An axisymmetric structure resonator unbalance mass identification device and method

Abstract

An axisymmetric structure resonator unbalance mass identification device and method, which utilizes a laser vibration detector to detect the vibration of the outer rod of the axisymmetric structure resonator, and further identifies the unbalance mass of the resonator. The laser vibration detector is erected outside the vacuum chamber, and the vibration of the outer rod of the resonator is detected through the glass window on the vacuum chamber. Through this non-contact measurement method, the vibration sensor does not need to be placed in the vacuum chamber, so that after the size and position of the unbalance mass are calculated, the unbalance mass of the resonator can be directly removed in the vacuum chamber, and the sensor does not need to be taken out of the vacuum chamber, avoiding the reduction of the leveling efficiency caused by repeated vacuumizing. At the same time, the laser vibration detector only needs to be installed once, avoiding the measurement error caused by repeated clamping when using a contact sensor.

Description

Technical Field

[0001] This invention relates to a device and method for identifying the unbalanced mass of an axisymmetric harmonic oscillator, belonging to the field of precision instrument design. Background Technology

[0002] Solid-state wave gyroscopes are a new type of high-precision gyroscope instrument that utilizes the Bryan effect caused by the Coriolis force in a rotating coordinate system to sense external rotation. Because they have no internal mechanical rotating parts, they have fewer potential failure factors, thus offering advantages such as high reliability, high precision, and long lifespan.

[0003] The core component of a solid-state wave gyroscope is an axisymmetric resonator, and its quality directly affects the gyroscope's final performance. However, due to limitations in manufacturing precision, actual resonators always contain a certain degree of error, resulting in a non-ideal axisymmetric structure, which significantly impacts the gyroscope's accuracy. Therefore, dynamic balancing of the manufactured resonator is essential and crucial for improving gyroscope accuracy; identifying the imbalance mass is a prerequisite for dynamic balancing of the resonator.

[0004] To identify unbalanced mass, a resonator needs to be excited electrically in a vacuum environment. The magnitude and orientation of the unbalanced mass are then calculated by detecting the vibration of the outer rod of the resonator. Since the amplitude of the outer rod's vibration is very small, a high-precision piezoelectric sensor is typically used to detect the vibration. However, as a contact measurement method, the piezoelectric sensor needs to be placed in the vacuum chamber along with the resonator. When removing the unbalanced mass, the sensor needs to be removed from the vacuum chamber. Therefore, the sensor needs to be repeatedly installed and removed during leveling, leading to a decrease in overall leveling efficiency. Furthermore, due to the repeated clamping and repositioning of the sensor, the piezoelectric sensor exhibits poor measurement repeatability and low consistency of the measurement data. Summary of the Invention

[0005] The technical problem solved by this invention is to address the various difficulties in identification and measurement in the existing technology by proposing a device and method for identifying the unbalanced mass of an axisymmetric harmonic oscillator.

[0006] The present invention solves the above-mentioned technical problem through the following technical solution:

[0007] A device for identifying the unbalanced mass of an axisymmetric resonator includes a laser vibrometer, a resonator, an excitation electrode, an electrode base, a vacuum chamber, a glass window, and a signal analysis system, wherein:

[0008] The excitation electrode used to start the resonator is set on the electrode base, and the resonator is set outside the excitation electrode. Both the excitation electrode and the resonator are installed inside the vacuum chamber. The laser vibrometer used to collect the vibration signal emitted by the resonator is set directly above the vacuum chamber. A glass window is set on the top of the vacuum chamber to allow the vibration signal to pass through and be transmitted. The laser vibrometer and the signal analyzer are connected by a cable to realize the transmission of vibration signal.

[0009] The resonator is equipped with an outer rod structure, and the fixed position of the laser vibrometer is located directly above the glass window, with the output optical path of the laser vibrometer focused with the center position of the outer rod structure; the vacuum chamber is evacuated before the resonator identification test is conducted.

[0010] The excitation electrode excites the harmonic oscillator with four antinodes before the harmonic oscillator identification test. Under the excitation action of the excitation electrode, the harmonic oscillator generates a vibration signal and outputs the vibration signal to the laser vibration meter through the outer rod structure.

[0011] The position, structure, and preset electric field strength of the excitation electrode are set according to the starting parameters of the resonator under test; the laser vibrometer collects the vibration signal of the resonator surface by interfering with the surface of the resonator by emitting an interference laser.

[0012] The signal analysis system includes a signal processing module, a vibration analysis module, a mass calculation module, and an output display module, wherein:

[0013] The signal processing module filters and amplifies the vibration signal transmitted by the laser vibrometer, and then sends the filtered signal to the vibration analysis module.

[0014] The vibration analysis module performs frequency and amplitude analysis on the filtered signal to obtain the vibration frequency and amplitude information of the harmonic oscillator and sends it to the mass calculation module.

[0015] The mass calculation module calculates the unbalanced mass of the harmonic oscillator based on its vibration frequency and amplitude information.

[0016] The output display module externally displays the vibration frequency and amplitude information, as well as the unbalanced mass of the harmonic oscillator.

[0017] The resonator has an axisymmetric structure. After the signal analysis system obtains the unbalanced mass, it controls the vacuum chamber to remove the unbalanced mass of the resonator based on the unbalanced mass data.

[0018] The mass calculation module calculates the unbalanced mass of the harmonic oscillator using methods such as Newton's iteration method and fitting to a Fourier series. The calculation method is as follows:

[0019]

[0020] In the formula, F xF y F z Let X, Y, and Z be the components of the unbalanced force caused by the unbalanced mass when the harmonic oscillator is oscillating with four antinodes, respectively; A be the amplitude of the four antinodes' oscillation; and ω be the angular frequency of the four antinodes' oscillation. Let be the standing wave azimuth angle of the fourth antinode vibration of the harmonic oscillator, and ∈1, ∈2, ∈3 be the values ​​of the 1st, 2nd, and 3rd harmonic components of the unbalanced mass of the harmonic oscillator. The azimuth angles are the 1st, 2nd, and 3rd harmonic components of the unbalanced mass of the harmonic oscillator.

[0021] An identification method based on an unbalanced mass identification device includes:

[0022] Design the position, structure, and preset electric field strength of the excitation electrodes based on the oscillation parameters of the resonator.

[0023] Assemble the unbalanced mass identification device to ensure that the center of the laser vibrometer, the glass window, and the resonator are set on the same axis;

[0024] The excitation electrode generates an electric field, which in turn controls the laser vibrometer to emit an interference laser beam toward the harmonic oscillator.

[0025] A laser vibrometer was used to collect the vibration signal generated after the harmonic oscillator started to vibrate.

[0026] The vibration signal is forwarded to the signal analysis system;

[0027] The vibration signal is solved by a signal analysis system to obtain the unbalanced mass of the harmonic oscillator.

[0028] In the process of solving vibration signals, the signal analysis system performs frequency analysis of folded signals through Fourier transform and amplitude analysis by calculating the peak value and effective value of the vibration signals.

[0029] The unbalanced mass of the harmonic oscillator is eliminated by controlling the air pressure in the vacuum chamber through an external control system.

[0030] The advantages of this invention compared to the prior art are:

[0031] (1) The present invention provides a device and method for identifying the unbalanced mass of an axisymmetric resonator. The resonator is installed on an electrode excitation base inside a vacuum chamber. A laser vibrometer is fixed outside the vacuum chamber, and the laser is aligned with the center of the outer rod of the resonator and focused. After evacuation, the resonator is excited by the electrode excitation system using four antinodes, and the vibration signal of the outer rod of the resonator is collected using the laser vibrometer. Finally, based on the collected signal, the magnitude and orientation of the unbalanced mass of the resonator are calculated using a signal analysis system, thereby achieving non-contact identification of the unbalanced mass of the resonator.

[0032] (2) The signal analysis algorithm used in this invention mainly uses Newton's iteration method to calculate the magnitude and orientation of the unbalanced mass of the harmonic oscillator. Based on the vibration of the four antinodes at different positions of the harmonic oscillator and the amplitude of the corresponding laser vibration signal, the unbalanced mass information of the harmonic oscillator is given by fitting first to third order Fourier series. It can ensure the accuracy of the calculation results through high-precision calculation and data processing capabilities. Attached Figure Description

[0033] Figure 1 A schematic diagram of the unbalanced mass identification device provided by the present invention. Detailed Implementation

[0034] A device and method for identifying the unbalanced mass of an axisymmetric resonator is disclosed. This method utilizes a laser vibrometer to detect the vibration of the outer rod of the axisymmetric resonator, thereby identifying the unbalanced mass. The laser vibrometer is mounted outside a vacuum chamber, and the vibration of the outer rod is detected through a glass window in the chamber. This non-contact measurement method eliminates the need to place the vibration sensor inside the vacuum chamber. After calculating the magnitude and orientation of the unbalanced mass, it allows for direct removal of the unbalanced mass within the vacuum chamber, avoiding the need to remove the sensor and the reduced leveling efficiency caused by repeated vacuuming. Furthermore, the laser vibrometer only requires a single installation, avoiding measurement errors caused by repeated clamping when using contact sensors.

[0035] A harmonic oscillator is used to measure unbalanced masses. The harmonic oscillator should have an axisymmetric structure to ensure the stability and accuracy of the vibration frequency.

[0036] The circuit controller is used for vacuum control of the resonator, achieved through excitation electrodes. It controls the resonator's vibration to produce four antinodes and controls it at different positions. The circuit controller should be able to precisely control the resonator's vibration frequency and amplitude.

[0037] A laser vibrometer is used to detect the vibration signal of a harmonic oscillator. It shines light through a glass window outside the vacuum chamber onto the outer rod of the harmonic oscillator and receives the reflected light signal to obtain the vibration information of the outer rod of the harmonic oscillator.

[0038] The signal analysis system processes the signals received by the laser to extract the vibrational characteristics of the harmonic oscillator. The signal processor should be able to analyze the signal quickly and accurately, extracting useful information as input data for the algorithm.

[0039] The identification device uses the four antinodes of the harmonic oscillator at different positions and the corresponding laser vibration signal amplitude to solve for the magnitude and orientation of the unbalanced mass of the harmonic oscillator using methods such as Newton's iteration method.

[0040] The external controller is operated by the user. It is used to control the operation of the entire system. The controller should be able to coordinate and synchronize the various components to ensure stable system operation and achieve the preset goals.

[0041] The connections and installation of the various components are as follows: the resonator is installed inside the vacuum cavity, while the electrodes, laser vibrometer, signal analysis system, and external controller are located outside the vacuum cavity. Specifically, the resonator is mounted on a base with excitation and detection electrodes inside the vacuum cavity. The electrodes on the base are led outside the vacuum cavity via wires, and the circuit controller controls the electrodes to vibrate the resonator, causing it to vibrate four antinodes at different positions. A laser outside the vacuum cavity shines through a glass window onto the outer rod of the resonator, and the vibration of the outer rod is detected by the light signal reflected back from it. Finally, the signal processor uses the vibration signal of the outer rod as input and employs methods such as Newton's iteration method to solve for the magnitude and orientation of the unbalanced mass of the resonator.

[0042] The implementation process of this system mainly consists of the following steps:

[0043] Harmonic oscillation initiation: This involves using electrodes to initiate the oscillation of the harmonic oscillator. Specifically, an electrode is placed near the surface of the harmonic oscillator, and an electric field is applied to induce oscillation. To ensure accurate control of the oscillator's oscillation, precise control is required over the electrode's position, shape, and electric field strength.

[0044] Laser interferometry: This system employs laser interferometry technology, which obtains the vibration signal of the resonator surface by interfering with a laser beam irradiated onto it. Laser interferometry has advantages such as high precision and high resolution, and can effectively detect the vibration of the resonator.

[0045] Signal processing: The acquired vibration signals need to undergo signal processing to improve the signal-to-noise ratio and resolution. The main signal processing methods include filtering, amplification, denoising, and digitization. Among these, filtering is the most basic signal processing method; it can remove noise from the signal, thereby improving its clarity and accuracy.

[0046] Vibration analysis: By performing frequency and amplitude analysis on the signal, information such as the vibration frequency and amplitude of the harmonic oscillator can be obtained. Frequency analysis can be achieved through methods such as Fourier transform, while amplitude analysis can be achieved by calculating parameters such as the peak value and RMS value of the vibration signal.

[0047] Unbalanced mass calculation: Based on the vibration frequency and amplitude of the harmonic oscillator, the unbalanced mass of the harmonic oscillator is obtained by fitting first to third order Fourier series using Newton's iteration method.

[0048] Output Results: Finally, the system outputs the calculated unbalanced mass results to a monitor or computer for display and recording.

[0049] The following description, in conjunction with the accompanying drawings and preferred embodiments, provides further details:

[0050] In the current embodiment, the unbalanced mass identification device for an axisymmetric resonator, such as... Figure 1 As shown, it includes a laser vibrometer, a resonator, excitation electrodes, an electrode base, a vacuum chamber, a glass window, and a signal analysis system, wherein:

[0051] The excitation electrode used to start the resonator is set on the electrode base, and the resonator is set outside the excitation electrode. Both the excitation electrode and the resonator are installed inside the vacuum chamber. The laser vibrometer used to collect the vibration signal emitted by the resonator is set directly above the vacuum chamber. A glass window is set on the top of the vacuum chamber to allow the vibration signal to pass through and be transmitted. The laser vibrometer and the signal analyzer are connected by a cable to realize the transmission of vibration signal.

[0052] An outer rod structure is provided on the resonator. The fixed position of the laser vibrometer is located directly above the glass window, and the output optical path of the laser vibrometer is focused with the center position of the outer rod structure. The vacuum chamber is evacuated before the resonator identification test is carried out.

[0053] Before the resonator identification test, the excitation electrode excites the resonator with four antinodes. Under the excitation of the excitation electrode, the resonator generates a vibration signal and outputs the vibration signal to the laser vibration meter through the outer rod structure.

[0054] The position, structure, and preset electric field strength of the excitation electrode are set according to the starting parameters of the resonator under test; the laser vibrometer collects the vibration signal of the resonator surface by interfering with the surface of the resonator by emitting an interferometric laser.

[0055] The signal analysis system includes a signal processing module, a vibration analysis module, a mass calculation module, and an output display module, among which:

[0056] The signal processing module filters and amplifies the vibration signal transmitted by the laser vibrometer, and then sends the filtered signal to the vibration analysis module.

[0057] The vibration analysis module performs frequency and amplitude analysis on the filtered signal to obtain the vibration frequency and amplitude information of the harmonic oscillator and sends it to the mass calculation module.

[0058] The mass calculation module calculates the unbalanced mass of the harmonic oscillator based on its vibration frequency and amplitude information.

[0059] The output display module externally displays the vibration frequency and amplitude information, as well as the unbalanced mass of the harmonic oscillator.

[0060] The resonator has an axisymmetric structure. After the signal analysis system obtains the unbalanced mass, it controls the vacuum chamber to remove the unbalanced mass of the resonator based on the unbalanced mass data.

[0061] The mass calculation module calculates the unbalanced mass of the harmonic oscillator using methods such as Newton's iteration method and fitting to a Fourier series. The calculation method is as follows:

[0062]

[0063] In the formula, F x F y F z Let X, Y, and Z be the components of the unbalanced force caused by the unbalanced mass when the harmonic oscillator undergoes four-wave antinode oscillation, respectively; A be the amplitude of the four-wave antinode oscillation of the harmonic oscillator; and ω be the angular frequency of the four-wave antinode oscillation of the harmonic oscillator. Let be the standing wave azimuth angle of the fourth antinode vibration of the harmonic oscillator, and ∈1, ∈2, ∈3 be the values ​​of the 1st, 2nd, and 3rd harmonic components of the unbalanced mass of the harmonic oscillator. The azimuth angles are the 1st, 2nd, and 3rd harmonic components of the unbalanced mass of the harmonic oscillator.

[0064] The identification method implemented by the unbalanced mass identification device includes the following steps:

[0065] Design the position, structure, and preset electric field strength of the excitation electrodes based on the oscillation parameters of the resonator.

[0066] Assemble the unbalanced mass identification device to ensure that the center of the laser vibrometer, the glass window, and the resonator are set on the same axis;

[0067] The excitation electrode generates an electric field, which in turn controls the laser vibrometer to emit an interference laser beam toward the harmonic oscillator.

[0068] A laser vibrometer was used to collect the vibration signal generated after the harmonic oscillator started to vibrate.

[0069] The vibration signal is forwarded to the signal analysis system;

[0070] The vibration signal is solved by a signal analysis system to obtain the unbalanced mass of the harmonic oscillator.

[0071] In the process of solving vibration signals, the signal analysis system performs frequency analysis of folded signals through Fourier transform and amplitude analysis by calculating the peak value and effective value of the vibration signal.

[0072] The unbalanced mass of the harmonic oscillator is eliminated by controlling the air pressure in the vacuum chamber through an external control system.

[0073] Although the present invention has been disclosed above with reference to preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can make possible changes and modifications to the technical solutions of the present invention by utilizing the methods and techniques disclosed above without departing from the spirit and scope of the present invention. Therefore, any simple modifications, equivalent changes and alterations made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solutions of the present invention shall fall within the protection scope of the technical solutions of the present invention.

[0074] The contents not described in detail in this specification are common knowledge to those skilled in the art.

Claims

1. A device for identifying the unbalanced mass of an axisymmetric resonator, characterized in that: Includes a laser vibrometer, resonator, excitation electrode, electrode base, vacuum chamber, glass window, and signal analysis system, among which: The excitation electrode used to start the resonator is set on the electrode base, and the resonator is set outside the excitation electrode. Both the excitation electrode and the resonator are installed inside the vacuum chamber. The laser vibrometer used to collect the vibration signal emitted by the resonator is set directly above the vacuum chamber. A glass window is set on the top of the vacuum chamber to allow the vibration signal to pass through and be transmitted. The laser vibrometer and the signal analyzer are connected by a cable to realize the transmission of vibration signal. The resonator is equipped with an outer rod structure, the fixed position of the laser vibrometer is located directly above the glass window and the output optical path of the laser vibrometer is focused with the center position of the outer rod structure; the vacuum chamber is evacuated before the resonator identification test is conducted. The excitation electrode excites the harmonic oscillator with four antinodes before the harmonic oscillator identification test. Under the excitation action of the excitation electrode, the harmonic oscillator generates a vibration signal and outputs the vibration signal to the laser vibration meter through the outer rod structure. The position, structure, and preset electric field strength of the excitation electrode are set according to the vibration parameters of the resonator under test; the laser vibrometer collects the vibration signal of the resonator surface by interfering with the surface of the resonator by emitting an interference laser. The signal analysis system includes a signal processing module, a vibration analysis module, a mass calculation module, and an output display module, wherein: The signal processing module filters and amplifies the vibration signal transmitted by the laser vibrometer, and then sends the filtered signal to the vibration analysis module. The vibration analysis module performs frequency and amplitude analysis on the filtered signal to obtain the vibration frequency and amplitude information of the harmonic oscillator and sends it to the mass calculation module. The mass calculation module calculates the unbalanced mass of the harmonic oscillator based on its vibration frequency and amplitude information. The output display module externally displays the vibration frequency and amplitude information, as well as the unbalanced mass of the harmonic oscillator. The resonator has an axisymmetric structure. After the signal analysis system obtains the unbalanced mass, it controls the vacuum chamber to remove the unbalanced mass of the resonator based on the unbalanced mass data. The connections and installation of the various components are as follows: the resonator is installed inside the vacuum cavity, while the electrodes, laser vibrometer, signal analysis system, and external controller are located outside the vacuum cavity. Specifically, the resonator is mounted on a base with excitation and detection electrodes inside the vacuum cavity. The electrodes on the base are led to the outside of the vacuum cavity via wires, and then the circuit controller controls the electrodes to make the resonator vibrate, causing it to vibrate four antinodes at different positions. A laser outside the vacuum cavity shines through a glass window onto the outer rod of the resonator, and the vibration of the outer rod is detected by the light signal reflected back from the outer rod. Finally, the signal processor uses the vibration signal of the outer rod as input and uses Newton's iteration method to solve for the magnitude and orientation of the unbalanced mass of the resonator. in: Harmonic oscillation initiation: The harmonic oscillator is started to oscillate using electrodes; specifically, an electrode needs to be placed near the surface of the harmonic oscillator, and an electric field is applied to make it vibrate; in order to ensure that the electrode can accurately control the vibration of the harmonic oscillator, the position, shape and electric field strength of the electrode need to be precisely controlled; Laser interferometry: This system uses laser interferometry technology to obtain the vibration signal of the resonator surface by interfering with the laser beam irradiating the surface of the resonator. Laser interferometry has the advantages of high precision and high resolution, and can detect the vibration of the resonator. Signal processing: The acquired vibration signals need to be processed to improve the signal-to-noise ratio and resolution. The main signal processing methods include filtering, amplification, denoising, and digitization. Among them, filtering is the most basic signal processing method. By filtering out noise from the signal, the clarity and accuracy of the signal are improved. Vibration analysis: By performing frequency and amplitude analysis on the signal, the vibration frequency and amplitude information of the harmonic oscillator are obtained; frequency analysis is achieved through Fourier transform, while amplitude analysis is achieved by calculating the peak value and RMS value parameters of the vibration signal. Unbalanced mass calculation: Based on the vibration frequency and amplitude information of the harmonic oscillator, the unbalanced mass of the harmonic oscillator is obtained by fitting first to third order Fourier series using the Newton iteration method; Output Results: Finally, the system outputs the calculated unbalanced mass results to a monitor or computer for display and recording.

2. The unbalanced mass identification device for an axisymmetric resonator according to claim 1, characterized in that: The mass calculation module calculates the unbalanced mass of the harmonic oscillator by fitting a Fourier series to a Newton-Fourier iterative method. The calculation method is as follows: In the formula, , , Let X, Y, and Z be the components of the unbalanced force caused by the unbalanced mass when the harmonic oscillator is oscillating with four antinodes, respectively, and A be the amplitude of the four antinodes oscillation. The circular frequency of the four antinodes of the harmonic oscillator. The azimuth angle of the standing wave of the four antinodes of the harmonic oscillator. , , The values ​​of the 1st, 2nd, and 3rd harmonic components of the unbalanced mass of the harmonic oscillator are given. , , The azimuth angles are the 1st, 2nd, and 3rd harmonic components of the unbalanced mass of the harmonic oscillator.

3. A method for identifying unbalanced mass using the device according to claim 2, characterized in that... include: Design the position, structure, and preset electric field strength of the excitation electrodes based on the oscillation parameters of the resonator. Assemble the unbalanced mass identification device to ensure that the center of the laser vibrometer, the glass window, and the resonator are set on the same axis; The excitation electrode generates an electric field, which in turn controls the laser vibrometer to emit an interference laser beam toward the harmonic oscillator. A laser vibrometer was used to collect the vibration signal generated after the harmonic oscillator started to vibrate. The vibration signal is forwarded to the signal analysis system; The vibration signal is solved by a signal analysis system to obtain the unbalanced mass of the harmonic oscillator.

4. The method for identifying the unbalanced mass of an axisymmetric harmonic oscillator according to claim 3, characterized in that: In the process of solving vibration signals, the signal analysis system performs frequency analysis of folded signals through Fourier transform and amplitude analysis by calculating the peak value and effective value of the vibration signals.

5. The method for identifying the unbalanced mass of an axisymmetric harmonic oscillator according to claim 4, characterized in that: The unbalanced mass of the harmonic oscillator is eliminated by controlling the air pressure in the vacuum chamber through an external control system.

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