Method for manufacturing glass cover member, glass cover member, and package provided with same

Abstract

A method for manufacturing a glass cover member (4) includes a film formation step (S122) in which a metallization layer (9) is formed on one surface (6c) of a frame section (6) by a film formation process using a mask member (25). In the film formation step (S122), a film formation process is performed in a state in which an opening (26) of a mask member (25) is disposed at a position facing one surface (6c) of a frame section (6) and one surface (8a) of a connection section (8) that is continuous on the inside of the one surface (6c) of the frame section (6). A first shielding part (27) of the shielding component (25) is arranged at a position which is closer to the outer side than the opening part (26) and is opposite to the glass cover component (4), and a second shielding part (28) of the shielding component (25) is arranged at a position which is closer to the inner side than the opening part (26) and is opposite to the glass cover component (4).

Description

Technical Field

[0001] The present invention relates to a method for manufacturing a glass cover member, a glass cover member, and a package including the cover member, and more particularly to a film forming technology for the glass cover member. Background Art

[0002] For example, for the purpose of protecting a light-emitting element such as an LED from the surrounding environment, there is known a structure called a package, which includes a substrate, a light-emitting element disposed at a predetermined position on the substrate, and a cover member that forms a space between the substrate and the cover member to accommodate the light-emitting element. In this structure, in order to efficiently extract light emitted by the light-emitting element, the cover member made of glass is formed into a dome shape (for example, refer to Patent Document 1).

[0003] On the other hand, glass lacks adhesion to other substances, so a joining structure has been proposed in which a metallized layer (metal layer) is provided on the surface of a glass cover member and the surface of a substrate, which serve as joining surfaces, and the metallized layers are joined to each other using a joining material such as solder (see Patent Document 2).

[0004] Prior art literature

[0005] Patent Literature

[0006] Patent Document 1: International Publication No. 2022 / 130799

[0007] Patent Document 2: International Publication No. 2020 / 012974 Summary of the invention

[0008] Problems to be solved by the invention

[0009] However, regarding the package of the above-mentioned structure, there is a demand for obtaining a larger space for accommodating the light-emitting element formed between the glass cover member and the substrate than ever before. On the other hand, since the overall size of the package is the same as before, for example, in the case of a package formed by bonding a dome-shaped glass cover member to a substrate, it is necessary to reduce the width direction dimension of the frame portion surrounding the peripheral portion of the dome portion instead of increasing the dome-shaped portion (dome portion) of the cover member (it should be noted that the width direction referred to here refers to the direction orthogonal to the length direction and thickness direction of the frame portion. The same applies to the following in this specification.). In the case of a joining structure in which a solder layer is sandwiched between a pair of metal layers as described above, it is necessary to form a metal layer on the surface of the frame portion, but if the width direction dimension of the frame portion is too small, a metal layer of the necessary size (width direction dimension) cannot be formed, resulting in a risk of reduced airtightness in the package.

[0010] In view of the above circumstances, a technical problem to be solved by the present invention is to provide a glass cover member capable of making the accommodation space of a light emitting element larger than before and providing good airtightness to the accommodation space.

[0011] Solutions to Solve Problems

[0012] The above-mentioned problem is solved by a method for manufacturing a glass cover member of the present invention. That is, the method is a method for manufacturing a glass cover member, wherein the glass cover member forms a space for accommodating a light-emitting element between the glass cover member and a base body, and the glass cover member integrally has a plate-shaped frame, a dome-shaped dome portion located inside the frame, and a connecting portion connecting the frame and the dome portion, and the method for manufacturing the glass cover member is characterized in that the method for manufacturing the glass cover member includes a film forming step of forming a metallized layer on one surface of the frame portion by film forming treatment using a masking member, and in the film forming step, the film forming treatment is performed in the following state: an opening of the masking member is arranged at a position opposite to one surface of the frame portion having a flat shape and one surface of the connecting portion continuous inside the one surface of the frame portion, a first masking portion of the masking member is arranged at a position outside the opening and opposite to the glass cover member, and a second masking portion of the masking member is arranged at a position inside the opening and opposite to the glass cover member.

[0013] It should be noted that the "connecting portion" mentioned in this specification means a portion whose inner surface is convex when observed in a cross section along the normal direction of the flat surface in contact with one surface of the frame. In addition, the "dome portion" mentioned in this specification means a portion whose inner surface is concave as a whole when observed in the above cross section. In addition, the "flat shape" mentioned in this specification means that the flatness of the target surface is 50μm or less.

[0014] Thus, in the present invention, when the film forming process is performed on the metallized layer of the frame of the glass cover member, the film forming process is performed in a state where the opening of the masking member is arranged at a position opposite to the surface of one side of the frame and the surface of one side of the connecting portion that is continuous inside the surface of the frame, so that the metallized layer is formed from the surface of the frame to the surface of the connecting portion that is continuous inside the surface of the frame. Thus, even if the width dimension of the frame does not satisfy the width dimension required for the formation of the metallized layer, the required width dimension can be ensured. Therefore, even when the dome portion is enlarged to increase the accommodation space of the light-emitting element, good airtightness can be given to the accommodation space of the light-emitting element.

[0015] Furthermore, in the method for manufacturing a glass cover member of the present invention, the film forming process may be performed using a masking member having a protruding portion protruding from the second masking portion toward the glass cover member.

[0016] As described above, the film forming process is performed in a state where the opening of the masking member is arranged at a position opposite to the frame and the connecting portion of the glass cover member, so that the metallization layer is formed not only on the surface of one side of the frame but also on the surface of one side of the connecting portion continuous with the surface on the inner side thereof. On the other hand, the second masking portion is arranged at a position inside the opening and opposite to the glass cover member, so it is expected that the metallization layer is formed only in the area opposite to the opening on the surface of one side of the connecting portion. However, the inner surface (one side surface) of the connecting portion is a convex curved surface, so when the masking member is arranged as described above, a gap y of a non-negligible size is generated between the outer end of the second masking portion 28 and the inner surface 8a of the connecting portion 8 (see Fig.13 ). Here, the film-forming material supplied to the surface of one side of the connecting portion through the opening may intrude into the inner space of the dome portion through the gap between the second masking portion and the connecting portion. As a result, there is a concern that the film-forming material may adhere not only to the inner surface of the connecting portion but also to the inner surface of the dome portion that is continuous with the inner surface of the connecting portion. Since the inner surface of the dome portion has a greater influence on the light extraction efficiency of the light-emitting element than the inner surface of the connecting portion, the adhesion of the film-forming material to the inner surface of the dome portion is likely to cause a decrease in the light extraction efficiency (for example, less than 90%).

[0017] In order to solve the above-mentioned problem, the film forming process is performed using a masking member having a protruding portion protruding from the second masking portion toward the glass cover member, so that the film forming material is prevented from intruding into the above-mentioned inner space through the gap between the connecting portion and the outer end of the second masking portion by the protruding portion (particularly the side surface thereof). Therefore, the adhesion of the film forming material to the inner surface of the dome portion can be prevented as much as possible, and the light extraction efficiency through the glass cover member (dome portion) can be improved.

[0018] In addition, in the case of providing a protrusion, in the method for manufacturing a glass cover member of the present invention, the film forming process may be performed using a masking member provided with a protrusion in such a manner that the protrusion is closest to the glass cover member at a boundary between one surface of the connecting portion and one surface of the dome portion continuous to the inner side of one surface of the connecting portion or at a position outside the boundary.

[0019] By providing the protrusion in this way, the portion where the gap formed between the cover member and the protrusion is the smallest can be close to the opening, thereby more effectively preventing the film-forming material from invading the inner space of the dome. Therefore, it is possible to prevent the film-forming material from adhering to the inner surface of the dome with a higher probability and further improve the light extraction efficiency.

[0020] Furthermore, when a protrusion is provided, in the method for manufacturing a glass cover member of the present invention, the film forming process may be performed using a masking member provided with the protrusion so that a gap is formed between the dome portion and the connecting portion and the protrusion.

[0021] The glass cover member having a frame and a dome portion is usually formed into a dome portion by deformation caused by heat softening. Therefore, in mass-produced parts, the shape accuracy of the dome portion and the connecting portion varies accordingly. In this regard, the protrusion is provided in a manner that a gap is formed between the protrusion and the dome portion and the connecting portion, thereby avoiding interference between the dome portion, the connecting portion, and the protrusion, and in particular, preventing damage to the inner surface of the dome portion.

[0022] In addition, in the case where the protrusion is provided in a manner so as to generate a gap between the dome portion and the connecting portion, in the manufacturing method of the glass cover member of the present invention, the size of the smallest portion of the gap between the dome portion and the protrusion and the gap between the connecting portion and the protrusion may be greater than 5% and less than 30% of the inner surface height of the dome portion.

[0023] Thus, by setting the size of the smallest portion in the gap to be 5% or more of the inner surface height of the dome portion, interference with the protrusion can be reliably avoided regardless of the deviation in the shape accuracy of the dome portion and the connecting portion. In addition, by setting the minimum value of the gap to be 30% or less of the inner surface height of the dome portion, it is possible to effectively prevent the film-forming material from invading through the gap.

[0024] Furthermore, when the protrusion is provided, in the method for manufacturing a glass cover member of the present invention, the ratio of the area of ​​the protrusion to the area of ​​the second shielding portion in a plan view of the dome portion may be 50% or more and 90% or less.

[0025] In the method for manufacturing a glass cover member of the present invention, the protruding portion may include a side surface provided upright from the second shielding portion and a front end surface, and a chamfered portion may be provided between the side surface and the front end surface.

[0026] Thus, by providing a chamfered portion between the side surface and the front end surface constituting the protrusion, it is possible to avoid interference between the corner of the protrusion and the glass cover member (connecting portion or dome portion), so that the gap between the protrusion and the glass cover member (connecting portion or dome portion) can be set to be narrower. Therefore, by using this structure, it is also possible to prevent the film forming material from invading the inner space of the dome portion with a higher probability, thereby achieving a further improvement in light extraction efficiency.

[0027] In the method for manufacturing a glass cover member of the present invention, the protrusion may include a side surface rising from the second shielding portion and a front end surface, and the side surface may be inclined toward the inside of the glass cover member as it moves away from the second shielding portion.

[0028] In this way, by using the inclined side surface and the front end surface to form the protrusion, the gap between the inner surface and the side surface of the connection part and the dome can be made extremely small in the entire area of ​​the protrusion direction. Therefore, using this structure, it is also possible to prevent the film-forming material from invading the inner space of the dome with a higher probability, thereby achieving a further improvement in the light extraction efficiency.

[0029] Furthermore, in the method for manufacturing a glass cover member of the present invention, the protruding portion may have a shape imitating the dome when the dome is viewed from above.

[0030] By configuring the protrusion in this way, the gap between the protrusion and the glass cover member (connecting portion or dome) can be closed over the entire circumference, thereby preventing the film-forming material from invading the inner space of the dome without omission and uniformly improving the light extraction efficiency.

[0031] Furthermore, in the method for manufacturing a glass cover member of the present invention, the protruding portion may be constituted by an annular wall portion.

[0032] As described above, when the second masking portion is provided with a protrusion, it is important to prevent the film-forming material from invading the inner space by utilizing the side surface of the protrusion. Therefore, there is no particular problem in utilizing the annular wall portion to constitute the protrusion.

[0033] In addition, in the manufacturing method of the glass cover member of the present invention, the protrusion may also include: a protrusion body; and a soft part, which is formed of a material softer than the protrusion body and constitutes the smallest part of the gap between the protrusion and the dome part and the gap between the protrusion and the connecting part.

[0034] By forming the protrusion in this way, the minimum gap between the protrusion and the glass cover member can be reduced compared to the case where the masking member including the protrusion is formed of a single material. Therefore, it is possible to prevent the film-forming material from invading the inner space of the dome with a higher probability, thereby achieving a further improvement in the light extraction efficiency. In addition, according to the above structure, the part that may come into contact with the dome or the connecting part becomes a soft part that is softer than the main body of the masking member (the protrusion main body), so even if the dome or the connecting part comes into contact with the protrusion, the risk of damaging the dome or the connecting part is extremely low. In addition, even if a part of the soft part adheres to the dome or the connecting part, it can be easily removed by cleaning, so there is no special problem.

[0035] In the method for producing a glass cover member of the present invention, the metallized layer may be formed by laminating a plurality of metal layers having different linear expansion coefficients, and the metal layer closer to the frame may have a smaller linear expansion coefficient.

[0036] In this way, the metallization layer is configured as a structure formed by stacking multiple metal layers, and the closer the metal layer is to the frame, the smaller the linear expansion coefficient is, thereby effectively alleviating the stress generated in the frame when the metallization layers are bonded to each other using a bonding material such as solder to bond the cover member to the base.

[0037] In this case, the film forming process may be performed so that the width dimension of the metal layer farthest from the frame portion among the plurality of metal layers is smaller than the width dimensions of the remaining metal layers.

[0038] By adjusting the width dimension of each metal layer in this manner, stress generated in the frame portion can also be effectively alleviated.

[0039] In addition, the above-mentioned problem can also be solved by the glass cover member of the present invention. That is, the cover member is a glass cover member that forms a space for accommodating a light-emitting element between the cover member and the base, and is characterized in that the glass cover member integrally includes a plate-shaped frame portion, a dome-shaped dome portion located inside the frame portion, and a connecting portion connecting the frame portion and the dome portion, and a metallized layer is formed across one surface of the frame portion and one surface of the connecting portion that is continuous inside the one surface of the frame portion.

[0040] Thus, in the present invention, the metallized layer formed on the frame of the glass cover member is formed across one surface of the frame and one surface of the connecting portion that is continuous inside the one surface of the frame. Therefore, even when the width dimension of the frame does not satisfy the width dimension required for forming the metallized layer, the width dimension required for forming the metallized layer can be ensured. Therefore, even when the dome portion is enlarged to increase the accommodation space of the light emitting element, good airtightness can be imparted to the accommodation space of the light emitting element.

[0041] The present invention can provide a glass cover member that can make the housing space of a light emitting element larger than before and provide good airtightness to the housing space, and is therefore suitable as a package including a cover member, a light emitting element, and a base.

[0042] Effects of the Invention

[0043] As described above, according to the present invention, it is possible to provide a glass cover member capable of providing good airtightness to the accommodation space while making the accommodation space for the light emitting element larger than before. BRIEF DESCRIPTION OF THE DRAWINGS

[0044] Figure 1 It is a perspective view of a package including the glass cover member according to the first embodiment of the present invention.

[0045] Figure 2 yes Figure 1 A top view of the package is shown.

[0046] Figure 3 yes Figure 1 A-A section view in.

[0047] Figure 4 yes Figure 3 An enlarged cross-sectional view of the portion indicated by arrow B in FIG.

[0048] Figure 5 It is composed Figure 1 A cross-sectional view of a glass cover member of the package shown.

[0049] Figure 6 yes Figure 5 An enlarged cross-sectional view of the portion indicated by arrow C in FIG.

[0050] Figure 7 It is used to illustrate the use of forming Figure 5 1 is a cross-sectional view showing an example of a process for forming a dome portion of a glass cover member.

[0051] Figure 8 It is a cross-sectional view for explaining another example of the dome forming process.

[0052] Fig. 9 This is a plan view of an example of a glass cover member after the dome portion is formed.

[0053] Fig.10 is Fig. 9 FIG. 1 is a plan view of an example of a masking member used in a film forming step of a glass cover member.

[0054] Fig.11 yes Fig.10 An enlarged view of the portion indicated by arrow D in FIG.

[0055] Fig.12 yes Fig.11 E-E section view in.

[0056] Fig.13 yes Fig.12 An enlarged view of the portion indicated by arrow F in FIG.

[0057] Fig.14 It is a cross-sectional view of a masking member and a glass cover member according to a second embodiment of the present invention.

[0058] Fig.15 It is a cross-sectional view of a masking member and a glass cover member according to a third embodiment of the present invention.

[0059] Fig.16 It is a cross-sectional view of a masking member and a glass cover member according to a fourth embodiment of the present invention.

[0060] Fig.17 It is a plan view of a masking member according to a fifth embodiment of the present invention.

[0061] Fig.18 It is a plan view of a masking member according to a sixth embodiment of the present invention.

[0062] Fig.19 It is an enlarged cross-sectional view of main parts of a masking member and a glass cover member according to a seventh embodiment of the present invention.

[0063] Fig. 20 It is a cross-sectional view of a masking member and a glass cover member according to an eighth embodiment of the present invention.

[0064] Fig.21 yes Fig. 20 An enlarged cross-sectional view of the main parts of the masking member and the glass cover member is shown.

[0065] Fig. 22 It is a cross-sectional view of a masking member and a glass cover member according to a ninth embodiment of the present invention.

[0066] Fig.23 It is a cross-sectional view of a masking member and a glass cover member according to a tenth embodiment of the present invention.

[0067] Fig.24 It is an enlarged cross-sectional view of main parts of a masking member and a glass cover member according to an eleventh embodiment of the present invention. DETAILED DESCRIPTION

[0068] The following is based on Figures 1 to 13 A first embodiment of the present invention will be described.

[0069] Figure 1 : is a perspective view of the package 1 of this embodiment. Figure 2 yes Figure 1 The top view of the package 1 is shown. Figure 3 yes Figure 1 1 is a cross-sectional view of a package 1. The package 1 comprises: a substrate 2, which is, for example, plate-shaped; a light-emitting element 3, which is arranged at a predetermined position on the substrate 2; a cover member 4 made of glass, which forms a space for accommodating the light-emitting element 3 between the substrate 2 and the cover member 4; and a sealing portion 5, which seals the substrate 2 and the cover member 4.

[0070] The substrate 2 is, for example, plate-shaped and is formed of a predetermined material. Here, as materials that can be used for the substrate 2, ceramics such as aluminum nitride, aluminum oxide, silicon carbide, silicon nitride, glass ceramics obtained by mixing and sintering these ceramics with glass powder, Fe-Ni-Co alloy, Cu-W alloy, Kovar (registered trademark) and other alloys can be cited. Of course, the materials cited here are only examples, and any materials can be applied.

[0071] The light emitting element 3 is fixed to the first main surface 2a of the base 2. In the present embodiment, an ultraviolet irradiation LED is used as the light emitting element 3. Of course, the light emitting element 3 of the present invention is not limited to the present embodiment.

[0072] The cover member 4 integrally includes a plate-shaped frame portion 6, a dome portion 7 located inside the frame portion 6 and bulging toward one side in the thickness direction of the frame portion 6, and a connecting portion 8 connecting the frame portion 6 and the dome portion 7. In the present embodiment, the frame portion 6, the dome portion 7, and the connecting portion 8 are integrally formed of the same material.

[0073] The frame 6 is located around the dome 7 and has a generally constant thickness. Of course, the thickness of the frame 6 can also be changed in its length direction (circumferential direction) or width direction as needed. Here, the thickness of the frame 6 is, for example, not less than 0.05 mm and not more than 2.0 mm. On the other hand, the width dimension of the frame 6 (here refers to the direction perpendicular to the thickness direction and the length direction of the frame 6) varies depending on its circumferential position. In this embodiment, the narrow width portion 6a and the wide width portion 6b are alternately arranged at every 90° phase (see Figure 2 ).

[0074] The frame portion 6 has an outer shape based on the outer shape of the package 1 or the outer shape of the dome portion 7. In this embodiment, the outer shape is a rectangular shape (see Figure 2 ). The frame portion 6 has a first main surface 6c having a relatively large area and a second main surface 6d located on the opposite side of the first main surface 6c. Here, the first main surface 6c is equivalent to the surface of one side of the frame portion 6 of the present invention. In the present embodiment, the first main surface 6c and the second main surface 6d are both flat. The surface roughness (arithmetic mean roughness) Ra of the first main surface 6c is preferably less than 1nm, more preferably less than 0.5nm, and further preferably less than 0.3nm. The surface roughness Ra of the second main surface 6d is preferably less than 1nm, more preferably less than 0.5nm, and further preferably less than 0.3nm.

[0075] The dome portion 7 has a concave inner surface 7a and a convex outer surface 7b corresponding to the inner surface 7a. In the present embodiment, the dome portion 7 is hemispherical and is formed at the central position of the frame portion 6. The thickness dimension of the dome portion 7 may be constant or may vary depending on the position. For example, the thickness dimension may vary in a manner that the thickness dimension decreases as the thickness dimension moves from the base end portion 7c of the dome portion 7 toward the top portion 7d. In this case, the thickness dimension of the base end portion 7c is, for example, greater than 0.19 mm and less than 1.9 mm. The thickness dimension of the top portion 7d is, for example, greater than 0.15 mm and less than 1.0 mm. The ratio of the thickness dimension of the top portion 7d to the thickness dimension of the base end portion 7c is greater than 0.08 and less than 0.9, preferably greater than 0.1 and less than 0.8, and more preferably greater than 0.2 and less than 0.5.

[0076] The outer diameter of the dome portion 7 is, for example, 2 mm to 150 mm inclusive. The height of the dome portion 7 (here, the shortest distance from an imaginary plane including the first main surface 6 c of the frame 6 to the top 7 d of the dome portion 7 ) is, for example, 0.5 mm to 80 mm inclusive.

[0077] The surface roughness Ra of the inner surface 7a is preferably 1 nm or less, more preferably 0.5 nm or less, and further preferably 0.3 nm or less. The surface roughness Ra of the outer surface 7b is preferably 1 nm or less, more preferably 0.5 nm or less, and further preferably 0.3 nm or less.

[0078] The connecting portion 8 has a convex inner surface 8a and a concave outer surface 8b corresponding to the inner surface 8a. Figure 4 The left side in the figure) is continuous with the first main surface 6c of the frame 6, and on the inner side (if Figure 4The outer surface 8b is continuous with the second main surface 6d of the frame portion 6 on the outside and is continuous with the outer surface 7b of the dome portion 7 on the inside.

[0079] The radius of curvature of the inner surface 8a is preferably larger than the radius of curvature of the outer surface 8b. The radius of curvature of the inner surface 8a is preferably 0.5 mm or more and 5 mm or less, more preferably 1 mm or more and 4.0 mm or less. The radius of curvature of the outer surface 8b is preferably 0.5 mm or more and 5.0 mm or less, more preferably 1.0 mm or more and 4.0 mm or less. The surface roughness Ra of the inner surface 8a is preferably 1.0 nm or less, more preferably 0.5 nm or less, and further preferably 0.3 nm or less. The surface roughness Ra of the outer surface 8b is preferably 1.0 nm or less, more preferably 0.5 nm or less, and further preferably 0.3 nm or less.

[0080] The cover member 4 of the above structure is obtained, for example, by forming a part of a flat glass plate into a dome shape. The glass used in the cover member 4 is preferably alkali-free glass, borosilicate glass, aluminosilicate glass, quartz glass, or crystallized glass. If it is alkali-free glass, borosilicate glass, or aluminosilicate glass, it is possible to achieve a balance between high transmittance and high processability during molding. In addition, if it is quartz glass, it is possible to have a significantly high transmittance in the ultraviolet region while maintaining processability during molding. In addition, if it is crystallized glass, it is possible to achieve a balance between high transmittance and high breaking strength.

[0081] When the glass is borosilicate glass, aluminosilicate glass or alkali-free glass, the glass composition preferably contains, by mass%, 50 to 75% SiO2, 1 to 25% Al2O3, 0 to 30% B2O3, 0 to 20% Li2O+Na2O+K2O, and 0 to 20% MgO+CaO+SrO+BaO. If the glass composition is within the above composition range, it belongs to these glass systems.

[0082] In the case of crystallized glass, as the glass composition, it is preferably a low thermal expansion crystallized glass containing 60 to 80% SiO2, 3 to 30% Al2O3, 1 to 20% Li2O + Na2O + K2O, 5 to 20% MgO + CaO + SrO + BaO in terms of mass %, and β-quartz solid solution or β-spodumene precipitated as crystals from the inside of the glass. Here, low thermal expansion refers to a thermal expansion coefficient of -10×10 -7 ~20×10 -7 / ℃.

[0083] like Figure 3As shown, the sealing portion 5 is formed between the frame portion 6 of the cover member 4 and the base 2. In this embodiment, the sealing portion 5 is formed on the entire circumference of the frame portion 6 (see Figure 2 ).

[0084] like Figure 4 As shown in the enlarged view, the sealing portion 5 is composed of a pair of metallized layers 9, 10 and a bonding portion 11. One of the metallized layers 9 is formed across the first main surface 6c of the frame portion 6 of the cover member 4 and the inner surface 8a of the connecting portion 8 that is continuous inside the first main surface 6c, and the other metallized layer 10 is formed on the first main surface 2a of the base 2. The bonding material 11a forming the bonding portion 11 is provided, for example, on the cover member 4 before bonding with the base 2 (see Figure 5 as well as Figure 6 ). In this case, each metallization layer 9 , 10 and the bonding portion 11 are formed on the entire circumference of the frame portion 6 .

[0085] The metallized layer 9 on one side is formed, for example, by stacking a plurality of metal layers 12 to 14 having different linear expansion coefficients. In the present embodiment, the metallized layer 9 is formed by three metal layers 12 to 14 in a stacked state. In this case, the first metal layer (base layer) 12 closest to the frame 6 and the second metal layer (intermediate layer) 13 next to the first metal layer 12 and close to the frame 6 are formed across the first main surface 6c of the frame 6 and the inner surface 8a of the connecting portion 8. In addition, the materials of the first metal layer (base layer) 12 closest to the frame 6, the second metal layer (intermediate layer) 13 next to the first metal layer 12 and close to the frame 6, and the third metal layer (surface layer) 14 farthest from the frame 6 are selected so that the closer the metal layer is to the frame 6, the smaller the linear expansion coefficient is. Glass has a lower linear expansion coefficient than metal, so by configuring as described above, the closer the metal layer is to the frame 6, the closer the linear expansion coefficient is to the frame 6 made of glass.

[0086] Here, examples of the metal used in the first metal layer 12 include Cr, Ta, W, Ti, Mo, Ni, Pt, etc. Examples of the metal used in the second metal layer 13 include Ni, Pt, Pd, etc. In addition, examples of the metal used in the third metal layer 14 include Au, Sn, Ag, Ni, Pt, etc. It should be noted that the metal used in each of the metal layers 12 to 14 may be a single metal or an alloy.

[0087] In addition, as in the present embodiment, when the metallization layer 9 on one side is composed of three metal layers 12 to 14, it is preferred that the second metal layer 13 is the thickest, the third metal layer 14 is the second thickest, and the first metal layer 12 is the thinnest. Specifically, the thickness dimension of the first metal layer 12 is preferably, for example, 0.01 μm or more and 0.3 μm or less, the thickness dimension of the second metal layer 13 is preferably, for example, 0.3 μm or more and 3.0 μm or less, and the thickness dimension of the third metal layer 14 is preferably 0.1 μm or more and 1.0 μm or less.

[0088] In order to further relax stress, the width dimension of the first metal layer 12 farthest from the frame portion 6 among the plurality of metal layers 12 to 14 may be smaller than the width dimensions of the remaining metal layers (the second metal layer 13 and the third metal layer 14 ).

[0089] As a method for forming the metallization layer 9 (first metal layer 12, second metal layer 13, third metal layer 14) of the above structure on the first main surface 6c of the frame portion 6, for example, sputtering, vacuum evaporation, vacuum evaporation using ion assistance or ion plating, and CVD film forming methods are mentioned.

[0090] The metallization layer 9 on one side has been described above, but the metallization layer 10 on the other side provided on the first main surface 2a of the substrate 2 can also adopt the same structure as described above. That is, the metallization layer 10 on the other side is composed of the first metal layer 15 closest to the substrate 2, the second metal layer 16 second closest to the substrate 2, and the third metal layer 17 farthest from the substrate 2 (see Figure 4 ). In this case, at least the first metal layer 15 and the second metal layer 16 are formed in a region opposite to the first main surface 6c of the frame portion 6 and a portion of the inner surface 8a of the connection portion 8. That is, the first metal layer 15 and the second metal layer 16 constituting the metallization layer 10 on the substrate 2 side are formed in a region corresponding in the width direction to the first metal layer 12 and the second metal layer 13 of the metallization layer 9 on the cover member 4 side formed across the first main surface 6c of the frame portion 6 and the inner surface 8a of the connection portion 8.

[0091] like Figure 3 as well as Figure 4 As shown, the bonding portion 11 is formed in a layered manner between a pair of metallization layers 9 and 10. When each metallization layer 9 is composed of three metal layers 12 to 14 (15 to 17) as in the present embodiment, the bonding portion 11 is formed so as to contact the third metal layers 14 and 17 farthest from the frame portion 6 and the base 2, respectively.

[0092] The bonding portion 11 is made of a metal bonding material 11a (see Figure 6) is formed. As the bonding material 11a, a material commercially available as a solder material or a brazing material can be used, for example, Au-Sn alloy, Pb-Sn alloy, Au-Ge alloy, etc. In the present embodiment, the bonding portion 11 is formed to have the same size as the width direction dimension of the third metal layer 14, 17 of each metallization layer 9, 10. In other words, the width direction dimension of the bonding portion 11 is made smaller than the width direction dimension of the first metal layer 12, 15 and the second metal layer 13, 16 of each metallization layer 9, 10.

[0093] Next, Figure 1 An example of a method for manufacturing the package 1 shown in FIG. 1 is described. The manufacturing method includes a preparation step S1 of preparing the base 2 and the cover member 4 and a bonding step S2 of bonding the base 2 and the cover member 4.

[0094] The preparation step S1 includes: a substrate preparation step S11, preparing a substrate 2 in a state where the other metallization layer 10 and the light-emitting element 3 are provided on the first main surface 2a; and a cover member preparation step S12, preparing a cover member 4 in a state where the metallization layer 9 and the bonding material 11a are provided on the first main surface 6c side of the frame 6.

[0095] In the substrate preparation step S11 , after the metallization layer 10 is formed on the first main surface 2 a of the substrate 2 , the light emitting element 3 is mounted in a region of the first main surface 2 a surrounded by the metallization layer 10 .

[0096] The cover member preparation step S12 includes a forming step S121 of forming the dome portion 7 on the plate glass G to produce Figure 3 The cover member 4 of the embodiment shown in the figure has a film forming step S122 of forming a metallization layer 9 by performing a film forming process on the first main surface 6 c side of the frame portion 6 ; and a bonding material forming step S123 of forming a bonding material 11 a on the metallization layer 9 .

[0097] (S121) Forming process

[0098] Figure 7 The device for forming the dome portion 7 on the cover member 4 is shown. The forming device 18 includes a support table 19 for supporting the plate glass G, a masking member 20 arranged to overlap the plate glass G supported by the support table 19, and a heating device 21 for heating a part of the plate glass G. In addition, the forming device 18 includes: a pressing member 22 for pressing the support table 19 and the masking member 20 in a direction in which the two are approached to each other; and an external force generating device 23 for applying an external force to a part of the plate glass G.

[0099] The support 19 includes a support portion 19a that supports the plate-shaped glass G, and a space portion 19c that includes an opening portion 19b surrounded by the support portion 19a and allows thermal deformation of a portion of the plate-shaped glass G. The support portion 19a of the support 19 supports the main surface (here, the lower surface) of the plate-shaped glass G. In the present embodiment, the opening 19b is circular, but other shapes may be selected according to the shape of the dome portion 7 to be formed, such as a triangular shape, a polygonal shape such as a quadrilateral shape, an elliptical shape, etc.

[0100] The space portion 19c of the support 19 is configured to be able to mold the entire dome portion 7 of the cover member 4 in a non-contact state. Examples of the material constituting the support 19 include metals and ceramics.

[0101] like Figure 7 As shown, the masking member 20 has a through hole 20a. In the present embodiment, the through hole 20a is circular, but other shapes may be selected according to the shape of the dome portion 7 to be formed, such as a triangle, a polygonal shape such as a quadrangular shape, or an elliptical shape.

[0102] The support stand 19 and the masking member 20 are configured such that the through hole 20 a of the masking member 20 is arranged on the inner side of the opening 19 b of the support stand 19 .

[0103] When the opening area of ​​the opening 19b of the support 19 is set to 100%, the cross-sectional area of ​​the through hole 20a of the masking member 20 is preferably 95% or less, and more preferably 80%. At least a portion of the through hole 20a is preferably arranged at least 1 mm inside the opening 19b of the support 19, and more preferably at least 3 mm inside the opening 19b of the support 19.

[0104] The masking member 20 is preferably formed of a material having a thermal conductivity of 1 [W / (m·K)] or less at 600° C. As the material of the masking member 20 , for example, ceramic is suitable. The thickness of the masking member 20 is preferably 1 mm or more.

[0105] The heating device 21 is configured to heat the plate-shaped glass G from the side of the masking member 20. In the present embodiment, the heating device 21 is a superheated steam supply device that supplies superheated steam S toward the plate-shaped glass G. It should be noted that the heating method of the heating device 21 is arbitrary in principle, for example, it may be heating by flame jetting of a burner, resistance heating, or laser heating. In addition, the heating device 21 may also be a heating device composed of a combination of different heating methods.

[0106] The pressing member 22 is configured to press the masking member 20 toward the support 19. As a mechanism for pressing the pressing member 22, for example, a fluid cylinder, a linear actuator, etc. It should be noted that the pressing member 22 may also be configured to press the support 19 relative to the fixed masking member 20.

[0107] As the external force generating device 23, for example, an exhaust device can be used. The exhaust device exhausts the gas existing in the space 19c of the support 19, thereby setting the space 19c of the support 19 to a negative pressure. As a result, a part of the plate glass G is sucked into the space 19c of the support 19, and thermal deformation of a part of the plate glass G can be promoted. As the exhaust device, for example, a pump using a Venturi mechanism is suitable.

[0108] It should be noted that the external force generating device 23 is not limited to the exhaust device, and may be a high-pressure gas generating device that ejects high-pressure gas from the shielding member 20 side toward the plate-shaped glass G. As a result, the plate-shaped glass G is pressurized toward the space portion 19c of the support platform 19, thereby promoting thermal deformation of the plate-shaped glass G. In addition, the thermal deformation of the plate-shaped glass G may be promoted by using a pump and a high-pressure gas generating device at the same time.

[0109] The molding of the cover member 4 by the molding device 18 having the above-described structure is performed, for example, as follows.

[0110] like Figure 7 As shown, first, the plate glass G is placed on the support 19, and the masking member 20 is arranged to overlap at a predetermined position on the placed plate glass G. Then, the support 19 and the masking member 20 are pressed in a direction to approach each other by the pressing member 22. Thus, the positional deviation of the plate glass G sandwiched between the support 19 and the masking member 20 can be suppressed.

[0111] Next, the plate glass G is heated from the masking member 20 side using the heating device 21. Specifically, the superheated steam S is supplied from the heating device 21 toward the region of the plate glass G that is not masked by the masking member 20 (the region exposed from the through hole 20a), so that the region is heated and deformed downward, and the dome portion 7 (at the Figure 7 , the state indicated by the double-dashed line).

[0112] Furthermore, by heating the sheet glass G in a state where the through hole 20 a of the masking member 20 is arranged inside the opening 19 b of the support 19 , the connecting portion 8 is formed around the dome portion 7 .

[0113] It should be noted that, when the plate-shaped glass G is thermally deformed as described above, a molding surface 24 that conforms to the shape of the plate-shaped glass G after thermal deformation may be provided. Figure 8As shown, for example, a forming surface 24 having a shape based on the outer surface 7b of the dome portion 7 and the outer surface 8b of the connecting portion 8 to be formed may be provided integrally with the support table 19, and the plate glass G may be heated to thermally deform the plate glass G into a shape imitating the forming surface 24. In this way, the forming accuracy of the dome portion 7 and the connecting portion 8 can be improved.

[0114] The above-mentioned forming step S121 may be performed separately on the plate-shaped glass G corresponding to one cover member 4, or may be performed collectively on the plate-shaped glass G corresponding to a plurality of cover members 4. In the latter case, as shown in FIG. Fig. 9 As shown in FIG. 1 , a structure is obtained in which a plurality of dome portions 7 are formed on one sheet of glass G. In this case, the respective cover members 4 are connected to each other via a portion serving as the frame portion 6 .

[0115] (S122) Film forming process

[0116] In step S122, a film forming process is performed on the cover member 4 in the following state, i.e., an opening portion of the masking member 25 is arranged at a position relative to the first main surface 6c of the frame portion 6 of the cover member 4 and the inner surface 8a of one side of the connecting portion 8 continuous to the inner side of the first main surface 6c of the frame portion 6, thereby forming a metallization layer 9 on the cover member 4.

[0117] Fig.10 is a top view of the masking member 25 of this embodiment. Fig.11 yes Fig.10 As shown in these figures, in this step S122, a plurality of (three in this embodiment) metal layers 12 to 14 constituting the metallization layer 9 are formed on a portion of the frame portion 6 and the connection portion 8 of the cover member 4 using the masking member 25 having the opening portion 26, the first masking portion 27, the second masking portion 28, and the protrusion 30.

[0118] In this embodiment, the masking member 25 has a shape corresponding to the shape of the plate-shaped glass G obtained in the forming step S121. Fig. 9 In the case where the plate glass G after the forming step S121 is in a state where a plurality of dome portions 7 are arranged at predetermined intervals, the masking member 25 has a plurality of openings 26, second masking portions 28, and protruding portions 30 arranged at positions corresponding to the dome portions 7 (see FIG. Fig.10 ).

[0119] Here, from the portion corresponding to one cover member 4 (refer to Fig.11), the opening portion 26 has a shape based on the shape of the base end portion 7c of the dome portion 7 formed in the forming step S121. When the dome portion 7 is hemispherical as in the present embodiment, the opening portion 26 is in a perfect circular shape. In addition, the size (outer diameter) of the opening portion 26 is substantially equal to the outer diameter of the base end portion 7c of the dome portion 7. A first shielding portion 27 is provided on the outside of the opening portion 26, and a second shielding portion 28 is provided on the inside of the opening portion 26. The first shielding portion 27 and the second shielding portion 28 are connected via a connecting portion 29. A protrusion 30 protruding from the second shielding portion 28 is provided on the cover member 4 side of the second shielding portion 28.

[0120] Fig.12 The portion corresponding to one cover member 4 is shown in FIG. Fig.10 The plate-shaped glass G shown is arranged in an overlapping manner. Fig.11 The state of the masking member 25 is shown. Fig.12 As shown, the opening 26 is arranged at a position facing a portion (inner portion) of the first main surface 6 c of the frame 6 and a portion (outer portion) of the inner surface 8 a of the connecting portion 8 continuing inside the first main surface 6 c .

[0121] The first masking portion 27 is disposed at a position facing a region outside a portion of the first main surface 6c of the frame portion 6 that faces the opening 26. Fig.12 In the embodiment, the first main surface 6c, which is flat, contacts the surface of the first shielding portion 27. The second shielding portion 28 is arranged in a region inside the portion of the inner surface 8a of the connecting portion 8 that faces the opening 26 and in a position that faces the inner surface 7a of the dome portion 7. Thus, except for the portion facing the opening 26, the first main surface 6c of the frame portion 6, the inner surface 8a of the connecting portion 8, and the inner surface 7a of the dome portion 7 are shielded by the first shielding portion 27 and the second shielding portion 28.

[0122] The protrusion 30 is in a rectangular parallelepiped shape in this embodiment and has a plurality of side surfaces 30a rising from the surface of the second shielding portion 28 and a flat front end surface 30b continuous with each side surface 30a at its front end. A corner portion 30c is provided between each side surface 30a and the front end surface 30b.

[0123] When the protrusion 30 has the above-mentioned structure, a minimum gap x1 is formed between the inner surface 8a of the connection portion 8 or the inner surface 7a of the dome portion 7 and the corner 30c of the protrusion 30 (see Fig.13). In the present embodiment, a minimum gap x1 is formed between the inner surface 7a of the dome portion 7 and the corner 30c of the protrusion 30. Here, the minimum gap x1 is preferably greater than 5% and less than 30% of the inner surface height of the dome portion 7 (here, the shortest distance between the imaginary plane in contact with the first main surface 6c of the frame portion 6 and the inner surface 7a of the top 7d). If the minimum gap x1 is greater than 5% of the inner surface height, interference between the corner 30c and the dome portion 7 or the connecting portion 8 can be prevented with a high probability. In addition, if the minimum gap x1 is less than 30% of the inner surface height, the film-forming material m (refer to Fig.13 ) When the minimum gap x1 is passed. From the same viewpoint, when the dome portion 7 is viewed from above, the ratio of the area of ​​the protrusion 30 to the area of ​​the second shielding portion 28 is preferably 50% or more and 90% or less.

[0124] It should be noted that, as in the above-mentioned embodiment, when the masking member 25 is arranged inwardly of the boundary between the inner surface 8a of the connecting portion 8 and the inner surface 7a of the dome portion 7 and in a manner that forms a minimum gap x1 with the protrusion 30, it is easy to prevent the corner portion 30c from interfering with the dome portion 7 or the connecting portion 8. In addition, the height and shape of the protrusion 30 can be easily changed.

[0125] The first metal layer 12 is first formed by a film forming process (for example, a film forming process based on a sputtering method) using the masking member 25 having the above-mentioned structure. In this case, by using a film forming material m corresponding to the metal constituting the first metal layer 12, the first metal layer 12 composed of a predetermined metal is formed on the first main surface 6c of the frame portion 6 and the portion of the inner surface 8a of the connection portion 8 that faces the opening portion 26.

[0126] In addition, during the above film forming process, the film forming material m is supplied to the first main surface 6c of the frame portion 6 and the inner surface 8a of the connecting portion 8 through the opening 26. At this time, there is a non-negligible gap y between the inner surface 8a of the connecting portion 8 having a convex curved surface and the surface of the outer end of the second masking portion 28 (see Fig.13 ). Therefore, the film-forming material m supplied through the opening 26 may intrude into the inner space through the gap y. In the present step S122, a protrusion 30 protrudes from the second masking portion 28 toward the cover member 4. Therefore, the film-forming material m that intrudes into the inner space of the connecting portion 8 through the gap y is prevented from further intrusion into the inner space by the protrusion 30. Fig.13 In the case of the illustrated embodiment, the side surface 30 a of the protrusion 30 is mainly used to prevent the film forming material m from entering.

[0127] As described above, after the first metal layer 12 is formed on the first main surface 6c of the frame portion 6 and the inner surface 8a of the connection portion 8, the second metal layer 13 is formed by a film forming process using the masking member 25 having the above-mentioned structure. In this case, by using a film forming material m corresponding to the metal constituting the second metal layer 13, the second metal layer 13 composed of a predetermined metal is formed on the exposed surface of the first metal layer 12 (the surface on the side opposite to the cover member 4). At this time, for example, by using a masking member 25 having an opening 26 having the same width dimension as that during the film forming process of the first metal layer 12, the second metal layer 13 is formed in a state where the same width dimension as the first metal layer 12 is formed and the first metal layer 12 overlaps with the entire width region thereof (see Figure 6 ).

[0128] In addition, there is a concern that the film-forming material m may invade the space further inward through the gap y between the connecting portion 8 and the second masking portion 28 during the film-forming process of the second metal layer 13. However, since a protrusion 30 protrudes from the second masking portion 28 toward the cover member 4, further intrusion of the film-forming material m inward is prevented by the protrusion 30.

[0129] After the second metal layer 13 is formed on the surface of the first metal layer 12 as described above, the third metal layer 14 is formed by a film forming process using the masking member 25 having the above-described structure. In this case, by using a film forming material m corresponding to the metal constituting the third metal layer 14, the third metal layer 14 composed of a predetermined metal is formed on the exposed surface of the second metal layer 13 (the surface on the side opposite to the first metal layer 12). At this time, for example, by using a masking member 25 having an opening 26 having a smaller width dimension than that during the film forming process of the second metal layer 13, the third metal layer 14 is formed in a state where it overlaps with the second metal layer 13 in a part of its width direction, thereby forming a metallization layer 9 in a state where three metal layers 12 to 14 are stacked (see Figure 6 ).

[0130] Furthermore, during the film formation process of the third metal layer 14 , the protruding portion 30 protrudes from the second masking portion 28 toward the cover member 4 , so that the film formation material m is prevented from further intruding to the inside by the protruding portion 30 .

[0131] (S123) Bonding material forming step

[0132] In step S123, a bonding portion 11 is formed on the surface of one metallization layer 9 formed in the film forming step S122 (see Figure 3In the present embodiment, the bonding material 11a is formed on the exposed surface (the surface on the side opposite to the second metal layer 13) of the third metal layer 14 at the position farthest from the frame portion 6 among the three metal layers 12 to 14 constituting the metallization layer 9 on one side (see Figure 6 ). The bonding material 11a is formed, for example, by coating in a paste state in a manner overlapping the third metal layer 14. At this time, as specific means of coating, a printing method using a mask (screen printing method), a coating method using a dispenser, etc. can be cited. The bonding material 11a is not limited to the above-mentioned method. For example, a bonding material that has been pre-formed into a predetermined frame shape by a metal-based bonding material can be arranged in a manner overlapping the third metal layer 14. Based on the above, a sheet glass G is obtained in which the first main surface 6c of the frame portion 6 corresponding to the plurality of cover members 4 is formed with the first metal layer 12, the second metal layer 13, the third metal layer 14, and the bonding material 11a.

[0133] It should be noted that, before the film formation process of the first metal layer 12, a buffer film formed by alternately stacking a silicon oxide film and a hafnium oxide film may be formed on the first main surface 6c of the frame 6, but this is omitted in the figure. Thus, the cover member 4 (sheet glass G) is formed with a buffer film, a first metal layer 12, a second metal layer 13, and a third metal layer 14 from the side close to the first main surface 6c of the frame 6. It should be noted that as a method for forming the buffer film, for example, a sputtering method, a vacuum evaporation method, a vacuum evaporation method using ion assistance or ion plating, and a film forming method of a CVD method can be applied.

[0134] (S2) Joining process

[0135] The bonding step S2 includes a heating step S21 of heating the bonding material 11 a formed in a frame shape on the surface of one metallization layer 9 (third metal layer 14 ) and a cooling step S22 of cooling the heated bonding material 11 a .

[0136] (S21) Heating process

[0137] In the heating step S21, the plate-shaped glass G having the plurality of cover members 4 is heated by using a heating device such as a reflow furnace to melt the bonding material 11a. This heating treatment is performed while the third metal layer 17 (see Figure 4 ) is in contact with the bonding material 11a formed on the cover member 4 side, preferably in a state where the third metal layer 17 is pressed against the bonding material 11a. The heating step S21 may be performed, for example, in a state where the space in the heating device is filled with nitrogen. The cover member 4 (sheet glass G) is heated to a temperature of 300°C or more, for example.

[0138] (S22) Cooling process

[0139] In the cooling step S22, the bonding material 11a melted in the heating step S21 is cooled. As a result, the bonding material 11a is solidified in a state of being closely attached to both the third metal layer 14 on the cover member 4 side and the third metal layer 17 on the base body 2 side, forming a bonding portion 11 (see Figure 6 ). In addition, the joint portion 11 is formed on the entire circumference of the frame portion 6, thereby forming the sealing portion 5.

[0140] In the present embodiment, finally, the plate-shaped glass G is cut along a predetermined cutting line (not shown), thereby completing a plurality of packages 1 that maintain airtightness.

[0141] As described above, in the glass cover member 4 and the manufacturing method thereof of the present embodiment, when the metallization layer 9 on one side of the frame portion 6 of the cover member 4 is formed, the metallization layer 9 on one side is formed from the first main surface 6c of the frame portion 6 to the inner surface 8a of the connecting portion 8 which is continuous to the inner side of the first main surface 6c. Thus, even when the width dimension of the frame portion 6 does not satisfy the width dimension required for forming the metallization layer 9 as in the narrow width portion 6a, the required width dimension can be ensured by extending the metallization layer 9 toward the connecting portion 8. Therefore, even when the dome portion 7 is enlarged to increase the accommodation space of the light emitting element 3, good airtightness can be imparted to the accommodation space of the light emitting element 3.

[0142] In addition, in the present embodiment, the film forming process is performed using the masking member 25 having the protruding portion 30 protruding from the second masking portion 28 toward the cover member 4, so that the film forming material m is prevented from intruding into the inner space through the gap y between the connecting portion 8 and the outer end of the second masking portion 28 by the protruding portion 30 (particularly the side surface 30a thereof) (see Fig.13 ). Therefore, the adhesion of the film-forming material m to the inner surface 7a of the dome portion 7 can be prevented as much as possible, thereby improving the light extraction efficiency through the glass cover member 4 (especially the dome portion 7). The light extraction efficiency of the package 1 having the cover member 4 of the present embodiment is, for example, 92% or more. It should be noted that the light extraction efficiency becomes the ratio of the total radiation flux of light. Specifically, the light extraction efficiency is evaluated as a percentage of the total radiation flux measured in the state where the cover member is covered, relative to the total radiation flux measured in the state where the cover member does not cover the light source, which is set to 100%. The total radiation flux is measured by extracting the light concentrated by the integrating sphere to the spectrometer.

[0143] The first embodiment of the present invention has been described above, but the cover member, the package including the cover member, and the method for manufacturing the cover member and the method for manufacturing the package including the cover member of the present invention are not limited to the above embodiment and can take various forms within the scope of the present invention.

[0144] Fig.14 2 is a cross-sectional view of a shielding member 25 according to a second embodiment of the present invention. As shown in the figure, the protrusion 40 of the present embodiment is different from the protrusion 30 of the first embodiment. Specifically, the protrusion 40 has a side surface 40a and a front end surface 40b that are provided upright from the second shielding portion 28, and the side surface 40a is inclined in a direction that tends to the inner side of the cover member 4 as it moves away from the second shielding portion 28. By configuring the protrusion 40 in this way, it is different from the case where the side surface 30a is provided upright vertically from the second shielding portion 28 (see Fig.12 ), the side surface 40a can be made closer to the cover member 4 as a whole. As a result, the gap between the inner surface 8a of the connecting portion 8 and the inner surface 7a of the dome portion 7 and the side surface 40a can be made extremely small over the entire area in the protruding direction thereof, thereby preventing the film-forming material m from invading the inner space of the dome portion 7 with a higher probability, thereby achieving a further improvement in the light extraction efficiency.

[0145] In the above-described embodiment, the case where the corner portions 30c and 40c are provided between the side surfaces 30a and 40a and the front end surfaces 30b and 40b of the protrusions 30 and 40 is exemplified, but the present invention is not limited to this. Fig.15 A cross-sectional view of a masking member 25 of one example (third embodiment of the present invention) is shown. As shown in the figure, the protrusion 50 of this embodiment has a side surface 50a and a front end surface 50b provided upright from the second masking portion 28, and a chamfered portion 50c is provided between the side surface 50a and the front end surface 50b.

[0146] Thus, by providing the chamfered portion 50c between the side surface 50a and the front end surface 50b constituting the protrusion 50, interference between the corner of the protrusion 50 and the glass cover member 4 (connection portion 8 or dome portion 7) can be avoided, so that the minimum gap between the cover member 4 and the protrusion 50 (in this case, the gap between the inner surface 7a of the dome portion 7 and the chamfered portion 50c of the protrusion 50) can be set to be narrower. Therefore, the film-forming material m can be prevented from intruding into the inner space of the dome portion 7 with a higher probability, and the light extraction efficiency can be further improved.

[0147] It should be noted that in Fig.15 , the corners of the protrusion 50 having a rectangular parallelepiped shape (a rectangular cross section) are provided with chamfered portions 50c, but this is of course only an example. Fig.14The corner 40c of the protrusion 40, whose side surface 40a is shown as being inclined toward the inner side of the cover member 4 as it moves away from the second shielding portion 28, is provided with a chamfered portion. In short, the chamfered portion can be provided regardless of the shape of the protrusion as a whole, as long as it is a corner between a side surface and a front end surface adjacent to each other at a predetermined angle.

[0148] In addition, when the protrusion is composed of a plurality of planes as described above, a chamfered portion may be provided at a corner composed of three planes. In the case of the protrusion 30 of the first embodiment of the present invention, a chamfered portion may be provided at a corner (a dot-shaped corner) formed between the side surfaces 30a, 30a and the front end surface 30b adjacent to each other and orthogonal to each other in the circumferential direction, but illustration of this is omitted.

[0149] In the above description, the protrusions 30 to 50 are all in the form of solid columns, but the form of the protrusions is not limited to this. Fig.16 As shown, the protrusion 60 may be formed by an annular wall portion 61 (a fourth embodiment of the present invention).

[0150] Fig.17 The enlarged plan view of the main part of the masking member 25 according to the fifth embodiment of the present invention is shown. The masking member 25 is provided with a protrusion 70 having a shape imitating the dome portion 7 in a plan view. Fig.17 The protrusion 70 shown is in the shape of a perfect cylinder, imitating the dome portion 7 whose outer shape is a perfect circle in a plan view.

[0151] Alternatively, although the dome portion 7 is not shown in the figure, it may be configured such that the dome portion 7 has four straight sides that are parallel or orthogonal to each other in a plan view and the sides are connected by arc-shaped corners. Fig.18 As shown, it is set to a shape imitating the outer shape of the above-mentioned dome part 7.

[0152] By configuring the protrusions 70 and 80 in this way, the gap between the protrusions 70 and 80 and the connection portion 8 or the dome portion 7 of the cover member 4 can be closed over the entire circumference. Therefore, the film forming material m can be prevented from invading the inner space of the dome portion 7 without omission, and the light extraction efficiency can be uniformly improved.

[0153] In the above embodiment, the masking member 25 is arranged inside the boundary between the inner surface 8a of the connecting portion 8 and the inner surface 7a of the dome portion 7 and forms a minimum gap x1 with the protruding portion 30 (see Fig.12 , Fig.13 ), but it can of course take other forms as well. Fig.19The main part of the shielding member 25 of the seventh embodiment of the present invention is enlarged and sectional drawing is shown. The shielding member 25 is formed at the boundary between the inner surface 8a of the connecting part 8 and the inner surface 7a of the dome part 7 (if the inner surface 8a of the connecting part 8 is larger than the inner surface 7a of the dome part 7). Fig.19 In particular, the shielding member 25 is configured and arranged so as to form a minimum gap x2 between the inner surface 7a of the dome portion 7 and the corner 80c between the side surface 80a and the front end surface 80b of the protruding portion 80 and the inflection point of the curve representing the inner surface 8a of the connecting portion 8 and the curve representing the inner surface 7a of the dome portion 7 on the outside.

[0154] Providing the protrusion 80 in this way can more effectively prevent the film-forming material m from invading the inner space of the dome portion 7 , thereby preventing the film-forming material m from adhering to the inner surface 7 a of the dome portion 7 with a higher probability, thereby further improving the light extraction efficiency.

[0155] Of course, the masking member 25 may be arranged (configured) to form a minimum gap between the cover member 4 and the protruding portion 30 at the boundary between the inner surface 8 a of the connecting portion 8 and the inner surface 7 a of the dome portion 7 , but this is not shown in the figure.

[0156] In the above description, the case where the protrusions 30 to 80 are formed integrally as a part of the masking member 25 using the same material as the remaining portion of the masking member 25 is exemplified, but other forms may be adopted as a matter of course. Fig. 20 A cross-sectional view of a masking member 25 according to an eighth embodiment of the present invention is shown. The masking member 25 includes a protrusion 90, and the protrusion 90 includes a protrusion body 95 and a soft portion 100 provided at least between the protrusion body 95 and the dome portion 7 or the connecting portion 8. Here, the soft portion 100 is formed of a material that is softer (lower in hardness) than the protrusion body 95. Usually, the masking member 25 including the protrusion body 95 is formed of a metal such as stainless steel or YEF42. In contrast, the soft portion 100 is formed of, for example, a resin (synthetic resin) that is a material with a lower hardness than metal, and is preferably formed of a heat-resistant resin in consideration of the temperature environment during film forming. As a specific example, silicone can be cited.

[0157] In the present embodiment, the protrusion body 95 is in the shape of a column, and the soft portion 100 is arranged to cover the side surface 95a of the protrusion body 95 in such a manner that the protrusion 90 as a whole has a frustum (a cone, pyramid, or other cone that removes a small cone similar to the cone) shape. In this case, the soft portion 100 constitutes the inclined surface 90a of the protrusion 90. In the present embodiment, the position and angle of the inclined surface 90a formed by the soft portion 100 are set in such a manner that a minimum gap x1 is formed between the soft portion 100 and the inner surface 8a of the connecting portion 8 (see Fig.21). In other words, at least the portion of the protrusion 90 where the distance to the inner surface 8 a of the connection portion 8 is the smallest is formed by the soft portion 100 .

[0158] By configuring the protrusion 90 in this way, the minimum gap x1 can be reduced compared to the case where the masking member 25 including the protrusions 30 to 80 is formed of a single material. Therefore, the film-forming material m can be prevented from intruding into the inner space of the dome portion 7 with a higher probability, thereby achieving further improvement in the light extraction efficiency. The light extraction efficiency in the package having the cover member 4 of this embodiment was verified by the same method as the first embodiment, and the light extraction efficiency was 93.5%.

[0159] In this case, the portion that may come into contact with the dome portion 7 or the connection portion 8 becomes the soft portion 100, so even if the dome portion 7 or the connection portion 8 comes into contact with the protrusion 90, the risk of damaging the dome portion 7 or the connection portion 8 is extremely low. In addition, even if a part of the soft portion 100 adheres to the dome portion 7 or the connection portion 8, it can be easily removed by washing, so there is no particular problem.

[0160] In addition, when the soft portion 100 is provided as described above, the shape of the soft portion 100 is arbitrary. Fig. 22 A cross-sectional view of a masking member 25 according to a ninth embodiment of the present invention is shown. In the masking member 25, the soft portion 120 constituting the protrusion 110 is formed so as to cover the corner portion 95b of the columnar protrusion body 95. By providing the soft portion 120 in this way, the contact between the protrusion body 95 and the dome portion 7 or the connecting portion 8 can be reliably avoided, and the film forming material m can be prevented from intruding into the inner space of the dome portion 7 with a higher probability.

[0161] Fig.23 A cross-sectional view of a masking member 25 according to a tenth embodiment of the present invention is shown. In the masking member 25, the soft portion 140 constituting the protrusion 130 is formed so as to cover the side surface 95a and the corner portion 95b of the columnar protrusion body 95 and the front end surface 95c of the protrusion body 95. By providing the soft portion 140 in this way, the contact between the protrusion body 95 and the dome portion 7 can be more reliably avoided, and the intrusion of the film forming material m into the inner space of the dome portion 7 can be further prevented with a high probability.

[0162] Of course, the entire protrusions 90, 110, 130 may be formed by the soft portion, but this is not shown in the figure. That is, the shape of the soft portion is arbitrary as long as there is no problem with the heat resistance during the film forming process. Moreover, not only the protrusions but also the entire masking member 25 may be formed by the soft portion. In addition, the soft portion may be formed by any material other than resin as long as it is soft enough not to damage the glass cover member 4 when it contacts the glass cover member 4.

[0163] In the above embodiment, the film forming step S122 is performed after the forming step S121 in the cover member preparation step S12, but the present invention is not limited to this order. The forming step S121 may be omitted by purchasing the dome portion 7 formed on the plate glass G from another company.

[0164] In the above embodiment, the bonding portion 11 is provided on the frame 6 side, but the bonding portion 11 may be provided on the base 2 side. The bonding portion 11 may be provided on both the frame 6 side and the base 2 side.

[0165] In addition, in the above-mentioned embodiment, the masking member 25 having the protrusion 30 is used when forming the third metal layer 14, but the present invention is not limited thereto. For example, when the gap y becomes smaller than a negligible size (including the case where the gap y disappears) by using the masking member 25 having the opening 26 with a small width dimension when forming the third metal layer 14, the protrusion 30 of the masking member 25 can be omitted.

[0166] Fig.24 An enlarged cross-sectional view of a main part of a masking member 150 according to an eleventh embodiment of the present invention is shown. The masking member 150 does not have the protrusions 30 to 90, 110, 130 as in the above-mentioned masking member 25. On the other hand, the thickness dimension t2 of the second masking portion 160 arranged in the area on the inner side of the portion of the inner surface 8a of the connecting portion 8 facing the opening portion 26 and the position facing the inner surface 7a of the dome portion 7 is made larger than the thickness dimension t1 of the first masking portion 170 arranged in the area on the outer side of the portion of the first main surface 6c of the frame portion 6 facing the opening portion 26. As a result, the gap y can be further reduced to prevent the film-forming material m from intruding into the inner space of the dome portion 7.

[0167] Of course, for example, the second shielding portion 160 can be arranged at a portion adjacent to the opening 26 closer to the dome portion 7 than the first shielding portion 170 (if Fig. 22The gap y is reduced by reducing the gap y, thereby forming the second masking portion 160 to have the same thickness as the first masking portion 170, which is omitted in the figure. In addition, by making the masking member 170 as thin as possible, the film-forming material m can be more reliably supplied to the first main surface 6c of the frame portion 6 and the inner surface 8a of the connecting portion 8, so that the interval of the opening portion 26 can be made narrower to suppress the film-forming material m from invading the inner space of the dome portion 7.

[0168] Description of Reference Numerals

[0169] 1: Package, 2: Base, 2a: First main surface, 3: Light emitting element, 4: Cover member, 5: Sealing portion, 6: Frame, 6a: Narrow width portion, 6b: Wide width portion, 6c: First main surface, 6d: Second main surface, 7: Dome portion, 7a: Inner surface, 7b: Outer surface, 7c: Base end portion, 7d: Top portion, 8: Connecting portion, 8a: Inner surface, 8b: Outer surface, 9: Metallization layer on one side (cover member), 10: Metallization layer on the other side (base), 11: Joining portion, 11a : bonding material, 12: first metal layer (cover member), 13: second metal layer (cover member), 14: third metal layer (cover member), 15: first metal layer (substrate), 16: second metal layer (substrate), 17: third metal layer (substrate), 18: forming device, 19: support table, 19a: support portion, 19b: opening portion, 19c: space portion, 20: masking member, 20a: through hole, 21: heating device, 22: pressing member, 23: external force generating device, 2 4: forming surface, 25, 150: masking member, 26: opening, 27, 170: first masking part, 28, 160: second masking part, 29: connecting part, 30, 40, 50, 60, 70, 80, 90, 110, 130: protrusion, 30a, 40a, 50a, 80a: side, 30b, 40b, 50b, 80b: front end, 30c, 40c, 80c: corner, 95: protrusion body, 100, 120, 140: soft part, 50c: chamfered part, 61: wall part, G: plate glass, m: film-forming material, S: superheated steam, S1: preparation process, S11: substrate preparation process, S12: cover member preparation process, S121: forming process, S122: film-forming process, S123: bonding material forming process, S2: bonding process, S21: heating process, S22: cooling process, x1, x2: minimum gap (between the cover member and the protrusion), y: gap (between the connecting portion and the second masking portion).

Claims

1. A method for manufacturing a glass cover member, wherein the glass cover member forms a space for accommodating a light-emitting element between the glass cover member and a base, and the glass cover member integrally comprises a plate-shaped frame portion, a dome-shaped dome portion located inside the frame portion, and a connecting portion connecting the frame portion and the dome portion, in, The method for manufacturing a glass cover member includes a film forming step of forming a metallized layer on one surface of the frame portion by a film forming process using a masking member, In the film forming process, the film forming process is performed in the following state: an opening portion of a masking member is arranged at a position opposite to a surface of one side of the frame portion and a surface of one side of the connecting portion continuous to the inner side of the surface of one side of the frame portion, and a first masking portion of the masking member is arranged at a position outside the opening portion and opposite to the glass cover member, and a second masking portion of the masking member is arranged at a position inside the opening portion and opposite to the glass cover member.

2. The method for manufacturing a glass cover member according to claim 1, wherein: The film forming process is performed using the masking member having a protruding portion protruding from the second masking portion toward the glass cover member.

3. The method for manufacturing a glass cover member according to claim 2, wherein: The film forming process is performed using the masking member provided with the protrusion in such a manner that the protrusion is closest to the glass cover member at a boundary between one surface of the connecting portion and one surface of the dome portion continuous to the inner side of one surface of the connecting portion or at a position outside the boundary.

4. The method for manufacturing a glass cover member according to claim 2 or 3, wherein: The film forming process is performed using the masking member provided with the protruding portion so that a gap is formed between the dome portion and the connecting portion and the protruding portion.

5. The method for manufacturing a glass cover member according to claim 4, wherein: The size of the smallest portion of the gap between the dome portion and the protruding portion and the gap between the connecting portion and the protruding portion is not less than 5% and not more than 30% of the height of the inner surface of the dome portion.

6. The method for manufacturing a glass cover member according to claim 2 or 3, wherein: When the dome portion is viewed in plan, a ratio of an area of ​​the protruding portion to an area of ​​the second shielding portion is greater than or equal to 50% and less than or equal to 90%.

7. The method for manufacturing a glass cover member according to claim 2 or 3, wherein: The protruding portion has a side surface provided to stand from the second shielding portion, and a front end surface, and a chamfered portion is provided between the side surface and the front end surface.

8. The method for manufacturing a glass cover member according to claim 2 or 3, wherein: The protruding portion includes a side surface provided to stand from the second shielding portion and a front end surface, and the side surface is inclined in a direction to go toward the inner side of the glass cover member as it moves away from the second shielding portion.

9. The method for manufacturing a glass cover member according to claim 2 or 3, wherein: When the dome portion is viewed from above, the protrusion has a shape that imitates the dome portion.

10. The method for manufacturing a glass cover member according to claim 2 or 3, wherein: The protrusion is formed of an annular wall portion.

11. The method for manufacturing a glass cover member according to claim 2 or 3, wherein: The protrusion includes a protrusion body and a soft portion formed of a material softer than the protrusion body and constituting the smallest portion of a gap between the protrusion and the dome portion and a gap between the protrusion and the connecting portion.

12. The method for producing a glass cover member according to any one of claims 1 to 3, wherein: The metallization layer is formed by laminating a plurality of metal layers having different linear expansion coefficients, and the film forming process is performed so that the linear expansion coefficient of the metal layer closer to the frame portion decreases.

13. The method for manufacturing a glass cover member according to claim 12, wherein: The film forming process is performed so that a width dimension of a metal layer farthest from the frame portion among the plurality of metal layers is smaller than width dimensions of the remaining metal layers.

14. A glass cover member, the glass cover member forming a space for accommodating a light emitting element between the glass cover member and a base body, in, The glass cover member integrally includes a plate-shaped frame portion, a dome-shaped dome portion located inside the frame portion, and a connecting portion connecting the frame portion and the dome portion. A metallization layer is formed across one surface of the frame portion and one surface of the connection portion that is continuous inside the one surface of the frame portion.

15. A package, wherein: The package includes the glass cover member according to claim 14, the light emitting element, and the base.

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