Compound actuator based on voice coil motor and piezoelectric ceramics

Abstract

The invention provides a compound actuator based on a voice coil motor and piezoelectric ceramics, and relates to the technical field of precise micro-displacement driving systems. The first vibration isolation unit comprises a voice coil motor assembly and a first vibration isolation piece, the first vibration isolation piece is connected with the load platform, and a first transmission area is arranged between the voice coil motor assembly and the first vibration isolation piece; the second vibration isolation unit comprises a piezoelectric ceramic supporting piece and a second vibration isolation piece, the second vibration isolation piece is connected with the load platform, and a second transmission area is arranged between the piezoelectric ceramic supporting piece and the second vibration isolation piece; the switching assembly comprises a transmission block used for driving the piezoelectric actuator to switch. The piezoelectric actuator located in the first transmission area is connected with the voice coil motor assembly and the first vibration isolation piece at the same time. The piezoelectric actuator located in the second transmission area is connected with the piezoelectric ceramic supporting piece and the second vibration isolation piece at the same time, and the transmission block is connected with the first vibration isolation piece and the voice coil motor assembly. The compound actuator can be switched between a series connection state and a parallel connection state in real time.

Description

Technical Field

[0001] The present invention relates to the technical field of precision micro-displacement drive systems, and in particular to a composite actuator based on a voice coil motor and piezoelectric ceramics. Background Art

[0002] With the rapid development of science and technology, the importance of vibration control technology in many high-tech fields has become increasingly prominent, especially in the fields of high-precision equipment, electronic instruments, medical equipment, aerospace, and precision engineering. For example, in the ultra-precision processing of lithography machines, external micro-vibrations have an adverse effect on the processing process. It is necessary to use a vibration isolation system to effectively suppress external and internal vibrations to ensure the stability of the equipment, improve operating performance, and ensure data accuracy and operational safety.

[0003] Referring to patent document CN116930554A, a velocity sensor calibration system for precision instrument vibration isolators is disclosed, wherein a composite active actuator is composed of a voice coil motor and a piezoelectric ceramic connected in series; the velocity sensor is evaluated and verified by the calibration system, and the velocity sensor after velocity calibration is used in an active vibration isolator, so that the vibration isolator can work in a more effective state, and the active vibration isolator has a better vibration reduction effect.

[0004] Referring to patent document CN116930554A, it discloses a high-speed, high-precision macro-micro platform and switching method based on piezoelectric ceramics. The piezoelectric ceramics are directly connected to the output shaft of the voice coil motor. The piezoelectric ceramics play a vibration reduction role for the high-speed motion platform by applying a reverse force. Specifically, the voice coil motor drives the macro motion, and the platform moves at a high speed with a high acceleration, and decelerates at the same acceleration before reaching the end of the macro motion stroke. During the macro motion of the platform, the acceleration sensor installed on the platform is used to measure the acceleration in the direction of the platform's motion, and obtain the vibration frequency and amplitude of the platform in real time. When the vibration frequency in the platform's deceleration motion is higher than a certain set threshold, the piezoelectric ceramic vibration reduction function is activated, and a reverse motion is applied to the platform. Its vibration reduction frequency and amplitude will be determined according to a specific algorithm.

[0005] In the current existing technology, a voice coil motor and a piezoelectric actuator are often connected in series to form a vibration reduction device. However, this series connection method has a slow response speed, low control accuracy, and a small adaptability range, especially showing limitations in multi-band vibration environments. Summary of the invention

[0006] The purpose of the present invention is to provide a composite actuator based on a voice coil motor and piezoelectric ceramics to solve the problems existing in the above-mentioned prior art. The composite actuator can be switched between series state and parallel state in real time, can adapt to a variety of different vibration scenarios, and greatly improves the flexibility and adaptability of vibration control.

[0007] To achieve the above-mentioned purpose, the present invention provides the following scheme: a composite actuator based on a voice coil motor and a piezoelectric ceramic is provided, comprising: a load platform; a first vibration isolation unit, comprising a voice coil motor assembly and a first vibration isolation member, the first vibration isolation member is connected to the load platform, and a first transmission area is provided between the voice coil motor assembly and the first vibration isolation member; a second vibration isolation unit, comprising a piezoelectric ceramic support member and a second vibration isolation member, the second vibration isolation member is connected to the load platform, and a second transmission area is provided between the piezoelectric ceramic support member and the second vibration isolation member; a piezoelectric actuator, the piezoelectric actuator is provided in the first a transmission zone or the second transmission zone; a switching component, including a transmission block for driving the piezoelectric actuator to switch between the first transmission zone and the second transmission zone; the piezoelectric actuator passes through the first transmission zone and the second transmission zone along the trajectory of the transmission block; the piezoelectric actuator located in the first transmission zone is connected to the voice coil motor assembly and the first vibration isolation member at the same time; the piezoelectric actuator located in the second transmission zone is connected to the piezoelectric ceramic support member and the second vibration isolation member at the same time, and at this time the transmission block is connected to the first vibration isolation member and the voice coil motor assembly.

[0008] Preferably, the first vibration isolation member includes a first guide rod and a first damper, one end of the first guide rod is connected to the load platform, and the other end is connected to the first damper; the outer end of the first guide rod is sleeved with a first limiting ring, the first limiting ring is slidably connected to the first guide rod, and the first limiting ring is fixedly arranged on the actuator housing.

[0009] Preferably, the first damper is connected to a first flexible hinge at one end away from the first guide rod, the axial stiffness of the first flexible hinge is greater than the torsional stiffness, and the piezoelectric actuator located in the first transmission zone is connected to the first flexible hinge; when the piezoelectric actuator is located in the second transmission zone, the transmission block is connected to the first flexible hinge.

[0010] Preferably, the second vibration isolation member includes a second guide rod and a second damper, the two ends of the second guide rod are respectively connected to the load platform and the second damper, the end of the second damper away from the second guide rod is connected to a second flexible hinge, the axial stiffness of the second flexible hinge is greater than the torsional stiffness, and the piezoelectric actuator located in the second transmission zone is connected to the second flexible hinge.

[0011] Preferably, the voice coil motor assembly includes a voice coil motor and a first end cover arranged on the voice coil motor, the first transmission area is located between the first flexible hinge and the first end cover, and the first end cover is connected to the piezoelectric actuator or the transmission block.

[0012] Preferably, a main coil spring is sleeved on the outer side of the voice coil motor, one end of the main coil spring is connected to the first end cover, a voice coil motor housing is sleeved on the outer side of the main coil spring, and the other end of the main coil spring is fixedly connected to the bottom plate of the voice coil motor housing.

[0013] Preferably, the piezoelectric ceramic support member includes a secondary coil spring and a second end cover, the second end cover is connected to one end of the secondary coil spring, the second transmission zone is located between the second flexible hinge and the second end cover, a secondary outer shell is provided on the outer side of the secondary coil spring, and the other end of the secondary coil spring is fixedly connected to the bottom plate of the secondary outer shell.

[0014] Preferably, the switching assembly also includes a limit plate, which is fixedly arranged on the voice coil motor assembly, and a through hole is opened in the limit plate, and a clamping block located in the through hole is arranged on the limit plate, and the clamping block is slidably connected to the transmission block, and the end of the transmission block is detachably connected to the piezoelectric actuator, and a push plate is connected to the end of the transmission block away from the piezoelectric actuator, and a displacement spring is connected between the push plate and the limit plate; the displacement spring is sleeved on the outside of the sliding track of the transmission block.

[0015] Preferably, the switching assembly further comprises a cam for driving the push plate to reciprocate, the cam being connected to an output shaft of the motor, and a tongue cooperating with the cam being arranged on a side of the push plate facing the cam.

[0016] Preferably, a first electromagnet for connecting to the piezoelectric actuator is provided on the transmission block, a second electromagnet is provided on the top of the transmission block, and the second electromagnet located in the first transmission area is connected to the first vibration isolation member.

[0017] Compared with the prior art, the present invention has achieved the following technical effects:

[0018] 1. The present invention can drive the piezoelectric actuator to switch back and forth between the first transmission zone and the second transmission zone through a switching device. When the piezoelectric actuator is in the first transmission zone, the piezoelectric actuator is directly connected in series with the voice coil motor assembly and the first vibration isolation member, so that the actuator device is in a series state; when the piezoelectric actuator is in the second transmission zone, the piezoelectric actuator is directly connected to the piezoelectric ceramic support member, and the transmission block can be connected to the first vibration isolation member and the voice coil motor assembly at the same time. At this time, the piezoelectric actuator and the voice coil motor assembly are in a parallel state. The composite actuator of the present invention can switch between the series state and the parallel state in real time, can adapt to a variety of different vibration scenarios, realizes wide-band vibration isolation of the system under complex vibration conditions, and greatly improves the flexibility and adaptability of vibration control.

[0019] Other technical solutions of the present invention also have the following technical effects:

[0020] 2. The present invention essentially proposes a macro-micro compound actuator that can flexibly switch between series and parallel modes, integrates a piezoelectric actuator, a voice coil motor and an adjustable damper, and can effectively control vibrations in different frequency bands through a mode switching mechanism.

[0021] In the series mode, the voice coil motor mainly responds to low-frequency vibrations and works in parallel with the main coil spring to provide control over low-frequency and partial medium-frequency vibrations. At the same time, the piezoelectric actuator is connected in series, focusing on the compensation of high-frequency vibrations, which is suitable for wide-band vibration coordinated control.

[0022] In parallel mode, the piezoelectric actuator is connected in series with the secondary coil spring to focus on active control of high-frequency vibrations, while the voice coil motor independently handles low-frequency vibrations. This design achieves wide-band vibration isolation of the system under complex vibration conditions, greatly improving the flexibility and adaptability of vibration control.

[0023] 3. When switching between series and parallel modes, the present invention can drive the transmission block and the piezoelectric actuator to move synchronously through the cam-push plate displacement mechanism, realize the switching of the piezoelectric actuator between series and parallel modes, and adapt to the needs of different vibration frequency bands. In the series mode, the piezoelectric actuator works in series with the voice coil motor, and the voice coil motor is connected in parallel with the main coil spring, so as to achieve a balance between large stroke requirements and high-frequency control, which is suitable for wide-band composite control requirements; in the parallel mode, the piezoelectric actuator is connected in series with the secondary coil spring through the cam-push plate displacement mechanism to specifically deal with high-frequency vibrations, while the voice coil motor is connected in parallel with the main coil spring to independently deal with low-frequency vibrations. The series-parallel switching mechanism of this design effectively expands the vibration isolation bandwidth of the system and improves the vibration reduction performance and response speed.

[0024] 4. Active control of piezoelectric actuator alone: ​​The vibration isolator proposed in the present invention can be actively controlled by a piezoelectric actuator independently. The piezoelectric actuator utilizes the inverse piezoelectric effect of piezoelectric materials to deform the piezoelectric actuator by applying voltage, thereby outputting a force opposite to the vibration direction to offset the vibration. It is connected to the load platform with the help of flexible hinges and other connectors, and the cam-push plate displacement mechanism adjusts the connection, and the piezoelectric actuator works independently. This mode has significant advantages, and has extremely high control accuracy for high-frequency vibrations. With its fast response characteristics, it can accurately track changes in high-frequency vibration signals and effectively reduce the transmission rate. It is widely used in equipment such as electron microscopes that are sensitive to high-frequency vibrations and have extremely high precision requirements, and can provide them with high-precision high-frequency vibration isolation to ensure the normal operation of the equipment and clear and accurate imaging.

[0025] 5. Independent active control of the voice coil motor: The vibration isolator proposed in the present invention can be actively controlled independently using a voice coil motor. The voice coil motor works based on the Ampere force principle. The current generates force through the coil in the magnetic field, and acts on the load platform through structures such as flexible hinges and connecting end covers to offset the vibration. The cam-push plate displacement mechanism enables the voice coil motor to operate independently and performs well in low-frequency and large-displacement vibration scenarios. It can provide a large thrust and stable stroke, and adapt to low-frequency vibration environments. For example, the low-frequency vibration generated by the operation of industrial machine tools can be effectively isolated to protect the accuracy and stability of the machine tools and extend their service life. It is highly applicable in equipment and scenarios such as construction projects and large motor equipment that need to deal with low-frequency and large-displacement vibrations. It can reduce the interference of external low-frequency vibrations on precision equipment or experimental facilities, and ensure their normal operation and experimental accuracy.

[0026] 6. Adjustable damping: As the core component for adjusting the damping characteristics of the system, adjustable dampers are installed under the first guide rod and the second guide rod in the present invention. By adjusting the distance and number between the central axis and the magnet, the damping coefficient can be flexibly adjusted to adapt to different vibration conditions. Especially under high-frequency vibration, the adjustable damper provides excellent vibration attenuation effect. Its slot-type design is simple and convenient, which facilitates precise damping adjustment and improves the vibration reduction performance of the system in various frequency bands.

[0027] 7. Dealing with large-stroke impact: In the series mode, a certain gap is maintained between the secondary coil spring and the second flexible hinge. When the system encounters a large-stroke impact, the secondary coil spring can provide a significant vibration isolation effect, reduce the vibration transmission caused by the impact, and add a layer of protection for the system.

[0028] 8. Limiting and positioning structure: The limiting and positioning structure includes the matching structure of the slide groove on the first end cover and the transmission block; it also includes the matching interface between the card block of the limiting plate and the card groove on the transmission block. The limiting and positioning structure plays a key role in the switching of series and parallel modes, ensuring the accuracy of the switching process of the piezoelectric actuator. The limiting structure limits the displacement range of the piezoelectric actuator to avoid excessive movement or misalignment; the slide groove and cam mechanism provide a smooth switching path to accurately position the piezoelectric actuator. At the same time, when the voice coil motor is connected in parallel with the piezoelectric actuator, the second electromagnet on the transmission block can be connected to the first flexible hinge to ensure the dynamic connection between the piezoelectric actuator and the first flexible hinge during the switching process, thereby improving the stability and accuracy of the system and reducing the structural complexity and maintenance difficulty.

[0029] 9. Flexible hinge connection: The first vibration isolation member and the second vibration isolation member of the present invention respectively include a first flexible hinge and a second flexible hinge. The present invention adopts a flexible hinge as a connection method between the motor output shaft and the load end. The flexible hinge has high axial stiffness and low bending stiffness, can effectively transmit axial vibration force, and compensate for displacement in other directions, and is suitable for use in high-precision environments. Compared with traditional spherical hinges, flexible hinges avoid friction and clearance problems, reduce the generation of additional damping, and effectively improve the high-frequency vibration reduction performance of the system.

[0030] 10. An acceleration sensor is arranged between the damper and the flexible hinge. The acceleration sensor monitors the vibration state in real time and feeds back the vibration data to the control system to ensure the accuracy of the vibration data and provide real-time feedback to the control system to achieve precise active control. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0032] Figure 1 It is an overall schematic diagram of the overall device of the present invention with an actuator housing;

[0033] Figure 2 This is a schematic diagram of the overall device of the present invention with the transmission block and the piezoelectric actuator omitted;

[0034] Figure 3 This is a schematic diagram of the overall device in parallel state of the present invention;

[0035] Figure 4 for Figure 3 A partial enlarged schematic diagram of

[0036] Figure 5 It is a front view schematic diagram of the whole device in parallel state of the present invention;

[0037] Figure 6 It is a cross-sectional schematic diagram of the overall device of the present invention in parallel state;

[0038] Figure 7 It is a cross-sectional schematic diagram of the internal structure of the overall device of the present invention in parallel state (without hatching);

[0039] Figure 8 It is a schematic diagram of the overall structure of the damper of the present invention;

[0040] Fig. 9 It is a schematic diagram of the overall structure of the first vibration isolation unit in the parallel mode of the present invention;

[0041] Fig.10 for Fig. 9 A cross-sectional view of

[0042] Fig.11 It is a schematic diagram of the overall structure of the second vibration isolation unit in the parallel mode of the present invention;

[0043] Fig.12 for Fig.11 A cross-sectional view of

[0044] Fig.13 This is a schematic diagram of the overall device in the series mode of the present invention;

[0045] Fig.14 is a schematic diagram of the overall device of the first end cover and the limiting plate;

[0046] Fig.15 It is the overall schematic diagram of the cam transmission structure;

[0047] Fig.16 It is a schematic diagram of the working principle of the series mode;

[0048] Fig.17 This is a schematic diagram of the working principle of the parallel mode;

[0049] Fig.18 A frequency domain comparison diagram of transmissibility curves of a single voice coil motor active control vibration reduction, a single piezoelectric active control vibration reduction, a piezoelectric and voice coil series composite vibration reduction, and a piezoelectric and voice coil parallel composite vibration reduction;

[0050] Fig.19 It is a schematic diagram comparing the time domain signals of the transmissibility curves of a single voice coil motor active control vibration reduction, a single piezoelectric active control vibration reduction, a piezoelectric and voice coil series composite vibration reduction, and a piezoelectric and voice coil parallel composite vibration reduction.

[0051] Among them, 1. load platform; 2. vibration reduction structure; 3. first vibration isolation member; 4. voice coil motor assembly; 5. first transmission area; 6. second vibration isolation member; 7. piezoelectric ceramic support member; 8. second transmission area; 9. piezoelectric actuator; 10. transmission block; 11. first guide rod; 12. first damper; 13. damper housing; 14. iron core; 15. magnet block; 16. adjustment block; 17. first limit ring; 18. actuator housing; 19. cover plate; 20. first flexible hinge; 21. second guide rod; 22. second damper; 23. The second flexible hinge; 24, voice coil motor; 25, first end cover; 26, slide groove; 27, main spiral spring; 28, secondary spiral spring; 29, second end cover; 30, secondary housing; 31, voice coil motor housing; 32, limit plate; 33, through hole; 34, block; 35, transmission slot; 36, push plate; 37, displacement spring; 38, cam; 39, tongue; 40, knob; 41, first electromagnet; 42, second electromagnet; 43, second limit ring; 44, column; 45, base; 46, acceleration sensor. DETAILED DESCRIPTION

[0052] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0053] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0054] Please refer to Figure 1-19As shown, in this embodiment, a composite actuator based on a voice coil motor and piezoelectric ceramics is provided, including a load platform 1, a vibration reduction structure 2 and a switching assembly. The vibration reduction structure 2 is connected to the load platform 1. The vibration reduction structure 2 includes a first vibration isolation unit and a second vibration isolation unit. The first vibration isolation unit includes a first vibration isolation member 3 and a voice coil motor assembly 4. The first vibration isolation member 3 is directly connected to the load platform 1. When the load platform 1 moves, it can drive the first vibration isolation member 3 to move synchronously. A first transmission area 5 is arranged between the voice coil motor assembly 4 and the first vibration isolation member 3; the second vibration isolation unit includes a second vibration isolation member 6 and a piezoelectric ceramic support member 7. The second vibration isolation member 6 is connected to the load platform 1. When the load platform 1 moves, it can drive the second vibration isolation member 6 to move synchronously; a second transmission area 8 is arranged between the piezoelectric ceramic support member 7 and the second vibration isolation member 6; preferably, the first transmission area 5 is horizontally aligned with the second transmission area 8. The piezoelectric actuator 9 is connected to the transmission block 10 of the switching assembly, and the piezoelectric actuator 9 is a piezoelectric ceramic actuator. When the transmission block 10 moves, it can synchronously drive the piezoelectric actuator 9 to move. The trajectory of the piezoelectric actuator 9 moving with the transmission block 10 can pass through the first transmission area 5 and the second transmission area 8, and the movement trajectory of the piezoelectric actuator 9 includes a series position and a parallel position. The piezoelectric actuator 9 located in the series position is connected to the first transmission area 5. Preferably, at this time, the piezoelectric actuator 9 can be connected to the first vibration isolation member 3 and the voice coil motor assembly 4 at the same time. At the same time, when the piezoelectric actuator 9 is located in the series position, the transmission block 10 is independent of the first transmission area 5 and the second transmission area 8, that is, the first transmission area 5 and the second transmission area 8 are not connected to the transmission block 10. The piezoelectric actuator 9 located in the parallel position can be connected to the second transmission area 8. At this time, the piezoelectric actuator 9 can be connected to the second vibration isolation member 6 and the piezoelectric ceramic support member 7 at the same time. At this time, the transmission block 10 can be connected to the first vibration isolation member 3 and the voice coil motor assembly 4 at the same time.

[0055] Working principle:

[0056] The load platform 1 is connected to the vibration source;

[0057] Series working mode: the transmission block 10 drives the piezoelectric actuator 9 to move along a preset trajectory; the piezoelectric actuator 9 is placed in the first transmission area 5, and the piezoelectric actuator 9 is simultaneously connected in series with the first vibration isolation member 3 and the voice coil motor assembly 4; in the series mode, the voice coil motor assembly 4 is used for low-frequency vibration control, and the piezoelectric actuator 9 is connected in series therewith, focusing on high-frequency vibration compensation, thereby forming a coordinated wide-band vibration control system, which is suitable for large stroke and wide-band vibration reduction requirements;

[0058] Parallel working mode: The transmission block 10 drives the piezoelectric actuator 9 to move along the preset trajectory, so that the piezoelectric actuator 9 is in the second transmission area 8. At this time, the piezoelectric actuator 9 is connected to the piezoelectric ceramic support 7 and the second vibration isolation member 6 at the same time. The transmission block 10 can be connected to the first vibration isolation member 3 and the voice coil motor assembly 4 at the same time. In the parallel mode, the piezoelectric actuator 9 focuses on the active control of high-frequency vibrations, while the voice coil motor assembly 4 independently handles low-frequency vibrations.

[0059] The present invention can drive the piezoelectric actuator 9 to switch back and forth between the first transmission zone 5 and the second transmission zone 8 through a switching device, so that the compound actuator can be adjusted in real time between the series state and the parallel state, and can adapt to a variety of different vibration scenarios, thereby realizing wide-band vibration isolation of the system under complex vibration conditions, and greatly improving the flexibility and adaptability of vibration control. Through the innovative series-parallel switching mechanism, efficient vibration control and isolation are achieved, overcoming the shortcomings of the prior art in terms of system flexibility, response speed and integration complexity, and providing a vibration reduction solution with superior performance and simple structure. Its excellent performance, simple structure and high degree of integration make the device have broad application prospects in high-precision fields such as aerospace, precision manufacturing, and electronic equipment, providing an efficient and reliable vibration protection solution.

[0060] In one embodiment, the first vibration isolation member 3 includes a first guide rod 11 and a first damper 12, one end of the first guide rod 11 is connected to the load platform 1, preferably fixedly connected. The other end of the first guide rod 11 is connected to the first damper 12; preferably, the first damper 12 is an adjustable damper, which can flexibly adjust the damping coefficient by controlling the number of magnets and the axial gap, further optimize the damping characteristics of the system, enhance the attenuation capacity of high-frequency vibrations, and enable the system to better adapt to complex vibration environments. Preferably, as Figure 8As shown, the first damper 12 includes a damper housing 13, an iron core 14, a magnet block 15 and an adjustment block 16. The damper housing 13 wraps the damper assembly to provide mechanical protection. The iron core 14 is located inside the damper. Preferably, the iron core 14 is vertically arranged, and the iron core 14 has a conical structure, and the overall structure is large at the top and small at the bottom, that is, as the iron core 14 gradually moves away from the load platform 1, its cross-sectional area gradually decreases. The iron core 14 can form a damping effect with the magnet block 15. The magnet block 15 is installed in the slot, and the damping level can be changed by adjusting the number and position. The adjustment block 16 is used to adjust the axial gap between the magnet block 15 and the iron core 14. When the adjustment block 16 drives the magnet block 15 to move upward along the slot, the gap between the magnet block 15 and the iron core 14 in the horizontal direction gradually decreases. The first damper 12 is installed under the first guide rod 11 and connected to the piezoelectric actuator 9 or the voice coil motor 24. The magnet block 15 is fixed by a slot and the distance can be adjusted by the adjustment block 16. This provides a dynamically adjustable damping coefficient, enhances the vibration attenuation effect during high-frequency vibration, and improves the comprehensive vibration reduction performance of the system by flexibly adjusting the damping characteristics to adapt to different vibration conditions. The slot design is simple and convenient, and it is easy to accurately adjust the damping, which improves the vibration reduction performance of the system in various frequency bands.

[0061] The outer end of the first guide rod 11 is sleeved with a first limiting ring 17, which is slidably connected to the first guide rod 11, and the outer side wall of the first limiting ring 17 is fixedly connected to the actuator housing 18. The vibration reduction structure 2 and the switching assembly are both arranged in the actuator housing 18, and the vibration reduction structure 2 and the switching assembly can be protected by the actuator housing 18. At the same time, a cover plate 19 is arranged on the top of the actuator housing 18, and the cover plate 19 is preferably fixedly connected to the actuator housing 18 by bolts. The first limiting ring 17 is specifically fixedly connected to the cover plate 19, and the first limiting ring 17 can penetrate the cover plate 19. The first limiting ring 17 can be fixedly connected to the cover plate 19 by bolts. The first guide rod 11 penetrates the first limiting ring 17 and is fixedly connected to the load platform 1. The load platform 1 is provided with a gap between the cover plate 19, that is, a space for the load platform 1 to move freely is provided on the cover plate 19. When the load platform 1 reaches the limit position, the load platform 1 can abut against the cover plate 19.

[0062] In this embodiment, a first flexible hinge 20 is provided at one end of the first damper 12 away from the first guide rod 11, and the axial stiffness of the first flexible hinge 20 is greater than its torsional stiffness. Preferably, the first flexible hinge 20 has high axial stiffness and low bending stiffness; specifically, in the axial direction, the first flexible hinge 20 is rigid and can effectively transmit axial vibration, and in other directions, the first flexible hinge 20 is flexible and can compensate for displacement in other directions. The characteristics of high axial stiffness and low bending stiffness effectively avoid the gap and friction problems of traditional hinges, ensure the efficient transmission of vibration energy and the precise compensation of displacement, further improve the high-frequency vibration reduction performance, and are suitable for use in high-precision environments. When the piezoelectric actuator 9 is located in the first transmission area 5, the piezoelectric actuator 9 can be connected to the first flexible hinge 20 and the voice coil motor assembly 4 at the same time. The vibration transmitted to the first flexible hinge 20 by the first guide rod 11 and the first damper 12 can effectively act on the piezoelectric actuator 9. When the piezoelectric actuator 9 is located in the second transmission zone 8, the transmission block 10 is located in the first transmission zone 5, and the transmission block 10 can be connected to the first flexible hinge 20 and the voice coil motor assembly 4 at the same time, and the vibration transmitted to the first flexible hinge 20 by the first guide rod 11 and the first damper 12 can effectively act on the transmission block 10.

[0063] In one embodiment, the second vibration isolation member 6 includes a second guide rod 21 and a second damper 22, one end of the second guide rod 21 is connected to the load platform 1, and the other end is connected to the second damper 22. When the load platform 1 moves, it can drive the second guide rod 21 and the second damper 22 to move synchronously. The structure of the second damper 22 is consistent with the structure of the first damper 12, and both are adjustable dampers. The end of the second damper 22 away from the second guide rod 21 is connected to a second flexible hinge 23, and the axial stiffness of the second flexible hinge 23 is greater than the torsional stiffness. Preferably, the second flexible hinge 23 is consistent with the structure of the first flexible hinge 20. When the piezoelectric actuator 9 is located in the second transmission zone 8, the second flexible hinge 23 is connected to the piezoelectric actuator 9, and the piezoelectric actuator 9 is also transmission-connected to the piezoelectric ceramic support 7. The second flexible hinge 23 is rigid in the axial direction and can transmit vibration, and is flexible in other directions and can compensate for displacement. The vibration transmitted by the second guide rod 21 and the second damper 22 can be effectively transmitted to the piezoelectric actuator 9 through the second flexible hinge 23. The second flexible hinge 23 can also be used to transmit vibration force, and effectively compensate for lateral displacement, reducing the impact of lateral vibration on system stability.

[0064] In one embodiment, Figure 7As shown, the voice coil motor assembly 4 includes a voice coil motor 24, a first end cover 25 is arranged on the voice coil motor 24, and the first transmission area 5 is located between the first flexible hinge 20 and the first end cover 25; the first end cover 25 can be connected to the piezoelectric actuator 9 or the transmission block 10; when the piezoelectric actuator 9 is located in the first transmission area 5, the piezoelectric actuator 9 is connected in series with the first end cover 25 in the voice coil motor assembly 4, and the piezoelectric actuator 9 is also connected to the first flexible hinge 20 at the same time. When the piezoelectric actuator 9 is located in the second transmission area 8, the transmission block 10 is located in the first transmission area 5, and the transmission block 10 can be connected to the first flexible hinge 20 and the first end cover 25 at the same time. Preferably, as Fig.14 As shown, the transmission block 10 is a rectangular structure, a slider is provided at the bottom of the transmission block 10, and a slide groove 26 that is slidably matched with the slider is provided in the first end cover 25. The transmission block 10 is slidably connected in the slide groove 26 through the slider, and the transmission block 10 can move along the slide groove 26, and the notch of the slide groove 26 faces the piezoelectric ceramic support 7. Preferably, a first rib and a second rib can be provided in the slide groove 26, and when the piezoelectric actuator 9 is located in the first transmission area 5, the piezoelectric actuator 9 can be limited by the first rib; preferably, the piezoelectric actuator 9 can also be slidably engaged with the slide groove 26, that is, the piezoelectric actuator 9 can slide along the slide groove 26, so that the piezoelectric actuator 9 can be stably located in the first transmission area 5. When the piezoelectric actuator 9 is located in the second transmission area 8, the slider abuts against the second rib, and the slider can be limited by the second rib, and at this time the transmission block 10 is located in the first transmission area 5.

[0065] In this embodiment, a main coil spring 27 is sleeved on the outer side of the voice coil motor 24, one end of the main coil spring 27 is connected to the first end cover 25, a voice coil motor housing 31 is sleeved on the outer side of the main coil spring 27, and the other end of the main coil spring 27 is fixedly connected to the bottom plate of the voice coil motor housing 31. The main coil spring 27 is coaxially arranged with the voice coil motor 24.

[0066] In this embodiment, the piezoelectric ceramic support 7 includes a secondary coil spring 28 and a second end cap 29, the axis of the secondary coil spring 28 is parallel to the axis of the main coil spring 27, the second end cap 29 is connected to the end of the secondary coil spring 28, the second transmission area 8 is located between the second end cap 29 and the second flexible hinge 23, and when the piezoelectric actuator 9 is located in the second transmission area 8, the piezoelectric actuator 9 is connected to the second flexible hinge 23 and the second end cap 29 at the same time. A secondary housing 30 is sleeved on the outer side of the secondary coil spring 28, and the other end of the secondary coil spring 28 is fixedly connected to the bottom plate of the secondary housing 30. In the series mode, the piezoelectric actuator 9 is used in series with the voice coil motor 24, and the voice coil motor 24 is connected in parallel with the main coil spring 27 to respectively deal with high-frequency and low-frequency vibrations, forming a wide-band coordinated control system. In this mode, the secondary coil spring 28 provides additional buffering capacity, which is suitable for the vibration suppression requirements of large-amplitude impacts, increases the total displacement of the system, and is suitable for occasions requiring large stroke and high-frequency precision control. In parallel mode, the piezoelectric actuator 9 is connected in series with the secondary coil spring 28, focusing on the active control of high-frequency vibrations; the voice coil motor 24 is connected in parallel with the main coil spring 27 to independently deal with low-frequency vibrations, realize multi-band division of labor control, and is suitable for high-frequency control of precision small strokes while ensuring low-frequency stability. In the present invention, the voice coil motor housing 31 covers the voice coil motor 24, and the voice coil motor housing 31 can provide mechanical support while also protecting the internal components from the external environment. The overall structure focuses on the isolation of low-frequency vibrations, provides additional support through the main coil spring 27, and uses an adjustable damper to adjust the vibration attenuation speed, further improving the low-frequency vibration isolation performance of the system. When the device is operating in parallel mode, the voice coil motor 24 and the piezoelectric actuator 9 work independently for low-frequency and high-frequency vibrations, respectively, greatly improving the adaptability and effect of vibration isolation.

[0067] Fig.16 and 17 The diagrams are the working principle diagrams of the series structure and parallel structure of the piezoelectric actuator 9 and the voice coil motor 24, respectively, where K1, K2, K3 and K4 represent the stiffness of the piezoelectric actuator 9, the voice coil motor 24, the primary coil spring 27 and the secondary coil spring 28, respectively, C represents the equivalent damping of the system, and δ1 and δ2 represent the displacement of the piezoelectric actuator 9 and the voice coil motor 24, respectively. In the series mode, the piezoelectric actuator 9 and the voice coil motor 24 are connected and work together through the push rod displacement mechanism (switching component). Assume x i is the displacement input of the base platform, x o is the displacement output of load platform 1;

[0068] According to Hooke's law F = Kx, the force F is the same when connected in series. The total displacement of the piezoelectric actuator 9 and the voice coil motor 24 in series is δ = δ1 + δ2. From F = K1δ1 = K2δ2, we can get )Total displacement According to the equivalent stiffness K eq Definition of F=K eq δ, we can get Right now According to Newton's second law F = Ma, for the load platform M, the forces acting on it are: the force F of the main coil spring K3 K3 =K3(X o -X i ), the force F of the secondary coil spring K4 K4 =K4(X o -X i ), equivalent force F eq =K eq (X i -X o (. Damping force The kinetic equation is: Substitute Simplified Perform Laplace transform on the dynamic equation, let s = jω, Ms 2 X o (s)+CsX o (s)+(K3+K4+K eq )X o (s) = (K3 + K4 + K eq )X i (s)+CsX i (s), the transfer function T(s) is, In the parallel mode, the piezoelectric actuator 9 is connected in series with the secondary coil spring 28, and the voice coil motor 24 is connected in parallel with the main coil spring 27. In parallel, the displacement δ is the same, and the total force F=F1+F2, where F1=K1δ, F2=K2δ, so the equivalent stiffness K eq =K1+K2, the subsequent kinetic equation and transfer rate function T(s) derivation process is consistent with the series mode.

[0069] Through the above re-established dynamic model and transfer rate function for the series and parallel situations, the difference between the two in structure and control characteristics can be more clearly seen, and can be used to further analyze the vibration transfer characteristics of the system at different frequencies and other related contents. Its role is that the series mode is suitable for wide-band vibration control, the low frequency is dominated by the voice coil motor, and the high frequency is compensated by the piezoelectric actuator 9; in the parallel mode, the division of labor is clear, the piezoelectric actuator 9 handles high-frequency vibration, the voice coil motor 24 and the spiral spring handle low-frequency vibration, and the system achieves wide-band efficient vibration isolation through mode switching.

[0070] Fig.18, 19 The vibration isolation performance of the voice coil motor 24 and the piezoelectric actuator 9 under different control modes is demonstrated. Fig.18 In the frequency domain comparison, by comparing with the original signal, it can be seen that the voice coil motor 24 can significantly reduce the transmissibility in the low frequency band and has good vibration isolation performance; the piezoelectric actuator 9 has an obvious effect on reducing the transmissibility in the high frequency band and has good vibration isolation performance; and the vibration isolator controlled by the voice coil and piezoelectric composite can effectively reduce the transmissibility in both low and high frequency environments, showing a good vibration isolation effect. Fig.19 The time domain signal is shown. When the voice coil motor 24 is actively controlled, it corresponds to low-frequency signal excitation; when the piezoelectric actuator 9 is actively controlled, it corresponds to high-frequency signal excitation; and the voice coil and piezoelectric composite control inputs a composite excitation signal of low frequency and high frequency, further demonstrating the advantages of composite control in processing signals of different frequencies. This composite control method makes full use of the low-frequency vibration isolation characteristics of the voice coil motor 24 and the high-frequency vibration isolation characteristics of the piezoelectric actuator 9, effectively making up for the limitations of a single actuator in vibration isolation applications, and can achieve more reliable and efficient vibration isolation in the full frequency band, greatly improving the adaptability and stability of the vibration isolation system in complex vibration environments, and providing a strong guarantee for the wide application of vibration isolation technology in multiple fields.

[0071] In one embodiment, the switching assembly includes a limit plate 32, which is fixedly connected to the voice coil motor assembly 4. Preferably, the limit plate 32 is fixedly arranged on the first end cover 25 of the voice coil motor assembly 4, and the limit plate 32 is fixedly connected to the first end cover 25. A through hole 33 is provided in the limit plate 32, and a clamping block 34 is provided on the limit plate 32, and the clamping block 34 is slidably connected to the transmission block 10. In some cases, a transmission slot 35 is assumed to be provided on the transmission block 10, and the clamping block 34 can be inserted into the transmission slot 35 of the transmission block 10, and the transmission slot 35 and the clamping block 34 are slidably matched. Preferably, when the piezoelectric actuator 9 is located in the first transmission area 5 or the second transmission area 8, the corresponding edges of the transmission slot 35 can abut against the clamping block 34, thereby further providing a limit. The transmission block 10 can move more stably along a preset trajectory through the sliding match between the transmission slot 35 and the clamping block 34, and the transmission block 10 can pass through the limit plate 32. The end of the transmission block 10 is detachably connected to the piezoelectric actuator 9, and the end of the transmission block 10 away from the piezoelectric actuator 9 is connected to a push plate 36, and a displacement spring 37 is connected between the push plate 36 and the limit plate 32, one end of the displacement spring 37 is fixedly connected to the limit plate 32, and the other end of the displacement spring 37 is fixedly connected to the push plate 36; and the displacement spring 37 is also a coil spring, and the middle part of the displacement spring 37 has a through hole, through the through hole of the displacement spring 37, the displacement spring 37 can be sleeved on the outside of the transmission block 10; the switching assembly also includes a cam 38, through which the push plate 36 can be pushed to reciprocate, and the push plate 36 can drive the transmission block 10 to move synchronously while moving, forming a "cam-push plate displacement mechanism"; a tongue 39 is provided on the side of the push plate 36 facing the cam 38, and the tongue 39 can cooperate with the cam 38, and the tongue 39 is a semicircular structure. During the rotation process, the cam 38 can abut against the tongue 39 and push the tongue 39 to move. While the tongue 39 moves, it can drive the transmission block 10 and the piezoelectric actuator 9 to move synchronously, so that the transmission block 10 produces a lateral displacement. When the end of the cam 38 abuts against the end of the tongue 39 perpendicular to the push plate 36, the piezoelectric actuator 9 is located in the second transmission area 8. At this time, the transmission block 10 is connected to the first transmission area 5, and the actuator is in a parallel state, that is, the piezoelectric actuator 9 is connected in parallel with the voice coil motor 24; when the cam 38 is disengaged from the abutment with the tongue 39, the displacement spring 37 drives the push plate 36 and the transmission block 10 to reset, so that the piezoelectric actuator 9 is connected to the first transmission area 5; at this time, the actuator is in a series state, that is, the piezoelectric actuator 9 is connected in series with the voice coil motor 24. In the present invention, through the precisely designed cam mechanism and slide groove structure, the piezoelectric actuator 9 can flexibly switch between the voice coil motor 24 and the secondary coil spring 28, and the switching process is smoother, thereby achieving seamless conversion between the series and parallel modes.

[0072] In this embodiment, a knob 40 is provided on the cam 38, and the knob 40 is preferably fixedly connected to the cam 38. When the knob 40 is rotated, the cam 38 can be driven to rotate synchronously; a first electromagnet 41 is provided on the transmission block 10, and the transmission block 10 is connected to the piezoelectric actuator 9 through the first electromagnet 41. Specifically, when the first electromagnet 41 is energized, a magnetic force is generated, and the piezoelectric actuator 9 can be adsorbed. The first electromagnet 41 is preferably a square electromagnet. A second electromagnet 42 is provided on the top of the transmission block 10, and the second electromagnet 42 is preferably a circular electromagnet. When the voice coil motor 24 is connected in parallel with the piezoelectric actuator 9, the piezoelectric actuator 9 is arranged in the second transmission area 8, and the second electromagnet 42 is energized to have magnetism. At this time, the second electromagnet 42 on the top of the transmission block 10 can be magnetically adsorbed with the first flexible hinge 20, so as to achieve a stable connection between the first flexible hinge 20 and the transmission block 10.

[0073] In summary, in the present invention, the switching device includes a knob 40, a cam 38, a tongue 39, a displacement spring 37, a limit plate 32, a transmission block 10, a circular electromagnet and a square electromagnet, forming a flexible mode switching system. In the switching system, the knob 40 is connected to the cam 38, and when the knob 40 is rotated, the cam 38 is driven to rotate, thereby generating a push stroke in the mechanism of the cam 38. This push stroke directly acts on the tongue 39, and the tongue 39 is displaced along the set trajectory. The tongue 39 is connected in series with the displacement spring 37, and the displacement spring 37 provides a buffering and reset function for the tongue 39; the tongue 39 is integrally formed with the transmission block 10, and the upper end and the end of the transmission block 10 are respectively installed with a circular electromagnet and a square electromagnet, which have magnetism after power is turned on, and the square electromagnet can be dynamically connected or disconnected with the piezoelectric actuator 9. The circular electromagnet is a key component for switching between series and parallel modes. When powered on in the parallel mode, the circular electromagnet and the first flexible hinge 20 are attracted to ensure that the transmission block 10 can effectively transmit force to the voice coil motor 24 and other components, maintain a stable connection, avoid interference causing connection failure, and ensure stable operation and precise control of the parallel mode. The connection state can be quickly changed during mode switching, improving the system response speed and flexibility, and optimizing the vibration reduction performance. This design allows the push rod to switch seamlessly between series and parallel modes. When the transmission block 10 is displaced, the movement range of the transmission block 10 is controlled by precise cooperation with the limit plate 32. The limit plate 32 is fixed on the voice coil motor assembly 4, and the limit plate 32 cooperates with the transmission slot 35 structure of the transmission block 10 to achieve accurate limiting, ensuring that the transmission block 10 will not be offside or offset during the switching process.

[0074] In the first embodiment, a second limiting ring 43 is sleeved on the outer side of the second guide rod 21, the second limiting ring 43 is fixedly connected to the cover plate 19, and the second limiting ring 43 is slidably connected to the second guide rod 21, so that the sliding of the second guide rod 21 can be guided and limited by the second guide rod 21. A base 45 is provided at the bottom of the voice coil motor assembly 4 and the piezoelectric ceramic support 7. In the present invention, the load platform 1 is located at the top of the system, and the equipment to be isolated from vibration is carried by the load platform 1. The piezoelectric main control vibration isolation unit connects the load platform 1 and the base 45 for high-frequency vibration control, and utilizes the rapid response characteristics of piezoelectric materials to effectively suppress high-frequency vibrations. The voice coil motor main control vibration isolation unit is connected in parallel with the piezoelectric actuator 9, and is responsible for low-frequency vibration control, and realizes low-frequency vibration isolation through its large stroke and stable thrust characteristics. The first limit ring 17 and the second limit ring 43 are fixed to the cover plate 19 by bolts, providing structural support for the entire device, while allowing the load platform 1 to move freely along the first guide rod 11 and the second guide rod 21. A space for the load platform 1 to move freely is provided above the cover plate 19, giving the system a certain degree of displacement freedom.

[0075] The vibration reduction structure 2, as the core component of the system, is directly connected to the load platform 1 and the base 45, and realizes the isolation and attenuation of vibration through structural design and active and passive control. The actuator housing 18 covers the entire vibration reduction system and is fixed to the base 45 by bolts, providing protection and stable support for the internal structure. The base 45 is fixed to the external environment and serves as the basic component of the system, providing a stable support base for the entire device, thereby ensuring the stability of the equipment under complex vibration conditions. Through the design of active and passive composite control, the vibration absorber can achieve efficient vibration isolation in a wide frequency band from low frequency to high frequency.

[0076] In one embodiment, the cam 38 is rotatably connected to the column 44 , and the cam 38 can be supported by the column 44 so that the cam 38 can be horizontally aligned with the tongue 39 .

[0077] In one embodiment, an acceleration sensor 46 is provided between the first damper 12 and the first flexible hinge 20, and an acceleration sensor 46 is also provided between the second damper 22 and the second flexible hinge 23. Preferably, the acceleration sensor 46 is fixed to the bottom of the adjustable damper by a threaded connection. The acceleration sensor 46 monitors the vibration state in real time, feeds back the vibration data to the control system, ensures the accuracy of the vibration data, and provides real-time feedback to the control system to achieve precise active control.

[0078] In the present invention, the application of compound actuators in series and parallel has its own advantages and disadvantages. The series structure can superimpose the displacements of the two actuators, thereby increasing the total displacement of the system, but may be subject to certain limitations in dynamic response; the parallel structure allows each actuator to function independently, which is convenient for the division of labor between high and low frequency control, but has higher requirements for precision matching and a more complex structure. Therefore, in order to take into account the control requirements of large stroke and high precision, the present invention uses a flexible series-parallel switching mechanism to enable the system to switch between different modes to adapt to complex and diverse vibration environments and precision requirements.

[0079] The design of the present invention realizes wide-band vibration control of the system in an environment where low-frequency and high-frequency coexist, and can freely switch between precise small stroke and large stroke, greatly improving the adaptability and overall vibration reduction performance of the system. This flexible series-parallel switching mechanism significantly improves the vibration reduction performance and response speed of the system, and can flexibly adjust the stiffness of the system according to actual needs. In addition, the present invention also realizes dynamic adjustment of the stiffness and damping of the system by introducing a flexible hinge, an adjustable damping device and a secondary coil spring 28, further optimizing the comprehensive performance of the system and enhancing the adaptability and control accuracy of the system.

[0080] It should be noted that it is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims are included in the present invention. Any reference numerals in the claims should not be regarded as limiting the claims involved.

[0081] The present invention uses specific examples to illustrate the principles and implementation methods of the present invention. The above examples are only used to help understand the method and core ideas of the present invention. At the same time, for those skilled in the art, according to the ideas of the present invention, there will be changes in the specific implementation methods and application scope. In summary, the content of this specification should not be understood as limiting the present invention.

Claims

1. A composite actuator based on a voice coil motor and piezoelectric ceramics, characterized in that: include: Load platform (1); A first vibration isolation unit comprises a voice coil motor assembly (4) and a first vibration isolation member (3), wherein the first vibration isolation member (3) is connected to the load platform (1), and a first transmission area (5) is provided between the voice coil motor assembly (4) and the first vibration isolation member (3); A second vibration isolation unit comprises a piezoelectric ceramic support member (7) and a second vibration isolation member (6), wherein the second vibration isolation member (6) is connected to the load platform (1), and a second transmission area (8) is provided between the piezoelectric ceramic support member (7) and the second vibration isolation member (6); A piezoelectric actuator (9), wherein the piezoelectric actuator (9) is arranged in the first transmission area (5) or the second transmission area (8); A switching component comprises a transmission block (10) for driving the piezoelectric actuator (9) to switch between the first transmission zone (5) and the second transmission zone (8); the piezoelectric actuator (9) passes through the first transmission zone (5) and the second transmission zone (8) along the trajectory of the movement of the transmission block (10); the piezoelectric actuator (9) located in the first transmission zone (5) is connected to the voice coil motor assembly (4) and the first vibration isolation member (3) at the same time; the piezoelectric actuator (9) located in the second transmission zone (8) is connected to the piezoelectric ceramic support member (7) and the second vibration isolation member (6) at the same time, and at this time the transmission block (10) is connected to the first vibration isolation member (3) and the voice coil motor assembly (4).

2. The composite actuator based on voice coil motor and piezoelectric ceramic according to claim 1, characterized in that: The first vibration isolation member (3) comprises a first guide rod (11) and a first damper (12); one end of the first guide rod (11) is connected to the load platform (1), and the other end is connected to the first damper (12); a first limiting ring (17) is sleeved on the outer end of the first guide rod (11); the first limiting ring (17) is slidably connected to the first guide rod (11); and the first limiting ring (17) is fixedly arranged on the actuator housing (18).

3. The composite actuator based on voice coil motor and piezoelectric ceramic according to claim 2, characterized in that: A first flexible hinge (20) is connected to one end of the first damper (12) away from the first guide rod (11); the axial stiffness of the first flexible hinge (20) is greater than the torsional stiffness; the piezoelectric actuator (9) located in the first transmission area (5) is connected to the first flexible hinge (20); when the piezoelectric actuator (9) is located in the second transmission area (8), the transmission block (10) is connected to the first flexible hinge (20).

4. The composite actuator based on voice coil motor and piezoelectric ceramic according to claim 3, characterized in that: The second vibration isolation member (6) comprises a second guide rod (21) and a second damper (22), the two ends of the second guide rod (21) being respectively connected to the load platform (1) and the second damper (22), the end of the second damper (22) away from the second guide rod (21) being connected to a second flexible hinge (23), the axial stiffness of the second flexible hinge (23) being greater than the torsional stiffness, and the piezoelectric actuator (9) located in the second transmission zone (8) being connected to the second flexible hinge (23).

5. The composite actuator based on voice coil motor and piezoelectric ceramic according to claim 4, characterized in that: The voice coil motor assembly (4) comprises a voice coil motor (24) and a first end cover (25) arranged on the voice coil motor (24); the first transmission area (5) is located between the first flexible hinge (20) and the first end cover (25); and the first end cover (25) is connected to the piezoelectric actuator (9) or the transmission block (10).

6. The composite actuator based on voice coil motor and piezoelectric ceramic according to claim 5, characterized in that: A main coil spring (27) is sleeved on the outer side of the voice coil motor (24), one end of the main coil spring (27) is connected to the first end cover (25), a voice coil motor housing (31) is sleeved on the outer side of the main coil spring (27), and the other end of the main coil spring (27) is fixedly connected to the bottom plate of the voice coil motor housing (31).

7. The composite actuator based on voice coil motor and piezoelectric ceramic according to claim 4, characterized in that: The piezoelectric ceramic support member (7) comprises a secondary coil spring (28) and a second end cover (29), wherein the second end cover (29) is connected to one end of the secondary coil spring (28), the second transmission area (8) is located between the second flexible hinge (23) and the second end cover (29), a secondary housing (30) is sleeved on the outer side of the secondary coil spring (28), and the other end of the secondary coil spring (28) is fixedly connected to the bottom plate of the secondary housing (30).

8. The composite actuator based on voice coil motor and piezoelectric ceramic according to claim 1, characterized in that: The switching assembly also includes a limit plate (32), the limit plate (32) is fixedly arranged on the voice coil motor assembly (4), a through hole (33) is opened in the limit plate (32), a clamping block (34) located in the through hole (33) is arranged on the limit plate (32), the clamping block (34) is slidably connected to the transmission block (10), the end of the transmission block (10) is detachably connected to the piezoelectric actuator (9), the end of the transmission block (10) away from the piezoelectric actuator (9) is connected to a push plate (36), and a displacement spring (37) is connected between the push plate (36) and the limit plate (32); the displacement spring (37) is sleeved on the outer side of the sliding track of the transmission block (10).

9. The composite actuator based on voice coil motor and piezoelectric ceramic according to claim 8, characterized in that: The switching assembly also includes a cam (38) for pushing the push plate (36) to reciprocate, the cam (38) being connected to the output shaft of the motor, and a tongue (39) cooperating with the cam (38) being provided on the side of the push plate (36) facing the cam (38).

10. The composite actuator based on voice coil motor and piezoelectric ceramic according to claim 1, characterized in that: The transmission block (10) is provided with a first electromagnet (41) for connecting to the piezoelectric actuator (9), and a second electromagnet (42) is provided on the top of the transmission block (10). The second electromagnet (42) located in the first transmission area (5) is connected to the first vibration isolation member (3).

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