Electrically controlled micro-robot for cell manipulation and its preparation method and operation platform

Abstract

The application provides an electrically controlled micro robot for cell operation, a preparation method and an operation platform of the micro robot, and the micro robot comprises a substrate, an electrically driven hinge located above the substrate, a first part for realizing lifting of a mechanical arm and a second part for realizing cell grabbing, the electrically driven hinge has different bending directions after being driven by voltage, an electrode located above the substrate, a wire for connecting the electrically driven hinge and the electrode, a panel comprising a first panel, a second panel and a third panel, the second panel comprises a plurality of block panels, the plurality of block panels are folded to form claws to grab cells when the electrically driven hinge is bent, the first panel is provided with a window for exposing the electrode, and an adhesive part for connecting the electrically driven hinge and the panel. The application can realize multi-degree-of-freedom control of the micro robot, reduce the size of the micro robot, and greatly widen the use range of the micro robot.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of biomedical engineering, in particular to an electrically controlled micro robot for cell operation and a preparation method and operation platform thereof. BACKGROUND

[0002] With the rapid development of biomedicine, people's demand for biological operation equipment is increasing, and the objects of operation are gradually expanding to micro-scale structures such as cells and cell groups. Micro-operation robots for operating micro-structures have become a research hotspot. Traditional micro-operation robots such as micro-operation robots have problems such as high instrument cost, large size that cannot be implanted in vivo, and complex instrument operation difficulty.

[0003] A Chinese invention patent with application publication number CN117961859A discloses a micro soft robot based on magnetic drive and a control method thereof. The expected current in the electromagnetic coil is adjusted to control the movement of the micro soft robot in the container. The size of the uniform magnetic field is adjusted to control the grabbing and releasing of the soft magnetized claw of the micro soft robot, thereby completing the cell grabbing and transportation operation task. The robot has a size of centimeter level, which is relatively large, and cannot realize multi-degree-of-freedom control and mass production.

[0004] Therefore, it is necessary to develop an electrically controlled micro micro-operation robot with small size and low cost, which is beneficial to realize multi-degree-of-freedom control of the robot, simplify the preparation method of the micro-operation robot, realize mass production of the robot, and reduce the cost of cell operation. SUMMARY

[0005] In view of the defects in the prior art, the purpose of the present application is to provide an electrically controlled micro robot for cell operation and a preparation method and operation platform thereof.

[0006] According to a first aspect of the present application, an electrically controlled micro robot for cell operation is provided, comprising:

[0007] a substrate;

[0008] an electrically driven hinge located above the substrate, the electrically driven hinge undergoing reversible bending and stretching deformation under the action of voltage, the electrically driven hinge comprising a first part and a second part, the first part being used to realize lifting of a mechanical arm, and the second part being used to realize cell grabbing;

[0009] an electrode located above the substrate;

[0010] a wire, the wire being used to connect the electrically driven hinge and the electrode;

[0011] a panel, comprising a first panel above the electrode, a second panel above the second part of the electro-actuated hinge, and a third panel above the first part of the electro-actuated hinge, the second panel comprising a plurality of block panels which fold into claws to grab cells when the electro-actuated hinge bends, the first panel having a window to expose the electrode;

[0012] an adhesive part between the electro-actuated hinge and the panel, the adhesive part connecting the electro-actuated hinge and the panel.

[0013] Optionally, the electro-actuated hinge has a bimetallic layer structure, comprising a driving layer and an inert layer, in a liquid electrolyte, at a preset voltage, the driving layer absorbs particle lattice deformation and volume expansion, while the inert layer remains unchanged, the bimetallic layer structure bends towards the inert layer, and the bending process is reversible.

[0014] Optionally, the material of the driving layer is palladium or palladium alloy, and the material of the inert layer is any one of titanium, gold, platinum and polymer.

[0015] Optionally, the thickness of the electro-actuated hinge is 1 nm to 10 μm, the effective working length is 10 nm to 1 cm, and the width is 10 nm to 1 cm.

[0016] Optionally, the second panel and the third panel have through holes, and the through holes are used to accelerate the release of the robotic device.

[0017] Optionally, the material of the panel is polymer or inorganic substance.

[0018] Optionally, the material of the substrate is any one of quartz, alumina and silicon wafer.

[0019] Optionally, the micro robot has at least one of the following characteristics:

[0020] - the thickness of the electrode is 1 nm to 10 μm, the length is 10 nm to 1 cm, and the width is 10 nm to 1 cm;

[0021] - the thickness of the wire is 1 nm to 10 μm, and the width is 10 nm to 1 cm;

[0022] - the thickness of the panel is 1 nm to 1 cm, the length is 5 nm to 5 cm, and the width is 5 nm to 5 cm.

[0023] According to a second aspect of the present application, a preparation method of the above-mentioned electro-controlled micro robot for cell operation is provided, the method comprising:

[0024] providing a substrate, and forming a sacrificial layer on the substrate;

[0025] forming an electrically driven hinge layer on the substrate;

[0026] depositing metal as a wire, an adhesive part and an electrode;

[0027] patterning polymer or inorganic material to form a panel;

[0028] removing the sacrificial layer to release the device, obtaining an electrically controlled micro robot for cell operation.

[0029] According to a third aspect of the present application, a micro robot micromanipulation platform is provided, comprising the above-mentioned electrically controlled micro robot for cell operation, and further comprising a microscope, a reference electrode, a liquid electrolyte, a voltage applying device and a probe stage; wherein:

[0030] the micro robot and the reference electrode are placed in the liquid electrolyte;

[0031] the voltage applying device is connected to the micro robot and the reference electrode respectively;

[0032] the microscope is used for observing cells;

[0033] the probe stage is connected to the output end of the voltage applying device;

[0034] the electrode part of the micro robot is connected to the probe stage, and the micro robot performs cell operation according to the observation result of the microscope.

[0035] Compared with the prior art, the present application has at least one of the following beneficial effects:

[0036] 1、The electrically driven hinge of the present application has different bending directions after applying voltage, and the panel at the end can realize cell grabbing operation after folding, and through the reversible electrochemical deformation of the electrically driven hinge, the movement of the panel of the robot is driven, and through the mutual cooperation between the structures, cell grabbing, lifting and other cell operations are realized, and the present application has the characteristics of small size, low cost, small driving voltage, etc., can be controlled in multiple degrees of freedom, and greatly widens the use range of the micro robot.

[0037] 2、The present application adopts micro-nano processing technology, can realize the micro robot with three-dimensional origami structure through planar process, simplifies the preparation method of micro operation robot, and the micro-electro-mechanical system (MEMS) technology processing method is mature, which is beneficial to reduce the manufacturing cost of small volume micro robot.

[0038] 3. The micro-operation platform provided by the application controls the micro robot by electric stimulation, controls the micro robot near the target cell in real time through the detection result of the microscope, adjusts the voltage application device, makes the electric drive hinge of the robot reversibly electrochemically deform, drives the panel of the robot to move, so as to realize cell grabbing, lifting and other cell operations, measures through the electrochemical test system, realizes the driving of the micro micro-operation robot in the range of-5V-5V, and completes the cell grabbing operation, and the application can improve the precision of the cell operation of the micro robot. BRIEF DESCRIPTION OF DRAWINGS

[0039] Other features, objects and advantages of the application will become more apparent from the following detailed description of non-limiting embodiments, made with reference to the accompanying drawings:

[0040] Figure 1 Fig. 1 is a structural schematic diagram of an electrically controlled micro robot for cell operation in an embodiment of the application;

[0041] In the figure: 101-electric drive hinge, 102-panel, 103-adhesion part, 104-wire, 105-electrode;

[0042] Figure 2 Fig. 2 is a plane schematic diagram of an electrically controlled micro robot for cell operation in an embodiment of the application;

[0043] Figure 3 Fig. 3 is a schematic diagram of the reversible bending and stretching deformation of the electric drive hinge under the action of voltage in an embodiment of the application;

[0044] Figure 4 Fig. 4 is a structural schematic diagram of a micro robot micro-operation platform in an embodiment of the application;

[0045] In the figure: 201-probe table, 202-host, 203-data acquisition card, 204-microscope, 205-current amplifier, 206-reference electrode, 207-liquid electrolyte, 208-micro robot;

[0046] Figure 5 Fig. 5 is a flow schematic diagram of a preparation method of an electrically controlled micro robot for cell operation in an embodiment of the application. DETAILED DESCRIPTION

[0047] The application will be described in detail below with specific embodiments. The following embodiments will help those skilled in the art to further understand the application, but do not limit the application in any form. It should be pointed out that those skilled in the art can make several modifications and improvements without departing from the concept of the application. These all belong to the protection scope of the application.

[0048] It should be noted that the terms "first", "second", and the like, are used merely for distinguishing like objects from one another, and are not intended to denote or imply relative importance or a quantity of the specified technical features. Thus, features defined with "first", "second" and the like can explicitly or implicitly include one or more of the features. Also, the terms "first", "second", and the like are used to distinguish similar objects from one another, and are not necessarily used to describe a particular sequential or chronological order. It should be understood that the use of the terms so used herein is merely intended to distinguish the particular instance from another instance of a similar object and is not intended to imply a sequence or order in which the features are implemented.

[0049] Various structural diagrams according to embodiments of the present application are shown in the accompanying drawings. These diagrams are not drawn to scale, in which certain details are shown in a somewhat exaggerated manner for purposes of clarity and understanding, and certain details can be omitted. The shapes of various regions, layers, and the relative sizes and positional relationships between them shown in the drawings are merely exemplary, and in actuality can be deviated due to manufacturing tolerances or technical limitations, and regions / layers with different shapes, sizes, and relative positions can be additionally designed according to actual needs by those skilled in the art, which all belong to the protection scope of the present application.

[0050] Figure 1 A structural diagram of an electrically controlled micro robot for cell operation is shown in an embodiment of the present application, which is used to realize multifunctional biological cell operation, and includes a substrate, an electrode 105, an electrically driven hinge 101, a wire 104, a panel 102, and an adhesive portion 103, wherein the substrate provides support and protection for the micro robot; the electrically driven hinge 101 is located above the substrate, and can reversibly bend and stretch under the action of voltage, the electrically driven hinge 101 includes a first part and a second part, the first part is used to realize mechanical arm lifting, and the second part is used to realize cell grabbing; the electrode 105 is located above the substrate, and is connected with one end of the electrically driven hinge 101, the wire 104 is used to connect the electrically driven hinge 101 and the electrode 105; the panel 102 includes a first panel located above the electrode 105, a second panel located above the second part of the electrically driven hinge 101, and a third panel located above the first part of the electrically driven hinge 101, the second panel includes a plurality of block-shaped panels, the electrically driven hinge 101 is located at the connection of each panel and the connection of the block-shaped panels, and the plurality of block-shaped panels fold to form a claw shape to grab cells when the electrically driven hinge 101 bends, the first panel is provided with a window for exposing the electrode 105, and the electrode 105 is exposed to contact with the outside world; the adhesive portion 103 is arranged between the electrically driven hinge 101 and the panel 102, and is used to connect the electrically driven hinge 101 and the panel 102.

[0051] Specifically, as Figure 1As shown, the plurality of block panels are arranged in three columns, each column including three rows, and a gap is left between two adjacent block panels. When the electrically driven hinge 101 is bent, the block panels are moved and folded, and the second panel forms a claw shape to achieve cell grabbing operation.

[0052] In some embodiments, the electrically driven hinge 101 has a bimetallic layer structure including a driving layer and an inert layer. In a liquid electrolyte, the driving layer absorbs particle lattices to deform and expand in volume at a preset voltage, and the preset voltage is a voltage greater than the overpotential of the metal material of the driving layer. The volume of the inert layer remains unchanged, and the bimetallic layer structure bends towards the inert layer. The bending process is reversible, and the volume of the driving layer reversibly increases and decreases. If there is only one driving layer, it will expand in all directions, and the volume of the inert layer remains unchanged, limiting the movement form of the driving layer to curling and flattening, so that the electrically driven hinge 101 can reversibly bend and flatten under the action of voltage.

[0053] In some embodiments, the material of the driving layer is a hydrogen storage metal such as palladium and its alloy, and the material of the inert layer is any one of titanium, gold, platinum, and polymer.

[0054] As an example, the bimetallic layer structure includes a gold layer and a palladium layer located above the gold layer, forming a gold-palladium bimetallic layer, or the bimetallic layer structure is a titanium-palladium bimetallic layer. Titanium has better adhesion to SU8 photoresist and is less likely to cause the panel 102 to fall off the electrically driven hinge 101. The thickness of the electrically driven hinge 101 is 1 nm to 10 μm, the effective working length (the hinge exposed to the contact between the two panels and the solution system) is 10 nm to 1 cm, and the width is 10 nm to 1 cm. As an example, the thickness of the electrically driven hinge 101 is 100-200 nm, the effective working length is 20 μm, and the width is 10 μm, so that the panel 102 of the robot is driven to fold.

[0055] Figure 2 A plan view of an electrically controlled micro robot is shown. The electrically driven hinge 101 includes a plurality of metal hinges, which can be divided into a hinge of a gripper part and a hinge of a mechanical arm part. The two parts of the hinge are connected with two electrodes respectively and are independently controlled to realize independent movement of the two parts. The left electrode can control the hinge of the gripper part to fold or stretch. The right electrode can control the hinge of the mechanical arm part to realize lifting and shifting of the mechanical arm.

[0056] In order to more clearly illustrate the process of reversible bending and flattening deformation of the electrically driven hinge 101 under the action of voltage, taking a Pd-Au bimetallic layer as an example, as shown in FIG. 4A, the Pd-Au bimetallic layer is in a flat state, and the Pd layer is located above the Au layer. When a voltage is applied to the Pd-Au bimetallic layer, the Pd layer absorbs particle lattices to deform and expand in volume, and the Au layer remains unchanged. The bimetallic layer structure bends towards the Au layer, as shown in FIG. 4B. When the voltage is removed, the Pd layer reversibly increases and decreases in volume, and the bimetallic layer structure reversibly bends and flattens, as shown in FIG. 4C. Figure 3As shown, in solution, under negative voltage, Pd absorbs hydrogen generated by water electrolysis, which causes deformation of Pd lattice and volume expansion. Since the volume of Au does not change, the bimetallic layer will bend towards the direction of Au. The process is reversible, and the hinge can reversibly bend and flatten.

[0057] In the above embodiment, the driving layer expands in volume and bends towards the direction of the inert layer. The hinges at different upper and lower positions can be arranged according to the mountain lines and valley lines of the origami structure. In other embodiments, the electrically driven hinge 101 can also use structures with other numbers of layers, for example, a layer of electrolyte such as hydrogel is sandwiched in the middle, so that the device can be free from the restriction of working only in solution.

[0058] In the process of MEMS processing of micro robots, the device needs to be released, that is, the device is placed in an etching solution to release the underlying substrate, while leaving the part of the substrate under the electrode 105, so that the device can be adhered to the substrate and the mechanical hand part can be released. In some embodiments, through holes are formed on the second panel and the third panel, and the through holes are used to accelerate the release of the robot device.

[0059] Exemplarily, a plurality of circular holes are formed on the second panel and the third panel, and the diameter of the circular holes is 10 μm. The plurality of circular holes are uniformly arranged to facilitate the processing of a photoetching machine. It should be noted that if the precision of the photoetching machine is smaller, smaller holes can be used.

[0060] The panel material needs to have certain rigidity. In some embodiments, the material of the panel 102 is a polymer or an inorganic substance. Exemplarily, the panel material is silicon dioxide, silicon nitride, and a negative photoresist, such as SU8 photoresist. The rigidity of SU8 is good and the processing is convenient. The thickness of the panel 102 needs to be considered in terms of the overall rigidity. If the thickness is too small, the panel will be soft and prone to deformation. If the thickness is too large, the folding will be complicated. Preferably, the thickness of the panel 102 is 1 nm to 1 cm, the length is 5 nm to 5 cm, and the width is 5 nm to 5 cm.

[0061] In some embodiments, the material of the substrate is any of quartz, alumina and silicon wafer. The material of the electrode 105 is gold, the thickness of the electrode 105 is 1 nm to 10 μm, the length of the electrode 105 is 10 nm to 1 cm, and the width of the electrode 105 is 10 nm to 1 cm. Exemplarily, the thickness of the electrode 105 is 100-200 nm, the length of the electrode 105 is 200 nm, and the width of the electrode 105 is 200 nm, so that the robot can be controlled by externally applying an electric signal to the electrode part. The material of the wire 104 is gold, the thickness of the wire 104 is 1 nm to 10 μm, and the width of the wire 104 is 10 nm to 1 cm. Exemplarily, the thickness of the wire 104 is 100-200 nm, and the width of the wire 104 is 10 μm, so that the wire 104 connects the electrically driven hinge 101 and the electrode 105, and an externally applied electric signal reaches the electrically driven hinge part through the wire 104. The material of the adhesive part 103 is gold, the thickness of the adhesive part 103 is 100-200 nm, and the width of the adhesive part 103 is 10-20 μm.

[0062] If the above metal film is too thin, it will not form a film after being released and is easy to break. Preferably, the thickness of the metal layer is between 20 nm and 200 nm, which can ensure the quality of sputtering. By setting the size of each part of the robot, the metal bimetallic film of the hinge is flexible and curlable after being released from the substrate, so that the micro robot has good flexibility. Since the overall size of the device is very small, it is suitable for in vivo implantation. The above micro robot has the characteristics of small size, low cost, small driving voltage, etc.

[0063] Based on the same inventive concept, another embodiment of the present application provides a preparation method of the above-mentioned electrically controlled micro robot for cell operation, which comprises the following steps:

[0064] S1, providing a substrate, and forming a sacrificial layer on the substrate;

[0065] S2, forming an electrically driven hinge layer on the substrate;

[0066] S3, depositing metal as a wire, an adhesive part and an electrode;

[0067] S4, patterning a polymer or an inorganic substance to form a panel;

[0068] S5, removing the sacrificial layer to release the device, thereby obtaining the electrically controlled micro robot for cell operation.

[0069] In step S5, the device is placed in an etching solution, the etching solution penetrates from the edge and the opening of the device, and the metal under the device is etched away. Since the etching has a certain rate, and the opening of the panel part can accelerate the etching, and the electrode part is relatively large in itself, when the gripper part is released, the electrode has not been released and is still stuck to the substrate. At this time, the etching is stopped, and the device is stuck to the substrate.

[0070] The micro-nano processing technology is adopted in the embodiment of the application, the three-dimensional origami structure micro robot can be processed through a planar process, the micro operation robot preparation method is simplified, the micro-electro-mechanical system (MEMS) technology processing method is mature, and the manufacturing cost of the small volume micro robot is reduced.

[0071] Based on the same inventive concept, another embodiment of the application provides a micro robot microscopic operation platform, a structural schematic diagram of which is shown in Figure 4 The operation platform includes the electrically controlled micro robot 208 for cell operation, a microscope 204, a reference electrode 206, a liquid electrolyte 207, a probe table 201, and a voltage applying device. The micro robot 208 and the reference electrode 206 are placed in the liquid electrolyte 207, the liquid electrolyte 207 is used to provide a stable electrochemical reaction environment, the reference electrode 206 provides a stable reference potential for the electrochemical reaction, the voltage applying device is connected with the micro robot 208 and the reference electrode 206 respectively, the microscope 204 is used to observe and detect cells, the probe table 201 is connected with the output end of the voltage applying device, the electrode part of the micro robot 208 is connected with the probe table 201, and the probe table 201 is provided with a needle tip with a diameter of 10 microns, which can be connected to the electrode part of the micro robot 208 to supply power to the micro robot 208, and the micro robot 208 performs cell operation according to the observation result of the microscope 204. The signal of the voltage applying device is transmitted to the electrode of the micro robot 208 through the probe table 201, the electrode of the micro robot receives the power supply of the probe, provides the power to the electrically driven hinge, and electrochemical reaction occurs, the micro robot 208 is controlled to move and perform cell operation as the working electrode of the electrochemical reaction by observing the cells through the microscope 204, and the current value of the channel transmitted back from the reference electrode 206 is collected.

[0072] In some optional embodiments, the voltage driving device includes a signal acquisition card, a host computer 202, and a current amplifier 205. The signal acquisition card is connected with the host computer 202, the host computer 202 controls the signal acquisition card to output voltage, the current amplifier 205 is connected with the input end of the signal acquisition card, the reference electrode 206 is connected with the current amplifier 205, and the probe table 201 is connected with the output end of the signal acquisition card. Specifically, the host computer 202 can run labview software, control the signal acquisition card to output voltage to the device, and collect current data of the circuit.

[0073] The signal is transmitted to the electrode of the micro robot 208 through the probe table 201, the cells are observed through the microscope 204, the micro robot 208 is controlled to move and perform cell operation, and the current value of the channel transmitted back from the reference electrode 206 is collected.

[0074] The above-described embodiment of the present invention uses electrical stimulation to control microrobot 208. By controlling the microrobot near the target cell in real time and adjusting the voltage and frequency at the output of data acquisition card 203, the robot's electrically driven hinge undergoes reversible electrochemical deformation, driving the robot's panel to move, thereby achieving cell manipulations such as cell grasping and lifting. This improves the precision of cell manipulation performed by microrobot 208. Measurements using an electrochemical testing system have shown that microrobot 208 can be driven to perform cell grasping operations within a low voltage range of -1.5V to 0.2V.

[0075] In some optional embodiments, the voltage-driven device can be a microchip integrated into the robot to achieve the same voltage application function as the voltage-driven device composed of the signal acquisition card, host 202, and current amplifier 205. In addition, electrical control through the integrated microchip facilitates in vivo implant control.

[0076] Below in conjunction with specific embodiment, the scheme of the application will be explained.It will be appreciated by those skilled in the art that the following examples are merely used to illustrate the application and should not be considered as limiting the scope of the application.In the embodiment, if no specific technology or conditions are indicated, the technology or conditions described in the document in this area or the product instructions are used. Reagents used or instruments that do not indicate manufacturers are conventional products that can be obtained through commercial means.

[0077] Example 1

[0078] Reference Figure 5 The microrobot provided in this embodiment has a preparation method comprising the following steps:

[0079] S1, such as Figure 5 As shown in (a), the substrate is a double-sided polished quartz substrate with a thickness of 500 μm;

[0080] S2, such as Figure 5 As shown in (b), a copper sacrificial layer with a thickness of 200 nm is sputtered on the substrate using magnetron sputtering;

[0081] S3, such as Figure 5 As shown in (c), photoresist is spin-coated and patterned by photolithography to serve as a metal mask layer;

[0082] S4, such as Figure 5 As shown in (d), Au with a thickness of 50 nm is sputtered using magnetron sputtering, and then the photoresist is washed away with acetone, leaving the sputtered Au on the substrate as the Au layer of the hinge;

[0083] S5, such as Figure 5As shown in (e), a photoresist is spin-coated and patterned by photolithography to serve as a metal mask layer. Pd with a thickness of 50 nm is sputtered using magnetron sputtering. The photoresist is then washed away using acetone, leaving the sputtered Pd on the substrate as the Pd layer of the hinge.

[0084] S6, such as Figure 5 As shown in (f), photoresist is spin-coated and patterned by photolithography to serve as a metal mask layer; Au is sputtered to a thickness of 50 nm using magnetron sputtering, and then the photoresist is washed away with acetone, leaving the sputtered Au on the substrate as the Au layer of the hinge, the wire, the adhesive portion, and the electrode;

[0085] S7, such as Figure 5 As shown in (g), SU8 negative resist is spin-coated, and after pre-baking, exposure, mid-baking, development, and post-baking, a 2μm-thick SU8 resist is obtained. It is used as the robot panel. When processing the panel, a hole needs to be punched in the center of the panel to accelerate the corrosion of the sacrificial layer below the panel.

[0086] S8, such as ​ As shown in (h), the sacrificial layer is etched with acetic acid and hydrogen peroxide etching solution. Since the electrode part is large, the electrode part is adhered to the substrate after the device is released, completing the robot release.

[0087] The microrobot is used to build and connect a microrobot micromanipulation platform as follows:

[0088] The operating platform includes a probe station, a host, a data acquisition card, a microscope, a current amplifier, a reference electrode, a liquid electrolyte, and a microrobot. The host brand is ASUS, the data acquisition card model is NI USB-6001, the microscope is Olympus microscope 204IX71, the current amplifier model is 205SR570, the reference electrode is 218, and the liquid electrolyte is PBS.

[0089] The microrobot and the reference electrode are placed in a liquid electrolyte, the electrode of the microrobot is connected to a probe station, the probe station is connected to the output end of a data acquisition card, the reference electrode is connected to a current amplifier, the current amplifier is connected to the input end of the data acquisition card, and the data acquisition card is connected to a host.

[0090] The host computer adjusts the output voltage of the data acquisition card to control the movement of the microrobot and realize cell manipulation.

[0091] Example 2

[0092] The difference between the microrobot in this embodiment and that in the embodiment is that the electrically driven hinge in embodiment 1 is replaced with a titanium and palladium bimetallic layer. Titanium has better adhesion to SU8 photoresist and is less likely to cause the panel and the electrically driven hinge to fall off.

[0093] The building and connection of the operation platform in the embodiment are similar to those in the embodiments, and will not be described here.

[0094] The micro robot in the above embodiment is used to operate cells, and the specific process is as follows:

[0095] The cell dispersion liquid is placed under a microscope, the micro robot near the target cell is controlled in real time under the microscope detection through the operation platform, the output voltage and frequency of the data acquisition card are adjusted, the appropriate output voltage and frequency are selected, the reversible electrochemical deformation of the electrically driven hinge of the robot is caused, the panel of the robot is moved, and thus the cell operation such as cell grabbing and lifting is realized.

[0096] In the above embodiment of the application, the electrically driven hinge has different bending directions after being driven by the voltage, and the panel at the end can realize cell grabbing operation after being folded, the reversible electrochemical deformation of the electrically driven hinge is caused, the panel of the robot is moved, the cell operation such as cell grabbing and lifting is realized through the mutual cooperation between structures, the size of the micro robot is reduced, the micro robot has the characteristics of small volume, low cost and small driving voltage, is suitable for long-term in-vivo implantation operation, and greatly widens the use range of the micro robot.

[0097] In the above embodiment of the application, the micro robot is controlled by the electric stimulation mode of the micro operation platform, the micro robot near the target cell is controlled in real time through the microscope detection result, the voltage and frequency of the output end of the data acquisition card are adjusted, the reversible electrochemical deformation of the electrically driven hinge of the robot is caused, the panel of the robot is moved, and thus the cell operation such as cell grabbing and lifting is realized, the measurement is performed through the electrochemical test system, the micro operation robot can be driven in the low voltage range of-1.5V-0.2V, and the cell grabbing operation is completed, compared with the prior art, the robot in the above embodiment of the application is smaller, the size is several hundred microns, two electrodes are used to realize multi-degree-of-freedom control, the grabbing hand grabbing and releasing action and the mechanical arm lifting and rotating action are controlled respectively, the energy density of the micro robot and the precision of the cell operation can be improved. In addition, the robot can be manufactured in batches by using the semiconductor processing technology in the above embodiment of the application.

[0098] The specific embodiments of the application are described above. It should be understood that the application is not limited to the above specific embodiments, and various modifications or changes can be made by those skilled in the art within the scope of the claims, which does not affect the essential content of the application. The above preferred features can be combined for use in the case of not conflicting with each other.

Claims

1. An electrically controlled microrobot for cell manipulation, characterized in that: include: substrate; an electrically driven hinge located above the substrate, wherein the electrically driven hinge undergoes reversible bending and stretching deformation under the action of a voltage, and comprises a first portion and a second portion, wherein the first portion is used to achieve lifting of the robotic arm, and the second portion is used to achieve cell grasping; an electrode located above the substrate; a wire, the wire being used to connect the electrically driven hinge and the electrode; a panel comprising a first panel located above the electrode, a second panel located above the second portion of the electrically driven hinge, and a third panel located above the first portion of the electrically driven hinge, wherein the second panel comprises a plurality of block panels, and when the electrically driven hinge is bent, the plurality of second panels fold to form a claw shape to grasp cells, and the first panel defines a window for exposing the electrode; an adhesive portion, provided between the electrically driven hinge and the panel, the adhesive portion being used to connect the electrically driven hinge and the panel; The electrically driven hinge has a bimetallic layer structure, comprising a driving layer and an inert layer. In a liquid electrolyte, under a preset voltage, the driving layer's absorbing particle lattice deforms and expands in volume, while the inert layer's volume remains unchanged, causing the bimetallic layer structure to bend toward the inert layer. This bending process is reversible. The driving layer is made of palladium or a palladium alloy, and the inert layer is made of any one of titanium, gold, platinum and polymer.

2. The electrically controlled microrobot for cell manipulation according to claim 1, characterized in that: The electrically driven hinge has a thickness of 1 nm to 10 μm, an effective working length of 10 nm to 1 cm, and a width of 10 nm to 1 cm.

3. The electrically controlled microrobot for cell manipulation according to claim 1, characterized in that: Through holes are provided on the second panel and the third panel, and the through holes are used to accelerate the release of the robot component.

4. The electrically controlled microrobot for cell manipulation according to claim 1, characterized in that: The panel is made of polymer or inorganic material.

5. The electrically controlled microrobot for cell manipulation according to claim 1, characterized in that: The substrate is made of any one of quartz, alumina and silicon wafer.

6. The electrically controlled microrobot for cell manipulation according to claim 1, characterized in that: Have at least one of the following characteristics: - the electrode has a thickness of 1 nm to 10 μm, a length of 10 nm to 1 cm, and a width of 10 nm to 1 cm; - the thickness of the wire is 1 nm to 10 μm, and the width is 10 nm to 1 cm; -The panel has a thickness of 1 nm to 1 cm, a length of 5 nm to 5 cm, and a width of 5 nm to 5 cm.

7. A method for preparing an electrically controlled microrobot for cell manipulation according to any one of claims 1 to 6, characterized in that: include: providing a substrate, and forming a sacrificial layer on the substrate; forming an electrically driven hinge layer on the substrate; Depositing metals for conductors, adhesives, and electrodes; patterning polymers or inorganics to form panels; Removing the sacrificial layer frees the device to yield an electrically controlled microrobot for cell manipulation.

8. A micro-robot micromanipulation platform, characterized in that: The electrically controlled microrobot for cell manipulation according to any one of claims 1 to 6 further comprises a microscope, a reference electrode, a liquid electrolyte, a voltage applying device, and a probe station; wherein: The microrobot and the reference electrode are placed in the liquid electrolyte; The voltage applying device is connected to the microrobot and the reference electrode respectively; The microscope is used to observe cells; The probe station is connected to the output end of the voltage applying device; The electrode portion of the microrobot is connected to the probe station, and the microrobot performs cell manipulation according to the observation results of the microscope.

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