Pipeline diagram generation method, semiconductor process equipment and computer readable storage medium

Abstract

The invention provides a pipeline diagram generation method, semiconductor process equipment and a computer readable storage medium. The method comprises the following steps: acquiring text information of a pipeline; the text information comprises at least two node identifiers and a pipeline identifier located between the two node identifiers; the text information is in one-to-one correspondence with the pipelines; analyzing the text information based on a preset analysis rule, and determining at least one piece of sub-text information; the analysis rule comprises dividing two adjacent node identifiers and a pipeline identifier between the two adjacent node identifiers into the same sub-text information, and the sub-text information is in one-to-one correspondence with the minimum pipeline; generating a corresponding minimum pipeline diagram based on the sub-text information; the minimum pipeline diagram is used for representing the structure of the minimum pipeline in an image form; and generating an initial pipeline diagram based on all the minimum pipeline diagrams. According to the scheme, the pipeline diagram can be quickly generated, and the generation efficiency of the pipeline diagram is improved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and in particular to a pipeline diagram generation method, semiconductor process equipment and computer-readable storage medium. Background Art

[0002] In the control system of semiconductor process equipment, a pipeline diagram is usually constructed for the pipeline system of the semiconductor process equipment, and the pipeline diagram is used to display or modify the attribute data of each pipeline, so as to intuitively present the attribute data of each pipeline or control the attributes of each pipeline.

[0003] At present, the related art pipeline diagram generation method is: first use special drawing software to draw the mechanical schematic diagram of the pipeline system; then perform image recognition on the mechanical schematic diagram to generate an initial pipeline diagram; then manually bind the device image and attribute data in the initial pipeline diagram to generate the target pipeline diagram. Since the image recognition process requires a lot of computing resources, the speed of generating the pipeline diagram is reduced. Summary of the invention

[0004] The present application provides a pipeline map generation method, semiconductor process equipment and computer-readable storage medium to solve the problem in the related art that image recognition consumes a lot of computing resources, resulting in a slow pipeline map generation speed.

[0005] The first aspect of the present application provides a pipeline diagram generation method, which is applied to a host computer of a semiconductor process equipment, wherein the semiconductor process equipment includes a pipeline system, the pipeline system includes at least one pipeline, the pipeline includes at least one minimum pipeline, and the minimum pipeline is a pipeline located between two adjacent nodes in the pipeline; the method includes: obtaining text information of the pipeline; the text information includes at least two node identifiers and a pipeline identifier located between the two node identifiers; the text information corresponds one-to-one with the pipeline; parsing the text information based on a preset parsing rule to determine at least one sub-text information; the parsing rule includes dividing two adjacent node identifiers and the pipeline identifier between them into the same sub-text information, and the sub-text information corresponds one-to-one with the minimum pipeline; based on the sub-text information, generating a corresponding minimum pipeline diagram; the minimum pipeline diagram is used to characterize the structure of the minimum pipeline in an image form; based on all the minimum pipeline diagrams, generating an initial pipeline diagram.

[0006] In one embodiment, the text information also includes a device identifier located between two adjacent node identifiers. The text information is parsed based on a preset parsing rule to determine that at least one sub-text information also includes: treating two adjacent node identifiers, a pipeline identifier located between two adjacent node identifiers, and a device identifier as a sub-text information.

[0007] In one embodiment, the method further includes: traversing the device identification of the sub-text information, acquiring attribute data corresponding to the device identification from a preset attribute database; and automatically binding the attribute data with the minimum pipeline diagram to generate a target pipeline diagram.

[0008] In one embodiment, the attribute data is presented in a table or icon form.

[0009] In one implementation, the attribute data and the text information are configured in the same text file.

[0010] In one embodiment, generating a corresponding minimum pipeline diagram based on sub-text information includes: based on the pipeline identifier in the sub-text information, obtaining a pipeline segment image corresponding to the pipeline identifier from a preset image database and displaying it; marking two node identifiers in the sub-text information at both ends of the pipeline segment image in a one-to-one correspondence to generate a minimum pipeline diagram.

[0011] In one embodiment, the sub-text information also includes a device identification. Based on the sub-text information, generating a corresponding minimum pipeline diagram also includes: based on the device identification in the sub-text information, obtaining a device image corresponding to the device identification from an image database; setting the device image on the pipeline segment image and displaying it.

[0012] In one embodiment, the minimum pipeline graph includes multiple minimum pipeline graphs, and the two ends of the minimum pipeline graph respectively have two different node identifiers. Based on all the minimum pipeline graphs, generating an initial pipeline graph includes: splicing the ends corresponding to the same node identifiers of all minimum pipeline graphs to generate the initial pipeline graph.

[0013] The second aspect of the present application provides a semiconductor process equipment, including a pipeline system and a host computer; the host computer includes a processor and a memory, the memory stores instructions, and the instructions are loaded and executed by the processor to implement any of the above-mentioned methods to generate a pipeline diagram of the pipeline system.

[0014] A third aspect of the present application provides a computer-readable storage medium, in which a computer program is stored. When the computer program is executed by a processor, a method of any one of the above-mentioned embodiments is implemented.

[0015] The advantages or beneficial effects of the above technical solution include at least: since there is a one-to-one correspondence between the pipelines in the pipeline system and the text information, the text information of the pipeline can be used to characterize the structure of the pipeline, and by parsing the text information of the pipeline, the sub-text information corresponding to the minimum pipeline in the pipeline can be determined, and then the sub-text information is used to generate the minimum pipeline map, and then the minimum pipeline map is used to generate the initial pipeline map. This pipeline map generation method only needs to process the text information, and does not need to perform image recognition. Its calculation amount is much smaller than the calculation amount of image recognition, which can effectively reduce the use of computing resources, which is conducive to improving the computing speed, thereby quickly generating the pipeline map and improving the efficiency of pipeline map generation. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The accompanying drawings herein are incorporated into and constitute a part of the specification, illustrate embodiments consistent with the present application, and together with the specification are used to explain the principles of the present application. In addition, these drawings and text descriptions are not intended to limit the scope of the concept of the present application in any way, but to illustrate the concept of the present application for those skilled in the art by referring to specific embodiments.

[0017] Figure 1A Shown is a mechanical schematic diagram of a piping system of related technology.

[0018] Figure 1B Shown is an initial piping diagram of a piping system of the related art.

[0019] Figure 1C Shown is a target piping diagram of a piping system of the related art.

[0020] Figure 2 The figure is a flow chart of a method for generating a pipeline diagram according to an embodiment of the present application.

[0021] Figure 3A Shown is a schematic structural diagram of a pipeline system according to an embodiment of the present application.

[0022] Figure 3B Shown is the pair Figure 3A Schematic diagram of the marking of the piping system in .

[0023] Figure 3C Shown is a schematic diagram of an initial pipeline diagram according to an embodiment of the present application.

[0024] Figure 3D Shown is a schematic diagram of a target pipeline diagram according to an embodiment of the present application.

[0025] Figure 4 The figure shows a partial flow chart of a pipeline diagram generation method according to another embodiment of the present application.

[0026] Figure 5The figure shows a structural block diagram of a host computer of a semiconductor process equipment according to an embodiment of the present application. DETAILED DESCRIPTION

[0027] In the following, only some exemplary embodiments are briefly described. As those skilled in the art will appreciate, the described embodiments may be modified in various ways without departing from the spirit or scope of the present application. Therefore, the drawings and descriptions are considered to be exemplary and non-restrictive in nature.

[0028] Figure 1A Shown is a mechanical schematic diagram of a piping system of related technology. Figure 1B Shown is an initial piping diagram of a piping system of the related art. Figure 1C Shown is a target piping diagram of a piping system of the related art.

[0029] The inventors found during the implementation process that: in the pipeline diagram generation method of the related art, if Figure 1A As shown, it is usually necessary to use special drawing software to draw the mechanical schematic diagram of the pipeline system first, wherein the pipeline source 11, flow meter 21, first valve 31, second valve 32, third valve 33, fourth valve 34, fifth valve 35, process chamber 41, dry pump 51, molecular pump 52, each pipeline section L, first node A, second node B, third node C, fourth node D in the mechanical schematic diagram all need to be drawn; please refer to Figure 1B , then perform image recognition on the mechanical schematic diagram of the pipeline system, obtain the corresponding pipeline segment image LA and device image from the image database according to the recognition result, and manually splice the device image and pipeline segment image LA to generate the initial pipeline diagram, where, Figure 1B The flow meter image 21A, the first valve image 31A, the second valve image 32A, the third valve image 33A, the fourth valve image 34A, the fifth valve image 35A, the process chamber image 41A, the dry pump image 51A and the molecular pump image 52A in FIG. 1 are all device images and are related to Figure 1A Then, manually bind each device image in the initial pipeline diagram with the corresponding device attribute data to generate Figure 1C However, since image recognition of mechanical schematics requires a lot of computing resources, it is easy to reduce the computing speed, resulting in a slow generation speed of the pipeline diagram.

[0030] In view of this, the present application provides a pipeline map generation method, semiconductor process equipment and computer-readable storage medium, which can effectively solve the problem of slow pipeline map generation speed caused by image recognition consuming a large amount of computing resources. The embodiments of the present application are described in detail below with reference to the accompanying drawings.

[0031] Figure 2 The figure is a flow chart of a method for generating a pipeline diagram according to an embodiment of the present application.

[0032] The embodiment of the present application provides a pipeline diagram generation method, which is applicable to a host computer of a semiconductor process equipment. The semiconductor process equipment includes a pipeline system, the pipeline system includes at least one pipeline, the pipeline includes at least one minimum pipeline, and the minimum pipeline is a pipeline located between two adjacent nodes in the pipeline. Among them, the pipeline includes but is not limited to a gas circuit, a water circuit, etc. The semiconductor process equipment can be a photovoltaic device or other semiconductor process equipment. The embodiment of the present application does not limit the type of semiconductor process equipment.

[0033] For example, Figure 3A As shown, the pipeline system includes a first pipeline L1 located between the pipeline source 11 and the process chamber 41, a second pipeline L2 located between the first node A and the second node B, a third pipeline L3 located between the dry pump 51 and the fourth node D, and a fourth pipeline L4 located between the third node C and the fourth node D, a total of four pipelines. Taking the first pipeline L1 as an example, the minimum pipeline of the first pipeline L1 includes a first minimum pipeline L11 located between the adjacent pipeline source 11 and the first node A, a second minimum pipeline L12 located between the adjacent first node A and the second node B, a third minimum pipeline L13 located between the adjacent second node B and the fourth node D, and a fourth minimum pipeline L14 located between the adjacent fourth node D and the process chamber 41.

[0034] like Figure 2 As shown, the pipeline diagram generating method includes the following steps S210 to S240.

[0035] Step S210, obtaining text information of the pipeline; the text information includes at least two node identifiers and a pipeline identifier located between the two node identifiers; the text information corresponds to the pipeline in a one-to-one manner. The text information is used to represent the structure of the pipeline in the form of character identifiers.

[0036] For example, the text information of the pipeline can be pre-written according to a preset description rule. For example, a description rule of the pipeline is shown in Table 1 below.

[0037] Table 1 Pipeline description rules

[0038]

[0039] According to the description rules in Table 1 above, you can use Figure 3B The marking diagram shown is Figure 3AThe pipeline system in is marked, where "(N2)" is the pipeline source identifier of the pipeline source 11, where "N2" represents the pipeline source name and "()" represents the starting node identifier; "#A" is the first node identifier used to characterize the first node A, "#B" is the second node identifier used to characterize the second node B, "#C" is the third node identifier used to characterize the third node C, and "#D" is the fourth node identifier used to characterize the fourth node D; "mfc:N2" is the flow meter identifier used to characterize the flow meter 21, and the flow meter 21 is used to detect the flow rate of the fluid provided by the pipeline source 11 flowing through the pipeline section where the flow meter 21 is located; "v1" is the first valve identifier used to characterize the first valve 31, "v2" is the second valve identifier used to characterize the second valve 32, "v3" is the third valve identifier used to characterize the third valve 33, "v4" is the fourth valve identifier used to characterize the fourth valve 34, and "v5" is the fifth valve identifier used to characterize the fifth valve 35; "pm1" is the process chamber identifier used to characterize the process chamber 41, which can be used as the termination node identifier; "pump1" is the dry pump identifier used to characterize the dry pump 51, and "pump2" is the molecular pump identifier used to characterize the molecular pump 52; "---->-----" is the pipeline identifier used to characterize the pipeline section with a one-way valve, and "---------" is the pipeline identifier used to characterize the pipeline section that only contains the pipeline section. It should be noted that using Figure 3B The marking diagram shown is Figure 3A The marking is an analysis process. If you are familiar with the description rules and the structure of the pipeline system, you can directly write the text information of each pipeline in the pipeline system according to the above description rules without using Figure 3B Label the piping system.

[0040] Please refer to the description rules in Table 1 above. Figure 3A and Figure 3B , the text information of the four pipelines in the pipeline system can be pre-written, as follows:

[0041] (N2)----->-----#A-----mfc:N2-----v1-----#B-----#D------pm1

[0042] #A------v2------#B

[0043] pump1-----#C----v3-----#D

[0044] #C------v4-----pump2-----v5-----#D

[0045] Among the above four text information, the first text information corresponds to the first pipeline L1, the second text information corresponds to the second pipeline L2, the third text information corresponds to the third pipeline L3, and the fourth text information corresponds to the fourth pipeline L4. In this way, the four pipelines in the pipeline system correspond to the four text information one by one.

[0046] Exemplarily, the above four text information can be written in the same description text in lines. The description text can be in TXT text format or other text formats in the computer field. The embodiment of the present application does not limit the format of the description text. Step S210 can be: obtaining each line of text information from the description text.

[0047] Step S220: parse the text information based on a preset parsing rule to determine at least one sub-text information; the parsing rule includes dividing two adjacent node identifiers and the pipeline identifier between them into the same sub-text information, and the sub-text information corresponds to the minimum pipeline one by one. The sub-text information is used to characterize the structure of the minimum pipeline in the form of a character identifier.

[0048] Exemplarily, the first text information “(N2)---->-----#A-----mfc:N2-----v1-----#B------#D------pm1” is taken as an example for description.

[0049] Please also read Figure 3B,In the first text information, “(N2), #A, #B, #D, pm1” all represent the node identifiers of the first pipeline L1. Parsing the first text information based on the preset parsing rules, determining at least one sub-text information may be: dividing the adjacent pipeline source identifier "(N2)" and the first node identifier "#A" and the pipeline identifier "---->-----" between them into one sub-text information, determining the first sub-text information "(N2)---->-----#A"; dividing the adjacent first node identifier "#A" and the second node identifier "#B" and the pipeline identifier "--------------" between them into one sub-text information, determining the second sub-text information "#A---------------#B"; dividing the adjacent second node identifier "#B" and the fourth node identifier "#D" and the pipeline identifier "------" between them into one sub-text information, determining the third sub-text information "#B------#D"; dividing the adjacent fourth node identifier "#D" and the termination node identifier "pm1" and the pipeline identifier "------" between them into one sub-text information, determining the fourth sub-text information "#D------pm1". The first subtext information corresponds to the first minimum pipeline L11, the second subtext information corresponds to the second minimum pipeline L12, the third subtext information corresponds to the third minimum pipeline L13, and the fourth subtext information corresponds to the fourth minimum pipeline L14.

[0050] Similarly, the corresponding sub-text information can be determined by parsing the second text information, the third text information and the fourth text information based on the preset parsing rules.

[0051] Step S230: Generate a corresponding minimum pipeline diagram based on the subtext information; the minimum pipeline diagram is used to represent the structure of the minimum pipeline in an image form.

[0052] For example, please refer to Figure 3B and Figure 3C Continuing with the first subtext information, the second subtext information, the third subtext information and the fourth subtext information as an example, based on the first subtext information, Figure 3C The first minimum pipeline diagram L11A in the text may generate a second minimum pipeline diagram L12A based on the second sub-text information, a third minimum pipeline diagram L13A based on the third sub-text information, and a fourth minimum pipeline diagram L14A based on the fourth sub-text information.

[0053] Step S240: Generate an initial pipeline diagram based on all minimum pipeline diagrams.

[0054] In one example, if the pipeline system consists of only one minimum pipeline, the minimum pipeline diagram can be used as the initial pipeline diagram. In another example, if the pipeline system consists of multiple minimum pipelines, all the minimum pipeline diagrams can be spliced ​​to generate the initial pipeline diagram. Figure 3C The initial piping diagram in .

[0055] In the above scheme, since there is a one-to-one correspondence between the pipelines in the pipeline system and the text information, the text information of the pipeline can be used to characterize the structure of the pipeline. By parsing the text information of the pipeline, the sub-text information corresponding to the minimum pipeline in the pipeline can be determined, and then the sub-text information is used to generate the minimum pipeline map, and then the minimum pipeline map is used to generate the initial pipeline map. This pipeline map generation method only needs to process the text information, and does not require image recognition. Its calculation amount is much smaller than that of image recognition, which can effectively reduce the use of computing resources and is conducive to improving the computing speed, thereby quickly generating the pipeline map and improving the efficiency of pipeline map generation.

[0056] In addition, in actual applications, since the pipeline diagram generation method of the related art relies on the mechanical schematic diagram of the pipeline system, the drawing of the mechanical schematic diagram is indispensable, which consumes a lot of drawing time and is inconvenient to modify. Compared with the related art, the present application uses the text information of the pipeline in the pipeline system to generate the pipeline diagram, which can save the tedious drawing process, and the editing and modification of the text information are simpler, more convenient and more flexible, which helps to increase the generation speed of the pipeline diagram. In this way, when the structure of the pipeline system changes, such as the model, batch, etc. of the pipeline system is different, or the user needs to modify the pipeline system, the pipeline diagram can be quickly updated by modifying the text information.

[0057] In one embodiment, the text information further includes a device identifier located between two adjacent node identifiers, and step S220 further includes: treating the two adjacent node identifiers, the pipeline identifier located between the two adjacent node identifiers, and the device identifier as a sub-text information.

[0058] Exemplarily, the first text information “(N2)---->-----#A-----mfc:N2-----v1-----#B------#D------pm1” is taken as an example for description.

[0059] Please also read Figure 3B, the flow meter identifier "mfc:N2" and the first valve identifier "v1" in the first text information are both device identifiers. The first text information is parsed based on the preset parsing rules to determine that at least one sub-text information can be: the adjacent pipeline source identifier "(N2)" and the first node identifier "#A" and the pipeline identifier "---->-----" between them are divided into one sub-text information to determine the first sub-text information "(N2)---->-----#A"; the adjacent first node identifier "#A" and the second node identifier "#B" and the pipeline identifier "--------------", the flow meter identifier "mfc:N2", and the first valve identifier "v1" are divided into one In the sub-text information, the second sub-text information "#A-----mfc:N2-----v1-----#B" is determined; the adjacent second node identifier "#B" and the fourth node identifier "#D" and the pipeline identifier "-----" between them are divided into one sub-text information, and the third sub-text information "#B------#D" is determined; the adjacent fourth node identifier "#D" and the termination node identifier "pm1" and the pipeline identifier "------" between them are divided into one sub-text information, and the fourth sub-text information "#D------pm1" is determined.

[0060] Based on this, when a device identifier exists between two adjacent node identifiers in the text information, the text information can also be parsed.

[0061] In one embodiment, Figure 4 As shown, after step S240, the pipeline map generating method may further include the following steps S250 to S260.

[0062] Step S250: traverse the device identification in the sub-text information, and obtain attribute data corresponding to the device identification from the attribute database.

[0063] Step S260: Automatically bind the attribute data with the minimum pipeline diagram corresponding to the sub-text information to generate a target pipeline diagram.

[0064] For example, please refer to FIG. 3B to FIG. 3D, taking the second minimum pipeline L12 in the first pipeline L1 as an example. By traversing the flowmeter identifier "mfc: N2" and the first valve identifier "v1" in the second subtext information corresponding to the second minimum pipeline L12, the operation data "0" and the setting data "2" corresponding to the flowmeter identifier "mfc: N2" can be obtained from the attribute database, and the icon F corresponding to the first valve identifier "v1" can be obtained. The operation data "0", the setting data "2" and the first valve identifier "v1" are automatically bound to the first minimum pipeline diagram L12A to generate a target pipeline diagram. For example, the operation data "0" and the setting data "2" are automatically bound to the flowmeter image 21A corresponding to the flowmeter identifier "mfc: N2", and the icon F corresponding to the first valve identifier "v1" is automatically bound to the first valve image 31A corresponding to it.

[0065] Among them, the operation data "0" and setting data "2" corresponding to the flow meter identification "mfc: N2" can be obtained from the attribute database. Based on the flow meter identification "mfc: N2", it can be automatically queried from the attribute database. For example, by automatically querying all data in the attribute database where the pipeline name of the flow meter is "N2", the corresponding operation data "0" and setting data "2" can be obtained.

[0066] Correspondingly, obtaining the icon corresponding to the first valve identifier "v1" from the attribute database may also be obtained by automatically querying the icon with the valve number "1" in the attribute database.

[0067] Based on this, the automatic binding of attribute data can be realized without human intervention, which can reduce the occurrence of binding errors and can easily and quickly generate the target pipeline diagram, which helps to further improve the efficiency of pipeline diagram generation.

[0068] In one embodiment, the attribute data is presented in a table or icon form.

[0069] For example, see Figure 3D On the flow meter image 21A, the flow meter operation data "0" and setting data "2" are displayed in a preset table format T. On the process chamber image 41A, the power data, internal even data, external even data and setting data of each section of the furnace tail, furnace and furnace mouth of the process chamber are displayed in a preset table format T. On the first valve image 31A and the dry pump image 51A, the corresponding icons are displayed in a preset icon format F.

[0070] In one embodiment, the attribute data and the text information are configured in the same text file. In this way, when the host computer executes the method of the present application, the number of files loaded by the host computer can be reduced, which is conducive to saving computing resources and improving generation efficiency.

[0071] It should be noted that in the related art, since the generation of the initial pipeline diagram requires image recognition and the generation of the target pipeline diagram requires attribute data binding, it is necessary to maintain at least one image library and one attribute database and ensure that the versions of the two are consistent. Compared with the related art, this application configures the attribute data and text information in the same text file, which can reduce the maintenance cost of the file.

[0072] In one implementation, step S230 includes the following steps S231 to S232.

[0073] Step S231: Based on the pipeline identifier in the subtext information, obtain and display the pipeline segment image corresponding to the pipeline identifier from a preset image database, wherein the preset image database stores multiple pipeline identifiers and multiple pipeline segment images corresponding to the multiple pipeline identifiers.

[0074] Step S232: Mark the two node identifiers in the subtext information at the two ends of the pipeline segment image in a one-to-one correspondence to generate a minimum pipeline diagram.

[0075] For example, please refer to Figure 3B and Figure 3C , taking the first subtext information "(N2)---->-----#A" as an example, based on the pipeline identifier "---->-----" in the first subtext information, the pipeline segment image corresponding to the pipeline identifier is obtained from the preset image database. The pipeline source identifier "(N2)" and the first node identifier "#A" are marked on both ends of the pipeline segment image in a one-to-one correspondence, and the first minimum pipeline diagram L11A corresponding to the first subtext information is generated. Among them, by marking the two ends of the pipeline segment image with the pipeline source identifier "(N2)" and the first node identifier "#A" in a one-to-one correspondence, the two ends of the first minimum pipeline diagram L11A can be distinguished.

[0076] Similarly, for the second sub-text information "#A---------------#B" parsed from the first text information, after executing the above steps S231 and S232, a second minimum pipeline diagram L12A corresponding to the second sub-text information can be generated. For the third sub-text information "#B------#D" parsed from the first text information, after executing the above steps S231 and S232, a third minimum pipeline diagram L13A corresponding to the third sub-text information can be generated. For the fourth sub-text information "#D------pm1" parsed from the first text information, a fourth minimum pipeline diagram L14A corresponding to the fourth sub-text information can be generated.

[0077] In the above scheme, the method for generating the minimum pipeline diagram is to first directly obtain the pipeline segment image corresponding to the pipeline identifier from the preset image database based on the correspondence between the pipeline identifier and the pipeline segment image, and then mark the two ends of the pipeline segment image respectively. The amount of calculation of this generation method is much smaller than the amount of calculation of image recognition, which can effectively reduce the use of computing resources and is conducive to the rapid generation of the minimum pipeline diagram; and, by using the two node identifiers in the subtext information to mark the two ends of the pipeline segment image one by one, the marking of the two ends of the minimum pipeline diagram can be achieved, which is conducive to the subsequent direct use of the minimum pipeline diagram to generate the initial pipeline diagram.

[0078] In one implementation, the subtext information further includes a device identification, and step S230 may further include the following steps S233 and S234.

[0079] Step S233: Based on the device identification in the subtext information, a device image corresponding to the device identification is acquired from an image database.

[0080] Step S234: setting the device image on the pipeline segment image and displaying it.

[0081] For example, the second subtext information includes the flow meter identifier "mfc:N2" and the first valve identifier "v1". Figure 3B and Figure 3C First, based on the flow meter identifier "mfc:N2" and the first valve identifier "v1", the flow meter image 21A corresponding to the flow meter identifier "mfc:N2" and the first valve image 31A corresponding to the first valve identifier "v1" are obtained from the image database, and then the flow meter image 21A and the first valve image 31A are set on the corresponding pipeline segment image LA' and displayed to generate the second minimum pipeline diagram L12A.

[0082] Similarly, based on the above method, the second valve image 32A corresponding to the second valve identification "v2", the third valve image 33A corresponding to the third valve identification "v3", the fourth valve image 34A corresponding to the fourth valve identification "v4", the fifth valve image 35A corresponding to the fifth valve identification "v5", the process chamber image 41A corresponding to the process chamber identification "pm1", the dry pump image 51A corresponding to the dry pump identification "pump1", and the molecular pump image 52A corresponding to the molecular pump identification "pump2" can be obtained from the image database respectively, and then these device images can be set on their respective corresponding pipeline segment images and displayed.

[0083] Based on this, when the sub-text information includes a device identification, the device image and its corresponding pipeline segment image can be automatically combined, which helps to quickly generate a minimum pipeline diagram.

[0084] In one embodiment, the minimum pipeline graph includes multiple minimum pipeline graphs, and both ends of the minimum pipeline graph have two different node identifiers respectively. Step S240 includes: splicing the ends corresponding to the same node identifier of all minimum pipeline graphs to generate an initial pipeline graph.

[0085] For example, please refer to Figure 3B and Figure 3C The above scheme is described by taking the splicing method of the first minimum pipeline diagram L11A corresponding to the first minimum pipeline L11 in the first pipeline L1, the second minimum pipeline diagram L12A corresponding to the second minimum pipeline L12 and the fifth minimum pipeline diagram L2A corresponding to the minimum pipeline in the second pipeline L2 as an example.

[0086] The node at the left end of the first minimum pipeline diagram L11A is identified as "(N2)", and the node at the right end is identified as "#A", the node at the left end of the second minimum pipeline diagram L12A is identified as "#A", and the node at the right end is identified as "#B", the node at the left end of the fifth minimum pipeline diagram L2A is identified as "#A", and the node at the right end is identified as "#B". The right end of the first minimum pipeline diagram L11A, the left end of the second minimum pipeline diagram L12A, and the left end of the fifth minimum pipeline diagram L2A are spliced ​​as the same intersection, and the right end of the second minimum pipeline diagram L12A and the right end of the fifth minimum pipeline diagram L2A are spliced ​​as the same intersection, so as to complete the splicing between the first minimum pipeline diagram L11A, the second minimum pipeline diagram L12A and the fifth minimum pipeline diagram L2A.

[0087] Similarly, after splicing the ends corresponding to the same node identifiers of all the minimum pipeline diagrams, we can get Figure 3C Initial piping diagram shown.

[0088] Based on this, by automatically splicing the ends corresponding to the same node identifiers of all minimum pipeline diagrams, the initial pipeline diagram can be automatically generated, which can save the manual splicing operation in the related technology and is conducive to the rapid generation of the initial pipeline diagram.

[0089] Figure 5 The figure shows a structural block diagram of a host computer of a semiconductor process equipment according to an embodiment of the present application.

[0090] The semiconductor process equipment includes a pipeline system and a host computer. Figure 5 As shown, the host computer 600 includes: a memory 610 and a processor 620. The memory 610 stores a computer program that can be run on the processor 620. When the processor 620 executes the computer program, the pipeline diagram generation method in the above embodiment is implemented. The number of the memory 610 and the processor 620 can be one or more.

[0091] The host computer 600 also includes a communication interface 630, which is used to communicate with external devices and perform data exchange transmission. If the memory 610, the processor 620 and the communication interface 630 are implemented independently, the memory 610, the processor 620 and the communication interface 630 can be interconnected through a bus and complete mutual communication. The bus can be an Industry Standard Architecture (ISA) bus, a Peripheral Component Interconnect (PCI) bus or an Extended Industry Standard Architecture (EISA) bus, etc. The bus can be divided into an address bus, a data bus, a control bus, etc. For ease of representation, Figure 5 Only one thick line is used in the diagram, but this does not mean that there is only one bus or only one type of bus.

[0092] Optionally, in a specific implementation, if the memory 610, the processor 620 and the communication interface 630 are integrated on a chip, the memory 610, the processor 620 and the communication interface 630 can communicate with each other through an internal interface.

[0093] An embodiment of the present application provides a computer-readable storage medium storing a computer program, which implements the method provided in the embodiment of the present application when the program is executed by a processor.

[0094] It should be understood that the processor may be a central processing unit (CPU), or other general-purpose processors, digital signal processors (DSP), application-specific integrated circuits (ASIC), field programmable gate arrays (FPGA) or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, etc. A general-purpose processor may be a microprocessor or any conventional processor, etc. It is worth noting that the processor may be a processor supporting the Advanced RISC Machines (ARM) architecture.

[0095] Further, optionally, the above-mentioned memory may include a read-only memory and a random access memory, and may also include a non-volatile random access memory. The memory may be a volatile memory or a non-volatile memory, or may include both volatile and non-volatile memories. Among them, the non-volatile memory may include a read-only memory (ROM), a programmable read-only memory (PROM), an erasable programmable read-only memory (EPROM), an electrically erasable programmable read-only memory (EEPROM), or a flash memory. The volatile memory may include a random access memory (RAM), which is used as an external cache. By way of example but not limitation, many forms of RAM are available. For example, static random access memory (SRAM), dynamic random access memory (DRAM), synchronous dynamic random access memory (SDRAM), double data rate synchronous dynamic random access memory (DDR SDRAM), enhanced synchronous dynamic random access memory (ESDRAM), synchronous link dynamic random access memory (SLDRAM) and direct memory bus random access memory (DR RAM).

[0096] In the above embodiments, it can be implemented in whole or in part by software, hardware, firmware or any combination thereof. When implemented using software, it can be implemented in whole or in part in the form of a computer program product. The computer program product includes one or more computer instructions. When the computer program instructions are loaded and executed on a computer, the process or function according to the present application is generated in whole or in part. The computer can be a general-purpose computer, a special-purpose computer, a computer network, or other programmable devices. The computer instructions can be stored in a computer-readable storage medium, or transmitted from one computer-readable storage medium to another computer-readable storage medium.

[0097] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0098] It should be understood that the various parts of the present application can be implemented with hardware, software, firmware or a combination thereof. In the above embodiments, multiple steps or methods can be implemented with software or firmware stored in a memory and executed by a suitable instruction execution system. All or part of the steps of the above embodiment method can be completed by instructing the relevant hardware through a program, which can be stored in a computer-readable storage medium, and when the program is executed, it includes one of the steps of the method embodiment or a combination thereof.

[0099] In addition, each functional unit in each embodiment of the present application can be integrated into a processing module, or each unit can exist physically separately, or two or more units can be integrated into one module. The above-mentioned integrated module can be implemented in the form of hardware or in the form of a software functional module. If the above-mentioned integrated module is implemented in the form of a software functional module and sold or used as an independent product, it can also be stored in a computer-readable storage medium. The storage medium can be a read-only memory, a disk or an optical disk, etc.

[0100] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of various changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.

Claims

1. A method for generating a pipeline diagram, characterized in that: A host computer applied to a semiconductor process equipment, wherein the semiconductor process equipment includes a pipeline system, the pipeline system includes at least one pipeline, the pipeline includes at least one minimum pipeline, and the minimum pipeline is a pipeline located between two adjacent nodes in the pipeline; the method includes: Acquire text information of the pipeline; the text information includes at least two node identifiers and a pipeline identifier located between the two node identifiers; the text information corresponds to the pipeline in a one-to-one manner; Parsing the text information based on a preset parsing rule to determine at least one sub-text information; the parsing rule includes dividing two adjacent node identifiers and a pipeline identifier therebetween into the same sub-text information, and the sub-text information corresponds to the minimum pipeline in a one-to-one manner; Based on the sub-text information, a corresponding minimum pipeline diagram is generated; the minimum pipeline diagram is used to represent the structure of the minimum pipeline in an image form; Based on all of the minimum pipeline diagrams, an initial pipeline diagram is generated.

2. The method according to claim 1, characterized in that The text information further includes a device identifier located between two adjacent node identifiers, and the parsing of the text information based on a preset parsing rule to determine at least one sub-text information further includes: Two adjacent node identifiers, a pipeline identifier and a device identifier between the two adjacent node identifiers are used as one sub-text information.

3. The method according to claim 2, characterized in that The method further comprises: Traversing the device identification in the subtext information, and acquiring attribute data corresponding to the device identification from a preset attribute database; The attribute data is automatically bound to the minimum pipeline diagram corresponding to the sub-text information to generate a target pipeline diagram.

4. The method according to claim 3, characterized in that The attribute data is presented in a table form or a graphical form.

5. The method according to claim 3, characterized in that: The attribute data and the text information are configured in the same text file.

6. The method according to claim 1, characterized in that The generating a corresponding minimum pipeline diagram based on the sub-text information includes: Based on the pipeline identifier in the subtext information, a pipeline segment image corresponding to the pipeline identifier is acquired from a preset image database and displayed; The two node identifiers in the subtext information are marked at both ends of the pipeline segment image in a one-to-one correspondence to generate the minimum pipeline diagram.

7. The method according to claim 6, characterized in that The sub-text information also includes a device identification, and the generating of a corresponding minimum pipeline diagram based on the sub-text information also includes: Based on the device identification in the subtext information, acquiring a device image corresponding to the device identification from the image database; The device image is set on the pipeline segment image and displayed.

8. The method according to claim 1, characterized in that The minimum pipeline graph includes a plurality of minimum pipeline graphs, and both ends of the minimum pipeline graph respectively have two different node identifiers. The initial pipeline graph is generated based on all the minimum pipeline graphs, including: The ends corresponding to the same node identifiers of all the minimum pipeline graphs are spliced ​​to generate the initial pipeline graph.

9. A semiconductor process equipment, characterized in that: It comprises a pipeline system and a host computer; the host computer comprises a processor and a memory, the memory stores instructions, and the instructions are loaded and executed by the processor to implement the method as described in any one of claims 1 to 8 to generate a pipeline diagram of the pipeline system.

10. A computer-readable storage medium, characterized in that: The computer-readable storage medium stores a computer program, and when the computer program is executed by a processor, the method according to any one of claims 1 to 9 is implemented.

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