Target-substrate distance adjusting structure of coating equipment

Abstract

The invention discloses a target-substrate distance adjusting structure of coating equipment, which comprises the coating equipment, a guide rail arranged at the lower part of the coating equipment, a sputtering target arranged at the front side of the coating equipment, a conveyor belt arranged at the upper part of the coating equipment, a conical tooth column I fixedly connected to the upper end of the conveyor belt, and a transmission part in meshed connection with the conical tooth column I, the rear portion of the transmission part is in meshed connection with a linkage part, an adjusting part is arranged in the middle of the linkage part, the front portion of the linkage part is connected with a supporting frame, a frame body of the supporting frame is rotationally connected with a long tooth column, the long tooth column is in meshed connection with a conveying wheel, and the adjusting part is arranged in the middle of the supporting frame. The power of the conveying belt can be stably transmitted to the conveying wheel, the conveying wheel stably drives glass to move, the position of the conveying wheel can be accurately adjusted through action adjustment of the positioning piece, and therefore the distance between the glass and a sputtering target after the conveying wheel is adjusted is guaranteed, and the coating machining quality of the glass is stable.

Description

Technical Field

[0001] The invention relates to the field of target-substrate distance adjustment structures, and in particular to a target-substrate distance adjustment structure of a coating device. Background Art

[0002] The thin layer substrate for coating by the commonly used PVD sputtering process is glass. Take the rotating sputtering target as an example: it is used to produce conductive films in displays or thin-film solar cells. At this time, the process begins. The air in the chamber is continuously removed by the vacuum pump to achieve low-pressure argon gas. The array inside the cylindrical target generates a magnetic field. The target is filled with cooling water, which will dissipate the heat during the sputtering process. The target rotates to make the material evenly utilized. This is the process of sputtering coating.

[0003] However, the distance between the coated substrate and the target material will change due to the thickness of the coated material glass, resulting in changes in the thickness of the substrate glass. Since the distance from the target material cannot be adjusted, the uniformity of the coated layer is affected. Summary of the invention

[0004] In order to solve the above technical problems, a target-substrate distance adjustment structure for a coating device is provided. The technical solution solves the problem raised in the above background technology that the distance between the coated substrate and the target material will change due to the thickness of the coated material glass, resulting in changes in the thickness of the substrate glass. Since the distance from the target material cannot be adjusted, the uniformity of the coated layer is affected.

[0005] To achieve the above purpose, the technical solution adopted by the present invention is: a target-substrate distance adjustment structure of a coating device, comprising a coating device, a guide track is arranged at the lower part of the coating device, a sputtering target is arranged at the front side of the coating device, a conveyor belt is arranged at the upper part of the coating device, a bevel gear column 1 is fixedly connected to the upper end of the conveyor belt, the bevel gear column 1 is meshedly connected with a transmission member, the rear part of the transmission member is meshedly connected with a linkage member, an adjustment member is arranged in the middle part of the linkage member, a support frame is connected at the front part of the linkage member, a long gear column is rotatably connected to the frame body of the support frame, the long gear column is meshedly connected with a transmission wheel, and an adjustment member is arranged in the middle part of the support frame;

[0006] Preferably, the transmission member comprises: a bevel gear column four and a gear one, the bevel gear column four is meshedly connected to the bevel gear column one, the column body of the bevel gear column four passes through and is fixedly connected to the gear one, the gear one is meshedly connected to the linkage member, and the end of the bevel gear column four is rotatably connected to the rear of the coating device;

[0007] Preferably, the linkage member comprises: gear 2 and bevel gear column 3, the gear 2 is meshedly connected to gear 1, one end of the gear 2 is rotatably connected to the rear of the coating device, the other end of the gear 2 is fixedly connected to one end of the adjusting member, the other end of the adjusting member is fixedly connected to the end of bevel gear column 3, the bevel gear column 3 is meshedly connected to the long gear column, and the column of the bevel gear column 3 penetrates and is rotatably connected to the frame body of the support frame;

[0008] Preferably, the adjusting member comprises: an adjusting disk 1, an articulated rod 1, an adjusting disk 2, and an articulated rod 2, wherein the protruding handle of the adjusting disk 1 is rotatably connected to one end of the articulated rod 1, the other end of the articulated rod 1 is articulated to one end of the articulated rod 2, and the other end of the articulated rod 2 is rotatably connected to the protruding handle of the adjusting disk 2;

[0009] Preferably, the long tooth column comprises: a tooth column and a second conical tooth column, the end of the tooth column is fixedly connected to the end of the second conical tooth column, the second conical tooth column is meshedly connected to the third conical tooth column, the column body of the second conical tooth column penetrates and is rotatably connected to the frame body of the support frame, and the tooth column is meshedly connected to the transmission wheel;

[0010] Preferably, the transmission wheel comprises: a support wheel and a toothed disc, the end of the support wheel is fixedly connected to the end of the toothed disc, the toothed disc is meshed with a tooth column, and the column of the support wheel penetrates and is rotatably connected to the frame of the support frame;

[0011] Preferably, the positioning member includes: a fixed handle, an adjusting screw hole, a sliding handle, and a track groove, the end of the fixed handle is fixedly connected to the frame body of the support frame, the handle body of the fixed handle is provided with a plurality of adjusting screw holes, the adjusting screw holes are fixedly connected to the threaded holes of the sliding handle by bolts, the handle body of the sliding handle is provided with a track groove, the track groove is slidably connected to the protruding strip of the fixed handle, and the end of the sliding handle is fixedly connected to the rear of the coating equipment.

[0012] Compared with the prior art, the present invention has the following beneficial effects:

[0013] When coating millimeter-thick glass, a conveyor belt is used for transportation. At this time, the conveyor wheel is hidden at the back of the conveyor belt to prevent the conveyor wheel from affecting the transportation of the conveyor belt. When coating millimeter-thick glass, the conveyor wheel is adjusted to the front of the conveyor belt so that the conveyor wheel can transport the glass. This can keep the distance between the glass and the sputtering target at the optimal distance, thereby improving the quality of glass coating. Through the action of the adjusting part, the conveyor wheel can be adapted to the adjustment of the conveyor wheel, so that the power of the conveyor belt can be stably transmitted to the conveyor wheel, so that the conveyor wheel can stably drive the glass to move, and through the action adjustment of the positioning part, the position of the conveyor wheel can be accurately adjusted to ensure the distance between the glass and the sputtering target after the conveyor wheel is adjusted, so that the coating processing quality of the glass is stable. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the front three-dimensional structure of the present invention;

[0015] Figure 2 It is a schematic diagram of the local structure of the present invention;

[0016] Figure 3 for Figure 2 The left structural diagram of ;

[0017] Figure 4 for Figure 3 A schematic diagram of the enlarged structure of part A;

[0018] Figure 5 for Figure 2 Schematic diagram of the rear structure;

[0019] Figure 6 for Figure 5 A schematic diagram of the enlarged structure of part B;

[0020] Figure 7 for Figure 5 Schematic diagram of the enlarged structure of part C.

[0021] The numbers in the figure are:

[0022] 1. Coating equipment; 11. Guide track; 12. Sputtering target; 13. Conveyor belt; 2. Conical gear column one; 3. Transmission member; 31. Conical gear column four; 32. Gear one; 4. Linkage member; 41. Gear two; 42. Conical gear column three; 5. Long gear column; 51. Gear column; 52. Conical gear column two; 6. Conveying wheel; 61. Support wheel; 62. Toothed disc; 7. Positioning member; 71. Fixing handle; 711. Adjusting screw hole; 72. Sliding handle; 721. Track groove; 8. Support frame; 9. Adjusting member; 91. Adjusting disk one; 911. Articulated rod one; 92. Adjusting disk two; 921. Articulated rod two. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0024] Embodiment 1

[0025] Please refer to Figure 1 , Figure 2 and Figure 4As shown, a target-substrate distance adjustment structure of a coating device comprises a coating device 1, a guide track 11 is arranged at the lower part of the coating device 1, a sputtering target 12 is arranged at the front side of the coating device 1, a conveyor belt 13 is arranged at the upper part of the coating device 1, a bevel gear column 2 is fixedly connected to the upper end of the conveyor belt 13, the bevel gear column 2 is meshedly connected with a transmission member 3, the rear part of the transmission member 3 is meshedly connected with a linkage member 4, an adjusting member 9 is arranged in the middle part of the linkage member 4, a support frame 8 is connected to the front part of the linkage member 4, a frame body of the support frame 8 is rotatably connected with a long gear column 5, the long gear column 5 is meshedly connected with a transmission wheel 6, and an adjusting member 9 is arranged in the middle part of the support frame 8.

[0026] Working principle: After placing the 12 mm thick glass to be coated on the guide track 11, start the conveyor belt 13 to cooperate with the sputtering target 12 to coat the glass. When replacing the 3 mm thick glass and placing it on the guide track 11, it is necessary to adjust the position of the positioning member 7 so that the support frame 8 can drive the conveying wheel 6 to a fixed distance forward to adapt to the distance between the 3 mm thick glass and the sputtering target 12. During this process, the adjusting member 9 will act so that the power of the conveyor belt 13 can drive the conveying wheel 6 to move, so that the conveying wheel 6 drives the glass to move.

[0027] Embodiment 2

[0028] Please refer to Figure 3-Figure 7 As shown, the transmission member 3 includes: a bevel gear column 4 31 and a gear 1 32. The bevel gear column 4 31 is meshedly connected to the bevel gear column 1 2. The column body of the bevel gear column 4 31 passes through and is fixedly connected to the gear 1 32. The gear 1 32 is meshedly connected to the linkage member 4. The end of the bevel gear column 4 31 is rotatably connected to the rear of the coating device 1.

[0029] The linkage member 4 includes: a gear 2 41 and a bevel gear column 3 42, wherein the gear 2 41 is meshedly connected to the gear 1 32, one end of the gear 2 41 is rotatably connected to the rear of the coating device 1, the other end of the gear 2 41 is fixedly connected to one end of the adjusting member 9, the other end of the adjusting member 9 is fixedly connected to the end of the bevel gear column 3 42, the bevel gear column 3 42 is meshedly connected to the long gear column 5, and the column of the bevel gear column 3 42 penetrates and is rotatably connected to the frame of the support frame 8;

[0030] The adjusting member 9 comprises: an adjusting plate 1 91, an articulated rod 1 911, an adjusting plate 2 92, and an articulated rod 2 921. The protruding handle of the adjusting plate 1 91 is rotatably connected to one end of the articulated rod 1 911, the other end of the articulated rod 1 911 is articulated to one end of the articulated rod 2 921, and the other end of the articulated rod 2 921 is rotatably connected to the protruding handle of the adjusting plate 2 92.

[0031] The long tooth column 5 includes: a tooth column 51 and a second conical tooth column 52. The end of the tooth column 51 is fixedly connected to the end of the second conical tooth column 52. The second conical tooth column 52 is meshedly connected to the third conical tooth column 42. The column body of the second conical tooth column 52 penetrates and is rotatably connected to the frame body of the support frame 8. The tooth column 51 is meshedly connected to the transmission wheel 6.

[0032] The transmission wheel 6 includes: a support wheel 61 and a toothed disc 62. The end of the support wheel 61 is fixedly connected to the end of the toothed disc 62. The toothed disc 62 is meshed with the toothed column 51. The column of the support wheel 61 penetrates and is rotatably connected to the frame of the support frame 8.

[0033] The positioning member 7 includes: a fixed handle 71, an adjusting screw hole 711, a sliding handle 72, and a track groove 721. The end of the fixed handle 71 is fixedly connected to the frame body of the support frame 8. The handle body of the fixed handle 71 has a plurality of adjusting screw holes 711. The adjusting screw holes 711 are fixedly connected to the threaded holes of the sliding handle 72 by bolts. The handle body of the sliding handle 72 has a track groove 721. The track groove 721 is slidably connected to the protruding strip of the fixed handle 71. The end of the sliding handle 72 is fixedly connected to the rear of the coating equipment 1.

[0034] Working principle: When the position of the conveying wheel 6 needs to be adjusted to adapt to the distance between the glass and the sputtering target 12, it is necessary to first loosen the bolt on the positioning member 7, and then align the adjusting screw hole 711 at the end of the fixing handle 71 with the threaded hole at the end of the sliding handle 72, and then tighten it with the bolt. In this process, the hinged rod 1 911 and the hinged rod 2 921 will also be straightened to a vertical state due to the movement of the support frame 8, so that it can adapt to the movement of the conveying wheel 6. At this time, the glass to be coated is placed on the guide track 11, and then the conveyor belt 13 is started. The conveyor belt 13 drives the bevel gear column 1 2 to rotate, and the bevel gear column 1 2 drives The bevel gear column four 31 rotates, the bevel gear column four 31 drives the gear one 32 to rotate, the gear one 32 drives the gear two 41 to rotate, the gear two 41 drives the adjusting disk one 91 to rotate synchronously, because the hinged rod one 911 is hinged with the hinged rod two 921, the adjusting disk one 91 drives the adjusting disk two 92 to rotate, the adjusting disk two 92 drives the bevel gear column three 42 to rotate, the bevel gear column three 42 drives the bevel gear column two 52 to rotate, the bevel gear column two 52 drives the gear column 51 to rotate, the gear column 51 drives multiple toothed discs 62 to rotate, the toothed disc 62 drives the supporting wheel 61 to rotate, so that the supporting wheel 61 drives the glass to move to adapt to the coating treatment of the sputtering target 12.

[0035] When coating 12 mm thick glass, the conveyor belt 13 is used for conveying. At this time, the conveyor wheel 6 is hidden behind the conveyor belt 13 to prevent the conveyor wheel 6 from affecting the conveying of the conveyor belt 13. When coating 3 mm thick glass, the conveyor wheel 6 is adjusted to the front side of the conveyor belt 13 so that the conveyor wheel 6 conveys the glass. This can keep the distance between the glass and the sputtering target 12 at an optimal distance, thereby improving the quality of glass coating. Through the action of the adjusting member 9, the adjustment of the conveyor wheel 6 can be adapted, so that the power of the conveyor belt 13 can be stably transmitted to the conveyor wheel 6, so that the conveyor wheel 6 can stably drive the glass to move. Through the action adjustment of the positioning member 7, the position of the conveyor wheel 6 can be accurately adjusted, thereby ensuring the distance between the glass and the sputtering target 12 after the conveyor wheel 6 is adjusted, so that the coating processing quality of the glass is stable.

[0036] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A target-substrate distance adjustment structure of a coating device, comprising a coating device (1), wherein a guide track (11) is arranged at the bottom of the coating device (1), a sputtering target (12) is arranged at the front side of the coating device (1), and a conveyor belt (13) is arranged at the top of the coating device (1), characterized in that: The upper end of the conveyor belt (13) is fixedly connected to a bevel tooth column (2), the bevel tooth column (2) is meshingly connected to a transmission member (3), the rear part of the transmission member (3) is meshingly connected to a linkage member (4), the middle part of the linkage member (4) is provided with an adjustment member (9), the front part of the linkage member (4) is connected to a support frame (8), the frame body of the support frame (8) is rotatably connected to a long tooth column (5), the long tooth column (5) is meshingly connected to a transmission wheel (6), and the middle part of the support frame (8) is provided with an adjustment member (9).

2. The target-substrate distance adjustment structure of a coating device according to claim 1, characterized in that: The transmission member (3) comprises: a bevel gear column four (31) and a gear one (32); the bevel gear column four (31) is meshedly connected to the bevel gear column one (2); the column body of the bevel gear column four (31) passes through and is fixedly connected to the gear one (32); the gear one (32) is meshedly connected to the linkage member (4); and the end of the bevel gear column four (31) is rotatably connected to the rear of the coating device (1).

3. The target-substrate distance adjustment structure of a coating device according to claim 2, characterized in that: The linkage member (4) comprises: gear 2 (41) and bevel gear column 3 (42); gear 2 (41) is meshedly connected to gear 1 (32); one end of gear 2 (41) is rotatably connected to the rear of the coating device (1); the other end of gear 2 (41) is fixedly connected to one end of an adjusting member (9); the other end of the adjusting member (9) is fixedly connected to the end of bevel gear column 3 (42); bevel gear column 3 (42) is meshedly connected to a long gear column (5); and the column body of bevel gear column 3 (42) penetrates and is rotatably connected to the frame body of the support frame (8).

4. The target-substrate distance adjustment structure of a coating device according to claim 3, characterized in that: The adjusting member (9) comprises: an adjusting disk 1 (91), an articulated rod 1 (911), an adjusting disk 2 (92), and an articulated rod 2 (921); the protruding handle of the adjusting disk 1 (91) is rotatably connected to one end of the articulated rod 1 (911); the other end of the articulated rod 1 (911) is articulated to one end of the articulated rod 2 (921); the other end of the articulated rod 2 (921) is rotatably connected to the protruding handle of the adjusting disk 2 (92).

5. The target-substrate distance adjustment structure of a coating device according to claim 1, characterized in that: The long tooth column (5) comprises: a tooth column (51) and a second conical tooth column (52); the end of the tooth column (51) is fixedly connected to the end of the second conical tooth column (52); the second conical tooth column (52) is meshingly connected to the third conical tooth column (42); the column body of the second conical tooth column (52) penetrates and is rotatably connected to the frame body of the support frame (8); and the tooth column (51) is meshingly connected to the transmission wheel (6).

6. The target-substrate distance adjustment structure of a coating device according to claim 5, characterized in that: The transmission wheel (6) comprises: a support wheel (61) and a toothed disc (62); the end of the support wheel (61) is fixedly connected to the end of the toothed disc (62); the toothed disc (62) is meshedly connected to a tooth column (51); and the column of the support wheel (61) penetrates and is rotatably connected to a frame body of a support frame (8).

7. The target-substrate distance adjustment structure of a coating device according to claim 1, characterized in that: The positioning member (7) comprises: a fixed handle (71), an adjusting screw hole (711), a sliding handle (72), and a track groove (721); the end of the fixed handle (71) is fixedly connected to the frame body of the support frame (8); the handle body of the fixed handle (71) is provided with a plurality of adjusting screw holes (711); the adjusting screw holes (711) are fixedly connected to the threaded holes of the sliding handle (72) by bolts; the handle body of the sliding handle (72) is provided with a track groove (721); the track groove (721) is slidably connected to the protruding strip of the fixed handle (71); and the end of the sliding handle (72) is fixedly connected to the rear of the coating device (1).

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