Optical detection device and method for controlling the same

Abstract

The present application relates to the technical field of optical detection, and particularly relates to an optical detection device and a control method thereof, the optical detection device comprising: a rechecking light source, a bright field light source and a dark field light source, bright field signal light, dark field signal light and rechecking signal light being transmitted along a common light path; a collection reflection element, the collection reflection element being used for collecting the bright field signal light and the dark field signal light and spatially separating the bright field signal light and the dark field signal light, so that the bright field signal light is reflected into a first transmission path to perform bright field imaging, and the dark field signal light is reflected into a second transmission path to perform dark field imaging; a mirror element, the mirror element being arranged on a transmission path of the rechecking signal light and being used for reflecting the rechecking signal light to a third transmission path to perform rechecking imaging; the rechecking light is a stroboscopic light beam to weaken the trailing of the rechecking signal light when the rechecking signal light is imaged, and the rechecking signal light is totally reflected by the mirror element to reduce light intensity attenuation, and the present application is at least beneficial to improving the detection precision of rechecking.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of optical detection technology, and in particular to an optical detection device and a control method thereof. BACKGROUND

[0002] In the process of semiconductor chip processing, defects caused by inevitable pollution and manufacturing errors are important reasons for the failure of semiconductor chips. Therefore, during the manufacturing of semiconductor chips, defect detection on wafers used to prepare semiconductor chips can improve the yield and thus obtain higher profits. In existing defect detection devices, optical imaging-based defect detection methods have the advantages of fast detection and non-contact, and are the most commonly used means of defect detection.

[0003] For optical imaging-based defect detection devices, detection speed and detection accuracy are important indicators involved in detection. The detection accuracy refers to the minimum size of defects that can be detected. It can be understood that increasing the magnification can obtain smaller optical resolution and improve the detection accuracy, but it also reduces the detection speed. In order to achieve fast and high-precision defect detection, defect detection usually includes two steps of preliminary detection and re-detection. In the preliminary detection, a low magnification is used to scan and detect a specified area to preliminarily obtain the defect position and preliminary morphology information of the defects in the area. In the re-detection, the defect position is moved to the re-detection probe, and a high magnification is used for re-detection imaging to obtain higher-precision defect images and realize analysis of more detailed information of the defects.

[0004] However, the re-detection accuracy of the current defect detection device needs to be improved. SUMMARY

[0005] Therefore, the present application aims to provide an optical detection device and a control method thereof, which at least improve the detection accuracy of re-detection.

[0006] To achieve the above-mentioned purpose, the technical scheme of the present application is as follows:

[0007] The application provides an optical detection device, which comprises: a reinspection light source, which emits reinspection light, the reinspection light is incident on a surface of a sample to be detected and forms a reinspection signal light through reflection of the sample to be detected; a bright field light source, which emits bright field light, and a dark field light source, which emits dark field light, the bright field light and the dark field light are incident on the surface of the sample to be detected respectively, the bright field light forms bright field signal light through reflection of the sample to be detected, and the dark field light forms dark field signal light through scattering of the sample to be detected, the bright field signal light, the dark field signal light and the reinspection signal light are transmitted along a common light path; a collection and reflection element, which is used for collecting the bright field signal light and the dark field signal light and spatially separating the bright field signal light and the dark field signal light, so that the bright field signal light is reflected into a first transmission path to perform bright field imaging, and the dark field signal light is reflected into a second transmission path to perform dark field imaging; and a mirror element, which is arranged on a transmission path of the reinspection signal light and is used for reflecting the reinspection signal light to a third transmission path to perform reinspection imaging; the reinspection light is a stroboscopic light beam, so that the trailing of the reinspection signal light in the reinspection imaging is weakened, and the reinspection signal light is totally reflected through the mirror element, so that the light intensity attenuation is reduced.

[0008] In some embodiments, the dark field signal light and the bright field signal light do not overlap with each other when being transmitted along the common light path, and a distance between a dark field light spot formed by the dark field light on the surface of the sample to be detected and a bright field light spot formed by the bright field light on the surface of the sample to be detected is in a range of 0.2 mm to 3 mm.

[0009] In some embodiments, the reinspection signal light keeps from overlapping with the bright field signal light and the dark field signal light when being transmitted along the common light path; the reinspection light and the bright field light have a common transmission light path, and the reinspection light and the bright field light do not overlap with each other when being transmitted.

[0010] In some embodiments, in the common light path, the reinspection signal light is located between the dark field signal light and the bright field signal light, and the reinspection signal light, the dark field signal light and the bright field signal light keep from overlapping with each other through mutual spatial isolation.

[0011] In some embodiments, a part of a light beam path of the reinspection light and a part of a light beam path of the bright field light overlap, and a part of a light beam path of the bright field signal light and a part of a light beam path of the reinspection signal light overlap; the optical detection device further comprises a first mirror group, when reinspection is performed, the first mirror group is used for being moved to the light beam path of the bright field light, the bright field light is shielded through the first mirror group, and the reinspection light is guided to the surface of the sample to be detected through the first mirror group; and the mirror element is used for being moved to the light beam path of the bright field signal light, so that the reinspection signal light is reflected to the third transmission path through the mirror element; when bright field detection is performed, the first mirror group is further used for being moved out of the light beam path of the bright field light, and the mirror element is further used for being moved out of the light beam path of the bright field signal light.

[0012] In some embodiments, the collection reflection element comprises a first reflection surface and a second reflection surface, the bright field signal light incident to the collection reflection element is reflected by the first reflection surface and enters the first transmission path, and the dark field signal light incident to the collection reflection element is reflected by the second reflection surface and enters the second transmission path.

[0013] In some embodiments, the optical detection device further comprises: a first detector arranged in the first transmission path and configured to image the bright field signal light emitted by the collection reflection element; a second detector arranged in the second transmission path and configured to image the dark field signal light emitted by the collection reflection element; and a third detector arranged in the third transmission path and configured to image the re-examination signal light emitted by the mirror element.

[0014] In some embodiments, the collection reflection element is a trapezoidal prism, the first reflection surface and the second reflection surface are arranged on two inclined side surfaces of the trapezoidal prism, the first transmission path, the second transmission path and the third transmission path are distributed in the same horizontal plane, and the first detector, the second detector and the third detector are arranged on the same water platform surface to reduce the influence of water platform surface vibration on imaging.

[0015] In some embodiments, the bright field light source and the dark field light source comprise a continuous light source, the re-examination light source comprises a stroboscopic light source, the first detector and the second detector comprise a line scan camera, and the third detector comprises a color area array camera.

[0016] In some embodiments, the optical detection device further comprises: an objective lens and a light splitting element arranged in sequence in a direction away from the sample to be detected, the re-examination light and the bright field light are sequentially incident to the surface of the sample to be detected through the light splitting element and the objective lens, the bright field signal light and the dark field signal light are sequentially incident to the collection reflection element through the objective lens and the light splitting element, and the re-examination signal light is sequentially incident to the mirror element through the objective lens and the light splitting element.

[0017] In some embodiments, the optical detection device further comprises an imaging lens group arranged between the light splitting element and the collection reflection element, and arranged between the light splitting element and the mirror element, the bright field signal light and the dark field signal light emitted from the light splitting element are collected by the collection reflection element through the imaging lens group, and the re-examination signal light emitted from the light splitting element is incident to the mirror element through the imaging lens group.

[0018] In some embodiments, the target surface size of the first detector is the same as the target surface size of the second detector, and the imaging field of view of the imaging lens group satisfies the following formula:

[0019] ;

[0020] wherein, D is the diameter of the imaging field of view, l is the target surface length,w for a target surface width, d for a separation distance between the bright field and the dark field.

[0021] In some embodiments, the optical detection device further comprises a re-examination illumination modulation mirror group, a first reflection mirror group and an illumination mirror group arranged between the re-examination light source and the light splitting element, the re-examination light emitted by the re-examination light source sequentially passes through the re-examination illumination modulation mirror group, the first reflection mirror group and the illumination mirror group to be incident on the light splitting element.

[0022] In some embodiments, the objective lens comprises a plurality of sub-objective lenses, each sub-objective lens has a different magnification, one of the plurality of sub-objective lenses is located in the light beam transmission path between the light splitting element and the sample to be detected, and the sub-objective lens located in the light beam transmission path is switchable.

[0023] In some embodiments, the optical detection device further comprises an automatic focusing module, the automatic focusing module comprises an automatic focusing light source and a dichroic mirror, the dichroic mirror is arranged between the light splitting element and the objective lens, the automatic focusing light source is used to emit focusing light, the focusing light is guided by the dichroic mirror to irradiate the surface of the sample to be detected, and the wavelength of the focusing light is different from the wavelength of the re-examination light, the wavelength of the bright field light, the wavelength of the dark field signal light, the wavelength of the bright field signal light and the wavelength of the re-examination signal light.

[0024] The present application provides another aspect of a control method of an optical detection device, comprising: providing an optical detection device, the optical detection device comprising a bright field light source, a dark field light source, a re-examination light source, an objective lens, a collection reflection element and a reflection mirror element; the control method of the optical detection device comprising: performing primary detection on a sample to be detected, switching the magnification of the objective lens to a first magnification, controlling the bright field light source to emit bright field light, and controlling the dark field light source to emit dark field light, the bright field light irradiating the sample to be detected to make the sample to be detected emit bright field signal light, the dark field light irradiating the sample to be detected to make the sample to be detected scatter dark field signal light, the dark field signal light and the bright field signal light not overlapping each other, and the dark field signal light and the bright field signal light being transmitted along a common light path by the objective lens to be collected by the collection reflection element, the collection reflection element spatially separating the bright field signal light and the dark field signal light, making the bright field signal light be reflected into a first transmission path for bright field imaging, and making the dark field signal light enter a second transmission path for dark field imaging; performing re-examination on the sample to be detected, switching the magnification of the objective lens to a second magnification, the second magnification being greater than the first magnification, controlling the re-examination light source to emit re-examination light, the re-examination light being incident on the surface of the sample to be detected and being reflected by the sample to be detected to form re-examination signal light, the re-examination signal light being reflected by the objective lens to the reflection mirror element to the third transmission path for re-examination imaging, the re-examination light being a stroboscopic light beam to reduce the trailing of the re-examination signal light when the re-examination signal light is imaged, and the re-examination signal light being totally reflected by the reflection mirror element to reduce the light intensity attenuation.

[0025] In some embodiments, the preliminary inspection further comprises: stepwise moving the sample to be inspected in a first direction for bright field imaging and dark field imaging, and stepwise moving the sample to be inspected in a second direction for bright field imaging and dark field imaging, the first direction being perpendicular to the second direction; the re-inspection further comprises: when the preliminary inspection detects a defect in the sample to be inspected, performing re-inspection imaging on the position where the defect is located.

[0026] In some embodiments, the optical detection device further comprises a first mirror set, the partial beam path of the re-inspection light and the partial beam path of the bright field light coincide, the partial beam path of the bright field signal light and the partial beam path of the re-inspection signal light coincide; the control method of the optical detection device further comprises: when performing re-inspection, moving the first mirror set to the beam path of the bright field light, so that the re-inspection light is guided to the surface of the sample to be inspected through the first mirror set, and moving the mirror element to the beam path of the bright field signal light at the same time, so that the re-inspection signal light is reflected to the third transmission path through the mirror element; when performing bright field detection, moving the first mirror set out of the beam path of the bright field light, so that the bright field light is transmitted to the surface of the sample to be inspected, and moving the mirror element out of the beam path of the bright field signal light at the same time, so that the bright field signal light is transmitted into the first transmission path for bright field imaging.

[0027] Compared with the prior art, the present application can achieve the following beneficial effects:

[0028] In the optical detection device provided by the embodiments of the present application, the bright field light source for preliminary inspection and the dark field light source for preliminary inspection are independent of each other, thereby avoiding the problem of limited wavelength selection in the detection process; and the re-inspection light source and the bright field light source are independent of each other, the re-inspection signal light is a return signal light formed by the re-inspection light emitted by the re-inspection light source after being reflected by the sample to be inspected, and is not obtained by splitting the bright field signal light, therefore, the intensity of the re-inspection signal light is strong, and the intensity of the bright field signal light is also strong, which is conducive to improving the detection accuracy; in addition, the stroboscopic light beam is used as the re-inspection light beam, which is conducive to relieving the imaging trailing phenomenon caused by the high-speed movement of the sample to be inspected during re-inspection, and is conducive to further improving the detection accuracy of re-inspection. BRIEF DESCRIPTION OF DRAWINGS

[0029] The accompanying drawings, which form a part of the present application, are used to provide further understanding of the present application, and serve as an explanation of the embodiments of the present application, and do not constitute improper limitations to the present application. In the drawings:

[0030] Figure 1 A structural schematic diagram of the optical detection device described in the embodiments of the present application;

[0031] Figure 2 Another structural schematic diagram of the optical detection device described in the embodiments of the present application;

[0032] Figure 3Another structural schematic diagram of the optical detection device according to the embodiment of the present application;

[0033] Figure 4 A structural schematic diagram of the collection reflection element according to the embodiment of the present application;

[0034] Figure 5 A schematic diagram of a single frame image corresponding to a stroboscopic light source and a single frame image corresponding to a constant light source;

[0035] Figure 6 An imaging field layout schematic diagram of the imaging lens group of the optical detection device according to the embodiment of the present application.

[0036] Legend: 120, review light source; 100, bright field light source; 110, dark field light source; 191, sample to be detected; 180, collection reflection element; 183, through hole; 181, first reflection surface; 182, second reflection surface; 200, first detector; 210, second detector; 220, third detector; 160, objective lens; 150, light splitting element; 170, imaging lens group; 121, review illumination modulation mirror group; 130, illumination lens group; 101, bright field illumination modulation mirror group; 122, first reflection mirror group; 140, second reflection mirror group; 161, sub-objective lens; 230, automatic focusing light source; 231, dichroic mirror; 111, dark field illumination modulation mirror group; 190, bearing table. DETAILED DESCRIPTION

[0037] It is found through analysis that, for defect detection, the detection time mainly depends on the initial detection scanning detection time, the number of defects in review and the positioning speed of defect positions. In a fixed detection time, how to improve the initial detection defect discrimination ability becomes the key to improving the defect detection precision. Considering that there are many types of defects that can exist on a chip, the bright field imaging and the dark field imaging have different discrimination abilities for different types of defects, and a detection method of respectively using bright field imaging and dark field imaging in initial detection is proposed. In this way, how to reasonably set the optical path of bright field imaging, the optical path of dark field imaging and the optical path of review imaging becomes the key of the defect detection technology based on optical imaging.

[0038] The existing implementation schemes can be divided into three categories: the first category of scheme sets two or three completely independent optical systems to respectively perform bright field imaging, dark field imaging and re-inspection imaging, so that different optical systems need to be switched to switch the bright field detection, dark field detection and re-inspection, which increases the difficulty of positioning the defect position, and therefore greatly increases the detection time; the second category of scheme adopts a common optical path design, the field of view regions corresponding to the bright field and the dark field are the same, the bright field imaging and the dark field imaging use light sources of different wavelengths for illumination, and different wavelengths of light are separated at the signal collection end to realize the simultaneous imaging of the bright field and the dark field, and then the re-inspection is realized by the way of splitting the signal light, considering that different defect materials have different sensitivities to the wavelength of the detection light, the selection of the detection wavelengths of the bright field and the dark field in the scheme is limited; the third category of scheme also adopts a common optical path design, the bright field and the dark field correspond to different regions of the field of view respectively, the split-region detection of the bright field and the dark field is realized, the re-inspection shares the light source with the bright field, and the re-inspection imaging is realized by splitting the bright field collected signal light (such as the optical scheme disclosed in patent US20090059215A1), the scheme realizes the simultaneous detection of the bright field and the dark field under the same optical path system, and can well realize the rapid and high-precision judgment of the defect position, but the re-inspection splitting reduces the intensity of the bright field signal and the re-inspection signal, and at the same time, the fast movement of the wafer in the re-inspection can easily cause the re-inspection imaging to produce a trailing phenomenon, and then affect the detection precision.

[0039] To solve the above problems, the embodiments of the present application provide an optical detection device and a control method thereof, which are beneficial to solve the problem of limited selection of light source wavelength in the detection process, and are beneficial to alleviate the imaging trailing phenomenon caused by the high-speed movement of the re-inspection sample, and are further beneficial to improve the detection precision of the re-inspection.

[0040] In order to make the purpose, technical scheme and advantages of the present application more clear, the present application will be further described in detail below with reference to the drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application, and do not constitute a limitation on the present application.

[0041] It should be noted that the embodiments in the present application and the features in the embodiments can be combined with each other without conflict.

[0042] In the description of the present application, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second" and the like are only for the purpose of description and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined with "first", "second" and the like can explicitly or implicitly include one or more of the features. In the description of the present application, unless otherwise stated, the meaning of "a plurality of" is two or more.

[0043] In the description of the present application, it should be noted that unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connecting" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium, or it can be connected inside two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood through specific circumstances.

[0044] The present application will be described in detail below with reference to the accompanying drawings and in conjunction with embodiments.

[0045] Reference Figures 1-2The application provides an optical detection device, which comprises: a re-examination light source 120, which emits re-examination light, the re-examination light is incident on the surface of a sample 191 to be detected, and the re-examination light is reflected by the sample 191 to form re-examination signal light; a bright field light source 100 and a dark field light source 110, which emit bright field light and dark field light respectively, the bright field light and the dark field light are incident on the surface of the sample 191 to be detected, the bright field light is reflected by the sample 191 to form bright field signal light, and the dark field light is scattered by the sample 191 to form dark field signal light, the bright field signal light, the dark field signal light and the re-examination signal light are transmitted along a common light path; a collection and reflection element 180, which is used for collecting the bright field signal light and the dark field signal light and spatially separating the bright field signal light and the dark field signal light, so that the bright field signal light is reflected into a first transmission path to form bright field imaging, and the dark field signal light is reflected into a second transmission path to form dark field imaging; and a mirror element 183, which is arranged on the transmission path of the re-examination signal light and is used for reflecting the re-examination signal light to a third transmission path to form re-examination imaging; the re-examination light is a stroboscopic light beam, so as to weaken the trailing of the re-examination signal light when the re-examination imaging is performed, and the re-examination signal light is totally reflected by the mirror element 183, so as to reduce the light intensity attenuation.

[0046] The bright field light source 100, the dark field light source 110 and the re-examination light source 120 are independent of each other, so that the wavelength selection in the detection process is not limited; the bright field signal light, the re-examination signal light and the dark field signal light are independent of each other, so that the signal light needs to be split to obtain the bright field signal light and the re-examination signal light in the prior art is avoided, which is beneficial to guarantee that the bright field signal light and the re-examination signal light with high intensity are obtained, and thus the detection precision is improved; the re-examination signal light is totally reflected by the mirror element 183, so that the light intensity attenuation is reduced as much as possible, and then the re-examination imaging is performed, which is beneficial to reduce the optical loss of the re-examination signal light in the transmission process, and even the light intensity attenuation in the total reflection process can be ignored, and thus the detection precision of the re-examination is improved; the stroboscopic light beam is used as the re-examination light, which is beneficial to relieve the imaging trailing phenomenon of the re-examination when the sample 191 to be detected moves at a high speed, specifically, in order to improve the speed, the photographing is usually performed in the movement process when the re-examination is taken, and a surface array camera is usually used as the re-examination detector, if the re-examination light is a constant light beam, because the frequency of the surface array camera is limited, the displacement caused by the movement is easy to cause large trailing in the exposure time of a single frame, as shown in (a) of FIG. 8; when the stroboscopic light beam is used as the re-examination light, the frequency of the re-examination light is higher than the frequency of the surface array camera, that is, the stroboscopic time of the re-examination light source 120 is very short, so the trailing is small, as shown in (b) of FIG. 8, and thus the trailing problem can be relieved. Figure 5 Figure 5

[0047] ​​It should be noted that the extension direction of the first transmission path, the extension direction of the second transmission path, and the extension direction of the third transmission path are all different. In some examples, the first transmission path and the second transmission path can extend in opposite directions, and the extension direction of the third transmission path can be perpendicular to (or parallel to) the extension direction of the first transmission path or the second transmission path. The spatial separation of the bright field signal light, the dark field signal light, and the review signal light is achieved by using the collection reflection element 180 and the mirror element 183, so that the corresponding signal light is received by the corresponding detector, and the problem of high difficulty in positioning the detector due to the close distance between the bright field signal light, the dark field signal light, and the review signal light is solved.

[0048] The optical detection device provided by the embodiment of the present application is used for defect detection of a sample 191 to be detected. In some examples, the sample 191 to be detected can be a wafer or a wafer with or without a pattern.

[0049] In some embodiments, with reference to Figure 1 and Figure 2 , the dark field signal light and the bright field signal light do not overlap when transmitted in the common optical path, and the distance between the dark field light spot formed on the surface of the sample 191 and the bright field light spot formed on the surface of the sample 191 is in the range of 0.2 mm to 3 mm. That is, the distance between the bright field light spot and the dark field light spot is not too far or too close. In this way, it is beneficial to avoid the difficulty of positioning to the same detection position, thereby improving the detection efficiency, and it is beneficial to ensure that the bright field detection and the dark field detection do not interfere with each other, thereby improving the detection accuracy.

[0050] In some embodiments, with reference to Figure 1 , the review signal light does not overlap with the bright field signal light and the dark field signal light when transmitted in the common optical path; the review light and the bright field light have a common transmission path, and the review light and the bright field light do not overlap when transmitted.

[0051] In some embodiments, with reference to Figure 1 , in the common optical path, the review signal light is located between the dark field signal light and the bright field signal light, and the review signal light, the dark field signal light, and the bright field signal light do not overlap by mutual spatial isolation. In this way, the distance between the dark field light spot and the bright field light spot with the largest distance among the dark field light spot, the bright field light spot, and the review light spot is not too far or too close. The advantage of not being too far is that in the switching process of the bright field detection, the dark field detection, and the review, the difficulty of positioning to the same detection position is avoided, thereby facilitating rapid switching of different detection modes and improving the detection efficiency. The advantage of not being too close is that it is beneficial to ensure that the bright field detection, the dark field detection, and the review do not interfere with each other, thereby improving the detection accuracy.

[0052] In some embodiments, the review spot is located between the dark field spot and the bright field spot, and the distance from the dark field spot to the review spot is the same as or different from the distance from the bright field spot to the review spot.

[0053] In some embodiments, the review light and the bright field light share a partial beam path, and the bright field signal light and the review signal light share a partial beam path. Figure 2 In some embodiments, the review light and the bright field light share a partial beam path, and the bright field signal light and the review signal light share a partial beam path; the optical detection device further comprises a first mirror group 122, when performing review, the first mirror group 122 is used to be moved to the beam path of the bright field light, so that the review light is guided to the surface of the sample 191 through the first mirror group 122 by blocking the bright field light; and the mirror element 183 is used to be moved to the beam path of the bright field signal light, so that the review signal light is reflected to the third transmission path through the mirror element 183; when performing bright field detection, the first mirror group 122 is further used to be moved out of the beam path of the bright field light, so that the bright field light can be guided to the surface of the sample 191 to generate bright field signal light, and the mirror element 183 is further used to be moved out of the beam path of the bright field signal light, so that the bright field signal light can also be transmitted to the collection reflection element 180, and then enter the first transmission path to perform bright field imaging. In this way, by moving the first mirror group 122 and the mirror element 183, the switching of the review light path and the bright field detection light path can be realized, and then the corresponding detection light path can be turned on when performing corresponding detection. Moreover, the same region on the sample 191 is imaged by the bright field detection and the review, and in the switching process of the bright field detection and the review, the difficulty of positioning to the same detection position is avoided, and then the detection speed is improved by realizing the rapid switching of different detection modes.

[0054] In some embodiments, the review light and the bright field light share a partial beam path, and the bright field signal light and the review signal light share a partial beam path; the optical detection device further comprises a first mirror group 122, when performing review, the first mirror group 122 is used to be moved to the beam path of the bright field light, so that the review light is guided to the surface of the sample 191 through the first mirror group 122 by blocking the bright field light; and the mirror element 183 is used to be moved to the beam path of the bright field signal light, so that the review signal light is reflected to the third transmission path through the mirror element 183; when performing bright field detection, the first mirror group 122 is further used to be moved out of the beam path of the bright field light, so that the bright field light can be guided to the surface of the sample 191 to generate bright field signal light, and the mirror element 183 is further used to be moved out of the beam path of the bright field signal light, so that the bright field signal light can also be transmitted to the collection reflection element 180, and then enter the first transmission path to perform bright field imaging. In this way, by moving the first mirror group 122 and the mirror element 183, the switching of the review light path and the bright field detection light path can be realized, and then the corresponding detection light path can be turned on when performing corresponding detection. Moreover, the same region on the sample 191 is imaged by the bright field detection and the review, and in the switching process of the bright field detection and the review, the difficulty of positioning to the same detection position is avoided, and then the detection speed is improved by realizing the rapid switching of different detection modes. Figure 4 In some embodiments, the collection reflection element 180 comprises a first reflection surface 181 and a second reflection surface 182, the bright field signal light incident to the collection reflection element 180 is reflected by the first reflection surface 181 and then enters the first transmission path, and the dark field signal light incident to the collection reflection element 180 is reflected by the second reflection surface 182 and then enters the second transmission path.

[0055] In some embodiments, the optical detection device further comprises a first detector 200 arranged in the first transmission path and configured to image the bright field signal light emitted by the collection reflection element 180; a second detector 210 arranged in the second transmission path and configured to image the dark field signal light emitted by the collection reflection element 180; and a third detector 220 arranged in the third transmission path and configured to image the review signal light emitted by the mirror element 183.

[0056] Figure 4 ​The collecting reflection element 180 is a trapezoidal prism, the first reflection surface 181 and the second reflection surface 182 are arranged on two inclined sides of the trapezoidal prism respectively, the first transmission path, the second transmission path and the third transmission path are distributed in the same horizontal plane, and the first detector 200, the second detector 210 and the third detector 220 are arranged on the same water platform surface to reduce the influence of water platform surface vibration on imaging. The principle of arranging the first detector 200, the second detector 210 and the third detector 220 on the same water platform surface to reduce the influence of vibration is as follows: generally, there is a support and damping structure under the platform for arranging the first detector 200, the second detector 210 and the third detector 220, if the first detector 200, the second detector 210 and the third detector 220 are arranged on the platform and arranged horizontally on the platform, then the gravity center of the first detector 200, the second detector 210 and the third detector 220 is relatively lower and can be better fixed with the platform; if the first detector 200, the second detector 210 and the third detector 220 are arranged in the vertical direction, the overall gravity center is higher, and the detector in the upper layer cannot be directly fixed with the platform and needs to be supported again, so that the detector in the upper layer is more easily affected by vibration. Based on this, the first detector 200, the second detector 210 and the third detector 220 are arranged on the same water platform surface, which is conducive to reducing the influence of platform vibration on imaging.

[0057] In some embodiments, the bright field light source 100 and the dark field light source 110 include a continuous light source for forming an efficient linear illumination spot (long strip-shaped spot) on the surface of the sample 191 to be detected; in some examples, a linear optical fiber can be used to couple the bright field light source 100 or the dark field light source 110 as an illumination input end.

[0058] In some embodiments, the first detector 200 and the second detector 210 include a line scan camera; in some examples, the first detector 200 and the second detector 210 are both integral delay line scan cameras, which can maintain high-resolution image capture capability in high-speed motion of the sample 191 to be detected, and are suitable for application scenarios of continuous and rapid movement of the sample 191 to be detected.

[0059] In some embodiments, the re-examination light source 120 includes a stroboscopic light source, which is used as the re-examination light source 120 to alleviate the imaging trailing phenomenon caused by the high-speed movement of the sample 191 to be detected.

[0060] In some embodiments, the third detection probe 220 comprises a color area array camera, so that high-precision images can be collected by the third detection probe 220, with higher resolution and faster sensitivity, capable of capturing more details and more accurate colors, which is conducive to technicians identifying defect features in the color images.

[0061] In some embodiments, referring to Figure 1 and Figure 2 , the optical detection device further comprises: an objective lens 160 and a light splitting element 150 arranged in sequence in a direction away from the sample 191 to be detected, the re-examination light and the bright field light are sequentially incident on the surface of the sample 191 to be detected through the light splitting element 150 and the objective lens 160, the bright field signal light and the dark field signal light are sequentially incident on the collection reflection element 180 through the objective lens 160 and the light splitting element 150, and the re-examination signal light is sequentially incident on the mirror element 183 through the objective lens 160 and the light splitting element 150.

[0062] In some embodiments, the optical detection device further comprises an imaging lens group 170, which is arranged between the light splitting element 150 and the collection reflection element 180, and also arranged between the light splitting element 150 and the mirror element 183, the bright field signal light and the dark field signal light emitted from the light splitting element 150 are collected by the collection reflection element 180 through the imaging lens group 170, and the re-examination signal light emitted from the light splitting element 150 is incident on the mirror element 183 through the imaging lens group 170.

[0063] In some embodiments, for the optical detection device in Figure 1 , the bright field light spot and the dark field light spot can both be linear light spots in a long strip shape, and the re-examination light spot is a circular light spot. Specifically, referring to Figure 6 , the outermost circle represents the maximum field of view of the optical system, and the maximum field of view refers to the field of view of the detector receiving the bright field signal light, the field of view of the detector receiving the dark field signal light, and the field of view of the detector receiving the re-examination signal light combined according to their respective relative positions, the field of view of the detector receiving the bright field signal light and the field of view of the detector receiving the dark field signal light can be symmetrically distributed about the center of the maximum field of view, and the center of the field of view of the detector receiving the re-examination signal light can coincide with the center of the maximum field of view.

[0064] Figure 6 The imaging field of view layout shown is also equivalent to an illumination field of view schematic diagram, the bright field light spot and the dark field light spot can be symmetrically distributed about the center of the field of view, and the center of the re-examination light spot can coincide with the center of the maximum field of view.

[0065] It should be noted that in order to ensure that the bright field detection and the dark field detection do not interfere with each other, it is necessary to ensure that the bright field spot and the dark field spot do not interfere with each other, and therefore, a spacing area needs to be maintained between the bright field spot and the dark field spot, the spacing area serving as an isolation area, and the width of the spacing area d is as small as possible, and the theoretical value is 0, but because of the influence of aberration of the illumination light and stray light, the bright field spot and the dark field spot will have a halo or a diffuse spot. If the width of the spacing area d is 0, it is necessary to pay a great cost to make the surface of each related optical element clean and free of defects, and the illumination light path is free of aberration, and therefore, for the consideration of engineering difficulty and cost, and also in order to introduce a recheck spot, the width of the spacing area d needs to be reasonably set, and needs to ensure that the bright field detection and the dark field detection do not interfere with each other, and can add a recheck spot, and also does not allow the bright field illumination area and the dark field illumination area to be too far apart to cause the imaging field of view to be too large, and the width of the spacing area in the embodiment of the present application is preferably d 0.2mm-3mm.

[0066] In some embodiments, the target surface size of the first detector 200 is the same as the target surface size of the second detector 210, and the imaging field of view of the imaging lens group 170 satisfies the following formula:

[0067] ;

[0068] wherein the reference Figure 6 , D is the diameter of the imaging field of view, l is the target surface length, that is, the target surface length of the second detector 210 or the target surface length of the first detector 200, w is the target surface width, that is, the target surface width of the first detector 200 or the target surface width of the second detector 210, d is the spacing distance between the bright field and the dark field.

[0069] In some embodiments, the light splitting element 150 includes a light splitting mirror, and the included angle between the light splitting surface of the light splitting mirror facing the objective lens 160 and the horizontal direction can be 45°, and the imaging lens group 170, the first detector 200, the second detector 210 and the third detector 220 are arranged on the same water platform surface, so as to reduce the influence of platform vibration on imaging.

[0070] In some embodiments, the transmittance of the light splitting element 150 can be in the range of 0-50%, and the reflectance of the light splitting element 150 can be in the range of 50%-100%. The reason for such arrangement is that the signal of bright field detection is sufficient (i.e., the light intensity of bright field light is large), while the signal of dark field detection is weak (both the light intensity of dark field light and the light intensity of dark field signal light are weak), so the reflectance of the light splitting element 150 is made large and the transmittance is made small, so as to balance the light efficiency of bright field detection and the light efficiency of dark field detection.

[0071] In some embodiments, the optical detection device further comprises a review illumination modulation mirror group 121, a first reflection mirror group 122 and an illumination mirror group 130 arranged between the review light source 120 and the light splitting element 150, and the review light emitted by the review light source 120 enters the light splitting element 150 in sequence through the review illumination modulation mirror group 121, the first reflection mirror group 122 and the illumination mirror group 130. In some examples, the review illumination modulation mirror group 121 can include some optical elements such as relay lenses, filter plates, polarizing plates, diaphragms, etc., which play a role of shaping and modulating the review light.

[0072] In some embodiments, the illumination mirror group 130 is also arranged between the bright field light source 100 and the light splitting element 150, and the optical detection device further comprises a bright field illumination modulation mirror group 101, and the bright field light emitted by the bright field light source 100 enters the light splitting element 150 in sequence through the bright field illumination modulation mirror group 101 and the illumination mirror group 130. In some examples, the bright field illumination modulation mirror group 101 can include some optical elements such as relay lenses, filter plates, polarizing plates, diaphragms, etc., which play a role of shaping and modulating the bright field light.

[0073] That is, in some embodiments of the present application, the review detection and the bright field detection share the illumination mirror group 130, the light splitting element 150, the objective lens 160 and the imaging mirror group 170, so as to facilitate reducing the setting cost of the optical detection device.

[0074] In some embodiments, the optical detection device further comprises a dark field illumination modulation mirror group 111 located between the dark field light source 110 and the sample 191 to be detected, and the dark field light emitted by the dark field light source 110 enters the surface of the sample 191 to be detected through the dark field illumination modulation mirror group 111.

[0075] It should be noted that the dark field illumination modulation mirror group 111, the bright field illumination modulation mirror group 101, the review illumination modulation mirror group 121, the imaging mirror group 170 and the illumination mirror group 130 involved in the embodiments of the present application are all used to realize optical modulation of light beams, which includes but is not limited to collimation, filtering and condensation, etc.

[0076] In some embodiments, it is referred to Figure 1The re-examination light and the bright field light have a common transmission light path, and the re-examination light and the bright field light do not overlap when being transmitted. The optical detection device further comprises a first mirror group 122. The re-examination light emitted from the re-examination illumination modulation mirror group 121 is reflected by the first mirror group 122 to change the light path, and then enters the illumination mirror group 130. By arranging the first mirror group 122, the position conflict between the bright field light source 100 and the re-examination light source 120 caused by the fact that the bright field light and the re-examination light share the illumination mirror group 130 can be solved. Of course, in some cases, the first mirror group 122 can be cancelled, and the re-examination light can be directly transmitted to the illumination mirror group 130 by using optical fiber or other light beam transmission devices.

[0077] In some embodiments, the optical detection device further comprises a second mirror group 140. The second mirror group 140 can be used to change the light path of the re-examination light and the bright field light. Specifically, referring to Figure 1 and Figure 2 The second mirror group 140 is arranged on the transmission light path of the re-examination light emitted from the illumination mirror group 130 and the bright field light emitted from the illumination mirror group 130. After being reflected by the second mirror group 140, the re-examination light and the bright field light change the light path and then enter the light splitting element 150. By arranging the second mirror group 140 for changing the light path, the positions of various components in the optical detection device can be reasonably arranged, thereby facilitating the reduction of the overall size of the optical detection device. Of course, in some cases, the second mirror group 140 can be cancelled, so that the re-examination light and the bright field light directly enter the light splitting element 150.

[0078] In some embodiments, the objective lens 160 comprises a plurality of sub-objective lenses 161. Each sub-objective lens 161 has a different magnification. One of the plurality of sub-objective lenses 161 is located in the light beam transmission light path between the light splitting element 150 and the sample 191 to be detected. The sub-objective lens 161 located in the light beam transmission light path is switchable. When performing bright field detection and dark field detection, a sub-objective lens 161 with a lower magnification can be switched into the light beam transmission light path. When performing re-examination, a sub-objective lens 161 with a higher magnification can be switched into the light beam transmission light path for re-examination imaging. The selected magnification of the objective lens 160 needs to be flexibly configured according to actual requirements, which is not limited here.

[0079] In some embodiments, referring to Figure 3The optical detection device further comprises an auto-focusing module, the auto-focusing module comprises an auto-focusing light source 230 and a dichroic mirror 231, the dichroic mirror 231 is arranged between the light splitting element 150 and the objective lens 160, the auto-focusing light source 230 is used to emit a focusing light, the focusing light is guided to irradiate the surface of the sample 191 through the dichroic mirror 231, the focusing light is reflected on the surface of the sample 191 to form a focusing detection light, the focusing detection light reaches the auto-focusing module along the original light path, the auto-focusing module can further comprise an imaging detector, the imaging detector collects the spectral information or shape information of the focusing detection light, and the position of the sample 191 relative to the front focal plane of the sub-objective lens 161 can be judged based on the information. In addition, the wavelength of the focusing light is different from the wavelength of the re-examination light, the wavelength of the bright field light, the wavelength of the dark field signal light, the wavelength of the bright field signal light and the wavelength of the re-examination signal light. In this way, the dichroic mirror 231 can reflect the focusing light and transmit the re-examination light, the bright field light, the dark field signal light, the bright field signal light and the re-examination signal light, so as to ensure that the focusing light is incident on the surface of the sample 191 through the sub-objective lens 161, and to avoid the influence of the auto-focusing module on the re-examination, the bright field detection and the dark field detection. It can be understood that the position of the sample 191 is measured in real time through the auto-focusing module, and the sample 191 is adjusted to the front focal plane of the sub-objective lens 161 to be in a focused state, so that the sample 191 can be re-examined and re-examined.

[0080] In some embodiments, the auto-focusing module can use a red band detection light beam as the focusing light, and in some examples, a detection light beam with a wavelength in the range of 650nm to 700nm is preferably used as the focusing light, and the spectrum of the detection light (re-examination light, bright field light, dark field signal light, bright field signal light and re-examination signal light) is preferably in the 400nm to 650nm band, and the dichroic mirror 231 can reflect the light beam above 650nm and transmit the light below 650nm, so that the focusing light and the detection light of the auto-focusing module do not interfere with each other.

[0081] In some embodiments, the optical detection device further comprises a carrying table 190, the carrying table 190 has a carrying surface for carrying the sample 191. In some examples, the carrying table 190 is an electric displacement table, which can carry the sample 191 horizontally and move in the X-Y-Z direction respectively.

[0082] The application also provides a control method of an optical detection device, the optical detection device comprising a bright field light source 100, a dark field light source 110, a review light source 120, an objective lens 160, a collection reflection element 180, and a mirror element 183. The control method comprises: performing primary detection on a sample 191 to be detected, switching the magnification of the objective lens 160 to a first magnification, controlling the bright field light source 100 to emit bright field light, and controlling the dark field light source 110 to emit dark field light, the bright field light irradiating the sample 191 to be detected to make the sample 191 to be detected emit bright field signal light, and the dark field light irradiating the sample 191 to be detected to make the sample 191 to be detected scatter dark field signal light, the dark field signal light and the bright field signal light not overlapping with each other, and the dark field signal light and the bright field signal light being transmitted along a common light path by the objective lens 160 and being collected by the collection reflection element 180, the collection reflection element 180 spatially separating the bright field signal light and the dark field signal light, making the bright field signal light reflect into a first transmission path for bright field imaging, and making the dark field signal light enter a second transmission path for dark field imaging; performing review on the sample 191 to be detected, switching the magnification of the objective lens 160 to a second magnification, the second magnification being greater than the first magnification, and controlling the review light source 120 to emit review light, the review light being incident on the surface of the sample 191 to be detected and being reflected by the sample 191 to be detected to form review signal light, the review signal light being reflected by the mirror element 183 to a third transmission path through the objective lens 160 for review imaging, the review light being a stroboscopic light beam to weaken the trailing of the review signal light in the review imaging, and the review signal light being totally reflected by the mirror element 183 to reduce light intensity attenuation.

[0083] In some embodiments, the primary detection further comprises: stepwise moving the sample 191 to be detected in a first direction for bright field imaging and dark field imaging, and stepwise moving the sample 191 to be detected in a second direction for bright field imaging and dark field imaging, the first direction being perpendicular to the second direction; and the review further comprises: when the primary detection detects that the sample 191 to be detected has defects, performing review imaging on the positions of the defects.

[0084] In some embodiments, the optical detection device further comprises a first mirror group 122, the partial beam path of the review light and the partial beam path of the bright field light coincide, the partial beam path of the bright field signal light and the partial beam path of the review signal light coincide; the control method of the optical detection device further comprises: when performing review, moving the first mirror group 122 to the beam path of the bright field light, so that the review light is guided to the surface of the sample 191 to be detected through the first mirror group 122, and moving the mirror element 183 to the beam path of the bright field signal light, so that the review signal light is reflected to the third transmission path through the mirror element 183; when performing bright field detection, moving the first mirror group 122 out of the beam path of the bright field light, so that the bright field light is transmitted to the surface of the sample 191 to be detected, and moving the mirror element 183 out of the beam path of the bright field signal light, so that the bright field signal light is transmitted into the first transmission path for bright field imaging.

[0085] It should be noted that the detection process of the sample 191 to be detected in the present application is divided into preliminary detection and review, wherein the preliminary detection includes bright field detection and dark field detection, and the bright field detection and the dark field detection are performed simultaneously and the imaging does not interfere with each other. A lower magnification sub-objective 161 can be switched into the optical path to cooperate with the bright field detection and the dark field detection. When the review is performed after the bright field detection and the dark field detection are completed, a higher magnification sub-objective 161 can be switched into the optical path to cooperate with the review. Of course, in some cases, the preliminary detection and the review can also be performed simultaneously. For example, a sub-objective 161 with a suitable magnification is selected and switched into the optical path, and the bright field detection, the dark field detection and the review are performed simultaneously. Since the illumination and the imaging are separated from each other, the three do not interfere with each other, so that the detection efficiency can be greatly improved.

[0086] In summary, the bright field detection, the dark field detection and the review performed by the optical detection device provided in the embodiments of the present application are separated from each other, and the review light path is integrated, which is beneficial to improve the detection speed. The review light path uses a separate review light source 120, and a stroboscopic light source is used to solve the imaging smearing problem caused by the rapid movement of the sample 191 to be detected during review. The bright field signal light, the dark field signal light and the review signal light are separated from each other by the collection reflection element 180 and the mirror element 183, and then are received by the corresponding detectors, thereby solving the problem that the signal light becomes weak after being separated by a beam splitter.

[0087] It should be understood that the various forms of the flow shown above can be reordered, added to, or deleted from. For example, the steps described in the present disclosure can be executed in parallel, in sequence, or in different orders, as long as the desired results of the technical solutions of the present disclosure can be achieved, which are not limited herein.

[0088] The above detailed description does not limit the scope of the application. Various modifications, combinations, sub-combinations and alternatives can be made to the detailed description. Any modification, equivalent replacement and improvement etc. made within the spirit and principle of the application shall be included in the scope of the application.

Claims

1. An optical detection device, characterized by include: A re-inspection light source emits re-inspection light, which is incident on the surface of the sample to be inspected and reflected by the sample to form a re-inspection signal light; A bright-field light source emitting bright-field light and a dark-field light source emitting dark-field light are respectively incident on the surface of the sample to be inspected. The bright-field light is reflected by the sample to form a bright-field signal light, and the dark-field light is scattered by the sample to form a dark-field signal light. The re-inspection light and the bright-field light share a common transmission optical path, and the re-inspection light and the bright-field light do not overlap during transmission. The bright-field light spot and the dark-field light spot are symmetrically distributed about the center of the field of view. The center of the re-inspection light spot coincides with the center of the field of view. The distance between the dark-field light spot and the bright-field light spot is in the range of 0.2 mm to 3 mm. The bright-field signal light, the dark-field signal light and the re-inspection signal light are transmitted along the common optical path. In the common optical path, the re-inspection signal light is located between the dark-field signal light and the bright-field signal light. The re-inspection signal light, the dark-field signal light and the bright-field signal light are kept from overlapping by mutual spatial isolation. A reflective collection element is used to collect the bright field signal light and the dark field signal light and perform spatial separation, so that the bright field signal light is reflected into a first transmission path for bright field imaging, and the dark field signal light is sent into a second transmission path for dark field imaging. A reflector element is disposed on the transmission path of the re-examination signal light, and is used to reflect the re-examination signal light to a third transmission path for re-examination imaging; The re-examination light is a strobe beam to reduce the ghosting produced by the re-examination signal light during re-examination imaging, and the re-examination signal light undergoes total internal reflection through the reflector element to reduce light intensity attenuation.

2. The optical detection device of claim 1, wherein, The collecting and reflecting element includes a first reflecting surface and a second reflecting surface. The bright field signal light incident on the collecting and reflecting element is reflected by the first reflecting surface and enters the first transmission path. The dark field signal light incident on the collecting and reflecting element is reflected by the second reflecting surface and enters the second transmission path.

3. The optical detection device of claim 2, wherein, The optical inspection equipment also includes: A first detector, located in the first transmission path, is used to image the bright field signal light emitted by the collecting and reflecting element; The second detector, located in the second transmission path, is used to image the dark field signal light emitted by the collecting and reflecting element; The third detector, located in the third transmission path, is used to image the re-examination signal light emitted by the reflector element.

4. The optical detection device of claim 3, wherein, The collecting and reflecting element is a trapezoidal prism. The first reflecting surface and the second reflecting surface are respectively disposed on two oblique sides of the trapezoidal prism. The first transmission path, the second transmission path and the third transmission path are all distributed in the same horizontal plane. The first detector, the second detector and the third detector are disposed on the same horizontal platform to reduce the influence of horizontal platform vibration on imaging.

5. The optical detection device of claim 3, wherein, The bright field light source and the dark field light source comprise continuous light sources, the review light source comprises a stroboscopic light source, the first detector and the second detector comprise line scan cameras, and the third detector comprises a color area array camera.

6. The optical detection device of claim 3, wherein, The optical detection device further comprises an objective lens and a light splitting element arranged in sequence in a direction away from the sample to be detected, wherein the review light and the bright field light sequentially pass through the light splitting element and the objective lens to be incident on the surface of the sample to be detected, the bright field signal light and the dark field signal light sequentially pass through the objective lens and the light splitting element to be incident on the collection reflecting element, and the review signal light sequentially passes through the objective lens and the light splitting element to be incident on the reflecting mirror element.

7. The optical detection device of claim 6, wherein, The optical detection device further comprises an imaging lens group arranged between the light splitting element and the collection reflecting element and arranged between the light splitting element and the reflecting mirror element, wherein the bright field signal light and the dark field signal light emitted from the light splitting element pass through the imaging lens group to be collected by the collection reflecting element, and the review signal light emitted from the light splitting element passes through the imaging lens group to be incident on the reflecting mirror element.

8. The optical detection device of claim 7, wherein, The target surface size of the first detector is the same as the target surface size of the second detector, and the imaging field of view of the imaging lens group satisfies the following formula: ； wherein, D is the diameter of the imaging field of view, l is the length of the target surface, w is the width of the target surface, d is the separation distance between the bright field and the dark field.

9. The optical detection device of claim 6, wherein, The optical detection device further comprises a review illumination modulation mirror group, a first reflecting mirror group and an illumination lens group arranged between the review light source and the light splitting element, wherein the review light emitted by the review light source sequentially passes through the review illumination modulation mirror group, the first reflecting mirror group and the illumination lens group to be incident on the light splitting element.

10. The optical detection device of claim 6, wherein, The objective lens comprises a plurality of sub-objective lenses, each of which has a different magnification, one of the plurality of sub-objective lenses is located in a light beam transmission path between the light splitting element and the sample to be detected, and the sub-objective lens located in the light beam transmission path is switchable.

11. The optical detection device of claim 6, wherein, The optical detection device further comprises an automatic focusing module, the automatic focusing module comprises an automatic focusing light source and a dichroic mirror, the dichroic mirror is arranged between the light splitting element and the objective lens, the automatic focusing light source is used to emit focusing light, the focusing light is guided by the dichroic mirror to irradiate the surface of the sample to be detected, and the wavelength of the focusing light is different from the wavelengths of the review light, the bright field light, the dark field signal light, the bright field signal light and the review signal light.

12. A control method of an optical inspection apparatus, characterized by, The optical detection device comprises: The optical detection device comprises a bright field light source, a dark field light source, a review light source, an objective lens, a collection reflecting element and a reflecting mirror element; The control method of the optical detection device comprises: The initial inspection is performed on the sample to be inspected, the magnification of the objective lens is switched to a first magnification, the bright field light source is controlled to emit bright field light, and the dark field light source is controlled to emit dark field light, the bright field light irradiates the sample to be inspected to make the sample to be inspected emit bright field signal light, the dark field light irradiates the sample to be inspected to make the sample to be inspected scatter dark field signal light, the dark field signal light and the bright field signal light do not overlap each other, and the dark field signal light and the bright field signal light are transmitted along a common optical path through the objective lens and are collected by the collection reflection element, the collection reflection element spatially separates the bright field signal light and the dark field signal light, reflects the bright field signal light into a first transmission path for bright field imaging, and makes the dark field signal light enter a second transmission path for dark field imaging; The re-inspection is performed on the sample to be inspected, the magnification of the objective lens is switched to a second magnification, the second magnification is greater than the first magnification, the re-inspection light source is controlled to emit re-inspection light, the re-inspection light is incident on the surface of the sample to be inspected and is reflected by the sample to be inspected to form re-inspection signal light, the re-inspection signal light is reflected by the mirror element to a third transmission path through the objective lens for re-inspection imaging, the re-inspection light is a stroboscopic light beam to reduce the smearing of the re-inspection signal light during re-inspection imaging, and the re-inspection signal light is totally reflected by the mirror element to reduce light intensity attenuation; The re-inspection light and the bright field light have a common transmission optical path, and the re-inspection light and the bright field light do not overlap each other during transmission, the bright field light spot and the dark field light spot are symmetrically distributed about the center of the field of view, the center of the re-inspection light spot coincides with the center of the field of view, the distance between the dark field light spot and the bright field light spot is within the range of 0.2mm to 3mm, in the common optical path, the re-inspection signal light is located between the dark field signal light and the bright field signal light, and the re-inspection signal light, the dark field signal light and the bright field signal light remain non-overlapping by mutual spatial isolation.

13. The method of controlling an optical detection apparatus according to claim 12, wherein The initial inspection further includes: stepwise moving the sample to be inspected in a first direction to perform the bright field imaging and the dark field imaging, and stepwise moving the sample to be inspected in a second direction to perform the bright field imaging and the dark field imaging, the first direction being perpendicular to the second direction; The re-inspection further includes: when the initial inspection detects a defect in the sample to be inspected, performing re-inspection imaging on the position of the defect.

Images