Display panel, method for preparing display panel and display device

Abstract

The invention provides a display panel, a method for preparing the display panel and a display device. The display panel comprises a substrate; the light-emitting devices are located on one side of the substrate, and each light-emitting device comprises a light-emitting functional layer and a first electrode which are sequentially arranged in a stacked mode in the direction away from the substrate; the first packaging layer is located on the sides, away from the substrate, of the multiple light emitting devices, and at least one via hole is formed in the first packaging layer; the at least one auxiliary electrode is located on the side, away from the substrate, of the first packaging layer, and the at least one auxiliary electrode is electrically connected with the first electrode through the at least one via hole; the protection layer is located on the side, away from the substrate, of the at least one auxiliary electrode, and the orthographic projection of the wall face of the at least one via hole on the substrate is located in the orthographic projection of the protection layer on the substrate. According to the technical scheme, the service life and reliability of the display panel can be improved.

Description

Technical Field

[0001] The present application relates to the field of display technology, and in particular to a display panel, a method for preparing a display panel, and a display device. Background Art

[0002] With the development of display technology, organic light-emitting diode (OLED) devices have become one of the commonly used display screens for electronic devices such as mobile phones, tablets, smart TVs, and smart wearable devices due to their advantages such as low power consumption, high brightness, wide viewing angle, and high contrast.

[0003] However, the lifespan and stability of OLED devices need to be further improved. Summary of the invention

[0004] In order to solve the above problems, embodiments of the present application provide a display panel, a method for manufacturing the display panel, and a display device.

[0005] In a first aspect, an embodiment of the present application provides a display panel, comprising: a substrate; a plurality of light-emitting devices, located on one side of the substrate, the light-emitting devices comprising a light-emitting functional layer and a first electrode stacked in sequence in a direction away from the substrate; a first encapsulation layer, located on the side of the plurality of light-emitting devices away from the substrate, the first encapsulation layer being provided with at least one via hole; at least one auxiliary electrode, located on the side of the first encapsulation layer away from the substrate, the at least one auxiliary electrode being electrically connected to the first electrode through the at least one via hole; a protective layer, located on the side of the at least one auxiliary electrode away from the substrate, the orthographic projection of the wall of the at least one via hole on the substrate being located within the orthographic projection of the protective layer on the substrate.

[0006] In combination with the first aspect, the thickness of the auxiliary electrode ranges from 2000 angstroms to 4000 angstroms; preferably, the thickness of the protective layer ranges from 1000 angstroms to 3000 angstroms; preferably, the material of the auxiliary electrode includes aluminum, and the material of the protective layer includes aluminum oxide; preferably, the shape of the orthographic projection of the wall of the via on the substrate includes at least one of a circle, a rectangle, an ellipse, a triangle and a trapezoid; preferably, the shape of the orthographic projection of the wall of the via on the substrate includes a circle, and the diameter of the circle is not less than 3μm and not more than 5μm; preferably, the display panel also includes a first power line, the first power line is configured with a first power voltage, at least one auxiliary electrode is electrically connected to the first power line, and the first electrode is configured with the first power voltage through the at least one auxiliary electrode.

[0007] In combination with the first aspect, at least one auxiliary electrode includes an auxiliary electrode, and the shape of the orthographic projection of the auxiliary electrode on the substrate is a grid; preferably, the orthographic projection of the protective layer on the substrate overlaps with the orthographic projection of the auxiliary electrode on the substrate, or the orthographic projection of the protective layer on the substrate covers the orthographic projection of the auxiliary electrode on the substrate; preferably, the auxiliary electrode includes a plurality of first wiring portions arranged along the first direction and extending along the second direction, and a plurality of second wiring portions arranged along the second direction and extending along the first direction, and a plurality of third wiring portions respectively connected to the first wiring portions and the second wiring portions, and the first direction and the second direction intersect; preferably, the width of the first wiring portion in the first direction is not less than 2μm and not more than 20μm, and / or, the width of the second wiring portion in the second direction is not less than 2μm and not more than 20μm; preferably, the orthographic projection of the wall surface of at least one via on the substrate is located within the orthographic projection of the first wiring portion on the substrate, and / or, the orthographic projection of the wall surface of at least one via on the substrate is located within the orthographic projection of the second wiring portion on the substrate; and / or, the orthographic projection of the wall surface of at least one via on the substrate is located within the orthographic projection of the third wiring portion on the substrate.

[0008] In combination with the first aspect, the display panel further comprises a pixel definition layer, the pixel definition layer is located between the substrate and the plurality of light-emitting devices, the pixel definition layer is provided with a plurality of pixel openings, the orthographic projection of the wall surface of at least one via hole on the substrate is offset from the orthographic projection of the wall surfaces of the plurality of pixel openings on the substrate; preferably, the orthographic projection of at least one auxiliary electrode on the substrate is offset from the orthographic projection of the wall surfaces of the plurality of pixel openings on the substrate, and / or the orthographic projection of the protective layer on the substrate is offset from the orthographic projection of the wall surfaces of the plurality of pixel openings on the substrate; preferably, the light-emitting device further comprises a second electrode arranged on a side of the light-emitting functional layer facing the substrate, a portion of the second electrode is located between the substrate and the pixel definition layer, and another portion of the second electrode is disposed from the corresponding The pixel opening is exposed; preferably, the orthographic projection of the light-emitting functional layer on the substrate at least covers the orthographic projection of the bottom wall of the corresponding pixel opening on the substrate; preferably, the orthographic projection of the light-emitting functional layer on the substrate covers the orthographic projection of the bottom wall and side wall of the corresponding pixel opening on the substrate; preferably, the orthographic projection of the light-emitting functional layer on the substrate covers the orthographic projection of the bottom wall and side wall of the corresponding pixel opening on the substrate and the orthographic projection of at least part of the surface of the pixel definition layer facing away from the substrate on the substrate; preferably, the display panel also includes a second encapsulation layer and a third encapsulation layer which are sequentially stacked in a direction away from the substrate; preferably, the materials of the first encapsulation layer and the third encapsulation layer include inorganic materials, and the material of the second encapsulation layer includes organic materials.

[0009] In a second aspect, an embodiment of the present application also provides a method for preparing a display panel, comprising: preparing a plurality of light-emitting devices on a substrate, the light-emitting devices comprising a light-emitting functional layer and a first electrode stacked in sequence in a direction away from the substrate; preparing a first encapsulation layer on the side of the plurality of light-emitting devices away from the substrate, and opening at least one via hole on the first encapsulation layer; preparing at least one auxiliary electrode on the side of the first encapsulation layer away from the substrate, the at least one auxiliary electrode being electrically connected to the first electrode through at least one via hole; preparing a protective layer on the side of at least one auxiliary electrode away from the substrate, wherein the at least one auxiliary electrode and the protective layer are prepared using the same equipment.

[0010] In combination with the second aspect, the step of preparing at least one auxiliary electrode on the side of the first packaging layer facing away from the substrate includes: in an inert gas atmosphere, sputtering the auxiliary electrode raw material using a magnetron sputtering process to obtain an auxiliary electrode; preferably, the auxiliary electrode raw material includes aluminum; preferably, the inert gas is argon; preferably, the power range of the DC power supply of the magnetron sputtering process is 2 to 5 kW, the gas flow range of argon is 100 to 300, and the pressure range of the inert gas is 0 to 1 Pa.

[0011] In combination with the second aspect, the step of preparing a protective layer on the surface of at least one auxiliary electrode facing away from the substrate includes: in a mixed gas atmosphere, sputtering the raw material of the protective layer using a magnetron sputtering process to obtain the protective layer; preferably, the raw material of the protective layer includes aluminum; preferably, the mixed gas includes argon and oxygen; preferably, the volume ratio of oxygen to the mixed gas is not less than 15% and not more than 50%; preferably, the power range of the DC current of the magnetron sputtering process is 2 to 5 kW, the gas flow range of argon is 30 to 90, the gas flow range of oxygen is 5 to 45, and the pressure range of the mixed gas is 0 to 1 Pa.

[0012] In combination with the second aspect, the step of preparing a plurality of light-emitting devices on a substrate includes: preparing a plurality of second electrodes on the substrate; preparing a plurality of light-emitting functional layers on at least a portion of the surface of the plurality of second electrodes facing away from the substrate; preparing a plurality of first electrodes on at least a portion of the surface of the plurality of light-emitting functional layers facing away from the substrate to obtain light-emitting devices; preferably, before the step of preparing the plurality of light-emitting functional layers on at least a portion of the surface of the plurality of second electrodes facing away from the substrate, the method also includes: preparing a pixel definition layer on the side of the plurality of second electrodes facing away from the substrate, the pixel definition layer enclosing a plurality of pixel openings, a portion of the second electrode being located between the substrate and the pixel definition layer, and another portion being exposed from the corresponding pixel opening, and the orthographic projection of the light-emitting functional layer on the substrate at least covering the orthographic projection of the bottom wall of the corresponding pixel opening on the substrate.

[0013] In combination with the second aspect, after the step of preparing a protective layer on the side of at least one auxiliary electrode facing away from the substrate, the method also includes: sequentially preparing a second encapsulation layer and a third encapsulation layer on the side of the protective layer facing away from the substrate; preferably, the first encapsulation layer and the third encapsulation layer are prepared by a chemical vapor deposition process; and / or, the second encapsulation layer is prepared by an inkjet printing process.

[0014] In a third aspect, an embodiment of the present application further provides a display device, comprising the above-mentioned display panel, or comprising a display panel prepared by the above-mentioned method.

[0015] Through the above technical solution, by arranging a protective layer on the side of the auxiliary electrode away from the substrate, and the protective layer covers the auxiliary electrode, the intrusion of water and oxygen can be blocked, thereby improving the life and reliability of the display panel. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 1 is a schematic top view of a partial structure of a display panel provided in one embodiment of the present application.

[0017] Figure 2a Schematic diagram of the cross-sectional structure of a display panel provided in one embodiment of the present application.

[0018] Figure 2b yes Figure 2a Magnified view of area A in the middle.

[0019] Figure 3a It is a schematic diagram of the cross-sectional structure of a display panel provided in yet another embodiment of the present application.

[0020] Figure 3b yes Figure 3a Magnified view of area B in the middle.

[0021] Figure 4 It is a schematic diagram of the cross-sectional structure of a display panel provided in yet another embodiment of the present application.

[0022] Figure 5 It is a schematic diagram of the cross-sectional structure of a display panel provided in yet another embodiment of the present application.

[0023] Figure 6 It is a schematic diagram of the cross-sectional structure of a display panel provided in yet another embodiment of the present application.

[0024] Figure 7 It is a schematic diagram of a process of manufacturing a display panel provided in one embodiment of the present application.

[0025] Figure 8 It is a schematic flow chart of a method for preparing a display panel provided in yet another embodiment of the present application.

[0026] Fig. 9 It is a schematic diagram of the structure of a display device provided in one embodiment of the present application. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0028] At present, a thin layer of metal material (for example, Ag) is usually used as the cathode of an OLED device. However, the resistance of the metal material is relatively large, especially when applied to a larger OLED device, it will cause a large voltage drop (IRDrop), which may affect the display effect or even damage the OLED device. To this end, a resistor can be connected in parallel to the cathode to reduce the voltage drop, for example, an auxiliary cathode is set on the side of the cathode away from the substrate. However, the inventors have found that the auxiliary cathode is usually made of metal. Due to the poor water-oxygen barrier performance of the metal, water and oxygen will penetrate the auxiliary cathode into the pixel area after the device leaves the vacuum environment, causing the light-emitting material to fail and affecting the life of the device.

[0029] In view of the above technical problems, in the first aspect, an embodiment of the present application provides a display panel. The display panel includes: a substrate; a plurality of light-emitting devices, located on one side of the substrate, the light-emitting devices including a light-emitting functional layer and a first electrode stacked in sequence in a direction away from the substrate; a first encapsulation layer, located on the side of the plurality of light-emitting devices away from the substrate, the first encapsulation layer is provided with at least one via; at least one auxiliary electrode, located on the side of the first encapsulation layer away from the substrate, at least one auxiliary electrode is electrically connected to the first electrode through at least one via; a protective layer, located on the side of at least one auxiliary electrode away from the substrate, the orthographic projection of the wall of at least one via on the substrate is located within the orthographic projection of the protective layer on the substrate. In the embodiment of the present application, by providing a protective layer on the side of the auxiliary electrode away from the substrate, and the protective layer covers the auxiliary electrode, water and oxygen intrusion can be blocked, thereby improving the life and reliability of the display panel.

[0030] Figure 1 is a schematic top view of a partial structure of a display panel provided by an embodiment of the present application. It should be noted that, in order to reflect the structure of the auxiliary electrode, Figure 1 The structure of the protective layer is not shown. Figure 2a Schematic diagram of the cross-sectional structure of a display panel provided in one embodiment of the present application. Figure 2b yes Figure 2a Magnified view of area A in the middle.

[0031] like Figure 1 and Figure 2aAs shown, the display panel includes a substrate 10 , a plurality of light emitting devices 30 , a first encapsulation layer 410 , at least one auxiliary electrode 50 , and a protective layer 60 .

[0032] In an embodiment of the present application, the substrate 10 includes a rigid substrate, such as a glass substrate; or, the substrate 10 includes a flexible substrate, such as polyimide (PI), polyethylene terephthalate (PET), polyethylene naphthalate (PEN), etc.

[0033] The light emitting device 30 is located on one side of the substrate 10. The light emitting device 30 includes a light emitting functional layer 330 and a first electrode 310 which are sequentially stacked in a direction away from the substrate. In the embodiment of the present application, the first electrode 310 is a cathode, and the first electrodes 310 of the plurality of light emitting devices 30 can be fully conductive. Optionally, the material of the first electrode 310 includes a metal material, for example, silver.

[0034] The first encapsulation layer 410 is located on the side of the plurality of light-emitting devices 30 away from the substrate 10, and the first encapsulation layer 410 is provided with at least one via hole 411. In the embodiment of the present application, the shape of the orthographic projection of the wall surface of the via hole 411 on the substrate 10 includes at least one of a circle, a rectangle, an ellipse, a triangle and a trapezoid. Optionally, the shape of the orthographic projection of the wall surface of the via hole 411 on the substrate 10 includes a circle, and the diameter of the circle is not less than 3μm and not more than 5μm. Exemplarily, the diameter of the circle is 3μm, 3.5μm, 4μm, 4.5μm, 5μm.

[0035] At least one auxiliary electrode 50 is located on the side of the first encapsulation layer away from the substrate 10, and at least one auxiliary electrode 50 is electrically connected to the first electrode 310 through at least one via 411. Optionally, the material of the auxiliary electrode 50 includes aluminum. The first electrode 310 and the auxiliary electrode 50 are connected to the same potential. Specifically, the display panel also includes a first power line (not shown in the figure), the first power line is configured with a first power supply voltage, at least one auxiliary electrode is electrically connected to the first power line, and the first electrode is configured with the first power supply voltage through at least one auxiliary electrode. By providing the auxiliary electrode 50, the resistance of the first electrode 310 can be reduced, thereby avoiding a large voltage drop (IR Drop).

[0036] The protective layer 60 is located on the side of the auxiliary electrode 50 facing away from the substrate 10. The orthographic projection of the wall surface of at least one via 411 on the substrate 10 is located within the orthographic projection of the protective layer 60 on the substrate 10. In the embodiment of the present application, the protective layer 60 covers the auxiliary electrode 50. In this way, it is possible to prevent water vapor from passing through the auxiliary electrode 50 and entering the light-emitting functional layer 330, thereby preventing the light-emitting material from failing. Optionally, the orthographic projection of the protective layer 60 on the substrate 10 overlaps with the orthographic projection of the auxiliary electrode 50 on the substrate 10, that is, the two completely overlap, such as Figure 2a and Figure 2b As shown, this can prevent water vapor from passing through the surface of the auxiliary electrode 50 and entering the light-emitting functional layer 330. Alternatively, the positive projection of the protective layer 60 on the substrate 10 covers the positive projection of the auxiliary electrode 50 on the substrate 10, for example, Figure 3a and Figure 3b As shown, the protective layer 60 covers the surface of the auxiliary electrode 50 away from the substrate 10 and covers the side wall of the auxiliary electrode 50 to prevent water vapor from entering the light-emitting functional layer 330 through the surface and side wall of the auxiliary electrode 50. In the embodiment of the present application, the thickness of the protective layer 60 is 1000 angstroms to 3000 angstroms. Exemplarily, the thickness of the protective layer 60 is 1000 angstroms, 1500 angstroms, 2000 angstroms, 2500 angstroms, and 3000 angstroms. Optionally, the material of the protective layer 60 includes aluminum oxide. The use of aluminum oxide can better improve the water and oxygen barrier properties.

[0037] In the embodiment of the present application, the thickness of the auxiliary electrode 50 is 2000 angstroms to 4000 angstroms. Exemplarily, the thickness of the auxiliary electrode 50 is 2000 angstroms, 2500 angstroms, 3000 angstroms, 3500 angstroms, 4000 angstroms, etc. Optionally, at least one auxiliary electrode 50 includes an auxiliary electrode. Figure 1 As shown, the orthographic projection of the auxiliary electrode 50 on the substrate 10 is a grid shape. Optionally, the auxiliary electrode 50 includes a plurality of electrodes along the first direction (i.e. Figure 1 x direction) and along the second direction (i.e. Figure 1 A plurality of first wiring portions 510 extending in the first direction (y direction in the diagram) and a plurality of second wiring portions 520 arranged in the second direction and extending in the first direction, and a plurality of third wiring portions 530 respectively connected to the first wiring portions 510 and the second wiring portions 520. The first direction intersects with the second direction. Optionally, the first direction and the second direction are perpendicular. Optionally, the width of the first wiring portion 510 in the first direction is not less than 2μm and not more than 20μm. Exemplarily, the width of the first wiring portion 510 in the first direction is 2μm, 5μm, 10μm, 15μm, 20μm. The width of the second wiring portion 520 in the second direction is not less than 2μm and not more than 20μm. Exemplarily, the width of the second wiring portion 520 in the second direction is 2μm, 5μm, 10μm, 15μm, 20μm.

[0038] In the embodiment of the present application, the orthographic projection of the wall surface of at least one via hole 411 on the substrate 10 is located within the orthographic projection of the first wiring portion 510 on the substrate 10; and / or, the orthographic projection of the wall surface of at least one via hole 411 on the substrate 10 is located within the orthographic projection of the second wiring portion 520 on the substrate 10; and / or, the orthographic projection of the wall surface of at least one via hole 411 on the substrate 10 is located within the orthographic projection of the third wiring portion 530 on the substrate 10. That is, the auxiliary electrode 50 can be electrically connected to the first electrode 310 through the first wiring portion 510, or the auxiliary electrode 50 can be electrically connected to the first electrode 310 through the second wiring portion 520, or the auxiliary electrode 50 can be electrically connected to the first electrode 310 through the third wiring portion 530.

[0039] Continue to refer Figure 2a The display panel further includes a pixel definition layer 20, which is located between the substrate 10 and the plurality of light emitting devices 30. The pixel definition layer 20 is provided with a plurality of pixel openings 201. In the embodiment of the present application, the pixel definition layer 20 includes an organic material or an inorganic material, which is not limited in the present application. For the convenience of explaining the present application, Figure 2a Only two pixel openings 201 are shown in the figure, and it can be understood that the display panel of the present application includes a plurality of pixel openings 201. Different pixel openings 201 can be provided with light-emitting functional materials of different colors.

[0040] In the embodiment of the present application, the orthographic projection of the wall surface of at least one via hole 411 on the substrate 10 is staggered with the orthographic projection of the wall surface of the plurality of pixel openings 201 on the substrate 10. Optionally, the orthographic projection of at least one auxiliary electrode 50 on the substrate 10 is staggered with the orthographic projection of the wall surface of the plurality of pixel openings 201 on the substrate 10; and / or, the orthographic projection of the protective layer 60 on the substrate 10 is staggered with the orthographic projection of the wall surface of the plurality of pixel openings 201 on the substrate 10. Since the light transmittance of the materials of the auxiliary electrode 50 and the protective layer 60 is poor, this can avoid affecting the light extraction efficiency.

[0041] Optionally, the display panel further includes a second electrode 320 disposed on the side of the light-emitting functional layer 330 facing the substrate 10, a portion of the second electrode 320 is located between the substrate 10 and the pixel definition layer 20, and another portion is exposed from the corresponding pixel opening 201. In the embodiment of the present application, the second electrode 320 is an anode. The light-emitting functional layer 330 includes a hole injection layer, a hole transport layer, an electron blocking layer, a light-emitting layer, a hole blocking layer, an electron transport layer, and an electron injection layer stacked in sequence in a direction away from the substrate 10. In the embodiment of the present application, the light-emitting functional layer 330 includes a red light-emitting functional layer, a green light-emitting functional layer, and a blue light-emitting functional layer. Light-emitting functional layers of different colors are located in different pixel openings 201.

[0042] In the embodiment of the present application, the orthographic projection of the light-emitting functional layer 330 on the substrate 10 at least covers the orthographic projection of the bottom wall 2011 of the corresponding pixel opening 201 on the substrate 10. Figure 2a As shown, the orthographic projection of the light-emitting functional layer 330 on the substrate 10 covers the orthographic projection of the bottom wall 2011 and the side wall 2012 of the corresponding pixel opening 201 on the substrate 10 and the orthographic projection of at least part of the surface of the pixel definition layer 20 facing away from the substrate 10 on the substrate. Figure 4 As shown, the orthographic projection of the light-emitting functional layer 330 on the substrate 10 covers the orthographic projection of the bottom wall 2011 of the corresponding pixel opening 201 on the substrate 10. Figure 5 As shown, the orthographic projection of the light-emitting functional layer 330 on the substrate 10 covers the orthographic projection of the bottom wall 2011 and the side wall 2012 of the corresponding pixel opening 201 on the substrate 10 .

[0043] Figure 6 is a cross-sectional schematic diagram of a display panel provided in yet another embodiment of the present application. Figure 6 The display panel shown is Figure 2a The difference of the display panel shown is that the display panel further includes a second encapsulation layer 420 and a third encapsulation layer 430 which are sequentially stacked in a direction away from the substrate 10. The materials of the first encapsulation layer 410 and the third encapsulation layer 430 include inorganic materials, such as silicon oxide and silicon nitride. The material of the second encapsulation layer 420 includes organic materials.

[0044] In the second aspect, the embodiment of the present application also provides a method for preparing a display panel, the method comprising: preparing a plurality of light-emitting devices on a substrate, the light-emitting devices comprising a light-emitting functional layer and a first electrode stacked in sequence in a direction away from the substrate; preparing a first encapsulation layer on the side of the plurality of light-emitting devices away from the substrate, and opening at least one via hole on the first encapsulation layer; preparing at least one auxiliary electrode on the side of the first encapsulation layer away from the substrate, the at least one auxiliary electrode being electrically connected to the first electrode through at least one via hole; preparing a protective layer on the surface of at least one auxiliary electrode away from the substrate, wherein at least one auxiliary electrode and the protective layer are prepared using the same device. In the embodiment of the present application, after the auxiliary electrode is prepared, there is no need to remove the substrate from the device, and the protective layer can be prepared by only changing the process conditions, which can avoid water and oxygen contacting the auxiliary electrode to cause water and oxygen intrusion, thereby avoiding failure of the display panel and improving the life and reliability of the display panel.

[0045] Figure 7 A method for preparing a display panel provided in an embodiment of the present application is as follows. Figure 7 As shown, the method includes the following steps.

[0046] Step S710: preparing a plurality of light-emitting devices on a substrate.

[0047] In the embodiment of the present application, the light-emitting device includes a light-emitting functional layer and a first electrode which are sequentially stacked in a direction away from a substrate.

[0048] Step S720: prepare a first encapsulation layer on a side of the plurality of light-emitting devices facing away from the substrate, and open at least one via hole in the first encapsulation layer.

[0049] In the embodiment of the present application, a first packaging layer is prepared by a chemical vapor deposition process; then, at least one via is formed by an etching process.

[0050] Step S730: preparing at least one auxiliary electrode on a side of the first packaging layer facing away from the substrate.

[0051] In an embodiment of the present application, at least one auxiliary electrode is electrically connected to the first electrode through at least one via. Optionally, in an inert gas atmosphere, the auxiliary electrode raw material is sputtered using a magnetron sputtering process to obtain an auxiliary electrode. Optionally, the auxiliary electrode raw material includes aluminum. The inert gas is argon. In an embodiment of the present application, the power range of the DC power supply for magnetron sputtering is 2 to 5 kW, the gas flow range of argon is 100 to 300, and the pressure range of the inert gas is 0 to 1 Pa. Optionally, the power of the DC power supply for magnetron sputtering is 2 kW, 3 kW, 4 kW, 5 kW, etc. The gas flow rate of argon is 100, 150, 200, 250, 300, etc. The pressure of the inert gas is 0 Pa, 0.2 Pa, 0.4 Pa, 0.5 Pa, 0.7 Pa, 0.8 Pa, 1 Pa, etc.

[0052] Step S740: preparing a protective layer on a side of at least one auxiliary electrode facing away from the substrate.

[0053] In an embodiment of the present application, the auxiliary electrode and the protective layer are prepared using the same equipment. That is, after the auxiliary electrode is prepared, there is no need to move the substrate out of the equipment, and the protective layer can be prepared by changing the process conditions. Optionally, in a mixed gas atmosphere, the raw material of the protective layer is sputtered using a magnetron sputtering process to obtain the protective layer. Optionally, the raw material of the protective layer includes aluminum. In an embodiment of the present application, the mixed gas includes argon and oxygen. The volume ratio of oxygen to the mixed gas is not less than 15% and not more than 50%. Exemplarily, the volume ratio of oxygen to the mixed gas is 15%, 20%, 30%, 40%, and 50%. Optionally, the power range of the DC current of magnetron sputtering is 2 to 5kW, the gas flow range of argon is 30 to 90, the gas flow range of oxygen is 5 to 45, and the pressure range of the inert gas is 0 to 1Pa. Optionally, the power of the DC current of magnetron sputtering is 2kW, 3kW, 4kW, 5kW, etc. The gas flow rate of argon gas is 30, 40, 50, 60, 70, 80, 90, etc. The gas flow rate of oxygen is 5, 7, 10, 12, 15, 20, 25, 30, 35, 40, 45, etc. The pressure of inert gas is 0Pa, 0.2Pa, 0.4Pa, 0.5Pa, 0.7Pa, 0.8Pa, 1Pa, etc.

[0054] Figure 8 FIG. 1 is a flow chart of a method for preparing a display panel provided by another embodiment of the present application. Figure 8 As shown, the method includes the following steps.

[0055] Step S810, preparing a plurality of second electrodes on the substrate.

[0056] Optionally, the second electrode comprises an anode.

[0057] Step S820: preparing a pixel definition layer on a side of the plurality of second electrodes facing away from the substrate.

[0058] In the embodiment of the present application, the pixel definition layer encloses a plurality of pixel openings, a portion of the second electrode is located between the substrate and the pixel definition layer, and another portion is exposed from the corresponding pixel opening. Optionally, the material of the pixel definition layer is deposited on the side of the plurality of second electrodes away from the substrate, and the pixel definition layer and the pixel opening are obtained by patterning.

[0059] Step S830, preparing a plurality of light-emitting functional layers on the side of the pixel definition layer facing away from the substrate.

[0060] In the embodiment of the present application, at least part of the light-emitting functional layer is located in the pixel opening. That is, the orthographic projection of the light-emitting functional layer on the substrate at least covers the orthographic projection of the bottom wall of the corresponding pixel opening on the substrate. The light-emitting functional layer includes a red light-emitting functional layer, a green light-emitting functional layer and a blue light-emitting functional layer. Light-emitting functional layers of different colors are located in different pixel openings.

[0061] Step S840, preparing a plurality of first electrodes on at least a portion of the surface of the plurality of light-emitting functional layers facing away from the substrate to obtain a light-emitting device.

[0062] Step S850: prepare a first packaging layer on a side of the plurality of light-emitting devices facing away from the substrate, and open at least one via hole in the first packaging layer.

[0063] Step S860: preparing at least one auxiliary electrode on a side of the first packaging layer facing away from the substrate.

[0064] Step S870: preparing a protective layer on a side of at least one auxiliary electrode facing away from the substrate.

[0065] In the embodiment of the present application, the preparation method of steps S850 to S870 is the same as the preparation method of steps S720 to S740, and will not be repeated here.

[0066] Step S880: sequentially prepare a second encapsulation layer and a third encapsulation layer on the side of the protective layer facing away from the substrate.

[0067] Optionally, the second encapsulation layer is prepared by an inkjet printing process, and / or the third encapsulation layer is prepared by a chemical vapor deposition process.

[0068] In a third aspect, an embodiment of the present application provides a display device, which includes the display panel described in the above embodiment.

[0069] Fig. 9 is a schematic diagram of the structure of a display device provided by an embodiment of the present application. Fig. 9 As shown, the display device 900 is a product with an image display function. For example, the display device 900 can be used to display static images, such as pictures or photos. The display device 900 can also be used to display dynamic images, such as videos.

[0070] The display device 900 may be a laptop computer, a mobile phone, a handheld or portable computer, a camera, a camcorder, a vehicle-mounted smart central control screen, a calculator, a smart watch, a GPS navigator, an electronic photo, an electronic billboard or sign, a projector, etc.

[0071] The display device 900 includes a display panel provided by any of the above embodiments, which may be an organic light emitting diode display panel or a quantum dot electroluminescent display panel.

[0072] In addition, the display device 900 may also have functions such as taking pictures, recording videos, fingerprint recognition, and face recognition. Accordingly, the display device 900 also includes at least one functional module for implementing the above functions, such as an under-screen camera, an under-screen fingerprint recognition sensor, and the like.

[0073] The basic principles of the present application are described above in conjunction with specific embodiments. However, it should be noted that the advantages, strengths, effects, etc. mentioned in the present application are only examples and not limitations, and it cannot be considered that these advantages, strengths, effects, etc. are required by each embodiment of the present application. In addition, the specific details disclosed above are only for the purpose of illustration and ease of understanding, not for limitation, and the above details do not limit the present application to being implemented by adopting the above specific details.

[0074] The block diagrams of the devices, apparatuses, equipment, and systems involved in this application are only illustrative examples and are not intended to require or imply that they must be connected, arranged, and configured in the manner shown in the block diagram. As will be appreciated by those skilled in the art, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any manner. Words such as "including", "comprising", "having", etc. are open words, referring to "including but not limited to", and can be used interchangeably with them. The words "or" and "and" used here refer to the words "and / or" and can be used interchangeably with them, unless the context clearly indicates otherwise. The words "such as" used here refer to the phrase "such as but not limited to", and can be used interchangeably with them.

[0075] It should also be noted that in the apparatus, device and method of the present application, each component or each step can be decomposed and / or recombined. Such decomposition and / or recombination should be regarded as equivalent solutions of the present application.

[0076] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of the present application. Therefore, the present application is not intended to be limited to the aspects shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

[0077] The above description has been given for the purpose of illustration and description. In addition, this description is not intended to limit the embodiments of the present application to the forms disclosed herein. Although multiple example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, changes, additions and sub-combinations thereof.

Claims

1. A display panel, characterized in that: include: substrate; A plurality of light-emitting devices are located on one side of the substrate, wherein the light-emitting devices include a light-emitting functional layer and a first electrode which are sequentially stacked in a direction away from the substrate; A first encapsulation layer is located on a side of the plurality of light-emitting devices away from the substrate, and the first encapsulation layer is provided with at least one via hole; at least one auxiliary electrode, located at a side of the first encapsulation layer away from the substrate, the at least one auxiliary electrode being electrically connected to the first electrode through the at least one via hole; The protective layer is located on a side of the at least one auxiliary electrode away from the substrate, and the orthographic projection of the wall surface of the at least one via hole on the substrate is located within the orthographic projection of the protective layer on the substrate.

2. The display panel according to claim 1, characterized in that: The thickness of the auxiliary electrode ranges from 2000 angstroms to 4000 angstroms; Preferably, the thickness of the protective layer ranges from 1000 angstroms to 3000 angstroms; Preferably, the material of the auxiliary electrode includes aluminum, and the material of the protective layer includes aluminum oxide; Preferably, the shape of the orthographic projection of the wall surface of the via hole on the substrate includes at least one of a circle, a rectangle, an ellipse, a triangle and a trapezoid; Preferably, the shape of the orthographic projection of the wall surface of the via hole on the substrate includes a circle, and the diameter of the circle is not less than 3 μm and not more than 5 μm; Preferably, the display panel further comprises a first power line, the first power line is configured with a first power voltage, the at least one auxiliary electrode is electrically connected to the first power line, and the first electrode is configured with the first power voltage through the at least one auxiliary electrode.

3. The display panel according to claim 1, characterized in that: The at least one auxiliary electrode comprises an auxiliary electrode, and the shape of the orthographic projection of the auxiliary electrode on the substrate is a grid shape; Preferably, the orthographic projection of the protective layer on the substrate overlaps with the orthographic projection of the auxiliary electrode on the substrate, or the orthographic projection of the protective layer on the substrate covers the orthographic projection of the auxiliary electrode on the substrate; Preferably, the auxiliary electrode includes a plurality of first wiring portions arranged along a first direction and extending along a second direction, a plurality of second wiring portions arranged along the second direction and extending along the first direction, and a plurality of third wiring portions respectively connected to the first wiring portions and the second wiring portions, and the first direction intersects the second direction; Preferably, the width of the first wiring portion in the first direction is not less than 2 μm and not more than 20 μm, and / or the width of the second wiring portion in the second direction is not less than 2 μm and not more than 20 μm; Preferably, the orthographic projection of the wall surface of at least one of the via holes on the substrate is located within the orthographic projection of the first wiring portion on the substrate, and / or the orthographic projection of the wall surface of at least one of the via holes on the substrate is located within the orthographic projection of the second wiring portion on the substrate; And / or, an orthographic projection of a wall surface of at least one of the via holes on the substrate is located within an orthographic projection of the third wiring portion on the substrate.

4. The display panel according to claim 1, characterized in that: The display panel further comprises a pixel definition layer, the pixel definition layer is located between the substrate and the plurality of light-emitting devices, the pixel definition layer is provided with a plurality of pixel openings, and the orthographic projection of the wall surface of the at least one via hole on the substrate is staggered with the orthographic projection of the wall surfaces of the plurality of pixel openings on the substrate; Preferably, the orthographic projection of the at least one auxiliary electrode on the substrate is staggered with the orthographic projection of the wall surfaces of the plurality of pixel openings on the substrate, and / or the orthographic projection of the protective layer on the substrate is staggered with the orthographic projection of the wall surfaces of the plurality of pixel openings on the substrate; Preferably, the light emitting device further comprises a second electrode disposed on a side of the light emitting functional layer facing the substrate, a portion of the second electrode is located between the substrate and the pixel definition layer, and another portion is exposed from the corresponding pixel opening; Preferably, the orthographic projection of the light-emitting functional layer on the substrate at least covers the orthographic projection of the bottom wall of the corresponding pixel opening on the substrate; Preferably, the orthographic projection of the light-emitting functional layer on the substrate covers the orthographic projection of the bottom wall and the side wall of the corresponding pixel opening on the substrate; Preferably, the orthographic projection of the light-emitting functional layer on the substrate covers the orthographic projection of the bottom wall and the side wall of the corresponding pixel opening on the substrate and the orthographic projection of at least part of the surface of the pixel definition layer facing away from the substrate on the substrate; Preferably, the display panel further comprises a second encapsulation layer and a third encapsulation layer which are sequentially stacked in a direction away from the substrate; Preferably, the materials of the first encapsulation layer and the third encapsulation layer include inorganic materials, and the material of the second encapsulation layer includes organic materials.

5. A method for preparing a display panel, characterized in that: include: Preparing a plurality of light-emitting devices on a substrate, wherein the light-emitting devices include a light-emitting functional layer and a first electrode which are sequentially stacked in a direction away from the substrate; Preparing a first encapsulation layer on a side of the plurality of light-emitting devices away from the substrate, and opening at least one via hole in the first encapsulation layer; At least one auxiliary electrode is prepared on a side of the first encapsulation layer facing away from the substrate, wherein the at least one auxiliary electrode is electrically connected to the first electrode through the at least one via hole; A protective layer is prepared on a side of the at least one auxiliary electrode facing away from the substrate, wherein the at least one auxiliary electrode and the protective layer are prepared using the same equipment.

6. The method for preparing a display panel according to claim 5, characterized in that: The step of preparing at least one auxiliary electrode on a side of the first encapsulation layer away from the substrate comprises: In an inert gas atmosphere, a raw material of an auxiliary electrode is sputtered by a magnetron sputtering process to obtain an auxiliary electrode; Preferably, the auxiliary electrode raw material includes aluminum; Preferably, the inert gas is argon; Preferably, the power range of the DC power supply of the magnetron sputtering process is 2-5 kW, the gas flow range of the argon gas is 100-300, and the pressure range of the inert gas is 0-1 Pa.

7. The method for preparing a display panel according to claim 5, characterized in that: The step of preparing a protective layer on the surface of the at least one auxiliary electrode facing away from the substrate comprises: In a mixed gas atmosphere, a raw material of the protective layer is sputtered by a magnetron sputtering process to obtain a protective layer; Preferably, the raw material of the protective layer includes aluminum; Preferably, the mixed gas comprises argon and oxygen; Preferably, the volume ratio of the oxygen to the mixed gas is not less than 15% and not more than 50%; Preferably, the power range of the direct current of the magnetron sputtering process is 2-5 kW, the gas flow range of the argon gas is 30-90, the gas flow range of the oxygen gas is 5-45, and the pressure range of the mixed gas is 0-1 Pa.

8. The method for preparing a display panel according to claim 5, characterized in that: The step of preparing a plurality of light-emitting devices on a substrate comprises: preparing a plurality of second electrodes on the substrate; Prepare a plurality of light-emitting functional layers on at least a portion of the surface of the plurality of second electrodes facing away from the substrate; Prepare a plurality of first electrodes on at least a portion of the surface of the plurality of light-emitting functional layers away from the substrate to obtain the light-emitting device; Preferably, before the step of preparing a plurality of light-emitting functional layers on at least a portion of the surface of the plurality of second electrodes facing away from the substrate, the method further comprises: preparing a pixel definition layer on the side of the plurality of second electrodes facing away from the substrate, the pixel definition layer enclosing a plurality of pixel openings, a portion of the second electrode being located between the substrate and the pixel definition layer, and another portion being exposed from the corresponding pixel opening, and the orthographic projection of the light-emitting functional layer on the substrate at least covering the orthographic projection of the bottom wall of the corresponding pixel opening on the substrate.

9. The method for preparing a display panel according to claim 5, characterized in that: After the step of preparing a protective layer on a side of the at least one auxiliary electrode facing away from the substrate, the method further comprises: Sequentially preparing a second encapsulation layer and a third encapsulation layer on a side of the protective layer away from the substrate; Preferably, the first encapsulation layer and the third encapsulation layer are prepared by chemical vapor deposition process; and / or the second encapsulation layer is prepared by inkjet printing process.

10. A display device, characterized in that: A display panel comprising any one of claims 1 to 4, or a display panel prepared by the method described in any one of claims 5 to 9.

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