A method and device for sulfur hexafluoride conversion based on the combination of two plasmas

Abstract

The present invention discloses a method and device for sulfur hexafluoride conversion based on the combination of two plasmas. In the present invention, the sulfur hexafluoride gas or sulfur hexafluoride waste gas is first activated and degraded through a dielectric barrier discharge-jet combined reactor. Subsequently, the degradation products of sulfur hexafluoride are sprayed into a gas-liquid reactor filled with an organic solution (such as methanol) in the form of a plasma jet to react with the organic solution. The dielectric barrier discharge increases the activation decomposition rate, and the jet maintains the plasma state. The organic solution reacts with the degradation products of sulfur hexafluoride. Through the synergistic action of the dielectric barrier discharge, the jet and the organic solution, not only the degradation of high-concentration SF6 is greatly improved, but also the generated fluorine-containing products can be recycled and reused resourcefully.

Description

Technical Field

[0001] The invention belongs to the technical field of sulfur hexafluoride resource utilization, and specifically relates to a method and device for converting sulfur hexafluoride based on the combination of two plasmas. Background Art

[0002] Sulfur hexafluoride (SF6) is a colorless, odorless, non-toxic, non-flammable, non-explosive inert gas. Due to its excellent physical and chemical properties, SF6 is widely used in power equipment, metal smelting, semiconductor manufacturing, aerospace and other industries. However, SF6 is also a strong greenhouse gas with a strong ability to absorb infrared radiation. Its greenhouse effect potential (GWP) is as high as 23,900 times that of CO2. In 1997, the parties to the United Nations Climate Convention designated SF6 as one of the six gases to be restricted in the Kyoto Protocol. However, in the past five years, the content of SF6 in the atmosphere has risen by 20%. In order to cope with the increasingly severe problem of climate change, the Paris Agreement has proposed stricter emission reduction targets. Therefore, SF6 emission reduction is imperative.

[0003] In recent years, many common treatment methods for environmental waste gas have been used to degrade SF6 gas, including thermal catalytic degradation, photolysis, electrolysis, etc. As a very popular waste gas treatment method in recent years, low-temperature plasma treatment technology has the advantages of convenience, simplicity, low energy consumption, and thorough treatment. It has a very broad application prospect. At the same time, related technologies have been reported to be applied in the treatment of SF6 waste gas.

[0004] At present, the existing SF6 degradation strategies focus on improving efficiency. The gas products are mostly neutralized and absorbed by alkaline solution, and the solid waste generated needs to be landfilled and other treatments, which consumes a large amount of industrial raw materials and also causes waste of sulfur and fluorine resources. For example, the patents "A two-stage sulfur hexafluoride degradation reactor based on dielectric barrier discharge and its treatment method" published on January 20, 2023 with the number CN115624848A, and "An oil-cooled sulfur hexafluoride degradation device and degradation method based on sliding arc discharge" published on January 31, 2023 with the number CN115646155A. Summary of the invention

[0005] In order to solve the problems existing in the above-mentioned prior art, the present invention provides a method and device for converting sulfur hexafluoride based on the combination of two plasmas. The present invention first activates and degrades sulfur hexafluoride gas or sulfur hexafluoride waste gas through a dielectric barrier discharge-jet combined reactor, and then the degradation products of sulfur hexafluoride are sprayed into a gas-liquid reactor filled with an organic solution (such as methanol) in the form of a plasma jet to react with the organic solution. The dielectric barrier discharge increases the activation decomposition rate, and the jet maintains the plasma state. The organic solution reacts with the degradation products of sulfur hexafluoride. Through the synergistic effect of the dielectric barrier discharge, the jet and the organic solution, not only the degradation of high-concentration SF6 is greatly improved, but also the generated fluorine-containing products can be recycled and reused.

[0006] The technical solution adopted to achieve the above-mentioned purpose of the present invention is:

[0007] A method for converting sulfur hexafluoride based on the combination of two plasmas comprises the following steps:

[0008] S1. Passing background gas and sulfur hexafluoride gas or sulfur hexafluoride waste gas into a dielectric barrier discharge-jet combined reactor, the background gas is ionized into plasma, the sulfur hexafluoride gas is first activated by plasma and then ionized into fluorine atoms and low-fluorine sulfides, and then the plasma, fluorine atoms and low-fluorine sulfides form a plasma jet under the action of an electric field;

[0009] S2. The plasma jet formed in step S1 reacts with the organic solvent to generate fluorine-containing products and other products that can be recycled.

[0010] Furthermore, the background gas is an inert gas.

[0011] Furthermore, when the organic solvent is methanol, the fluorine-containing products are C2H2F2 and C2H4F2O, and the other products are CH2O and C2H6O.

[0012] A sulfur hexafluoride sulfur conversion device based on the combination of two plasmas comprises a sulfur hexafluoride gas supply unit, a background gas gas supply unit, a dielectric barrier discharge-jet combined reactor and a gas-liquid reaction unit, wherein the sulfur hexafluoride gas supply unit and the background gas gas supply unit are respectively connected to the inlet of the dielectric barrier discharge-jet combined reactor, the gas-liquid reaction unit comprises a gas-liquid reactor, the dielectric barrier discharge-jet combined reactor is connected to the gas-liquid reactor, and the outlet of the jet combined reactor sprays a plasma jet into the gas-liquid reactor.

[0013] The dielectric barrier discharge-jet combined reactor comprises a reaction tube, a metal rod inner electrode, an annular outer electrode, a first plasma power supply and a second plasma power supply, one end of the metal rod inner electrode is connected to the first plasma power supply, the metal rod inner electrode penetrates the reaction tube inlet end and extends into the reaction tube, and the metal rod inner electrode is located at the center of the reaction tube, the annular outer electrode is sleeved on the side wall of the reaction tube, one end of the annular outer electrode facing the reaction tube inlet is close to the reaction tube inlet, the annular outer electrode is connected to the second plasma power supply, and the side wall of the reaction tube is grounded.

[0014] The outlet of the reaction cylinder is tapered, and the port of the reaction cylinder outlet facing the gas-liquid reactor is a small port.

[0015] It also includes an air pump. The sulfur hexafluoride gas supply unit includes a sulfur hexafluoride gas cylinder, a first gas supply branch, a first pressure reducing valve, a first flow meter and a first solenoid valve. The upstream end of the first gas supply branch is connected to the sulfur hexafluoride gas cylinder. The first pressure reducing valve, the first flow meter and the first solenoid valve are installed on the first gas supply branch in sequence from the upstream end to the downstream end of the first gas supply branch. The background gas supply unit includes a background gas cylinder, a second gas supply branch, a second pressure reducing valve, a second flow meter and a second solenoid valve. The upstream end of the second gas supply branch is connected to the background gas cylinder. The second pressure reducing valve, the second flow meter and the second solenoid valve are installed on the second gas supply branch in sequence from the upstream end to the downstream end of the second gas supply branch. The downstream ends of the first gas supply branch and the second gas supply branch are respectively connected to the air pump inlet, and the air pump outlet is connected to the inlet of the dielectric barrier discharge-jet combined reactor.

[0016] The gas-liquid reactor is provided with a first interface, a second interface and an exhaust port, the dielectric barrier discharge-jet combined reactor runs through the first interface, and the reaction cylinder outlet is located in the first interface.

[0017] The gas-liquid reactor is in the shape of a three-necked flask, the reaction tube is arranged vertically or tilted, and the outlet of the reaction tube faces downward.

[0018] The gas-liquid reaction unit comprises a circulation pipeline, which comprises a circulation pipe and a circulation pump. The upstream end of the circulation pipe is connected to the gas-liquid reactor, the circulation pipe runs through the second interface inlet, and the downstream end of the circulation pipe is located in the gas-liquid reactor.

[0019] A spray nozzle is arranged on the downstream end of the circulation pipe.

[0020] Compared with the prior art, the advantages and beneficial effects of the present invention are:

[0021] 1. The present invention uses dielectric barrier discharge plasma, plasma jet and organic solution to synergistically degrade and treat sulfur hexafluoride gas or sulfur hexafluoride waste gas. The dielectric barrier discharge-jet combination can effectively increase the activation and decomposition rate of SF6. The organic solution can react with the products of SF6 activation and degradation to form usable fluorine-containing products and other products, which can not only effectively improve the degradation efficiency of SF6 and achieve the treatment of high-concentration SF6, but also make SF6 gas or SF6 waste gas into a substance that can be recycled again.

[0022] 2. Experiments show that the degradation efficiency of the present invention can be as high as 99%, and it can degrade mixed gas (mixed gas of SF6 and background gas) with SF6 concentration as high as 0.5%.

[0023] 3. The gas-liquid reactor of the present invention is provided with a circulating atomizing spray mechanism, which can make the gas-liquid reaction more thorough. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 Schematic diagram of the structure of the device for sulfur hexafluoride conversion based on the combination of two plasmas.

[0025] Figure 2 This is a gas chromatography-mass spectrometry diagram of the liquid product in the gas-liquid reactor after the sulfur hexafluoride degradation product reacts with methanol in Example 2.

[0026] Figure 3 This is a diagram showing the effect of input power on SF6 degradation rate in a dielectric barrier discharge-jet combined reactor.

[0027] Figure 4 This is a comparison chart of the effects of different conversion methods on SF6 degradation rate.

[0028] Among them, 1-sulfur hexafluoride gas cylinder, 2-first gas supply branch, 3-first pressure reducing valve, 4-first flow meter, 5-first solenoid valve, 6-argon gas cylinder, 7-second gas supply branch, 8-second pressure reducing valve, 9-second flow meter, 10-second solenoid valve, 11-air pump, 12-reaction cylinder, 13-copper rod, 14-metal ring, 15-first plasma power supply, 16-second plasma power supply, 17-gas-liquid reactor, 18-first interface, 19-second interface, 20-exhaust port, 21-circulation pipe, 22-circulation pump, 23-spray nozzle. DETAILED DESCRIPTION

[0029] The device for converting sulfur hexafluoride based on the combination of two plasmas of the present invention is described in detail below with reference to the accompanying drawings.

[0030] Example 1

[0031] The structure of the device provided in this embodiment for converting sulfur hexafluoride by using two plasmas in cooperation with an organic solvent is as follows: Figure 1 As shown, it includes a sulfur hexafluoride gas supply unit, an argon gas supply unit, an air pump, a dielectric barrier discharge-jet combined reactor and a gas-liquid reaction unit.

[0032] The sulfur hexafluoride gas supply unit includes a sulfur hexafluoride gas cylinder 1, a first gas supply branch pipe 2, a first pressure reducing valve 3, a first flow meter 4 and a first solenoid valve 5. The upstream end of the first gas supply branch pipe 2 is connected to the sulfur hexafluoride gas cylinder 1, and the first pressure reducing valve 3, the first flow meter 4 and the first solenoid valve 5 are installed on the first gas supply branch pipe 1 in sequence along the direction from the upstream end to the downstream end of the first gas supply branch pipe 2.

[0033] The background gas supply unit includes an argon gas cylinder 6, a second gas supply branch pipe 7, a second pressure reducing valve 8, a second flow meter 9 and a second solenoid valve 10. The upstream end of the second gas supply branch pipe 7 is connected to the argon gas cylinder 6, and the second pressure reducing valve 8, the second flow meter 9 and the second solenoid valve 10 are installed on the second gas supply branch pipe 7 in sequence along the direction from the upstream end to the downstream end of the second gas supply branch pipe 7.

[0034] The downstream ends of the first gas supply branch pipe 2 and the second gas supply branch pipe 7 are respectively connected to the inlet of the air pump 11 . Sulfur hexafluoride gas or sulfur hexafluoride waste gas and argon gas enter the air pump 11 according to a certain ratio and are evenly mixed in the air pump 11 .

[0035] The dielectric barrier discharge-jet combined reactor comprises a reaction tube 12, a copper rod inner electrode 13, an annular outer electrode 14, a first plasma power supply 15 and a second plasma power supply 16, wherein the annular outer electrode 14 is an annular wire mesh. The outlet of the gas pump 11 is connected to the inlet of the reaction tube 12, the outlet of the reaction tube 12 is conical, and the port of the outlet of the reaction tube 12 facing away from its inlet is a small port. One end of the copper rod inner electrode 13 is connected to the first plasma power supply 15, the copper rod inner electrode 13 penetrates the inlet end of the reaction tube 12 and extends into the reaction tube 12, and the copper rod inner electrode 13 is located at the center of the reaction tube 12. The copper rod inner electrode 13 serves as the positive electrode of the jet part, and the side wall of the reaction tube 12 is grounded to form a loop with the positive electrode of the copper rod inner electrode 13. The annular outer electrode 14 is sleeved on the outer side wall of the reaction tube 12, and the annular outer electrode 14 is close to the inlet end of the reaction tube 12 toward one end of the annular outer electrode 14. The annular outer electrode 14 is connected to the second plasma power supply 16 . The annular outer electrode 14 serves as a positive electrode of the blocking medium discharge portion and forms a loop with the side wall of the reaction tube 12 .

[0036] The gas-liquid reaction unit comprises a gas-liquid reactor 17 and a circulation line. The gas-liquid reactor 17 is in the shape of a three-necked flask, and the gas-liquid reactor 17 is provided with a first interface 18, a second interface 19 and an exhaust port 20, and the second interface 19 is vertically arranged, and the first interface 18 and the exhaust port 20 are all tilted. The reaction tube 12 is tilted, and the reaction tube 12 is fixed by a bracket (not shown), and the reaction tube 12 entrances face upward, and the reaction tube 12 outlets face downward. The reaction tube 12 runs through the first interface outlet, and the reaction tube 12 outlets are located in the first interface 18, and the reaction tube 12 outlets are close to the first interface 18 outlets.

[0037] The circulation pipeline includes a circulation pipe 21 and a circulation pump 22. The upstream end of the circulation pipe 21 is connected to the gas-liquid reactor 17. The circulation pipe 21 passes through the inlet end of the second interface 19. The downstream end of the circulation pipe 21 is located in the gas-liquid reactor 17. The circulation pump 22 is installed on the circulation pipe 21. A spray nozzle 23 is provided on the downstream end of the circulation pipe 21.

[0038] The method for converting sulfur hexafluoride based on the combination of two plasmas of the present invention is described in detail below in conjunction with the above-mentioned device.

[0039] Example 2

[0040] 1. Add methanol into the gas-liquid reactor 17.

[0041] 2. According to the connection relationship of the above devices (such as Figure 1 (as shown) the device for sulfur hexafluoride conversion based on the combination of two plasmas is assembled and connected.

[0042] 3. Open the argon gas cylinder 6, the second pressure reducing valve 8, the second flow meter 9, the second solenoid valve 10 and the air pump 11, close the exhaust port 20, and pass argon gas to detect the air tightness of the device to prevent the leakage of toxic gas during the reaction from causing harm to the staff and ensure that the reaction is carried out stably and orderly. After the detection is completed, close the argon gas cylinder 6, the second pressure reducing valve 8, the second flow meter 9, the second solenoid valve 10 and the air pump 11.

[0043] 4. Set the input power of the dielectric barrier discharge part to 50 W, set the input power of the jet part to 50 W, turn on the first plasma power supply 15 and the second plasma power supply 16, and the temperature in the reaction tube 12 begins to rise. After a period of time, the temperature in the reaction tube 12 tends to stabilize at 40°C.

[0044] 5. Open the sulfur hexafluoride gas cylinder 1, the first pressure reducing valve 3, the first flowmeter 4, the first solenoid valve 5, the argon gas cylinder 6, the second pressure reducing valve 8, the second flowmeter 9, the second solenoid valve 10, the air pump 11, the first plasma power supply 15, the second plasma power supply 16, the circulation pump 22 and the exhaust port 20. The sulfur hexafluoride gas in the sulfur hexafluoride gas cylinder 1 and the argon gas in the argon gas cylinder 6 enter the air pump 11, mix evenly in the air pump 11, and then enter the reaction cylinder 12. The first flowmeter 4 and the first solenoid valve 5 accurately control the amount of sulfur hexafluoride gas introduced, and the second flowmeter 9 and the second solenoid valve 10 accurately control the amount of argon gas introduced. The concentration of SF6 can be accurately controlled by two-way solenoid valves and flowmeters. In this embodiment, the flow rate of the mixed gas of sulfur hexafluoride and argon is controlled to be 1L / min, and the volume concentration of SF6 is 0.5%.

[0045] In the reaction tube 12, the background gas is ionized into plasma, and the sulfur hexafluoride gas is ionized into fluorine atoms and low-fluorine sulfides (such as SF5, SF4, etc.) after being activated by the plasma. The plasma, fluorine atoms and low-fluorine sulfides form a plasma jet under the action of the electric field.

[0046] 7. The plasma jet is injected into the gas-liquid reactor 17 in a jet state to react with methanol. The gas flowing out of the outlet is qualitatively analyzed by a gas chromatography-mass spectrometer. The obtained gas chromatography-mass spectrum is as follows: Figure 2 As shown by Figure 2 It can be seen that the gas flowing out of the exhaust port contains SO2F2, SOF2, C2H2F2, C2H4F2O, CH2O and C2H6O, among which the formation of SO2F2 and SOF2 may be due to the reaction of the generated fluorine atoms and low fluoride with the reactor (the main component is glass SiO2) or methanol to obtain: the fluorine atoms and low fluoride sulfides produced by the degradation of sulfur hexafluoride gas react with methanol liquid, and the broken F bonds can be grafted onto methanol to form F-containing hydrocarbons C2H2F2 and C2H4F2O, as well as CH2O and C2H6O generated by methanol oxidation. Compared with the acidic and toxic gases produced by the degradation of SF6, the F-containing hydrocarbons C2H2F2, C2H4F2O, CH2O and C2H6O are much more usable.

[0047] At the same time, the circulation pump 22 draws the organic solution in the gas-liquid reactor 17 to the second interface 19 for spraying out, so that the chemical reaction in the gas-liquid reactor 17 is more sufficient and thorough.

[0048] 8. When it is necessary to stop the reaction, close the sulfur hexafluoride gas cylinder 1, the first pressure reducing valve 3, the first flow meter 4 and the first solenoid valve 5. Ten minutes later, turn off the first plasma power supply 15 and the second plasma power supply 16, and continue to introduce argon gas so that the plasma in the reaction tube 12 is driven into the gas-liquid reactor 17. Ten minutes later, close the argon gas cylinder 6, the second pressure reducing valve 8, the second flow meter 9, the second solenoid valve 10, the air pump 11 and the circulation pump 22.

[0049] Example 3

[0050] The input power of the dielectric barrier discharge and the jet part is changed synchronously, and the SF6 concentration in the gas discharged from the outlet is detected by gas chromatograph. The data graph of SF6 degradation rate changing with input power is shown in the figure below. Figure 3 As shown by Figure 3 It can be seen that with the increase of the input power of the dielectric barrier discharge and the jet part, the SF6 degradation rate also increases. When the input power of the dielectric barrier discharge and the jet part reaches 70w, the SF6 degradation rate reaches 99.62%, which is close to complete degradation.

[0051] Example 4

[0052] Different conversion methods are used to convert sulfur hexafluoride gas, and the different conversion methods are as follows: 1. Using barrier dielectric discharge plasma alone to degrade and convert SF6, the input power (50W) and size of the barrier dielectric discharge plasma reactor are the same as those of the dielectric barrier discharge-jet combined reactor in Example 1; 2. Using jet plasma alone to degrade and convert SF6, the input power (50W) and size of the jet plasma reactor are the same as those of the dielectric barrier discharge-jet combined reactor in Example 1; 3. Using methanol alone to degrade and convert SF6; 4. Using barrier dielectric discharge plasma and jet plasma in combination to degrade and convert SF6, the input power (50W) and size of the barrier dielectric discharge-jet combined reactor are the same as those of the dielectric barrier discharge-jet combined reactor in Example 1. W) and the size are the same as those of the dielectric barrier discharge-jet combined reactor in Example 1; 5. SF6 is degraded and converted by combining barrier dielectric discharge plasma and methanol. The input power (50W) and size of the barrier dielectric discharge plasma reactor are the same as those of the dielectric barrier discharge-jet combined reactor in Example 1; 6. SF6 is degraded and converted by combining jet plasma and methanol. The input power (50W) and size of the jet plasma reactor are the same as those of the dielectric barrier discharge-jet combined reactor in Example 1; 7. SF6 is converted by combining barrier dielectric discharge plasma, barrier dielectric discharge plasma and methanol. The input power (50W) of the barrier dielectric discharge-jet combined reactor is the same as that of Example 1. The sulfur hexafluoride in the mixed gas discharged by each conversion method is detected by gas chromatograph to calculate the degradation rate of sulfur hexafluoride.

[0053] Comparison of the degradation rates of sulfur hexafluoride when the above 7 conversion methods are used to convert sulfur hexafluoride Figure 4 As shown by Figure 4 It can be seen that only when SF6 is converted through the synergistic combination of blocking dielectric discharge plasma, blocking dielectric discharge plasma and methanol, the degradation rate is the highest, which is significantly higher than other conversion methods.

Claims

1. A method for converting sulfur hexafluoride based on the combination of two plasmas, characterized in that The steps include: S1. Passing background gas and sulfur hexafluoride gas or sulfur hexafluoride waste gas into a dielectric barrier discharge-jet combined reactor, the background gas is ionized into plasma, the sulfur hexafluoride gas is first activated by plasma and then ionized into fluorine atoms and low-fluorine sulfides, and then the plasma, fluorine atoms and low-fluorine sulfides form a plasma jet under the action of an electric field; S2. The plasma jet formed in step S1 reacts with the organic solvent to generate fluorine-containing products and other products that can be recycled.

2. The method for sulfur hexafluoride conversion based on the combination of two plasmas according to claim 1, characterized in that: The background gas is an inert gas.

3. The method for converting sulfur hexafluoride by using two plasmas in cooperation with an organic solvent according to claim 1, characterized in that: When the organic solvent is methanol, the fluorine-containing products are C2H2F2 and C2H4F2O, and the other products are CH2O and C2H6O.

4. A device for sulfur hexafluoride conversion based on the combination of two plasmas, characterized in that: The invention comprises a sulfur hexafluoride gas supply unit, a background gas gas supply unit, a dielectric barrier discharge-jet combined reactor and a gas-liquid reaction unit. The sulfur hexafluoride gas supply unit and the background gas gas supply unit are respectively connected to the inlet of the dielectric barrier discharge-jet combined reactor. The gas-liquid reaction unit comprises a gas-liquid reactor. The dielectric barrier discharge-jet combined reactor is connected to the gas-liquid reactor, and the outlet of the jet combined reactor sprays a plasma jet into the gas-liquid reactor.

5. The device for sulfur hexafluoride conversion based on the combination of two plasmas according to claim 4, characterized in that: The dielectric barrier discharge-jet combined reactor comprises a reaction tube, a metal rod inner electrode, an annular outer electrode, a first plasma power supply and a second plasma power supply, one end of the metal rod inner electrode is connected to the first plasma power supply, the metal rod inner electrode penetrates the reaction tube inlet end and extends into the reaction tube, and the metal rod inner electrode is located at the center of the reaction tube, the annular outer electrode is sleeved on the side wall of the reaction tube, one end of the annular outer electrode facing the reaction tube inlet is close to the reaction tube inlet, the annular outer electrode is connected to the second plasma power supply, and the side wall of the reaction tube is grounded.

6. The device for sulfur hexafluoride conversion based on the combination of two plasmas according to claim 5, characterized in that: The outlet of the reaction cylinder is tapered, and the port of the reaction cylinder outlet facing the gas-liquid reactor is a small port.

7. The device for sulfur hexafluoride conversion based on the combination of two plasmas according to claim 4, characterized in that: It also includes an air pump. The sulfur hexafluoride gas supply unit includes a sulfur hexafluoride gas cylinder, a first gas supply branch, a first pressure reducing valve, a first flow meter and a first solenoid valve. The upstream end of the first gas supply branch is connected to the sulfur hexafluoride gas cylinder. The first pressure reducing valve, the first flow meter and the first solenoid valve are installed on the first gas supply branch in sequence from the upstream end to the downstream end of the first gas supply branch. The background gas supply unit includes a background gas cylinder, a second gas supply branch, a second pressure reducing valve, a second flow meter and a second solenoid valve. The upstream end of the second gas supply branch is connected to the background gas cylinder. The second pressure reducing valve, the second flow meter and the second solenoid valve are installed on the second gas supply branch in sequence from the upstream end to the downstream end of the second gas supply branch. The downstream ends of the first gas supply branch and the second gas supply branch are respectively connected to the air pump inlet, and the air pump outlet is connected to the inlet of the dielectric barrier discharge-jet combined reactor.

8. The device for sulfur hexafluoride conversion based on the combination of two plasmas according to claim 4, characterized in that: The gas-liquid reactor is provided with a first interface, a second interface and an exhaust port, the dielectric barrier discharge-jet combined reactor runs through the first interface, and the reaction cylinder outlet is located in the first interface.

9. The device for sulfur hexafluoride conversion based on the combination of two plasmas according to claim 8, characterized in that: The gas-liquid reactor is in the shape of a three-necked flask, the reaction tube is arranged vertically or obliquely, and the outlet of the reaction tube faces downward.

10. The device for sulfur hexafluoride conversion based on the combination of two plasmas according to claim 8, characterized in that: The gas-liquid reaction unit comprises a circulation pipeline, which comprises a circulation pipe and a circulation pump. The upstream end of the circulation pipe is connected to the gas-liquid reactor, the circulation pipe runs through the second interface inlet, and the downstream end of the circulation pipe is located in the gas-liquid reactor.

11. The device for sulfur hexafluoride conversion based on the combination of two plasmas according to claim 10, characterized in that: A spray nozzle is arranged on the downstream end of the circulation pipe.