Multi-cavity vacuum generation device, inertia measurement device and use method of multi-cavity vacuum generation device and inertia measurement device

Abstract

The invention relates to a multi-cavity vacuum generating device, an inertia measuring device and a using method thereof, the vacuum generating device comprises a main cavity and three vacuum cavities, each vacuum cavity is provided with an open end, the open ends of the three vacuum cavities are hermetically communicated with the main cavity, and the axial directions of the three vacuum cavities are in pairwise orthogonality; and the main cavity is also provided with a plurality of interfaces which are used for being hermetically connected with a molecular pump valve, an ion pump, a getter pump and an atom source in a one-to-one correspondence manner. In order to simplify atomic inertial measurement equipment and realize miniaturization, the technical scheme of multi-chamber integration is adopted, and three vacuum chambers are orthogonally arranged and integrated in a set of vacuum generation device, so that the use requirements of the atomic control process of three atomic gyroscopes in an atomic inertial measurement assembly on an ultrahigh vacuum environment are met at the same time; and the composition of the atomic inertial measurement device is greatly simplified, and the miniaturization use requirement of the atomic inertial measurement device is met.

Description

Technical Field

[0001] The present invention relates to the technical field of quantum inertial measurement, and in particular to a multi-chamber vacuum generating device, an inertial measurement device and a use method thereof. Background Art

[0002] The atomic inertial measurement unit is a novel inertial measurement device, and the vacuum generator is one of its core components.

[0003] At present, in the field of quantum inertial measurement, the sensitive unit of the atomic inertial measurement component is usually composed of three independent atomic gyroscope sensitive units. Each atomic gyroscope sensitive unit is equipped with an independent vacuum generating device to meet the ultra-high vacuum environment required by each atomic gyroscope sensitive unit in the atomic manipulation process. However, in order to ensure the measurement accuracy, the consistency of the three ultra-high vacuum environments must be maintained. Setting up three independent vacuum generating devices and ensuring the consistency of the three ultra-high vacuum environments poses certain challenges in terms of vacuum control requirements. In addition, setting up three independent vacuum generating devices will result in a large overall size of the equipment and occupy a large space, which is not conducive to the miniaturization of the equipment and restricts the use scenarios of the equipment.

[0004] Therefore, it is necessary to study a miniaturized multi-chamber vacuum generating device solution. Summary of the invention

[0005] Based on the above description, the present invention provides a multi-chamber vacuum generating device, an inertial measurement device and a method of using the same to solve the problem that the atomic inertial measurement device occupies a large space, thereby facilitating the miniaturization of the device and enhancing the applicability of the device.

[0006] According to a first aspect of the present invention, there is provided a multi-chamber vacuum generating device, comprising a main cavity and three vacuum chambers, wherein the vacuum chamber has an open end, the open ends of the three vacuum chambers are in sealed communication with the main cavity, and the axes of the three vacuum chambers are orthogonal to each other; The main cavity is also provided with a plurality of interfaces for correspondingly and sealedly connecting with the molecular pump valve, the ion pump, the getter pump and the atomic source one by one.

[0007] Based on the above technical solution, the present invention can also be improved as follows.

[0008] Preferably, one end of the main cavity is provided with three mounting surfaces, the three mounting surfaces are orthogonal in pairs, the three vacuum chambers are mounted on the three mounting surfaces one by one, and the axial direction of the vacuum chamber is perpendicular to its corresponding mounting surface.

[0009] Preferably, the plurality of interfaces are arranged at an end of the main cavity away from the three mounting surfaces.

[0010] Preferably, the vacuum chamber comprises a chamber body and a mounting flange, and an open end of the chamber body is sealed and connected to the main cavity through the mounting flange.

[0011] Preferably, the chamber body is light-transmissive.

[0012] Preferably, the chamber body is a full glass cavity, or a combined cavity of a metal frame and glass.

[0013] According to a second aspect of the present invention, based on the aforementioned multi-chamber vacuum generating device, the present invention further provides an inertial measurement device, comprising a molecular pump valve, an ion pump, a getter pump, an atomic source and three atomic gyro sensitive units, and the aforementioned multi-chamber vacuum generating device, wherein: The molecular pump valve is connected to the main cavity and the molecular pump, and is used to provide kinetic energy to the gas molecules in the main cavity and the vacuum chamber through the molecular pump; The ion pump and the getter pump are respectively connected to the main cavity and are used to extract the gas inside the main cavity and the vacuum chamber to prepare and maintain an ultra-high vacuum environment in the vacuum chamber; The atomic source is connected to the main cavity and is used to heat the alkali metal to form alkali metal vapor, and diffuse the alkali metal vapor into the vacuum chamber through the main cavity; The three atomic gyro sensitive units are arranged one-to-one corresponding to the three vacuum chambers, each of the atomic gyro sensitive units has its sensitive one-dimensional angular velocity and one-dimensional linear acceleration, and the angular velocity direction and linear acceleration vector direction of a single atomic gyro sensitive unit are orthogonal; the angular velocities sensitive to the three atomic gyro sensitive units are orthogonal to each other, and the linear accelerations sensitive to the three atomic gyro sensitive units are orthogonal to each other.

[0014] Preferably, the atomic gyro sensitive unit comprises an optomechanical module built around a vacuum chamber, and three of the optomechanical modules form an inertial measurement unit having both sensitive angular velocity and linear acceleration inertial quantities.

[0015] According to a third aspect of the present invention, there is also provided a method for using an inertial measurement device, which is applied to the aforementioned inertial measurement device, comprising: Open the molecular pump valve, start the molecular pump, ion pump and getter pump to prepare the vacuum environment of the main cavity and the three vacuum chambers; When the vacuum degree of the vacuum environment meets the requirements, close the molecular pump valve and the molecular pump; Starting the atomic source to prepare alkali metal vapor, and diffusing the alkali metal vapor into the vacuum chamber through the main cavity; The three atomic gyro sensitive units are started to realize three-axis angular velocity and linear acceleration inertial measurement.

[0016] Compared with the prior art, the technical solution of the present application has the following beneficial technical effects: In order to simplify the atomic inertial measurement equipment and achieve miniaturization, the present invention adopts a multi-chamber integration technical solution. By orthogonally arranging and integrating three vacuum chambers into a vacuum generating device, the requirements for the use of ultra-high vacuum environment in the atomic manipulation process of the three atomic gyroscopes in the atomic inertial measurement component are met, and the composition of the atomic inertial measurement device is greatly simplified to meet its miniaturized use requirements. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 A schematic diagram of the principle of a multi-chamber vacuum generating device provided in an embodiment of the present invention; Figure 2 A schematic structural diagram of a multi-chamber vacuum generating device provided in an embodiment of the present invention; Figure 3 A schematic diagram of the matching relationship between the mounting surface and the vacuum chamber of a multi-chamber vacuum generating device provided by an embodiment of the present invention; Figure 4 A schematic diagram of a single vacuum chamber structure provided by an embodiment of the present invention; Figure 5 A schematic diagram of the coordination relationship of three atomic gyro sensitive units in an inertial measurement device provided by an embodiment of the present invention; Figure 6 A flow chart of a method for using an inertial measurement device provided by an embodiment of the present invention.

[0018] In the accompanying drawings, the components represented by the reference numerals are listed as follows: 1. Main cavity, 2. First vacuum chamber, 3. Second vacuum chamber, 4. Third vacuum chamber, 5. Ion pump, 6. Getter pump, 7. Molecular pump valve, 8. Atomic source, 9. First mounting surface, 10. Second mounting surface, 11. Third mounting surface, 12. Chamber body, 13. Mounting flange, 14. First-axis atomic gyro sensitive unit, 15. Second-axis atomic gyro sensitive unit, 16. Third-axis atomic gyro sensitive unit, 17. First-axis acceleration, 18. Second-axis acceleration, 19. Third-axis acceleration, 20. First-axis angular velocity, 21. Second-axis angular velocity, 22. Third-axis angular velocity. DETAILED DESCRIPTION

[0019] In order to facilitate understanding of the present application, the present application will be described more fully below with reference to the relevant drawings. Embodiments of the present application are provided in the drawings. However, the present application can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present application more thorough and comprehensive.

[0020] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art to which this application belongs. The terms used herein in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application.

[0021] It will be appreciated that spatial relationship terms such as "under", "beneath", "below", "under", "above", "above", etc., may be used herein to describe the relationship of an element or feature shown in the figures to other elements or features. It should be understood that in addition to the orientations shown in the figures, spatial relationship terms also include different orientations of the device in use and operation. For example, if the device in the accompanying drawings is flipped, the element or feature described as "under other elements" or "under it" or "under it" will be oriented as "on" the other elements or features. Therefore, the exemplary terms "under" and "under" may include both upper and lower orientations. In addition, the device may also include additional orientations (e.g., rotated 90 degrees or other orientations), and the spatial descriptors used herein are interpreted accordingly.

[0022] It should be noted that when an element is considered to be "connected" to another element, it can be directly connected to the other element, or connected to the other element through an intermediate element. The "connection" in the following embodiments should be understood as "electrical connection", "communication connection", etc. if the connected circuits, modules, units, etc. have electrical signals or data transmission between each other.

[0023] When used herein, the singular forms "a", "an", and "said / the" may also include plural forms, unless the context clearly indicates otherwise. It should also be understood that the terms "include / comprise" or "have" etc. specify the presence of stated features, wholes, steps, operations, components, parts or combinations thereof, but do not exclude the possibility of the presence or addition of one or more other features, wholes, steps, operations, components, parts or combinations thereof.

[0024] See also Figure 1~Figure 3 ,in, Figure 1 A schematic diagram of the principle of a multi-chamber vacuum generating device provided in an embodiment of the present invention, Figure 2 A schematic diagram of the structure of a multi-chamber vacuum generating device provided in an embodiment of the present invention, Figure 3 A schematic diagram of the matching relationship between the mounting surface and the vacuum chamber of a multi-chamber vacuum generating device provided in an embodiment of the present invention.

[0025] Combination Figure 1 and Figure 2As shown, this embodiment provides a multi-chamber vacuum generating device, including a main cavity 1 and three vacuum chambers (a first vacuum chamber 2, a second vacuum chamber 3 and a third vacuum chamber 4), each vacuum chamber has an open end, the open ends of the first vacuum chamber 2, the second vacuum chamber 3 and the third vacuum chamber 4 are respectively connected to the main cavity 1 in a sealed manner, and the axial directions of the first vacuum chamber 2, the second vacuum chamber 3 and the third vacuum chamber 4 are orthogonal to each other; The main cavity 1 is also provided with a plurality of interfaces for correspondingly and sealedly connecting with the molecular pump valve 7, the ion pump 5, the getter pump 6 and the atomic source 8 one by one, so as to realize the preparation of the ultra-high vacuum environment and the acquisition of the alkali metal vapor.

[0026] It is understandable that in order to simplify the atomic inertial measurement device and achieve miniaturization, the present embodiment adopts a multi-chamber integrated technical solution, by orthogonally arranging the first vacuum chamber 2, the second vacuum chamber 3 and the third vacuum chamber 4 and integrating them on a main cavity 1, and realizing parallel connection of the three vacuum chambers through the internal space of the main cavity 1, a set of vacuum generating devices can be used to simultaneously meet the use requirements of the ultra-high vacuum environment of the atomic manipulation process of the three atomic gyroscopes in the atomic inertial measurement component, and greatly simplify the composition of the atomic inertial measurement device to meet its miniaturization use requirements. The embodiment of the present invention has high feasibility and can promote the engineering process of the atomic inertial measurement component.

[0027] In one possible embodiment, the main cavity 1 can be integrally processed from titanium alloy or non-magnetic stainless steel, etc., and has a connecting hole cavity inside, which connects the three vacuum chambers in parallel and evenly transmits the alkali metal atomic vapor to the three vacuum chambers. One end of the main cavity 1 is provided with three mounting surfaces. Figure 2 As an example, three mounting surfaces are arranged at the upper end of the main cavity 1, and the three mounting surfaces include a first mounting surface 9, a second mounting surface 10, and a third mounting surface 11 ( Figure 2 (not shown), the first mounting surface 9, the second mounting surface 10, and the third mounting surface 11 are orthogonal to each other, and the first vacuum chamber 2, the second vacuum chamber 3, and the third vacuum chamber 4 are mounted on the first mounting surface 9, the second mounting surface 10, and the third mounting surface 11 one by one, and the axial direction of the vacuum chamber is perpendicular to its corresponding mounting surface. Figure 3 As shown, the first mounting surface 9, the second mounting surface 10, and the third mounting surface 11 take the center of the top surface of the main cavity 1 as the center point, and evenly divide the top surface of the main cavity 1 into three sectors. The first vacuum chamber 2 is mounted on the first mounting surface 9, the second vacuum chamber 3 is mounted on the second mounting surface 10, and the third vacuum chamber 4 is mounted on the third mounting surface 11, so that the three vacuum chambers are integrated into one end of the main cavity 1.

[0028] In one possible embodiment, Figure 2 As shown, the multiple interfaces are arranged on one end of the main cavity 1 away from the three mounting surfaces, so that the molecular pump valve 7, ion pump 5, getter pump 6 and atomic source 8 are concentrated on one end of the main cavity 1 away from the three vacuum chambers and connected to the main cavity 1, which is more conducive to the miniaturization design of the device and reduces the interference between the device and the surrounding installation environment.

[0029] In one possible embodiment, Figure 4 The figure shows a schematic diagram of the structure of a single vacuum chamber, which includes a chamber body 12 and a mounting flange 13. The open end of the chamber body 12 is sealed and connected to the main chamber 1 through the mounting flange 13 to achieve communication between the internal spaces of the two. The chamber body 12 needs to be light-transmissive so that the laser can pass through during the inertial measurement process.

[0030] As a preferred embodiment, the chamber body 12 of the vacuum chamber adopts a full glass chamber, or a combination of a metal frame and glass, to meet the requirements of structural strength and optical performance. The chamber body 12 and the mounting flange 13 are sealed by welding or gluing, and the vacuum chamber is sealed and connected to the mounting surface of the main chamber 1 through the mounting flange 13.

[0031] Based on the miniaturized multi-chamber vacuum generating device provided in the above embodiments, this embodiment further provides an inertial measurement device, which includes a molecular pump valve 7, an ion pump 5, a getter pump 6, an atomic source 8 and three atomic gyroscope sensitive units, and the multi-chamber vacuum generating device provided in the above embodiments, wherein: The molecular pump valve 7 is connected to the main cavity 1 and the molecular pump (not shown in the figure), and is used to be opened during the vacuum preparation process to provide kinetic energy to the main cavity 1 and the gas molecules in the vacuum chamber through the molecular pump; and the molecular pump valve 7 is closed after the vacuum preparation is completed, and the main cavity 1 of the vacuum generating device is separated from the molecular pump; The ion pump 5 and the getter pump 6 are respectively connected to the main cavity 1 and are used to extract the gas inside the main cavity 1 and the vacuum chamber to prepare and maintain an ultra-high vacuum environment in the vacuum chamber; The atomic source 8 is connected to the main cavity 1 and is used to heat alkali metal elements such as rubidium or cesium to form alkali metal vapor, and release / diffuse the alkali metal vapor into the vacuum chamber through the main cavity 1 for use in the atomic inertial measurement process; like Figure 5The figure shows a schematic diagram of the coordination relationship of the three atomic gyro sensitive units in the inertial measurement device. The three atomic gyro sensitive units (the first axis atomic gyro sensitive unit 14, the second axis atomic gyro sensitive unit 15 and the third axis atomic gyro sensitive unit 16) are arranged one-to-one corresponding to the three vacuum chambers (the first vacuum chamber 2, the second vacuum chamber 3 and the third vacuum chamber 4). Each atomic gyro sensitive unit is arranged around the circumference of a vacuum chamber. Each atomic gyro sensitive unit has its sensitive one-dimensional angular velocity and one-dimensional linear acceleration, respectively, so that the first axis angular velocity 20, the second axis angular velocity 21 and the third axis angular velocity 22, as well as the first axis acceleration 17, the second axis acceleration 18 and the third axis acceleration 19 are obtained. The angular velocity direction and the linear acceleration vector direction of a single atomic gyro sensitive unit are orthogonal, for example, the first axis angular velocity 20 sensed by the first axis atomic gyro sensitive unit 14 is orthogonal to the first axis acceleration 17, the second axis angular velocity 21 sensed by the second axis atomic gyro sensitive unit 15 is orthogonal to the second axis acceleration 18, and the third axis angular velocity 22 sensed by the third axis atomic gyro sensitive unit 16 is orthogonal to the third axis acceleration 19. The angular velocities sensed by the three atomic gyro sensitive units are orthogonal in pairs, for example, the first axis angular velocity 20 and the second axis angular velocity 21 are orthogonal, the second axis angular velocity 21 and the third axis angular velocity 22 are orthogonal, and the first axis angular velocity 20 and the third axis angular velocity 22 are orthogonal; the linear accelerations sensed by the three atomic gyro sensitive units are orthogonal in pairs, for example, the first axis acceleration 17 and the second axis acceleration 18 are orthogonal, the second axis acceleration 18 and the third axis acceleration 19 are orthogonal, and the first axis acceleration 17 and the third axis acceleration 19 are orthogonal. The first axis angular velocity 20 is in the same direction as the second axis acceleration 18, the second axis angular velocity 21 is in the same direction as the third axis acceleration 19, and the third axis angular velocity 22 is in the same direction as the first axis acceleration 17. The spatial rectangular coordinate system formed by the directions of the first axis angular velocity 20, the second axis angular velocity 21, and the third axis angular velocity 22, and the spatial rectangular coordinate system formed by the vector direction of the first axis acceleration 17, the vector direction of the second axis acceleration 18, and the vector direction of the third axis acceleration 19.

[0032] The atomic gyro sensitive unit includes an optomechanical module built around a vacuum chamber, and three optomechanical modules form an inertial measurement unit that is sensitive to both angular velocity and linear acceleration inertial quantities.

[0033] It is understandable that the atomic gyro sensitive unit cooperates with the vacuum chamber to perform inertial measurement is a prior art, and the technical solution of the present invention does not improve it, so its working principle will not be described in detail here.

[0034] Based on the inertial measurement device provided in the above embodiment, this embodiment further provides a method for using the inertial measurement device, including: S1, open the molecular pump valve 7, start the molecular pump, ion pump 5 and getter pump 6 to prepare the vacuum environment of the main cavity 1 and the three vacuum chambers; S2, when the vacuum degree of the vacuum environment meets the requirements, close the molecular pump valve 7 and the molecular pump; S3, starting the atomic source 8 to prepare alkali metal vapor, and diffusing the alkali metal vapor into the vacuum chamber through the main cavity 1; S4, starting the three atomic gyro sensitive units to achieve three-axis angular velocity and linear acceleration inertial measurement.

[0035] The present invention provides a multi-chamber vacuum generating device, an inertial measurement device and a method of using the same. In order to simplify the atomic inertial measurement equipment and achieve miniaturization, a multi-chamber integrated technical solution is adopted. Three vacuum chambers are orthogonally arranged and integrated into a set of vacuum generating devices. The requirements for the use of ultra-high vacuum environment in the atomic manipulation process of three atomic gyroscopes in the atomic inertial measurement component are met at the same time, and the composition of the atomic inertial measurement device is greatly simplified to meet the requirements for its miniaturized use.

[0036] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A multi-chamber vacuum generating device, characterized in that: It comprises a main cavity and three vacuum chambers, wherein the vacuum chamber has an open end, the open ends of the three vacuum chambers are in closed communication with the main cavity, and the axes of the three vacuum chambers are orthogonal to each other; The main cavity is also provided with a plurality of interfaces for correspondingly and sealedly connecting with the molecular pump valve, the ion pump, the getter pump and the atomic source.

2. A multi-chamber vacuum generating device according to claim 1, characterized in that: One end of the main cavity is provided with three mounting surfaces, the three mounting surfaces are orthogonal to each other, the three vacuum chambers are mounted on the three mounting surfaces one by one, and the axial direction of the vacuum chamber is perpendicular to its corresponding mounting surface.

3. A multi-chamber vacuum generating device according to claim 2, characterized in that: The plurality of interfaces are arranged on an end of the main cavity away from the three mounting surfaces.

4. A multi-chamber vacuum generating device according to any one of claims 1 to 3, characterized in that: The vacuum chamber comprises a chamber body and a mounting flange, and an open end of the chamber body is sealed and connected to the main cavity through the mounting flange.

5. A multi-chamber vacuum generating device according to any one of claims 1 to 3, characterized in that: The chamber body is light-transmissive.

6. A multi-chamber vacuum generating device according to claim 5, characterized in that: The chamber body is a full glass chamber, or a combined chamber of a metal frame and glass.

7. An inertial measurement device, characterized in that: The invention comprises a molecular pump valve, an ion pump, a getter pump, an atomic source and three atomic gyro sensitive units, and a multi-chamber vacuum generating device according to any one of claims 1 to 6, wherein: The molecular pump valve is connected to the main cavity and the molecular pump, and is used to provide kinetic energy to the gas molecules in the main cavity and the vacuum chamber through the molecular pump; The ion pump and the getter pump are respectively connected to the main cavity and are used to extract the gas inside the main cavity and the vacuum chamber to prepare and maintain an ultra-high vacuum environment in the vacuum chamber; The atomic source is connected to the main cavity and is used to heat the alkali metal to form alkali metal vapor, and diffuse the alkali metal vapor into the vacuum chamber through the main cavity; The three atomic gyro sensitive units are arranged one-to-one corresponding to the three vacuum chambers, each of the atomic gyro sensitive units has its sensitive one-dimensional angular velocity and one-dimensional linear acceleration, and the angular velocity direction and linear acceleration vector direction of a single atomic gyro sensitive unit are orthogonal; the angular velocities sensitive to the three atomic gyro sensitive units are orthogonal to each other, and the linear accelerations sensitive to the three atomic gyro sensitive units are orthogonal to each other.

8. An inertial measurement device according to claim 7, characterized in that: The atomic gyro sensitive unit includes an optomechanical module built around a vacuum chamber, and three optomechanical modules form an inertial measurement unit that is sensitive to both angular velocity and linear acceleration inertial quantities.

9. A method for using an inertial measurement device, applied to the inertial measurement device according to claim 7 or 8, characterized in that: include: Open the molecular pump valve, start the molecular pump, ion pump and getter pump to prepare the vacuum environment of the main cavity and the three vacuum chambers; When the vacuum degree of the vacuum environment meets the requirements, close the molecular pump valve and the molecular pump; Starting the atomic source to prepare alkali metal vapor, and diffusing the alkali metal vapor into the vacuum chamber through the main cavity; The three atomic gyro sensitive units are started to realize three-axis angular velocity and linear acceleration inertial measurement.

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