments: used as carriers or reaction media for analytical instruments such as mass spectrometers and chromatographs. Its stability and low background noise make it indispensable; ② Nuclear magnetic resonance: used as a detection sample in nuclear magnetic resonance experiments, and the structure and properties of the sample are obtained by analyzing the resonance signal of the hydrogen nucleus. ③ Energy field: High-purity hydrogen is the fuel in fuel cells. It produces electricity and water by reacting with oxygen. It has the advantages of high efficiency, zero emissions and environmental protection. It is widely used in automobiles, aerospace and other fields.
[0005] In summary, the application of ultra-pure hydrogen not only covers multiple fields from basic chemical industry to high-end technology, but also plays an important role in promoting green production and low-carbon life.
[0006] However, in the traditional ultrapure hydrogen separation process, the heating equipment often consumes a lot of electricity, resulting in increased costs. Therefore, it is of great significance to develop an efficient and energy-saving method for optimizing ultrapure hydrogen equipment. Summary of the invention
[0007] The object of the present invention is to provide an ultrapure hydrogen equipment optimization energy-saving method, which can effectively utilize the exhausted tail gas hydrogen and supply heat to the hydrogen separator through a catalytic oxidation method to reduce additional power consumption.
[0008] To achieve the above object, the present invention provides the following technical solutions:
[0009] An ultrapure hydrogen equipment optimization and energy saving method, the method comprising the following steps:
[0010] a) collecting tail gas hydrogen generated during the ultrapure hydrogen separation process;
[0011] b) introducing the tail gas hydrogen into a catalytic oxidizer, mixing it with air to undergo a catalytic oxidation reaction to generate heat;
[0012] c) using the heat generated by the catalytic oxidation reaction to heat a hydrogen separator or to maintain the reaction temperature in the catalytic oxidizer;
[0013] d) Emission of tail gas after catalytic oxidation reaction.
[0014] Furthermore, the method also includes transporting the exhaust gas hydrogen to the catalytic oxidizer through an exhaust gas hydrogen collecting pipe before the exhaust gas hydrogen is introduced into the catalytic oxidizer, and providing a check valve in the exhaust gas hydrogen collecting pipe to prevent the exhaust gas hydrogen from flowing back.
[0015] Furthermore, a catalytic oxidant layer is provided in the catalytic oxidizer to promote the catalytic oxidation reaction of exhaust gas hydrogen and air.
[0016] Furthermore, the catalytic oxidant layer includes one or more catalysts capable of promoting catalytic oxidation of hydrogen in the tail gas.
[0017] Furthermore, the method also includes transferring the heat generated by the catalytic oxidation reaction to the hydrogen separator through a heat recovery device to reduce the additional energy consumption in the hydrogen separation process.
[0018] Furthermore, the heat recovery device includes a heat exchanger for transferring the heat generated by the catalytic oxidation reaction to the working medium of the hydrogen separator, thereby heating the hydrogen separator.
[0019] Furthermore, it also includes monitoring the temperature, pressure and exhaust gas composition during the catalytic oxidation reaction, and adjusting the operating parameters of the catalytic oxidizer according to the monitoring results to optimize the energy saving effect.
[0020] Beneficial effects of the present invention:
[0021] 1. By effectively utilizing the exhaust tail gas hydrogen for catalytic oxidation, heat is supplied to the hydrogen separator, achieving heat reuse, reducing additional power consumption, and reducing production costs;
[0022] 2. Reduce the emission of harmful substances in exhaust gas, which is beneficial to environmental protection;
[0023] 3. The technical solution is simple and practical, easy to promote and apply.
[0024] In summary, the present invention provides an efficient and energy-saving method for optimizing ultrapure hydrogen equipment, which has important practical application value and promotion prospects. BRIEF DESCRIPTION OF THE DRAWINGS
[0025] Figure 1 A schematic diagram of a process for optimizing energy saving of ultrapure hydrogen equipment according to the present invention;
[0026] Figure 2 The present invention is a schematic diagram of an apparatus for optimizing energy saving of ultrapure hydrogen equipment. DETAILED DESCRIPTION
[0027] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings here can be arranged and designed in various different configurations.
[0028] In the description of the embodiments of the present invention, it should be noted that if the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. appear, the orientation or position relationship indicated is based on the orientation or position relationship shown in the drawings, or the orientation or position relationship in which the invented product is usually placed when used. It is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.
[0029] In addition, the terms "horizontal", "vertical", "overhanging" and the like do not mean that the components must be absolutely horizontal or overhanging, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.
[0030] In the description of the embodiments of the present invention, "plurality" means at least 2.
[0031] In the description of the embodiments of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal connection of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0032] The technical solution of the present invention includes components such as a tail gas hydrogen collection pipe, a catalytic oxidant layer, a cylindrical reactor, a tail gas exhaust pipe and an air fan. The tail gas hydrogen enters the catalytic oxidizer through the collection pipe, mixes with the air from the blower, and undergoes catalytic combustion through the catalytic oxidant layer. The heat generated in this process is provided by a heating device to maintain the temperature required for the catalytic reaction. At the same time, in order to prevent the tail gas hydrogen from flowing back into the system, a check valve is provided in the tail gas hydrogen pipe.
[0033] like Figure 1 As shown, including:
[0034] Separator 10, separated tail gas hydrogen outlet 11, separated ultrapure hydrogen outlet 12, unseparated hydrogen inlet 13;
[0035] Heating device 20, catalytic oxidant layer 21;
[0036] Also includes:
[0037] A: Tail gas hydrogen enters the catalytic oxidizer;
[0038] B: Air from the blower enters the catalytic oxidizer.
[0039] Specifically,
[0040] An ultrapure hydrogen equipment optimization and energy saving method, the method comprising the following steps:
[0041] a) collecting tail gas hydrogen generated during the ultrapure hydrogen separation process;
[0042] b) introducing the tail gas hydrogen into a catalytic oxidizer, mixing it with air to undergo a catalytic oxidation reaction to generate heat;
[0043] c) using the heat generated by the catalytic oxidation reaction to heat a hydrogen separator or to maintain the reaction temperature in the catalytic oxidizer;
[0044] d) Emission of tail gas after catalytic oxidation reaction.
[0045] As a further improvement of the present technical solution, the exhaust gas hydrogen is also transported to the catalytic oxidizer through an exhaust gas hydrogen collecting pipe before the exhaust gas hydrogen is introduced into the catalytic oxidizer, and a check valve is provided in the exhaust gas hydrogen collecting pipe to prevent the exhaust gas hydrogen from flowing back.
[0046] As a further improvement of the present technical solution, a catalytic oxidant layer is provided in the catalytic oxidizer to promote the catalytic oxidation reaction of exhaust gas hydrogen and air.
[0047] As a further improvement of the technical solution, the catalytic oxidant layer includes one or more catalysts capable of promoting catalytic oxidation of hydrogen in the exhaust gas.
[0048] As a further improvement of the technical solution, the heat generated by the catalytic oxidation reaction is transferred to the hydrogen separator through a heat recovery device to reduce the additional energy consumption in the hydrogen separation process.
[0049] As a further improvement of the technical solution, the heat recovery device includes a heat exchanger for transferring the heat generated by the catalytic oxidation reaction to the working medium of the hydrogen separator, thereby heating the hydrogen separator.
[0050] As a further improvement of the technical solution, it also includes monitoring the temperature, pressure and exhaust gas composition during the catalytic oxidation reaction, and adjusting the operating parameters of the catalytic oxidizer according to the monitoring results to optimize the energy-saving effect.
[0051] Specific implementation:
[0052] 1. Background and Objectives
[0053] During the operation of ultra-pure hydrogen equipment, a large amount of tail gas hydrogen will be generated. This tail gas hydrogen usually contains a certain amount of impurities, but still has a relatively high hydrogen concentration. In order to achieve the goal of energy conservation and emission reduction, the tail gas hydrogen can be recycled to reduce energy waste and improve the energy utilization efficiency of the overall equipment.
[0054] 2. Specific implementation steps
[0055] Tail gas hydrogen collection
[0056] Install tail gas collection devices, such as tail gas collection pipes or gas collection hoods, at the tail gas outlet of the ultrapure hydrogen equipment to ensure that the tail gas hydrogen can be effectively collected;
[0057] A check valve is installed in the tail gas collection device to prevent the tail gas hydrogen from flowing back in the pipeline and affecting the collection effect.
[0058] Tail gas hydrogen pretreatment
[0059] Pre-treat the collected tail gas hydrogen to remove impurities and particulate matter to improve the efficiency of the subsequent catalytic oxidation reaction;
[0060] The pretreatment process can adopt methods such as filtration, adsorption or washing, and the specific selection should be determined according to the composition and concentration of the tail gas hydrogen.
[0061] Catalytic oxidation reaction
[0062] The pretreated tail gas hydrogen is introduced into the catalytic oxidizer and mixed with an appropriate amount of air;
[0063] A catalytic oxidant layer, such as a noble metal catalyst or a transition metal oxide catalyst, is provided in the catalytic oxidizer to promote the catalytic oxidation reaction of exhaust gas hydrogen and air;
[0064] A large amount of heat is generated during the catalytic oxidation reaction, which can be recovered and utilized.
[0065] Heat recovery
[0066] Provide a heat recovery device, such as a heat exchanger, to transfer the heat generated by the catalytic oxidation reaction to the hydrogen separator or other equipment that requires heating;
[0067] Through the heat recovery device, the additional energy consumption in the hydrogen separation process can be reduced and the energy utilization efficiency of the overall equipment can be improved.
[0068] Exhaust Emissions and Treatment
[0069] The tail gas after catalytic oxidation reaction should be further treated to ensure that it meets environmental emission standards;
[0070] The treatment process can adopt dust removal, desulfurization and denitrification methods, and the specific selection should be determined according to the composition of the tail gas and the emission standards;
[0071] The treated exhaust gas should be safely discharged into the atmosphere through a dedicated exhaust pipe.
[0072] Monitoring and Optimization
[0073] During the entire implementation process, the collection, pretreatment, catalytic oxidation reaction, heat recovery and utilization of tail gas hydrogen and tail gas emissions should be monitored regularly;
[0074] According to the monitoring results, timely adjust the operating parameters to optimize the energy saving effect;
[0075] At the same time, the equipment should be regularly maintained and serviced to ensure its normal operation and long-term stability.
[0076] 3. Expected Results and Benefits
[0077] By implementing the above-mentioned ultrapure hydrogen equipment optimization and energy-saving methods, the following effects and benefits can be expected:
[0078] Reduce exhaust hydrogen emissions and reduce environmental pollution;
[0079] Recycle the energy in tail gas hydrogen to improve the energy efficiency of the overall equipment;
[0080] Reduce the extra energy consumption in the hydrogen separation process and reduce energy consumption costs;
[0081] Improve the operating stability and reliability of ultra-pure hydrogen equipment and extend the service life of the equipment.
[0082] In summary, this ultrapure hydrogen equipment optimization and energy-saving method has significant environmental and economic benefits, and is worthy of promotion and application in related industries.
[0083] The present invention and its embodiments are described above, and such description is not restrictive. The drawings show only one embodiment of the present invention, and the actual structure is not limited thereto. In short, if ordinary technicians in the field are inspired by it, without departing from the purpose of the invention, they can design a structure and embodiment similar to the technical solution without creativity, which should belong to the protection scope of the present invention.
Claims
1. An ultrapure hydrogen equipment optimization and energy saving method, characterized in that: The method comprises the following steps: a) collecting tail gas hydrogen generated during the ultrapure hydrogen separation process; b) introducing the tail gas hydrogen into a catalytic oxidizer, mixing it with air to undergo a catalytic oxidation reaction to generate heat; c) using the heat generated by the catalytic oxidation reaction to heat a hydrogen separator or to maintain the reaction temperature in the catalytic oxidizer; d) Emission of tail gas after catalytic oxidation reaction.
2. The method for optimizing energy saving of ultrapure hydrogen equipment according to claim 1, characterized in that: The method also includes transporting the exhaust gas hydrogen to the catalytic oxidizer through an exhaust gas hydrogen collecting pipe before the exhaust gas hydrogen is introduced into the catalytic oxidizer, and providing a check valve in the exhaust gas hydrogen collecting pipe to prevent the exhaust gas hydrogen from flowing back.
3. The method for optimizing energy saving of ultrapure hydrogen equipment according to claim 2, characterized in that: A catalytic oxidant layer is arranged in the catalytic oxidizer to promote the catalytic oxidation reaction of tail gas hydrogen and air.
4. The method for optimizing energy saving of ultrapure hydrogen equipment according to claim 3, characterized in that: The catalytic oxidant layer includes one or more catalysts capable of promoting catalytic oxidation of hydrogen in the tail gas.
5. The method for optimizing energy saving of ultrapure hydrogen equipment according to claim 2, characterized in that: The method also includes transferring heat generated by the catalytic oxidation reaction to the hydrogen separator through a heat recovery device to reduce additional energy consumption in the hydrogen separation process.
6. The method for optimizing energy saving of ultrapure hydrogen equipment according to claim 5, characterized in that: The heat recovery device comprises a heat exchanger for transferring the heat generated by the catalytic oxidation reaction to the working medium of the hydrogen separator, thereby heating the hydrogen separator.
7. An ultrapure hydrogen equipment optimization and energy saving method according to any one of claims 1 to 6, characterized in that: It also includes monitoring the temperature, pressure and exhaust gas composition during the catalytic oxidation reaction, and adjusting the operating parameters of the catalytic oxidizer based on the monitoring results to optimize the energy saving effect.