Magnetic shielding integrated superconducting quantum interference assembly

Abstract

The invention provides a magnetic-shielding integrated superconducting quantum interference assembly, and the assembly comprises a refrigerating machine which is used for generating cold energy so as to enable a superconducting interference device to reach a preset temperature, and the outside of the refrigerating machine is provided with a magnetic shield; the cold platform is arranged between the flexible cold chain and the columnar cold chain of the refrigerator; the flexible cold chain is connected with a cold finger of the refrigerator, and magnetic shields are arranged outside the cold finger, the flexible cold chain and the columnar cold chain; and the superconducting interference device is arranged at the lower part of the columnar cold chain, at least one layer of magnetic shielding is arranged outside the superconducting interference device, and the magnetic shielding is used for shielding magnetic noise generated by corresponding components. Aiming at the characteristic of large magnetic noise of the refrigerating machine, magnetic shielding is designed for the refrigerating machine and the cold finger, thermal design is also considered, and normal work of the assembly is guaranteed. According to the invention, the structure is optimized, the superconducting interference device is biased away from the maximum magnetic noise source, and the magnetic noise of the superconducting interference device is reduced to the minimum through the multi-layer magnetic shielding design.

Description

Technical Field

[0001] The present application relates to the technical field of low-temperature refrigeration equipment, in particular to the technical field of electromagnetic protection related to this technical field, and specifically to a magnetically shielded integrated superconducting quantum interference component. Background Art

[0002] At present, superconducting quantum interference devices are widely used in the fields of geomagnetic detection and magnetic field detection, and they need to work continuously for a long time during the application process. On the other hand, superconducting quantum interference devices must work at deep low temperatures such as liquid nitrogen and liquid helium. The traditional component structure is redundant and complex, and a vacuum and low-temperature environment is provided for the device by constructing liquid refrigerants and vacuum dewars. With the development of the demand for miniature and low-power detection, traditional solutions cannot meet the demand.

[0003] However, the operation of the refrigerator itself will introduce a large amount of magnetic noise, the sources of which include the operation of the refrigerator compressor motor, the air pressure changes of the cold fingers and the noise introduced by tiny vibrations. How to shield them has become a technical difficulty in existing methods.

[0004] It is understandable that if these noises are not processed, they will affect the detection effect of the device, increase the background noise, and make the target noise submerged in the noise of the component itself, thus losing the detection function. In addition, even if the signal can be processed by algorithm to reduce the noise, the background noise of the system still needs to be shielded and reduced through structural design. Summary of the invention

[0005] The present invention provides a magnetically shielded integrated superconducting quantum interference component, aiming to solve the technical problem of excessive system background magnetic noise in existing superconducting quantum interference devices during operation.

[0006] In order to solve at least one of the above problems existing in the prior art, an embodiment of the present application provides a magnetically shielded integrated superconducting quantum interference component.

[0007] According to an embodiment of the present application, the present application provides a magnetically shielded integrated superconducting quantum interference component, including:

[0008] A refrigerator, used to generate cold so that the superconducting interference device reaches a preset temperature, and a magnetic shield is provided on the outside of the refrigerator;

[0009] A cold platform is arranged between the flexible cold chain and the columnar cold chain of the refrigerator; the flexible cold chain is connected to the cold finger of the refrigerator, and the cold finger, the flexible cold chain and the columnar cold chain are all provided with magnetic shielding outside;

[0010] The superconducting interference device is arranged at the lower part of the columnar cold chain, and at least one layer of magnetic shielding is arranged on the outside, and the magnetic shielding is used to shield the magnetic noise generated by the corresponding components.

[0011] In some embodiments of the present application, the refrigerator further comprises:

[0012] The heat sink is arranged on the top of the refrigerator and is used to absorb the heat generated when the refrigerator is working.

[0013] In some embodiments of the present application, a magnetically shielded integrated superconducting quantum interference component further includes:

[0014] A refrigerator mounting plate, arranged at the bottom of the main body of the refrigerator;

[0015] The component mounting base plate has one side connected to the cold platform through a plurality of cold platform support rods; and the other side connected to the refrigerator mounting plate through a bellows, wherein the bellows is used to reduce the vibration of the refrigerator on the superconducting interference device.

[0016] In some embodiments of the present application, a plurality of magnetic shields are provided between the refrigerator mounting plate and the component mounting base plate and inside the bellows.

[0017] In some embodiments of the present application, the component mounting substrate is provided with a through hole for allowing the flexible cold chain or the cold finger to pass through so as to be connected to the cold platform.

[0018] In some embodiments of the present application, the cold finger and the magnetic shielding outside the flexible cold chain pass through the through hole and are arranged between the refrigerator mounting plate and the cold platform.

[0019] In some embodiments of the present application, a magnetic shield is provided between the component mounting substrate and the cold platform and outside the cold platform support rod.

[0020] In some embodiments of the present application, the columnar cold chain and the cold platform are offset.

[0021] In some embodiments of the present application, a portion of the bottom of the cold platform is offset from the columnar cold chain, and a magnetic shield is provided on the outside;

[0022] The rest of the bottom of the cold platform is provided with magnetic shielding.

[0023] In some embodiments of the present application, a mounting base is provided between the columnar cold chain and the superconducting interference device, and the mounting base is surrounded by the columnar cold chain and the magnetic shielding outside the superconducting interference device.

[0024] From the above description, it can be seen that an embodiment of the present invention provides a magnetically shielded integrated superconducting quantum interference component, including: a refrigerator, used to generate cold so that the superconducting interference device reaches a preset temperature, and a magnetic shield is arranged on the outside of the refrigerator; a cold platform, arranged between the flexible cold chain and the columnar cold chain of the refrigerator; the flexible cold chain is connected to the cold finger of the refrigerator, and the cold finger, the flexible cold chain and the outside of the columnar cold chain are all provided with magnetic shielding; a superconducting interference device, arranged at the lower part of the columnar cold chain, and at least one layer of magnetic shielding is arranged on the outside, and the magnetic shielding is used to shield the magnetic noise generated by the corresponding component.

[0025] The present invention provides a magnetically shielded integrated superconducting quantum interference component. First, in view of the large magnetic noise of the refrigerator itself, magnetic shielding is designed for the refrigerator and the cold finger respectively, and thermal design is also considered to ensure the normal operation of the component. Secondly, in order to achieve low magnetic noise of the superconducting interference device, the present invention optimizes the structure and places it away from the largest source of magnetic noise. Finally, the present invention minimizes the magnetic noise of the superconducting interference device through a multi-layer magnetic shielding design. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the prior art descriptions. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work. In the drawings:

[0027] Figure 1 This is a schematic diagram of the cross-sectional structure of a magnetically shielded integrated superconducting quantum interference component according to an embodiment of the present application.

[0028] Reference numerals:

[0029] 1: Heat sink;

[0030] 2: Refrigerator;

[0031] 3, 4, 7, 11, 12, 14, 17, 18, 21, 22: magnetic shielding;

[0032] 5: Refrigerator mounting plate;

[0033] 6: Cold fingers;

[0034] 8: Bellows;

[0035] 9: Component mounting substrate;

[0036] 10: Flexible cold chain;

[0037] 13: Cold platform support rod;

[0038] 15: Cold platform;

[0039] 16: Columnar cold chain;

[0040] 19: Install the base;

[0041] 20: Superconducting interferometer device;

[0042] 23: Shell;

[0043] 24: Through hole. DETAILED DESCRIPTION

[0044] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0045] The patent application with publication number CN118890887A discloses an electromagnetic protective shell, comprising: a first protective shell, installed on the periphery of the magnetic field, for achieving the shielding effect of the magnetic field; a second protective shell, installed on the periphery of the first protective shell and the electric field, for achieving the shielding effect of the electric field and the magnetic field, wherein the second protective shell comprises at least two layers of coating, and a metal layer arranged between the coatings, and the coatings are used to isolate the electric field and the magnetic field.

[0046] It can be seen that the structure of the electromagnetic protection shell is very simple and can only be used for simple working conditions. The metal coating or structure only involves the isolation of the magnetic field and the electric field, without considering the thermal and related conditions of the components. The protection is only the shell.

[0047] Based on this, and in order to solve at least one of the above-mentioned problems existing in the prior art, an embodiment of the present application provides a magnetically shielded integrated superconducting quantum interference component. Figure 1 Schematic diagram of a magnetically shielded integrated superconducting quantum interference component according to an embodiment of the present application. Figure 1 As shown, a magnetically shielded integrated superconducting quantum interference component comprises:

[0048] A refrigerator 2, used to generate cold to make the superconducting interference device 20 reach a preset temperature, and a magnetic shield 3 is provided outside the refrigerator 2;

[0049] A cold platform 15 is arranged between the flexible cold chain 10 of the refrigerator 2 and the columnar cold chain 16; the flexible cold chain 10 is connected to the cold finger 6 of the refrigerator 2, and the cold finger 6, the flexible cold chain 10 and the columnar cold chain 16 are all provided with magnetic shielding outside;

[0050] The superconducting interference device 20 is arranged at the lower part of the columnar cold chain 16, and at least one layer of magnetic shielding is arranged on the outside, and the magnetic shielding is used to shield the magnetic noise generated by the corresponding components.

[0051] From the above description, it can be seen that an embodiment of the present invention provides a magnetically shielded integrated superconducting quantum interference component, including: a refrigerator, used to generate cold so that the superconducting interference device reaches a preset temperature, and a magnetic shield is arranged on the outside of the refrigerator; a cold platform, arranged between the flexible cold chain and the columnar cold chain of the refrigerator; the flexible cold chain is connected to the cold finger of the refrigerator, and the cold finger, the flexible cold chain and the outside of the columnar cold chain are all provided with magnetic shielding; a superconducting interference device, arranged at the lower part of the columnar cold chain, and at least one layer of magnetic shielding is arranged on the outside, and the magnetic shielding is used to shield the magnetic noise generated by the corresponding component.

[0052] The present invention provides a magnetically shielded integrated superconducting quantum interference component. First, the present invention combines shielding design, structural design, mechanical layout and other designs, and considers multiple physical fields such as thermal and magnetic fields to achieve the design of a compact structure of the integrated superconducting quantum interference component. In addition, the present invention considers the cooling of the superconducting interference device and designs a corresponding shielding structure to meet the application requirements of the superconducting interference device for low noise.

[0053] Magnetic noise refers to the noise generated by electromagnetic force during the operation of electrical equipment such as refrigerators. Preferably, the above-mentioned magnetic noise includes:

[0054] Electromagnetic force: The iron core and winding of the refrigerator motor or transformer will generate periodic electromagnetic force under the action of the alternating magnetic field. These electromagnetic forces act on the iron core and structural parts, causing vibration and thus generating noise.

[0055] Magnetostrictive effect: Ferromagnetic materials undergo minute dimensional changes under the action of a magnetic field. This phenomenon is called magnetostriction. The magnetostrictive effect causes the core material to undergo minute mechanical vibrations when the magnetic field changes, generating noise.

[0056] Mechanical structure resonance: Vibrations caused by electromagnetic forces or magnetostriction may excite resonances in certain mechanical structures of motors or transformers, amplifying the noise.

[0057] Uneven air gap magnetic field: In the motor, if the air gap magnetic field between the rotor and the stator is uneven, it will also cause vibration and noise. For example, the uneven air gap may be caused by manufacturing errors or improper assembly.

[0058] Superconducting Quantum Interference Device (SQUID) is a very precise magnetic field detector that uses quantum interference in superconducting loops to measure magnetic fields based on the quantum effect of superconducting materials. SQUID is widely used in basic physics research, medical imaging (such as EEG measurement, magnetic resonance imaging) and experiments in the field of ultra-low temperature.

[0059] SQUID consists of a superconducting loop and one or more superconducting tunneling junctions (Josephson junctions). The Josephson junction is separated by two superconducting electrodes and a thin insulating layer (usually an oxide layer) and has a quantum tunneling effect. This structure uses the interference phenomenon of quantum mechanics and can detect changes in external magnetic fields very sensitively.

[0060] The working principle of SQUID mainly relies on the Josephson effect, that is, when passing through a superconducting tunnel junction, current can flow without being affected by resistance, and the magnitude of the current is related to the external magnetic field. Specifically, the main working principles of SQUID include the following aspects:

[0061] Quantum interference: In a SQUID, when the external magnetic field changes, it affects the superconducting current flowing in the superconducting loop. According to the quantum interference effect, the magnetic flux in the loop affects the phase of the current, causing interference effects to occur. These interference effects affect the current intensity and phase in the superconducting loop, thereby changing the output signal.

[0062] Magnetic flux quantization: The magnetic flux in the superconducting loop is quantized, usually in units of Planck's constant and the quantity related to the superconducting current (magnetic flux quantum). When the magnetic flux change caused by the external magnetic field exceeds one magnetic flux quantum, the response of the SQUID will jump significantly, forming a periodic magnetic field response.

[0063] Relationship between critical current and external magnetic field: An important characteristic of SQUID is that the critical current of the superconducting tunnel junction (that is, when the current reaches a certain threshold, the superconducting state is destroyed) changes with the external magnetic field. Under a certain external magnetic field, the output voltage of the SQUID will change, generating a signal that is linearly or nonlinearly related to the magnetic field strength.

[0064] Main components:

[0065] Superconducting loop: generally uses aluminum, lead, titanium or other low-temperature superconducting materials to form a closed loop.

[0066] Josephson junction: Made of two superconducting electrodes and a thin insulating layer. Often used to regulate the way current flows through a loop.

[0067] Magnetic flux sensor: measures the strength of an external magnetic field by sensing changes in the magnetic field.

[0068] Readout circuitry: Includes circuitry for measuring changes in current in the superconducting loop, with the output available for further analysis.

[0069] Continue to see Figure 1 In some embodiments of the present application, the refrigerator 2 further includes:

[0070] The heat sink 1 is arranged on the top of the refrigerator 2 and is used to absorb the heat generated when the refrigerator 2 is working.

[0071] The heat sink (or radiator) of a chiller is used to efficiently release the waste heat from the compressor and condenser in the refrigeration cycle to the surrounding environment. Heat sinks are made of highly thermally conductive materials such as aluminum or copper and are designed with a large surface area to improve heat dissipation efficiency. They can remove heat through natural convection or forced air cooling to ensure efficient operation of the chiller.

[0072] Continue to see Figure 1 In some embodiments of the present application, a magnetically shielded integrated superconducting quantum interference component further includes:

[0073] A refrigerator mounting plate 5 is arranged at the bottom of the main body of the refrigerator 2;

[0074] The component mounting substrate 9 has one side ( Figure 1 The component mounting substrate 9 faces downward) is connected to the cold platform 15 through a plurality of cold platform support rods 13; the other side ( Figure 1 The component mounting substrate 9 (facing upward) is connected to the refrigerator mounting plate 5 through a bellows 8, and the bellows 8 is used to reduce the vibration of the refrigerator 2 on the superconducting interference device 20.

[0075] Continue to see Figure 1 In some embodiments of the present application, a plurality of magnetic shields 7 are provided between the refrigerator mounting plate 5 and the component mounting base plate 9 and inside the bellows 8 .

[0076] The cold finger 6 will generate a weak displacement vibration inside when working, thereby introducing magnetic noise, so it needs to be shielded. On the component mounting substrate 9, multiple interfaces of the magnetic shield 7 are reserved for installing the magnetic shield 7. Preferably, the material of the magnetic shield 7 is a ferromagnetic shielding material. Ferromagnetic shielding materials are mainly used to effectively shield external magnetic fields and are made of iron or other iron alloys (such as silicon steel, iron-nickel alloy, etc.). These materials are characterized by having a high relative magnetic permeability, which can significantly attract and guide the magnetic field, thereby reducing its interference with sensitive areas.

[0077] Continue to see Figure 1In some embodiments of the present application, the component mounting substrate 9 is provided with a through hole 24 for allowing the flexible cold chain 10 or the cold finger 6 to pass through (when the cold finger 6 is longer, the cold finger 6 passes through the through hole 24, and when the cold finger 6 is shorter, the flexible cold chain 10 at its lower part passes through the through hole 24) to connect with the cold platform 15.

[0078] Continue to see Figure 1 In some embodiments of the present application, the cold finger 6 and the magnetic shield 12 outside the flexible cold chain 10 pass through the through hole and are arranged between the refrigerator mounting plate 5 and the cold platform 15.

[0079] A magnetic shield is provided between the component mounting substrate 9 and the cold platform 15 and outside the cold platform support rod 13 .

[0080] Continue to see Figure 1 In some embodiments of the present application, the columnar cold chain 16 and the cold platform 15 are offset (this offset setting can avoid the refrigerator 2 with the largest magnetic noise and the components that conduct cold energy, reducing the magnetic noise to the minimum). Since the superconducting interference device 20 is set at the lower part of the columnar cold chain 16, the superconducting interference device 20 and the cold platform 15 are also offset.

[0081] Continue to see Figure 1 When the columnar cold chain 16 and the cold platform 15 are offset, a portion of the bottom of the cold platform 15 is offset from the columnar cold chain 16 and a magnetic shield 22 is provided on the outside; the rest of the bottom of the cold platform 15 is provided with a magnetic shield 14.

[0082] Continue to see Figure 1 In some embodiments of the present application, an installation base 19 (for installing the superconducting interference device 20) is arranged between the columnar cold chain 16 and the superconducting interference device 20, and the installation base 19 is surrounded by the columnar cold chain 16 and the magnetic shielding 22 outside the superconducting interference device 20.

[0083] Preferably, a magnetic shield 21 is provided at the lower portion of the mounting base 19 , and the magnetic shield 21 surrounds the superconducting interference device 20 . A magnetic shield 18 is also provided at the upper portion of the mounting base 19 for shielding the magnetic noise of the mounting base 19 .

[0084] It can be understood that the magnetic shield 21 is the primary magnetic shield of the superconducting interference device 20, and the magnetic shield 22 is the secondary magnetic shield of the superconducting interference device 20. The multi-level magnetic shielding setting can further reduce the magnetic noise received by the superconducting interference device 20.

[0085] Continue to see Figure 1In some embodiments of the present application, a relatively large housing 23 is disposed at the bottom of the mounting base 19 , which is located at the outermost side and the bottom of the entire assembly and is used to accommodate all components at the bottom of the mounting base 19 .

[0086] From the above description, it can be seen that an embodiment of the present invention provides a magnetically shielded integrated superconducting quantum interference component, including: a refrigerator, used to generate cold so that the superconducting interference device reaches a preset temperature, and a magnetic shield is arranged on the outside of the refrigerator; a cold platform, arranged between the flexible cold chain and the columnar cold chain of the refrigerator; the flexible cold chain is connected to the cold finger of the refrigerator, and the cold finger, the flexible cold chain and the outside of the columnar cold chain are all provided with magnetic shielding; a superconducting interference device, arranged at the lower part of the columnar cold chain, and at least one layer of magnetic shielding is arranged on the outside, and the magnetic shielding is used to shield the magnetic noise generated by the corresponding component.

[0087] The present invention provides a magnetically shielded integrated superconducting quantum interference component. First, in view of the large magnetic noise of the refrigerator itself, magnetic shielding is designed for the refrigerator and the cold finger respectively, and thermal design is also considered to ensure the normal operation of the component. Secondly, in order to achieve low magnetic noise of the superconducting interference device, the present invention optimizes the structure and places it away from the largest source of magnetic noise. Finally, the present invention minimizes the magnetic noise of the superconducting interference device through a multi-layer magnetic shielding design.

[0088] In order to further illustrate the solution, the present invention also provides a specific application example of a magnetically shielded integrated superconducting quantum interference component.

[0089] like Figure 1 As shown, a low-vibration liquid nitrogen-free high-temperature superconducting interferometer component can be divided into three parts according to the magnetic shielding components: refrigerator magnetic shielding, cold chain and cold platform magnetic shielding, and superconducting interferometer device magnetic shielding.

[0090] The magnetic shield 3, the magnetic shield 4, and the plurality of magnetic shields 7 constitute the magnetic shield of the refrigerator;

[0091] Magnetic shield 11, magnetic shield 12, magnetic shield 14, and magnetic shield 17 constitute the cold chain and cold platform magnetic shield;

[0092] The magnetic shield 18 , the magnetic shield 21 , and the magnetic shield 22 constitute the magnetic shield of the superconducting interference device.

[0093] The heat sink 1 is used to absorb the heat generated by the operation of the motor of the refrigerator 2 and conduct the heat to the external environment. The magnetic shield 3 and the magnetic shield 4 are respectively installed on the outside and the bottom of the refrigerator 2 to shield the magnetic noise generated by the operation of the motor of the refrigerator 2. The refrigerator 2 is integrated with the cold finger 6 (or not integrated, the present application is not limited to this), and the refrigerator 2 is installed on the refrigerator mounting plate 5, and the mounting interface of the magnetic shield 3 and the magnetic shield 4 is left on the refrigerator mounting plate 5. Preferably, the material of the magnetic shield 3 and the magnetic shield 4 is ferromagnetic shielding material.

[0094] The refrigerator mounting plate 5 and the component mounting substrate 9 are connected by a bellows 8, which mitigates the influence of refrigerator vibration on the superconducting interference device 20. The refrigerator mounting plate 5, the component mounting substrate 9 and the bellows 8 are all made of non-magnetic materials, preferably high-strength aluminum alloy.

[0095] On the component mounting substrate 9, multiple interfaces of the magnetic shield 7 are reserved for mounting the magnetic shield 7. When the cold finger 6 is working, a weak displacement vibration will be generated inside, thereby introducing magnetic noise, so it needs to be shielded. Preferably, the material of the magnetic shield 7 is a ferromagnetic shielding material.

[0096] The cold finger 6 is connected to the cold platform 15 through a flexible cold chain 10. At this time, the flexible cold chain 10 passes through the through hole 24 on the component mounting substrate 9, and the flexible cold chain 10 transfers the cold energy from the refrigerator 2 to the cold platform 15 (further transferred to the superconducting interference device 20 through the columnar cold chain 16). A magnetic shield 12 installation interface is reserved on the cold platform 15 to shield the magnetic noise of the flexible cold chain 10 and the cold finger 6. The cold platform 15 is made of high thermal conductivity material. The material of the magnetic shield 12 is ferromagnetic shielding material. The magnetic shield 12 is on the outside of the flexible cold chain 10, and the inner diameter of the multiple magnetic shields 7 is larger than the outer diameter of the magnetic shield 12 to ensure smooth installation.

[0097] The cold platform 15 is connected and fixed to the component mounting base plate 9 through a plurality of cold platform support rods 13. The cold platform support rods 13 are made of a material with a low thermal expansion coefficient and a low thermal conductivity, preferably G-10 (G-10 is a composite material of glass fiber and resin rolled, having the characteristics of insulation, corrosion resistance, and wear resistance).

[0098] A magnetic shield 11 is disposed on the cold platform 15 to cover the magnetic shield 12 and the cold platform support rod 13 to shield the magnetic noise of this part of the structure and material.

[0099] Furthermore, the noise of the refrigerator 2, the cold finger 6 and the flexible cold chain 10 is shielded by the magnetic shield 14. The materials of the magnetic shield 11 and the magnetic shield 14 are both ferromagnetic shielding materials.

[0100] The superconducting interference device 20 is mounted on the mounting base 19 and connected to the cold platform 15 through the columnar cold chain 16, and the cold energy is transferred to the superconducting interference device 20 to ensure its working temperature. Preferably, the mounting position is offset placement (it can be understood that coaxial placement is also possible, but offset can further reduce noise) to avoid the refrigerator 2 with the largest magnetic noise and the components that conduct cold energy, and reduce the magnetic noise to a minimum.

[0101] Magnetic shields 18 and 21 are installed on both sides of the mounting base 19, and the outer periphery is a columnar magnetic shield 17. The magnetic shield 17 is installed on the cold platform 15. The outermost side is further reduced by a primary magnetic shield 22 to reduce noise.

[0102] From the above description, it can be seen that an embodiment of the present invention provides a magnetically shielded integrated superconducting quantum interference component, including: a refrigerator, used to generate cold so that the superconducting interference device reaches a preset temperature, and a magnetic shield is arranged on the outside of the refrigerator; a cold platform, arranged between the flexible cold chain and the columnar cold chain of the refrigerator; the flexible cold chain is connected to the cold finger of the refrigerator, and the cold finger, the flexible cold chain and the outside of the columnar cold chain are all provided with magnetic shielding; a superconducting interference device, arranged at the lower part of the columnar cold chain, and at least one layer of magnetic shielding is arranged on the outside, and the magnetic shielding is used to shield the magnetic noise generated by the corresponding component.

[0103] The present invention provides a magnetically shielded integrated superconducting quantum interference component. First, in view of the large magnetic noise of the refrigerator itself, magnetic shielding is designed for the refrigerator and the cold finger respectively, and thermal design is also considered to ensure the normal operation of the component. Secondly, in order to achieve low magnetic noise of the superconducting interference device, the present invention optimizes the structure and places it away from the largest source of magnetic noise. Finally, the present invention minimizes the magnetic noise of the superconducting interference device through a multi-layer magnetic shielding design.

[0104] In the description of this specification, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0105] The descriptions with reference to the terms "one embodiment", "a specific embodiment", "some embodiments", "for example", "example", "specific example", or "some examples" etc. mean that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. The order of steps involved in each embodiment is used to schematically illustrate the implementation of the present invention, and the order of steps therein is not limited and may be appropriately adjusted as needed.

[0106] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood by specific circumstances.

[0107] Each embodiment in this specification is described in a progressive manner, and the same and similar parts between the embodiments can be referred to each other, and each embodiment focuses on the differences from other embodiments. In particular, for the system embodiment, since it is basically similar to the method embodiment, the description is relatively simple, and the relevant parts can be referred to the partial description of the method embodiment. In the description of this specification, the description of the reference terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the embodiment of this specification. In this specification, the schematic representation of the above terms does not necessarily target the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, in the absence of contradiction, a person skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples.

[0108] The above is only an example of the embodiment of the present specification and is not intended to limit the embodiment of the present specification. For those skilled in the art, the embodiment of the present specification may have various changes and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the embodiment of the present specification shall be included in the scope of the claims of the embodiment of the present specification.

Claims

1. A magnetically shielded integrated superconducting quantum interference component, characterized in that: include: A refrigerator, used to generate cold so that the superconducting interference device reaches a preset temperature, and a magnetic shield is provided on the outside of the refrigerator; A cold platform is arranged between the flexible cold chain and the columnar cold chain of the refrigerator; the flexible cold chain is connected to the cold finger of the refrigerator, and the cold finger, the flexible cold chain and the columnar cold chain are all provided with magnetic shielding outside; The superconducting interference device is arranged at the lower part of the columnar cold chain, and at least one layer of magnetic shielding is arranged on the outside, and the magnetic shielding is used to shield the magnetic noise generated by the corresponding components.

2. The integrated superconducting quantum interference component according to claim 1, characterized in that: The refrigerator also includes: The heat sink is arranged on the top of the refrigerator and is used to absorb the heat generated when the refrigerator is working.

3. The integrated superconducting quantum interference component according to claim 1, characterized in that: Also includes: A refrigerator mounting plate, arranged at the bottom of the main body of the refrigerator; The component mounting base plate has one side connected to the cold platform through a plurality of cold platform support rods; and the other side connected to the refrigerator mounting plate through a bellows, wherein the bellows is used to reduce the vibration of the refrigerator on the superconducting interference device.

4. The integrated superconducting quantum interference component according to claim 3, characterized in that: A plurality of magnetic shields are arranged between the refrigerator mounting plate and the component mounting base plate and inside the bellows.

5. The integrated superconducting quantum interference component according to claim 3, characterized in that: The component mounting substrate is provided with a through hole for the flexible cold chain or the cold finger to pass through so as to be connected with the cold platform.

6. The integrated superconducting quantum interference component according to claim 5, characterized in that: The cold finger and the magnetic shield outside the flexible cold chain pass through the through hole and are arranged between the refrigerator mounting plate and the cold platform.

7. The integrated superconducting quantum interference component according to claim 5, characterized in that: A magnetic shield is provided between the component mounting substrate and the cold platform and outside the cold platform support rod.

8. The integrated superconducting quantum interference component according to claim 1, characterized in that: The columnar cold chain and the cold platform are offset.

9. The integrated superconducting quantum interference component according to claim 8, characterized in that: A portion of the bottom of the cold platform is offset from the columnar cold chain, and a magnetic shield is provided on the outside; The rest of the bottom of the cold platform is provided with magnetic shielding.

10. The integrated superconducting quantum interference component according to claim 9, characterized in that: A mounting base is arranged between the columnar cold chain and the superconducting interference device, and the mounting base is surrounded by the columnar cold chain and the magnetic shielding outside the superconducting interference device.

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