Three-dimensional galvanometer scanning system

Abstract

The invention relates to the field of dynamic focusing equipment, in particular to a three-dimensional galvanometer scanning system which comprises a Z-axis focusing mechanism, a galvanometer mechanism and a focus working plane. The Z-axis focusing mechanism, the galvanometer mechanism and the focus working plane are adjacent in sequence, the Z-axis focusing mechanism is used for receiving laser emitted by the laser emitter and guiding the laser into the galvanometer mechanism in the mode that the incident angle and the emergent angle are rotationally adjusted, and the galvanometer mechanism is used for reflecting the laser to different positions on the focus working plane. When the position of the focus point of the laser needs to be adjusted, the incident angle and the emergent angle of the laser passing through the Z-axis focusing mechanism can be changed only by adjusting the current state of the Z-axis focusing mechanism and rotating the Z-axis focusing mechanism by a certain angle. Compared with a traditional galvanometer scanning device, the device is relatively compact in structural distribution and does not generate abnormal movement, and the response speed of a three-dimensional scanning system is increased by changing the motion structure mode of the transmission Z-axis focusing mechanism.

Description

Technical Field

[0001] The invention relates to the field of dynamic focusing equipment, and in particular to a three-dimensional galvanometer scanning system. Background Art

[0002] The scanning galvanometer control system has the characteristics of large output torque, small moment of inertia, fast speed, high precision and stable operation, and is widely used in marking, engraving, drilling, cutting, welding, rapid processing and other fields. The working principle of the galvanometer laser scanning system is to magnify and collimate the light beam output by the laser through the beam expander, and then converge it to the surface of the workpiece through the x-axis scanning galvanometer, y-axis scanning galvanometer and scanning focusing mirror in sequence. By controlling the distance of the x-axis and y-axis scanning galvanometers, the moving distance and position of the laser beam in the x-direction and y-direction of the material surface are adjusted to process the surface of the workpiece.

[0003] The two technical solutions disclosed in the Chinese patent documents "CN210649013U" and "CN111123463A" both use linear reciprocating motion to change the distance between the beam expander and the focusing lens, thereby achieving a change in the focal position in the Z-axis direction. Due to the limitations of the linear reciprocating motion structure, the inertia of the motion module in the Z-axis dynamic focusing device is relatively large, which limits the response speed of the three-dimensional scanning system. Summary of the invention

[0004] Based on this, it is necessary to provide a three-dimensional galvanometer scanning system to address the above-mentioned technical problems. Compared with traditional galvanometer scanning devices, the structure of this device is relatively compact and will not produce abnormal movements. By changing the motion structure of the Z-axis focusing mechanism of the transmission, the response speed of the three-dimensional scanning system is improved.

[0005] The present invention provides a three-dimensional galvanometer scanning system, comprising a Z-axis focusing mechanism, a galvanometer mechanism and a focal working plane; the Z-axis focusing mechanism, the galvanometer mechanism and the focal working plane are adjacent to each other in sequence, the Z-axis focusing mechanism is used to receive laser light emitted by a laser transmitter, and introduce the laser light into the galvanometer mechanism by rotating to adjust the incident angle and the exit angle, and the galvanometer mechanism is used to reflect the laser light to different positions on the focal working plane.

[0006] In one embodiment, the laser emitter is located at an end of the Z-axis focusing mechanism away from the galvanometer mechanism, and the laser emitter and the Z-axis focusing mechanism can be assembled or disassembled.

[0007] In one embodiment, the Z-axis focusing mechanism includes a first moving mirror and a second moving mirror; the first moving mirror and the second moving mirror are arranged opposite to each other, and the first moving mirror and the second moving mirror rotate in opposite directions.

[0008] In one embodiment, the first movable mirror rotates around its first axis, the second movable mirror rotates around its second axis, and a line between the first axis and the second axis is parallel to or coincides with the laser emitted by the laser emitter.

[0009] In one embodiment, the first axis and the second axis coincide with central axes of two rods passing through the first moving mirror and the second moving mirror, respectively, and ends of the rods extend through the outside of the Z-axis focusing mechanism.

[0010] In one embodiment, the minimum angle between the first moving mirror and the second moving mirror is zero, the maximum angle is an obtuse angle, and the obtuse angle opens downward.

[0011] In one embodiment, the Z-axis focusing mechanism also includes a beam expander and a focusing mirror; the laser passes through the beam expander and enters the range of the first moving mirror and the second moving mirror, and passes through the focusing mirror under the refraction of the rotated first moving mirror and the second moving mirror.

[0012] In one embodiment, when the rotation angles of the first moving mirror and the second moving mirror change, the maximum width of the laser spot when the laser passes through the focusing mirror changes synchronously.

[0013] In one embodiment, the galvanometer mechanism includes an X galvanometer and a Y galvanometer; the X galvanometer and the Y galvanometer are parallel, and the X galvanometer and the Y galvanometer are used to reflect the laser in sequence and finally converge multiple laser points at the same position.

[0014] In one embodiment, the focal working plane includes a first working plane and a second working plane; the first working plane and the second working plane are at different distances from the laser emitter, and the first working plane and the second working plane are perpendicular to the laser injection direction.

[0015] When the above-mentioned three-dimensional galvanometer scanning system is used, the laser emitter is started to emit laser, and the laser will pass through the Z-axis focusing mechanism and the galvanometer mechanism in sequence, and intersect at a certain position on the focal working plane. When the focus point position of the laser is required, it is only necessary to adjust the current state of the Z-axis focusing mechanism and rotate it at a certain angle to change the incident angle and the exit angle of the laser when it passes through the Z-axis focusing mechanism, and finally make the laser focus on other positions on the focal working plane. Compared with the traditional galvanometer scanning device, the device is relatively compact in structure and will not produce abnormal movement. By changing the motion structure of the transmission Z-axis focusing mechanism, the response speed of the three-dimensional scanning system is improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0017] Figure 1 A schematic diagram of the structure of a three-dimensional galvanometer scanning system provided by the present invention;

[0018] Figure 2 A schematic diagram of the internal module distribution of the three-dimensional galvanometer scanning system provided by the present invention;

[0019] Figure 3 This is one of the internal architecture schematic diagrams of the three-dimensional galvanometer scanning system provided by the present invention;

[0020] Figure 4 The second schematic diagram of the internal structure of the three-dimensional galvanometer scanning system provided by the present invention;

[0021] Figure 5 A schematic diagram of the partial structure of the side surface of the system housing provided by the present invention;

[0022] Figure 6 One of the schematic diagrams of the internal structure of the system housing provided by the present invention;

[0023] Figure 7 The second schematic diagram of the internal structure of the system housing provided by the present invention;

[0024] Figure 8 This is a third schematic diagram of the internal structure of the system housing provided by the present invention.

[0025] Reference numerals:

[0026] 110, Z-axis focusing mechanism; 111, beam expander; 112, first moving mirror; 1121, first axis; 113, second moving mirror; 1131, second axis; 114, focusing mirror; 120, galvanometer mechanism; 121, X galvanometer; 122, Y galvanometer; 130, focal working plane; 131, first working surface; 132, second working surface; 140, system housing; 141, limiting groove; 142, annular groove; 150, third rotating rod; 160, transmission assembly; 170, rotating sleeve; 171, thick plate portion; 172, thin plate portion; 173, limiting block; 180, clamping head; 181, clamping seat; 1811, card slot; 182, insertion rod; 200, laser emitter. DETAILED DESCRIPTION

[0027] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0028] Combine the following Figures 1 to 8 A three-dimensional galvanometer scanning system of the present invention is described.

[0029] like Figures 1 to 4 As shown, in one embodiment, a three-dimensional galvanometer scanning system includes a Z-axis focusing mechanism 110, a galvanometer mechanism 120 and a focal working plane 130; the Z-axis focusing mechanism 110, the galvanometer mechanism 120 and the focal working plane 130 are adjacent to each other in sequence, the Z-axis focusing mechanism 110 is used to receive the laser emitted by the laser transmitter 200, and guide the laser into the galvanometer mechanism 120 by rotating to adjust the incident angle and the exit angle, and the galvanometer mechanism 120 is used to reflect the laser to different positions on the focal working plane 130.

[0030] When the above-mentioned three-dimensional galvanometer scanning system is used, the laser emitter 200 is started to emit laser light, and the laser light will pass through the Z-axis focusing mechanism 110 and the galvanometer mechanism 120 in sequence, and intersect at a certain position on the focal working plane 130. When the focal point position of the laser light is required, it is only necessary to adjust the current state of the Z-axis focusing mechanism 110 and rotate it at a certain angle to change the incident angle and the exit angle of the laser light when it passes through the Z-axis focusing mechanism 110, and finally make the laser light focus on other positions on the focal working plane 130. Compared with the traditional galvanometer scanning device, the device is relatively compact in structure and will not produce abnormal movement. By changing the motion structure of the transmission Z-axis focusing mechanism 110, the response speed of the three-dimensional scanning system is improved.

[0031] In one embodiment, the laser emitter 200 is located at an end of the Z-axis focusing mechanism 110 away from the galvanometer mechanism 120 , and the laser emitter 200 and the Z-axis focusing mechanism 110 can be assembled or disassembled.

[0032] Specifically, in the present embodiment, the Z-axis focusing mechanism 110 and the galvanometer mechanism 120 are both arranged between the system housing 140, and the two ends of the system housing 140 are respectively the laser entrance port and the laser exit port. The entrance port is located opposite to the laser emitter 200, and according to actual needs, the laser emitter 200 can be placed outside as a separate device, or the laser emitter 200 and the system housing 140 can be assembled into one, and the exit port is directly opposite to the focal working plane 130.

[0033] In one embodiment, the Z-axis focusing mechanism 110 includes a first movable mirror 112 and a second movable mirror 113 ; the first movable mirror 112 and the second movable mirror 113 are disposed opposite to each other, and the first movable mirror 112 and the second movable mirror 113 rotate in opposite directions.

[0034] Specifically, n first moving mirrors 112 and second moving mirrors 113 are provided. When in use, each first moving mirror 112 is combined with a second moving mirror 113. Multiple groups of first moving mirrors 112 and second moving mirrors 113 can be distributed in sequence to refract the laser multiple times. The first moving mirror 112 and the second moving mirror 113 have the same rotation speed and opposite rotation directions.

[0035] In one embodiment, the first movable mirror 112 rotates around its first axis 1121 , and the second movable mirror 113 rotates around its second axis 1131 . The line between the first axis 1121 and the second axis 1131 is parallel to or coincides with the laser emitted by the laser emitter 200 .

[0036] Specifically, since the first axis 1121 and the second axis 1131 serve as the rotation centers of the first movable mirror 112 and the second movable mirror 113 respectively, the first axis 1121 and the second axis 1131 are located at the center points on the sides of the first movable mirror 112 and the second movable mirror 113. Since the connecting line between the first axis 1121 and the second axis 1131 is parallel to or coincides with the laser emitted by the laser emitter 200, the state of the laser entering the first movable mirror 112 and emitting from the second movable mirror 113 remains stable.

[0037] In one embodiment, the first axis 1121 and the second axis 1131 coincide with the central axes of two rods passing through the first movable mirror 112 and the second movable mirror 113 , respectively, and the ends of the rods extend to the outside of the Z-axis focusing mechanism 110 .

[0038] Specifically, the ends of the rod used to control the rotation of the first movable mirror 112 and the second movable mirror 113 extend through the outer surface of the system housing 140 for hand-held twisting operation. Preferably, a servo motor can be arranged inside the system housing 140, and the drive shaft of the servo motor is connected to the rod, and the drive button of the servo motor is arranged on the surface of the system housing 140 for the operator to operate.

[0039] It should be noted that the minimum angle between the first moving mirror 112 and the second moving mirror 113 is zero, the maximum angle is an obtuse angle, and the obtuse angle opens downward.

[0040] In one embodiment, the Z-axis focusing mechanism 110 also includes a beam expander 111 and a focusing mirror 114; the laser passes through the beam expander 111 and enters the range of the first moving mirror 112 and the second moving mirror 113, and passes through the focusing mirror 114 under the refraction of the rotated first moving mirror 112 and the second moving mirror 113.

[0041] Specifically, the first moving mirror 112 and the second moving mirror 113 have the same rotation speed and opposite rotation directions. This design can ensure that the center point of the laser is always incident along the center of the focusing mirror 114 .

[0042] In one embodiment, when the rotation angles of the first moving mirror 112 and the second moving mirror 113 change, the maximum width of the laser spot when the laser passes through the focusing mirror 114 changes synchronously.

[0043] Specifically, assuming that the first state is Figure 3 As shown in FIG. 1 , the two points when the laser is incident on the surface of the focusing mirror 114 are A1 and B1 respectively. Figure 4 As shown, the two points when the laser is incident on the surface of the focusing mirror 114 are A2 and B2. According to the actual state, the distance between A1 and B1 and the distance between A2 and B2 can be judged to determine that the final focusing point of the laser is located at a certain position on the focal working plane 130.

[0044] In one embodiment, the galvanometer mechanism 120 includes an X galvanometer 121 and a Y galvanometer 122; the X galvanometer 121 and the Y galvanometer 122 are parallel, and the X galvanometer 121 and the Y galvanometer 122 are used to reflect the laser in sequence and finally converge multiple laser points at the same position.

[0045] Specifically, the focal working plane 130 includes a first working plane 131 and a second working plane 132 ; the first working plane 131 and the second working plane 132 are at different distances from the laser emitter 200 , and the first working plane 131 and the second working plane 132 are perpendicular to the laser incident direction.

[0046] like Figure 5 As shown, in one embodiment, a plurality of limit grooves 141 are provided on the side of the system housing 140, and the plurality of limit grooves 141 are arranged in a ring array, and an annular groove 142 is also provided on the side of the system housing 140, and the central axis of the annular groove 142 coincides with the array center of the plurality of limit grooves 141, and the annular groove 142 is connected to the plurality of limit grooves 141.

[0047] It should be noted that, in this embodiment, the first axis 1121 is the central axis of the first rotating rod, and the second axis 1131 is the central axis of the second rotating rod, that is, the first rotating rod and the second rotating rod are respectively disposed on the first moving mirror 112 and the second moving mirror 113 .

[0048] In one embodiment, a third rotating rod 150 and the above-mentioned first rotating rod and second rotating rod are installed through the side of the system housing 140, wherein one end of the three rotating rods located inside the system housing 140 is connected through a transmission assembly 160, and when the third rotating rod 150 rotates, it will drive the first rotating rod and the second rotating rod to rotate in opposite directions.

[0049] like Figures 6 to 8 As shown, a rotating sleeve 170 is installed at one end of the third rotating rod 150 located outside the system housing 140, and the rotating sleeve 170 includes a thick plate portion 171, a thin plate portion 172 and a limit block 173; the two thin plate portions 172 are respectively arranged on the two side ends of the thick plate portion 171, and there is a certain interval between the thin plate portion 172 and the surface of the system housing 140, and the two limit blocks 173 are respectively arranged on the side of the two thin plate portions 172 facing the system housing 140, and are respectively clamped in the two limit grooves 141.

[0050] The surface of the thick plate portion 171 movably fits the system housing 140, while the thickness of the thin plate portion 172 is less than that of the thick plate portion 171 and has a certain elasticity. When the third rotating rod 150 rotates, the limit block 173 disengages from the limit groove 141 and moves along the annular groove 142. During this process, the thin plate portion 172 is squeezed by the limit groove 141 to produce bending deformation.

[0051] In one embodiment, the clamping head 180 is arranged at one end where the first rotating rod and the second rotating rod are located inside the system housing 140, and the clamping head 180 includes a clamping seat 181 and an insertion rod 182, wherein the clamping seat 181 is connected to one end of the first rotating rod or the second rotating rod located inside the system housing 140, and a card slot 1811 is provided at one end of the clamping seat 181 away from the first rotating rod or the second rotating rod. The card slot 1811 is arranged in a rectangular structure as a whole, and the upper and lower ends of the card slot 1811 respectively pass through the upper and lower ends of the clamping seat 181, and the side end of the first movable mirror 112 or the second movable mirror 113 is clamped in the card slot 1811, and an insertion rod 182 is horizontally inserted on the clamping seat 181, and the insertion rod 182 passes through the card slot 1811, and a socket for the insertion rod 182 to pass through is provided on the surface of the first movable mirror 112 or the second movable mirror 113.

[0052] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0053] The above-mentioned embodiments only express several implementation methods of the present invention, and the description thereof is relatively specific and detailed, but it cannot be understood as limiting the scope of the patent of the present invention. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the present invention, which all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention shall be subject to the attached claims.

Claims

1. A three-dimensional galvanometer scanning system, characterized in that: It includes a Z-axis focusing mechanism, a galvanometer mechanism and a focal working plane; the Z-axis focusing mechanism, the galvanometer mechanism and the focal working plane are adjacent to each other in sequence, the Z-axis focusing mechanism is used to receive the laser emitted by the laser transmitter, and guide the laser into the galvanometer mechanism by rotating to adjust the incident angle and the exit angle, and the galvanometer mechanism is used to reflect the laser to different positions on the focal working plane.

2. The three-dimensional galvanometer scanning system according to claim 1, characterized in that: The laser emitter is located at one end of the Z-axis focusing mechanism away from the galvanometer mechanism, and the laser emitter and the Z-axis focusing mechanism can be assembled or disassembled.

3. The three-dimensional galvanometer scanning system according to claim 2, characterized in that: The Z-axis focusing mechanism includes a first moving mirror and a second moving mirror; the first moving mirror and the second moving mirror are arranged opposite to each other, and the first moving mirror and the second moving mirror rotate in opposite directions.

4. The three-dimensional galvanometer scanning system according to claim 3, characterized in that: The first movable mirror rotates around its first axis, and the second movable mirror rotates around its second axis. The line between the first axis and the second axis is parallel to or coincides with the laser emitted by the laser emitter.

5. The three-dimensional galvanometer scanning system according to claim 4, characterized in that: The first axis and the second axis coincide with the central axes of two rods passing through the first moving mirror and the second moving mirror respectively, and the ends of the rods extend through the outside of the Z-axis focusing mechanism.

6. The three-dimensional galvanometer scanning system according to claim 5, characterized in that: The minimum angle between the first moving mirror and the second moving mirror is zero, the maximum angle is an obtuse angle, and the obtuse angle opens downward.

7. The three-dimensional galvanometer scanning system according to claim 6, characterized in that: The Z-axis focusing mechanism also includes a beam expander and a focusing mirror; the laser enters the range of the first moving mirror and the second moving mirror after passing through the beam expander, and passes through the focusing mirror under the refraction of the first moving mirror and the second moving mirror after rotation.

8. The three-dimensional galvanometer scanning system according to claim 7, characterized in that: When the rotation angles of the first moving mirror and the second moving mirror change, the maximum width of the laser spot when the laser passes through the focusing mirror changes synchronously.

9. The three-dimensional galvanometer scanning system according to claim 8, characterized in that: The galvanometer mechanism includes an X galvanometer and a Y galvanometer; the X galvanometer and the Y galvanometer are parallel, and the X galvanometer and the Y galvanometer are used to reflect the laser in sequence and finally converge multiple laser points at the same position.

10. The three-dimensional galvanometer scanning system according to claim 9, characterized in that: The focal working plane includes a first working plane and a second working plane; the first working plane and the second working plane are at different distances from the laser emitter, and the first working plane and the second working plane are perpendicular to the laser injection direction.

Images