Full-automatic double-sided vacuum coating device and coating process for optical filter

Abstract

The invention discloses a full-automatic double-sided vacuum coating device for an optical filter and a coating process, and particularly relates to the technical field of optical filter coating. Coating units are arranged on the two sides of a vacuum cavity, the placed optical filter is supported by a supporting part, then the outer wall of the optical filter is fixed by two clamping pieces, and the coating units are arranged on the two sides of the vacuum cavity; the overturning frame is overturned by an angle of rotation anticlockwise to drive the optical filter to overturn, so that the optical filter is changed from a horizontal state to a vertical state, two surfaces of the optical filter are sputter-coated by the coating units on the two sides, during coating, the butt-joint plate and the mounting groove are in sealed butt joint, and the corrugated pipe is in an allowable telescopic range; the ion beam generation areas on the two sides are both kept in a communicated vacuum state with the vacuum cavity, sputtered atoms freely move in the direction of the corrugated pipe and the butt joint hole and migrate and deposit on the surface of the optical filter in vacuum, double-face film coating of the optical filter is achieved, the deposition rate is increased, the vacuum state is beneficial to improving the growth quality of a film layer, and the film layer has better adhesive force.

Description

Technical Field

[0001] The invention relates to the technical field of filter coating, and in particular to a filter full-automatic double-sided vacuum coating device and a coating process. Background Art

[0002] Double-sided vacuum coating of filters usually refers to the process of coating the required optical thin films on the front and back surfaces of the same optical filter (usually glass, fused quartz and other substrate materials) through vacuum coating technology to achieve specific optical performance requirements (such as transmittance, reflectivity, cut-off bandwidth, center wavelength, etc.). Compared with single-sided coating, double-sided coating can achieve better spectral characteristics under more compact device design, reduce the number of components, reduce system stray light, etc. Ion beam sputtering is often used for coating, and sputtering deposition is achieved by directly bombarding the target material with high-energy ion beams. The uniformity, density, environmental stability, etc. of the film layer are very good, which is suitable for the preparation of high-end optical filters.

[0003] After searching, the invention patent with publication number CN119040836A discloses a double-sided coating device and a coating method for filter processing, which drives the mounting frame to flip and replaces different filters to be coated near the bottom of the vacuum coating cabinet. When the shaft is reversed, the mounting frame no longer rotates, and the shaft can drive the placement frame to flip and coat the other side of the filter.

[0004] Existing filters are vacuum coated by evaporation. Due to differences in the distribution of evaporation sources, the film formed by vacuum evaporation coating often has a columnar structure with pores. This structure causes the film to be uneven and rough on the surface. The adhesion between the film and the filter is insufficient, causing the film to fall off easily. Summary of the invention

[0005] The object of the present invention is to provide a fully automatic double-sided vacuum coating device and a coating process for a filter, so as to solve the problems mentioned in the above background technology.

[0006] The technical problems mainly solved by the present invention are:

[0007] The film formed by vacuum coating of existing filters is uneven, has a rough surface, and has insufficient adhesion between the film and the filter.

[0008] The present invention can be implemented by the following technical solutions:

[0009] A fully automatic double-sided vacuum coating device for optical filters, comprising a coating box, a vacuum chamber is arranged inside the coating box, a flip clamp is rotatably installed inside the vacuum chamber; the flip clamp comprises an L-shaped flip frame, a rotating seat driven to rotate by a driving motor is arranged on one side of the flip frame, a plurality of mounting grooves are penetrated through the surface of the rotating seat, and a groove cavity communicating with the mounting grooves is arranged inside the rotating seat, two clamping members that simultaneously fix the outer wall of the optical filter are arranged inside the groove cavity, and a support part for carrying the optical filter in each mounting groove is rotatably arranged on the bottom surface of the rotating seat;

[0010] The coating box is provided with coating units for vacuum sputtering of the optical filter on both sides of the vacuum chamber. During the sputtering coating, the vacuum chamber is in a vacuum state.

[0011] The coating unit includes an ion beam generating area, the gas delivery end of the ion beam generating area is connected to a bellows, the end of the bellows is connected to a docking plate that seals with the vacuum chamber, the surface of the docking plate is provided with a docking hole, and the end face of the docking plate is provided with a docking portion that fits with the mounting groove.

[0012] A further technical improvement of the present invention is that a through groove is provided on the side of the vacuum chamber, an insertion frame is installed on the inner wall of the through groove, a sealing plate is inserted into the interior of the insertion frame, and the end of the sealing plate is fixed to the docking plate.

[0013] A further technical improvement of the present invention is that a telescopic column is installed on the lower part of the surface of the ion beam generating area, and a push rod is provided on the upper part of the surface of the ion beam generating area for driving the docking plate to move by a cylinder, and the telescopic end of the telescopic column is fixed to the docking plate.

[0014] A further technical improvement of the present invention is that the supporting part comprises a blocking plate rotatably connected to the rotating seat, and a support member extending into the installation groove and supporting the filter is provided on the surface of the blocking plate.

[0015] A further technical improvement of the present invention is that: an annular plug-in block is installed on the outer wall surface of the rotating seat, a limiting slot slidably engaged with the plug-in block is provided on the inner wall surface of the flip frame, a laser displacement sensor for detecting the coating thickness of the filter in each installation slot is installed on the inner wall surface of the flip frame, an airbag ring for pushing the filter in the installation slot to move is installed on the outside of the laser displacement sensor, and an adsorption head is provided on the end of the airbag ring.

[0016] A further technical improvement of the present invention is that a bidirectional screw driven by a built-in motor is installed inside the groove cavity, the threads on the bidirectional screw are threadedly connected to the corresponding clamping piece, and the end of the clamping piece is provided with an arc-shaped fitting portion that contacts the filter.

[0017] A further technical improvement of the present invention is that: the upper surface of the coating box is provided with a loading port arranged in line with multiple installation grooves, the inner wall surface of the loading port is elastically installed with an inclined arc block, the upper surface of the coating box is installed with a fixing frame, the top of the fixing frame is installed with a moving plate pushed by a segmented cylinder, the lower surface of the moving plate is installed with a connecting column, and the bottom surface of the connecting column is installed with a suction cup for adsorbing and fixing the filter.

[0018] A further technical improvement of the present invention is that a plurality of exhaust ports communicating with the vacuum chamber are provided on the front surface of the coating box, the exhaust ports are aligned with the hole grooves of the mounting grooves when the flip clamp is rotated after coating, and an inclined arc block 2 is elastically installed on the inner wall surface of each exhaust port.

[0019] A fully automatic double-sided vacuum coating process for a filter, the process comprising the following steps:

[0020] Step 1: Load the filter into the loading port, fix the filter by adsorption of the suction cup, and drive the fixed filter into the installation slot in the vacuum chamber through the moving plate and the connecting column;

[0021] Step 2: Fix the outer wall of the filter by two clamping parts, and flip the filter counterclockwise by flipping the flip frame so that the filter in the mounting groove faces the coating units on both sides for vacuum coating;

[0022] Step 3: The push rod pushes the docking plate to align with the mounting groove, and the ion beam generation area ionizes the inert gas to generate plasma and accelerates to form a high-energy ion beam, which is guided to the surface of the target material, exchanges momentum with the target material atoms, and leaves the target material surface and enters the gas phase. The sputtered atoms migrate in the vacuum and deposit on the filter surface;

[0023] Step 4: After coating, the rotating seat rotates autonomously, and the laser displacement sensor detects the thickness of both sides of the coated filter. After passing the test, the airbag ring pushes the filter toward the discharge port.

[0024] Compared with the prior art, the present invention has the following beneficial effects:

[0025] 1. By setting the coating units on both sides of the vacuum chamber, the support part first supports the inserted filter, and then fixes the outer wall of the filter by two clamps. The flip frame rotates counterclockwise to drive the filter to flip, so that the filter changes from a horizontal state to a vertical state. The coating units on both sides sputter and coat the two sides of the filter. During coating, the docking plate and the installation slot are sealed and docked, the bellows are in the allowable expansion and contraction range, and the ion beam generation areas on both sides are in a vacuum state connected to the vacuum chamber, that is, the vacuum chamber maintains a continuous vacuum to reduce the impact of impurities in the air on the film layer. The ion beam generation area ionizes the inert gas to generate plasma and accelerates to form a high-energy ion beam, which is guided to the target surface, exchanges momentum with the target atoms, and leaves the target surface and enters the gas phase. The sputtered atoms migrate along the direction of the bellows and the docking hole in the vacuum and deposit on the filter surface, thereby realizing double-sided coating of the filter. The sputtering process in a vacuum environment allows atoms to move freely in all directions, significantly improving the deposition rate and production efficiency. The vacuum state helps to improve the growth quality of the film layer, making it more uniform, dense, and with better adhesion.

[0026] 2. The rotating seat is driven by the flip frame to rotate. At this time, the two sides of the filter rotate in turn towards the laser displacement sensor. The laser displacement sensor detects the uniformity of the coating thickness on both sides of the coated filter to ensure that the coating achieves the expected optical effect on both the front and back sides of the filter and the consistency of transmittance and reflectivity, thereby improving the overall performance of the filter. After passing the test, the airbag ring pushes the adsorption head and the filter to adsorb and fix it, and pushes the filter to move toward the discharge port and push it out;

[0027] 3. The segmented cylinder pushes the moving plate and the suction cup connected to it for the first time to fix the filter. Then the segmented cylinder pushes it for the second time. At this time, the filter connected to the suction cup is pushed downward, pressing the arc block 1, so that it elastically enters the hole groove on the inner wall of the loading port. The filter enters the rotating seat in the vacuum chamber and is fixed. After the coating inspection, the rotating seat rotates down. At this time, the discharge port is aligned with the hole groove of the installation slot, which is convenient for the filter to be pushed out after the inspection is qualified. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to facilitate understanding by those skilled in the art, the present invention is further described below with reference to the accompanying drawings.

[0029] Figure 1 It is a schematic diagram of the external structure of the present invention;

[0030] Figure 2 It is a schematic diagram of the internal structure of the coating box of the present invention;

[0031] Figure 3 It is a schematic diagram of the installation structure of the suction cup of the present invention;

[0032] Figure 4 It is a schematic diagram of the installation structure of the flip frame and the vacuum chamber of the present invention;

[0033] Figure 5 It is a structural schematic diagram of the rotating seat of the present invention;

[0034] Figure 6 It is a schematic structural diagram of the coating unit of the present invention.

[0035] In the figure: 1. coating box; 2. vacuum chamber; 3. rotating seat; 4. flip frame; 5. mounting groove; 6. blocking plate; 7. supporting member; 8. oblique arc block 1; 9. fixing frame; 10. suction cup; 11. coating unit; 12. loading port; 13. moving plate; 14. connecting column; 15. laser displacement sensor; 16. air bag ring; 17. groove cavity; 19. bidirectional screw; 20. clamping member; 21. plug-in block; 22. limiting slot; 23. discharge port; 24. oblique arc block 2; 25. ion beam generating area; 26. push rod; 27. plug-in frame; 28. through groove; 29. ​​docking plate; 30. docking part; 31. docking hole; 32. bellows; 33. telescopic column; 34. sealing plate. DETAILED DESCRIPTION

[0036] In order to further explain the technical means and effects adopted by the present invention to achieve the predetermined invention purpose, the specific implementation methods, structures, features and effects of the present invention are described in detail below in conjunction with the accompanying drawings and preferred embodiments.

[0037] See also Figure 1-Figure 6 As shown, the present invention provides a fully automatic double-sided vacuum coating device for optical filters, comprising a coating box 1, wherein a vacuum chamber 2 is arranged inside the coating box 1, and a flip clamping table is rotatably installed inside the vacuum chamber 2; the flip clamping table comprises an L-shaped flip frame 4, and a rotating seat 3 driven to rotate by a driving motor is arranged on one side of the flip frame 4, and a plurality of mounting grooves 5 are penetrated through the surface of the rotating seat 3, and a groove cavity 17 communicating with the mounting groove 5 is arranged inside the rotating seat 3, and two clamping members 20 that simultaneously fix the outer wall of the optical filter are installed inside the groove cavity 17, and a support portion for carrying the optical filter in each mounting groove 5 is rotatably arranged on the bottom surface of the rotating seat 3;

[0038] The coating box 1 has coating units 11 for vacuum sputtering of the filter installed on both sides of the vacuum chamber 2. During the sputtering coating, the vacuum chamber 2 is in a vacuum state.

[0039] The coating unit 11 includes an ion beam generating area 25, a bellows 32 is connected to the gas delivery end of the ion beam generating area 25, and the end of the bellows 32 is connected to a docking plate 29 that is sealed with the vacuum chamber 2. The surface of the docking plate 29 is provided with a docking hole 31, and the end surface of the docking plate 29 is provided with a docking portion 30 that fits with the mounting groove 5. When coating the filter, the initial position of the flip clamp is as follows: Figure 2 As shown, when the optical filter enters the mounting groove 5 in the flip clamp, the inserted optical filter is first supported by the support part, and then the outer wall of the optical filter is fixed by two clamping members 20. The flip frame 4 in the flip clamp is flipped 90 degrees counterclockwise to drive the optical filter to flip, so that the optical filter changes from a horizontal state to a vertical state, and then the coating units 11 on both sides sputter and coat both sides of the optical filter. During coating, the docking plate 29 is sealed and docked with the position of the mounting groove 5. At this time, the bellows 32 is in the allowable expansion and contraction range, and the ion beam generating areas 25 on both sides are in a vacuum state connected to the vacuum chamber 2, that is, the vacuum chamber 2 maintains a continuous vacuum to reduce the contamination of the film layer by impurities in the air. The ion beam generating area 25 ionizes the inert gas to generate plasma and accelerates the formation of a high-energy ion beam, which is guided to the surface of the target material, exchanges momentum with the target material atoms, and leaves the target material surface and enters the gas phase. The sputtered atoms migrate along the direction of the bellows 32 and the docking hole 31 in the vacuum and are deposited on the surface of the filter, thereby realizing double-sided coating of the filter. The sputtering process in a vacuum environment allows atoms to move freely in all directions, significantly improving the deposition rate. A faster deposition rate helps to shorten the coating time and improve production efficiency. The vacuum state helps to improve the growth quality of the film layer, making it more uniform, dense, and having better adhesion.

[0040] See also Figure 6 As shown, a through groove 28 is provided on the side of the vacuum chamber 2, and an insert frame 27 is installed on the inner wall of the through groove 28. A sealing plate 34 is inserted in the internal seal of the insert frame 27, and the end of the sealing plate 34 is fixed to the docking plate 29. A telescopic column 33 is installed on the lower surface of the ion beam generating area 25, and a push rod 26 is provided on the upper surface of the ion beam generating area 25 for pushing the docking plate 29 to move by a cylinder. The telescopic end of the telescopic column 33 is fixed to the docking plate 29. During coating, the push rod 26 pushed by the cylinder pushes the docking plate 29 to engage with the mounting groove 5. In this process, the sealing plate 34 slides in the insert frame 27, and the telescopic column 33 is extended at this time.

[0041] See also Figure 2 As shown, the support portion includes a blocking plate 6 rotatably connected to the rotating seat 3, and a support member 7 extending into the interior of the mounting groove 5 and supporting the filter is provided on the surface of the blocking plate 6. The blocking plate 6 is connected to the rotating seat 3 through a rotating motor, that is, when coating, the blocking plate 6 rotates to open and drives the support member 7 to leave the interior of the mounting groove 5, thereby releasing the support for the filter and facilitating vacuum coating of one side of the filter.

[0042] See also Figure 4 and Figure 5 As shown, the outer wall surface of the rotating seat 3 is installed with an annular plug-in block 21, the inner wall surface of the flip frame 4 is provided with a limit slot 22 that is slidably engaged with the plug-in block 21, and the inner wall surface of the flip frame 4 is installed with a laser displacement sensor 15 for detecting the coating thickness of the filter in each installation slot 5. The outside of the laser displacement sensor 15 is installed with an airbag ring 16 for pushing the filter in the installation slot 5 to move, and an adsorption head is provided at the end of the airbag ring 16. The rotating seat 3 is driven by the flip frame 4 to rotate, that is, the plug-in block 21 slides in the limit slot 22. At this time, the two sides of the filter are successively facing the laser displacement sensor 15. The laser displacement sensor 15 detects the thickness of the two sides of the coated filter to ensure that the coating achieves the expected optical effect on the front and back sides of the filter, and ensures the consistency of transmittance and reflectivity, thereby improving the overall performance of the filter. After passing the detection, the airbag ring 16 pushes the adsorption head and the filter to be adsorbed and fixed, and pushes the filter to move toward the discharge port 23 and push it out.

[0043] See also Figure 4 As shown, a bidirectional screw 19 driven by a built-in motor is installed inside the groove cavity 17. The thread on the bidirectional screw 19 is threadedly connected to the corresponding clamping piece 20. The end of the clamping piece 20 is provided with an arc-shaped fitting portion that contacts the filter. The bidirectional screw 19 drives the clamping piece 20 to move, thereby achieving contact clamping of the filter to fix its position.

[0044] See also Figure 1-Figure 3 As shown, the upper surface of the coating box 1 is provided with a loading port 12 which is arranged in line with the plurality of mounting grooves 5, and an oblique arc block 8 is elastically installed in the hole groove on the inner wall of the loading port 12, and a fixing frame 9 is installed on the upper surface of the coating box 1, and a moving plate 13 pushed by a segmented cylinder is installed on the top of the fixing frame 9, and a connecting column 14 is installed on the lower surface of the moving plate 13, and a suction cup 10 for adsorbing and fixing the filter is installed on the bottom surface of the connecting column 14, and the filter is loaded into the loading port 12, and the segmented cylinder pushes the moving plate 13 and the suction cup 10 connected thereto for the first time to adsorb and fix the filter, and then the segmented cylinder pushes it for the second time, at this time, the filter connected to the suction cup 10 is subjected to a downward thrust, pressing the oblique arc block 8, so that it elastically enters the hole groove on the inner wall of the loading port 12, and the filter enters the rotating seat 3 in the vacuum chamber 2 and is fixed, and then undergoes a flipping operation to carry out the next step of coating.

[0045] See also Figure 1 and Figure 4As shown, the front surface of the coating box 1 is provided with a plurality of discharge ports 23 communicated with the vacuum chamber 2, and the discharge ports 23 are aligned with the hole grooves of the mounting groove 5 when the flip clamp is rotated 90 degrees after coating, and the inner wall surface of each discharge port 23 is elastically mounted with an inclined arc block 24. After the coating is completed, the rotating seat 3 rotates so that both sides of the filter are flush with the laser displacement sensor 15, which is convenient for the detection of the uniformity of the coating. After the detection is qualified, the filter is released from the clamping and is pushed out from the corresponding discharge port 23.

[0046] A fully automatic double-sided vacuum coating process for a filter, the process comprising the following steps:

[0047] Step 1: Load the filter into the loading port 12, fix the filter by adsorption of the suction cup 10, and drive the fixed filter into the mounting groove 5 in the vacuum chamber 2 through the moving plate 13 and the connecting column 14;

[0048] Step 2: Fix the outer wall of the filter by two clamping members 20, and flip the flip frame 4 90 degrees counterclockwise so that the filter in the mounting slot 5 faces the coating units 11 on both sides for vacuum coating;

[0049] Step 3: The push rod 26 pushes the docking plate 29 to align with the mounting groove 5, and the ion beam generating area 25 ionizes the inert gas to generate plasma and accelerates to form a high-energy ion beam, which is guided to the surface of the target material, exchanges momentum with the target material atoms, and leaves the target material surface and enters the gas phase. The sputtered atoms migrate in the vacuum and deposit on the surface of the filter;

[0050] Step 4: After coating, the rotating seat 3 rotates autonomously, and the laser displacement sensor 15 detects the thickness of both sides of the coated filter. After the detection is qualified, the airbag ring 16 pushes the filter toward the discharge port 23.

[0051] When the present invention is in use, the coating units 11 are correspondingly arranged on both sides of the vacuum chamber 2, the support portion first supports the inserted optical filter, and then the two clamping members 20 fix the outer wall of the optical filter, the flip frame 4 flips and rotates 90 degrees counterclockwise to drive the optical filter to flip, so that the optical filter changes from a horizontal state to a vertical state, and the coating units 11 on both sides sputter and coat the two sides of the optical filter. During coating, the docking plate 29 is sealed and docked with the position of the mounting groove 5, the bellows 32 is in the allowable expansion and contraction range, and the ion beam generating areas 25 on both sides are in a vacuum state connected with the vacuum chamber 2, that is, the vacuum chamber 2 maintains a continuous vacuum, reducing In order to reduce the pollution of impurities in the air to the film layer, the ion beam generating area 25 ionizes the inert gas to generate plasma and accelerates to form a high-energy ion beam, which is guided to the surface of the target material, exchanges momentum with the target material atoms, and leaves the target material surface and enters the gas phase. The sputtered atoms migrate along the direction of the bellows 32 and the docking hole 31 in the vacuum and are deposited on the surface of the filter, thereby realizing double-sided coating of the filter. The sputtering process in a vacuum environment allows atoms to move freely in all directions, significantly improving the deposition rate and production efficiency. The vacuum state helps to improve the growth quality of the film layer, making it more uniform, dense, and having better adhesion.

[0052] The rotating seat 3 is driven by the flip frame 4 to rotate, and at this time, the two sides of the filter are rotated toward the laser displacement sensor 15 in turn. The laser displacement sensor 15 detects the uniformity of the coating thickness on both sides of the coated filter to ensure that the coating achieves the expected optical effect on both the front and back sides of the filter, and ensures the consistency of transmittance and reflectivity, thereby improving the overall performance of the filter. After passing the test, the airbag ring 16 pushes the adsorption head and the filter to be adsorbed and fixed, and pushes the filter to move toward the discharge port 23 and push it out;

[0053] The segmented cylinder pushes the moving plate 13 and the suction cup 10 connected thereto to fix the filter for the first time, and then the segmented cylinder pushes it for the second time. At this time, the filter connected to the suction cup 10 is subjected to a downward thrust, pressing the oblique arc block 8, so that it elastically enters the hole groove on the inner wall of the loading port 12. The filter enters the rotating seat 3 in the vacuum chamber 2 and is fixed, and then undergoes a flipping operation. After the coating inspection, the rotating seat 3 rotates downward, and at this time, the discharge port 23 is aligned with the hole groove of the mounting slot 5, so as to facilitate the operation of pushing out the filter after the inspection is qualified.

[0054] The above description is only a preferred embodiment of the present invention and does not limit the present invention in any form. Although the present invention has been disclosed as a preferred embodiment as above, it is not used to limit the present invention. Any technical personnel in this field can make some changes or modify the technical contents disclosed above into equivalent embodiments without departing from the scope of the technical solution of the present invention. However, any simple modification, equivalent change and modification made to the above embodiments according to the technical essence of the present invention without departing from the content of the technical solution of the present invention still fall within the scope of the technical solution of the present invention.

Claims

1. A fully automatic double-sided vacuum coating device for a filter, comprising a coating box (1), characterized in that: The coating box (1) is provided with a vacuum chamber (2) inside, and a flip clamp is rotatably installed inside the vacuum chamber (2); the flip clamp comprises an L-shaped flip frame (4), and a rotating seat (3) driven to rotate by a driving motor is provided on one side of the flip frame (4); a plurality of mounting grooves (5) are penetrated through the surface of the rotating seat (3), and a groove cavity (17) communicating with the mounting groove (5) is provided inside the rotating seat (3), and two clamping members (20) are installed inside the groove cavity (17) for fixing the outer wall of the filter at the same time, and a support portion for supporting the filter in each mounting groove (5) is rotatably provided on the bottom surface of the rotating seat (3); The coating box (1) is provided with coating units (11) for vacuum sputtering of the optical filter on both sides of the vacuum chamber (2). During the sputtering coating, the vacuum chamber (2) is in a vacuum state. The coating unit (11) comprises an ion beam generating area (25), the gas delivery end of the ion beam generating area (25) is connected to a bellows (32), the end of the bellows (32) is connected to a docking plate (29) that is sealed with the vacuum chamber (2), a docking hole (31) is provided on the surface of the docking plate (29), and a docking portion (30) that is in contact with the mounting groove (5) is provided on the end surface of the docking plate (29).

2. The fully automatic double-sided vacuum coating device for optical filters according to claim 1, characterized in that: A through groove (28) is provided on the side of the vacuum chamber (2), an insertion frame (27) is installed on the inner wall surface of the through groove (28), a sealing plate (34) is sealed and plugged into the interior of the insertion frame (27), and the end of the sealing plate (34) is fixed to the docking plate (29).

3. The fully automatic double-sided vacuum coating device for optical filters according to claim 1, characterized in that: A telescopic column (33) is installed at the lower part of the surface of the ion beam generating area (25), and a push rod (26) is provided at the upper part of the surface of the ion beam generating area (25) for driving a docking plate (29) to move by a cylinder, and a telescopic end of the telescopic column (33) is fixed to the docking plate (29).

4. The fully automatic double-sided vacuum coating device for optical filters according to claim 1, characterized in that: The support portion comprises a blocking plate (6) rotatably connected to the rotating seat (3), and a support member (7) extending into the interior of the mounting groove (5) and supporting the optical filter is provided on the surface of the blocking plate (6).

5. The fully automatic double-sided vacuum coating device for optical filters according to claim 1, characterized in that: The outer wall surface of the rotating seat (3) is provided with an insert block (21) of an annular structure, the inner wall surface of the flip frame (4) is provided with a limit slot (22) slidably engaged with the insert block (21), the inner wall surface of the flip frame (4) is provided with a laser displacement sensor (15) for detecting the coating thickness of the optical filter in each installation slot (5), the outer portion of the laser displacement sensor (15) is provided with an air bag ring (16) for pushing the optical filter in the installation slot (5) to move, and an adsorption head is provided at the end of the air bag ring (16).

6. The fully automatic double-sided vacuum coating device for optical filters according to claim 1, characterized in that: A bidirectional screw (19) driven by a built-in motor is installed inside the groove cavity (17); the thread on the bidirectional screw (19) is threadedly connected to a corresponding clamping piece (20); and an arc-shaped fitting portion in contact with the filter is provided at the end of the clamping piece (20).

7. The fully automatic double-sided vacuum coating device for optical filters according to claim 1, characterized in that: The upper surface of the coating box (1) is provided with a loading port (12) arranged in line with multiple installation grooves (5), and the inner wall surface of the loading port (12) is elastically installed with an inclined arc block (8). The upper surface of the coating box (1) is installed with a fixing frame (9), and the top of the fixing frame (9) is installed with a moving plate (13) driven by a segmented cylinder, and the lower surface of the moving plate (13) is installed with a connecting column (14), and the bottom surface of the connecting column (14) is installed with a suction cup (10) for adsorbing and fixing the filter.

8. The fully automatic double-sided vacuum coating device for optical filters according to claim 1, characterized in that: The front side surface of the coating box (1) is provided with a plurality of discharge ports (23) communicating with the vacuum chamber (2), and the discharge ports (23) are aligned with the hole grooves of the mounting groove (5) when the flip clamp is rotated 90 degrees after coating, and the inner wall surface of each of the discharge ports (23) is elastically installed with an inclined arc block 2 (24).

9. A fully automatic double-sided vacuum coating process for optical filters, applied to a fully automatic double-sided vacuum coating device for optical filters as claimed in any one of claims 1 to 8, characterized in that: The process includes the following steps: Step 1: Load the optical filter into the loading port (12), fix the optical filter by adsorption of the suction cup (10), and drive the fixed optical filter into the mounting groove (5) in the vacuum chamber (2) through the moving plate (13) and the connecting column (14); Step 2: fix the outer wall of the filter by two clamping members (20), and flip the filter 90 degrees counterclockwise by using the flip frame (4), so that the filter in the mounting groove (5) faces the coating units (11) on both sides for vacuum coating; Step 3: The push rod (26) pushes the docking plate (29) to align with the mounting groove (5), and the ion beam generating area (25) ionizes the inert gas to generate plasma and accelerates to form a high-energy ion beam, which is guided to the surface of the target material, exchanges momentum with the target material atoms, and leaves the target material surface to enter the gas phase, and the sputtered atoms migrate in the vacuum and deposit on the surface of the filter; Step 4: After coating, the rotating seat (3) rotates autonomously, and the laser displacement sensor (15) detects the thickness of both sides of the coated filter. After the detection is qualified, the airbag ring (16) pushes the filter toward the discharge port (23).

Images