Method, device and equipment for determining blade array structure of turbo molecular pump

Abstract

The invention provides a method, device and equipment for determining a blade array structure of a turbo molecular pump. The method comprises the steps that the expected pumping speed and the expected compression ratio are obtained; blade rows of the turbo molecular pump are increased step by step, and parameter adjustment is carried out on the blade rows increased in each step until a target first blade row cascade structure meeting the expected pumping speed is obtained; on the basis of the target first blade array cascade structure, turbine molecular pump blade arrays are increased step by step, and parameter adjustment is conducted on the blade arrays increased in each step until a target second blade array cascade structure meeting the expected compression ratio is obtained; and performing overall fine tuning optimization on the target second blade array cascade structure, and determining a final blade array structure. According to the effect of each stage of the turbo molecular pump blade array and the inter-stage cascading characteristic, performance improvement of the pumping speed and the compression ratio is decoupled, meanwhile, in the process of inspecting the performance of the blade array cascading structure, the optimal balance point between the compression ratio and the pumping speed can be quickly found out by optimizing the parameters of the turbo molecular pump blade array stage by stage, and the performance of the turbo molecular pump blade array is improved. And the calculation complexity is reduced.

Description

Technical Field

[0001] The present disclosure relates to the field of vacuum technology, and in particular to a method, device and equipment for determining a blade row structure of a turbomolecular pump. Background Art

[0002] The turbomolecular pump includes a multi-stage blade row structure. Each blade row structure not only needs to strictly control its geometry, angle and position to ensure the smooth transfer of gas molecules, but also needs to adjust parameters according to the type of gas, pumping speed requirements, etc. The multi-stage blade row structure design means that there are many adjustable parameters of the turbomolecular pump, such as the number of blades, blade row inclination, rotation speed, pump channel width and turbine diameter, etc. A slight adjustment of any parameter will affect the overall performance of the pump. Existing design methods often face huge optimization search space and high computational complexity due to the large number of adjustable parameters, resulting in high design costs. The simplified matching design method, by designing different single-stage blade row structures and then combining and matching to design multi-stage blade row structures, can reduce a lot of computational complexity, but it is difficult to find the best balance between compression ratio and pumping speed, resulting in efficiency loss and application limitations.

[0003] In summary, in order to meet the increasingly stringent demands of precision instruments and industrial equipment for vacuum environments, it is of great practical significance to explore improvements in the blade structure and parameter optimization methods of turbomolecular pumps. Summary of the invention

[0004] The embodiments of the present disclosure provide a method, device and equipment for determining the blade row structure of a turbomolecular pump, so as to solve the problem that the existing multi-stage turbine blade design optimization search space is huge, resulting in high computational complexity and difficulty in finding the optimal balance point between compression ratio and pumping speed.

[0005] Based on the above problems, in a first aspect, an embodiment of the present disclosure provides a method for determining a blade row structure of a turbomolecular pump, comprising:

[0006] Obtain the expected pumping speed and expected compression ratio;

[0007] gradually increasing the number of turbine molecular pump blades, and adjusting the parameters of the blades added at each stage until a target first blade row cascade structure that meets the desired pumping speed is obtained;

[0008] Adding turbomolecular pump blade rows step by step on the basis of the target first blade row cascade structure, and adjusting parameters of the blade rows added at each stage until a target second blade row cascade structure that meets the desired compression ratio is obtained;

[0009] The target second leaf row cascade structure is fine-tuned and optimized as a whole to determine a final leaf row structure.

[0010] In combination with the first aspect, in a possible implementation manner, the stepwise increase of the turbomolecular pump blade rows and the parameter adjustment of the blade rows added at each stage until a target first blade row cascade structure that meets the desired pumping speed is obtained include:

[0011] Add one more turbomolecular pump blade row, adjust the first blade row parameters, and optimize the maximum Ho coefficient;

[0012] Cascading the added first-stage turbomolecular pump blade row with the determined current blade row cascade structure, adjusting the parameters of the second blade row of the newly added stage, optimizing the maximum Ho coefficient of the cascaded blade row cascade structure, and determining a first blade row cascade structure; wherein the first blade row cascade structure includes a first optimal blade row cascade structure that meets the current maximum pumping speed, or includes the first optimal blade row cascade structure and a first alternative blade row cascade structure that meets the current first pumping speed;

[0013] When the pumping speed corresponding to the current first optimal blade row cascade structure does not meet the expected pumping speed, the first blade row cascade structure is used as a new current blade row cascade structure, and the steps of adding a turbomolecular pump blade row and adjusting the first blade row parameters are returned to execute;

[0014] In a case where the pumping speed corresponding to the current first optimal leaf row cascade structure meets the expected pumping speed, the target first leaf row cascade structure is determined according to the first leaf row cascade structure.

[0015] In combination with the first aspect, in a possible implementation manner, when the pumping speed corresponding to the current first optimal leaf row cascade structure meets the expected pumping speed, determining the target first leaf row cascade structure according to the first leaf row cascade structure includes:

[0016] When the pumping speed corresponding to the current first optimal leaf row cascade structure meets the expected pumping speed, comparing the pumping speed corresponding to the first candidate leaf row cascade structure with the expected pumping speed;

[0017] The current first optimal blade row cascade structure and the first candidate blade row cascade structure that meets the desired pumping speed are determined as the target first blade row cascade structure.

[0018] In combination with the first aspect, in a possible implementation manner, the first blade row parameter includes: blade row inclination angle, blade row height, blade number and blade thickness;

[0019] The second blade row parameters include: blade row inclination angle, blade row height and blade number;

[0020] The current first pumping speed is related to the corresponding current maximum pumping speed.

[0021] In combination with the first aspect, in a possible implementation manner, the step of adding turbomolecular pump blade rows step by step on the basis of the target first blade row cascade structure, and adjusting parameters of the blade rows added at each stage until a target second blade row cascade structure satisfying the desired compression ratio is obtained, comprising:

[0022] Add one more turbomolecular pump blade row, adjust the parameters of the third blade row, and optimize the maximum compression ratio;

[0023] Cascading the added first-stage turbomolecular pump blade row with the determined current blade row cascade structure, adjusting the parameters of the fourth blade row of the newly added stage, optimizing the maximum compression ratio of the cascaded blade row cascade structure, and determining a second blade row cascade structure; wherein the second blade row cascade structure includes a second optimal blade row cascade structure that meets the current maximum compression ratio, or includes the second optimal blade row cascade structure and a second alternative blade row cascade structure that meets the current first compression ratio;

[0024] When the compression ratio corresponding to the current second optimal blade row cascade structure does not meet the expected compression ratio, the second blade row cascade structure is used as a new current blade row cascade structure, and the steps of adding a turbomolecular pump blade row and adjusting the parameters of the third blade row are returned to be executed;

[0025] When the compression ratio corresponding to the current second optimal leaf-row cascade structure satisfies the expected compression ratio, the target second leaf-row cascade structure is determined according to the second leaf-row cascade structure.

[0026] In combination with the first aspect, in a possible implementation manner, when the compression ratio corresponding to the current second optimal leaf row cascade structure satisfies the expected compression ratio, determining the target second leaf row cascade structure according to the second leaf row cascade structure includes:

[0027] When the compression ratio corresponding to the current second optimal leaf-row cascade structure satisfies the expected compression ratio, the current second optimal leaf-row cascade structure is determined as the target second leaf-row cascade structure.

[0028] In combination with the first aspect, in a possible implementation manner, the third blade row parameter includes: blade row inclination angle, blade row height, blade number, blade thickness and minimum blade row inner diameter;

[0029] The fourth blade row parameters include: blade row inclination angle, blade row height, number of blades and minimum blade row inner diameter;

[0030] The current first compression ratio is related to the corresponding current maximum compression ratio.

[0031] In combination with the first aspect, in a possible implementation manner, the overall fine-tuning and optimizing the target second leaf row cascade structure to determine the final leaf row structure includes:

[0032] determining a maximum Ho coefficient of the turbomolecular pump;

[0033] According to the leaf row parameters of each level of the target second leaf row cascade structure, setting corresponding search neighborhoods for the leaf row parameters of each level respectively;

[0034] Determining a first search space according to the product of the search neighborhoods;

[0035] According to the maximum compression ratio corresponding to the target second blade row cascade structure and the maximum Ho coefficient of the turbomolecular pump, the blade row parameters of each stage are traversed and optimized in the first search space to determine the optimal blade row parameters that meet the expected pumping speed and the expected compression ratio, and to determine the final blade row structure.

[0036] In combination with the first aspect, in a possible implementation manner, determining the maximum Ho coefficient of the turbomolecular pump includes:

[0037] Obtaining constraints of the turbomolecular pump;

[0038] Determining a maximum Ho coefficient of the turbomolecular pump according to the constraint condition and the desired pumping speed;

[0039] The constraints include: the maximum outer diameter and the minimum inner diameter of the turbomolecular pump blade row, the operating temperature, the type of extracted gas and the operating rotation speed.

[0040] In combination with the first aspect, in a possible implementation manner, the method further includes:

[0041] Outputting at least one of the following blade row parameters corresponding to each blade row of the turbomolecular pump: blade row inclination angle, blade row height, number of blades, blade row outer diameter, and blade row inner diameter;

[0042] Wherein, in the case where the blade row inclination angle varies with the blade row radius, the blade row inclination angle includes blade row inclination angle values ​​at preset scattered points within the blade row radius variation range.

[0043] In combination with the first aspect, in a possible implementation manner, the method further includes:

[0044] For the first-stage turbomolecular pump blade row, the first-stage blade row parameters are adjusted, the maximum Ho coefficient is optimized, and the first-stage blade row structure is obtained;

[0045] Performing a second blade row parameter adjustment on the first-stage blade row structure to determine an adjusted first-stage blade row structure; wherein the adjusted first-stage blade row structure includes: an optimal first-stage blade row structure that meets the current maximum pumping speed, or includes the optimal first-stage blade row structure and an alternative first-stage blade row structure that meets the current first pumping speed;

[0046] When the pumping speed corresponding to the adjusted first-stage blade row structure does not meet the expected pumping speed, performing the step of adding a turbomolecular pump blade row and adjusting the first blade row parameters;

[0047] In a case where the pumping speed corresponding to the adjusted first-stage leaf row structure meets the expected pumping speed, the target first leaf row cascade structure is determined according to the adjusted first-stage leaf row structure.

[0048] In a second aspect, a device for determining a blade row structure of a turbomolecular pump is provided, comprising:

[0049] An acquisition module, used for acquiring a desired pumping speed and a desired compression ratio;

[0050] A first parameter adjustment module is used to increase the turbomolecular pump blade row step by step, and adjust the parameters of the blade row added at each stage until a target first blade row cascade structure that meets the desired pumping speed is obtained;

[0051] A second parameter adjustment module is used to gradually increase the turbomolecular pump blade row on the basis of the target first blade row cascade structure, and adjust the parameters of each added blade row until a target second blade row cascade structure that meets the desired compression ratio is obtained;

[0052] A determination module is used to perform overall fine-tuning and optimization on the target second leaf row cascade structure to determine a final leaf row structure.

[0053] In a third aspect, a device for determining the blade row structure of a turbomolecular pump is provided, comprising: the device for determining the blade row structure of a turbomolecular pump as described in the second aspect.

[0054] The beneficial effects of the embodiments of the present disclosure include:

[0055] The embodiments of the present disclosure provide a method, device and equipment for determining the blade row structure of a turbomolecular pump, comprising: obtaining a desired pumping speed and a desired compression ratio; increasing the turbomolecular pump blade rows step by step, and adjusting the parameters of the blade rows added at each stage until a target first blade row cascade structure that meets the desired pumping speed is obtained; increasing the turbomolecular pump blade rows step by step on the basis of the target first blade row cascade structure, and adjusting the parameters of the blade rows added at each stage until a target second blade row cascade structure that meets the desired compression ratio is obtained; and performing overall fine-tuning and optimization on the target second blade row cascade structure to determine the final blade row structure. The method for determining the blade row structure of a turbomolecular pump provided in the embodiment of the present disclosure improves the pumping speed of the turbomolecular pump in the front-stage blade row cascade structure, and improves the compression ratio in the rear-stage blade row cascade structure according to the function of each stage of the turbomolecular pump blade row and the inter-stage cascade characteristics. Compared with the prior art, the performance improvements of the pumping speed and the compression ratio are decoupled. At the same time, in the process of examining the performance of the blade row cascade structure, the best balance point between the compression ratio and the pumping speed can be quickly found by optimizing the turbomolecular pump blade row parameters step by step, thereby avoiding the simultaneous optimization of all parameters, reducing the optimization search space, and reducing the computational complexity. BRIEF DESCRIPTION OF THE DRAWINGS

[0056] Figure 1 A flow chart of a method for determining a blade row structure of a turbomolecular pump provided in an embodiment of the present disclosure;

[0057] Figure 2 A schematic diagram of the structure of a single-stage blade row structure provided in an embodiment of the present disclosure;

[0058] Figure 3 A flow chart for determining the blade row structure of a turbomolecular pump provided in an embodiment of the present disclosure;

[0059] Figure 4 A structural diagram of a device for determining the blade row structure of a turbomolecular pump provided in an embodiment of the present disclosure. DETAILED DESCRIPTION

[0060] The embodiments of the present disclosure provide a method, device and apparatus for determining the blade row structure of a turbomolecular pump. The preferred embodiments of the present disclosure are described below in conjunction with the drawings of the specification. It should be understood that the preferred embodiments described herein are only used to illustrate and explain the present disclosure, and are not used to limit the present disclosure. In addition, the embodiments and features in the embodiments of the present application can be combined with each other if there is no conflict.

[0061] The present disclosure provides a method for determining the blade row structure of a turbomolecular pump. Figure 1 As shown, the following steps are included:

[0062] S101, obtaining a desired pumping speed and a desired compression ratio;

[0063] S102, increasing the turbomolecular pump blade rows step by step, and adjusting the parameters of the blade rows added at each stage until a target first blade row cascade structure that meets the desired pumping speed is obtained;

[0064] S103, adding turbomolecular pump blade rows step by step on the basis of the target first blade row cascade structure, and adjusting parameters of the blade rows added at each stage until a target second blade row cascade structure that meets the desired compression ratio is obtained;

[0065] S104: Perform overall fine-tuning and optimization on the target second leaf row cascade structure to determine the final leaf row structure.

[0066] In the disclosed embodiments, the turbomolecular pump is an indispensable and important equipment in modern vacuum technology, which can be used to produce clean high vacuum and ultra-high vacuum environments. Turbomolecular pumps are widely used in scientific instruments, industrial production equipment, semiconductor manufacturing, electron microscopes, particle accelerators and other fields due to their stable and reliable working characteristics and excellent pumping efficiency under molecular flow. The core structure of the turbomolecular pump includes a multi-stage high-speed rotating blade row, a stator, a rotor and a bearing system. Its pumping process depends on the interaction between the blade row and the molecular flow state, that is, through the rotation of multiple blade row cascade structures, the gas molecules are transferred step by step along the direction of the pump body, and the gas in the system is gradually removed. This multi-stage blade row structure design is based on the principle of molecular dynamics, which can effectively improve the pumping rate and compression ratio under molecular flow, so that the pump can reach a high vacuum state in a very short time. This efficient gas transfer process also determines the irreplaceable nature of the turbomolecular pump in the field of ultra-high vacuum.

[0067] However, while the multi-stage blade row structure of the turbomolecular pump improves performance, it also increases the complexity of the design and manufacturing cost. Each blade row structure not only needs to strictly control its geometry, angle and position to ensure the smooth transfer of gas molecules, but also needs to adjust parameters according to the type of gas, pumping speed requirements, etc. The multi-stage blade row structure design means that there are many adjustable parameters of the turbomolecular pump, such as the number of blades, blade row inclination, pump channel width and turbine diameter, and any slight adjustment of any parameter will affect the overall performance of the pump. The existing design methods generally adopt two methods: the first method is to optimize all parameters uniformly. This method has a huge optimization search space, high computational complexity and high design cost due to the large number of parameters that can be optimized; the second method adopts a simplified matching design method, which designs different single-stage blade row structures and then combines and matches them to design multi-stage blade row structures. Although it can reduce a lot of computational complexity, it is difficult to find the best balance between compression ratio and pumping speed, resulting in efficiency loss and application limitations.

[0068] In the embodiment of the present disclosure, the design target of the turbomolecular pump blade row structure is first obtained. The design target may include the expected pumping speed S max and the expected compression ratio Kmax . Add a new turbomolecular pump blade row and adjust the parameters of the new blade row. If there is a determined blade row cascade structure, cascade the new turbomolecular pump blade row and the determined blade row cascade structure. In order to optimize the maximum pumping speed of the cascaded blade row cascade structure, adjust the parameters of the new first-stage blade row. Add turbomolecular pump blade rows step by step, and adjust the parameters of each added blade row until the cascaded blade row cascade structure meets the expected pumping speed S max , determine the leaf-row cascade structure as the target first leaf-row cascade structure.

[0069] Furthermore, according to the function of each stage of the turbomolecular pump blade row and the inter-stage cascade characteristics, the pumping speed of the turbomolecular pump is improved in the front-stage blade row cascade structure, and the compression ratio is improved in the rear-stage blade row cascade structure. That is, the desired pumping speed requirement is met during the design of the target first blade row cascade structure, and the desired compression ratio requirement is met during the design of the target second blade row cascade structure. On the basis of the above-mentioned target first blade row cascade structure, the turbomolecular pump blade rows are added step by step, and the parameters of each newly added blade row are adjusted to optimize the compression ratio until the corresponding blade row cascade structure after the current cascade meets the desired compression ratio K. max , the blade row cascade structure is determined as the target second blade row cascade structure. Then, based on the target second blade row cascade structure, fine-tuning is performed in the neighborhood of all the blade row structure parameter values, and a traversal search can be performed in the space formed by the product of all parameter search neighborhoods to find the optimal turbomolecular pump blade row cascade structure with the maximum pumping speed and compression ratio while ensuring that the expected pumping speed and the expected compression ratio are met.

[0070] In order to improve the performance of the turbomolecular pump, such as the pumping speed and compression ratio, and to complete the design of the turbomolecular pump blade row structure under the condition of lower computational complexity, the embodiment of the present application optimizes the turbomolecular pump blade row parameters step by step based on the multi-stage cascade characteristics of the turbomolecular pump. First, a new turbomolecular pump blade row is added, and then the newly added first-stage turbomolecular pump blade row is cascaded with the previous stage, and the design target is optimized by adjusting the parameters after the cascade. According to the cascade characteristics of the turbomolecular pump, the pumping performance of the turbomolecular pump can be optimized first, and then the compression ratio performance can be optimized. Finally, fine-tuning is performed on the parameter neighborhood of the overall blade row cascade structure to obtain the best design solution. Since the pumping and compression ratio are optimized and adjusted separately, the design complexity is reduced. At the same time, the optimization search space is reduced and the computational complexity is reduced by replacing the simultaneous optimization of all blade row parameters with step-by-step optimization.

[0071] In another embodiment of the present disclosure, in the above step S102, the turbomolecular pump blade rows are gradually increased, and the parameters of the blade rows added at each stage are adjusted until a target first blade row cascade structure that meets the desired pumping speed is obtained, including:

[0072] Step 1, adding a turbomolecular pump blade row, adjusting the first blade row parameters, and optimizing the maximum Ho coefficient;

[0073] Step 2, cascading the added first-stage turbomolecular pump blade row with the determined current blade row cascade structure, adjusting the parameters of the second blade row of the newly added stage, optimizing the maximum Ho coefficient of the cascaded blade row cascade structure, and determining the first blade row cascade structure; wherein the first blade row cascade structure includes a first optimal blade row cascade structure that meets the current maximum pumping speed, or includes the first optimal blade row cascade structure and a first alternative blade row cascade structure that meets the current first pumping speed;

[0074] Step 3: when the pumping speed corresponding to the current first optimal blade row cascade structure does not meet the expected pumping speed, the first blade row cascade structure is used as the new current blade row cascade structure, and the process returns to the step of adding a turbomolecular pump blade row and adjusting the parameters of the first blade row;

[0075] Step 4: When the pumping speed corresponding to the current first optimal leaf row cascade structure meets the expected pumping speed, determine the target first leaf row cascade structure according to the first leaf row cascade structure.

[0076] In the embodiment of the present disclosure, in order to make the turbomolecular pump meet the desired pumping speed, the blade row of the turbomolecular pump is gradually increased and the parameters are adjusted. In order to calculate the pumping speed that can be obtained by the turbomolecular pump blade row structure, the blade row can be expanded. Figure 2 is a schematic diagram of the structure of a single-stage leaf row structure, such as Figure 2 As shown, side I can be the inlet side of the blade row structure of this stage, and side II can be the outlet side of the blade row structure of this stage. Among them, the blade row inclination angle is α, the blade thickness is δ, the blade spacing is a, the blade end width is e, and the blade chord length is b. When the blade row rotates, for example, counterclockwise, the movement speed of the blade in the radial direction can be a constant v. The transmission probability coefficient includes M 12 and M 21 , M 12 is the forward transmission probability, that is, the probability of gas molecules passing through the blade row structure from side I to side II, M 21 is the reverse transmission probability, that is, the probability of gas molecules entering side I from side II through the leaf row structure. 12 Greater than the reverse transmission probability M 21 Under such circumstances, a macroscopic suction effect can be formed.

[0077] For the above step 1, add a turbomolecular pump blade row, the transmission probability coefficient M 12 and M 21 The size of can depend on the geometry of the blade row, the blade speed ω and the operating temperature T of the turbomolecular pump. Since the blade speed ω and the operating temperature T of the turbomolecular pump are relatively fixed, the transmission probability coefficient M12 and M 21 The relevant parameters include: blade row inclination angle α, blade row height h, blade number Z and blade thickness δ. The pumping performance of the single-stage blade row structure of the turbomolecular pump is based on the transmission probability coefficient M 12 and M 21 It can be approximated by using the integral equation method, Monte Carlo method, transfer matrix method and angle coefficient method on the basis of single-stage multi-point equivalent leaf row, expressed as: M 12 =f1(α, h, Z, δ), M 21 =f2(α, h, Z, δ). Then we get the transmission probability coefficient M 12 and M 21 After that, it can be determined that the maximum Ho coefficient of the newly added single-stage blade row structure can be expressed as H ’ max =M 12 -M 21 After that, the first leaf row parameters can be adjusted to obtain the maximum Ho coefficient H of the leaf row structure. ’ max The first blade row parameters may include parameters such as blade row inclination angle α, blade row height h, blade number Z, and blade thickness δ. Any blade row structure that can optimize the maximum Ho coefficient through parameter adjustment may be retained.

[0078] For step 2 above, if there is a current blade row cascade structure that has been determined, the newly added first-stage turbomolecular pump blade row is cascaded with the determined current blade row cascade structure. The forward transmission probability P and reverse transmission probability Q of the cascaded blade row cascade structure can be expressed as: Among them, M 12 and M 21 They represent the forward transmission probability and reverse transmission probability of the newly added first-stage turbomolecular pump blade row, N 12 and N 21 They represent the forward transmission probability and reverse transmission probability of the current leaf row cascade structure that has been determined. The maximum Ho coefficient H of the leaf row cascade structure after cascading ’ max It can be expressed as The maximum pumping speed of the blade row cascade structure can be expressed as Where F is the effective area of ​​the blade row channel. By adjusting the parameters of the second blade row of the newly added stage, the maximum Ho coefficient of the blade row cascade structure after cascading can be optimized, and then the maximum pumping speed of the blade row cascade structure after cascading can be optimized to obtain the first blade row cascade structure. The second blade row parameters may include parameters such as blade row inclination angle α, blade row height h, and blade number Z. Since the adjustable parameter range is large, a large number of blade row cascade structures that do not meet the maximum pumping speed will be obtained during the adjustment process. Therefore, the first blade row cascade structure may include the first optimal blade row cascade structure that meets the current maximum pumping speed, or include the first optimal blade row cascade structure and the first alternative blade row cascade structure that meets the current first pumping speed. The first optimal blade row cascade structure may be the blade row cascade structure with the largest pumping speed among all current blade row cascade structures. The magnitude of the first pumping speed may be related to the maximum pumping speed. For example, the magnitude of the first pumping speed may be 50% of the maximum pumping speed, and the blade row cascade structure that meets the first pumping speed is saved as the first alternative blade row cascade structure.

[0079] For the above step 3, when the pumping speed corresponding to the current first optimal blade row cascade structure does not meet the expected pumping speed, the first blade row cascade structure is used as the new current blade row cascade structure, and the process returns to the above step 1 to perform the steps of adding a turbomolecular pump blade row and adjusting the parameters of the first blade row.

[0080] For the above step 4, when the pumping speed corresponding to the current first optimal leaf row cascade structure meets the expected pumping speed, the first optimal leaf row cascade structure in the first leaf row cascade structure can be determined as the target first leaf row cascade structure, or the first optimal leaf row cascade structure in the first leaf row cascade structure and the leaf row cascade structure that meets the expected pumping speed in the first alternative leaf row cascade structure can be determined as the target first leaf row cascade structure.

[0081] By gradually increasing the blade rows and adjusting their parameters, compared with adjusting the blade row parameters of the turbomolecular pump as a whole, the amount of adjusted parameters can be reduced and the calculation complexity can be reduced. In addition, by setting the first pumping speed, a large number of invalid blade row cascade structure design schemes can be reduced, further reducing the optimal blade row cascade structure search space.

[0082] In another embodiment of the present disclosure, in the above step 4, when the pumping speed corresponding to the current first optimal leaf row cascade structure meets the expected pumping speed, determining the target first leaf row cascade structure according to the first leaf row cascade structure includes:

[0083] Step 1: When the pumping speed corresponding to the current first optimal leaf row cascade structure meets the expected pumping speed, the pumping speed corresponding to the first candidate leaf row cascade structure is compared with the expected pumping speed;

[0084] Step 2: Determine the current first optimal blade row cascade structure and the first candidate blade row cascade structure that meets the expected pumping speed as the target first blade row cascade structure.

[0085] In the disclosed embodiment, by screening the first alternative leaf row cascade structure, as many leaf row cascade structures as possible that are effective for the subsequent optimization of the compression ratio can be retained. The first leaf row cascade structure may include a first optimal leaf row cascade structure that satisfies the current maximum pumping speed. When the pumping speed corresponding to the current first optimal leaf row cascade structure satisfies the expected pumping speed, the current first optimal leaf row cascade structure is determined as the target first leaf row cascade structure. Alternatively, the first leaf row cascade structure may include a first optimal leaf row cascade structure and a first alternative leaf row cascade structure that satisfies the current first pumping speed. When the pumping speed corresponding to the current first optimal leaf row cascade structure satisfies the expected pumping speed, for the above step one, the pumping speed corresponding to the first alternative leaf row cascade structure is compared with the expected pumping speed, thereby obtaining the first alternative leaf row cascade structure that satisfies the expected pumping speed. For the above step two, the current first optimal leaf row cascade structure and the first alternative leaf row cascade structure that satisfies the expected pumping speed are determined as the target first leaf row cascade structure. By screening the first candidate blade row cascade structures, it is ensured that the target first blade row cascade structures all meet the expected pumping speed.

[0086] In yet another embodiment of the present disclosure, the first blade row parameters include: blade row inclination angle, blade row height, blade number and blade thickness;

[0087] The second blade row parameters include: blade row inclination angle, blade row height and blade number;

[0088] The current first pumping speed is related to the corresponding current maximum pumping speed.

[0089] In the disclosed embodiment, the adjusted blade row parameter range and the first pumping speed are determined. For a single-stage blade row structure, in order to optimize the maximum Ho coefficient, the first blade row parameter may include parameters such as blade row inclination angle α, blade row height h, blade number Z and blade thickness δ. For a blade row cascade structure, in order to optimize the maximum pumping speed, the second blade row parameter may include parameters such as blade row inclination angle α, blade row height h and blade number Z. In the process of adjusting the second blade row parameter, some blade row cascade structures that do not meet the maximum pumping speed may be obtained, so the first pumping speed is set. The first pumping speed is related to the maximum pumping speed corresponding to the first-stage turbomolecular pump blade row added in step 2 and the determined current blade row cascade structure after cascading. For example, the first pumping speed can be 50% of the maximum pumping speed. The blade row cascade structure that meets the first pumping speed can be retained as the first alternative blade row cascade structure. By limiting the adjusted blade row parameter range to reduce the adjustment parameter range, and determining the first pumping speed, the effectiveness of the first alternative blade row cascade structure is ensured.

[0090] In another embodiment of the present disclosure, in the above step S103, turbomolecular pump blade rows are added step by step on the basis of the target first blade row cascade structure, and parameters of the blade rows added at each stage are adjusted until a target second blade row cascade structure that meets the desired compression ratio is obtained, including:

[0091] Step 1, adding a turbomolecular pump blade row, adjusting the parameters of the third blade row, and optimizing the maximum compression ratio;

[0092] Step 2, cascading the added first-stage turbomolecular pump blade row with the determined current blade row cascade structure, adjusting the parameters of the fourth blade row of the newly added stage, optimizing the maximum compression ratio of the cascaded blade row cascade structure, and determining a second blade row cascade structure; wherein the second blade row cascade structure includes a second optimal blade row cascade structure that meets the current maximum compression ratio, or includes a second optimal blade row cascade structure and a second alternative blade row cascade structure that meets the current first compression ratio;

[0093] Step 3: When the compression ratio corresponding to the current second optimal blade row cascade structure does not meet the expected compression ratio, the second blade row cascade structure is used as the new current blade row cascade structure, and the process returns to the step of adding a turbomolecular pump blade row and adjusting the parameters of the third blade row;

[0094] Step 4: When the compression ratio corresponding to the current second optimal leaf-row cascade structure meets the expected compression ratio, determine a target second leaf-row cascade structure according to the second leaf-row cascade structure.

[0095] In the embodiment of the present disclosure, in order to make the turbomolecular pump meet the desired compression ratio, the blade rows of the turbomolecular pump are gradually increased and the parameters are adjusted based on the target first blade row cascade structure that meets the desired pumping speed. After the gas molecules move in equilibrium on both sides of the blade row structure, Figure 2 As shown in Figure 1, when the number of gas molecules entering side II from side I through the blade row structure is the same as the number of gas molecules entering side I from side II through the blade row, the maximum compression ratio K of the blade row structure can be obtained. max , expressed as: Among them, M 12 and M 21 They are respectively the forward transmission probability and reverse transmission probability of the newly added first-stage turbomolecular pump blade row.

[0096] For the above step 1, adding a turbomolecular pump blade row and adjusting the parameters of the third blade row can increase the maximum compression ratio K of the blade row structure. max The third blade row parameters may include blade row inclination angle α, blade row height h, blade number Z, blade thickness δ, and minimum blade row inner diameter d. Any blade row structure that can optimize the maximum compression ratio by adjusting the parameters may be retained.

[0097] For the above step 2, the added first-stage turbomolecular pump blade row is cascaded with the determined current blade row cascade structure. The maximum compression ratio of the cascaded blade row cascade structure can be expressed as Where P and Q represent the forward transmission probability and reverse transmission probability of the cascaded leaf row cascade structure respectively. Adjusting the parameters of the newly added fourth leaf row can increase the maximum compression ratio K of the cascaded leaf row cascade structure. max Optimization is performed to obtain a second blade row cascade structure, and the fourth blade row parameters may include parameters such as blade row inclination angle α, blade row height h, number of blades Z, and minimum blade row inner diameter d. Since the adjustable parameter range is large, a large number of blade row cascade structures that do not meet the maximum compression ratio will be obtained during the adjustment process. Therefore, the second blade row cascade structure may include a second optimal blade row cascade structure that meets the current maximum compression ratio, or include a second optimal blade row cascade structure and a second alternative blade row cascade structure that meets the current first compression ratio. The second optimal blade row cascade structure may be a blade row cascade structure with the largest compression ratio among all current blade row cascade structures. The size of the first compression ratio may be related to the maximum compression ratio. For example, the size of the first compression ratio may be 80% of the maximum compression ratio, and the blade row cascade structure that meets the first compression ratio is saved as the second alternative blade row cascade structure.

[0098] For the above step 3, when the compression ratio corresponding to the current second optimal blade row cascade structure does not meet the expected compression ratio, the second blade row cascade structure is used as the new current blade row cascade structure, and the process returns to the above step 1 to execute the steps of adding a turbomolecular pump blade row and adjusting the parameters of the third blade row.

[0099] With respect to the above step 4, when the compression ratio corresponding to the current second optimal leaf row cascade structure meets the expected compression ratio, the second optimal leaf row cascade structure in the second leaf row cascade structure can be determined as the target second leaf row cascade structure. Only the optimal leaf row cascade structure is passed to the subsequent parameter adjustment step, which can reduce the amount of calculation and ensure that the optimal leaf row cascade structure can meet the design goal.

[0100] By gradually increasing the blade rows and adjusting their parameters, compared with adjusting the blade row parameters of the turbomolecular pump as a whole, the amount of adjusted parameters can be reduced and the calculation complexity can be reduced. In addition, by setting the first compression ratio, a large number of invalid blade row cascade structure design schemes can be reduced, further reducing the optimal blade row cascade structure search space.

[0101] In another embodiment of the present disclosure, in the above step 4, when the compression ratio corresponding to the current second optimal leaf row cascade structure meets the expected compression ratio, determining the target second leaf row cascade structure according to the second leaf row cascade structure includes:

[0102] When the compression ratio corresponding to the current second optimal leaf-row cascade structure satisfies the expected compression ratio, the current second optimal leaf-row cascade structure is determined as the target second leaf-row cascade structure.

[0103] In the disclosed embodiment, when the compression ratio corresponding to the second optimal leaf row cascade structure meets the expected compression ratio, only the second optimal leaf row cascade structure is retained as the object of subsequent adjustment and optimization. The second leaf row cascade structure may include the second optimal leaf row cascade structure that meets the current maximum compression ratio, or may include the second optimal leaf row cascade structure and the second alternative leaf row cascade structure that meets the current first compression ratio. When the compression ratio corresponding to the current second optimal leaf row cascade structure meets the expected compression ratio, the current second optimal leaf row cascade structure is determined as the target second leaf row cascade structure to reduce the amount of calculation while ensuring that the target second leaf row cascade structure can meet the design goal.

[0104] In yet another embodiment of the present disclosure, the third blade row parameter includes: blade row inclination angle, blade row height, number of blades, blade thickness and minimum blade row inner diameter;

[0105] The fourth blade row parameters include: blade row inclination angle, blade row height, blade number and minimum blade row inner diameter;

[0106] The current first compression ratio is associated with the corresponding current maximum compression ratio.

[0107] In the disclosed embodiment, the adjusted blade row parameter range and the first compression ratio are determined. For a single-stage blade row structure, in order to optimize the maximum compression ratio, the third blade row parameter may include parameters such as blade row inclination angle α, blade row height h, blade number Z, blade thickness δ, and minimum blade row inner diameter d. For a blade row cascade structure, in order to optimize the maximum compression ratio, the fourth blade row parameter may include parameters such as blade row inclination angle α, blade row height h, blade number Z, and minimum blade row inner diameter d. In the process of adjusting the fourth blade row parameter, some blade row cascade structures that do not meet the maximum pumping speed may be obtained, so the first compression ratio is set. The first compression ratio is related to the maximum compression ratio corresponding to the cascade of the first-stage turbomolecular pump blade row added in step 2 and the determined current blade row cascade structure. For example, the first compression ratio can be 80% of the maximum compression ratio. The blade row cascade structure that meets the first compression ratio can be retained as the second alternative blade row cascade structure. By limiting the adjusted blade row parameter range to reduce the adjustment parameter range, and determining the first compression ratio, the effectiveness of the second alternative blade row cascade structure is ensured.

[0108] In another embodiment of the present disclosure, in the above step S104, the target second leaf row cascade structure is fine-tuned and optimized as a whole to determine the final leaf row structure, including:

[0109] Step 1, determine the maximum Ho coefficient of the turbomolecular pump;

[0110] Step 2: according to the leaf row parameters of each level of the target second leaf row cascade structure, corresponding search neighborhoods are set for the leaf row parameters of each level;

[0111] Step 3: Determine the first search space according to the product of the search neighborhood;

[0112] Step 4: According to the maximum compression ratio corresponding to the target second blade row cascade structure and the maximum Ho coefficient of the turbomolecular pump, the parameters of each blade row are traversed and optimized in the first search space to determine the optimal blade row parameters that meet the expected pumping speed and the expected compression ratio, and determine the final blade row structure.

[0113] In the disclosed embodiment, the leaf row parameters corresponding to each leaf row of the target second leaf row cascade structure are fine-tuned within the corresponding search neighborhood. Based on the optimal target second leaf row cascade structure, the leaf row structure parameter values ​​of all stages of the turbomolecular pump are fine-tuned within the neighborhood to obtain the optimal turbomolecular pump leaf row structure that meets the design target. For the above step 1, the maximum Ho coefficient H of the turbomolecular pump is first determined. max For the above step 2, the blade row parameters of each level of the target second blade row cascade structure include parameters such as blade row inclination angle α, blade row height h, blade number Z and blade thickness δ. For example, the blade row parameters of the i-th layer of the target second blade row cascade structure are respectively expressed as α i0 、h i0 , Z i0 , δ i0 . Taking the parameter value ±0.05 as the search neighborhood, it can be expressed as: α i ∈[0.95α i0 , 1.05α i0 ]、h i ∈[0.95h i0 , 1.05h i0 ]、Z i ∈[0.95Z i0 , 1.05Z i0 ],δ i ∈[0.95δ i0 , 1.05δ i0 ]. For the above step 3, the product of all parameters in the search neighborhood constitutes the first search space. For the above step 4, in the first search space, the pumping speed and compression ratio are used as the optimization objectives for traversal search, and the optimal turbomolecular pump blade row cascade structure with the maximum pumping speed and compression ratio is found under the premise of ensuring that the expected pumping speed and the expected compression ratio are met. The optimization solution objective of this step can be expressed as:

[0114] In another embodiment of the present disclosure, in the above step 1, determining the maximum Ho coefficient of the turbomolecular pump includes:

[0115] Step 1: Obtain the constraints of the turbomolecular pump;

[0116] Step 2: Determine the maximum Ho coefficient of the turbomolecular pump based on the constraints and the desired pumping speed;

[0117] The conditions include: the maximum outer diameter and the minimum inner diameter of the turbomolecular pump blade row, the operating temperature, the type of extracted gas and the operating speed.

[0118] In the embodiment of the present disclosure, the maximum Ho coefficient of the turbomolecular pump is determined by the constraints of the turbomolecular pump and the desired pumping speed. For the above step 1, the constraints of the turbomolecular pump are obtained, and the constraints include the maximum outer diameter D, the minimum inner diameter d, the operating temperature T, the type of extracted gas, the turbomolecular pump operating speed ω and other parameters allowed by the turbomolecular pump blade row. According to the obtained gas type, the molar molecular mass M of the gas can be determined. For the above step 2, the constraints of the turbomolecular pump and the desired pumping speed S max , the maximum Ho coefficient H of the turbomolecular pump can be determined max , whose expression is The maximum Ho coefficient of the turbomolecular pump can be used to fine-tune the parameter values ​​of the blade rows of all stages of the turbomolecular pump in a neighborhood, so as to obtain the optimal turbomolecular pump blade row structure that meets the design objectives.

[0119] In another embodiment of the present disclosure, the method further includes:

[0120] Outputting at least one of the following blade row parameters corresponding to each blade row of each stage of the turbomolecular pump: blade row inclination angle, blade row height, number of blades, blade row outer diameter and blade row inner diameter;

[0121] In the case where the blade row inclination angle varies with the blade row radius, the blade row inclination angle includes blade row inclination angle values ​​at preset scattered points within the blade row radius variation range.

[0122] In the disclosed embodiment, the output is the final blade row structure content. In the stage of outputting the final blade row structure, the output content includes: at least one of the following blade row parameters corresponding to each stage of the turbomolecular pump blade row: blade row inclination angle, blade row height, number of blades, blade row outer diameter, and blade row inner diameter. In the case where the blade row inclination angle varies with the blade row radius, for the blade row inclination angle parameter, it includes the blade row inclination angle value at the preset scattered points within the blade row radius variation range. For example, at least 10 equally spaced discrete points are selected within the blade row radius variation range, and the blade row inclination angle value at each discrete point is output.

[0123] In another embodiment of the present disclosure, it also includes:

[0124] Step 1: for the first-stage turbomolecular pump blade row, adjusting the first blade row parameters, optimizing the maximum Ho coefficient, and obtaining the first-stage blade row structure;

[0125] Step 2: adjusting the second blade row parameters of the first-stage blade row structure to determine the adjusted first-stage blade row structure; wherein the adjusted first-stage blade row structure includes: an optimal first-stage blade row structure that meets the current maximum pumping speed, or includes the optimal first-stage blade row structure and an alternative first-stage blade row structure that meets the current first pumping speed;

[0126] Step 3: when the pumping speed corresponding to the adjusted first-stage blade row structure does not meet the expected pumping speed, performing the step of adding a turbomolecular pump blade row and adjusting the first blade row parameters;

[0127] Step 4: When the pumping speed corresponding to the adjusted first-stage leaf row structure meets the expected pumping speed, determine the target first-stage leaf row cascade structure according to the adjusted first-stage leaf row structure.

[0128] In the embodiment of the present disclosure, the parameters of the first-stage turbomolecular pump blade row are adjusted to determine whether the adjusted first-stage turbomolecular pump blade row meets the expected pumping speed. ’ max Optimization is performed, and the first blade row parameters may include parameters such as blade row inclination angle α, blade row height h, number of blades Z, and blade thickness δ. Any blade row structure obtained by optimizing the maximum Ho coefficient through parameter adjustment can be retained, thereby obtaining the first-level blade row structure. For the above step 2, the second blade row parameter adjustment is performed on the first-level blade row structure, and the maximum pumping speed of the first-level blade row structure can be optimized. The second blade row parameters may include parameters such as blade row inclination angle α, blade row height h, and number of blades Z to determine the adjusted first-level blade row structure. Since the adjustable parameter range is large, a large number of blade row structures that do not meet the maximum pumping speed will be obtained during the adjustment process. Therefore, the adjusted first-level blade row structure includes: the optimal first-level blade row structure that meets the current maximum pumping speed, or includes the optimal first-level blade row structure and the alternative first-level blade row structure that meets the current first pumping speed. The optimal first-level blade row structure can be the blade row structure with the highest pumping speed among all current blade row structures. The magnitude of the first pumping speed may be related to the maximum pumping speed. For example, the magnitude of the first pumping speed may be 50% of the maximum pumping speed. The leaf row structure that meets the first pumping speed is saved as an alternative first-stage leaf row structure. With respect to the above step 3, if the pumping speed corresponding to the adjusted first-stage leaf row structure does not meet the expected pumping speed, Figure 3As shown, the step of adding a turbomolecular pump blade row and adjusting the first blade row parameters is performed in S302. With respect to the above step 4, when the pumping speed corresponding to the adjusted first-stage blade row structure meets the expected pumping speed, the optimal first-stage blade row structure in the adjusted first-stage blade row structure can be determined as the target first blade row cascade structure, and the optimal first-stage blade row structure in the adjusted first-stage blade row structure and the blade row structure whose pumping speed meets the expected pumping speed in the alternative first-stage blade row structure can also be determined as the target first blade row cascade structure.

[0129] Figure 3 A flow chart for determining the blade row structure of a turbomolecular pump provided in an embodiment of the present disclosure. Figure 3 As shown, including:

[0130] S301, obtaining a desired pumping speed and a desired compression ratio;

[0131] S302, adding a turbomolecular pump blade row, adjusting the first blade row parameters, and optimizing the maximum Ho coefficient;

[0132] S303, judging whether there is a determined current leaf column cascade structure, if so, proceeding to step S304, if not, proceeding to step S305;

[0133] S304, cascading the added first-stage turbomolecular pump blade row with the determined current blade row cascade structure, and adjusting the parameters of the second blade row of the newly added stage to determine the first blade row cascade structure;

[0134] S305, adjusting the second leaf row parameter of the leaf row structure to determine the adjusted leaf row structure;

[0135] S306, judging whether the expected pumping speed is met, if so, proceeding to step S307, if not, proceeding to step S302;

[0136] S307, determining the target first leaf row cascade structure;

[0137] S308, adding a turbomolecular pump blade row, adjusting the parameters of the third blade row, and optimizing the maximum compression ratio;

[0138] S309, cascading the added first-stage turbomolecular pump blade row with the determined current blade row cascade structure, and adjusting the parameters of the fourth blade row of the newly added stage to determine the second blade row cascade structure;

[0139] S310, determine whether the expected compression ratio is met, if yes, proceed to step S311, if no, proceed to step S308;

[0140] S311, determining a target second leaf row cascade structure;

[0141] S312: Perform overall fine-tuning and optimization on the target second leaf row cascade structure to determine the final leaf row structure; this process ends.

[0142] Based on the same disclosed concept, the embodiments of the present disclosure also provide a device and equipment for determining the blade row structure of a turbomolecular pump. Since the principles of the problems solved by these devices and equipment are similar to those of the aforementioned method for determining the blade row structure of a turbomolecular pump, the implementation of the device and equipment can refer to the implementation of the aforementioned method, and the repeated parts will not be repeated.

[0143] The present disclosure provides a device for determining the blade row structure of a turbomolecular pump, such as Figure 4 As shown, including:

[0144] An acquisition module 401 is used to acquire a desired pumping speed and a desired compression ratio;

[0145] A first parameter adjustment module 402 is used to increase the turbomolecular pump blade row step by step, and adjust the parameters of the blade row added at each stage until a target first blade row cascade structure that meets the desired pumping speed is obtained;

[0146] A second parameter adjustment module 403 is used to gradually increase the turbomolecular pump blade rows on the basis of the target first blade row cascade structure, and adjust the parameters of each added blade row until a target second blade row cascade structure that meets the desired compression ratio is obtained;

[0147] The determination module 404 is used to perform overall fine-tuning optimization on the target second leaf row cascade structure to determine a final leaf row structure.

[0148] In another embodiment of the present disclosure, the first parameter adjustment module 402 is used to add a first-stage turbomolecular pump blade row, adjust the first blade row parameters, and optimize the maximum Ho coefficient;

[0149] Cascading the added first-stage turbomolecular pump blade row with the determined current blade row cascade structure, adjusting the parameters of the second blade row of the newly added stage, optimizing the maximum Ho coefficient of the cascaded blade row cascade structure, and determining a first blade row cascade structure; wherein the first blade row cascade structure includes a first optimal blade row cascade structure that meets the current maximum pumping speed, or includes the first optimal blade row cascade structure and a first alternative blade row cascade structure that meets the current first pumping speed;

[0150] When the pumping speed corresponding to the current first optimal blade row cascade structure does not meet the expected pumping speed, the first blade row cascade structure is used as a new current blade row cascade structure, and the steps of adding a turbomolecular pump blade row and adjusting the first blade row parameters are returned to execute;

[0151] In a case where the pumping speed corresponding to the current first optimal leaf row cascade structure meets the expected pumping speed, the target first leaf row cascade structure is determined according to the first leaf row cascade structure.

[0152] In another embodiment of the present disclosure, the first parameter adjustment module 402 is used to compare the pumping speed corresponding to the first candidate leaf row cascade structure with the expected pumping speed when the pumping speed corresponding to the current first optimal leaf row cascade structure meets the expected pumping speed;

[0153] The current first optimal blade row cascade structure and the first candidate blade row cascade structure that meets the desired pumping speed are determined as the target first blade row cascade structure.

[0154] In another embodiment of the present disclosure,

[0155] The first blade row parameters include: blade row inclination angle, blade row height, blade number and blade thickness;

[0156] The second blade row parameters include: blade row inclination angle, blade row height and blade number;

[0157] The current first pumping speed is related to the corresponding current maximum pumping speed.

[0158] In another embodiment of the present disclosure, the second parameter adjustment module 403 is used to add a turbomolecular pump blade row, adjust the third blade row parameters, and optimize the maximum compression ratio;

[0159] Cascading the added first-stage turbomolecular pump blade row with the determined current blade row cascade structure, adjusting the parameters of the fourth blade row of the newly added stage, optimizing the maximum compression ratio of the cascaded blade row cascade structure, and determining a second blade row cascade structure; wherein the second blade row cascade structure includes a second optimal blade row cascade structure that meets the current maximum compression ratio, or includes the second optimal blade row cascade structure and a second alternative blade row cascade structure that meets the current first compression ratio;

[0160] When the compression ratio corresponding to the current second optimal blade row cascade structure does not meet the expected compression ratio, the second blade row cascade structure is used as a new current blade row cascade structure, and the steps of adding a turbomolecular pump blade row and adjusting the parameters of the third blade row are returned to be executed;

[0161] When the compression ratio corresponding to the current second optimal leaf-row cascade structure satisfies the expected compression ratio, the target second leaf-row cascade structure is determined according to the second leaf-row cascade structure.

[0162] In another embodiment of the present disclosure, the second parameter adjustment module 403 is used to determine the current second optimal leaf row cascade structure as the target second leaf row cascade structure when the compression ratio corresponding to the current second optimal leaf row cascade structure meets the expected compression ratio.

[0163] In another embodiment of the present disclosure,

[0164] The third blade row parameters include: blade row inclination angle, blade row height, blade number, blade thickness and minimum blade row inner diameter;

[0165] The fourth blade row parameters include: blade row inclination angle, blade row height, number of blades and minimum blade row inner diameter;

[0166] The current first compression ratio is related to the corresponding current maximum compression ratio.

[0167] In yet another embodiment of the present disclosure, the determination module 404 is used to determine the maximum Ho coefficient of the turbomolecular pump;

[0168] According to the leaf row parameters of each level of the target second leaf row cascade structure, setting corresponding search neighborhoods for the leaf row parameters of each level respectively;

[0169] Determining a first search space according to the product of the search neighborhoods;

[0170] According to the maximum compression ratio corresponding to the target second blade row cascade structure and the maximum Ho coefficient of the turbomolecular pump, the blade row parameters of each stage are traversed and optimized in the first search space to determine the optimal blade row parameters that meet the expected pumping speed and the expected compression ratio, and to determine the final blade row structure.

[0171] In yet another embodiment of the present disclosure, the determination module 404 is used to obtain the constraint conditions of the turbomolecular pump;

[0172] Determining a maximum Ho coefficient of the turbomolecular pump according to the constraint condition and the desired pumping speed;

[0173] The constraints include: the maximum outer diameter and the minimum inner diameter of the turbomolecular pump blade row, the operating temperature, the type of extracted gas and the operating rotation speed.

[0174] In another embodiment of the present disclosure, the determination module 404 is further configured to output at least one of the following blade row parameters corresponding to each blade row of each stage of the turbomolecular pump: blade row inclination angle, blade row height, number of blades, blade row outer diameter, and blade row inner diameter;

[0175] Wherein, in the case where the blade row inclination angle varies with the blade row radius, the blade row inclination angle includes blade row inclination angle values ​​at preset scattered points within the blade row radius variation range.

[0176] In yet another embodiment of the present disclosure, the first parameter adjustment module 402 is further configured to:

[0177] For the first-stage turbomolecular pump blade row, the first-stage blade row parameters are adjusted, the maximum Ho coefficient is optimized, and the first-stage blade row structure is obtained;

[0178] Performing a second blade row parameter adjustment on the first-stage blade row structure to determine an adjusted first-stage blade row structure; wherein the adjusted first-stage blade row structure includes: an optimal first-stage blade row structure that meets the current maximum pumping speed, or includes the optimal first-stage blade row structure and an alternative first-stage blade row structure that meets the current first pumping speed;

[0179] When the pumping speed corresponding to the adjusted first-stage blade row structure does not meet the expected pumping speed, performing the step of adding a turbomolecular pump blade row and adjusting the first blade row parameters;

[0180] In a case where the pumping speed corresponding to the adjusted first-stage leaf row structure meets the expected pumping speed, the target first leaf row cascade structure is determined according to the adjusted first-stage leaf row structure.

[0181] An embodiment of the present disclosure provides a device for determining the blade row structure of a turbomolecular pump, comprising: a device for determining the blade row structure of a turbomolecular pump as described in any of the above embodiments.

[0182] Through the description of the above implementation methods, those skilled in the art can clearly understand that the embodiments of the present disclosure can be implemented by hardware, or by means of software plus a necessary general hardware platform. Based on such an understanding, the technical solution of the embodiments of the present disclosure can be embodied in the form of a software product, which can be stored in a non-volatile storage medium (which can be a CD-ROM, a USB flash drive, a mobile hard disk, etc.), including a number of instructions for enabling a computer device (which can be a personal computer, a server, or a network device, etc.) to execute the methods described in each embodiment of the present disclosure.

[0183] Those skilled in the art will appreciate that the accompanying drawings are merely schematic diagrams of a preferred embodiment, and the modules or processes in the accompanying drawings are not necessarily required for implementing the present disclosure.

[0184] Those skilled in the art can understand that the modules in the device in the embodiment can be distributed in the device in the embodiment according to the description of the embodiment, or can be changed accordingly and located in one or more devices different from the present embodiment. The modules in the above embodiment can be combined into one module, or can be further divided into multiple sub-modules.

[0185] The serial numbers of the above-mentioned embodiments of the present disclosure are only for description and do not represent the advantages or disadvantages of the embodiments.

[0186] Obviously, those skilled in the art can make various changes and modifications to the present disclosure without departing from the spirit and scope of the present disclosure. Thus, if these modifications and variations of the present disclosure fall within the scope of the claims of the present disclosure and their equivalents, the present disclosure is also intended to include these modifications and variations.

Claims

1. A method for determining the blade row structure of a turbomolecular pump, characterized in that: include: Obtain the expected pumping speed and expected compression ratio; gradually increasing the number of turbine molecular pump blades, and adjusting the parameters of the blades added at each stage until a target first blade row cascade structure that meets the desired pumping speed is obtained; Adding turbomolecular pump blade rows step by step on the basis of the target first blade row cascade structure, and adjusting parameters of the blade rows added at each stage until a target second blade row cascade structure that meets the desired compression ratio is obtained; The target second leaf row cascade structure is fine-tuned and optimized as a whole to determine a final leaf row structure.

2. The method according to claim 1, characterized in that The step of gradually increasing the turbomolecular pump blade rows and adjusting the parameters of the blade rows added at each stage until a target first blade row cascade structure that meets the desired pumping speed is obtained includes: Add one more turbomolecular pump blade row, adjust the first blade row parameters, and optimize the maximum Ho coefficient; Cascading the added first-stage turbomolecular pump blade row with the determined current blade row cascade structure, adjusting the parameters of the second blade row of the newly added stage, optimizing the maximum Ho coefficient of the cascaded blade row cascade structure, and determining a first blade row cascade structure; wherein the first blade row cascade structure includes a first optimal blade row cascade structure that meets the current maximum pumping speed, or includes the first optimal blade row cascade structure and a first alternative blade row cascade structure that meets the current first pumping speed; When the pumping speed corresponding to the current first optimal blade row cascade structure does not meet the expected pumping speed, the first blade row cascade structure is used as a new current blade row cascade structure, and the steps of adding a turbomolecular pump blade row and adjusting the first blade row parameters are returned to execute; In a case where the pumping speed corresponding to the current first optimal leaf row cascade structure meets the expected pumping speed, the target first leaf row cascade structure is determined according to the first leaf row cascade structure.

3. The method according to claim 2, characterized in that The step of determining the target first leaf row cascade structure according to the first leaf row cascade structure when the pumping speed corresponding to the current first optimal leaf row cascade structure meets the expected pumping speed includes: When the pumping speed corresponding to the current first optimal leaf row cascade structure meets the expected pumping speed, comparing the pumping speed corresponding to the first candidate leaf row cascade structure with the expected pumping speed; The current first optimal blade row cascade structure and the first candidate blade row cascade structure that meets the desired pumping speed are determined as the target first blade row cascade structure.

4. The method according to claim 2, characterized in that The first blade row parameters include: blade row inclination angle, blade row height, blade number and blade thickness; The second blade row parameters include: blade row inclination angle, blade row height and blade number; The current first pumping speed is related to the corresponding current maximum pumping speed.

5. The method according to claim 1, characterized in that The step of gradually adding turbomolecular pump blade rows on the basis of the target first blade row cascade structure and adjusting parameters of each added blade row until a target second blade row cascade structure satisfying the desired compression ratio is obtained includes: Add one more turbomolecular pump blade row, adjust the parameters of the third blade row, and optimize the maximum compression ratio; Cascading the added first-stage turbomolecular pump blade row with the determined current blade row cascade structure, adjusting the parameters of the fourth blade row of the newly added stage, optimizing the maximum compression ratio of the cascaded blade row cascade structure, and determining a second blade row cascade structure; wherein the second blade row cascade structure includes a second optimal blade row cascade structure that meets the current maximum compression ratio, or includes the second optimal blade row cascade structure and a second alternative blade row cascade structure that meets the current first compression ratio; When the compression ratio corresponding to the current second optimal blade row cascade structure does not meet the expected compression ratio, the second blade row cascade structure is used as a new current blade row cascade structure, and the steps of adding a turbomolecular pump blade row and adjusting the parameters of the third blade row are returned to be executed; When the compression ratio corresponding to the current second optimal leaf-row cascade structure satisfies the expected compression ratio, the target second leaf-row cascade structure is determined according to the second leaf-row cascade structure.

6. The method according to claim 5, characterized in that The step of determining the target second leaf row cascade structure according to the second leaf row cascade structure when the compression ratio corresponding to the current second optimal leaf row cascade structure satisfies the expected compression ratio includes: When the compression ratio corresponding to the current second optimal leaf-row cascade structure satisfies the expected compression ratio, the current second optimal leaf-row cascade structure is determined as the target second leaf-row cascade structure.

7. The method according to claim 5, characterized in that The third blade row parameters include: blade row inclination angle, blade row height, blade number, blade thickness and minimum blade row inner diameter; The fourth blade row parameters include: blade row inclination angle, blade row height, number of blades and minimum blade row inner diameter; The current first compression ratio is related to the corresponding current maximum compression ratio.

8. The method according to claim 1, characterized in that The overall fine-tuning and optimizing of the target second leaf row cascade structure to determine the final leaf row structure includes: determining a maximum Ho coefficient of the turbomolecular pump; According to the leaf row parameters of each level of the target second leaf row cascade structure, setting corresponding search neighborhoods for the leaf row parameters of each level respectively; Determining a first search space according to the product of the search neighborhoods; According to the maximum compression ratio corresponding to the target second blade row cascade structure and the maximum Ho coefficient of the turbomolecular pump, the blade row parameters of each stage are traversed and optimized in the first search space to determine the optimal blade row parameters that meet the expected pumping speed and the expected compression ratio, and to determine the final blade row structure.

9. The method according to claim 8, characterized in that Determining the maximum Ho coefficient of the turbomolecular pump includes: Obtaining constraints of the turbomolecular pump; Determining a maximum Ho coefficient of the turbomolecular pump according to the constraint condition and the desired pumping speed; The constraints include: the maximum outer diameter and the minimum inner diameter of the turbomolecular pump blade row, the operating temperature, the type of extracted gas and the operating rotation speed.

10. The method according to claim 1, characterized in that The method further comprises: Outputting at least one of the following blade row parameters corresponding to each blade row of the turbomolecular pump: blade row inclination angle, blade row height, number of blades, blade row outer diameter, and blade row inner diameter; Wherein, in the case where the blade row inclination angle varies with the blade row radius, the blade row inclination angle includes blade row inclination angle values ​​at preset scattered points within the blade row radius variation range.

11. The method according to claim 2, characterized in that Also includes: For the first-stage turbomolecular pump blade row, the first-stage blade row parameters are adjusted, the maximum Ho coefficient is optimized, and the first-stage blade row structure is obtained; Performing a second blade row parameter adjustment on the first-stage blade row structure to determine an adjusted first-stage blade row structure; wherein the adjusted first-stage blade row structure includes: an optimal first-stage blade row structure that meets the current maximum pumping speed, or includes the optimal first-stage blade row structure and an alternative first-stage blade row structure that meets the current first pumping speed; When the pumping speed corresponding to the adjusted first-stage blade row structure does not meet the expected pumping speed, performing the step of adding a turbomolecular pump blade row and adjusting the first blade row parameters; In a case where the pumping speed corresponding to the adjusted first-stage leaf row structure meets the expected pumping speed, the target first leaf row cascade structure is determined according to the adjusted first-stage leaf row structure.

12. A device for determining the blade row structure of a turbomolecular pump, characterized in that: include: An acquisition module, used for acquiring a desired pumping speed and a desired compression ratio; A first parameter adjustment module is used to increase the turbomolecular pump blade row step by step, and adjust the parameters of the blade row added at each stage until a target first blade row cascade structure that meets the desired pumping speed is obtained; A second parameter adjustment module is used to gradually increase the turbomolecular pump blade row on the basis of the target first blade row cascade structure, and adjust the parameters of each added blade row until a target second blade row cascade structure that meets the desired compression ratio is obtained; A determination module is used to perform overall fine-tuning and optimization on the target second leaf row cascade structure to determine a final leaf row structure.

13. A device for determining the blade row structure of a turbomolecular pump, characterized in that: include: A device for determining the blade row structure of a turbomolecular pump as claimed in claim 12.

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