Angular velocity detection device for inhibiting in-phase mode and micromechanical gyroscope

Abstract

The invention provides an angular velocity detection device for inhibiting an in-phase mode and a micromechanical gyroscope, and relates to the technical field of angular velocity detection.An in-phase detection inhibition unit is arranged on a substrate and located on the outer side of a driving detection module, the in-phase detection inhibition unit deforms in the tangential direction of a circle in the in-phase detection mode, and the in-phase detection inhibition unit deforms in the tangential direction of the circle in the anti-phase detection mode. The in-phase detection suppression unit deforms along the radial direction of the circle; the in-phase driving suppression unit is arranged on the substrate and located on the inner side of the driving detection module, the in-phase driving suppression unit deforms in the tangential direction of the circle in the in-phase driving mode, and the in-phase driving suppression unit deforms in the radial direction of the circle in the anti-phase driving mode. According to the angular velocity detection device capable of suppressing the in-phase mode and the micromechanical gyroscope, the influence of external acceleration and the like on the angular velocity detection precision can be effectively reduced by suppressing the in-phase detection mode by the in-phase detection suppression unit and suppressing the in-phase driving mode by the in-phase driving suppression unit.

Description

Technical Field

[0001] The present disclosure relates to the technical field of angular velocity detection, and in particular to an angular velocity detection device and a micromechanical gyroscope capable of suppressing in-phase modes. Background Art

[0002] A micromechanical gyroscope is a gyroscope made of micro-electro-mechanical systems (MEMS). It detects angular velocity based on the principle of Coriolis force and is then used in military fields such as smart ammunition, tactical missiles, and individual weapons and equipment, as well as civilian fields such as automotive safety anti-shake platforms, balance cars, and electronic equipment.

[0003] Micromechanical gyroscopes generally work in anti-phase drive mode and anti-phase detection mode to suppress common mode errors. However, external acceleration may cause in-phase drive mode motion and in-phase detection mode motion, affecting the detection accuracy of the micromechanical gyroscope and causing the performance of the micromechanical gyroscope to deteriorate. Summary of the invention

[0004] The present disclosure aims to solve one of the technical problems in the related art at least to some extent.

[0005] Therefore, an object of the present disclosure is to provide an angular velocity detection device and a micromechanical gyroscope that suppress the in-phase mode.

[0006] To achieve the above-mentioned purpose, the first aspect of the present disclosure provides an angular velocity detection device for suppressing in-phase mode, comprising: a substrate; a plurality of drive detection modules, wherein the drive detection modules are movably arranged on the substrate, and the plurality of drive detection modules are centrally symmetrical along the center of a circle, and adjacent drive detection modules are connected with an in-phase detection suppression unit and an in-phase drive suppression unit respectively arranged tangentially along the circle; wherein the in-phase detection suppression unit is arranged on the substrate and located on the outside of the drive detection module, and when the in-phase detection mode is in the in-phase detection mode, the in-phase detection suppression unit is deformed along the tangential direction of the circle, and when the anti-phase detection mode is in the anti-phase detection mode, the in-phase detection suppression unit is deformed along the radial direction of the circle; the in-phase drive suppression unit is arranged on the substrate and located on the inside of the drive detection module, and when the in-phase drive mode is in the in-phase drive mode, the in-phase drive suppression unit is deformed along the tangential direction of the circle, and when the anti-phase drive mode is in the anti-phase drive mode, the in-phase drive suppression unit is deformed along the radial direction of the circle.

[0007] Optionally, the in-phase detection suppression unit includes: a first elastic strip, a first clamp assembly and a second clamp assembly; wherein, the first elastic strip is arranged on the substrate and located on the outside of the drive detection module, and the first elastic strip is arranged along the tangent direction of the circle; the first clamp assembly and the second clamp assembly are respectively arranged on the outside of the first elastic strip, and the first clamp assembly and the second clamp assembly are axially symmetrical along the diameter of the circle, one end of the first clamp assembly away from the second clamp assembly is connected to the first drive detection module in the adjacent drive detection module, and one end of the second clamp assembly away from the first clamp assembly is connected to the second drive detection module in the adjacent drive detection module.

[0008] Optionally, the first clamp assembly and the second clamp assembly respectively include: a second elastic strip, which is arranged on the outside of the first elastic strip and arranged along the radial direction of the circle; a first U-shaped elastic strip, which is arranged on the outside of the second elastic strip and arranged along the tangent direction of the circle, and the first U-shaped elastic strip and the first elastic strip form a first preset angle; a third elastic strip, which is arranged at one end of the first U-shaped elastic strip away from the second elastic strip, and the end of the third elastic strip away from the first U-shaped elastic strip is connected to the drive detection module, the third elastic strip is arranged along the tangent direction of the circle, and the third elastic strip and the first U-shaped elastic strip form a second preset angle.

[0009] Optionally, the first clamp assembly and the second clamp assembly further include: a first hollow groove and a second hollow groove, respectively, the first hollow groove being arranged on the second elastic strip and arranged radially along the circle, the second hollow groove being arranged on the second elastic strip and connected to the first hollow groove, and the second hollow groove being arranged tangentially along the circle, and the second hollow groove being parallel to the first elastic strip; the in-phase detection suppression unit further includes: a third hollow groove, the third hollow groove being arranged on the first elastic strip and arranged tangentially along the circle, and the third hollow groove being parallel to the first elastic strip.

[0010] Optionally, the in-phase drive suppression unit includes: a fourth elastic strip, the fourth elastic strip is provided on the substrate and located on the inner side of the drive detection module, and the fourth elastic strip is arranged along the tangent direction of the circle.

[0011] Optionally, the drive detection module includes: a mass block and a drive detection unit, the mass block is movably arranged on the substrate, and the drive detection unit is set between the mass block and the substrate, the drive detection unit drives the mass block to vibrate radially along the circle, and detects the amplitude of the tangential vibration of the mass block along the circle; wherein the in-phase detection suppression unit and the in-phase drive suppression unit are connected between the mass blocks of adjacent drive detection modules.

[0012] Optionally, the drive detection module also includes: an outer cooperative beam, the outer cooperative beam including: a first support seat, a fifth elastic strip, a first cooperative component and a second cooperative component; wherein, the first support seat is arranged on the substrate, and the first support seat is arranged along the tangent of the circle, the fifth elastic strip is located on the inner side of the first support seat, the fifth elastic strip is arranged along the tangent of the circle, and the fifth elastic strip is parallel to the first support seat; the first cooperative component and the second cooperative component are axially symmetrical along the diameter of the circle, and the first cooperative component and the second cooperative component respectively include: a second U-shaped elastic strip and a third U-shaped elastic strip; the second U-shaped elastic strip is arranged between the first support seat and the fifth elastic strip, and the second U-shaped elastic strip is arranged along the tangent of the circle, and the second U-shaped elastic strip and the first support seat are at a third preset angle; the third U-shaped elastic strip is arranged between the fifth elastic strip and the mass block, and the third U-shaped elastic strip is arranged along the tangent of the circle, and the third U-shaped elastic strip is parallel to the fifth elastic strip.

[0013] Optionally, the drive detection module also includes: an inner cooperative beam, the inner cooperative beam includes: a sixth elastic strip, a third cooperative assembly and a fourth cooperative assembly; wherein the sixth elastic strip is arranged along the tangent direction of the circle, and the sixth elastic strip is connected to the in-phase drive suppression unit; the third cooperative assembly and the fourth cooperative assembly are axially symmetrical along the diameter of the circle, and the third cooperative assembly and the fourth cooperative assembly respectively include: a second support seat, a fourth U-shaped elastic strip and a fifth U-shaped elastic strip; the second support seat is arranged on the substrate, and the second support seat is located on the inner side of the sixth elastic strip, the fourth U-shaped elastic strip is arranged between the second support seat and the sixth elastic strip, the fourth U-shaped elastic strip is arranged along the tangent direction of the circle, and the fourth U-shaped elastic strip is parallel to the sixth elastic strip; the fifth U-shaped elastic strip is arranged between the sixth elastic strip and the mass block, and the fifth U-shaped elastic strip is arranged along the tangent direction of the circle, and the fifth U-shaped elastic strip and the sixth elastic strip are at a fourth preset angle.

[0014] Optionally, the mass block is provided with at least one hollow area; the drive detection module further includes: at least one stop unit, the stop unit is provided on the substrate, and the stop unit is located in the hollow area.

[0015] A second aspect of the present disclosure provides a micromechanical gyroscope, comprising: an angular velocity detection device for suppressing in-phase mode as provided in the first aspect of the present disclosure.

[0016] The technical solution provided by the present disclosure may have the following beneficial effects: By using the in-phase detection suppression unit to suppress the in-phase detection mode and the in-phase drive suppression unit to suppress the in-phase drive mode, the influence of external acceleration and the like on the angular velocity detection accuracy can be effectively reduced, thereby effectively improving the performance of the micromechanical gyroscope when the angular velocity detection device is applied to the micromechanical gyroscope.

[0017] Additional aspects and advantages of the present disclosure will be given in part in the following description and in part will be obvious from the following description or learned through practice of the present disclosure. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The above and / or additional aspects and advantages of the present disclosure will become apparent and easily understood from the following description of the embodiments in conjunction with the accompanying drawings, in which: Figure 1 is a schematic structural diagram of an angular velocity detection device for suppressing in-phase mode proposed in an embodiment of the present disclosure; Figure 2 It is a structural schematic diagram of an in-phase detection suppression unit in an angular velocity detection device for suppressing in-phase mode proposed in an embodiment of the present disclosure; Figure 3 It is a structural schematic diagram of an in-phase drive suppression unit in an angular velocity detection device for suppressing in-phase mode proposed in an embodiment of the present disclosure; Figure 4 It is a schematic structural diagram of an outer cooperating beam in an angular velocity detection device for suppressing in-phase modes proposed in an embodiment of the present disclosure; Figure 5 It is a schematic structural diagram of an inner cooperating beam in an angular velocity detection device for suppressing in-phase mode proposed in an embodiment of the present disclosure; Figure 6 1 is a force diagram of an in-phase detection suppression unit in an angular velocity detection device for suppressing in-phase mode proposed in an embodiment of the present disclosure ((a) is in-phase, and (b) is anti-phase); Figure 7 1 is a force diagram of an in-phase drive suppression unit in an angular velocity detection device for suppressing in-phase mode proposed in an embodiment of the present disclosure ((a) is in-phase, and (b) is anti-phase); As shown in the figure: 1. Substrate; 2. Drive detection module; 21. mass block, 22. drive detection unit; 23. outer cooperating beam, 231. first supporting seat, 232. fifth elastic strip, 233. second U-shaped elastic strip, 234. third U-shaped elastic strip; 24. inner cooperating beam, 241. sixth elastic strip, 242. second supporting seat, 243. fourth U-shaped elastic strip, 244. fifth U-shaped elastic strip; 25. Stop unit; 3. In-phase detection suppression unit; 31. first elastic strip, 32. second elastic strip, 33. first U-shaped elastic strip, 34. third elastic strip, 35. first hollow groove, 36. second hollow groove, 37. third hollow groove; 4. In-phase drive suppression unit, 41. Fourth elastic strip. DETAILED DESCRIPTION

[0019] Embodiments of the present disclosure are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present disclosure, and cannot be understood as limiting the present disclosure.

[0020] like Figure 1 As shown, the embodiment of the present disclosure proposes an angular velocity detection device for suppressing the in-phase mode, comprising: a substrate 1 and a plurality of drive detection modules 2, the drive detection modules 2 are movably arranged on the substrate 1, and the plurality of drive detection modules 2 are centrally symmetrical along the center of a circle, and adjacent drive detection modules 2 are connected with an in-phase detection suppression unit 3 and an in-phase drive suppression unit 4 respectively arranged tangentially along the circle. Among them, the in-phase detection suppression unit 3 is arranged on the substrate 1 and located on the outside of the drive detection module 2, when the in-phase detection mode is used, the in-phase detection suppression unit 3 is deformed along the tangent direction of the circle, and when the anti-phase detection mode is used, the in-phase detection suppression unit 3 is deformed along the radial direction of the circle; the in-phase drive suppression unit 4 is arranged on the substrate 1 and located on the inside of the drive detection module 2, when the in-phase drive mode is used, the in-phase drive suppression unit 4 is deformed along the tangent direction of the circle, and when the anti-phase drive mode is used, the in-phase drive suppression unit 4 is deformed along the radial direction of the circle.

[0021] It can be understood that since the drive detection module 2 is movably arranged on the substrate 1, and the multiple drive detection modules 2 are centrally symmetrical along the center of the circle, when the whole has an angular velocity input, the drive detection module 2 can detect the angular velocity based on the Coriolis force principle, thereby meeting the use requirements of the micromechanical gyroscope.

[0022] like Figure 6As shown, when the in-phase detection mode is used, the in-phase detection suppression unit 3 is deformed along the tangential direction of the circle, and when the anti-phase detection mode is used, the in-phase detection suppression unit 3 is deformed along the radial direction of the circle. Since the in-phase detection suppression unit 3 is arranged along the tangential direction of the circle, the stiffness of the in-phase detection suppression unit 3 in the tangential direction of the circle is much greater than the stiffness in the radial direction of the circle. In other words, the stiffness of the in-phase detection suppression unit 3 in the in-phase detection mode is much greater than the stiffness in the anti-phase detection mode, thereby achieving the effect of suppressing the in-phase detection mode.

[0023] like Figure 7 As shown, when the in-phase driving mode is used, the in-phase driving suppression unit 4 is deformed along the tangential direction of the circle, and when the in-phase driving mode is used, the in-phase driving suppression unit 4 is deformed along the radial direction of the circle. Since the in-phase driving suppression unit 4 is arranged along the tangential direction of the circle, the stiffness of the in-phase driving suppression unit 4 in the tangential direction of the circle is much greater than the stiffness in the radial direction of the circle. In other words, the stiffness of the in-phase driving suppression unit 4 in the in-phase driving mode is much greater than the stiffness in the in-phase driving mode, thereby achieving the effect of suppressing the in-phase driving mode.

[0024] Therefore, by suppressing the in-phase detection mode by the in-phase detection suppression unit 3 and suppressing the in-phase drive mode by the in-phase drive suppression unit 4, the influence of external acceleration and the like on the angular velocity detection accuracy can be effectively reduced, and thus when the angular velocity detection device is applied to a micromechanical gyroscope, the performance of the micromechanical gyroscope can be effectively improved.

[0025] It should be noted that micromechanical gyroscopes generally operate in anti-phase drive mode and anti-phase detection mode to suppress common mode errors. However, external acceleration may induce in-phase drive mode motion and in-phase detection mode motion.

[0026] ; Among them, x an 、x in are the opposite motion and the same phase motion, ω an ,ω in are the in-phase and anti-phase driving modes respectively, m is the mass of the detection mass block 21, F is the driving force, a is the external acceleration, and Δk is the stiffness error caused by the processing error.

[0027] In the present embodiment, the resonant frequencies of the in-phase driving mode and the in-phase detection mode are higher than the resonant frequencies of the anti-phase driving mode and the anti-phase detection mode, thereby making the driving detection module 2 more resistant to random vibrations, thereby improving the overall accuracy of angular velocity detection and effectively improving the performance of the micromechanical gyroscope.

[0028] like Figure 6As shown, in the same-phase detection mode, the force directions on adjacent drive detection modules 2 are the same (circumferential direction of the circle), for example: both are counterclockwise, or both are clockwise, and in the opposite-phase detection mode, the force directions on adjacent drive detection modules 2 are opposite, for example: one is counterclockwise and the other is clockwise, or one is clockwise and the other is counterclockwise.

[0029] like Figure 7 As shown, in the same-phase driving mode, the force directions on adjacent driving detection modules 2 are the same (radial direction of the circle), for example, both are in the centripetal direction, or both are in the centrifugal direction. In the anti-phase driving mode, the force directions on adjacent driving detection modules 2 are opposite, for example, one is in the centripetal direction and the other is in the centrifugal direction, or one is in the centrifugal direction and the other is in the centripetal direction.

[0030] The Coriolis force principle based on which the angular velocity detection device is based is that when a rotating object moves along the radial direction of a circle, it will generate a tangential force along the circle. The specific derivation process of the Coriolis force principle will not be repeated here. The radial direction of the circle refers to the diameter direction of the circle (there are multiple directions), and the tangential direction of the circle refers to the tangent direction of the circle (there are multiple directions). The radial direction of the circle is perpendicular to the tangential direction of the circle.

[0031] The number of drive detection modules 2 is an even number, and the angular velocity detection device as a whole forms a fully symmetrical structure and has multiple symmetry axes. The number of drive detection modules 2 can be set according to actual needs and is not limited to this. For example, there can be four drive detection modules 2.

[0032] The driving detection module 2 realizes angular velocity detection based on the Coriolis force principle. The specific type of the driving detection module 2 can be set according to actual needs and is not limited to this.

[0033] The substrate 1 is used to carry the driving detection module 2 and the like. The specific type of the substrate 1 can be set according to actual needs and is not limited thereto.

[0034] like Figure 2 As shown, in some embodiments, the in-phase detection suppression unit 3 includes: a first elastic strip 31, a first clamp assembly and a second clamp assembly. The first elastic strip 31 is arranged on the substrate 1 and located outside the drive detection module 2, and the first elastic strip 31 is arranged along the tangent direction of the circle, the first clamp assembly and the second clamp assembly are respectively arranged on the outside of the first elastic strip 31, and the first clamp assembly and the second clamp assembly are axially symmetrical along the diameter of the circle, the end of the first clamp assembly away from the second clamp assembly is connected to the first drive detection module in the adjacent drive detection module 2, and the end of the second clamp assembly away from the first clamp assembly is connected to the second drive detection module in the adjacent drive detection module 2.

[0035] It can be understood that since the first elastic strip 31 is arranged along the tangent direction of the circle and is connected between adjacent drive detection modules 2 by using the first clamp assembly and the second clamp assembly, the stiffness of the first elastic strip 31 in the tangential direction of the circle is much greater than the stiffness in the radial direction of the circle, that is, the stiffness of the first elastic strip 31 in the in-phase detection mode is much greater than the stiffness in the anti-phase detection mode, thereby achieving the effect of suppressing the in-phase detection mode.

[0036] It should be noted that the first elastic strip 31, the first clamp assembly and the second clamp assembly form a clamp-like structure, and the stiffness of the clamp opening and closing (in the anti-phase detection mode) is much smaller than the stiffness of the clamp rotating (in the same-phase detection mode).

[0037] The first elastic strip 31 is an elastic strip plate. The specific type of the first elastic strip 31 can be set according to actual needs and is not limited thereto.

[0038] The first clamp assembly and the second clamp assembly are used for the elastic arrangement of the first elastic strip 31 between adjacent drive detection modules 2, and enable the same-phase detection suppression unit 3 to provide a certain driving and detection stiffness for the drive detection module 2. The specific types of the first clamp assembly and the second clamp assembly can be set according to actual needs and are not limited to this.

[0039] like Figure 2 As shown, in some embodiments, the first clamp assembly and the second clamp assembly respectively include: a second elastic strip 32, a first U-shaped elastic strip 33 and a third elastic strip 34, the second elastic strip 32 is arranged on the outside of the first elastic strip 31, and the second elastic strip 32 is arranged radially of the circle, the first U-shaped elastic strip 33 is arranged on the outside of the second elastic strip 32, and the first U-shaped elastic strip 33 is arranged tangentially of the circle, the first U-shaped elastic strip 33 and the first elastic strip 31 form a first preset angle, the third elastic strip 34 is arranged at one end of the first U-shaped elastic strip 33 away from the second elastic strip 32, and one end of the third elastic strip 34 away from the first U-shaped elastic strip 33 is connected to the drive detection module 2, the third elastic strip 34 is arranged tangentially of the circle, and the third elastic strip 34 and the first U-shaped elastic strip 33 form a second preset angle.

[0040] It can be understood that, by utilizing two groups of sequentially connected second elastic strips 32, first U-shaped elastic strips 33 and third elastic strips 34, an elastic arrangement of the first elastic strip 31 between the adjacent first drive detection modules and the second drive detection modules is achieved, which not only ensures the suppression of the in-phase detection mode, but also enables the stable operation of the drive detection module 2.

[0041] It should be noted that the second elastic strip 32 is an elastic strip, and the specific type of the second elastic strip 32 can be set according to actual needs, and there is no limitation on this. The second elastic strip 32 is perpendicular to the first elastic strip 31 .

[0042] The first U-shaped elastic strip 33 is an elastic U-shaped strip, and the specific type of the first U-shaped elastic strip 33 can be set according to actual needs, and there is no limitation on this. The first U-shaped elastic strip 33 and the first elastic strip 31 form an angle of 45 degrees.

[0043] The third elastic strip 34 is an elastic strip, and the specific type of the third elastic strip 34 can be set according to actual needs, and there is no limitation on this. The third elastic strip 34 is perpendicular to the first U-shaped elastic strip 33 .

[0044] like Figure 2 As shown, in some embodiments, the first clamp assembly and the second clamp assembly further include: a first hollow groove 35 and a second hollow groove 36, respectively, the first hollow groove 35 is arranged on the second elastic strip 32, and the first hollow groove 35 is arranged along the radial direction of the circle, the second hollow groove 36 is arranged on the second elastic strip 32 and connected to the first hollow groove 35, and the second hollow groove 36 is arranged along the tangent direction of the circle, and the second hollow groove 36 is parallel to the first elastic strip 31; the in-phase detection suppression unit 3 further includes: a third hollow groove 37, the third hollow groove 37 is arranged on the first elastic strip 31, and the third hollow groove 37 is arranged along the tangent direction of the circle, and the third hollow groove 37 is parallel to the first elastic strip 31.

[0045] It can be understood that, by utilizing the first hollow groove 35 and the second hollow groove 36 arranged on the second elastic strip 32 and the third hollow groove 37 arranged on the first elastic strip 31, the first elastic strip 31 and the second elastic strip 32 have higher elastic deformation capacity, thereby making the drive detection module 2 have higher motion stability.

[0046] It should be noted that the first hollow groove 35 is a strip-shaped hollow structure, and the specific type of the first hollow groove 35 can be set according to actual needs and is not limited to this.

[0047] The second hollow groove 36 is a strip-shaped hollow structure, and the specific type of the second hollow groove 36 can be set according to actual needs, and there is no limitation on this. Among them, the first hollow groove 35 and the second hollow groove 36 form an L-shaped layout.

[0048] The third hollow groove 37 is a strip-shaped hollow structure, and the specific type of the third hollow groove 37 can be set according to actual needs and is not limited to this.

[0049] like Figure 3 As shown, in some embodiments, the in-phase drive suppression unit 4 includes: a fourth elastic strip 41, which is disposed on the substrate 1 and located inside the drive detection module 2, and the fourth elastic strip 41 is arranged along the tangent direction of the circle.

[0050] It can be understood that when the in-phase driving mode is used, the fourth elastic strip 41 is deformed along the tangential direction of the circle, and when the anti-phase driving mode is used, the fourth elastic strip 41 is deformed along the radial direction of the circle. Since the fourth elastic strip 41 is arranged along the tangential direction of the circle, the stiffness of the fourth elastic strip 41 in the tangential direction of the circle is much greater than the stiffness in the radial direction of the circle. In other words, the stiffness of the fourth elastic strip 41 in the in-phase driving mode is much greater than the stiffness in the anti-phase driving mode, thereby achieving the effect of suppressing the in-phase driving mode.

[0051] It should be noted that the fourth elastic strip 41 is an elastic strip, and the specific type of the fourth elastic strip 41 can be set according to actual needs, and there is no limitation on this. The fourth elastic strip 41 is parallel to the first elastic strip 31 .

[0052] like Figure 1 As shown, in some embodiments, the driving detection module 2 includes: a mass block 21 and a driving detection unit 22, the mass block 21 is movably arranged on the substrate 1, and the driving detection unit 22 is arranged between the mass block 21 and the substrate 1, and the driving detection unit 22 drives the mass block 21 to vibrate along the radial direction of the circle and detects the amplitude of the tangential vibration of the mass block 21 along the circle. Among them, the mass blocks 21 of adjacent driving detection modules 2 are connected with the same-phase detection suppression unit 3 and the same-phase driving suppression unit 4.

[0053] It can be understood that the driving detection unit 22 drives the mass block 21 to vibrate radially of the circle, and when the whole has an angular velocity input, based on the principle of Coriolis force, a force along the tangential direction of the circle will be generated on the mass block 21 that vibrates radially of the circle, so that the mass block 21 vibrates tangentially of the circle while vibrating radially, and then the amplitude of the tangential vibration of the mass block 21 along the circle is detected by the driving detection unit 22 to obtain the overall angular velocity, thereby realizing the detection of angular velocity and meeting the use requirements.

[0054] Furthermore, the in-phase detection suppression unit 3 connected between adjacent mass blocks 21 can effectively suppress the in-phase detection mode, and the in-phase drive suppression unit 4 can effectively suppress the in-phase drive mode, thereby effectively reducing the influence of external acceleration and the like on the detection accuracy of the drive detection unit 22, and further when the angular velocity detection device is applied to a micromechanical gyroscope, the performance of the micromechanical gyroscope can be effectively improved.

[0055] It should be noted that the mass block 21 is a detection device for radial and tangential vibrations along a circle. The specific type of the mass block 21 can be set according to actual needs and is not limited thereto. For example, the angular velocity detection device is processed on a silicon wafer substrate, the substrate 1 can be a silicon plate, and the mass block 21 can be a silicon block. Among them, the mass block 21 can be a centrosymmetric structure, so that the radial vibration of the mass block 21 along the circle and the tangential vibration frequency along the circle are the same, thereby making the detection accuracy of the angular velocity higher and the overall performance higher.

[0056] like Figure 4 As shown, in some embodiments, the driving detection module 2 further includes: an outer cooperative beam 23, and the outer cooperative beam 23 includes: a first support seat 231, a fifth elastic strip 232, a first cooperative component and a second cooperative component. Among them, the first support seat 231 is set on the substrate 1, and the first support seat 231 is arranged along the tangent of the circle, the fifth elastic strip 232 is located on the inner side of the first support seat 231, the fifth elastic strip 232 is arranged along the tangent of the circle, and the fifth elastic strip 232 is parallel to the first support seat 231; the first cooperative assembly and the second cooperative assembly are axially symmetrical along the diameter of the circle, and the first cooperative assembly and the second cooperative assembly respectively include: a second U-shaped elastic strip 233 and a third U-shaped elastic strip 234; the second U-shaped elastic strip 233 is set between the first support seat 231 and the fifth elastic strip 232, and the second U-shaped elastic strip 233 is arranged along the tangent of the circle, and the second U-shaped elastic strip 233 and the first support seat 231 are at a third preset angle; the third U-shaped elastic strip 234 is set between the fifth elastic strip 232 and the mass block 21, and the third U-shaped elastic strip 234 is arranged along the tangent of the circle, and the third U-shaped elastic strip 234 and the fifth elastic strip 232 are parallel.

[0057] It can be understood that the first support seat 231, the fifth elastic strip 232 and the two groups of symmetrically distributed second U-shaped elastic strips 233 and the third U-shaped elastic strips 234 constitute an outer cooperative beam 23 with tangential elastic capacity and radial elastic capacity, which can not only effectively support the mass block 21, but also provide decoupled detection stiffness and driving stiffness, thereby ensuring the stable movement of the mass block 21, and further improving the detection accuracy of the drive detection unit 22.

[0058] It should be noted that, in the outer cooperative beam 23, the part with tangential elasticity provides detection stiffness, and the part with radial elasticity provides driving stiffness. The part with tangential elasticity and the part with radial elasticity are connected and decoupled through a decoupling frame. Specifically, in the driving mode, the tangential elastic part providing driving stiffness is deformed, and the radial elastic part providing detection stiffness is almost not deformed, and the detection mode is opposite. In this way, the driving and detection modal stiffness can be adjusted independently, and then the resonant frequency of the driving and detection modes can be controlled.

[0059] In the driving mode, the radial part of the outer cooperative beam 23 and the decoupling frame remain almost motionless; in the detection mode, the tangential part of the outer cooperative beam 23 and the decoupling frame move synchronously with the mass block 21.

[0060] By measuring the movement of the mass block 21 in the detection direction, the angular velocity of the sensitive axis is calculated based on the Coriolis force. This is the basic working principle of the gyroscope. The free movement of the decoupling frame of the outer cooperating beam 23 in the detection direction may drive the mass block 21 to move in the detection direction, thereby affecting the output result.

[0061] In this embodiment, the decoupling frame of the outer cooperative beam 23 and the mass block 21 have large tangential stiffness, so the two can be approximated as a rigid body in the tangential direction, and the movement of the decoupling frame in the detection direction can be suppressed by the electrostatic force applied to the mass block 21.

[0062] In the detection closed-loop working mode, the detection modal motion is suppressed, the mass block 21 does not move in the detection direction, and the decoupling frame of the outer cooperative beam 23 is also suppressed from moving in the detection direction.

[0063] In the open-loop detection mode, the decoupling frame of the outer cooperative beam 23 has no driving motion, is not subjected to the Coriolis force, and moves synchronously with the mass block 21 in the detection direction.

[0064] The first support seat 231 is used to support the outer side of the mass block 21 by using the cooperation of the fifth elastic strip 232, the second U-shaped elastic strip 233 and the third U-shaped elastic strip 234. The specific type of the first support seat 231 can be set according to actual needs and is not limited to this.

[0065] The fifth elastic strip 232 is an elastic strip plate, and the specific type of the fifth elastic strip 232 can be set according to actual needs and is not limited thereto.

[0066] The second U-shaped elastic strip 233 is an elastic U-shaped strip plate, and the specific type of the second U-shaped elastic strip 233 can be set according to actual needs, and there is no limitation on this. The second U-shaped elastic strip 233 is perpendicular to the first support seat 231 .

[0067] The third U-shaped elastic strip 234 is an elastic U-shaped strip plate. The specific type of the third U-shaped elastic strip 234 can be set according to actual needs and is not limited thereto.

[0068] like Figure 5As shown, in some embodiments, the driving detection module 2 further includes: an inner cooperative beam 24, and the inner cooperative beam 24 includes: a sixth elastic strip 241, a third cooperative component and a fourth cooperative component. Among them, the sixth elastic strip 241 is arranged along the tangent direction of the circle, and the sixth elastic strip 241 is connected to the in-phase drive suppression unit 4; the third cooperative assembly and the fourth cooperative assembly are axially symmetrical along the diameter of the circle, and the third cooperative assembly and the fourth cooperative assembly respectively include: a second support seat 242, a fourth U-shaped elastic strip 243 and a fifth U-shaped elastic strip 244; the second support seat 242 is arranged on the substrate 1, and the second support seat 242 is located on the inner side of the sixth elastic strip 241, the fourth U-shaped elastic strip 243 is arranged between the second support seat 242 and the sixth elastic strip 241, the fourth U-shaped elastic strip 243 is arranged along the tangent direction of the circle, and the fourth U-shaped elastic strip 243 and the sixth elastic strip 241 are parallel; the fifth U-shaped elastic strip 244 is arranged between the sixth elastic strip 241 and the mass block 21, and the fifth U-shaped elastic strip 244 is arranged along the tangent direction of the circle, and the fifth U-shaped elastic strip 244 and the sixth elastic strip 241 are at a fourth preset angle.

[0069] It can be understood that the sixth elastic strip 241 and two groups of symmetrically distributed second support seats 242, the fourth U-shaped elastic strip 243 and the fifth U-shaped elastic strip 244 constitute an inner cooperative beam 24 with tangential elastic capacity and radial elastic capacity, which can not only effectively support the mass block 21, but also provide decoupled detection stiffness and driving stiffness, thereby ensuring the stable movement of the mass block 21, and further improving the detection accuracy of the drive detection unit 22.

[0070] It should be noted that, in the inner cooperating beam 24, the part with tangential elasticity provides detection stiffness, while the part with radial elasticity provides driving stiffness. The part with tangential elasticity and the part with radial elasticity are connected and decoupled through a decoupling frame. Specifically, in the driving mode, the tangential elastic part providing driving stiffness is deformed, and the radial elastic part providing detection stiffness is almost not deformed, and the detection mode is opposite. In this way, the driving and detection modal stiffness can be adjusted independently, and then the resonant frequency of the driving and detection modes can be controlled.

[0071] In the driving mode, the radial part of the inner cooperating beam 24 and the decoupling frame move synchronously with the mass block 21; in the detection mode, the tangential part of the inner cooperating beam 24 and the decoupling frame remain almost motionless.

[0072] The sixth elastic strip 241 is an elastic strip, and the specific type of the sixth elastic strip 241 can be set according to actual needs, and there is no limitation on this. The middle part of the sixth elastic strip 241 extends inward and passes through the gap between the two second support seats 242 and then connects to the fourth elastic strip 41.

[0073] The second support seat 242 is used to support the outer side of the mass block 21 by using the cooperation of the sixth elastic strip 241, the fourth U-shaped elastic strip 243 and the fifth U-shaped elastic strip 244. The specific type of the second support seat 242 can be set according to actual needs and is not limited to this.

[0074] The fourth U-shaped elastic strip 243 is an elastic U-shaped strip plate. The specific type of the fourth U-shaped elastic strip 243 can be set according to actual needs and is not limited to this.

[0075] The fifth U-shaped elastic strip 244 is an elastic U-shaped strip, and the specific type of the fourth U-shaped elastic strip 243 can be set according to actual needs, and there is no limitation on this. The fifth U-shaped elastic strip 244 is perpendicular to the sixth elastic strip 241 .

[0076] Thus, the inner cooperative beam 24, the outer cooperative beam 23, the in-phase detection suppression unit 3 and the in-phase drive suppression unit 4 provide fixed constraints, which are distributed around the mass block 21 and can suppress the influence of non-operating modes. In this embodiment, the first-order mode is the driving mode, the second-order mode is the detection mode, and the random vibration cannot trigger a non-operating mode of a lower order than the operating mode, thereby improving the resistance to random vibration.

[0077] like Figure 1 As shown, in some embodiments, the mass block 21 is provided with at least one hollow area; the drive detection module 2 further includes: at least one stop unit 25, the stop unit 25 is provided on the substrate 1, and the stop unit 25 is located in the hollow area.

[0078] It can be understood that, since the stop unit 25 is disposed on the substrate 1 and is located in the hollow area, the mass block 21 can be limited by at least one stop unit 25 to avoid excessive travel.

[0079] It should be noted that the specific type of the stop unit 25 can be set according to actual needs and is not limited to this. For example, the stop unit 25 can be a prismatic block, and the size of the hollow area is larger than the size of the stop unit 25.

[0080] The comb teeth in the drive detection unit 22 need to be connected to the external electrical signal, and vertical interconnection technology, wire bonding technology, etc. can be used. However, when the number of interfaces is large, metal routing is usually required to guide the signal. The routing can be arranged on the upper layer of the substrate 1 and directly connected to the structure, or the routing of other layers can be connected to the structure through vertical interconnection technology. In this embodiment, a solution of directly routing on a single layer can be implemented, which can be directly arranged on the substrate 1 layer. Connecting the comb teeth to the peripheral square pins and connecting the external electrical signal to the peripheral square pins can drive the structure to move and detect the electrical signal.

[0081] The disclosed embodiment also provides a micromechanical gyroscope, including: an angular velocity detection device for suppressing in-phase mode as in the disclosed embodiment.

[0082] It can be understood that the suppression of the in-phase detection mode by the in-phase detection suppression unit 3 and the suppression of the in-phase drive mode by the in-phase drive suppression unit 4 can effectively reduce the influence of external acceleration on the angular velocity detection accuracy, thereby effectively improving the performance of the micromechanical gyroscope.

[0083] It should be noted that a micromechanical gyroscope is a gyroscope made using a microelectromechanical system (MEMS), also known as a MEMS gyroscope. The specific type of the micromechanical gyroscope can be set according to actual needs and there is no restriction on this.

[0084] In the description of the present disclosure, the terms "first", "second", etc. are used for descriptive purposes only and cannot be understood as indicating or implying relative importance. In addition, in the description of the present disclosure, unless otherwise specified, "plurality" means two or more.

[0085] Any process or method description in a flowchart or otherwise described herein may be understood to represent a module, segment or portion of code that includes one or more executable instructions for implementing the steps of a specific logical function or process, and the scope of the preferred embodiments of the present disclosure includes alternative implementations in which functions may not be performed in the order shown or discussed, including performing functions in a substantially simultaneous manner or in the reverse order depending on the functions involved, which should be understood by those skilled in the art to which the embodiments of the present disclosure belong.

[0086] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present disclosure. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0087] Although the embodiments of the present disclosure have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations of the present disclosure. A person skilled in the art may change, modify, replace and vary the above embodiments within the scope of the present disclosure.

Claims

1. An angular velocity detection device for suppressing in-phase mode, characterized in that: include: substrate; A plurality of drive detection modules, wherein the drive detection modules are movably arranged on the substrate, and the plurality of drive detection modules are centrally symmetrical along the center of a circle, and adjacent drive detection modules are connected with an in-phase detection suppression unit and an in-phase drive suppression unit respectively arranged tangentially along the circle; Wherein, the in-phase detection suppression unit is arranged on the substrate and located outside the driving detection module, and when in the in-phase detection mode, the in-phase detection suppression unit is deformed along the tangential direction of the circle, and when in the anti-phase detection mode, the in-phase detection suppression unit is deformed along the radial direction of the circle; The in-phase drive suppression unit is arranged on the substrate and located inside the drive detection module. When in the in-phase drive mode, the in-phase drive suppression unit deforms along the tangential direction of the circle. When in the anti-phase drive mode, the in-phase drive suppression unit deforms along the radial direction of the circle.

2. The angular velocity detection device for suppressing in-phase mode according to claim 1, characterized in that: The in-phase detection suppression unit comprises: a first elastic strip, a first clamp-type assembly, and a second clamp-type assembly; Wherein, the first elastic strip is arranged on the substrate and located outside the driving detection module, and the first elastic strip is arranged along the tangent direction of the circle; The first clamp assembly and the second clamp assembly are respectively arranged on the outside of the first elastic strip, and the first clamp assembly and the second clamp assembly are axially symmetrical along the diameter of the circle. One end of the first clamp assembly away from the second clamp assembly is connected to a first drive detection module among the adjacent drive detection modules, and one end of the second clamp assembly away from the first clamp assembly is connected to a second drive detection module among the adjacent drive detection modules.

3. The angular velocity detection device for suppressing in-phase mode according to claim 2, characterized in that: The first clamp assembly and the second clamp assembly respectively include: a second elastic strip, the second elastic strip being arranged outside the first elastic strip and arranged along the radial direction of the circle; a first U-shaped elastic strip, wherein the first U-shaped elastic strip is disposed outside the second elastic strip, and the first U-shaped elastic strip is arranged along the tangent direction of the circle, and the first U-shaped elastic strip and the first elastic strip form a first preset angle; A third elastic strip, wherein the third elastic strip is arranged at one end of the first U-shaped elastic strip away from the second elastic strip, and one end of the third elastic strip away from the first U-shaped elastic strip is connected to the drive detection module, the third elastic strip is arranged along the tangent direction of the circle, and the third elastic strip and the first U-shaped elastic strip form a second preset angle.

4. The angular velocity detection device for suppressing in-phase mode according to claim 3, characterized in that: The first clamp assembly and the second clamp assembly further include: a first hollow groove and a second hollow groove, respectively, wherein the first hollow groove is provided on the second elastic strip and arranged along the radial direction of the circle, the second hollow groove is provided on the second elastic strip and connected to the first hollow groove, and the second hollow groove is arranged along the tangent direction of the circle, and the second hollow groove is parallel to the first elastic strip; The in-phase detection suppression unit further includes: a third hollow groove, which is provided on the first elastic strip and arranged along the tangent direction of the circle, and is parallel to the first elastic strip.

5. The angular velocity detection device for suppressing in-phase mode according to claim 1, characterized in that: The in-phase drive suppression unit comprises: A fourth elastic strip is provided on the substrate and located inside the driving detection module, and the fourth elastic strip is arranged along a tangent direction of the circle.

6. The angular velocity detection device for suppressing in-phase mode according to claim 1, characterized in that: The drive detection module comprises: A mass block and a driving detection unit, wherein the mass block is movably arranged on the substrate, and the driving detection unit is arranged between the mass block and the substrate, and the driving detection unit drives the mass block to vibrate in the radial direction of the circle and detects the amplitude of the tangential vibration of the mass block along the circle; Wherein, the in-phase detection suppression unit and the in-phase drive suppression unit are connected between the mass blocks of adjacent drive detection modules.

7. The angular velocity detection device for suppressing in-phase mode according to claim 6, characterized in that: The drive detection module also includes: An outer cooperative beam, the outer cooperative beam comprising: a first support seat, a fifth elastic strip, a first cooperative component and a second cooperative component; Wherein, the first support seat is disposed on the substrate, and the first support seat is arranged along the tangent direction of the circle, the fifth elastic strip is located on the inner side of the first support seat, the fifth elastic strip is arranged along the tangent direction of the circle, and the fifth elastic strip is parallel to the first support seat; The first cooperating component and the second cooperating component are axially symmetrical along the diameter of the circle, and the first cooperating component and the second cooperating component respectively include: a second U-shaped elastic strip and a third U-shaped elastic strip; The second U-shaped elastic strip is disposed between the first support seat and the fifth elastic strip, and the second U-shaped elastic strip is arranged along the tangent direction of the circle, and the second U-shaped elastic strip and the first support seat form a third preset angle; The third U-shaped elastic strip is disposed between the fifth elastic strip and the mass block, and the third U-shaped elastic strip is arranged along the tangent direction of the circle, and the third U-shaped elastic strip is parallel to the fifth elastic strip.

8. The angular velocity detection device for suppressing in-phase mode according to claim 6, characterized in that: The drive detection module also includes: An inner cooperative beam, the inner cooperative beam comprising: a sixth elastic strip, a third cooperative assembly and a fourth cooperative assembly; Wherein, the sixth elastic strip is arranged along the tangent direction of the circle, and the sixth elastic strip is connected to the in-phase drive suppression unit; The third cooperating assembly and the fourth cooperating assembly are axially symmetrical along the diameter of the circle, and the third cooperating assembly and the fourth cooperating assembly respectively include: a second support seat, a fourth U-shaped elastic strip and a fifth U-shaped elastic strip; The second support seat is arranged on the substrate, and the second support seat is located on the inner side of the sixth elastic strip, the fourth U-shaped elastic strip is arranged between the second support seat and the sixth elastic strip, the fourth U-shaped elastic strip is arranged along the tangent direction of the circle, and the fourth U-shaped elastic strip is parallel to the sixth elastic strip; The fifth U-shaped elastic strip is disposed between the sixth elastic strip and the mass block, and the fifth U-shaped elastic strip is arranged along the tangent direction of the circle, and the fifth U-shaped elastic strip and the sixth elastic strip form a fourth preset angle.

9. The angular velocity detection device for suppressing in-phase mode according to claim 6, characterized in that: The mass block is provided with at least one hollow area; The driving detection module further includes: at least one stopping unit, wherein the stopping unit is disposed on the substrate and is located in the hollow area.

10. A micromechanical gyroscope, characterized in that: include: An angular velocity detection device for suppressing in-phase modes as claimed in any one of claims 1 to 9.

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