Probe card detection equipment and operation method thereof

Abstract

The invention discloses probe card detection equipment and an operation method thereof, and relates to the technical field of semiconductor probe card testing, the probe card detection equipment comprises a detection mounting plate, a connection module and a detection module, the connection module is arranged on the detection mounting plate, the detection module is arranged on the detection mounting plate, and the connection module is connected with the detection module. The detection module comprises a clamping assembly, a driving assembly and a detection assembly, the clamping assembly is connected with the output end of the driving assembly, the clamping assembly is further movably connected with the detection assembly, the driving assembly drives the clamping assembly to clamp the probe card, the clamping assembly drives the detection assembly to move towards the direction of the probe card in the process that the clamping assembly clamps the probe card, and the detection assembly detects the probe card. By means of the arrangement, the probe card can be detected before leaving a factory, the problem that the probe card can only be tested at a client side is solved, and labor and time cost is greatly saved.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor probe card testing, and in particular to a probe card testing device and an operating method thereof. Background Art

[0002] In the semiconductor industry, probe cards are key tools for testing integrated circuit chips. Their performance and quality directly affect the test results of the chips. With the continuous development of semiconductor technology, the testing requirements for probe cards are getting higher and higher; At present, in the semiconductor field, there are not many factory inspection equipment for probe cards in China. Normally, most of them are placed on the client's machine for actual use to determine whether there is a problem with the production of the probe card. However, a probe card is large in size and weight. For example, the 93K Direct Docking probe card has many resource channels. If a problem occurs and is not found out before leaving the factory and directly flows into the client, it will waste a lot of manpower and material resources to solve the problem. This equipment completely simulates the probe card status during the probe station test phase for factory inspection, which fully simulates the customer's actual usage status. Summary of the invention

[0003] The main purpose of the present invention is to provide a probe card detection device and an operation method thereof, aiming to solve the problem that the probe card cannot be tested before leaving the factory.

[0004] To achieve the above object, the present invention provides a probe card testing device, the probe card testing device comprising: Detection of mounting plate; A connection module, disposed on the detection mounting plate, for preliminarily stabilizing the probe card to be detected on the surface of the detection mounting plate; A detection module is arranged on the detection mounting plate, the detection module comprises a clamping component, a driving component and a detection component, the clamping component is connected to the output end of the driving component, and the clamping component is also movably connected to the detection component; The driving component drives the clamping component to clamp the probe card. During the process of the clamping component clamping the probe card, the clamping component drives the detection component to move toward the probe card, so that the detection component can be connected to the probe card, thereby testing the probe card.

[0005] Preferably, the connection module comprises a first driving cylinder and a claw assembly whose number matches that of the first driving cylinder, and the claw assembly drives the probe card for card reception inspection through the first driving cylinder.

[0006] Preferably, the claw assembly is built into the detection mounting plate, and the claw assembly is arranged opposite to the probe card to be detected.

[0007] Preferably, the claw assembly comprises two claw blocks; The first driving cylinder drives the two clamping claw blocks to open, so that the clamping claw blocks are clamped with the clamping grooves on the surface of the probe card.

[0008] Preferably, the number of the clamping assemblies is four, and the four clamping assemblies are spaced apart and distributed on the detection mounting plate along the width direction of the detection mounting plate; There are two detection components, one detection component is located between two clamping components, and the other detection component is located between the other two clamping components, wherein the two detection components are symmetrically distributed.

[0009] Preferably, the clamping assembly comprises a long plate, a plurality of hook elements are arranged at intervals at the bottom of the long plate, a plurality of long slots are arranged at intervals along the length direction of the detection mounting plate, and an end of the hook element away from the long plate passes through the corresponding long slot; The drive assembly includes a second drive cylinder; Under the action of the second driving cylinder, the long plate can move along the length direction of the long slot, so that the hook element hooks the follower on the probe card.

[0010] Preferably, a plurality of cam follower shafts are arranged at intervals along the length direction of the long board on one side of the long board facing the detection assembly; The detection assembly comprises a needle block element, and connecting blocks adapted to the corresponding cam follower shaft are respectively arranged on both sides of the needle block element, and the connecting block is provided with a movable hole, and the cam follower shaft is movably inserted into the movable hole; The long plate moves in the length direction of the long slot, so that the cam follower shaft moves in the movable hole, thereby linking the needle block element to pass through the detection mounting plate and move between the bottom and the top of the detection mounting plate.

[0011] Preferably, the movable hole comprises a high hole and a low hole, the high hole is located above the low hole, and an arc hole for movement of the cam follower shaft is provided between the high hole and the low hole.

[0012] Preferably, a mounting piece is provided on a side of the detection mounting plate facing the probe card, and the mounting piece is used to mount the probe card detection device on other structures for operation.

[0013] A method for operating a probe card testing device, using the probe card testing device according to any one of the preceding claims, comprising the following steps: Grabbing: placing the probe card on the detection mounting plate, and the connection module on the detection mounting plate preliminarily grabs the probe card to be detected, and is used to preliminarily fix the probe card on the surface of the detection mounting plate; Detection: The clamping assembly is driven by the driving assembly, and the clamping assembly can clamp the probe card so that the probe card moves further toward the detection mounting plate. During the process of the clamping assembly clamping the probe card, the detection assembly located on the side of the detection mounting plate away from the probe card is linked by the clamping assembly, and the detection assembly approaches the detection mounting plate and is connected to the probe card that is also close to the detection mounting plate; Installation: The connected probe card test equipment and probe card are transported and turned 180 degrees so that the test installation plate can be connected to other structures to start the test test.

[0014] The beneficial effects of the present invention are as follows: the clamping component is connected to the output end of the driving component, and the clamping component is also movably connected to the detection component, so that the driving component can drive the clamping component to clamp the probe card clamped by the connecting module. In the process of the clamping component clamping the probe card, the clamping component drives the detection component to move in the direction of the probe card, ensuring that the detection component is connected to the corresponding area of ​​the probe card, thereby realizing the detection of the probe card by the detection component. The above arrangement enables the probe card to be tested before leaving the factory, thereby solving the problem that the probe card can only be tested at the client end. Secondly, the above arrangement adopts fully automatic operation, which saves labor costs, and can test probe cards in batches, thereby improving test efficiency. BRIEF DESCRIPTION OF THE DRAWINGS In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0015] Figure 1 It is a schematic diagram of the three-dimensional structure of the probe card detection device of the present invention; Figure 2 It is a schematic diagram of the three-dimensional structure of the probe card detection device of the present invention from another angle; Figure 3 It is a schematic diagram of the three-dimensional structure of the connecting block in the present invention; Figure 4 A cross-sectional view of the probe card testing device of the present invention when the hook element is not hooked to the follower in the probe card; Figure 5 It is a cross-sectional view of the probe card testing device of the present invention when the needle block assembly is not pressing the probe card to be tested; Figure 6 A cross-sectional view of the probe card testing device of the present invention when the hook element is hooked to the follower in the probe card; Figure 7 It is a cross-sectional view of the probe card testing device of the present invention when the needle block assembly is pressing the probe card to be tested.

[0016] Description of labels: 1. Detection mounting plate; 11. Slideway; 12. Adapter block; 13. Long notch; 14. Mounting piece; 2. Connecting module; 21. First driving cylinder; 22. Claw assembly; 221. Claw block; 3. Detection module; 31. Clamping assembly; 311. Long plate; 312. Hook element; 313. Cam follower shaft; 32. Driving assembly; 321. Second driving cylinder; 33. Detection assembly; 331. Connecting block; 332. Movable hole; 3321. High hole; 3322. Low hole; 333. Needle block element.

[0017] The purpose, features and advantages of the present invention will be further described with reference to the accompanying drawings in conjunction with the embodiments. DETAILED DESCRIPTION

[0018] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0019] It should be noted that if the embodiments of the present invention involve directional indications such as up, down, left, right, front, back, etc., then the directional indications are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture as shown in the accompanying drawings. If the specific posture changes, the directional indication will also change accordingly.

[0020] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present invention, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, if the meaning of "and / or" appearing in the full text is to include three parallel schemes, taking "A and / or B" as an example, it includes scheme A, or scheme B, or a scheme that satisfies both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0021] The present invention provides a probe card detection device, which is applied to the field of probe card testing. Figure 1-Figure 7 The probe card detection device includes a detection mounting plate 1, a connection module 2 and a detection module 3. The connection module 2 is arranged on the detection mounting plate 1, and is used to preliminarily stabilize the probe card to be detected on the surface of the detection mounting plate 1. The detection module 3 is arranged on the detection mounting plate 1. The detection module 3 includes a clamping component 31, a driving component 32 and a detection component 33. The clamping component 31 is connected to the output end of the driving component 32, and the clamping component 31 is also movably connected to the detection component 33. The driving component 32 drives the clamping component 31 to clamp the probe card. In the process of the clamping component 31 clamping the probe card, the clamping component 31 drives the detection component 33 to move in the direction of the probe card, so that the detection component 33 can be connected to the probe card, and then the probe card is tested. The above allows the probe card to be tested before leaving the factory, solves the problem that the probe card can only be tested at the client, and greatly saves labor costs and time costs.

[0022] In this embodiment, please refer to Figure 1 and Figure 2 The connection module 2 includes a first driving cylinder 21 and a claw assembly 22 whose number matches the first driving cylinder 21. The claw assembly 22 drives the probe card for reception inspection through the first driving cylinder 21 to ensure that the probe card can proceed with subsequent processes.

[0023] Furthermore, the claw assembly 22 is built into the detection mounting plate 1, and the claw assembly 22 is arranged opposite to the probe card to be detected. In the present embodiment, there are two claw assemblies 22, and the two claw assemblies 22 are distributed at intervals. This arrangement ensures that after the claw assembly 22 clamps the probe card, it does not affect the probe card from being close to the surface of the detection mounting plate 1.

[0024] Based on the above, the claw assembly 22 includes two claw blocks 221. The first driving cylinder 21 drives the two claw blocks 221 to open so that the claw blocks 221 are engaged with the grooves on the surface of the probe card, thereby firmly placing the probe card on the surface of the detection mounting plate 1.

[0025] In other embodiments, the claw assembly 22 may be other structures, such as a suction nozzle, which utilizes the vacuum adsorption principle to adsorb the probe card onto the surface of the detection mounting plate 1. In fact, any structure of the claw assembly 22 can be used as long as it can clamp the probe card and does not affect the proximity of the probe card to the detection mounting plate 1.

[0026] In this embodiment, please refer to Figure 1There are four clamping components 31, and the four clamping components 31 are spaced apart on the detection mounting plate 1 along the width direction of the detection mounting plate 1. As for the detection components 33, there are two detection components 33, one detection component 33 is located between two clamping components 31, and the other detection component 33 is located between the other two clamping components 31, wherein the two detection components 33 are symmetrically distributed. This arrangement is mainly to enable the detection components 33 to cooperate with the clamping components 31 on both sides, to ensure that the detection components 33 can operate in conjunction with the operation of the clamping components 31 arranged on both sides, and then to connect the detection components 33 to the probe card to realize the test of the probe card.

[0027] It should be noted that the width direction of the detection mounting plate 1 is indicated by an arrow L. For details, please refer to Figure 1 .

[0028] For the clamping assembly 31, please refer to Figure 1 and Figure 4 The clamping assembly 31 includes a long plate 311, and a plurality of hook elements 312 are arranged at intervals at the bottom of the long plate 311. The detection mounting plate 1 is arranged at intervals along its length direction. The end of the hook element 312 away from the long plate 311 passes through the corresponding long slot 13. The hook element 312 is mainly used to hook the probe card and move the probe card toward the detection mounting plate 1.

[0029] As for how the hook element 312 hooks the probe card, please refer to Figure 1 , Figure 4 and Figure 6 In the present embodiment, the hook element 312 is shaped like a letter "7", and the side of the hook end in contact with the probe card is an inclined surface. Since the driving assembly 32 includes a second driving cylinder 321, under the action of the second driving cylinder 321, the long plate 311 can move along the length direction of the corresponding long slot 13, thereby causing the hook element 312 to move along the direction of the follower on the probe card, and the follower on the probe card then moves relative to the inclined surface, thereby ensuring that the hook element 312 hooks the follower on the probe card. After the hook element 312 hooks the follower of the probe card, the position of the follower on the probe card is closer to the surface of the detection mounting board 1 than its initial position, thereby causing the probe card to be closer to the detection mounting board 1.

[0030] Following the above, as to how the second driving cylinder 321 acts on the long plate 311 to move along the length direction of the detection mounting plate 1, in the present embodiment, a slideway 11 is further provided on the detection mounting plate 1, and a transfer block 12 is slidably connected to the slideway 11, and the side of the transfer block 12 is connected to the long plate 311, wherein the second driving cylinder 321 drives the transfer block 12 to slide on the slideway 11, thereby driving the long plate 311 to move in the long slot 13.

[0031] It should be noted that, in other embodiments, the driving component 32 may be other power sources, such as a micro motor, as long as it can move the long board 311 in a corresponding direction.

[0032] In this embodiment, a plurality of cam follower shafts 313 are arranged at intervals along the length direction of the long plate 311 on one side of the long plate 311 facing the detection component 33. The detection component 33 includes a needle block element 333. Connecting blocks 331 adapted to the corresponding cam follower shafts 313 are respectively arranged on both sides of the needle block element 333. The connecting block 331 is provided with a movable hole 332, and the cam follower shaft 313 is movably inserted into the movable hole 332.

[0033] For further information, please refer to Figure 1 , Figure 5 and Figure 7 The long plate 311 is moved in the length direction of the long slot 13 by the second driving cylinder 321, so that the cam follower shaft 313 moves in the movable hole 332, and then the needle block element 333 is linked to pass through the detection mounting plate 1 and move between the bottom and the top of the detection mounting plate 1, so as to realize the connection between the needle block element 333 and the probe card.

[0034] In this embodiment, please refer to Figure 1-Figure 4 and Figure 6 The movable hole 332 includes a high hole 3321 and a low hole 3322. The high hole 3321 is located above the low hole 3322. An arc hole for moving the cam follower shaft 313 is arranged between the high hole 3321 and the low hole 3322. Specifically, the second driving cylinder 321 drives the long plate 311 to move along the length direction of the long slot 13, so that the hook element 312 moves toward the corresponding follower direction, thereby ensuring that the hook element 312 hooks the follower. In the process of the hook element 312 hooking the follower, the cam follower shaft 313 inserted in the low hole 3322 will move into the high hole 3321 through the arc hole, so that the needle block element 333 moves toward the probe card direction, thereby realizing that the needle block element 333 passes through the detection mounting plate 1 and is connected to the pogo area of ​​the probe card close to the detection mounting plate 1. Furthermore, a mounting member 14 is provided on the side of the detection mounting plate 1 facing the probe card. The mounting member 14 is used to mount the probe card detection equipment on other structures for operation. In the present embodiment, the other structure may be a machine platform. As for the mounting member 14, it is mounting holes provided at the four corners of the detection mounting plate 1. The mounting holes are socketed with the adjustment shafts on the machine platform. When the adjustment shafts are rotated, the corresponding corners of the detection mounting plate 1 will rise or fall accordingly. This setting can adjust the height between the detection mounting plate 1 and the machine platform, while also ensuring the flatness of the detection mounting plate 1, so as to facilitate the needle block element 333 to test the probe card.

[0035] It should be noted that the adjustment axis on the machine is represented by N, and the follower on the probe card to be tested is represented by M. For details, please refer to Figure 1 .

[0036] In other embodiments, the mounting member 14 may be other structures. For example, connecting rods are respectively provided at the four corners of the detection mounting plate 1, and a plurality of height holes are arranged at intervals along the length direction of the connecting rod. A shaft tube connected with the plug-in rod is provided on the machine platform matched therewith, and a positioning hole is provided on the shaft tube. By plugging the shaft into the positioning hole and the height hole, the height between the detection mounting plate 1 and the machine platform can also be adjusted, and the flatness of the detection mounting plate 1 can also be ensured. In fact, as long as the mounting member 14 can ensure the flatness of the detection mounting plate 1, any structure can be used.

[0037] The present invention also provides an operating method of a probe card detection device, please refer to Figure 1-Figure 7 , using the above-mentioned probe card detection equipment, including the following steps: Grabbing: placing the probe card on the detection installation board 1, and the connection module 2 on the detection installation board 1 preliminarily grabs the probe card to be detected, so as to preliminarily fix the probe card on the surface of the detection installation board 1; Detection: The clamping assembly 31 is driven by the driving assembly 32. The clamping assembly 31 can clamp the probe card so that the probe card moves further toward the detection mounting plate 1. When the clamping assembly 31 clamps the probe card, the detection assembly 33 located on the side of the detection mounting plate 1 away from the probe card is linked by the clamping assembly 31. The detection assembly 33 approaches the detection mounting plate 1 and is connected to the probe card that is also close to the detection mounting plate 1. Installation: The connected probe card detection device and the probe card are transported and turned 180 degrees, so that the detection installation plate 1 can be connected with other structures, and then the detection test is started.

[0038] After the above-mentioned probe card test is completed, the driving component 32 drives the long plate 311 to move in the opposite direction to the previous direction, so that the hook element 312 is away from the follower on the probe card, and then the detection component 33 is linked to leave the pogo area of ​​the probe card, so that the probe card is away from the detection mounting plate 1, which is convenient for the subsequent process to recover the probe card. This operation method adopts fully automated operation, saving labor costs, and can also batch detect probe cards that have not yet left the factory, and has strong and wide applicability.

[0039] The above descriptions are only optional embodiments of the present invention, and are not intended to limit the patent scope of the present invention. All equivalent structural changes made using the contents of the present invention's specification and drawings, or directly / indirectly applied in other related technical fields, are included in the patent protection scope of the present invention.

Claims

1. A probe card testing device, characterized in that: The probe card detection equipment comprises: Detection mounting plate (1); A connection module (2) is arranged on the detection installation board (1) and is used to initially stabilize the probe card to be detected on the surface of the detection installation board (1); A detection module (3) is arranged on the detection mounting plate (1), the detection module (3) comprising a clamping component (31), a driving component (32) and a detection component (33), the clamping component (31) being connected to an output end of the driving component (32), and the clamping component (31) being also movably connected to the detection component (33); The driving component (32) drives the clamping component (31) to clamp the probe card. When the clamping component (31) clamps the probe card, the clamping component (31) drives the detection component (33) to move in the direction of the probe card, so that the detection component (33) can be connected to the probe card, thereby testing the probe card.

2. The probe card testing device according to claim 1, characterized in that: The connection module (2) comprises a first driving cylinder (21) and claw assemblies (22) whose number matches that of the first driving cylinder (21); the claw assemblies (22) drive the probe card for card reception detection via the first driving cylinder (21).

3. The probe card testing device according to claim 2, characterized in that: The clamping claw assembly (22) is built into the detection mounting plate (1), and the clamping claw assembly (22) is arranged opposite to the probe card to be detected.

4. The probe card testing device according to claim 3, characterized in that: The claw assembly (22) comprises two claw blocks (221); The first driving cylinder (21) drives the two clamping claw blocks (221) to open, so that the clamping claw blocks (221) are clamped with the clamping grooves on the surface of the probe card.

5. The probe card testing device according to claim 4, characterized in that: The number of the clamping assemblies (31) is four, and the four clamping assemblies (31) are distributed on the detection installation plate (1) at intervals along the width direction of the detection installation plate (1); There are two detection components (33), one detection component (33) is located between two clamping components (31), and the other detection component (33) is located between another two clamping components (31), wherein the two detection components (33) are symmetrically distributed.

6. The probe card testing device according to claim 5, characterized in that: The clamping assembly (31) comprises a long plate (311), a plurality of hook elements (312) are arranged at intervals on the bottom of the long plate (311), a plurality of long slots (13) are arranged at intervals along the length direction of the detection installation plate (1), and an end of the hook element (312) away from the long plate (311) penetrates the corresponding long slot (13); The driving assembly (32) comprises a second driving cylinder (321); Under the action of the second driving cylinder (321), the long plate (311) can move along the length direction of the long slot (13), so that the hook element (312) hooks the follower on the probe card.

7. The probe card testing device according to claim 6, characterized in that: A plurality of cam follower shafts (313) are arranged at intervals along the length direction of the long plate (311) on one side of the long plate (311) facing the detection assembly (33); The detection assembly (33) comprises a needle block element (333), and connecting blocks (331) adapted to the corresponding cam follower shaft (313) are respectively arranged on both sides of the needle block element (333), and the connecting block (331) is provided with a movable hole (332), and the cam follower shaft (313) is movably inserted into the movable hole (332); The long plate (311) is moved in the length direction of the long slot (13), so that the cam follower shaft (313) moves in the movable hole (332), thereby linking the needle block element (333) to pass through the detection mounting plate (1) and move between the bottom and the top of the detection mounting plate (1).

8. The probe card testing device according to claim 7, characterized in that: The movable hole (332) comprises a high hole (3321) and a low hole (3322), the high hole (3321) is located above the low hole (3322), and an arc hole for movement of the cam follower shaft (313) is provided between the high hole (3321) and the low hole (3322).

9. The probe card testing device according to any one of claims 1 to 8, characterized in that: A mounting piece (14) is provided on one side of the detection mounting plate (1) facing the probe card, and the mounting piece (14) is used to mount the probe card detection device on other structures for operation.

10. A method for operating a probe card testing device, characterized in that: The probe card detection device according to any one of claims 1 to 9 comprises the following steps: Grabbing: placing the probe card on the detection installation plate (1), and the connection module (2) on the detection installation plate (1) preliminarily grabs the probe card to be detected, and is used to preliminarily fix the probe card on the surface of the detection installation plate (1); Detection: The clamping component (31) is driven by the driving component (32), and the clamping component (31) can clamp the probe card so that the probe card moves further toward the detection installation plate (1). When the clamping component (31) clamps the probe card, the detection component (33) located on the side of the detection installation plate (1) away from the probe card is linked by the clamping component (31), and the detection component (33) approaches the detection installation plate (1) and is connected to the probe card that is also close to the detection installation plate (1); Installation: The connected probe card detection device and the probe card are transported and turned 180 degrees, so that the detection installation plate (1) can be connected to other structures, and then the detection test is started.

Images