Cooling device and integrated assembly

Abstract

The embodiment of the invention discloses a cooling device and an integrated assembly, and the cooling device comprises a shell, a refrigerant supply unit and a pressure control unit. A sealed cavity is formed in the shell, the shell is used for installing a to-be-cooled device, and the to-be-cooled device can be an optical lens, a chip, a battery, a processor, a server, a precise component in a large science device and the like. The to-be-cooled device is provided with at least one to-be-cooled face, and the to-be-cooled face can be located in the sealed cavity. The refrigerant supply unit is used for supplying a refrigerant into the sealed cavity, and the refrigerant can be water or other aqueous solutions containing specific components or the like. The pressure control unit is communicated with the sealing cavity and used for adjusting the pressure in the sealing cavity to be smaller than or equal to the flash evaporation pressure of the refrigerant, so that flash evaporation cooling is achieved, and the refrigeration efficiency can be improved. The shell is further provided with a refrigerant outlet part which is used for discharging gaseous refrigerants, and the refrigerants entering the shell can continue to be subjected to flash evaporation in the follow-up process.

Description

Technical Field

[0001] The present application relates to the technical field of cooling and heat dissipation, and in particular to a cooling device and an integrated component. Background Art

[0002] With the continuous development of integrated technology, the performance of various devices is constantly improving, while the power consumption density is also increasing, resulting in increasingly serious heat dissipation problems.

[0003] In particular, high-power chips, precision components with continuous heat input, and reflectors used in high-power laser equipment generate significant heat. If the heat cannot be dissipated in time, it will seriously affect the normal use of these components and threaten the operational stability and safety of the entire system. Taking the reflectors used in high-power laser equipment as an example, in the relevant technology, the reflectors are mainly convectively cooled by circulating media in the form of air, water, etc., and the heat dissipation capacity is relatively limited, which seriously restricts the development and application of high-power laser equipment.

[0004] Therefore, how to provide a solution to overcome or alleviate the above-mentioned defects is still a technical problem that needs to be solved urgently by those skilled in the art. Summary of the invention

[0005] An embodiment of the present application provides a cooling device and an integrated component. The cooling device at least uses a refrigerant flash phase change method to cool the device to be cooled, has better cooling performance, and can meet the heat dissipation requirements of the device to be cooled with high power consumption density.

[0006] An embodiment of the present application provides a cooling device, including a shell, a refrigerant supply unit and a pressure control unit. A sealed chamber is provided in the shell, and the shell is used to install a device to be cooled, and the device to be cooled may be, for example, an optical lens, a chip, a battery, a processor, a server, a precision component in a large scientific device, etc. The device to be cooled has at least one surface to be cooled, and the surface to be cooled can be located in the sealed chamber. The refrigerant supply unit is used to provide a refrigerant into the sealed chamber, and the refrigerant may be, for example, water, or other aqueous solutions containing specific components. The pressure control unit is connected to the sealed chamber, and is used to adjust the pressure in the sealed chamber to be less than or equal to the flash pressure of the refrigerant. The shell is also provided with a refrigerant outlet.

[0007] In the above scheme, the refrigerant provided by the refrigerant supply unit can undergo flash evaporation phase change after entering the sealed chamber. Compared with the convection heat dissipation in the related art, the flash evaporation phase change of the refrigerant can absorb more heat, and the heat flux density can reach 400W / cm 2, the upper limit of the cooling capacity is higher, and the cooling device can be cooled more efficiently to meet the heat dissipation requirements of the cooling device with high power density. After cooling, the gaseous refrigerant can be discharged from the shell from the refrigerant outlet to control the amount of gaseous refrigerant in the shell, which is conducive to the subsequent flash evaporation of the refrigerant entering the shell.

[0008] Taking the device to be cooled as an optical lens used in high-power laser equipment as an example, the above solution can improve the heat dissipation performance of the optical lens, which is beneficial to the development and application of high-power laser equipment.

[0009] In some optional embodiments, a shell wall of the shell is provided with a mounting hole, and the mounting hole is used to mount the device to be cooled. The device to be cooled also has at least one working surface, and the working surface can be exposed to the outside of the shell.

[0010] With such an arrangement, the working surface and the surface to be cooled can be effectively isolated, and the working environment of the working surface and the internal environment of the sealed chamber will not affect each other, which is more conducive to ensuring the normal operation of the device to be cooled, and is especially suitable for use with devices to be cooled that need to work in a specific environment. Still taking the device to be cooled as a reflector used in a laser device as an example, the working surface exposed outside the shell can be used to receive incident light emitted by a laser or other optical device (such as a reflector, lens, etc. at other locations) to facilitate the use with the laser or other optical devices. The working environment of the working surface can be a vacuum environment, or some specific atmosphere, etc.

[0011] It should be understood that in addition to the above-mentioned embodiments, an embodiment in which the device to be cooled is entirely located inside the shell may also be adopted. In this case, the sealed chamber may be provided by the shell alone, and the shell may isolate and protect the device to be cooled, thereby reducing the interference of external dust and other impurities with the device to be cooled.

[0012] In some optional embodiments, the cooling device further comprises a fixed clamping unit. The fixed clamping unit comprises a clamping module, and the clamping module is inserted into the mounting hole. The device to be cooled can be sealed and assembled in the clamping module, and the clamping module is provided with an exposure hole, and the exposure hole is used to expose the working surface.

[0013] Under this implementation method, the device to be cooled can be indirectly assembled through the fixed clamping unit and the shell. There is no need for a matching design between the external contour of the device to be cooled and the internal contour of the mounting hole. The mounting hole can have a variety of structural forms and the degree of freedom in design can be higher. At the same time, it can also reduce the direct wear between the device to be cooled and the shell, which is more conducive to protecting the device to be cooled and the shell. In addition, the fixed clamping unit can also adjust the posture of the device to be cooled, which can better meet the use requirements of the device to be cooled.

[0014] In some optional embodiments, the clamping module includes an annular mounting plate and an annular clamping plate. The annular mounting plate is inserted into the mounting hole, and the annular clamping plate is sealed and assembled on the annular mounting plate. The annular clamping plate is used to seal and assemble the device to be cooled, and the exposed hole at least includes the center hole of the annular mounting plate.

[0015] Specifically, a flexible seal can be provided between the annular mounting plate and the annular clamping plate. The flexible seal can be, for example, a sealing ring made of a material with certain elastic properties such as rubber, latex, or plastic, etc., to ensure the sealing performance between the annular mounting plate and the annular clamping plate. The annular mounting plate and the annular clamping plate can be connected by a connector, which can be a screw, etc., and the connector can be located radially outside the flexible seal to avoid affecting the sealing between the annular clamping plate and the annular mounting plate. In addition, the annular mounting plate and the annular clamping plate can also be sealed by gluing, etc., so that the connection structure between the two can be simpler.

[0016] The connection method between the device to be cooled and the annular clamping plate can refer to the annular mounting plate and the annular clamping plate mentioned above.

[0017] In some optional embodiments, the annular mounting plate includes an annular body and a first protrusion, and the first protrusion is located on the outer peripheral wall of the annular body. Correspondingly, the mounting hole includes a base hole portion and a reaming portion, and the reaming portion is formed by the inner hole wall of the base hole portion protruding outward. The outer contour of the annular body matches the inner contour of the base hole portion, and the outer contour of the first protrusion matches the inner contour of the reaming portion. The annular body is inserted into the base hole portion, and the first protrusion is inserted into the reaming portion. Through the cooperation of the first protrusion and the reaming portion, the stress generated by the annular mounting plate and the shell after connection can be effectively reduced, which is conducive to ensuring the connection reliability and stability of the annular mounting plate and the shell.

[0018] The shapes of the outer contour of the first protrusion and the inner contour of the reaming portion are not limited here. In practical applications, those skilled in the art can set them according to specific needs. For example, both can be dovetail-shaped. In addition, the number of the first protrusion and the reaming portion is not limited either. It can be determined in combination with actual use needs. It can be understood that the more the number of the first protrusion and the reaming portion, the better the effect of reducing stress, and the fewer the number of the first protrusion and the reaming portion, the simpler the structure.

[0019] In some optional embodiments, the annular mounting plate is further provided with a threaded portion, and the clamping module further includes an adjusting component, which is threadedly connected to the threaded portion and can abut against the annular clamping plate.

[0020] In specific practice, by adjusting the thread matching size of the adjusting component and the threaded portion, the annular clamping plate can be driven to move relative to the annular mounting plate, so that the installation posture of the device to be cooled in the housing can be fine-tuned to better achieve the matching between the device to be cooled and the external device. Still taking the device to be cooled as a reflector used in a laser device as an example, by fine-tuning the installation posture of the reflector, the reflector can be better connected to the laser or other optical devices.

[0021] The threaded portion may include a second protrusion disposed on the inner peripheral wall of the annular body, and the second protrusion may be provided with a threaded hole for cooperation with the adjustment component. The second protrusion may directly tap the threaded hole; or the second protrusion may be provided with an inner hole, and a threaded member may be provided in the inner hole, and the threaded member may be a member with a threaded hole in the form of a nut, etc., and then the threaded member and the adjustment component are threadedly matched. Of course, the threaded portion may also be provided on the annular body, which is also feasible.

[0022] In some optional embodiments, the fixing clamping unit further includes a flexible support module, and the flexible support module is used to support the device to be cooled. The flexible support module is used to support the device to be cooled to improve the stability of the device to be cooled in the housing.

[0023] In some optional embodiments, the fixed clamping unit also includes a socket module, the socket module outer shell is assembled on the clamping module, the socket module has a first contour surface, the shape of the first contour surface is consistent with the shape of the inner wall surface of the shell, and the socket module is fitted with the inner wall surface of the shell through the first contour surface to improve the installation stability of the socket module in the shell.

[0024] In some optional embodiments, the fixed clamping unit further includes a support base, which is at least used to support the clamping module to further improve the stability of the fixed clamping unit.

[0025] In some optional embodiments, the support seat is provided with a circulation channel, which is used to realize the flow of refrigerant inside the shell, which is beneficial to improving the uniformity of the distribution of the refrigerant in the shell, and can effectively avoid the accumulation of refrigerant in local areas of the shell, thereby improving the uniformity of refrigeration and heat dissipation; and / or, a heating device is installed in the support seat, and the heating device is used to heat the refrigerant inside the shell, thereby assisting the evaporation of the refrigerant; and / or, the support seat has a receiving surface for receiving the refrigerant, the receiving surface and the inner wall surface of the shell are abutted, and the receiving surface is lower than the opening of the refrigerant outlet on the shell in the height direction. In this way, the liquid refrigerant falling on the receiving surface is not easy to flow out directly from the refrigerant outlet, and can only flow out from the refrigerant outlet when evaporated into a gaseous state, so that the refrigeration effect of the refrigerant can be more fully exerted.

[0026] In some optional embodiments, the refrigerant supply unit includes a spray module, and the spray module includes a nozzle component, and the nozzle component is used to spray the refrigerant onto the surface to be cooled. In this way, the refrigerant can also dissipate heat for the device to be cooled by contact heat dissipation, and the heat dissipation form of the refrigerant for the device to be cooled is more diverse, and the refrigeration effect of the refrigerant can also be more fully exerted.

[0027] In some optional embodiments, the injection module also includes a nozzle fixing bracket, the nozzle component is provided with a clamping portion, the nozzle fixing bracket is provided with a clamping portion, and the nozzle component can be assembled on the clamping portion through the clamping portion; the nozzle fixing bracket includes a base and a cover plate, the cover plate is detachably assembled on the base, the nozzle component is located between the cover plate and the base, and at least one of the base and the cover plate is provided with a clamping portion.

[0028] By adopting this scheme, the cover plate and the base can be conveniently connected and disassembled. When the cover plate and the base are in a connected state, the clamping part and the clamping part can be connected, so that the nozzle component can be clamped and assembled on the nozzle fixing frame. When the cover plate and the base are in a separated state, the nozzle component and the nozzle fixing frame can be separated, so that the installation position of the nozzle component can be conveniently adjusted; specifically, in the embodiment of the present application, the number of at least one of the clamping part and the clamping part can be multiple, when the number of the clamping parts is multiple, each clamping part can be distributed along the axial interval of the nozzle component, when the number of the clamping parts is multiple, each clamping part can be distributed along the axial interval of the nozzle component, when the cover plate and the base are separated, by adjusting different clamping parts and different clamping parts to cooperate, the installation position of the nozzle component on the nozzle fixing frame can be adjusted, so that the installation position of the nozzle component relative to the device to be cooled can be adjusted, so as to adjust the cooling performance provided by the nozzle component, which can better meet the cooling of the device to be cooled.

[0029] In some optional embodiments, the nozzle component includes a nozzle and a fixed sleeve, the nozzle is mounted on the fixed sleeve, and the fixed sleeve is provided with a clamping portion, so that the nozzle can be avoided from being processed. The connection method between the nozzle and the fixed sleeve includes but is not limited to welding, threaded connection, screw connection, clamping, riveting, bonding, interference fit, etc., as long as the reliability of the connection can be guaranteed.

[0030] In some optional embodiments, the injection module also includes a nozzle fixing frame and a driving component. The nozzle component is installed on the nozzle fixing frame. The driving component is connected to the nozzle component and is used to adjust the axial position of the nozzle component relative to the nozzle fixing frame. In this way, online adjustment of the installation position of the nozzle component can be achieved, and the adjustment is more convenient.

[0031] In some optional embodiments, the injection module includes a plurality of nozzle components, each of which is equipped with a flow control element; or, the injection module includes a plurality of nozzle components, the refrigerant supply unit also includes a liquid separation module, and the liquid separation module is also provided with a topological flow channel, the topological flow channel has a flow channel opening consistent with the number of nozzle components, and each flow channel opening is connected to each nozzle component one by one. This embodiment can adjust the flow rate of each nozzle component, and can better adapt to the non-uniform thermal field on the device to be cooled, such as the device to be cooled under the heating of Gaussian irregular heat source.

[0032] In some optional embodiments, there are multiple injection modules and multiple surfaces to be cooled, and each surface to be cooled is provided with at least one injection module, so that each cooling surface can have at least one injection module for injection cooling, which is beneficial to ensure the cooling and heat dissipation effect for each surface to be cooled.

[0033] In some optional embodiments, the refrigerant supply unit further includes a cold source, which is located outside the shell to avoid occupying the internal space of the shell, which can effectively reduce the size of the shell to reduce the control difficulty of the pressure control unit, and also avoid the influence of the internal environment of the sealed chamber on the cold source. The shell is provided with a refrigerant inlet, the cold source is connected to the refrigerant inlet, the injection module is located inside the shell, and the injection module is also connected to the refrigerant inlet.

[0034] In some optional embodiments, the cooling device provided in the embodiments of the present application also includes a temperature detection component, which is used to detect the surface temperature of the surface to be cooled, so as to detect the state of the device to be cooled, and can cooperate to adjust the flow rate and installation position of each nozzle component.

[0035] In some optional embodiments, the housing is provided with an observation window for observing the conditions inside the housing. The observation window may be located on the cylinder of the housing or on the end cover of the housing.

[0036] In a second aspect, an embodiment of the present application further provides an integrated component, including a functional device and a cooling device. The cooling device may specifically be the cooling device involved in any one of the aforementioned embodiments, and the functional device is a device to be cooled.

[0037] In the embodiment of the present application, the cooling device at least uses the refrigerant flash evaporation phase change method to cool and dissipate heat from the functional device, which has better heat dissipation efficiency and greater heat flux density, and can greatly increase the upper limit of the cooling capacity, thereby improving the cooling and heat dissipation effect of the functional device, so as to utilize the application of cooling devices with high power consumption density. In addition, the above-mentioned integrated component can integrate the functional device and the cooling device, so that the two are connected as one, and the device has a higher degree of integration.

[0038] In some optional implementations, the functional device is any one of an optical lens, a chip, a battery, a processor, and a server. Taking the functional device as an optical lens as an example, the optical lens can be a reflector in a laser device. In this case, the integrated component provided in the embodiment of the present application can be a reflector component. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] Figure 1 A schematic diagram of a structure of an implementation method of an integrated component provided in an embodiment of the present application;

[0040] Figure 2 for Figure 1 Schematic diagram of the structure from another perspective;

[0041] Figure 3 for Figure 1 A schematic diagram of the structure of the middle shell;

[0042] Figure 4 A structural schematic diagram of an implementation method of a fixed clamping unit;

[0043] Figure 5 for Figure 4 A cross-sectional view of the clamping module, the flexible support module and the device to be cooled;

[0044] Figure 6 A structural schematic diagram of another implementation method of fixing the clamping unit;

[0045] Figure 7 for Figure 5 A cross-sectional view of the clamping module, the flexible support module and the device to be cooled;

[0046] Figure 8 To adopt Figure 6 A schematic diagram of the structure of the integrated components of the fixed clamping unit;

[0047] Fig. 9 A structural schematic diagram of an implementation method of a refrigerant supply unit;

[0048] Fig.10 for Fig. 9 A schematic diagram of the structure of a method for implementing the liquid separation module;

[0049] Fig.11 for Fig. 9 A schematic diagram of the structure of another implementation of the liquid separation module.

[0050] Fig.12 for Fig. 9 The schematic diagram of the structure of the injection module;

[0051] Fig.13 for Fig.12The connection structure diagram of the nozzle component, the nozzle fixing frame and the liquid dispensing joint;

[0052] Fig.14 A diagram showing the relative positions of the injection module and another device to be cooled;

[0053] Fig.15 for Fig.14 A schematic diagram of the structure of an injection module;

[0054] The following are the descriptions of the reference numerals:

[0055] 100 shell, 110 cylinder, 110a connecting flange, 110b supporting portion, 110b-1 supporting surface, 111 refrigerant outlet, 112 refrigerant inlet, 113 pressure regulating port, 114 signal transmission port, 115 mounting hole, 115a base hole portion, 115b expansion hole portion, 116 pressure limiting valve, 120 end cover, 130 observation window, 131 frame, 132 lens;

[0056] 200 refrigerant supply unit, 210 injection module, 211 nozzle component, 211a nozzle, 211b fixed sleeve, 211b-1 clamping part, 212 nozzle fixing frame, 212a base, 212a-1 substrate, 212a-2 end plate, 212b cover plate, 212b-1 clamping part, 220 cold source, 230 diverter, 240 flow regulating valve, 250 pressure sensor, 260 liquid separation module, 261 liquid separation part, 261a equal diversion channel, 261b topological channel, 262 liquid separation joint;

[0057] 300 pressure control unit;

[0058] 400 fixed clamping unit, 410 clamping module, 410a exposure hole, 411 annular mounting plate, 411a annular body, 411b first protrusion, 411c threaded portion, 411c-1 second protrusion, 411c-2 threaded member, 412 annular clamping plate, 413 adjustment component, 414 flexible sealing member, 415 connecting member, 420 flexible support module, 430 sleeve module, 431 first contour surface, 440 support seat, 441 circulation channel, 442 second contour surface, 443 receiving surface, 450 bracket module;

[0059] A device to be cooled, A1 surface to be cooled, A2 working surface;

[0060] BIncident light. DETAILED DESCRIPTION

[0061] In order to enable those skilled in the art to better understand the technical solution of the present application, the present application is further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0062] In the description of the embodiments of the present application, the terms "first" and "second" are used for descriptive purposes only and are not to be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features.

[0063] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly stipulated and limited, the terms "installed", "connected" and "connected" should be understood in a broad sense. For example, "connection" can be a detachable connection or a non-detachable connection; it can be a direct connection or an indirect connection through an intermediate medium.

[0064] The directional terms mentioned in the embodiments of the present application, such as "inside", "outside", etc., are only references to the directions of the drawings. Therefore, the directional terms used are for better and clearer explanation and understanding of the embodiments of the present application, rather than indicating or implying that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the embodiments of the present application.

[0065] In the description of the embodiments of the present application, the term "plurality" refers to two or more than two. Moreover, when "plurality" is used to indicate the number of different components, it does not indicate the relationship between the components in terms of quantity.

[0066] In the description of the embodiments of the present application, the terms "include", "comprises" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also includes other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the sentence "comprises a ..." does not exclude the presence of other identical elements in the process, method, article or device including the element.

[0067] In the description of the embodiments of the present application, "and / or" is only a description of the association relationship of the associated objects, indicating that there may be three relationships. For example, M and / or N can represent: M exists alone, M and N exist at the same time, and N exists alone. In addition, the character " / " in this article generally indicates that the associated objects before and after are in an "or" relationship.

[0068] The embodiment of the present application provides an integrated component, which includes a functional device and a cooling device, and the functional device and the cooling device are integrated. The cooling device can cool and dissipate heat for the functional device, and can control the temperature of the functional device, so that the temperature of the functional device can be controlled within an appropriate range to ensure the working performance of the functional device.

[0069] The above-mentioned functional devices may be, for example, optical lenses, chips, batteries, processors, servers, precision components in large scientific devices, etc. The above-mentioned optical lenses may be, for example, reflectors in laser equipment, etc., and their materials include but are not limited to silicon, brass, etc. The above-mentioned chips may be, for example, high-performance base station chips, central processing unit (CPU) chips, etc. The above-mentioned batteries may be, for example, battery packs used in cars or servers, etc. The above-mentioned processors may be, for example, CPUs, graphics processing units (GPUs), field programmable gate arrays (FPGAs), application specific integrated circuits (ASICs), etc. The above-mentioned servers may be, for example, desktop servers, rack servers, cabinet servers, blade servers, etc. The above-mentioned large scientific devices may be, for example, positive and negative ion colliders, aviation remote sensing systems, etc.

[0070] It should be understood that the types of functional devices are not limited to the above description. In fact, any device that has cooling and heat dissipation requirements and can be integrated with the cooling device provided in the embodiment of the present application can be used as the above functional device.

[0071] In the embodiment of the present application, the functional device is a heat-generating device, also referred to as a device to be cooled.

[0072] Please refer to Figure 1-Figure 5 , Figure 1 A schematic diagram of a structure of an implementation method of an integrated component provided in an embodiment of the present application. Figure 2 for Figure 1 A schematic diagram of the structure from another perspective. Figure 3 for Figure 1 Schematic diagram of the structure of the middle shell, Figure 4 is a structural schematic diagram of a method for implementing a fixed clamping unit, Figure 5 for Figure 4 Cross-sectional view of the clamping module, the flexible support module and the device to be cooled.

[0073] like Figure 1-Figure 3 As shown, in the embodiment of the present application, the cooling device includes a shell 100 , a refrigerant supply unit and a pressure control unit 300 .

[0074] The housing 100 is the structural basis of the cooling device, and is used to provide a sealed chamber (not shown in the figure) for cooling the device A to be cooled.

[0075] The housing 100 may include a cylinder 110 and an end cap 120. The cylinder 110 may be a circular cylinder, a square cylinder or other special-shaped cylinders, and both ends of the cylinder 110 may be provided with openings (not shown in the figure) to facilitate the device A to be cooled to enter and exit the housing 100. The end caps 120 are located at both ends of the cylinder 110 and may be connected to the cylinder 110. The end caps 120 can block the above-mentioned openings to cooperate with the cylinder 110 to construct the aforementioned sealed chamber.

[0076] The two end covers 120 and the cylinder 110 can be connected in a relatively easy-to-detach connection mode, so that the end covers 120 can be easily disassembled and assembled to facilitate maintenance and adjustment of the equipment. The relatively easy-to-detach connection mode can be, for example, a clamping connection or a threaded connection, and the threaded connection can be, for example, a bolt, a screw, or a stud. In the implementation mode of the attached drawings, as shown in FIG. Figure 1-Figure 3 As shown, both ends of the cylinder 110 may be provided with connection flanges 110a radially protruding from the outer wall surface of the cylinder 110, and the end cover 120 may be connected to the connection flange 110a by means of a threaded connector.

[0077] In addition, one of the two end caps 120 can be connected to the cylinder 110 in a relatively easy-to-detach connection mode, while the other can be connected in a relatively difficult-to-detach connection mode. This is also feasible. The relatively difficult-to-detach connection mode can be, for example, welding, which is more conducive to ensuring the reliability and sealing of the connection.

[0078] The cylinder 110 may also be provided with a support portion 110b, and the support portion 110b has a relatively flat support surface 110b-1. The housing 100 may be supported and assembled on the mounting surface of the integrated component by the support surface 110b-1 of the support portion 110b; the mounting surface may be, for example, the ground, or the mounting surface may be, for example, the surface of some support table. The number of support portions 110b may be one or more, and may be specifically set according to the needs of use, as long as the stability of the support assembly of the housing 100 is guaranteed. In the implementation method of the attached drawings, as shown in FIG. Figure 1-Figure 3 As shown, the support portion 110b and the connecting flange 110a can be an integrated structure. In this implementation, the parts of the cylinder 110 are relatively few, and the processing and preparation of the cylinder 110 can be relatively easy. In some other implementations of the embodiments of the present application, the support portion 110b can also be an independently arranged component. In this case, the support portion 110b can be prepared separately and then assembled with the cylinder 110. In this implementation, the installation position of the support portion 110b can have more options, and the installation freedom can be higher.

[0079] The cylinder 110 is also provided with a signal transmission port 114 for realizing signal transmission between the device in the sealed chamber and the external device; the signal transmission port 114 can be an interface device in the form of an aviation plug, etc. It should be understood that the signal transmission port 114 can also be provided on the end cover 120.

[0080] In some implementations, the housing 100 may also be configured with an observation window 130 , which may include a lens 132 , through which a user may observe the internal conditions of the sealed chamber to determine the operating status of the cooling device.

[0081] The observation window 130 can be installed on the cylinder 110. Alternatively, the observation window 130 can also be installed on the end cover 120. For details of this implementation, please refer to Figure 1-Figure 3 The observation window 130 may further include a frame 131, which may be roughly annular, and a lens 132 may be installed on the frame 131. The observation window 130 may be connected to the end cover 120 through the frame 131. Specific connection methods include but are not limited to welding, threaded connection, threaded connection, clamping, riveting, bonding, etc., as long as the reliability of the connection can be guaranteed.

[0082] The refrigerant supply unit is used to provide refrigerant into the sealed chamber. The refrigerant may be, for example, water or other aqueous solutions containing specific components.

[0083] The housing 100 is provided with a pressure regulating port 113. The pressure control unit 300 can be a vacuum source or an exhaust fan, etc. The pressure control unit 300 can be connected to the sealed chamber through the pressure regulating port 113, and is used to adjust the pressure in the sealed chamber to be less than or equal to the flash pressure of the refrigerant. In this way, the refrigerant can undergo a flash phase change after entering the sealed chamber. Compared with the convective heat dissipation in the related art, the flash phase change of the refrigerant can absorb more heat, and the heat flux density can reach 400W / cm 2 , the upper limit of the cooling capacity is higher, and the cooling device A can be cooled more efficiently to meet the heat dissipation requirements of the cooling device A with high power consumption density.

[0084] The above-mentioned flash pressure specifically refers to the pressure at which the refrigerant will flash, and its specific value is related to the type, saturation and temperature of the refrigerant, and is not limited here. It should be understood that the lower the pressure in the sealed chamber, the more obvious the flash phenomenon is, and the more the refrigerant undergoes flash phase change after entering the sealed chamber.

[0085] Depending on the pressure in the sealed chamber, the amount of refrigerant that undergoes flash phase change will also vary. When part of the refrigerant undergoes flash phase change, part of the refrigerant can become gaseous, and the gaseous part will impact the remaining liquid part, which can be broken and atomized to form a flash spray. The droplets in the flash spray are relatively small and less affected by gravity. They can reach the specified location along the specified path. There are no excessive requirements for the installation posture of the device A to be cooled, and the device A to be cooled can be better cooled and dissipated.

[0086] The shell 100 may also be provided with a refrigerant outlet 111. After cooling, the gaseous refrigerant may be discharged from the shell 100 through the refrigerant outlet 111, so as to control the amount of the gaseous refrigerant in the shell 100, which is beneficial for the refrigerant subsequently entering the shell 100 to continue flash evaporation. The refrigerant outlet 111 may be installed on the cylinder 110 or on the end cover 120.

[0087] In some implementations, the cooling device provided in the embodiment of the present application may further include a refrigerant recovery unit (not shown in the figure), which may be connected to the refrigerant outlet portion 111 for recycling the refrigerant leaving the shell 100, thereby reducing the waste of refrigerant. In specific practice, the refrigerant recovery unit may also be connected to the refrigerant supply unit, and the recovered refrigerant may be provided to the shell 100 by the refrigerant supply unit after it becomes liquid again, so as to realize the recycling of the refrigerant. A filter device may be provided in the refrigerant supply unit or the refrigerant recovery unit for filtering the refrigerant in the circulation process to filter out possible solid particles, thereby improving the smoothness of the refrigerant circulation.

[0088] Of course, in some other implementations of the embodiment of the present application, the refrigerant recovery unit may not exist. In this case, the refrigerant leaving the shell 100 may also be directly discharged, which is also feasible.

[0089] The housing 100 may also be provided with a pressure limiting valve 116 , which is used to control the pressure in the sealed chamber. The pressure limiting valve 116 may be installed on the cylinder 110 or on the end cover 120 .

[0090] During specific installation, the device A to be cooled may be partially located inside the shell 100. In this case, the sealed chamber may be formed by enclosing the shell 100 and the device A to be cooled, and a part of the device A to be cooled may be exposed outside the shell 100; in this way, the interaction between the device A to be cooled and external equipment can be facilitated. Of course, the device A to be cooled may also be located as a whole inside the shell 100. In this case, the sealed chamber may be provided by the shell 100 alone, and the shell 100 may isolate and protect the device A to be cooled, thereby reducing the interference of external dust and other impurities on the device A to be cooled. In the following description, the embodiments of the present application are mainly described by taking the example that the device A to be cooled is partially located inside the shell 100.

[0091] In detail, Figure 1-Figure 5 As shown, the housing 100 may be provided with a mounting hole 115, which may be located in the cylinder 110 or in the end cover 120; the device A to be cooled may be mounted in the mounting hole 115, and the device A to be cooled may have a cooling surface A1 and a working surface A2, the cooling surface A1 may be located in the sealed chamber, and the working surface A2 may be exposed outside the housing 100; this design scheme can effectively isolate the working surface A2 from the cooling surface A1, and the working environment of the working surface A2 and the internal environment of the sealed chamber will not affect each other, which is more conducive to ensuring the normal operation of the device A to be cooled, and is particularly suitable for the use of the device A to be cooled that needs to work in a specific environment. Taking the device A to be cooled as a reflector used in a laser device as an example, the working surface A2 exposed outside the housing 100 can be used to receive incident light emitted by a laser or other optical devices (such as reflectors, lenses, etc. at other positions), so as to facilitate the use with the laser or other optical devices, and the working environment of the working surface A2 can be a vacuum environment, or some specific atmospheres, etc.

[0092] In some implementations, the device A to be cooled can be directly mounted in the mounting hole 115. Specifically, the outer contour of the device A to be cooled and the inner contour of the mounting hole 115 can be set to match each other, so that the device A to be cooled can be directly embedded in the mounting hole 115, and the mounting structure of the device A to be cooled can be relatively simple.

[0093] It should be noted that the matching between the contours in the embodiment of the present application means that the shapes and sizes of the two contours are basically consistent, so that the devices with these two contours can be plugged in relatively reliably.

[0094] In other implementations, such as Figure 4 and Figure 5As shown, the cooling device provided in the embodiment of the present application may also include a fixed clamping unit 400, and the fixed clamping unit 400 may include a clamping module 410, and the clamping module 410 may be inserted into the mounting hole 115; the device A to be cooled may be sealed and assembled in the clamping module 410 to ensure the sealing between the device A to be cooled and the clamping module 410; the clamping module 410 may be provided with an exposure hole 410a, and the working surface A2 of the device A to be cooled may be exposed through the exposure hole 410a. In this implementation mode, the device A to be cooled may be indirectly assembled through the fixed clamping unit 400 and the housing 100, and there is no need to match the outer contour of the device A to be cooled and the inner contour of the mounting hole 115. The mounting hole 115 may have more structural forms, and the degree of freedom of design may be higher; at the same time, the direct wear between the device A to be cooled and the housing 100 may be reduced, which is more conducive to protecting the device A to be cooled and the housing 100; in addition, the fixed clamping unit 400 may also adjust the posture of the device A to be cooled, which may better meet the use requirements of the device A to be cooled.

[0095] The clamping module 410 may include an annular mounting plate 411 and an annular clamping plate 412 .

[0096] The annular mounting plate 411 can be inserted into the mounting hole 115. In some implementations, Figure 3 and Figure 4 , the annular mounting plate 411 may include an annular body 411a and a first protrusion 411b, the first protrusion 411b may be located on the outer peripheral wall of the annular body 411a, and accordingly, the mounting hole 115 may include a base hole portion 115a and a reaming portion 115b, the reaming portion 115b may be formed by the inner hole wall of the base hole portion 115a protruding outward; the outer contour of the annular body 411a and the inner contour of the base hole portion 115a may match, and the outer contour of the first protrusion 411b and the inner contour of the reaming portion 115b may match; during specific installation, the annular body 411a may be inserted into the base hole portion 115a, and the first protrusion 411b may be inserted into the reaming portion 115b. In this way, through the cooperation of the first protrusion 411b and the reaming portion 115b, the stress generated after the connection between the annular mounting plate 411 and the housing 100 can be effectively reduced, which is conducive to ensuring the connection reliability and stability of the annular mounting plate 411 and the housing 100.

[0097] Here, the embodiment of the present application does not limit the specific shapes of the first protrusion 411b and the expansion hole portion 115b. In practical applications, those skilled in the art can design them in combination with specific usage requirements. Figure 3 and Figure 4In the implementation method, the first protrusion 411b and the reaming portion 115b can both be roughly dovetail-shaped. The dovetail-shaped structural design can improve the combination reliability of the first protrusion 411b and the reaming portion 115b, and is more conducive to reducing the stress between the annular mounting plate 411 and the shell 100.

[0098] Similarly, the embodiment of the present application does not limit the number of first bumps 411b and expansion holes 115b. In practical applications, those skilled in the art can also design them in combination with specific usage requirements. However, it should be noted that the number of first bumps 411b and expansion holes 115b should be consistent, and the positions of each first bump 411b and each expansion hole 115b can correspond one to one, so that each first bump 411b can be inserted into each expansion hole 115b one to one. Figure 3 and Figure 4 In the implementation manner, the number of the first protrusion 411b and the number of the expansion hole portion 115b can be two, and the two first protrusions 411b and the two expansion hole portions 115b can be assembled in a one-to-one correspondence.

[0099] In addition, the embodiment of the present application does not limit the structural shape of the annular body 411a and the base hole portion 115a. In practical applications, those skilled in the art can design it in combination with specific usage requirements. Figure 3 and Figure 4 As shown, the outer contour of the annular body 411a and the inner contour of the base hole portion 115a can be roughly rectangular. In addition, the outer contour of the annular body 411a and the inner contour of the base hole portion 115a can also be set to other shapes, such as circle, rhombus, pentagon or other complex shapes.

[0100] It should be understood that in some other implementations of the embodiment of the present application, the annular mounting plate 411 may also only include the annular body 411a, and accordingly, the mounting hole 115 may also only include the base hole portion 115a, which is also feasible.

[0101] The annular clamping plate 412 can be sealed and assembled on the annular mounting plate 411. Specifically, a flexible seal 414 can be provided between the annular mounting plate 411 and the annular clamping plate 412. The flexible seal 414 can be, for example, a sealing ring made of a material with certain elastic properties such as rubber, latex, and plastic, etc., to ensure the sealing performance between the annular mounting plate 411 and the annular clamping plate 412. The annular mounting plate 411 and the annular clamping plate 412 can be connected by a connector 415, which can be a screw, etc., combined with Figure 5The connecting member 415 may be located radially outside the flexible sealing member 414 to avoid affecting the sealing between the annular clamping plate 412 and the annular mounting plate 411 .

[0102] The device A to be cooled can be sealed and assembled on the annular clamping plate 412. The sealing assembly method between the device A to be cooled and the annular clamping plate 412 can be the aforementioned connector 415+flexible seal 414. Alternatively, a sealant can be used to achieve the sealing and connection between the device A to be cooled and the annular clamping plate 412. Compared with other forms of mechanical connectors, the sealant connection can reduce the stress brought by the clamping module 410 to the device A to be cooled, and can effectively reduce the damage caused by the clamping module 410 to the device A to be cooled. At the same time, it can also avoid setting connection structures in the form of connection holes in the device A to be cooled, which can reduce the damage to the device A to be cooled. The type of sealant can be determined according to needs. For example, the sealant can be a vacuum sealant. The vacuum sealant has good vacuum sealing and pressure resistance, and can achieve the connection between the device A to be cooled and the annular clamping plate 412 under vacuum conditions, so that the cooling device provided in the present application can be used under vacuum conditions.

[0103] The annular mounting plate 411 may also be provided with a threaded portion 411c, and the clamping module 410 may also include an adjusting component 413, which may specifically be a threaded connector in the form of a screw or the like. The adjusting component 413 may be installed on the threaded portion 411c and may abut against the annular clamping plate 412.

[0104] In specific practice, by adjusting the thread matching dimensions of the adjusting component 413 and the threaded portion 411c, the annular clamping plate 412 can be driven to move relative to the annular mounting plate 411, so that the installation posture of the device to be cooled A in the housing 100 can be fine-tuned, so as to better achieve the matching between the device to be cooled A and the external device. Still taking the device to be cooled A as a reflector used in a laser device as an example, by fine-tuning the installation posture of the reflector, the docking of the reflector with the laser or other optical devices can be better achieved. Since a flexible seal 414 is used to seal between the annular mounting plate 411 and the annular clamping plate 412, and the flexible seal 414 has a certain elastic deformation ability, even if the adjusting component 413 drives the annular clamping plate 412 to move relative to the annular mounting plate 411, the flexible seal 414 can still ensure the sealing performance between the annular clamping plate 412 and the annular mounting plate 411.

[0105] Combination Figure 4The threaded portion 411c may include a second protrusion 411c-1 disposed on the inner circumferential wall of the annular body 411a, and the second protrusion 411c-1 may be provided with a threaded hole for mating with the adjustment component 413. The second protrusion 411c-1 may directly tap the threaded hole; or Figure 5 As shown, the second protrusion 411c-1 can be provided with an inner hole (not marked in the figure), and a threaded member 411c-2 can be provided in the inner hole. The threaded member 411c-2 can specifically be a member with a threaded hole in the form of a nut, etc., and then the threaded member 411c-2 and the adjustment member 413 are threadedly matched.

[0106] Of course, the threaded portion 411c may also be provided on the annular body 411a, which is also feasible.

[0107] Combination Figure 5 , the device A to be cooled may include a thin neck and a thick neck, wherein the thin neck may be inserted into the center hole of the annular clamping plate 412, and the thin neck has a working surface A2; the working surface A2 may be flush with the surface of the annular clamping plate 412 facing the annular mounting plate 411, or the thin neck may partially extend into the center hole of the annular mounting plate 411, but the thin neck does not protrude from the center hole of the annular mounting plate 411. In this implementation, the exposure hole 410a may include the center hole of the annular mounting plate 411, and the working surface A2 of the device A to be cooled may be exposed through the exposure hole 410a; in addition, since the thin neck of the device A to be cooled is entirely recessed in the center hole of the annular mounting plate 411, the size of the device A to be cooled may be relatively small. Still taking the device A to be cooled as a reflector applied to a laser device as an example, this implementation can adapt to the situation where the grazing incidence angle is relatively large.

[0108] It should be understood that if the narrow neck is also entirely recessed into the central hole of the annular clamping plate 412 , then the exposed hole 410 a may also include a portion of the central hole of the annular clamping plate 412 .

[0109] In some implementations, the fixed clamping unit 400 may further include a flexible support module 420 , and the flexible support module 420 is used to support the device A to be cooled to improve the stability of the device A to be cooled in the housing 100 .

[0110] The flexible support module 420 can be made of relatively soft engineering plastics to have a certain degree of flexible deformation. In this way, the flexible support module 420 can absorb the position movement of the device A to be cooled in the housing 100 due to gravity and other reasons through its own deformation, which can effectively reduce the damage to the device A to be cooled. At the same time, the flexible support module 420 can play a certain role in heat insulation, which can reduce the direct transfer of heat from the device A to be cooled to other devices in the housing 100, thereby reducing the possibility of thermal damage to other devices in the housing 100.

[0111] The number of the flexible support module 420 can be one or more. When there are more than one, the flexible support modules 420 can be arranged at intervals to support the cooling device A at multiple different positions, thereby improving the reliability and stability of the support; the gaps between adjacent flexible support modules 420 can be used for heat dissipation.

[0112] In some implementations, the fixed clamping unit 400 may further include a sleeve module 430, which may be mounted on the clamping module 410. The sleeve module 430 may have a first contour surface 431, and the shape of the first contour surface 431 may be consistent with the shape of the inner wall surface of the housing 100. During specific installation, the sleeve module 430 may fit the inner wall surface of the housing 100 through the first contour surface 431, so as to improve the installation stability of the sleeve module 430 in the housing 100.

[0113] The shapes of the first contour surface 431 and the inner wall of the housing 100 can be various and are not limited here. Figure 3 and Figure 4 As shown, the barrel 110 of the shell 100 is a circular barrel, and the inner wall surface of the barrel 110 is a cylindrical surface. Accordingly, the first profiling surface 431 can be an arc-shaped cylindrical surface, and the curvature of the arc-shaped cylindrical surface can be consistent with the curvature of the cylindrical surface, so that the first profiling surface 431 can fit the cylindrical surface; or, the inner wall surface of the shell 100 can also be a plane, in which case, the first profiling surface 431 can also be a plane; or, the inner wall surface of the shell 100 can also be other complex surfaces, such as a bent surface formed by a combination of multiple planes, a special-shaped surface formed by a combination of a plane and a curved surface, etc. Correspondingly, the first profiling surface 431 can also adopt the above-mentioned complex surfaces such as the bent surface and the special-shaped surface, as long as the first profiling surface 431 and the inner wall surface of the shell 100 can fit together.

[0114] In some implementations, the fixed clamping unit 400 may further include a support base 440, which is at least used to support the clamping module 410 to further improve the stability of the fixed clamping unit 400. Figure 4The support seat 440 may have a second profiling surface 442, which is similar to the first profiling surface 431, and the shape of the second profiling surface 442 may be consistent with the inner wall surface of the housing 100. During installation, the support seat 440 may be fitted with the inner wall surface of the housing 100 through the second profiling surface 442 to improve the stability of the support seat 440 in the housing 100.

[0115] The support seat 440 may also be provided with at least one circulation channel 441. The circulation channel 441 may be a groove-shaped channel provided on the surface of the support seat 440, or may be a hole-shaped channel provided inside the support seat 440. The circulation channel 441 is used to realize the flow of the refrigerant inside the shell 100, which is conducive to improving the uniformity of the distribution of the refrigerant in the shell 100, and can effectively avoid the accumulation of the refrigerant in a local area in the shell 100.

[0116] A heating device (not shown in the figure) is also installed in the support base 440. The heating device can be, for example, a resistance heating wire, etc., which is used to heat the refrigerant inside the shell 100, thereby assisting the evaporation of the refrigerant.

[0117] The support seat 440 has a receiving surface 443 for receiving liquid refrigerant, and the receiving surface 443 abuts against the inner wall surface of the shell 100, and the receiving surface 443 can be lower than the opening of the refrigerant outlet 111 on the shell 100 in the height direction. In this way, the liquid refrigerant falling on the receiving surface 443 is not easy to flow out directly from the refrigerant outlet 111, and can only flow out from the refrigerant outlet 111 when it evaporates into a gaseous state, so that the refrigeration effect of the refrigerant can be more fully exerted.

[0118] Combination Figure 4 The support base 440 can also support a bracket module 450, which can connect the support base 440 and the sleeve module 430 to improve the structural stability of the entire fixed clamping unit 400. In addition, the bracket module 450 can also be used to support a part of the structure of the refrigerant supply unit 200 located inside the shell 100.

[0119] Please refer to Figure 6-Figure 8 , Figure 6 FIG. 1 is a schematic diagram of another implementation method of fixing the clamping unit. Figure 7 for Figure 5 Cross-sectional view of the clamping module, the flexible support module and the device to be cooled. Figure 8 To adopt Figure 6 Schematic diagram of the structure of the integrated components of the fixed clamping unit.

[0120] like Figure 6-Figure 8As shown, in some other implementations of the present application, the narrow neck of the device A to be cooled may have a larger portion extending into the exposure hole 410a. Figure 7 The orientation and position relationship in the figure define the “front” and “rear” orientations, wherein the side where the working surface A2 of the device A to be cooled is located is the “front”, and in the axial direction of the device A to be cooled, the other side opposite to the “front” is the “rear”. In this way, the annular clamping plate 412 as a whole is equivalent to being located on the rear side of the annular mounting plate 411.

[0121] In the above implementation, by adjusting the axial size of the device A to be cooled or the axial position of the device A to be cooled relative to the annular clamping plate 412, the position of the working surface A2 can be adjusted, so that the working surface A2 can protrude from the front end P of the annular mounting plate 411, or be flush with the front end P of the annular mounting plate 411, or be slightly retracted from the front end P of the annular mounting plate 411; in this way, the annular mounting plate 411 has relatively less obstruction on the working surface A2, which is more conducive to the coordinated use between the working surface A2 and the external device. Still taking the device A to be cooled as a reflector used in laser equipment as an example, the above implementation allows the grazing angle of the incident light B to be relatively small, which can meet the use requirements in some specific scenarios.

[0122] In order to conveniently adjust the installation position of the device A to be cooled in the exposure hole 410a, in this implementation, the aforementioned second protrusion 411c-1 can be omitted, that is, the aforementioned threaded portion 411c can be omitted, which can further simplify the structure of the cooling device provided in the embodiment of the present application. Of course, the threaded portion 411c can also be adjusted to avoid interference with the device A to be cooled, for example, the threaded portion 411c can be set on the annular body 411a.

[0123] In addition, the outer wall surface of the cylinder 110 may not be provided with the connecting flange 110a to avoid the connecting flange 110a blocking the incident light B and the reflected light formed after passing through the device to be cooled A. At this time, the end cover 120 can be directly installed on the axial end of the cylinder 110 through a threaded connector or the like.

[0124] Please refer to Figure 9-Figure 15 , Fig. 9 is a structural schematic diagram of an implementation method of a refrigerant supply unit, Fig.10 for Fig. 9 A schematic diagram of the structure of a method for implementing the liquid separation module. Fig.11 for Fig. 9 A schematic diagram of another implementation of the liquid separation module. Fig.12 for Fig. 9 The schematic diagram of the structure of the injection module. Fig.13 for Fig.12The connection structure diagram of the nozzle component, nozzle fixing frame and liquid dispensing joint, Fig.14 is a relative position diagram of the injection module and another device to be cooled, Fig.15 for Fig.14 Schematic diagram of the structure of an injection module.

[0125] like Fig. 9 As shown, the refrigerant supply unit 200 may include a spray module 210, and the spray module 210 may include a nozzle component 211, and the nozzle component 211 may be used to spray the refrigerant to the surface to be cooled A1. In this way, the refrigerant can also dissipate heat for the device to be cooled A by contact heat dissipation, and the heat dissipation form of the refrigerant for the device to be cooled A is more diverse, and the refrigeration effect of the refrigerant can also be more fully exerted.

[0126] The number of the spray modules 210 may be one or more, which is specifically related to the number and shape of the surfaces A1 to be cooled. In some implementations, the number of the spray modules 210 and the surfaces A1 to be cooled may be consistent. In this case, when there are multiple surfaces A1 to be cooled, there may be the same number of spray modules 210, and each spray module 210 and each surface A1 to be cooled may be arranged in a one-to-one correspondence; for example, Fig. 9 In the embodiment, the device A to be cooled includes three surfaces A1 to be cooled. Accordingly, three spray modules 210 may be provided, and each spray module 210 and each surface A1 to be cooled may be provided one-to-one. In other implementations, a surface A1 to be cooled may be provided with multiple spray modules 210 so that the coolant may be sprayed to the surface A1 to be cooled simultaneously through multiple spray modules 210. This may be caused by the complex structure or large area of ​​the surface A1 to be cooled. For example, in Fig.12 In the embodiment, the cylindrical surface A1 to be cooled can be cooled by configuring two or more spray modules 210. In fact, there can also be a situation where one spray module 210 sprays refrigerant to multiple surfaces A1 to be cooled at the same time. In this case, the spray module 210 can be configured with multiple nozzle components 211, and each nozzle component 211 can have at least two different spraying directions, so that the refrigerant can be sprayed to multiple surfaces A1 to be cooled at the same time through one spray module 210.

[0127] The refrigerant supply unit 200 may further include a cold source 220 , which may specifically be a liquid storage component such as a liquid tank, or a liquid supply component such as a faucet, for providing liquid refrigerant.

[0128] The cold source 220 can be located outside the housing 100, so that the internal space of the housing 100 can be avoided from being occupied, and the size of the housing 100 can be effectively reduced to reduce the control difficulty of the pressure control unit 300, and the influence of the internal environment of the sealed chamber on the cold source 220 can also be avoided. Of course, the cold source 220 can also be located inside the housing 100, so that the cooling device provided in the embodiment of the present application can basically be integrated in the housing 100, and the integration of the entire cooling device can be greatly improved.

[0129] Taking the cold source 220 located outside the housing 100 as an example, Figure 1 and Fig. 9 The shell 100 may be provided with a refrigerant inlet 112, which may be located at the cylinder 110, or the refrigerant inlet 112 may also be located at the end cover 120. The cold source 220 may be connected to the refrigerant inlet 112, the injection module 210 may be located at the inner side of the shell 100, and the injection module 210 may also be connected to the refrigerant inlet 112, and the cold source 220 may provide the refrigerant to the injection module 210 through the refrigerant inlet 112.

[0130] When there are multiple injection modules 210, the refrigerant supply unit 200 may further include a flow divider 230, which has an inlet and multiple outlets, wherein the number of the outlets may be consistent with the number of the injection modules 210. During specific assembly, the inlet of the flow divider 230 may be connected to the cold source 220, and each outlet of the flow divider 230 may be connected to each injection module 210 in a one-to-one correspondence, so as to provide refrigerant to each injection module 210.

[0131] A flow regulating valve 240 and a pressure sensor 250 may also be provided between the diverter 230 and the refrigerant inlet 112 to control the flow rate and pressure of the refrigerant discharged from the diverter 230 , thereby adjusting the amount and pressure of the refrigerant entering each injection module 210 .

[0132] In some implementations, such as Fig. 9As shown, the diverter 230, the flow regulating valve 240 and the pressure sensor 250 can all be located on the outside of the shell 100 to avoid occupying the internal space of the shell 100, thereby reducing the size of the shell 100 to a greater extent and reducing the control difficulty of the pressure control unit 300, while avoiding the influence of the internal environment of the sealed chamber on the diverter 230, the flow regulating valve 240 and the pressure sensor 250; in this embodiment, the outlet of the diverter 230 is directly connected to the refrigerant inlet 112, so the number of refrigerant inlet 112 and the number of outlets of the diverter 230 are consistent. In other implementations, the flow divider 230, the flow regulating valve 240 and the pressure sensor 250 can all be disposed in the housing 100 to further enhance the integration of the cooling device provided by the embodiment of the present application; in this embodiment, the inlet of the flow divider 230 is directly connected to the refrigerant inlet 112, and only one refrigerant inlet 112 is required, and the number of refrigerant inlet 112 is relatively small, and the structure of the housing 100 can be relatively simple. For ease of description, the following embodiments of the present application are all described by taking the flow divider 230, the flow regulating valve 240 and the pressure sensor 250 as being disposed outside the housing 100 as an example.

[0133] One injection module 210 may include only one nozzle component 211 . In this case, the injection module 210 may be directly connected to the refrigerant inlet portion 112 .

[0134] One injection module 210 may also include a plurality of nozzle components 211. In this case, a liquid separation module 260 may be further provided between the injection module 210 and the refrigerant inlet 112. The liquid separation module 260 is used to separate the refrigerant from the refrigerant inlet 112 to transport the refrigerant to each nozzle component 211. In this implementation, the injection flow rates of each nozzle component 211 of the same injection module 210 may be consistent; or, the injection flow rates of each nozzle component 211 of the same injection module 210 may be different to adapt to the non-uniform thermal field on the device A to be cooled, such as the device A to be cooled under the heating of a Gaussian irregular heat source.

[0135] The liquid separation module 260 may include a liquid separation part 261 and a liquid separation joint 262. A liquid separation flow channel is provided in the liquid separation part 261, and the liquid separation part 261 is connected to the refrigerant inlet part 112 for introducing the refrigerant into the liquid separation flow channel. The liquid separation joint 262 is installed in the liquid separation part 261, and the specific installation method includes but is not limited to snap-on, welding, bonding, threaded connection, interference fit, etc., as long as the reliability of the connection can be guaranteed; the liquid separation joint 262 can be connected to the liquid separation part 261, and the liquid separation joint 262 is also connected to the nozzle part 211, so as to supply the refrigerant in the liquid separation flow channel to the nozzle part 211.

[0136] It should be understood that in some other implementations of the embodiments of the present application, the liquid separation module 260 may not include the liquid separation joint 262. In this case, the liquid separation part 261 may also be directly connected to the injection module 210 to directly introduce the refrigerant into the nozzle part 211 of the injection module 210 through the liquid separation channel. This is also feasible.

[0137] like Fig.10 As shown, in some implementations, the liquid separation channel can be an equally divided channel 261a, and the equally divided channel 261a can achieve equal distribution of the refrigerant, and can distribute the refrigerant equally to each nozzle component 211. In this implementation, the liquid separation module 260 itself does not have the function of flow control. If it is necessary to adjust the injection flow of different nozzle components 211, it is necessary to adjust the model of the nozzle component 211 in advance, or add a control element in the form of a regulating valve to each nozzle component 211, and then adjust the model of the nozzle component 211 through the control element.

[0138] like Fig.11 As shown, in other implementations, the liquid separation channel can also be a topological channel 261b, and the topological channel 261b can be designed through simulation to directly adjust the flow rate at each channel outlet of the topological channel 261b by adjusting the aperture and connection relationship of each branch inside the channel, so as to achieve differentiated and precise control of the flow rate at each nozzle component 211. In this implementation, the flow rate regulation of each nozzle component 211 is based on the structural control of the topological channel 261b, and there is no need to add control elements, and the control difficulty of the cooling device provided in the embodiment of the present application will be reduced.

[0139] The spray module 210 may include a nozzle fixing frame 212, and each nozzle component 211 may be mounted on the nozzle fixing frame 212 to achieve installation and fixation of the nozzle component 211. The nozzle component 211 may be fixed in a manner including, but not limited to, welding, threaded connection, screw connection, clamping, riveting, bonding, interference fit, etc., as long as the reliability of the connection can be guaranteed.

[0140] The installation position of the nozzle component 211 on the nozzle fixing frame 212 can be selected in various ways, and can be specifically set in combination with the thermal field distribution of the surface A1 to be cooled. Fig.12 In the embodiment, each nozzle component 211 can be evenly distributed on the nozzle fixing frame 212. Fig.15 In the embodiment, each nozzle component 211 is basically distributed on the nozzle fixing frame 212 in an axisymmetric manner.

[0141] The axial position of the nozzle component 211 on the nozzle fixing frame 212 may not be adjustable. At this time, the connection between the nozzle component 211 and the nozzle fixing frame 212 may be welding, bonding, riveting, etc.

[0142] Alternatively, the axial position of the nozzle component 211 on the nozzle fixing frame 212 may also be adjustable, so that the spray distance between the nozzle component 211 and the surface A1 to be cooled can be adjusted to adjust the cooling intensity of the nozzle component 211. The following embodiments of the present application are mainly described by taking this as an example.

[0143] In some implementations, such as Fig.12 and Fig.13 As shown, the nozzle component 211 can be provided with a clamping portion 211b-1, and the nozzle fixing frame 212 can be provided with a clamping portion 212b-1, and the nozzle component 211 can be assembled on the clamping portion 212b-1 through the clamping portion 211b-1; the number of the clamping portion 211b-1 and the clamping portion 212b-1 can be multiple, and each clamping portion 211b-1 and each clamping portion 212b-1 can be distributed at intervals along the axial direction of the nozzle component 211; the nozzle fixing frame 212 includes a base 212a and a cover plate 212b, and the cover plate 212b can be detachably assembled on the base 212a, for example, it can be installed on the base 212a by means of screw connection or clamping; the nozzle component 211 can be located between the cover plate 212b and the base 212a, and at least one of the base 212a and the cover plate 212b is provided with a clamping portion 212b-1.

[0144] In this way, through the cooperation of the clamping portion 211b-1 and the engaging portion 212b-2, the nozzle component 211 can be installed and fixed on the nozzle fixing frame 212. When the axial position of the nozzle component 211 needs to be adjusted, the cover plate 212b and the base 212a can be disassembled first, and then the nozzle component 211 is shifted to adjust the clamping position of the clamping portion 211b-1 and the engaging portion 212b-1, and then the base 212a and the cover plate 212b are installed.

[0145] exist Fig.12 In the embodiment, the base 212a may include a substrate 212a-1 and two end plates 212a-2; the substrate 212a-1 and the cover plate 212b may be arranged opposite to each other, and each nozzle component 211 may be arranged between the substrate 212a-1 and the cover plate 212b; the two end plates 212a-2 may be located on both sides of the substrate 212a-1 / cover plate 212b, and may be connected to the substrate 212a-1 and the cover plate 212b by means of connecting members in the form of screws or the like. In addition, the two end plates 212a-2 and the substrate 212a-1 may be arranged as an integrated structure to form an integrated, U-shaped base 212a, which is also feasible.

[0146] The nozzle component 211 may include a nozzle 211a and a fixed sleeve 211b. The nozzle 211a may be installed on the fixed sleeve 211b. The specific installation methods include but are not limited to welding, threaded connection, screw connection, clamping, riveting, bonding, interference fit, etc., as long as the reliability of the connection can be guaranteed; the aforementioned clamping portion 211b-1 may be specifically arranged on the fixed sleeve 211b, so that the processing of the nozzle 211a can be avoided. Of course, the nozzle component 211 may also include only the nozzle 211a. In this case, the aforementioned clamping portion 211b-1 may be arranged on the nozzle 211a.

[0147] It should be understood that the number of only one of the clamping portion 211b-1 and the clamping portion 212b-1 may be plural, while the number of the other may be one, which is also feasible.

[0148] In other implementations, the injection module 210 may also include a nozzle fixing bracket 212 and a driving component (not shown in the figure), the nozzle component 211 may be installed on the nozzle fixing bracket 212, and the driving component may be connected to the nozzle component 211 for adjusting the axial position of the nozzle component 211 relative to the nozzle fixing bracket 212.

[0149] The driving component can be a linear driving element that can directly output linear displacement, and the linear driving element can be, for example, a linear cylinder, a linear oil cylinder, etc., so that the structure of the driving component can be relatively simple. Alternatively, the driving component can also include a rotary driving element that can directly output rotational displacement, and the rotary driving element can be, for example, a motor, a rotary cylinder, etc. In this case, the driving component can also include a displacement conversion mechanism in the form of a gear rack mechanism, a screw mechanism, etc., so as to convert the rotational displacement output by the rotary driving element into the linear displacement required by the nozzle component 211.

[0150] The driving component can realize real-time adjustment of the axial position of the nozzle component 211, and can more timely adjust the cooling intensity of the nozzle component 211 to better meet the use requirements. At the same time, the driving component can also adjust the axial position of the nozzle component 211 steplessly, and the degree of freedom of adjustment is also greater.

[0151] The spray module 210 and the liquid separation module 260 located inside the housing 100 can be installed in the aforementioned fixed clamping unit 400 , for example, can be installed in the bracket module 450 in the fixed clamping unit 400 .

[0152] In some implementations, the cooling device provided in the embodiment of the present application may also include a temperature detection component (not shown in the figure), which may be, for example, a thermocouple, etc., for detecting the surface temperature of the surface A1 to be cooled, so as to detect the state of the device A to be cooled.

[0153] In specific practice, according to the surface temperature of the to-be-cooled surface A1 measured by the temperature detection component, the operating state of the nozzle component 211 can also be adjusted, so as to adjust the cooling intensity of the nozzle component 211 according to the actual situation. This adjustment can be made through the flow control valve 240, or through the control element set in the nozzle assembly 211, or by adjusting the axial position of the nozzle assembly 211.

[0154] When the integrated assembly provided in the embodiment of the present application is assembled as a whole, the liquid separation module 260, the fixed clamping unit 400 and the device A to be cooled can be assembled outside the shell 100 first, and then the temperature detection component is attached to the cooling surface A1 of the device A to be cooled, and then the whole is placed in the cylinder 110; then, the temperature detection component and the signal transmission port 114 are connected, and the end cover 120 and the cylinder 110 are assembled; then, the cold source 220, the diverter 230, the flow regulating valve 240, the pressure sensor 250 and the refrigerant inlet 112 outside the shell 100 can be installed. After the assembly is completed, the installation posture of the device A to be cooled can also be adjusted by adjusting the cooperation between the component 413 and the threaded portion 411c.

[0155] Specific examples are used herein to illustrate the principles and implementation methods of the present application, and the description of the above embodiments is only used to help understand the method and core ideas of the present application. It should be pointed out that for ordinary technicians in this technical field, without departing from the principles of the present application, several improvements and modifications can be made to the present application, and these improvements and modifications also fall within the scope of protection of the claims of the present application.

Claims

1. A cooling device, characterized in that: The invention comprises a shell, a refrigerant supply unit and a pressure control unit, wherein the shell has a sealed chamber therein, the shell is used to install a device to be cooled, the device to be cooled has at least one surface to be cooled, and the surface to be cooled can be located in the sealed chamber, the refrigerant supply unit is used to provide refrigerant into the sealed chamber, the pressure control unit is connected to the sealed chamber, and is used to adjust the pressure in the sealed chamber to be less than or equal to the flash pressure of the refrigerant, and the shell is also provided with a refrigerant outlet.

2. The cooling device according to claim 1, characterized in that: The shell wall of the shell is provided with a mounting hole, and the mounting hole is used to mount the device to be cooled. The device to be cooled also has at least one working surface, and the working surface can be exposed to the outside of the shell.

3. The cooling device according to claim 2, characterized in that: It also includes a fixed clamping unit, which includes a clamping module. The clamping module is inserted into the mounting hole. The device to be cooled can be sealed and assembled on the clamping module. The clamping module is provided with an exposure hole for exposing the working surface.

4. The cooling device according to claim 3, characterized in that: The clamping module includes an annular mounting plate and an annular clamping plate, the annular mounting plate is inserted into the mounting hole, the annular clamping plate is sealingly assembled on the annular mounting plate, the annular clamping plate is used to seal and assemble the device to be cooled, and the exposure hole at least includes the center hole of the annular mounting plate.

5. The cooling device according to claim 4, characterized in that: The annular mounting plate includes an annular body and a first protrusion, wherein the first protrusion is located on the outer peripheral wall of the annular body, the mounting hole includes a base hole portion and an expanded hole portion, the expanded hole portion is formed by the inner hole wall of the base hole portion protruding outward, the outer contour of the annular body matches the inner contour of the base hole portion, the outer contour of the first protrusion matches the inner contour of the expanded hole portion, the annular body is inserted into the base hole portion, and the first protrusion is inserted into the expanded hole portion.

6. The cooling device according to claim 4 or 5, characterized in that: The annular mounting plate is also provided with a threaded portion, and the clamping module further comprises an adjusting component, which is threadedly connected to the threaded portion and can abut against the annular clamping plate.

7. The cooling device according to any one of claims 3 to 6, characterized in that: The fixed clamping unit further includes a flexible support module, and the flexible support module is used to support the device to be cooled.

8. The cooling device according to any one of claims 3 to 7, characterized in that: The fixed clamping unit also includes a sleeve module, the sleeve module outer shell is assembled on the clamping module, the sleeve module has a first contour surface, the shape of the first contour surface is consistent with the shape of the inner wall surface of the shell, and the sleeve module is fitted with the inner wall surface of the shell through the first contour surface.

9. The cooling device according to any one of claims 3 to 7, characterized in that: The fixed clamping unit further comprises a support base, and the support base is at least used to support the clamping module.

10. The cooling device according to claim 9, characterized in that: The support seat is provided with a circulation channel; and / or, A heating device is installed in the support seat; and / or, The support seat has a receiving surface for receiving the refrigerant, the receiving surface abuts against the inner wall surface of the shell, and the receiving surface is lower than the opening of the refrigerant outlet on the shell in the height direction.

11. The cooling device according to any one of claims 1 to 10, characterized in that: The refrigerant supply unit includes a spray module including a nozzle component for spraying the refrigerant onto the surface to be cooled.

12. The cooling device according to claim 11, characterized in that: The injection module further comprises a nozzle fixing frame, the nozzle component is provided with a clamping portion, the nozzle fixing frame is provided with a clamping portion, and the nozzle component can be assembled to the clamping portion through the clamping portion; There are multiple clamping parts, each of which is spaced apart along the axial direction of the nozzle component; and / or there are multiple clamping parts, each of which is spaced apart along the axial direction of the nozzle component; The nozzle fixing frame comprises a base and a cover plate, wherein the cover plate is detachably assembled on the base, the nozzle component is located between the cover plate and the base, and at least one of the base and the cover plate is provided with the engaging portion.

13. The cooling device according to claim 12, characterized in that: The nozzle component comprises a spray head and a fixed sleeve, the spray head is mounted on the fixed sleeve, and the fixed sleeve is provided with the clamping portion.

14. The cooling device according to claim 11, characterized in that: The injection module further comprises a nozzle fixing frame and a driving component, wherein the nozzle component is mounted on the nozzle fixing frame, and the driving component is connected to the nozzle component and is used to adjust the axial position of the nozzle component relative to the nozzle fixing frame.

15. The cooling device according to any one of claims 11 to 14, characterized in that: The injection module includes a plurality of nozzle components, each of which is equipped with a flow control element; or, The injection module includes a plurality of the nozzle components, and the refrigerant supply unit also includes a liquid separation module. The liquid separation module is also provided with a topological flow channel, and the topological flow channel has flow channel openings consistent with the number of the nozzle components, and each of the flow channel openings is connected to each of the nozzle components in a one-to-one correspondence.

16. The cooling device according to any one of claims 11 to 15, characterized in that: There are multiple spray modules, and there are multiple surfaces to be cooled. Each surface to be cooled is correspondingly provided with at least one spray module.

17. The cooling device according to any one of claims 11 to 16, characterized in that: The refrigerant supply unit also includes a cold source, which is located on the outside of the shell. The shell is provided with a refrigerant inlet, and the cold source is connected to the refrigerant inlet. The injection module is located on the inside of the shell, and the injection module is also connected to the refrigerant inlet.

18. The cooling device according to any one of claims 1 to 17, characterized in that: It also includes a temperature detection component, which is used to detect the surface temperature of the surface to be cooled.

19. The cooling device according to any one of claims 1 to 18, characterized in that: The housing is provided with an observation window.

20. An integrated component, characterized in that: It comprises a functional device and a cooling device, wherein the cooling device is the cooling device according to any one of claims 1 to 19, and the functional device is the device to be cooled.

21. The integrated assembly according to claim 20, characterized in that: The functional device is any one of an optical lens, a chip, a battery, a processor, and a server.

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