Pump-valve integrated miniature vacuum pump

Abstract

The invention provides a pump-valve integrated mini vacuum pump, comprising: a pump body having a fluid inlet, a vacuum port and a fluid outlet, the fluid inlet being in fluid communication with the vacuum port; the pumping component or / and the pump body form a pump cavity, the fluid inlet is in fluid communication with the pump cavity and forms an inflow channel, and the pump cavity is in fluid communication with the fluid outlet and forms an outflow channel. A power part; the back pressure mechanism is arranged on the outflow channel and comprises a back pressure part, a back pressure section located on the outflow channel is formed between the pump cavity and the back pressure part, and the back pressure part is constructed to be capable of maintaining the fluid pressure of the back pressure section when the pumping component acts; the valve mechanism comprises a vacuum valve, and the vacuum valve is provided with a shut-off position for shutting off fluid communication between the fluid inlet and the vacuum port and a communication position for allowing fluid communication between the fluid inlet and the vacuum port; wherein the vacuum valve is in fluid communication with the back pressure section, and when the pumping component acts, the vacuum valve can be switched to the turn-off position from the communication position and maintained at the turn-off position under the action of the fluid pressure of the back pressure section.

Description

Technical Field

[0001] The invention relates to the technical field of micro fluid pumps, in particular to a micro vacuum pump integrating a pump and a valve. Background Art

[0002] There is a type of miniature vacuum pump with integrated pump and valve, that is, a vacuum valve capable of changing the flow direction of a fluid is integrated on the miniature vacuum pump. This type of miniature vacuum pump is often used in devices such as breast pumps and massage chairs that require periodic changes in the flow direction of a fluid.

[0003] The Chinese invention patent application with patent number 202310943696.0 provides a micro vacuum pump valve integrated machine, which includes a pump body 1, a pump cover 2 having a fluid inlet 211, a fluid outlet 221 and an air release port 231, a diaphragm having a pump cavity, and a vacuum valve 23 disposed in the pump cover 2. The fluid inlet 211, the pump cavity and the fluid outlet 221 are fluidically connected in sequence, the air release port 231 is fluidically connected to the fluid inlet 221, and the vacuum valve 23 can selectively close the air release port 231 or block the fluid path between the pump cavity and the fluid outlet 221.

[0004] Usually, the fluid inlet 211 of the integrated machine is sealed and connected with a deformable airbag. When the integrated machine is started, the pressure in the pump chamber rises and pushes the vacuum valve 23 upward, the vacuum valve 23 closes the air leakage port 231, the fluid flows from the fluid inlet 211 to the fluid outlet 221, and the airbag shrinks due to the decrease in internal pressure; when the integrated machine is stopped, the pressure in the pump chamber drops, the vacuum valve 23 returns to its original position and opens the air leakage port 231, the fluid flows back from the air leakage port 231 to the fluid inlet 221, and the airbag expands due to the increase in internal pressure.

[0005] However, in actual use, at the initial start-up of the integrated machine, the fluid pressure increases and pushes open the vacuum valve 23, the fluid in the pump chamber and the fluid outlet 221 circulates, and the fluid pressure in the pump chamber begins to decrease; thereafter, after the fluid pressure drops to a certain level, the vacuum valve 23 drops under the action of elastic force and cuts off the fluid connection between the pump chamber and the fluid outlet 221, and the fluid pressure in the pump chamber begins to increase again. As a result, the vacuum valve 23 of the integrated machine exhibits a continuous rising and falling oscillating motion, the integrated machine discharges unstable fluid volume and is accompanied by a large valve flapping noise, which results in poor user experience. Summary of the invention

[0006] In view of the above technical problems, an object of the present invention is to provide a micro vacuum pump in which a vacuum valve can be maintained in a state of shutting off the fluid connection between a fluid inlet and a vacuum port when a pumping component is working.

[0007] In order to achieve the above-mentioned purpose, the present invention provides the following technical solutions: a micro vacuum pump with an integrated pump and valve, comprising: a pump body, having a fluid inlet for fluid to enter, a vacuum port for fluid to enter, and a fluid outlet for fluid to flow out, wherein the fluid inlet is fluidly connected to the vacuum port; a pumping component installed in the pump body, wherein the pumping component or / and the pump body form a pump cavity, wherein the fluid inlet is fluidly connected to the pump cavity and forms an inflow channel, and the pump cavity fluid is fluidly connected to the fluid outlet and forms an outflow channel; a power component for driving the pumping component; a back pressure mechanism, which is arranged on the outflow channel and includes a back pressure member, A back-pressure section located on the outflow channel is formed between the pump chamber and the back-pressure member, and the back-pressure member is configured to maintain the fluid pressure of the back-pressure section when the pumping member is in operation; and a valve mechanism includes a vacuum valve, and the vacuum valve has a shut-off position for shutting off the fluid connection between the fluid inlet and the vacuum port and a connecting position for allowing fluid connection between the fluid inlet and the vacuum port; wherein the vacuum valve is fluidically connected to the back-pressure section, and when the pumping member is in operation, the vacuum valve can be switched from the connecting position to the shut-off position and maintained at the shut-off position under the action of the fluid pressure of the back-pressure section.

[0008] In the above technical solution, preferably, the back pressure member is a valve fixedly mounted on the outflow channel and having an opening pressure.

[0009] In the above preferred solutions, it is further preferred that the back pressure mechanism further comprises a back pressure valve seat fixedly mounted on the outflow channel, and the back pressure valve seat is provided with a plurality of openings for fluidly connecting the back pressure section. It is also further preferred that the back pressure member is constructed as a diaphragm valve that bends radially inward and toward the back pressure valve seat, and the back pressure member is annular; when the back pressure member is closed, the back pressure member and the back pressure valve seat jointly define an annular back pressure cavity, and the plurality of openings are fluidly connected to the back pressure cavity.

[0010] In the above preferred solution, it is further preferred that a pressure relief hole is provided on the back pressure valve seat, which fluidly connects the back pressure section and the fluid outlet, and the pressure relief hole is independent of the back pressure cavity; when the back pressure member is closed, the fluid in the back pressure section can flow to the fluid outlet through the pressure relief hole. It is also possible that the inner diameter of the pressure relief hole is within the range of 0.2-0.6 mm.

[0011] In the above preferred solution, further preferably, the back pressure mechanism further comprises a flow blocker located between the back pressure valve seat and the fluid outlet, and the flow blocker is a porous structure that allows fluid to pass through. It is also further preferred that the flow blocker is installed on the side of the back pressure member away from the back pressure valve seat and limits the maximum opening of the back pressure member.

[0012] In the above preferred embodiment, further preferably, the back pressure member is composed of a closable multi-petal elastic sheet.

[0013] In the above technical solution, preferably, the back-pressure member is a porous structure that allows fluid to pass through, and the back-pressure member is fixedly mounted on the outflow channel.

[0014] In the above technical solution, preferably, the back pressure mechanism further includes a support seat, and a micro-pressure reduction channel is formed between the back pressure member and the support seat.

[0015] In the above technical solution, preferably, the micro vacuum pump is a diaphragm vacuum pump. It is also further preferred that the pump body includes a motor seat, a diaphragm seat, a lower valve seat, an upper valve seat and a pump cover arranged in sequence from bottom to top, the motor seat defines a transmission cavity, and the micro vacuum pump also includes a transmission component arranged in the transmission cavity and used to realize the transmission connection between the power component and the pumping component.

[0016] In the above preferred scheme, it is further preferred that the fluid inlet, the transmission chamber and the pump chamber are fluidically connected in sequence to form the inflow channel.

[0017] In the above preferred solutions, it is further preferred that the back pressure section is an exhaust cavity formed between the upper valve seat and the lower valve seat. It is also further preferred that the pump cover and the upper valve seat jointly form a vacuum cavity, the vacuum valve is arranged in the vacuum cavity and divides the vacuum cavity into an upper chamber and a lower chamber that are independent of each other, the upper chamber is fluidically connected to the fluid inlet and the vacuum port at the same time, and the lower chamber is fluidically connected to the exhaust cavity.

[0018] In the above preferred embodiment, further preferably, the micro vacuum pump also includes a diaphragm made of flexible material, the diaphragm is clamped between the upper valve seat and the pump cover, and the vacuum valve and the back pressure member are integrated on the diaphragm.

[0019] Compared with the prior art, when the pumping part of the micro vacuum pump provided by the present invention is working, due to the action of the back pressure part, the fluid pressure of the back pressure section is maintained at a certain value and will not fluctuate. Therefore, the vacuum valve switched to the closed position under the action of the fluid pressure of the back pressure section will not have oscillating movement. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 A schematic structural diagram of a micro vacuum pump according to a first embodiment of the present invention;

[0021] Figure 2 It is a schematic structural diagram of several embodiments of the back pressure mechanism provided by the present invention;

[0022] Figure 3 A three-dimensional diagram of a micro vacuum pump according to a second embodiment of the present invention;

[0023] Figure 4 for Figure 3 A top view of the micro vacuum pump shown;

[0024] Figure 5 for Figure 4 The micro vacuum pump shown is a cross-sectional view obtained along the AA section line;

[0025] Figure 6 for Figure 5 A partial enlarged view of

[0026] Figure 7 for Figure 3 A three-dimensional view of the motor base of the micro vacuum pump shown;

[0027] Figure 8 for Figure 3 A three-dimensional view of the diaphragm seat of the micro vacuum pump shown;

[0028] Fig. 9 for Figure 3 A three-dimensional view of a diaphragm member of the micro vacuum pump;

[0029] Fig.10 Figure 3 A three-dimensional view of the lower valve seat of the micro vacuum pump shown;

[0030] Fig.11 for Figure 3 A three-dimensional view of an upper valve seat of the micro vacuum pump shown;

[0031] Fig.12 for Figure 3 A bottom view of the upper valve seat of the micro vacuum pump shown;

[0032] Fig.13 for Figure 3 A three-dimensional view of a diaphragm member of the micro vacuum pump;

[0033] Fig.14 for Figure 3 The three-dimensional image of the pump cover of the micro vacuum pump shown Figure 1 ;

[0034] Fig.15 for Figure 3 The three-dimensional image of the pump cover of the micro vacuum pump shown Figure 2 .

[0035] Note in the figure:

[0036] 100, micro vacuum pump; 200, micro vacuum pump;

[0037] 1. Pump body; 11. Fluid inlet; 12. Vacuum port; 13. Fluid outlet; 14. Vacuum chamber; 15. Back pressure section; 16. Pressure reduction section;

[0038] 2. Pumping component; 21. Pump chamber; 22. Bell-shaped bag; 23. Skirt; 24. Second front through hole; 25. Second rear through hole;

[0039] 3. Power components;

[0040] 4. Vacuum valve;

[0041] 51. back pressure member; 52. opening; 53. back pressure valve seat; 54. flow resistance member;

[0042] 6. Transmission parts;

[0043] 71. air intake chamber; 72. air exhaust chamber;

[0044] 10; motor seat, 101, transmission cavity; 102, shaft hole; 103, bolt hole;

[0045] 20, diaphragm seat; 201, mounting hole; 202, first front through hole; 203, first rear through hole;

[0046] 30, lower valve seat; 301, exhaust seat; 302, intake seat; 303, exhaust hole; 304, intake hole; 305, third front through hole; 306, third rear through hole;

[0047] 40, upper valve seat; 401, through hole; 402, groove; 403, boss; 404, pressure relief hole;

[0048] 50. Pump cover; 501. Air nozzle; 502. Communication port;

[0049] 60. Diaphragm. DETAILED DESCRIPTION

[0050] In order to explain in detail the technical content, structural features, objectives and effects of the present application, the technical solutions in the embodiments of the present application will be described below in conjunction with the drawings in the embodiments of the present application.

[0051] In this application, spatially relative terms such as "under", "below", "under", "down", "above", "upper", "above", "higher", "side" (for example, as in "sidewall"), etc., are used to describe the relationship of one element to another (other) element as shown in the accompanying drawings. The spatially relative terms are intended to include different orientations of the device in use, operation and / or manufacture in addition to the orientation depicted in the accompanying drawings. For example, if the device in the accompanying drawings is turned over, the elements described as "under" or "beneath" other elements or features will then be positioned as "above" the other elements or features. Therefore, the exemplary term "under" can include both above and below orientations. In addition, the device can be positioned otherwise (for example, rotated 90 degrees or at other orientations), so the spatially relative descriptors used herein are interpreted accordingly.

[0052] In the present application, the term "fluid connection" used to express the relative relationship between two fluid spaces (such as cavities, flows, holes) means that there is a fluid path between the two fluid spaces for the fluid to flow from one fluid space to another fluid space, and the two fluid spaces can be directly connected or connected through several fluid spaces; it should be understood that the expression of a physical object being fluidly connected with another fluid space (or physical object) appearing in the present application is a brief expression that the space (on a certain side) where the physical object is located is fluidly connected with another fluid space (or the space where the physical object is located).

[0053] In the present application, the term "independent" used to describe the relative relationship between two fluid spaces means that the two fluid spaces are not directly connected, but does not exclude the possibility that the two fluid spaces are connected through several fluid spaces.

[0054] The present invention provides a miniature vacuum pump with an integrated pump and valve, aiming to solve the technical problem of continuous oscillation of the vacuum valve during the operation of such vacuum pumps in the prior art, so as to achieve at least one of the technical effects of exhaust stability and noise reduction.

[0055] Specifically, see Figure 1, which shows a micro vacuum pump 100 of the first embodiment provided by the present invention. The micro vacuum pump 100 includes a pump body 1, a valve mechanism disposed inside the pump body 1 and used to switch the flow direction of the fluid, a back pressure mechanism arranged in the pump body 1, a pumping component 2 for pumping the fluid, and a driving component 3 for driving the pumping component 2. It should be noted here that the valve mechanism and the back pressure mechanism provided by the present invention can be undoubtedly applied to diaphragm type, electromagnetic type, axial flow type, flexible impeller type, etc. (the main difference between the above-mentioned various types of micro pumps is the different types of pumping components and power components) micro vacuum pumps. Therefore, the specific type of its micro vacuum pump does not have a limiting effect on the scope of protection of the present invention.

[0056] The pump body 1 is formed with a fluid inlet 11 for allowing fluid to enter the pump body 1, a vacuum port 12 for allowing fluid to enter the pump body 1, and a fluid outlet 13 for allowing fluid to leave the pump body 1. The pumping component 2 is arranged in the pump body 1, and a pump chamber 21 is formed inside the pumping component 2 or between the pumping component 2 and the pump body 1. The fluid inlet 11 is in fluid communication with the vacuum port 12. The fluid inlet 11 is in fluid communication with the pump chamber 21 to form an inflow channel (not marked in the figure), and the pump chamber 21 is in fluid communication with the fluid outlet 13 to form an outflow channel. Generally speaking, the inflow channel, outflow channel, or / and pump chamber are provided with a valve ( Figure 1 not shown).

[0057] A vacuum chamber 14 for placing a valve mechanism is also formed in the pump body 1. The valve mechanism includes a vacuum valve 4 installed in the vacuum chamber 14. The vacuum valve 4 divides the vacuum chamber 14 into an upper chamber (marked in the figure) and a lower chamber (not marked in the figure) that are independent of each other. The fluid inlet 11, the upper chamber and the vacuum port 12 are fluidically connected in sequence, and the lower chamber is fluidically connected to the pump chamber 21. The vacuum valve 4 has a shutoff position for shutting off the fluid communication between the fluid inlet 11 and the vacuum port 12 and a communication position (such as a shutoff position) for allowing the fluid inlet 11 to be fluidically connected to the vacuum port 12. Figure 1 , Figure 6 position), and can switch between the above-mentioned off position and the connected position.

[0058] The fluid inlet 11 of the micro vacuum pump 100 is usually sealed and connected to an airbag. When the micro vacuum pump 100 is working, the power component 3 drives the pumping component 2 to pump the fluid, the fluid pressure in the pump chamber 21 rises and forces the vacuum valve 4 to switch to the off position, and the fluid connection between the fluid inlet 11 and the vacuum port 12 is cut off. After the fluid in the airbag enters the pump body 1 from the fluid inlet 11, it passes through the inflow channel, the pump chamber 21, the outflow channel and the fluid outlet 13 in sequence, and is finally discharged from the micro vacuum pump 100, and the pressure in the airbag decreases.

[0059] After the micro vacuum pump 100 stops working, the valve 4 is reset to the connected position under the action of atmospheric pressure, its own elastic force and / or a reset component (not shown in the figure), and the vacuum port 12 is restored to fluid communication with the fluid inlet 11. The external fluid reaches the airbag after passing through the vacuum port 12 and the fluid inlet 11, and the pressure in the airbag rises and expands outward. Thus, the airbag can be periodically contracted and expanded through the periodic operation of the micro vacuum pump 100.

[0060] Combination Figure 2 The back pressure mechanism includes a back pressure member 51 disposed on the outflow channel, and the back pressure member 51 divides the outflow channel into a back pressure section 15 extending from the pump chamber 21 to the back pressure member 51 and a pressure reduction section 16 extending from the back pressure member 51 to the fluid outlet 13. The back pressure member 51 is configured to generate an opening pressure in the back pressure section or increase the resistance of the outflow channel, so as to maintain the air pressure of the back pressure section 15 within a certain range higher than the air pressure of the fluid outlet 13. In other embodiments, the back pressure member can also be directly disposed at the fluid outlet, that is, the design of the pressure reduction section is eliminated.

[0061] The lower chamber of the vacuum chamber 14 is in fluid communication with the back pressure section 15. When the micro vacuum pump 100 is working, the vacuum valve 4 is subjected to the fluid pressure of the back pressure section 15 and switches from the communication position to the closed position. Due to the effect of the back pressure mechanism, when the micro vacuum pump 100 is working, the back pressure section 15 will not experience the pressure drop in the prior art, but will maintain a higher level. Therefore, the vacuum valve 4 will not experience the continuous oscillation in the prior art, but will maintain in the closed position.

[0062] In addition, in diaphragm type, electromagnetic type and other micro vacuum pumps, the pumping components periodically inhale and discharge fluid. As a result, periodic air waves are generated on the outflow channel of the micro vacuum pump in the prior art, and the air waves are a major source of noise in the current micro vacuum pump. The back pressure mechanism provided in this embodiment can maintain the fluid pressure of the back pressure section at a stable value, thereby eliminating the generation of the above-mentioned air waves and reducing the exhaust noise of the micro vacuum pump 100.

[0063] It can be understood that the vacuum chamber 14 is only for facilitating the design of the valve mechanism. In other embodiments, the vacuum chamber can be eliminated, and the vacuum valve can be fixed by directly installing the vacuum valve on the outflow channel (meaning fixedly installing it on a physical object forming the fluid channel). As long as the vacuum valve can be switched from the connected position to the closed position and maintained at the closed position by the fluid pressure of the back pressure section, the specific structure and installation method of the valve mechanism do not limit the scope of protection of the present invention.

[0064] Figure 2 Several possible examples of back pressure mechanisms provided by the present invention are shown. For ease of description, various embodiments are distinguished by adding English letters after the corresponding component labels.

[0065] like Figure 2 As shown in (a), the back pressure mechanism includes a back pressure member 51a made of a flexible material and a back pressure valve seat 53a having an opening 52a. The back pressure member 51a is constructed as a diaphragm valve fixedly mounted on the exhaust passage and capable of selectively closing the opening 52a. When the fluid pressure of the back pressure section 15 is higher than the opening pressure of the diaphragm valve (i.e., the valve is opened when the pressure is greater than the opening pressure of the diaphragm valve), the back pressure member 51a opens the above-mentioned opening 52a, and the fluid flows to the fluid outlet 13 through the flow port (not shown in the figure) of the back pressure member 51a.

[0066] like Figure 2 As shown in (b), the back pressure mechanism includes a back pressure member 51b and a back pressure valve seat 53b with an opening 52b. The back pressure member 51b is configured to have a metal sheet valve fixedly mounted on the exhaust passage and having a constant elastic force. After the fluid pressure of the back pressure section 15 is higher than the opening pressure of the metal sheet valve, the back pressure member 51b opens the above-mentioned opening 52b, and the fluid flows to the fluid outlet 13.

[0067] like Figure 2 As shown in (c), the back pressure mechanism includes a back pressure member 51c, which is composed of a multi-petal elastic leaf fixedly mounted on the exhaust passage and closable (meaning that the fluid passage can be closed) (the closed state is shown in the figure). After the fluid in the back pressure section 15 is higher than the opening pressure of the back pressure member 51c, the back pressure member 51c is opened, and a gap is formed between the multi-petal flexible leaves for fluid flow, and the fluid flows to the fluid outlet 13.

[0068] It can be understood that in the above three embodiments, the back pressure member 51 is a valve with a certain opening pressure, and the fluid can flow to the fluid outlet 13 only after the air pressure of the back pressure section 15 is greater than the above opening pressure. Therefore, the back pressure member 51 can maintain the fluid pressure of the back pressure section 15 at least at the opening pressure of the back pressure member 51.

[0069] Continue reading Figure 2 ,like Figure 2 As shown in (d), the back pressure mechanism includes a back pressure member 51d and a support seat 54d having an opening 52d. The back pressure member 51d is configured as a porous structure that allows fluid to pass through. When the micro vacuum pump 100 is working, the fluid flows to the fluid outlet 13 after passing through the opening 52d and the back pressure member 51d.

[0070] like Figure 2As shown in (e), the back pressure mechanism includes a back pressure member 51e with a clearance fit to the tube wall of the outflow channel and a support seat 54e with an opening 52e. A micro-pressure reduction channel 55e is formed between the back pressure member 51e and the back pressure valve seat 54e. The above-mentioned micro-pressure reduction channel 55e can be directly formed by providing a rough contact surface on the back pressure member 51e and / or the back pressure valve seat 54e, or by providing a tiny flow channel. When the micro vacuum pump 100 is working, the fluid flows to the fluid outlet 13 after passing through the opening 52e and the micro-pressure reduction channel 55e.

[0071] It can be understood that in the above two embodiments, the back pressure mechanism increases the fluid resistance along the path (i.e., increases the pressure drop of the fluid at this location) by means of the back pressure member 51 and / or the support seat 54, so that the back pressure section 15 is maintained at a certain fluid pressure. In addition, a tiny fluid channel for multiple reflections of noise can be formed between the above two back pressure members 51 and / or the outflow channel, so that the noise can be effectively reduced.

[0072] See also Figure 3-5 , shows a micro vacuum pump 200, which is an embodiment of the micro vacuum pump 100 provided by the present invention being specifically applied to a diaphragm micro pump. To avoid redundancy, the structures with the same functions will not be described again, and the labels of the previous embodiment will continue to be used.

[0073] The pump body 1 of the micro vacuum pump 200 includes a motor seat 10, a diaphragm seat 20, a lower valve seat 30, an upper valve seat 40 and a pump cover 50 which are arranged in sequence from bottom to top. The motor seat 10, the diaphragm seat 20, the lower valve seat 30, the upper valve seat 40 and the pump cover 50 are firmly fixed together by a number of fastening bolts (not marked in the figure).

[0074] Combination Figure 7 The motor seat 10 defines a transmission chamber 101 with an upper opening, and the diaphragm seat 20 closes the upper opening of the transmission chamber 101. The micro vacuum pump 200 also includes a transmission component 6 disposed in the transmission chamber 101, and the transmission component 6 is used to realize the transmission connection between the power component 3 and the pumping component 2.

[0075] The power component 3 of the micro vacuum pump 200 is an electric motor, which has a motor housing (not marked in the figure) and an output shaft (not marked in the figure) protruding outward relative to the motor housing. The bottom of the motor base 10 is provided with an axial hole 102 for the output shaft to pass through and a plurality of bolt holes 103 for the fastening bolts to pass through. The fastening bolts pass through the bolt holes 103 and are threadedly connected to the motor housing to fix the power component 3 on the motor base 10. The output shaft of the power component 3 passes through the axial hole 102 and is connected to the transmission component 6.

[0076] See also Figure 5 , Figure 8 and Fig. 9The pumping part 2 of the micro vacuum pump 200 is a diaphragm member, which is clamped between the diaphragm seat 20 and the lower valve seat 30. The pumping part 2 has a plurality of bell-shaped capsules 22 and a skirt 23 that connects the bell-shaped capsules 22 into one body. The pump chamber 21 is formed on the bell-shaped capsule 22. The diaphragm seat 20 is provided with mounting holes 201 for placing the bell-shaped capsules 22, a first front through hole 202 for fluid communication with the transmission chamber 101, and a plurality of first rear through holes 203 for fluid communication with the transmission chamber 101. The mounting hole 201, the first front through hole 202, and the first rear through holes 203 all axially penetrate the diaphragm seat 20.

[0077] The pumping component 2 is also provided with a second front through hole 24 connected to the first front through hole 202 and second rear through holes 25 respectively connected to the second rear through holes 203 . The second front through hole 24 and the second rear through holes 25 axially penetrate the pumping component 2 .

[0078] Continue reading Figure 5 and Fig.10 The lower valve seat 30 is installed on the upper side of the pumping component 2 and covers each pump chamber 21. The lower valve seat 30 is provided with an exhaust seat 301 for placing an exhaust valve (not marked in the figure) and a plurality of intake seats 302 for placing intake valves (not marked in the figure). The lower valve seat 30 is also provided with exhaust holes 303 respectively connected to each pump chamber 21 by fluid and arranged near the exhaust seat 301, intake holes 304 respectively connected to each pump chamber 21 by fluid and arranged near the intake seat 302, a third front through hole 305 connected to the second front through hole 24 by fluid, and a third rear through hole 306 respectively connected to each second rear through hole 25 by fluid.

[0079] Combination Figure 6 , Fig.11 and Fig.12 , the upper valve seat 40 and the lower valve seat 30 define mutually independent air intake chamber 71, air exhaust chamber 72 and side chamber (not shown in the figure). The fluid inlet 11, side chamber, third front through hole 305, second front through hole 24, first front through hole 202, transmission chamber 101, first rear through hole 203, second rear through hole 25, third rear through hole 306, air intake chamber 71 and each air intake hole 304 of the micro vacuum pump 200 are sequentially fluidly connected and constitute the inflow channel of the micro vacuum pump 200. The fluid channel extends the fluid path through the transmission chamber 101 and uses the transmission chamber 101 to reduce the pressure, which is conducive to reducing the suction noise of the micro vacuum pump 200.

[0080] Continue reading Figure 5 and Figure 14-15 The pump cover 50 is formed with an air nozzle 501 for connecting an external air bag or pipeline. The fluid inlet 11 is integrated on the outer end of the air nozzle 501 , and the vacuum port 12 and the fluid outlet 13 are directly opened on the pump cover 50 .

[0081] Combination Figure 6 , the vacuum chamber 14 of this embodiment is defined by the pump cover 50 and the upper valve seat 40. The vacuum port 12 is directly connected to the vacuum chamber 14, and a connecting port 502 directly connected to the vacuum chamber 14 is formed on the air nozzle 501. The vacuum valve 4 has a plunger portion (not marked in the figure) that can close the connecting port 502, a deformable deformation portion (not marked in the figure), and a mounting portion (not marked in the figure) clamped between the pump cover 50 and the upper valve seat 40, and the above-mentioned plunger portion, deformation portion and mounting portion are integrally formed. When the vacuum valve 4 is in the off position, its plunger portion closes the above-mentioned connecting port 502, thereby shutting off the fluid connection between the air inlet 11 and the vacuum port 12; when the vacuum valve 4 is in the connecting position, the plunger portion is separated from the above-mentioned connecting port 502, and the fluid connection between the air inlet 11 and the vacuum port 12 is restored.

[0082] Combination Fig.11 The upper valve cover 40 is provided with a through hole 401 for realizing fluid communication between the lower chamber of the vacuum chamber 14 and the exhaust chamber 72. The back pressure valve seat 53 of the micro vacuum pump 200 is formed on the upper valve seat 40. The back pressure valve seat 53 is also formed with an annular groove 402 and a boss 403 located inside the groove 402. The openings 52 are directly connected to the above-mentioned groove 402. It can be understood that the exhaust chamber 72 of the micro vacuum pump 200 is the back pressure section of the micro vacuum pump 200.

[0083] The back pressure member 51 of the micro vacuum pump 200 is a valve fixedly mounted on the exhaust passage and in an annular shape. The back pressure member 51 is made of a flexible material and is configured to bend radially inward and toward the back pressure valve seat 53. When the back pressure member 51 is closed, the free end of the back pressure member 51 contacts the boss 403, and an annular back pressure cavity (not marked in the figure) is formed between the back pressure member 51 and the back pressure valve seat 53, and the opening 52 is fluidically connected to the back pressure cavity. It can be understood that the groove 402 constitutes a part of the back pressure cavity.

[0084] Compared to Figure 2 The various valves provided and the back pressure member 51 provided by the micro vacuum pump 200 have the advantages of stable airflow at a small opening. In addition, Figure 2For the various valves provided, when the fluid flow rate of the micro vacuum pump 200 is small, due to the different back pressures at various places and the different wall thicknesses at various places, it is inevitable that when the valve opening is small, extremely narrow gaps will be formed between individual places on the valve body and the valve seat. The above extremely narrow gap is the main reason for the whistle sound produced by this type of vacuum valve. The back pressure member 51 provided by the micro vacuum pump 200 is actually a curved diaphragm in an annular shape with a center hole, and there is no other complex structure. Therefore, the back pressure member 51 is easy to manufacture and can better control the wall thickness at various places. As a result, when the fluid flow rate of the micro vacuum pump 200 is small, the opening of the back pressure member 51 in each radial direction is consistent (the reason is that the back pressure is the same and the wall thickness manufacturing error is small), and extremely narrow gaps will not be produced at individual places, so the whistle sound can be effectively suppressed.

[0085] Further, see Figure 6 The above-mentioned back pressure mechanism has the following technical problems: after the pumping component 2 stops working, the back pressure member 51 is closed, and the fluid in the lower chamber of the vacuum chamber 14 and the exhaust chamber 72 is blocked by the back pressure member 51. The above-mentioned fluid is slowly deflated under the combined action of the fluid pressure difference and the restoring force of the vacuum valve 4 pointing from the closed position to the connected position (such as the elastic force of the vacuum valve 4 itself, the return spring, the magnetic force, etc.). As a result, the back pressure mechanism makes the speed of the vacuum valve 4 returning from the closed position to the connected position slow, that is, the response speed of the vacuum valve 4 decreases.

[0086] To this end, combined Figure 11-12 The back pressure valve seat 53 is also provided with a pressure relief hole 404 that is fluidly connected to the exhaust chamber 72 and the fluid outlet 13. The pressure relief hole 404 is independent of the above-mentioned back pressure chamber. When the back pressure member 51 is closed, the pressure relief hole 404 is not covered by the back pressure member 51 (i.e., the pressure relief hole 404 is still fluidly connected to the exhaust port). When the pumping component 2 stops moving, the vacuum valve 4 switches from the closed position back to the connected position, and the residual fluid in the lower chamber of the vacuum chamber 14 and the exhaust chamber 72 reaches the exhaust port 13 through the pressure relief hole 404.

[0087] The pressure relief hole 404 reserves a fluid path for the lower chamber of the vacuum chamber 14 to the exhaust port 13 when the back pressure member 51 is closed, which improves the response speed of the vacuum valve 4 from the closed position to the connected position. Figure 2 (e) of the micro-decompression channel 55e), so when the pumping component 2 is in operation, the back pressure mechanism can still maintain the fluid pressure of the exhaust chamber 72. According to actual tests, the inner diameter of the pressure relief hole 404 can be selected to be any value in the range of 0.2-0.6mm.

[0088] Furthermore, the back pressure mechanism of the micro vacuum pump 200 further includes a flow resistance member 54 disposed between the back pressure member 51 and the exhaust port 13 . The flow resistance member 54 is fixedly mounted on the exhaust passage and is configured as a porous structure that allows fluid to pass through.

[0089] Furthermore, in order to prevent the back pressure member 51 of the micro vacuum pump 200 from bending in the opposite direction under the action of fluid pressure, the flow resistance member 54 is placed on the upper side of the back pressure member 51 and limits the maximum opening of the back pressure member 51 .

[0090] Furthermore, combined with Fig.13 The micro vacuum pump 200 is also provided with a diaphragm 60 clamped between the pump cover 50 and the upper valve seat 40. The vacuum valve 4 and the back pressure member 51 are integrated on the diaphragm 60 to reduce the number of components and assembly cost of the micro vacuum pump 200.

[0091] The above embodiments are only for illustrating the technical concept and features of the present application, and their purpose is to enable people familiar with the technology to understand the content of the present application and implement it accordingly, and they cannot be used to limit the protection scope of the present application. Any equivalent changes or modifications made according to the spirit of the present application should be included in the protection scope of the present application.

Claims

1. A miniature vacuum pump with integrated pump and valve, characterized in that: include: The pump body has a fluid inlet for fluid to enter, a vacuum port for fluid to enter, and a fluid outlet for fluid to flow out, wherein the fluid inlet is fluidically connected to the vacuum port; A pumping component is installed in the pump body, the pumping component or / and the pump body form a pump cavity, the fluid inlet is fluidly connected to the pump cavity to form an inflow channel, and the pump cavity fluid is fluidly connected to the fluid outlet to form an outflow channel; A power component, used to drive the pumping component; A back pressure mechanism, arranged on the outflow channel and comprising a back pressure member, a back pressure section located on the outflow channel is formed between the pump chamber and the back pressure member, and the back pressure member is configured to maintain the fluid pressure of the back pressure section when the pumping member is in operation; as well as a valve mechanism including a vacuum valve, wherein the vacuum valve has an off position for shutting off fluid communication between the fluid inlet and the vacuum port and a communication position for allowing fluid communication between the fluid inlet and the vacuum port; Wherein, the vacuum valve fluid is connected to the back pressure section, and when the pumping component is activated, the vacuum valve can be switched from the connected position to the shut-off position and maintained at the shut-off position under the action of the fluid pressure of the back pressure section.

2. The micro vacuum pump according to claim 1, characterized in that: The back pressure member is a valve fixedly mounted on the outflow channel and having an opening pressure.

3. The micro vacuum pump according to claim 2, characterized in that: The back pressure mechanism further comprises a back pressure valve seat fixedly mounted on the outflow channel, and the back pressure valve seat is provided with a plurality of openings for fluid communication with the back pressure section.

4. The micro vacuum pump according to claim 3, characterized in that: The back-pressure component is constructed as a diaphragm valve that bends radially inward and toward the back-pressure valve seat, and the back-pressure component is annular; when the back-pressure component is closed, the back-pressure component and the back-pressure valve seat jointly define an annular back-pressure cavity, and the plurality of opening fluids are connected to the back-pressure cavity.

5. The micro vacuum pump according to claim 4, characterized in that: The back pressure valve seat is provided with a pressure relief hole which fluidly connects the back pressure section and the fluid outlet, and the pressure relief hole is independent of the back pressure chamber; when the back pressure component is closed, the fluid in the back pressure section can flow to the fluid outlet through the pressure relief hole.

6. The micro vacuum pump according to claim 5, characterized in that: The inner diameter of the pressure relief hole is in the range of 0.2-0.6 mm.

7. The micro vacuum pump according to claim 4, characterized in that: The back pressure mechanism further comprises a flow blocking member located between the back pressure valve seat and the fluid outlet, and the flow blocking member is a porous structure that allows fluid to pass through.

8. The micro vacuum pump according to claim 7, characterized in that: The flow blocking member is installed on a side of the back pressure member away from the back pressure valve seat and limits the maximum opening of the back pressure member.

9. The micro vacuum pump according to claim 2, characterized in that: The back pressure piece is composed of a closable multi-petal elastic sheet.

10. The micro vacuum pump according to claim 1, characterized in that: The back pressure piece is a porous structure that allows fluid to pass through, and the back pressure piece is fixedly installed on the outflow channel.

11. The micro vacuum pump according to claim 1, characterized in that: The back pressure mechanism further comprises a support seat, and a micro-pressure reduction channel is formed between the back pressure member and the support seat.

12. The micro vacuum pump according to any one of claims 1 to 11, characterized in that: The micro vacuum pump is a diaphragm vacuum pump.

13. The micro vacuum pump according to claim 12, characterized in that: The pump body includes a motor seat, a diaphragm seat, a lower valve seat, an upper valve seat and a pump cover which are arranged in sequence from bottom to top. The motor seat defines a transmission cavity. The micro vacuum pump also includes a transmission component arranged in the transmission cavity and used to realize the transmission connection between the power component and the pumping component.

14. The micro vacuum pump according to claim 13, characterized in that: The fluid inlet, the transmission chamber and the pump chamber are fluidically connected in sequence to form the inflow channel.

15. The micro vacuum pump according to claim 13, characterized in that: The back pressure section is an exhaust cavity formed between the upper valve seat and the lower valve seat.

16. The micro vacuum pump according to claim 15, characterized in that: The pump cover and the upper valve seat together form a vacuum chamber, the vacuum valve is arranged in the vacuum chamber and divides the vacuum chamber into an upper chamber and a lower chamber that are independent of each other, the upper chamber is fluidically connected to the fluid inlet and the vacuum port, and the lower chamber is fluidically connected to the exhaust chamber.

17. The micro vacuum pump according to claim 13, characterized in that: It also includes a diaphragm made of flexible material, the diaphragm is clamped between the upper valve seat and the pump cover, and the vacuum valve and the back pressure component are integrated on the diaphragm.

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