Solar cell, preparation method thereof and power utilization device

Abstract

The invention provides a solar cell, a preparation method thereof and a power utilization device, and the preparation method of the solar cell comprises the following steps: providing a substrate, and preparing an emission layer on one side surface of the substrate; sequentially preparing a tunneling silicon oxide layer, an intrinsic silicon layer, a first doped polycrystalline silicon layer and a second doped polycrystalline silicon layer on the surface of the other side of the substrate by utilizing plasma enhanced chemical vapor deposition; by optimizing the preparation process of the deposited tunneling silicon oxide layer and the preparation process of the doped polycrystalline silicon layer, the compactness and uniformity of the tunneling silicon oxide layer and the doped polycrystalline silicon layer are improved, the tunneling effect is improved, good selective tunneling passing is achieved for electrons-holes (namely, electrons pass and holes are blocked), and the performance of the device is improved. And meanwhile, the energy band structure on the back surface can be bent, the direction of the traditional energy band is changed, and the rapid deposition and uniform coverage of the film layer enable the cell to have good electrical performance parameters at the silk-screen printing end and improve the efficiency.

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