Motion transmission valve device for display etching equipment

Abstract

The invention provides a motion transmission valve device for display etching equipment, and belongs to the technical field of transmission valves. Which comprises a transmission valve body, a first valve port and a second valve port which are symmetrically distributed are formed in the transmission valve body, and is characterized in that first driving devices are symmetrically installed on the outer portion of the transmission valve body, a first valve plate is arranged in the transmission valve body in a sleeved mode, and a second valve plate is arranged on one side face of the first valve plate in a sleeved mode. By arranging the first driving device, the first valve plate, the second driving device and the second valve plate, the first valve plate and the second valve plate form a split type valve plate structure in the transmission valve body, in the process of sealing a second valve port, the second valve plate is in an L-shaped movement track, friction cannot be generated between the second valve plate and the inner side wall of the transmission valve body, and the sealing effect of the transmission valve body is improved. Therefore, impact in the moving process of the second valve plate is effectively controlled, and the situation that the second valve plate rubs with the inner wall of the conveying valve body to generate chippings, and then pollution of the etching solution is caused is avoided.

Description

Technical Field

[0001] The present invention relates to the technical field of transmission valves, and in particular to a motion transmission valve device for display etching equipment. Background Art

[0002] In the display manufacturing process, the etching process is a crucial link, which directly affects the accuracy and yield of the display. In the etching process of the display, the substrate or wafer needs to be transferred to the process chamber for etching. The stability of the vacuum environment in the process chamber has an important impact on the etching accuracy and product quality. The motion transfer valve, as a key sealing component of the process chamber, is usually installed at the entrance and exit of the process chamber to isolate the external environment during the etching process to ensure that the process chamber maintains a stable vacuum state.

[0003] However, the existing transmission valves still have the following technical problems during long-term use. Traditional transmission valves mostly adopt a rigid driving structure. The valve plate generates a large impact force due to inertia during high-speed opening and closing, which not only leads to aggravated mechanical wear between the valve plate and the valve seat, but also produces particulate residues due to friction. These residues may pollute the internal environment of the process chamber, causing the vacuum degree in the process chamber to be affected. Secondly, the seals of the existing transmission valves are exposed to the highly corrosive gases generated by the etching process for a long time, and are prone to hardening. At the same time, the impact load of the valve plate movement further accelerates the fatigue failure of the sealing structure, resulting in a significant shortening of the sealing life, requiring frequent shutdowns for replacement, reducing equipment working efficiency and increasing maintenance costs. Therefore, the present application provides a motion transmission valve device for display etching equipment to meet the needs. Summary of the invention

[0004] The technical problem to be solved by the present invention is to provide a motion transmission valve device for display etching equipment to solve the problems of large movement impact of the existing transmission valve valve plate, easy wear and residue, affecting the process vacuum degree, and fast aging of the sealing structure and high replacement frequency.

[0005] In order to solve the above technical problems, the present invention provides the following technical solutions: A motion transmission valve device for display etching equipment, comprising a transmission valve body, the transmission valve body is provided with a first valve port and a second valve port symmetrically distributed, a first driving device is symmetrically installed on the outside of the transmission valve body, and a first valve plate is sleeved in the transmission valve body, a second valve plate is sleeved on one side of the first valve plate, and a second driving device is symmetrically installed on the other side of the first valve plate, and the first valve plate is fixedly connected to a driving rod of the first driving device; a sealing component is used for sealing between the second valve plate and the second valve port, and the sealing component is respectively connected to the second valve plate and the transmission valve body; a reinforcing component is used to improve the structural strength of the sealing component, and the reinforcing component is connected to the sealing component; an installation component is used for fixing the relative position between the second valve plate and the sealing component, and the installation component is respectively connected to the second valve plate and the reinforcing component.

[0006] Optionally, a solenoid valve located between the first drive devices is fixedly installed on the outside of the transmission valve body, and the solenoid valve is connected to the first drive device and the second drive device through a pipeline.

[0007] Optionally, a cavity is provided in the transmission valve body to accommodate the second drive device, the first valve plate and the second valve plate, the first valve port and the second valve port are both connected to the cavity, and a guide end matching the size of the second valve port is provided on the outside of the second valve plate.

[0008] Optionally, the position of the second driving device corresponds to the position of the first driving device one by one, and the driving rod of the second driving device is perpendicular to the driving rod of the first driving device.

[0009] Optionally, a receiving groove matching the size of the second valve plate is formed on the outside of the first valve plate, and the end of the driving rod of the second driving device extends into the receiving groove and is fixedly connected to the second valve plate through a dedicated pressure rod.

[0010] Optionally, the sealing assembly includes a first sealing strip sleeved on the outside of the second valve plate and a sealing groove opened on the inner wall of the transmission valve body, the shape of the sealing groove is adapted to the shape of the first sealing strip, and a second sealing strip is fixedly connected to the outer side of the sealing groove.

[0011] Optionally, a symmetrically distributed second locking edge is provided at one end of the first sealing strip close to the second valve plate, and a mounting groove corresponding to the position of the first sealing strip is opened on the outside of the second valve plate, and the shape of the mounting groove close to the opening is adapted to the shape of the second locking edge.

[0012] Optionally, a symmetrically distributed first locking edge is provided at one end of the first sealing strip away from the second valve plate, a first deformation zone is provided in the middle of the first locking edge, and an avoidance groove matching the shape of the first locking edge is provided on the outside of the first sealing strip.

[0013] Optionally, the reinforcing component includes an elastic frame sleeved in the first sealing strip, the end of the elastic frame is fixedly connected with an umbrella-shaped elastic end, the position of the elastic end corresponds to the position of the first locking edge, and the elastic frame and the elastic end are provided with a disconnection seam at the bend of the first sealing strip.

[0014] Optionally, the mounting assembly includes a first limiting plate fixedly connected in the mounting groove and a second limiting plate fixedly connected to the outside of the elastic skeleton, the end of the second limiting plate is bent in a C shape to form a connecting end, and a second deformation zone is provided on the second limiting plate, the end shape of the first limiting plate is adapted to the shape of the connecting end, and a third deformation zone is provided on the first limiting plate.

[0015] Compared with the prior art, the present invention has at least the following beneficial effects: In the above scheme, by arranging the first driving device and the first valve plate as well as the second driving device and the second valve plate, the first valve plate and the second valve plate form a split valve plate structure in the transmission valve body. In the process of sealing the second valve port, the second valve plate presents an L-shaped movement trajectory and will not generate friction with the inner wall of the transmission valve body, thereby effectively controlling the impact of the second valve plate during movement, avoiding debris generated by friction with the inner wall of the transmission valve body, and preventing the vacuum degree of the process chamber from being affected.

[0016] By setting up the sealing component, when the second valve plate closes the second valve port, the first sealing strip in the sealing component can contact and cooperate with the second sealing strip, thereby effectively sealing the gap between the second valve plate and the inner wall of the transmission valve body. When the process chamber is in a vacuum environment, a pressure difference can be formed under the action of external air pressure, thereby forming self-locking of the second valve plate. Secondly, the sealing component will not be excessively squeezed by the second valve plate, thereby ensuring the service life of the sealing component and thus ensuring the sealing effect of the transmission valve device in a closed state.

[0017] By setting up a reinforcement component, the overall structure of the first sealing strip is further strengthened, the shape of the first sealing strip is supported by the reinforcement component, and the elasticity of the first locking edge is enhanced by the elastic end in the reinforcement component. Even if the first sealing strip is aged, the elasticity of the elastic end can ensure the deformation of the first locking edge and the ability to reset after deformation, thereby ensuring the sealing effect of the sealing component, reducing the maintenance and replacement frequency of the sealing component, reducing the workload of the staff and controlling the use cost of the transmission valve.

[0018] By setting up a reinforcement component and an installation component, different from the sealing structure of a traditional transmission valve, which only relies on the installation method of connecting the sealing structure body and the valve plate, a matching installation component is set on the reinforcement component and inside the installation groove, so as to further enhance the stability of the connection between the sealing component and the second valve plate, and the operation is simple and convenient. The structures of the sealing component, the reinforcement component and the installation component are interrelated and complementary in function, thereby improving the technical solution of the entire transmission valve. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The accompanying drawings, which are incorporated herein and constitute a part of the specification, illustrate embodiments of the invention and, together with the description, further serve to explain the principles of the invention and to enable those skilled in the relevant art to make and use the invention.

[0020] Figure 1 A schematic diagram of the three-dimensional structure of a motion transmission valve device for display etching equipment; Figure 2 It is a schematic diagram of the internal three-dimensional structure of the transmission valve body; Figure 3 It is a schematic diagram of the matching structure of the first valve plate, the second valve plate and the second valve port; Figure 4 for Figure 3 The enlarged structural diagram at A in the middle; Figure 5 It is a schematic diagram of a partial cross-sectional structure of a transmission valve body; Figure 6 for Figure 5 The enlarged structural diagram at B in the middle; Figure 7 is a schematic diagram of the three-dimensional structure of the second valve plate; Figure 8 It is a schematic diagram of the explosion structure of the first valve plate, the second valve plate, the elastic skeleton and the first sealing strip; Fig. 9 for Figure 8 The enlarged structural diagram at C in the middle; Fig.10 for Figure 8 The enlarged structural diagram at D in the middle; Fig.11 It is a schematic diagram of the matching structure of the first sealing strip and the elastic frame; Fig.12 It is a schematic diagram of the matching structure of the first sealing strip, the elastic frame and the mounting groove; Fig.13 for Fig.12 Enlarged structural diagram at E in the middle.

[0021] Reference numerals: 1. Transmission valve body; 2. First drive device; 3. Second drive device; 4. Solenoid valve; 5. First valve plate; 6. First valve port; 7. Second valve port; 8. Second valve plate; 9. Guide end; 10. Special pressure rod; 11. First sealing strip; 12. Sealing groove; 13. Second sealing strip; 14. Elastic skeleton; 15. Mounting groove; 16. First limiting plate; 17. Elastic end; 18. Disconnection seam; 19. First locking edge; 20. First deformation zone; 21. Second locking edge; 22. Avoidance groove; 23. Second limiting plate; 24. Connecting end; 25. Second deformation zone; 26. Third deformation zone; 27. Storage groove.

[0022] As shown in the figure, in order to clearly implement the structure of the embodiment of the present invention, specific structures and devices are marked in the figure, but this is only for illustrative purposes and is not intended to limit the present invention to the specific structure, device and environment. According to specific needs, ordinary technicians in this field can adjust or modify these devices and environments. DETAILED DESCRIPTION

[0023] The following is a detailed description of a motion transmission valve device for display etching equipment provided by the present invention in conjunction with the accompanying drawings and specific embodiments. At the same time, it is explained here that in order to make the embodiments more detailed, the following embodiments are the best and preferred embodiments, and those skilled in the art may also adopt other alternatives to implement some known technologies; and the accompanying drawings are only for a more specific description of the embodiments, and are not intended to specifically limit the present invention.

[0024] It should be noted that the references to "one embodiment", "embodiment", "exemplary embodiments", "some embodiments" and the like in the specification indicate that the embodiments described may include specific features, structures or characteristics, but not every embodiment may include the specific features, structures or characteristics. In addition, when a specific feature, structure or characteristic is described in conjunction with an embodiment, it should be within the knowledge of a person skilled in the art to implement such feature, structure or characteristic in conjunction with other embodiments (whether or not explicitly described).

[0025] In general, a term can be understood, at least in part, from its use in context. For example, depending, at least in part, on the context, the term "one or more" as used herein can be used to describe any feature, structure, or characteristic in the singular sense, or can be used to describe a combination of features, structures, or characteristics in the plural sense. Additionally, the term "based on" can be understood as not necessarily intended to convey an exclusive set of factors, but can instead, depending, at least in part, on the context, allow for the presence of other factors that are not necessarily explicitly described.

[0026] It will be understood that the meanings of “on,” “over,” and “above” in the present invention should be interpreted in the broadest manner, so that “on” not only means “directly on” something, but also includes the meaning of being “on” something with intervening features or layers therebetween, and “on” or “over” not only means “on” or “above” something, but also includes the meaning of being “on” or “above” something with no intervening features or layers therebetween.

[0027] Additionally, spatially relative terms such as "under," "beneath," "lower," "above," "upper," and the like may be used herein for descriptive convenience to describe the relationship of one element or feature to another element or features, as shown in the accompanying drawings. Spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the accompanying drawings. The device may be oriented in other ways, and the spatially relative descriptors used herein may be similarly interpreted accordingly.

[0028] like Figures 1 to 13As shown, an embodiment of the present invention provides a motion transmission valve device for display etching equipment, including a transmission valve body 1, on which a symmetrically distributed first valve port 6 and a second valve port 7 are opened, a first driving device 2 is symmetrically installed on the outside of the transmission valve body 1, and a first valve plate 5 is sleeved in the transmission valve body 1, a second valve plate 8 is sleeved on one side of the first valve plate 5, and a second driving device 3 is symmetrically installed on the other side of the first valve plate 5, the first valve plate 5 is fixedly connected to a driving rod of the first driving device 2, an electromagnetic valve 4 located between the first driving device 2 is fixedly installed on the outside of the transmission valve body 1, the electromagnetic valve 4 is connected to the first driving device 2 and the second driving device 3 through a pipeline, a cavity for accommodating the second driving device 3, the first valve plate 5 and the second valve plate 8 is opened in the transmission valve body 1, the first valve port 6 and the second valve port 7 are both connected to the cavity, and the second valve plate 8 is provided with a second valve port 8 on the outside. 7, the setting of the guide end 9 can provide a certain limit and guiding effect for the second valve plate 8 in the process of the second valve plate 8 approaching the second valve port 7, and the side of the guide end 9 close to the second valve port 7 is provided with an inclined surface, so that the area value of the side of the guide end 9 close to the second valve port 7 is smaller than the opening size of the second valve port 7, so that the guide end 9 can enter the second valve port 7 more easily, and it is convenient for the second valve plate 8 to close the second valve port 7 to the second valve port 7, the first valve port 6 and the second valve port 7 opened on the transmission valve body 1 and the cavity opened in the transmission valve body 1, when the second valve port 7 is opened, the internal cavity of the transmission valve body 1 can be connected with the first valve port 6 and the second valve port 7, so as to form a channel for the substrate or wafer to be etched to pass through, and then the etching process is controlled by controlling the opening and closing of the second valve port 7 on the transmission valve body 1, so as to ensure the control of the etching process by relevant staff.

[0029] The position of the second driving device 3 corresponds to the position of the first driving device 2 one by one, and the driving rod of the second driving device 3 is perpendicular to the driving rod of the first driving device 2. The outside of the first valve plate 5 is provided with a receiving groove 27 adapted to the size of the second valve plate 8. The receiving groove 27 on the first valve plate 5 is used to receive the second valve plate 8 and the guide end 9. When the second valve port 7 is in the open state, the second valve plate 8 and the guide end 9 are completely received in the receiving groove 27. In this state, the second driving device 3 is completely retracted, the end surface of the guide end 9 is flush with the end surface of the first valve plate 5, and the end of the driving rod of the second driving device 3 extends The second valve plate 8 is fixedly connected to the receiving groove 27 through the special pressure rod 10. The setting of the special pressure rod 10 can balance the pressure applied by the second driving device 3 to the second valve plate 8, keep the force on each part of the second valve plate 8 uniform, avoid a large gap between a certain part of the second valve plate 8 and the transmission valve body 1 after closing, and ensure the sealing effect of the second valve plate 8 in the closed state. When the first driving device 2 is working, it can drive the first valve plate 5 inside the transmission valve body 1 through its driving rod. When the first driving device 2 is working, it can drive the first valve plate 5 to telescope in the cavity inside the transmission valve body 1 through its driving rod. During the displacement of the valve plate 5, the second driving device 3 is not in a working state, the second valve plate 8 and the guide end 9 are received in the receiving groove 27 on the first valve plate 5, and a gap is reserved between the first valve plate 5 and the inner wall of the cavity in the transmission valve body 1, so that during the displacement of the first valve plate 5 by the first driving device 2, the first valve plate 5 and its external structural parts will not generate friction with the inner wall of the transmission valve body 1, and when the first valve plate 5 drives the second valve plate 8 to move to a position corresponding to the second valve port 7, the second driving device 3 works again and drives the second valve plate 8 to generate a vertical movement perpendicular to the first valve plate 5 through its driving rod. The second valve plate 8 and the guide end 9 move in the opposite direction of the activity, so that the second valve plate 8 and the guide end 9 approach the second valve port 7 until the second valve plate 8 and the guide end 9 close the second valve port 7. During the whole process, the driving rods used for the first driving device 2 and the second driving device 3 are perpendicular to each other, so the movement directions of the first valve plate 5 and the second valve plate 8 are also perpendicular to each other, and finally an L-shaped movement trajectory of the second valve plate 8 is formed, which ensures the closing action of the second valve port 7 while avoiding the friction between the contacting structures in the transmission valve body 1. The debris generated by the friction, effectively preventing the vacuum degree in the process chamber from being affected and then affecting the etching effect.

[0030] The sealing component is used for sealing between the second valve plate 8 and the second valve port 7. The sealing component is respectively connected to the second valve plate 8 and the transmission valve body 1. The setting of the sealing component ensures the sealing state of the second valve port 7 after being closed by the second valve plate 8, effectively forming a sealing effect on the process chamber, and the sealing process will not be excessively squeezed between the second valve plate 8 and the transmission valve body 1, so that the service life of the sealing component is longer; the strengthening component is used to improve the structural strength of the sealing component. The strengthening component is connected to the sealing component. The setting of the strengthening component can strengthen the overall structure of the sealing component, and the sealing component can still be strengthened after aging. The components are used to ensure their deformation ability and sealing effect, thereby meeting the working requirements of the transmission valve device and reducing the inspection and maintenance frequency of the transmission valve device; the installation component is used to fix the relative position between the second valve plate 8 and the sealing component, and the installation component is connected to the second valve plate 8 and the reinforcement component respectively. The setting of the installation component makes the disassembly and assembly between the sealing component and the second valve plate 8 simple and convenient, and the operation is fast during maintenance and replacement. It is stable and reliable after installation and will not affect the working efficiency of the transmission valve device too much. The structures of the sealing component, the reinforcement component and the installation component are interrelated, and they are coordinated in function, complement each other, and jointly improve the use effect of the entire transmission valve.

[0031] In this embodiment, if Figures 3 to 11As shown, the sealing assembly includes a first sealing strip 11 sleeved on the outside of the second valve plate 8 and a sealing groove 12 opened on the inner side wall of the transmission valve body 1, the shape of the sealing groove 12 is adapted to the shape of the first sealing strip 11, and the outer side of the sealing groove 12 is fixedly connected to the second sealing strip 13, the end of the first sealing strip 11 away from the second valve plate 8 is provided with a symmetrically distributed first locking edge 19, the middle part of the first locking edge 19 is provided with a first deformation zone 20, and the outside of the first sealing strip 11 is provided with an avoidance groove 22 adapted to the shape of the first locking edge 19, the opening of the first deformation zone 20 makes the thickness of the first locking edge 19 at the first deformation zone 20 thinner and the strength weaker, thereby making the first locking edge 19 at the first During the process of inserting the sealing strip 11 into the sealing groove 12 as a whole, the outer part of the first locking edge 19 will be subjected to the extrusion force from the inner side wall of the transmission valve body 1, thereby causing the first locking edge 19 to bend and deform at the first deformation zone 20, so that the area value of the end of the first sealing strip 11 close to the sealing groove 12 is reduced, which facilitates the insertion of the first sealing strip 11 into the sealing groove 12. During this process, the avoidance groove 22 on the first sealing strip 11 also causes a certain depression on the outer part of the first sealing strip 11. During the process of the first locking edge 19 being extruded and deformed, the first locking edge 19 can bend toward the avoidance groove 22 on the outer part of the first sealing strip 11 and fit in the avoidance groove 22. By opening the avoidance groove 22, the first The deformation of the locking edge 19 provides enough space for the first sealing strip 11 to be inserted into the sealing groove 12. When the first sealing strip 11 is fully inserted into the sealing groove 12, the second valve plate 8 also fits against the inner wall of the transmission valve body 1 and squeezes the second sealing strip 13 on the outer side of the sealing groove 12. The second sealing strip 13 is a hollow tubular structure. After being squeezed by the second valve plate 8, it will undergo corresponding deformation and squeeze toward the position where the first sealing strip 11 is located. At this time, the first sealing strip 11 has completely entered the sealing groove 12, and the first locking edge 19 has also restored its deformation in the sealing groove 12. The depression formed by the avoidance groove 22 on the outside of the first sealing strip 11 can also fit with the second sealing strip 13. The first sealing strip 11, the sealing groove 12 and the second sealing strip 13 cooperate with each other under the extrusion between the second valve plate 8 and the inner wall of the transmission valve body 1, and the gap between the second valve plate 8 and the inner wall of the transmission valve body 1 is sealed, and the sealing effect is stable and reliable, and the sealing structure will not be excessively squeezed to accelerate the damage of the sealing structure, thereby ensuring the sealing effect after the second valve plate 8 closes the second valve port 7. When the process chamber is in a vacuum environment, the pressure difference between the inside and outside of the process chamber can also be formed under the action of the external air pressure, thereby cooperating with the deformation of the first sealing strip 11 and the second sealing strip 13 to form the self-locking of the second valve plate 8, and further ensuring the sealing effect of the process chamber.

[0032] A symmetrically distributed second locking edge 21 is provided at one end of the first sealing strip 11 close to the second valve plate 8. A mounting groove 15 corresponding to the position of the first sealing strip 11 is provided on the outside of the second valve plate 8. The shape of the mounting groove 15 close to the opening is adapted to the shape of the second locking edge 21. The first sealing strip 11 is sleeved in the mounting groove 15 on the second valve plate 8. The first sealing strip 11 and the mounting groove 15 are connected via the second locking edge 21. The first sealing strip 11 itself is made of rubber and has a certain deformation ability. When the second locking edge 21 on the first sealing strip 11 is squeezed, the second locking edge 21 can be deformed, and then the first sealing strip 11 enters the mounting groove 15. After the first sealing strip 11 enters the mounting groove 15, the second locking edge 21 relies on its own elastic force to restore the deformation, thereby forming a preliminary connection relationship between the second valve plate 8 and the first sealing strip 11.

[0033] In this embodiment, if Figures 8 to 12 As shown, the reinforcing component includes an elastic skeleton 14 sleeved in the first sealing strip 11, and the end of the elastic skeleton 14 is fixedly connected with an umbrella-shaped elastic end 17, and the position of the elastic end 17 corresponds to the position of the first locking edge 19. When the first locking edge 19 is bent and deformed, it will drive the elastic end 17 to deform, and accumulate elastic potential energy by relying on the deformation of the elastic end 17. After the external force is removed, the elastic end 17 and the first locking edge 19 rely on their own elastic force to recover, thereby ensuring the sealing effect formed by the cooperation of the first sealing strip 11, the sealing groove 12 and the second sealing strip 13. The elastic skeleton 14 and the elastic end 17 are provided with a disconnection seam 18 at the bend corner of the first sealing strip 11. The disconnection seam 18 provided on the elastic skeleton 14 and the elastic end 17 disconnects the elastic skeleton 14 and the elastic end 17 in the first sealing strip 11, so that the end of the elastic end 17 is in an open structure, thereby preventing the elastic end 17 from being damaged by itself. The elastic skeleton 14 and the elastic end 17 are wrapped on the inner side of the first sealing strip 11 to provide support for the first sealing strip 11 and maintain the structural shape of the first sealing strip 11. At the same time, the elastic skeleton 14 and the elastic end 17 are different from the rubber material of the first sealing strip 11. They are made of plastic with higher strength and have stronger supporting capacity and recovery ability after deformation. Even if the first sealing strip 11 ages to a certain extent after a period of use due to its own material problems, the elastic skeleton 14 and the elastic end 17 inside the first sealing strip 11 can also maintain the shape of the first sealing strip 11. Secondly, the elastic end 17 can also rely on its own good elasticity to maintain the deformation and recovery ability of the first locking edge 19 on the first sealing strip 11.

[0034] In this embodiment, if Figures 8 to 13As shown, the mounting assembly includes a first limiting piece 16 fixedly connected to the mounting groove 15 and a second limiting piece 23 fixedly connected to the outside of the elastic skeleton 14, the end of the second limiting piece 23 is bent in a C shape to form a connecting end 24, and a second deformation zone 25 is provided on the second limiting piece 23, the end shape of the first limiting piece 16 is adapted to the shape of the connecting end 24, and a third deformation zone 26 is provided on the first limiting piece 16, the second limiting piece 23 is distributed in an inverted figure-eight shape on the outside of the elastic skeleton 14, the first limiting piece 16 is also distributed in an inverted figure-eight shape inside the mounting groove 15, and the spacing between the second limiting pieces 23 is adapted to the spacing between the first limiting pieces 16, and at the first sealing strip 11 When the connection between the second valve plate 8 and the connecting end 24 is fixed, the connecting end 24 is between the first limiting piece 16 and keeps hooked with the first limiting piece 16. The second deformation zone 25 and the third deformation zone 26 are provided so that the second limiting piece 23 and the first limiting piece 16 are respectively thinned in the second deformation zone 25 and the third deformation zone 26, and the strength is weaker. The second limiting piece 23 and the first limiting piece 16 can be deformed more easily after being acted upon by an external force. The second deformation zone 25 and the third deformation zone 26 are provided to guide the deformation of the second limiting piece 23 and the first limiting piece 16. The setting of the mounting assembly further strengthens the connection relationship between the first sealing strip 11 and the mounting groove 15 through the elastic skeleton 14 and the second limiting piece 23. When the first sealing strip 11 body forms a preliminary connection relationship with the mounting groove 15 by relying on the second locking edge 21, the second limiting piece 23 on the elastic skeleton 14 also follows the first sealing strip 11 into the mounting groove 15. In the process of entering the mounting groove 15, the outer side of the connecting end 24 on the second limiting piece 23 contacts the outer side of the first limiting piece 16, and the two are squeezed against each other, and the second limiting piece 23 and the first limiting piece 16 are bent and deformed at the second deformation zone 25 and the third deformation zone 26 respectively, until the second locking edge 21 on the first sealing strip 11 is connected and fixed with the mounting groove 15, and at the same time, the connecting end 24 on the second limiting piece 23 is also hooked with the first limiting piece 16, and the second locking edge 21 and the mounting groove 15 are connected. In the initial connection state between the mounting groove 15, the second limiting piece 23, the connecting end 24 and the first limiting piece 16 are all made of elastic plastic material, which has stronger stability than the rubber material of the first sealing strip 11 after being connected and fixed. Therefore, the connection relationship between the second valve plate 8 and the first sealing strip 11 can be strengthened. When the first sealing strip 11 needs to be removed, the first sealing strip 11 is pulled away from the second valve plate 8, which can drive the second limiting piece 23 and the first limiting piece 16 to deform again until the connecting end 24 is separated from the first limiting piece 16, and the second locking edge 21 is separated from the mounting groove 15, so that the overall disassembly and assembly operation of the first sealing strip 11 is very convenient, and it is easy for the staff to perform maintenance and replacement operations.

[0035] The present invention covers any substitution, modification, equivalent method and scheme made on the essence and scope of the present invention. In order to make the public have a thorough understanding of the present invention, specific details are described in detail in the following preferred embodiments of the present invention, but those skilled in the art can fully understand the present invention without the description of these details. In addition, in order to avoid unnecessary confusion about the essence of the present invention, well-known methods, processes, procedures, components and circuits are not described in detail.

[0036] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principle of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. A motion transmission valve device for display etching equipment, comprising a transmission valve body, wherein the transmission valve body is provided with a first valve port and a second valve port which are symmetrically distributed, characterized in that: A first driving device is symmetrically installed on the outside of the transmission valve body, and a first valve plate is sleeved in the transmission valve body, a second valve plate is sleeved on one side of the first valve plate, and a second driving device is symmetrically installed on the other side of the first valve plate, and the first valve plate is fixedly connected to a driving rod of the first driving device; A sealing assembly, used for sealing between the second valve plate and the second valve port, the sealing assembly being connected to the second valve plate and the transmission valve body respectively; A reinforcing component, used to improve the structural strength of the sealing component, the reinforcing component being connected to the sealing component; The mounting assembly is used to fix the relative position between the second valve plate and the sealing assembly, and the mounting assembly is respectively connected to the second valve plate and the reinforcement assembly.

2. The motion transmission valve device for display etching equipment according to claim 1, characterized in that: A solenoid valve located between the first drive devices is fixedly installed on the outside of the transmission valve body, and the solenoid valve is connected to the first drive device and the second drive device through pipelines.

3. The motion transmission valve device for display etching equipment according to claim 2, characterized in that: The transmission valve body is provided with a cavity for accommodating the second driving device, the first valve plate and the second valve plate. The first valve port and the second valve port are both connected to the cavity. The outside of the second valve plate is provided with a guide end adapted to the size of the second valve port.

4. The motion transmission valve device for display etching equipment according to claim 3, characterized in that: The position of the second driving device corresponds to the position of the first driving device one by one, and the driving rod of the second driving device is perpendicular to the driving rod of the first driving device.

5. The motion transmission valve device for display etching equipment according to claim 1, characterized in that: A receiving groove matching the size of the second valve plate is formed on the outside of the first valve plate, and the end of the driving rod of the second driving device extends into the receiving groove and is fixedly connected to the second valve plate through a dedicated pressure rod.

6. The motion transmission valve device for display etching equipment according to claim 1, characterized in that: The sealing assembly includes a first sealing strip sleeved on the outside of the second valve plate and a sealing groove opened on the inner wall of the transmission valve body. The shape of the sealing groove is adapted to the shape of the first sealing strip, and a second sealing strip is fixedly connected to the outer side of the sealing groove.

7. The motion transmission valve device for display etching equipment according to claim 6, characterized in that: A symmetrically distributed second locking edge is arranged at one end of the first sealing strip close to the second valve plate, and an installation groove corresponding to the position of the first sealing strip is opened on the outside of the second valve plate, and the shape of the installation groove close to the opening is adapted to the shape of the second locking edge.

8. The motion transmission valve device for display etching equipment according to claim 7, characterized in that: A symmetrically distributed first locking edge is arranged at one end of the first sealing strip away from the second valve plate, a first deformation zone is opened in the middle of the first locking edge, and an avoidance groove matching the shape of the first locking edge is opened on the outside of the first sealing strip.

9. The motion transmission valve device for display etching equipment according to claim 8, characterized in that: The reinforcing component includes an elastic frame sleeved in the first sealing strip, the end of the elastic frame is fixedly connected with an umbrella-shaped elastic end, the position of the elastic end corresponds to the position of the first locking edge, and the elastic frame and the elastic end are provided with a disconnection seam at the bend of the first sealing strip.

10. The motion transmission valve device for display etching equipment according to claim 9, characterized in that: The mounting assembly includes a first limiting plate fixedly connected in the mounting groove and a second limiting plate fixedly connected to the outside of the elastic skeleton, the end of the second limiting plate is bent in a C shape to form a connecting end, and a second deformation zone is provided on the second limiting plate, the end shape of the first limiting plate is adapted to the shape of the connecting end, and a third deformation zone is provided on the first limiting plate.

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