Gas path inner surface detection device and gallium nitride production system

Abstract

The invention relates to the technical field of gas path detection, in particular to a gas path inner surface detection device and a gallium nitride production system. In the detection device, a first visual module is used for acquiring global image data of the inner surface of a gas path in front of the gas path inner surface detection device. And the control end is used for determining the flaw position according to the global image data, and is used for controlling the adjusting mechanism to enable the cover body to be attached to the inner surface of the gas path so as to enable the cover body to cover the flaw position. And the second visual module is used for acquiring close-range image data of the flaw position. The compression mechanism is used for compressing air in the cover body, and the air pressure detection module is used for detecting air pressure in the cover body. The control end is also used for determining the flaw volume of the flaw position according to the compression ratio of the compression mechanism and the air pressure in the compressed cover body. The gas conveying quality risk can be subjected to preventive evaluation, and the adverse effect of the gas path problem on the gas conveying quality can be reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of gas path detection, and in particular to a gas path inner surface detection device and a gallium nitride production system. Background Art

[0002] In gas transportation, the integrity of the inner surface of the gas path is very important and directly related to the quality of gas transportation. Although existing detection methods can help determine whether the gas path is damaged, such as cracks, defects, etc., when cracks, defects, etc. are detected, the gas previously transported has already been affected. At present, there is a lack of preventive detection methods in gas transportation.

[0003] In view of this, this application is hereby filed. Summary of the invention

[0004] The first object of the present invention is to provide a gas path inner surface detection device, which can perform preventive assessment of the quality risk of gas delivery and help reduce the adverse effects of gas path problems on gas delivery quality.

[0005] The second object of the present invention is to provide a gallium nitride production system, which can perform preventive assessment of the quality risk of raw gas transportation during the production process, reduce the adverse effects of the transportation process on the purity of the raw gas, and help ensure high-quality production of gallium nitride.

[0006] The embodiment of the present invention is achieved as follows: A gas path inner surface detection device comprises: a frame, a first visual module, an adjustment mechanism, a cover body, a compression mechanism, a second visual module, an air pressure detection module and a control terminal.

[0007] The frame has a traveling mechanism. The first visual module is installed on the frame to obtain global image data of the inner surface of the gas path in front of the gas path inner surface detection device.

[0008] The adjusting mechanism is arranged on the frame, the cover body is installed on the adjusting mechanism, and the compression mechanism, the second visual module and the air pressure detection module are all arranged inside the cover body.

[0009] The control end is used to determine the defect position according to the global image data, and to control the adjustment mechanism to make the cover body fit the inner surface of the gas path so that the cover body covers the defect position. The second visual module is used to obtain close-range image data of the defect position. The compression mechanism is used to compress the gas in the cover body, and the air pressure detection module is used to detect the air pressure in the cover body.

[0010] The control end is also used to determine the defect volume at the defect position according to the compression ratio of the compression mechanism and the air pressure in the cover body after compression.

[0011] Furthermore, the frame includes a front frame body and a rear frame body. The front frame body has a first reference rod extending toward the rear frame body on one side close to the rear frame body, and the rear frame body has a second reference rod extending toward the front frame body on one side close to the front frame body. The first reference rod and the second reference rod are coaxially spaced.

[0012] The adjusting mechanism comprises: a rotating member, an adjusting rod, a first driver and a second driver.

[0013] The rotating member is arranged between the first reference rod and the second reference rod, and the first reference rod and the second reference rod are both rotationally matched with the rotating member. Along the axial direction of the first reference rod, the first reference rod and the second reference rod are both fixedly matched with the rotating member.

[0014] The adjusting rod is arranged perpendicular to the first reference rod and penetrates the rotating member, and the adjusting rod is slidably matched with the rotating member.

[0015] The first driver is arranged on the first reference rod or the second reference rod to drive the rotating member. The second driver is arranged on the rotating member to drive the adjusting rod to slide. The cover is arranged on the end of the adjusting rod.

[0016] Furthermore, the traveling mechanism includes: walking wheels, a first transmission shaft, a second transmission shaft and a power mechanism.

[0017] Both the front frame and the rear frame are provided with running wheels, and the power mechanism is arranged on the rear frame.

[0018] The first reference rod and the second reference rod are both tubular. The first transmission shaft is rotatably accommodated in the first reference rod, and the second transmission shaft is rotatably accommodated in the second reference rod. The first transmission shaft is in transmission cooperation with the walking wheel of the front frame body, and the second transmission shaft is in transmission cooperation with the power mechanism.

[0019] A first blind hole is provided on one end surface of the first transmission shaft close to the second transmission shaft, the first blind hole is eccentrically arranged on the first transmission shaft, and a first magnetic part is slidably fitted in the first blind hole. A second blind hole is provided on one end surface of the second transmission shaft close to the first transmission shaft, the second blind hole is eccentrically arranged on the second transmission shaft, and a second magnetic part is slidably fitted in the second blind hole.

[0020] The rotating member is provided with a clearance through hole, which extends along the axial direction of the first reference rod and penetrates the rotating member.

[0021] A rotating core is rotatably matched in the yielding through hole, and the rotating core has a first inner cavity. A first opening for connecting the outside with the first inner cavity is opened on the side of the rotating core close to the first transmission shaft, and a second opening for connecting the outside with the first inner cavity is opened on the side of the rotating core close to the second transmission shaft.

[0022] A third magnetic member is disposed in the first inner cavity. The third magnetic member is rotatably fitted in the rotating core along the circumferential direction of the rotating core, and the third magnetic member has an N-pole magnetic region and an S-pole magnetic region. The third magnetic member is driven by a third driver.

[0023] The third magnetic member has a first working position and a second working position. When the third magnetic member is in the first working position, the first opening and the second opening correspond to any one of the N-pole magnetic region and the S-pole magnetic region respectively, the first magnetic member is attracted by the magnetic force of the third magnetic member and extends into the first opening, and the second magnetic member is attracted by the magnetic force of the third magnetic member and extends into the second opening, so that the first transmission shaft and the second transmission shaft are in transmission cooperation.

[0024] When the third magnetic member is in the second working position, the first opening and the second opening respectively correspond to the other of the N-pole magnetic region and the S-pole magnetic region, the first magnetic member is repelled by the magnetic force of the third magnetic member and withdraws from the first opening, and the second magnetic member is repelled by the magnetic force of the third magnetic member and withdraws from the second opening, so that the power between the first transmission shaft and the second transmission shaft is disconnected.

[0025] When the gas path inner surface detection device is moving, the control end controls the third magnetic member to be in the first working position. When the defect volume of the defect position needs to be detected, the control end controls the third magnetic member to be in the second working position.

[0026] Furthermore, the through hole, the rotating core and the first reference rod are coaxially arranged.

[0027] The rotating member has a matching groove on one side close to the first reference rod and a matching groove on the other side, and a through hole is provided at the bottom of the matching groove to connect the matching grooves on both sides. The first reference rod and the second reference rod extend into the matching grooves on both sides of the rotating member respectively and rotate to match the matching grooves.

[0028] The adjusting rod is arranged along the radial direction of the first reference rod, passes through the clearance hole, is provided with a connecting hole extending along the axial direction of the clearance hole, and the rotating core is rotatably matched in the connecting hole.

[0029] The adjusting rod has a first sliding stop point and a second sliding stop point. When the adjusting rod is located at the first sliding stop point, the communicating hole and the giving way hole are coaxially arranged, and the cover body is separated from the inner surface of the gas path. When the adjusting rod is located at the second sliding stop point, the communicating hole and the giving way hole are staggered, and the cover body is arranged on the inner surface of the gas path.

[0030] Furthermore, a hole wall of the communicating hole is provided with a clearance groove, which continuously extends in a ring shape along the circumference of the clearance groove. The adjusting rod also has a second inner cavity, which is communicated with the clearance groove.

[0031] The rotating core has an outer gear ring, and the outer gear ring is located in the clearance groove.

[0032] A rotating ring is arranged in the second inner cavity. The rotating ring also has an outer gear ring and is meshed with the rotating core.

[0033] The rotating ring is provided with a radial through hole, a hole wall of the radial through hole is provided with a groove, and the groove continuously extends in a ring shape along the circumference of the radial through hole.

[0034] A limiting column is slidably fitted in the radial through hole, and the limiting column has a flange that slidably fits in the groove. An elastic member is abutted between the side of the flange away from the inner ring wall of the rotating ring and the side of the groove away from the inner ring wall of the rotating ring, so that the end of the limiting column extends into the interior of the rotating ring.

[0035] A coil spring is also arranged in the second inner cavity, and the coil spring is located inside the rotating ring.

[0036] The end of the limiting column close to the coil spring is wedge-shaped, and the free end of the coil spring abuts against the wedge-shaped surface of the limiting column.

[0037] When the first transmission shaft drives the second transmission shaft through the rotating core, the limiting column overcomes the elastic force of the coil spring to push the free end of the coil spring.

[0038] Among them, the relationship between the coil spring and the elastic member is: when the limiting column pushes the free end of the coil spring to move at least two circles, the free end of the coil spring can overcome the elastic force of the elastic member to push the limiting column toward the outside of the rotating ring, so that the free end of the coil spring passes over the wedge surface of the limiting column.

[0039] The rotating ring is also equipped with a ratchet mechanism so that the rotating ring can only rotate in the direction driven by the rotating core.

[0040] A separation mechanism for separating the ratchet and the pawl of the ratchet mechanism is also provided in the second inner cavity.

[0041] A gallium nitride production system comprises: a gallium nitride production reactor, a first gas pipeline, a second gas pipeline and the above-mentioned gas line inner surface detection device.

[0042] The first gas pipeline and the second gas pipeline are used to alternately transport raw material gas to the gallium nitride production reactor.

[0043] The gas line inner surface detection device is used to detect the inner surface condition of the idle one of the first gas pipeline and the second gas pipeline.

[0044] The beneficial effects of the technical solution of the embodiment of the present invention include: The gas path inner surface detection device provided in the embodiment of the present invention can effectively troubleshoot problems on the gas path inner surface, especially can screen defective parts that are in the early stage of damage (for example: early stage of corrosion), can warn of future risks of gas transmission, and play a preventive role.

[0045] In general, the gas path inner surface detection device provided in the embodiment of the present invention can perform preventive assessment of the quality risk of gas delivery, which helps to reduce the adverse effects of gas path problems on the quality of gas delivery.

[0046] The gallium nitride production system provided by the embodiment of the present invention can perform preventive assessment on the transportation quality risk of raw material gas during the production process, which can reduce the adverse effects of the transportation process on the purity of the raw material gas, and is conducive to ensuring the high-quality production of gallium nitride. BRIEF DESCRIPTION OF THE DRAWINGS

[0047] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments are briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without creative work.

[0048] Figure 1 A schematic diagram of the coordination of the gas path inner surface detection device provided by an embodiment of the present invention in the gas path; Figure 2 A schematic diagram of the matching of the cover body of the gas path inner surface detection device provided by an embodiment of the present invention; Figure 3 is a schematic diagram of the end surface structure of the first transmission shaft; Figure 4 is a schematic diagram of the end surface structure of the second transmission shaft; Figure 5 It is a schematic diagram of the end surface structure of the rotating core; Figure 6 A schematic diagram of the internal structure of the rotating core from an end view; Figure 7 A schematic diagram of the internal structure of the rotating core from a side view; Figure 8 Schematic diagram of the cooperation between the first reference rod, the rotating member and the second reference rod (when the third magnetic member is located at the first working position); Fig. 9 Schematic diagram of the cooperation between the first reference rod, the rotating member and the second reference rod (when the third magnetic member is located at the second working position); Fig.10 It is a schematic diagram of the end surface structure of the rotating part; Fig.11 It is a schematic diagram of the internal structure of the rotating part; Fig.12 Schematic diagram of the internal structure of the adjusting rod; Fig.13 Schematic diagram of the coordination of the rotating ring.

[0049] Description of reference numerals: Frame 100; front frame body 110; first reference rod 111; rear frame body 120; second reference rod 121; walking wheel 210; first transmission shaft 220; first blind hole 221; first magnetic member 222; second transmission shaft 230; second blind hole 231; second magnetic member 232; first visual module 300; adjustment mechanism 400; rotating member 410; clearance hole 411; matching groove 412; adjustment rod 420; connecting hole 421; clearance groove 422; second inner cavity 423; rotating ring 424; limiting column 425; elastic member 426; coil spring 427; cover body 500; compression mechanism 600; rotating core 700; first inner cavity 710; first opening 720; second opening 730; third magnetic member 740. DETAILED DESCRIPTION

[0050] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings here can be arranged and designed in various different configurations.

[0051] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention claimed for protection, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0052] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0053] The terms “first”, “second”, “third”, etc. are only used for distinguishing descriptions and should not be understood as indicating or implying relative importance.

[0054] In addition, the terms "parallel", "vertical", etc. do not mean that the components must be absolutely parallel or vertical, but can be slightly tilted. For example, "parallel" only means that its direction is more parallel than "vertical", and does not mean that the structure must be completely parallel, but can be slightly tilted.

[0055] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "setting", "installation" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be a communication between the two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0056] The inventor of this application has found that during the gas delivery process, although the existing detection methods can help detect damage to the gas path, such as defects (depressions) on the inner surface, when defects (depressions) appear, it means that the pipe materials originally existing at the defect (depression) position may have been carried away by the delivered gas, or have reacted with the delivered gas. These will directly affect the quality of the previously delivered gas, and the detection of defects (depressions) on the inner surface has a lag relative to the impact on gas quality, which is not conducive to preventive control of gas delivery quality.

[0057] In order to overcome the shortcomings of the prior art, please refer to Figure 1 and Figure 2 This embodiment provides a gas path inner surface detection device. The gas path inner surface detection device includes: a frame 100, a first visual module 300, an adjustment mechanism 400, a cover body 500, a compression mechanism 600, a second visual module (not shown in the figure), an air pressure detection module (not shown in the figure) and a control end (not shown in the figure).

[0058] The gas path inner surface detection device is used to detect the inner surface of the gas path. During the detection, the gas path inner surface detection device is placed inside the gas path. It should be noted that the gas path in the present application includes but is not limited to a gas pipeline.

[0059] The frame 100 has a traveling mechanism, and the traveling mechanism is used to drive the entire gas path inner surface detection device to move along the gas path to achieve complete detection of the gas path inner surface. Optionally, the traveling mechanism includes running wheels 210, and the bottom and top of the frame 100 are provided with running wheels 210, and the running wheels 210 are in contact with the inner surface of the gas path, so that the entire gas path inner surface detection device can move smoothly along the gas path. In addition, running wheels 210 can also be set on both sides of the frame 100, which can further improve the stability during the travel process, and is not limited to this. Specifically, the number and location of the running wheels 210 can be flexibly set according to actual needs, and this application does not make specific restrictions, as long as the gas path inner surface detection device can remain stable during the process of traveling along the gas path.

[0060] The first visual module 300 is installed on the frame 100 to obtain global image data of the inner surface of the gas path in front of the gas path inner surface detection device. During the movement of the gas path inner surface detection device, the first visual module 300 can continuously collect image data of the inner surface of the gas path in front of the gas path inner surface detection device, thereby forming global image data of the inner surface of the gas path.

[0061] The adjustment mechanism 400 is disposed on the frame 100, the cover 500 is installed on the adjustment mechanism 400, and the compression mechanism 600, the second visual module and the air pressure detection module are all disposed in the cover 500. It can be understood that the first visual module 300 and the second visual module both include a lens, a light source and other necessary components, which will not be described in detail in this application.

[0062] The control end is used to perform image analysis based on the global image data to determine the defect location. Among them, the image of the inner surface of a brand new or qualified gas path can be used as a standard image. During the detection process, the global image data is compared with the standard image to determine the defect location.

[0063] It should be noted that image comparison can not only detect defective parts, but also detect possible subsequent defective parts. For example, although the structural integrity of a certain area is consistent with the standard image, the color of the area has changed (including but not limited to the appearance of corrosion spots and corrosion lines in the early stages of corrosion). By identifying the location that is different from the standard image as the defect location, the risk of gas transportation and contamination can be effectively analyzed in advance. If the identified defective location does have subsequent risks, such as initial signs of corrosion, the gas line will need to be maintained accordingly.

[0064] In actual detection, in order to accurately compare with the standard image, when using the first visual module 300 to obtain the image of the inner surface of the gas path in front of the gas path inner surface detection device, it is necessary to simultaneously obtain the image of the entire circumference within a certain axial range, that is, to simultaneously obtain the image of the annular area of ​​a certain length in front of the gas path inner surface detection device. In addition, during the detection process, the images of the annular area can be collected while these images are synchronously compared with the standard image to improve the detection efficiency.

[0065] In order to more accurately determine the actual situation of the defect position, after finding the defect position through image comparison, the control end is also used to control the adjustment mechanism 400 to fit the cover body 500 to the inner surface of the air path so that the cover body 500 covers the defect position and makes the cover body 500 fully fit the inner surface of the air path.

[0066] Since the second vision module is arranged in the cover body 500, when the cover body 500 is covered on the defect position, the light source of the second vision module can better illuminate the defect position, thereby facilitating the second vision module to collect close-range image data that is closer to the real appearance of the defect position, so as to serve as a basis for reviewing the actual condition of the defect position.

[0067] The compression mechanism 600 is used to compress the gas in the cover body 500 , and the air pressure detection module is used to detect the air pressure in the cover body 500 .

[0068] The control end is also used to determine the defect volume at the defect position according to the compression ratio of the compression mechanism 600 and the air pressure in the cover body 500 after compression.

[0069] Among them, we take the state when the cover body 500 is covered at the corresponding position of the inner surface of the qualified gas path as the standard state. Under the standard state, the air pressure inside the cover body 500 detected after the compression mechanism 600 compresses the gas in the cover body 500 is used as the standard reference air pressure.

[0070] During actual testing, after the cover body 500 is placed on the defective position, the compression mechanism 600 is used to compress the gas in the cover body 500 at the same compression ratio. If it is determined from the image that the defective position has only changed in color and the structural integrity is temporarily qualified (that is, the structure is temporarily intact), and the compressed air pressure is the same as the standard reference air pressure, then it means that the structural integrity of the defective position is indeed qualified, and this position is very likely just in the early stage of damage. This requires relevant technical personnel to further judge the necessity of maintenance of this defective position based on the image data.

[0071] If it is determined from the image that there is a defect (depression) at the defect location, and the compressed air pressure is less than the standard reference air pressure, it means that there is indeed a defect (depression) at the defect location. At this time, the size of the depression can be calculated based on the difference between the compressed air pressure and the standard reference air pressure, thereby helping to determine the degree of damage.

[0072] If it is determined from the image that there is a bulge at the defect location, and the compressed air pressure is greater than the standard reference air pressure, it means that there is indeed a bulge at the defect location. At this time, the size of the bulge can be calculated based on the difference between the compressed air pressure and the standard reference air pressure, thereby helping to determine the degree of damage.

[0073] This design can effectively troubleshoot problems on the inner surface of the gas path, especially screen defective areas that are in the early stages of damage (for example, early stages of corrosion), and provide early warnings for future risks in gas transportation, thus playing a preventive role.

[0074] In general, the gas path inner surface detection device provided in this embodiment can perform preventive assessment of the quality risks of gas delivery, which helps to reduce the adverse effects of gas path problems on the quality of gas delivery.

[0075] In this embodiment, the frame 100 includes a front frame body 110 and a rear frame body 120. The front frame body 110 has a first reference rod 111 extending toward the rear frame body 120 on one side thereof close to the rear frame body 120, and the rear frame body 120 has a second reference rod 121 extending toward the front frame body 110 on one side thereof close to the front frame body 110. The first reference rod 111 and the second reference rod 121 are coaxially spaced.

[0076] The adjustment mechanism 400 includes: a rotating member 410, an adjustment rod 420, a first driver (not shown in the figure) and a second driver (not shown in the figure).

[0077] The rotating member 410 is disposed between the first reference rod 111 and the second reference rod 121. The first reference rod 111 and the second reference rod 121 are both rotationally matched with the rotating member 410 along the circumferential direction of the first reference rod 111 and the second reference rod 121. The first reference rod 111 and the second reference rod 121 are both fixedly matched with the rotating member 410 along the axial direction of the first reference rod 111.

[0078] The adjusting rod 420 is disposed perpendicular to the first reference rod 111 and passes through the rotating member 410 . Along the length direction of the adjusting rod 420 , the adjusting rod 420 is slidably matched with the rotating member 410 .

[0079] The first driver is disposed on the first reference rod 111 or the second reference rod 121 to drive the rotating member 410 to rotate relative to the first reference rod 111 and the second reference rod 121. The second driver is disposed on the rotating member 410 to drive the adjusting rod 420 to slide relative to the rotating member 410. The cover 500 is disposed at the end of the adjusting rod 420.

[0080] The first driver and the second driver are both controlled by the control end.

[0081] With this design, the first driver can drive the rotating member 410 to rotate, thereby adjusting the orientation of the cover body 500. The second driver drives the adjusting rod 420, thereby controlling the cover body 500 to fit and separate from the inner surface of the gas path. With the cooperation of the first driver and the second driver, the position of the cover body 500 can be flexibly changed, so that the cover is set at different defect positions.

[0082] Specifically, during the detection process, based on the image obtained by the first vision module 300 and combined with the optical parameters of the first vision module 300, the relative position relationship between the corresponding defect position and the gas path inner surface detection device can be determined. In this way, by controlling the travel distance of the gas path inner surface detection device and driving the rotating part 410, the cover body 500 can be smoothly aligned with the defect position that needs to be covered. Finally, the second driver can be used to smoothly cover and release the defect position.

[0083] Further, please combine Figure 3-Figure 11 The traveling mechanism includes: a walking wheel 210, a first transmission shaft 220, a second transmission shaft 230 and a power mechanism (not shown in the figure).

[0084] Both the front frame 110 and the rear frame 120 are provided with running wheels 210 , and the power mechanism is provided at the rear frame 120 .

[0085] In this embodiment, the gas path to be detected can be a circular pipe. During the detection process, when the gas path inner surface detection device moves along the gas path, the running wheels 210 at the top, bottom and both sides of the gas path inner surface detection device are in contact with the inner surface of the gas path to ensure that the gas path inner surface detection device remains stable during the movement. In this state, the first reference rod 111 and the second reference rod 121 are both coaxially arranged with the gas path.

[0086] Specifically, the first reference rod 111 and the second reference rod 121 are both tubular. The outer diameter of the first transmission shaft 220 is matched with the inner diameter of the first reference rod 111, and the outer diameter of the second transmission shaft 230 is matched with the inner diameter of the second reference rod 121. The first transmission shaft 220 is rotatably accommodated in the first reference rod 111, and the second transmission shaft 230 is rotatably accommodated in the second reference rod 121. The first transmission shaft 220 is coaxially arranged with the first reference rod 111, and the second transmission shaft 230 is coaxially arranged with the second reference rod 121.

[0087] The first transmission shaft 220 is in transmission cooperation with the walking wheel 210 of the front frame body 110 , and the second transmission shaft 230 is in transmission cooperation with the power mechanism.

[0088] A first blind hole 221 is formed on one end surface of the first transmission shaft 220 close to the second transmission shaft 230 . The first blind hole 221 is axially arranged on the first transmission shaft 220 . The first blind hole 221 is eccentrically arranged on the first transmission shaft 220 . A first magnetic member 222 is slidably fitted in the first blind hole 221 .

[0089] A second blind hole 231 is formed on one end surface of the second transmission shaft 230 close to the first transmission shaft 220 . The second blind hole 231 is axially arranged on the second transmission shaft 230 . The second blind hole 231 is eccentrically arranged on the second transmission shaft 230 . A second magnetic member 232 is slidably fitted in the second blind hole 231 .

[0090] In this embodiment, the first transmission shaft 220 has two opposite edges on both sides of the end surface, and the second transmission shaft 230 has two opposite edges on both sides of the end surface, and the first magnetic member 221 and the second magnetic member 232 are provided. The first magnetic member 222 and the second magnetic member 232 are both cylindrical.

[0091] The rotating member 410 is provided with a clearance hole 411 . The clearance hole 411 extends along the axial direction of the first reference rod 111 and penetrates the rotating member 410 . The clearance hole 411 is coaxially arranged with the first reference rod 111 .

[0092] A rotating core 700 is rotatably fitted in the clearance through hole 411 . Specifically, the rotating core 700 is cylindrical and is coaxially arranged with the clearance through hole 411 . The rotating core 700 has a first inner cavity 710 , and the first inner cavity 710 extends along the axial direction of the rotating core 700 .

[0093] A first opening 720 is provided on one side of the rotating core 700 close to the first transmission shaft 220 to connect the outside with the first inner cavity 710 . The inner diameter of the first opening 720 matches the outer diameter of the first magnetic member 222 . The position of the first opening 720 corresponds to the first magnetic member 222 .

[0094] A second opening 730 is provided on one side of the rotating core 700 close to the second transmission shaft 230 to connect the outside with the first inner cavity 710 . The inner diameter of the second opening 730 matches the outer diameter of the second magnetic member 232 . The position of the second opening 730 corresponds to the second magnetic member 232 .

[0095] The first inner cavity 710 is provided with a third magnetic member 740. The third magnetic member 740 is rotatably fitted in the rotating core 700 along the circumference of the rotating core 700, and the third magnetic member 740 has an N-pole magnetic region and an S-pole magnetic region. The third magnetic member 740 is driven by a third driver.

[0096] Optionally, the third magnetic member 740 is annular, and is coaxially disposed with the rotating core 700 and rotatably engaged with the rotating core 700. Along the circumference of the third magnetic member 740, the third magnetic member 740 has N-pole magnetic regions and S-pole magnetic regions alternately disposed in sequence.

[0097] In this embodiment, a third magnetic member 740 is disposed at one end of the first inner cavity 710 close to the first opening 720 and one end of the first inner cavity 710 close to the second opening 730 .

[0098] The third magnetic member 740 has a first working position and a second working position.

[0099] When the third magnetic member 740 is in the first working position, the first opening 720 and the second opening 730 correspond to any one of the N-pole magnetic region and the S-pole magnetic region, respectively. For example, it is assumed that the first opening 720 and the second opening 730 are both facing the N-pole magnetic region of the third magnetic member 740. In this state, the first magnetic member 222 (the corresponding end of the first magnetic member 222 facing the first opening 720 is the S-pole) is attracted by the magnetic force of the third magnetic member 740 and extends into the first opening 720, and the second magnetic member 232 (the corresponding end of the second magnetic member 232 facing the second opening 730 is the S-pole) is attracted by the magnetic force of the third magnetic member 740 and extends into the second opening 730. At this time, if the first transmission shaft 220 rotates, the rotating core 700 can be driven by the first magnetic member 222, and the rotating core 700 can rotate the second transmission shaft 230 by driving the second magnetic member 232, thereby realizing the transmission cooperation between the first transmission shaft 220 and the second transmission shaft 230.

[0100] When the third magnetic member 740 is in the second working position, the first opening 720 and the second opening 730 correspond to the other of the N-pole magnetic region and the S-pole magnetic region, respectively. Exemplarily, at this time, the first opening 720 and the second opening 730 are both facing the S-pole magnetic region of the third magnetic member 740. The first magnetic member 222 (the end of the first magnetic member 222 facing the first opening 720 is the S-pole) is repelled by the magnetic force of the third magnetic member 740 and withdraws from the first opening 720, and the second magnetic member 232 (the end of the second magnetic member 232 facing the second opening 730 is the S-pole) is repelled by the magnetic force of the third magnetic member 740 and withdraws from the second opening 730, so that the power between the first transmission shaft 220 and the second transmission shaft 230 is disconnected, and the first transmission shaft 220 cannot continue to drive the second transmission shaft 230.

[0101] The switching of the third magnetic member 740 between the first working position and the second working position is achieved by the third driver driving the third magnetic member 740 to rotate. The third magnetic member 740 is controlled by the control end.

[0102] When the gas path inner surface detection device is moving, the control end controls the third magnetic member 740 to be in the first working position. When the defect volume of the defect position needs to be detected, the control end controls the third magnetic member 740 to be in the second working position to ensure that the gas path inner surface detection device does not move when the defect position is verified by the cover body 500, and to prevent the cover body 500 from scratching the gas path inner surface due to accidental movement of the gas path inner surface detection device.

[0103] In this embodiment, the rotating member 410 is provided with a matching groove 412 on one side close to the first reference rod 111 and on one side close to the second reference rod 121, and the through hole 411 is provided at the bottom of the matching groove 412 to connect the matching grooves 412 on both sides. The first reference rod 111 and the second reference rod 121 extend into the matching grooves 412 on both sides of the rotating member 410 respectively and are rotatably matched with the matching grooves 412.

[0104] The adjusting rod 420 is arranged along the radial direction of the first reference rod 111, and passes through the clearance hole 411. The adjusting rod 420 is provided with a connecting hole 421 extending along the axial direction of the clearance hole 411, and the rotating core 700 is rotatably fitted in the connecting hole 421. The rotating core 700 and the connecting hole 421 are arranged coaxially.

[0105] The adjustment rod 420 has a first sliding stop point and a second sliding stop point.

[0106] When the adjusting rod 420 is located at the first sliding stop point, the communicating hole 421 is coaxially arranged with the making way hole 411 , and the cover body 500 is separated from the inner surface of the gas path.

[0107] When the adjusting rod 420 is located at the second sliding stop point, the communicating hole 421 is staggered with the making way hole 411 , and the cover body 500 covers the inner surface of the gas path.

[0108] Through this design, when the adjusting rod 420 is driven to make the cover body 500 cover the inner surface of the air path, the adjusting rod 420 is located at the second sliding stop point. At this time, the adjusting rod 420 drives the rotating core 700 to deviate from the first transmission shaft 220 and the second transmission shaft 230. Even if the first magnetic part 222 and the second magnetic part 232 are accidentally extended and the power mechanism is accidentally started, the air path inner surface detection device will not move, ensuring the safety and reliability of the cover body 500 when verifying the defective position.

[0109] Further, please combine Figure 12-13 The hole wall of the communicating hole 421 is provided with a clearance groove 422, which continuously extends in a ring shape along the circumference of the clearance groove 422. The adjusting rod 420 also has a second inner cavity 423, which is communicated with the clearance groove 422.

[0110] The rotating core 700 has an outer gear ring, and the outer gear ring is located in the clearance groove 422 .

[0111] A rotating ring 424 is disposed in the second inner cavity 423 . The rotating ring 424 also has an outer gear ring. The rotating ring 424 is meshed with the rotating core 700 .

[0112] The rotating ring 424 is provided with a radial through hole, and a groove is provided on the wall of the radial through hole. The groove continuously extends in a ring shape along the circumference of the radial through hole.

[0113] A limiting column 425 is slidingly fitted in the radial through hole, and the limiting column 425 has a flange that slides in the groove. An elastic member 426 is abutted between the side of the flange away from the inner ring wall of the rotating ring 424 and the side of the groove away from the inner ring wall of the rotating ring 424, so that the end of the limiting column 425 extends into the interior of the rotating ring 424, that is, the elastic member 426 is used to drive the limiting column 425 to move toward the central axis of the rotating ring 424.

[0114] A coil spring 427 is further disposed in the second inner cavity 423 . The coil spring 427 is located inside the rotating ring 424 . A fixed end of the coil spring 427 is fixedly connected to the inner wall of the second inner cavity 423 .

[0115] One end of the limiting column 425 close to the coil spring 427 is wedge-shaped, and the free end of the coil spring 427 abuts against the wedge-shaped surface of the limiting column 425 .

[0116] When the first transmission shaft 220 drives the second transmission shaft 230 via the rotating core 700 , the limiting column 425 uses its wedge-shaped surface to overcome the elastic force of the coil spring 427 to push the free end of the coil spring 427 , so that energy is stored in the coil spring 427 .

[0117] Among them, the relationship between the coil spring 427 and the elastic member 426 is: after the limiting column 425 pushes the free end of the coil spring 427 to move at least two circles, the free end of the coil spring 427 can overcome the elastic force of the elastic member 426 to push the limiting column 425 toward the outside of the rotating ring 424, so that the free end of the coil spring 427 passes over the wedge surface of the limiting column 425.

[0118] The rotating ring 424 is also equipped with a ratchet mechanism (not shown in the figure). The rotating ring 424 cooperates with the ratchet transmission of the ratchet mechanism. The pawl of the ratchet mechanism is used to limit the ratchet to rotate in one direction, that is, the ratchet cannot rotate in the opposite direction, so that the rotating ring 424 can only rotate in the direction driven by the rotating core 700, that is, when the first transmission shaft 220 drives the second transmission shaft 230 through the rotating core 700, the rotating core 700 can smoothly drive the rotating ring 424, and when the third magnetic member 740 is in the second working position, the rotating ring 424 will not reverse under the restriction of the ratchet mechanism.

[0119] The second inner cavity 423 is also provided with a separation mechanism (not shown in the figure) for separating the ratchet wheel and the pawl of the ratchet mechanism. The separation mechanism is controlled by the control end, and the separation mechanism may include a toggle arm and a fourth driver, and the fourth driver is used to drive the toggle arm, so that the toggle arm pushes the pawl to separate the pawl from the ratchet wheel, but is not limited thereto. When the toggle arm pushes the pawl to separate the pawl from the ratchet wheel, the restriction of the pawl on the ratchet wheel is released, and the ratchet wheel can rotate in the reverse direction, so that the rotating ring 424 can rotate in the reverse direction.

[0120] Through the above design, a certain amount of mechanical energy can be stored in the coil spring 427 during the process of the first transmission shaft 220 driving the second transmission shaft 230 through the rotating core 700. Under normal circumstances, due to the limiting effect of the ratchet mechanism, this part of energy will always be stored in the coil spring 427.

[0121] However, when the third magnetic member 740 is in the second working position, if the power mechanism is accidentally started and drives the second transmission shaft 230 to rotate a certain angle, then the second magnetic member 232 and the second opening 730 are no longer directly opposite each other. Even if the third magnetic member 740 is switched back to the first working position, the second magnetic member 232 cannot be smoothly inserted into the second opening 730.

[0122] At this time, after adjusting the adjustment rod 420 back to the first sliding stop point and switching the third magnetic member 740 back to the first working position, the first magnetic member 222 is re-engaged with the first opening 720 , and the second magnetic member 232 cannot be engaged with the second opening 730 .

[0123] At this time, the control end is used to control the separation mechanism, so that the separation mechanism pushes the pawl of the ratchet mechanism, so that the pawl is separated from the ratchet, and the restriction of the pawl on the ratchet is released, and the ratchet can rotate in the opposite direction, so that the rotating ring 424 can rotate in the opposite direction. In this way, the mechanical energy in the coil spring 427 can be released, and the coil spring 427 can drive the rotating ring 424 by pushing the limiting column 425, and the rotating ring 424 further drives the rotating core 700 to rotate, thereby changing the position of the second opening 730 until the second magnetic member 232 is re-matched to the second opening 730.

[0124] It should be noted that when selecting the coil spring 427, it is necessary to ensure that the mechanical energy stored in the coil spring 427 can smoothly drive the rotating core 700 (during this process, the gas path inner surface detection device will move in the opposite direction). After the second magnetic member 232 is re-matched to the second opening 730, the distance of the reverse movement can be determined based on the image data of the first visual module 300, and used to correct the position of the gas path inner surface detection device.

[0125] Optionally, in the present embodiment, the compression mechanism 600 may take the form of a fifth driver and a piston, but is not limited thereto. Correspondingly, the adjusting rod 420 may have a piston cavity, which extends through the inner surface of the cover body 500. The fifth driver is disposed at one end of the piston cavity away from the cover body 500, the piston slides in the piston cavity and is slidably sealed with the piston cavity, and the piston is driven by the fifth driver. The fifth driver is controlled by the control end. During compression, the fifth driver drives the piston from one end of the piston cavity away from the cover body 500 to the end close to the cover body 500, thereby compressing the gas in the cover body 500, and the compression ratio can be calculated based on the distance that the fifth driver drives the piston to move. After the air pressure detection is completed, the fifth driver is used to drive the piston to reset.

[0126] This embodiment further provides a gallium nitride production system, which includes: a gallium nitride production reactor, a first gas pipeline, a second gas pipeline, and the above-mentioned gas line inner surface detection device.

[0127] The first gas pipeline and the second gas pipeline are used to alternately transport raw material gas to the gallium nitride production reactor.

[0128] The gas path inner surface detection device is used to detect the inner surface condition of the idle one of the first gas pipeline and the second gas pipeline, that is, when the first gas pipeline and the second gas pipeline are working alternately, at the same time, only one of the first gas pipeline and the second gas pipeline is in working state. At this time, the gas path inner surface detection device can be used to detect the inner surface of the other one.

[0129] In summary, the gas path inner surface detection device provided in the embodiment of the present invention can perform preventive assessment of the quality risk of gas delivery, which helps to reduce the adverse effects of gas path problems on the quality of gas delivery.

[0130] The gallium nitride production system provided by the embodiment of the present invention can perform preventive assessment on the transportation quality risk of raw material gas during the production process, which can reduce the adverse effects of the transportation process on the purity of the raw material gas, and is conducive to ensuring the high-quality production of gallium nitride.

[0131] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A gas path inner surface detection device, characterized in that: include: A frame, a first visual module, an adjustment mechanism, a cover, a compression mechanism, a second visual module, an air pressure detection module and a control terminal; The frame has a traveling mechanism; the first visual module is installed on the frame to obtain global image data of the inner surface of the gas path in front of the gas path inner surface detection device; The adjusting mechanism is arranged on the frame, the cover is installed on the adjusting mechanism, and the compression mechanism, the second visual module and the air pressure detection module are all arranged inside the cover; The control end is used to determine the defect position according to the global image data, and to control the adjustment mechanism to make the cover body fit the inner surface of the gas path so that the cover body covers the defect position; the second visual module is used to obtain the close-range image data of the defect position; the compression mechanism is used to compress the gas in the cover body, and the air pressure detection module is used to detect the air pressure in the cover body; The control end is also used to determine the defect volume of the defect position according to the compression ratio of the compression mechanism and the air pressure in the cover body after compression.

2. The gas path inner surface detection device according to claim 1, characterized in that: The frame comprises a front frame body and a rear frame body; the front frame body has a first reference rod extending toward the rear frame body on one side close to the rear frame body, and the rear frame body has a second reference rod extending toward the front frame body on one side close to the front frame body; The first reference rod and the second reference rod are coaxially arranged with a spacing; The adjusting mechanism comprises: a rotating member, an adjusting rod, a first driver and a second driver; The rotating member is disposed between the first reference rod and the second reference rod, and the first reference rod and the second reference rod are both rotationally matched with the rotating member; along the axial direction of the first reference rod, the first reference rod and the second reference rod are both fixedly matched with the rotating member; The adjusting rod is arranged perpendicular to the first reference rod and passes through the rotating member, and the adjusting rod is slidably matched with the rotating member; The first driver is arranged on the first reference rod or the second reference rod to drive the rotating member; the second driver is arranged on the rotating member to drive the adjusting rod to slide; and the cover is arranged on the end of the adjusting rod.

3. The gas path inner surface detection device according to claim 2, characterized in that: The traveling mechanism comprises: a traveling wheel, a first transmission shaft, a second transmission shaft and a power mechanism; The front frame and the rear frame are both provided with the walking wheels, and the power mechanism is provided on the rear frame; The first reference rod and the second reference rod are both tubular; the first transmission shaft is rotatably accommodated in the first reference rod, and the second transmission shaft is rotatably accommodated in the second reference rod; the first transmission shaft is in transmission cooperation with the walking wheel of the front frame body, and the second transmission shaft is in transmission cooperation with the power mechanism; A first blind hole is formed on an end surface of the first transmission shaft close to the second transmission shaft, the first blind hole is eccentrically arranged on the first transmission shaft, and a first magnetic member is slidably fitted in the first blind hole; a second blind hole is formed on an end surface of the second transmission shaft close to the first transmission shaft, the second blind hole is eccentrically arranged on the second transmission shaft, and a second magnetic member is slidably fitted in the second blind hole; The rotating member is provided with a clearance through hole, and the clearance through hole extends along the axial direction of the first reference rod and passes through the rotating member; A rotating core is rotatably fitted in the said yielding through hole, and the said rotating core has a first inner cavity; a first opening for connecting the outside with the first inner cavity is provided on a side of the said rotating core close to the first transmission shaft, and a second opening for connecting the outside with the first inner cavity is provided on a side of the said rotating core close to the second transmission shaft; A third magnetic member is provided in the first inner cavity; along the circumference of the rotating core, the third magnetic member is rotatably fitted in the rotating core, and the third magnetic member has an N-pole magnetic region and an S-pole magnetic region; the third magnetic member is driven by a third driver; The third magnetic member has a first working position and a second working position; when the third magnetic member is in the first working position, the first opening and the second opening correspond to any one of the N-pole magnetic region and the S-pole magnetic region respectively, the first magnetic member is attracted by the magnetic force of the third magnetic member and extends into the first opening, and the second magnetic member is attracted by the magnetic force of the third magnetic member and extends into the second opening, so that the first transmission shaft and the second transmission shaft are in transmission cooperation; When the third magnetic member is in the second working position, the first opening and the second opening correspond to the other of the N-pole magnetic region and the S-pole magnetic region, respectively, the first magnetic member is repelled by the magnetic force of the third magnetic member and withdraws from the first opening, and the second magnetic member is repelled by the magnetic force of the third magnetic member and withdraws from the second opening, so that the power between the first transmission shaft and the second transmission shaft is disconnected; When the gas path inner surface detection device is moving, the control end controls the third magnetic component to be in the first working position; when it is necessary to detect the defect volume of the defect position, the control end controls the third magnetic component to be in the second working position.

4. The gas path inner surface detection device according to claim 3, characterized in that: The clearance through hole, the rotating core and the first reference rod are coaxially arranged; The rotating member has a side close to the first reference rod and a side close to the second reference rod, both of which are provided with matching grooves, and the clearance through hole is provided at the groove bottom of the matching grooves and connects the matching grooves on both sides; the first reference rod and the second reference rod extend into the matching grooves on both sides of the rotating member respectively and are rotatably matched with the matching grooves; The adjusting rod is arranged along the radial direction of the first reference rod, and the adjusting rod passes through the clearance through hole; the adjusting rod is provided with a connecting hole extending along the axial direction of the clearance through hole, and the rotating core is rotatably fitted in the connecting hole; The adjusting rod has a first sliding stop point and a second sliding stop point; when the adjusting rod is located at the first sliding stop point, the connecting hole and the giving way hole are coaxially arranged, and the cover body is separated from the inner surface of the air path; when the adjusting rod is located at the second sliding stop point, the connecting hole and the giving way hole are staggered, and the cover body is arranged on the inner surface of the air path.

5. The gas path inner surface detection device according to claim 4, characterized in that: The hole wall of the communicating hole is provided with a clearance groove, and the clearance groove continuously extends in a ring shape along the circumference of the clearance groove; the adjusting rod also has a second inner cavity, and the second inner cavity is connected with the clearance groove; The rotating core has an outer gear ring, and the outer gear ring is located in the clearance groove; A rotating ring is arranged in the second inner cavity, the rotating ring also has an outer gear ring, and the rotating ring is meshed with the rotating core; The rotating ring is provided with a radial through hole, the hole wall of the radial through hole is provided with a groove, and the groove continuously extends in a ring shape along the circumference of the radial through hole; A limiting column is slidably fitted in the radial through hole, the limiting column has a flange, the flange is slidably fitted in the groove, and an elastic member is abutted between a side of the flange away from the inner ring wall of the rotating ring and a side of the groove away from the inner ring wall of the rotating ring, so that the end of the limiting column extends into the interior of the rotating ring; A coil spring is also disposed in the second inner cavity, and the coil spring is located inside the rotating ring; The end of the limiting column close to the coil spring is wedge-shaped, and the free end of the coil spring abuts against the wedge-shaped surface of the limiting column; When the first transmission shaft drives the second transmission shaft through the rotating core, the limiting column overcomes the elastic force of the coil spring to push the free end of the coil spring; The relationship between the coil spring and the elastic member is as follows: when the limiting column pushes the free end of the coil spring to move at least two circles, the free end of the coil spring can overcome the elastic force of the elastic member to push the limiting column toward the outside of the rotating ring, so that the free end of the coil spring passes over the wedge surface of the limiting column; The rotating ring is also equipped with a ratchet mechanism so that the rotating ring can only rotate in the direction driven by the rotating core; The second inner cavity is also provided with a separation mechanism for separating the ratchet and the pawl of the ratchet mechanism.

6. A gallium nitride production system, characterized in that: include: A gallium nitride production reactor, a first gas pipeline, a second gas pipeline, and a gas path inner surface detection device as described in any one of claims 1 to 5; The first gas pipeline and the second gas pipeline are used to alternately transport raw material gas to the gallium nitride production reactor; The gas line inner surface detection device is used to detect the inner surface condition of the idle one of the first gas pipeline and the second gas pipeline.

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