Metal film evaporation equipment for capacitor cover plate processing

Abstract

The invention relates to the technical field of capacitor cover plate coating, in particular to metal film evaporation equipment for capacitor cover plate machining, which comprises a reaction box, a rotating mechanism, a connecting mechanism and a plurality of rotating discs. The cover plates can be mounted and taken out more simply, and more storage racks can be stored through the mounting structure. And in order to more conveniently mount and take out the cover plate, the pull rod descends under the action of gravity, so that the rotating disc is clamped with the rotating shaft, the plurality of clamping frames can approach the box door one by one, and the cover plate is convenient to mount and take out. And during film coating, due to closing of the box door, clamping connection is established between the rotating disc and the reaction box, the rotating disc cannot rotate and can rotate, a plurality of clamping connection frames can be pushed to rotate at the same time through the rotating shaft, namely, the multiple layers of storage frames can rotate synchronously, and the film coating uniformity of the cover plate is guaranteed.

Description

Technical Field

[0001] The invention relates to the technical field of capacitor cover plate coating, and in particular to a metal film evaporation device for capacitor cover plate processing. Background Art

[0002] Metal film evaporation equipment is a device used to deposit metal film on solid surface, which is deposited on solid surface by heating and evaporating a certain substance. Existing coating equipment protects metal heating evaporation equipment and reaction chamber, heats and evaporates the coating metal through metal heating evaporation equipment, and then continuously injects it into the reaction chamber.

[0003] The reaction chamber in the prior art generally places the workpiece to be coated directly on a rotating platform, or hangs the workpiece in the reaction chamber by hooks. However, due to the relatively small overall structure of the capacitor cover, the larger structure of the non-automobile wheel hub coating is coated. Therefore, the reaction chamber should consider how to store more capacitor covers in the chamber, and how to install and remove a large number of capacitor covers in the reaction chamber more quickly. In addition, the dense capacitor covers will make it difficult for the coating gas to enter the dense area when coating inside the reaction chamber, resulting in uneven thickness after coating.

[0004] Therefore, it is necessary to design a metal thin film evaporation equipment for capacitor cover processing, which can quickly and in large quantities install and remove capacitor covers, and when coating, when densely placed capacitor covers are placed, the covers can also be evenly coated. Summary of the invention

[0005] In view of the above-mentioned technical deficiencies, the purpose of the present invention is to provide a metal thin film evaporation equipment for capacitor cover plate processing, which can quickly and in large quantities install and remove capacitor cover plates, and when coating, when densely placed capacitor cover plates are placed, the cover plates can also be evenly coated.

[0006] In order to achieve the above-mentioned purpose, the present invention adopts the following technical scheme: the present invention provides a metal thin film evaporation equipment for capacitor cover plate processing, including a reaction box, a rotating mechanism, a connecting mechanism and multiple rotating disks, the rotating mechanism includes a rotating shaft installed in the middle of the reaction box and capable of rotating, multiple rotating disks are rotatably installed on the rotating shaft, the connecting mechanism is fixedly installed on the multiple rotating disks, the connecting mechanism is used to switch the rotating disk and the outer edge of the rotating shaft or the inner wall of the reaction box to be clamped, each rotating disk is provided with multiple rotatable clamping frames, the multiple clamping frames are evenly distributed along the circumferential direction of the rotating shaft, and one side of each clamping frame is meshed and connected with the rotating shaft, a detachable storage rack is provided on the other side of the clamping rack, multiple cover plates are clamped on the storage rack, and a box door that can be rotatably opened and closed is provided on the reaction box.

[0007] Preferably, the connecting mechanism includes two pull rods and clamping rods respectively installed on multiple rotating disks, two clamping rods are installed on each rotating disk, the two clamping rods are symmetrically arranged, the middle parts of the two clamping rods can be rotatably installed on the rotating disk, a sliding column is fixedly arranged on each clamping rod, and a waist-shaped sliding groove for the sliding column to slide is opened on the pull rod. A clamping block 1 is fixedly arranged on the outer edge of the reaction box, and a clamping block 2 is fixedly arranged on the inner edge of the rotating shaft. When the pull rod is pulled upward, the top of the clamping rod is clamped with the clamping block 1, and when the pull rod is pushed downward, the bottom of the clamping rod is clamped with the clamping block 2. A lifting mechanism is fixedly arranged on the top of the reaction box, and the lifting mechanism is used to pull the two pull rods upward, and the top of the pull rod is rotatably connected to the lifting mechanism.

[0008] Preferably, a rotating disc 1 is fixedly provided on the outer edge of the rotating shaft, a plurality of push pins are fixedly provided along the circumference of the rotating disc 1, each clamping frame includes a rotating disc 2 and a rotating shaft, a plurality of transmission pins inserted into the push pins are provided on the side of the rotating disc 2 close to the rotating disc 1, the plurality of transmission pins are evenly distributed along the circumferential direction of the rotating disc 2, one end of the rotating shaft is fixedly connected to the rotating disc 2, and a swivel seat rotatably connected to the rotating shaft is fixedly provided on the upper part of the rotating disc.

[0009] Preferably, the card-connecting frame includes a contact plate and a plurality of card posts, the contact plate is fixedly mounted on one end of the rotating shaft, the plurality of card posts are fixedly mounted on the contact plate, the storage frame includes a card plate and two plug posts, the card posts are card-connected to the card plate, the card plate is provided with card holes for inserting the card posts, the two plug posts are horizontally fixedly mounted on the card plate, and the cover plate is sleeved on the plug posts.

[0010] Preferably, a plurality of locking mechanisms are fixedly provided on the pull rod, the plurality of locking mechanisms respectively correspond to the multiple layers of rotating disks, and the locking mechanisms are located above the rotating disks. When the pull rod is pulled upward to the final position, the locking mechanisms contact the side of the card plate away from the contact plate. When the pull rod is pulled downward to the final position, the locking mechanisms are located below the card plate.

[0011] Preferably, each locking mechanism includes a connecting ring, two connecting rods and multiple pressure strips, one end of the two connecting rods are fixedly connected to the two pull rods respectively, the inner sides of the two connecting rods are fixedly connected to the connecting ring, and the multiple pressure strips are fixedly mounted on the connecting ring. The tops of the multiple pressure strips are provided with outward flanges. When the pull rod is pulled upward to the final position, one side of the pressure strip contacts the card plate.

[0012] Preferably, the lifting mechanism includes a pulling plate, a rotating seat, a rotating ring, a trapezoidal block, a protrusion and a plurality of guide pillars, the bottoms of the plurality of guide pillars are fixedly connected to the top of the pulling plate, the guide pillars can be vertically slidably installed on the reaction box, the rotating seat is fixedly installed on the bottom of the pulling plate, the rotating ring can be rotatably installed on the rotating seat, the pulling rod is fixedly installed on the bottom of the rotating seat, the trapezoidal block is fixedly installed on the bottom of the pulling plate, and the protrusion is fixedly installed on the box door.

[0013] Preferably, the reaction box is provided with a vacuum exhaust port and a coating air inlet, the vacuum exhaust port is used to be connected to a vacuum generator, and the coating air inlet is used to be connected to a metal heating evaporation device.

[0014] Preferably, the rotating mechanism includes a rotating motor, a retaining ring is fixedly mounted on the top of the reaction box, and an output end of the retaining ring passes through the reaction box and is fixedly connected to the top of the rotating shaft.

[0015] Preferably, a plurality of retaining rings are fixedly arranged on the outer edge of the rotating shaft, and the tops of the retaining rings are in contact with the bottom of the rotating disk.

[0016] The beneficial effects of the present invention are as follows: the metal film evaporation equipment for processing capacitor cover plates can make the installation and removal of multiple cover plates simpler by being able to place the storage rack horizontally, and this installation structure can store more storage racks. In order to install and remove the cover plates more conveniently, the pull rod is lowered by gravity, so that the rotating disk and the rotating shaft are connected, so that multiple connecting racks can be close to the box door one by one, which is convenient for installing and removing the cover plates. In addition, when coating, due to the closing of the box door, the pull rod is pulled upward, that is, the connecting between the rotating disk and the reaction box is established, so that the rotating disk cannot rotate, but can rotate on the rotating shaft to simultaneously push multiple connecting racks to rotate, that is, the multi-layer storage rack can rotate synchronously, and the storage rack drives the cover plate to rotate and coat the film, thereby ensuring the uniformity of the coating of the cover plate. In addition, the storage rack placed horizontally and along the circumferential direction of the rotating shaft can make a large gap between two adjacent storage racks so that the coating gas can pass through quickly. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0018] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention.

[0019] Figure 2 It is the front view of the present invention.

[0020] Figure 3 This is a schematic diagram of the three-dimensional structure of the present invention without the shell of the reaction box.

[0021] Figure 4 for Figure 3 A partial enlarged view of point A.

[0022] Figure 5 It is a partial cross-sectional view of the present invention.

[0023] Figure 6 It is a schematic diagram of the local three-dimensional structure of the present invention.

[0024] Figure 7 It is a three-dimensional structural schematic diagram of the storage rack in the installed state.

[0025] Figure 8 It is a schematic diagram of the three-dimensional structure of the locking mechanism.

[0026] Fig. 9 It is a schematic diagram of the three-dimensional structure of the pulling mechanism.

[0027] Fig.10 It is a schematic diagram of the partial three-dimensional structure of the pulling mechanism.

[0028] Description of reference numerals: 1, reaction box; 1a, box door; 1b, vacuum exhaust port; 1c, coating air inlet; 1d, clamping block 1; 2, rotating mechanism; 2a, rotating shaft; 2b, clamping block 2; 2c, rotating disk 1; 2d, push column; 2e, rotating motor; 2f, retaining ring; 3, storage rack; 3a, clamping plate; 3b, plug column; 4, connecting mechanism; 4a, pull rod; 4b, clamping rod; 4b1 , sliding column; 4c, lifting mechanism; 4c1, pulling plate; 4c2, guide column; 4c3, swivel seat; 4c4, swivel ring; 4c5, trapezoidal block; 4c6, protrusion; 5, rotating disk; 6, clamping frame; 6a, rotating disk II; 6b, transmission column; 6c, rotating shaft; 6d, clamping column; 6e, contact plate; 7, cover plate; 8, locking mechanism; 8a, connecting ring; 8b, connecting rod; 8c, pressure strip. DETAILED DESCRIPTION

[0029] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0030] Embodiment: The present invention provides a metal film evaporation device for processing a capacitor cover plate, such as Figure 1 , Figure 2 and Figure 3As shown, it includes a reaction box 1, a rotating mechanism 2, a connecting mechanism 4 and a plurality of rotating disks 5, the rotating mechanism 2 is fixedly installed on the reaction box 1, the rotating mechanism 2 includes a rotating shaft 2a installed in the middle of the reaction box 1 and capable of rotation, and a plurality of rotating disks 5 are rotatably installed on the rotating shaft 2a, the connecting mechanism 4 is fixedly installed on the plurality of rotating disks 5, the connecting mechanism 4 is used to switch the rotating disk 5 to be engaged with the outer edge of the rotating shaft 2a or the inner wall of the reaction box 1, and a plurality of rotatable clamping frames 6 are arranged on each rotating disk 5, the plurality of clamping frames 6 are evenly distributed along the circumferential direction of the rotating shaft 2a, and one side of each clamping frame 6 is engaged with the rotating shaft 2a When the connection mechanism 4 locks the rotating disk 5 and the rotating shaft 2a, the rotating shaft 2a will drive the rotating disk 5 to rotate together, that is, the clamping frame 6 installed on the rotating disk 5 rotates together with the rotating shaft 2a, so that the rotating shaft 2a and the clamping frame 6 cannot be engaged, that is, when the rotating shaft 2a rotates, it will not drive the clamping frame 6 to rotate, but drive the clamping frame 6 to rotate in a circle. Multiple clamping frames 6 will approach the door 1a one by one, and a detachable storage rack 3 is provided on the other side of the clamping frame 6. Multiple cover plates 7 are clamped on the storage rack 3, and the reaction box 1 is provided with a door 1a that can be rotated and opened. When the clamping frame 6 approaches the door 1a, the worker can clamp the storage rack 3 one by one on the clamping frame 6. Multiple cover plates 7 have been installed on the storage rack 3 in advance. In this way, installation is more convenient.

[0031] When the connecting mechanism 4 locks the rotating disk 5 and the inner wall of the reaction box 1, that is, the rotating disk 5 cannot rotate, and when the rotating shaft 2a rotates, the clamping frame 6 will not rotate along with the rotating shaft 2a, but through the meshing connection between the two, the clamping frame 6 rotates on its own, that is, during the coating process, the storage rack 3 is driven to rotate by the clamping frame 6, so that the cover plate 7 can be coated more evenly.

[0032] In order to enable the plurality of rotating disks 5 to be switched by the connecting mechanism 4 to be connected to the inner wall of the reaction box 1 or the rotating shaft 2a, for this purpose, Figure 3 , 4 As shown in Figure 5, the connecting mechanism 4 includes two pull rods 4a and clamping rods 4b respectively installed on multiple rotating disks 5, each rotating disk 5 is installed with two clamping rods 4b, the two clamping rods 4b are symmetrically arranged, and the middle parts of the two clamping rods 4b can be rotatably installed on the rotating disk 5, each clamping rod 4b is fixedly provided with a sliding column 4b1, and the pull rod 4a is provided with a waist-shaped sliding groove for the sliding column 4b1 to slide. When the pull rod 4a is pulled upward or pushed downward, the pull rod 4a will drive the clamping rod 4b to rotate along the hinge with the rotating disk 5, a clamping block 1d is fixedly provided on the outer edge of the reaction box 1, and a clamping block 2b is fixedly provided on the inner edge of the rotating shaft 2a. When the pull rod 4a is pulled upward, as shown in Figure 5, Figure 5As shown, the top of the clamping rod 4b is clamped with the clamping block 1d, and when the pull rod 4a is pushed downward, the bottom of the clamping rod 4b is clamped with the clamping block 2b. A lifting mechanism 4c is fixedly arranged on the top of the reaction box 1. The lifting mechanism 4c is used to pull the two pull rods 4a upward, and the top of the pull rod 4a is rotatably connected with the lifting mechanism 4c. When the clamping rod 4b is clamped with the clamping block 1d, the clamping rod 4b connects the rotating disk 5 and the reaction box 1, so that the rotating disk 5 cannot rotate with the rotating shaft 2a. When the rotating shaft 2a rotates, the clamping frame 6 can be driven to rotate. When the clamping rod 4b is clamped with the clamping block 2b, the rotation of the rotating shaft 2a will drive the rotating disk 5 to rotate. When the rotating disk 5 is driven to rotate, the top of the pull rod 4a is rotatably connected with the lifting mechanism 4c, so that the pull rod 4a can rotate to avoid obstruction. By pulling the pull rod 4a upward, multiple clamping rods 4b can be driven to move, and no electrical components are required inside the reaction box 1, which reduces the occurrence of failures. The clamping rods 4b are pulled symmetrically to make them clamped, and the clamping is more stable.

[0033] The bottoms of the clamping block 1 1d and the clamping block 2 2b are both provided with grooves, and the grooves are used for the end of the clamping rod 4b to be rotated and clamped.

[0034] In order to realize the meshing transmission between the clamping frame 6 and the rotating shaft 2a, for this purpose, as shown in FIG. Figure 6 As shown, a rotating disk 1 2c is fixedly arranged on the outer edge of the rotating shaft 2a, and a plurality of push pins 2d are fixedly arranged on the rotating disk 1 2c along the circumference. Each clamping frame 6 includes a rotating disk 2 6a and a rotating shaft 6c. A plurality of transmission pins 6b inserted into the push pins 2d are arranged on the side of the rotating disk 2 6a close to the rotating disk 1 2c. The plurality of transmission pins 6b are evenly distributed along the circumference of the rotating disk 2 6a. One end of the rotating shaft 6c is fixedly connected to the rotating disk 2 6a. A rotating seat connected to the rotating shaft 6c is fixedly arranged on the rotating disk 5. When the rotating disk 5 and the reaction box 1 are locked, the rotating disk 5 cannot rotate, and the rotating shaft 2a rotates, which will make the rotating shaft 2a drive the plurality of push pins 2d to rotate through the rotating disk 1 2c, and the push pins 2d will push the transmission pins 6b to rotate, so that the rotating shaft 6c rotates, so that the clamping frame 6 drives the storage frame 3 connected thereto to rotate, that is, the engagement between the clamping frame 6 and the rotating shaft 2a is achieved. When the rotating disk 5 rotates, the clamping frame 6 will be driven to rotate together, so that the transmission column 6b and the push column 2d are in a relatively static state, avoiding driving the clamping frame 6 to rotate, and facilitating the clamping of the storage frame 3 and the clamping frame 6.

[0035] In order to realize the quick connection between the card frame 6 and the storage rack 3, so as to reduce the consumption of installation time, and to realize the connection between the cover plate 7 and the storage rack 3, for this purpose, as Figure 6 and Figure 7As shown, the clamping frame 6 includes a contact plate 6e and a plurality of clamping columns 6d. The contact plate 6e is fixedly mounted on one end of the rotating shaft 6c. The plurality of clamping columns 6d are fixedly mounted on the contact plate 6e. The storage rack 3 includes a clamping plate 3a and two plugging columns 3b. The plugging columns 6d are clamped with the clamping plate 3a. The clamping plate 3a is provided with a clamping hole for the plugging columns 6d to be inserted. The two plugging columns 3b are fixedly mounted horizontally on the clamping plate 3a. The cover plate 7 is sleeved on the plugging columns 3b. When the rotating shaft 6c is driven to rotate, the rotating shaft 6c will drive the clamping plate 3a to rotate through the contact plate 6e and the plugging columns 6d, so that the plugging columns 3b can drive the plurality of cover plates 7 to rotate, so that the film attached to the plurality of cover plates 7 is more uniform. When installing the storage rack 3, the worker only needs to align the plugging columns 6d with the clamping plate 3a for clamping.

[0036] If only the clamping column 6d is clamped to the clamping plate 3a, when the storage rack 3 is driven to rotate, there is a probability that the clamping connection with the clamping frame 6 will be separated. Figure 7 As shown, a plurality of locking mechanisms 8 are fixedly arranged on the pull rod 4a, and the plurality of locking mechanisms 8 respectively correspond to the multiple layers of rotating disks 5, and the locking mechanisms 8 are located above the rotating disks 5. When the pull rod 4a is pulled upward to the final position, the locking mechanisms 8 abut against the side of the card plate 3a away from the contact plate 6e, so that the locking mechanism 8 presses the card plate 3a against the contact plate 6e, avoiding separation between the storage rack 3 and the card-connecting rack 6, and realizing locking therebetween. When the pull rod 4a is pulled downward to the final position, the locking mechanism 8 is located below the card plate 3a, avoiding obstruction of the locking mechanism 8 when the storage rack 3 and the card-connecting rack 6 are card-connected.

[0037] In order to enable the pull rod 4a to pull the locking mechanism 8 to move upward together with the pull rod 4a during the upward movement, Figure 4 and Figure 8As shown, each locking mechanism 8 includes a connecting ring 8a, two connecting rods 8b and a plurality of pressure strips 8c, one end of the two connecting rods 8b is fixedly connected to the two pull rods 4a respectively, the inner side of the two connecting rods 8b is fixedly connected to the connecting ring 8a, and the plurality of pressure strips 8c are fixedly installed on the connecting ring 8a, and the tops of the plurality of pressure strips 8c are provided with outward flanges, and when the pull rod 4a is pulled upward to the final position, one side of the pressure strip 8c contacts the card plate 3a. That is, through the contact of the pressure strip 8c, the storage rack 3 and the card-connecting rack 6 are locked to avoid separation during the rotation process. And by setting the flange, when the card plate 3a is slightly displaced outward, the card plate 3a can be re-contacted on the card-connecting rack 6 through the upwardly moving flange, so as to ensure that the locking can be achieved. The entire locking process does not require electrical components, and is based on the movement of the pull rod 4a that originally needs to be pulled upward, ensuring that locking and rotation preparation are carried out synchronously. If not locked, the rotation of the clamping frame 6 will not start, ensuring the operational safety of the equipment. At the same time, there are no electrical components, avoiding the damage of coating to electrical components.

[0038] Since multiple storage racks 3 need to rotate around the rotating mechanism 2 after the door is opened, the pull rod 4a needs to be able to quickly drop after the door is opened so that the rotating disk 5 and the rotating mechanism 2 are locked, and the pull rod 4a can rotate around the lifting mechanism 4c. Figure 1 and Fig. 9 As shown, the lifting mechanism 4c includes a pull plate 4c1, a rotating seat 4c3, a rotating ring 4c4, a trapezoidal block 4c5, a protrusion 4c6 and a plurality of guide pillars 4c2, the bottom of the plurality of guide pillars 4c2 is fixedly connected to the top of the pull plate 4c1, the guide pillars 4c2 can be vertically slidably mounted on the reaction box 1, the rotating seat 4c3 is fixedly mounted on the bottom of the pull plate 4c1, the rotating ring 4c4 can be rotatably mounted on the rotating seat 4c3, the pull rod 4a is fixedly mounted on the bottom of the rotating seat 4c3, the trapezoidal block 4c5 is fixedly mounted on the bottom of the pull plate 4c1, and the protrusion 4c6 is fixedly mounted on the box door 1a. When the box door 1a is closed, the protrusion 4c6 will push the trapezoidal block 4c5 upward, so that the trapezoidal block 4c5 is lifted upward. The trapezoidal block 4c5 will pull the rotating ring 4c4 upward through the pull plate 4c1, that is, the pull rod 4a is driven upward. When the door is opened, the protrusion 4c6 separates from the trapezoidal block 4c5, and the pull rod 4a moves downward, so that the rotating disk 5 is quickly locked with the rotating mechanism 2. After locking, when the rotating shaft 2a rotates, the rotating shaft 2a drives the pull rod 4a to rotate together, and the pull rod 4a rotates along the rotating seat 4c3 through the support of the rotating ring 4c4.

[0039] like Figure 1As shown, the reaction box 1 is provided with a vacuum exhaust port 1b and a coating air inlet 1c. The vacuum exhaust port 1b is used to connect to a vacuum generator, and the coating air inlet 1c is used to connect to a metal heating evaporation device. The air inside the reaction box 1 is extracted through the vacuum exhaust port 1b, so that a vacuum environment is formed inside the reaction box 1 during coating. The coating air inlet 1c is used to supply coating gas to enter the reaction box 1.

[0040] like Figure 3 As shown, the rotating mechanism 2 includes a rotating motor 2e, a retaining ring 2f is fixedly mounted on the top of the reaction box 1, and the output end of the retaining ring 2f passes through the reaction box 1 and is fixedly connected to the top of the rotating shaft 2a. By controlling the rotating motor 2e to work, the rotating motor 2e drives the rotating shaft 2a to rotate.

[0041] like Figure 5 and Figure 6 As shown, a plurality of retaining rings 2f are fixedly provided on the outer edge of the rotating shaft 2a, and the top of the retaining ring 2f contacts the bottom of the rotating disk 5, so that the plurality of rotating disks 5 can be rotatably installed on the rotating shaft 2a.

[0042] When in use, before the pull rod 4a is pulled upward, the connecting mechanism 4 locks the rotating disk 5 with the rotating shaft 2a, and the rotating disk 5 is driven to rotate together with the clamping frame 6 by the rotation of the rotating shaft 2a. For each rotation of one station, the worker can install a row of storage racks 3 one by one on the multi-layer rotating disk 5. After the installation of multiple rows of storage racks 3 is completed, the pull rod 4a is pulled upward by the lifting mechanism 4c, so that the connecting mechanism 4 locks the rotating disk 5 with the reaction box 1, and the pull rod 4a moving upward will also drive the locking mechanism 8 to move upward, locking the storage rack 3 with the clamping frame 6. At this time, when the rotating mechanism 2 is operated, the push column 2d can push the multiple clamping frames 6 to rotate, so that the cover plate 7 can be evenly coated. When the box door 1a is closed, the pull rod 4a automatically descends by gravity, locking the rotating shaft 2a with the rotating disk 5, so that the rotating disk 5 can be driven by the rotating rotating shaft 2a.

[0043] The metal film evaporation equipment for processing capacitor cover plates can make the installation and removal of multiple cover plates 7 easier by being able to place the storage rack 3 horizontally, and this installation structure can store more storage racks 3. In order to install and remove the cover plates 7 more conveniently, the pull rod 4a is lowered by gravity, so that the rotating disk 5 and the rotating shaft 2a are connected, so that multiple connecting racks 6 can be close to the box door 1a one by one, which is convenient for installing and removing the cover plates 7. In addition, when coating, due to the closing of the box door 1a, the pull rod 4a is pulled upward, that is, the connecting between the rotating disk 5 and the reaction box 1 is established, so that the rotating disk 5 cannot rotate, but can rotate on the rotating shaft 2a to simultaneously push the multiple connecting racks 6 to rotate, that is, the multi-layer storage racks 3 can rotate synchronously, and the storage racks 3 drive the cover plates 7 to perform rotary coating, thereby ensuring the uniformity of the coating of the cover plates 7. In addition, the storage racks 3 placed horizontally and along the circumferential direction of the rotating shaft 2a can make a large gap between two adjacent storage racks 3 so that the coating gas can pass through quickly.

[0044] Obviously, those skilled in the art can make various changes and modifications to the present invention without departing from the spirit and scope of the present invention. Thus, if these modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include these modifications and variations.

Claims

1. A metal thin film evaporation equipment for capacitor cover processing, characterized in that: The invention comprises a reaction box (1), a rotating mechanism (2), a connecting mechanism (4) and a plurality of rotating disks (5), wherein the rotating mechanism (2) comprises a rotating shaft (2a) which is mounted in the middle of the reaction box (1) and is capable of rotation, and the plurality of rotating disks (5) are all mounted on the rotating shaft (2a) in a rotatable manner, and the connecting mechanism (4) is fixedly mounted on the plurality of rotating disks (5), and the connecting mechanism (4) is used for switching the rotating disks (5) to engage with the outer edge of the rotating shaft (2a) or the inner wall of the reaction box (1), and each rotating disk (5) is provided with a plurality of rotatable engaging frames (6), the plurality of engaging frames (6) are evenly distributed along the circumferential direction of the rotating shaft (2a), and one side of each engaging frame (6) is meshedly connected with the rotating shaft (2a), and a detachable storage frame (3) is provided on the other side of the engaging frame (6), and a plurality of cover plates (7) are engaged with the storage frame (3), and the reaction box (1) is provided with a box door (1a) which can be rotatably opened and closed.

2. A metal thin film evaporation device for processing capacitor cover plates as claimed in claim 1, characterized in that: The connection mechanism (4) comprises two pull rods (4a) and clamping rods (4b) respectively mounted on a plurality of rotating disks (5), each rotating disk (5) being mounted with two clamping rods (4b), the two clamping rods (4b) being symmetrically arranged, the middle parts of the two clamping rods (4b) being rotatably mounted on the rotating disk (5), each clamping rod (4b) being fixedly provided with a sliding column (4b1), the pull rod (4a) being provided with a waist-shaped sliding groove for the sliding column (4b1) to slide, and a sliding column (4b1) being fixedly provided on the outer edge of the reaction box (1). A first clamping block (1d) is provided, and a second clamping block (2b) is fixedly arranged on the inner edge of the rotating shaft (2a); when the pull rod (4a) is pulled upward, the top of the clamping rod (4b) is clamped with the first clamping block (1d); when the pull rod (4a) is pushed downward, the bottom of the clamping rod (4b) is clamped with the second clamping block (2b); a lifting mechanism (4c) is fixedly arranged on the top of the reaction box (1); the lifting mechanism (4c) is used to pull the two pull rods (4a) upward, and the top of the pull rod (4a) is rotatably connected to the lifting mechanism (4c).

3. A metal thin film evaporation device for processing capacitor cover plates as claimed in claim 2, characterized in that: A rotating disc 1 (2c) is fixedly arranged on the outer edge of the rotating shaft (2a), and a plurality of push pins (2d) are fixedly arranged on the rotating disc 1 (2c) in a circular manner. Each clamping frame (6) comprises a rotating disc 2 (6a) and a rotating shaft (6c). A plurality of transmission pins (6b) inserted into the push pins (2d) are arranged on a side of the rotating disc 2 (6a) close to the rotating disc 1 (2c). The plurality of transmission pins (6b) are evenly distributed along the circumferential direction of the rotating disc 2 (6a). One end of the rotating shaft (6c) is fixedly connected to the rotating disc 2 (6a), and a rotating seat rotatably connected to the rotating shaft (6c) is fixedly arranged on the upper side of the rotating disc (5).

4. A metal thin film evaporation device for processing capacitor cover plates as claimed in claim 3, characterized in that: The card-jointed frame (6) comprises a contact plate (6e) and a plurality of card-jointed columns (6d), wherein the contact plate (6e) is fixedly mounted on one end of a rotating shaft (6c), and the plurality of card-jointed columns (6d) are fixedly mounted on the contact plate (6e). The storage frame (3) comprises a card-jointed plate (3a) and two plug-in columns (3b), wherein the card-jointed columns (6d) are card-jointed with the card-jointed plate (3a), and a card-jointed hole for inserting the card-jointed columns (6d) is provided on the card-jointed plate (3a), and the two plug-in columns (3b) are fixedly mounted horizontally on the card-jointed plate (3a), and the cover plate (7) is sleeved on the plug-in columns (3b).

5. The metal thin film evaporation equipment for capacitor cover processing according to claim 4, characterized in that: A plurality of locking mechanisms (8) are fixedly arranged on the pull rod (4a), and the plurality of locking mechanisms (8) respectively correspond to the multiple layers of rotating disks (5), and the locking mechanisms (8) are located above the rotating disks (5); when the pull rod (4a) is pulled upward to a final position, the locking mechanisms (8) abut against a side of the clamping plate (3a) away from the contact plate (6e); and when the pull rod (4a) is pulled downward to a final position, the locking mechanisms (8) are located below the clamping plate (3a).

6. A metal thin film evaporation device for processing capacitor cover plates as claimed in claim 5, characterized in that: Each locking mechanism (8) comprises a connecting ring (8a), two connecting rods (8b) and a plurality of pressure strips (8c); one end of the two connecting rods (8b) is fixedly connected to two pull rods (4a) respectively; the inner sides of the two connecting rods (8b) are fixedly connected to the connecting ring (8a); the plurality of pressure strips (8c) are fixedly mounted on the connecting ring (8a); the tops of the plurality of pressure strips (8c) are provided with outward flanges; when the pull rod (4a) is pulled upward to a final position, one side of the pressure strip (8c) contacts the clamping plate (3a).

7. The metal thin film evaporation equipment for capacitor cover processing according to claim 2, characterized in that: The lifting mechanism (4c) comprises a pulling plate (4c1), a rotating seat (4c3), a rotating ring (4c4), a trapezoidal block (4c5), a protrusion (4c6) and a plurality of guide pillars (4c2); the bottoms of the plurality of guide pillars (4c2) are fixedly connected to the top of the pulling plate (4c1); the guide pillars (4c2) are vertically slidably mounted on the reaction box (1); the rotating seat (4c3) is fixedly mounted on the bottom of the pulling plate (4c1); the rotating ring (4c4) is rotatably mounted on the rotating seat (4c3); the pulling rod (4a) is fixedly mounted on the bottom of the rotating seat (4c3); the trapezoidal block (4c5) is fixedly mounted on the bottom of the pulling plate (4c1); and the protrusion (4c6) is fixedly mounted on the box door (1a).

8. The metal thin film evaporation equipment for capacitor cover processing according to claim 1, characterized in that: The reaction box (1) is provided with a vacuum exhaust port (1b) and a coating air inlet (1c); the vacuum exhaust port (1b) is used to be connected to a vacuum generator, and the coating air inlet (1c) is used to be connected to a metal heating evaporation device.

9. The metal thin film evaporation equipment for capacitor cover processing according to claim 1, characterized in that: The rotating mechanism (2) comprises a rotating motor (2e), a retaining ring (2f) fixedly mounted on the top of the reaction box (1), and an output end of the retaining ring (2f) passes through the reaction box (1) and is fixedly connected to the top of the rotating shaft (2a).

10. The metal thin film evaporation equipment for capacitor cover processing according to claim 1, characterized in that: A plurality of retaining rings (2f) are fixedly arranged on the outer edge of the rotating shaft (2a), and the top of the retaining ring (2f) contacts the bottom of the rotating disk (5).

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