Drying and annealing device and battery production line
By designing a device with integrated drying and annealing functions, the problems of low production efficiency and low economic benefits caused by independent drying and annealing equipment in the prior art are solved, and efficient drying and annealing of the substrate are achieved, and the overall efficiency of the battery production line is improved.
Patent Information
- Application Number
- CN202510084002.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-20
- Publication Date
- 2025-05-06
AI Technical Summary
During the production process of existing perovskite batteries, drying and annealing equipment are independent, resulting in long process time, low production efficiency, high equipment costs, high maintenance and use costs, and low economic benefits.
A drying and annealing device is designed, including a drying annealing chamber, a vacuum venting mechanism, a carrier plate, a ventilation mechanism and a heating mechanism. Through vacuum drying and heating annealing, continuous drying and annealing of the substrate is achieved.
Save process time, improve production efficiency, reduce equipment costs and maintenance costs, reduce land area, and improve economic benefits.
Smart Images

Figure CN119947537A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of battery production, and in particular to a drying annealing device and a battery production line. Background Art
[0002] At present, in the production process of perovskite cells, after the substrate is coated, it needs to be dried and annealed in sequence. However, the current drying equipment and annealing equipment are independent of each other. After the substrate is dried by the drying equipment, it needs to be transported to the annealing equipment for annealing, which is time-consuming and labor-intensive. The drying and annealing process takes a long time, the production efficiency is low, and the equipment cost is high, the floor space is large, the maintenance cost is high, and the economic benefit is low.
[0003] In view of this, it is particularly important to design and manufacture a drying annealing device and a battery production line with high production efficiency and high economic benefits, especially in battery production. Summary of the invention
[0004] The object of the present invention is to provide a drying and annealing device, which can sequentially dry and anneal a substrate, save process time, improve production efficiency, reduce equipment cost and maintenance cost, reduce floor space, and improve economic benefits.
[0005] Another object of the present invention is to provide a battery production line, in which the drying and annealing device can sequentially dry and anneal the substrate, saving process time, improving production efficiency, and reducing equipment costs and maintenance costs, reducing floor space, and improving economic benefits.
[0006] The present invention is achieved by adopting the following technical solutions.
[0007] A drying annealing device comprises a drying annealing chamber, a vacuum pumping mechanism, a carrying plate, a ventilation mechanism and a heating mechanism. The carrying plate is installed in the drying annealing chamber and is used to carry a substrate. The vacuum pumping mechanism is connected to the drying annealing chamber and is used to vacuum the drying annealing chamber to dry the substrate. The heating mechanism is installed in the drying annealing chamber and is used to heat the drying annealing chamber. The ventilation mechanism is connected to the drying annealing chamber and is used to introduce inert gas into the drying annealing chamber to anneal the substrate at a preset temperature and a preset pressure.
[0008] Optionally, the vacuum pumping mechanism includes a vacuum pump and a vacuum tube, one end of the vacuum tube is connected to the vacuum pump, and the other end is connected to the top wall of the drying annealing chamber, and the vacuum pump is used to extract the air in the drying annealing chamber through the vacuum tube.
[0009] Optionally, the vacuum pumping mechanism further includes a flow equalizing plate, which is installed on the inner side of the top wall of the drying and annealing chamber. The flow equalizing plate is provided with a plurality of flow guide holes, which are arranged in parallel and spaced apart and are all connected to the vacuum tube.
[0010] Optionally, the heating mechanism includes a plurality of heating lamp tubes, which are arranged side by side and are all installed on the bottom wall of the drying and annealing chamber.
[0011] Optionally, the ventilation mechanism includes a gas tank, an air pump and an air pipe, the air pump is installed on the gas tank and connected to the drying annealing chamber through the air pipe, and the gas tank is used to store inert gas.
[0012] Optionally, the drying annealing device also includes a plug-in mechanism, which includes a driving member and a plug-in plate. The driving member is installed in the drying annealing chamber and connected to the plug-in plate. The plug-in plate slides with the drying annealing chamber. The driving member is used to drive the plug-in plate to extend into the drying annealing chamber to separate the drying annealing chamber into a first cavity and a second cavity. The vacuuming mechanism and the ventilation mechanism are both connected to the first cavity. The supporting plate is arranged in the first cavity, and the heating mechanism is arranged in the second cavity.
[0013] Optionally, the drying and annealing device further comprises a ventilation pipe, one end of which is communicated with the first cavity, and the other end of which is communicated with the second cavity, and a switch valve is arranged in the ventilation pipe.
[0014] Optionally, the drying annealing device further comprises a water cooling pipeline, which is installed in the plug board and is used for passing cooling water to cool the plug board.
[0015] Optionally, the drying and annealing chamber includes a chamber body and a support arm, the support arm is connected to the chamber body, the support plate is arranged on the support arm, and the water cooling pipeline is also installed in the wall of the chamber body and / or the support arm.
[0016] A battery production line comprises the above-mentioned drying and annealing device, which comprises a drying and annealing chamber, a vacuum pumping mechanism, a carrying plate, a ventilation mechanism and a heating mechanism, wherein the carrying plate is installed in the drying and annealing chamber and is used to carry a substrate, the vacuum pumping mechanism is connected to the drying and annealing chamber and is used to vacuum the drying and annealing chamber to dry the substrate, the heating mechanism is installed in the drying and annealing chamber and is used to heat the drying and annealing chamber, the ventilation mechanism is connected to the drying and annealing chamber and is used to introduce inert gas into the drying and annealing chamber to anneal the substrate at a preset temperature and a preset air pressure.
[0017] The drying annealing device and battery production line provided by the present invention have the following beneficial effects:
[0018] The drying annealing device provided by the present invention comprises a supporting plate installed in a drying annealing chamber, the supporting plate is used to support a substrate, a vacuum pumping mechanism is connected to the drying annealing chamber, the vacuum pumping mechanism is used to vacuumize the drying annealing chamber to dry the substrate, a heating mechanism is installed in the drying annealing chamber, the heating mechanism is used to heat the drying annealing chamber, a ventilation mechanism is connected to the drying annealing chamber, the ventilation mechanism is used to introduce an inert gas into the drying annealing chamber, so that the substrate is annealed at a preset temperature and a preset air pressure. Compared with the prior art, the drying annealing device provided by the present invention adopts a vacuum pumping mechanism and a ventilation mechanism connected to the drying annealing chamber and a heating mechanism installed in the drying annealing chamber, so that the substrate can be dried and annealed in sequence, which saves process time, improves production efficiency, reduces equipment cost and maintenance cost, reduces floor space, and improves economic benefits.
[0019] The battery production line provided by the present invention, wherein the drying and annealing device can sequentially dry and anneal the substrate, saving process time, improving production efficiency, and reducing equipment cost and maintenance cost, reducing floor space, and improving economic benefits. BRIEF DESCRIPTION OF THE DRAWINGS
[0020] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments are briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without creative work.
[0021] Figure 1 A schematic diagram of the structure of the drying and annealing device provided by an embodiment of the present invention when the inserting plate is extended;
[0022] Figure 2 A schematic diagram of the structure of the drying and annealing device provided by an embodiment of the present invention when the inserting plate is retracted;
[0023] Figure 3 A schematic diagram of the structure of a vacuum pumping mechanism in a drying and annealing device provided in an embodiment of the present invention;
[0024] Figure 4 A schematic diagram of the structure of a ventilation mechanism in a drying and annealing device provided in an embodiment of the present invention.
[0025] Icons: 100-drying and annealing device; 110-drying and annealing chamber; 111-opening and closing door; 112-first cavity; 113-second cavity; 114-chamber body; 115-support arm; 120-vacuum extraction mechanism; 121-vacuum pump; 122-vacuum tube; 123-current equalizing plate; 124-flow guide hole; 130-carrying plate; 140-ventilation mechanism; 141-gas tank; 142-gas pump; 143-gas pipe; 150-heating mechanism; 151-heating lamp; 160-plug-in mechanism; 161-driving member; 162-plug-in; 170-ventilation pipe; 171-opening and closing valve; 180-thermometer; 190-barometer; 200-base. DETAILED DESCRIPTION
[0026] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings here can be arranged and designed in various different configurations.
[0027] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention claimed for protection, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.
[0028] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.
[0029] In the description of the present invention, it should be noted that the terms "inside", "outside", "upper", "lower", "horizontal", etc. indicate the orientation or position relationship based on the orientation or position relationship shown in the drawings, or the orientation or position relationship in which the product of the invention is usually placed when in use, which is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.
[0030] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "connect", "install", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0031] Some embodiments of the present invention are described in detail below in conjunction with the accompanying drawings. In the absence of conflict, the features of the following embodiments can be combined with each other.
[0032] Please refer to Figures 1 to 4 The embodiment of the present invention provides a battery production line (not shown) for producing batteries. The drying and annealing device 100 can sequentially dry and anneal the substrate 200, saving process time, improving production efficiency, reducing equipment costs and maintenance costs, reducing floor space, and improving economic benefits.
[0033] The battery production line includes a coating device (not shown) and a drying and annealing device 100. The coating device is connected to the drying and annealing device 100, and the coating device is used to coat the substrate 200. After the coating is completed, the substrate 200 is sent to the drying and annealing device 100 manually or by a robot arm. The drying and annealing device 100 is used to dry and anneal the substrate 200 in sequence, which is convenient and fast.
[0034] The drying annealing device 100 includes a drying annealing chamber 110, a vacuum pumping mechanism 120, a carrier plate 130, a ventilation mechanism 140, and a heating mechanism 150. The carrier plate 130 is installed in the drying annealing chamber 110, and the carrier plate 130 is used to carry the substrate 200 to support and position the substrate 200. The vacuum pumping mechanism 120 is connected to the drying annealing chamber 110, and the vacuum pumping mechanism 120 is used to vacuum the drying annealing chamber 110 to suck out the air (including water vapor) in the drying annealing chamber 110, so as to dry the substrate 200, thereby realizing the vacuum drying function of the substrate 200. The heating mechanism 150 is installed in the drying and annealing chamber 110, and the heating mechanism 150 is used to heat the drying and annealing chamber 110 to heat the substrate 200, so that the substrate 200 is heated to a preset temperature; the ventilation mechanism 140 is connected to the drying and annealing chamber 110, and the ventilation mechanism 140 is used to introduce inert gas into the drying and annealing chamber 110, so that the drying and annealing chamber 110 reaches a preset pressure; the heating mechanism 150 and the ventilation mechanism 140 work together to make the drying and annealing chamber 110 reach a preset temperature and a preset pressure, so that the substrate 200 in the drying and annealing chamber 110 is annealed at the preset temperature and the preset pressure, and the annealing function of the substrate 200 is realized. In this way, the drying and annealing device 100 can sequentially realize the drying and annealing of the substrate 200, save process time, improve production efficiency, reduce equipment costs and maintenance costs, reduce floor space, and improve economic benefits.
[0035] Further, the drying and annealing chamber 110 is provided with a switch door 111, and the substrate 200 can be sent into the drying and annealing chamber 110 or taken out from the drying and annealing chamber 110 through the switch door 111. Specifically, the position of the switch door 111 corresponds to the upper position of the carrier plate 130, so as to place the substrate 200 on the carrier plate 130 or take out the substrate 200 on the carrier plate 130.
[0036] The vacuum pumping mechanism 120 includes a vacuum pump 121 and a vacuum tube 122. One end of the vacuum tube 122 is connected to the vacuum pump 121, and the other end is connected to the top wall of the drying annealing chamber 110. The vacuum pump 121 is used to extract the air in the drying annealing chamber 110 through the vacuum tube 122 to achieve vacuum drying of the substrate 200, with high drying efficiency and good drying effect.
[0037] Preferably, the vacuum pumping mechanism 120 further includes a flow equalizing plate 123. The flow equalizing plate 123 is installed on the inner side of the top wall of the drying and annealing chamber 110, and the flow equalizing plate 123 is provided with a plurality of flow guide holes 124, which are arranged in parallel and spaced apart, and are all connected to the vacuum tube 122. Specifically, during the operation of the vacuum pump 121, the air in the drying and annealing chamber 110 flows upward, enters the flow equalizing plate 123 through the plurality of flow guide holes 124, and then flows out through the vacuum tube 122. In this process, the plurality of flow guide holes 124 work together to ensure the uniformity of air flow, avoid turbulence, and improve the stability of the vacuum pumping process.
[0038] The heating mechanism 150 includes a plurality of heating lamps 151. The plurality of heating lamps 151 are arranged side by side and are all installed on the bottom wall of the drying annealing chamber 110. The heating lamps 151 are used to emit light and heat when powered on, so as to radiate heat into the drying annealing chamber 110, so that the temperature in the drying annealing chamber 110 rises rapidly until it reaches a preset temperature. Furthermore, when the temperature in the drying annealing chamber 110 reaches a preset temperature, the power of the heating lamps 151 is reduced so that the heating lamps 151 heat the drying annealing chamber 110, so as to ensure that the drying annealing chamber 110 is continuously at the preset temperature, thereby ensuring the annealing effect.
[0039] The ventilation mechanism 140 includes a gas tank 141, an air pump 142 and an air pipe 143. The air pump 142 is installed on the gas tank 141 and connected to the drying annealing chamber 110 through the air pipe 143. The gas tank 141 is used to store inert gas, and the air pump 142 is used to extract the inert gas in the gas tank 141 to the drying annealing chamber 110 to back-pressurize the drying annealing chamber 110 until the preset air pressure is reached. Further, when the air pressure in the drying annealing chamber 110 reaches the preset air pressure, the air pump 142 is turned off. At this time, since the drying annealing chamber 110 is a closed chamber, the air pressure therein will not change, ensuring that the drying annealing chamber 110 is continuously at the preset air pressure, thereby further ensuring the annealing effect.
[0040] Preferably, the drying and annealing device 100 further includes a plug-in mechanism 160, which includes a driving member 161 and a plug-in plate 162. The driving member 161 is installed in the drying and annealing chamber 110 and connected to the plug-in plate 162, and the driving member 161 is used to drive the plug-in plate 162 to move. The plug-in plate 162 is slidably matched with the drying and annealing chamber 110, and the driving member 161 is used to drive the plug-in plate 162 to extend into the drying and annealing chamber 110 to separate the drying and annealing chamber 110 into a first cavity 112 and a second cavity 113, wherein the first cavity 112 is arranged above the second cavity 113, the flow equalizing plate 123 of the vacuum mechanism 120 is arranged in the first cavity 112, the vacuum mechanism 120 and the ventilation mechanism 140 are both connected to the first cavity 112, the carrier plate 130 is arranged in the first cavity 112, and the heating mechanism 150 is arranged in the second cavity 113. Specifically, after annealing of a substrate 200 is completed, the first cavity 112 and the second cavity 113 are separated by the insert plate 162 to isolate the heat emitted by the heating mechanism 150 in the second cavity 113, thereby improving the cooling efficiency of the first cavity 112, facilitating the rapid drying operation of the next substrate 200 (a higher ambient temperature will have a certain impact on the vacuum drying effect), improving the drying annealing efficiency, and ensuring the drying effect.
[0041] Preferably, the drying and annealing device 100 further includes a vent pipe 170. One end of the vent pipe 170 is connected to the first cavity 112, and the other end is connected to the second cavity 113. A switch valve 171 is provided in the vent pipe 170, and the switch valve 171 is used to control the on and off of the vent pipe 170. Specifically, when the switch valve 171 is opened, the vent pipe 170 is turned on, and at this time, the first cavity 112 is connected to the second cavity 113 through the vent pipe 170, and the vacuum mechanism 120 can directly extract the air in the first cavity 112, and the vacuum mechanism 120 can also extract the air in the second cavity 113 to the first cavity 112 through the vent pipe 170, and then extract it out. When the switch valve 171 is closed, the vent pipe 170 is disconnected, and at this time, the first cavity 112 cannot be connected to the second cavity 113 through the vent pipe 170.
[0042] Preferably, the drying and annealing device 100 further includes a water cooling pipeline (not shown). The water cooling pipeline is installed in the plug plate 162, and the water cooling pipeline is used to pass cooling water to cool the plug plate 162, thereby quickly cooling the first cavity 112, so as to further improve the cooling efficiency of the first cavity 112, so that the first cavity 112 can be quickly cooled to a temperature that can be vacuum dried, shorten the interval time for vacuum drying the next substrate 200, and improve the drying and annealing efficiency.
[0043] The drying and annealing chamber 110 includes a chamber body 114 and a support arm 115. The support arm 115 is connected to the chamber body 114. In this embodiment, the support arm 115 and the chamber body 114 are integrally formed to improve the connection strength. The support plate 130 is arranged on the support arm 115, and the support arm 115 is used to support and fix the support plate 130. Specifically, a water cooling pipeline is also installed in the wall of the chamber body 114 and / or the support arm 115 to further improve the cooling efficiency of the first cavity 112, thereby further improving the drying and annealing efficiency.
[0044] In this embodiment, there are multiple support arms 115, and the multiple support arms 115 are arranged at intervals. The air in the first cavity 112 can pass through the space between two adjacent support arms 115. The multiple support arms 115 work together to reliably support and fix the supporting plate 130, thereby fixing the relative position of the supporting plate 130 and the warehouse body 114.
[0045] Preferably, the drying and annealing device 100 further includes a thermometer 180 and a barometer 190. Both the thermometer 180 and the barometer 190 are installed in the drying and annealing chamber 110, the thermometer 180 is used to detect the temperature in the drying and annealing chamber 110, and the barometer 190 is used to detect the air pressure in the drying and annealing chamber 110, so as to control the temperature and air pressure in the drying and annealing chamber 110 and ensure the vacuum drying and annealing effect.
[0046] It should be noted that, during the operation of the drying and annealing device 100, the substrate 200 is firstly sent into the drying and annealing chamber 110 through the switch door 111 and placed on the carrier plate 130. At this time, the insert plate 162 is arranged in the drying and annealing chamber 110 to separate the drying and annealing chamber 110 into a first cavity 112 and a second cavity 113, and the switch valve 171 in the vent pipe 170 is opened to connect the first cavity 112 with the second cavity 113 through the vent pipe 170; then, the vacuum pump 121 is turned on to evacuate the air in the first cavity 112 and the second cavity 113. The substrate 200 is drawn out until both the first cavity 112 and the second cavity 113 are in a vacuum state. During this process, the moisture on the surface of the substrate 200 is synchronously drawn out to achieve the vacuum drying function of the substrate 200. After the drying is completed, the drive member 161 is used to drive the plug plate 162 to retract out of the drying and annealing chamber 110 to merge the first cavity 112 and the second cavity 113. The switch valve 171 in the ventilation pipe 170 is closed, and the air pump 142 is turned on to introduce inert gas into the drying and annealing chamber 110, so that the drying and annealing chamber 110 is back-pressurized. When the inside of the drying and annealing chamber 110 is When the air pressure reaches the preset pressure, the air pump 142 is stopped, and the heating lamp 151 is turned on to heat the drying annealing chamber 110, and the drying annealing chamber 110 is kept at the preset temperature to achieve the annealing function of the substrate 200; after the annealing is completed, the heating lamp 151 is turned off, and the driving member 161 is used to drive the plug plate 162 to extend into the drying annealing chamber 110 to separate the drying annealing chamber 110 into the first cavity 112 and the second cavity 113 again, so as to prevent the residual heat of the heating lamp 151 in the second cavity 113 from being transferred to the first cavity 112; then the air pump 142 is turned on again to heat the drying annealing chamber 110, and the heating lamp 151 ... The pump 142 is used to introduce inert gas into the drying and annealing chamber 110; when the air pressure in the drying and annealing chamber 110 reaches normal pressure, the switch door 111 is opened to take out the substrate 200; then cooling water is introduced into the water cooling pipeline to water-cool the first cavity 112 to achieve rapid cooling of the first cavity 112; when the first cavity 112 is cooled to a temperature that can be vacuum dried, the next substrate 200 is sent into the drying and annealing chamber 110 through the switch door 111 and placed on the carrier plate 130; this cycle is repeated to sequentially achieve the drying and annealing functions of multiple substrates 200.
[0047] The drying and annealing device 100 provided in the embodiment of the present invention comprises a carrier plate 130 installed in a drying and annealing chamber 110, the carrier plate 130 is used to carry a substrate 200, a vacuum pumping mechanism 120 is connected to the drying and annealing chamber 110, the vacuum pumping mechanism 120 is used to vacuum the drying and annealing chamber 110 to dry the substrate 200, a heating mechanism 150 is installed in the drying and annealing chamber 110, the heating mechanism 150 is used to heat the drying and annealing chamber 110, and a ventilation mechanism 140 is connected to the drying and annealing chamber 110, the ventilation mechanism 140 is used to introduce an inert gas into the drying and annealing chamber 110, so that the substrate 200 is annealed at a preset temperature and a preset pressure. Compared with the prior art, the drying and annealing device 100 provided by the present invention uses a vacuuming mechanism 120 and a ventilation mechanism 140 connected to the drying and annealing chamber 110 and a heating mechanism 150 installed in the drying and annealing chamber 110, so it can sequentially realize the drying and annealing of the substrate 200, save process time, improve production efficiency, reduce equipment cost and maintenance cost, reduce floor space, and improve economic benefits, so that the battery production line has good production efficiency and good product quality.
[0048] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.
Claims
1. A drying annealing device, characterized in that: It includes a drying annealing chamber, a vacuum pumping mechanism, a carrying plate, a ventilation mechanism and a heating mechanism. The carrying plate is installed in the drying annealing chamber and is used to carry a substrate. The vacuum pumping mechanism is connected to the drying annealing chamber and is used to vacuum the drying annealing chamber to dry the substrate. The heating mechanism is installed in the drying annealing chamber and is used to heat the drying annealing chamber. The ventilation mechanism is connected to the drying annealing chamber and is used to introduce inert gas into the drying annealing chamber to anneal the substrate at a preset temperature and a preset pressure.
2. The drying and annealing device according to claim 1, characterized in that: The vacuum pumping mechanism comprises a vacuum pump and a vacuum tube, one end of the vacuum tube is connected to the vacuum pump, and the other end is connected to the top wall of the drying and annealing chamber. The vacuum pump is used to extract the air in the drying and annealing chamber through the vacuum tube.
3. The drying and annealing device according to claim 2, characterized in that: The vacuum pumping mechanism further comprises a flow equalizing plate, which is installed on the inner side of the top wall of the drying and annealing chamber. The flow equalizing plate is provided with a plurality of flow guide holes, which are arranged in parallel and spaced apart and are all connected to the vacuum tube.
4. The drying and annealing device according to claim 1, characterized in that: The heating mechanism comprises a plurality of heating lamp tubes, which are arranged side by side and are all installed on the bottom wall of the drying and annealing chamber.
5. The drying and annealing device according to claim 1, characterized in that: The ventilation mechanism comprises a gas tank, an air pump and an air pipe. The air pump is installed on the gas tank and connected to the drying and annealing chamber through the air pipe. The gas tank is used to store inert gas.
6. The drying and annealing device according to any one of claims 1 to 5, characterized in that: The drying and annealing device also includes a plug-in mechanism, which includes a driving member and a plug-in plate. The driving member is installed in the drying and annealing chamber and connected to the plug-in plate. The plug-in plate is slidably matched with the drying and annealing chamber. The driving member is used to drive the plug-in plate to extend into the drying and annealing chamber to separate the drying and annealing chamber into a first cavity and a second cavity. The vacuuming mechanism and the ventilation mechanism are both connected to the first cavity. The carrying plate is arranged in the first cavity, and the heating mechanism is arranged in the second cavity.
7. The drying and annealing device according to claim 6, characterized in that: The drying and annealing device further comprises a vent pipe, one end of which is communicated with the first cavity, and the other end of which is communicated with the second cavity, and a switch valve is arranged in the vent pipe.
8. The drying and annealing device according to claim 6, characterized in that: The drying annealing device further comprises a water cooling pipeline, which is installed in the plug board and is used for cooling water to pass through so as to cool the plug board.
9. The drying and annealing device according to claim 8, characterized in that: The drying and annealing chamber comprises a chamber body and a support arm, wherein the support arm is connected to the chamber body, the bearing plate is arranged on the support arm, and the water cooling pipeline is also installed in the wall of the chamber body and / or the support arm.
10. A battery production line, characterized in that: It comprises the drying and annealing device as described in any one of claims 1 to 9.