Closing assembly for vacuum valve

Abstract

The invention relates to a vacuum valve (1) having a valve seat (3, 3b), a closing assembly (10) and a drive unit (7) connected to the closing assembly (10), the closing assembly (10) having a carrier element (20) with a first connection side and a closing plate (30, 40) with a second connection side, and the first and second connection sides being designed to connect the carrier element (20) to the closing plate (30, 40), having a support and a retaining element, the closing plate (30, 40) is joined to the carrier element (20), and the support and the retaining element are designed in such a way that a clamping force perpendicular to the direction of extension of the at least one connection side is generated by interaction between the support and the retaining element in the joined state, the retaining elements protrude from the respective connection sides and have curved boundary lines for interacting with the supports.

Description

[0001] The invention relates to a closure assembly for a vacuum valve, comprising a carrier element and a detachable closure plate, and a connection system for connecting the closure plate to the carrier element.

[0002] Generally, valves are designed to regulate flows, in particular the flow of fluids. With a valve, a flow can be allowed at the maximum valve opening cross section or completely shut off. In addition, some types of valves offer the possibility of regulating the flow per unit time, i.e. they offer the ability to regulate the flow of a fluid.

[0003] A vacuum valve is a specific type of valve. These valves are known in the prior art in various embodiments for regulating volume flows or mass flows and / or for substantially gas-tightly closing a flow path through an opening formed in a valve housing and are used in particular in vacuum chamber systems in the field of IC, semiconductor or substrate production, which must be operated in a protected atmosphere that is as free of contaminating particles as possible.

[0004] Such a vacuum chamber system particularly comprises at least one evacuable vacuum chamber for accommodating semiconductor components or substrates to be processed or manufactured, the vacuum chamber having at least one vacuum chamber opening through which the semiconductor components or other substrates can be introduced into and out of the vacuum chamber, and at least one vacuum pump for evacuating the vacuum chamber.

[0005] For example, in production systems for semiconductor wafers or liquid crystal substrates, highly sensitive semiconductor or liquid crystal components pass through a number of process vacuum chambers in sequence, wherein the components located within the process vacuum chambers are processed in each case by a processing device. During the processing within the process vacuum chambers and during transport from one chamber to another, the highly sensitive semiconductor components or substrates must always be in a protected atmosphere, in particular in an airless environment.

[0006] For this purpose, peripheral valves are used on the one hand to open and close the gas inlet or outlet and transfer valves are used on the other hand to open and close the transfer openings of the vacuum chamber for feeding and discharging the components.

[0007] Vacuum valves through which semiconductor components pass are called vacuum transfer valves due to the described fields of application and the associated dimensions, rectangular valves due to their typically rectangular opening cross section, and gate valves, rectangular gate valves or transfer gate valves due to their typical mode of operation.

[0008] Peripheral valves are used in particular for controlling or regulating a gas flow between a vacuum chamber and a vacuum pump or another vacuum chamber. The peripheral valve is located, for example, in a pipe system between a process vacuum chamber or a transfer chamber and a vacuum pump, the atmosphere or another process vacuum chamber. The opening cross section of such valves, also called pump valves, is usually smaller than the opening cross section of a vacuum transfer valve. Since, depending on the application, peripheral valves are used not only for fully opening and closing the opening, but also for controlling or regulating the flow by continuously adjusting the opening cross section between the fully open position and the gas-tight closed position, they are also referred to as control valves. A possible peripheral valve for controlling or regulating a gas flow is a swing valve.

[0009] In a typical swing valve, as known from US 6,089,537 (Olmsted), in a first step, a valve disc, which is usually circular, is pivoted about an opening, which is also usually circular, from a position exposing the opening to an intermediate position covering the opening. In the case of a gate valve, as described in US 6,416,037 (Geiser) or US 6,056,266 (Blecha), the valve disc, like the opening, is usually rectangular and in this first step is pushed linearly from a position opening the opening into an intermediate position covering the opening. In this intermediate position, the valve disc of the swing or gate valve is spaced opposite to the valve seat surrounding the opening. In a second step, the distance between the valve disc and the valve seat is reduced so that the valve disc and the valve seat are pressed evenly together and the opening is closed in a substantially airtight manner. This second movement is preferably in a direction substantially perpendicular to the valve seat.

[0010] For example, sealing can be achieved by a sealing ring arranged on the closing side of the valve disc, which is pressed onto a valve seat surrounding the opening, or by a sealing ring on the valve seat, against which the closing side of the valve disc is pressed. Since the closing process takes place in two steps, the sealing ring between the valve disc and the valve seat is hardly affected by shear forces that could damage the sealing ring, because the movement of the valve disc in the second step takes place essentially in a straight line perpendicular to the valve seat.

[0011] Various sealing devices are known in the prior art, for example US 6,629,682 B2 (Duelli). Suitable materials for sealing rings and seals in vacuum valves are for example fluororubber (also called FKM), in particular fluoroelastomer known by the trade name "Viton", and perfluororubber (FFKM for short).

[0012] Various drive systems are known in the prior art for realizing a combination of rotational movement of the valve disc parallel to the opening in the case of a swing valve and translational movement of the valve disc perpendicular to the opening in the case of a gate valve. For example, US 6,089,537 (Olmsted) discloses a drive system for a swing valve, and US 6,416,037 (Geiser) discloses a drive system for a gate valve.

[0013] Particularly for vacuum applications, the valve disc must be pressed against the valve seat in such a way that the required tightness is ensured over the entire pressure range while avoiding damage to the sealing medium, in particular the sealing material or sealing rings (e.g. O-rings), due to excessive pressure stresses. In order to ensure this, known valves control the contact pressure regulation of the valve disc as a function of the pressure difference existing between the two sides of the valve disc. However, in particular in the case of large pressure fluctuations or changes from negative pressure to positive pressure (or vice versa), an even distribution of the force along the entire circumference of the sealing ring cannot always be guaranteed. However, the overall aim is to decouple the sealing ring from the supporting forces generated by the pressure applied to the valve.

[0014] During the service life of a vacuum valve, changes often occur in the valve components due to wear of the sealing material or sealing surfaces as well as structural changes of valve components (e.g. drive unit or valve stem) due to environmental influences (temperature, humidity, shocks, etc.).

[0015] In order to prevent any leakage that may occur in the process or to keep the sealing quality at a continuously high level, the valve closing parts are usually replaced or renewed at certain time intervals. Such maintenance intervals are usually determined by the number of opening and closing cycles expected within a certain period of time or the number and type of influences (e.g. process gases) that occur. Maintenance is usually carried out as a preventive measure in order to be able to exclude the possibility of leakage as far in advance as possible.

[0016] Replacing the entire valve closing element, i.e. the entire valve disk, usually requires considerable effort. For this purpose, the vacuum system must be regularly at least partially vented to allow for the replacement. For the replacement itself, the valve disk is separated from the actuator and a new one is inserted. After the replacement, subsequent evacuation and flushing of the previously vented section is required.

[0017] The present invention is therefore based on the object of providing an improved vacuum valve, in particular a valve closure, which reduces or avoids the above-mentioned disadvantages.

[0018] This object is achieved by realizing the features of the independent claims. Features that further develop the invention in an alternative or advantageous manner can be gathered from the dependent claims.

[0019] The basic idea of ​​the invention is to design the valve closure in multiple parts, wherein the closure plate can be connected modularly and detachably to the support structure (carrier element). In this case, the closure plate preferably has a sealing material. Maintenance can be carried out accordingly simply by replacing only the closure plate, wherein the carrier element can remain connected to the drive unit of the vacuum valve.

[0020] The connection of the closing plate to the carrier element can be realized in particular by a clamping connection, wherein one of the two components, the closing plate or the carrier element, has a support and the respective other component has a retaining element as a counterpart.

[0021] The closing plate and the carrier element can preferably be designed so that they can be connected to each other by pushing them together, and by or during this pushing together, the support is engaged with the retaining element. This can generate a clamping force that presses or pulls the closing plate toward the carrier element.

[0022] The support element and / or the retaining element can in particular have an undercut contour for generating the clamping force, wherein the undercut contour in particular has an inclined surface with respect to the connection side or the sealing surface.

[0023] The invention therefore relates to a vacuum valve for regulating a volume flow or a mass flow and / or for closing and opening a valve opening. The vacuum valve has a valve seat with a valve opening defining an opening axis and a first sealing surface surrounding the valve opening. Furthermore, the vacuum valve has a closing assembly for regulating a volume flow or a mass flow and / or for closing the valve opening in a substantially airtight manner by means of a second sealing surface corresponding to the first sealing surface and a drive unit connected to the closing assembly, the drive unit being adapted to provide a movement of the closing assembly such that the closing assembly can be adjusted from an open position, in which the closing assembly at least partially exposes the valve opening, to a closed position, in which the first sealing surface and the second sealing surface come into sealing contact with a sealing material present therebetween, thereby closing the valve opening in an airtight manner, and back.

[0024] The closure assembly comprises a carrier element with a first connection side and a closure plate with a second connection side, wherein the first and second connection sides are designed to connect the carrier element to the closure plate. The closure assembly further comprises a support and a retaining element, wherein the first connection side comprises the support and the second connection side comprises the retaining element, or the first connection side comprises the retaining element and the second connection side comprises the support.

[0025] The closing plate is joined together with the carrier element, and the support and the retaining element are designed accordingly such that, by interaction of the support and the retaining element in the joined state, a clamping force is generated perpendicularly to the extension direction of the at least one connecting side.

[0026] The retaining element projects from the respective connection side and has a curved boundary line for interaction with the support.

[0027] In particular, the sealing material can be arranged on the first or second sealing surface.For example, the sealing material can be present as an O-ring in a groove of the closing plate or vulcanized onto the closing plate.

[0028] The support element can be designed in particular as a groove, in particular as a dovetail groove. The support element can in particular provide a support line or a support surface.

[0029] In particular, the support element is shaped such that it can generate a clamping force.Alternatively or additionally, the support element can be shaped such that an exact relative positioning of the closing plate and the carrier element can be provided by providing a support line or support surface.

[0030] The closing plate and the carrier element each extend in particular mainly in an extension direction. The extension direction corresponds to the direction of maximum spatial extension of the respective component. This extension can also be referred to as the respective width of the closing plate or the carrier element.

[0031] Perpendicularly to the direction of extension, the respective component has a height which is usually smaller than its width.

[0032] In a third spatial direction, perpendicular to the extension direction and the height, the respective component has a thickness.

[0033] The connection system of the closure assembly can be designed in particular such that the closure plate and the carrier element are joined by pushing them together in a direction perpendicular to the extension direction. In this case, the pushing together is performed in particular along a defined direction. During the pushing together, there is preferably contact between the closure plate and the carrier element, and the two connection sides of these components are at least partially in contact during the pushing together via the support and / or retaining element.

[0034] When pushed together, the support and the retaining element come into effective contact. The interaction of the retaining element and the support ensures, on the one hand, that the closing plate is held on the carrier element and, on the other hand, that a contact pressure is generated which presses the closing plate against the carrier element. In this pushed together state, the closing plate can be fixed to the carrier element. The fixing can be provided by applying a force in the push-together direction, for example by a screw connection.

[0035] The application of force can press the support and the retaining element together. The two elements, the support and the retaining element, are preferably designed such that the degree of the clamping force acting perpendicularly to the connection side can be varied depending on the force applied. In other words, the greater the force used to secure the closing plate to the carrier element, the greater the clamping force can be.

[0036] In one embodiment, the curved boundary line of the vacuum valve may have a radius of curvature r, wherein the width b of the first or second connection side corresponds to at least twenty times the radius of curvature r. Therefore, b≥r*20 may apply.

[0037] In particular, the border line defines at least a portion of an edge of the retaining element.In one embodiment, the border line may also define (ie at least partially surround) a region of the retaining element which produces a clamping effect together with the support.

[0038] In one embodiment, the retaining element can have a rounded head shape or a mushroom head shape at its end protruding from the respective connection side.

[0039] The shape of the retaining element can be provided by an object which, as the distance from the respective connection side increases, has an increasingly greater extension perpendicular to the distance normal. The cross section of the rounded object can have a trapezoidal shape, in particular an isosceles trapezoidal shape.

[0040] In particular, the boundary line may be given by the perimeter of the protruding object at its maximum extension perpendicular to the distance normal.

[0041] In particular, the rounded retaining element provides an undercut in the direction of the connection side.

[0042] In one embodiment, the boundary line may form an ellipse, a circle or a semicircle. Alternatively, the boundary line may describe a polygon.

[0043] In one embodiment, the first or second connection side can have a receptacle for fastening the retaining element, in particular a recess or a hole with an internal thread. This offers the advantage that the retaining element can be quickly and easily inserted onto the connection side or replaced, for example in the event of damage. To this end, the retaining element can have a shape that corresponds to the shape and extension of the receptacle.

[0044] In one embodiment, the holding element can be fixedly connected to the respective connection side.

[0045] In one embodiment, the support can have a curved support line for interaction with the retaining element, wherein the support line has a radius of curvature r, wherein the width b of the first or second connecting side corresponds to at least fifteen times the radius of curvature r. In one embodiment, the support line forms an ellipse, a circle or a semicircle.

[0046] In particular, the support line can be designed to correspond to a boundary line of the retaining element. In this way, the course and / or the size can at least substantially correspond to the course and / or the size of the boundary line. In this way, the clamping of the closing plate to the carrier element can be optimized so that the clamping force has a desired magnitude at a defined position of the closing plate.

[0047] In one embodiment, the closure plate may have fastening elements protruding from a connecting side thereof for releasably connecting the closure plate to the carrier plate.

[0048] In particular, the fastening element is designed to protrude relative to the connection side and has a recess, in particular a hole, extending through the fastening element for the passage of a fastening means, in particular a screw.

[0049] In one embodiment, the fastening element may comprise a stop aligned parallel to the extension direction of the closing plate, and the carrier element may comprise a centering surface corresponding to the stop, wherein the interaction of the stop and the centering surface provides alignment of the closing plate relative to the carrier element.

[0050] An exact alignment can be provided by this, in particular in the extension direction, in particular in such a way that closing plate and carrier element overlap in a desired position and / or for example the position of the circumference of the closing plate corresponds to the position of the circumference of the carrier element.

[0051] A fastening element which is firmly connected to the closing plate advantageously simplifies joining and connecting (connecting) the closing plate and the carrier element, since the position of the fastening element can be fixed in a defined manner and the fastening counterpart can be arranged and shaped appropriately on the carrier element.

[0052] Due to the protruding shape and position of the fastening element, a centering or desired positioning relative to the carrier can be predefined in the mating direction (parallel to the height of the closing plate). This facilitates assembly of the closing plate to the carrier element and prevents, for example, excessive compression of the two components.

[0053] In one embodiment, the carrier element can have a first guide element extending perpendicularly to the extension direction of the carrier element, wherein the first guide element has a rectangular groove and the rectangular groove provides an undercut. The closing plate can have a second guide element, wherein the second guide element has an undercut, in particular a dovetail undercut, for connecting to the rectangular groove.

[0054] In particular, the second guide element can be provided by the retaining element.

[0055] Such guides provide an advantageous assembly aid when assembling the closing plate and the carrier element. Thus, the plate can be pushed onto the carrier by means of the guides, wherein the guides already provide for the relative positioning of the components.

[0056] In one embodiment, the closing assembly can have at least two, in particular four, retaining elements, wherein the second connection side has at least two retaining elements. By means of a plurality of arrangements of retaining elements, a simplified and convenient alignment of the closing plate relative to the carrier element can be achieved. In particular, if the retaining elements are designed as round heads (round head pins) or mushroom heads, a simple, precise and at the same time strong fit and clamping connection can be provided by them.

[0057] In one embodiment, the vacuum valve may include a separation device for separating the process atmosphere region from the external atmosphere region.

[0058] The process atmosphere area is to be understood in particular as an area which can be defined by a process chamber. In this area, a process atmosphere, in particular a vacuum, can be generated for processing substrates. Components used in this area must meet higher requirements, for example with regard to material resistance. Therefore, the external atmosphere area is to be understood in particular as an area in which normal atmospheric conditions exist, for example room air.

[0059] The drive unit can here be assigned at least partially, in particular completely, to the external atmosphere region and the valve closure element can be assigned in particular to the process atmosphere region.

[0060] The separating device of the valve can be formed by a bellows, for example. The bellows can be arranged, for example, inside the valve housing or the drive unit.

[0061] The valve known in the prior art and described, for example, in US 6,772,989 has a valve body with two ports, a valve seat arranged in a flow path connecting the two ports in a flow chamber, and an opening opposite the valve seat. The piston of a pneumatic cylinder system is arranged in a valve cover closing the opening. The piston drives a valve disc via a valve stem, which opens and closes the valve seat. The valve cover is connected to the opening in an airtight manner via a bellows plate. Both ends of the bellows surrounding the valve stem are connected in an airtight manner to the inner edge surface of the bellows plate and the valve disc. The valve disc has an annular retaining groove on the surface facing the valve seat, in which a sealing ring is arranged.

[0062] The valve housing is made of, for example, aluminum or stainless steel or is coated internally with aluminum or another suitable material, while the valve disc and bellows are usually made of steel. The bellows can expand and compress along its longitudinal axis within the displacement path of the valve disc, sealing the flow chamber gas-tightly from the valve stem and the actuator. Two main types of bellows are used. On the one hand, diaphragm bellows and, on the other hand, shaft bellows, the latter differing from diaphragm bellows in that it has no weld seams and is easier to clean, but has a smaller maximum stroke.

[0063] The invention also relates to a closing assembly for a vacuum valve for regulating a volume flow or a mass flow and / or for closing and opening a valve opening. The closing assembly has a coupling member suitable for being connected to a drive unit of the vacuum valve and a second sealing surface corresponding to a first sealing surface of a valve seat of the vacuum valve. The closing assembly also includes a carrier element with a first connection side and a closing plate with a second connection side, wherein the first and second connection sides are designed to connect the carrier element to the closing plate. In addition, a support member and a retaining element are provided, wherein the first connection side includes the support member and the second connection side includes the retaining element, or the first connection side includes the retaining element and the second connection side includes the support member.

[0064] The closing plate is combined with the carrier element in such a way that the support and the retaining element are designed accordingly so that, by the interaction of the support and the retaining element in this combined state, a clamping force perpendicular to the extension direction of at least one connecting side is generated. The retaining element protrudes from the corresponding connecting side and has a curved boundary line for interaction with the support.

[0065] In one embodiment, the carrier element can have a third connecting side opposite the first connecting side and a further closing plate, wherein the further closing plate is connected to the carrier element via the third connecting side, wherein a further retaining element of the closing plate or of the carrier element interacts in a clamping manner with a further support of the closing plate or of the carrier element.

[0066] At least one closure plate, in particular two closure plates, of the closure assembly may be present according to one of the following embodiments according to the invention.

[0067] The invention also relates to a closing plate for a closing assembly as described above. The closing plate has a second sealing surface corresponding to the first sealing surface of the valve seat of the vacuum valve, wherein the second sealing surface comprises a sealing material (seal). The closing plate also has a second connection side, wherein the second connection side is suitable for connection to the first or third connection side of the carrier element of the closing assembly and is arranged on the rear side of the closing plate relative to the sealing surface. In particular, the connection side is in the opposite direction relative to the sealing surface.

[0068] The closing plate has a retaining element, wherein the retaining element is adapted so that, when the closing plate is joined together with the carrier element, a clamping force is generated by the interaction of the support of the carrier element with the retaining element, the clamping force being perpendicular to the extension direction of the second connection side. The retaining element protrudes from the second connection side and has a curved boundary line for interacting with the support.

[0069] In one embodiment, the curved boundary line may have a radius of curvature r, wherein the width b of the second connecting side corresponds to at least fifteen times the radius of curvature r.

[0070] In one embodiment, the second connecting side can have a receptacle for fastening the retaining element, in particular a recess or a hole with an internal thread.

[0071] In one embodiment, the retaining element may be fixedly connected to the second connecting side.

[0072] In one embodiment, the retaining element can have a rounded head at its end protruding from the second connection side.

[0073] In one embodiment, the boundary line may form an ellipse, a circle, or a semicircle.

[0074] In one embodiment, the closure plate may comprise a fastening element protruding from the second connecting side for releasably connecting the closure plate to a carrier element of the closure assembly.

[0075] In particular, the fastening element can be designed to protrude relative to the second connecting side and have a recess, in particular a hole, extending through the fastening element for the passage of a fastening means, in particular a screw.

[0076] In particular, the fastening element may comprise a stop aligned parallel to the extension direction of the closing plate, and the carrier element may comprise a centering surface corresponding to the stop, wherein the interaction of the stop and the centering surface provides alignment of the closing plate relative to the carrier element.

[0077] The valve or its closing assembly according to the invention is described in more detail below by way of example by means of exemplary embodiments schematically shown in the accompanying drawings. Identical elements are marked with the same reference numerals in the figures. The described embodiments are generally not shown to scale, and they should not be understood as limiting.

[0078] The accompanying drawings show in detail:

[0079] Figure 1a to Figure 1c A first embodiment of a closure assembly according to the invention with a carrier element and a closure plate is shown;

[0080] Figure 2 A retaining element of a closing assembly according to the invention is shown;

[0081] Figure 3a to Figure 3b A further embodiment of a closure assembly according to the invention having a carrier element and a closure plate is shown;

[0082] Figure 4a to Figure 4b A further embodiment of a closure assembly according to the invention having a carrier element and a closure plate is shown;

[0083] Figure 5a to Figure 5b A further embodiment of a closure assembly according to the invention having a carrier element and a closure plate is shown;

[0084] Figures 6a to 6c An embodiment of a vacuum valve according to the present invention is shown.

[0085] Figure 1a to Figure 1c An embodiment of a closure assembly 10 according to the invention and a closure plate 30 according to the invention are shown. Figure 1a A closure assembly 10 according to the invention is shown having a carrier element 20 and a first closure plate 30 and a second closure plate 40. The closure plate 30 is shown in a partially transparent representation to clarify the connection of the closure plate 30 to the carrier element 20 located centrally between the closure plates 30,40.

[0086] By arranging two closing plates 30 and 40 on both sides, the valve closing member can provide sealing for two valve openings (particularly opposite to each other). For this purpose, the valve closing member can optionally be pressed against one of the openings.

[0087] Figure 1b The connection side of the closing plate 30 is shown. Figure 1cThe sealing surface 32 of the closing plate 30 opposite the rear connection side 31 is shown. The sealing surface 32 has a circumferential seal and can therefore provide the required sealing effect.

[0088] Four holding elements 33a-33d are arranged on the connecting side 31 of the closing plate 30. The holding elements 33a-33d are arranged here along a line on the connecting side 31. The closing plate 30 also has four fastening elements 34a-34d.

[0089] The carrier element 20 has a support element 21 on its connection side 24 .

[0090] The arrangement and shape of the retaining elements 33a-33d are such that they are in an assembled, connected state (see Figure 1a ) interacts with the support 21 of the carrier element 20. In this case, the holding elements 33a-33d rest on the support and achieve a clamping of the closing plate 30 to the carrier element 20. The corresponding clamping force acts perpendicularly to the extension direction E of the assembly parts and perpendicularly to the direction defining the height h of the closing plate 30. The width b of the closing plate 30 is generally defined by the extension in the extension direction E.

[0091] In order to provide the clamping force, the retaining elements 33 a - 33 d in the illustrated embodiment are designed as rounded heads. Figure 2 A perspective view of a rounded retaining element 33a is shown. The remaining retaining elements 33b-33d are shaped in the same way. The rounded shape provides an increase in extension perpendicular to the distance from the closing plate 30 as the distance increases.

[0092] Thus, the retaining element 33a (and in each case also the remaining retaining elements 33b-33d) provide a retaining surface 35a which runs obliquely relative to the surface of the connection side. Due to the oblique course of the retaining surface 35a, the closing plate 30 is pressed against the carrier element 20 when the closing plate 30 is joined together with the carrier element 20 by interaction with the support 21. In particular, for this purpose, the closing plate 30 is pushed relative to the carrier element 20 in the connection direction F while in existing contact with the carrier element 20. For this purpose, the support 21 can provide an oblique support surface similar to a round head, which makes a simple and precise connection of the two components possible.

[0093] In the connected state, the support surface and the retaining surface 35 a are therefore in contact, in particular in surface contact.

[0094] The support 21 can be designed as an edge or a groove. The support can extend over a large part of the width of the carrier element or can be designed as individual segments in a plurality of parts, in particular corresponding in number, shape and size to the holding elements 33a-33d.

[0095] The retaining elements 33a-33d each have at their ends (i.e. in the area furthest from the connection side 31) a diameter d (double radius r) which is smaller than the width b by at least a factor of 10, in particular by a factor of 15 or 20. The diameter decreases accordingly as the surface of the closing plate 30 is approached.

[0096] The fastening elements 34a-34d are arranged to protrude at the upper end of the closing plate 30. Figure 1a As shown, the closing plate 30 can be fastened to the carrier element 20 by means of these fastening elements 34a-34d. In the embodiment shown, the closing plate 30 is fixed to the carrier element 20 by means of these fastening elements 34a-34d with screws.

[0097] The positioning of the fastening elements 34a-34d also provides for limiting the mobility (in the connection direction F) of the closing plate 30 relative to the carrier element 20 during assembly (pushing together), thereby enabling the relative alignment of the components to be defined. Thus, the assembly can be performed easily by the user and without much prior knowledge.

[0098] In order to align the closing plate 30 with respect to the carrier element 20 also precisely in the extension direction E, the fastening elements 34b and 34c have respective lateral stops 36b and 36c. The stops 36b and 36c face in opposite directions (parallel to the extension direction E). The carrier element 20 has centering surfaces 22b and 22c which interact and correspond with the stops 36b and 36c, respectively.

[0099] When the carrier element 20 and the closing plate 30 are pushed together, the stops 34b-34c contact the centering surfaces 22b-22c, wherein the latter are shaped such that the distance between the two stop surfaces 34b-c substantially corresponds to the distance between the two centering surfaces 22b-22c. Thus, when the components are pushed together, horizontal alignment occurs (automatically), thereby providing a simple and reliable assembly.

[0100] Figure 3a and Figure 3b A further embodiment of a closure assembly 10 according to the invention and of a closure plate 30 according to the invention is shown.

[0101] According to Figure 1a to Figure 1c Compared to the embodiment of FIG. 1 , the closing plate 30 here has guide elements 37 a and 37 b instead of fastening elements 34 a - 34 d .

[0102] In the embodiments herein, the guide elements 37a-37b can each have an undercut, which is in particular dovetail-shaped, for connecting to the groove. The undercuts are arranged on the sides of the guide elements 37a-37b opposite to each other. Therefore, the carrier element 20 has a corresponding guide element 23 extending perpendicularly to the extension direction E of the carrier element 20. Here, the guide element 23 of the carrier element 20 has a rectangular groove on each side, and the rectangular groove provides the undercut.

[0103] The interaction of the guide elements 37a-37b with the guide element 23 provides on the one hand a precise relative alignment of the closing plate 30 with respect to the carrier element 20 in the extension direction E and on the other hand a simple and reliable guidance when the two components are pushed together.

[0104] Here, the fastening of the closing plate 30 to the carrier element 20 is achieved by a separate fastening body which is fixed to the upper side of the carrier element 20 and presses the closing plate 30 in the connection direction F. Thus, a clamping of the closing plate 30 to the carrier element 20 is provided by the interaction of the retaining elements 33a-33d with the support 21, and a holding of the closing plate 30 to the carrier element 20 is provided by the guide elements.

[0105] Figure 4a and Figure 4b A further embodiment of a closure assembly 10 according to the invention and of a closure plate 30 according to the invention is shown.

[0106] According to Figure 3a and Figure 3b Compared with the embodiment of the present invention, the closing plate 30 has only two holding elements 33b and 33c instead of four holding elements 33a-33d. The two holding elements 33b and 33c are also present in different positions.

[0107] The two retaining elements 33b and 33c are positioned such that, when the closing plate 30 is joined together with the carrier element 20, they act as guide elements on the closing plate side and engage in the grooves provided by the guide elements 23 on the carrier element side. Furthermore, when the desired positioning relative to the carrier element 20 is achieved, the two retaining elements 33b and 33c come into contact with the support 21 in the connection direction F, thereby achieving clamping and precise positioning.

[0108] Furthermore, the closing plate 30 can be held to the carrier element 20 by further guide elements 37a-37b. Alternatively or additionally, the closing plate 30 can be held on the carrier element 20 by means of a provided fastening body. To this end, the fastening body can have corresponding edges that engage with counterparts on the closing plate 30.

[0109] Figure 5a and Figure 5bA further embodiment of a closure assembly 10 according to the invention and of a closure plate 30 according to the invention is shown.

[0110] Compared to the previous embodiment, the closing plate 30 has two different retaining elements 33e and 33f instead of four rounded retaining elements 33a-33d. The retaining elements 33e and 33f are here each formed integrally with a connecting body 38a and 38b offset from the connecting side 31. The retaining elements 33e and 33f are arranged on the lower side of the connecting bodies 38a and 38b facing the connecting direction F.

[0111] The connecting bodies 38 a and 38 b also have lateral guide elements 37 a - 37 b for sliding together with the carrier element 20 in a precisely guided manner.

[0112] Furthermore, the support 21 of the carrier element 20 can have recesses which correspond to the arrangement and shape of the retaining elements 33 e and 33 f, so that in the pushed-together state the retaining elements 33 e and 33 f are present in the recesses and, due to this fit, centering of the closing plate 30 relative to the carrier element 20 is provided, in particular in the extension direction E. The shown one-piece design provides a robust and compact variant for precise and simple mounting of the closing plate 30 on the carrier element 20.

[0113] Figures 6a to 6c An exemplary embodiment of a vacuum valve 1 according to the invention, which is designed as a (double-sided) vacuum transfer valve 1 , is shown in different closed positions.

[0114] The vacuum valve 1 has a closing assembly 10 according to the present invention having two closing plates (valve discs) 30 and 40. Each closing plate has a sealing surface 32a, 32b with a seal for hermetically closing the openings 2a, 2b. The opening has a cross-section corresponding to the closing plate and is designed in the valve wall. The valve wall can be, for example, a wall of a vacuum process chamber. The openings 2a, 2b are each surrounded by a valve seat 3a, 3b, which also provides a sealing surface corresponding to the sealing surface of the closing plate. The sealing surfaces 32a, 32b of the closing plates 30, 40 surround the corresponding closing plates and have a sealing material (seal). In the closed position S( Figure 6c ), the seal is compressed between the sealing surfaces. Openings 2a, 2b connect the gas region M with the gas regions L and R.

[0115] It will be appreciated that the valve seats 3a, 3b with their sealing surfaces may alternatively be formed as valve components structurally fixed to the valve 1 and may for example be arranged (eg screwed) to the chamber opening.

[0116] The closing assembly 10 can be arranged on an adjustment arm 5, which is, for example, rod-shaped and extends along a geometric adjustment axis V. The adjustment arm 5 is mechanically connected to a drive unit 7, by which the closing assembly 10 can be adjusted by the drive unit 7 in the open position O ( Figure 6a ) through the middle position Z( Figure 6b ) to the closed position S( Figure 6c ).

[0117] In the open position O, the closing assembly 10 is outside the projection area of ​​the openings 2a, 2b and fully exposes them, such as Figure 6a shown.

[0118] The closure assembly 10 can be adjusted from the open position O into the intermediate position Z by the drive unit 7 by linearly adjusting the closure assembly 10 in the axial direction in a plane parallel or coaxial to the adjustment axis V and parallel to the valve wall.

[0119] At this intermediate position Z( Figure 6b ) the sealing surfaces 32a, 32b are spaced apart from and opposed to the sealing surfaces of the valve seats surrounding the openings 2a, 2b.

[0120] By adjusting in the direction of the opening axis A defined by the openings 2a, 2b (here: transversely to the adjustment axis V), and thus for example perpendicularly to the wall and the valve seat, the closing assembly 10 can be adjusted from the intermediate position Z into the closed position S ( Figure 6c ).

[0121] In the closed position S, the closing plate 30 closes the opening 2 a in a gas-tight manner and separates the gas region M from the gas region R in a gas-tight manner.

[0122] The vacuum valve is opened and closed by the drive unit 7, in this case by L-shaped movement of the closing assembly 10 in two directions (e.g. perpendicular to each other). It should be understood that, similar to closing the opening 2a by the closing plate 30, a gas-tight seal of the opening 2b can be provided by moving the closing assembly 10 in the other direction of the axis A by the closing plate 40.

[0123] The transfer valve 1 shown is usually used for sealing process volumes (vacuum chambers) as well as loading and unloading volumes. In such applications, frequent switching between the open position O and the closed position S is usually performed. This can lead to increased wear of the sealing surfaces 32a, 32b, the seals and the mechanical moving parts. By means of the modular, removable arrangement of the closing plates 30 and 40 according to the invention, the sealing elements can be easily replaced or maintained.

[0124] It should be understood that these shown figures are only schematic illustrations of possible exemplary embodiments. The various methods may also be combined with each other and with devices and methods of the prior art.

Claims

1. A vacuum valve (1) for regulating a volume flow or a mass flow and / or for closing and opening a valve opening (2a, 2b), the vacuum valve (1) comprising: a valve seat (3, 3b) having a valve opening (2a, 2b) defining an opening axis (A) and a first sealing surface surrounding the valve opening (2a, 2b), a closure component (10) for regulating a volume flow or a mass flow and / or for closing the valve opening (2a, 2b) in a substantially gas-tight manner, the closure component (10) having a second sealing surface (32, 32a, 32b) corresponding to the first sealing surface, and a drive unit (7) connected to the closing assembly (10) and adapted to provide movement of the closing assembly (10) such that the closing assembly (10) can be adjusted from an open position (O) to a closed position (S) and vice versa, o In the open position (O), the closure assembly at least partially exposes the valve opening (2a, 2b), o In the closed position (S), the first and second sealing surfaces (32, 32a, 32b) are in sealing contact with the sealing material present therebetween and thus close the valve opening (2a, 2b) in an airtight manner, It is characterized in that The closing assembly (10) comprises a carrier element (20) having a first connection side (24) and a closing plate (30, 40) having a second connection side (31), wherein the first connection side (24) and the second connection side (31) are designed to connect the carrier element (20) to the closing plate (30, 40), A support (21) and retaining elements (33a-33f), wherein: o the first connection side (24) comprises the support (21), and the second connection side (31) comprises the retaining elements (33a-33f), or o the first connection side (24) comprises the retaining elements (33a-33f) and the second connection side (31) comprises the support (21), The closing plate (30, 40) is combined with the carrier element (20), and the support element (21) and the retaining element (33a-33f) are designed accordingly so that, by the interaction of the support element (21) and the retaining element (33a-33f) in the combined state, a clamping force is generated perpendicular to the extension direction of at least one connecting side (24, 31), The retaining elements (33a-33f) protrude from the respective connection side (24, 31) and have a curved boundary line for interaction with the support (21).

2. The vacuum valve (1) according to claim 1, characterized in that: The curved boundary line has a radius of curvature r, wherein a width b of the first connecting side (24) or the second connecting side (31) corresponds to at least twenty times the radius of curvature r.

3. The vacuum valve according to claim 1 or 2, characterized in that: The first connection side (24) or the second connection side (31) has a receptacle for fastening the retaining element (33a-33f), in particular a recess or a hole with an internal thread.

4. The vacuum valve according to claim 1 or 2, characterized in that: The retaining elements (33a-33f) are fixedly connected to the respective connection side (24, 31).

5. A vacuum valve according to any one of the preceding claims, characterized in that The retaining elements (33a-33f) have rounded heads at their ends protruding from the respective connection side (24, 31).

6. A vacuum valve according to any one of the preceding claims, characterized in that The boundary lines form an ellipse, a circle or a semicircle.

7. A vacuum valve according to any one of the preceding claims, characterized in that The support member (21) has a curved support line for cooperating with the retaining elements (33a-33f), wherein: The support line has a radius of curvature r, wherein a width b of the first connecting side (24) or the second connecting side (31) corresponds to at least twenty times the radius of curvature r, and / or · Form an ellipse, circle or semicircle.

8. A vacuum valve according to any one of the preceding claims, characterized in that The closing plate (30, 40) has fastening elements (34a-34d) protruding from its connecting side (31) for releasably connecting the closing plate (30, 40) to the carrier element (20).

9. The vacuum valve according to claim 8, characterized in that: The fastening elements (34a-34d) are designed to protrude relative to the connection side (31) and have recesses, in particular holes, extending through the fastening elements (34a-34d) for fastening devices, in particular screws, to pass through.

10. The vacuum valve according to claim 8 or 9, characterized in that: The fastening element (34a-34d) has a stopper (36b, 36c) aligned parallel to the extension direction of the closing plate, and the carrier element (20) has a centering surface (22c, 22d) corresponding to the stopper (36b, 36c), wherein the interaction between the stopper (36b, 36c) and the centering surface (22c, 22d) leads to the alignment of the closing plate (30, 40) relative to the carrier element (20).

11. A vacuum valve according to any one of the preceding claims, characterized in that The carrier element (20) has a first guide element (23) extending perpendicularly to the extension direction of the carrier element, wherein the first guide element has a rectangular groove and the rectangular groove provides an undercut; and The closing plate (30, 40) has a second guide element (37a, 37b), wherein the second guide element has an undercut, in particular a dovetail-shaped undercut, for connecting to the rectangular groove.

12. The vacuum valve according to claim 11, characterized in that The second guide element is provided by the retaining element.

13. A vacuum valve according to any one of the preceding claims, characterized in that The closure assembly (10) comprises at least two, in particular four, retaining elements, wherein the second connecting side (31) comprises the at least two retaining elements.

14. A closing assembly (10) for a vacuum valve (1), the closing assembly (10) being used for regulating a volume flow or a mass flow and / or for closing and opening a valve opening (2a, 2b), the closing assembly (10) comprising: a coupling adapted to be coupled to a drive unit (7) of said vacuum valve (1), and a second sealing surface (32, 32a, 32b) corresponding to the first sealing surface of the valve seat (3a, 3b) of the vacuum valve (1), It is characterized in that a carrier element (20) having a first connection side (24) and a closing plate (30, 40) having a second connection side (31), wherein the first connection side (24) and the second connection side (31) are designed to connect the carrier element (20) to the closing plate (30, 40), and Support (21) and retaining elements (33a-33f), wherein o the first connection side (24) comprises the support (21), and the second connection side (31) comprises the retaining elements (33a-33f), or o The first connection side (24) comprises the retaining elements (33a-33f) and the second connection side (31) comprises the support (21), wherein: The closing plate (30, 40) is combined with the carrier element (20), and the support element (21) and the retaining element (33a-33f) are designed accordingly so that, by the interaction of the support element (21) and the retaining element (33a-33f) in the combined state, a clamping force is generated perpendicular to the extension direction of at least one connecting side (24, 31), The retaining elements (33a-33f) protrude from the respective connection side (24, 31) and have a curved boundary line for interaction with the support (21).

15. Closure assembly (10) according to claim 14, characterized in that The carrier element (20) has a third connection side opposite the first connection side (24) and a further closing plate (40), wherein the further closing plate (40) is connected to the carrier element (20) via the third connection side, wherein the closing plate or a further retaining element of the carrier element interacts with the closing plate or a further support of the carrier element in a clamping manner.

16. A closure plate (30, 40) for a closure assembly (10) according to claim 14 or 15, the closure plate (30, 40) comprising: a second sealing surface (32, 32a, 32b) corresponding to the first sealing surface of the valve seat (3a, 3b) of the vacuum valve (1), wherein the second sealing surface (32, 32a, 32b) comprises a sealing material, a second connection side (31), wherein the second connection side (31) is suitable for connection to the first connection side or the third connection side (24) of the carrier element (20) of the closure assembly (10) and is arranged on the rear side of the closure plate (30, 40) relative to the sealing surface (32, 32a, 32b), a retaining element (33a-33f), wherein the retaining element (33a-33f) is adapted such that, when the closing plate (30, 40) is joined together with the carrier element (20), a clamping force is generated by the interaction between the support (21) of the carrier element (20) and the retaining element (33a-33f), the clamping force being perpendicular to the extension direction of the second connecting side (31), and The retaining elements (33a-33f) protrude from the second connecting side (31) and have a curved boundary line for interaction with the support (21).

17. Closing plate (30, 40) according to claim 16, characterized in that The curved boundary line has a radius of curvature r, wherein a width b of the second connecting side corresponds to at least twenty times the radius of curvature r.

18. Closing plate (30, 40) according to claim 16 or 17, characterized in that The second connection side (31) has a receptacle for fastening the retaining element (33a-33f), in particular a recess or a hole with an internal thread.

19. Closing plate (30, 40) according to any one of claims 16 to 18, characterized in that The retaining elements (33a-33f) are fixedly connected to the second connection side.

20. Closing plate (30, 40) according to any one of claims 16 to 19, characterized in that The retaining elements (33a-33f) have rounded heads at their ends protruding from the second connection side (31).

21. A closing plate (30, 40) according to any one of claims 16 to 20, characterised in that The boundary lines form an ellipse, a circle or a semicircle.

22. Closing plate (30, 40) according to any one of claims 16 to 21, characterized in that The closure plate (30, 40) comprises fastening elements (34a-34d) protruding from the second connecting side (31) for releasably connecting the closure plate (30, 40) to a carrier element (20) of the closure assembly (10).

23. Closing plate (30, 40) according to claim 22, characterized in that The fastening elements (34a-34d) are designed to protrude relative to the second connection side (31) and have recesses, in particular holes, extending through the fastening elements (34a-34d) for the fastening means, in particular screws, to pass through.

24. Closing plate (30, 40) according to claim 22 or 23, characterized in that The fastening element (34a-34d) has a stop (36b, 36c) aligned parallel to the extension direction (E) of the closing plate (30, 40), and the carrier element (20) has a centering surface (22b, 22c) corresponding to the stop (36b, 36c), wherein the interaction between the stop (36b, 36c) and the centering surface (22b, 22c) provides alignment of the closing plate (30, 40) relative to the carrier element (20).

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