Device and method for concentrating krypton and xenon by using liquid oxygen

Abstract

The invention discloses a device and a method for concentrating krypton and xenon by liquid oxygen. The device comprises a concentration separation tank, a raw liquid oxygen storage device, a rear liquid oxygen storage tank, a krypton and xenon finished product storage tank and an external heat exchanger, the concentration and separation tank comprises a high-pressure-resistant tank body, a middle tank arranged in the high-pressure-resistant tank body, an inner tank arranged in the middle tank and an internal heat exchanger arranged in the inner tank; the stock solution oxygen storage device is communicated with the bottom of the middle tank through a pipeline; the rear liquid oxygen storage tank is communicated with the bottom of the inner tank through a pipeline; the external heat exchanger communicates with the internal heat exchanger through a pipeline; the krypton-xenon finished product storage tank is communicated with the bottom of the middle tank through a According to the device, heat energy can be released through condensation of rear liquid oxygen in the inner tank, heat energy is provided for concentrated krypton and xenon, energy consumption is reduced, heat exchange is conducted through the external heat exchanger, and self-sufficient energy or low-energy-consumption operation is achieved; the device can be directly connected with a storage tank or an oxygen enrichment layer of an air separation device or an oxygen transportation storage vehicle, so that direct transformation or independent operation on original equipment is facilitated.

Description

Technical Field

[0001] The invention relates to the technical field of gas refining, and in particular to a device and method for concentrating krypton and xenon in liquid oxygen. Background Art

[0002] Krypton (Kr) and xenon (Xe) are rare gases in the air at very low concentrations (kr about 1.14ppm, xenon about 0.087ppm), so it is difficult to enrich them directly in the air;

[0003] Since the boiling points of krypton and xenon are higher than those of oxygen (Kr boiling point -153°C, Xe boiling point -108°C, O2 boiling point -183°C), they gradually concentrate in liquid oxygen and eventually accumulate in the residue after the evaporation of liquid oxygen (oxygen-depleted liquid air), with a concentration of up to 0.1% to 1%.

[0004] However, the existing technology enriches krypton and xenon through the residue after liquid oxygen evaporation (krypton-xenon-poor liquid oxygen), relying on the difference in boiling points of krypton, xenon and oxygen to achieve preliminary separation, but there are the following defects and shortcomings:

[0005] Existing technology has high energy consumption: cryogenic distillation needs to maintain extremely low temperatures (below -183°C), which consumes a lot of energy and has high operating costs.

[0006] Therefore, those skilled in the art are in urgent need of providing a device and method for concentrating krypton and xenon in liquid oxygen that is self-sufficient with low or no energy consumption. Summary of the invention

[0007] The purpose of the present invention is to provide a device and method for concentrating krypton and xenon in liquid oxygen to solve the problems existing in the above-mentioned prior art.

[0008] A device for concentrating krypton and xenon with liquid oxygen, comprising: a concentration separation tank, a raw liquid oxygen storage device, a post-liquid oxygen storage tank, a krypton and xenon finished product storage tank, and an external heat exchanger;

[0009] The concentration and separation tank comprises a high-pressure resistant tank body, a middle tank arranged inside the high-pressure resistant tank body, an inner tank arranged inside the middle tank, and an internal heat exchanger arranged in the inner tank;

[0010] The raw liquid oxygen storage device is connected to the bottom of the middle tank through a pipeline; the rear liquid oxygen storage tank is connected to the bottom of the inner tank through a pipeline; the external heat exchanger is connected to the internal heat exchanger through a pipeline; the krypton-xenon finished product storage tank is connected to the bottom of the middle tank through a pipeline; the external heat exchanger is also connected to the bottom of the middle tank through a pipeline.

[0011] Further, the external heat exchanger is at least one group;

[0012] The external heat exchanger is one or more of a fin heat exchanger, a coil heat exchanger, a shell and tube heat exchanger, a plate heat exchanger, and a shell and tube heat exchanger.

[0013] Further, the internal heat exchanger is located in the middle and upper part of the inner tank, and fills the middle and upper part of the inner tank, and there is a space between the internal heat exchanger and the bottom;

[0014] The internal heat exchanger is one or more of a shell-and-tube heat exchanger, a coiled-tube heat exchanger, a sleeve-and-tube heat exchanger, a plate heat exchanger, and a shell-and-tube heat exchanger.

[0015] Furthermore, it also includes a first flow pump, a first switch valve, a second flow pump, a second switch valve and a controller;

[0016] The first flow pump and the first switch valve are arranged on the pipeline between the raw liquid oxygen storage device and the middle tank;

[0017] The second flow pump and the second switch valve are arranged on the pipeline between the rear liquid oxygen storage tank and the inner tank;

[0018] The first flow pump, the first switch valve, the second flow pump, and the second switch valve are all electrically connected to the controller.

[0019] Furthermore, it also includes a third switch valve, which is arranged on the pipeline between the krypton-xenon finished product storage tank and the middle tank;

[0020] And the third switch valve is electrically connected to the controller.

[0021] Furthermore, it also includes a fourth switch valve and a fifth switch valve, wherein the fourth switch valve is arranged on the pipeline between the external heat exchanger and the internal heat exchanger; and the fifth switch valve is arranged on the pipeline between the external heat exchanger and the middle tank;

[0022] The fourth switch valve and the fifth switch valve are electrically connected to the controller.

[0023] Furthermore, it also includes a pressure gauge and a liquid level gauge;

[0024] The pressure gauge is arranged at the upper end of the concentration and separation tank and is connected to the interior of the middle tank and is located at the top of the middle tank;

[0025] The indicating instrument of the liquid level gauge is arranged at the upper end of the concentration and separation tank and the measuring head is located at the bottom of the middle tank;

[0026] The pressure gauge and the liquid level gauge are both electrically connected to the controller.

[0027] Furthermore, it also includes safety valves, and there are at least two safety valves, both of which are connected to the top of the middle tank.

[0028] Furthermore, it also includes a vacuum insulation layer, which is arranged between the high-pressure resistant tank body and the middle tank;

[0029] The raw liquid oxygen storage device is a storage tank, an oxygen enrichment layer of an air separation device, or an oxygen transport storage vehicle.

[0030] A method for concentrating krypton and xenon with liquid oxygen, using the above-mentioned device for concentrating krypton and xenon with liquid oxygen, comprises the following steps:

[0031] S1: opening the first switch valve on the pipeline of the raw liquid oxygen storage device through the controller, and obtaining the flow data of the first flow pump; regulating the first switch valve through the controller to make liquid oxygen flow out of the raw liquid oxygen storage device accurately, and at the same time, the controller continuously monitors and records the flow data of the first flow pump to adjust the raw liquid oxygen supply in real time to keep the system running stably;

[0032] S2: The fourth switch valve is opened through the controller, and the external heat exchanger provides a heat source for the internal heat exchanger. The original liquid oxygen located at the upper middle end and the periphery of the inner tank absorbs heat and evaporates, and maintains a low-temperature environment below the inner tank. The residues after the original liquid oxygen evaporates are enriched in the middle tank and the lower end of the inner tank to form krypton and xenon with a high concentration; the oxygen entering the lower end of the inner tank is condensed by cooling to form liquid oxygen, which releases heat and is transferred to the internal heat exchanger to provide heat energy. The second switch valve is controlled by the controller to open to collect the liquid oxygen, and the controller continuously monitors and records the flow data of the second flow pump to adjust the recovery amount of liquid oxygen in real time to keep the system running stably;

[0033] S3: When a relatively high concentration of krypton and xenon is accumulated at the lower end of the intermediate tank, the controller controls the fifth switch valve to continue heating the relatively high concentration of krypton and xenon at the lower end to form a high concentration of krypton and xenon. The controller controls the third switch valve, and the krypton and xenon finished product storage tank collects the high concentration of krypton and xenon.

[0034] Compared with the prior art, the present invention provides a device and method for concentrating krypton and xenon in liquid oxygen, which has the following beneficial effects:

[0035] 1. The present invention evaporates the raw liquid oxygen from the raw liquid oxygen storage device in the inner tank, and the residual krypton, xenon, etc. are enriched in the middle tank. The present invention realizes separation based on the difference in boiling points of gas components. The boiling points of krypton (Kr) and xenon (Xe) (-153°C and -108°C, respectively) are higher than those of oxygen (-183°C). Therefore, in the process of low-temperature liquid oxygen evaporation, krypton and xenon will be preferentially enriched in the liquid oxygen residue in liquid form due to their higher boiling points, forming a krypton-xenon mixture.

[0036] 2. The present invention can utilize the heat energy released by the condensation of the post-liquid oxygen in the inner tank 13 to provide heat energy for concentrating krypton and xenon, thereby reducing energy consumption, and achieve energy self-sufficiency or low-energy operation through heat exchange with an external heat exchanger.

[0037] 3. The present invention can be directly connected to a storage tank or an oxygen enrichment layer of an air separation device or an oxygen transport storage vehicle, has strong practicality, is convenient for direct transformation on oxygen plant equipment or independent operation, and is easy to use. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0039] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0040] Among them: 1 is a concentration separation tank; 2 is a raw liquid oxygen storage device; 3 is a rear liquid oxygen storage tank; 4 is a krypton-xenon finished product storage tank; 5 is an external heat exchanger; 11 is a high-pressure tank body; 12 is a middle tank; 13 is an inner tank; 14 is an internal heat exchanger; 6 is a first flow pump; 61 is a first switch valve; 7 is a second flow pump; 71 is a second switch valve; 8 is a controller; 9 is a pressure gauge; 10 is a liquid level gauge; 100 is a safety valve; 200 is a third switch valve; 300 is a fourth switch valve; 400 is a fifth switch valve; 500 is a vacuum insulation layer. DETAILED DESCRIPTION

[0041] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0042] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0043] like Figure 1 As shown, a device for concentrating krypton and xenon with liquid oxygen comprises: a concentration and separation tank 1, a raw liquid oxygen storage device 2, a post-liquid oxygen storage tank 3, a krypton and xenon finished product storage tank 4 and an external heat exchanger 5;

[0044] The concentration and separation tank 1 comprises a high-pressure tank body 11, a middle tank 12 arranged inside the high-pressure tank body 11, an inner tank 13 arranged inside the middle tank 12, and an internal heat exchanger 14 arranged in the inner tank 13;

[0045] The original liquid oxygen storage device 2 is connected to the bottom of the middle tank 12 through a pipeline; the rear liquid oxygen storage tank 3 is connected to the bottom of the inner tank 13 through a pipeline; the external heat exchanger 5 is connected to the internal heat exchanger 13 through a pipeline; the krypton-xenon finished product storage tank 4 is connected to the bottom of the middle tank 12 through a pipeline; the external heat exchanger 5 is also connected to the bottom of the middle tank 12 through a pipeline.

[0046] In this embodiment, the external heat exchanger 5 is a group;

[0047] In still other embodiments, multiple sets of external heat exchangers 5 may be provided according to the original oxygen flow rate;

[0048] In this embodiment, the external heat exchanger 5 is a finned heat exchanger;

[0049] In other embodiments, the external heat exchanger 5 is one or more of a coiled tube heat exchanger, a shell-and-tube heat exchanger, a plate heat exchanger, and a shell-and-tube heat exchanger.

[0050] In this embodiment, the internal heat exchanger 14 is located in the middle and upper part of the inner tank 13 and fills the middle and upper part of the inner tank 13, and there is a space between the internal heat exchanger 14 and the bottom;

[0051] In this embodiment, the internal heat exchanger 14 is a shell-and-tube heat exchanger.

[0052] In still other embodiments, the internal heat exchanger 14 is one or more of a coiled heat exchanger, a shell-and-tube heat exchanger, a plate heat exchanger, and a shell-and-tube heat exchanger.

[0053] In this embodiment, it also includes a first flow pump 6, a first switch valve 61, a second flow pump 7, a second switch valve 71 and a controller 8;

[0054] The first flow pump 6 and the first switch valve 61 are arranged on the pipeline between the raw liquid oxygen storage device 2 and the middle tank 12;

[0055] A second flow pump 7 and a second switch valve 71 are provided on the pipeline between the rear liquid oxygen storage tank 3 and the inner tank 13;

[0056] The first flow pump 6 , the first switch valve 61 , the second flow pump 7 , and the second switch valve 71 are all electrically connected to the controller 8 .

[0057] In this embodiment, a third switch valve 200 is also included. The third switch valve 200 is arranged on the pipeline between the krypton-xenon finished product storage tank 4 and the middle tank 12;

[0058] And the third switch valve 200 is electrically connected to the controller 8 .

[0059] In this embodiment, a fourth switch valve 300 and a fifth switch valve 400 are further included. The fourth switch valve 300 is arranged on the pipeline between the external heat exchanger 5 and the internal heat exchanger 13; the fifth switch valve 400 is arranged on the pipeline between the external heat exchanger 5 and the middle tank 12;

[0060] The fourth switch valve 300 and the fifth switch valve 400 are electrically connected to the controller 8 .

[0061] In this embodiment, a pressure gauge 9 and a liquid level gauge 10 are also included;

[0062] The pressure gauge 9 is arranged at the upper end of the concentration separation tank 1 and is connected to the inside of the middle tank 12 and is located at the top of the middle tank 12;

[0063] The indicating instrument of the liquid level meter 10 is arranged at the upper end of the concentration separation tank 1 and the measuring head is located at the bottom of the middle tank 12;

[0064] The pressure gauge 9 and the liquid level gauge 10 are both electrically connected to the controller 8 .

[0065] In this embodiment, a safety valve 100 is also included. There are at least two safety valves 100 and both are connected to the top of the middle tank 12 .

[0066] Safety valve 100 effectively ensures safety and ensures stable operation of the equipment.

[0067] In this embodiment, a vacuum insulation layer 500 is further included, and the vacuum insulation layer 500 is provided between the high-pressure tank body 11 and the middle tank 12;

[0068] The raw liquid oxygen storage device 2 is a storage tank, an oxygen enrichment layer of an air separation device, or an oxygen transport storage vehicle.

[0069] The vacuum insulation layer 500 achieves heat preservation and insulation, effectively preventing temperature loss.

[0070] A method for concentrating krypton and xenon with liquid oxygen, using the above-mentioned device for concentrating krypton and xenon with liquid oxygen, comprises the following steps:

[0071] S1: Open the first switch valve 61 on the pipeline of the raw liquid oxygen storage device 2 through the controller 8, and obtain the flow data of the first flow pump 6; adjust the first switch valve 61 through the controller 8 to make the liquid oxygen flow out of the raw liquid oxygen storage device 2 accurately. At the same time, the controller 8 continuously monitors and records the flow data of the first flow pump 6 to adjust the raw liquid oxygen supply in real time to keep the system running stably;

[0072] S2: The fourth switch valve 300 is opened through the controller 8, and the external heat exchanger 5 provides a heat source for the internal heat exchanger 13. The original liquid oxygen located at the upper and middle end of the inner tank 13 and the peripheral part absorbs heat and evaporates, and maintains a low-temperature environment below the inner tank 13. The residue after the original liquid oxygen evaporates is enriched at the lower end of the middle tank 12 to form a high concentration of krypton and xenon; the oxygen entering the lower end of the inner tank 13 is condensed by cooling to form liquid oxygen, and the liquid oxygen releases heat and is transferred to the internal heat exchanger 13 to provide heat energy. The second switch valve 71 is controlled by the controller 8 to open to collect the liquid oxygen, and the controller 8 continuously monitors and records the flow data of the second flow pump 7 to adjust the recovery amount of liquid oxygen in real time to keep the system running stably;

[0073] In some other embodiments, the controller 8 also needs to combine multiple parameters, such as the liquid level meter 10, the pressure gauge 9 and other parameters, to adjust the original liquid oxygen supply, the post-liquid oxygen recovery and the opening and closing of each switch valve in real time to maintain stable operation of the system;

[0074] S3: When krypton and xenon are enriched at a relatively high concentration at the lower end of the intermediate tank 12, the controller 8 controls the fifth switch valve 400 to continue heating the krypton and xenon at the lower end to form high-concentration krypton and xenon. The controller 8 controls the third switch valve 200, and the krypton and xenon finished product storage tank 4 collects the high-concentration krypton and xenon.

[0075] Compared with the prior art, the present invention provides a device and method for concentrating krypton and xenon in liquid oxygen, which has the following beneficial effects:

[0076] 1. The present invention evaporates the raw liquid oxygen from the raw liquid oxygen storage device 2 in the inner tank 13, and the residual krypton, xenon, etc. are enriched in the middle tank 12. The present invention realizes separation based on the difference in boiling points of gas components. The boiling points of krypton Kr and xenon Xe are respectively -153°C and -108°C, which are higher than -183°C of oxygen. Therefore, in the process of low-temperature liquid oxygen evaporation, krypton and xenon will be preferentially enriched in the liquid oxygen residue in liquid form due to their higher boiling points, forming a krypton-xenon mixture.

[0077] 2. The present invention can utilize the heat energy released by the condensation of the post-liquid oxygen in the inner tank 13 to provide heat energy for concentrating krypton and xenon, thereby reducing energy consumption, and achieve energy self-sufficiency or low-energy operation through heat exchange with an external heat exchanger.

[0078] 3. The present invention can be directly connected to a storage tank or an oxygen enrichment layer of an air separation device or an oxygen transport storage vehicle, has strong practicality, is convenient for direct transformation on oxygen plant equipment or independent operation, and is easy to use.

[0079] In the description of the present invention, it should be understood that the terms "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0080] The embodiments described above are only descriptions of the preferred modes of the present invention, and are not intended to limit the scope of the present invention. Without departing from the design spirit of the present invention, various modifications and improvements made to the technical solutions of the present invention by ordinary technicians in this field should all fall within the protection scope determined by the claims of the present invention.

Claims

1. A device for concentrating krypton and xenon in liquid oxygen, characterized in that: include: A concentration and separation tank (1), a raw liquid oxygen storage device (2), a post-liquid oxygen storage tank (3), a krypton-xenon finished product storage tank (4), and an external heat exchanger (5); The concentration and separation tank (1) comprises a high-pressure resistant tank body (11), a middle tank (12) arranged inside the high-pressure resistant tank body (11), an inner tank (13) arranged inside the middle tank (12), and an internal heat exchanger (14) arranged in the inner tank (13); The raw liquid oxygen storage device (2) is connected to the bottom of the middle tank (12) through a pipeline; the rear liquid oxygen storage tank (3) is connected to the bottom of the inner tank (13) through a pipeline; the external heat exchanger (5) is connected to the internal heat exchanger (13) through a pipeline; the krypton-xenon finished product storage tank (4) is connected to the bottom of the middle tank (12) through a pipeline; and the external heat exchanger (5) is also connected to the bottom of the middle tank (12) through a pipeline.

2. The device for concentrating krypton and xenon in liquid oxygen according to claim 1, characterized in that: The external heat exchanger (5) is at least one group; The external heat exchanger (5) is one or more of a fin heat exchanger, a coil heat exchanger, a shell-and-tube heat exchanger, a plate heat exchanger, and a shell-and-tube heat exchanger.

3. The device for concentrating krypton and xenon in liquid oxygen according to claim 1, characterized in that: The internal heat exchanger (14) is located in the upper middle part of the inner tank (13), and fills the upper middle part of the inner tank (13), and there is a space between the internal heat exchanger (14) and the bottom; The internal heat exchanger (14) is one or more of a shell-and-tube heat exchanger, a coiled-tube heat exchanger, a shell-and-tube heat exchanger, a plate heat exchanger, and a shell-and-tube heat exchanger.

4. The device for concentrating krypton and xenon in liquid oxygen according to any one of claims 1 to 3, characterized in that: It also includes a first flow pump (6), a first switch valve (61), a second flow pump (7), a second switch valve (71) and a controller (8); The first flow pump (6) and the first switch valve (61) are arranged on the pipeline between the raw liquid oxygen storage device (2) and the middle tank (12); The second flow pump (7) and the second switch valve (71) are arranged on the pipeline between the rear liquid oxygen storage tank (3) and the inner tank (13); The first flow pump (6), the first switch valve (61), the second flow pump (7), and the second switch valve (71) are all electrically connected to the controller (8).

5. The device for concentrating krypton and xenon in liquid oxygen according to claim 4, characterized in that: It also includes a third switch valve (200), which is arranged on the pipeline between the krypton-xenon finished product storage tank (4) and the middle tank (12); Furthermore, the third switch valve (200) is electrically connected to the controller (8).

6. The device for concentrating krypton and xenon in liquid oxygen according to claim 5, characterized in that: The heat exchanger further comprises a fourth switch valve (300) and a fifth switch valve (400), wherein the fourth switch valve (300) is arranged on the pipeline between the external heat exchanger (5) and the internal heat exchanger (13); and the fifth switch valve (400) is arranged on the pipeline between the external heat exchanger (5) and the middle tank (12); Furthermore, the fourth switch valve (300) and the fifth switch valve (400) are electrically connected to the controller (8).

7. The device for concentrating krypton and xenon in liquid oxygen according to claim 6, characterized in that: It also includes a pressure gauge (9) and a liquid level gauge (10); The pressure gauge (9) is arranged at the upper end of the concentration and separation tank (1) and is communicated with the interior of the middle tank (12) and is located at the top of the middle tank (12); The indicating instrument of the liquid level meter (10) is arranged at the upper end of the concentration and separation tank (1) and the measuring head is located at the bottom of the middle tank (12); The pressure gauge (9) and the liquid level gauge (10) are both electrically connected to the controller (8).

8. The device for concentrating krypton and xenon in liquid oxygen according to claim 7, characterized in that: It also includes safety valves (100), and there are at least two safety valves (100) which are both connected to the top of the middle tank (12).

9. The device for concentrating krypton and xenon in liquid oxygen according to claim 8, characterized in that: It also includes a vacuum heat insulation layer (500), wherein the vacuum heat insulation layer (500) is arranged between the high-pressure resistant tank body (11) and the middle tank (12); The raw liquid oxygen storage device (2) is a storage tank, an oxygen enrichment layer of an air separation device, or an oxygen transport storage vehicle.

10. A method for concentrating krypton and xenon in liquid oxygen, characterized in that: The device for concentrating krypton and xenon using liquid oxygen as claimed in any one of claims 6 to 9 comprises the following steps: S1: opening the first switch valve (61) on the pipeline of the raw liquid oxygen storage device (2) through the controller (8) and obtaining the flow data of the first flow pump (6); regulating the first switch valve (61) through the controller (8) so that liquid oxygen can flow out of the raw liquid oxygen storage device (2) accurately, and at the same time, the controller (8) continuously monitors and records the flow data of the first flow pump (6) to adjust the raw liquid oxygen supply in real time to maintain stable operation of the system; S2: The fourth switch valve (300) is opened through the controller (8), and the external heat exchanger (5) provides a heat source for the internal heat exchanger (13). The original liquid oxygen located at the upper end and the periphery of the inner tank (13) absorbs heat and evaporates, and maintains a low-temperature environment below the inner tank (13). The residue after the original liquid oxygen evaporates is enriched in the middle tank (12) and the lower end of the inner tank (13) to form krypton and xenon with a relatively high concentration; the oxygen entering the lower end of the inner tank (13) is condensed by cooling to form liquid oxygen, and the liquid oxygen releases heat and is transferred to the internal heat exchanger (13) to provide heat energy. The second switch valve (71) is controlled by the controller (8) to open to collect the liquid oxygen, and the controller (8) continuously monitors and records the flow data of the second flow pump (7) to adjust the recovery amount of liquid oxygen in real time to keep the system running stably; S3: When krypton and xenon are enriched at a relatively high concentration at the lower end of the middle tank (12), the controller (8) controls the fifth switch valve (400) to continue heating the krypton and xenon enriched at the relatively high concentration at the lower end to form high-concentration krypton and xenon. The controller (8) controls the third switch valve (200) so that the krypton and xenon finished product storage tank (4) collects the high-concentration krypton and xenon.

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