Radio frequency plane cathode capable of conveniently adjusting number of power connection points and coating equipment

Abstract

The invention provides a radio frequency plane cathode convenient for adjusting the number of power connection points. The radio frequency plane cathode comprises a base used for installing a magnetic circuit and a target material, and a power connection end used for being connected with a power supply, a plurality of power connection potentials are distributed on the base; each power connection potential is correspondingly provided with a corresponding power connection assembly, each power connection assembly comprises a power connection part and a supporting part for supporting the power connection part, and the power connection parts in all the power connection assemblies are electrically connected with the power connection ends. And each power connection part can independently move on the corresponding supporting part so as to be in contact with or separated from the corresponding power connection potential distributed on the base. The coating equipment provided by the invention comprises the radio frequency planar cathode convenient for adjusting the number of the power connection points. The method solves the problem that the current sputtering plane cathode power connection point cannot be adjusted, and has the advantages of flexibly adapting to the process requirements of customers, meeting the equipment integration requirements and improving the coating uniformity.

Description

Technical Field

[0001] The invention relates to the technical field of film coating, and in particular to a radio frequency planar cathode and film coating equipment which are convenient for adjusting the number of electrical connection points. Background Art

[0002] The RF planar cathode is part of the coating equipment. During the coating process, the current will affect the cathode's emission of electrons, which in turn changes the plasma state and the material deposition rate. When the current is increased, more coating materials can often be ionized and excited, thereby accelerating their deposition onto the substrate. The more material is deposited in the same time, the greater the coating thickness, and vice versa. However, the number and distribution of the connection points of the existing RF planar cathode have been determined at the beginning of the design, and the number and distribution of the connection points cannot be adjusted according to actual conditions. Summary of the invention

[0003] In order to solve the technical problems existing in the background technology, the present invention proposes a radio frequency planar cathode and a coating device which are convenient for adjusting the number of power connection points.

[0004] The present invention provides a radio frequency planar cathode that is convenient for adjusting the number of power connection points, comprising: a base for installing a magnetic circuit and a target material, and a power connection terminal for connecting a power source;

[0005] A plurality of connection points are distributed on the base; a corresponding connection assembly is arranged corresponding to each connection point, and the connection assembly includes a connection component and a support component for supporting the connection component. The connection components in all connection components are electrically connected to the connection terminals respectively, and each connection component can move independently on the corresponding support component to form contact or separation with the corresponding connection point distributed on the base.

[0006] Preferably, the power connection component has an insulating part and a conductive part, and is axially movably mounted on the support component, wherein the conductive part is located on the support component close to the base and electrically connected to the power connection end, and the insulating part is located on the support component away from the base.

[0007] Preferably, the power connection component is threadedly assembled with the support component.

[0008] Preferably, a threaded hole is provided on the supporting component, and the power connection component is threadedly assembled in the threaded hole of the supporting component.

[0009] Preferably, a nut is provided on the supporting component, and the electrical connection component is assembled with the nut.

[0010] Preferably, a protective cover is provided on the end of the insulating portion away from the conductive portion.

[0011] Preferably, an upper limit is provided at the end of the insulating portion.

[0012] Preferably, a limiting component is provided between the conductive portion and the insulating portion of the power connection component, and the limiting component and the conductive portion are located on the same side of the supporting component.

[0013] Preferably, the insulating part and the conductive part are detachably assembled.

[0014] Preferably, the supporting member is an insulating member.

[0015] Preferably, a metal plate fixed to the support component is provided on a side of the support component away from the base.

[0016] Preferably, the power connection components are connected to each other via connecting components to form a whole.

[0017] Preferably, the power connection component is electrically connected to the power connection terminal through a conductive wire or a conductive plate, and when a conductive plate is used for electrical connection, the power connection terminal and the power connection assembly are respectively mounted on the conductive plate, the conductive plate is mounted on the base and covers all the connection potentials, and an insulating pad is arranged between the conductive plate and the base, and a corresponding through hole is arranged at any contact position of the conductive plate; the power connection components in each power connection component are arranged in their through holes one by one, and the peripheral wall of the conductive part thereof contacts the inner wall of the through hole to form an electrical connection.

[0018] Preferably, the conductive portion is located on the conductive plate and is provided with a lower limit position on the side close to the base.

[0019] The present invention provides a coating device, comprising: a radio frequency planar cathode as described above, which is convenient for adjusting the number of electrical connection points.

[0020] In the present invention, a corresponding power connection assembly and power connection component are arranged at each power connection potential, and the power connection components in all power connection assemblies are electrically connected to the power connection ends respectively, and all power connection components can move on the corresponding support components to form contact or separation with the base, so that the number and distribution of power connection points can be changed by adjusting the power connection components at different power connection potentials to contact or separate with the base, thereby solving the problem that the power connection points of the sputtering plane cathode cannot be adjusted. The invention has the advantages of flexibly adapting to customer process requirements, meeting equipment integration requirements, and improving coating uniformity. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 A schematic diagram of the structure of a radio frequency planar cathode proposed by the present invention that is convenient for adjusting the number of connection points;

[0022] Figure 2 A schematic diagram of assembling the power connection component and the support component in a radio frequency planar cathode that is convenient for adjusting the number of power connection points proposed by the present invention;

[0023] Figure 3A top view of the structure diagram of the power connection terminal and the power connection assembly installed on the conductive plate in a radio frequency planar cathode that is convenient for adjusting the number of power connection points proposed by the present invention;

[0024] Figure 4 The present invention provides an axial view of a structural diagram of the installation of the power connection terminal and the power connection assembly on a conductive plate in a radio frequency planar cathode that is convenient for adjusting the number of power connection points. DETAILED DESCRIPTION

[0025] Reference Figure 1 The present invention proposes a radio frequency planar cathode that is convenient for adjusting the number of power connection points, comprising: a base 1 for installing a magnetic circuit and a target material, and a power connection terminal 2 for connecting a power source;

[0026] There are several connection points distributed on the base 1; each connection point is correspondingly provided with a corresponding connection assembly, the connection assembly includes a connection component 3 and a support component 4 for supporting the connection component 3, the connection components 3 in all connection assemblies are respectively electrically connected to the connection terminal 2, and each connection component 3 can be independently moved on the corresponding support component 4 to form contact or separation with the corresponding connection point distributed on the base. During the working process, the number and distribution of connection points are adjusted by controlling the contact or separation of each connection component 3 with the corresponding connection point on the base 1.

[0027] Reference Figure 2 The power connection component 3 has an insulating portion 31 and a conductive portion 32. The power connection component 3 is axially movable and installed on the support component 4. The conductive portion 32 is located on the side of the support component 4 close to the base 1 and is electrically connected to the power connection terminal 2. The insulating portion 31 is located on the side of the support component 4 away from the base 1. In order to facilitate the control of the axial movement of the power connection component 3, the power connection component 3 and the support component 4 are connected by threaded assembly. The specific assembly method can be to directly set a threaded hole on the support component 4 and thread the power connection component 3 in the threaded hole of the support component 4, or to set a nut on the support component 4 and thread the power connection component 3 and the nut. During adjustment, the insulating portion 31 is rotated to drive the power connection component 3 to screw in or out, which can control the conductive portion 32 of the power connection component 3 to contact or separate from the base 1.

[0028] In order to prevent accidental touch, in this embodiment, a protective cover 5 is provided at the end of the insulating part 31 away from the conductive part 32. When adjustment is required, the protective cover 5 is opened, and after the adjustment is completed, the protective cover 5 is covered. In specific design, the protective cover 5 can be installed on the supporting component 4, or on other components that can cover the insulating part 31 inside.

[0029] In order to limit the screw-in amount of the power connection component 3 and to facilitate the rotation of the power connection component 3, an upper limit position 311 is set at the end of the insulating portion 31 of the power connection component 3 in this embodiment. During operation, the upper limit position 311 can be rotated manually or with a wrench to drive the entire power connection component 3 to be screwed in and out.

[0030] In addition, in this embodiment, a metal plate fixed to the support component 4 is provided on the side away from the base 1 to increase the surface strength of the support component 4 .

[0031] like Figure 2 A limiting component 6 is provided between the conductive portion 32 and the insulating portion 31 of the power connection component 3 , and the limiting component 6 and the conductive portion 32 are located on the same side of the supporting component 4 , so that the limiting component 6 limits the rotation amount of the power connection component 3 .

[0032] Reference Figure 3-4 The power connection component 3 can be electrically connected to the power connection terminal 2 through a conductive wire such as a cable or wire that can transmit current, or a conductive metal sheet such as a conductive plate or sheet that can conduct current input.

[0033] When a conductive wire is used for electrical connection, the electrical connection components are connected to each other through a connecting component to form a whole, and the electrical terminal 2 is installed on the connecting component so that the electrical terminal 2 and the electrical connection component form a whole, which is convenient for disassembly or separate sale.

[0034] When a conductive plate is used for electrical connection, the electrical terminals 2 and the electrical connection components are respectively mounted on the conductive plate, which is mounted on the base 1 and covers all the electrical potentials, and an insulating pad 7 is arranged between the conductive plate and the base 1, and a corresponding through hole is arranged at any contact point of the conductive plate; each electrical connection component 3 is arranged in its through hole in a one-to-one correspondence, and the peripheral wall of its conductive part 32 contacts the inner wall of the through hole to form an electrical connection. During assembly, the conductive plate is directly mounted on the base 1, and then the electrical terminal 2 is connected to electricity, which is extremely convenient and quick.

[0035] Furthermore, the conductive part 32 is provided with a lower limit 321 on the side of the conductive plate close to the base 1 to prevent the electrical connection component 3 from being screwed out of the through hole. In order to facilitate installation and maintenance, the insulating part 31 and the conductive part 32 are arranged in a detachable assembly structure in this embodiment. The specific assembly method can be threaded assembly, for example, the conductive part 32 is directly screwed into the insulating part 31 from the end of one end of the insulating part 31. When disassembling or maintaining, the conductive plate is first removed from the base 1, and then the conductive part 32 is directly removed from the insulating part 31 from the other side of the conductive plate.

[0036] The present invention provides a coating device, comprising: a radio frequency planar cathode as described above, which is convenient for adjusting the number of electrical connection points.

[0037] As can be seen from the above, the present invention sets a corresponding power connection component, the power connection part 3, at each connection potential, and makes the power connection parts 3 in all power connection components electrically connected to the power connection terminal 2 respectively, and all power connection parts 3 can move on the corresponding support part 4 to form contact or separation with the base 1, so as to change the number and distribution of power connection points by adjusting the power connection parts 3 at different connection potentials to contact or separate with the base 1, so that during the use of the planar cathode, the local current can be adjusted according to the actual coating uniformity to correct the uniformity of the entire coating equipment, which solves the problem that the current sputtering planar cathode power connection points cannot be adjusted, and has the advantages of flexibly adapting to customer process requirements, meeting equipment integration requirements, and improving coating uniformity.

[0038] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A radio frequency planar cathode that is convenient for adjusting the number of connection points, characterized in that: include: A base (1) for mounting a magnetic circuit and a target material, and a power connection terminal (2) for connecting to a power source; A plurality of connection points are distributed on the base (1); a corresponding connection assembly is provided for each connection point, the connection assembly comprising a connection component (3) and a support component (4) for supporting the connection component (3); the connection components (3) in all the connection components are electrically connected to the connection terminals (2) respectively, and each connection component (3) can be independently moved on the corresponding support component (4) to form contact with or separate from the corresponding connection point distributed on the base (1).

2. The radio frequency planar cathode that is convenient for adjusting the number of connection points according to claim 1, characterized in that: The power connection component (3) comprises an insulating portion (31) and a conductive portion (32). The power connection component (3) is axially movably mounted on the support component (4), and the conductive portion (32) is located on the side of the support component (4) close to the base (1) and electrically connected to the power connection terminal (2), while the insulating portion (31) is located on the side of the support component (4) far from the base (1).

3. The radio frequency planar cathode that is convenient for adjusting the number of connection points according to claim 2, characterized in that: The power connection component (3) and the support component (4) are threadedly assembled.

4. The radio frequency planar cathode that is convenient for adjusting the number of connection points according to claim 3, characterized in that: The support component (4) is provided with a threaded hole, and the power connection component (3) is threadedly assembled in the threaded hole of the support component (4).

5. The radio frequency planar cathode that is convenient for adjusting the number of connection points according to claim 3, characterized in that: A nut is provided on the supporting component (4), and the power connection component (3) is assembled with the nut.

6. The radio frequency planar cathode that is convenient for adjusting the number of connection points according to claim 2, characterized in that: A protective cover (5) is provided on the outer cover of the end of the insulating part (31) away from the conductive part (32); Preferably, an upper limit position (311) is provided at the end of the insulating portion (31); Preferably, the power connection component (3) is provided with a limiting component (6) between the conductive portion (32) and the insulating portion (31), and the limiting component (6) and the conductive portion (32) are located on the same side of the supporting component (4); Preferably, the insulating part (31) and the conductive part (32) are detachably assembled.

7. The radio frequency planar cathode that is convenient for adjusting the number of connection points according to claim 1, characterized in that: The supporting component (4) is an insulating component; Preferably, a metal plate fixed to the support component (4) is provided on the side away from the base (1).

8. The radio frequency planar cathode that is convenient for adjusting the number of connection points according to claim 1, characterized in that: The power connection components are connected to each other through connecting parts to form a whole.

9. The radio frequency planar cathode that is convenient for adjusting the number of connection points according to claim 2, characterized in that: The electrical connection component (3) is electrically connected to the electrical connection terminal (2) through a conductive wire or a conductive plate, and when the conductive plate is used for electrical connection, the electrical connection terminal (2) and the electrical connection component are respectively mounted on the conductive plate, the conductive plate is mounted on the base (1) and covers all the connection potentials, and an insulating pad (7) is arranged between the conductive plate and the base (1), and a corresponding through hole is arranged at any contact point of the conductive plate; the electrical connection components (3) in each electrical connection component (3) are arranged in their through holes one by one, and the peripheral wall of the conductive part (32) thereof contacts the inner wall of the through hole to form an electrical connection; Preferably, the conductive portion (32) is located on the conductive plate and is close to the base (1) and is provided with a lower limit position (321).

10. A coating device, characterized in that: include: A radio frequency planar cathode that facilitates adjustment of the number of connection points as claimed in any one of claims 1 to 9.

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