Optical module calibration device and optical module calibration method

Abstract

The invention provides an optical module calibration device and an optical module calibration method. The optical module calibration device is used for calibrating the detection module to be coaxial with the optical module to be calibrated, and the light splitting reflection system is located on the light emitting side of the automatic focusing collimation system; the light splitting and reflecting system is arranged on a light splitting system adjusting carrying table, the light splitting system adjusting carrying table is provided with a first light through hole, and the light splitting system adjusting carrying table is used for adjusting the rotation degree of the light splitting and reflecting system around a second direction axis and the rotation degree of the light splitting and reflecting system around a third direction axis; the automatic focusing and collimating system and the light splitting system adjusting carrying platform are arranged on the bearing platform in a spaced mode, and the bearing platform is provided with a second light through hole coaxial with the first light through hole. The adjusting assembly is used for adjusting the rotation degree of the bearing platform around the first direction shaft, the rotation degree of the bearing platform around the second direction shaft and the rotation degree of the bearing platform around the third direction shaft on the first direction shaft and the second direction shaft. According to the invention, the problem of poor calibration precision between the optical module and the detection equipment in the prior art is solved.

Description

Technical Field

[0001] The present invention relates to the field of optical module detection equipment and technology, and in particular to an optical module calibration device and an optical module calibration method. Background Art

[0002] With the gradual development of electronic products, more and more electronic products are equipped with optical modules to make the functions of electronic products more and more diversified. In order to ensure the optical performance of the optical module, it is usually necessary to test the optical performance of the optical module during the manufacturing process of the optical module. During the testing process, the position and posture of the testing module relative to the optical module on the side has a direct impact on the test results.

[0003] During the assembly and adjustment of existing optical module inspection equipment, a combination of standard parts, micrometers, auxiliary visual cameras, and other means are generally used to achieve multi-degree-of-freedom calibration. The calibration accuracy is mainly guaranteed by structural design and processing accuracy, and the relative accuracy is low.

[0004] That is to say, there is a problem of poor calibration accuracy between the optical module and the detection equipment in the prior art. Summary of the invention

[0005] The main purpose of the present invention is to provide an optical module calibration device and an optical module calibration method to solve the problem of poor calibration accuracy between the optical module and the detection equipment in the prior art.

[0006] In order to achieve the above-mentioned purpose, according to one aspect of the present invention, there is provided an optical module calibration device, which is used for calibrating a detection module to be coaxial with an optical module to be calibrated, and comprises: an automatic focusing and collimating system; a spectroscopic reflection system, which is located on the light-emitting side of the automatic focusing and collimating system; a spectroscopic system adjustment platform, which is provided on the spectroscopic system adjustment platform, which has a first light-through hole, and which is used to adjust the rotation degree of the spectroscopic reflection system around a second direction axis and a rotation degree around a third direction axis; an instrument adjustment platform, which comprises a carrying platform and an adjustment component, wherein the automatic focusing and collimating system and the spectroscopic system adjustment platform are arranged on the carrying platform at intervals, and the carrying platform has a second light-through hole which is coaxially arranged with the first light-through hole, and the adjustment component is used to adjust the carrying platform in the first direction axis, the second direction axis, and the rotation degree around the first direction axis, the rotation degree around the second direction axis, and the rotation degree around the third direction axis; wherein the first direction axis, the second direction axis and the third direction axis are perpendicular to each other.

[0007] Furthermore, the spectroscopic reflection system includes: a spectroscopic prism, the orthographic projection of the spectroscopic prism on the spectroscopic system adjustment stage overlaps with the first light hole, the spectroscopic prism is used to reflect the first part of the calibration light emitted by the automatic focusing and collimation system to the optical module to be calibrated, the first part of the calibration light is used to calibrate the coaxiality of the optical module calibration device and the optical module to be calibrated, the spectroscopic prism is used to transmit the second part of the calibration light emitted by the automatic focusing and collimation system, the central wavelengths of the first part of the calibration light and the second part of the calibration light are different; a plane reflector, the plane reflector is located on the side of the spectroscopic prism away from the automatic focusing and collimation system, the spectroscopic prism is used to reflect the second part of the calibration light, and the second part of the calibration light reflected by the plane reflector is used to calibrate the coaxiality of the optical module calibration device and the detection module.

[0008] Furthermore, the automatic focusing collimation system includes: a light source assembly, which is used to emit calibration light; a transflective prism, which is located on the light-emitting side of the light source assembly; a collimation module, which is located on the light-emitting side of the transflective prism, and the calibration light enters the collimation module after being emitted through the transflective prism and is collimated by the collimation module, and the calibration light collimated by the collimation module is incident on the light-splitting reflection system; an image sensor, which is located on the reflective side of the transflective prism, and is used to receive the second part of the calibration light reflected by the plane reflector, wherein the second part of the calibration light reflected by the plane reflector reaches the image sensor via the collimation module and the transflective prism in sequence.

[0009] Furthermore, the central axis of the collimating module, the central axis of the transflective prism, the central axis of the beam splitter prism and the central axis of the plane reflector are located at the same height.

[0010] Furthermore, the light source assembly includes: an LED panel; a graticule plate, wherein the graticule plate is located between the LED panel and the transflective prism, and the center of the graticule plate and the center of the transflective prism are located at the same height.

[0011] Further, the minimum distance from the graticule to the transflective prism is the same as the minimum distance from the image sensor to the transflective prism.

[0012] Furthermore, the graticule is a cross graticule.

[0013] Furthermore, the beam splitter prism includes a first right-angle prism and a second right-angle prism, and the inclined surface of the first right-angle prism is arranged to fit the inclined surface of the second right-angle prism.

[0014] According to another aspect of the present invention, an optical module calibration method is provided. The optical module calibration device is calibrated. The optical module calibration method comprises:

[0015] Obtain an optical module calibration device, an optical module to be calibrated, and a detection module, and arrange the optical module calibration device, the optical module to be calibrated, and the detection module at preset positions;

[0016] Adjusting the automatic focusing collimation system of the optical module calibration device to be coaxial with the light splitting reflection system of the optical module calibration device;

[0017] Adjust the optical module to be calibrated, the detection module and the optical module calibration device to be coaxial.

[0018] Furthermore, the step of adjusting the optical module to be calibrated, the detection module and the optical module calibration device to be coaxial includes:

[0019] Adjust the parallel calibration light emitted by the automatic focusing collimation system, and under the parallel calibration light, adjust the rotation degree of the optical module calibration device and the detection module around the first direction axis and the rotation degree around the second direction axis, so that the light spot is imaged at the center of the field of view of the optical module to be calibrated and the image sensor;

[0020] Adjust the automatic focusing and collimation system to emit limited-distance calibration light, and under the limited-distance calibration light, adjust the positions of the optical module to be calibrated, the detection module and the optical module calibration device on the first direction axis, the second direction axis, and the degree of rotation around the third direction axis, so that the optical module to be calibrated, the detection module and the optical module calibration device are coaxial.

[0021] Further, the steps of adjusting the parallel calibration light emitted by the automatic focusing collimation system, and adjusting the rotation degree of the optical module to be calibrated, the detection module and the optical module calibration device around the first direction axis and the rotation degree around the second direction axis under the parallel calibration light include:

[0022] Adjust the automatic focusing collimation system to emit cross-parallel calibration light, wherein the cross-parallel calibration light is incident on the beam splitting reflection system, the beam splitting prism of the beam splitting reflection system reflects the first part of the cross-parallel calibration light to the optical module to be calibrated, the beam splitting prism transmits the second part of the cross-parallel calibration light to the plane reflector of the beam splitting reflection system, the plane reflector reflects the second part of the cross-parallel calibration light to the beam splitting prism, and the beam splitting prism reflects the second part of the cross-parallel calibration light to the detection module;

[0023] Adjusting the focus of the optical module to be calibrated so that the optical module to be calibrated forms an image of the first part of the cross parallel calibration light;

[0024] Taking the optical module to be calibrated as a reference, adjusting the adjustment components of the automatic focusing and collimation system, changing the rotation degree of the bearing platform in the first direction axis and the rotation degree of the second direction axis, so that the first part of the cross-parallel calibration light reflected by the light splitting reflection system is imaged at the center of the field of view of the optical module to be calibrated;

[0025] Taking the automatic focusing and collimation system as a reference, adjust the rotation degree of the detection module in the first direction axis and the rotation degree of the second direction axis, so that the second part of the cross parallel calibration light reflected by the detection module returns to the automatic focusing and collimation system along the original path, and the second part of the cross parallel calibration light is located at the center of the field of view of the image sensor of the automatic focusing and collimation system.

[0026] Further, the steps of adjusting the automatic focusing and collimation system to emit a limited distance calibration light, and adjusting the positions of the optical module to be calibrated, the detection module and the optical module calibration device on the first direction axis and the second direction axis, and the rotation degree around the third direction axis under the limited distance calibration light include:

[0027] Adjusting the automatic focusing collimation system to emit a convergent cross calibration light of a limited distance, wherein the convergent cross calibration light of a limited distance is incident on the beam splitting reflection system, and the beam splitting prism of the beam splitting reflection system reflects a part of the convergent cross calibration light of a limited distance to the optical module to be calibrated;

[0028] Adjust the focus of the optical module to be calibrated so that the optical module to be calibrated forms an image of the convergent cross calibration light of a limited distance;

[0029] Taking the optical module to be calibrated as a reference, adjusting the adjustment components of the automatic focusing and collimation system, changing the rotation degree of the carrying platform around the third direction axis and the position on the first direction axis and the second direction axis, so that the convergent cross calibration light of limited distance is imaged at the center of the field of view of the optical module to be calibrated, and the convergent cross calibration light of limited distance is parallel to the first direction axis and the second direction axis relative to the imaging surface of the optical module to be calibrated;

[0030] Turn off the light source of the automatic focusing and collimation system, light up the luminous target of the detection module, and the target light emitted by the luminous target enters the automatic focusing and collimation system through the spectroscopic reflection system;

[0031] Adjust the focal length of the automatic focusing and collimating system so that the automatic focusing and collimating system images the target light;

[0032] Taking the automatic focusing and collimation system as a reference, adjust the rotation degree of the detection module around the third direction axis and the position on the first direction axis and the second direction axis, and the light emitted by the detection module is imaged at the center of the field of view of the image sensor, and the target light is parallel to the first direction axis and the second direction axis of the image sensor, so that the optical module to be calibrated, the detection module and the optical module calibration device are coaxial.

[0033] Furthermore, when the optical module to be calibrated has an image source, the steps of adjusting the optical module to be calibrated, the detection module and the optical module calibration device, and making the optical module to be calibrated, the detection module and the optical module calibration device coaxial include:

[0034] Taking the optical module to be calibrated as a reference, adjusting the optical module calibration device to be coaxial with the optical module to be calibrated;

[0035] Taking the optical module calibration device as a reference, adjust the detection module to be coaxial with the optical module calibration device.

[0036] Furthermore, taking the optical module to be calibrated as a reference, the step of adjusting the optical module calibration device to be coaxial with the optical module to be calibrated includes:

[0037] Step S411, lighting up the image source of the optical module to be calibrated, and making the light emitted by the image source a cross light;

[0038] Step S412, adjusting the focus of the automatic focusing collimation system, and imaging the cross light emitted by the image source;

[0039] Step S413: Taking the optical module to be calibrated as a reference, adjusting the adjustment component of the automatic focusing and collimating system, changing the rotation degree of the carrying platform around the first direction axis, the rotation degree around the second direction axis, and the rotation degree around the third direction axis, so that the cross light is located at the center of the field of view of the image sensor of the automatic focusing and collimating system, and the cross light is parallel to the first direction axis and the second direction axis of the image sensor;

[0040] Step S414, turning on the light source of the automatic focusing and collimating system, and adjusting the focusing distance of the automatic focusing and collimating system to the center position of the first surface of the lens of the optical module to be calibrated;

[0041] Step S415, taking the optical module to be calibrated as a reference, adjusting the adjustment components of the automatic focusing and collimation system, changing the distance between the bearing platform on the first direction axis and the second direction axis, so that the center image of the sphere is at the center of the field of view of the optical module to be calibrated;

[0042] Step S416, repeating steps S411 to S415 until both steps S413 and S415 are satisfied, and the optical module to be calibrated, the detection module and the optical module calibration device are coaxial.

[0043] Furthermore, taking the optical module calibration device as a reference, the step of adjusting the detection module to be coaxial with the optical module calibration device includes:

[0044] Adjust the automatic focusing collimation system to emit cross parallel calibration light, wherein the cross parallel calibration light is incident on the beam splitting reflection system, the beam splitting prism transmits the second part of the cross parallel calibration light to the plane reflector of the beam splitting reflection system, the plane reflector reflects the second part of the cross parallel calibration light to the beam splitting prism, and the beam splitting prism reflects the second part of the cross parallel calibration light to the detection module;

[0045] Adjust the focus of the detection module so that the detection module forms an image of the second part of the cross parallel calibration light;

[0046] Taking the automatic focusing and collimation system as a reference, adjusting the rotation degree of the detection module in the first direction axis and the rotation degree of the second direction axis, so that the second part of the cross parallel calibration light reflected by the detection module returns to the automatic focusing and collimation system along the original path, and the second part of the cross parallel calibration light is located at the center of the field of view of the image sensor of the automatic focusing and collimation system;

[0047] Adjust the automatic focusing collimation system to emit a convergent cross calibration light of a limited distance, wherein the convergent cross calibration light of a limited distance is incident on the beam splitting reflection system, the beam splitting prism of the beam splitting reflection system transmits a part of the convergent cross calibration light of a limited distance to the plane reflector, the plane reflector reflects the convergent cross calibration light of a limited distance to the beam splitting prism, and the beam splitting prism reflects the convergent cross calibration light of a limited distance to the detection module;

[0048] Adjust the focus of the detection module so that the detection module images the convergent cross calibration light of a limited distance;

[0049] Taking the automatic focusing and collimation system as a reference, adjust the adjustment components of the automatic focusing and collimation system, change the rotation degree of the supporting platform around the third direction axis and the position on the first direction axis and the second direction axis, so that the convergent cross calibration light of limited distance is imaged at the center of the field of view of the detection module, and the first direction axis and the second direction axis of the imaging surface of the cross relative to the calibration optical module are parallel.

[0050] Further, the step of adjusting the automatic focusing and collimation system of the optical module calibration device to be coaxial with the spectroscopic reflection system of the optical module calibration device includes:

[0051] Adjust the automatic focusing collimation system so that the automatic focusing collimation system emits cross-parallel calibration light;

[0052] The coarse adjustment light splitting system adjusts the rotation degree of the stage around the second direction axis and the rotation degree around the third direction axis, so that the parallel calibration light passes through the light splitting prism and is incident on the plane reflector;

[0053] The image sensor of the automatic focusing and collimating system images the parallel calibration light reflected by the plane reflector, wherein the plane reflector reflects the light, and the light passes through the beam splitter prism, the collimating module, and the transflective prism in sequence to the image sensor.

[0054] The splitter system is adjusted to adjust the rotation degree of the stage around the second direction axis and the rotation degree around the third direction axis, so that the cross spot received by the image sensor is at the center of the field of view of the image sensor, and the position of the splitter system adjustment stage is fixed.

[0055] By applying the technical solution of the present invention, an optical module calibration device is used to calibrate that a detection module is coaxial with an optical module to be calibrated, and the optical module calibration device includes an automatic focusing collimation system, a spectroscopic reflection system, a spectroscopic system adjustment platform and an instrument adjustment platform, wherein the spectroscopic reflection system is located on the light emitting side of the automatic focusing collimation system; the spectroscopic reflection system is arranged on the spectroscopic system adjustment platform, and the spectroscopic system adjustment platform has a first light-through hole, and the spectroscopic system adjustment platform is used to adjust the degree of rotation of the spectroscopic reflection system around a second direction axis and a degree of rotation around a third direction axis.

[0056] By setting up an automatic focusing collimation system, a spectroscopic reflection system, a spectroscopic system adjustment stage and an instrument adjustment stage, the coaxiality of the detection module and the optical module to be calibrated can be accurately calibrated. By adjusting the position of the light in the automatic focusing collimation system and the spectroscopic reflection system, the transmission path of the light in the automatic focusing collimation system, the spectroscopic reflection system, the detection module and the optical module to be calibrated can be adjusted, and then the coaxiality of the detection module and the optical module to be calibrated can be accurately calibrated to ensure the accuracy of the detection module. Among them, the spectroscopic system adjustment stage can separately adjust the rotation degree of the spectroscopic reflection system around the second direction axis and the rotation degree around the third direction axis, so as to adjust the coaxiality of the spectroscopic reflection system and the automatic focusing collimation system, ensure that the spectroscopic reflection system is coaxial with the automatic focusing collimation system, and then ensure the accuracy of the calibration. BRIEF DESCRIPTION OF THE DRAWINGS

[0057] The drawings constituting a part of the present application are used to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the drawings:

[0058] Figure 1 A schematic structural diagram of an optical module calibration device according to an optional embodiment of the present invention is shown;

[0059] Figure 2 A flow chart showing an optical module calibration method according to an optional embodiment of the present invention;

[0060] Figure 3 A light path diagram of an optical module during calibration of an optional embodiment of the present invention is shown;

[0061] Figure 4 A light path diagram of another optional embodiment of the present invention during optical module calibration is shown;

[0062] Figure 5 A flow chart showing an optical module calibration method according to another optional embodiment of the present invention;

[0063] Figure 6 A flow chart showing an optical module calibration method according to another optional embodiment of the present invention;

[0064] Figure 7 A light path diagram of another optional embodiment of the present invention during optical module calibration is shown;

[0065] Figure 8 A light path diagram of another optional embodiment of the present invention during optical module calibration is shown;

[0066] Fig. 9 A light path diagram of another optional embodiment of the present invention during optical module calibration is shown;

[0067] Fig.10 A flow chart showing an optical module calibration method according to another optional embodiment of the present invention;

[0068] Fig.11 A flow chart of an optical module calibration method according to another optional embodiment of the present invention is shown.

[0069] The above drawings include the following reference numerals:

[0070] 10. Automatic focusing and collimation system; 11. Light source assembly; 111. LED panel; 112. Graticule; 12. Transflective prism; 13. Collimation module; 14. Image sensor; 20. Beam splitting reflection system; 21. Beam splitting prism; 211. First right-angle prism; 212. Second right-angle prism; 22. Plane reflector; 30. Beam splitting system adjustment stage; 31. First light hole; 40. Instrument adjustment stage; 41. Carrying platform; 42. Adjustment assembly; 421. Second light hole; 43. Collimation system stage; 50. Detection module; 60. Optical module to be calibrated. DETAILED DESCRIPTION

[0071] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0072] It should be noted that, unless otherwise specified, all technical and scientific terms used in this application have the same meanings as commonly understood by ordinary technicians in the technical field to which this application belongs.

[0073] In the present invention, unless otherwise specified, the directional words used, such as "up, down, top, bottom", usually refer to the directions shown in the drawings, or to the components themselves in the vertical, perpendicular or gravity directions; similarly, for ease of understanding and description, "inside and outside" refer to the inside and outside relative to the outline of each component itself, but the above-mentioned directional words are not used to limit the present invention.

[0074] In order to solve the problem of poor calibration accuracy between an optical module and a detection device in the prior art, the present invention provides an optical module calibration device and an optical module calibration method.

[0075] like Figures 1 to 11 As shown, the optical module calibration device is used to calibrate the detection module 50 to be coaxial with the optical module 60 to be calibrated, and the optical module calibration device includes an automatic focusing collimation system 10, a spectroscopic reflection system 20, a spectroscopic system adjustment platform 30 and an instrument adjustment platform 40. The spectroscopic reflection system 20 is located on the light emitting side of the automatic focusing collimation system 10; the spectroscopic reflection system 20 is arranged on the spectroscopic system adjustment platform 30, and the spectroscopic system adjustment platform 30 has a first light hole 31. The spectroscopic system adjustment platform 30 is used to adjust the rotation degree of the spectroscopic reflection system 20 around the second direction axis and the rotation degree around the third direction axis.

[0076] By setting the automatic focusing collimation system 10, the spectroscopic reflection system 20, the spectroscopic system adjustment stage 30 and the instrument adjustment stage 40, the coaxiality of the detection module 50 and the optical module 60 to be calibrated can be accurately calibrated. By adjusting the position of the light in the automatic focusing collimation system 10 and the spectroscopic reflection system 20, the transmission path of the light in the automatic focusing collimation system 10, the spectroscopic reflection system 20, the detection module 50 and the optical module 60 to be calibrated can be adjusted, and then the coaxiality of the detection module 50 and the optical module 60 to be calibrated can be accurately calibrated to ensure the accuracy of the detection of the detection module 50. Among them, the spectroscopic system adjustment stage 30 can separately adjust the rotation degree (Ry) of the spectroscopic reflection system 20 around the second direction axis and the rotation degree (Rz) around the third direction axis, so as to adjust the coaxiality of the spectroscopic reflection system 20 and the automatic focusing collimation system 10, ensure that the spectroscopic reflection system 20 is coaxial with the automatic focusing collimation system 10, and then ensure the accuracy of the calibration.

[0077] like Figure 1 As shown, the first direction axis is the X axis, the second direction axis is the Y axis, the third direction axis is the Z axis, the rotation degree around the second direction axis is Ry, the rotation degree around the third direction axis is Rz, and the rotation degree around the first direction axis is Rx.

[0078] like Figure 1As shown, the instrument adjustment stage 40 includes a carrying platform 41 and an adjustment component 42. The automatic focusing collimation system 10 and the spectroscopic system adjustment stage 30 are arranged on the carrying platform 41 at intervals. The carrying platform 41 has a second light hole 421 coaxially arranged with the first light hole 31. The adjustment component 42 is used to adjust the carrying platform 41 in the first direction axis, the second direction axis, and the rotation degree around the first direction axis, the rotation degree around the second direction axis, and the rotation degree around the third direction axis; wherein the first direction axis, the second direction axis and the third direction axis are perpendicular to each other. The adjustment component 42 can adjust the translational freedom of the carrying platform 41 in the first direction axis (X axis) and the second direction axis (Y axis), as well as the rotational freedom such as the rotation degree (Rx) around the first direction axis, the rotation degree (Ry) around the second direction axis, and the rotation degree (Rz) around the third direction axis. The adjustment component 42 can adjust the degrees of freedom of the carrying platform 41 in the above-mentioned five directions. When the adjustment component 42 adjusts the movement of the carrying platform 41, the automatic focusing collimation system 10 and the spectroscopic reflection system 20 move synchronously with the carrying platform 41 to adjust the coaxiality among the automatic focusing collimation system 10, the spectroscopic reflection system 20, the detection module 50 and the optical module to be calibrated 60, thereby completing the calibration of the coaxiality between the detection module 50 and the optical module to be calibrated 60.

[0079] The optical module calibration device in the present application can be applied to a variety of detection modules 50, and can be used to calibrate non-imaging modules with image sources, such as AR and VR modules, and can also be used to calibrate imaging modules without image sources, such as camera modules.

[0080] The focusing of the above-mentioned automatic focusing and collimation system 10, as well as the adjustment of the spectroscopic system adjustment stage 30 and the instrument adjustment stage 40, can be completed by software control, providing an automated calibration method, reducing manual intervention, and improving the accuracy and consistency of calibration.

[0081] In some optional embodiments, such as Figure 1 As shown, the instrument adjustment stage 40 also includes a collimation system stage 43, which is arranged on a side of the carrying platform 41 away from the adjustment component 42, and the collimation system stage 43 is spaced apart from the second light hole 421, and the automatic focusing collimation system 10 is arranged on the collimation system stage 43.

[0082] In some optional embodiments, such as Figure 1As shown, the spectroscopic reflection system 20 includes a spectroscopic prism 21 and a plane reflector 22. The orthographic projection of the spectroscopic prism 21 on the spectroscopic system adjustment stage 30 overlaps with the first light hole 31. The spectroscopic prism 21 is used to reflect the first part of the calibration light emitted by the automatic focusing and collimation system 10 to the optical module 60 to be calibrated. The first part of the calibration light is used to calibrate the coaxiality between the optical module calibration device and the optical module 60 to be calibrated. The spectroscopic prism 21 is used to transmit the second part of the calibration light emitted by the automatic focusing and collimation system 10. The central wavelengths of the first part of the calibration light and the second part of the calibration light are different. The plane reflector 22 is located on the side of the spectroscopic prism 21 away from the automatic focusing and collimation system 10. The spectroscopic prism 21 is used to reflect the second part of the calibration light. The second part of the calibration light reflected by the plane reflector 22 is used to calibrate the coaxiality between the optical module calibration device and the detection module 50. The second part of the calibration light can be transmitted through the dichroic prism 21, and the first part of the calibration light can be reflected. The automatic focusing and collimation system 10 emits two coaxial wavelengths of light, which are divided into two paths when encountering the dichroic prism 21. One path is used to calibrate the coaxiality between the optical module calibration device and the optical module 60 to be calibrated, and the other path is used to calibrate the coaxiality between the optical module calibration device and the detection module 50. When the optical module 60 to be calibrated is coaxial with the optical module calibration device and the optical module calibration device is coaxial with the detection module 50, the optical module 60 to be calibrated is coaxial with the detection module 50. Among them, after the second part of the calibration light is reflected by the plane reflector 22, it is incident on the dichroic prism 21, and is reflected by the dichroic prism 21 to the target plane in the detection module 50. The second part of the calibration light after reflection by the target plane returns to the automatic focusing and alignment system 10 along the original path, and the rotation degree of the first direction axis and the second direction axis of the detection module 50 are adjusted so that the light reflected by the detection module 50 is imaged at the center of the field of view of the image sensor 14, and the optical module 60 to be calibrated is coaxial with the detection module 50.

[0083] It should be noted that when light of the same wavelength is incident on the dichroic prism 21 from different directions, it can be transmitted or reflected by the dichroic prism 21. For example, the second part of the calibration light emitted by the automatic focusing collimation system 10 can pass through the dichroic prism 21. When the second part of the calibration light is reflected from the plane reflector 22 to the dichroic prism 21, the dichroic prism 21 reflects the second part of the calibration light to the detection module 50.

[0084] The light splitting reflection system 20 is combined with the automatic focusing and collimating system 10 to realize real-time feedback of the beam position. The control component can control the automatic focusing and collimating system 10, the instrument adjustment stage 40 and the detection module 50, so as to automatically adjust the relative positions of the optical module 60 to be calibrated, the detection module 50 and the optical module 60 to be calibrated, and realize automatic calibration. The control component can analyze the feedback beam position data and provide a quantitative representation of the calibration results, which is convenient for further control of the detection equipment installation and adjustment and analysis of the detection results.

[0085] In some optional embodiments, a reflective film is provided on a surface of the plane reflector 22 facing the beam splitter prism 21, and the flatness error of the reflective film is less than or equal to 1 um to avoid large calibration errors caused by large flatness errors of the reflective film.

[0086] In some optional embodiments, such as Figure 1 As shown, the automatic focusing collimation system 10 includes a light source assembly 11, a transflective prism 12, a collimation module 13 and an image sensor 14, wherein the light source assembly 11 is used to emit calibration light; the transflective prism 12 is located at the light-emitting side of the light source assembly 11; the collimation module 13 is located at the light-emitting side of the transflective prism 12, and the calibration light enters the collimation module 13 after being emitted from the transflective prism 12, and is collimated by the collimation module 13, and the calibration light collimated by the collimation module 13 is incident into the spectroscopic reflection system 20; the image sensor 14 is located at the reflective side of the transflective prism 12, and the image sensor 14 is used to receive the second part of the calibration light reflected by the plane reflector 22, wherein the second part of the calibration light reflected by the plane reflector 22 passes through the collimation module 13 and the transflective prism 12 in sequence to reach the image sensor 14. The collimation module 13 in the automatic focusing collimation system 10 can collimate the calibration light emitted by the light source assembly 11 to ensure that the light beam remains parallel during propagation, which is crucial in optical detection. At the same time, the automatic focusing collimation system 10 can automatically focus, which means that it can accurately control the focal point of the light beam, and can generate a clear light spot or image whether at infinity (parallel calibration light) or at a specific distance (limited distance calibration light beam), thereby improving the accuracy and reliability of calibration. The design of the transflective prism 12 (i.e., semi-transparent and semi-reflective prism) can transmit or reflect the calibration light emitted by the light source assembly 11, and reflect or transmit the light emitted from the collimation module 13 to the transflective prism 12, so that the transflective prism 12 has different effects on light from different directions.

[0087] In some optional embodiments, the transflective prism 12 can reflect the calibration light emitted by the light source assembly 11 and transmit the light emitted from the collimating module 13 to the transflective prism 12 .

[0088] In some other optional embodiments, the transflective prism 12 can transmit the calibration light emitted by the light source assembly 11 and reflect the light emitted from the collimating module 13 to the transflective prism 12 .

[0089] The image sensor 14 can receive and accurately measure the position information of the second part of the calibration light reflected by the detection module 50. Combined with the focus adjustment of the light beam, this ability can be used to calibrate the relative position and posture between the optical module and the detection module, including horizontal displacement (X, Y direction) and three rotation angles (Rx, Ry, Rz direction), to achieve high-precision posture calibration of five degrees of freedom. Since the image sensor 14 can accurately measure the position of the reflected light beam, the control component can quantitatively analyze the calibration results and provide intuitive calibration error data, which is helpful for subsequent correction and optimization, and is also convenient for recording and comparing the calibration status of different detection equipment. The control component controls the automatic focusing collimation system 10, which can automatically adjust the beam characteristics (such as wavelength, light intensity, etc.) of the light source component 11 and the focusing state of the collimation module 13. With the feedback information of the image sensor 14, the automation of the calibration process can be realized, reducing human operation errors and improving efficiency. The combined use of the automatic focusing and collimating system 10 and the spectroscopic reflection system 20 reduces the dependence on specific standard parts, simplifies the calibration process, reduces the calibration cost and time required, and improves the assembly efficiency and productivity of the detection equipment.

[0090] In some optional embodiments, the central axis of the collimation module 13, the central axis of the transflective prism 12, the central axis of the beam splitter prism 21 and the central axis of the plane reflector 22 are located at the same height. The centers of the collimation module 13, the transflective prism 12, the beam splitter prism 21 and the plane reflector 22 are located at the same height, which is convenient for adjusting the auto-focus collimation system 10 and the beam splitter reflection system 20 to be coaxial to ensure the accuracy of calibration. The same height setting of the central axis of each optical element can ensure the consistency and predictability of the optical path, avoid the deflection of the light beam caused by the height difference, thereby improving the stability of the light path and the accuracy of optical measurement. The central axes of the collimation module 13, the transflective prism 12, the beam splitter prism 21 and the plane reflector 22 are located at the same height, which can reduce the system error caused by the asymmetric influence of the optical element on the light beam, ensure that the path and characteristics of the light are minimally changed when passing through each optical element, and improve the accuracy of calibration and detection. When the central axes of the collimating module 13, the transflective prism 12, the beam splitter prism 21 and the plane reflector 22 are kept at the same height, the calibration process can be simplified because no additional adjustment in the height direction is required, which not only saves time but also reduces the complexity and potential error sources of the calibration process.

[0091] In some optional embodiments, such as Figure 1As shown, the light source assembly 11 includes an LED panel 111 and a grating plate 112, wherein the grating plate 112 is located between the LED panel 111 and the transflective prism 12, and the center of the grating plate 112 is located at the same height as the center of the transflective prism 12. Placing the grating plate 112 and the transflective prism 12 at the same height can ensure that the light emitted from the LED panel 111 can enter the transflective prism 12 accurately and without deviation after passing through the grating plate 112. This precise alignment of the optical path helps to improve the imaging quality and reduce scattering or deviation in the optical path, thereby ensuring the accuracy of the calibration process. The light emitted by the LED panel 111 may be unevenly distributed in space. By adjusting the size and shape of the light spot through the grating plate 112, and then ensuring that the grating plate 112 and the transflective prism 12 are located at the same height, the uniformity of the light intensity can be improved and the clarity of the light spot can be improved, which is particularly important for calibration tasks that require high-precision light spots. The reflection and transmission characteristics of the transflective prism 12 require that the light enters at a specific angle and direction to minimize the loss of light in the transflective prism 12. Keeping the graticule 112 and the transflective prism 12 at the same height can optimize the light path, reduce the light loss caused by angle mismatch, and improve the light energy utilization rate of the light source assembly 11. Keeping the graticule 112 and the transflective prism 12 at the same height facilitates direct observation and adjustment of the position and size of the light spot during the debugging and calibration process, making the calibration process more intuitive and convenient.

[0092] In addition, the graticule 112 usually has a specific mark or pattern for calibrating the optical module. Aligning the graticule 112 with the transflective prism 12 can simplify the calibration process, avoid additional optical path adjustment steps, and thus improve calibration efficiency.

[0093] In some optional embodiments, the graticule 112 is a cross graticule. The cross graticule design can intuitively display the alignment of the light beam or image. During the calibration process, the light emitted by the LED panel 111 is a cross-shaped spot after passing through the cross graticule. The cross-shaped spot is imaged at the center of the optical module 60 to be calibrated, and the cross-shaped spot after the target plane in the detection module 50 is reflected and aligned with the cross-shaped spot in the field of view of the image sensor 14, then the calibration state can be intuitively judged, which is conducive to improving the calibration accuracy. The intersection of the cross graticule can be used as a reference for the analysis of the control component. The control component can calculate the relative displacement and angular deviation between the module to be tested and the detection module by identifying the position and direction of the cross line, and provide a quantitative calibration result, which is convenient for further precision control and correction. The cross graticule can not only be used to detect the offset of the parallel calibration light path, but also can detect the rotation deviation through its directionality, supporting multi-degree-of-freedom calibration of relative posture, including the offset in the horizontal X and Y directions, the angular deviation in the pitch Rx and Ry directions, and the rotation deviation in the rotation Rz direction.

[0094] In some optional embodiments, the minimum distance from the grating plate 112 to the transflective prism 12 is the same as the minimum distance from the image sensor 14 to the transflective prism 12. This design ensures that the light beam emitted from the grating plate 112 and the light beam received from the image sensor 14 experience the same optical path length at the transflective prism 12. This symmetry helps to reduce the system error caused by the mismatch of the optical path length and improve the overall accuracy of the calibration device. The same minimum distance is conducive to ensuring the consistency of the incident and exit angles of the light beam at the transflective prism 12, thereby ensuring the stability of the light beam during the detection process. This is particularly important for applications that require high-precision relative posture calibration, such as coaxial calibration of the detection module and the optical module. Keeping the two minimum distances the same means that the grating plate 112 and the image sensor 14 are in symmetrical positions in the optical system. This helps the automatic focusing and collimation system 10 to ensure the clarity of the image on the image sensor 14 and the size of the cross spot according to the reversibility of the light path when transmitting and receiving the cross spot, and helps to ensure the adjustment accuracy in the horizontal X, Y directions, the pitch Rx, Ry directions, and the rotation Rz direction.

[0095] In some optional embodiments, such as Figure 1 As shown, the beam splitter prism 21 includes a first right angle prism 211 and a second right angle prism 212, and the inclined surface of the first right angle prism 211 is arranged to fit with the inclined surface of the second right angle prism 212. When the inclined surfaces of the first right angle prism 211 and the second right angle prism 212 fit together, a stable turning point of the optical path can be formed. A part of the light is reflected on the inclined surface of the first right angle prism 211, and another part of the light passes through the inclined surface of the first right angle prism 211 and enters the second right angle prism, thereby achieving accurate light splitting and guiding of the light beam, and ensuring the accuracy and consistency of the optical path.

[0096] In some optional embodiments, the six surfaces of the beam splitter prism 21 are coated with a high-transmittance film, wherein the transmittance and reflectivity of the beam splitter prism 21 are both 50%. The flatness error of the six surfaces of the beam splitter prism 21 is less than or equal to 1um to avoid errors caused by unevenness of the beam splitter prism 21.

[0097] In some optional embodiments, the optical module calibration method uses the above-mentioned optical module calibration device for calibration, and the optical module calibration method includes steps S10 to S30. Figure 2 .

[0098] Step S10, obtain the optical module calibration device, the optical module 60 to be calibrated and the detection module 50, and arrange the optical module calibration device, the optical module 60 to be calibrated and the detection module 50 at preset positions. The optical module 60 to be calibrated and the detection module 50 are respectively arranged at their preset positions to facilitate subsequent adjustment of the optical path.

[0099] Step S20, adjusting the automatic focusing collimation system 10 of the optical module calibration device to be coaxial with the spectroscopic reflection system 20 of the optical module calibration device. The coaxiality of the optical module calibration device is adjusted to ensure that the automatic focusing collimation system 10 is coaxial with the spectroscopic reflection system 20, so as to facilitate the subsequent calibration of the coaxiality between the optical module 60 to be calibrated and the detection module 50. Step S20 includes steps S21 to S24.

[0100] Step S21 , adjusting the automatic focusing and collimating system 10 so that the automatic focusing and collimating system 10 emits cross-parallel calibration light.

[0101] Step S22 , the coarse adjustment spectroscopic system adjusts the rotation degree (Ry) of the stage 30 around the second direction axis and the rotation degree (Rz) around the third direction axis, so that the parallel calibration light passes through the spectroscopic prism 21 and is incident on the plane reflector 22 .

[0102] Step S23, the image sensor 14 of the automatic focusing and collimating system 10 forms an image of the parallel calibration light reflected by the plane reflector 22. The plane reflector 22 reflects the light, and the light passes through the beam splitter prism 21, the collimating module 13, and the transflective prism 12 in sequence to reach the image sensor 14.

[0103] Step S24, adjust the spectroscopic system to adjust the rotation degree (Ry) of the stage 30 around the second direction axis and the rotation degree (Rz) around the third direction axis, so that the cross spot received by the image sensor 14 is at the center of the field of view of the image sensor 14, and fix the position of the spectroscopic system to adjust the stage 30.

[0104] Step S30 , adjusting the optical module to be calibrated 60 , the detection module 50 and the optical module calibration device to be coaxial.

[0105] In the process of adjusting the coaxiality of the optical module to be calibrated 60, the detection module 50 and the optical module calibration device, the adjustment methods for the optical module to be calibrated with an image source and the calibration optical module without an image source are different. The adjustment methods for the optical module to be calibrated with an image source and the calibration optical module without an image source are introduced below.

[0106] In some optional embodiments, when the optical module 60 to be calibrated does not have an image source, step S30 includes step S31 and step S32. Figures 3 to 6 .

[0107] Step S31, adjust the auto-focus collimation system 10 to emit parallel calibration light, and under the parallel calibration light, adjust the rotation degree of the optical module calibration device and the detection module 50 around the first direction axis and the rotation degree around the second direction axis, so that the light spot is imaged at the center of the field of view of the optical module to be calibrated 60 and the image sensor 14. Step S31 includes steps S311 to S314. Please refer to Figure 2and Figure 5 .

[0108] Step S311, adjust the automatic focusing and collimating system 10 to emit cross-parallel calibration light, wherein the cross-parallel calibration light is incident on the beam splitting reflection system 20, the beam splitting prism 21 of the beam splitting reflection system 20 reflects the first part of the cross-parallel calibration light to the optical module 60 to be calibrated, the beam splitting prism 21 transmits the second part of the cross-parallel calibration light to the plane reflector 22 of the beam splitting reflection system 20, the plane reflector 22 reflects the second part of the cross-parallel calibration light to the beam splitting prism 21, and the beam splitting prism 21 reflects the second part of the cross-parallel calibration light to the detection module 50. This arrangement allows a beam of light emitted from the automatic focusing and collimating system 10 to be divided into two beams of light through the beam splitting prism 21, wherein one beam is used to calibrate the optical module calibration device and the optical module 60 to be calibrated coaxially, and the other beam is used to calibrate the optical module calibration device and the detection module 50.

[0109] Step S312 , adjusting the focus of the optical module 60 to be calibrated, so that the optical module 60 to be calibrated forms an image of the first part of the cross parallel calibration light.

[0110] Step S313: Taking the optical module 60 to be calibrated as a reference, adjusting the adjusting component 42 of the automatic focusing and collimating system 10, changing the rotation degree of the bearing platform 41 in the first direction axis and the rotation degree of the second direction axis, so that the first part of the cross parallel calibration light reflected by the light splitting reflection system 20 is imaged at the center of the field of view of the optical module 60 to be calibrated. When adjusting the optical module 60 to be calibrated to be coaxial with the optical module calibration device, the position of the optical module calibration device is adjusted based on the optical module 60 to be calibrated as a reference.

[0111] Step S314: With the automatic focusing and collimating system 10 as a reference, adjust the rotation degree of the detection module 50 about the first direction axis and the rotation degree of the second direction axis, so that the second part of the cross parallel calibration light reflected by the detection module 50 returns to the automatic focusing and collimating system 10 along the original path, and the second part of the cross parallel calibration light is located at the center of the field of view of the image sensor 14 of the automatic focusing and collimating system 10. Because the positional relationship between the optical module calibration device and the optical module 60 to be calibrated has been adjusted before step S314, when adjusting the positional relationship between the detection module 50 and the optical module calibration device, the position of the detection module 50 is adjusted with the automatic focusing and collimating system 10 as a reference, so as to avoid changing the positional relationship between the optical module calibration device and the optical module 60 to be calibrated.

[0112] Step S32, adjust the automatic focusing and collimation system 10 to emit a limited distance calibration light, and adjust the positions of the optical module 60 to be calibrated, the detection module 50 and the optical module calibration device on the first direction axis, the second direction axis, and the rotation degree around the third direction axis under the limited distance calibration light, so that the optical module 60 to be calibrated, the detection module 50 and the optical module calibration device are coaxial. Step S32 includes steps S321 to S326. Please refer to Figure 4 and Figure 6 .

[0113] Step S321, adjust the automatic focusing collimation system 10 to emit a convergent cross calibration light of a limited distance, wherein the convergent cross calibration light of a limited distance is incident on the spectroscopic reflection system 20, and the spectroscopic prism 21 of the spectroscopic reflection system 20 reflects a part of the convergent cross calibration light of a limited distance to the optical module 60 to be calibrated.

[0114] Step S322 , adjusting the focus of the optical module 60 to be calibrated, so that the optical module 60 to be calibrated forms an image of the convergent cross calibration light of a limited distance.

[0115] Step S323: Taking the optical module 60 to be calibrated as a reference, adjust the adjustment component 42 of the automatic focusing and collimating system 10, change the rotation degree of the carrying platform 41 around the third direction axis and the position on the first direction axis and the second direction axis, so that the convergent cross calibration light of limited distance is imaged at the center of the field of view of the optical module 60 to be calibrated, and the convergent cross calibration light of limited distance is parallel to the first direction axis and the second direction axis relative to the imaging surface of the optical module 60 to be calibrated. When adjusting the optical module 60 to be calibrated to be coaxial with the optical module calibration device, the position of the optical module calibration device is adjusted based on the optical module 60 to be calibrated as a reference.

[0116] Step S324 , turn off the light source of the automatic focusing and collimating system 10 , light up the luminous target of the detection module 50 , and the target light emitted by the luminous target enters the automatic focusing and collimating system 10 through the light splitting and reflecting system 20 .

[0117] Step S325 , adjusting the focal length of the automatic focusing and collimating system 10 so that the automatic focusing and collimating system 10 forms an image of the target light.

[0118] Step S326: With the automatic focusing and collimation system 10 as a reference, adjust the rotation degree of the detection module 50 around the third axis and the position on the first axis and the second axis, and image the light emitted by the detection module 50 at the center of the field of view of the image sensor 14, and the target light is parallel to the first axis and the second axis of the image sensor 14, so that the optical module 60 to be calibrated, the detection module 50 and the optical module calibration device are coaxial. Since the optical module calibration device and the optical module 60 to be calibrated have been adjusted to be coaxial before step S326, when adjusting the detection module 50 to be coaxial with the optical module calibration device, the position of the detection module 50 is adjusted with the automatic focusing and collimation system 10 as a reference, so that the optical module 60 to be calibrated, the detection module 50 and the optical module calibration device are coaxial.

[0119] In some optional embodiments, when the optical module 60 to be calibrated has an image source, step S40 includes step S41 and step S42. Figures 7 to 11 .

[0120] Step S41: Taking the optical module 60 to be calibrated as a reference, adjust the optical module calibration device to be coaxial with the optical module 60 to be calibrated. Step S41 includes steps S411 to S416. Figure 7 , Figure 8 and Fig.10 .

[0121] Step S411 , lighting up the image source of the optical module 60 to be calibrated, and making the light emitted by the image source a cross light.

[0122] Step S412: adjust the automatic focusing and collimating system 10 to focus, and image the cross light emitted by the image source.

[0123] Step S413, taking the optical module 60 to be calibrated as a reference, adjust the adjustment component 42 of the automatic focusing and collimation system 10, change the rotation degree of the supporting platform 41 around the first direction axis, the rotation degree around the second direction axis, and the rotation degree around the third direction axis, so that the cross light is located at the center of the field of view of the image sensor 14 of the automatic focusing and collimation system 10, and the cross light is parallel to the first direction axis and the second direction axis of the image sensor 14.

[0124] Step S414, turn on the light source of the automatic focusing collimation system 10, and adjust the focusing distance of the automatic focusing collimation system 10 to the spherical center position of the first surface of the lens of the optical module to be calibrated 60. The spherical center position refers to the curvature center position of the first surface of the lens. In theory, the optical axis is the line connecting the spherical centers of all lenses, so the automatic collimation system focuses on the spherical center of the lens, and the module to be calibrated and the center of the collimation system can be adjusted to be aligned.

[0125] Step S415 , taking the optical module 60 to be calibrated as a reference, adjusting the adjustment component 42 of the automatic focusing and collimating system 10 , changing the distance between the carrying platform 41 on the first direction axis and the second direction axis, so that the spherical center image is at the center of the field of view of the optical module 60 to be calibrated.

[0126] Step S416, repeating steps S411 to S415 until both step S413 and step S415 are satisfied, and the optical module 60 to be calibrated, the detection module 50 and the optical module calibration device are coaxial.

[0127] Step S42: Using the optical module calibration device as a reference, adjust the detection module 50 to be coaxial with the optical module calibration device. Step S42 includes steps S421 to S426. Fig. 9 and Fig.11 .

[0128] Step S421, adjust the automatic focusing collimation system 10 to emit cross-parallel calibration light, wherein the cross-parallel calibration light is incident on the spectroscopic reflection system 20, the spectroscopic prism 21 transmits the second part of the cross-parallel calibration light to the plane reflector 22 of the spectroscopic reflection system 20, the plane reflector 22 reflects the second part of the cross-parallel calibration light to the spectroscopic prism 21, and the spectroscopic prism 21 reflects the second part of the cross-parallel calibration light to the detection module 50.

[0129] Step S422, adjusting the focus of the detection module 50 so that the detection module 50 images the second part of the cross parallel calibration light.

[0130] Step S423, taking the automatic focusing and collimation system 10 as a reference, adjust the rotation degree of the detection module 50 in the first direction axis and the rotation degree of the second direction axis, so that the second part of the cross parallel calibration light reflected by the detection module 50 returns to the automatic focusing and collimation system 10 along the original path, and the second part of the cross parallel calibration light is located at the center of the field of view of the image sensor 14 of the automatic focusing and collimation system 10.

[0131] Step S424, adjust the automatic focusing collimation system 10 to emit a convergent cross calibration light of a limited distance, wherein the convergent cross calibration light of a limited distance is incident on the spectroscopic reflection system 20, the spectroscopic prism 21 of the spectroscopic reflection system 20 transmits a portion of the convergent cross calibration light of a limited distance to the plane reflector 22, the plane reflector 22 reflects the convergent cross calibration light of a limited distance to the spectroscopic prism 21, and the spectroscopic prism 21 reflects the convergent cross calibration light of a limited distance to the detection module 50.

[0132] Step S425 , adjusting the focus of the detection module 50 so that the detection module 50 images the convergent cross calibration light of a limited distance.

[0133] Step S426, based on the automatic focusing and collimation system 10, adjust the rotation degree of the detection module 50 around the third direction axis and the position on the first direction axis and the second direction axis, so that the limited distance converging cross calibration light is imaged at the center of the field of view of the detection module 50, and the cross light is parallel to the first direction axis and the second direction axis of the detection module 50.

[0134] Completing the above process means completing the calibration of the relative posture of the optical module 60 to be calibrated and the detection module 50. The optical module calibration device can be used in multiple scenes and multiple detection modules 50 after one calibration in the design, processing and installation stages. The optical module calibration device can achieve quantitative characterization of the installation results through software control and algorithm analysis, and can be used for the installation and control of the detection module 50, and can also assist in the actual detection process and the evaluation and analysis of the detection results.

[0135] In some optional embodiments, when the optical module 60 to be calibrated has an image source and the image source can emit parallel light, the following steps may be included:

[0136] Taking the optical module 60 to be calibrated as a reference, the detection module 50 is adjusted to be coaxial with the optical module 60 to be calibrated.

[0137] Taking the optical module 60 to be calibrated as a reference, the optical module calibration device is adjusted to be coaxial with the optical module 60 to be calibrated.

[0138] Obviously, the above-described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0139] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.

[0140] It should be noted that the terms "first", "second", etc. in the specification and claims of the present application and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the numbers used in this way can be interchanged where appropriate, so that the embodiments of the present application described herein can be implemented in an order other than those illustrated or described herein.

[0141] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. An optical module calibration device, characterized in that: The optical module calibration device is used to calibrate the detection module (50) to be coaxial with the optical module (60) to be calibrated, and the optical module calibration device comprises: Automatic focusing and collimation system (10); A light splitting reflection system (20), the light splitting reflection system (20) being located on the light output side of the automatic focusing and collimating system (10); A light splitting system adjustment platform (30), the light splitting reflection system (20) being arranged on the light splitting system adjustment platform (30), the light splitting system adjustment platform (30) having a first light through hole (31), and the light splitting system adjustment platform (30) being used to adjust the rotation degree of the light splitting reflection system (20) around the second direction axis and the rotation degree around the third direction axis; An instrument adjustment platform (40), the instrument adjustment platform (40) comprising a carrying platform (41) and an adjustment component (42), the automatic focusing collimation system (10) and the spectroscopic system adjustment platform (30) are arranged on the carrying platform (41) at intervals, the carrying platform (41) has a second light hole (421) arranged coaxially with the first light hole (31), and the adjustment component (42) is used to adjust the carrying platform (41) in a first direction axis, a second direction axis, and the degree of rotation around the first direction axis, the degree of rotation around the second direction axis, and the degree of rotation around a third direction axis; wherein the first direction axis, the second direction axis and the third direction axis are perpendicular to each other.

2. The optical module calibration device according to claim 1, characterized in that: The light splitting reflection system (20) comprises: a beam splitter prism (21), wherein the orthographic projection of the beam splitter prism (21) on the beam splitter system adjustment stage (30) overlaps with the first light hole (31), the beam splitter prism (21) is used to reflect a first portion of calibration light emitted by the automatic focusing and collimating system (10) to the optical module (60) to be calibrated, the first portion of calibration light being used to calibrate the coaxiality between the optical module calibration device and the optical module (60) to be calibrated, and the beam splitter prism (21) is used to transmit a second portion of calibration light emitted by the automatic focusing and collimating system (10), the central wavelengths of the first portion of calibration light and the second portion of calibration light being different; A plane reflector (22), the plane reflector (22) being located on a side of the beam splitter prism (21) away from the automatic focusing collimation system (10), the beam splitter prism (21) being used to reflect the second portion of calibration light, the second portion of calibration light reflected by the plane reflector (22) being used to calibrate the coaxiality between the optical module calibration device and the detection module (50).

3. The optical module calibration device according to claim 2, characterized in that: The automatic focusing and collimating system (10) comprises: A light source assembly (11), the light source assembly (11) being used to emit calibration light; a transflective prism (12), the transflective prism (12) being located on the light-emitting side of the light source assembly (11); a collimation module (13), the collimation module (13) being located on the light-emitting side of the transflective prism (12); the calibration light being emitted from the transflective prism (12) enters the collimation module (13) and is collimated by the collimation module (13); the calibration light being collimated by the collimation module (13) is incident on the light-splitting reflection system (20); An image sensor (14), the image sensor (14) being located on the reflective side of the transflective prism (12), the image sensor (14) being used to receive the second portion of calibration light reflected by the plane reflector (22), wherein the second portion of calibration light reflected by the plane reflector (22) sequentially passes through the collimating module (13) and the transflective prism (12) to reach the image sensor (14).

4. The optical module calibration device according to claim 3, characterized in that: The central axis of the collimating module (13), the central axis of the transflective prism (12), the central axis of the beam splitter prism (21) and the central axis of the plane reflector (22) are located at the same height.

5. The optical module calibration device according to claim 3, characterized in that: The light source assembly (11) comprises: LED panel (111); A graticule (112), wherein the graticule (112) is located between the LED panel (111) and the transflective prism (12), and the center of the graticule (112) and the center of the transflective prism (12) are located at the same height.

6. The optical module calibration device according to claim 5, characterized in that: The minimum distance from the graticule (112) to the transflective prism (12) is the same as the minimum distance from the image sensor (14) to the transflective prism (12).

7. The optical module calibration device according to claim 5, characterized in that: The graticule (112) is a cross graticule.

8. The optical module calibration device according to any one of claims 2 to 7, characterized in that: The beam splitter prism (21) comprises a first right-angle prism (211) and a second right-angle prism (212), wherein the inclined surface of the first right-angle prism (211) and the inclined surface of the second right-angle prism (212) are arranged in close contact with each other.

9. An optical module calibration method, characterized in that: The optical module calibration method is calibrated using the optical module calibration device according to any one of claims 1 to 8, and the optical module calibration method comprises: Acquire an optical module calibration device, an optical module to be calibrated (60), and a detection module (50), and arrange the optical module calibration device, the optical module to be calibrated (60), and the detection module (50) at preset positions; Adjusting the automatic focusing collimation system (10) of the optical module calibration device to be coaxial with the light splitting reflection system (20) of the optical module calibration device; The optical module to be calibrated (60), the detection module (50) and the optical module calibration device are adjusted to be coaxial.

10. The optical module calibration method according to claim 9, characterized in that: The step of adjusting the optical module to be calibrated (60), the detection module (50) and the optical module calibration device to be coaxial comprises: The automatic focusing and collimating system (10) is adjusted to emit parallel calibration light, and under the parallel calibration light, the rotation degree of the optical module calibration device and the detection module (50) around the first direction axis and the rotation degree around the second direction axis are adjusted so that the light spot is imaged at the center of the field of view of the optical module (60) to be calibrated and the image sensor (14) of the automatic focusing and collimating system (10); The automatic focusing and collimating system (10) is adjusted to emit limited-distance calibration light, and under the limited-distance calibration light, the positions of the optical module (60) to be calibrated, the detection module (50) and the optical module calibration device on the first direction axis and the second direction axis, and the degree of rotation around the third direction axis are adjusted, so that the optical module (60) to be calibrated, the detection module (50) and the optical module calibration device are coaxial.

Images