Piezoelectric driving device

Abstract

The invention belongs to a jig for semiconductor production, and particularly relates to a piezoelectric driving device which comprises a base. The vibrator comprises a base part and a function part, the base part is fixedly connected with the base, the function part is flexibly hinged to the base part, and a power output end is arranged on the function part; the piezoelectric stack group is connected with the functional part, the piezoelectric stack group is configured to be capable of driving the power output end to vibrate along an elliptical path, and the elliptical path is divided into a first half path and a second half path by taking the long axis of the elliptical path as a boundary; the retaining part is movably matched with the base in the direction parallel to the short axis of the elliptical path; and the holding part is flexibly connected with the functional part through a force transmission component. According to the invention, the retaining part is additionally arranged on the vibrator, and the movement period of the retaining part is consistent with the movement period of the vibrator driving end, so that the side wall of the sliding table can be pressed tightly when the vibrator driving end resets, the sliding table is prevented from moving reversely, and the side wall of the sliding table is loosened when the vibrator driving end drives the sliding table to feed, and the movement resistance of the sliding table is reduced.

Description

Technical Field

[0001] The invention belongs to a jig for semiconductor production, and in particular relates to a piezoelectric driving device. Background Art

[0002] Semiconductor devices need to be fixed and displaced with high precision during the production process. The existing technology generally uses a piezoelectric micro-motion platform to achieve this function. The working principle of the piezoelectric micro-motion platform is to use the electrical energy-mechanical energy conversion characteristics of the piezoelectric material to transfer the tiny deformation of the piezoelectric material after power is applied to the displacement platform, thereby realizing the nano-scale movement of the platform; for example, applying an alternating electric field to the piezoelectric material to make it vibrate, and this vibration is transmitted to the vibrator. The vibrator structure is specially designed to convert the vibration into a reciprocating motion of a specific path, such as Figure 1 The elliptical trajectory shown in FIG. 1 is used to drive the displacement platform to move in one half of the elliptical trajectory, and the other half of the elliptical trajectory is used to reset the oscillator driving end, as shown in FIG. Figure 2 However, in practical applications, the vibrator driving end often cannot be separated from the displacement platform in time during the resetting process. Due to the short-term stickiness between the vibrator driving end and the displacement platform, the displacement platform will produce reverse displacement. The law of its displacement changing with time is as follows: Figure 3 As shown, this results in the system being unable to accurately control the displacement of the displacement platform, thus affecting production quality. Summary of the invention

[0003] In view of the above-mentioned shortcomings of the prior art, an object of the present invention is to provide a piezoelectric drive device capable of improving motion accuracy.

[0004] To achieve the above-mentioned and other related purposes, the present invention provides a piezoelectric driving device, comprising: Base; A vibrator, the vibrator comprising a base and a functional part, the base is fixedly connected to the base, the functional part is flexibly hinged to the base, and the functional part is provided with a power output end; A piezoelectric stacking group connected to the functional part, wherein the piezoelectric stacking group is configured to drive the power output end to vibrate along an elliptical path, wherein the elliptical path is divided into a first half and a second half by its major axis; The holding portion is movably cooperated with the base along a direction parallel to the short axis of the elliptical path; the holding portion is flexibly connected to the functional portion through a force transmission component, and the force transmission component is configured as follows: when the power output end moves along the first half-stroke, the force transmission component drives the holding portion away from the side where the first half-stroke is located, and when the power output end moves along the second half-stroke, the force transmission component drives the holding portion close to the side where the first half-stroke is located.

[0005] In an optional embodiment of the present invention, the force transmitting member includes a swinging part and an elastic buffer part, the first end of the swinging part is flexibly hinged to the functional part, the second end of the swinging part is flexibly hinged to the first end of the elastic buffer part, and the second end of the elastic buffer part is fixedly connected to the retaining part; the first area of ​​the swinging part is pivotally connected to the base, and the first area is a partial area between the first end and the second end of the swinging part.

[0006] In an optional embodiment of the present invention, a protrusion is provided on the side of the swinging part away from the first half, a support is provided on the base, the support is provided with a limiting groove cooperating with the protrusion, the protrusion is accommodated in the limiting groove, and the swinging part can swing with the limiting groove as a fulcrum.

[0007] In an optional embodiment of the present invention, the second end of the swing portion is located on a side of the first end of the elastic buffer portion close to the first half.

[0008] In an optional embodiment of the present invention, the functional part includes a first vibration arm and a second vibration arm, one end of the first vibration arm and the second vibration arm are fixedly connected, and the two are arranged at an angle, the other ends of the first vibration arm and the second vibration arm are flexibly hinged to the base respectively, the positive angle of the connecting end of the first vibration arm and the second vibration arm constitutes the power output end, the force transmission component is connected to the first vibration arm and / or the second vibration arm, and the force transmission component is arranged close to the power output end.

[0009] In an optional embodiment of the present invention, a material reduction hole is respectively provided at one end of the first vibration arm and the second vibration arm close to the base.

[0010] In an optional embodiment of the present invention, the piezoelectric stack group includes two piezoelectric stack bodies, one end of one of the piezoelectric stack bodies is connected to the first vibration arm, one end of the other piezoelectric stack body is connected to the second vibration arm, and the other ends of the two piezoelectric stack bodies are connected to the base or the base.

[0011] In an optional embodiment of the present invention, it also includes a slide, which is slidably arranged relative to the base along a direction parallel to the major axis of the elliptical path, the slide is located beside the vibrator, and the first side wall of the slide is adjacent to or in contact with the power output end and the retaining portion.

[0012] In an optional embodiment of the present invention, a guard plate parallel to the first side wall is provided on the base adjacent to the first side wall, and the guard plate is provided with a notch for avoiding the power output end and a limiting groove for limiting the movement direction of the retaining part.

[0013] In an optional embodiment of the present invention, the base includes a first substrate and a second substrate, the slide is mounted on the first substrate, the vibrator is mounted on the second substrate, the second substrate is movably connected to the first substrate along a direction parallel to the short axis of the elliptical path, and a locking mechanism is provided between the second substrate and the first substrate, and the locking mechanism is configured to be able to maintain the second substrate at multiple positions within the active stroke, and to be able to release the second substrate from multiple positions within the active stroke.

[0014] The technical effect of the present invention is that by adding a retaining portion to the vibrator and making its movement cycle consistent with the movement cycle of the vibrator driving end, the present invention can press the side wall of the slide when the vibrator driving end is reset to prevent the slide from reversing, and release the side wall of the slide when the vibrator driving end drives the slide to feed, thereby reducing the movement resistance of the slide. This design effectively solves the problem of reverse displacement caused by short-term adhesion between the vibrator driving end and the side wall of the slide when resetting, significantly improves the overall movement accuracy of the slide, thereby improving the positioning accuracy and production quality in the production process of semiconductor devices. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the motion trajectory of the vibrator driving end of the piezoelectric micro-motion platform in the no-load state; Figure 2 It is a schematic diagram of the motion trajectory when the vibrator driving end of the piezoelectric micro-motion platform cooperates with the displacement platform; Figure 3 It is a curve diagram of the displacement variation of the existing piezoelectric micro-motion platform over time; Figure 4 is a three-dimensional diagram of a piezoelectric drive device provided by an embodiment of the present invention; Figure 5 is a front view of a piezoelectric drive device provided by an embodiment of the present invention; Figure 6 yes Figure 5 I partial enlarged view; Figure 7 is a three-dimensional diagram of the assembly state of the vibrator and the piezoelectric stack provided by an embodiment of the present invention; Figure 8 It is a local enlarged view of the vibrator provided by the embodiment of the present invention. DETAILED DESCRIPTION

[0016] The following describes the embodiments of the present invention by specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention. It should be noted that the following embodiments and features in the embodiments can be combined with each other without conflict.

[0017] It should be noted that the illustrations provided in the following embodiments are only used to illustrate the basic concept of the present invention in a schematic manner, and thus the illustrations only show components related to the present invention rather than being drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component may be changed arbitrarily, and the component layout may also be more complicated.

[0018] The piezoelectric drive device provided by the present invention is used to drive the slide 50 to perform linear motion. The motion trajectory of the vibrator 20 driving end in the no-load state can be referred to Figure 1 As shown, when the driving end of the vibrator 20 cooperates with the side wall of the slide 50, due to the constraint of the side wall of the slide 50, part of its trajectory will become roughly parallel to the side wall of the slide 50, as shown in FIG. Figure 2 As shown in FIG. 1 , this part of the trajectory indicates that the driving end of the vibrator 20 is in close contact with the side wall of the slide 50. At this time, the driving end of the vibrator 20 can drive the slide 50 to move under the action of friction, while the remaining part of the trajectory corresponds to the state where the driving end of the vibrator 20 is separated from the side wall of the slide 50. At this time, the driving end of the vibrator 20 can be reset independently. If the driving end of the vibrator 20 cannot be separated from the side wall of the slide 50 in time when resetting, the slide 50 will move in the opposite direction, such as Figure 3 As shown, the overall motion accuracy of the slide 50 is affected. To this end, the present invention adds a retaining portion 40 to the vibrator 20, and the retaining portion 40 can press or loosen the side wall of the slide 50, and the motion cycle of the retaining portion 40 is consistent with the motion cycle of the driving end of the vibrator 20, that is, when the driving end of the vibrator 20 is reset, the retaining portion 40 presses the side wall of the slide 50 to prevent the slide 50 from shifting in the opposite direction. When the driving end of the vibrator 20 drives the slide 50 to feed, the retaining portion 40 loosens the side wall of the slide 50, reduces the motion resistance of the slide 50, and effectively improves the overall motion accuracy of the slide 50. The technical solution of the present invention is described in detail below in conjunction with specific embodiments: See also Figure 4-8As shown, the piezoelectric driving device provided by the embodiment of the present invention includes a base 10, a vibrator 20, a piezoelectric stacking group 30 and a holding part 40; the vibrator 20 includes a base 21 and a functional part, the base 21 is fixedly connected to the base 10, the functional part is flexibly hinged to the base 21, and a power output end 201 is provided on the functional part; the piezoelectric stacking group 30 is connected to the functional part, and the piezoelectric stacking group 30 is configured to be able to drive the power output end 201 to vibrate along an elliptical path, and the elliptical path is divided into a first half S1 and a second half S2 with its major axis X as the boundary, and the first half S1 is used to drive the slide 50 The second half-stroke S2 ​​is used for resetting the power output end 201; the retaining part 40 is movably matched with the base 10 along the direction parallel to the minor axis Y of the elliptical path; the retaining part 40 is flexibly connected to the functional part through a force transmission member 41, and the force transmission member 41 is configured as follows: when the power output end 201 moves along the first half-stroke S1, the force transmission member 41 drives the retaining part 40 away from the side where the first half-stroke S1 is located, and when the power output end 201 moves along the second half-stroke S2, the force transmission member 41 drives the retaining part 40 close to the side where the first half-stroke S1 is located. The present invention adds a retaining part 40 to the vibrator 20 and makes its movement cycle consistent with the movement cycle of the driving end of the vibrator 20, so that the side wall of the slide 50 can be pressed when the driving end of the vibrator 20 is reset to prevent the slide 50 from shifting in the opposite direction, and the side wall of the slide 50 can be loosened when the driving end of the vibrator 20 drives the slide 50 to feed, thereby reducing the movement resistance of the slide 50. This design effectively solves the problem of reverse displacement caused by temporary adhesion between the driving end of the vibrator 20 and the side wall of the slide 50 when resetting, significantly improves the overall motion accuracy of the slide 50, thereby improving the positioning accuracy and production quality in the semiconductor device production process.

[0019] See also Figure 5-8 As shown, in an optional embodiment of the present invention, the force transmission member 41 includes a swinging part 411 and an elastic buffer part 412, the first end of the swinging part 411 is flexibly hinged with the functional part, the second end of the swinging part 411 is flexibly hinged with the first end of the elastic buffer part 412, and the second end of the elastic buffer part 412 is fixedly connected with the holding part 40; the first area of ​​the swinging part 411 is pivoted with the base 10, and the first area is a partial area between the first end and the second end of the swinging part 411. This embodiment uses the lever principle of the swinging part 411 to achieve the reverse movement of the holding part 40 and the driving end of the vibrator 20, and the structure is simple and easy to control; at the same time, the swinging part 411 is flexibly hinged with the functional part and the elastic buffer part 412, which effectively avoids the interference of the vibration of the functional part on the movement process of the holding part 40, so that the holding part 40 can evenly contact the side wall of the slide 50, avoid local wear caused by stress concentration, and improve the service life.

[0020] See also Figure 6 As shown, in an optional embodiment of the present invention, a protrusion 413 is provided on the side of the swinging part 411 away from the first half-stroke S1, a support 121 is provided on the base 10, and the support 121 is provided with a limiting groove that cooperates with the protrusion 413, and the protrusion 413 is received in the limiting groove, and the swinging part 411 can swing with the limiting groove as a fulcrum. This embodiment constrains the swinging path of the swinging part 411 by providing the protrusion 413 on the swinging part 411 and cooperating with the limiting groove on the base 10, ensuring that the swinging part 411 swings stably with the limiting groove as a fulcrum, thereby achieving effective transmission of stress; at the same time, this design further improves the synchronization of the movement of the holding part 40 and the power output end 201, avoids deviation during the movement process, enhances the reliability and movement accuracy of the device, and ensures the accuracy of the displacement control of the slide 50.

[0021] See also Figure 6 As shown, in an optional embodiment of the present invention, the second end of the swinging part 411 is located on the side of the first end of the elastic buffer part 412 close to the first half-stroke S1. In this embodiment, by arranging the second end of the swinging part 411 on the side of the first end of the elastic buffer part 412 close to the first half-stroke S1, the swinging part 411 applies a pulling force instead of a pushing force to the elastic buffer part 412 during the movement, thereby avoiding fatigue and wear of the flexible hinge due to the compression force, thereby significantly improving the service life of the flexible hinge, enhancing the durability and reliability of the device, and maintaining the stability and accuracy of the movement.

[0022] See also Figure 5 , 7As shown in Figure 8, in an optional embodiment of the present invention, the functional part includes a first vibration arm 22 and a second vibration arm 23, one end of the first vibration arm 22 and the second vibration arm 23 are fixedly connected, and the two are arranged at an angle, the other ends of the first vibration arm 22 and the second vibration arm 23 are flexibly hinged to the base 21 respectively, the positive angle of the connecting end of the first vibration arm 22 and the second vibration arm 23 constitutes the power output end 201, the force transmission component 41 is connected to the first vibration arm 22 and / or the second vibration arm 23, and the force transmission component 41 is arranged close to the power output end 201; the piezoelectric stacking group 30 includes two piezoelectric stack bodies 31, one end of one of the piezoelectric stack bodies 31 is connected to the first vibration arm 22, one end of the other piezoelectric stack body 31 is connected to the second vibration arm 23, and the other ends of the two piezoelectric stack bodies 31 are connected to the base 21 or the base 10. The two piezoelectric stacks 31 respectively drive the first vibration arm 22 and the second vibration arm 23 to generate vibration; there is a phase difference in the alternating electric fields of the two piezoelectric stacks 31, which causes the two to extend and retract alternately, and the two piezoelectric stacks 31 respectively drive the two vibration arms to deform. Due to the vibration phase difference and angle design of the two vibration arms, the combined motion of the two causes the power output end 201 to form an elliptical trajectory motion. Specifically, after the piezoelectric stack 31 is energized, it respectively drives the two vibration arms to generate periodic deformation, transmits vibration through the flexible hinge, and finally causes the power output end 201 to vibrate along an elliptical path, thereby achieving high-precision displacement control.

[0023] See also Figure 5 , 7 As shown, in an optional embodiment of the present invention, the first vibration arm 22 and the second vibration arm 23 are respectively provided with a material reduction hole 24 at one end close to the base 21. In this embodiment, the material reduction hole 24 is provided at one end of the first vibration arm 22 and the second vibration arm 23 close to the base 21, and the stiffness distribution of the vibration arm is adjusted by locally thinning the material, so as to accurately control the deformation trajectory of the vibration arm, and ensure that the power output end 201 can stably move according to the designed elliptical path; this design optimizes the vibration characteristics of the vibration arm, reduces unnecessary deformation interference, improves the movement accuracy and reliability of the device, and enhances the overall performance of the piezoelectric drive device.

[0024] See also Figure 4 , 5As shown in Figures 6 and 7, in an optional embodiment of the present invention, the slide 50 is slidably arranged relative to the base 10 along a direction parallel to the major axis X of the elliptical path, the slide 50 is located beside the vibrator 20, and the first side wall of the slide 50 is arranged adjacent to or in contact with the power output end 201 and the retaining portion 40. A guard plate 60 parallel to the first side wall is provided on the base 10 adjacent to the first side wall, and a notch portion for avoiding the power output end 201 and a limiting groove for limiting the movement direction of the retaining portion 40 are provided on the guard plate 60. This embodiment effectively controls the movement posture of the retaining portion 40 by providing a guard plate 60 parallel to the first side wall of the slide 50 on the base 10 and designing a limiting groove on the guard plate 60, ensuring that the retaining portion 40 uniformly contacts the side wall of the slide 50 during movement, thereby avoiding movement deviation or wear caused by uneven force.

[0025] See also Figure 4 , 5 As shown, in an optional embodiment of the present invention, the base 10 includes a first substrate 11 and a second substrate 12, the slide 50 is mounted on the first substrate 11, the vibrator 20 is mounted on the second substrate 12, the second substrate 12 is movably connected to the first substrate 11 along a direction parallel to the minor axis Y of the elliptical path, and a locking mechanism is provided between the second substrate 12 and the first substrate 11, and the locking mechanism is configured to be able to keep the second substrate 12 at multiple positions within the active stroke, and to release the second substrate 12 from multiple positions within the active stroke. This embodiment divides the base 10 into a first substrate 11 and a second substrate 12, and respectively mounts the vibrator 20 and the slide 50 on different substrates, and at the same time provides a locking mechanism, so that the second substrate 12 can adjust the position and lock along the minor axis Y direction of the elliptical path, thereby realizing flexible adjustment and precise positioning of the relative position between the vibrator 20 and the slide 50; this design not only improves the adaptability and adjustability of the device, but also ensures the matching accuracy between the driving end of the vibrator 20 and the side wall of the slide 50, further improving the motion control accuracy of the slide 50 and the overall performance of the device. In a specific embodiment, the locking mechanism may be, for example, a bolt.

[0026] In summary, the present invention adds a retaining portion 40 to the vibrator 20 and makes its movement cycle consistent with the movement cycle of the driving end of the vibrator 20. This can press the side wall of the slide 50 when the driving end of the vibrator 20 is reset to prevent the slide 50 from shifting in the opposite direction, and release the side wall of the slide 50 when the driving end of the vibrator 20 drives the slide 50 to feed, thereby reducing the movement resistance of the slide 50. This design effectively solves the problem of reverse displacement caused by temporary sticking between the driving end of the vibrator 20 and the side wall of the slide 50 when resetting, significantly improves the overall movement accuracy of the slide 50, and thus improves the positioning accuracy and production quality in the production process of semiconductor devices; the lever principle of the swinging portion 411 is used to realize the reverse movement of the retaining portion 40 and the driving end of the vibrator 20, and the structure is simple and easy to control; at the same time, a flexible hinge is used between the swinging portion 411 and the functional portion and the elastic buffer portion 412, which effectively avoids the interference of the vibration of the functional portion on the movement process of the retaining portion 40, so that the retaining portion 40 can be evenly connected with the side wall of the slide 50 The swinging part 411 is provided with a protruding part 413, which cooperates with the limiting groove on the base 10 to constrain the swinging path of the swinging part 411, and ensure that the swinging part 411 swings stably with the limiting groove as a fulcrum, thereby realizing effective transmission of stress; at the same time, this design further improves the synchronization of the movement of the holding part 40 and the power output end 201, avoids deviation during the movement, enhances the reliability and movement accuracy of the device, and ensures the accuracy of the displacement control of the slide 50; by setting the second end of the swinging part 411 on the elastic buffer The first end of the punching portion 412 is close to the first half-stroke S1 side, so that the swinging portion 411 applies a pulling force rather than a pushing force to the elastic buffer portion 412 during the movement, thereby avoiding fatigue and wear of the flexible hinge due to the compression force, thereby significantly improving the service life of the flexible hinge, enhancing the durability and reliability of the device, and maintaining the stability and accuracy of the movement; by arranging a guard plate 60 parallel to the first side wall of the slide 50 on the base 10, and designing a limit groove on the guard plate 60, the movement posture of the holding portion 40 is effectively controlled, ensuring that the holding portion 40 is evenly abutted against the side wall of the slide 50 during the movement. The invention relates to a method for realizing a flexible contact between the vibrator 20 and the slide 50, thereby avoiding movement deviation or wear caused by uneven force; by dividing the base 10 into a first substrate 11 and a second substrate 12, and installing the vibrator 20 and the slide 50 on different substrates respectively, and providing a locking mechanism, the second substrate 12 can be adjusted and locked along the direction of the minor axis Y of the elliptical path, thereby realizing flexible adjustment and precise positioning of the relative position between the vibrator 20 and the slide 50; this design not only improves the adaptability and adjustability of the device, but also ensures the matching accuracy between the driving end of the vibrator 20 and the side wall of the slide 50, thereby further improving the motion control accuracy of the slide 50 and the overall performance of the device.

[0027] The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Anyone familiar with the art may modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by a person of ordinary skill in the art without departing from the spirit and technical concept disclosed by the present invention shall still be covered by the claims of the present invention.

[0028] In the description herein, many specific details, such as examples of components and / or methods, are provided to provide a complete understanding of embodiments of the present invention. However, those skilled in the art will recognize that embodiments of the present invention may be practiced without one or more of the specific details or with other devices, systems, components, methods, components, materials, parts, etc. In other cases, well-known structures, materials, or operations are not specifically shown or described in detail to avoid obscuring aspects of embodiments of the present invention.

Claims

1. A piezoelectric drive device, characterized in that: include: Base (10); A vibrator (20), the vibrator (20) comprising a base (21) and a functional part, the base (21) being fixedly connected to the base (10), the functional part being flexibly hinged to the base (21), and the functional part being provided with a power output end (201); A piezoelectric stack group (30) connected to the functional part, the piezoelectric stack group (30) being configured to be able to drive the power output end (201) to vibrate along an elliptical path, the elliptical path being divided into a first half (S1) and a second half (S2) by its major axis (X); The holding portion (40) is movably matched with the base (10) along a direction parallel to the short axis (Y) of the elliptical path; the holding portion (40) is flexibly connected to the functional portion via a force transmission component (41), and the force transmission component (41) is configured such that: when the power output end (201) moves along the first half-stroke (S1), the force transmission component (41) drives the holding portion (40) away from a side where the first half-stroke (S1) is located; and when the power output end (201) moves along the second half-stroke (S2), the force transmission component (41) drives the holding portion (40) close to a side where the first half-stroke (S1) is located.

2. The piezoelectric drive device according to claim 1, characterized in that: The force transmission component (41) comprises a swinging portion (411) and an elastic buffer portion (412); the first end of the swinging portion (411) is flexibly hinged to the functional portion, the second end of the swinging portion (411) is flexibly hinged to the first end of the elastic buffer portion (412), and the second end of the elastic buffer portion (412) is fixedly connected to the retaining portion (40); a first area of ​​the swinging portion (411) is pivotally connected to the base (10), and the first area is a partial area between the first end and the second end of the swinging portion (411).

3. The piezoelectric drive device according to claim 2, characterized in that: A protrusion (413) is provided on a side of the swing portion (411) away from the first half (S1); a support (121) is provided on the base (10); the support (121) is provided with a limiting groove that cooperates with the protrusion (413); the protrusion (413) is received in the limiting groove, and the swing portion (411) can swing with the limiting groove as a fulcrum.

4. The piezoelectric drive device according to claim 2, characterized in that: The second end of the swing portion (411) is located on a side of the first end of the elastic buffer portion (412) close to the first half (S1).

5. The piezoelectric drive device according to claim 1, characterized in that: The functional part comprises a first vibration arm (22) and a second vibration arm (23); one end of the first vibration arm (22) and the second vibration arm (23) are fixedly connected, and the two are arranged at an angle; the other ends of the first vibration arm (22) and the second vibration arm (23) are respectively flexibly hinged to the base (21); the positive angle of the connecting end of the first vibration arm (22) and the second vibration arm (23) constitutes the power output end (201); the force transmission component (41) is connected to the first vibration arm (22) and / or the second vibration arm (23), and the force transmission component (41) is arranged close to the power output end (201).

6. The piezoelectric drive device according to claim 5, characterized in that: A material reduction hole (24) is provided at one end of the first vibration arm (22) and the second vibration arm (23) close to the base (21).

7. The piezoelectric drive device according to claim 5, characterized in that: The piezoelectric stack group (30) comprises two piezoelectric stack bodies (31), wherein one end of one of the piezoelectric stack bodies (31) is connected to the first vibration arm (22), one end of the other piezoelectric stack body (31) is connected to the second vibration arm (23), and the other ends of the two piezoelectric stack bodies (31) are connected to the base (21) or the pedestal (10).

8. The piezoelectric drive device according to claim 1, characterized in that: It also includes a slide table (50), the slide table (50) being slidably arranged relative to the base (10) along a direction parallel to the major axis (X) of the elliptical path, the slide table (50) being located beside the vibrator (20), and a first side wall of the slide table (50) being arranged adjacent to or in contact with the power output end (201) and the retaining portion (40).

9. The piezoelectric drive device according to claim 8, characterized in that: A guard plate (60) parallel to the first side wall is provided on the base (10) at a position adjacent to the first side wall, and the guard plate (60) is provided with a notch for avoiding the power output end (201) and a limiting groove for limiting the movement direction of the retaining portion (40).

10. The piezoelectric drive device according to claim 8, characterized in that: The base (10) comprises a first substrate (11) and a second substrate (12), the slide table (50) is mounted on the first substrate (11), the vibrator (20) is mounted on the second substrate (12), the second substrate (12) is movably connected to the first substrate (11) along a direction parallel to a short axis (Y) of the elliptical path, and a locking mechanism is provided between the second substrate (12) and the first substrate (11), the locking mechanism being configured to be able to retain the second substrate (12) at a plurality of positions within a movable travel, and to be able to release the second substrate (12) from a plurality of positions within the movable travel.

Images