Light spot size adjusting assembly, optical system and laser processing equipment

Abstract

The invention relates to the technical field of optics, and discloses a light spot size adjusting assembly, an optical system and laser processing equipment, the light spot size adjusting assembly comprises a first microlens array, a second microlens array and a focus lens; the second microlens array is movably arranged relative to the first microlens array along a first direction, and an acute angle is formed between the first direction and the light path direction; when the second micro lens array moves to a first position, the passing light beam is output to form a first light spot; and when the second microlens array moves to a second position away from the first microlens array in the first direction, the passing light beam is output to form a second light spot, the position of the edge of one side of the second light spot is unchanged relative to the position of the edge of the side of the first light spot, and the size of the second light spot is reduced relative to the size of the first light spot. Through the mode, the position of the edge of one side of the light spot can be ensured to be unchanged on the basis of adjusting the size of the output light spot, the structure is simple, the cost is low, and the reliability is good.

Description

Technical Field

[0001] The embodiments of the present application relate to the field of optical technology, and specifically to a spot size adjustment component, an optical system, and laser processing equipment. Background Art

[0002] In the field of optics, the size of the light spot needs to be adjusted in many cases, and the adjusted light spot must be in a specified position. For example, in the application scenario of laser edge banding, it is necessary to ensure that the distance between the upper and lower edges of the output light spot is consistent with the thickness of the workpiece to be processed, so as to ensure that the edge banding can be reliably irradiated by the laser and combined with the workpiece to be processed.

[0003] In order to ensure that the laser edge sealing equipment is compatible with workpieces of different thicknesses, the optical system thereon needs to be equipped with a complex adjustment mechanism. Most of the existing methods are to first adjust the optical elements inside the optical system to scale the size of the formed light spot with its optical axis as the reference. After the light spot is scaled to the required size, the upper and lower edges of the light spot are aligned with the upper and lower edges of the workpiece to be processed by adjusting the position of the entire optical system.

[0004] This adjustment method results in a large number of moving parts, a complex structure, and high cost for the laser edge banding equipment. At the same time, due to its complex adjustment method, adjustment errors are very likely to occur, thereby affecting processing accuracy and reliability. Summary of the invention

[0005] In view of the above problems, an embodiment of the present application provides a spot size adjustment component, which can ensure that the position of the edge of one side of the spot remains unchanged on the basis of adjusting the output spot size, and has a simple structure, low cost and good reliability.

[0006] According to one aspect of an embodiment of the present application, a light spot size adjustment component is provided, comprising a first microlens array, a second microlens array and a focusing lens arranged in sequence along a light path direction; the first microlens array is used to be fixedly arranged relative to a light source, and the second microlens array is movably arranged relative to the first microlens array along a first direction, and an acute angle is formed between the first direction and the light path direction; when the second microlens array moves to a first position, it is aligned with the first microlens array along the light path direction, the first microlens array is used to receive a light beam output by the light source, and the first microlens array, the second microlens array and the focusing lens are used together to make the light beam output to form a first light spot; the second microlens array When the array moves away from the first microlens array to the second position along the first direction, it deviates from the first microlens array. The first microlens array is used to receive the light beam output by the light source, and when the second microlens array is in the first position, the light beam passing through any microchannel on the second microlens array still passes through the same microchannel on the second microlens array when the second microlens array is in the second position. The first microlens array, the second microlens array and the focusing mirror are used together to make the light beam output to form a second light spot, wherein the position of one side edge of the second light spot remains unchanged relative to the position of the first light spot on the side edge, and the size of the second light spot is reduced relative to the size of the first light spot.

[0007] In an optional manner, the arrangement direction of the microchannels on the first microlens array and the second microlens array are both the second direction, the second direction is perpendicular to the light path direction, the acute angle between the first direction and the light path direction is θ, and the acute angle between the first direction and the second direction is (90°-θ); when the second microlens array moves to the first position, the optical axes of the first microlens array, the second microlens array and the focusing mirror coincide with each other; when the second microlens array moves to the second position, the optical axis of the first microlens array coincides with the optical axis of the focusing mirror, and the optical axis of the second microlens array is parallel to but does not coincide with the optical axis of the first microlens array, and the first microlens array, the second microlens array and the focusing mirror are used together to make the second light spot formed by the passing light beam, so that the size of the second light spot along the second direction is reduced relative to the size of the first light spot along the second direction, and the edge of the second light spot on one side along the second direction is relative to the edge of the first light spot on that side.

[0008] In an optional manner, the focal length and aperture of the first microlens array and the second microlens array are equal, wherein the focal length is f, the aperture is d, and when the second microlens array is in the first position, the distance between the first microlens array and the second microlens array along the optical path direction is f; the value of θ is as follows:

[0009]

[0010] According to another aspect of an embodiment of the present application, an optical system is provided, comprising a light source and a spot size adjustment component as described above, wherein the spot size adjustment component is used to receive a light beam output by the light source and process the light beam to adjust the size of a light spot formed by its output.

[0011] In an optional manner, the optical system also includes a beam shaping component, which is arranged between the light source and the spot size adjustment component. The beam shaping component is used to receive the light beam output by the light source and collimate it before outputting it to the spot size adjustment component.

[0012] In an optional manner, the optical system also includes a beam expansion component, which is arranged between the beam shaping component and the spot size adjustment component. The beam expansion component is used to receive the light beam output by the beam shaping component and expand it before outputting it to the spot size adjustment component.

[0013] In an optional manner, the optical system also includes a third-direction size adjustment component, which is arranged adjacent to the spot size adjustment component along the light path direction, and the third-direction size adjustment component is used to adjust the size of the passing light beam along a third direction, and the third direction is perpendicular to both the light path direction and the second direction, and the second direction is the arrangement direction of the microchannels on the first microlens array and the second microlens array.

[0014] In an optional manner, the third direction size adjustment component includes a third microlens array and a fourth microlens array arranged in sequence along the light path direction, the arrangement direction of the microchannels on the third microlens array and / or the fourth microlens array is the third direction, and at least one of the third microlens array and the fourth microlens array is movably arranged along the light path direction to adjust the size of the output light spot along the third direction by changing the distance between the third microlens array and the fourth microlens array along the light path direction.

[0015] In an optional manner, the optical system further includes a reflection component, which is disposed in the optical path of the light beam output by the light source, and is used to reflect the light beam to change the propagation direction of the light beam.

[0016] According to another aspect of an embodiment of the present application, a laser processing device is provided, comprising a feeding platform and the optical system described in any one of the above items, wherein the feeding platform is used to transport the workpiece to be processed, the optical system is arranged toward the feeding platform, and the edge of the second light spot whose position remains unchanged relative to the first light spot is located on the surface of the feeding platform.

[0017] The light spot size adjustment component provided in the embodiment of the present application can adjust the size of the light spot formed by the output while ensuring that the position of one side edge of the light spot remains unchanged by tilting the moving direction of the second microlens array to the first direction forming an acute angle with the light path direction and ensuring that the light beam passing through the same microchannel on the second microlens array remains unchanged when the second microlens array is in any position. Therefore, there is no need to additionally set up a motion platform for adjusting the position of the light spot edge by adjusting the position of the optical system, which is conducive to simplifying the structure and motion relationship of the optical system, thereby reducing the product volume, reducing costs, and improving control accuracy.

[0018] The above description is only an overview of the technical solution of the present application. In order to more clearly understand the technical means of the present application, it can be implemented in accordance with the contents of the specification. In order to make the above and other purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are listed below. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Various other advantages and benefits will become apparent to those of ordinary skill in the art by reading the detailed description of the preferred embodiments below. The accompanying drawings are only for the purpose of illustrating the preferred embodiments and are not to be considered as limiting the present application. Also, the same reference symbols are used throughout the accompanying drawings to represent the same components. In the accompanying drawings:

[0020] Figure 1 It is a schematic diagram of the structure and optical path of an existing spot size adjustment component;

[0021] Figure 2 A schematic diagram of the structure and optical path of a spot size adjustment component provided in an embodiment of the present invention;

[0022] Figure 3 A schematic diagram of the structure and optical path of another light spot size adjustment component provided by an embodiment of the present invention;

[0023] Figure 4 A schematic diagram of the structure of a second microlens array provided in an embodiment of the invention;

[0024] Figure 5 A schematic diagram of the structure and optical path of the first optical system in the fast axis direction provided by an embodiment of the present invention;

[0025] Figure 6 for Figure 5 The structure and optical path schematic diagram of the optical system in the slow axis direction;

[0026] Figure 7 A schematic diagram of the structure and optical path of a second optical system in the fast axis direction provided by an embodiment of the present invention;

[0027] Figure 8 for Figure 7 The structure and optical path schematic diagram of the optical system in the slow axis direction;

[0028] Fig. 9 A schematic diagram of the structure and optical path of a third optical system provided by an embodiment of the present invention;

[0029] Fig.10 A schematic diagram of the structure and optical path of a fourth optical system provided by an embodiment of the present invention;

[0030] Fig.11 A schematic structural diagram of a laser processing device provided in an embodiment of the present invention.

[0031] The reference numerals in the specific implementation manner are as follows:

[0032] 100, spot size adjustment component; 110, first microlens array; 120, second microlens array; 130, focusing lens;

[0033] 210, first light spot; 220, second light spot;

[0034] 1000, optical system; 300, light source; 400, beam shaping component; 500, beam expansion component; 600, third direction size adjustment component; 610, third microlens array; 620, fourth microlens array; 700, reflection component;

[0035] 10000, laser processing equipment; 2000, feeding platform;

[0036] 20000, parts to be processed. DETAILED DESCRIPTION

[0037] The following embodiments of the technical solution of the present application are described in detail in conjunction with the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solution of the present application, and are therefore only used as examples, and cannot be used to limit the scope of protection of the present application.

[0038] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by technicians in the technical field to which this application belongs; the terms used herein are only for the purpose of describing specific embodiments and are not intended to limit this application; the terms "including" and "having" in the specification and claims of this application and the above-mentioned figure descriptions and any variations thereof are intended to cover non-exclusive inclusions.

[0039] In the description of the embodiments of the present application, the technical terms "first", "second", etc. are only used to distinguish different objects, and cannot be understood as indicating or implying relative importance or implicitly indicating the number, specific order or primary and secondary relationship of the indicated technical features. In the description of the embodiments of the present application, the meaning of "multiple" is more than two, unless otherwise clearly and specifically defined.

[0040] Reference to "embodiments" herein means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0041] In the description of the embodiments of the present application, the term "and / or" is only a description of the association relationship of associated objects, indicating that three relationships may exist. For example, A and / or B can represent: A exists, A and B exist at the same time, and B exists. In addition, the character " / " in this article generally indicates that the associated objects before and after are in an "or" relationship.

[0042] In the description of the embodiments of the present application, the term "multiple" refers to more than two (including two). Similarly, "multiple groups" refers to more than two groups (including two groups), and "multiple pieces" refers to more than two pieces (including two pieces).

[0043] In the description of the embodiments of the present application, the technical terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, which are only for the convenience of describing the embodiments of the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the embodiments of the present application.

[0044] In the description of the embodiments of the present application, unless otherwise clearly specified and limited, technical terms such as "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, and it can be the internal connection of two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present application can be understood according to the specific circumstances.

[0045] Laser edge banding is a processing method that uses laser to irradiate the edge banding on the workpiece to melt the coating on the edge banding to perfectly combine the workpiece and the edge banding. In the process of laser edge banding, the workpiece is generally transported horizontally on the feeding platform. When the workpiece passes through the laser irradiation area, the edge banding at the corresponding position is combined with the workpiece.

[0046] When edge-sealing workpieces of different thicknesses, in order to fully utilize the laser energy and ensure the reliability of edge sealing, the laser spot size needs to be adjusted so that its size in the height direction is consistent with the thickness of the workpiece, and the upper and lower edges of the spot need to be aligned with the upper and lower edges of the workpiece.

[0047] In order to achieve the above purpose, the existing laser edge banding system is equipped with a complex adjustment mechanism. For details, please refer to Figure 1 , the figure shows an existing optical system for laser edge banding. As shown in the figure, when edge banding is performed on a workpiece with a thickness of h1, the distance between the two microlens arrays is its focal length f', and the light path in the optical system is shown as the solid line in the figure. After the horizontally incident light beam is focused by each microchannel of the microlens array on the left, the light beam focused by the corresponding microchannel converges at the center of the cylindrical surface of the microlens array on the right without being deflected. The side edge of the light spot finally formed on the processing surface is the combination of the solid line and the dotted line at the processing surface in the figure, and the outer contour of the front of the light spot as shown in the figure is the shaded area of ​​the solid line. On this basis, when it is necessary to perform edge sealing on the workpiece with a thickness of h2, the microlens array on the right side of the optical system moves to the right to the position shown by the dotted line. At this time, the light path from the light source to the microlens array on the right side is consistent with the previous light path, and the light path from the microlens array on the right side to the processing surface is shown by the dotted line in the figure. The light beam focused by each microchannel of the microlens array on the left side converges before the center of the cylindrical surface of the microlens array on the right side, so that the light beam of each microchannel reaches the cylindrical surface of the microlens array on the right side after convergence. The divergence angle of the light beam is compressed when it exits the microlens array on the right side, and the side edge of the light spot finally formed on the processing surface is the dotted line at the processing surface in the figure. The front of the light spot is shown in the figure as the shaded area with the dotted line outline. At this time, the first step of adjustment is completed - the adjustment of the light spot size.

[0048] Next, since the height of the feeding plane on the feeding platform of the edge banding equipment is constant, it is necessary to adjust the bottom edge of the adjusted light spot to a position that coincides with the feeding plane. To this end, the entire optical system needs to be installed on a motion platform, and the driver drives the optical system downward through the motion platform to move the bottom edge of the adjusted light spot to the feeding plane, completing the adjustment of the light spot size and position. Next, the workpiece with a thickness of h2 is transported through the feeding platform, and the adjusted light spot output by the optical system is used for edge banding.

[0049] In summary, the existing laser edge banding equipment has a large number of optical system motion modules, which leads to its complex structure, large size and high cost. At the same time, due to the complexity of the motion relationship, the control system will become more complicated and prone to adjustment errors, which will affect the processing accuracy.

[0050] Based on this, the present application proposes a spot size adjustment component, which cleverly changes the relative position relationship between the two microlens arrays by utilizing the refraction principle of the light beam propagating in different media, so that the two microlens arrays are staggered along the light path direction, so that the spot size can be adjusted. At the same time, it can also ensure that the position of one edge of the spot does not change after adjustment, so that there is no need for an additional motion platform to adjust the position of the optical system, ensuring that the entire system structure is simple and low in cost, and because the motion mode is single, it is conducive to ensuring the accuracy of adjustment.

[0051] The spot size adjustment component provided in the present application includes but is not limited to applications in technical fields such as laser edge sealing, laser beauty, lighting, scanning, etc. The following mainly describes the laser edge sealing application scenario as an example.

[0052] See also Figure 2 , the figure shows the structure and optical path of the spot size adjustment component provided by the embodiment of the present application. As shown in the figure, the spot size adjustment component 100 includes a first microlens array 110, a second microlens array 120 and a focusing lens 130 which are sequentially arranged along the optical path direction (the direction indicated by the z-axis in the figure). The first microlens array 110 is used to be fixedly arranged relative to the light source, and the second microlens array 120 is movably arranged relative to the first microlens array 110 along a first direction (the direction indicated by the double arrow A in the figure), and an acute angle θ is formed between the direction indicated by the double arrow A and the direction indicated by the z-axis.

[0053] When the second microlens array 120 moves to the first position (i.e., the second microlens array 120 is at the position shown by the solid line in the figure), it is aligned with the first microlens array 110 along the direction shown by the z-axis. The first microlens array 110 is used to receive the light beam input by the light source (the light beam composed of the solid line and the double-dotted line in the figure), and the first microlens array 110, the second microlens array 120 and the focusing lens 130 are used together to make the light beam output form the first light spot 210 (with the first light spot 210). Figure 1 Similarly, the side edge of the first light spot 210 is a combination of the solid line and the dotted line in the figure).

[0054] When the second microlens array 120 moves away from the first microlens array 110 in the direction indicated by the double arrow A to the second position (that is, when the second microlens array 120 is in the position indicated by the dotted line in the figure), it deviates from the first microlens array 110. The first microlens array 110 is used to receive the light beam output by the light source (the light beam composed of the solid line and the dotted line in the figure), and when the second microlens array 120 is in the first position, the light beam passing through any microchannel on the second microlens array 120 still passes through the same microchannel on the second microlens array 120 when the second microlens array 120 is in the second position. The first microlens array 110, the second microlens array 120 and the focusing lens 130 are used together to make the light beam output to form a second light spot 220 (the side edge of the second light spot 220 is the dotted line shown in the figure), wherein the position of one side edge of the second light spot 220 remains unchanged relative to the position of the first light spot 210 at the side edge, and the size of the second light spot 220 is reduced relative to the size of the first light spot 210.

[0055] exist Figure 2 In the specific embodiment shown, when the second microlens array 120 is in the first position, the distance between the second microlens array 120 and the first microlens array 110 along the direction shown by the z-axis is the focal length f of the first microlens array 110, so that the light beam horizontally incident on the first microlens array 110 is focused to the center of each microchannel on the second microlens array 120, and the divergence angle of the light beam basically does not change after passing through the second microlens array 120, and finally forms a first light spot 210 after being focused by the focusing mirror 130.

[0056] When the second microlens array 120 moves to the lower right to the second position along the direction indicated by the double arrow A, the light beams passing through the first microlens array 110 converge and travel a certain distance before reaching the second microlens array 120. Figure 2 As shown in FIG. 1 , a portion of the light beam passing through the center of the microchannel on the second microlens array 120 at the first position still passes through the center of the corresponding microchannel on the second microlens array 120 at the second position (the portion of the light beam includes Figure 2 The light path of the partial light beam does not change when the second microlens array 120 is in the first position and the second position, and is composed of Figure 2 It can be seen that this part of the light beam forms the bottom edge of the first light spot 210 and the second light spot 220, thereby ensuring that the bottom edge positions of the first light spot 210 and the second light spot 220 formed when the second microlens array 120 is in the first position and the second position do not change.

[0057] It should be noted that Figure 2 This is only an exemplary description provided in the embodiments of the present application. In other embodiments, such as Figure 3As shown in FIG. 1 , when the second microlens array 120 is in the first position, the light beams passing through the first microlens array 110 may also converge at the center of the microchannel on the second microlens array 120. The specific light path is shown in the figure. It should be noted that, unlike Figure 2 Similarly, Figure 3 The light beam represented by the solid line exists when the second microlens array 120 is in the first position and the second position. The light beam represented by the dashed line exists when the second microlens array 120 is in the first position but does not exist when it is in the second position. The light beam represented by the dotted line is the opposite, that is, it does not exist when the second microlens array 120 is in the first position but exists when it is in the second position.

[0058] Depend on Figure 3 It can be seen from the optical path shown that when the second microlens array 120 is in the first position and the second position, the positions of the bottom edges of the first light spot and the second light spot formed remain unchanged.

[0059] In order to ensure that the spot size is reliably adjusted, the Figure 2 and Figure 3 It can be seen from the illustrated embodiment that when the second microlens array 120 is in the first position, a light beam passing through any microchannel thereon will still pass through the same microchannel on the second microlens array 120 when the second microlens array 120 is in the second position.

[0060] It is understandable that in Figure 2 and Figure 3 In the illustrated embodiment, the cylindrical surfaces on the first microlens array 110 and the second microlens array 120 are both convex toward the focusing lens 130, which does not constitute a limitation on the specific structures of the first microlens array 110 and the second microlens array 120. In other embodiments, the cylindrical surfaces on the first microlens array 110 and the second microlens array 120 may both be convex in a direction away from the focusing lens 130, or the cylindrical surface on one of the two may be convex toward the focusing lens 130, and the cylindrical surface on the other may be convex in a direction away from the focusing lens 130.

[0061] The light spot size adjustment component 100 provided in the embodiment of the present application can adjust the size of the light spot formed by the output while ensuring that the position of one side edge of the light spot remains unchanged by tilting the moving direction of the second microlens array 120 to the first direction that forms an acute angle with the light path direction and ensuring that the light beam passing through the same microchannel on the second microlens array 120 remains unchanged when the second microlens array 120 is in any position. Therefore, there is no need to additionally set up a motion platform for adjusting the position of the light spot edge by adjusting the position of the optical system, which is conducive to simplifying the structure and motion relationship of the optical system, thereby reducing the product volume, reducing costs, and improving control accuracy.

[0062] Please refer again Figure 2 , and further combined with Figure 4 , the figure shows the front structure of the second microlens array 120 provided by the embodiment of the present application. As shown in the figure, in some embodiments, the arrangement direction of the microchannels on the first microlens array 110 and the second microlens array 120 are both in the second direction (the direction indicated by the y axis in the figure), the acute angle between the direction indicated by the z axis and the direction indicated by the double arrow A is θ, and the acute angle between the direction indicated by the z axis and the direction indicated by the double arrow A is (90°-θ). When the second microlens array 120 moves to the first position, the optical axes of the first microlens array 110, the second microlens array 120 and the focusing lens 130 coincide. When the second microlens array 120 moves to the second position, the optical axes of the first microlens array 110 and the focusing mirror 130 coincide with each other, and the optical axis of the second microlens array 120 is parallel to but not coincident with the optical axis of the first microlens array 110. The first microlens array 110, the second microlens array 120 and the focusing mirror 130 are used together to form a second light spot 220 after the passing light beam forms the second light spot 220, and the size of the second light spot 220 along the direction indicated by the y-axis is reduced relative to the size of the first light spot 210 along the direction indicated by the y-axis.

[0063] The two acute angles formed by the direction indicated by the double arrow A and the directions indicated by the y-axis and the z-axis are complementary to each other, so that the moving direction of the second microlens array 120 is limited to be in the yz plane.

[0064] In this embodiment, when the second microlens array 120 is located at the first position, the optical axes of the first microlens array 110, the second microlens array 120 and the focusing lens 130 coincide with each other, so that the components of the optical path are aligned with each other, which is convenient for precise control of the optical path, and in this state, the size of the first light spot 210 formed by the output is the largest. When the second microlens array 120 is displaced to the second position along the direction indicated by the double arrow A in the yz plane, the optical axis of the second microlens array 120 moves to form a parallel but non-coincident relationship with the optical axis of the first microlens array 110. Since the light beam passing through the same microchannel on the second microlens array 120 does not change, based on the refraction principle of light propagation, the position of the bottom edge of the formed second light spot 220 along the direction indicated by the y-axis remains unchanged relative to the first light spot 210, but the size along the direction indicated by the y-axis is reduced relative to the first light spot 210. Figure 2 As shown in , from the presented light spot, it is equivalent to that the bottom edge position of the light spot remains unchanged, while the top edge of the light spot decreases.

[0065] In order to quickly and accurately determine the moving direction of the second microlens array 120 for different application scenarios, the present application proposes an implementation method. Figure 2As shown in the figure, the focal length and aperture of the first microlens array 110 and the second microlens array 120 are equal, wherein the focal length is f, the aperture is d, and when the second microlens array 120 is in the first position, the distance between the first microlens array 110 and the second microlens array 120 along the direction shown by the z axis is f, and θ is as follows:

[0066]

[0067] by Figure 2 For example, the focal length of the focusing lens 130 is F. When the second microlens array 120 moves to the second position, the distance between the first microlens array 110 and the second microlens array 120 along the z-axis direction is f+l, and the distance along the y-axis direction is h. Based on optical principles, the size change ΔL of the light spot along the z-axis direction has the following relationship:

[0068]

[0069] From formula (1), we can get:

[0070]

[0071] According to the trigonometric function relationship:

[0072]

[0073] Combining equations (2) and (3), θ can be determined as follows:

[0074]

[0075] Based on the above derivation process, for different application scenarios, after the focal lengths and apertures of the first microlens array 110 and the second microlens array 120 are known, the moving direction of the second microlens array 120 can be quickly determined, and corresponding product designs for different application scenarios can be performed more conveniently and quickly.

[0076] According to another aspect of the embodiment of the present application, an optical system is also provided. Figure 5 and Figure 6 , Figure 5 The optical path of the optical system along the third direction (the direction shown by the x-axis in the figure, that is, the fast axis direction of the optical system) is shown in FIG. Figure 6 1000 shows the optical path of the optical system along the second direction (the direction shown by the y-axis in the figure, i.e., the slow axis direction of the optical system). As shown in the figure, the optical system 1000 includes a light source 300 and a light spot size adjustment component 100 provided in any of the above embodiments. The light spot size adjustment component 100 is used to receive the light beam output by the light source 300 and process the light beam to adjust the size of the light spot formed by the output.

[0077] The optical system 1000 provided in the embodiment of the present application can adjust the size of the light spot formed by the output while ensuring that the position of one edge of the light spot remains unchanged by adopting the light spot size adjustment component 100 provided in any of the above embodiments, thereby eliminating the need to additionally set up a motion platform for adjusting the position of the optical system, thereby achieving the purpose of simplifying the structure and motion relationship of the optical system, thereby reducing the product volume, reducing costs, and improving control accuracy.

[0078] In order to make the light beam incident to the spot size adjustment component 100 close to collimation, so as to ensure that the spot size adjustment component 100 can accurately adjust the size of the spot, the present application further proposes an implementation method, which is described in detail in detail in detail. Figure 5 and Figure 6 As shown in the figure, the optical system 1000 also includes a beam shaping component 400, which is arranged between the light source 300 and the spot size adjustment component 100. The beam shaping component 400 is used to receive the light beam output by the light source 300 and align and collimate it before outputting it to the spot size adjustment component 100.

[0079] Specifically, in Figure 5 and Figure 6 In the specific embodiment shown, the beam shaping assembly 400 uses two circular mirrors, and collimates the light beam output by the light source 300 in the directions shown by the x-axis and the y-axis. In other embodiments, only one circular mirror or more circular mirrors may be used. In addition, if it is only necessary to collimate the light beam in the direction shown by the y-axis, one or more cylindrical mirrors may be used to compress the divergence angle of the light beam in the direction shown by the y-axis to form a light beam close to collimation.

[0080] The light beam outputted by the light source 300 is collimated by the beam shaping component 400 and then outputted to the light spot size adjustment component 100, so that the light beam incident on the light spot size adjustment component 100 approaches parallel light, thereby facilitating the light spot size adjustment component 100 to more accurately adjust the output light spot size.

[0081] Furthermore, in order to increase the area of ​​the light spot, the present application also proposes an implementation method, which can be specifically referred to in Figure 7 and Figure 8 , Figure 7 and Figure 8 The optical paths of the optical system in the direction indicated by the x-axis and the direction indicated by the y-axis are shown respectively. As shown in the figure, the optical system 1000 further includes a beam expansion component 500, which is arranged between the beam shaping component 400 and the light spot size adjustment component 100. The beam expansion component 500 is used to receive the light beam output by the beam shaping component 400 and align and perform beam expansion processing, and then output it to the light spot size adjustment component 100.

[0082] exist Figure 7 and Figure 8 In the specific embodiment shown, the beam expansion component 500 adopts a cylindrical lens group having a surface shape in the direction shown by the x-axis and no surface shape in the direction shown by the y-axis. The cylindrical lens group includes a concave cylindrical lens and a convex cylindrical lens. The concave cylindrical lens receives the collimated light beam input by the beam shaping component 400 and outputs it after expanding the divergence angle in the direction shown by the y-axis. The light beam after the divergence angle expansion enters the convex cylindrical lens after passing a certain distance. The convex cylindrical lens then performs divergence angle compression processing on it and outputs a collimated light beam. After passing through the beam expansion component 500, the coverage area of ​​the light beam in the direction shown by the y-axis is increased, thereby playing a beam expansion function.

[0083] Understandably, Figure 7 and Figure 8 This is only an exemplary description provided for the embodiments of the present application. In some other embodiments, beam expansion can be performed only in the x-axis direction as needed, or a circular mirror group can be set to perform beam expansion in both the y-axis and x-axis directions, or multiple sets of cylindrical mirror groups with a surface shape in the x-axis direction and a surface shape in the y-axis direction can be set respectively to achieve beam expansion in the x-axis and y-axis directions.

[0084] By setting a beam expansion component 500 between the beam shaping component 400 and the spot size adjustment component 100, the beam is expanded by the beam expansion component 500 and then output to the spot size adjustment component 100, so as to increase the output spot area while achieving the function of keeping the edge position of one side of the spot unchanged and the size adjustable, thereby meeting the needs of specific application scenarios such as laser edge sealing.

[0085] In order to achieve diversified adjustment of the spot size to meet the application in more scenarios, this application further proposes an implementation method, please refer to Fig. 9 , the figure shows the optical path of the optical system in the third direction (the direction indicated by the x-axis in the figure, i.e., the fast axis direction of the optical system). As shown in the figure, the optical system 1000 further includes a third-direction size adjustment component 600, which is disposed adjacent to the spot size adjustment component 100 along the optical path direction, and the third-direction size adjustment component 600 is used to adjust the size of the passing light beam along the direction indicated by the x-axis.

[0086] Specifically, Fig. 9As shown in , in some embodiments, the third direction size adjustment component 600 includes a third microlens array 610 and a fourth microlens array 620 sequentially arranged along the direction indicated by the z-axis, and the arrangement directions of the microchannels on the third microlens array 610 and the fourth microlens array 620 are both in the direction indicated by the z-axis. At least one of the third microlens array 610 and the fourth microlens array 620 is movably arranged along the direction indicated by the z-axis, so as to adjust the size of the light spot formed by the output along the direction indicated by the x-axis by changing the distance between the third microlens array 610 and the fourth microlens array 620 along the direction indicated by the z-axis.

[0087] Combination Figure 1 According to the principle shown, by changing the distance between the third microlens array 610 and the fourth microlens array 620 along the direction shown by the z-axis, the size of the light spot along the direction shown by the x-axis, that is, the width of the light spot, can be changed. In the field of laser edge sealing, there is no need to control the position of the edge of one side of the laser along the x-axis to remain unchanged, so the third microlens array 610 and / or the fourth microlens array 620 can be movably set along the direction shown by the z-axis. By changing the width of the output light spot along the x-axis, the requirements for the light spot width in different application scenarios can be met.

[0088] In order to achieve the change of the light path direction and optimize the layout of each optical element, the present application also proposes an implementation method, please refer to Fig.10 As shown in the figure, the optical system 1000 also includes a reflection component 700, which is arranged in the light path where the light beam output by the light source 300 is located, and the reflection component 700 is used to reflect the light beam to change the propagation direction of the output.

[0089] Specifically, the reflective component 700 may adopt a reflective mirror or a lens coated with a reflective film to reflect the received light beam.

[0090] Since the reflective component 700 only changes the direction of light propagation and does not perform any beam shaping, its position is not limited. Figure 5 and Figure 6 In the specific embodiment shown, the reflective component 700 is disposed between the beam shaping component 400 and the spot size adjustment component 100. Figure 7 and Figure 8 In the specific embodiment shown, the reflective component 700 is disposed between the beam shaping component 400 and the beam expanding component 500. Fig. 9 In the specific embodiment shown, the reflective component 700 is disposed between the beam shaping component 400 and the third direction size adjustment component 600. Fig.10 In the specific embodiment shown, the reflective component 700 is disposed at the output end of the spot size adjustment component 100 .

[0091] By setting the reflective component 700 in the optical path, the direction of light beam propagation can be changed, which is beneficial to optimize the layout of each optical element, making the overall structure of the optical system 1000 more compact and reasonable, and avoiding the optical system being larger in a single direction, which affects the miniaturization requirements and aesthetics of the final product.

[0092] According to another aspect of the embodiment of the present application, a laser processing device is also provided. Fig.11 As shown in the figure, the laser processing equipment 10000 includes a feeding platform 2000 and an optical system 1000 in any of the above embodiments, the feeding platform 2000 is used to transport the workpiece 20000 to be processed, the optical system 1000 is arranged toward the feeding platform 2000, and the edge of the second light spot whose position remains unchanged relative to the first light spot is located on the surface of the feeding platform 2000.

[0093] Specifically, the feeding platform 2000 is used to transport the workpiece 20000 to be processed along the x-axis direction perpendicular to both the y-axis and the z-axis, and the side of the workpiece 20000 to be processed is irradiated by the light spot output by the optical system 1000 to complete the edge sealing. Figure 2 Similarly, at the workpiece 20000, the dotted line in the figure represents the partial contour of the workpiece with a smaller thickness, the dashed line represents the partial contour of the workpiece with a larger thickness, and the solid line represents the common contour of the two workpieces. The dotted line from the optical system 1000 to the workpiece 20000 is the edge beam when processing the workpiece with a smaller thickness, the dashed line is the edge beam when processing the workpiece with a larger thickness, and the solid line is the common edge beam when processing the two workpieces.

[0094] As can be seen from the diagram, when the laser processing equipment 10000 uses any of the above-mentioned embodiments to provide an optical system 1000 to process the workpiece 20000, when the spot size is adjusted for the workpiece 20000 of different thicknesses, the bottom edge of the spot formed on the surface of the workpiece 20000 is always on the surface of the feeding platform 2000 conveying the workpiece 20000, so that the bottom edge of the spot is always aligned with the bottom edge of the workpiece 20000, and the top edge of the spot is aligned with the top edge of the workpiece 20000 by adjusting the spot size, so that the spot size adjustment is more convenient, thereby achieving edge sealing processing of the workpiece 20000.

[0095] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them; although the present application is described in detail with reference to the above embodiments, a person skilled in the art should understand that the technical solutions described in the above embodiments can still be modified, or some or all of the technical features can be replaced by equivalents; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application. In particular, as long as there is no structural conflict, the various technical features mentioned in the embodiments can be combined in any way.

Claims

1. A spot size adjustment component, characterized in that: It includes a first microlens array, a second microlens array and a focusing lens which are sequentially arranged along the light path direction; The first microlens array is used to be fixedly arranged relative to the light source, and the second microlens array is movably arranged relative to the first microlens array along a first direction, and an acute angle is formed between the first direction and the light path direction; When the second microlens array moves to the first position, it is aligned with the first microlens array along the optical path direction, the first microlens array is used to receive the light beam output by the light source, and the first microlens array, the second microlens array and the focusing lens are used together to make the passing light beam output form a first light spot; When the second microlens array moves away from the first microlens array to the second position along the first direction, it deviates from the first microlens array. The first microlens array is used to receive the light beam output by the light source, and when the second microlens array is in the first position, the light beam passing through any microchannel on the second microlens array still passes through the same microchannel on the second microlens array when the second microlens array is in the second position. The first microlens array, the second microlens array and the focusing mirror are used together to make the light beam output to form a second light spot, wherein the position of one side edge of the second light spot remains unchanged relative to the position of the first light spot on the side edge, and the size of the second light spot is reduced relative to the size of the first light spot.

2. The spot size adjustment assembly according to claim 1, characterized in that: The arrangement directions of the microchannels on the first microlens array and the second microlens array are both in the second direction, the second direction is perpendicular to the light path direction, the acute angle between the first direction and the light path direction is θ, and the acute angle between the first direction and the second direction is (90°-θ); When the second microlens array moves to the first position, the optical axes of the first microlens array, the second microlens array and the focusing mirror coincide with each other; When the second microlens array moves to the second position, the optical axis of the first microlens array coincides with the optical axis of the focusing mirror, and the optical axis of the second microlens array is parallel to but does not coincide with the optical axis of the first microlens array. The first microlens array, the second microlens array and the focusing mirror are used together to make the passing light beam form a second light spot, so that the size of the second light spot along the second direction is reduced relative to the size of the first light spot along the second direction, and the edge of the second light spot on one side along the second direction is relative to the edge of the first light spot on that side.

3. The spot size adjustment assembly according to claim 2, characterized in that: The focal length and aperture of the first microlens array and the second microlens array are equal, wherein the focal length is f, the aperture is d, and when the second microlens array is in the first position, the distance between the first microlens array and the second microlens array along the optical path direction is f; The values ​​of θ are as follows:

4. An optical system, characterized in that: It comprises a light source and a spot size adjustment component according to any one of claims 1 to 3, wherein the spot size adjustment component is used to receive a light beam output by the light source and process the light beam to adjust the size of a light spot formed by the output.

5. The optical system according to claim 4, characterized in that The optical system further comprises a beam shaping component, which is disposed between the light source and the light spot size adjustment component, and is used for receiving the light beam output by the light source, collimating the light beam, and then outputting the light beam to the light spot size adjustment component.

6. The optical system according to claim 5, characterized in that The optical system further comprises a beam expansion component, which is arranged between the beam shaping component and the spot size adjustment component. The beam expansion component is used to receive the light beam output by the beam shaping component and perform beam expansion processing on the light beam before outputting it to the spot size adjustment component.

7. The optical system according to claim 4, characterized in that The optical system also includes a third direction size adjustment component, which is arranged adjacent to the spot size adjustment component along the light path direction, and is used to adjust the size of the passing light beam along the third direction, and the third direction is perpendicular to both the light path direction and the second direction, and the second direction is the arrangement direction of the microchannels on the first microlens array and the second microlens array.

8. The optical system according to claim 7, characterized in that The third direction size adjustment component includes a third microlens array and a fourth microlens array sequentially arranged along the light path direction, the arrangement direction of the microchannels on the third microlens array and / or the fourth microlens array is the third direction, and at least one of the third microlens array and the fourth microlens array is movably arranged along the light path direction, so as to adjust the size of the light spot formed by the output along the third direction by changing the distance between the third microlens array and the fourth microlens array along the light path direction.

9. The optical system according to claim 4, characterized in that The optical system further comprises a reflection component, which is arranged in the optical path of the light beam output by the light source, and is used for reflecting the light beam to change the propagation direction of the light beam.

10. A laser processing device, characterized in that: It comprises a feeding platform and the optical system described in any one of claims 4-9, wherein the feeding platform is used to convey the workpiece to be processed, the optical system is arranged toward the feeding platform, and the edge of the second light spot whose position remains unchanged relative to the first light spot is located on the surface of the feeding platform.

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