Display substrate and display device
By providing vias on the fifth insulating layer to expose the first flat layer and forming a deflation channel, the problem of poor bulging caused by water vapor accumulation in the first flat layer is solved, and the reliability and display effect of the display substrate are improved.
Patent Information
- Application Number
- CN202380010150.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2023-08-15
- Publication Date
- 2025-05-02
AI Technical Summary
When the existing display substrate is prepared under a high temperature environment, the residual water vapor in the first flat layer is prone to accumulate and lead to poor bulging, which affects the reliability and display effect of the display product.
A plurality of vias are provided on the fifth insulating layer, and at least one via exposes the first flat layer, thereby forming a deflation channel to release water vapor in the first flat layer and avoiding bad bulging.
By forming a deflation channel, the water vapor in the first flat layer is effectively released, and the poor bulging of the display substrate is avoided, and the reliability and display effect of the display substrate are improved.
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Figure CN119923984A_ABST
Abstract
Description
Display substrate and display device
[0001] The present disclosure relates to, but is not limited to, the field of display technology, and in particular to a display substrate and a display device.
[0002] Organic Light Emitting Diode (OLED) and Quantum-dot Light Emitting Diode (QLED) are active light-emitting display devices with the advantages of self-luminescence, wide viewing angle, high contrast, low power consumption, extremely high response speed, thinness, bendability and low cost. With the continuous development of display technology, flexible display devices (Flexible Display) using OLED or QLED as light-emitting devices and thin film transistors (TFT) for signal control have become the mainstream products in the current display field.
[0003]
[0004] The following is a summary of the subject matter of the detailed description of the present disclosure. This summary is not intended to limit the scope of the claims.
[0005] In a first aspect, the present disclosure provides a display substrate, provided with a plurality of sub-pixels arranged in an array, at least one sub-pixel comprising: a pixel driving circuit, the display substrate comprising: a substrate and a driving structure layer disposed on the substrate, the pixel driving circuit being disposed on the driving structure layer;
[0006] The driving structure layer at least comprises: a first insulating layer, a semiconductor layer, a second insulating layer, a first conductive layer, a third insulating layer, a second conductive layer, a fourth insulating layer, a third conductive layer, a first planar layer, a fifth insulating layer and a fourth conductive layer sequentially stacked on the substrate;
[0007] The fifth insulating layer is provided with a plurality of via holes, and at least one via hole on the fifth insulating layer exposes the first planar layer;
[0008] The thickness of the first planarizing layer is greater than the thickness of the fifth insulating layer.
[0009] In an exemplary embodiment, the pixel driving circuit includes: a first transistor to a fifth transistor, the driving structure layer further includes: a first scanning signal line, a second scanning signal line, a third scanning signal line, an initial signal line, a data signal line, a light emitting signal line, a reference signal line and a first power line, the first transistor is electrically connected to the third scanning signal line and the initial signal line, respectively, the second transistor is electrically connected to the second scanning signal line and the reference signal line, respectively, the fourth transistor is electrically connected to the first scanning signal line and the data signal line, respectively, and the fifth transistor is electrically connected to the light emitting signal line and the first power line, respectively;
[0010] Any one of the first scan signal line, the second scan signal line, the third scan signal line, the initial signal line, the light emitting signal line, the reference signal line and the first power line at least partially extends along a first direction, and the data signal line at least partially extends along a second direction, and the first direction intersects the second direction;
[0011] The reference signal line, the second scanning signal line, the first scanning signal line, the light emitting signal line, the first power supply line, the third scanning signal line and the initial signal line connected to any sub-pixel are arranged in sequence along the second direction;
[0012] The first flat layer is provided with first to fourth via holes, wherein the orthographic projection of the first via hole on the substrate is located within the range of the orthographic projection of the second electrode of the third transistor on the substrate, and the surface of the second electrode of the third transistor is exposed, the orthographic projection of the second via hole on the substrate is located within the range of the orthographic projection of the first electrode of the fourth transistor on the substrate, and the surface of the first electrode of the fourth transistor is exposed, the orthographic projection of the third via hole on the substrate is located within the range of the orthographic projection of the reference signal line on the substrate, and the surface of the reference signal line is exposed, and the orthographic projection of the fourth via hole on the substrate is located within the range of the orthographic projection of the first power line on the substrate, and the surface of the first power line is exposed;
[0013] The third via hole is located on a midline extending along the second direction between two adjacent fourth via holes.
[0014] In an exemplary embodiment, the fifth insulating layer is provided with fifth to eighth via holes, wherein:
[0015] The orthographic projection of the fifth via hole on the substrate is located within the range of the orthographic projection of the first via hole and the first flat layer on the substrate, the orthographic projection of the sixth via hole on the substrate is located within the range of the orthographic projection of the second via hole and the first flat layer on the substrate, the orthographic projection of the seventh via hole on the substrate is located within the range of the orthographic projection of the third via hole and the first flat layer on the substrate, and the orthographic projection of the eighth via hole on the substrate is located within the range of the orthographic projection of the fourth via hole and the first flat layer on the substrate.
[0016] In an exemplary embodiment, a length of the fifth via hole along the first direction is less than a length of the first via hole along the first direction, and a length of the fifth via hole along the second direction is less than a length of the first via hole along the second direction;
[0017] The length of the sixth via hole along the first direction is less than the length of the second via hole along the first direction, and the length of the sixth via hole along the second direction is less than the length of the second via hole along the second direction;
[0018] The length of the seventh via hole along the first direction is less than the length of the third via hole along the first direction, and the length of the seventh via hole along the second direction is less than the length of the third via hole along the second direction;
[0019] The length of the eighth via hole along the first direction is shorter than the length of the fourth via hole along the first direction, and the length of the eighth via hole along the second direction is shorter than the length along the second direction.
[0020] In an exemplary embodiment, in any sub-pixel, the boundaries of the via hole include: a first boundary, a second boundary, a third boundary and a fourth boundary, wherein the first boundary of the via hole is a boundary of the via hole close to the first signal line, the second boundary of the via hole is a boundary of the via hole far from the first signal line, the third boundary of the via hole is a boundary located on one side of the first center line, and the fourth boundary of the via hole is a boundary located on the other side of the first center line, and the via hole includes: a first via hole and a fifth via hole, the first signal line is one of the light emitting signal line, the first power line, the third scanning signal line and the initial signal line connected to the sub-pixel, the first center line is a center line of the first via hole extending along the second direction, the third boundary of the first via hole and the third boundary of the fifth via hole are located on the same side of the first center line, and the fourth boundary of the first via hole and the fourth boundary of the fifth via hole are located on the same side of the first center line;
[0021] The distance between the orthographic projection of the first boundary of the first via on the substrate and the orthographic projection of the first signal line on the substrate is greater than the distance between the orthographic projection of the first boundary of the fifth via on the substrate and the orthographic projection of the first signal line on the substrate, the distance between the orthographic projection of the second boundary of the first via on the substrate and the orthographic projection of the first signal line on the substrate is greater than the distance between the orthographic projection of the second boundary of the fifth via on the substrate and the orthographic projection of the first signal line on the substrate, the distance between the third boundary of the first via and the first center line is greater than the distance between the orthographic projection of the third boundary of the fifth via on the substrate and the orthographic projection of the first center line on the substrate, and the distance between the fourth boundary of the first via and the first center line is greater than the distance between the orthographic projection of the fourth boundary of the fifth via on the substrate and the orthographic projection of the first center line on the substrate.
[0022] In an exemplary embodiment, within any sub-pixel, a distance between an orthographic projection of a first boundary of the first via hole on the substrate and an orthographic projection of a first boundary of the fifth via hole on the substrate is greater than a distance between an orthographic projection of a third boundary of the first via hole on the substrate and an orthographic projection of a third boundary of the fifth via hole on the substrate, and is less than a distance between an orthographic projection of a second boundary of the first via hole on the substrate and an orthographic projection of a second boundary of the fifth via hole on the substrate;
[0023] A distance between an orthographic projection of a first boundary of the first via hole on the substrate and an orthographic projection of a first boundary of the fifth via hole on the substrate is approximately 1 micrometer to 2 micrometers.
[0024] In an exemplary embodiment, in any sub-pixel, the boundaries of the via hole include: a first boundary, a second boundary, a third boundary and a fourth boundary, wherein the first boundary of the via hole is a boundary of the via hole close to the first signal line, the second boundary of the via hole is a boundary of the via hole far from the first signal line, the third boundary of the via hole is a boundary located on one side of the second center line, and the fourth boundary of the via hole is a boundary located on the other side of the second center line, and the via hole includes: a second via hole and a sixth via hole, the first signal line is one of the light emitting signal line, the first power line, the third scanning signal line and the initial signal line connected to the sub-pixel, the second center line is a center line of the second via hole extending along the second direction, the third boundary of the second via hole and the third boundary of the sixth via hole are located on the same side of the second center line, and the fourth boundary of the second via hole and the fourth boundary of the sixth via hole are located on the same side of the second center line;
[0025] The distance between the orthographic projection of the first boundary of the second via on the substrate and the orthographic projection of the first signal line on the substrate is greater than the distance between the orthographic projection of the first boundary of the sixth via on the substrate and the orthographic projection of the first signal line on the substrate, the distance between the orthographic projection of the second boundary of the second via on the substrate and the orthographic projection of the first signal line on the substrate is greater than the distance between the orthographic projection of the second boundary of the sixth via on the substrate and the orthographic projection of the first signal line on the substrate, the distance between the third boundary of the second via and the second center line is greater than the distance between the orthographic projection of the third boundary of the sixth via on the substrate and the orthographic projection of the second center line on the substrate, and the distance between the fourth boundary of the second via and the second center line is greater than the distance between the orthographic projection of the fourth boundary of the sixth via on the substrate and the orthographic projection of the second center line on the substrate.
[0026] In an exemplary embodiment, within any sub-pixel, a distance between an orthographic projection of a first boundary of the second via hole on the substrate and an orthographic projection of a first boundary of the sixth via hole on the substrate is greater than a distance between an orthographic projection of a third boundary of the second via hole on the substrate and an orthographic projection of a third boundary of the sixth via hole on the substrate, and is less than a distance between an orthographic projection of a second boundary of the second via hole on the substrate and an orthographic projection of a second boundary of the sixth via hole on the substrate;
[0027] A distance between an orthographic projection of a first boundary of the second via hole on the substrate and an orthographic projection of a first boundary of the sixth via hole on the substrate is approximately 1 micrometer to 2 micrometers.
[0028] In an exemplary embodiment, the boundaries of the via hole include: a first boundary, a second boundary, a third boundary and a fourth boundary, wherein the first boundary of the via hole is a boundary of the via hole close to the second signal line, the second boundary of the via hole is a boundary of the via hole far from the second signal line, the third boundary of the via hole is a boundary located on one side of a third center line, and the fourth boundary of the via hole is a boundary located on the other side of the third center line, the via hole includes: a third via hole and a seventh via hole, the second signal line is a light emitting signal line connected to a sub-pixel connected to a reference signal line exposed by the third via hole, a first power line, a first scan signal line, a second scan signal line, a third scan signal line, an initial signal line and a light emitting signal line, the third center line is a center line of the third via hole extending along the second direction, the third boundary of the third via hole and the third boundary of the seventh via hole are located on the same side of the third center line, and the fourth boundary of the third via hole and the fourth boundary of the seventh via hole are located on the same side of the third center line;
[0029] The distance between the orthographic projection of the first boundary of the third via on the substrate and the orthographic projection of the second signal line on the substrate is greater than the distance between the orthographic projection of the first boundary of the seventh via on the substrate and the orthographic projection of the second signal line on the substrate, the distance between the orthographic projection of the second boundary of the third via on the substrate and the orthographic projection of the second signal line on the substrate is greater than the distance between the orthographic projection of the second boundary of the seventh via on the substrate and the orthographic projection of the second signal line on the substrate, the distance between the third boundary of the third via and the third center line is greater than the distance between the orthographic projection of the third boundary of the seventh via on the substrate and the orthographic projection of the third center line on the substrate, and the distance between the fourth boundary of the third via and the third center line is greater than the distance between the orthographic projection of the fourth boundary of the seventh via on the substrate and the orthographic projection of the third center line on the substrate.
[0030] In an exemplary embodiment, a distance between an orthographic projection of a first boundary of the third via hole on the substrate and an orthographic projection of a first boundary of the seventh via hole on the substrate is greater than a distance between an orthographic projection of a third boundary of the third via hole on the substrate and an orthographic projection of a third boundary of the seventh via hole on the substrate, and is less than a distance between an orthographic projection of a second boundary of the third via hole on the substrate and an orthographic projection of a second boundary of the seventh via hole on the substrate;
[0031] A distance between an orthographic projection of a first boundary of the third via hole on the substrate and an orthographic projection of a first boundary of the seventh via hole on the substrate is approximately 1 micrometer to 2 micrometers.
[0032] In an exemplary embodiment, the boundaries of the via hole include: a first boundary, a second boundary, a third boundary and a fourth boundary, wherein the first boundary of the via hole is a boundary of the via hole close to the third signal line, the second boundary of the via hole is a boundary of the via hole far from the third signal line, the third boundary of the via hole is a boundary located on one side of a fourth center line, and the fourth boundary of the via hole is a boundary located on the other side of the fourth center line, the via hole includes: a fourth via hole and an eighth via hole, the third signal line is any one of a third scanning signal line and an initial signal line connected to a sub-pixel connected to a first power line exposed by the fourth via hole, the fourth center line is a center line of the fourth via hole extending along the second direction, the third boundary of the fourth via hole and the third boundary of the eighth via hole are located on the same side of the fourth center line, and the fourth boundary of the fourth via hole and the fourth boundary of the eighth via hole are located on the same side of the fourth center line;
[0033] The distance between the orthographic projection of the first boundary of the fourth via on the substrate and the orthographic projection of the third signal line on the substrate is greater than the distance between the orthographic projection of the first boundary of the eighth via on the substrate and the orthographic projection of the third signal line on the substrate, the distance between the orthographic projection of the second boundary of the fourth via on the substrate and the orthographic projection of the third signal line on the substrate is greater than the distance between the orthographic projection of the second boundary of the eighth via on the substrate and the orthographic projection of the third signal line on the substrate, the distance between the third boundary of the fourth via and the fourth center line is greater than the distance between the orthographic projection of the third boundary of the eighth via on the substrate and the orthographic projection of the fourth center line on the substrate, and the distance between the fourth boundary of the fourth via and the fourth center line is greater than the distance between the orthographic projection of the fourth boundary of the eighth via on the substrate and the orthographic projection of the fourth center line on the substrate.
[0034] In an exemplary embodiment, a distance between an orthographic projection of a first boundary of the fourth via hole on the substrate and an orthographic projection of a first boundary of the eighth via hole on the substrate is greater than a distance between an orthographic projection of a third boundary of the fourth via hole on the substrate and an orthographic projection of a third boundary of the eighth via hole on the substrate, and is less than a distance between an orthographic projection of a second boundary of the fourth via hole on the substrate and an orthographic projection of a second boundary of the eighth via hole on the substrate;
[0035] A distance between an orthographic projection of a first boundary of the fourth via hole on the substrate and an orthographic projection of a first boundary of the eighth via hole on the substrate is approximately 1 micrometer to 2 micrometers.
[0036] In an exemplary embodiment, the fifth insulating layer is provided with fifth to eighth via holes, wherein:
[0037] The orthographic projection of the fifth via on the substrate is within the range of the orthographic projection of the first via on the substrate, the orthographic projection of the sixth via on the substrate is within the range of the orthographic projection of the second via on the substrate, the orthographic projection of the seventh via on the substrate is within the range of the orthographic projection of the third via on the substrate, and the orthographic projection of the eighth via on the substrate is within the range of the orthographic projection of the fourth via on the substrate.
[0038] In an exemplary embodiment, the fifth insulating layer is further provided with any one of the first and second ventilation holes;
[0039] The orthographic projections of the first vent hole and the second vent hole on the substrate partially overlap with the orthographic projection of the first flat layer on the substrate, and the first flat layer is exposed;
[0040] There is no overlapping area between the orthographic projections of the first air hole and the second air hole on the substrate and the orthographic projections of the active pattern, gate electrode, first pole and second pole of any transistor, as well as the reference signal line, first scanning signal line, second scanning signal line, third scanning signal line, initial signal line, first power supply line and light-emitting signal line on the substrate.
[0041] In an exemplary embodiment, the length of the first ventilation hole along the first direction is greater than the length of the boundary of the second electrode of the third transistor close to the first scanning signal line, and the length of the first ventilation hole along the second direction is greater than the length of the fifth via hole along the second direction;
[0042] The orthographic projection of the first vent hole on the substrate is at least arranged around at least one side of the orthographic projection of the first via hole on the substrate;
[0043] The distance between the orthographic projection of the first vent hole on the substrate and the orthographic projection of the fifth via hole on the substrate is smaller than the distance between the orthographic projection of the first scan signal line on the substrate and the orthographic projection of the fifth via hole on the substrate.
[0044] In an exemplary embodiment, the length of the second vent hole along the second direction is greater than the length of the sixth via hole along the second direction, and the length of the second vent hole along the first direction is less than the length of the sixth via hole along the first direction;
[0045] The second ventilation holes and the sixth via holes are arranged along the second direction, and the distance between the orthographic projection of the sixth via hole on the substrate and the orthographic projection of the first scanning signal line on the substrate is greater than the distance between the second ventilation holes and the sixth via holes.
[0046] In an exemplary embodiment, the fifth insulating layer is further provided with a third vent hole;
[0047] The orthographic projection of the third vent hole on the substrate partially overlaps with the orthographic projection of the first flat layer on the substrate, and the first flat layer is exposed;
[0048] The orthographic projection of the third air hole on the substrate is located between the orthographic projection of the first scanning signal line on the substrate and the orthographic projection of the light-emitting signal line on the substrate, and there is no overlapping area with the active pattern, gate electrode, first pole and second pole of any transistor, and the orthographic projection of the reference signal line, first scanning signal line, second scanning signal line, third scanning signal line, initial signal line, first power line and light-emitting signal line on the substrate.
[0049] In an exemplary embodiment, the fifth insulating layer is further provided with at least one of the fourth ventilation hole and the fifth ventilation hole;
[0050] The orthographic projections of the fourth vent hole and the fifth vent hole on the substrate partially overlap with the orthographic projection of the first flat layer on the substrate, and the first flat layer is exposed;
[0051] The orthographic projection of the fourth vent hole on the substrate at least partially overlaps with the orthographic projection of the reference signal line on the substrate, and does not overlap with the orthographic projections of the active pattern, the gate electrode, the first electrode and the second electrode of any transistor, and the first scanning signal line, the second scanning signal line, the third scanning signal line, the initial signal line, the first power supply line and the light emitting signal line on the substrate;
[0052] The orthographic projection of part of the fifth air holes on the substrate has no overlapping area with the orthographic projection of the active pattern, gate electrode, first pole and second pole of any transistor, as well as the reference signal line, first scanning signal line, second scanning signal line, third scanning signal line, initial signal line, first power line and light-emitting signal line on the substrate; the orthographic projection of another part of the fifth air holes on the substrate at least partially overlaps with the orthographic projection of the first power line on the substrate, and has no overlapping area with the orthographic projection of the active pattern, gate electrode, first pole and second pole of any transistor, as well as the reference signal line, first scanning signal line, second scanning signal line, third scanning signal line, initial signal line and light-emitting signal line on the substrate.
[0053] In an exemplary embodiment, the length of the fourth vent hole along the second direction is greater than the length of the third via hole along the second direction, and the length of the fourth vent hole along the first direction is less than the length of the third via hole along the first direction;
[0054] The fourth air hole and the seventh via hole are arranged along the first direction, and the distance between the orthographic projection on the substrate and the orthographic projection of the gate electrode of the first transistor of the adjacent sub-pixel on the substrate is smaller than the distance between the orthographic projection of the seventh via hole on the substrate and the orthographic projection of the gate electrode of the first transistor of the adjacent sub-pixel on the substrate.
[0055] In an exemplary embodiment, the length of the fifth vent hole along the second direction is greater than the length of the fourth via hole along the second direction, and the length of the fifth vent hole along the first direction is less than the length of the fourth via hole along the first direction;
[0056] The fifth vent hole and the eighth via hole are arranged along the first direction, and the distance between their orthographic projection on the substrate and the orthographic projection of the fourth via hole on the substrate is smaller than the distance between the orthographic projection of the fourth via hole on the substrate and the orthographic projection of the gate electrode of the first transistor on the substrate.
[0057] In an exemplary embodiment, the pixel driving circuit further includes: a capacitor, the capacitor including: a first plate, a second plate, and a third plate, the first plate being electrically connected to the third plate;
[0058] The semiconductor layer includes at least: an active pattern of at least one transistor;
[0059] The first conductive layer at least includes: a gate electrode of at least one transistor and a first plate of a capacitor;
[0060] The second conductive layer at least includes: a second plate of the capacitor;
[0061] The third conductive layer at least includes: a first electrode and a second electrode of at least one transistor, a first scanning signal line, a second scanning signal line, a third scanning signal line, a light emitting signal line, an initial signal line, a reference signal line, a first power supply line and a third electrode plate of a capacitor;
[0062] The fourth conductive layer at least includes: a data signal line.
[0063] In an exemplary embodiment, the first electrode plate of the capacitor includes: a first gate connection portion and a second gate connection portion, the second gate connection portion of the sub-pixel in the current column is located on a side of the first gate connection portion close to the sub-pixel in the next column, and a distance between a boundary of the first gate connection portion close to the gate electrode of the fifth transistor and the gate electrode of the fifth transistor is smaller than a distance between a boundary of the second gate connection portion close to the gate electrode of the fifth transistor and the gate electrode of the fifth transistor, and a distance between a boundary of the first gate connection portion far from the gate electrode of the fifth transistor and the gate electrode of the fifth transistor is smaller than a distance between a boundary of the second gate connection portion far from the gate electrode of the fifth transistor and the gate electrode of the fifth transistor;
[0064] The length of the first gate connection portion along the first direction is greater than the length of the second gate connection portion along the first direction, and the length of the first gate connection portion along the second direction is greater than the length of the second gate connection portion along the second direction.
[0065] In an exemplary embodiment, an orthographic projection of the second plate of the capacitor on the substrate at least partially overlaps an orthographic projection of the first plate of the capacitor on the substrate;
[0066] The second plates of the capacitors of the sub-pixels in the same column have the same shape and area, and the area of the second plates of the capacitors of the sub-pixels in the 3k+1th column is smaller than any one of the areas of the second plates of the capacitors of the sub-pixels in the 3k+2th column and the second plates of the capacitors of the sub-pixels in the 3k+3th column;
[0067] The area of the overlapping region between the second plate of the capacitor and the first plate of the capacitor of the 3k+1th column of sub-pixels is smaller than the area of the overlapping region between the second plate of the capacitor and the first plate of the capacitor of the 3k+2th column of sub-pixels, and the area of the overlapping region between the second plate of the capacitor and the first plate of the capacitor of the 3k+2th column of sub-pixels is smaller than the area of the overlapping region between the second plate of the capacitor and the first plate of the capacitor of the 3k+3th column of sub-pixels;
[0068] The area of the overlapped region between the second electrode plate of the capacitor of the 3k+1th column of sub-pixels and the first gate connection portion is smaller than the area of the overlapped region between the second electrode plate of the capacitor of the 3k+2th column of sub-pixels and the first gate connection portion, and the area of the overlapped region between the second electrode plate of the capacitor of the 3k+2th column of sub-pixels and the first gate connection portion is smaller than the area of the overlapped region between the second electrode plate of the capacitor of the 3k+3th column of sub-pixels and the first gate connection portion;
[0069] The area of the overlapping area between the second plate and the second gate connection portion of the capacitor of the 3k+1th column of sub-pixels is smaller than the area of the overlapping area between the second plate and the second gate connection portion of the capacitor of the 3k+2th column of sub-pixels, and the area of the overlapping area between the second plate and the second gate connection portion of the capacitor of the 3k+3th column of sub-pixels is smaller than the area of the overlapping area between the second plate and the second gate connection portion of the capacitor of the 3k+2th column of sub-pixels.
[0070] In an exemplary embodiment, the orthographic projection of the third plate of the capacitor on the substrate at least partially overlaps with the orthographic projections of the first plate of the capacitor and the second plate of the capacitor on the substrate, respectively, and the orthographic projection on the substrate has a non-overlapping area with the orthographic projection of the first plate of the capacitor on the substrate, and has a non-overlapping area with the orthographic projection of the second plate of the capacitor on the substrate.
[0071] In an exemplary embodiment, the invention further includes: an initial connection line located in the first conductive layer, the initial connection line at least partially extending along the second direction, the initial connection line being electrically connected to the initial signal line;
[0072] Two initial connection lines are arranged between at least two columns of sub-pixels, and the two initial connection lines between at least two adjacent sub-pixels are arranged symmetrically with respect to a midline extending along the second direction between the two adjacent sub-pixels;
[0073] The orthographic projection of the sixth via hole on the substrate does not overlap with the orthographic projection of the initial connection line on the substrate.
[0074] In an exemplary embodiment, the invention further comprises: at least one connection line of a power connection line and a reference connection line located in the fourth conductive layer, wherein at least a portion of the power connection line and the reference connection line extends along the second direction;
[0075] The power connection line is electrically connected to the first power line, and the reference connection line is electrically connected to the reference signal line;
[0076] The orthographic projection of at least part of the reference connection line on the substrate is between the orthographic projections of two initial connection lines located between two adjacent sub-pixels on the substrate, and the orthographic projection of the power connection line on the substrate and the orthographic projection of the initial connection line on the substrate are away from the side of the orthographic projection of the reference connection line on the substrate.
[0077] In an exemplary embodiment, the fifth insulating layer is provided with at least one of the first to fifth ventilation holes;
[0078] There is no overlapping area between the orthographic projections of the first to fifth vent holes on the substrate and the orthographic projections of the power connection line, the reference connection line and the data signal line on the substrate;
[0079] The orthographic projection of the fourth vent hole on the substrate partially overlaps with the orthographic projection of the initial connection line on the substrate.
[0080] In an exemplary embodiment, it further includes: a light emitting structure layer, the sub-pixel further includes: a light emitting device, the light emitting device includes: a first electrode, an organic light emitting layer and a second electrode, the light emitting structure layer includes a light emitting device, and the light emitting structure layer includes: a fifth conductive layer, a first pixel definition layer, a second pixel definition layer, a light emitting material layer and a sixth conductive layer sequentially stacked on a side of the driving structure layer away from the substrate;
[0081] The fifth conductive layer at least includes: a first electrode;
[0082] The light-emitting material layer at least includes: an organic light-emitting layer;
[0083] The sixth conductive layer at least includes: a second electrode;
[0084] The light transmittance of the first pixel definition layer is less than the light transmittance of the second pixel definition layer.
[0085] In an exemplary embodiment, the fifth insulating layer has a thickness of about 1200 angstroms to about 1600 angstroms;
[0086] The thickness of the first planar layer is about 18000 angstroms to 22000 angstroms, and the material used to make the first planar layer includes polyimide.
[0087] In a second aspect, the present disclosure further provides a display device, comprising: the above-mentioned display substrate.
[0088] Other aspects will be apparent upon reading and understanding the drawings and detailed description.
[0089] BRIEF DESCRIPTION OF THE DRAWINGS
[0090] The accompanying drawings are used to provide an understanding of the technical solution of the present disclosure and constitute a part of the specification. Together with the embodiments of the present disclosure, they are used to explain the technical solution of the present disclosure and do not constitute a limitation on the technical solution of the present disclosure.
[0091] FIG1 is a schematic structural diagram of a display device;
[0092] FIG2 is a schematic diagram of a planar structure of a display substrate;
[0093] FIG3 is a second schematic diagram of a planar structure of a display substrate;
[0094] FIG4 is a third schematic diagram of a planar structure of a display substrate;
[0095] FIG5A is a schematic diagram of an equivalent circuit of a pixel driving circuit;
[0096] FIG5B is a working timing diagram of the pixel driving circuit provided in FIG5A ;
[0097] FIG6 is a schematic diagram of a display substrate;
[0098] FIG7A is a first structural schematic diagram of a display substrate provided in an embodiment of the present disclosure;
[0099] FIG7B is a second structural schematic diagram of a display substrate provided in an embodiment of the present disclosure;
[0100] FIG8A is a schematic diagram of a partial film layer of the display substrate provided in FIG7A ;
[0101] FIG8B is a schematic diagram of a partial film layer of the display substrate provided in FIG7B ;
[0102] FIG9A is an enlarged schematic diagram of a region A in the display substrate provided in FIG8A ;
[0103] FIG9B is an enlarged schematic diagram of a region B in the display substrate provided in FIG8A ;
[0104] FIG9C is an enlarged schematic diagram of a region C in the display substrate provided in FIG8A ;
[0105] FIG9D is an enlarged schematic diagram of a region D in the display substrate provided in FIG8A ;
[0106] FIG10 is a schematic diagram showing the capacitance of the display substrate provided in FIG7A and FIG7B ;
[0107] FIG11 is a schematic diagram of a portion of the film layers of a capacitor of a display substrate provided by FIG10 for FIG7A and FIG7B;
[0108] FIG12 is a schematic diagram of the semiconductor layer pattern in FIGS. 7A and 7B ;
[0109] FIG13 is a schematic diagram of a first conductive layer pattern in FIG7A and FIG7B ;
[0110] FIG14 is a schematic diagram of FIG7A and FIG7B after forming a first conductive layer pattern;
[0111] FIG15 is a schematic diagram of a second conductive layer pattern in FIGS. 7A and 7B ;
[0112] FIG16 is a schematic diagram of FIG7A and FIG7B after forming a second conductive layer pattern;
[0113] FIG17 is a schematic diagram of FIG7A and FIG7B after forming a fourth insulating layer pattern;
[0114] FIG18 is a schematic diagram of a third conductive layer pattern in FIGS. 7A and 7B ;
[0115] FIG19 is a schematic diagram of FIG7A and FIG7B after forming a third conductive layer pattern;
[0116] FIG20 is a schematic diagram of FIG7A and FIG7B after forming a first planar layer pattern;
[0117] FIG21 is a schematic diagram of FIG7A after forming a fifth insulating layer pattern;
[0118] FIG22 is a schematic diagram of FIG7B after forming a fifth insulating layer pattern;
[0119] FIG23 is a schematic diagram of a fourth conductive layer pattern in FIGS. 7A and 7B ;
[0120] FIG24 is a schematic diagram of FIG7A after forming a fourth conductive layer pattern;
[0121] FIG25 is a schematic diagram of FIG7B after forming a fourth conductive layer pattern;
[0122] FIG26 is a schematic diagram of FIG7A after forming a sixth insulating layer pattern;
[0123] FIG27 is a schematic diagram of FIG7B after forming a sixth insulating layer pattern;
[0124] FIG28 is a schematic diagram of FIG7A after forming a second planar layer pattern;
[0125] FIG29 is a schematic diagram of FIG7B after forming a second planar layer pattern;
[0126] FIG30 is a schematic diagram of a fifth conductive layer pattern in FIGS. 7A and 7B ;
[0127] FIG31 is a schematic diagram of FIG7A after forming a fifth conductive layer pattern;
[0128] FIG32 is a schematic diagram of FIG7B after the fifth conductive layer pattern is formed;
[0129] FIG33 is a schematic diagram of FIG7A after forming a first pixel definition layer pattern;
[0130] FIG34 is a schematic diagram of FIG7B after forming the first pixel definition layer;
[0131] FIG35 is a schematic diagram of FIG7A after forming a second pixel definition layer pattern;
[0132] FIG. 36 is a schematic diagram of FIG. 7B after forming a second pixel definition layer pattern.
[0133] Details
[0134] In order to make the purpose, technical solutions and advantages of the present disclosure clearer, the embodiments of the present disclosure will be described in detail in conjunction with the accompanying drawings hereinafter. Note that the embodiments can be implemented in a number of different forms. A person of ordinary skill in the relevant technical field can easily understand the fact that the methods and contents can be transformed into various forms without departing from the purpose and scope of the present disclosure. Therefore, the present disclosure should not be interpreted as being limited to the contents described in the following embodiments. In the absence of conflict, the embodiments in the present disclosure and the features in the embodiments can be arbitrarily combined with each other. In order to keep the following description of the embodiments of the present disclosure clear and concise, the present disclosure omits the detailed description of some known functions and known components. The drawings of the embodiments of the present disclosure only involve the structures involved in the embodiments of the present disclosure, and other structures can refer to the general design.
[0135] The proportions of the drawings in this disclosure can be used as a reference in the actual process, but are not limited to this. For example: the width-to-length ratio of the channel, the thickness and spacing of each film layer, the width and spacing of each signal line can be adjusted according to actual needs. The number of pixels in the display substrate and the number of sub-pixels in each pixel are not limited to the numbers shown in the figures. The drawings described in this disclosure are only structural schematic diagrams, and one method of this disclosure is not limited to the shapes or values shown in the drawings.
[0136] In the present specification, ordinal numbers such as “first”, “second” and “third” are provided to avoid confusion among constituent elements, and are not intended to limit the number.
[0137] In this specification, for the sake of convenience, the words and phrases indicating the orientation or positional relationship, such as "middle", "upper", "lower", "front", "back", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., are used to illustrate the positional relationship of the constituent elements with reference to the drawings. This is only for the convenience of describing this specification and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as a limitation of the present disclosure. The positional relationship of the constituent elements is appropriately changed according to the direction in which each constituent element is described. Therefore, it is not limited to the words and phrases described in the specification, and can be appropriately replaced according to the situation.
[0138] In this specification, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate, or the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in this disclosure can be understood according to specific circumstances.
[0139] In this specification, a transistor refers to an element including at least three terminals: a gate electrode, a drain electrode, and a source electrode. The transistor has a channel region between a drain electrode (drain electrode terminal, drain region, or drain electrode) and a source electrode (source electrode terminal, source region, or source electrode), and current can flow through the drain electrode, the channel region, and the source electrode. Note that in this specification, the channel region refers to a region where current mainly flows.
[0140] In this specification, the first electrode may be a drain electrode and the second electrode may be a source electrode, or the first electrode may be a source electrode and the second electrode may be a drain electrode. In the case of using transistors with opposite polarities or when the direction of current changes during circuit operation, the functions of the "source electrode" and the "drain electrode" are sometimes interchanged. Therefore, in this specification, the "source electrode" and the "drain electrode" may be interchanged.
[0141] In this specification, "electrical connection" includes the case where components are connected together through an element having some electrical function. There is no particular limitation on the "element having some electrical function" as long as it can transmit and receive electrical signals between the connected components. Examples of "element having some electrical function" include not only electrodes and wiring, but also switching elements such as transistors, resistors, inductors, capacitors, and other elements having various functions.
[0142] In this specification, "parallel" means a state where the angle formed by two straight lines is greater than -10° and less than 10°, and therefore, also includes a state where the angle is greater than -5° and less than 5°. In addition, "perpendicular" means a state where the angle formed by two straight lines is greater than 80° and less than 100°, and therefore, also includes a state where the angle is greater than 85° and less than 95°.
[0143] In this specification, "film" and "layer" may be interchanged. For example, "conductive layer" may be replaced by "conductive film". Similarly, "insulating film" may be replaced by "insulating layer".
[0144] In this specification, the term "same-layer arrangement" refers to a structure formed by patterning two (or more) structures through the same patterning process, and their materials may be the same or different. For example, the materials of the precursors forming the multiple structures arranged in the same layer are the same, and the materials finally formed may be the same or different.
[0145] The triangles, rectangles, trapezoids, pentagons or hexagons in this specification are not in the strict sense, and may be approximate triangles, rectangles, trapezoids, pentagons or hexagons, etc. There may be some small deformations caused by tolerances, and there may be chamfers, arc edges and deformations.
[0146] The term "about" in the present disclosure refers to a numerical value that is not strictly limited to allow for process and measurement errors.
[0147] FIG1 is a schematic diagram of the structure of a display device. As shown in FIG1 , the display device may include a timing controller, a data driver, a scan driver, a light emitting driver and a pixel array, the timing controller is respectively connected to the data driver, the scan driver and the light emitting driver, the data driver is respectively connected to a plurality of data signal lines (D1 to Dn), the scan driver is respectively connected to a plurality of scan signal lines (S1 to Sm), and the light emitting driver is respectively connected to a plurality of light emitting signal lines (E1 to Eo). The pixel array may include a plurality of sub-pixels Pxij, i and j may be natural numbers, at least one sub-pixel Pxij may include a circuit unit and a light emitting device connected to the circuit unit, the circuit unit may include a pixel driving circuit, and the pixel driving circuit may be respectively connected to the scan signal line, the light emitting signal line and the data signal line.
[0148] In an exemplary embodiment, the timing controller can provide grayscale values and control signals suitable for the specifications of the data driver to the data driver, can provide clock signals, scan start signals, etc. suitable for the specifications of the scan driver to the scan driver, and can provide clock signals, emission stop signals, etc. suitable for the specifications of the light-emitting driver to the light-emitting driver.
[0149] In an exemplary embodiment, the data driver may generate data voltages to be provided to the data signal lines D1, D2, D3, ... and Dn using the grayscale values and control signals received from the timing controller. For example, the data driver may sample the grayscale values using the clock signal and apply data voltages corresponding to the grayscale values to the data signal lines D1 to Dn in units of pixel rows, where n may be a natural number.
[0150] In an exemplary embodiment, the scan driver may generate a scan signal to be provided to the scan signal lines S1, S2, S3, ... and Sm by receiving a clock signal, a scan start signal, etc. from a timing controller. For example, the scan driver may sequentially provide a scan signal having an on-level pulse to the scan signal lines S1 to Sm. For example, the scan driver may be constructed in the form of a shift register, and may sequentially transmit a scan start signal provided in the form of an on-level pulse to a next-level circuit under the control of a clock signal to generate a scan signal, and m may be a natural number.
[0151] In an exemplary embodiment, the light emitting driver may generate an emission signal to be provided to the light emitting signal lines E1, E2, E3, ... and Eo by receiving a clock signal, an emission stop signal, etc. from a timing controller. For example, the light emitting driver may sequentially provide an emission signal having a cut-off level pulse to the light emitting signal lines E1 to Eo. For example, the light emitting driver may be configured in the form of a shift register, and may generate an emission signal in a manner that sequentially transmits an emission stop signal provided in the form of a cut-off level pulse to a next stage circuit under the control of a clock signal, and o may be a natural number.
[0152] FIG. 2 is a schematic diagram of a planar structure of a display substrate, FIG. 3 is a schematic diagram of a planar structure of a display substrate, and FIG. 4 is a schematic diagram of a planar structure of a display substrate. As shown in FIG. 2 to FIG. 4, the display substrate may include a plurality of pixel units P arranged in a matrix, at least one of the plurality of pixel units P includes a first sub-pixel P1 emitting a first color light, a second sub-pixel P2 emitting a second color light, and a third sub-pixel P3 emitting a third color light, and the first sub-pixel P1, the second sub-pixel P2, and the third sub-pixel P3 each include a pixel driving circuit and a light-emitting device. The pixel driving circuits in the first sub-pixel P1, the second sub-pixel P2, and the third sub-pixel P3 are respectively connected to the scanning signal line, the data signal line, and the light-emitting signal line, and the pixel driving circuit is configured to receive the data voltage transmitted by the data signal line under the control of the scanning signal line and the light-emitting signal line, and output a corresponding current to the light-emitting device. The light-emitting devices in the first sub-pixel P1, the second sub-pixel P2, and the third sub-pixel P3 are respectively connected to the pixel driving circuits of the sub-pixels in which they are located, and the light-emitting devices are configured to emit light of corresponding brightness in response to the current output by the pixel driving circuit of the sub-pixel in which they are located.
[0153] In an exemplary embodiment, the first sub-pixel P1 may be a red sub-pixel (R) emitting red light, the second sub-pixel P2 may be a blue sub-pixel (B) emitting blue light, and the third sub-pixel P3 may be a green sub-pixel (G) emitting green light. In an exemplary embodiment, the shape of the sub-pixels may be rectangular, rhombus, pentagonal, or hexagonal.
[0154] In an exemplary embodiment, a pixel unit may include three sub-pixels, and the three sub-pixels may be arranged in a horizontal parallel manner, a vertical parallel manner, or a herringbone manner, which is not limited in the present disclosure. FIG. 2 and FIG. 3 are illustrated by taking a pixel unit including three sub-pixels as an example, and the three sub-pixels in FIG. 2 are arranged in a horizontal parallel manner, and the three sub-pixels in FIG. 3 are arranged in a herringbone manner.
[0155] In an exemplary embodiment, a pixel unit may include four sub-pixels, and the four sub-pixels may be arranged in a horizontal parallel, vertical parallel or square manner, which is not limited in the present disclosure. FIG. 4 is an example of a pixel unit including four sub-pixels, and the four sub-pixels are arranged in a square manner.
[0156] On a plane perpendicular to the display substrate, the display substrate may include a driving structure layer disposed on a substrate, a light emitting structure layer disposed on a side of the driving structure layer away from the substrate, and an encapsulation structure layer disposed on a side of the light emitting structure layer away from the substrate. In some possible implementations, the display substrate may include other film layers, such as a touch structure layer, etc., which is not limited in the present disclosure.
[0157] In an exemplary embodiment, the substrate may be a rigid substrate or a flexible substrate, wherein the rigid substrate may be, but is not limited to, one or more of glass and a conductive foil; the flexible substrate may be, but is not limited to, one or more of polyethylene terephthalate, polyethylene terephthalate, polyetheretherketone, polystyrene, polycarbonate, polyarylate, polyarylate, polyimide, polyvinyl chloride, polyethylene, and textile fibers.
[0158] In an exemplary embodiment, the light emitting device may be an organic light emitting diode (OLED) including a first electrode (anode), an organic light emitting layer, and a second electrode (cathode) stacked.
[0159] In an exemplary embodiment, the driving structure layer may include a plurality of transistors and storage capacitors constituting a pixel driving circuit, and the light-emitting structure layer may include an anode, a pixel definition layer, an organic light-emitting layer and a cathode, the anode being connected to a drain electrode of a transistor therein through a via, the organic light-emitting layer being connected to the anode, and the cathode being connected to the organic light-emitting layer, and the organic light-emitting layer emits light of corresponding colors when driven by the anode and the cathode.
[0160] In an exemplary embodiment, the organic light emitting layer may include a light emitting layer (EML) and any one or more of the following layers: a hole injection layer (HIL), a hole transport layer (HTL), an electron blocking layer (EBL), a hole blocking layer (HBL), an electron transport layer (ETL), and an electron injection layer (EIL). In an exemplary embodiment, one or more of the hole injection layer, the hole transport layer, the electron blocking layer, the hole blocking layer, the electron transport layer, and the electron injection layer of all sub-pixels may be a common layer connected together, and the light emitting layers of adjacent sub-pixels may have a small amount of overlap, or may be isolated.
[0161] In an exemplary embodiment, the encapsulation structure layer may include a stacked first encapsulation layer, a second encapsulation layer and a third encapsulation layer. The first encapsulation layer and the third encapsulation layer may be made of inorganic materials, the second encapsulation layer may be made of organic materials, and the second encapsulation layer is arranged between the first encapsulation layer and the third encapsulation layer to ensure that external water vapor cannot enter the light-emitting structure layer.
[0162] In an exemplary embodiment, the touch structure layer may include a first touch insulation layer arranged on the packaging structure layer, a first touch metal layer arranged on the first touch insulation layer, a second touch insulation layer covering the first touch metal layer, a second touch metal layer arranged on the second touch insulation layer, and a touch protection layer covering the second touch metal layer. The first touch metal layer may include a plurality of bridging electrodes, the second touch metal layer may include a plurality of first touch electrodes and second touch electrodes, and the first touch electrode or the second touch electrode may be connected to the bridging electrode through a via.
[0163] FIG5A is a schematic diagram of an equivalent circuit of a pixel driving circuit. In an exemplary embodiment, the pixel driving circuit may be a 3T1C, 4T1C, 5T1C, 5T2C, 6T1C, 7T1C or 8T1C structure. As shown in FIG5A , the pixel driving circuit may include 5 transistors (a first transistor T1 to a fifth transistor T5), 1 capacitor C, and the pixel driving circuit may be connected to 7 signal lines (a data signal line Data, a first scanning signal line G1, a second scanning signal line G2, a third scanning signal line G3, a light emitting signal line EM, an initial signal line INIT, a reference signal line REF and a first power line VDD), and the light emitting device L is connected to the second power line VSS.
[0164] In an exemplary embodiment, as shown in FIG. 5A, a gate electrode of the first transistor T1 is electrically connected to the third scan signal line G3, a first electrode of the first transistor T1 is electrically connected to the initial signal line INIT, a second electrode of the first transistor T1 is electrically connected to the first node N1, a gate electrode of the second transistor T2 is electrically connected to the second scan signal line G2, a first electrode of the second transistor T2 is electrically connected to the reference signal line REF, a second electrode of the second transistor T2 is electrically connected to the second node N2, a gate electrode of the third transistor T3 is electrically connected to the second node N2, a first electrode of the third transistor T3 is electrically connected to the third node N3, and a second electrode of the third transistor T3 is electrically connected to the first node N1. The gate electrode of the fourth transistor T4 is electrically connected to the first scanning signal line G1, the first electrode of the fourth transistor T4 is electrically connected to the data signal line Data, the second electrode of the fourth transistor T4 is electrically connected to the second node N4, the gate electrode of the fifth transistor T5 is electrically connected to the light emitting signal line EM, the first electrode of the fifth transistor T5 is electrically connected to the first power supply line VDD, the second electrode of the fifth transistor T5 is electrically connected to the third node N3, and the capacitor C includes: a first electrode plate C1, a second electrode plate C2 and a third electrode plate C3 stacked in sequence on the substrate, wherein the first electrode plate C1 and the third electrode plate C3 are electrically connected to the second node N2, and the second electrode plate C2 is electrically connected to the first node N1.
[0165] In an exemplary embodiment, the first transistor T1 may be referred to as a reset transistor, and when the signal of the third scan signal line G3 is an effective level signal, the first transistor T1 transmits the signal of the initial signal line to the first node N1 to reset the charge amount of the first electrode of the light emitting device L.
[0166] In an exemplary embodiment, the third transistor T3 may be referred to as a driving transistor, and the third transistor T3 determines the magnitude of a driving current flowing between the first power line VDD and the second power line VSS according to a potential difference between its gate electrode and the first electrode.
[0167] In an exemplary embodiment, the fourth transistor T4 may be referred to as a switching transistor, a scan transistor, etc., and enables the data voltage of the data signal line Data to be input to the second node N2 when an on-level scan signal is applied to the first scan signal line S1.
[0168] In an exemplary embodiment, the fifth transistor T5 may be referred to as a light emitting transistor. When an on-level light emitting signal is applied to the light emitting signal line EM, the fifth transistor T5 enables the light emitting device L to emit light by forming a driving current path between the first power line VDD and the second power line VSS.
[0169] In an exemplary embodiment, as shown in Fig. 5A, the number of any one of the first transistor T1, the second transistor T2 and the fourth transistor T4 may be at least one. Fig. 5A is described by taking one first transistor T1, one second transistor T2 and one fourth transistor T4 as an example.
[0170] In an exemplary embodiment, when the number of the first transistors T1 can be at least two, the gate electrodes of all the first transistors are electrically connected to the third scan signal line, at least two first transistors are arranged in series, the first electrode of the first first transistor is electrically connected to the initial signal line, and the second electrode of the last first transistor is electrically connected to the first node N1.
[0171] In an exemplary embodiment, when the number of the second transistors T2 can be at least two, the gate electrodes of all the second transistors are electrically connected to the second scan signal line, at least two second transistors are arranged in series, the first electrode of the first second transistor is electrically connected to the reference signal line, and the second electrode of the last second transistor is electrically connected to the second node N2.
[0172] In an exemplary embodiment, when the number of the fourth transistors T4 can be at least two, the gate electrodes of all the fourth transistors are electrically connected to the first scan signal line, at least two fourth transistors are arranged in series, the first electrode of the first fourth transistor is electrically connected to the data signal line, and the second electrode of the last fourth transistor is electrically connected to the second node N2.
[0173] In an exemplary embodiment, as shown in FIG. 5A , a first electrode of the light emitting device L is electrically connected to the first node N1 , and a second electrode of the light emitting device L is connected to the second power line VSS.
[0174] In an exemplary embodiment, the first power line VDD continuously provides a high level signal, and the second power line VSS continuously provides a low level signal.
[0175] In an exemplary embodiment, a voltage value of a signal of the initial signal line INIT may be lower than a voltage value of a signal of the second power line VSS, and erroneous light emission of the light emitting device may be avoided.
[0176] In an exemplary embodiment, the first scan signal line G1 is a scan signal line in the pixel driving circuit of the current display row, and the third scan signal line G3 is a scan signal line in the pixel driving circuit of the previous display row. The third scan signal line G3 of the current display row and the first scan signal line G1 in the pixel driving circuit of the previous display row are the same signal line, which can reduce the signal lines of the display substrate and realize a narrow frame of the display substrate.
[0177] According to the characteristics of the transistor, the transistor can be divided into an N-type transistor and a P-type transistor. When the transistor is a P-type transistor, the turn-on voltage is a low-level voltage (e.g., 0V, -5V, -10V or other suitable voltages), and the turn-off voltage is a high-level voltage (e.g., 5V, 10V or other suitable voltages). When the transistor is an N-type transistor, the turn-on voltage is a high-level voltage (e.g., 5V, 10V or other suitable voltages), and the turn-off voltage is a low-level voltage (e.g., 0V, -5V, -10V or other suitable voltages).
[0178] In an exemplary embodiment, the first transistor T1 to the fifth transistor T5 may be P-type transistors or N-type transistors. Using the same type of transistors in the pixel driving circuit can simplify the process flow, reduce the process difficulty of the display substrate, and improve the product yield.
[0179] In an exemplary embodiment, the first to fifth transistors T1 to T5 are all N-type transistors.
[0180] In an exemplary embodiment, the first power line VDD continuously provides a high level signal, the second power line VSS continuously provides a low level signal, and the reference signal line REF continuously provides a reference signal, wherein the voltage of the reference signal is 0V.
[0181] FIG5B is a working timing diagram of the pixel driving circuit provided in FIG5A. The following is an explanation of the exemplary embodiment of the present disclosure through the working process of the pixel driving circuit shown in FIG5A. The pixel driving circuit in FIG5B includes five transistors (first transistor T1 to fifth transistor T5) and one capacitor C, and all five transistors are N-type transistors.
[0182] In an exemplary embodiment, the operation process of the pixel driving circuit may include:
[0183] The first stage P1 is called the reset stage. The signals of the second scanning signal line G2 and the third scanning signal line G3 are high-level signals, and the signals of the first scanning signal line G1 and the light-emitting signal line EM are low-level signals. The signal of the second scanning signal line G2 is a high-level signal, the second transistor T2 is turned on, the signal of the reference signal line REF is provided to the second node N2, the signal of the second node N2 is initialized (reset), and the original charge in the second node N2 is cleared. The signal of the third scanning signal line G3 is a high-level signal, the first transistor T1 is turned on, the signal of the initial signal line INIT is provided to the first node N1, the anode of the light-emitting device L is initialized (reset), and the original charge in the anode of the light-emitting device L is cleared. The signals of the first scanning signal line G1 and the light-emitting signal line EM are low-level signals, the fourth transistor T4 and the fifth transistor T5 are turned off, and in this stage, the light-emitting device L does not emit light.
[0184] In the second stage P2, i.e., the threshold compensation stage, the signals of the second scanning signal line G2 and the light-emitting signal line EM are high-level signals, the signals of the first scanning signal line G1 and the third scanning signal line G3 are low-level signals, the signal of the second scanning signal line G2 is a high-level signal, the second transistor T2 is turned on, the signal of the reference signal line REF is continuously provided to the second node N2, the signal of the light-emitting signal line EM is a high-level signal, the fifth transistor T5 is turned on, and the signal of the first power line VDD is written into the first node N1 through the turned-on fifth transistor T5, the third node N3 and the turned-on third transistor T3, until the voltage V2 of the signal at the second node N1 is Vref-Vth, Vref is the voltage value of the signal of the initial signal line REF, Vth is the threshold voltage of the third transistor T3, and the capacitor C stores the voltage difference Vth between the signals at the first node N1 and the second node N2.
[0185] In the third stage P3, the data writing stage, the signal of the first scanning signal line G1 is a high-level signal, the signals of the second scanning signal line G2, the third scanning signal line G3 and the light-emitting signal line EM are low-level signals, and the data signal line Data outputs a data voltage. The signal of the first scanning signal line G1 is a high-level signal, the fourth transistor T4 is turned on, and the data voltage of the data signal line Data is written into the second node N2. At this time, the voltage value V2 of the second node N2 is Vdata, Vdata is the data voltage of the data signal line, and the signal of the second node N2 jumps from the voltage value of this stage to the voltage value of the previous stage. Therefore, under the action of the capacitor C, the signal of the first node N1 also jumps. At this time, the voltage value V1 of the signal of the first node N1 is Vref-Vth+α(Vdata-Vref). The signals of the second scanning signal line G2, the third scanning signal line G3 and the light-emitting signal line EM are low-level signals, and the first transistor T1, the second transistor T2 and the fifth transistor T5 are turned off. In this stage, the light-emitting device L does not emit light.
[0186] In the fourth stage P4, i.e., the light emitting stage, the signal of the light emitting signal line EM is a high level signal, and the signals of the first scanning signal line G1, the second scanning signal line G2, and the third scanning signal line G3 are low level signals. The signal of the light emitting signal line EM is a high level signal, the fifth transistor T5 is turned on, and the power supply voltage output by the first power supply line VDD provides a driving voltage to the first electrode of the light emitting device L through the turned-on fifth transistor T5 and the third transistor T3, driving the light emitting device L to emit light.
[0187] During the driving process of the pixel driving circuit, the driving current flowing through the third transistor T3 (driving transistor) is determined by the voltage difference between its gate electrode (also the second node N2) and the first electrode (also the first node N1). Since the voltage value V1 of the signal at the first node is Vref-Vth+α(Vdata-Vref), and the voltage value V1 of the signal at the second node N1 is Vdata, the driving current of the third transistor T3 is: I=K*(Vgs-Vth) 2 =K*[Vdata-Vref+Vth-α(Vdata-Vref)] 2 =K*[(1-α)(Vdata-Vref)] 2
[0188] Wherein, I is the driving current flowing through the third transistor T3, that is, the driving current driving the light emitting device L, K is a constant, and Vgs is the voltage difference between the gate electrode and the first electrode of the third transistor T3.
[0189] It can be seen from the derivation results of the above current formula that in the light-emitting stage, the driving current of the third transistor T3 is no longer affected by the threshold voltage of the third transistor T3, thereby eliminating the influence of the threshold voltage of the third transistor T3 on the driving current, which can ensure the uniform display brightness of the display product and improve the display effect of the entire display product.
[0190] FIG6 is a schematic diagram of a display substrate. As shown in FIG6 , the driving structure layer of the display substrate includes: a first conductive layer, a second conductive layer, a third conductive layer and a fourth conductive layer, wherein a flat layer and an insulating layer are provided between the third conductive layer and the fourth conductive layer, wherein the insulating layer covers the flat layer. The flat layer will be made of a polyimide material, which can achieve good flattening. When the fourth conductive layer is subsequently formed, since the fourth conductive layer is prepared in a high temperature environment, the high temperature will cause the residual water vapor in the flat layer to gather and bulge 10, causing the display substrate to bulge poorly, thereby resulting in low reliability of the display product, thereby affecting the display effect of the display product.
[0191] FIG7A is a schematic diagram of the structure of the display substrate provided in the embodiment of the present disclosure, FIG7B is a schematic diagram of the structure of the display substrate provided in the embodiment of the present disclosure, FIG8A is a schematic diagram of a partial film layer of the display substrate provided in FIG7A, and FIG8B is a schematic diagram of a partial film layer of the display substrate provided in FIG7B. As shown in FIG7A, FIG7B, FIG8A and FIG8B, the embodiment of the present disclosure provides a display substrate, which is provided with a plurality of sub-pixels arranged in an array, at least one sub-pixel includes: a pixel driving circuit, the display substrate includes: a substrate and a driving structure layer provided on the substrate, and the pixel driving circuit is provided in the driving structure layer.
[0192] In an exemplary embodiment, the driving structure layer includes at least: a first insulating layer, a semiconductor layer, a second insulating layer, a first conductive layer, a third insulating layer, a second conductive layer, a fourth insulating layer, a third conductive layer, a first flat layer, a fifth insulating layer, and a fourth conductive layer stacked sequentially on the substrate. FIGS. 7A and 7B show the first insulating layer, the semiconductor layer, the second insulating layer, the first conductive layer, the third insulating layer, the second conductive layer, the fourth insulating layer, the third conductive layer, the first flat layer, and the fifth insulating layer.
[0193] As shown in FIG. 7A and FIG. 7B , a plurality of via holes are disposed on the fifth insulating layer, and at least one via hole on the fifth insulating layer exposes the first planar layer.
[0194] As shown in FIGS. 7A and 7B , the thickness of the first planarization layer may be greater than the thickness of the fifth insulating layer.
[0195] In an exemplary embodiment, the fifth insulating layer has a thickness of about 1200 angstroms to about 1600 angstroms. Exemplarily, the fifth insulating layer has a thickness of about 1400 angstroms.
[0196] In an exemplary embodiment, the thickness of the first planar layer is about 18,000 angstroms to 22,000 angstroms. Exemplarily, the thickness of the first planar layer is about 20,000 angstroms.
[0197] In an exemplary embodiment, the material of the first planarization layer may include polyimide.
[0198] The present invention exposes the first flat layer through at least one via hole on the fifth insulating layer, thereby forming a venting channel, so that residual water vapor in the first flat layer in the subsequent manufacturing process can be released, thereby avoiding bulging of the display substrate, improving the reliability of the display substrate, and further ensuring the display effect of the display product.
[0199] In an exemplary embodiment, in combination with Figures 7A to 7B, the pixel driving circuit may include: a first transistor to a fifth transistor, the driving structure layer also includes: a first scan signal line G1, a second scan signal line G2, a third scan signal line G3, an initial signal line INIT, a data signal line Data, a light emitting signal line EM, a reference signal line REF and a first power line VDD, the first transistor is electrically connected to the third scan signal line G3 and the initial signal line INIT, respectively, the second transistor is electrically connected to the second scan signal line G2 and the reference signal line REF, respectively, the fourth transistor is electrically connected to the first scan signal line G1 and the data signal line Data, respectively, and the fifth transistor is electrically connected to the light emitting signal line EM and the first power line VDD, respectively.
[0200] In an exemplary embodiment, any one of the first scan signal line G1, the second scan signal line G2, the third scan signal line G3, the initial signal line INIT, the light emitting signal line EM, the reference signal line REF, and the first power line VDD at least partially extends along the first direction D1, and the data signal line Data at least partially extends along the second direction D2, and the first direction D1 intersects the second direction D2;
[0201] In an exemplary embodiment, the reference signal line REF, the second scan signal line G2, the first scan signal line G1, the emission signal line EM, the first power line VDD, the third scan signal line G3 and the initial signal line INIT connected to any sub-pixel are sequentially arranged along the second direction D2.
[0202] In an exemplary embodiment, as shown in FIGS. 8A and 8B , the first planar layer is provided with first to fourth via holes V1 to V4, wherein the orthographic projection of the first via hole V1 on the substrate is located within the range of the orthographic projection of the second electrode 34 of the third transistor on the substrate, and the surface of the second electrode 34 of the third transistor is exposed, the orthographic projection of the second via hole V2 on the substrate is located within the range of the orthographic projection of the first electrode 43 of the fourth transistor on the substrate, and the surface of the first electrode 43 of the fourth transistor is exposed, the orthographic projection of the third via hole V3 on the substrate is located within the range of the orthographic projection of the reference signal line REF on the substrate, and the surface of the reference signal line REF is exposed, and the orthographic projection of the fourth via hole V4 on the substrate is located within the range of the orthographic projection of the first power line VDD on the substrate, and the surface of the first power line VDD is exposed;
[0203] In an exemplary embodiment, as shown in FIGS. 8A and 8B , the third via hole V3 is located on a center line of two adjacent fourth via holes V4 extending along the second direction D2 .
[0204] In an exemplary embodiment, as shown in FIG8A , the fifth insulating layer is provided with fifth to eighth via holes V5 to V8, wherein the orthographic projection of the fifth via hole V5 on the substrate is located within the range of the orthographic projection of the first via hole V1 and the first flat layer on the substrate, the orthographic projection of the sixth via hole V6 on the substrate is located within the range of the orthographic projection of the second via hole V2 and the first flat layer on the substrate, the orthographic projection of the seventh via hole V7 on the substrate is located within the range of the orthographic projection of the third via hole V3 and the first flat layer on the substrate, and the orthographic projection of the eighth via hole V8 on the substrate is located within the range of the orthographic projection of the fourth via hole V4 and the first flat layer on the substrate. In an exemplary embodiment, the orthographic projection of any via hole among the fifth via hole V5 to the eighth via hole V8 on the substrate overlaps with the orthographic projection of the first flat layer on the substrate, that is, any via hole among the fifth via hole V5 to the eighth via hole V8 exposes the first flat layer, which can be used as a venting channel, so that the residual water vapor in the first flat layer in the subsequent manufacturing process can be released, thereby avoiding bulging defects of the display substrate, improving the reliability of the display substrate, and further ensuring the display effect of the display product.
[0205] Figure 9A is an enlarged schematic diagram of area A in the display substrate provided in Figure 8A, Figure 9B is an enlarged schematic diagram of area B in the display substrate provided in Figure 8A, Figure 9C is an enlarged schematic diagram of area C in the display substrate provided in Figure 8A, and Figure 9D is an enlarged schematic diagram of area D in the display substrate provided in Figure 8A.
[0206] In an exemplary embodiment, as shown in FIGS. 8A and 9A , the length of the fifth via hole V5 along the first direction D1 is less than the length of the first via hole V1 along the first direction D1 , and the length of the fifth via hole V5 along the second direction D2 is less than the length of the first via hole V1 along the second direction D2 .
[0207] In an exemplary embodiment, as shown in FIG8A , within any sub-pixel, the boundaries of the via hole include: a first boundary, a second boundary, a third boundary, and a fourth boundary, wherein the first boundary of the via hole is a boundary of the via hole close to the first signal line, the second boundary of the via hole is a boundary of the via hole away from the first signal line, the third boundary of the via hole is a boundary located on one side of the first center line O1, and the fourth boundary of the via hole is a boundary located on the other side of the first center line O1. The via hole includes: a first via hole V1 and a fifth via hole V5, the first signal line is one of the light emitting signal line EM, the first power line VDD, the third scanning signal line G3, and the initial signal line INIT connected to the sub-pixel, the first center line O1 is the center line of the first via hole extending along the second direction D2, the third boundary of the first via hole V1 and the third boundary of the fifth via hole V5 are located on the same side of the first center line, and the fourth boundary of the first via hole V1 and the fourth boundary of the fifth via hole V5 are located on the same side of the first center line.
[0208] In an exemplary embodiment, as shown in FIG8A , the distance between the orthographic projection of the first boundary of the first via V1 on the substrate and the orthographic projection of the first signal line on the substrate is greater than the distance between the orthographic projection of the first boundary of the fifth via V5 on the substrate and the orthographic projection of the first signal line on the substrate, the distance between the orthographic projection of the second boundary of the first via V1 on the substrate and the orthographic projection of the first signal line on the substrate is greater than the distance between the orthographic projection of the second boundary of the fifth via V5 on the substrate and the orthographic projection of the first signal line on the substrate, the distance between the third boundary of the first via V1 and the first center line O1 is greater than the distance between the orthographic projection of the third boundary of the fifth via V5 on the substrate and the orthographic projection of the first center line O1 on the substrate, and the distance between the fourth boundary of the first via V1 and the first center line O1 is greater than the distance between the orthographic projection of the fourth boundary of the fifth via V5 on the substrate and the orthographic projection of the first center line O1 on the substrate.
[0209] In an exemplary embodiment, as shown in FIG9A , within any sub-pixel, a distance d11 between an orthographic projection of a first boundary of the first via hole V1 on the substrate and an orthographic projection of a first boundary of the fifth via hole V5 on the substrate is greater than a distance d12 between an orthographic projection of a third boundary of the first via hole V1 on the substrate and an orthographic projection of a third boundary of the fifth via hole V5 on the substrate, and is less than a distance d13 between an orthographic projection of a second boundary of the first via hole V1 on the substrate and an orthographic projection of a second boundary of the fifth via hole V5 on the substrate. In the present disclosure, d11>d12, d13>d11 can facilitate the degassing of the first planar layer on the basis of saving space for the fifth via hole.
[0210] In an exemplary embodiment, as shown in Fig. 9A, the distance d11 between the orthographic projection of the first boundary of the first via hole V1 on the substrate and the orthographic projection of the first boundary of the fifth via hole V5 on the substrate is about 1 micrometer to 2 micrometers. Exemplarily, the distance d11 between the orthographic projection of the first boundary of the first via hole V1 on the substrate and the orthographic projection of the first boundary of the fifth via hole V5 on the substrate may be about 1.5 micrometers.
[0211] In an exemplary embodiment, as shown in FIGS. 8A and 9B , the length of the sixth via hole V6 along the first direction D1 is less than the length of the second via hole V2 along the first direction D1 , and the length of the sixth via hole V6 along the second direction D2 is less than the length of the second via hole V2 along the second direction D2 .
[0212] In an exemplary embodiment, as shown in FIG8A , within any sub-pixel, the boundaries of the via hole include: a first boundary, a second boundary, a third boundary and a fourth boundary, wherein the first boundary of the via hole is a boundary of the via hole close to the first signal line, the second boundary of the via hole is a boundary of the via hole away from the first signal line, the third boundary of the via hole is a boundary located on one side of the second center line O2, and the fourth boundary of the via hole is a boundary located on the other side of the second center line O2. The via hole includes: a second via hole V2 and a sixth via hole V6. The first signal line is one of the light emitting signal line EM, the first power line VDD, the third scanning signal line G3 and the initial signal line INIT connected to the sub-pixel. The second center line O2 is a center line of the second via hole V2 extending along the second direction. The third boundary of the second via hole V2 and the third boundary of the sixth via hole V6 are located on the same side of the second center line O2. The fourth boundary of the second via hole V2 and the fourth boundary of the sixth via hole V6 are located on the same side of the second center line O2.
[0213] In an exemplary embodiment, as shown in FIG8A , the distance between the orthographic projection of the first boundary of the second via V2 on the substrate and the orthographic projection of the first signal line on the substrate is greater than the distance between the orthographic projection of the first boundary of the sixth via V6 on the substrate and the orthographic projection of the first signal line on the substrate, the distance between the orthographic projection of the second boundary of the second via V2 on the substrate and the orthographic projection of the first signal line on the substrate is greater than the distance between the orthographic projection of the second boundary of the sixth via V6 on the substrate and the orthographic projection of the first signal line on the substrate, the distance between the third boundary of the second via V2 and the second center line O2 is greater than the distance between the orthographic projection of the third boundary of the sixth via V6 on the substrate and the orthographic projection of the second center line O2 on the substrate, and the distance between the fourth boundary of the second via V2 and the second center line O2 is greater than the distance between the orthographic projection of the fourth boundary of the sixth via V6 on the substrate and the orthographic projection of the second center line O2 on the substrate.
[0214] In an exemplary embodiment, as shown in FIG9B , within any sub-pixel, the distance d21 between the orthographic projection of the first boundary of the second via hole V2 on the substrate and the orthographic projection of the first boundary of the sixth via hole V6 on the substrate is greater than the distance d22 between the orthographic projection of the third boundary of the second via hole V2 on the substrate and the orthographic projection of the third boundary of the sixth via hole V6 on the substrate, and is less than the distance d23 between the orthographic projection of the second boundary of the second via hole V2 on the substrate and the orthographic projection of the second boundary of the sixth via hole V6 on the substrate. In the present disclosure, d21>d22, d23>d21 can facilitate the degassing of the first planar layer on the basis of saving the space of the sixth via hole.
[0215] In an exemplary embodiment, as shown in Fig. 9B, the distance between the orthographic projection of the first boundary of the second via hole V2 on the substrate and the orthographic projection of the first boundary of the sixth via hole V6 on the substrate is about 1 micrometer to 2 micrometers. Exemplarily, the distance between the orthographic projection of the first boundary of the second via hole V2 on the substrate and the orthographic projection of the first boundary of the sixth via hole V6 on the substrate may be about 1.5 micrometers.
[0216] In an exemplary embodiment, as shown in FIGS. 8A and 9C , the length of the seventh via V7 along the first direction D1 is less than the length of the third via V3 along the first direction D1 , and the length of the seventh via V7 along the second direction D2 is less than or equal to the length of the third via V3 along the second direction D2 .
[0217] In an exemplary embodiment, as shown in FIG8A, the boundaries of the via hole include: a first boundary, a second boundary, a third boundary and a fourth boundary, wherein the first boundary of the via hole is a boundary of the via hole close to the second signal line, the second boundary of the via hole is a boundary of the via hole away from the second signal line, the third boundary of the via hole is a boundary located on one side of the third center line O3, the fourth boundary of the via hole is a boundary located on the other side of the third center line O3, the via hole includes: a third via hole V3 and a seventh via hole V7, the second signal line is a reference signal line REF exposed by the third via hole V3 The connected sub-pixel is connected to one of the signal lines among the luminous signal line EM, the first power line VDD, the first scanning signal line G1, the second scanning signal line G2, the third scanning signal line G3, the initial signal line INIT and the luminous signal line EM, the third center line O3 is the center line of the third via hole V3 extending along the second direction D2, the third boundary of the third via hole V3 and the third boundary of the seventh via hole V7 are located on the same side of the third center line O3, and the fourth boundary of the third via hole V3 and the fourth boundary of the seventh via hole V7 are located on the same side of the third center line O3.
[0218] In an exemplary embodiment, as shown in FIG8A , the distance between the orthographic projection of the first boundary of the third via V3 on the substrate and the orthographic projection of the second signal line on the substrate is greater than the distance between the orthographic projection of the first boundary of the seventh via V7 on the substrate and the orthographic projection of the second signal line on the substrate, the distance between the orthographic projection of the second boundary of the third via V3 on the substrate and the orthographic projection of the second signal line on the substrate is greater than the distance between the orthographic projection of the second boundary of the seventh via V7 on the substrate and the orthographic projection of the second signal line on the substrate, the distance between the third boundary of the third via V3 and the third center line O3 is greater than the distance between the orthographic projection of the third boundary of the seventh via V7 on the substrate and the orthographic projection of the third center line O3 on the substrate, and the distance between the fourth boundary of the third via V3 and the third center line O3 is greater than the distance between the orthographic projection of the fourth boundary of the seventh via V7 on the substrate and the orthographic projection of the third center line O3 on the substrate.
[0219] In an exemplary embodiment, as shown in FIG9C , the distance d31 between the orthographic projection of the first boundary of the third via hole V3 on the substrate and the orthographic projection of the first boundary of the seventh via hole V7 on the substrate is greater than the distance d33 between the orthographic projection of the third boundary of the third via hole V3 on the substrate and the orthographic projection of the third boundary of the seventh via hole V7 on the substrate, and is less than the distance d33 between the orthographic projection of the second boundary of the third via hole V3 on the substrate and the orthographic projection of the second boundary of the seventh via hole V7 on the substrate. In the present disclosure, d31>d32, d33>d31 can facilitate the degassing of the first planar layer on the basis of saving the space of the seventh via hole.
[0220] In an exemplary embodiment, as shown in Fig. 9C, a distance d31 between an orthographic projection of a first boundary of the third via hole V3 and an orthographic projection of a first boundary of the seventh via hole V7 on the substrate is approximately 1 micrometer to 2 micrometers. Exemplarily, a distance d31 between an orthographic projection of a first boundary of the third via hole V3 and an orthographic projection of a first boundary of the seventh via hole V7 on the substrate may be approximately 1.5 micrometers.
[0221] In an exemplary embodiment, as shown in FIGS. 8A and 9D , the length of the eighth via V8 along the first direction D1 is greater than the length of the fourth via V4 along the first direction D1 , and the length of the eighth via V8 along the second direction D2 is greater than or equal to the length of the fourth via V4 along the second direction D2 .
[0222] In an exemplary embodiment, as shown in FIG8A , the boundaries of the via include: a first boundary, a second boundary, a third boundary and a fourth boundary, wherein the first boundary of the via is a boundary of the via close to the third signal line, the second boundary of the via is a boundary of the via far from the third signal line, the third boundary of the via is a boundary located on one side of the fourth center line O4, and the fourth boundary of the via is a boundary located on the other side of the fourth center line O4, and the via includes: a fourth via V4 and an eighth via V8, the third signal line is any one of a third scanning signal line and an initial signal line connected to the sub-pixel connected to the first power line exposed by the fourth via V4, the fourth center line O4 is a center line of the fourth via V4 extending along the second direction D2, the third boundary of the fourth via V4 and the third boundary of the eighth via V8 are located on the same side of the fourth center line O4, and the fourth boundary of the fourth via V4 and the fourth boundary of the eighth via V8 are located on the same side of the fourth center line O4.
[0223] In an exemplary embodiment, as shown in FIG8A , the distance between the orthographic projection of the first boundary of the fourth via V4 on the substrate and the orthographic projection of the third signal line on the substrate is greater than the distance between the orthographic projection of the first boundary of the eighth via V8 on the substrate and the orthographic projection of the third signal line on the substrate, the distance between the orthographic projection of the second boundary of the fourth via V4 on the substrate and the orthographic projection of the third signal line on the substrate is greater than the distance between the orthographic projection of the second boundary of the eighth via V8 on the substrate and the orthographic projection of the third signal line on the substrate, the distance between the third boundary of the fourth via V4 and the fourth center line O4 is greater than the distance between the orthographic projection of the third boundary of the eighth via V8 on the substrate and the orthographic projection of the fourth center line O4 on the substrate, and the distance between the fourth boundary of the fourth via V4 and the fourth center line O4 is greater than the distance between the orthographic projection of the fourth boundary of the eighth via V8 on the substrate and the orthographic projection of the fourth center line O4 on the substrate.
[0224] In an exemplary embodiment, as shown in FIG9D , the distance d41 between the orthographic projection of the first boundary of the fourth via hole V4 on the substrate and the orthographic projection of the first boundary of the eighth via hole V8 on the substrate is greater than the distance d42 between the orthographic projection of the third boundary of the fourth via hole V4 on the substrate and the orthographic projection of the third boundary of the eighth via hole V8 on the substrate, and is less than the distance d43 between the orthographic projection of the second boundary of the fourth via hole V4 on the substrate and the orthographic projection of the second boundary of the eighth via hole V8 on the substrate. In the present disclosure, d41>d42, d43>d41 can facilitate the degassing of the first planar layer on the basis of saving the space of the eighth via hole.
[0225] In an exemplary embodiment, as shown in Fig. 9D, a distance d41 between an orthographic projection of a first boundary of the fourth via hole V4 and an orthographic projection of a first boundary of the eighth via hole V8 on the substrate is approximately 1 micrometer to 2 micrometers. Exemplarily, a distance d41 between an orthographic projection of a first boundary of the fourth via hole V4 and an orthographic projection of a first boundary of the eighth via hole V8 on the substrate may be approximately 1.5 micrometers.
[0226] In an exemplary embodiment, as shown in Fig. 8B, the fifth insulating layer is provided with fifth to eighth via holes V5 to V8, wherein the orthographic projection of the fifth via hole V5 on the substrate is within the range of the orthographic projection of the first via hole V1 on the substrate, the orthographic projection of the sixth via hole V6 on the substrate is within the range of the orthographic projection of the second via hole V2 on the substrate, the orthographic projection of the seventh via hole V7 on the substrate is within the range of the orthographic projection of the third via hole V3 on the substrate, and the orthographic projection of the eighth via hole V8 on the substrate is within the range of the orthographic projection of the fourth via hole V4 on the substrate.
[0227] In an exemplary embodiment, as shown in FIG. 8B , the fifth insulating layer is further provided with any one of the first ventilation hole H1 and the second ventilation hole H2 .
[0228] In an exemplary embodiment, as shown in FIG. 8B , the orthographic projections of the first and second vent holes H1 and H2 on the substrate partially overlap with the orthographic projections of the first planar layer on the substrate, and the first planar layer is exposed.
[0229] In an exemplary embodiment, as shown in FIG8B , there is no overlapping area between the orthographic projections of the first air hole H1 and the second air hole H2 on the substrate and the orthographic projections of the active pattern, gate electrode, first pole and second pole of any transistor, and the reference signal line REF, the first scan signal line G1, the second scan signal line G2, the third scan signal line G3, the initial signal line INIT, the first power line VDD and the light emitting signal line EM on the substrate.
[0230] In an exemplary embodiment, as shown in FIG8B , the length of the first vent hole H1 along the first direction D1 is greater than the length of the boundary of the second electrode 34 of the third transistor close to the first scan signal line G1, and the length of the first vent hole H1 along the second direction D2 is greater than the length of the sixth via hole V6 along the second direction D2;
[0231] In an exemplary embodiment, as shown in FIG. 8B , the orthographic projection of the first vent hole H1 on the substrate at least surrounds at least one side of the orthographic projection of the first via hole V1 on the substrate.
[0232] In an exemplary embodiment, as shown in FIG8B , the distance between the orthographic projection of the first air hole H1 on the substrate and the orthographic projection of the fifth via hole V5 on the substrate is smaller than the distance between the projection of the first scan signal line G1 on the substrate and the orthographic projection of the fifth via hole V5 on the substrate, that is, the first air hole H1 is arranged at the periphery of the sleeve hole including the fifth via hole V5 and the first via hole V1.
[0233] In an exemplary embodiment, as shown in FIG. 8B , the length of the second ventilation hole H2 along the second direction D2 is greater than the length of the sixth via hole V6 along the second direction D2 , and the length of the second ventilation hole H2 along the first direction D1 is less than the length of the sixth via hole V6 along the first direction D1 .
[0234] In an exemplary embodiment, as shown in FIG. 8B , the second ventilation holes H2 and the sixth via holes V6 are arranged along the second direction D2 .
[0235] In an exemplary embodiment, as shown in Fig. 8B, the distance between the orthographic projection of the sixth via hole V6 on the substrate and the orthographic projection of the first scan signal line G1 on the substrate is greater than the distance between the second vent hole H2 and the sixth via hole V6. That is, the second vent hole is disposed at the periphery of the sleeve hole including the second via hole V2 and the sixth via hole V6.
[0236] In an exemplary embodiment, as shown in Fig. 8B, a third vent hole H3 is further formed on the fifth insulating layer, wherein the orthographic projection of the third vent hole H3 on the substrate partially overlaps with the orthographic projection of the first planar layer on the substrate, and the first planar layer is exposed.
[0237] In an exemplary embodiment, as shown in FIG8B , the orthographic projection of the third air hole H3 on the substrate is located between the orthographic projection of the first scanning signal line G1 on the substrate and the orthographic projection of the light-emitting signal line EM on the substrate, and there is no overlapping area with the active pattern, gate electrode, first pole and second pole of any transistor, and the reference signal line REF, the first scanning signal line G1, the second scanning signal line G2, the third scanning signal line G3, the initial signal line INIT, the first power line VDD and the orthographic projection of the light-emitting signal line EM on the substrate.
[0238] In an exemplary embodiment, as shown in FIG8B , at least one of a fourth vent hole H4 and a fifth vent hole H5 is further provided on the fifth insulating layer. The orthographic projections of the fourth vent hole H4 and the fifth vent hole H5 on the substrate partially overlap with the orthographic projections of the first flat layer on the substrate, and the first flat layer is exposed;
[0239] In an exemplary embodiment, as shown in FIG8B , the orthographic projection of the fourth air hole H4 on the substrate at least partially overlaps with the orthographic projection of the reference signal line REF on the substrate, and there is no overlapping area with the orthographic projections of the active pattern, gate electrode, first pole and second pole of any transistor and the first scanning signal line G1, second scanning signal line G2, third scanning signal line G3, initial signal line INIT, first power line VDD and light emitting signal line EM on the substrate.
[0240] In an exemplary embodiment, as shown in FIG8B , the orthographic projection of a portion of the fifth air hole H5 on the substrate has no overlapping area with the orthographic projection of the active pattern, gate electrode, first pole and second pole of any transistor, as well as the reference signal line REF, the first scan signal line G1, the second scan signal line G2, the third scan signal line G3, the initial signal line INIT, the first power line VDD and the light-emitting signal line EM on the substrate, and the orthographic projection of another portion of the fifth air hole H5 on the substrate at least partially overlaps with the orthographic projection of the first power line VDD on the substrate, and has no overlapping area with the orthographic projection of the active pattern, gate electrode, first pole and second pole of any transistor, as well as the reference signal line REF, the first scan signal line G1, the second scan signal line G2, the third scan signal line G3, the initial signal line INIT and the light-emitting signal line EM on the substrate. Exemplarily, the orthographic projection of the fifth air hole located on the side of the first column of sub-pixels away from the second column of sub-pixels on the substrate does not overlap with the orthographic projection of the active pattern, gate electrode, first pole and second pole of any transistor, as well as the reference signal line REF, the first scanning signal line G1, the second scanning signal line G2, the third scanning signal line G3, the initial signal line INIT, the first power line VDD and the light-emitting signal line EM on the substrate, and the orthographic projection of the remaining fifth air holes on the substrate at least partially overlaps with the orthographic projection of the first power line VDD on the substrate, and does not overlap with the orthographic projection of the active pattern, gate electrode, first pole and second pole of any transistor, as well as the reference signal line REF, the first scanning signal line G1, the second scanning signal line G2, the third scanning signal line G3, the initial signal line INIT and the light-emitting signal line EM on the substrate.
[0241] In an exemplary embodiment, as shown in FIG. 8B , the length of the fourth ventilation hole H4 along the second direction D2 is greater than the length of the third via hole V3 along the second direction D2 , and the length of the fourth ventilation hole H4 along the first direction D1 is less than the length of the third via hole V3 along the first direction D1 .
[0242] In an exemplary embodiment, as shown in Fig. 8B, the fourth vent hole H4 and the seventh via hole V7 are arranged along the first direction D1, and the distance between the orthogonal projection on the substrate and the orthogonal projection on the substrate of the gate electrode 12 of the first transistor of the adjacent sub-pixel is smaller than the distance between the orthogonal projection on the substrate of the seventh via hole V7 and the orthogonal projection on the substrate of the first transistor of the adjacent sub-pixel 12. That is, the fourth vent hole H4 is located at the periphery of the sleeve hole including the third via hole V3 and the seventh via hole V7.
[0243] In an exemplary embodiment, as shown in FIG. 8B , the length of the fifth vent hole H5 along the second direction D2 is greater than the length of the fourth via hole V4 along the second direction D2, and the length of the fifth vent hole H5 along the first direction D1 is less than the length of the fourth via hole V4 along the first direction D1;
[0244] In an exemplary embodiment, as shown in Fig. 8B, the fifth vent hole H5 and the eighth via hole V8 are arranged along the first direction D1, and the distance between the orthographic projection on the substrate and the orthographic projection on the substrate of the fourth via hole V4 is smaller than the distance between the orthographic projection on the substrate of the fourth via hole V4 and the orthographic projection on the substrate of the gate electrode 12 of the first transistor. That is, the fifth vent hole H5 is located at the periphery of the sleeve hole including the fourth via hole V4 and the eighth via hole V8.
[0245] In an exemplary embodiment, FIG10 is a schematic diagram of a capacitor of a display substrate provided in FIG7A and FIG7B. In combination with FIG7A, FIG7B and FIG10, the pixel driving circuit further includes: a capacitor, the capacitor includes: a first electrode plate C1, a second electrode plate C2 and a third electrode plate C3, the first electrode plate C1 is electrically connected to the third electrode plate C3;
[0246] The semiconductor layer includes at least: an active pattern of at least one transistor;
[0247] The first conductive layer at least includes: a gate electrode of at least one transistor and a first plate C1 of a capacitor;
[0248] The second conductive layer at least includes: a second plate C2 of the capacitor;
[0249] The third conductive layer at least includes: a first electrode and a second electrode of at least one transistor, a first scanning signal line G1, a second scanning signal line G2, a third scanning signal line G3, a light emitting signal line EM, an initial signal line INIT, a reference signal line REF, a first power line VDD and a third plate C3 of a capacitor;
[0250] The fourth conductive layer at least includes: a data signal line Data.
[0251] In an exemplary embodiment, as shown in Figure 10, the first plate C1 of the capacitor includes: a first gate connection portion and a second gate connection portion, the second gate connection portion of the sub-pixel in this column is located on the side of the first gate connection portion close to the sub-pixel in the next column, and the distance between the boundary of the first gate connection portion close to the gate electrode of the fifth transistor and the gate electrode of the fifth transistor is smaller than the distance between the boundary of the second gate connection portion close to the gate electrode of the fifth transistor and the gate electrode of the fifth transistor, and the distance between the boundary of the first gate connection portion away from the gate electrode of the fifth transistor and the gate electrode of the fifth transistor is smaller than the distance between the boundary of the second gate connection portion away from the gate electrode of the fifth transistor and the gate electrode of the fifth transistor.
[0252] In an exemplary embodiment, the length of the first gate connection portion in the first direction D1 is greater than the length of the second gate connection portion in the first direction D1, and the length of the first gate connection portion in the second direction D2 is greater than the length of the second gate connection portion in the second direction D2.
[0253] In an exemplary embodiment, Figure 11 is a partial film layer schematic diagram of a capacitor of a display substrate provided for Figures 7A and 7B in Figure 10. As shown in Figure 11, the orthographic projection of the second plate C2 of the capacitor on the substrate at least partially overlaps the orthographic projection of the first plate of the capacitor on the substrate.
[0254] In an exemplary embodiment, as shown in FIG. 11 , the second plates of the capacitors of the sub-pixels in the same column have the same shape and area, and the area of the second plate of the capacitor of the sub-pixel in the 3k+1th column is smaller than any of the area of the second plate of the capacitor of the sub-pixel in the 3k+2th column and the area of the second plate of the capacitor of the sub-pixel in the 3k+3th column.
[0255] In an exemplary embodiment, as shown in FIG11 , the area of the overlapped region between the second plate of the capacitor of the 3k+1th column of sub-pixels and the first plate of the capacitor is smaller than the area of the overlapped region between the second plate of the capacitor of the 3k+2th column of sub-pixels and the first plate of the capacitor, and the area of the overlapped region between the second plate of the capacitor of the 3k+2th column of sub-pixels and the first plate of the capacitor is smaller than the area of the overlapped region between the second plate of the capacitor of the 3k+3th column of sub-pixels and the first plate of the capacitor;
[0256] In an exemplary embodiment, as shown in FIG11 , the area of the overlapping region between the second plate of the capacitor and the first gate connection portion of the 3k+1th column of sub-pixels is smaller than the area of the overlapping region between the second plate of the capacitor and the first gate connection portion of the 3k+2th column of sub-pixels, and the area of the overlapping region between the second plate of the capacitor and the first gate connection portion of the 3k+2th column of sub-pixels is smaller than the area of the overlapping region between the second plate of the capacitor and the first gate connection portion of the 3k+3th column of sub-pixels.
[0257] In an exemplary embodiment, as shown in FIG11 , the area of the overlapping region between the second plate and the second gate connection portion of the capacitor of the 3k+1th column of sub-pixels is smaller than the area of the overlapping region between the second plate and the second gate connection portion of the capacitor of the 3k+2th column of sub-pixels, and the area of the overlapping region between the second plate and the second gate connection portion of the capacitor of the 3k+3th column of sub-pixels is smaller than the area of the overlapping region between the second plate and the second gate connection portion of the capacitor of the 3k+2th column of sub-pixels.
[0258] In an exemplary embodiment, as shown in FIG10 , the orthographic projection of the third plate of the capacitor on the substrate at least partially overlaps with the orthographic projections of the first plate of the capacitor and the second plate of the capacitor on the substrate, respectively, and the orthographic projection on the substrate has a non-overlapping area with the orthographic projection of the first plate of the capacitor on the substrate, and has a non-overlapping area with the orthographic projection of the second plate of the capacitor on the substrate.
[0259] In an exemplary embodiment, as shown in FIGS. 7A , 7B, 8A and 8B, the display substrate may further include an initial connection line L1 located in the first conductive layer, the initial connection line L1 at least partially extending along the second direction D2 , and the initial connection line L1 being electrically connected to the initial signal line INIT.
[0260] In an exemplary embodiment, as shown in FIGS. 7A , 7B, 8A and 8B, two initial connection lines L1 are disposed between at least two columns of sub-pixels, and the two initial connection lines L1 between at least two adjacent sub-pixels are symmetrically disposed relative to a midline extending between the two adjacent sub-pixels along the second direction D2.
[0261] In an exemplary embodiment, the plurality of initial connection lines L1 and the plurality of initial signal lines INIT form a mesh structure, which can improve the display uniformity of the display substrate and further improve the reliability of the display substrate.
[0262] In an exemplary embodiment, as shown in FIGS. 8A and 8B , the orthographic projection of the sixth via hole V6 on the substrate does not overlap with the orthographic projection of the initial connection line L2 on the substrate.
[0263] In an exemplary embodiment, as shown in FIGS. 7A and 7B , the display substrate may further include: at least one of a power connection line L2 and a reference connection line L3 located in the fourth conductive layer, and either of the power connection line L2 and the reference connection line L3 extends at least partially along the second direction D2 .
[0264] In an exemplary embodiment, as shown in FIGS. 7A and 7B , the power connection line L2 is electrically connected to the first power line VDD, and the reference connection line is electrically connected to the reference signal line REF.
[0265] In an exemplary embodiment, as shown in Figures 7A and 7B, between the orthographic projection of at least a portion of the reference connection line L3 on the substrate and the orthographic projections of two initial connection lines L1 located between two adjacent sub-pixels on the substrate, the orthographic projection of the power connection line L2 on the substrate and the orthographic projection of the initial connection line L1 on the substrate are away from the side of the orthographic projection of the reference connection line L3 on the substrate.
[0266] In an exemplary embodiment, multiple reference connection lines L3 and multiple reference signal lines REF form a mesh structure, and multiple power connection lines L2 and multiple first power lines VDD form a mesh structure, which can improve the display uniformity of the display substrate and further improve the reliability of the display substrate.
[0267] In an exemplary embodiment, as shown in FIG8B , the fifth insulating layer is provided with at least one of the first to fifth ventilation holes H1 to H5; the orthographic projections of the first to fifth ventilation holes H1 to H5 on the substrate do not overlap with the orthographic projections of the power connection line L2, the reference connection line L3 and the data signal line Data on the substrate.
[0268] In an exemplary embodiment, as shown in FIG. 8B , the orthographic projection of the fourth vent hole H4 on the substrate partially overlaps with the orthographic projection of the initial connection line L1 on the substrate.
[0269] In an exemplary embodiment, it further includes: a light emitting structure layer, the sub-pixel further includes: a light emitting device, the light emitting device includes: a first electrode, an organic light emitting layer and a second electrode, the light emitting structure layer includes the light emitting device, and the light emitting structure layer includes: a fifth conductive layer, a first pixel definition layer, a second pixel definition layer, a light emitting material layer and a sixth conductive layer sequentially stacked on a side of the driving structure layer away from the substrate;
[0270] The fifth conductive layer at least includes: a first electrode;
[0271] The light-emitting material layer at least includes: an organic light-emitting layer;
[0272] The sixth conductive layer at least includes: a second electrode.
[0273] In an exemplary embodiment, light transmittance of the first pixel definition layer may be less than light transmittance of the second pixel definition layer.
[0274] In an exemplary embodiment, the display substrate of the present disclosure can be applied to a display device having a pixel driving circuit, such as OLED, quantum dot display (QLED), light emitting diode display (Micro LED or Mini LED) or quantum dot light emitting diode display (QDLED), etc., which is not limited in the present disclosure.
[0275] The following is an exemplary explanation through the preparation process of the display substrate. The "patterning process" mentioned in the present disclosure includes processes such as coating photoresist, mask exposure, development, etching, and stripping photoresist for metal materials, inorganic materials or transparent conductive materials, and includes processes such as coating organic materials, mask exposure and development for organic materials. Deposition can be any one or more of sputtering, evaporation, and chemical vapor deposition, coating can be any one or more of spraying, spin coating and inkjet printing, and etching can be any one or more of dry etching and wet etching, which are not limited in the present disclosure. "Thin film" refers to a layer of thin film made by deposition, coating or other processes of a certain material on a substrate. If the "thin film" does not require a patterning process during the entire production process, the "thin film" can also be called a "layer". If the "thin film" requires a patterning process during the entire production process, it is called a "thin film" before the patterning process and a "layer" after the patterning process. The "layer" after the patterning process contains at least one "pattern". The "A and B are arranged in the same layer" in the present disclosure means that A and B are formed simultaneously through the same patterning process, and the "thickness" of the film layer is the size of the film layer in the direction perpendicular to the display substrate. In the exemplary embodiments of the present disclosure, "the orthographic projection of B is within the range of the orthographic projection of A" or "the orthographic projection of A includes the orthographic projection of B" means that the boundary of the orthographic projection of B falls within the boundary of the orthographic projection of A, or the boundary of the orthographic projection of A overlaps with the boundary of the orthographic projection of B.
[0276] In an exemplary embodiment, taking six sub-pixels (one sub-pixel row, six sub-pixel columns, such as first to sixth columns of sub-pixels) as an example, the preparation process of the display substrate may include the following operations.
[0277] (1) Forming a semiconductor layer pattern. In an exemplary embodiment, forming a semiconductor layer pattern may include: sequentially depositing a first insulating film and a semiconductor film on a substrate, patterning the semiconductor film through a patterning process to form a first insulating layer covering the substrate, and a semiconductor layer pattern disposed on the first insulating layer, as shown in FIG. 12 , which is a schematic diagram of the semiconductor layer pattern in FIGS. 7A and 7B .
[0278] In an exemplary embodiment, as shown in FIG. 12 , the semiconductor layer pattern may include at least active patterns 11 of first to fifth transistors 51 located in each sub-pixel.
[0279] In an exemplary embodiment, the active pattern 11 of the first transistor may be separately provided, the active pattern 21 of the second transistor and the active pattern 41 of the fourth transistor are interconnected as an integral structure, and the active pattern 31 of the third transistor and the active pattern 51 of the fifth transistor are interconnected as an integral structure.
[0280] In an exemplary embodiment, in the second direction D2, the integrated structure of the active pattern 21 of the second transistor and the active pattern 41 of the fourth transistor and the active pattern 11 of the first transistor are respectively located on different sides of the integrated structure of the active pattern 31 of the third transistor and the active pattern 51 of the fifth transistor. The integrated structure of the active pattern 21 of the second transistor and the active pattern 41 of the fourth transistor of the present sub-pixel is located on a side of the integrated structure of the active pattern 31 of the third transistor and the active pattern 51 of the fifth transistor of the present sub-pixel close to the previous row of sub-pixels, and the active pattern 11 of the first transistor of the present sub-pixel is located on a side of the integrated structure of the active pattern 31 of the third transistor and the active pattern 51 of the fifth transistor of the present sub-pixel close to the next row of sub-pixels. The active pattern 41 of the fourth transistor is located on a side of the active pattern 21 of the second transistor close to the active pattern 11 of the first transistor, and the active pattern 51 of the fifth transistor is located on a side of the active pattern 31 of the third transistor close to the active pattern 11 of the first transistor.
[0281] In an exemplary embodiment, the active pattern 11 of the first transistor may include: a first active connection portion 11A, a second active connection portion 11B, and a third active connection portion 11C, the first active connection portion 11A is located on a side of the second active connection portion 11B close to the integrated structure of the active pattern 31 of the third transistor and the active pattern 51 of the fifth transistor, and the third active connection portion 11C is located on a side of the second active connection portion 11B away from the integrated structure of the active pattern 31 of the third transistor and the active pattern 51 of the fifth transistor, the first active connection portion 11A may be in a strip shape and extend along the second direction D2, the second active connection portion 11B may be in a strip shape and extend along the first direction D1, and the third active connection portion 11C may be in an "L" shape, one end of the first active connection portion 11A is connected to one end of the second active connection portion 11B, and one end of the third active connection portion 11C is connected to the other end of the second active connection portion 11B.
[0282] In an exemplary embodiment, the active pattern 21 of the second transistor may be in a “┐” shape, the active pattern 31 of the third transistor may be in a left-rotated “Ω” shape, the active pattern 41 of the fourth transistor may be in an “n” shape, and the active pattern 51 of the fifth transistor may be in an “I” shape.
[0283] In an exemplary embodiment, the first active connection portion 11A and the active pattern 51 of the fifth transistor are arranged along the second direction D2.
[0284] In an exemplary embodiment, the active pattern of each transistor may include a first region, a second region, and a channel region between the first region and the second region. In an exemplary embodiment, the second region 21-2 of the active pattern 21 of the second transistor may serve as the second region 41-2 of the active pattern 41 of the fourth transistor, and the first region 31-1 of the active pattern 31 of the third transistor may serve as the second region 51-2 of the active pattern 51 of the fifth transistor. The first region 11-1 and the second region 11-2 of the active pattern 11 of the first transistor, the first region 21-1 of the active pattern 21 of the second transistor, the second region 31-2 of the active pattern 31 of the third transistor, the first region 41-1 of the active pattern 41 of the fourth transistor, and the first region 51-1 of the active pattern 51 of the fifth transistor may be separately provided.
[0285] (2) Forming a first conductive layer pattern. In an exemplary embodiment, forming the first conductive layer pattern may include: depositing a second insulating film and a first conductive film in sequence on the substrate on which the aforementioned pattern is formed, patterning the first conductive film by a patterning process, forming a second insulating layer covering the semiconductor layer pattern, and a first conductive layer pattern disposed on the second insulating layer, as shown in FIGS. 13 and 14 , where FIG. 13 is a schematic diagram of the first conductive layer pattern in FIGS. 7A and 7B , and FIG. 14 is a schematic diagram of FIGS. 7A and 7B after the first conductive layer pattern is formed. In an exemplary embodiment, the first conductive layer may be referred to as a first gate metal (GATE1) layer.
[0286] In an exemplary embodiment, the first conductive layer pattern may include at least: gate electrodes 12 to 52 of the first transistor and the first plate C1 of the capacitor in each sub-pixel, and two initial connection lines L1 between at least two columns of adjacent sub-pixels.
[0287] In an exemplary embodiment, the initial connection line L1 may be in the shape of a line whose main portion extends along the second direction D2, and at least two initial connection lines L1 between two adjacent sub-pixels are symmetrically arranged with respect to a midline extending along the second direction D2 between the two adjacent sub-pixels.
[0288] In an exemplary embodiment, the gate electrode 32 of the third transistor and the first plate C1 of the capacitor are connected to each other as an integral structure. The gate electrode 12 of the first transistor, the gate electrode 22 of the second transistor, the gate electrode 42 of the fourth transistor and the gate electrode 52 of the fifth transistor may be provided separately.
[0289] In an exemplary embodiment, the integrated structure of the gate electrode 32 of the third transistor and the first electrode plate C1 of the capacitor includes: a first gate connection portion 32A and a second gate connection portion 32B, the shapes of the first gate connection portion 32A and the second gate connection portion 32B may be rectangular, the second gate connection portion 32B of the sub-pixel in this column is located on the side of the first gate connection portion 32A close to the sub-pixel in the next column, and the distance between the boundary of the first gate connection portion 32A close to the gate electrode 52 of the fifth transistor and the gate electrode 52 of the fifth transistor is smaller than the distance between the boundary of the second gate connection portion 32B close to the gate electrode 52 of the fifth transistor and the gate electrode 52 of the fifth transistor, and the distance between the boundary of the first gate connection portion 32A away from the gate electrode 52 of the fifth transistor and the gate electrode 52 of the fifth transistor is smaller than the distance between the boundary of the second gate connection portion 32B away from the gate electrode 52 of the fifth transistor and the gate electrode 52 of the fifth transistor.
[0290] In an exemplary embodiment, the length of the first gate connection portion 32A in the first direction D1 is greater than the length of the second gate connection portion 32B in the first direction D1, and the length of the first gate connection portion 32A in the second direction D2 is greater than the length of the second gate connection portion 32B in the second direction D2.
[0291] In an exemplary embodiment, the gate electrode 12 of the first transistor may include: a first connection segment 12A and two first branch segments 12B, the two first branch segments 12B are located on one side of the first connection segment 12A close to the gate electrode 32 of the third transistor (also the first plate C1 of the capacitor), and are respectively connected to the first connection segment 12A, one end of one of the first branch segments 12B is connected to the end of the first connection segment 12A, and the other first branch segment 12B is connected to the middle of the first connection segment 12A. The first connection segment 12A may be strip-shaped and extend along the first direction D1, the first branch segment 12B extends along the second direction D2, and the two first branch segments 12B are arranged along the first direction D1.
[0292] In an exemplary embodiment, the length of the first branch segment 12A along the first direction D1 is less than the sum of the lengths of the first gate connection portion 32A and the second gate connection portion 32B along the first direction D1, and is greater than the length of the second gate connection portion 32B along the first direction D1, and the first branch segment 12A of the sub-pixel in this column is close to the boundary of the sub-pixel in the next column and the second gate connection portion 32B of the sub-pixel in this column is close to the boundary of the sub-pixel in the next column. Arrange along the second direction D2.
[0293] In an exemplary embodiment, the gate electrode 22 of the second transistor may include: a second connection segment 22A and two second branch segments 22B, the two second branch segments 22B are located on a side of the second connection segment 22A away from the gate electrode 32 of the third transistor (also the first plate C1 of the capacitor), and are respectively connected to the second connection segment 22A, one end of one of the second branch segments 22B is connected to the end of the second connection segment 22A, and the other second branch segment 22B is connected to the middle of the second connection segment 22A. The second connection segment 22A may be strip-shaped and extend along the first direction D1, the second branch segment 22B extends along the second direction D2, and the two second branch segments 22B are arranged along the first direction D1.
[0294] In an exemplary embodiment, the length of the second branch segment 22A along the first direction D1 is less than the length of the first gate connection portion 32A along the first direction D1, and the distance between the straight line where the second branch segment 22A of the current column of sub-pixels is close to the boundary of the next column of sub-pixels and the straight line where the first gate connection portion 32A is close to the boundary of the previous column of sub-pixels is less than the length of the first gate connection portion 32A along the first direction D1.
[0295] In an exemplary embodiment, the length of the first connecting segment 12A along the first direction D1 is greater than the length of the second connecting segment 22A along the first direction D1.
[0296] In an exemplary embodiment, the gate electrode 42 of the fourth transistor may include: a third connection segment 42A and two third branch segments 42B, the two third branch segments 42B are located on one side of the third connection segment 42A close to the gate electrode 32 of the third transistor (also the first plate C1 of the capacitor), and are respectively connected to the third connection segment 42A, one end of one third branch segment 42B is connected to the end of the third connection segment 42A, and the other third branch segment 42B is connected to the middle of the third connection segment 42A. The third connection segment 42A may be strip-shaped and extend along the first direction D1, the third branch segment 42B extends along the second direction D2, and the two third branch segments 42B are arranged along the first direction D1.
[0297] In an exemplary embodiment, the length of the third branch segment 42A along the first direction D1 is less than the length of the first gate connection portion 32A along the first direction D1, and the distance between the straight line where the third branch segment 42A of the current column of sub-pixels is close to the boundary of the next column of sub-pixels and the straight line where the first gate connection portion 32A of the current column of sub-pixels is close to the boundary of the previous column of sub-pixels is less than the length of the first gate connection portion 32A along the first direction D1.
[0298] In an exemplary embodiment, the length of the third connecting segment 42A along the first direction D1 is greater than the length of the second connecting segment 22A along the first direction D1, and the length of the third branch segment 42B along the second direction D2 is greater than the length of the second branch segment 22B along the second direction D2.
[0299] In an exemplary embodiment, the area of the gate electrode 42 of the fourth transistor is greater than the area of the gate electrode 22 of the second transistor.
[0300] In an exemplary embodiment, the gate electrode 52 of the fifth transistor may be shaped like a stripe and extend along the first direction D1.
[0301] In an exemplary embodiment, the length of the gate electrode 52 of the fifth transistor along the first direction D1 is less than the length of the first gate connection portion 32A along the first direction D1, and the gate electrode 52 of the fifth transistor of the current column of sub-pixels is located near the boundary of the next column of sub-pixels and between the boundary of the first gate connection portion 32A near the boundary of the previous column of sub-pixels and the boundary of the first gate connection portion 32A near the next column of sub-pixels.
[0302] In an exemplary embodiment, two first branch segments 12B of the gate electrode 12 of the first transistor are arranged across the active pattern of the first transistor, two second branch segments 22B of the gate electrode 22 of the second transistor are arranged across the active pattern of the second transistor, the gate electrode 32 of the third transistor (which is also the first plate C1 of the capacitor) is arranged across the active pattern of the third transistor, the third branch segment 42B of the gate electrode 42 of the fourth transistor is arranged across the active pattern of the fourth transistor, and the gate electrode 52 of the fifth transistor is arranged across the active pattern of the fifth transistor, that is, the extension direction of the gate electrode of at least one transistor is perpendicular to the extension direction of the active pattern.
[0303] In an exemplary embodiment, two first branch segments 12B of the gate electrode 12 of the first transistor are arranged across the active pattern of the first transistor, that is, the first transistor has a double-gate structure, which is structurally equivalent to a sub-pixel including two first transistors connected in series.
[0304] In an exemplary embodiment, two second branch segments 22B of the gate electrode 22 of the second transistor are arranged across the active pattern of the second transistor, that is, the second transistor has a double-gate structure, which is structurally equivalent to a sub-pixel including two second transistors connected in series.
[0305] In an exemplary embodiment, two third branch segments 42B of the gate electrode 42 of the fourth transistor are arranged across the active pattern of the fourth transistor, that is, the fourth transistor has a dual-gate structure, which is structurally equivalent to a sub-pixel including two fourth transistors connected in series.
[0306] In an exemplary embodiment, after forming the first conductive layer pattern, the first conductive layer pattern can be used as a shield to perform conductorization on the semiconductor layer. The semiconductor layer in the area shielded by the first conductive layer forms the channel region of the first transistor T1 to the fifth transistor T5, and the semiconductor layer in the area not shielded by the first conductive layer is conductorized, that is, the first area and the second area of the active pattern of the first transistor to the active pattern of the fifth transistor are both conductorized, and the first area of the active pattern of the third transistor after conductorization (also the second area of the active pattern of the fifth transistor) can serve as the first electrode 33 of the third transistor and the second electrode 54 of the fifth transistor.
[0307] (3) Forming a second conductive layer pattern. In an exemplary embodiment, forming the second conductive layer pattern may include: depositing a third insulating film and a second conductive film in sequence on the substrate on which the aforementioned pattern is formed, patterning the second conductive film by a patterning process, forming a third insulating layer covering the first conductive layer pattern, and a second conductive layer pattern disposed on the third insulating layer, as shown in FIGS. 15 and 16 , where FIG. 15 is a schematic diagram of the second conductive layer pattern in FIGS. 7A and 7B , and FIG. 16 is a schematic diagram of FIGS. 7A and 7B after the second conductive layer pattern is formed. In an exemplary embodiment, the second conductive layer may be referred to as a second gate metal (GATE2) layer.
[0308] In an exemplary embodiment, as shown in FIGS. 15 and 16 , the second conductive layer pattern may include at least: a second plate C2 of a capacitor located in each sub-pixel.
[0309] In an exemplary embodiment, the main body of the second plate C2 of the capacitor is in a rectangular shape. The second plate C2 of the capacitor of at least one sub-pixel may further include: at least one protrusion.
[0310] In an exemplary embodiment, an orthographic projection of the second plate C2 of the capacitor on the substrate at least partially overlaps an orthographic projection of the gate electrode of the third transistor (which is also the first plate of the capacitor) on the substrate.
[0311] In an exemplary embodiment, for any sub-pixel, the straight line where the second plate C2 of the capacitor of the current column of sub-pixels is close to the boundary of the next column of sub-pixels coincides with the straight line where the second gate connection portion is close to the boundary of the next column of sub-pixels.
[0312] In an exemplary embodiment, for any sub-pixel, a distance between an orthographic projection of the second plate C2 of the capacitor on the substrate and an orthographic projection of the active pattern of the first transistor on the substrate is smaller than a distance between an orthographic projection of the second gate connection portion on the substrate and an orthographic projection of the active pattern of the first transistor on the substrate.
[0313] In an exemplary embodiment, the second plates of the capacitors of the sub-pixels in the same column have the same shape and area.
[0314] In an exemplary embodiment, the second plates C2 of the capacitors of the sub-pixels in the (3k + 1)-th column have the same shape and area, where 0 ≤ k < N / 3 and N is the total number of columns of the sub-pixels.
[0315] In an exemplary embodiment, the second plates C2 of the capacitors of the sub-pixels in the (3k + 2)-th column have the same shape and area.
[0316] In an exemplary embodiment, the second plates C2 of the capacitors of the sub-pixels in the (3k + 3)-th column have the same shape and area.
[0317] In an exemplary embodiment, the area of the second plate C2 of the capacitor of the sub-pixel in the (3k + 1)-th column is smaller than either the area of the second plate C2 of the capacitor of the sub-pixel in the (3k + 2)-th column or the area of the second plate C2 of the capacitor of the sub-pixel in the (3k + 3)-th column.
[0318] In an exemplary embodiment, the length of the second plate C2 of the capacitor of the sub-pixel in the (3k + 2)-th column along a direction D1 is smaller than the length of the second plate C2 of the capacitor of the sub-pixel in the (3k + 3)-th column along the first direction D1, and the length of the second plate C2 of the capacitor of the sub-pixel in the (3k + 2)-th column along a second direction D2 is greater than the length of the second plate C2 of the capacitor of the sub-pixel in the (3k + 3)-th column along the second direction D2.
[0319] In an exemplary embodiment, the area of the overlapping region between the second plate C2 of the capacitor of the sub-pixel in the (3k + 1)-th column and the first plate of the capacitor is smaller than the area of the overlapping region between the second plate C2 of the capacitor of the sub-pixel in the (3k + 2)-th column and the first plate of the capacitor, and the area of the overlapping region between the second plate C2 of the capacitor of the sub-pixel in the (3k + 2)-th column and the first plate of the capacitor is smaller than the area of the overlapping region between the second plate C2 of the capacitor of the sub-pixel in the (3k + 3)-th column and the first plate of the capacitor.
[0320] In an exemplary embodiment, the area of the overlapping region between the second plate C2 of the capacitor of the sub-pixel in the (3k + 1)-th column and the first gate connection portion is smaller than the area of the overlapping region between the second plate C2 of the capacitor of the sub-pixel in the (3k + 2)-th column and the first gate connection portion, and the area of the overlapping region between the second plate C2 of the capacitor of the sub-pixel in the (3k + 2)-th column and the first gate connection portion is smaller than the area of the overlapping region between the second plate C2 of the capacitor of the sub-pixel in the (3k + 3)-th column and the first gate connection portion.
[0321] In an exemplary embodiment, the area of the overlapping region between the second plate C2 of the capacitor of the 3k+1th column of sub-pixels and the second gate connection portion is smaller than the area of the overlapping region between the second plate C2 of the capacitor of the 3k+2th column of sub-pixels and the second gate connection portion, and the area of the overlapping region between the second plate C2 of the capacitor of the 3k+3th column of sub-pixels and the second gate connection portion is smaller than the area of the overlapping region between the second plate C2 of the capacitor of the 3k+2th column of sub-pixels and the second gate connection portion.
[0322] (4) Forming a fourth insulating layer pattern. In an exemplary embodiment, forming the fourth insulating layer pattern may include: depositing a fourth insulating film on the substrate on which the aforementioned pattern is formed, patterning the fourth insulating film using a patterning process to form a fourth insulating layer pattern covering the second conductive layer, wherein a plurality of vias are provided on the fourth insulating layer pattern, as shown in FIG. 17 , which is a schematic diagram of FIG. 7A and FIG. 7B after the fourth insulating layer pattern is formed.
[0323] In an exemplary embodiment, as shown in FIG. 17 , the fourth insulation layer pattern may include at least ninth to twenty-first via holes V9 to V21 located in each sub-pixel and a twenty-second via hole V22 located between at least two columns of adjacent sub-pixels.
[0324] In an exemplary embodiment, the orthographic projection of the ninth via V9 on the substrate is located within the range of the orthographic projection of the first area of the active pattern of the first transistor on the substrate, the second insulating layer and the third insulating layer in the ninth via V9 are etched away to expose the surface of the first area of the active pattern of the first transistor, and the ninth via V9 is configured to connect a subsequently formed initial signal line to the first area of the active pattern of the first transistor through the via.
[0325] In an exemplary embodiment, the orthographic projection of the tenth via V10 on the substrate is located within the range of the orthographic projection of the second area of the active pattern of the first transistor on the substrate, the second insulating layer and the third insulating layer in the tenth via V10 are etched away to expose the surface of the second area of the active pattern of the first transistor, and the tenth via V10 is configured to connect the second electrode of the subsequently formed first transistor to the second area of the active pattern of the first transistor through the via.
[0326] In an exemplary embodiment, the orthographic projection of the eleventh via V11 on the substrate is located within the range of the orthographic projection of the first area of the active pattern of the second transistor on the substrate, the second insulating layer and the third insulating layer in the eleventh via V11 are etched away to expose the surface of the first area of the active pattern of the second transistor, and the eleventh via V11 is configured to connect a subsequently formed reference signal line to the first area of the active pattern of the second transistor through the via.
[0327] In an exemplary embodiment, the orthographic projection of the twelfth via V12 on the substrate is located within the range of the orthographic projection of the second area of the active pattern of the second transistor (also the second area of the active pattern of the fourth transistor) on the substrate, the second insulating layer and the third insulating layer in the twelfth via V12 are etched away to expose the surface of the second area of the active pattern of the second transistor (also the second area of the active pattern of the fourth transistor), and the twelfth via V12 is configured to connect the second electrode of the subsequently formed second transistor (also the second electrode of the fourth transistor and the third electrode plate of the capacitor) to the second area of the active pattern of the second transistor (also the second area of the active pattern of the fourth transistor) through the via.
[0328] In an exemplary embodiment, the orthographic projection of the thirteenth via hole V13 on the substrate is located within the range of the orthographic projection of the second area of the active pattern of the third transistor on the substrate, the second insulating layer and the third insulating layer in the thirteenth via hole V13 are etched away to expose the surface of the second area of the active pattern of the third transistor, and the thirteenth via hole V13 is configured to connect the second electrode of the subsequently formed third transistor to the second area of the active pattern of the third transistor through the via hole.
[0329] In an exemplary embodiment, the orthographic projection of the fourteenth via V14 on the substrate is located within the range of the orthographic projection of the first area of the active pattern of the fourth transistor on the substrate, the second insulating layer and the third insulating layer in the fourteenth via V14 are etched away to expose the surface of the first area of the active pattern of the fourth transistor, and the fourteenth via V14 is configured to connect the first electrode of the subsequently formed fourth transistor to the first area of the active pattern of the fourth transistor through the via.
[0330] In an exemplary embodiment, the orthographic projection of the fifteenth via hole V15 on the substrate is located within the range of the orthographic projection of the first area of the active pattern of the fifth transistor on the substrate, the second insulating layer and the third insulating layer in the fifteenth via hole V15 are etched away to expose the surface of the first area of the active pattern of the fifth transistor, and the fifteenth via hole V15 is configured to connect a subsequently formed light-emitting signal line to the first area of the active pattern of the fifth transistor through the via hole.
[0331] In an exemplary embodiment, the orthographic projection of the sixteenth via hole V16 on the substrate is within the range of the orthographic projection of the gate electrode of the first transistor on the substrate, the third insulating layer in the sixteenth via hole V16 is etched away, exposing the surface of the gate electrode of the first transistor, and the sixteenth via hole V16 is configured to connect a subsequently formed third scanning signal line to the gate electrode of the first transistor through the via hole. Exemplarily, the sixteenth via hole V16 exposes the surface of the first connecting section of the gate electrode of the first transistor.
[0332] In an exemplary embodiment, the orthographic projection of the seventeenth via hole V17 on the substrate is within the range of the orthographic projection of the gate electrode of the second transistor on the substrate, the third insulating layer in the seventeenth via hole V17 is etched away, exposing the surface of the gate electrode of the second transistor, and the seventeenth via hole V17 is configured to connect a second scan signal line formed subsequently to the gate electrode of the second transistor through the via hole. Exemplarily, the seventeenth via hole V17 exposes the surface of the second connection segment of the gate electrode of the second transistor.
[0333] In an exemplary embodiment, the orthographic projection of the eighteenth via hole V18 on the substrate is located within the range of the orthographic projection of the gate electrode of the third transistor (also the first plate of the capacitor) on the substrate, the third insulating layer in the eighteenth via hole V18 is etched away to expose the surface of the gate electrode of the third transistor (also the first plate of the capacitor), and the eighteenth via hole V18 is configured to connect the second electrode of the subsequently formed second transistor (also the second electrode of the fourth transistor) to the gate electrode of the third transistor (also the first plate of the capacitor) through the via hole.
[0334] In an exemplary embodiment, the orthographic projection of the nineteenth via hole V19 on the substrate is within the range of the orthographic projection of the gate electrode of the fourth transistor on the substrate, the third insulating layer in the nineteenth via hole V19 is etched away, exposing the surface of the gate electrode of the fourth transistor, and the nineteenth via hole V19 is configured to connect a first scan signal line formed subsequently to the gate electrode of the fourth transistor through the via hole. Exemplarily, the nineteenth via hole V19 exposes the surface of the third connection segment of the gate electrode of the fourth transistor.
[0335] In an exemplary embodiment, the orthographic projection of the twentieth via hole V20 on the substrate is located within the range of the orthographic projection of the gate electrode of the fifth transistor on the substrate, the third insulating layer in the twentieth via hole V20 is etched away to expose the surface of the gate electrode of the fifth transistor, and the twentieth via hole V20 is configured to connect a subsequently formed light-emitting signal line to the gate electrode of the fifth transistor through the via hole.
[0336] In an exemplary embodiment, the orthographic projection of the twenty-first via V21 on the substrate is located within the range of the orthographic projection of the second plate of the capacitor on the substrate, the twenty-first via V21 exposes the surface of the second plate of the capacitor, and the twenty-first via V21 is configured to connect the second electrode of the subsequently formed third transistor and the second electrode of the first transistor to the second plate of the capacitor through the via.
[0337] In an exemplary embodiment, the orthographic projection of the twenty-second via hole V22 on the substrate is within the range of the orthographic projection of the initial connecting line on the substrate, the third insulating layer in the twenty-second via hole V22 is etched away to expose the surface of the initial connecting line, and the twenty-second via hole V22 is configured to connect a subsequently formed initial signal line to the initial connecting line through the via hole.
[0338] In an exemplary embodiment, a virtual straight line extending along the first direction D1 passes through the ninth via hole V9 and the twenty-second via hole V22. A virtual straight line extending along the first direction D1 passes through the thirteenth via hole V13 and another portion of the twenty-first via hole V21. A virtual straight line extending along the first direction D1 passes through the twelfth via hole V12 and the fourteenth via hole V14.
[0339] In an exemplary embodiment, a virtual straight line extending along the second direction D2 passes through the tenth via hole V10 and another portion of the twenty-first via hole V21. A virtual straight line extending along the second direction D2 passes through the twelfth via hole V12 and the eighteenth via hole V18. A virtual straight line extending along the second direction D2 passes through the eleventh via hole V11, the thirteenth via hole V13, and the fifteenth via hole V15.
[0340] In an exemplary embodiment, in each sub-pixel, the number of the ninth via hole V9 may be at least one, and when the number of the ninth via hole V9 is plural, the plurality of ninth via holes V9 are arranged along the first direction D1.
[0341] In an exemplary embodiment, in each sub-pixel, the number of any via hole among the tenth via hole V10 , the eleventh via hole V11 , the twelfth via hole V12 , the thirteenth via hole V13 , the fourteenth via hole V14 , the fifteenth via hole V15 , and the eighteenth via hole V18 may be one.
[0342] In an exemplary embodiment, in each sub-pixel, the number of the sixteenth via hole V16 may be plural, and the plurality of sixteenth via holes V16 are arranged along the first direction D1.
[0343] In an exemplary embodiment, in each sub-pixel, the number of the seventeenth via hole V17 may be plural, and the plurality of seventeenth via holes V17 are arranged along the first direction D1.
[0344] In an exemplary embodiment, in each sub-pixel, the number of the nineteenth via hole V19 may be plural, and the plurality of nineteenth via holes V19 are arranged along the first direction D1.
[0345] In an exemplary embodiment, in each sub-pixel, the number of the twentieth via hole V20 may be plural, and the plurality of twentieth via holes V20 are arranged along the first direction D1.
[0346] In an exemplary embodiment, the number of the twenty-first via holes V21 may be multiple, and at least part of the twenty-first via holes V21 in the current row of sub-pixels are arranged along the first direction D1 and are located at the second plate of the capacitor close to the boundary of the previous row of sub-pixels, and another part of the twenty-first via holes V21 in the current row of sub-pixels are located at the second plate of the capacitor close to the boundary of the next row of sub-pixels.
[0347] (5) Forming a third conductive layer pattern. In an exemplary embodiment, forming the third conductive layer pattern may include: depositing a third conductive film on the substrate on which the aforementioned pattern is formed, patterning the third conductive film using a patterning process, and forming a third conductive layer pattern on the fourth insulating layer, as shown in FIGS. 18 and 19, where FIG. 18 is a schematic diagram of the third conductive layer pattern in FIGS. 7A and 7B, and FIG. 19 is a schematic diagram of FIGS. 7A and 7B after the third conductive layer pattern is formed. In an exemplary embodiment, the third conductive layer may be referred to as a first source-drain metal (SD1) layer.
[0348] In an exemplary embodiment, as shown in Figures 18 and 19, the third conductive layer pattern may include at least: a first electrode 13 and a second electrode 14 of a first transistor located in each sub-pixel, a second electrode 23 and a second electrode 24 of a second transistor, a second electrode 34 of a third transistor, a first electrode 43 and a second electrode 44 of a fourth transistor, a first electrode 53 of a fifth transistor, a third electrode plate C3 of a capacitor, a first scanning signal line G1, a second scanning signal line G2, a third scanning signal line G3, a reference signal line REF, a light emitting signal line EM, a first power line VDD and an initial signal line INIT.
[0349] In an exemplary embodiment, the reference signal line REF may be in the shape of a line whose main part extends along the first direction D1, and the reference signal line REF connected to the sub-pixel of this row may be located on the side of the third plate C3 of the capacitor of this sub-pixel close to the sub-pixel of the previous row. Each reference signal line REF is provided with a first connection block REF-1, the first end of the first connection block REF-1 is connected to the reference signal line REF, the first connection block REF-1 is located on the side of the reference signal line REF close to the third plate C3 of the capacitor, and extends along the second direction D2, and the positive projection of at least part of the first connection block REF-1 on the substrate is located between the positive projections of the two first signal lines on the substrate. The area where the reference signal line REF overlaps with the active pattern of the second transistor can serve as the first electrode 23 of the second transistor, and the reference signal line REF is electrically connected to the first area of the active pattern of the second transistor through the third via.
[0350] In an exemplary embodiment, the shape of the second scan signal line G2 may be a line shape in which the main part extends along the first direction D1, and the second scan signal line G2 connected to the sub-pixel of the current row may be located between the third electrode C3 of the capacitor of the current sub-pixel and the reference signal line REF connected to the sub-pixel of the current row. The positive projection of the second scan signal line G2 on the substrate at least partially overlaps the positive projection of the second connection section of the gate electrode of the second transistor on the substrate, and the second scan signal line G2 is electrically connected to the gate electrode of the second transistor through the seventeenth via hole.
[0351] In an exemplary embodiment, the shape of the first scan signal line G1 may be a line shape in which the main part extends along the first direction D1, and the first scan signal line G1 connected to the sub-pixel of the present row may be located between the third electrode plate C3 of the capacitor of the present sub-pixel and the second scan signal line G2 connected to the sub-pixel of the present row. The positive projection of the first scan signal line G1 on the substrate at least partially overlaps the positive projection of the third connection segment of the gate electrode of the fourth transistor on the substrate, and the first scan signal line G1 is electrically connected to the gate electrode of the fourth transistor through the nineteenth via hole.
[0352] In an exemplary embodiment, the shape of the light emitting signal line EM may be a line shape whose main part extends along the first direction D1, and the light emitting signal line EM connected to the sub-pixel in this row may be located on a side of the third electrode plate C3 of the capacitor of the sub-pixel away from the first scanning signal line G1 connected to the sub-pixel in this row. The positive projection of the light emitting signal line EM on the substrate at least partially overlaps the positive projection of the gate electrode of the fifth transistor on the substrate, and the light emitting signal line EM is electrically connected to the gate electrode of the fifth transistor through the twentieth via hole.
[0353] In an exemplary embodiment, the shape of the first power line VDD may be a line shape with a main part extending along the first direction D1, and the first power line VDD connected to the sub-pixel of this row may be located on a side of the light-emitting signal line EM connected to the sub-pixel away from the third plate C3 of the capacitor. Each first power line VDD is provided with a second connection block VDD-1, a first end of the second connection block VDD-1 is connected to the first power line VDD, and the second connection block VDD-1 is located on a side of the first power line VDD away from the third plate C3 of the capacitor and extends along the second direction D2. The area where the first power line VDD overlaps with the active pattern of the fifth transistor may serve as the first electrode 53 of the fifth transistor, and the first power line VDD is electrically connected to the first area of the active pattern of the fifth transistor through the fifteenth via.
[0354] In an exemplary embodiment, straight lines extending in the second direction D2 where the second connection blocks VDD- 1 are located are alternately arranged with straight lines extending in the second direction D2 where the first connection wires REF- 1 are located.
[0355] In an exemplary embodiment, the shape of the third scan signal line G3 may be a line shape whose main part extends along the first direction D1, and the third scan signal line G3 connected to the sub-pixels of the current row may be located on a side of the first power line VDD connected to the sub-pixels of the current row away from the third electrode plate C3 of the capacitor of the sub-pixels of the current row. The positive projection of the third scan signal line G3 on the substrate at least partially overlaps the positive projection of the first connection section of the gate electrode of the first transistor on the substrate, and the third scan signal line G3 is electrically connected to the gate electrode of the first transistor through the sixteenth via hole.
[0356] In an exemplary embodiment, the shape of the initial signal line INIT may be a line shape in which the main part extends along the first direction D1, and the initial signal line INIT connected to the sub-pixels of the row may be located on a side of the third scanning signal line G3 connected to the sub-pixels of the row away from the first power line VDD connected to the sub-pixels of the row. The area where the initial signal line INIT overlaps with the active pattern of the first transistor may serve as the first electrode 13 of the first transistor, and the initial signal line INIT is electrically connected to the first area of the active pattern of the first transistor through the ninth via hole, and is connected to the first signal line through the twenty-second via hole.
[0357] In an exemplary embodiment, the second electrode 24 of the second transistor, the second electrode 44 of the fourth transistor and the third electrode plate C3 of the capacitor are an integrated structure connected to each other, and the second electrode 14 of the first transistor, the second electrode 34 of the third transistor and the first electrode 43 of the fourth transistor can be set separately.
[0358] In an exemplary embodiment, the orthographic projections of the integrated structure of the second electrode 24 of the second transistor, the second electrode 44 of the fourth transistor, and the third electrode plate C3 of the capacitor on the substrate overlap at least partially with the orthographic projections of the first electrode plate of the capacitor and the second electrode plate of the capacitor on the substrate, respectively. The orthographic projections of the integrated structure of the second electrode 24 of the second transistor, the second electrode 44 of the fourth transistor, and the third electrode plate C3 of the capacitor on the substrate have a non-overlapping area with the orthographic projection of the first electrode plate of the capacitor on the substrate, and have a non-overlapping area with the orthographic projection of the second electrode plate of the capacitor on the substrate.
[0359] In an exemplary embodiment, the integrated structure of the second electrode 24 of the second transistor, the second electrode 44 of the fourth transistor and the third electrode plate C3 of the capacitor includes: a first electrode connection portion 24A and a second electrode connection portion 24B, the second electrode connection portion 24B is located on the side of the first electrode connection portion 24A close to the first scanning signal line G1, and is arranged at a right angle to the first electrode connection portion 24A. The second electrode connection portion 24B may be in a strip shape and extend along the second direction D2, and the first electrode connection portion 24A may be in a shape of "┌", wherein the width of the portion extending along the second direction D2 of the first electrode connection portion 24A is greater than the width of the portion extending along the first direction D1 of the first electrode connection portion 24A. The second electrode 24 of the second transistor (also the second electrode 44 of the fourth transistor and the third electrode plate C3 of the capacitor) is connected to the second region of the active pattern of the second transistor (also the second region of the active pattern of the fourth transistor) through the twelfth via hole, and is connected to the gate electrode of the third transistor (also the first electrode plate of the capacitor) through the eighteenth via hole.
[0360] In an exemplary embodiment, the second electrode 14 of the first transistor is located on a side of the first electrode connection portion 24A close to the light emitting signal line EM, and is arranged along the second direction D2 with the second electrode connection portion 24B. The second electrode 14 of the first transistor may be in a strip shape and extend along the second direction D2. The second electrode 14 of the first transistor is connected to the second region of the active pattern of the first transistor through the tenth via hole, and is electrically connected to the second plate of the capacitor through the twenty-first via hole.
[0361] In an exemplary embodiment, the length of the second electrode 14 of the first transistor along the first direction D1 is greater than the length of the second electrode connection portion 24B along the first direction D1.
[0362] In an exemplary embodiment, the second electrode 34 of the third transistor is located on a side of the first electrode connection portion 24A close to the first scan signal line G1, and the second electrode 34 of the third transistor of the current column of sub-pixels is located on a side of the second electrode connection portion 24B of the current column of sub-pixels close to the previous column of sub-pixels, and the second electrode 34 of the third transistor and the second electrode connection portion 24B are arranged along the first direction D1. The shape of the second electrode 34 of the third transistor can be "┘"-shaped, and the width of the portion of the second electrode 34 of the third transistor extending along the second direction D2 is greater than the width of the portion of the second electrode 34 of the third transistor extending along the first direction D1. The second electrode 34 of the third transistor is connected to the second region of the active pattern of the third transistor through the thirteenth via hole, and is electrically connected to the second plate of the capacitor through the twenty-first via hole.
[0363] In an exemplary embodiment, the first electrode 43 of the fourth transistor is located between the second electrode 34 of the third transistor and the first scan signal line G1, and is located on a side of the second electrode 34 of the third transistor away from the second electrode connection portion 24B. The shape of the first electrode 43 of the fourth transistor can be a block. The first electrode 43 of the fourth transistor is connected to the first region of the active pattern of the fourth transistor through the fourteenth via hole.
[0364] In an exemplary embodiment, the first scanning signal line G1, the second scanning signal line G2, the third scanning signal line G3, the reference signal line REF, the light emitting signal line EM, the first power line VDD and the initial signal line INIT can be designed with equal width, or can be designed with unequal width, can be straight lines, or can be broken lines, which can not only facilitate the layout of the pixel structure but also reduce the parasitic capacitance between the signal lines, which is not limited in the present disclosure.
[0365] (6) Forming a first planar layer pattern. In an exemplary embodiment, forming the first planar layer pattern may include: coating a first planar film on the substrate on which the aforementioned pattern is formed, patterning the first planar film using a patterning process to form a first planar layer pattern covering the third conductive layer pattern, wherein a plurality of vias are disposed on the first planar layer pattern, as shown in FIG. 20 , which is a schematic diagram of FIG. 7A and FIG. 7B after the first planar layer pattern is formed.
[0366] In an exemplary embodiment, as shown in FIG. 20 , the plurality of via holes in the first planar layer pattern include at least a first via hole V1 and a second via hole V2 located in each sub-pixel, and a third via hole V3 and a fourth via hole V4 located between at least two columns of adjacent sub-pixels.
[0367] In an exemplary embodiment, the orthographic projection of the first via hole V1 on the substrate is located within the range of the orthographic projection of the second electrode of the third transistor on the substrate, the first via hole V1 exposes the surface of the second electrode of the third transistor, and the first via hole V1 is configured to connect a subsequently formed anode connection electrode to the second electrode of the third transistor through the via hole.
[0368] In an exemplary embodiment, an orthographic projection of the first via hole V1 on the substrate does not overlap with orthographic projections of the fifth via hole and the thirteenth via hole on the substrate, and an area of the first via hole V1 is greater than an area of any of the fifth via hole and the thirteenth via hole.
[0369] In an exemplary embodiment, the orthographic projection of the second via V2 on the substrate is located within the range of the orthographic projection of the first electrode of the fourth transistor on the substrate, the second via V2 exposes the surface of the first electrode of the fourth transistor, and the second via V2 is configured to connect a subsequently formed data signal line Data to the first electrode of the fourth transistor through the via.
[0370] In an exemplary embodiment, an orthographic projection of the second via hole V2 on the substrate at least partially overlaps with an orthographic projection of the sixth via hole V6 on the substrate.
[0371] In an exemplary embodiment, the orthographic projection of the third via hole V3 on the substrate is within the range of the orthographic projection of the reference signal line on the substrate, the third via hole V3 exposes the surface of the reference signal line, and the third via hole V3 is configured to connect a subsequently formed third connecting line to the reference signal line through the via hole. Exemplarily, the third via hole V3 exposes a first connecting block of the reference signal line.
[0372] In an exemplary embodiment, the orthographic projection of the fourth via hole V4 on the substrate is within the range of the orthographic projection of the first power line on the substrate, the fourth via hole V4 exposes the surface of the first power line, and the fourth via hole V4 is configured to connect the second connecting line formed subsequently to the first power line through the via hole. Exemplarily, the fourth via hole V4 exposes the second connecting block of the first power line.
[0373] In an exemplary embodiment, an area of the seventeenth via hole may be equal to an area of the eighteenth via hole, and the seventeenth via hole is located on a center line extending along the first direction D1 between two adjacent eighteenth via holes.
[0374] In an exemplary embodiment, the number of any via hole among the first to fourth via holes V1 to V4 may be one.
[0375] (7) Forming a fifth insulating layer pattern. In an exemplary embodiment, forming the fifth insulating layer pattern may include: depositing a fifth insulating film on the substrate on which the aforementioned pattern is formed, patterning the fifth insulating film using a patterning process to form a fifth insulating layer pattern covering the first flat layer pattern, wherein a plurality of vias are provided on the fifth insulating layer, as shown in FIGS. 21 and 22 , where FIG. 21 is a schematic diagram of FIG. 7A after the fifth insulating layer pattern is formed, and FIG. 22 is a schematic diagram of FIG. 7B after the fifth insulating layer pattern is formed.
[0376] In an exemplary embodiment, as shown in FIGS. 21 and 22 , the plurality of via holes of the fifth insulation layer pattern include at least fifth and sixth via holes V5 and V6 located in each sub-pixel and seventh and eighth via holes V7 and V8 located between at least two columns of adjacent sub-pixels.
[0377] In an exemplary embodiment, as shown in FIGS. 21 and 22 , the number of any one of the fifth via hole V5 and the sixth via hole V6 in each sub-pixel is one.
[0378] In an exemplary embodiment, as shown in Figures 21 and 22, the orthographic projection of the fifth via V5 on the substrate is located within the range of the orthographic projection of the second electrode of the third transistor on the substrate, the fifth via V5 exposes the surface of the second electrode of the third transistor, and the fifth via V5 is configured to connect the subsequently formed anode connecting electrode to the second electrode of the third transistor through the via.
[0379] In an exemplary embodiment, as shown in FIG. 21 , the orthographic projection of the fifth via hole V5 on the substrate does not overlap with the orthographic projections of the fifth via hole and the twenty-first via hole on the substrate.
[0380] In an exemplary embodiment, as shown in FIG. 21 , the orthographic projection of a portion of the fifth via V5 on the substrate is located within the range of the orthographic projection of the first via on the substrate, and the orthographic projection of another portion of the fifth via V5 on the substrate is located within the range of the orthographic projection of the first flat layer on the substrate, that is, the fifth via V5 exposes the second electrode of the third transistor and may also expose the first flat layer.
[0381] In an exemplary embodiment, as shown in FIG. 21 , the length of the fifth via hole V5 along the first direction D1 is smaller than that of the first via hole along the first direction D1 , and the length of the fifth via hole V5 along the second direction D2 is smaller than that of the first via hole along the second direction D2 .
[0382] In an exemplary embodiment, as shown in FIG. 21 , the boundaries of the via include: a first boundary, a second boundary, a third boundary and a fourth boundary, wherein the first boundary of the via is a boundary of the via close to the first signal line, the second boundary of the via is a boundary of the via far from the first signal line, the third boundary of the via is a boundary located on one side of the first center line, and the fourth boundary of the via is a boundary located on the other side of the first center line. The via includes: a first via and a fifth via, the first signal line is one of the light-emitting signal line, the first power line, the third scanning signal line and the initial signal line connected to the sub-pixel, the first center line is the center line of the first via extending along the second direction, the third boundary of the first via and the third boundary of the fifth via are located on the same side of the first center line, and the fourth boundary of the first via and the fourth boundary of the fifth via are located on the same side of the first center line. The distance between the orthographic projection of the first boundary of the first via on the substrate and the orthographic projection of the first signal line on the substrate is greater than the distance between the orthographic projection of the first boundary of the fifth via on the substrate and the orthographic projection of the first signal line on the substrate, the distance between the orthographic projection of the second boundary of the first via on the substrate and the orthographic projection of the first signal line on the substrate is greater than the distance between the orthographic projection of the second boundary of the fifth via on the substrate and the orthographic projection of the first signal line on the substrate, the distance between the third boundary of the first via and the first center line is greater than the distance between the orthographic projection of the third boundary of the fifth via on the substrate and the orthographic projection of the first center line on the substrate, and the distance between the fourth boundary of the first via and the first center line is greater than the distance between the orthographic projection of the fourth boundary of the fifth via on the substrate and the orthographic projection of the first center line on the substrate.
[0383] In an exemplary embodiment, as shown in FIG. 21 , within any sub-pixel, the distance between the orthographic projection of the first boundary of the first via on the substrate and the orthographic projection of the first boundary of the fifth via on the substrate is greater than the distance between the orthographic projection of the third boundary of the first via on the substrate and the orthographic projection of the third boundary of the fifth via on the substrate, and is less than the distance between the orthographic projection of the second boundary of the first via on the substrate and the orthographic projection of the second boundary of the fifth via on the substrate.
[0384] In an exemplary embodiment, as shown in Fig. 21, the distance between the orthographic projection of the first boundary of the first via hole on the substrate and the orthographic projection of the first boundary of the fifth via hole on the substrate is about 1 micron to 2 microns. Exemplarily, the distance between the orthographic projection of the first boundary of the first via hole on the substrate and the orthographic projection of the first boundary of the fifth via hole on the substrate is about 1.5 microns.
[0385] In an exemplary embodiment, as shown in FIG. 22 , the orthographic projection of the fifth via hole V5 on the substrate is within the range of the orthographic projection of the first via hole on the substrate.
[0386] In an exemplary embodiment, as shown in FIGS. 21 and 22 , the orthographic projection of the sixth via V6 on the substrate is located within the range of the orthographic projection of the first electrode of the fourth transistor on the substrate, the sixth via V6 exposes the surface of the first electrode of the fourth transistor, and the sixth via V6 is configured to connect a subsequently formed data signal line to the first electrode of the fourth transistor through the via.
[0387] In an exemplary embodiment, as shown in FIG. 21 , the orthographic projection of a portion of the sixth via V6 on the substrate is located within the range of the orthographic projections of the sixth via and the second via on the substrate, and the orthographic projection of another portion of the sixth via V6 on the substrate is located within the range of the orthographic projection of the first flat layer on the substrate, that is, the twentieth via exposes the first electrode of the fourth transistor and also exposes the first flat layer.
[0388] In an exemplary embodiment, as shown in FIG. 21 , the length of the sixth via hole V6 along the first direction D1 is smaller than the length of the second via hole along the first direction D1 , and the length of the sixth via hole V6 along the second direction D2 is smaller than the length of the second via hole along the second direction D2 .
[0389] In an exemplary embodiment, as shown in FIG. 21 , within any sub-pixel, the boundaries of the via hole include: a first boundary, a second boundary, a third boundary, and a fourth boundary, wherein the first boundary of the via hole is a boundary of the via hole close to the first signal line, the second boundary of the via hole is a boundary of the via hole away from the first signal line, the third boundary of the via hole is a boundary located on one side of the second center line, and the fourth boundary of the via hole is a boundary located on the other side of the second center line. The via hole includes: a second via hole and a sixth via hole, the first signal line is one of the light emitting signal line, the first power line, the third scanning signal line, and the initial signal line connected to the sub-pixel, the second center line is a center line of the second via hole extending along the second direction, the third boundary of the second via hole and the third boundary of the sixth via hole are located on the same side of the second center line, and the fourth boundary of the second via hole and the fourth side of the sixth via hole are located on the same side of the second center line. the distance between the orthographic projection of the first boundary of the second via on the substrate and the orthographic projection of the first signal line on the substrate is greater than the distance between the orthographic projection of the first boundary of the sixth via on the substrate and the orthographic projection of the first signal line on the substrate, the distance between the orthographic projection of the second boundary of the second via on the substrate and the orthographic projection of the first signal line on the substrate is greater than the distance between the orthographic projection of the second boundary of the sixth via on the substrate and the orthographic projection of the first signal line on the substrate, the distance between the third boundary of the second via and the second midline is greater than the distance between the orthographic projection of the third boundary of the sixth via on the substrate and the orthographic projection of the second midline on the substrate, and the distance between the fourth boundary of the second via and the second midline is greater than the distance between the orthographic projection of the fourth boundary of the sixth via on the substrate and the orthographic projection of the second midline on the substrate.
[0390] In an exemplary embodiment, as shown in FIG. 21 , within any sub-pixel, the distance between the orthographic projection of the first boundary of the second via on the substrate and the orthographic projection of the first boundary of the sixth via on the substrate is greater than the distance between the orthographic projection of the third boundary of the second via on the substrate and the orthographic projection of the third boundary of the sixth via on the substrate, and is less than the distance between the orthographic projection of the second boundary of the second via on the substrate and the orthographic projection of the second boundary of the sixth via on the substrate.
[0391] In an exemplary embodiment, as shown in Fig. 21, the distance between the orthographic projection of the first boundary of the second via hole on the substrate and the orthographic projection of the first boundary of the sixth via hole on the substrate is about 1 micron to 2 microns. Exemplarily, the distance between the orthographic projection of the first boundary of the second via hole on the substrate and the orthographic projection of the first boundary of the sixth via hole on the substrate may be about 1.5 microns.
[0392] In an exemplary embodiment, as shown in FIG. 22 , the orthographic projection of the sixth via hole V6 on the substrate is within the range of the orthographic projection of the second via hole on the substrate.
[0393] In an exemplary embodiment, as shown in FIG. 21 , the orthographic projection of the seventh via V7 on the substrate is located within the range of the orthographic projection of the reference signal line on the substrate, the seventh via V7 exposes the surface of the reference signal line, and the seventh via V7 is configured to connect a subsequently formed third signal line to the reference signal line through the via.
[0394] In an exemplary embodiment, as shown in FIGS. 21 and 22 , the orthographic projection of the twentieth via hole V21 on the substrate does not overlap with the orthographic projection of the first signal line on the substrate.
[0395] In an exemplary embodiment, as shown in FIG. 21 , the orthographic projection of a portion of the seventh via V7 on the substrate is located within the range of the orthographic projection of the third via on the substrate, and the orthographic projection of another portion of the seventh via V7 on the substrate is located within the range of the orthographic projection of the first flat layer on the substrate, that is, the seventh via V7 exposes the reference signal line and also exposes the first flat layer.
[0396] In an exemplary embodiment, as shown in FIG. 21 , the length of the seventh via hole V7 along the first direction D1 is less than the length of the third via hole along the first direction D1 , and the length of the seventh via hole V7 along the second direction D2 is less than the length of the third via hole along the second direction D2 .
[0397] In an exemplary embodiment, as shown in FIG. 21 , the boundaries of the via include: a first boundary, a second boundary, a third boundary and a fourth boundary, wherein the first boundary of the via is a boundary of the via close to the second signal line, the second boundary of the via is a boundary of the via far from the second signal line, the third boundary of the via is a boundary located on one side of the third center line, and the fourth boundary of the via is a boundary located on the other side of the third center line. The via includes: a third via and a seventh via, the second signal line is a light emitting signal line connected to a sub-pixel connected to a reference signal line exposed by the third via, a first power line, a first scan signal line, a second scan signal line, a third scan signal line, an initial signal line and a light emitting signal line, the third center line is a center line of the third via extending along the second direction, the third boundary of the third via and the third boundary of the seventh via are located on the same side of the third center line, and the third via is connected to the reference signal line exposed by the third via. The fourth boundary of the hole and the fourth boundary of the seventh via are located on the same side of the third center line; the distance between the orthographic projection of the first boundary of the third via on the substrate and the orthographic projection of the second signal line on the substrate is greater than the distance between the orthographic projection of the first boundary of the seventh via on the substrate and the orthographic projection of the second signal line on the substrate, the distance between the orthographic projection of the second boundary of the third via on the substrate and the orthographic projection of the second signal line on the substrate is greater than the distance between the orthographic projection of the second boundary of the seventh via on the substrate and the orthographic projection of the second signal line on the substrate, the distance between the third boundary of the third via and the third center line is greater than the distance between the orthographic projection of the third boundary of the seventh via on the substrate and the orthographic projection of the third center line on the substrate, and the distance between the fourth boundary of the third via and the third center line is greater than the distance between the orthographic projection of the fourth boundary of the seventh via on the substrate and the orthographic projection of the third center line on the substrate.
[0398] In an exemplary embodiment, as shown in FIG. 21 , the distance between the orthographic projection of the first boundary of the third via on the substrate and the orthographic projection of the first boundary of the seventh via on the substrate is greater than the distance between the orthographic projection of the third boundary of the third via on the substrate and the orthographic projection of the third boundary of the seventh via on the substrate, and is less than the distance between the orthographic projection of the second boundary of the third via on the substrate and the orthographic projection of the second boundary of the seventh via on the substrate.
[0399] In an exemplary embodiment, as shown in Fig. 21, the distance between the orthographic projection of the first boundary of the third via hole on the substrate and the orthographic projection of the first boundary of the seventh via hole on the substrate is about 1 micrometer to 2 micrometers. Exemplarily, the distance between the orthographic projection of the first boundary of the third via hole on the substrate and the orthographic projection of the first boundary of the seventh via hole on the substrate may be about 1.5 micrometers.
[0400] In an exemplary embodiment, as shown in FIG. 22 , the orthographic projection of the seventh via hole V7 on the substrate is within the range of the orthographic projection of the third via hole on the substrate.
[0401] In an exemplary embodiment, as shown in FIGS. 21 and 22 , the orthographic projection of the eighth via V8 on the substrate is located within the range of the orthographic projection of the first power line on the substrate, the eighth via V8 exposes the surface of the first power line, and the eighth via V8 is configured to connect a subsequently formed second signal line to the first power line through the via.
[0402] In an exemplary embodiment, as shown in Fig. 21, the orthographic projection of a portion of the eighth via hole V8 on the substrate is located within the range of the orthographic projection of the fourth via hole on the substrate, and the orthographic projection of another portion of the eighth via hole V8 on the substrate is located within the range of the orthographic projection of the first planar layer on the substrate. The eighth via hole V8 exposes the first power line and may also expose the first planar layer.
[0403] In an exemplary embodiment, as shown in FIG. 21 , the length of the eighth via hole V8 along the first direction D1 is less than the length of the fourth via hole along the first direction D1 , and the length of the eighth via hole V8 along the second direction D2 is less than the length of the fourth via hole along the second direction D2 .
[0404] In an exemplary embodiment, as shown in FIG. 21 , the boundaries of the via include: a first boundary, a second boundary, a third boundary and a fourth boundary, wherein the first boundary of the via is a boundary of the via close to the third signal line, the second boundary of the via is a boundary of the via far from the third signal line, the third boundary of the via is a boundary located on one side of the fourth center line, and the fourth boundary of the via is a boundary located on the other side of the fourth center line. The via includes: a fourth via and an eighth via, the third signal line is any one of a third scanning signal line and an initial signal line connected to a sub-pixel connected to the first power line exposed by the fourth via, the fourth center line is a center line of the fourth via extending along the second direction, the third boundary of the fourth via and the third boundary of the eighth via are located on the same side of the fourth center line, and the fourth boundary of the fourth via and the fourth boundary of the eighth via are located on the same side of the fourth center line. on the same side of the fourth center line; the distance between the orthographic projection of the first boundary of the fourth via on the substrate and the orthographic projection of the third signal line on the substrate is greater than the distance between the orthographic projection of the first boundary of the eighth via on the substrate and the orthographic projection of the third signal line on the substrate, the distance between the orthographic projection of the second boundary of the fourth via on the substrate and the orthographic projection of the third signal line on the substrate is greater than the distance between the orthographic projection of the second boundary of the eighth via on the substrate and the orthographic projection of the third signal line on the substrate, the distance between the third boundary of the fourth via and the fourth center line is greater than the distance between the orthographic projection of the third boundary of the eighth via on the substrate and the orthographic projection of the fourth center line on the substrate, and the distance between the fourth boundary of the fourth via and the fourth center line is greater than the distance between the orthographic projection of the fourth boundary of the eighth via on the substrate and the orthographic projection of the fourth center line on the substrate.
[0405] In an exemplary embodiment, as shown in FIG. 21 , the distance between the orthographic projection of the first boundary of the fourth via on the substrate and the orthographic projection of the first boundary of the eighth via on the substrate is greater than the distance between the orthographic projection of the third boundary of the fourth via on the substrate and the orthographic projection of the third boundary of the eighth via on the substrate, and is less than the distance between the orthographic projection of the second boundary of the fourth via on the substrate and the orthographic projection of the second boundary of the eighth via on the substrate.
[0406] In an exemplary embodiment, as shown in Fig. 21, the distance between the orthographic projection of the first boundary of the fourth via hole on the substrate and the orthographic projection of the first boundary of the eighth via hole on the substrate is about 1 micron to 2 microns. Exemplarily, the distance between the orthographic projection of the first boundary of the fourth via hole on the substrate and the orthographic projection of the first boundary of the eighth via hole on the substrate is about 1.5 microns.
[0407] In an exemplary embodiment, as shown in FIG. 22 , the orthographic projection of the eighth via hole V8 on the substrate is located within the range of the orthographic projection of the fourth via hole on the substrate.
[0408] In an exemplary embodiment, as shown in FIG. 22 , the fifth insulating layer pattern in the display substrate provided in FIG. 8 may further include: first to third ventilation holes H1 to H3 located in at least one sub-pixel and fourth and fifth ventilation holes H4 and H5 located between at least two columns of adjacent sub-pixels.
[0409] In an exemplary embodiment, as shown in FIG. 22 , the orthographic projection of any one of the first to fifth ventilation holes H1 to H5 on the substrate partially overlaps with the orthographic projection of the first flat layer on the substrate, that is, any one of the first to fifth ventilation holes H1 to H5 exposes the first flat layer.
[0410] In an exemplary embodiment, as shown in Fig. 22, the distance between the orthographic projection of the first vent hole H1 on the substrate and the orthographic projection of the fifth via hole on the substrate is smaller than the distance between the projection of the first scan signal line on the substrate and the orthographic projection of the fifth via hole on the substrate. That is, the first vent hole H1 is disposed at the periphery of the sleeve hole including the fifth via hole and the first via hole.
[0411] In an exemplary embodiment, as shown in Fig. 22, the cross-section of the first vent hole H1 may be in the shape of a broken line. The orthographic projection of the first vent hole H1 on the substrate at least surrounds at least one side of the orthographic projection of the first via hole on the substrate.
[0412] In an exemplary embodiment, as shown in Figure 22, there is no overlapping area between the orthographic projection of the first air hole H1 on the substrate and the orthographic projection of the active pattern, gate electrode, first pole and second pole of any transistor on the substrate, as well as the reference signal line, first scanning signal line, second scanning signal line, third scanning signal line, initial signal line, first power line, light-emitting signal line and initial connection line.
[0413] In an exemplary embodiment, as shown in Figure 22, the length of the first air hole H1 along the first direction D1 can be greater than the length of the second electrode of the third transistor close to the boundary of the first scan signal line, and the length of the first air hole H1 along the second direction D2 can be greater than the length of the sixth via V6 along the second direction D2.
[0414] In an exemplary embodiment, as shown in Fig. 22, the second ventilation hole H2 and the sixth via hole V6 are arranged along the second direction D2. The distance between the orthographic projection of the sixth via hole V6 on the substrate and the orthographic projection of the first scan signal line on the substrate is greater than the distance between the second ventilation hole H2 and the sixth via hole V6, that is, the second ventilation hole H2 is arranged at the periphery of the sleeve hole including the sixth via hole and the second via hole.
[0415] In an exemplary embodiment, as shown in FIG. 22 , the length of the second ventilation hole H2 along the second direction D2 is greater than the length of the sixth via hole V6 along the second direction D2 , and the length of the second ventilation hole H2 along the first direction D1 is less than the length of the sixth via hole V6 along the first direction D1 .
[0416] In an exemplary embodiment, as shown in Figure 22, there is no overlapping area between the orthographic projection of the second air hole H2 on the substrate and the orthographic projection of the active pattern, gate electrode, first pole and second pole of any transistor on the substrate, as well as the reference signal line, first scanning signal line, second scanning signal line, third scanning signal line, initial signal line, first power line, light-emitting signal line and initial connection line.
[0417] In an exemplary embodiment, as shown in FIG. 22 , the orthographic projection of the third vent hole H3 on the substrate is located between the orthographic projection of the first scan signal line on the substrate and the orthographic projection of the third plate of the capacitor on the substrate.
[0418] In an exemplary embodiment, as shown in Figure 22, there is no overlapping area between the orthographic projection of the third air hole H3 on the substrate and the orthographic projection of the active pattern, gate electrode, first pole and second pole of any transistor on the substrate, as well as the reference signal line, first scanning signal line, second scanning signal line, third scanning signal line, initial signal line, first power line, light-emitting signal line and initial connection line.
[0419] In an exemplary embodiment, as shown in FIG. 22 , in any sub-pixel, the number of any one of the first to third air holes H1 to H3 may be one.
[0420] In an exemplary embodiment, the display substrate includes a plurality of fourth ventilation holes H4 and a plurality of fifth ventilation holes H5.
[0421] In an exemplary embodiment, as shown in Fig. 22, the fourth vent hole H4 and the seventh via hole V7 are arranged along the first direction D1. The distance between the orthographic projection of the fourth vent hole on the substrate and the orthographic projection of the gate electrode of the first transistor of the adjacent sub-pixel on the substrate is smaller than the distance between the orthographic projection of the seventh via hole on the substrate and the orthographic projection of the gate electrode of the first transistor of the adjacent sub-pixel on the substrate, that is, the fourth vent hole H4 is arranged at the periphery of the sleeve hole including the seventh via hole and the third via hole.
[0422] In an exemplary embodiment, as shown in Figure 22, the orthographic projection of the fourth air hole H4 on the substrate at least partially overlaps with the orthographic projections of the initial connection line and the reference signal line on the substrate, and there is no overlapping area with the orthographic projections of the active pattern, gate electrode, first pole and second pole of any transistor and the first scanning signal line, second scanning signal line, third scanning signal line, initial signal line, first power line and light-emitting signal line on the substrate.
[0423] In an exemplary embodiment, as shown in FIG. 22 , the length of the fourth vent hole H4 along the second direction D2 is greater than the length of the third via hole along the second direction D2 , and the length of the fourth vent hole H4 along the first direction D1 is less than the length of the third via hole along the first direction D1 .
[0424] In an exemplary embodiment, as shown in Fig. 22, the fifth vent hole H5 and the eighth via hole V8 are arranged along the first direction D1. The distance between the orthographic projection of the fifth vent hole H5 on the substrate and the orthographic projection of the fourth via hole on the substrate is smaller than the distance between the orthographic projection of the fourth via hole on the substrate and the orthographic projection of the gate electrode of the first transistor on the substrate, that is, the fifth vent hole H5 is arranged at the periphery of the sleeve hole including the eighth via hole and the fourth via hole.
[0425] In an exemplary embodiment, as shown in FIG. 22 , the length of the fifth ventilation hole H5 along the second direction D2 is greater than the length of the fourth via hole along the second direction D2 , and the length of the fifth ventilation hole H5 along the first direction D1 is less than the length of the fourth via hole along the first direction D1 .
[0426] In an exemplary embodiment, as shown in Fig. 22, the orthographic projection of a portion of the fifth vent H5 on the substrate does not overlap with the orthographic projection of any transistor's active pattern, gate electrode, first pole and second pole, reference signal line, first scan signal line, second scan signal line, third scan signal line, initial signal line, first power line, light-emitting signal line, and initial connection line on the substrate. The orthographic projection of another portion of the fifth vent H5 on the substrate at least partially overlaps with the orthographic projection of the first power line on the substrate, and does not overlap with the orthographic projection of any transistor's active pattern, gate electrode, first pole and second pole, reference signal line, first scan signal line, second scan signal line, third scan signal line, initial signal line, light-emitting signal line, and initial connection line on the substrate.
[0427] In an exemplary embodiment, the cross-section of any of the second to fifth ventilation holes may be in the shape of a polygon, such as a rectangle, a square, a pentagon, or a hexagon. The present disclosure is described using a rectangle as an example.
[0428] (8) Forming a fourth conductive layer pattern. In an exemplary embodiment, forming the fourth conductive layer may include: depositing a fourth conductive film on the substrate on which the aforementioned pattern is formed, patterning the fourth conductive film using a patterning process, and forming a fourth conductive layer disposed on the fifth insulating layer, as shown in FIGS. 23, 24, and 25, wherein FIG. 23 is a schematic diagram of the fourth conductive layer pattern in FIGS. 7A and 7B, FIG. 24 is a schematic diagram of FIG. 7A after the fourth conductive layer pattern is formed, and FIG. 25 is a schematic diagram of FIG. 7B after the fourth conductive layer pattern is formed. In an exemplary embodiment, the fourth conductive layer may be referred to as a second source-drain metal (SD2) layer.
[0429] In an exemplary embodiment, as shown in FIGS. 23 to 25 , the fourth conductive layer pattern may include at least an anode connection electrode AL located at each sub-pixel and a data signal line Data, a power connection line L2 , and a reference connection line L3 .
[0430] In an exemplary embodiment, the shape of the data signal line Data may be a line shape in which the main part extends along the second direction D2, and the positive projection of the data signal line Data connected to the sub-pixel in this column on the substrate may be located on the side of the positive projection of the third plate of the capacitor on the substrate close to the sub-pixel in the previous column. Each data signal line Data is provided with a third connection block Data-1, the first end of the third connection block Data-1 is connected to the data signal line Data, the third connection block Data-1 is located on the side of the data signal line Data close to the third plate C3 of the capacitor, and extends along the first direction D1, and the positive projection of the third connection block Data-1 on the substrate at least partially overlaps with the positive projection of the first electrode of the fourth transistor on the substrate. The data signal line Data is electrically connected to the first electrode of the fourth transistor through the sixth via hole and the second via hole in sequence.
[0431] In an exemplary embodiment, the shape of the power connection line L2 can be a line shape in which the main part extends along the second direction D2, and the orthographic projection of the power connection line L2 on the substrate overlaps at least partially with the orthographic projection of the second connection block on the first power line on the substrate. The power connection line L2 is electrically connected to the first power line through the eighth via hole and the fourth via hole in sequence.
[0432] In an exemplary embodiment, the plurality of power connection lines L2 and the plurality of first power lines may form a mesh structure, which may improve display uniformity of the display substrate.
[0433] In an exemplary embodiment, the reference connection line L3 may be in the shape of a line whose main body portion extends along the second direction D2, and the orthographic projection of the reference connection line L3 on the substrate at least partially overlaps the orthographic projection of the first connection block on the reference signal line on the substrate. The reference connection line L3 is electrically connected to the reference signal line through the seventh via hole and the third via hole in sequence.
[0434] In an exemplary embodiment, the orthographic projection of at least a portion of the reference connection line L3 on the substrate is between the orthographic projections of two initial connection lines located between two adjacent sub-pixels on the substrate.
[0435] In an exemplary embodiment, the plurality of reference connection lines L3 and the plurality of reference signal lines may form a mesh structure, which may improve display uniformity of the display substrate.
[0436] In an exemplary embodiment, the anode connection electrode AL may be block-shaped, and its orthographic projection on the substrate at least partially overlaps with the orthographic projection of the second electrode of the third transistor on the substrate. The anode connection electrode AL is sequentially connected to the second electrode of the third transistor through the fifth via hole and the first via hole.
[0437] In an exemplary embodiment, as shown in FIG. 25 , the orthographic projections of the first to fifth vent holes on the substrate do not overlap with the orthographic projections of the power connection line, the reference connection line, the data signal line, and the anode connection electrode on the substrate.
[0438] In an exemplary embodiment, the power connection line L2, the reference connection line L3 and the data signal line Data can be designed with equal width, or can be designed with unequal width, can be a straight line, or can be a broken line, which can not only facilitate the layout of the pixel structure, but also reduce the parasitic capacitance between the signal lines, which is not limited in the present disclosure.
[0439] (9) Forming a sixth insulating layer pattern. In an exemplary embodiment, forming the sixth insulating layer pattern may include: depositing a sixth insulating film on the substrate on which the aforementioned pattern is formed, and patterning the sixth insulating film using a patterning process to form a sixth insulating layer pattern covering the fourth conductive layer pattern, wherein a plurality of vias are provided on the sixth insulating layer, as shown in FIGS. 26 and 27 , wherein FIG. 26 is a schematic diagram of FIG. 7A after the sixth insulating layer pattern is formed, and FIG. 27 is a schematic diagram of FIG. 7B after the sixth insulating layer pattern is formed.
[0440] In an exemplary embodiment, as shown in FIGS. 26 and 27 , the plurality of via holes of the sixth insulation layer pattern includes at least a twenty-third via hole V23 located in each sub-pixel.
[0441] In an exemplary embodiment, the orthographic projection of the twenty-third via hole V23 on the substrate is located within the range of the orthographic projection of the anode connecting electrode on the substrate, the twenty-third via hole V23 exposes the surface of the anode connecting electrode, and the twenty-third via hole V23 is configured to connect the anode of the subsequently formed light-emitting device to the anode connecting electrode through the via hole.
[0442] In an exemplary embodiment, in at least one sub-pixel, an orthographic projection of the twenty-third via hole on the substrate has no overlapping area with orthographic projections of the fifteenth via hole and the nineteenth via hole on the substrate.
[0443] (10) Forming a second planar layer pattern. In an exemplary embodiment, forming the second planar layer pattern may include: coating a second planar film on the substrate on which the aforementioned pattern is formed, patterning the second planar film using a patterning process to form a second planar layer covering the sixth insulating layer pattern, wherein a plurality of vias are disposed on the second planar layer, as shown in FIGS. 28 and 29 , where FIG. 28 is a schematic diagram of FIG. 7A after the second planar layer pattern is formed, and FIG. 29 is a schematic diagram of FIG. 7B after the second planar layer pattern is formed.
[0444] In an exemplary embodiment, as shown in FIGS. 28 and 29 , the plurality of via holes of the second planar layer pattern may include at least a twenty-fourth via hole V24 located at each sub-pixel.
[0445] In an exemplary embodiment, the orthographic projection of the twenty-fourth via hole V24 on the substrate is within the range of the orthographic projection of the anode connecting electrode on the substrate, and the twenty-fourth via hole V24 exposes the surface of the anode connecting electrode, and the twenty-fourth via hole V24 is configured to connect the anode of the subsequently formed light-emitting device to the anode connecting electrode through the via hole.
[0446] In an exemplary embodiment, for any sub-pixel, the orthographic projection of the twenty-third via hole on the substrate is within the range of the orthographic projection of the twenty-fourth via hole V24 on the substrate. The orthographic projection of the twenty-fourth via hole on the substrate partially overlaps with the orthographic projection of part of the sixth insulating layer on the substrate.
[0447] At this point, the drive structure layer is prepared on the substrate. In a plane parallel to the display substrate, the drive structure layer may include a plurality of pixel drive circuits, and the pixel drive circuits are connected to the first scan signal line, the second scan signal line, the third scan signal line, the light emitting signal line, the initial signal line, the reference signal line, the data signal line and the first power supply line. In a plane perpendicular to the display substrate, the drive structure layer may be disposed on the substrate.
[0448] The driving structure layer may include a first insulating layer, a semiconductor layer, a second insulating layer, a first conductive layer, a third insulating layer, a second conductive layer, a fourth insulating layer, a third conductive layer, a first flat layer, a fifth insulating layer, a fourth conductive layer, a sixth insulating layer and a second flat layer, which are sequentially arranged on the substrate. The semiconductor layer may include at least active patterns of the first transistor to the fifth transistor, the first conductive layer may include at least gate electrodes of the first transistor to the fifth transistor, a first plate of a capacitor and an initial connection line, the second conductive layer may include at least a second plate of a capacitor, the third conductive layer may include at least a first scanning signal line, a second scanning signal line, a third scanning signal line, a reference signal line, a light emitting signal line, an initial signal line and a first power line, and first and second electrodes of a plurality of transistors, the initial signal line is connected through an initial connection line, the fourth conductive layer may include at least a data signal line, a power connection line, a reference connection line and an anode connection electrode, the power connection line is connected to the first power line through a via hole, and the reference connection line is connected to the reference signal line through a via hole.
[0449] In an exemplary embodiment, the semiconductor layer may be made of various materials such as amorphous indium gallium zinc oxide (a-IGZO), zinc oxynitride (ZnON), indium zinc tin oxide (IZTO), amorphous silicon (a-Si), polycrystalline silicon (p-Si), sexithiophene, polythiophene, etc., that is, the present disclosure is applicable to transistors manufactured based on oxide technology, silicon technology, and organic technology. Exemplarily, the semiconductor layer may be made of polycrystalline silicon.
[0450] In an exemplary embodiment, the thickness of the semiconductor layer may be approximately 430 angstroms to 520 angstroms. Exemplarily, the thickness of the semiconductor layer may be approximately 470 angstroms.
[0451] In an exemplary embodiment, the first conductive layer, the second conductive layer, the third conductive layer and the fourth conductive layer can be made of metal materials, such as any one or more of silver (Ag), copper (Cu), aluminum (Al) and molybdenum (Mo), or alloy materials of the above metals, such as aluminum neodymium alloy (AlNd) or molybdenum niobium alloy (MoNb), and can be a single-layer structure, or a multi-layer composite structure, such as Mo / Cu / Mo, or Ti / Al / Ti, etc.
[0452] In an exemplary embodiment, the resistivity of any film layer of the third conductive layer and the fourth conductive layer is less than the resistivity of any film layer of the first conductive layer and the second conductive layer. Exemplarily, the first conductive layer and the second conductive layer may be made of molybdenum, and the third conductive layer and the fourth conductive layer may be made of Ti / Al / Ti.
[0453] In an exemplary embodiment, the thickness of the first conductive layer may be approximately 2500 angstroms to 3000 angstroms, and exemplary, the thickness of the first conductive layer may be approximately 2800 angstroms.
[0454] In an exemplary embodiment, the thickness of the second conductive layer may be approximately 2500 angstroms to 3000 angstroms, and exemplary, the thickness of the second conductive layer may be approximately 2800 angstroms.
[0455] In an exemplary embodiment, the third conductive layer and the fourth conductive layer respectively include: a first sub-conductive layer, a second sub-conductive layer and a third sub-conductive layer sequentially stacked on the substrate, the first sub-conductive layer and the third sub-conductive layer can be made of Ti, and the second sub-conductive layer can be made of Al. Exemplarily, the thickness of the first sub-conductive layer can be about 400 angstroms to 600 angstroms, and can be about 500 angstroms, the thickness of the second sub-conductive layer can be about 6000 angstroms to 7000 angstroms, and can be 6500 angstroms, and the thickness of the third sub-conductive layer can be about 200 angstroms to 400 angstroms, and can be about 300 angstroms.
[0456] In an exemplary embodiment, the first insulating layer, the second insulating layer, the third insulating layer, the fourth insulating layer, the fifth insulating layer and the sixth insulating layer may be made of any one or more of silicon oxide (SiOx), silicon nitride (SiNx) and silicon oxynitride (SiON), and may be a single layer, a multilayer or a composite layer. The first insulating layer may be called a buffer layer, the second insulating layer and the third insulating layer may be called a gate insulating (GI) layer, the fourth insulating layer may be called an interlayer insulating (ILD) layer, and the fifth insulating layer may be called a passivation (PVX) layer. Exemplarily, the first insulating layer may be made of
[0457] In an exemplary embodiment, when the first insulating layer is made of silicon oxide (SiOx), the thickness of the first insulating layer may be about 2500 angstroms to 3500 angstroms, and exemplarily, the thickness of the first insulating layer may be about 3000 angstroms. When the first insulating layer is made of silicon nitride (SiNx), the thickness of the first insulating layer may be about 500 angstroms to 1500 angstroms, and exemplarily, the thickness of the first insulating layer may be about 1000 angstroms.
[0458] In an exemplary embodiment, when the second insulating layer is made of silicon oxide (SiOx), the thickness of the second insulating layer may be about 700 angstroms to 900 angstroms, and exemplarily, the thickness of the second insulating layer may be about 800 angstroms. When the second insulating layer is made of silicon nitride (SiNx), the thickness of the second insulating layer may be about 350 angstroms to 450 angstroms, and exemplarily, the thickness of the second insulating layer may be about 400 angstroms.
[0459] In an exemplary embodiment, the third insulating layer may be made of silicon nitride (SiNx), and the thickness of the third insulating layer may be approximately 2500 angstroms to 3000 angstroms. Exemplarily, the thickness of the third insulating layer may be approximately 2800 angstroms.
[0460] In an exemplary embodiment, when the fourth insulating layer is made of silicon oxide, the thickness of the fourth insulating layer may be approximately 1500 angstroms to 2500 angstroms, and exemplary, the thickness of the fourth insulating layer may be approximately 2000 angstroms. When the fourth insulating layer is made of silicon nitride (SiNx), the thickness of the fourth insulating layer may be approximately 2500 angstroms to 3500 angstroms, and exemplary, the thickness of the fourth insulating layer may be approximately 3000 angstroms.
[0461] In an exemplary embodiment, the fifth insulating layer may be made of silicon nitride (SiNx) and may have a thickness of about 1200 angstroms to about 1600 angstroms. Exemplarily, the fifth insulating layer may have a thickness of about 1400 angstroms.
[0462] In an exemplary embodiment, the sixth insulating layer may be made of silicon nitride (SiNx) and may have a thickness of about 1200 angstroms to about 1600 angstroms. Exemplarily, the sixth insulating layer may have a thickness of about 1400 angstroms.
[0463] In an exemplary embodiment, the first planarization layer and the second planarization layer may employ an organic material such as a resin, for example, polyimide, or the like.
[0464] In an exemplary embodiment, the thickness of the first planarization layer may be approximately 18,000 angstroms to 22,000 angstroms, and illustratively, the thickness of the first planarization layer may be approximately 20,000 angstroms.
[0465] In an exemplary embodiment, the thickness of the second planarization layer may be approximately 20,000 angstroms to 40,000 angstroms. For example, the thickness of the second planarization layer may be approximately 20,000 angstroms.
[0466] In an exemplary embodiment, after the driving structure layer is prepared, a light emitting structure layer is prepared on the driving structure layer. The preparation process of the light emitting structure layer may include the following operations.
[0467] (11) Forming a fifth conductive layer pattern. In an exemplary embodiment, forming the fifth conductive layer pattern may include: depositing a fifth conductive film on the substrate on which the aforementioned pattern is formed, and patterning the fifth conductive film using a patterning process to form a fifth conductive layer disposed on the second flat layer, as shown in FIGS. 30 to 32 , where FIG. 30 is a schematic diagram of the fifth conductive layer pattern in FIGS. 7A and 7B , FIG. 31 is a schematic diagram of FIG. 7A after the fifth conductive layer pattern is formed, and FIG. 32 is a schematic diagram of FIG. 7B after the fifth conductive layer pattern is formed.
[0468] In an exemplary embodiment, the fifth conductive layer pattern includes at least the first electrode 20 located in each sub-pixel.
[0469] In an exemplary embodiment, the shape of the first electrode 20 may be a rectangle, or may be other shapes, which is not limited in the present disclosure.
[0470] In an exemplary embodiment, for any sub-pixel, the anode 20 of the light emitting device is connected to the anode connection electrode through the twenty-fourth via hole and the twenty-third via hole in sequence.
[0471] In an exemplary embodiment, at least a portion of the orthographic projection of any one of the anode connection electrode, the first plate of the capacitor, the second plate of the capacitor and the third plate of the capacitor, the gate electrode of the fifth transistor and the gate electrode of the first transistor on the substrate is within the range of the orthographic projection of the anode on the substrate.
[0472] In an exemplary embodiment, the plurality of anodes may include a first anode of a red light emitting device, a second anode of a blue light emitting device, and a third anode of a green light emitting device. The first anode may be located at a red sub-pixel emitting red light, the second anode may be located at a blue sub-pixel emitting blue light, and the third anode may be located at a green sub-pixel emitting green light.
[0473] (12) Forming a first pixel definition layer pattern. In an exemplary embodiment, forming the first pixel definition layer pattern may include: coating a first pixel definition film on the substrate on which the aforementioned pattern is formed, patterning the first pixel definition film using a patterning process to form a first pixel definition layer pattern, wherein the first pixel definition layer pattern includes a plurality of vias, as shown in FIGS. 33 and 34 , where FIG. 33 is a schematic diagram of FIG. 7A after the first pixel definition layer pattern is formed, and FIG. 34 is a schematic diagram of FIG. 7B after the first pixel definition layer pattern is formed.
[0474] In an exemplary embodiment, as shown in FIGS. 33 and 34 , the first pixel definition layer pattern may include a twenty-fifth via hole V25 located at each sub-pixel.
[0475] In an exemplary embodiment, the orthographic projections of the twenty-fifth via hole V25 on the substrate are respectively within the range of the orthographic projections of the anode and a portion of the second planar layer on the substrate, the twenty-fifth via hole V25 exposes the surface of the anode, and the twenty-fifth via hole V25 is configured to connect a subsequently formed organic light-emitting layer to the anode through the via hole.
[0476] In an exemplary embodiment, a distance between an orthographic projection of a boundary of the twenty-fifth via V25 close to the reference signal line on the substrate and an orthographic projection of the reference signal line on the substrate is smaller than a distance between an orthographic projection of the anode on the substrate and an orthographic projection of the reference signal line on the substrate.
[0477] In an exemplary embodiment, the length of the twenty-fifth via hole V25 along the first direction D1 may be greater than or equal to the length of the anode along the first direction D1. The length of the twenty-fifth via hole V25 along the second direction D2 may be less than or equal to the length of the anode along the second direction D2.
[0478] (13) Forming a second pixel definition layer pattern. In an exemplary embodiment, forming the second pixel definition layer pattern may include: coating a second pixel definition film on the substrate on which the aforementioned pattern is formed, patterning the second pixel definition film using a patterning process to form a second pixel definition layer pattern, wherein the second pixel definition layer pattern includes a plurality of vias, as shown in FIGS. 35 and 36 , where FIG. 35 is a schematic diagram of FIG. 7 after the second pixel definition layer pattern is formed, and FIG. 36 is a schematic diagram of FIG. 8 after the second pixel definition layer pattern is formed.
[0479] In an exemplary embodiment, as shown in FIGS. 35 and 36 , the second pixel definition layer pattern may include a twenty-sixth via hole V26 located at each sub-pixel.
[0480] In an exemplary embodiment, the orthographic projections of the twenty-sixth via hole V26 on the substrate are respectively located within the range of the orthographic projections of the anode and a portion of the twenty-fifth via hole on the substrate, the twenty-sixth via hole V26 exposes the surface of the anode, and the twenty-sixth via hole V26 is configured to connect a subsequently formed organic light-emitting layer to the anode through the via hole.
[0481] In an exemplary embodiment, the distance between the orthographic projection of the boundary of the twenty-sixth via V26 close to the reference signal line on the substrate and the orthographic projection of the reference signal line on the substrate may be equal to the distance between the orthographic projection of the boundary of the twenty-fifth via V26 close to the reference signal line on the substrate and the orthographic projection of the reference signal line on the substrate.
[0482] In an exemplary embodiment, the length of the twenty-sixth via hole V26 along the first direction D1 may be less than the length of the anode along the first direction D1. The length of the twenty-sixth via hole V26 along the second direction D2 may be greater than the length of the anode along the second direction D2.
[0483] In an exemplary embodiment, the fifth conductive layer may have a single-layer structure, such as indium tin oxide ITO or indium zinc oxide IZO, or may have a multi-layer composite structure, such as ITO / Ag / ITO.
[0484] In an exemplary embodiment, the fifth conductive layer may include a first anode layer, a second anode layer, and a third anode layer stacked sequentially on the substrate, the first anode layer and the third anode layer may be made of ITO, and the second anode layer may be made of Ag. Exemplarily, the thickness of the first anode layer and the third anode layer may be about 50 angstroms to 100 angstroms, exemplary, the thickness of the first anode layer may be about 70 angstroms, the thickness of the second anode layer may be about 800 angstroms to 1200 angstroms, and exemplary, the thickness of the second anode layer may be about 1000 angstroms.
[0485] In an exemplary embodiment, materials of the first pixel definition layer and the second pixel definition layer may include polyimide, acryl, polyethylene terephthalate, or the like.
[0486] In an exemplary embodiment, the transmittance of the first pixel definition layer is less than the transmittance of the second pixel definition layer.
[0487] In an exemplary embodiment, the thickness of the first pixel definition layer may be approximately 16,000 angstroms to 20,000 angstroms, and illustratively, the thickness of the first pixel definition layer may be approximately 18,000 angstroms.
[0488] In an exemplary embodiment, the thickness of the second pixel definition layer may be approximately 13,000 angstroms to 17,000 angstroms, and illustratively, the thickness of the second pixel definition layer may be approximately 15,000 angstroms.
[0489] In an exemplary embodiment, the subsequent preparation process may include: first using an evaporation or inkjet printing process to form a light-emitting material layer, wherein the light-emitting material layer may at least include: an organic light-emitting layer, the organic light-emitting layer located in the same sub-pixel may be connected to the anode through the twenty-sixth via and the twenty-fifth via in sequence, and then a sixth conductive layer pattern is formed on the organic light-emitting layer, wherein the sixth conductive layer pattern may include at least a second electrode, and then a packaging structure layer is formed, the packaging structure layer may include a stacked first packaging layer, a second packaging layer and a third packaging layer, the first packaging layer and the third packaging layer may be made of inorganic materials, the second packaging layer may be made of organic materials, and the second packaging layer is arranged between the first packaging layer and the third packaging layer, which can ensure that external water vapor cannot enter the light-emitting structure layer.
[0490] From the structure and preparation process of the display substrate described above, it can be seen that the display substrate provided by the present disclosure forms a degassing channel by providing a via hole exposing the first flat layer on the fifth insulating layer, so that the residual water vapor in the first flat layer in the subsequent manufacturing process can be released, thereby improving the reliability of the display substrate and ensuring the display effect of the display product. The preparation process of the display substrate of the exemplary embodiment of the present disclosure can be well compatible with the existing preparation process, the process is simple to realize, easy to implement, high in production efficiency, low in production cost, and high in yield rate.
[0491] The structure and preparation process shown in the above disclosure are only an exemplary description. In the exemplary implementation, the corresponding structure can be changed and the patterning process can be increased or decreased according to actual needs. For example, some overlapping vias can be set in sub-pixels away from the first center line to increase the spacing between adjacent overlapping vias, reduce mutual interference, and ensure that the display screen does not have crosstalk. The present disclosure does not limit this.
[0492] In an exemplary embodiment, the display substrate of the present disclosure may be applied to other display devices having a pixel driving circuit, such as a quantum dot display, etc., which is not limited in the present disclosure.
[0493] An embodiment of the present disclosure further provides a display device, which includes a display substrate.
[0494] The display substrate is the display substrate provided by any of the aforementioned embodiments, and the implementation principle and effect are similar, which will not be repeated here.
[0495] In an exemplary embodiment, the display device may be any product or component with a display function, such as a mobile phone, a tablet computer, a television, a monitor, a laptop computer, a digital photo frame, a navigator, etc., but the embodiments of the present invention are not limited thereto.
[0496] The drawings of the embodiments of the present disclosure only involve the structures involved in the embodiments of the present disclosure, and other structures may refer to the general design.
[0497] For the sake of clarity, in the drawings used to describe the embodiments of the present disclosure, the thickness and size of the layer or microstructure are exaggerated. It will be understood that when an element such as a layer, film, region, or substrate is referred to as being "on" or "under" another element, the element may be "directly" "on" or "under" the other element, or there may be intermediate elements.
[0498] Although the embodiments disclosed in the present disclosure are as above, the contents described are only embodiments adopted to facilitate understanding of the present disclosure and are not intended to limit the present disclosure. Any technician in the field to which the present disclosure belongs can make any modifications and changes in the form and details of implementation without departing from the spirit and scope disclosed in the present disclosure, but the scope of patent protection of the present disclosure shall still be subject to the scope defined in the attached claims.
Claims
A display substrate is provided with a plurality of sub-pixels arranged in an array, at least one sub-pixel comprising: A pixel driving circuit, the display substrate comprises: a substrate and a driving structure layer arranged on the substrate, the pixel driving circuit is arranged on the driving structure layer; the driving structure layer at least comprises: a first insulating layer, a semiconductor layer, a second insulating layer, a first conductive layer, a third insulating layer, a second conductive layer, a fourth insulating layer, a third conductive layer, a first flat layer, a fifth insulating layer and a fourth conductive layer stacked in sequence on the substrate; a plurality of via holes are arranged on the fifth insulating layer, at least one via hole on the fifth insulating layer exposes the first flat layer; the thickness of the first flat layer is greater than the thickness of the fifth insulating layer. The display substrate according to claim 1, wherein: The pixel driving circuit includes: a first transistor to a fifth transistor, and the driving structure layer also includes: a first scanning signal line, a second scanning signal line, a third scanning signal line, an initial signal line, a data signal line, a light-emitting signal line, a reference signal line and a first power line, the first transistor is electrically connected to the third scanning signal line and the initial signal line respectively, the second transistor is electrically connected to the second scanning signal line and the reference signal line respectively, the fourth transistor is electrically connected to the first scanning signal line and the data signal line respectively, and the fifth transistor is electrically connected to the light-emitting signal line and the first power line respectively; any signal line among the first scanning signal line, the second scanning signal line, the third scanning signal line, the initial signal line, the light-emitting signal line, the reference signal line and the first power line at least partially extends along the first direction, the data signal line at least partially extends along the second direction, and the first direction intersects with the second direction; any sub The reference signal line, the second scanning signal line, the first scanning signal line, the light-emitting signal line, the first power line, the third scanning signal line and the initial signal line connected to the pixel are arranged in sequence along the second direction; the first flat layer is provided with a first via hole to a fourth via hole, wherein the orthographic projection of the first via hole on the substrate is located within the range of the orthographic projection of the second electrode of the third transistor on the substrate, and the surface of the second electrode of the third transistor is exposed, the orthographic projection of the second via hole on the substrate is located within the range of the orthographic projection of the first electrode of the fourth transistor on the substrate, and the surface of the first electrode of the fourth transistor is exposed, the orthographic projection of the third via hole on the substrate is located within the range of the orthographic projection of the reference signal line on the substrate, and the surface of the reference signal line is exposed, the orthographic projection of the fourth via hole on the substrate is located within the range of the orthographic projection of the first power line on the substrate, and the surface of the first power line is exposed; the third via hole is located on the midline of two adjacent fourth via holes extending along the second direction. The display substrate according to claim 2, wherein: The fifth insulating layer is provided with fifth to eighth via holes, wherein the orthographic projection of the fifth via hole on the substrate is located within the range of the orthographic projection of the first via hole and the first flat layer on the substrate, the orthographic projection of the sixth via hole on the substrate is located within the range of the orthographic projection of the second via hole and the first flat layer on the substrate, the orthographic projection of the seventh via hole on the substrate is located within the range of the orthographic projection of the third via hole and the first flat layer on the substrate, and the orthographic projection of the eighth via hole on the substrate is located within the range of the orthographic projection of the fourth via hole and the first flat layer on the substrate. The display substrate according to claim 3, wherein: The length of the fifth via along the first direction is less than the length of the first via along the first direction, and the length of the fifth via along the second direction is less than the length of the first via along the second direction; the length of the sixth via along the first direction is less than the length of the second via along the first direction, and the length of the sixth via along the second direction is less than the length of the second via along the second direction; The length of the seventh via hole along the first direction is less than the length of the third via hole along the first direction, and the length of the seventh via hole along the second direction is less than the length of the third via hole along the second direction; The length of the eighth via hole along the first direction is shorter than the length of the fourth via hole along the first direction, and the length of the eighth via hole along the second direction is shorter than the length along the second direction. The display substrate according to claim 4, wherein: In any sub-pixel, the boundaries of the via hole include: a first boundary, a second boundary, a third boundary and a fourth boundary, wherein the first boundary of the via hole is a boundary of the via hole close to the first signal line, the second boundary of the via hole is a boundary of the via hole far from the first signal line, the third boundary of the via hole is a boundary located on one side of the first center line, and the fourth boundary of the via hole is a boundary located on the other side of the first center line. The via hole includes: a first via hole and a fifth via hole, the first signal line is one of the light emitting signal line, the first power line, the third scanning signal line and the initial signal line connected to the sub-pixel, the first center line is the center line of the first via hole extending along the second direction, the third boundary of the first via hole and the third boundary of the fifth via hole are located on the same side of the first center line, and the fourth boundary of the first via hole and the fifth via hole are located on the same side of the first center line. the fourth boundary of the first via is located on the same side of the first center line; the distance between the orthographic projection of the first boundary of the first via on the substrate and the orthographic projection of the first signal line on the substrate is greater than the distance between the orthographic projection of the first boundary of the fifth via on the substrate and the orthographic projection of the first signal line on the substrate, the distance between the orthographic projection of the second boundary of the first via on the substrate and the orthographic projection of the first signal line on the substrate is greater than the distance between the orthographic projection of the second boundary of the fifth via on the substrate and the orthographic projection of the first signal line on the substrate, the distance between the third boundary of the first via and the first center line is greater than the distance between the orthographic projection of the third boundary of the fifth via on the substrate and the orthographic projection of the first center line on the substrate, and the distance between the fourth boundary of the first via and the first center line is greater than the distance between the orthographic projection of the fourth boundary of the fifth via on the substrate and the orthographic projection of the first center line on the substrate. The display substrate according to claim 5, wherein: In any sub-pixel, the distance between the orthographic projection of the first boundary of the first via on the substrate and the orthographic projection of the first boundary of the fifth via on the substrate is greater than the distance between the orthographic projection of the third boundary of the first via on the substrate and the orthographic projection of the third boundary of the fifth via on the substrate, and is smaller than the distance between the orthographic projection of the second boundary of the first via on the substrate and the orthographic projection of the second boundary of the fifth via on the substrate; the distance between the orthographic projection of the first boundary of the first via on the substrate and the orthographic projection of the first boundary of the fifth via on the substrate is approximately 1 micron to 2 microns. The display substrate according to claim 4, wherein: In any sub-pixel, the boundaries of the via hole include: a first boundary, a second boundary, a third boundary and a fourth boundary, wherein the first boundary of the via hole is a boundary of the via hole close to the first signal line, the second boundary of the via hole is a boundary of the via hole away from the first signal line, the third boundary of the via hole is a boundary located on one side of the second center line, and the fourth boundary of the via hole is a boundary located on the other side of the second center line. The via hole includes: a second via hole and a sixth via hole, the first signal line is one of the light emitting signal line, the first power line, the third scanning signal line and the initial signal line connected to the sub-pixel, the second center line is the center line of the second via hole extending along the second direction, the third boundary of the second via hole and the third boundary of the sixth via hole are located on the same side of the second center line, and the fourth boundary of the second via hole and the sixth via hole are located on the same side of the second center line. the fourth boundary of the second via is located on the same side of the second center line; the distance between the orthographic projection of the first boundary of the second via on the substrate and the orthographic projection of the first signal line on the substrate is greater than the distance between the orthographic projection of the first boundary of the sixth via on the substrate and the orthographic projection of the first signal line on the substrate, the distance between the orthographic projection of the second boundary of the second via on the substrate and the orthographic projection of the first signal line on the substrate is greater than the distance between the orthographic projection of the second boundary of the sixth via on the substrate and the orthographic projection of the first signal line on the substrate, the distance between the third boundary of the second via and the second center line is greater than the distance between the orthographic projection of the third boundary of the sixth via on the substrate and the orthographic projection of the second center line on the substrate, and the distance between the fourth boundary of the second via and the second center line is greater than the distance between the orthographic projection of the fourth boundary of the sixth via on the substrate and the orthographic projection of the second center line on the substrate. The display substrate according to claim 7, wherein: In any sub-pixel, a distance between an orthographic projection of a first boundary of the second via hole on the substrate and an orthographic projection of a first boundary of the sixth via hole on the substrate is greater than a distance between an orthographic projection of a third boundary of the second via hole on the substrate and an orthographic projection of a third boundary of the sixth via hole on the substrate, and is less than a distance between an orthographic projection of a second boundary of the second via hole on the substrate and an orthographic projection of a second boundary of the sixth via hole on the substrate; A distance between an orthographic projection of a first boundary of the second via hole on the substrate and an orthographic projection of a first boundary of the sixth via hole on the substrate is approximately 1 micrometer to 2 micrometers. The display substrate according to claim 4, wherein: The boundaries of the via hole include: a first boundary, a second boundary, a third boundary and a fourth boundary, wherein the first boundary of the via hole is a boundary of the via hole close to the second signal line, the second boundary of the via hole is a boundary of the via hole far from the second signal line, the third boundary of the via hole is a boundary located on one side of a third center line, and the fourth boundary of the via hole is a boundary located on the other side of the third center line. The via hole includes: a third via hole and a seventh via hole, the second signal line is a light emitting signal line connected to a sub-pixel connected to a reference signal line exposed by the third via hole, a first power line, a first scanning signal line, a second scanning signal line, a third scanning signal line, an initial signal line and a light emitting signal line, the third center line is a center line of the third via hole extending along the second direction, the third boundary of the third via hole and the third boundary of the seventh via hole are located on the same side of the third center line, and the The fourth boundary of the third via and the fourth boundary of the seventh via are located on the same side of the third center line; the distance between the orthographic projection of the first boundary of the third via on the substrate and the orthographic projection of the second signal line on the substrate is greater than the distance between the orthographic projection of the first boundary of the seventh via on the substrate and the orthographic projection of the second signal line on the substrate, the distance between the orthographic projection of the second boundary of the third via on the substrate and the orthographic projection of the second signal line on the substrate is greater than the distance between the orthographic projection of the second boundary of the seventh via on the substrate and the orthographic projection of the second signal line on the substrate, the distance between the third boundary of the third via and the third center line is greater than the distance between the orthographic projection of the third boundary of the seventh via on the substrate and the orthographic projection of the third center line on the substrate, and the distance between the fourth boundary of the third via and the third center line is greater than the distance between the orthographic projection of the fourth boundary of the seventh via on the substrate and the orthographic projection of the third center line on the substrate. The display substrate according to claim 9, wherein: The distance between the orthographic projection of the first boundary of the third via hole on the substrate and the orthographic projection of the first boundary of the seventh via hole on the substrate is greater than the distance between the orthographic projection of the third boundary of the third via hole on the substrate and the orthographic projection of the third boundary of the seventh via hole on the substrate, and is less than the distance between the orthographic projection of the second boundary of the third via hole on the substrate and the orthographic projection of the second boundary of the seventh via hole on the substrate; A distance between an orthographic projection of a first boundary of the third via hole on the substrate and an orthographic projection of a first boundary of the seventh via hole on the substrate is approximately 1 micrometer to 2 micrometers. The display substrate according to claim 4, wherein: The boundaries of the via hole include: a first boundary, a second boundary, a third boundary and a fourth boundary, wherein the first boundary of the via hole is a boundary of the via hole close to the third signal line, the second boundary of the via hole is a boundary of the via hole far from the third signal line, the third boundary of the via hole is a boundary located on one side of a fourth center line, and the fourth boundary of the via hole is a boundary located on the other side of the fourth center line. The via hole includes: a fourth via hole and an eighth via hole, the third signal line is any one of a third scanning signal line and an initial signal line connected to a sub-pixel connected to a first power line exposed by the fourth via hole, the fourth center line is a center line of the fourth via hole extending along the second direction, the third boundary of the fourth via hole and the third boundary of the eighth via hole are located on the same side of the fourth center line, and the fourth boundary of the fourth via hole and the first boundary of the eighth via hole are located on the same side of the fourth center line. The four boundaries are located on the same side of the fourth center line; the distance between the orthographic projection of the first boundary of the fourth via on the substrate and the orthographic projection of the third signal line on the substrate is greater than the distance between the orthographic projection of the first boundary of the eighth via on the substrate and the orthographic projection of the third signal line on the substrate, the distance between the orthographic projection of the second boundary of the fourth via on the substrate and the orthographic projection of the third signal line on the substrate is greater than the distance between the orthographic projection of the second boundary of the eighth via on the substrate and the orthographic projection of the third signal line on the substrate, the distance between the third boundary of the fourth via and the fourth center line is greater than the distance between the orthographic projection of the third boundary of the eighth via on the substrate and the orthographic projection of the fourth center line on the substrate, and the distance between the fourth boundary of the fourth via and the fourth center line is greater than the distance between the orthographic projection of the fourth boundary of the eighth via on the substrate and the orthographic projection of the fourth center line on the substrate. The display substrate according to claim 11, wherein The distance between the orthographic projection of the first boundary of the fourth via on the substrate and the orthographic projection of the first boundary of the eighth via on the substrate is greater than the distance between the orthographic projection of the third boundary of the fourth via on the substrate and the orthographic projection of the third boundary of the eighth via on the substrate, and is smaller than the distance between the orthographic projection of the second boundary of the fourth via on the substrate and the orthographic projection of the second boundary of the eighth via on the substrate; the distance between the orthographic projection of the first boundary of the fourth via on the substrate and the orthographic projection of the first boundary of the eighth via on the substrate is approximately 1 micron to 2 microns. The display substrate according to claim 2, wherein: The fifth insulating layer is provided with fifth to eighth via holes, wherein the orthographic projection of the fifth via hole on the substrate is within the range of the orthographic projection of the first via hole on the substrate, the orthographic projection of the sixth via hole on the substrate is within the range of the orthographic projection of the second via hole on the substrate, the orthographic projection of the seventh via hole on the substrate is within the range of the orthographic projection of the third via hole on the substrate, and the orthographic projection of the eighth via hole on the substrate is within the range of the orthographic projection of the fourth via hole on the substrate. The display substrate according to claim 13, wherein: The fifth insulating layer is also provided with any one of the first and second ventilation holes; the orthographic projections of the first and second ventilation holes on the substrate partially overlap with the orthographic projections of the first flat layer on the substrate, and the first flat layer is exposed; There is no overlapping area between the orthographic projections of the first air hole and the second air hole on the substrate and the orthographic projections of the active pattern, gate electrode, first pole and second pole of any transistor, as well as the reference signal line, first scanning signal line, second scanning signal line, third scanning signal line, initial signal line, first power supply line and light-emitting signal line on the substrate. The display substrate according to claim 14, wherein: The length of the first ventilation hole along the first direction is greater than the length of the boundary of the second electrode of the third transistor close to the first scanning signal line, and the length of the first ventilation hole along the second direction is greater than the length of the fifth via hole along the second direction; The orthographic projection of the first vent hole on the substrate is at least arranged around at least one side of the orthographic projection of the first via hole on the substrate; The distance between the orthographic projection of the first vent hole on the substrate and the orthographic projection of the fifth via hole on the substrate is smaller than the distance between the orthographic projection of the first scan signal line on the substrate and the orthographic projection of the fifth via hole on the substrate. The display substrate according to claim 14, wherein: The length of the second air hole along the second direction is greater than the length of the sixth via hole along the second direction, and the length of the second air hole along the first direction is less than the length of the sixth via hole along the first direction; the second air hole and the sixth via hole are arranged along the second direction, and the distance between the orthographic projection of the sixth via hole on the substrate and the orthographic projection of the first scanning signal line on the substrate is greater than the distance between the second air hole and the sixth via hole. The display substrate according to claim 13 or 14, wherein: A third air hole is also provided on the fifth insulating layer; the orthographic projection of the third air hole on the substrate partially overlaps with the orthographic projection of the first flat layer on the substrate, and exposes the first flat layer; the orthographic projection of the third air hole on the substrate is located between the orthographic projection of the first scanning signal line on the substrate and the orthographic projection of the light-emitting signal line on the substrate, and there is no overlapping area with the active pattern, gate electrode, first pole and second pole of any transistor, and the orthographic projection of the reference signal line, first scanning signal line, second scanning signal line, third scanning signal line, initial signal line, first power line and light-emitting signal line on the substrate. The display substrate according to any one of claims 13, 14 and 17, wherein: The fifth insulating layer is further provided with at least one of a fourth ventilation hole and a fifth ventilation hole; the orthographic projections of the fourth ventilation hole and the fifth ventilation hole on the substrate partially overlap with the orthographic projections of the first flat layer on the substrate, and the first flat layer is exposed; The orthographic projection of the fourth air hole on the substrate at least partially overlaps with the orthographic projection of the reference signal line on the substrate, and does not overlap with the orthographic projection of the active pattern, gate electrode, first pole and second pole of any transistor, as well as the first scanning signal line, the second scanning signal line, the third scanning signal line, the initial signal line, the first power line and the light-emitting signal line on the substrate; the orthographic projection of some of the fifth air holes on the substrate does not overlap with the orthographic projection of the active pattern, gate electrode, first pole and second pole of any transistor, as well as the reference signal line, the first scanning signal line, the second scanning signal line, the third scanning signal line, the initial signal line, the first power line and the light-emitting signal line on the substrate, and the orthographic projection of another part of the fifth air holes on the substrate at least partially overlaps with the orthographic projection of the first power line on the substrate, and does not overlap with the orthographic projection of the active pattern, gate electrode, first pole and second pole of any transistor, as well as the reference signal line, the first scanning signal line, the second scanning signal line, the third scanning signal line, the initial signal line and the light-emitting signal line on the substrate. The display substrate according to claim 18, wherein: The length of the fourth air hole along the second direction is greater than the length of the third via hole along the second direction, and the length of the fourth air hole along the first direction is less than the length of the third via hole along the first direction; the fourth air hole and the seventh via hole are arranged along the first direction, and the distance between the orthographic projection of the fourth air hole on the substrate and the orthographic projection of the gate electrode of the first transistor of the adjacent sub-pixel on the substrate is less than the distance between the orthographic projection of the seventh via hole on the substrate and the orthographic projection of the gate electrode of the first transistor of the adjacent sub-pixel on the substrate. The display substrate according to claim 18, wherein: The length of the fifth vent hole along the second direction is greater than the length of the fourth via hole along the second direction, and the length of the fifth vent hole along the first direction is less than the length of the fourth via hole along the first direction; The fifth vent hole and the eighth via hole are arranged along the first direction, and the distance between their orthographic projection on the substrate and the orthographic projection of the fourth via hole on the substrate is smaller than the distance between the orthographic projection of the fourth via hole on the substrate and the orthographic projection of the gate electrode of the first transistor on the substrate. The display substrate according to claim 3 or 13, wherein: The pixel driving circuit also includes: a capacitor, the capacitor includes: a first plate, a second plate and a third plate, the first plate is electrically connected to the third plate; the semiconductor layer includes at least: an active pattern of at least one transistor; the first conductive layer includes at least: a gate electrode of at least one transistor and a first plate of the capacitor; the second conductive layer includes at least: a second plate of the capacitor; the third conductive layer includes at least: a first electrode and a second electrode of at least one transistor, a first scanning signal line, a second scanning signal line, a third scanning signal line, a light-emitting signal line, an initial signal line, a reference signal line, a first power supply line and a third plate of the capacitor; the fourth conductive layer includes at least: a data signal line. The display substrate according to claim 21, wherein The first electrode plate of the capacitor includes: a first gate connection portion and a second gate connection portion, the second gate connection portion of the sub-pixel in this column is located on a side of the first gate connection portion close to the sub-pixel in the next column, and the distance between the boundary of the first gate connection portion close to the gate electrode of the fifth transistor and the gate electrode of the fifth transistor is smaller than the distance between the boundary of the second gate connection portion close to the gate electrode of the fifth transistor and the gate electrode of the fifth transistor, and the distance between the boundary of the first gate connection portion away from the gate electrode of the fifth transistor and the gate electrode of the fifth transistor is smaller than the distance between the boundary of the second gate connection portion away from the gate electrode of the fifth transistor and the gate electrode of the fifth transistor; the length of the first gate connection portion along the first direction is greater than the length of the second gate connection portion along the first direction, and the length of the first gate connection portion along the second direction is greater than the length of the second gate connection portion along the second direction. The display substrate according to claim 22, wherein The orthographic projection of the second electrode plate of the capacitor on the substrate at least partially overlaps with the orthographic projection of the first electrode plate of the capacitor on the substrate; the second electrode plates of the capacitors located in the same column of sub-pixels have the same shape and area, the area of the second electrode plate of the capacitor of the 3k+1th column of sub-pixels is smaller than any one of the area of the second electrode plate of the capacitor of the 3k+2th column of sub-pixels and the area of the second electrode plate of the capacitor of the 3k+3th column of sub-pixels; the area of the overlapping region between the second electrode plate of the capacitor of the 3k+1th column of sub-pixels and the first electrode plate of the capacitor is smaller than the area of the overlapping region between the second electrode plate of the capacitor of the 3k+2th column of sub-pixels and the first electrode plate of the capacitor, the area of the overlapping region between the second electrode plate of the capacitor of the 3k+2th column of sub-pixels and the first electrode plate of the capacitor is smaller than the area of the overlapping region between the second electrode plate of the capacitor of the 3k+3th column of sub-pixels and the first electrode plate of the capacitor; The area of the overlapping area between the second plate and the first gate connection portion of the capacitor of the k+1 column of sub-pixels is smaller than the area of the overlapping area between the second plate and the first gate connection portion of the capacitor of the 3k+2 column of sub-pixels, and the area of the overlapping area between the second plate and the first gate connection portion of the capacitor of the 3k+2 column of sub-pixels is smaller than the area of the overlapping area between the second plate and the first gate connection portion of the capacitor of the 3k+3 column of sub-pixels; the area of the overlapping area between the second plate and the second gate connection portion of the capacitor of the 3k+1 column of sub-pixels is smaller than the area of the overlapping area between the second plate and the second gate connection portion of the capacitor of the 3k+2 column of sub-pixels, and the area of the overlapping area between the second plate and the second gate connection portion of the capacitor of the 3k+3 column of sub-pixels is smaller than the area of the overlapping area between the second plate and the second gate connection portion of the capacitor of the 3k+2 column of sub-pixels. The display substrate according to claim 22 or 23, wherein: The orthographic projection of the third plate of the capacitor on the substrate at least partially overlaps with the orthographic projections of the first plate of the capacitor and the second plate of the capacitor on the substrate, respectively, and the orthographic projection on the substrate has a non-overlapping area with the orthographic projection of the first plate of the capacitor on the substrate, and has a non-overlapping area with the orthographic projection of the second plate of the capacitor on the substrate. The display substrate according to claim 21, further comprising: An initial connection line located in the first conductive layer, the initial connection line at least partially extending along the second direction, the initial connection line being electrically connected to the initial signal line; two initial connection lines are arranged between at least two columns of sub-pixels, and the two initial connection lines located between at least two adjacent sub-pixels are symmetrically arranged relative to a midline extending along the second direction between the two adjacent sub-pixels; the orthographic projection of the sixth via hole on the substrate does not overlap with the orthographic projection of the initial connection line on the substrate. The display substrate according to claim 25, further comprising: At least one of the power connection line and the reference connection line is located in the fourth conductive layer, and any one of the power connection line and the reference connection line at least partially extends along the second direction; the power connection line is electrically connected to the first power line, and the reference connection line is electrically connected to the reference signal line; the orthographic projection of at least part of the reference connection line on the substrate is between the orthographic projection of two initial connection lines located between two adjacent sub-pixels on the substrate, and the orthographic projection of the power connection line on the substrate and the orthographic projection of the initial connection line on the substrate are away from the side of the orthographic projection of the reference connection line on the substrate. The display substrate according to claim 26, wherein When the fifth insulating layer is provided with at least one of the first to fifth ventilation holes; the orthographic projections of the first to fifth ventilation holes on the substrate do not overlap with the orthographic projections of the power connection line, the reference connection line and the data signal line on the substrate; the orthographic projection of the fourth ventilation hole on the substrate partially overlaps with the orthographic projection of the initial connection line on the substrate. The display substrate according to claim 1, further comprising: The light-emitting structure layer, the sub-pixel also includes: a light-emitting device, the light-emitting device includes: a first electrode, an organic light-emitting layer and a second electrode, the light-emitting structure layer includes a light-emitting device, the light-emitting structure layer includes: a fifth conductive layer, a first pixel definition layer, a second pixel definition layer, a light-emitting material layer and a sixth conductive layer stacked in sequence on the side of the driving structure layer away from the substrate; the fifth conductive layer at least includes: a first electrode; the light-emitting material layer at least includes: an organic light-emitting layer; the sixth conductive layer at least includes: a second electrode; the light transmittance of the first pixel definition layer is less than the light transmittance of the second pixel definition layer. The display substrate according to claim 1, wherein: The thickness of the fifth insulating layer is about 1200 angstroms to 1600 angstroms; the thickness of the first planar layer is about 18000 angstroms to 22000 angstroms, and the material used to make the first planar layer includes polyimide. A display device, comprising: A display substrate as claimed in any one of claims 1 to 29.