Jet type phosphine diluting device

Abstract

The invention relates to the technical field of spraying, and discloses a spraying type phosphine diluting device which comprises a mixing pipe, a spraying head, a spraying head and a spraying head, the mixing pipe is provided with a diluent gas inlet used for allowing diluent gas to enter, and the lower end of the mixing pipe is provided with a spraying nozzle; the Tesla valve runner is formed in the upper end of the inner side of the mixing pipe; the phosphine inlet is formed in one side wall of the mixing pipe so that phosphine can enter the mixing pipe, and one end of the phosphine inlet penetrates through the inner wall of the Tesla valve runner so that the phosphine can be mixed with diluent gas; by arranging the Tesla valve runner, the detection assembly and the mixing assembly, the device can well perform detection and provide secondary mixing when the concentration is inaccurate so as to ensure that diluted phosphine reaches the preset concentration, the structure is simple, mixed gas can be accelerated during dilution, reverse backflow of the mixed gas is prevented, and the practicability of the device is improved.

Description

Technical Field

[0001] The invention relates to the field of injection technology, and in particular to an injection-type phosphine dilution device. Background Art

[0002] Phosphine, chemical formula PH3, can be used as a doping source in the semiconductor ion implantation process to adjust the electrical properties of semiconductor materials. Phosphine gas is highly toxic at high concentrations, so it is usually diluted with inert gases. Dilution can be achieved by mixing phosphine with inert gases in a certain ratio to ensure that it remains within a safe concentration range during operation. The diluted phosphine, as a doping source, can effectively introduce phosphorus into semiconductor materials. Phosphorus, as an n-type dopant, can improve the conductivity of semiconductors and change their electrical properties.

[0003] When diluting existing phosphine, the dilution gas and phosphine are usually introduced into the same nozzle to achieve the dilution and utilization of the phosphine. However, this method only performs mixing once, and the concentration of the diluted phosphine is difficult to ensure accuracy. There is a situation where the concentration is too high or too low, which affects subsequent use. In addition, the gas cannot ensure unidirectional flow during mixing, and reverse reflux may exist. For this reason, we propose a jet-type phosphine dilution device. Summary of the invention

[0004] The object of the present invention is to provide a jet-type phosphine dilution device to solve the problem mentioned in the above background technology that the existing phosphine is only mixed once at the nozzle, it is difficult to ensure that the predetermined concentration is accurately reached after dilution and mixing, and there may be a problem of gas reverse reflux during mixing.

[0005] To achieve the above object, the present invention provides the following technical solution: a jet-type phosphine dilution device, comprising:

[0006] A mixing tube, wherein a dilution gas inlet is provided on the mixing tube for dilution gas to enter, and a nozzle is provided at the lower end of the mixing tube;

[0007] The Tesla valve flow channel is opened at the upper end of the inner side of the mixing tube;

[0008] A phosphine inlet is arranged on a side wall of the mixing tube for the phosphine to enter, and one end of the phosphine inlet penetrates the inner wall of the Tesla valve flow channel to mix the phosphine with the dilution gas;

[0009] A detection component is arranged in the middle of one side wall of the mixing tube to detect the diluted gas;

[0010] The guide plate is arranged at the middle part of the inner side of the mixing tube to guide the gas, and a mixing chamber is arranged at the lower end of the mixing tube, and a stirring component for remixing the gas is arranged inside the mixing chamber.

[0011] Preferably, the stirring assembly includes a rotating shaft, stirring blades, a base and a supplementary pipe, the base is fixed to the lower end of the inner side of the mixing tube by a support rod, and a rotating shaft is rotatably arranged between the base and the guide plate, the outer surface of the rotating shaft is provided with stirring blades, the supplementary pipe is fixed to the outer surface of the mixing tube, and one end of the supplementary pipe passes through a side wall of the mixing tube and is connected to the mixing chamber.

[0012] Preferably, two supplementary pipes are provided, and one end of the two supplementary pipes is connected to the dilution gas and the phosphine respectively.

[0013] Preferably, the supplementary pipeline includes an inflow member and a spiral member, the spiral member is fixed to the outer surface of the mixing tube, and one end of the spiral member is provided with an inflow member for air intake.

[0014] Preferably, a plurality of stirring blades are evenly distributed along the axial direction of the rotating shaft, and the outlet end of the supplementary pipe corresponds to the stirring blades.

[0015] Preferably, the guide plate is circular, and a through groove is formed through the inner side of the guide plate.

[0016] Preferably, the cross section of the through groove is an inclined structure.

[0017] Preferably, the detection assembly includes a sampling tube and a gas analyzer, the gas analyzer is fixed to the outer surface of the mixing tube, and a side wall of the gas analyzer is provided with a sampling tube extending into the inner side of the mixing tube.

[0018] Preferably, the inner diameter of the nozzle is smaller than the inner diameter of the dilution gas inlet.

[0019] Compared with the prior art, the present invention has the following beneficial effects:

[0020] By providing a Tesla valve flow channel, a detection component and a mixing component, it is avoided that only one mixing is performed when diluting the phosphine, resulting in too low or too high concentration of the phosphine after dilution. The device can perform detection well and provide secondary mixing when the concentration is inaccurate to ensure that the diluted phosphine reaches a predetermined concentration. The structure is simple, and the mixed gas can be accelerated during dilution to prevent the mixed gas from flowing back, thereby improving the practicality of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a structural schematic diagram of the present invention;

[0022] Figure 2 This is a schematic diagram of the supplementary pipeline structure of the present invention;

[0023] Figure 3 It is a schematic diagram of the cross-sectional structure of the mixing tube of the present invention;

[0024] Figure 4 It is a schematic diagram of the guide plate structure of the present invention;

[0025] Figure 5 It is a schematic diagram of the spiral structure of the present invention.

[0026] In the figure: 1. mixing tube; 2. gas analyzer; 3. nozzle; 4. phosphine inlet; 5. dilution gas inlet; 6. supplementary pipeline; 601. inflow part; 602. spiral part; 7. Tesla valve flow channel; 8. sampling tube; 9. guide plate; 901. through groove; 10. mixing chamber; 11. rotating shaft; 12. stirring blade; 13. base. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0028] See also Figure 1-Figure 5 The present invention provides a technical solution: a jet-type phosphine dilution device, comprising:

[0029] A mixing tube 1, the mixing tube 1 is provided with a dilution gas inlet 5 for entering a dilution gas, the phosphine can be diluted by the dilution gas, such as nitrogen or argon, and a nozzle 3 is provided at the lower end of the mixing tube 1;

[0030] The Tesla valve flow channel 7 is provided at the upper end of the inner side of the mixing tube 1, so as to facilitate the mixing of the phosphine and the diluent gas, and accelerate the mixing process so that the mixed gas flows in one direction;

[0031] A phosphine inlet 4 is provided on a side wall of the mixing tube 1 for the entry of phosphine, and one end of the phosphine inlet 4 penetrates the inner wall of the Tesla valve flow channel 7 to mix the phosphine with the dilution gas, so as to facilitate the mixing and dilution of the phosphine;

[0032] A detection component is arranged in the middle of one side wall of the mixing tube 1 to detect the diluted gas, so as to facilitate the detection of the concentration of phosphine in the diluted mixed gas;

[0033] A guide plate 9 is arranged in the middle of the inner side of the mixing tube 1 to guide the gas, and a mixing chamber 10 is arranged at the lower end of the mixing tube 1. The inner side of the mixing chamber 10 has a stirring component for remixing the gas, so as to facilitate remixing to achieve a predetermined dilution concentration of phosphine.

[0034] Preferably, the stirring assembly includes a rotating shaft 11, stirring blades 12, a base 13 and a supplementary pipe 6. The base 13 is fixed to the lower end of the inner side of the mixing tube 1 by a support rod, and the rotating shaft 11 is rotatably arranged between the base 13 and the guide plate 9. The outer surface of the rotating shaft 11 is provided with stirring blades 12. The supplementary pipe 6 is fixed to the outer surface of the mixing tube 1, and one end of the supplementary pipe 6 passes through a side wall of the mixing tube 1 and is connected to the mixing chamber 10, so as to supplement the dilution gas or phosphine respectively when the phosphine concentration is detected to be too large or too small.

[0035] Preferably, two supplementary pipes 6 are provided, and one end of the two supplementary pipes 6 is respectively connected to the dilution gas and the phosphine, so as to supplement the gas to reach a predetermined dilution concentration.

[0036] Preferably, the supplementary pipe 6 includes an inflow piece 601 and a spiral piece 602. The spiral piece 602 is fixed to the outer surface of the mixing tube 1 to facilitate the rotation of the rotating shaft 11 so as to move the multiple stirring blades 12 to remix the gas. An inflow piece 601 for air intake is provided at one end of the spiral piece 602.

[0037] Preferably, a plurality of stirring blades 12 are evenly distributed along the axial direction of the rotating shaft 11 , and the outlet end of the supplementary pipe 6 corresponds to the stirring blades 12 .

[0038] Preferably, the guide plate 9 is circular, and a through groove 901 is formed through the inner side of the guide plate 9 to facilitate guiding the gas.

[0039] Preferably, the cross section of the through groove 901 is an inclined structure, so as to better concentrate the gas near the stirring blade 12 to improve the mixing effect of the gas.

[0040] Preferably, the detection component includes a sampling tube 8 and a gas analyzer 2. The gas analyzer 2 is fixed to the outer surface of the mixing tube 1. A sampling tube 8 extending into the inner side of the mixing tube 1 is provided on one side wall of the gas analyzer 2 to facilitate the detection of phosphine concentration.

[0041] Preferably, the inner diameter of the nozzle 3 is smaller than the inner diameter of the dilution gas inlet 5, so that the diluted phosphine has a better flow rate when sprayed out.

[0042] The working principle and use process of the present invention are as follows: when in use, the dilution gas enters the inner side of the Tesla valve flow channel 7 through the dilution gas inlet 5, and the phosphine flows into the inner side of the Tesla valve flow channel 7 through the inner wall of the Tesla valve flow channel 7 along the inclined phosphine inlet 4. The phosphine is mixed with the dilution gas inside the Tesla valve flow channel 7 for dilution. The Tesla valve flow channel 7 can accelerate the gas well and prevent the flowing gas from flowing back. After preliminary acceleration and dilution, the gas flows out from the lower end of the Tesla valve flow channel 7. The mixed gas is detected by the gas analyzer 2. When the concentration of phosphine is relatively high, The signal is transmitted to the external processing module, and one of the supplementary pipes 6 of the dilution air is opened through the controller of the processing module, so that the dilution air enters the inner side of the mixing chamber 10. The spiral member 602 is spiral-shaped, and can blow the stirring blade 12 when the dilution gas flows into the mixing chamber 10, thereby driving the rotating shaft 11 to rotate to drive the multiple stirring blades 12 to rotate, so that the dilution gas is mixed with the preliminarily diluted phosphine gas to reach a preset concentration. Similarly, when the concentration of phosphine is low, phosphine can be introduced to increase the concentration, and finally ejected from the inner side of the mixing tube 1 to the outside through the nozzle 3 with a smaller diameter.

[0043] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A jet-type phosphine dilution device, characterized in that: include: A mixing tube (1), wherein a dilution gas inlet (5) is provided on the mixing tube (1) for admitting dilution gas, and a nozzle (3) is provided at the lower end of the mixing tube (1); A Tesla valve flow channel (7) is provided at the upper end of the inner side of the mixing tube (1); A phosphine inlet (4) is arranged on a side wall of the mixing tube (1) to allow the phosphine to enter, and one end of the phosphine inlet (4) penetrates the inner wall of the Tesla valve flow channel (7) to mix the phosphine with the dilution gas; A detection component is arranged in the middle of a side wall of the mixing tube (1) to detect the diluted gas; A guide plate (9) is arranged in the middle of the inner side of the mixing tube (1) to guide the gas, and a mixing chamber (10) is arranged at the lower end of the mixing tube (1), and a stirring component for remixing the gas is arranged inside the mixing chamber (10).

2. A jet-type phosphine dilution device according to claim 1, characterized in that: The stirring assembly comprises a rotating shaft (11), a stirring blade (12), a base (13) and a supplementary pipe (6); the base (13) is fixed to the lower end of the inner side of the mixing pipe (1) through a support rod, and a rotating shaft (11) is rotatably arranged between the base (13) and the guide plate (9); the outer surface of the rotating shaft (11) is provided with a stirring blade (12); the supplementary pipe (6) is fixed to the outer surface of the mixing pipe (1), and one end of the supplementary pipe (6) passes through a side wall of the mixing pipe (1) and is connected to the mixing chamber (10).

3. A jet-type phosphine dilution device according to claim 2, characterized in that: Two supplementary pipes (6) are provided, and one end of the two supplementary pipes (6) is connected to the dilution gas and the phosphine respectively.

4. A jet-type phosphine dilution device according to claim 3, characterized in that: The supplementary pipeline (6) comprises an inflow piece (601) and a spiral piece (602), wherein the spiral piece (602) is fixed to the outer surface of the mixing tube (1), and one end of the spiral piece (602) is provided with an inflow piece (601) for air intake.

5. The jet-type phosphine dilution device according to claim 2, characterized in that: A plurality of stirring blades (12) are evenly distributed along the axial direction of the rotating shaft (11), and the outlet end of the supplementary pipe (6) corresponds to the stirring blades (12).

6. The jet-type phosphine dilution device according to claim 1, characterized in that: The guide plate (9) is circular, and a through groove (901) is provided through the inner side of the guide plate (9).

7. A jet-type phosphine dilution device according to claim 6, characterized in that: The cross section of the through groove (901) is an inclined structure.

8. The jet-type phosphine dilution device according to claim 1, characterized in that: The detection assembly comprises a sampling tube (8) and a gas analyzer (2), wherein the gas analyzer (2) is fixed to the outer surface of the mixing tube (1), and a sampling tube (8) extending into the inner side of the mixing tube (1) is provided on a side wall of the gas analyzer (2).

9. The jet-type phosphine dilution device according to claim 1, characterized in that: The inner diameter of the nozzle (3) is smaller than the inner diameter of the dilution gas inlet (5).

Images