Laser cleaning head and laser cleaning device

Abstract

The invention discloses a laser cleaning head and a laser cleaning device, and relates to the technical field of cleaning equipment.The laser cleaning head comprises a laser emitting head, a light processing assembly, an adjusting module and a shell, and the laser emitting head is used for emitting laser beams; the light processing assembly comprises a focusing module and a first light path deflection module. The laser emitting head, the focusing module and the first light path deflection module are sequentially arranged in the shell in the length direction of the shell. A laser beam can sequentially irradiate the focusing module and the first light path deflection module, the focusing module can focus the laser beam, and the first light path deflection module can enable the laser beam to deflect in the direction perpendicular to the length direction of the shell and irradiate a to-be-cleaned part; the adjusting module is connected with the focusing module and can drive the focusing module to move in the length direction of the shell. The cleaning device can better adapt to complex working environments, and can meet the cleaning requirements for rapid and thorough cleaning of different target surfaces.

Description

Technical Field

[0001] The invention relates to the technical field of cleaning equipment, in particular to a laser cleaning head and a laser cleaning device. Background Art

[0002] Laser cleaning is a technology that uses laser to interact with pollutants attached to the workpiece substrate, causing the pollutants to expand and melt instantly due to heat, and then separate from the workpiece substrate in the form of gas volatilization. It is highly efficient and environmentally friendly, and has been widely used in many fields such as industrial manufacturing, aerospace, and cultural relics protection. Among them, the plastic encapsulation mold is a mold used for semiconductor component packaging. Its main function is to encapsulate the chip into a plastic shell to protect the chip so that it can work stably in various environments. If the plastic encapsulation mold is not thoroughly cleaned and cleaned without damage, it will lead to problems such as reduced quality of semiconductor components, increased maintenance costs of the plastic encapsulation mold, and shortened life of the plastic encapsulation mold. Thorough cleaning and non-damage cleaning of the plastic encapsulation mold is essential to maintain the performance of the plastic encapsulation mold and extend its service life.

[0003] In response to the challenges brought by the diversification of electronic components, the design of plastic encapsulation molds tends to have larger layouts and more complex structures to meet production needs and improve production efficiency. In addition, in order to save space, the opening distance between the upper and lower molds of the plastic encapsulation mold is reduced, which limits the operating space for laser cleaning. At the same time, in order to improve production efficiency, the mold surface area of ​​the plastic encapsulation mold is increased, resulting in a wider area to be cleaned and a deeper cleaning depth. These changes require the laser cleaning head to have a longer working distance to cover a larger cleaning area, which brings new challenges to the cleaning of plastic encapsulation molds.

[0004] Most existing laser cleaning heads simply integrate the laser emission head and light processing components into the shell, without considering the flat design of the laser cleaning head, which is difficult to adapt to complex working environments, especially difficult to flexibly achieve cleaning in narrow spaces. Existing laser cleaning heads either do not have a focal length adjustment function, or adjust the focal length by replacing the focusing lens, which makes it impossible or inconvenient to focus the laser beam on different target surfaces, making it difficult to meet the cleaning needs of fast and thorough cleaning of different target surfaces. Summary of the invention

[0005] The purpose of the present invention is to provide a laser cleaning head and a laser cleaning device to solve the problems existing in the above-mentioned prior art, so that the cleaning head can not only clean large cavities, but also clean narrow small cavities or corners, etc., can better adapt to complex working environments, and can meet the cleaning needs of fast and thorough cleaning of different target surfaces.

[0006] To achieve the above object, the present invention provides the following solutions: The present invention provides a laser cleaning head, comprising a laser emission head, a light processing component, an adjustment module and a housing, wherein: The laser emitting head is used for emitting a laser beam; The optical processing component includes a focusing module and an optical path deflection module 1, wherein the laser emitting head, the focusing module, and the optical path deflection module 1 are sequentially arranged in the shell along the length direction of the shell; the laser beam can sequentially irradiate the focusing module and the optical path deflection module 1, the focusing module can focus the laser beam, and the optical path deflection module 1 can deflect the laser beam in a direction perpendicular to the length direction of the shell and irradiate the part to be cleaned; The adjusting module is connected to the focusing module, and the adjusting module can drive the focusing module to move along the length direction of the shell.

[0007] Preferably, the optical processing component also includes an optical path deflection module 2 and a scanning module arranged between the focusing module and the laser emission head, the optical path deflection module 2 is arranged opposite to the laser emission head, the scanning module is arranged on one side of the optical path deflection module 2, the scanning module and the optical path deflection module 2 are arranged along the width direction of the shell, the laser beam emitted by the laser emission head can be irradiated to the optical path deflection module 2, the optical path deflection module 2 can deflect the laser beam toward the direction of the scanning module and irradiate the scanning module, and the scanning module can reflect the laser beam so that the laser beam is irradiated to the focusing module.

[0008] Preferably, the scanning module includes a scanning lens and a driving module, the scanning lens is connected to the driving module, the driving module is fixedly connected to the housing, and the driving module can drive the scanning lens to perform multi-dimensional rotation so that the laser beam can be incident from the scanning lens to the optical path deflection module one.

[0009] Preferably, the optical path deflection module 2 and the scanning module are both fixedly connected to the adjustment module.

[0010] Preferably, the optical path deflection module 1 includes a reflector and a knob, the knob is connected to the reflector, the reflector is arranged inside the shell, and the knob is arranged outside the shell, and rotating the knob can rotate the reflector around an axis parallel to the width direction of the shell.

[0011] Preferably, it further comprises a posture adjustment device, the shell is connected to the posture adjustment device, and the posture adjustment device can adjust the posture of the shell so that the shell is parallel to the plane to be cleaned.

[0012] Preferably, it further comprises a detection device, wherein the detection device is connected to the posture adjustment device by signal, and the detection device can obtain the angle between the housing and the surface to be detected.

[0013] Preferably, the detection device includes a controller and two laser ranging modules, the two laser ranging modules are fixedly connected to a side of the housing close to the surface to be detected, each laser ranging module is used to monitor the distance between each laser ranging module and the surface to be detected, each laser ranging module is communicatively connected to the controller, and the controller is signal-connected to the posture adjustment device.

[0014] Preferably, the adjustment module includes an adjustment plate and at least two locking members, the focusing module, the optical path deflection module 2 and the scanning module are all fixedly connected to the adjustment plate; at least two circular holes are arranged on the adjustment plate, and at least two strip holes are arranged on the side wall of the outer shell close to the part to be cleaned, each of the circular holes is arranged opposite to one of the strip holes, and each of the strip holes is arranged opposite to at least one circular hole, each of the locking members can pass through one of the circular holes and a corresponding strip hole and lock the adjustment plate and the outer shell, the locking member can unlock the adjustment plate and the outer shell, and when the adjustment plate and the outer shell are unlocked, the locking member can drive the adjustment plate to move along the strip hole under the action of external force.

[0015] The present invention also provides a laser cleaning device provided with the above-mentioned laser cleaning head.

[0016] Compared with the prior art, the present invention has achieved the following technical effects: The present invention provides a laser cleaning head and a laser cleaning device, comprising a laser emitting head, a light processing component, an adjustment module and a shell, wherein the light processing component comprises a focusing module and an optical path deflection module 1, and the laser emitting head, the focusing module and the optical path deflection module 1 are sequentially arranged in the shell along the length direction of the shell; a laser beam can sequentially irradiate the focusing module and the optical path deflection module 1, the focusing module can focus the laser beam, and the optical path deflection module 1 can deflect the laser beam in a direction perpendicular to the length direction of the shell and irradiate a part to be cleaned; the adjustment module is connected to the focusing module, and the adjustment module can drive the focusing module to move along the length direction of the shell.

[0017] Since the laser emission head, focusing module, and optical path deflection module 1 are all arranged along the length direction of the shell, and the size of the shell in the length direction is relatively large, the direction of the laser beam propagating along the length direction of the shell is converted into a direction perpendicular to the length of the shell by the optical path deflection module 1, so that the laser beam can be emitted to the part to be cleaned in a direction perpendicular to the length direction of the shell, which is conducive to the flat design of the laser head, so that the cleaning head can not only clean large cavities, but also narrow small cavities or corners, etc., and can better adapt to complex working environments. By adjusting the distance between the focusing module and the laser emission head through the adjustment module, the distance from the focus of the laser beam emitted by the laser cleaning head to the part to be detected can be adjusted, thereby realizing the change of the focal length and working distance of the laser cleaning head, which can meet the cleaning needs of fast and thorough cleaning of different target surfaces. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0019] Figure 1 A schematic diagram of the structure of the laser cleaning head provided in Example 1; Figure 2 is a schematic diagram of the structure of the adjustment plate in Example 1; Figure 3 is a schematic diagram of the structure of the strip-shaped hole in Example 1; In the figure: 100, laser cleaning head; 1, laser emission head; 2, light processing component; 201, focusing module; 202, optical path deflection module one; 203, optical path deflection module two; 204, scanning lens; 205, driving module; 3, adjustment module; 301, adjustment plate; 302, circular hole; 4, housing; 401, strip hole; 5, laser ranging module; 6, transmission optical fiber; 7, air blowing protection device; 8, protective lens. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0021] The purpose of the present invention is to provide a laser cleaning head and a laser cleaning device to solve the problems existing in the above-mentioned prior art, so that the cleaning head can not only clean large cavities, but also clean narrow small cavities or corners, etc., can better adapt to complex working environments, and can meet the cleaning needs of fast and thorough cleaning of different target surfaces.

[0022] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0023] Embodiment 1 like Figures 1 to 3 As shown, this embodiment provides a laser cleaning head 100, including a laser emission head 1, a light processing component 2, an adjustment module 3 and a housing 4, wherein: The laser transmitting head 1 is used for transmitting a laser beam; The optical processing component 2 includes a focusing module 201 and an optical path deflection module 202. The laser emission head 1, the focusing module 201, and the optical path deflection module 202 are sequentially arranged in the housing 4 along the length direction of the housing 4; the laser beam can sequentially irradiate the focusing module 201 and the optical path deflection module 202, the focusing module 201 can focus the laser beam, and the optical path deflection module 202 can deflect the laser beam in a direction perpendicular to the length direction of the housing 4 and irradiate the part to be cleaned; The adjustment module 3 is connected to the focusing module 201 , and the adjustment module 3 can drive the focusing module 201 to move along the length direction of the housing 4 .

[0024] Since the laser emitting head 1, the focusing module 201, and the optical path deflection module 1 202 are all arranged along the length direction of the shell 4, and the length direction dimension of the shell 4 is relatively large, the direction of the laser beam propagating along the length direction of the shell 4 is converted into a direction perpendicular to the length of the shell 4 by the optical path deflection module 1 202, so that the laser beam can be emitted to the part to be cleaned along the direction perpendicular to the length direction of the shell 4, which is conducive to realizing the flat design of the laser head, so that the cleaning head can not only clean large cavities, but also narrow small cavities or corners, etc., and can better adapt to complex working environments. By adjusting the distance between the focusing module 201 and the laser emitting head 1 through the adjustment module 3, the distance from the focus of the laser beam emitted by the laser cleaning head 100 to the part to be detected can be adjusted, thereby realizing the change of the focal length and working distance of the laser cleaning head 100, which can meet the cleaning needs of fast and thorough cleaning of different target surfaces.

[0025] In this embodiment, the optical processing component 2 further includes an optical path deflection module 203 and a scanning module disposed between the focusing module 201 and the laser emitting head 1. The optical path deflection module 203 is disposed opposite to the laser emitting head 1, and the scanning module is disposed on one side of the optical path deflection module 203. The scanning module and the optical path deflection module 203 are disposed along the width direction of the housing 4. The laser beam emitted by the laser emitting head 1 can be irradiated to the optical path deflection module 203. The optical path deflection module 203 can deflect the laser beam toward the scanning module and irradiate the scanning module. The scanning module can reflect the laser beam so that the laser beam is irradiated to the focusing module 201. The optical path deflection module 203 and the scanning module are disposed along the width direction of the housing 4, which is conducive to reducing the length dimension of the laser cleaning head 100. The scanning module is used to control the scanning width of the laser.

[0026] In this embodiment, the scanning module includes a scanning lens 204 and a driving module 205, the scanning lens 204 is connected to the driving module 205, the driving module 205 is fixedly connected to the housing 4, and the driving module 205 can drive the scanning lens 204 to rotate in multiple dimensions, so that the laser beam can be incident from the scanning lens 204 to the optical path deflection module 1 202, thereby adjusting the scanning angle of the laser and adjusting the projection direction of the laser beam, so that the laser cleaning head 100 can easily clean the vertical surface and curved surface of components such as plastic packaging molds, adapt to the cleaning needs of molds of different shapes, and greatly improve the adaptability and flexibility of the cleaning operation. It should be noted that the scanning module can be selected according to the use requirements to meet the rotation dimension requirements of the scanning lens 204.

[0027] In this embodiment, the optical path deflection module 203 and the scanning module are both fixedly connected to the adjustment module 3. The focusing module 201, the optical path deflection module 203 and the scanning module are all adjusted in position by the adjustment module 3, so that the integrated adjustment of the three modules is realized, and when the three modules are adjusted separately, the position deviation generated during the adjustment process causes the optical path to be deflected during the transmission between the modules, thereby affecting the normal transmission of the laser beam.

[0028] In this embodiment, the optical path deflection module 202 includes a reflector and a knob, the knob is connected to the reflector, the reflector is arranged inside the shell 4, and the knob is arranged outside the shell 4. Rotating the knob can cause the reflector to rotate around an axis parallel to the width direction of the shell 4, thereby ensuring that the laser beam can be emitted along the side perpendicular to the length direction of the shell 4 after being irradiated to the optical path deflection module 202.

[0029] In this embodiment, a posture adjustment device is also included, and the housing 4 is connected to the posture adjustment device, which can adjust the posture of the housing 4 so that the housing 4 is parallel to the plane to be cleaned. The posture adjustment device can be a robot in the form of six degrees of freedom.

[0030] In this embodiment, a detection device is also included. The detection device is connected to the posture adjustment device by signal, and the detection device can obtain the angle between the housing 4 and the surface to be detected.

[0031] In this embodiment, the detection device includes a controller and two laser distance measuring modules 5. The two laser distance measuring modules 5 are fixedly connected to the side of the housing 4 close to the surface to be detected. Each laser distance measuring module 5 is used to monitor the distance between each laser distance measuring module 5 and the surface to be detected. Each laser distance measuring module 5 is connected to the controller for communication, and the controller is connected to the posture adjustment device by signal. The controller can control the posture adjustment device according to the distance signal measured by the laser distance measuring module 5 to adjust the focal length of the laser cleaning head 100 and the plastic sealing mold in real time before and during cleaning. The controller can obtain the parallelism between the laser cleaning head 100 and the surface to be cleaned according to the measurement data of the two laser distance measuring modules 5, and adjust the posture of the housing 4 through the posture adjustment device to ensure that the laser cleaning head 100 always remains parallel to the surface to be cleaned during the cleaning process, effectively preventing the tilt caused by movement, thereby ensuring the accuracy and consistency of cleaning, improving the cleaning quality and enhancing the stability and adaptability of the laser cleaning head 100.

[0032] As a preferred embodiment, before use, the housing 4 is adjusted to be parallel to the plane to be cleaned and maintain a set distance. The set distance is preset in the controller. During the cleaning process, if the distance values ​​detected by the two laser ranging modules 5 are different from the set distance, the controller is used to adjust them. First, ensure that the distance value detected by one laser ranging module 5 is the same as the set distance, and then adjust the other laser ranging module 5 through the posture adjustment device. Figure 1 As shown, the laser ranging module 5 is rotated up and down and / or left and right, and another laser ranging module 5 is dynamically adjusted according to the dynamic monitoring data of the laser ranging module 5 until the distance value detected by the other laser ranging module 5 is the same as the set distance.

[0033] In this embodiment, the adjustment module 3 includes an adjustment plate 301 and at least two locking members, the focusing module 201, the optical path deflection module 203 and the scanning module are all fixedly connected to the adjustment plate 301; at least two circular holes 302 are arranged on the adjustment plate 301, and at least two strip holes 401 are arranged on the side wall of the shell 4 close to the part to be cleaned, each circular hole 302 is arranged opposite to a strip hole 401, and each strip hole 401 is arranged opposite to at least one circular hole 302, each locking member can pass through a strip hole 401 and a corresponding circular hole 302 and lock the adjustment plate 301 and the shell 4, the locking member can unlock the adjustment plate 301 and the shell 4, and when the adjustment plate 301 and the shell 4 are unlocked, the locking member can drive the adjustment plate 301 to move along the strip hole 401 under the action of external force.

[0034] As a preferred embodiment, there are six circular holes 302, and each strip hole 401 is connected to three circular holes 302. A plurality of strip holes 401 are provided, and each strip hole 401 corresponds to a plurality of circular holes 302, which can prevent the light path from tilting during the adjustment process and ensure the stability of the adjustment. The locking member can be a combination of a pin and a nut or a combination of a bolt and a nut. The adjustment plate 301 can be adjusted by loosening the nut without unscrewing the nut, and the adjustment plate 301 can be locked by tightening the nut. The forward and backward movement range of the adjustment plate 301 is 60 mm, and the adjustable laser focus range is ±30 mm. The strip hole 401 is provided on the mounting plate of the housing 4.

[0035] In this embodiment, an air blowing protection device 7 and a protective lens 8 are also included. The outer shell 4 is provided with a window, and the protective lens 8 is provided at the window. The laser beam from the optical path deflection module 202 can pass through the protective lens 8 and irradiate the part to be cleaned. The protective lens 8 is used to close the window of the laser cleaning head 100 to prevent external impurities from entering the outer shell 4 through the window, thereby protecting the various components in the outer shell 4; the air blowing protection device 7 is fixedly connected to the outer shell 4, and the air blowing protection device 7 can blow air toward the side of the protective lens 8 close to the part to be cleaned, so as to prevent the smoke, dust, etc. generated during laser cleaning from falling on the protective lens 8 and hindering laser transmission.

[0036] As a preferred embodiment, the direction of the airflow blown by the air blowing protection device 7 is parallel to the plane where the protective lens 8 is located. The air blowing protection device 7 is an air knife device. The air blowing protection device 7 is fixed to the bottom plate of the housing 4 through a slot and a buckle.

[0037] As a preferred embodiment, this embodiment also includes a laser generating module and a transmission optical fiber 6. The laser generating module is fixedly connected to the housing 4 and is used to emit a laser beam of a certain wavelength. The laser emitting head 1 is fixedly connected to the housing 4. The laser generating module and the laser emitting head 1 are connected through the transmission optical fiber 6. The laser emitting head 1 is connected to the transmission optical fiber 6 and fixes the transmission optical fiber 6 to ensure that the laser emitting position remains unchanged and the laser light emitting direction is stable. The transmission optical fiber 6 is wrapped with a corrugated tube.

[0038] As a preferred embodiment, the driving device is a scanning motor, which is arranged on the side of the scanning lens 204 away from the optical path deflection module 202, and the scanning motor is fixedly connected to the outer side of the housing 4, that is, the driving device, the scanning lens 204, and the optical path deflection module 202 are arranged along the width direction of the housing 4, and the scanning motor does not occupy the space in the thickness direction of the housing 4, so that the scanning module is flatter in the thickness direction of the housing 4. Among them, the window is arranged on a side surface of the housing 4 in the thickness direction.

[0039] As a preferred embodiment, the focusing module 201 is a combination of a long-focus and a short-focus focusing lens, which expands the scanning path of the laser cleaning head 100, thereby achieving a wider cleaning coverage. The housing 4 is made of aluminum alloy.

[0040] As a preferred embodiment, two laser distance measuring modules 5 are fixedly connected to both sides of the housing 4 in the width direction, and the two laser distance measuring modules 5 are staggered in the length direction of the housing 4. The laser beam of the laser cleaning head 100 is emitted from one side of the housing 4 in the thickness direction.

[0041] The laser cleaning head 100 of this embodiment can be used to clean various molds such as semiconductor molds, optoelectronic molds, rubber molds, plastic molds, and metal molds, such as removing contaminants such as residual resin and organic oxides that affect the packaging quality caused by continuous epoxy resin packaging in the mold cavity and mold surface. However, the laser cleaning head 100 of this embodiment is not limited to the cleaning of plastic molds, but can also be used to clean parts that can be cleaned by laser in various fields such as industrial manufacturing and aerospace.

[0042] Embodiment 2 This embodiment provides a laser cleaning device, which is provided with the laser cleaning head 100 in Embodiment 1.

[0043] The present invention uses specific examples to illustrate the principles and implementation methods of the present invention. The above examples are only used to help understand the method and core ideas of the present invention. At the same time, for those skilled in the art, according to the ideas of the present invention, there will be changes in the specific implementation methods and application scope. In summary, the content of this specification should not be understood as limiting the present invention.

Claims

1. A laser cleaning head, characterized in that: It includes a laser transmitter head, a light processing component, an adjustment module and a housing, wherein: The laser emitting head is used for emitting a laser beam; The optical processing component includes a focusing module and an optical path deflection module 1, wherein the laser emitting head, the focusing module, and the optical path deflection module 1 are sequentially arranged in the shell along the length direction of the shell; the laser beam can sequentially irradiate the focusing module and the optical path deflection module 1, the focusing module can focus the laser beam, and the optical path deflection module 1 can deflect the laser beam in a direction perpendicular to the length direction of the shell and irradiate the part to be cleaned; The adjusting module is connected to the focusing module, and the adjusting module can drive the focusing module to move along the length direction of the shell.

2. The laser cleaning head according to claim 1, characterized in that: The optical processing component also includes an optical path deflection module 2 and a scanning module arranged between the focusing module and the laser emitting head. The optical path deflection module 2 is arranged opposite to the laser emitting head, and the scanning module is arranged on one side of the optical path deflection module 2. The scanning module and the optical path deflection module 2 are arranged along the width direction of the shell. The laser beam emitted by the laser emitting head can be irradiated to the optical path deflection module 2, and the optical path deflection module 2 can deflect the laser beam toward the scanning module and irradiate it to the scanning module. The scanning module can reflect the laser beam so that the laser beam is irradiated to the focusing module.

3. The laser cleaning head according to claim 2, characterized in that: The scanning module includes a scanning lens and a driving module, the scanning lens is connected to the driving module, the driving module is fixedly connected to the housing, and the driving module can drive the scanning lens to rotate in multiple dimensions so that the laser beam can be incident from the scanning lens to the optical path deflection module 1.

4. The laser cleaning head according to claim 2, characterized in that: The optical path deflection module 2 and the scanning module are both fixedly connected to the adjustment module.

5. The laser cleaning head according to claim 1, characterized in that: The optical path deflection module 1 includes a reflector and a knob, wherein the knob is connected to the reflector, the reflector is arranged inside the housing, and the knob is arranged outside the housing. Rotating the knob can rotate the reflector around an axis parallel to the width direction of the housing.

6. The laser cleaning head according to claim 1, characterized in that: It also includes a posture adjustment device, the shell is connected to the posture adjustment device, and the posture adjustment device can adjust the posture of the shell so that the shell is parallel to the plane to be cleaned.

7. The laser cleaning head according to claim 6, characterized in that: It also includes a detection device, which is connected to the posture adjustment device by signal, and the detection device can obtain the angle between the shell and the surface to be detected.

8. The laser cleaning head according to claim 7, characterized in that: The detection device includes a controller and two laser ranging modules. The two laser ranging modules are fixedly connected to a side of the housing close to the surface to be detected. Each laser ranging module is used to monitor the distance between each laser ranging module and the surface to be detected. Each laser ranging module is communicatively connected to the controller, and the controller is signal-connected to the posture adjustment device.

9. The laser cleaning head according to claim 4, characterized in that: The adjustment module includes an adjustment plate and at least two locking pieces, the focusing module, the optical path deflection module 2 and the scanning module are all fixedly connected to the adjustment plate; at least two circular holes are arranged on the adjustment plate, and at least two strip holes are arranged on the side wall of the shell close to the part to be cleaned, each of the circular holes is arranged opposite to one of the strip holes, and each of the strip holes is arranged opposite to at least one circular hole, each of the locking pieces can pass through one of the circular holes and a corresponding strip hole and lock the adjustment plate and the shell, the locking piece can unlock the adjustment plate and the shell, and when the adjustment plate and the shell are unlocked, the locking piece can drive the adjustment plate to move along the strip hole under the action of external force.

10. A laser cleaning device, characterized in that: A laser cleaning head as described in any one of claims 1 to 9 is provided.

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