Integrated extremely high vacuum pipeline pump for particle accelerator

Abstract

The invention relates to the technical field of vacuum acquisition of particle accelerators, in particular to an integrated extremely-high vacuum pipeline pump for a particle accelerator. The titanium pump comprises a titanium pump core and a beam vacuum tube assembly with a main body structure, the main body structure is arranged to be a shell with a containing cavity, an inlet and an outlet are formed in the two ends of the shell respectively, a cylindrical area which extends from the inlet to the outlet along a straight line and is used for transmitting particles is formed in the containing cavity, and the containing cavity comprises an integration area located outside the cylindrical area. And the titanium pump core is connected with the shell, is embedded in the integrated area and is used for improving the vacuum degree of the accommodating cavity. According to the invention, by optimizing the structure of the vacuum tube, the space for arranging the vacuum pump is saved, the large pumping speed is generated in the form of the pipeline pump, the vacuum degree of the accelerator storage ring is effectively improved, the beam life is prolonged, the installation process is simplified, the production cost is reduced, and popularization and application of the miniaturized accelerator are facilitated.

Description

Technical Field

[0001] The invention relates to the technical field of vacuum acquisition of particle accelerators, and in particular to an integrated extremely high vacuum pipeline pump for particle accelerators. Background Art

[0002] In a particle accelerator, the beam can only maintain a sufficient life span and be continuously accumulated and accelerated to reach the designed energy and flux if it runs in a vacuum environment. For the storage ring vacuum system, particles will interact with residual gas and be lost during movement. In order to accumulate the beam, a higher vacuum degree is required, usually reaching 10 -10 Pa. Therefore, the storage ring vacuum system mainly achieves ultra-high vacuum through discretely distributed vacuum pumps (such as sputtering ion pumps, titanium sublimation pumps, non-evaporable getter pumps, etc.). In addition, the main residual gas in the ultra-high vacuum is H 2 The function of the titanium sublimation pump is to remove H 2 The function of sputtering ion pump is to extract a small amount of inert gas. Therefore, the number of titanium sublimation pumps required is much greater than that of sputtering ion pumps.

[0003] In order to reduce floor space, equipment cost and better promote application, particle accelerators are gradually developing towards miniaturization, which makes the circumference of the storage ring continuously reduced. In addition, the storage ring is equipped with many magnet elements for deflecting and focusing the beam, detection elements for diagnosing beam parameters, high-frequency cavities for accelerating the beam, and electrostatic deflection plates for beam injection and extraction, which greatly limits the space for installing titanium sublimation pumps on small particle accelerators. Moreover, titanium sublimation pumps have a great impact on H 2 The pumping speed is positively correlated with its volume and size. A titanium sublimation pump with a larger volume has a larger surface area for air suction. Therefore, it is difficult for a small particle accelerator to achieve the required vacuum degree using traditional solutions. Summary of the invention

[0004] The present invention aims to solve at least one of the technical problems existing in the related art. To this end, the present invention proposes an integrated ultra-high vacuum pipeline pump for a particle accelerator to optimize the vacuum structure design of a small particle accelerator and ensure that its vacuum degree meets the requirements.

[0005] The present invention provides an integrated ultra-high vacuum pipeline pump for a particle accelerator, the integrated ultra-high vacuum pipeline pump comprising: A beam vacuum tube assembly is provided with a main structure, an inlet flange and an outlet flange; Titanium pump core, used to form a titanium adsorption layer with air-absorbing effect; Wherein, the main structure is configured as a shell having a receiving cavity, an inlet and an outlet are respectively arranged at both ends of the shell, a columnar region for transmitting particles extending in a straight line from the inlet to the outlet is formed in the receiving cavity, the inlet flange is installed at the inlet, and the outlet flange is installed at the outlet; The accommodating chamber includes an integrated area outside the cylindrical area. The titanium pump core is connected to the housing and embedded in the integrated area to improve the vacuum degree of the accommodating chamber.

[0006] According to an integrated ultra-high vacuum pipeline pump for a particle accelerator provided by the present invention, a plurality of titanium pump cores are dispersedly arranged in the integrated area, so as to make the titanium adsorption layer evenly adhere to the inner wall of the accommodating cavity and expand the coverage area.

[0007] According to the present invention, an integrated ultra-high vacuum pipeline pump for a particle accelerator is provided, wherein the housing is composed of a long tube with a rectangular cross section and a plurality of convex portions arranged at intervals along the extension direction of the long tube, and the housing is in a sawtooth shape; The columnar region is located in the long tube, the integrated region is located in the convex portion, and the titanium pump core is arranged in a one-to-one correspondence with the convex portion.

[0008] According to an integrated ultra-high vacuum pipeline pump for a particle accelerator provided by the present invention, the housing is configured to be cylindrical, the inlet and the outlet are located at the center of the cylindrical end surface, and the diameter of the inlet and the diameter of the outlet are both smaller than the diameter of the housing, and the integrated area is annularly surrounding the outer periphery of the cylindrical area; A plurality of the titanium pump cores are evenly distributed along the circumference of the integrated area.

[0009] According to an integrated ultra-high vacuum pipeline pump for a particle accelerator provided by the present invention, the shell is provided with a cylindrical baffle, and the baffle extends from the outlet to the inner side of the shell along the axial direction of the shell. The shell is also provided with a bellows connected to the baffle and embedded in the inner side of the baffle, so as to increase the surface area of ​​the inner wall of the shell.

[0010] According to an integrated ultra-high vacuum pipeline pump for a particle accelerator provided by the present invention, the shell is configured as a cylinder with a hexagonal cross-section, the inlet and the outlet are respectively located on two parallel side walls of the shell, the cylindrical area divides the integrated area into two parts with different volumes, and the titanium pump core is configured to have two lengths corresponding to the volumes of the integrated area.

[0011] According to an integrated ultra-high vacuum pipeline pump for a particle accelerator provided by the present invention, the extension direction of the titanium pump core is set to be consistent with the extension direction of the columnar region.

[0012] According to an integrated ultra-high vacuum pipeline pump for a particle accelerator provided by the present invention, the distance between the inlet flange and the outlet flange is greater than or equal to 80 mm.

[0013] According to an integrated ultra-high vacuum pipeline pump for a particle accelerator provided by the present invention, the titanium pump core comprises a titanium wire, a grounding rod, a ceramic sheet, a support rod and a pump flange; The titanium wire is made of titanium, and after heating and sublimation, a titanium adsorption layer with an air absorption effect is generated on the inner wall of the shell.

[0014] According to an integrated ultra-high vacuum pipeline pump for a particle accelerator provided by the present invention, the support rod connects the ceramic sheet and the pump flange, and the length of the support rod is adjustable to adjust the total length of the titanium pump core.

[0015] The above one or more technical solutions in the present invention have at least one of the following technical effects: By setting up a columnar area for transmitting particles and an integrated area for installing a vacuum pump in the shell, the connecting structure for fixing the vacuum pump is eliminated. More titanium pump cores can be installed in a limited space to meet the vacuum degree requirements for the residual gas extraction speed, and the installation process can be simplified and costs can be reduced.

[0016] In addition to the technical problems solved by the present invention, the technical features of the technical solutions constituted, and the advantages brought about by the technical features of these technical solutions described above, other technical features of the present invention and the advantages brought about by these technical features will be further explained in conjunction with the accompanying drawings or will be understood through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or related technologies, the drawings required for use in the embodiments or related technical descriptions are briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0018] Figure 1 A schematic diagram of the three-dimensional structure of an integrated ultra-high vacuum pipeline pump provided in an embodiment of the present invention.

[0019] Figure 2 A front view of an integrated ultra-high vacuum pipeline pump provided in an embodiment of the present invention.

[0020] Figure 3 for Figure 2 Cross-sectional view of section AA of the integrated ultra-high vacuum pipeline pump.

[0021] Figure 4 A schematic diagram of the three-dimensional structure of a titanium pump core provided in an embodiment of the present invention.

[0022] Figure 5 A schematic diagram of the three-dimensional structure of another integrated ultra-high vacuum pipeline pump provided in an embodiment of the present invention.

[0023] Figure 6 A front view of another integrated ultra-high vacuum pipeline pump provided in an embodiment of the present invention.

[0024] Figure 7 for Figure 6 Cross-sectional view of the BB section of the integrated ultra-high vacuum pipeline pump.

[0025] Figure 8 A schematic diagram of the three-dimensional structure of another integrated ultra-high vacuum pipeline pump provided in an embodiment of the present invention.

[0026] Fig. 9 A top view of another integrated ultra-high vacuum pipeline pump provided in an embodiment of the present invention.

[0027] Fig.10 for Fig. 9 Cross-sectional view of the CC section of the integrated ultra-high vacuum pipeline pump.

[0028] Reference numerals: 100. Beam vacuum tube assembly; 110. Main structure; 111. Shell; 112. Accommodating cavity; 112a. Columnar area; 112b. Integrated area; 113. Inlet; 114. Outlet; 115. Long tube; 116. Protrusion; 117. Baffle; 118. Bellows; 120. Inlet flange; 130. Outlet flange; 140. Flange interface; 200. Titanium pump core; 210. Titanium wire; 220. Grounding rod; 230. Ceramic sheet; 240. Support rod; 250. Pump flange. DETAILED DESCRIPTION

[0029] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be clearly described below in conjunction with the drawings of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0030] In the description of the embodiments of the present invention, it should be noted that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the embodiments of the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as limitations on the embodiments of the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0031] In the description of the embodiments of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present invention can be understood according to specific circumstances.

[0032] In the embodiments of the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0033] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the embodiment of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0034] In the present invention, a titanium sublimation pump (TSP) refers to a vacuum pump used to obtain an extremely high vacuum environment. Its working principle is based on the sublimation of metal titanium at high temperature, and the ability to adsorb or react with gas molecules remaining in the vacuum system, thereby further reducing the pressure of the system.

[0035] CF flange (Conflat Flange) refers to a metal sealing flange used in ultra-high vacuum (UHV) and high vacuum (HV) systems. The characteristic of CF flange is that it achieves sealing through the close fit between the knife edge and the copper gasket. It does not require the use of organic materials such as rubber or elastomer as a seal. It can withstand higher temperatures and has better vacuum performance. It is widely used in particle accelerators, synchrotron radiation facilities, space simulation equipment, and various experimental devices that require extremely high vacuum.

[0036] In a particle accelerator, the beam can only maintain a sufficient life span and be continuously accumulated and accelerated to reach the designed energy and flux if it runs in a vacuum environment. For the storage ring vacuum system, particles will interact with residual gas and be lost during movement. In order to accumulate the beam, a higher vacuum degree is required, usually reaching 10 -10 Pa. Therefore, the storage ring vacuum system mainly achieves ultra-high vacuum through discretely distributed vacuum pumps (such as sputtering ion pumps, titanium sublimation pumps, non-evaporable getter pumps, etc.). In addition, the main residual gas in the ultra-high vacuum is H 2 The function of the titanium sublimation pump is to remove H 2 The function of sputtering ion pump is to extract a small amount of inert gas. Therefore, the number of titanium sublimation pumps required is much greater than that of sputtering ion pumps.

[0037] However, in the storage ring of a small particle accelerator, due to limited installation space, the traditional solution of achieving extremely high vacuum through discretely distributed vacuum pumps is difficult to implement. In order to solve this problem, an embodiment of the present invention introduces an integrated extremely high vacuum pipeline pump for a particle accelerator.

[0038] like Figure 1 , Figure 5 and Figure 8 As shown, the integrated ultra-high vacuum pipeline pump mainly includes a beam vacuum tube assembly 100 and a titanium pump core 200. Since the titanium pump core 200 can be deposited on the inner wall of the beam vacuum tube assembly 100 to form a titanium film after being heated and sublimated, the beam vacuum tube assembly 100 can remove H in the residual gas. 2 , transformed into a pipeline pump that can further improve the ultimate vacuum degree.

[0039] Specifically, the beam vacuum tube assembly 100 is provided with a main structure 110, an inlet flange 120 and an outlet flange 130. The titanium pump core 200 is installed in the main structure 110, and is used to form a titanium adsorption layer with an air absorption function on the inner wall of the main structure 110.

[0040] like Figure 3 As shown, the main structure 110 is configured as a shell 111 having a housing 112. An inlet 113 and an outlet 114 are respectively disposed at both ends of the shell 111. A columnar region 112a extending in a straight line from the inlet 113 to the outlet 114 is formed in the housing 112 for transmitting particles.

[0041] The inlet flange 120 is installed at the inlet 113 , and the outlet flange 130 is installed at the outlet 114 , for sealing connection with other components of the particle accelerator.

[0042] The receiving chamber 112 includes an integrated region 112 b. The integrated region 112 b is located outside the columnar region 112 a and is a space in the receiving chamber 112 except the columnar region 112 a.

[0043] The titanium pump core 200 is connected to the housing 111 and embedded in the integrated area 112 b to improve the vacuum degree of the accommodating chamber 112 .

[0044] Furthermore, the cross section of the columnar region 112a may be configured in various shapes, such as a rectangle, a racetrack, an octagon, a circle, or other irregular shapes.

[0045] The housing 111 is also provided with a flange interface 140 for fixedly connecting the titanium pump core 200. The flange interface 140 is a standard CF series flange, such as CF35, CF50, CF63, CF100, CF150, etc.

[0046] like Figure 4 As shown, the titanium pump core 200 includes a titanium wire 210, a grounding rod 220, a ceramic sheet 230, a support rod 240 and a pump flange 250. The titanium wire 210 is made of titanium, and after heating and sublimation, a titanium adsorption layer with an air absorption effect is generated on the inner wall of the housing 111.

[0047] Furthermore, the support rod 240 connects the ceramic sheet 230 and the pump flange 250 .

[0048] In order to adapt the length of the titanium pump core 200 to the space size of the accommodating cavity 112 , the length of the support rod 240 is adjustable, so that the titanium pump core 200 can be installed at different positions of the accommodating cavity 112 by adjusting the support rod 240 .

[0049] In addition, the grounding rod 220 is made of oxygen-free copper and serves as grounding. The ceramic sheet 230 is made of 95 porcelain and serves as insulation and fixing. The support rod 240 is made of oxygen-free copper and serves as support. The pump flange 250 is a standard CF series flange, which is set to the same specifications as the flange interface 140, so as to be sealed and connected to the housing 111.

[0050] In this embodiment, by providing a columnar area 112a for transmitting particles and an integrated area 112b for installing a vacuum pump in the shell 111, the connecting structure for fixing the vacuum pump is eliminated. This allows more titanium pump cores 200 to be installed in a limited space to meet the vacuum degree requirements for the residual gas extraction speed, and can also simplify the installation process and reduce costs.

[0051] Based on the above embodiment, in another embodiment of the present invention, an integrated ultra-high vacuum pipeline pump for a particle accelerator is introduced.

[0052] like Figures 1 to 10 As shown, a plurality of the titanium pump cores 200 are dispersedly disposed in the integrated area 112 b , so as to make the titanium adsorption layer evenly adhere to the inner wall of the accommodating cavity 112 and expand the coverage area.

[0053] The titanium wire 210 of the titanium pump core 200 is heated and sublimated, and then a titanium film is deposited on the inner wall of the accommodating cavity 112 to produce an air suction effect, thereby increasing the vacuum degree in the shell 111 and reducing the pressure gradient. The beam vacuum component is transformed from a gas source to a pipeline pump with a considerable pumping speed, which reduces the gas outflow rate of the inner wall and provides a pumping speed, thereby greatly improving the vacuum degree of the particle accelerator vacuum system.

[0054] Based on the above embodiment, in another embodiment of the present invention, an integrated ultra-high vacuum pipeline pump for a particle accelerator is introduced.

[0055] In order to make the integrated ultra-high vacuum pipeline pump applicable to various spaces, the housing 111 may be configured in various shapes.

[0056] like Figures 1 to 3 As shown, the shell 111 is composed of a long tube 115 with a rectangular cross section and a plurality of protrusions 116 arranged at intervals along the extending direction of the long tube 115, and the shell 111 is sawtooth-shaped.

[0057] The columnar region 112a is located in the long tube 115. The integrated region 112b is located in the convex portion 116. The titanium pump core 200 and the convex portion 116 are disposed in a one-to-one correspondence.

[0058] like Figures 5 to 7 As shown, in another embodiment of the present invention, the housing 111 is configured to be cylindrical.

[0059] Accordingly, the inlet 113 and the outlet 114 are located at the center of the cylindrical end surface. In addition, the diameter of the inlet 113 and the diameter of the outlet 114 are both smaller than the diameter of the housing 111. The integrated area 112b is annularly arranged around the outer periphery of the cylindrical area 112a.

[0060] The plurality of titanium pump cores 200 are evenly distributed along the circumference of the integrated area 112 b.

[0061] Furthermore, in order to increase the surface area of ​​the inner wall of the housing 111, the housing 111 is provided with a cylindrical baffle 117. The baffle 117 extends from the outlet 114 to the inner side of the housing 111 along the axial direction of the housing 111. The housing 111 is also provided with a bellows 118 connected to the baffle 117 and embedded inside the baffle 117, which is used to deposit the titanium film after the titanium wire 210 is heated and sublimated on a larger surface area, thereby generating a higher pumping speed.

[0062] like Figures 8 to 10 As shown, in another embodiment of the present invention, the housing 111 is configured as a column with a hexagonal cross section.

[0063] The inlet 113 and the outlet 114 are respectively located on two parallel side walls of the housing 111. The cylindrical area 112a divides the integrated area 112b into two parts with different volumes. The other side walls of the housing 111 are provided with flange interfaces 140 of various specifications for mounting detection elements. For example, a flange interface 140 of specification CF35 is provided on the side wall of the bottom side of the housing 111, and a pump flange 250 is installed for a titanium pump core 200 of CF35.

[0064] Furthermore, the titanium pump core 200 is set to two lengths according to the volume of the integrated area 112b, which not only fully utilizes the extra space but also improves the vacuum degree of the system.

[0065] For example, a titanium pump core 200 with a longer length is used in a location with sufficient space, and a titanium pump core 200 with a shorter length is used in a location with extremely limited space. This allows a thin film with a larger area to be deposited on the inner wall of the shell 111 while meeting the installation requirements, resulting in a higher pumping speed and a higher vacuum degree.

[0066] Based on the above embodiment, in another embodiment of the present invention, an integrated ultra-high vacuum pipeline pump for a particle accelerator is introduced.

[0067] like Figure 3 and Figure 7As shown, the central axis of the flange interface 140 is arranged to be parallel to the extension direction of the columnar region 112 a , so that more titanium pump cores 200 can be installed in the accommodating cavity 112 , thereby improving the utilization rate of the accommodating cavity 112 .

[0068] Correspondingly, after the titanium pump core 200 is connected to the flange interface 140 , the extension direction of the titanium pump core 200 is set to be consistent with the extension direction of the columnar region 112 a .

[0069] Furthermore, a distance between the inlet flange 120 and the outlet flange 130 is greater than or equal to 80 mm.

[0070] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

[0071] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. An integrated ultra-high vacuum pipeline pump for a particle accelerator, characterized in that: include: A beam vacuum tube assembly (100) is provided with a main structure (110), an inlet flange (120) and an outlet flange (130); A titanium pump core (200) used to form a titanium adsorption layer having an air-absorbing function; The main structure (110) is configured as a shell (111) having a housing cavity (112); an inlet (113) and an outlet (114) are respectively arranged at two ends of the shell (111); a columnar region (112a) for transmitting particles is formed in the housing cavity (112) and extends in a straight line from the inlet (113) to the outlet (114); the inlet flange (120) is mounted on the inlet (113); and the outlet flange (130) is mounted on the outlet (114); The accommodating chamber (112) comprises an integrated region (112b) located outside the columnar region (112a); the titanium pump core (200) is connected to the housing (111) and embedded in the integrated region (112b) to improve the vacuum degree of the accommodating chamber (112).

2. The integrated ultra-high vacuum pipeline pump for a particle accelerator according to claim 1, characterized in that: The plurality of titanium pump cores (200) are dispersedly arranged in the integrated area (112b) so as to make the titanium adsorption layer evenly adhere to the inner wall of the accommodating cavity (112) and expand the coverage area.

3. The integrated ultra-high vacuum pipeline pump for a particle accelerator according to claim 2, characterized in that: The shell (111) is composed of a long tube (115) with a rectangular cross section and a plurality of protrusions (116) arranged at intervals along the extension direction of the long tube (115), and the shell (111) is in a sawtooth shape; The columnar region (112a) is located in the long tube (115), the integrated region (112b) is located in the convex portion (116), and the titanium pump core (200) and the convex portion (116) are arranged in a one-to-one correspondence.

4. The integrated ultra-high vacuum pipeline pump for a particle accelerator according to claim 2, characterized in that: The shell (111) is configured to be cylindrical, the inlet (113) and the outlet (114) are located at the center of the cylindrical end surface, and the diameter of the inlet (113) and the diameter of the outlet (114) are both smaller than the diameter of the shell (111), and the integrated area (112b) is annularly arranged around the outer periphery of the cylindrical area (112a); A plurality of the titanium pump cores (200) are evenly distributed along the circumference of the integrated area (112b).

5. The integrated ultra-high vacuum pipeline pump for a particle accelerator according to claim 4, characterized in that: The shell (111) is provided with a cylindrical baffle (117), and the baffle (117) extends from the outlet (114) to the inside of the shell (111) along the axial direction of the shell (111). The shell (111) is also provided with a bellows (118) connected to the baffle (117) and embedded inside the baffle (117), so as to increase the surface area of ​​the inner wall of the shell (111).

6. The integrated ultra-high vacuum pipeline pump for a particle accelerator according to claim 2, characterized in that: The shell (111) is configured as a cylinder with a hexagonal cross section; the inlet (113) and the outlet (114) are respectively located on two parallel side walls of the shell (111); the columnar region (112a) divides the integrated region (112b) into two parts with different volumes; and the titanium pump core (200) is configured to have two lengths corresponding to the volumes of the integrated region (112b).

7. The integrated ultra-high vacuum pipeline pump for a particle accelerator according to any one of claims 1 to 6, characterized in that: The extension direction of the titanium pump core (200) is arranged to be consistent with the extension direction of the columnar region (112a).

8. The integrated ultra-high vacuum pipeline pump for a particle accelerator according to any one of claims 1 to 6, characterized in that: The distance between the inlet flange (120) and the outlet flange (130) is greater than or equal to 80 mm.

9. The integrated ultra-high vacuum pipeline pump for a particle accelerator according to any one of claims 1 to 6, characterized in that: The titanium pump core (200) comprises a titanium wire (210), a grounding rod (220), a ceramic sheet (230), a support rod (240) and a pump flange (250); The titanium wire (210) is made of titanium, and after heating and sublimation, a titanium adsorption layer with an air absorption function is generated on the inner wall of the shell (111).

10. The integrated ultra-high vacuum pipeline pump for a particle accelerator according to claim 9, characterized in that: The support rod (240) connects the ceramic sheet (230) and the pump flange (250); the length of the support rod (240) is adjustable and is used to adjust the total length of the titanium pump core (200).

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